AU2003268904A1 - Support for substrates and compound comprising a support substrate and an extremely thin substrate - Google Patents

Support for substrates and compound comprising a support substrate and an extremely thin substrate

Info

Publication number
AU2003268904A1
AU2003268904A1 AU2003268904A AU2003268904A AU2003268904A1 AU 2003268904 A1 AU2003268904 A1 AU 2003268904A1 AU 2003268904 A AU2003268904 A AU 2003268904A AU 2003268904 A AU2003268904 A AU 2003268904A AU 2003268904 A1 AU2003268904 A1 AU 2003268904A1
Authority
AU
Australia
Prior art keywords
support
substrate
substrates
compound
extremely thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003268904A
Other versions
AU2003268904A8 (en
Inventor
Steffen Astheimer
Frank Bohm
Claudia Booss
Hauke Esemann
Andreas Habeck
Silke Knoche
Clemens Ottermann
Armin Plichta
Gerd Rudas
Frank Voges
Gerhard Weber
Thomas Zetterer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE20215401U external-priority patent/DE20215401U1/en
Priority claimed from DE10330430A external-priority patent/DE10330430A1/en
Priority claimed from PCT/EP2003/010358 external-priority patent/WO2004032593A2/en
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of AU2003268904A8 publication Critical patent/AU2003268904A8/en
Publication of AU2003268904A1 publication Critical patent/AU2003268904A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
AU2003268904A 2002-10-07 2003-10-02 Support for substrates and compound comprising a support substrate and an extremely thin substrate Abandoned AU2003268904A1 (en)

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
DE20215401U DE20215401U1 (en) 2002-10-07 2002-10-07 Composite of a thin substrate and a carrier substrate with releasable connecting means
DE20215401.7 2002-10-07
DE10323301.6 2003-05-21
DE10323302.4 2003-05-21
DE10323304A DE10323304A1 (en) 2002-10-07 2003-05-21 Composite comprises thin substrate (e.g. glass) less than 0.3 mm thick releasably bound to carrier substrate through adhesive force, useful e.g. in display industry, in polymer electronics, photovoltaic industry, sensors and biotechnology
DE10323304.0 2003-05-21
DE10323303.2 2003-05-21
DE10323301A DE10323301A1 (en) 2002-10-07 2003-05-21 Composite comprises thin substrate (e.g. glass) less than 0.3 mm thick releasably bound to carrier substrate by electrostatic force, useful e.g. in display industry, in polymer electronics, photovoltaic industry, sensors and biotechnology
DE10323302A DE10323302A1 (en) 2002-10-07 2003-05-21 Composite comprises thin substrate (e.g. glass) less than 0.3 mm thick releasably bound to carrier substrate having fine structuring with open, infinitesimal cavities, useful in e.g. display industry, polymer electronics, and biotechnology
DE10323303A DE10323303A1 (en) 2002-10-07 2003-05-21 Composite comprises thin substrate (e.g. glass) having less than 0.3 mm thickness releasably bound to carrier substrate through bonding material, useful in e.g. display industry, polymer electronics, in sensors, biotechnology and medicine
DE10330430.4 2003-07-04
DE10330430A DE10330430A1 (en) 2003-07-04 2003-07-04 Composite used e.g. in displays and in the production of optoelectronic components comprises an extremely thin substrate connected to a support substrate by a connecting material
PCT/EP2003/010358 WO2004032593A2 (en) 2002-10-07 2003-09-18 Extremely thin substrate support
AU2003283248 2003-09-18
PCT/EP2003/010907 WO2004033197A2 (en) 2002-10-07 2003-10-02 Support for substrates and compound comprising a support substrate and an extremely thin substrate

Publications (2)

Publication Number Publication Date
AU2003268904A8 AU2003268904A8 (en) 2004-05-04
AU2003268904A1 true AU2003268904A1 (en) 2004-05-04

Family

ID=32097194

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003268904A Abandoned AU2003268904A1 (en) 2002-10-07 2003-10-02 Support for substrates and compound comprising a support substrate and an extremely thin substrate

Country Status (2)

Country Link
AU (1) AU2003268904A1 (en)
WO (1) WO2004033197A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514090B (en) * 2007-07-13 2015-12-21 Mapper Lithography Ip Bv A lithography system and a wafer table for supporting a wafer
US8705010B2 (en) 2007-07-13 2014-04-22 Mapper Lithography Ip B.V. Lithography system, method of clamping and wafer table
DE102012215149A1 (en) * 2012-08-27 2014-03-20 Schott Ag Glass substrate tape
CN105307864B (en) 2013-06-20 2018-03-30 肖特玻璃科技(苏州)有限公司 The conjugant of thin glass on the support substrate and its production and use
DE102015112036B4 (en) * 2015-07-23 2017-05-11 Schott Ag Monolithic underlay for full surface support of a workpiece
WO2017035770A1 (en) * 2015-09-01 2017-03-09 Schott Glass Technologies (Suzhou) Co., Ltd. Method for producing a bonded glass article and a bonded glass article

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD285085A5 (en) * 1989-06-16 1990-12-05 Veb Werk Fuer Technisches Glas Ilmenau,Dd METHOD AND DEVICE FOR COATING CROSS-SECTION FLAT GLASS
JPH0740870B2 (en) * 1991-07-26 1995-05-10 株式会社いかるが牛乳 Method for producing low-lactose milk
JP3263128B2 (en) * 1992-06-26 2002-03-04 ローム株式会社 Processing of thin glass
JP2915254B2 (en) * 1993-07-29 1999-07-05 セントラル硝子株式会社 Attachment of thin glass and method of transporting it
DE19649488A1 (en) * 1996-11-29 1997-11-06 Schott Glaswerke Pneumatic handling or transport system and for thin glass sheet in display manufacture
EP1024952B1 (en) * 1997-10-24 2002-06-26 Agfa-Gevaert A laminate comprising a thin borosilicate glass substrate as a constituting layer
US6689414B2 (en) * 1999-02-16 2004-02-10 Schott Glas Method of protecting glass substrate surfaces
JP2000252342A (en) * 1999-03-01 2000-09-14 Seiko Epson Corp Method for transporting thin plate and manufacture of liquid crystal panel
EP1217655A1 (en) * 2000-12-23 2002-06-26 VenTec Gesellschaft für Venturekapital und Unternehmensberatung Method of handling a thin wafer
WO2004009480A1 (en) * 2002-07-17 2004-01-29 Osram Opto Semiconductors Gmbh Shatterproof ultra-thin glass and the handling thereof

Also Published As

Publication number Publication date
AU2003268904A8 (en) 2004-05-04
WO2004033197A2 (en) 2004-04-22
WO2004033197A3 (en) 2004-08-05

Similar Documents

Publication Publication Date Title
AUPS309002A0 (en) A covertile for a substrate
AU2003241784A1 (en) Material for substrate mounting optical circuit-electric circuit mixedly and substrate mounting optical circuit-electric circuit mixedly
AU2003262881A1 (en) Temperature-controlled substrate holder
AU2003228282A1 (en) Assembly of active optical devices on a substrate
AU2002366860A1 (en) Method and device for depositing crystalline layers on crystalline substrates
AU2003278248A1 (en) Diffusing substrate
AU2003229196A1 (en) Ceramic thin film on various substrates, and process for producing same
AU2003238305A1 (en) Method and apparatus for supporting a substrate
AU2003302719A1 (en) Superconductor material on a tape substrate
AU2002245433A1 (en) Method for uniformly coating a substrate
AU2003234441A1 (en) Carrier tape for electronic components
AU2003237399A1 (en) Methods for transferring a layer onto a substrate
AU2003299708A1 (en) Special film-coated substrate for bio-microarray fabrication and use thereof
AU2003232414A1 (en) Process for manufacturing substrates with detachment of a temporary support, and associated substrate
AU2002367724A1 (en) Method of carrying substrate
AU2003215669A1 (en) Method for coating a substrate and device for carrying out the method
AU2003283248A1 (en) Extremely thin substrate support
AU2003263069A1 (en) A method for depositing a film on a substrate
AU2003277601A1 (en) Method of forming film on substrate
AU2003268904A1 (en) Support for substrates and compound comprising a support substrate and an extremely thin substrate
AU2002350883A1 (en) System of layers for transparent substrates and coated substrate
AU2003230930A1 (en) Coated substrates for computer printers
AU2003263225A1 (en) Method of altering the properties of a thin film and substrate implementing said method
AU2003212379A1 (en) Coated substrate
AU2003266511A1 (en) Thin film and method for manufacturing same

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase