AUPN875296A0 - Method and apparatus for monitoring materials processing - Google Patents

Method and apparatus for monitoring materials processing

Info

Publication number
AUPN875296A0
AUPN875296A0 AUPN8752A AUPN875296A AUPN875296A0 AU PN875296 A0 AUPN875296 A0 AU PN875296A0 AU PN8752 A AUPN8752 A AU PN8752A AU PN875296 A AUPN875296 A AU PN875296A AU PN875296 A0 AUPN875296 A0 AU PN875296A0
Authority
AU
Australia
Prior art keywords
materials processing
monitoring materials
monitoring
processing
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AUPN8752A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MANAKATO Pty Ltd
Original Assignee
MANAKATO Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MANAKATO Pty Ltd filed Critical MANAKATO Pty Ltd
Priority to AUPN8752A priority Critical patent/AUPN875296A0/en
Publication of AUPN875296A0 publication Critical patent/AUPN875296A0/en
Priority to AU20186/97A priority patent/AU2018697A/en
Priority to JP53298597A priority patent/JP2001519891A/en
Priority to IL12628997A priority patent/IL126289A0/en
Priority to PCT/AU1997/000181 priority patent/WO1997035177A1/en
Priority to KR1019980707424A priority patent/KR20000064701A/en
Priority to CN97194713.9A priority patent/CN1219236A/en
Assigned to MANAKATO PTY LTD reassignment MANAKATO PTY LTD Assignment by Applicant under S 113 Assignors: Misiura, Jacek Michal
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/216—Polarisation-affecting properties using circular polarised light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/123—Conversion circuit
AUPN8752A 1996-03-19 1996-03-19 Method and apparatus for monitoring materials processing Abandoned AUPN875296A0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
AUPN8752A AUPN875296A0 (en) 1996-03-19 1996-03-19 Method and apparatus for monitoring materials processing
AU20186/97A AU2018697A (en) 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light
JP53298597A JP2001519891A (en) 1996-03-19 1997-03-19 Measurement of characteristic parameters by polarization
IL12628997A IL126289A0 (en) 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light
PCT/AU1997/000181 WO1997035177A1 (en) 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light
KR1019980707424A KR20000064701A (en) 1996-03-19 1997-03-19 Characteristic Parameter Determination by Polarization
CN97194713.9A CN1219236A (en) 1996-03-19 1997-03-19 Method and device for determining characteristic parameters by polarised light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPN8752A AUPN875296A0 (en) 1996-03-19 1996-03-19 Method and apparatus for monitoring materials processing

Publications (1)

Publication Number Publication Date
AUPN875296A0 true AUPN875296A0 (en) 1996-04-18

Family

ID=3793065

Family Applications (1)

Application Number Title Priority Date Filing Date
AUPN8752A Abandoned AUPN875296A0 (en) 1996-03-19 1996-03-19 Method and apparatus for monitoring materials processing

Country Status (6)

Country Link
JP (1) JP2001519891A (en)
KR (1) KR20000064701A (en)
CN (1) CN1219236A (en)
AU (1) AUPN875296A0 (en)
IL (1) IL126289A0 (en)
WO (1) WO1997035177A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19734646A1 (en) 1997-08-11 1999-03-04 Bosch Gmbh Robert Ellipsometer measuring device
US6583875B1 (en) 2000-05-19 2003-06-24 Therma-Wave, Inc. Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
FR2809491B1 (en) * 2000-05-26 2008-07-04 Production Rech S Appliquees METHOD AND APPARATUS FOR ELLIPSOMETRIC METROLOGY FOR SAMPLE CONTAINED IN A CHAMBER OR THE LIKE
KR100688980B1 (en) * 2005-07-01 2007-03-08 삼성전자주식회사 Apparatus for monitoring plasma and method of monitoring plasma
CN102507040B (en) * 2011-11-10 2013-08-21 复旦大学 Thin film temperature measurement method based on ellipsometer
CN102519364B (en) * 2011-11-30 2014-10-15 上海华力微电子有限公司 Optical detection method and computer-aided system for plasma etching structure
FR2994264B1 (en) * 2012-08-02 2014-09-12 Centre Nat Rech Scient PROCESS FOR ANALYZING THE CRYSTALLINE STRUCTURE OF A POLY-CRYSTALLINE SEMICONDUCTOR MATERIAL
EP2703773B1 (en) * 2012-08-28 2014-12-24 Texmag GmbH Vertriebsgesellschaft Sensor for detecting a moving strip
CN103076287B (en) * 2013-01-25 2015-05-13 中国人民解放军陆军军官学院 Method for detecting damage of first wall of tokamak fusion reactor with polarized light
CN103486974B (en) * 2013-09-23 2016-04-13 中国科学院微电子研究所 A kind of Spectroscopic Ellipsometry measurement mechanism and method
CN103759661B (en) * 2013-11-04 2016-06-29 北京理工大学 A kind of device for measuring film thickness and refractive index in medium
AU2014385273B2 (en) * 2014-03-07 2017-06-15 Halliburton Energy Services, Inc. Wavelength-dependent light intensity modulation in multivariate optical computing devices using polarizers
CN105136679B (en) * 2015-09-02 2017-12-26 北京航玻新材料技术有限公司 A kind of optical material surface method for evaluating quality and its application based on ellipsometer
CN105445191B (en) * 2015-11-30 2018-08-24 中国科学院长春应用化学研究所 Multichannel in situ measurement atmosphere pond
CN113281268B (en) * 2021-05-31 2022-08-16 华中科技大学 Data analysis method and system for rotating polarization device spectrum ellipsometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985447A (en) * 1975-08-29 1976-10-12 Bell Telephone Laboratories, Incorporated Measurement of thin films by polarized light
FR2491234B1 (en) * 1980-09-29 1986-06-20 Labo Electronique Physique ELECTRONIC DEVICE FOR THE ANALYSIS AND CALCULATION OF FOURIER COEFFICIENTS OF A PERIODIC FUNCTION, AND ELLIPSOMETER COMPRISING SUCH A DEVICE
IT1184100B (en) * 1985-04-23 1987-10-22 Cselt Centro Studi Lab Telecom STATIC INTERFEROMETRIC ELLIPSOMETER
US4850711A (en) * 1986-06-13 1989-07-25 Nippon Kokan Kabushiki Kaisha Film thickness-measuring apparatus using linearly polarized light
DE4301889A1 (en) * 1993-01-14 1994-07-21 Sentech Instr Gmbh Method for determining characteristic sizes of transparent layers by means of ellipsometry

Also Published As

Publication number Publication date
JP2001519891A (en) 2001-10-23
CN1219236A (en) 1999-06-09
WO1997035177A1 (en) 1997-09-25
KR20000064701A (en) 2000-11-06
IL126289A0 (en) 1999-05-09

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