AU2003214406A1 - Mems devices on a nanometer scale - Google Patents

Mems devices on a nanometer scale

Info

Publication number
AU2003214406A1
AU2003214406A1 AU2003214406A AU2003214406A AU2003214406A1 AU 2003214406 A1 AU2003214406 A1 AU 2003214406A1 AU 2003214406 A AU2003214406 A AU 2003214406A AU 2003214406 A AU2003214406 A AU 2003214406A AU 2003214406 A1 AU2003214406 A1 AU 2003214406A1
Authority
AU
Australia
Prior art keywords
mems devices
nanometer scale
nanometer
scale
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003214406A
Inventor
Torbjorn G. I. Ling
Andrej Litwin
Lars G. Montelius
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
BTG International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BTG International Ltd filed Critical BTG International Ltd
Publication of AU2003214406A1 publication Critical patent/AU2003214406A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
AU2003214406A 2003-03-13 2003-03-13 Mems devices on a nanometer scale Abandoned AU2003214406A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/GB2003/001069 WO2004080886A1 (en) 2003-03-13 2003-03-13 Mems devices on a nanometer scale

Publications (1)

Publication Number Publication Date
AU2003214406A1 true AU2003214406A1 (en) 2004-09-30

Family

ID=32982438

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003214406A Abandoned AU2003214406A1 (en) 2003-03-13 2003-03-13 Mems devices on a nanometer scale

Country Status (3)

Country Link
EP (1) EP1603829A1 (en)
AU (1) AU2003214406A1 (en)
WO (1) WO2004080886A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1890306B1 (en) * 2006-08-18 2010-12-08 Imec MEMS Variable capacitor and method for producing same
EP1890305A1 (en) * 2006-08-18 2008-02-20 Interuniversitair Microelektronica Centrum Vzw MEMS Variable capacitor and method for producing same
US7782594B2 (en) 2006-08-18 2010-08-24 Imec MEMS variable capacitor and method for producing the same
WO2009048695A2 (en) 2007-10-11 2009-04-16 The Regents Of The University Of California Nanotube resonator devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232847B1 (en) * 1997-04-28 2001-05-15 Rockwell Science Center, Llc Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
DE60012962T2 (en) * 1999-11-03 2005-08-11 International Business Machines Corp. SENSORS AND TRANSFORMERS WITH FREESTANDING BOOM
KR100756211B1 (en) * 2000-05-04 2007-09-06 비티지 인터내셔널 리미티드 Nanostructures

Also Published As

Publication number Publication date
EP1603829A1 (en) 2005-12-14
WO2004080886A1 (en) 2004-09-23

Similar Documents

Publication Publication Date Title
GB0205794D0 (en) Mems devices on a nanometer scale
AU2003218453A1 (en) Packaging microelectromechanical structures
AU2003212969A1 (en) Packaging microelectromechanical structures
GB2406716B (en) A micro-electromechanical variable capactitor
AU2003901208A0 (en) A flotation device
AU2003234674A1 (en) A movable micro-electromechanical device
AU2002952684A0 (en) A device
AU2003202803A1 (en) Micro device
AU2003902474A0 (en) A bioelastomer i
AUPS187602A0 (en) A measuring device
AU2003214406A1 (en) Mems devices on a nanometer scale
AU2003271081A1 (en) Micro movable device
AU2003253456A1 (en) A surface-light source-condensing stand
AU2003219026A1 (en) A bird-frightening device
AU2003304291A1 (en) A car-locking device
AU2003900068A0 (en) A sprinker system
AU2002950564A0 (en) A novelty device
AU2003905523A0 (en) A Backseal Device
AU2003900380A0 (en) A device
AU2003207975A1 (en) A microelectromechanical device having a system for sensing position
AU2003244790A1 (en) A micro-electromechanical variable capactitor
AU2003900432A0 (en) A support device
AU2003900238A0 (en) A locking device
AU2003901403A0 (en) A mounting device
AU2002101042A4 (en) A measuring device

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase