AU531198B2 - Foil holder - Google Patents
Foil holderInfo
- Publication number
- AU531198B2 AU531198B2 AU61722/80A AU6172280A AU531198B2 AU 531198 B2 AU531198 B2 AU 531198B2 AU 61722/80 A AU61722/80 A AU 61722/80A AU 6172280 A AU6172280 A AU 6172280A AU 531198 B2 AU531198 B2 AU 531198B2
- Authority
- AU
- Australia
- Prior art keywords
- foil holder
- foil
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU61722/80A AU531198B2 (en) | 1979-08-27 | 1979-08-27 | Foil holder |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU61722/80A AU531198B2 (en) | 1979-08-27 | 1979-08-27 | Foil holder |
AUPE020679 | 1979-08-27 | ||
AUPE0206 | 1979-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
AU6172280A AU6172280A (en) | 1981-03-05 |
AU531198B2 true AU531198B2 (en) | 1983-08-11 |
Family
ID=25633234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU61722/80A Ceased AU531198B2 (en) | 1979-08-27 | 1979-08-27 | Foil holder |
Country Status (1)
Country | Link |
---|---|
AU (1) | AU531198B2 (en) |
-
1979
- 1979-08-27 AU AU61722/80A patent/AU531198B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
AU6172280A (en) | 1981-03-05 |
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