CA1254617A - Transparent multi-oxygen sensor array - Google Patents

Transparent multi-oxygen sensor array

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Publication number
CA1254617A
CA1254617A CA000506705A CA506705A CA1254617A CA 1254617 A CA1254617 A CA 1254617A CA 000506705 A CA000506705 A CA 000506705A CA 506705 A CA506705 A CA 506705A CA 1254617 A CA1254617 A CA 1254617A
Authority
CA
Canada
Prior art keywords
transparent
electrochemical sensor
sensing electrodes
oxygen
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000506705A
Other languages
French (fr)
Inventor
David A. Gough
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Application granted granted Critical
Publication of CA1254617A publication Critical patent/CA1254617A/en
Expired legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/404Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors

Abstract

TRANSPARENT MULTI-OXYGEN SENSOR ARRAY

ABSTRACT

A transparent electrochemical oxygen sensor for simultaneously determining oxygen concentration at different locations on a biological surface that is capable of being positioned over the region sought to be measured and includes an array of independently functioning oxygen-sensitive electrodes, a counter electrode, and a reference electrode.

Description

~i~S~61'7 TRARSPAR~NT M~LTI--OX~G~N SENSOR ARRA~

FIELD OF TEl~ INV~NTIQN
This invention relates to an electrochemical device for determining oxygen concentration on biological surfaces.

BACRGROOND OF TaE I~V~TION
This invention was made with Government support under Grant ~o. HL 17421 awarded by ~ational Institutes of Health.
~he Government has certain rights in this invention.
There exist several electrochemical devices for determining the concentration of various biologically important gases on biological surfaces. Because of the critical role that oxygen plays in physiological events, most of these instruments primarily monitor oxygen, and particularly are employed to monitor oxygen concentrations in patients suffering from disease. The principle on which the instruments operate is that of the common oxygen electrode as described by L.C. Clark, Jr., in 3IsD~S~i~nfi 2Q b~Li~gn Society ~ isisl IL~5~n~1 O~g~D~ (195S, 2:41).
~hile there exist a number of oxygen sensors suitable for monitoring oxygen at or on such biological surfaces as tissues, organs, blood vessels, etc., none are capable of accurately determining oxygen at different specific locations on the surface. The reasons are two-fold: First, the sensors have not been satisfactorily designed with multiple independent sensing capacity capable of close physical contact with the surface. The latter is required for determining oxygen across nonuniform shaped surfaces.
Second, it is difficult to precisely position existing UOCG2-PA.D15] ~C CASE NO 84-037-1 dj,~, . . .

~259~

sensors over the diminutive biological structures, particularly superficial blocd vessels where it is often desirable to determine the oxygen contour profile across the vessel surface because it is difficult to visually ascertain where on the surface the electrodes are located.
SUMMARY OF THE INVENTION
This invention describes a transparent array of multiple oxygen sensors capable of determining oxygen concentration on a biological surface. The device is constructed using semiconductor fabrication techniques and includes multiple independently operated oxygen-sensing electrodes sufficient in number to measure gradients across the biological surface. The electrodes are situated on a transparent and flexible base, which enables the user to accurately position the sensor over a specific region on the surface under consideration, and, moreover, insures uniform working contact of the sensors with irregularly shaped biological surfaces such as organs, tissues, blood vessels, leaves, etc.
According to another aspect of the invention there is provided a transpaxent electrochemical sensor for determining the concentration of a gas at or near biological surfaces comprising:
a transparent support base and situated on one side thereof, a plurality of functionally independent sensing electrodes, a reference electrode, and a counter electrode, said electrodes being in contact with an electrolytic solution, and said function-ally independent sensing electrodes being capable of detecting said gas concentration present at different regions of said biological surface.

~54g~7 6~128-170 Said sensing electrodes are, in one embodiment, preferably situated on the support base in a two dimentional array, particul-arly preferably comprising 8~32 sensing electrodes.

BRIEF DESCRIPTION OF THE DRAWINGS
FIGURE 1 iS a top plant view of a transparent multi-oxygen sensor;
FIGURE 2 is an enlargement of the sensor array encircled in broken line in FIGURE l; and FIGURF 3 is an enlarged sectional view taken on line 3-3 of FIGURE 2.

-- - 2a -~2~17 DETAILED DESCRIPTIO~ OF Ta~ SPECIFIC ~BODIME~T
The transparent multi-oxygen sensor array is fabricated on a suitable transparent substrate that will orm the support base on which the electrodes are deposited. The size of the support base is dictated by the area over which an oxygen gradient is sought to be measured, and not by electrochemical considerations. A variety of transparent materials can be used as a support base. Particularly useful are glass or clear plastic, an example of suitable plastic being certain polymers of chlorinated hydrocarbons such as polyvinylidine chloride. Flexible plastic is preferred in those instances where the sensor is utilized to measure oxygen gradients across the surface of irregularly shaped tissues or organs to insure contact of the sensor with the surfaces under consideration.

I. PrepaLa~ion Q~ ~h~ fi~nSQ~ ~E~ fQL Electrode In order to assure attachment of metals suitable for use as electrodes, it is desirable to clean the surface of the base on which the metals will be deposited. Cleaning of either glass or plastic surfaces can be carried out by various methods, which those skilled in the art will be aware of. A commonly used method is to immerse the base in a sonic bath and subject the base to sonication for an empirically predetermined period of time to remove contaminants from the surface. The base is subsequently rinsed in distilled water.
A second step is required preparatory to depositing metals on glass to insure sufficient bonding of the metals UOCG2-PA.D15] ~C CASE NO 84-037-1 .

~Z~i46~7 to a glass base. In order to provide a suitable adhesive substratum, it is desirable to etch the surface of the glass base.
Severalmethods are available to etch glass, particularly useful is exposure of glass to a mild acid solution. Illustrative of suitable acids are hydrochloric acid or acetic acid. After etching, the base is rinsed in distilled water and dried under an inert atmosphere such as nitrogen.

II. Deposition of Electrodes Techniques routinely used to construct integrated circuits are employed to construct the sensor pattern. The techniques are well described by W.S. DeForest in Photoresist Materials and Processes (McGraw-Hill, 1975) and numerous other texts.
Fabrication of the sensor array is accomplished by depositing, onto one side of the base, under vacuum, noble metals such as platinum or gold routinely used to construct an oxygen sensor. Generally, the multi-oxygen sensor array will have at a minimum three types of electrodes. These are oxygen-sensitive electrodes made of a noble metal, a counter electrode also composedofa noble metal, and a reference silver-silver chloride electrode. It is sometimes convenient to combine the counter and reference electrodes into a single electrode. When the sensor base support is made of glass, it is desirable to deposit an adhesion layer of another metal before depositing the electrode metal, platinum or gold, so as to enhance the binding of the noble ~l~S~6~7 metal to the hase. Illustrative of a glass-binding metal is chromium. Examples of such depo~ition techniques are vapor deposition, or sputtering. Next, a layer of noble metal about 100 to about 800 angstrom~ thick is similarly deposited on top of the layer of chromium, and the materials heated between 250C to 300C for 4 to 5 hours to anneal the layers.
Photolithographic procedures are then employed to establish the electrode pattern. The base is coated using procedures well-known in the art with positive photoresist material on the side containing the metal layers, and soft-baked at 90~C for 25 minutes. Illustrative of positive photoresist material is polyphenolformaldehyde resin, commercially known as novolak resin ~e.g., Shipley*1350).
The material is coated over the metal layers by spin coating. Next, a lithographic mask suitable for forming the desired number of platinum electrodes in a particular array, and of a particular diameter, and with sufricient distance between the electrodes is positioned over the base and the plate exposed to ultraviolet light for 25 seconds. The mask is removed and the base is exposed to developer for 40 minutes followed by hard-baking at 120C for 30 minutes.
The oxygen electrodes are then formed by etching away the platinum and chromium layers. This can be achieved by contacting the base with a dilute mixture of hydrochloric and nitric acids (aqua regia) to etch platinum, followed by a solution of nitric acid and ceric ammonium nitrate to etch chromium, While there is no one combination of either electrode number, electrode diameter, or distance between electrodes ~Tro.1~ ,k ~UOCG2-PA.D151 ~C CASE NO 84-037-1 .
.: ~ . ...

that is optimally preferred for adequate performance of the sensor array, it is anticipated that more than a dozen platinum electrodes with diameters of 20~ to 100~, and 40~
to 20~u separation distance will often be employed. It is anticipated that these parameters will be a function of the type of surface and the distance over which an oxygen gradient is sought to be measured.
The procedures used to form the platinum oxygen-sensing measuring electrodes are also employed to form the silver-silver chloride reference electrode. A second deposition ofchromium is done using a physical mask ~o define the area of the intended reference electrode, followed by deposition of silver. Silver is deposited by vapor deposition, sputterin~, or other suitable techniques. The layers are annealed by heating at 170C for 2 hours. In an alternative method the base is again covered with a positive photoresist layer, and soft-baked at 90C for 25 minutes. Next, a lithographic mask having a negative image of the silver electrode is placed over the base and the base exposed to ultraviolet light for 25 seconds. The mask is removed and the base contacted with developer for 40 seconds followed by hard-baking at :L20C for 30 minutes. Next, silver is vapor deposited and the photoresist layer is dissolved, leaving the silver electrode pattern. Lastly, the silver is chlorided by electrochemical deposition of chloride from a solution of potassium chloride.
Adequate performance of the sensor requires that the silver reference electrode and counter electrode occupy a particular position on the sensor base. The silver reference electrode must be located between the oxygen [~OCG2-PA.D15] UC CASE NO 84-037-1 .;, ~ _ ' ~2~ 7 sensin~ electrode array and the counter electrode, preferably closer to the oxygen sensing electrodes. If a combination counter/reference electrode is used, the common electrode may be a silvér-silver chloride electrode.

III. Sgoncs~inn ~f tbe Se~sQ~ ~Q ~ e~:ei~ .
The platinum sensing electrode, the silver reference electrode, and the platinum counter electrode communicate with recording instrumentation through electrical connectors by way of platinum bonding pads, which were formed during the initial deposition of platinum. The bonding pads are situated at the edge of the plate with each electrode being connected to a separate pad, and the pads, in turn, are connected to electrical connectors. The size of the bonding pad can be varied without affecting sensor performance. A
satisfactory size is approximately 200~ square. The electrical connectors can be composed of a variety of metals well-known to the those in the art; particularly useful are platinum or gold. The electrical connectors can be bonded to the bonding pads by several techniques, including ultrasonic bonding, or by applying electrically conductive epoxy to the pads.

IV~ In~LI~lin~ Qf ~h~ Electrodes.
The base and all electrodes and connectors contained thereon are coated with photoresist material. This layer acts as an insulator to prevent oxygen from contacting metal surfaces other than those required to detect the presence of oxygen. While photoresist material is a convenient insulator, a variety of other insulating materials can also UOCG2-PA.D15] UC CASE NO 84-037-1 perform satisfactorily. ~ thickness of lu of insulating layer performs satisfactorily. Application of the photore~ist material is achieved by covering the base containing thereon electrodes and electrical connectors with a lithographic mask to define the active electrode areas. The base is then exposed to ultraviolet light for 25 seconds, and contacted with developer to expose the areas of the electrodes that are used to detect oxygen. Lastly, the electrical connectors are connected to more substantial lead wires that connect into a multichannel recording instrument.

V. Q Yg~n=~ s~ embrane.
A transparent multi-oxygen sensor array determines oxygen present at the surface of biological surfaces by diffusion of oxygen present through a thin layer of physiological fluids that bathe the surface. Because the sensor electrodes must be in contact with an electrolytic solution to function, and since physiological fluids are high in electrolytes, the sensor can function with the electrodes in direct contact with the fluid. ~owever, in those instances where it is necessary, or desirable, to monitor oxygen concentration over a long period of time, it is sometimes seen that prolonged contact of the electrodes with substances present in bodily fluids may poison the electrodes and adversely affect their performance. Thus, to minimize this the surface of the array can be covered with a membrane. For a membrane to be usable in this capacity, it should be permeable to oxygen, impermeable to higher molecular weight substances found in bodily fluids, and have 30 relatively good optical properties. At a minimum, it should [UOCG2-PA.D15] UC CASE NO 84-037-1 12S4tj~7 be partially transparent. Illustrative of materials with these properties is poly(dimethylsiloxane-carbonate) copolymer, which is sold under the trade name of MEM 213 by General Electric. Poly-ethylene or tetrafluoroethylene may also be used. The membrane can be attached to the sensor by a variety of methods well-known to those in the art. Particularly suitable for attachment is cyanoa-crylate glue. The membrane must be placed over the array in such a fashion that a small quantity of conductive electrolyte is pres-ent between the membrane and the electrodes to make electrical contact.
The following example is provided to illustrate the invention. However, it should be understood that it is not intend-ed to limit the scope of the invention.

EXAMPLE
The transparent multi-oxygen sensor array shown in Figure 1 was tested for its ability to detect varying levels of oxygen in solution. The sensor was immersed in phosphate buffer, pH 7.3, at 37C that had previously been equilibrated with atmospheric oxygen, and the resulting currents noted. About 50 nanoamps of curren-t was 20 produced for an oxygen sensor of 150~ diameter; 30 nanoamps for a sensor 75~ diameter; and 15 nanoamps for a sensor of 25~ diameter.
On transferring the sensor to a solution containing no oxygen, the sensor displayed a current of 1-2 nanoamps.

Claims (34)

1. A transparent electrochemical sensor for determining the concentration of a gas at or near biological surfaces comprising:
a transparent support base and situated on one side thereof, a plurality of functionally independent sensing electrodes, a reference electrode, and a counter electrode, said electrodes being in contact with an electrolytic solution, and said functionally independent sensing electrodes being capable of detecting said gas concentration present at different regions of said biological surface.
2. A transparent electrochemical sensor as described in Claim 1 wherein said gas is oxygen.
3. A transparent electrochemical sensor as described in Claim 1 wherein said transparent support base is made of glass.
4. A transparent electrochemical sensor as described in Claim 1 wherein said transparent support base is a flexible or rigid halogenated hydrocarbon polymer film.
5. A transparent electrochemical sensor as described in Claim 1 wherein said sensing electrode are made of a noble metal.
6. A transparent electrochemical sensor as described in Claim 1 wherein said sensing electrodes are situated on said support base in a two-dimensional array.
7. A transparent electrochemical sensor as described in Claim 6 wherein said two-dimensional array comprises between eight (8) to thirty-two (32) sensing electrodes.
8. A transparent electrochemical sensor as described in Claim 7 wherein said sensing electrodes are between 20µ to 100µ in diameter.
9. A transparent electrochemical sensor as described in Claim 8 wherein said sensing electrodes are spaced 40µ to 200µ apart.
10. A transparent electrochemical sensor as described in Claim 9 wherein said sensing electrodes are coated with insulating material.
11. A transparent electrochemical sensor as described in Claim 1 wherein said sensor is covered with a porous oxygen-permeable material.
12. A transparent electrochemical sensor as described in Claim 11 wherein said porous oxygen-permeable material is transparent.
13. A transparent electrochemical sensor as described in Claim 12 wherein said porous oxygen-permeable material is drawn from the group consisting of polymers of poly(dimethylsiloxane-carbonate), polyethylene, or tetrafluoroethylene.
14. A transparent electrochemical sensor as described in Claim 13 wherein said porous oxygen-permeable material encloses an electrolytic solution.
15. A transparent electrochemical sensor as described in Claim 1 wherein said reference electrode is composed of chloride silver.
16. A transparent electrochemical sensor as described in Claim 15 wherein said reference electrode is situated between said sensing electrodes and said counter electrode.
17. A transparent electrochemical sensor as described in Claim 1 wherein said counter electrode is composed of a noble metal.
18. A method of measuring the concentration of a gas on biological surfaces comprising:
contacting said biological surface with a transparent electrochemical sensor capable of detecting said gas at different regions of said biological surface which includes a transparent support base and situated on one side thereof a plurality of functionally independent sensing electrodes, a reference electrode, and a counter electrode, said electrodes being in contact with a electrolytic solution, and said functionally independent sensing electrodes being capable of detecting gas present at different regions of said biological surface.
19. A method as described in Claim 18 wherein said gas is oxygen.
20. A method as described in Claim 18 wherein said transparent support base is made of glass.
21. A method as described in Claim 18 wherein said transparent support base is made of a flexible or rigid halogenated hydrocarbon polymer film.
22. A method as described in Claim 18 wherein said sensing electrodes are made of a noble metal.
23. A method as described in Claim 18 wherein said sensing electrodes are situated on said support surface in a two-dimensional array.
24. A method as described in Claim 23 wherein said two-dimensional array comprises between eight (8) to thirty-two (32) measuring electrodes.
25. A method as described in Claim 24 wherein said sensing electrodes are between 20µ to 100µ in diameter.
26. A method as described in Claim 25 wherein said sensing electrodes are 40µ to 200µ apart.
27. A method as described in Claim 26 wherein said sensing electrodes are coated with insulating material.
28. A method as described in Claim 18 wherein said transparent electrochemical sensor is covered with porous oxygen-permeable material.
29. A method as described in Claim 28 wherein said porous oxygen-permeable material is transparent.
30. A method as described in Claim 29 wherein said porous oxygen-permeable material is drawn from the group consisting of polymers of poly(dimethylsiloxane-carbonate), polyethylene, or tetrafluoroethylene.
31. A method as described in Claim 30 wherein said porous oxygen permeable material encloses an electrolytic solution.
32. A method as described in Claim 18 wherein said reference electrode is composed of chloride silver.
33. A method as described in Claim 32 wherein said reference electrode is situated between said sensing electrodes and said counter electrode.
34. A method as described in Claim 18 wherein said counter electrode is composed of a noble metal.
CA000506705A 1985-04-19 1986-04-15 Transparent multi-oxygen sensor array Expired CA1254617A (en)

Applications Claiming Priority (2)

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US72521485A 1985-04-19 1985-04-19
US725,214 1985-04-19

Publications (1)

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Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
US4874500A (en) * 1987-07-15 1989-10-17 Sri International Microelectrochemical sensor and sensor array
GB2213269A (en) * 1987-12-01 1989-08-09 Univ Cardiff Microenvironmental sensor assemblies
EP0319198A3 (en) * 1987-12-01 1990-05-16 University College Cardiff Consultants Ltd. Microenvironmental sensor assemblies
AU3038789A (en) * 1988-01-21 1989-08-11 Electro-Nucleonics Inc. Dry ion-selective electrodes for the determination of ionic species in aqueous media
JPH03183943A (en) * 1989-12-14 1991-08-09 Hitachi Ltd Oxygen sensor
GB9412789D0 (en) * 1994-06-24 1994-08-17 Environmental Sensors Ltd Improvements to electrodes

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US3337440A (en) * 1964-01-21 1967-08-22 Leonard J Nestor Electrochemical cell for the study of corrosion by polarization methods in non-conducting solutions
US3985633A (en) * 1972-11-11 1976-10-12 Eschweiler & Co. Device for the polarographic measurement of oxygen pressure
US4062750A (en) * 1974-12-18 1977-12-13 James Francis Butler Thin film electrochemical electrode and cell
US4155814A (en) * 1977-11-30 1979-05-22 Csepel Muvek Femmuve Method and apparatus for galvanostatic and potentiostatic electrochemical investigation of the rate of corrosion processes
NL7801869A (en) * 1978-02-20 1979-08-22 Philips Nv DEVICE FOR TRANSCUTANEOUS ELECTROCHEMICAL DETERMINATION OF BLOOD PARTIAL OXYGEN PRESSURE.
US4285796A (en) * 1978-08-21 1981-08-25 The University Of Virginia Electrolysis electrode
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EP0218694A1 (en) 1987-04-22
WO1986006484A1 (en) 1986-11-06

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