ZA9506811B - Dual cylindrical target magnetron with multiple anodes - Google Patents

Dual cylindrical target magnetron with multiple anodes

Info

Publication number
ZA9506811B
ZA9506811B ZA9506811A ZA9506811A ZA9506811B ZA 9506811 B ZA9506811 B ZA 9506811B ZA 9506811 A ZA9506811 A ZA 9506811A ZA 9506811 A ZA9506811 A ZA 9506811A ZA 9506811 B ZA9506811 B ZA 9506811B
Authority
ZA
South Africa
Prior art keywords
cylindrical target
multiple anodes
dual cylindrical
target magnetron
magnetron
Prior art date
Application number
ZA9506811A
Inventor
Peter A Sieck
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US30111494A priority Critical
Application filed by Boc Group Inc filed Critical Boc Group Inc
Publication of ZA9506811B publication Critical patent/ZA9506811B/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
    • H01J37/34Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions operating with cathodic sputtering
    • H01J37/3411Constructional aspects of the reactor
    • H01J37/3438Electrodes other than cathode
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
    • H01J37/34Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions operating with cathodic sputtering
    • H01J37/3402Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405Magnetron sputtering
ZA9506811A 1994-09-06 1995-08-15 Dual cylindrical target magnetron with multiple anodes ZA9506811B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US30111494A true 1994-09-06 1994-09-06

Publications (1)

Publication Number Publication Date
ZA9506811B true ZA9506811B (en) 1996-05-14

Family

ID=23162013

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA9506811A ZA9506811B (en) 1994-09-06 1995-08-15 Dual cylindrical target magnetron with multiple anodes

Country Status (10)

Country Link
US (1) US5645699A (en)
EP (1) EP0701270B1 (en)
JP (1) JPH08170172A (en)
KR (1) KR960010566A (en)
CN (1) CN1126365A (en)
AU (1) AU2857595A (en)
CA (1) CA2156350A1 (en)
DE (2) DE69508011D1 (en)
TW (1) TW315980U (en)
ZA (1) ZA9506811B (en)

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US6093293A (en) * 1997-12-17 2000-07-25 Balzers Hochvakuum Ag Magnetron sputtering source
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US6902813B2 (en) * 2001-09-11 2005-06-07 Cardinal Cg Company Hydrophilic surfaces carrying temporary protective covers
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DE10145201C1 (en) * 2001-09-13 2002-11-21 Fraunhofer Ges Forschung Device for coating substrates having a curved surface contains a pair of rectangular magnetron sources and substrate holders arranged in an evacuated chamber
US6736948B2 (en) * 2002-01-18 2004-05-18 Von Ardenne Anlagentechnik Gmbh Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation
DE60309441T2 (en) * 2002-03-01 2007-09-20 Cardinal Cg Co., Eden Prairie Thin film coating with a transparent primer layer
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US20040129561A1 (en) * 2003-01-07 2004-07-08 Von Ardenne Anlagentechnik Gmbh Cylindrical magnetron magnetic array mid span support
US7014741B2 (en) * 2003-02-21 2006-03-21 Von Ardenne Anlagentechnik Gmbh Cylindrical magnetron with self cleaning target
US20050051422A1 (en) * 2003-02-21 2005-03-10 Rietzel James G. Cylindrical magnetron with self cleaning target
US20050224343A1 (en) * 2004-04-08 2005-10-13 Richard Newcomb Power coupling for high-power sputtering
USRE44155E1 (en) 2004-07-12 2013-04-16 Cardinal Cg Company Low-maintenance coatings
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US20060065524A1 (en) * 2004-09-30 2006-03-30 Richard Newcomb Non-bonded rotatable targets for sputtering
US20060096855A1 (en) * 2004-11-05 2006-05-11 Richard Newcomb Cathode arrangement for atomizing a rotatable target pipe
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US20060278519A1 (en) * 2005-06-10 2006-12-14 Leszek Malaszewski Adaptable fixation for cylindrical magnetrons
US20060278521A1 (en) * 2005-06-14 2006-12-14 Stowell Michael W System and method for controlling ion density and energy using modulated power signals
US20060278524A1 (en) * 2005-06-14 2006-12-14 Stowell Michael W System and method for modulating power signals to control sputtering
WO2007003488A1 (en) * 2005-06-30 2007-01-11 Bekaert Advanced Coatings A module for coating both sides of a substrate in a single pass
US20070080056A1 (en) * 2005-10-07 2007-04-12 German John R Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths
US20070095281A1 (en) * 2005-11-01 2007-05-03 Stowell Michael W System and method for power function ramping of microwave liner discharge sources
US7842355B2 (en) * 2005-11-01 2010-11-30 Applied Materials, Inc. System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
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US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
JP5474796B2 (en) 2007-09-14 2014-04-16 日本板硝子株式会社 Method of manufacturing a low-maintenance coating and low-maintenance coating
EP2091067A1 (en) 2008-02-14 2009-08-19 Applied Materials, Inc. Apparatus for treating a substrate
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US8182662B2 (en) 2009-03-27 2012-05-22 Sputtering Components, Inc. Rotary cathode for magnetron sputtering apparatus
US9388490B2 (en) 2009-10-26 2016-07-12 General Plasma, Inc. Rotary magnetron magnet bar and apparatus containing the same for high target utilization
DE102012206553A1 (en) 2012-04-20 2013-10-24 Von Ardenne Anlagentechnik Gmbh Controlling thickness distribution in vacuum coating of substrate, comprises placing cathode and anode in vacuum chamber, where plasma discharge is generated during treating the substrate in plasma area defined between cathode and substrate
US8674327B1 (en) 2012-05-10 2014-03-18 WD Media, LLC Systems and methods for uniformly implanting materials on substrates using directed magnetic fields
DE102012110284B3 (en) * 2012-10-26 2013-11-14 Von Ardenne Anlagentechnik Gmbh Sputtering coating device, useful in vacuum coating system, comprises support unit having mounting flange and support section, sputtering magnetrons, and vacuum pump, where support section opens into suction port of mounting flange
KR20150012139A (en) * 2013-07-24 2015-02-03 삼성디스플레이 주식회사 Sputtering apparatus and method for forming thin film using the same
DE102014103740B4 (en) * 2014-01-09 2018-11-15 VON ARDENNE Asset GmbH & Co. KG Sputtering arrangement and sputtering method
DE102014114237A1 (en) * 2014-09-30 2016-03-31 Von Ardenne Gmbh Coating system and process for the deposition of layers by magnetron sputtering
DE102015104616A1 (en) * 2015-03-26 2016-09-29 Von Ardenne Gmbh Magnetron assembly and method for operating a Rohrmagnetronanordnung
JP2016204705A (en) * 2015-04-22 2016-12-08 キヤノントッキ株式会社 Film deposition apparatus, and film deposition method
WO2017100118A1 (en) 2015-12-11 2017-06-15 Cardinal Cg Company Method of coating both sides of a substrate
CN105986236A (en) * 2016-06-27 2016-10-05 广东腾胜真空技术工程有限公司 Low-temperature deposition magnetron sputtering coating device and method

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US4465575A (en) * 1981-09-21 1984-08-14 Atlantic Richfield Company Method for forming photovoltaic cells employing multinary semiconductor films
US4466877A (en) * 1983-10-11 1984-08-21 Shatterproof Glass Corporation Magnetron cathode sputtering apparatus
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US4849087A (en) * 1988-02-11 1989-07-18 Southwall Technologies Apparatus for obtaining transverse uniformity during thin film deposition on extended substrate
US5178743A (en) * 1989-06-15 1993-01-12 Microelectronics And Computer Technology Corporation Cylindrical magnetron sputtering system
BE1003701A3 (en) * 1990-06-08 1992-05-26 Saint Roch Glaceries Rotary cathode.
WO1992001081A1 (en) 1990-07-06 1992-01-23 The Boc Group, Inc. Method and apparatus for co-sputtering and cross-sputtering homogeneous films
US5106474A (en) 1990-11-21 1992-04-21 Viratec Thin Films, Inc. Anode structures for magnetron sputtering apparatus
US5108574A (en) * 1991-01-29 1992-04-28 The Boc Group, Inc. Cylindrical magnetron shield structure
JPH062123A (en) * 1992-06-23 1994-01-11 Mitsubishi Heavy Ind Ltd Film forming device by sputtering

Also Published As

Publication number Publication date
AU2857595A (en) 1996-03-21
CN1126365A (en) 1996-07-10
KR960010566A (en) 1996-04-20
DE69508011T2 (en) 1999-07-15
TW315980U (en) 1997-09-11
US5645699A (en) 1997-07-08
EP0701270B1 (en) 1999-03-03
DE69508011D1 (en) 1999-04-08
JPH08170172A (en) 1996-07-02
EP0701270A1 (en) 1996-03-13
CA2156350A1 (en) 1996-03-07

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