CN100338434C - Thrre-dimensional image measuring apparatus - Google Patents
Thrre-dimensional image measuring apparatus Download PDFInfo
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- CN100338434C CN100338434C CNB200480003759XA CN200480003759A CN100338434C CN 100338434 C CN100338434 C CN 100338434C CN B200480003759X A CNB200480003759X A CN B200480003759XA CN 200480003759 A CN200480003759 A CN 200480003759A CN 100338434 C CN100338434 C CN 100338434C
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- 238000003384 imaging method Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000005286 illumination Methods 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 claims description 2
- 230000003760 hair shine Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
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- 230000008676 import Effects 0.000 description 1
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Abstract
The present invention relates to a three-dimensional image measuring apparatus comprising: an XYZ shaft transfer means mounted onto a base member; a work stage mounted to the base member, for moving a measuring object to a measuring position and thereafter supporting it and having a predetermined reference surface set at a side thereof; an image obtaining means in which it is moved toward X,Y and Z shafts by the XYZ shaft transfer means, scans a grating image by the frequency of N times to a side of the measuring object supported and fixed to the work stage, obtains the changed grating image by the measuring object by N times; a light emitting means mounted to a side of the image obtaining means for generating and emitting light with a predetermined wavelength; and a control unit which irradiates light generated from the light emitting means mounted to a side of the image obtaining means to the reference surface set the side of the work stage, receives the changed grating image obtained from the image obtaining means, thereby producing the three-dimensional image.
Description
Technical field
The present invention relates to a kind of Thrre-dimensional image measuring apparatus, relate in particular to a kind of like this Thrre-dimensional image measuring apparatus, wherein when the 3-D view of measuring object is measured, raster image is assigned with, the image of Fen Peiing is arrived a side and the opposite side of measuring object by alternate sweep then, thereby can eliminate the shadow region that produces when measuring 3-D view.
Background technology
The 4th, 794, No. 550 United States Patent (USP)s (submit the applicant on October 15th, 1986: a kind of prior art that relates to Thrre-dimensional image measuring apparatus is disclosed Benjamin Eastman Kodak (Eastmen Kodak Company)), its will be below with reference to accompanying drawing to being described.
Fig. 1 is the structural drawing according to the Thrre-dimensional image measuring apparatus of prior art.As shown in Figure 1, the light that produces from light source 1 shines on the surface 9 of measuring object by grating 2 (it moves by grating moving meter 4 " a " direction towards arrow) and camera lens 3 as having the horizontal light beam 1a in the cycle " d " of raster image.The light of irradiation shines the camera 7 with imageing sensor 6 with angle 1b scattering and by camera lens 5, can obtain sampled images thus.The 3-D view that the sampled images that obtains is handled with the surface 3 that obtains measuring object by computing machine 8, the 3-D view that obtains then is shown by display device 8b.Here, keyboard 8a is used to import several information, measures the not purpose of Ah's interference pattern (moir é pattern) to reach.
As mentioned above, when using traditional not Ah interference pattern to measure 3-D view, there are several defectives:, therefore can not accurately measure to the 3-D view of measuring object owing to have immeasurablel shadow region in the optional position of measuring object.
Summary of the invention
Therefore, fundamental purpose of the present invention provides a kind of Thrre-dimensional image measuring apparatus, wherein, when the 3-D view of measuring object is measured, raster image is assigned with, subsequently the image that distributes by scanning obtain measured object change for N time to a side and the opposite side of measuring object 3-D view to obtain 3-D view, so just eliminated the shadow region, and can further improve the measuring accuracy of 3-D view thus.
Another object of the present invention provides a kind of Thrre-dimensional image measuring apparatus, and wherein projection part and three-dimensional camera are arranged as straight line, thereby make up Thrre-dimensional image measuring apparatus compacter.
In one aspect of the invention,, provide a kind of Thrre-dimensional image measuring apparatus, comprising in order to realize above-mentioned purpose of the present invention: the XYZ shaft moving device, it is installed on the base members; Worktable, it is installed on the described base members, is used for measuring object is moved to the measuring position and supports described measuring object subsequently, and described worktable has the predetermined reference field that is arranged on the one side; Image acquiring device, wherein, described image acquiring device is moved towards X, Y and Z axle by described XYZ shaft moving device, scan raster image supported and be fixed in a side of the described measuring object of described worktable with N time number of times, obtain the raster image that is changed for N time by described measuring object, and alternately described raster image is scanned the opposite side of described measuring object, obtain the raster image that is changed for N time by described measuring object with N time number of times; Light-emitting device, the side that it is installed on described image acquiring device is used to produce and launch the light with predetermined wavelength; And control module, by controlling described worktable and described XYZ shaft moving device, the illumination that described control module will produce from the described light-emitting device of the side that is installed on described image acquiring device is mapped to the reference field of a side that is set in described worktable, receive catoptrical image by described image acquiring device subsequently, the measuring vertical distance, thereby keep the focal length between described measuring object and the described image acquiring device consistently, and receive the described reformed raster image that obtains from described image acquiring device, thereby produce 3-D view.
Described image acquiring device comprises: the projection part, it produces raster image by luminous light source and diffraction grating, and the optical projection system that the raster image that is produced is passed be installed on described diffraction grating downside, wherein, described diffraction grating is installed on described light source downside, be used for receiving the light that sends from light source, and moved by the grating mobile device; Divider, it is installed on the downside of described projection part, first mirror that utilization is moved by the mirror mobile device and second mirror come the raster image of the optical projection system irradiation that sees through described projection part is distributed, and are installed in the 3rd mirror on a left side/right side of described first mirror and second mirror and the 4th mirror and first light filter and second light filter by level respectively and distribute described raster image; And image-generating unit, it is installed on the downside of described divider, by the imaging mirror reformed raster image is flatly reflected, and the raster image that obtains described change by imaging lens and imaging device is to camera, and wherein said reformed raster image is to pass first and second light filters of divider and shine described measuring object to be reflected then.
Brief description of drawings
The present invention's easy to understand more that becomes with reference to the accompanying drawings, accompanying drawing only provides in the mode of example, therefore should be as limitation of the present invention, wherein:
Fig. 1 is the structural drawing according to the Thrre-dimensional image measuring apparatus of prior art;
Fig. 2 is the integrally-built stereographic map of expression according to Thrre-dimensional image measuring apparatus of the present invention;
Fig. 3 and 4 is structural drawing of the image acquiring device shown in Fig. 2;
Fig. 5 is the view of apparatus of the divider shown in Fig. 3;
Fig. 6 and 7 is figure of an embodiment of the divider shown in the presentation graphs 3;
Fig. 8 and 9 is figure of another embodiment of the divider shown in the presentation graphs 3.
Realize best mode of the present invention
Now with reference to the Thrre-dimensional image measuring apparatus of accompanying drawing detailed description according to the preferred embodiments of the invention.
Fig. 2 is the integrally-built stereographic map of expression according to Thrre-dimensional image measuring apparatus of the present invention.As shown in Figure 2, worktable 20 is installed on the top of base members 30, XYZ shaft moving device 10 is installed on the top of worktable 20, image acquiring device 40 is installed on freely the XYZ shaft moving device 10 that moves towards X, Y and Z axle, the 3-D view of measuring object 100 (as shown in Figure 3) is measured being used for, and control module 50 (as shown in Figure 3) is installed on a side of base members 30 to be used for integrally controlling image acquiring device 40, worktable 20 and XYZ shaft moving device 10.
One of any between linear electric machine or the ball-screw (ball screw) is suitable as XYZ shaft moving device 10, so that make image acquiring device 40 move towards X, Y and Z axle respectively.The worktable 20 that measuring object 100 is moved to measuring position (as Fig. 2 to shown in Figure 4) comprises first guiding device 21, second guiding device 22 and guiding gearing 23.
First guiding device 21 is installed on base members 30 being fixed, and has the predetermined benchmark that is positioned at the one side.This reference field is set at apart from the optional position of the suitable distance in top of first guiding device 21 or apart from the optional position of base members 30 suitable distances, makes image acquiring device 40 can receive light.Second guiding device 22, it is installed into and is used for that the size according to measuring object 100 is moved on the basis of first guiding device 21.In order to move second guiding device 22, guiding gearing 23 be installed to be make first and second guiding devices 21 and 22 respectively with its with right angle intersection.The ball-screw 23b that cooperates with motor 23a is applicable to guiding gearing 23, and motor 24a and travelling belt 24b be mounted respectively in the inboard of first and second guiding devices 21 and 22, to be used for traverse measurement object 100.
For measuring object is measured, whether the control module 50 at first focusing between check measurement object 100 and the image acquiring device 40 is correct.For this reason, control module 50 utilizes light-emitting device 48 to produce the light with predetermined wavelength so that light arrives the predetermined reference field of a side that is arranged on worktable 20, wherein light-emitting device 48 is installed on a side of image acquiring device 40, that is to say, when when Y direction is seen image acquiring device 40, can see that light-emitting device 48 is in the front side.
Adopt laser designator (laser pointer) as the light-emitting device 48 that is used to produce light with presetted wavelength.Before measuring object 100 is measured, control module 50 will be mapped to reference surface, receive the vertical range between reflected light image, calculating reference field and the image acquiring device 40 by image acquiring device 40 from the illumination that light-emitting device 48 produces, and control the Z-direction distance of image acquiring device 40 according to the result by control XYZ shaft moving device 10, thereby keep the focal length of measuring object 100 and image acquiring device 40.
When the focal length between measuring object 100 and the image acquiring device 40 is kept when constant, control module 50 is measured 3-D view by control image acquiring device 40.For this reason, control module 50 at first makes image acquiring device 40 move towards X, Y and Z axle by control XYZ shaft moving device 10, moves it then to supported and be fixed in the measuring object 100 of worktable 20.When finishing moving process, image acquiring device 40 scans raster image one side N time of measuring object 100, obtain the raster image that measured object changes for N time, alternately raster image is scanned the opposite side of measuring object, and obtain the raster image that measured object changes for N time.
The structure Fig. 3 and 4 with reference to the accompanying drawings that alternately scans side of measuring object 100 and opposite side and obtain the image acquiring device 40 of reformed raster image subsequently is described.
Fig. 3 is in front from the structural drawing of the observed image acquiring device of Y direction.Fig. 4 is in front from the structural drawing of the observed image acquiring device of X-direction.Shown in Fig. 3 and 4, image acquiring device 40 can be configured to the shell 40a of the image acquiring device that is illustrated by the broken lines compactly.That is to say that deriving means comprises the divider 44 that throws part 41, is installed on the vertical lower of projection part 41, the image-generating unit 45 that is installed on the vertical lower of divider 44.
(it is installed on light source 41a downside to be used for receiving the light that sends from light source to projection part 41 by luminous light source 41a and diffraction grating 41b, and 41c moves by the grating mobile device) produce raster image, and the raster image that is produced is passed be installed on the 41d of optical projection system of diffraction grating 41b downside.The raster image that passes the 41d of optical projection system of projection part 41 is passed to divider 44.Here, the liquid crystal diffraction grating can be suitable as diffraction grating 41b, and PZT (piezoelectricity) actuator is suitable as grating mobile device 41d.
The distributor 44 that is installed on the 41d of the optical projection system downside of projection part 41 distributes mirror 42 (it comprises first and second mirror 42a and the 42b that move by the mirror mobile device) to distributing according to the raster image that comes from the 41d of optical projection system by raster image; Make then raster image be transmitted to the third and fourth mirror 44a and 44c (they flatly are installed in respectively the left/right side of first and second mirrors) and make subsequently raster image through the filtration of the first and second filter 44b and 44d (they are installed on respectively the downside of the third and fourth mirror 44a and 44c), scan respectively then a side of measuring object 100 and opposite side N time.
The raster image that scans measuring object 100 has formed the raster image that measured object 100 changes, and reformed raster image is received image-generating unit 45.Image-generating unit 45 is installed on the downside of divider 44, it makes reformed raster image horizontal reflection (wherein, this reformed raster image be pass the first and second light filter 44b of divider 44 and 44d, respectively scan side of measuring object 100 and opposite side N time and form by imaging mirror 45a), and obtain reformed raster image to camera 45d by imaging lens and imaging device 45c.Here, camera 45d obtains the reformed raster image of the measuring object 100 with 2 * N frame and sends it to control module 50.
In order to obtain the 3-D view accurately of measuring object 100, as shown in Figure 5, be used for distributing the raster image of raster image to distribute the center line of mirror 42, the first mirror 42a and each tilting mirrors of the second mirror 42b to intersect, contact and be shaped.Raster image is scanned side N time of measuring object by the first mirror 42a, and subsequently, it is moved towards Y direction by mirror mobile device 43, and raster image is assigned with and scanned opposite side N time of measuring object 100 by the second mirror 42b.
An embodiment of distributing mirror 42 as raster image, shown in Fig. 6 and 7, can adopting wherein, the first and second mirror 46a and 46b form three angle mirrors 46 of dip plane separately.Utilize the first mirror 46a, raster image is scanned side N time of measuring object 100 (as shown in Figure 3) by the 3rd mirror 44a and the first light filter 44b, subsequently, three angle mirrors 46 are moved towards X-direction by mirror mobile device 43, raster image is distributed by the second mirror 46b, and the raster image that distributes alternately scans opposite side N time of measuring object 100 by the 4th mirror 44c and the second light filter 44d.
Another embodiment as grating distributes mirror 42 shown in Fig. 8 and 9, can adopt rotating mirror 47a.By rotating mirror 47a, raster image is scanned side N time of measuring object by the 3rd mirror 44a and the first light filter 44b, subsequently, as shown in Figure 8, rotating mirror 47a is by the predetermined angle (as shown in Figure 9) of the rotating element of for example automatically controlled mirror instrument (galvano mirror meter) 47b rotation, and raster image is distributed by the 4th mirror 44c and the second light filter 44d, and the raster image that distributes is scanned opposite side N time of measuring object 100.Here, one of cylinder, linear electric machine and ball-screw can be suitable as mirror mobile device 42a to distribute the straight line moving meter of mirror 42 as being used for mobile raster image.Automatically controlled mirror instrument is used as whirligig 47b, and it uses as the rotating element that rotating mirror 47a is rotated.
As mentioned above, when the 3-D view of measuring object is measured, raster image is alternately scanned a side of measuring object and opposite side N time, obtain reformed raster image then, thereby can eliminate shadow region and saturation region by utilizing respectively the phase value that obtains from a side and opposite side, can measure 3-D view more accurately thus.
Industrial applicability
As mentioned above, the present invention has following beneficial effect: raster image is alternately scanned survey One side of amount object and opposite side N time obtain then the raster image of change, thereby can pass through Utilize respectively the phase value that obtains from a side and opposite side to eliminate shadow region and saturation region, thus can Enough 3-D views of measuring more accurately, and since projection part, distributor and image-generating unit be with The vertical direction alinement, therefore consist of more compactly Thrre-dimensional image measuring apparatus.
Claims (14)
1. Thrre-dimensional image measuring apparatus comprises:
The XYZ shaft moving device, it is installed on the base members;
Worktable, it is installed on the described base members, is used for measuring object is moved to the measuring position and supports described measuring object subsequently, and described worktable has the predetermined reference field that is arranged on the one side;
Image acquiring device, wherein, described image acquiring device is moved towards X, Y and Z axle by described XYZ shaft moving device, scan raster image supported and be fixed in a side of the described measuring object of described worktable with N time number of times, obtain the raster image that is changed for N time by described measuring object, and alternately described raster image is scanned the opposite side of described measuring object, obtain the raster image that is changed for N time by described measuring object with N time number of times;
Light-emitting device, the side that it is installed on described image acquiring device is used to produce and launch the light with predetermined wavelength; And
Control module, by controlling described worktable and described XYZ shaft moving device, the illumination that described control module will produce from the described light-emitting device of the side that is installed on described image acquiring device is mapped to the reference field of a side that is set in described worktable, receive catoptrical image by described image acquiring device subsequently, the measuring vertical distance, thereby keep the focal length between described measuring object and the described image acquiring device consistently, and receive the described reformed raster image that obtains from described image acquiring device, thereby produce 3-D view.
2. three-dimensional measuring apparatus as claimed in claim 1, wherein, described XYZ shaft moving device is any one among linear motor or the ball-screw, so that described image acquiring device is moved towards X, Y and Z axle respectively.
3. three-dimensional measuring apparatus as claimed in claim 1, wherein,
First guiding device, it is installed on described base members being fixed, and has the predetermined benchmark that is positioned at the one side;
Second guiding device, it is installed into and is used for that the size according to described measuring object is moved on the basis of described first guiding device; And
The guiding gearing, its be installed to be make described first and second guiding devices respectively with its with right angle intersection, and be used on the basis of described first guiding device moving described second guiding device.
4. three-dimensional measuring apparatus as claimed in claim 3, wherein, described guiding gearing is a ball-screw.
5. three-dimensional measuring apparatus as claimed in claim 1, wherein, described image acquiring device comprises:
The projection part, it produces raster image by luminous light source and diffraction grating, and the optical projection system that the raster image that is produced is passed be installed on described diffraction grating downside, wherein, described diffraction grating is installed on described light source downside, be used for receiving the light that sends from light source, and moved by the grating mobile device;
Divider, it is installed on the downside of described projection part, first mirror that utilization is moved by the mirror mobile device and second mirror come the raster image of the optical projection system irradiation that sees through described projection part is distributed, and are installed in the 3rd mirror on a left side/right side of described first mirror and second mirror and the 4th mirror and first light filter and second light filter by level respectively and distribute described raster image; And
Image-generating unit, it is installed on the downside of described divider, by the imaging mirror reformed raster image is flatly reflected, and the raster image that obtains described change by imaging lens and imaging device is to camera, and wherein said reformed raster image is to pass first and second light filters of divider and shine described measuring object to be reflected then.
6. three-dimensional measuring apparatus as claimed in claim 5, wherein, described diffraction grating is the liquid crystal diffraction grating.
7. three-dimensional measuring apparatus as claimed in claim 5, wherein, the described grating mobile device of described projection part is the PZT actuator.
8. three-dimensional measuring apparatus as claimed in claim 5, wherein, described first mirror of described divider and the center line of each tilting mirrors of second mirror are to intersect, contact and be shaped.
9. three-dimensional measuring apparatus as claimed in claim 5, wherein, first mirror of described divider and second mirror are respectively three angle mirrors.
10. three-dimensional measuring apparatus as claimed in claim 5, wherein, described mirror mobile device is one of cylinder, linear motor and ball-screw.
11. three-dimensional measuring apparatus as claimed in claim 5, wherein, first mirror of described divider and second mirror are respectively rotating mirrors.
12. three-dimensional measuring apparatus as claimed in claim 1, wherein, described three-dimensional measuring apparatus further comprises the whirligig that is used to make described rotating mirror rotation predetermined angular.
13. three-dimensional measuring apparatus as claimed in claim 12, wherein, described whirligig is automatically controlled mirror instrument.
14. three-dimensional measuring apparatus as claimed in claim 1, wherein, described light-emitting device is a laser designator.
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