AU2002366855A1 - Method and device for analyzing a repeatedly occurring process - Google Patents

Method and device for analyzing a repeatedly occurring process

Info

Publication number
AU2002366855A1
AU2002366855A1 AU2002366855A AU2002366855A AU2002366855A1 AU 2002366855 A1 AU2002366855 A1 AU 2002366855A1 AU 2002366855 A AU2002366855 A AU 2002366855A AU 2002366855 A AU2002366855 A AU 2002366855A AU 2002366855 A1 AU2002366855 A1 AU 2002366855A1
Authority
AU
Australia
Prior art keywords
analyzing
repeatedly occurring
occurring process
repeatedly
occurring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002366855A
Inventor
Arieh Greenberg
Christian Reh
Christian Schatt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of AU2002366855A1 publication Critical patent/AU2002366855A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G05B19/4187—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow by tool management
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31103—Configure parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Testing And Monitoring For Control Systems (AREA)
AU2002366855A 2001-12-13 2002-11-14 Method and device for analyzing a repeatedly occurring process Abandoned AU2002366855A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10161307.5 2001-12-13
DE10161307A DE10161307A1 (en) 2001-12-13 2001-12-13 A method and apparatus for analyzing a recurring process, and a method and apparatus for evaluating a plurality of process devices of the same type, and a method and apparatus for improving the performance of a process device
PCT/EP2002/012784 WO2003054643A1 (en) 2001-12-13 2002-11-14 Method and device for analyzing a repeatedly occurring process

Publications (1)

Publication Number Publication Date
AU2002366855A1 true AU2002366855A1 (en) 2003-07-09

Family

ID=7709114

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002366855A Abandoned AU2002366855A1 (en) 2001-12-13 2002-11-14 Method and device for analyzing a repeatedly occurring process

Country Status (4)

Country Link
CN (1) CN1605050A (en)
AU (1) AU2002366855A1 (en)
DE (1) DE10161307A1 (en)
WO (1) WO2003054643A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1724651A1 (en) * 2005-05-13 2006-11-22 Siemens Aktiengesellschaft Preemptive diagnostic of automation components
US7761171B2 (en) * 2006-09-29 2010-07-20 Fisher-Rosemount Systems, Inc. Methods and apparatus to generate schedules to execute functions in a process control system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3656060A (en) * 1971-01-15 1972-04-11 Ibm Time interval measuring and accumulating device
EP0130179A1 (en) * 1982-12-23 1985-01-09 Dst Digitale Steuerungssysteme Gmbh Method and device for monitoring processes
US5691895A (en) * 1995-12-18 1997-11-25 International Business Machines Corporation Mechanism and architecture for manufacturing control and optimization
DE19747574A1 (en) * 1997-10-28 1999-05-06 Siemens Ag Procedure for determining feasible configurations of processing systems
JP2000210800A (en) * 1999-01-27 2000-08-02 Komatsu Ltd Method for monitoring industrial machine and device therefor
US6556949B1 (en) * 1999-05-18 2003-04-29 Applied Materials, Inc. Semiconductor processing techniques
DE19922919C2 (en) * 1999-05-19 2002-01-17 Infineon Technologies Ag Plant for processing wafers
DE19934196A1 (en) * 1999-07-21 2001-01-25 Volkswagen Ag Clock time and fault detection system converts control signal occurring at start/end of process step into clock signal detectable by computer in interface between computer and device
DE19952194A1 (en) * 1999-10-29 2001-05-17 Infineon Technologies Ag Plant for processing wafers
JP2001134316A (en) * 1999-11-09 2001-05-18 Toshiba Corp Monitoring device for control system
DE10008251A1 (en) * 2000-02-23 2001-08-30 Gordon Pipa Method for detecting and analyzing complex correlations between signals, greatly reduces the computing power required to find such correlations

Also Published As

Publication number Publication date
CN1605050A (en) 2005-04-06
WO2003054643A1 (en) 2003-07-03
DE10161307A1 (en) 2003-07-03

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase