AU2002231067A1 - Inductively coupled plasma reactor - Google Patents

Inductively coupled plasma reactor

Info

Publication number
AU2002231067A1
AU2002231067A1 AU2002231067A AU2002231067A AU2002231067A1 AU 2002231067 A1 AU2002231067 A1 AU 2002231067A1 AU 2002231067 A AU2002231067 A AU 2002231067A AU 2002231067 A AU2002231067 A AU 2002231067A AU 2002231067 A1 AU2002231067 A1 AU 2002231067A1
Authority
AU
Australia
Prior art keywords
inductively coupled
coupled plasma
plasma reactor
reactor
inductively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002231067A
Inventor
Valery Godyak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2002231067A1 publication Critical patent/AU2002231067A1/en
Abandoned legal-status Critical Current

Links

AU2002231067A 2000-12-26 2001-12-21 Inductively coupled plasma reactor Abandoned AU2002231067A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/257,786 2000-12-26

Publications (1)

Publication Number Publication Date
AU2002231067A1 true AU2002231067A1 (en) 2002-07-08

Family

ID=

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