AU2002228436A1 - Film forming method and film forming device - Google Patents
Film forming method and film forming deviceInfo
- Publication number
- AU2002228436A1 AU2002228436A1 AU2002228436A AU2002228436A AU2002228436A1 AU 2002228436 A1 AU2002228436 A1 AU 2002228436A1 AU 2002228436 A AU2002228436 A AU 2002228436A AU 2002228436 A AU2002228436 A AU 2002228436A AU 2002228436 A1 AU2002228436 A1 AU 2002228436A1
- Authority
- AU
- Australia
- Prior art keywords
- film forming
- forming method
- forming device
- film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-32280 | 2001-02-08 | ||
JP2001032280A JP2002235168A (en) | 2001-02-08 | 2001-02-08 | Method and apparatus for film deposition |
PCT/JP2002/000936 WO2002063063A1 (en) | 2001-02-08 | 2002-02-05 | Film forming method and film forming device |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2002228436A1 true AU2002228436A1 (en) | 2003-02-13 |
AU2002228436B2 AU2002228436B2 (en) | 2007-05-24 |
Family
ID=18896239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002228436A Ceased AU2002228436B2 (en) | 2001-02-08 | 2002-02-05 | Film forming method and film forming device |
Country Status (13)
Country | Link |
---|---|
US (1) | US20040096580A1 (en) |
EP (1) | EP1371746B1 (en) |
JP (1) | JP2002235168A (en) |
KR (1) | KR100819719B1 (en) |
CN (1) | CN1265016C (en) |
AT (1) | ATE321154T1 (en) |
AU (1) | AU2002228436B2 (en) |
CA (1) | CA2436750C (en) |
DE (1) | DE60210045T2 (en) |
DK (1) | DK1371746T3 (en) |
ES (1) | ES2261642T3 (en) |
NZ (1) | NZ527521A (en) |
WO (1) | WO2002063063A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006028977B4 (en) * | 2006-06-23 | 2012-04-12 | Qimonda Ag | Sputterdepositions device |
JP5244725B2 (en) * | 2009-07-21 | 2013-07-24 | 株式会社日立ハイテクノロジーズ | Deposition equipment |
KR101701731B1 (en) * | 2012-02-03 | 2017-02-02 | 시게이트 테크놀로지 엘엘씨 | Methods of forming layers |
CN106544634B (en) * | 2015-09-17 | 2019-03-12 | 宁波江丰电子材料股份有限公司 | A kind of forming method of film layer, target and target production method |
CN107630188A (en) * | 2017-10-31 | 2018-01-26 | 安徽富芯微电子有限公司 | A kind of film-coating mechanism and its application method for being used to improve metal level plating film uniformity |
CN108165934B (en) * | 2018-01-19 | 2020-06-16 | 武汉华美晨曦光电有限责任公司 | Evaporation plating equipment |
CN114250164B (en) * | 2020-09-23 | 2023-11-17 | 中国农业大学 | Acinetobacter 1502IPR-05 with nitrogen fixation and phosphorus dissolution capabilities and application thereof |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5736437A (en) * | 1980-08-14 | 1982-02-27 | Fuji Photo Film Co Ltd | Producing device of magnetic recording medium |
JPS6194242A (en) * | 1984-10-16 | 1986-05-13 | Fuji Photo Film Co Ltd | Manufacture of magnetic recording medium |
JPH0533124A (en) * | 1991-07-26 | 1993-02-09 | Olympus Optical Co Ltd | Laser flash vapor-deposition device |
US5332133A (en) * | 1991-11-01 | 1994-07-26 | Nisshin Flour Milling Co., Ltd. | Powder supplying apparatus and powder spraying apparatus |
JPH06101037A (en) * | 1992-09-22 | 1994-04-12 | Hitachi Ltd | Ion-beam sputtering device |
US5650378A (en) * | 1992-10-02 | 1997-07-22 | Fujikura Ltd. | Method of making polycrystalline thin film and superconducting oxide body |
JP2996568B2 (en) * | 1992-10-30 | 2000-01-11 | 株式会社フジクラ | Method for producing polycrystalline thin film and method for producing oxide superconducting conductor |
AU6132494A (en) * | 1993-03-12 | 1994-09-26 | Neocera, Inc. | Superconducting films on alkaline earth fluoride substrates with multiple buffer layers |
JPH06271394A (en) * | 1993-03-19 | 1994-09-27 | Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Target for laser beam vapor deposition device and production of oxide superconductor using the same |
US5411772A (en) * | 1994-01-25 | 1995-05-02 | Rockwell International Corporation | Method of laser ablation for uniform thin film deposition |
JPH0870144A (en) * | 1994-08-26 | 1996-03-12 | Sumitomo Electric Ind Ltd | Manufacture of superconductor parts |
JPH08144051A (en) * | 1994-11-21 | 1996-06-04 | Matsushita Electric Ind Co Ltd | Formation of thin film using laser abrasion and laser abrasion device |
JPH08246134A (en) * | 1995-03-07 | 1996-09-24 | Sumitomo Electric Ind Ltd | Production of thin film and apparatus for production of thin film by laser vapor deposition method |
US5624722A (en) * | 1995-03-07 | 1997-04-29 | Sumitomo Electric Industries, Ltd. | Apparatus and method for depositing films on substrate via on-axis laser ablation |
JP3771012B2 (en) * | 1997-09-02 | 2006-04-26 | 株式会社フジクラ | Oxide superconducting conductor |
US6090207A (en) * | 1998-04-02 | 2000-07-18 | Neocera, Inc. | Translational target assembly for thin film deposition system |
JP3877903B2 (en) * | 1999-04-28 | 2007-02-07 | 株式会社フジクラ | Thin film formation method |
JP2002266072A (en) * | 2001-03-09 | 2002-09-18 | Sumitomo Electric Ind Ltd | Laminated film and film deposition method |
-
2001
- 2001-02-08 JP JP2001032280A patent/JP2002235168A/en not_active Withdrawn
-
2002
- 2002-02-05 AT AT02710513T patent/ATE321154T1/en not_active IP Right Cessation
- 2002-02-05 KR KR1020037010471A patent/KR100819719B1/en not_active IP Right Cessation
- 2002-02-05 US US10/466,330 patent/US20040096580A1/en not_active Abandoned
- 2002-02-05 CN CNB028044746A patent/CN1265016C/en not_active Expired - Fee Related
- 2002-02-05 AU AU2002228436A patent/AU2002228436B2/en not_active Ceased
- 2002-02-05 ES ES02710513T patent/ES2261642T3/en not_active Expired - Lifetime
- 2002-02-05 CA CA002436750A patent/CA2436750C/en not_active Expired - Fee Related
- 2002-02-05 DE DE60210045T patent/DE60210045T2/en not_active Expired - Lifetime
- 2002-02-05 WO PCT/JP2002/000936 patent/WO2002063063A1/en active IP Right Grant
- 2002-02-05 DK DK02710513T patent/DK1371746T3/en active
- 2002-02-05 NZ NZ527521A patent/NZ527521A/en unknown
- 2002-02-05 EP EP02710513A patent/EP1371746B1/en not_active Expired - Lifetime
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