AU2002224569A1 - Fluid mass flow control valve and method of operation - Google Patents

Fluid mass flow control valve and method of operation

Info

Publication number
AU2002224569A1
AU2002224569A1 AU2002224569A AU2456902A AU2002224569A1 AU 2002224569 A1 AU2002224569 A1 AU 2002224569A1 AU 2002224569 A AU2002224569 A AU 2002224569A AU 2456902 A AU2456902 A AU 2456902A AU 2002224569 A1 AU2002224569 A1 AU 2002224569A1
Authority
AU
Australia
Prior art keywords
control valve
flow control
mass flow
fluid mass
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002224569A
Inventor
Daniel T Mudd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fugasity Corp
Original Assignee
Fugasity Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fugasity Corp filed Critical Fugasity Corp
Publication of AU2002224569A1 publication Critical patent/AU2002224569A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87338—Flow passage with bypass
    • Y10T137/87354—Including flowmeter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
AU2002224569A 2000-07-08 2001-07-06 Fluid mass flow control valve and method of operation Abandoned AU2002224569A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21692800P 2000-07-08 2000-07-08
US60216928 2000-07-08
PCT/US2001/021482 WO2002008844A1 (en) 2000-07-08 2001-07-06 Fluid mass flow control valve and method of operation

Publications (1)

Publication Number Publication Date
AU2002224569A1 true AU2002224569A1 (en) 2002-02-05

Family

ID=22809021

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002224569A Abandoned AU2002224569A1 (en) 2000-07-08 2001-07-06 Fluid mass flow control valve and method of operation

Country Status (3)

Country Link
US (1) US6443174B2 (en)
AU (1) AU2002224569A1 (en)
WO (1) WO2002008844A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7809473B2 (en) * 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7383851B2 (en) * 2004-10-07 2008-06-10 Eaton Corporation Closed loop pressure control system and electrically operated pressure control valve with integral pressure sensor and method of making same
EP2021892B1 (en) 2006-04-27 2013-02-20 Sko Flo Industries, Inc. Flow control valve
US7395708B2 (en) * 2006-04-28 2008-07-08 Skoflo Industries, Inc. Flow measuring apparatus including a piston movable in the flow barrel
US20110114196A1 (en) * 2009-06-17 2011-05-19 Jason Lall Electronic pressure regulator
DE102010051743B4 (en) * 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmable hydrocephalus valve
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP5890984B2 (en) * 2011-08-30 2016-03-22 株式会社フジキン Fluid control device
JP6224630B2 (en) * 2012-03-07 2017-11-01 イリノイ トゥール ワークス インコーポレイティド System and method for using decay rate measurement for real-time measurement and correction of zero offset and zero drift of mass flow controllers or mass flow meters
US10048105B2 (en) * 2012-03-07 2018-08-14 Illinois Tool Works Inc. System and method for providing a self validating mass flow controller and mass flow meter
WO2014040002A2 (en) 2012-09-10 2014-03-13 Mudd Daniel T Pressure based mass flow controller
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US20190186649A1 (en) * 2017-12-15 2019-06-20 William J. Warren Liquid Flow Control Attachment with Wireless Connection
US11054050B2 (en) * 2018-08-13 2021-07-06 Proserv Operations Inc. Valve with press-fit insert
CN109746758A (en) * 2019-02-19 2019-05-14 大连理工大学 A kind of jet stream support device and method being used for thin-wall part based on non-newtonian fluid
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Family Cites Families (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2666297A (en) 1950-03-14 1954-01-19 Elmer C Skousgaard Container and discharge valve therefor
US3335748A (en) 1964-09-15 1967-08-15 Henry B Peter Adjustable control for metered flow
US3271994A (en) 1965-04-19 1966-09-13 Jered Ind Inc Fluid flow comparator for use in calibrating fluid flow orifices
US3559482A (en) 1968-11-27 1971-02-02 Teledyne Inc Fluid flow measuring apparatus
US3570807A (en) * 1969-01-14 1971-03-16 Bell Aerospace Corp Electromechanical control valve
US3841520A (en) 1969-04-04 1974-10-15 Airco Inc Flame arresting vent valve
US3807456A (en) 1970-06-25 1974-04-30 Trw Inc Hydraulic controller including rotary valve
US3814541A (en) 1971-11-24 1974-06-04 Delta Controls Ltd Fluid supply apparatus
US3910113A (en) 1972-11-20 1975-10-07 William R Brown Method of selectively varying the differential output and overall performance characteristics of a proportional differential pressure producing fluid flow device
US4026657A (en) 1974-09-05 1977-05-31 Textron, Inc. Sintered spherical articles
US4015626A (en) 1976-01-22 1977-04-05 Thordarson, Inc. Constant flow valve for low flow rates
US4096746A (en) 1977-02-25 1978-06-27 The Perkin-Elmer Corporation Flow controller-flow sensor assembly for gas chromatographs and the like
US4275752A (en) 1978-09-22 1981-06-30 Collier Nigel A Fluid flow apparatus and method
US4203465A (en) 1979-03-27 1980-05-20 General Motors Corporation Precision pressure control valve
US4253156A (en) 1979-06-22 1981-02-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Automatic flowmeter calibration system
DE2929389C2 (en) 1979-07-20 1984-05-17 Machinefabriek Mokveld B.V., 2800 Gouda Control valve
US4315523A (en) 1980-03-06 1982-02-16 American Flow Systems, Inc. Electronically controlled flow meter and flow control system
EP0061856B1 (en) 1981-04-01 1987-08-26 LUCAS INDUSTRIES public limited company Measurement of air mass flow into an internal combustion engine
US4462915A (en) 1981-09-23 1984-07-31 Oil Process Systems, Inc. Method and system for filtering cooking oil
AT381571B (en) 1982-11-15 1986-11-10 Oemv Ag DEVICE FOR STAGE PRESSURE RELEASE WHEN RELAXING, IN PARTICULAR, HOT GASES
FR2543321B1 (en) 1983-03-22 1985-08-16 Electricite De France DEVICE FOR CONTROLLING A FLOW OF FLUID, ESPECIALLY RADIOACTIVE FLUID
US4576043A (en) 1984-05-17 1986-03-18 Chevron Research Company Methods for metering two-phase flow
US4687020A (en) * 1985-05-17 1987-08-18 Doyle James H Fluid mass flow controller
US4669052A (en) 1985-07-02 1987-05-26 Motorola, Inc. Apparatus and method for calibrating a sensor
DE3538828A1 (en) 1985-10-31 1987-05-07 Druva Gmbh BASIC FITTINGS, PARTICULARLY AS PART OF A PRESSURE REDUCER
US4718443A (en) 1987-02-06 1988-01-12 Conoco Inc. Mass flowmeter apparatus
US5100551A (en) 1987-03-27 1992-03-31 Pall Corporation Segmented filter disc with slotted support and drainage plate
GB8711931D0 (en) 1987-05-20 1987-06-24 British Petroleum Co Plc Filtration/coalescence
CA1309954C (en) 1987-07-29 1992-11-10 Yasuo Yamada Deaerator for particulates
GB8720356D0 (en) 1987-08-28 1987-10-07 Thorn Emi Flow Measurement Ltd Fluid meter
US4918995A (en) 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
US4858643A (en) 1988-03-14 1989-08-22 Unit Instruments, Inc. Fluid flow stabilizing apparatus
US4796651A (en) 1988-03-30 1989-01-10 LeRoy D. Ginn Variable gas volume flow measuring and control methods and apparatus
NL9000339A (en) 1990-02-13 1991-09-02 System Engineering & Component PRESSURE DROP REDUCTION DEVICE, AND VALVE FITTED WITH A PRESSURE DROP REDUCTION DEVICE.
US5419133A (en) * 1989-09-05 1995-05-30 Schneider; Edward T. High speed thermochemical actuator
US5080131A (en) 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
DE3936619A1 (en) 1989-11-03 1991-05-08 Man Nutzfahrzeuge Ag METHOD FOR INJECTING A FUEL INTO THE COMBUSTION CHAMBER OF AN AIR COMPRESSING, SELF-IGNITION ENGINE, AND APPARATUS FOR CARRYING OUT THIS METHOD
JPH03156509A (en) 1989-11-14 1991-07-04 Stec Kk Mass flow controller
US5123439A (en) 1990-02-01 1992-06-23 Industrial Ceramics Engineering Valve body ceramic liners
US5142483A (en) 1990-04-24 1992-08-25 Caltechnix Corporation Pressure regulating system for positive shut-off pressure controller
US5237523A (en) 1990-07-25 1993-08-17 Honeywell Inc. Flowmeter fluid composition and temperature correction
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5052363A (en) 1990-10-22 1991-10-01 Ford Motor Company EGR control valve having ceramic elements
US5583282A (en) 1990-12-14 1996-12-10 Millipore Investment Holdings Limited Differential gas sensing in-line monitoring system
US5138869A (en) 1990-12-14 1992-08-18 Novapure Corporation In-line detector system for real-time determination of impurity concentration in a flowing gas stream
US5062446A (en) 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
JPH07111367B2 (en) 1991-02-26 1995-11-29 ディーエクスエル・インターナショナル・インコーポレーテッド Flow rate sensor and its inspection method
US5359878A (en) 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
US5114447A (en) 1991-03-12 1992-05-19 Mott Metallurgical Corporation Ultra-high efficiency porous metal filter
ATE135459T1 (en) 1991-05-17 1996-03-15 Unit Instr Inc DEVICE FOR CALIBRATION OF A FLOW CONTROL DEVICE
US5311762A (en) 1991-12-16 1994-05-17 Dxl Usa Flow sensor calibration
DE69212129T2 (en) 1991-12-18 1997-01-23 Pierre Delajoud Mass flow meter with constricting element
US5187972A (en) 1992-01-17 1993-02-23 Clean Air Engineering, Inc. Gas monitor
US5190068A (en) 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
US5297427A (en) 1992-09-03 1994-03-29 Alicat Scientific, Inc. Wide-range laminar flowmeter
US5329966A (en) 1993-03-08 1994-07-19 Vici Metronics Incorporated Gas flow controller
EP0627256B1 (en) 1993-06-04 1996-12-04 Millipore Corporation High-efficiency metal filter element and process for the manufacture thereof
US5511585A (en) 1994-03-31 1996-04-30 The Lee Company Method and device for providing fluid resistance within a flow passageway
US5624409A (en) 1994-06-10 1997-04-29 Fluidsense Corporation Variable-pulse dynamic fluid flow controller
US5730181A (en) 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US5549272A (en) 1994-08-11 1996-08-27 Johnson Service Company Combination pressure pulsation damper and check valve depressor
US5542284A (en) 1994-10-18 1996-08-06 Queen's University At Kingston Method and instrument for measuring differential oxygen concentration between two flowing gas streams
US5660207A (en) * 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US6026847A (en) 1995-10-11 2000-02-22 Reinicke; Robert H. Magnetostrictively actuated valve
US5804717A (en) 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5868159A (en) 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
JP3580645B2 (en) 1996-08-12 2004-10-27 忠弘 大見 Pressure type flow controller
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US5918616A (en) 1996-11-15 1999-07-06 Sanfilippo; James J. Apparatus and method of controlling gas flow
US5865205A (en) * 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
US5904170A (en) 1997-05-14 1999-05-18 Applied Materials, Inc. Pressure flow and concentration control of oxygen/ozone gas mixtures
US5917066A (en) 1997-07-16 1999-06-29 Mott Metallurgical Corporation Inline ultra-high efficiency filter
US5970801A (en) 1997-12-30 1999-10-26 Bear Medical Systems, Inc. Variable orifice flow sensor
US6080219A (en) 1998-05-08 2000-06-27 Mott Metallurgical Corporation Composite porous media
US5988211A (en) 1998-07-06 1999-11-23 Randolph W. Cornell I.V. flow controller
US6152162A (en) 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
US6119710A (en) 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction

Also Published As

Publication number Publication date
US20020002996A1 (en) 2002-01-10
US6443174B2 (en) 2002-09-03
WO2002008844A1 (en) 2002-01-31

Similar Documents

Publication Publication Date Title
AU2002224569A1 (en) Fluid mass flow control valve and method of operation
AU2001293198A1 (en) Body fluid flow control method and device
AU2003203917A1 (en) Body Fluid Flow Control Method and Device
AUPP512398A0 (en) A control member for a valve and method for determining fluid flow rate through a valve
AU2003261322A1 (en) Fluid flow control device and method for use of same
AU2001286035A1 (en) Method of determining fluid flow
AU2003276358A1 (en) Fluid system control valve and system comprising said valve
AU2001267038A1 (en) Thermally operated valve for automatically modulating the flow of fluids and method
TW487151U (en) Piezoelectric fluid control valve
AU2008099A (en) Fluid flow control valve
AU2001277984A1 (en) Small internal volume fluid mass flow control apparatus
AU2003225608A1 (en) A valve assembly and method for controlling fluid flow through a tube
AU2002353330A1 (en) A device for regulating the flow of a fluid, in particular for solenoid valves
AU2001247252A1 (en) Mass flow controller and method of operation of mass flow controller
EP1327807A3 (en) Flow control system and valve for controlling a fluid flow
EP1167847B8 (en) Flow control valve
AU2002224393A1 (en) Annular flow safety valve and method
HK1057196A1 (en) Fluid dispensing valve and method of use.
AU1678200A (en) Fluid flow control valve
AU2002248911A1 (en) Bellows actuator for pressure and flow control
AU5146799A (en) Electric-control valve for regulating flow of fluid
AU2002220926A1 (en) Fluid control valves
AU2001248574A1 (en) Differential flow control valve
EP1256750A4 (en) Motor type flow control valve and method of manufacturing the flow control valve
AU2002318082A1 (en) Sleeve valve and method for providing a controllable fluid flow