CN101547744A - 双流体狭缝式喷嘴及其制造方法 - Google Patents

双流体狭缝式喷嘴及其制造方法 Download PDF

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Publication number
CN101547744A
CN101547744A CNA2008800006941A CN200880000694A CN101547744A CN 101547744 A CN101547744 A CN 101547744A CN A2008800006941 A CNA2008800006941 A CN A2008800006941A CN 200880000694 A CN200880000694 A CN 200880000694A CN 101547744 A CN101547744 A CN 101547744A
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China
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plate
liquid
chamber
mixed
air
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CNA2008800006941A
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English (en)
Chinese (zh)
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CN101547744B (zh
Inventor
平木川均
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spray Systems Japan Co ltd
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Spraying Systems Japan Co
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Publication of CN101547744A publication Critical patent/CN101547744A/zh
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Publication of CN101547744B publication Critical patent/CN101547744B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0491—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid the liquid and the gas being mixed at least twice along the flow path of the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/025—Nozzles having elongated outlets, e.g. slots, for the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0483—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with gas and liquid jets intersecting in the mixing chamber

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  • Nozzles (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CN2008800006941A 2007-09-18 2008-04-30 双流体狭缝式喷嘴及其制造方法 Expired - Fee Related CN101547744B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP240456/2007 2007-09-18
JP2007240456A JP4156656B1 (ja) 2007-09-18 2007-09-18 二流体スリットノズルおよびその製造方法
PCT/JP2008/058248 WO2009037887A1 (ja) 2007-09-18 2008-04-30 二流体スリットノズルおよびその製造方法

Publications (2)

Publication Number Publication Date
CN101547744A true CN101547744A (zh) 2009-09-30
CN101547744B CN101547744B (zh) 2011-08-03

Family

ID=39846566

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800006941A Expired - Fee Related CN101547744B (zh) 2007-09-18 2008-04-30 双流体狭缝式喷嘴及其制造方法

Country Status (4)

Country Link
JP (1) JP4156656B1 (no)
KR (1) KR101010032B1 (no)
CN (1) CN101547744B (no)
WO (1) WO2009037887A1 (no)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103464315A (zh) * 2013-08-28 2013-12-25 清华大学深圳研究生院 一种能形成均匀水幕的工艺喷嘴
CN103691623A (zh) * 2013-12-23 2014-04-02 清华大学深圳研究生院 实现均匀喷涂低冲击的组合工艺喷嘴
CN103736606A (zh) * 2013-12-23 2014-04-23 清华大学深圳研究生院 集成式出射流道结构工艺喷嘴
CN104166318A (zh) * 2014-09-09 2014-11-26 清华大学深圳研究生院 静压出流显影喷嘴
CN105045049A (zh) * 2015-07-31 2015-11-11 清华大学深圳研究生院 一种具有排气通道的显影喷嘴
CN106340473A (zh) * 2015-07-06 2017-01-18 芝浦机械电子株式会社 水刀、基板处理装置及基板处理方法
CN112430897A (zh) * 2020-11-20 2021-03-02 杭州诺邦无纺股份有限公司 一种功能性无纺复合材料及制备方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101067737B1 (ko) * 2009-07-29 2011-09-28 김현희 평판 디스플레이 세정용 이류체 분사장치
KR101329319B1 (ko) * 2010-08-13 2013-11-14 세메스 주식회사 노즐 및 이를 갖는 기판처리장치
KR101652481B1 (ko) * 2015-05-08 2016-08-30 남지영 이중 슬릿 노즐를 이용한 약액 도포 장치
CN108971100B (zh) * 2018-08-31 2023-06-06 厦门米海智能科技股份有限公司 一种气泡减阻喷淋臂及包含该喷淋臂的清洗机
KR102031719B1 (ko) * 2019-02-26 2019-10-14 이중호 디스플레이 패널 세정용 아쿠아나이프
CN120112363A (zh) * 2022-11-22 2025-06-06 东丽株式会社 狭缝型喷射喷嘴

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2513475B2 (ja) * 1986-10-21 1996-07-03 ノードソン株式会社 液体の混合吐出又は噴出方法とその装置
JP2000051768A (ja) * 1998-08-15 2000-02-22 San Tool:Kk 湿気反応型塗布剤塗布装置におけるノズルダイ
CN2669993Y (zh) * 2003-12-24 2005-01-12 宝山钢铁股份有限公司 气液复合平面射流喷射嘴
JP4649214B2 (ja) 2005-01-12 2011-03-09 株式会社いけうち 二流体用スリットノズル

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103464315A (zh) * 2013-08-28 2013-12-25 清华大学深圳研究生院 一种能形成均匀水幕的工艺喷嘴
CN103464315B (zh) * 2013-08-28 2015-12-09 清华大学深圳研究生院 一种能形成均匀水幕的工艺喷嘴
CN103691623A (zh) * 2013-12-23 2014-04-02 清华大学深圳研究生院 实现均匀喷涂低冲击的组合工艺喷嘴
CN103736606A (zh) * 2013-12-23 2014-04-23 清华大学深圳研究生院 集成式出射流道结构工艺喷嘴
CN103691623B (zh) * 2013-12-23 2016-04-06 清华大学深圳研究生院 实现均匀喷涂低冲击的组合工艺喷嘴
CN103736606B (zh) * 2013-12-23 2016-04-06 清华大学深圳研究生院 集成式出射流道结构工艺喷嘴
CN104166318A (zh) * 2014-09-09 2014-11-26 清华大学深圳研究生院 静压出流显影喷嘴
CN106340473A (zh) * 2015-07-06 2017-01-18 芝浦机械电子株式会社 水刀、基板处理装置及基板处理方法
CN106340473B (zh) * 2015-07-06 2020-03-06 芝浦机械电子株式会社 基板处理装置及基板处理方法
CN105045049A (zh) * 2015-07-31 2015-11-11 清华大学深圳研究生院 一种具有排气通道的显影喷嘴
CN105045049B (zh) * 2015-07-31 2019-05-14 清华大学深圳研究生院 一种具有排气通道的显影喷嘴
CN112430897A (zh) * 2020-11-20 2021-03-02 杭州诺邦无纺股份有限公司 一种功能性无纺复合材料及制备方法

Also Published As

Publication number Publication date
JP4156656B1 (ja) 2008-09-24
KR20090051735A (ko) 2009-05-22
JP2009066564A (ja) 2009-04-02
WO2009037887A1 (ja) 2009-03-26
CN101547744B (zh) 2011-08-03
HK1136240A1 (en) 2010-06-25
KR101010032B1 (ko) 2011-01-21

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