AU2002228436A1 - Film forming method and film forming device - Google Patents

Film forming method and film forming device

Info

Publication number
AU2002228436A1
AU2002228436A1 AU2002228436A AU2002228436A AU2002228436A1 AU 2002228436 A1 AU2002228436 A1 AU 2002228436A1 AU 2002228436 A AU2002228436 A AU 2002228436A AU 2002228436 A AU2002228436 A AU 2002228436A AU 2002228436 A1 AU2002228436 A1 AU 2002228436A1
Authority
AU
Australia
Prior art keywords
film forming
forming method
forming device
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU2002228436A
Other versions
AU2002228436B2 (en
Inventor
Shuji Hahakura
Kazuya Ohmatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001032280A external-priority patent/JP2002235168A/en
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of AU2002228436A1 publication Critical patent/AU2002228436A1/en
Application granted granted Critical
Publication of AU2002228436B2 publication Critical patent/AU2002228436B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU2002228436A 2001-02-08 2002-02-05 Film forming method and film forming device Ceased AU2002228436B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-32280 2001-02-08
JP2001032280A JP2002235168A (en) 2001-02-08 2001-02-08 Method and apparatus for film deposition
PCT/JP2002/000936 WO2002063063A1 (en) 2001-02-08 2002-02-05 Film forming method and film forming device

Publications (2)

Publication Number Publication Date
AU2002228436A1 true AU2002228436A1 (en) 2003-02-13
AU2002228436B2 AU2002228436B2 (en) 2007-05-24

Family

ID=18896239

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002228436A Ceased AU2002228436B2 (en) 2001-02-08 2002-02-05 Film forming method and film forming device

Country Status (13)

Country Link
US (1) US20040096580A1 (en)
EP (1) EP1371746B1 (en)
JP (1) JP2002235168A (en)
KR (1) KR100819719B1 (en)
CN (1) CN1265016C (en)
AT (1) ATE321154T1 (en)
AU (1) AU2002228436B2 (en)
CA (1) CA2436750C (en)
DE (1) DE60210045T2 (en)
DK (1) DK1371746T3 (en)
ES (1) ES2261642T3 (en)
NZ (1) NZ527521A (en)
WO (1) WO2002063063A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006028977B4 (en) * 2006-06-23 2012-04-12 Qimonda Ag Sputterdepositions device
JP5244725B2 (en) * 2009-07-21 2013-07-24 株式会社日立ハイテクノロジーズ Deposition equipment
KR101701731B1 (en) * 2012-02-03 2017-02-02 시게이트 테크놀로지 엘엘씨 Methods of forming layers
CN106544634B (en) * 2015-09-17 2019-03-12 宁波江丰电子材料股份有限公司 A kind of forming method of film layer, target and target production method
CN107630188A (en) * 2017-10-31 2018-01-26 安徽富芯微电子有限公司 A kind of film-coating mechanism and its application method for being used to improve metal level plating film uniformity
CN108165934B (en) * 2018-01-19 2020-06-16 武汉华美晨曦光电有限责任公司 Evaporation plating equipment
CN114250164B (en) * 2020-09-23 2023-11-17 中国农业大学 Acinetobacter 1502IPR-05 with nitrogen fixation and phosphorus dissolution capabilities and application thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736437A (en) * 1980-08-14 1982-02-27 Fuji Photo Film Co Ltd Producing device of magnetic recording medium
JPS6194242A (en) * 1984-10-16 1986-05-13 Fuji Photo Film Co Ltd Manufacture of magnetic recording medium
JPH0533124A (en) * 1991-07-26 1993-02-09 Olympus Optical Co Ltd Laser flash vapor-deposition device
US5332133A (en) * 1991-11-01 1994-07-26 Nisshin Flour Milling Co., Ltd. Powder supplying apparatus and powder spraying apparatus
JPH06101037A (en) * 1992-09-22 1994-04-12 Hitachi Ltd Ion-beam sputtering device
US5650378A (en) * 1992-10-02 1997-07-22 Fujikura Ltd. Method of making polycrystalline thin film and superconducting oxide body
JP2996568B2 (en) * 1992-10-30 2000-01-11 株式会社フジクラ Method for producing polycrystalline thin film and method for producing oxide superconducting conductor
AU6132494A (en) * 1993-03-12 1994-09-26 Neocera, Inc. Superconducting films on alkaline earth fluoride substrates with multiple buffer layers
JPH06271394A (en) * 1993-03-19 1994-09-27 Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai Target for laser beam vapor deposition device and production of oxide superconductor using the same
US5411772A (en) * 1994-01-25 1995-05-02 Rockwell International Corporation Method of laser ablation for uniform thin film deposition
JPH0870144A (en) * 1994-08-26 1996-03-12 Sumitomo Electric Ind Ltd Manufacture of superconductor parts
JPH08144051A (en) * 1994-11-21 1996-06-04 Matsushita Electric Ind Co Ltd Formation of thin film using laser abrasion and laser abrasion device
JPH08246134A (en) * 1995-03-07 1996-09-24 Sumitomo Electric Ind Ltd Production of thin film and apparatus for production of thin film by laser vapor deposition method
US5624722A (en) * 1995-03-07 1997-04-29 Sumitomo Electric Industries, Ltd. Apparatus and method for depositing films on substrate via on-axis laser ablation
JP3771012B2 (en) * 1997-09-02 2006-04-26 株式会社フジクラ Oxide superconducting conductor
US6090207A (en) * 1998-04-02 2000-07-18 Neocera, Inc. Translational target assembly for thin film deposition system
JP3877903B2 (en) * 1999-04-28 2007-02-07 株式会社フジクラ Thin film formation method
JP2002266072A (en) * 2001-03-09 2002-09-18 Sumitomo Electric Ind Ltd Laminated film and film deposition method

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