AU2001261619A1 - System for precision control of the position of an atmospheric plasma jet - Google Patents
System for precision control of the position of an atmospheric plasma jetInfo
- Publication number
- AU2001261619A1 AU2001261619A1 AU2001261619A AU6161901A AU2001261619A1 AU 2001261619 A1 AU2001261619 A1 AU 2001261619A1 AU 2001261619 A AU2001261619 A AU 2001261619A AU 6161901 A AU6161901 A AU 6161901A AU 2001261619 A1 AU2001261619 A1 AU 2001261619A1
- Authority
- AU
- Australia
- Prior art keywords
- plasma jet
- precision control
- atmospheric plasma
- atmospheric
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/44—Plasma torches using an arc using more than one torch
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20410300P | 2000-05-15 | 2000-05-15 | |
US60204103 | 2000-05-15 | ||
PCT/US2001/015678 WO2001088220A1 (en) | 2000-05-15 | 2001-05-15 | System for precision control of the position of an atmospheric plasma jet |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001261619A1 true AU2001261619A1 (en) | 2001-11-26 |
Family
ID=22756627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001261619A Abandoned AU2001261619A1 (en) | 2000-05-15 | 2001-05-15 | System for precision control of the position of an atmospheric plasma jet |
Country Status (3)
Country | Link |
---|---|
US (1) | US6492613B2 (en) |
AU (1) | AU2001261619A1 (en) |
WO (1) | WO2001088220A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6955991B2 (en) * | 1999-11-01 | 2005-10-18 | Jetek, Inc. | Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes |
US6762136B1 (en) * | 1999-11-01 | 2004-07-13 | Jetek, Inc. | Method for rapid thermal processing of substrates |
US7960670B2 (en) * | 2005-05-03 | 2011-06-14 | Kla-Tencor Corporation | Methods of and apparatuses for measuring electrical parameters of a plasma process |
WO2003084294A1 (en) * | 2002-03-28 | 2003-10-09 | Apit Corp. S.A. | Atmospheric plasma surface treatment method and device for same |
US6815246B2 (en) * | 2003-02-13 | 2004-11-09 | Rwe Schott Solar Inc. | Surface modification of silicon nitride for thick film silver metallization of solar cell |
NL1023491C2 (en) * | 2003-05-21 | 2004-11-24 | Otb Groep B V | Cascade source. |
US7375039B2 (en) * | 2005-05-24 | 2008-05-20 | International Business Machines Corporation | Local plasma processing |
WO2007079488A2 (en) * | 2006-01-03 | 2007-07-12 | Victor Barinov | Controlled electrospinning of fibers |
FR2897748B1 (en) * | 2006-02-20 | 2008-05-16 | Snecma Services Sa | THERMAL BARRIER DEPOSITION METHOD BY PLASMA TORCH |
US9040120B2 (en) * | 2011-08-05 | 2015-05-26 | Frito-Lay North America, Inc. | Inorganic nanocoating primed organic film |
US9267011B2 (en) | 2012-03-20 | 2016-02-23 | Frito-Lay North America, Inc. | Composition and method for making a cavitated bio-based film |
US9162421B2 (en) | 2012-04-25 | 2015-10-20 | Frito-Lay North America, Inc. | Film with compostable heat seal layer |
WO2013192547A1 (en) | 2012-06-23 | 2013-12-27 | Frito-Lay North America, Inc. | Deposition of ultra-thin inorganic oxide coatings on packaging |
US9149980B2 (en) | 2012-08-02 | 2015-10-06 | Frito-Lay North America, Inc. | Ultrasonic sealing of packages |
US9090021B2 (en) | 2012-08-02 | 2015-07-28 | Frito-Lay North America, Inc. | Ultrasonic sealing of packages |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE763709A (en) * | 1971-03-03 | 1971-08-02 | Soudure Autogene Elect | CURTAIN PLASMA. |
US5235160A (en) * | 1990-03-22 | 1993-08-10 | Matsushita Electric Industrial Co., Ltd. | Heat-plasma-jet generator capable of conducting plasma spray or heat-plasma cvd coating in a relatively wide area |
RU2030811C1 (en) * | 1991-05-24 | 1995-03-10 | Инженерный центр "Плазмодинамика" | Solid body plasma processing plant |
RU2032280C1 (en) * | 1992-02-18 | 1995-03-27 | Инженерный центр "Плазмодинамика" | Method of control over plasma flux and plasma device |
US5565249A (en) * | 1992-05-07 | 1996-10-15 | Fujitsu Limited | Method for producing diamond by a DC plasma jet |
US5767627A (en) | 1997-01-09 | 1998-06-16 | Trusi Technologies, Llc | Plasma generation and plasma processing of materials |
-
2001
- 2001-05-15 WO PCT/US2001/015678 patent/WO2001088220A1/en active Application Filing
- 2001-05-15 AU AU2001261619A patent/AU2001261619A1/en not_active Abandoned
- 2001-05-15 US US09/855,299 patent/US6492613B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20020030038A1 (en) | 2002-03-14 |
WO2001088220A1 (en) | 2001-11-22 |
WO2001088220A8 (en) | 2002-02-07 |
US6492613B2 (en) | 2002-12-10 |
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