WO2009037887A1 - 二流体スリットノズルおよびその製造方法 - Google Patents

二流体スリットノズルおよびその製造方法 Download PDF

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Publication number
WO2009037887A1
WO2009037887A1 PCT/JP2008/058248 JP2008058248W WO2009037887A1 WO 2009037887 A1 WO2009037887 A1 WO 2009037887A1 JP 2008058248 W JP2008058248 W JP 2008058248W WO 2009037887 A1 WO2009037887 A1 WO 2009037887A1
Authority
WO
WIPO (PCT)
Prior art keywords
mixing
plate
liquid
supply plate
jetting
Prior art date
Application number
PCT/JP2008/058248
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Hitoshi Hirakikawa
Original Assignee
Spraying Systems Co., Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spraying Systems Co., Japan filed Critical Spraying Systems Co., Japan
Priority to CN2008800006941A priority Critical patent/CN101547744B/zh
Priority to HK10102756.8A priority patent/HK1136240B/zh
Publication of WO2009037887A1 publication Critical patent/WO2009037887A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/025—Nozzles having elongated outlets, e.g. slots, for the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0483—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with gas and liquid jets intersecting in the mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0491—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid the liquid and the gas being mixed at least twice along the flow path of the liquid

Landscapes

  • Nozzles (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
PCT/JP2008/058248 2007-09-18 2008-04-30 二流体スリットノズルおよびその製造方法 WO2009037887A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2008800006941A CN101547744B (zh) 2007-09-18 2008-04-30 双流体狭缝式喷嘴及其制造方法
HK10102756.8A HK1136240B (zh) 2007-09-18 2008-04-30 雙流體狹縫式噴嘴及其製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-240456 2007-09-18
JP2007240456A JP4156656B1 (ja) 2007-09-18 2007-09-18 二流体スリットノズルおよびその製造方法

Publications (1)

Publication Number Publication Date
WO2009037887A1 true WO2009037887A1 (ja) 2009-03-26

Family

ID=39846566

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058248 WO2009037887A1 (ja) 2007-09-18 2008-04-30 二流体スリットノズルおよびその製造方法

Country Status (4)

Country Link
JP (1) JP4156656B1 (zh)
KR (1) KR101010032B1 (zh)
CN (1) CN101547744B (zh)
WO (1) WO2009037887A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108971100A (zh) * 2018-08-31 2018-12-11 厦门米海智能科技股份有限公司 一种气泡减阻喷淋臂及包含该喷淋臂的清洗机

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101067737B1 (ko) * 2009-07-29 2011-09-28 김현희 평판 디스플레이 세정용 이류체 분사장치
KR101329319B1 (ko) * 2010-08-13 2013-11-14 세메스 주식회사 노즐 및 이를 갖는 기판처리장치
CN103464315B (zh) * 2013-08-28 2015-12-09 清华大学深圳研究生院 一种能形成均匀水幕的工艺喷嘴
CN103691623B (zh) * 2013-12-23 2016-04-06 清华大学深圳研究生院 实现均匀喷涂低冲击的组合工艺喷嘴
CN103736606B (zh) * 2013-12-23 2016-04-06 清华大学深圳研究生院 集成式出射流道结构工艺喷嘴
CN104166318A (zh) * 2014-09-09 2014-11-26 清华大学深圳研究生院 静压出流显影喷嘴
KR101652481B1 (ko) * 2015-05-08 2016-08-30 남지영 이중 슬릿 노즐를 이용한 약액 도포 장치
CN106340473B (zh) * 2015-07-06 2020-03-06 芝浦机械电子株式会社 基板处理装置及基板处理方法
CN105045049B (zh) * 2015-07-31 2019-05-14 清华大学深圳研究生院 一种具有排气通道的显影喷嘴
KR102031719B1 (ko) * 2019-02-26 2019-10-14 이중호 디스플레이 패널 세정용 아쿠아나이프
CN112430897B (zh) * 2020-11-20 2022-03-11 杭州诺邦无纺股份有限公司 一种功能性无纺复合材料及制备方法
CN120112363A (zh) * 2022-11-22 2025-06-06 东丽株式会社 狭缝型喷射喷嘴

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63104679A (ja) * 1986-10-21 1988-05-10 Nordson Kk 液体の混合吐出又は噴出方法とその装置
JP2000051768A (ja) * 1998-08-15 2000-02-22 San Tool:Kk 湿気反応型塗布剤塗布装置におけるノズルダイ
JP2006192360A (ja) * 2005-01-12 2006-07-27 Ikeuchi:Kk 二流体用スリットノズル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2669993Y (zh) * 2003-12-24 2005-01-12 宝山钢铁股份有限公司 气液复合平面射流喷射嘴

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63104679A (ja) * 1986-10-21 1988-05-10 Nordson Kk 液体の混合吐出又は噴出方法とその装置
JP2000051768A (ja) * 1998-08-15 2000-02-22 San Tool:Kk 湿気反応型塗布剤塗布装置におけるノズルダイ
JP2006192360A (ja) * 2005-01-12 2006-07-27 Ikeuchi:Kk 二流体用スリットノズル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108971100A (zh) * 2018-08-31 2018-12-11 厦门米海智能科技股份有限公司 一种气泡减阻喷淋臂及包含该喷淋臂的清洗机
CN108971100B (zh) * 2018-08-31 2023-06-06 厦门米海智能科技股份有限公司 一种气泡减阻喷淋臂及包含该喷淋臂的清洗机

Also Published As

Publication number Publication date
CN101547744A (zh) 2009-09-30
JP4156656B1 (ja) 2008-09-24
KR20090051735A (ko) 2009-05-22
JP2009066564A (ja) 2009-04-02
CN101547744B (zh) 2011-08-03
HK1136240A1 (zh) 2010-06-25
KR101010032B1 (ko) 2011-01-21

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