AU2003243125A1 - Integrated optical displacement sensors for scanning probe microscopy - Google Patents

Integrated optical displacement sensors for scanning probe microscopy

Info

Publication number
AU2003243125A1
AU2003243125A1 AU2003243125A AU2003243125A AU2003243125A1 AU 2003243125 A1 AU2003243125 A1 AU 2003243125A1 AU 2003243125 A AU2003243125 A AU 2003243125A AU 2003243125 A AU2003243125 A AU 2003243125A AU 2003243125 A1 AU2003243125 A1 AU 2003243125A1
Authority
AU
Australia
Prior art keywords
integrated optical
scanning probe
displacement sensors
optical displacement
probe microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003243125A
Inventor
Atilla Aydinli
Coskun Kocabas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2003243125A1 publication Critical patent/AU2003243125A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU2003243125A 2003-06-18 2003-06-18 Integrated optical displacement sensors for scanning probe microscopy Abandoned AU2003243125A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/TR2003/000053 WO2004112050A1 (en) 2003-06-18 2003-06-18 Integrated optical displacement sensors for scanning probe microscopy

Publications (1)

Publication Number Publication Date
AU2003243125A1 true AU2003243125A1 (en) 2005-01-04

Family

ID=33550705

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003243125A Abandoned AU2003243125A1 (en) 2003-06-18 2003-06-18 Integrated optical displacement sensors for scanning probe microscopy

Country Status (2)

Country Link
AU (1) AU2003243125A1 (en)
WO (1) WO2004112050A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100399040C (en) * 2005-03-31 2008-07-02 电子科技大学 Magnetizer for magnetic probe of magnetic microscope
DE602005009285D1 (en) * 2005-06-14 2008-10-09 Nat Applied Res Laboratories Bend beam with front wings for the conductive probe of an electric scanning probe microscope.
US7474410B2 (en) 2006-04-11 2009-01-06 Massachusetts Institute Of Technology Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography
US9835591B2 (en) 2011-02-25 2017-12-05 Panorama Synergy Ltd Optical cantilever based analysis
US9057706B2 (en) 2011-02-25 2015-06-16 University Of Western Australia Optical cantilever based analyte detection
GB2493585B (en) * 2011-08-11 2013-08-14 Ibm Scanning probe microscopy cantilever comprising an electromagnetic sensor
EP2620779A1 (en) 2012-01-30 2013-07-31 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Probe calibration
FR3055011B1 (en) * 2016-08-12 2018-08-17 Vmicro MICROMECHANICAL SENSOR WITH OPTICAL TRANSDUCTION
WO2019104083A1 (en) * 2017-11-22 2019-05-31 Magic Leap, Inc. Thermally actuated cantilevered beam optical scanner
CN108678918B (en) * 2018-05-08 2019-12-17 中国地质大学（武汉） Laser-induced photothermal expansion type driving device
EP3722741A1 (en) 2019-04-08 2020-10-14 Nokia Technologies Oy An apparatus comprising a cantilever
US10884192B1 (en) 2019-12-16 2021-01-05 Hewlett Packard Enterprise Development Lp Single-etch wide-bandwidth grating couplers with individually-tuned grating sections
CN111665375A (en) * 2020-06-28 2020-09-15 深圳市繁华物创科技有限公司 Atomic force microscope probe and system based on waveguide Bragg grating
CN113567818B (en) * 2021-08-16 2024-05-03 重庆大学 Fabry-Perot partial discharge sensing device and method based on cantilever supporting structure
CN114252815B (en) * 2021-11-24 2023-08-29 清华大学深圳国际研究生院 Magnetic cantilever sensor, manufacturing method thereof, measuring device and imaging system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775214A (en) * 1983-12-21 1988-10-04 Rosemount Inc. Wavelength coded resonant optical sensor
US5231286A (en) * 1990-08-31 1993-07-27 Olympus Optical Co., Ltd. Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide
JPH05196458A (en) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr Piezoresistance cantilever structure for atomic power microscope
JP3000491B2 (en) * 1991-04-10 2000-01-17 キヤノン株式会社 Cantilever unit, information processing apparatus using the same, atomic force microscope, magnetic force microscope
JPH05126561A (en) * 1991-10-30 1993-05-21 Olympus Optical Co Ltd Cantilever chip array
JPH05231861A (en) * 1992-02-20 1993-09-07 Olympus Optical Co Ltd Scanning probe microscope

Also Published As

Publication number Publication date
WO2004112050A1 (en) 2004-12-23

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase