AU2002225777A1 - Method of manufacturing ultra-precise, self-assembled micro systems - Google Patents

Method of manufacturing ultra-precise, self-assembled micro systems

Info

Publication number
AU2002225777A1
AU2002225777A1 AU2002225777A AU2577702A AU2002225777A1 AU 2002225777 A1 AU2002225777 A1 AU 2002225777A1 AU 2002225777 A AU2002225777 A AU 2002225777A AU 2577702 A AU2577702 A AU 2577702A AU 2002225777 A1 AU2002225777 A1 AU 2002225777A1
Authority
AU
Australia
Prior art keywords
precise
self
micro systems
manufacturing ultra
assembled micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002225777A
Inventor
Andre Sharon
Holger Wirtz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boston University
Fraunhofer USA Inc
Original Assignee
Boston University
Fraunhofer USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boston University, Fraunhofer USA Inc filed Critical Boston University
Publication of AU2002225777A1 publication Critical patent/AU2002225777A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2002225777A 2000-11-28 2001-11-28 Method of manufacturing ultra-precise, self-assembled micro systems Abandoned AU2002225777A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25349600P 2000-11-28 2000-11-28
US60/253,496 2000-11-28
PCT/US2001/044757 WO2002044078A1 (en) 2000-11-28 2001-11-28 Method of manufacturing ultra-precise, self-assembled micro systems

Publications (1)

Publication Number Publication Date
AU2002225777A1 true AU2002225777A1 (en) 2002-06-11

Family

ID=22960520

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002225777A Abandoned AU2002225777A1 (en) 2000-11-28 2001-11-28 Method of manufacturing ultra-precise, self-assembled micro systems

Country Status (2)

Country Link
AU (1) AU2002225777A1 (en)
WO (1) WO2002044078A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor
US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
US5971355A (en) * 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US6108121A (en) * 1998-03-24 2000-08-22 The Board Of Trustees Of The Leland Stanford Junior University Micromachined high reflectance deformable mirror
US6082208A (en) * 1998-04-01 2000-07-04 Sandia Corporation Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
US6101371A (en) * 1998-09-12 2000-08-08 Lucent Technologies, Inc. Article comprising an inductor
US6148124A (en) * 1998-11-20 2000-11-14 Lucent Technologies Wavelength division multiplexed optical networks

Also Published As

Publication number Publication date
WO2002044078A1 (en) 2002-06-06
WO2002044078A9 (en) 2002-10-24

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