WO2025247010A1 - 加热炉 - Google Patents

加热炉

Info

Publication number
WO2025247010A1
WO2025247010A1 PCT/CN2025/095941 CN2025095941W WO2025247010A1 WO 2025247010 A1 WO2025247010 A1 WO 2025247010A1 CN 2025095941 W CN2025095941 W CN 2025095941W WO 2025247010 A1 WO2025247010 A1 WO 2025247010A1
Authority
WO
WIPO (PCT)
Prior art keywords
fixing member
heating
fixing
vacuum cavity
electromagnetic induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/CN2025/095941
Other languages
English (en)
French (fr)
Inventor
朱太荣
郭永胜
张武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laplace Renewable Energy Technology Co Ltd
Original Assignee
Laplace Renewable Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laplace Renewable Energy Technology Co Ltd filed Critical Laplace Renewable Energy Technology Co Ltd
Publication of WO2025247010A1 publication Critical patent/WO2025247010A1/zh
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories or equipment specially adapted for furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B5/14—Arrangements of heating devices

Definitions

  • This application relates to the field of photovoltaic material processing technology, and in particular to a heating furnace.
  • photovoltaic materials and semiconductors are widely used in the new energy industry.
  • chemical vapor deposition (CVD), diffusion, and coating techniques are typically used for chemical treatment to apply the photovoltaic materials or semiconductors to products.
  • CVD chemical vapor deposition
  • diffusion diffusion
  • coating techniques are typically used for chemical treatment to apply the photovoltaic materials or semiconductors to products.
  • the materials are usually placed in heating equipment and reacted under specific temperature and pressure conditions.
  • horizontal heating furnaces are one of the commonly used heating equipment.
  • horizontal heating furnaces have the problem of uneven temperature distribution between the top and bottom during heating, which affects the processing quality.
  • An embodiment of this application provides a heating furnace, including: a shell; a vacuum chamber disposed within the shell, the vacuum chamber being used to contain sheet material; a fixing assembly disposed outside the vacuum chamber; and a heating assembly disposed around the outside of the vacuum chamber and connected to the fixing assembly; wherein the distance between the upper part of the heating assembly and the vacuum chamber is a first gap, and the distance between the lower part of the heating assembly and the vacuum chamber is a second gap, the first gap being greater than the second gap.
  • the heating assembly includes a power module and an electromagnetic induction element, wherein the power module is electrically connected to the electromagnetic induction element; wherein the vacuum chamber is made of metal, and the electromagnetic induction element is insulated from the vacuum chamber.
  • the fixing component includes a first fixing member and a second fixing member.
  • the first fixing member is disposed at the upper part of the vacuum cavity
  • the second fixing member is disposed at the lower part of the vacuum cavity.
  • Both the first fixing member and the second fixing member include a fixing part and a connecting part.
  • the fixing part is connected to the vacuum cavity
  • the connecting part is connected to the electromagnetic induction element.
  • the distance between the fixing part of the first fixing member and the connecting part of the first fixing member is a first distance
  • the distance between the fixing part of the second fixing member and the connecting part of the second fixing member is a second distance.
  • the first distance is greater than the second distance.
  • the fixing component further includes at least one third fixing member, wherein the first fixing member, the second fixing member, and the third fixing member are spaced apart in the circumferential direction of the vacuum cavity.
  • the connecting portion is provided with a limiting hole, which penetrates the connecting portion in the circumferential direction of the vacuum cavity, and the electromagnetic induction element passes through the limiting hole.
  • the electromagnetic induction element is provided with a mounting post; the connecting part is located on the side of the electromagnetic induction element away from the vacuum cavity, the connecting part is provided with a positioning hole, the positioning hole penetrates the connecting part radially in the vacuum cavity, and the mounting post passes through the positioning hole.
  • the electromagnetic induction element has a cooling tank inside, which is used to contain coolant.
  • the vacuum chamber is provided with multiple heating zones along its length, and each heating zone is provided with heating components; the heating furnace also includes multiple temperature sensors, which are respectively disposed in the multiple heating zones.
  • the heating furnace further includes an insulation layer disposed on the outside of the vacuum chamber.
  • the heating furnace provided in this application has a lower part that is closer to the vacuum chamber than the upper part when the heating element is heating. This results in faster heat generation in the lower part of the vacuum chamber compared to the upper part, compensating for the temperature unevenness caused by the upward flow of hot gas. This makes the temperature in the upper and lower parts of the reaction space closer, improving the heating uniformity of the sheet material and thus enhancing processing quality.
  • this heating furnace can improve the quality of the finished product.
  • Figure 1 is a schematic diagram of the structure of the heating furnace according to the first embodiment of this application.
  • Figure 2 is a schematic diagram of the state of the heating furnace of the first embodiment of this application when heating sheet material.
  • Figure 3 is a schematic diagram of the distribution of the heating zone in the first embodiment of this application.
  • Figure 4 is a structural schematic diagram of the fastener according to the first embodiment of this application.
  • Figure 5 is a schematic diagram showing the distribution of the first fastener, the second fastener, and the third fastener according to the first embodiment of this application.
  • Figure 6 is a schematic diagram of the structure of the heating furnace according to the second embodiment of this application.
  • Figure 7 is a schematic diagram of the structure of the electromagnetic induction element according to the second embodiment of this application.
  • Figure 8 is a cross-sectional schematic diagram of the electromagnetic induction element of the second embodiment of this application.
  • Figure 9 is a structural schematic diagram of the fastener according to the second embodiment of this application.
  • Figure 10 is a schematic diagram of the state of the heating furnace of the second embodiment of this application when heating sheet material.
  • the words “exemplary” or “for example” are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as “exemplary” or “for example” in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words “exemplary” or “for example” is intended to present the relevant concepts in a specific manner.
  • a horizontal heating furnace includes an outer shell, heating wires, and a vacuum chamber arranged sequentially from the outside to the inside.
  • the vacuum chamber extends horizontally as a whole, and multiple heating wires are provided, each of which surrounds the outside of the vacuum chamber, and the multiple heating wires are distributed along the length of the vacuum chamber.
  • the material In actual processing, the material needs to be fixed in the center of the reaction space. After the heating wire is energized, it generates heat, which is transferred to the material inside the vacuum chamber through the vacuum chamber. However, during the heating process, the density of the hot gas inside the vacuum chamber is greater than that of the cold gas, causing the hot gas to rise. This results in the upper part of the vacuum chamber heating up faster than the lower part, leading to uneven temperature distribution and affecting the uniformity of material heating and processing quality.
  • this application provides a heating furnace that provides uniform heating and improves processing quality.
  • the heating furnace can be used to chemically process sheet materials, including but not limited to silicon wafers, silicon carbide wafers, or crystal wafers.
  • the heat treatment, electrical treatment, or chemical treatment includes, but is not limited to, chemical vapor deposition or diffusion processes.
  • Figure 1 is a structural schematic diagram of the heating furnace according to the first embodiment of this application.
  • Figure 2 is a schematic diagram of the state of the heating furnace according to the first embodiment of this application when heating sheet material.
  • the heating furnace includes a shell 10, a vacuum chamber 20, a fixing assembly 30, and a heating assembly 40.
  • the vacuum chamber 20 is disposed inside the shell 10, and a gap is left between the outer side of the vacuum chamber 20 and the inner side of the shell 10.
  • the shell 10 is made of a weak magnetic material, preferably a weak magnetic insulating material, such as plastic.
  • the vacuum chamber 20 is generally cylindrical, and a reaction space 21 is formed inside the vacuum chamber 20.
  • the reaction space 21 is used to contain the sheet material 100.
  • the direction of the heating furnace during normal use is used as the directional reference below, that is, the vacuum chamber 20 is placed in a horizontal direction as an example, and the length direction (or axis) of the vacuum chamber 20 is the horizontal direction.
  • the sheet material 100 can be loaded onto a carrier such as a boat.
  • the vacuum chamber 20 is an openable and closable cavity structure. Before processing, the vacuum chamber 20 can be opened, and the boat can be fixed in the reaction space 21 by a fixing mechanism. After the boat is fixed, the sheet material 100 is located at the center of the vacuum chamber 20. Then the vacuum chamber 20 is closed, and the vacuum chamber 20 is evacuated for vacuum treatment.
  • a fixing component 30 is disposed on the outside of the vacuum chamber 20 and connected to the heating component 40.
  • the fixing component 30 is used to fix the vacuum chamber 20 and the heating component 40 relative to each other.
  • the heating component 40 is used to heat the sheet material 100 inside the vacuum chamber 20.
  • the heating component 40 is disposed around the outside of the vacuum chamber 20, and the heating component 40 is distributed along the length direction of the vacuum chamber 20 and covers the vacuum chamber 20.
  • a gap is provided between the heating component 40 and the vacuum chamber 20.
  • the distance between the upper part of the heating component 40 and the vacuum chamber 20 is the first gap T1
  • the distance between the lower part of the heating component 40 and the vacuum chamber 20 is the second gap T2.
  • the first gap T1 is greater than the second gap T2.
  • the lower part of the heating component 40 is closer to the vacuum chamber 20 than the upper part, so that the heat generated in the lower part of the vacuum chamber 20 is faster than the heat generated in the upper part of the vacuum chamber 20, which compensates for the temperature unevenness caused by the upward flow of hot gas, and makes the temperature in the upper part of the reaction space 21 closer to the temperature in the lower part, thereby improving the heating uniformity of the sheet material 100 and improving the processing quality.
  • both the vacuum chamber 20 and the heating component 40 have annular cross-sections in the vertical direction.
  • the outer radius of the vacuum chamber 20 is smaller than the inner radius of the heating component 40, and the height of the center of the vacuum chamber 20 is lower than the height of the center of the heating component 40.
  • the heating furnace uses electromagnetic induction for heating.
  • the vacuum chamber 20 is made of metal, including but not limited to carbon steel and stainless steel.
  • the heating assembly 40 includes a power module 41 and an electromagnetic induction element 42.
  • the power module 41 is electrically connected to the electromagnetic induction element 42, which surrounds the vacuum chamber 20 in a ring shape.
  • the vacuum chamber 20 and the electromagnetic induction element 42 are insulated from each other.
  • the electromagnetic induction element 42 is an induction coil formed by winding oxygen-free copper wire (including but not limited to mica wire).
  • the induction coil is welded with leads and electrically connected to the power module 41 through the leads.
  • the power module 41 is a high-frequency power control box, where high frequency refers to a frequency above 10000 Hz.
  • the power module 41 provides high-frequency current to the electromagnetic induction element 42.
  • the electromagnetic induction element 42 Under the influence of the high-frequency current, the electromagnetic induction element 42 generates a changing magnetic field.
  • the vacuum cavity 20, made of metal, generates an induced current and Joule heat under the influence of the changing magnetic field, thereby providing sufficient reaction temperature for the sheet material 100 in the reaction space 21.
  • the lower part of the electromagnetic induction element 42 is closer to the vacuum cavity 20 than the upper part, there are more electromagnetic lines and induced electromotive force passing through the lower part of the vacuum cavity 20 than in the upper part. This results in a larger induced current and more Joule heat generated in the lower part of the vacuum cavity 20 compared to the upper part. Consequently, the heat generated in the lower part of the vacuum cavity 20 is faster than that generated in the upper part, thus compensating for the temperature unevenness caused by the upward flow of hot gas.
  • the electromagnetic induction element 42 heats the metal vacuum chamber 20 through electromagnetic induction, resulting in rapid heating and high production efficiency.
  • the inner wall of the vacuum chamber 20 will be coated with a film.
  • induction heating has a skin effect, meaning the induced current is concentrated on the outer surface of the vacuum chamber 20, and the heat on the inner surface is transferred through heat conduction.
  • the thickness of the coating on the inner wall of the vacuum chamber 20 has little impact on heat conduction, avoiding the problems of reduced light transmittance and lower heating efficiency associated with resistance heating wires used in related technologies for heating quartz vacuum chambers, where the inner wall of the quartz vacuum chamber is coated.
  • the metal vacuum chamber 20 is less prone to bursting or shattering under high-temperature conditions, reducing subsequent maintenance costs and improving production efficiency.
  • Figure 3 is a schematic diagram of the distribution of the heating zone in the first embodiment of this application.
  • each heating zone 22 is equipped with an electromagnetic induction element 42, so that each heating zone 22 can generate Joule heat. It is understood that the number, length, etc., of the heating zones 22 can be configured according to actual needs, and this application does not impose any limitations on this.
  • the heating furnace also includes multiple temperature sensors 50, which are respectively disposed in multiple heating zones 22.
  • the multiple temperature sensors 50 can detect the actual temperature of each heating zone 22 in real time. It is understood that each heating zone 22 can be configured with one or more temperature sensors 50, and the number, location, etc., of the temperature sensors 50 can be configured according to actual needs; this application does not impose any limitations on this.
  • each heating zone 22 is configured with four temperature sensors 50, which are circumferentially distributed around the inner wall of the vacuum chamber 20.
  • the temperature sensors 50 can be thermocouples.
  • Each power supply module 41 is electrically connected to a multiple electromagnetic induction element 42 distributed in its corresponding heating zone 22. Furthermore, each power supply module 41 is electrically connected to a temperature sensor 50 disposed in its corresponding heating zone 22.
  • the power module 41 can output a current of a specified frequency to multiple electromagnetic induction elements 42 distributed in the corresponding heating zones 22, causing the multiple electromagnetic induction elements 42 to generate a magnetic field of a specified intensity, thereby controlling the heat generated in the vacuum chamber 20.
  • the power module 41 can also adjust the frequency of the current output to the corresponding electromagnetic induction elements 42 based on the temperature data fed back by the temperature sensor 50 and the set target temperature value, so that the actual temperature of the heating zone 22 is maintained at the target temperature value.
  • multiple power modules 41 can control each electromagnetic induction element 42 distributed in multiple heating zones 22 separately, achieving zoned control.
  • Figure 4 is a structural schematic diagram of the first fastener according to the first embodiment of this application.
  • Figure 5 is a schematic diagram showing the distribution of the first fastener, the second fastener, and the third fastener according to the first embodiment of this application.
  • the fixing assembly 30 includes a first fixing member 31 and a second fixing member 32.
  • the first fixing member 31 is disposed on the upper part of the vacuum chamber 20, and the second fixing member 32 is disposed on the lower part of the vacuum chamber 20.
  • Both the first fixing member 31 and the second fixing member 32 include a fixing part 34 and a connecting part 35.
  • the fixing part 34 is connected to the vacuum chamber 20, and the connecting part 35 is connected to the electromagnetic induction element 42.
  • the first fixing member 31 and the second fixing member 32 are connected between the electromagnetic induction element 42 and the vacuum chamber 20, supporting and fixing the electromagnetic induction element 42 and the vacuum chamber 20, so that the inner annular ring of the electromagnetic induction element 42 is separated from the outer annular ring of the vacuum chamber 20 to maintain a specified distance, so as to form a first distance T1 and a second distance T2 between the electromagnetic induction element 42 and the vacuum chamber 20.
  • the distance between the fixing portion 34 and the connecting portion 35 of the first fixing member 31 is a first distance
  • the distance between the fixing portion 34 and the connecting portion 35 of the second fixing member 32 is a second distance, with the first distance being greater than the second distance.
  • first distance of the first fixing member 31 and the second distance of the second fixing member 32 limit the specific values of the first distance T1 and the second distance T2 between the electromagnetic induction element 42 and the vacuum cavity 20.
  • the specific values of the first distance T1 and the second distance T2 can be set according to the degree of compensation for the temperature unevenness caused by the upward flow of hot gas, and the first distance of the first fixing member 31 and the second distance of the second fixing member 32 can also be adaptively adjusted according to the specific values of the first distance T1 and the second distance T2.
  • the heating furnace is defined to have a spacing coefficient K, which is used to indicate the spacing deviation between the first spacing T1 and the second spacing T2.
  • the spacing coefficient K (first spacing T1 - second spacing T2) / first spacing T1.
  • the value range of the spacing coefficient K is [0.4, 1].
  • the heating furnace is defined to have a temperature difference coefficient Qs, which indicates the temperature difference between the top and bottom temperatures of the heating furnace.
  • the temperature difference coefficient Qs (top temperature value Qt - bottom temperature value Qb) / top temperature value Qt.
  • the required range for the temperature difference coefficient Qs is ⁇ 3%.
  • the top temperature value Qt is the measured data of the top temperature of the heating furnace
  • the bottom temperature value Qb is the measured data of the bottom temperature of the heating furnace.
  • the diameter of the vacuum chamber 20 (i.e., the diameter of the heating furnace tube) is set to 470 mm, and the diameter of the electromagnetic induction element 42 is set to 540 mm.
  • the target temperature of the heating furnace is set to 600°C.
  • the time for the heating furnace to rise from room temperature to the target temperature is set to 20 minutes.
  • the temperature measurement positions of the heating furnace are set as top and bottom temperature measurement points.
  • the top temperature measurement point is located 5mm from the top of the furnace, and multiple top temperature measurement points are distributed along the axial direction of the heating furnace (such as at the furnace opening, furnace tail, and middle).
  • the bottom temperature measurement point is located 5mm from the bottom of the furnace, and multiple bottom temperature measurement points are distributed along the axial direction of the heating furnace (such as at the furnace opening, furnace tail, and middle).
  • the average temperature of multiple top temperature measuring points was recorded as the top temperature value Qt
  • the average temperature of multiple bottom temperature measuring points was recorded as the bottom temperature value Qb.
  • the spacing coefficient K was set to 1, and the corresponding top temperature value Qt, bottom temperature value Qb, and temperature difference coefficient Qs were recorded.
  • the spacing coefficient K was set to 0.8, and the corresponding top temperature value Qt, bottom temperature value Qb, and temperature difference coefficient Qs were recorded.
  • the spacing coefficient K was set to 0.6, and the corresponding top temperature value Qt, bottom temperature value Qb, and temperature difference coefficient Qs were recorded.
  • the spacing coefficient K was set to 0.4, and the corresponding top temperature value Qt, bottom temperature value Qb, and temperature difference coefficient Qs were recorded.
  • the recorded data for each group of experiments are shown in Table 1.
  • the fixing assembly 30 further includes at least one third fixing member 33.
  • the first fixing member 31, the second fixing member 32, and the third fixing member 33 are distributed at intervals in the circumferential direction of the vacuum cavity 20.
  • the third fixing member 33 also includes a fixing part 34 and a connecting part 35.
  • the third fixing member 33 is connected to the vacuum cavity 20 through the fixing part 34 and connected to the electromagnetic induction element 42 through the connecting part 35.
  • first fixing member 31, the second fixing member 32 and the third fixing member 33 form a multi-point support structure distributed around the vacuum cavity 20 to improve the stability between the electromagnetic induction elements 42 and prevent the relative displacement between the vacuum cavity 20 and the electromagnetic induction elements 42 from causing a change in the distance between them.
  • the number of third fixing members 33 is two, with the first fixing member 31, the second fixing member 32, and the two third fixing members 33 distributed vertically and horizontally relative to the vacuum cavity 20.
  • the number of third fixing members 33 may also be one, with the first fixing member 31, the second fixing member 32, and the third fixing member 33 distributed in a triangle relative to the vacuum cavity 20, i.e., the second fixing member 32 and the third fixing member 33 are located to the lower left and lower right of the first fixing member 31, respectively.
  • the specific number of third fixing members 33 can be configured according to the required fixing strength between the vacuum cavity 20 and the electromagnetic induction element 42, and the distribution direction of the third fixing members 33 can also be adaptively adjusted; this application does not impose any limitations on this.
  • the first fixing member 31, the second fixing member 32, and the third fixing member 33 are all elongated strips.
  • the width direction of the first fixing member 31, the second fixing member 32, and the third fixing member 33 are all arranged radially corresponding to the vacuum cavity 20, and the length direction of the first fixing member 31, the second fixing member 32, and the third fixing member 33 are all arranged longitudinally corresponding to the vacuum cavity 20.
  • a fixing portion 34 is formed on the side of the first fixing member 31, the second fixing member 32, and the third fixing member 33 facing the vacuum cavity 20, and a connecting portion 35 is formed on the side of the first fixing member 31, the second fixing member 32, and the third fixing member 33 away from the vacuum cavity 20.
  • the fixing part 34 is detachably fixed to the vacuum chamber 20, so that the user can replace the first fixing part 31, the second fixing part 32 or the third fixing part 33, thereby completing the disassembly and assembly of the electromagnetic induction element 42, which facilitates the later maintenance of the heating furnace.
  • hooks are provided at both ends of the vacuum chamber 20.
  • Through holes are provided at both ends of the fixing part 34 for the hooks to pass through.
  • the hooks can be structures formed by winding high-temperature resistant wires, such as quartz wire or high-silica wire, through the through holes.
  • the fixing part 34 can also be detachably installed in the vacuum chamber 20 by means of bolting, snap-fitting, etc., to achieve the effect of convenient assembly and disassembly, and this application does not impose any restrictions on this.
  • the fixing part 34 can also be directly bonded to the vacuum chamber 20 by high-temperature adhesive.
  • the connecting portion 35 is provided with a limiting hole 351.
  • the limiting hole 351 extends through both sides of the connecting portion 35 in the circumferential direction of the vacuum cavity 20, and the electromagnetic induction element 42 passes through the limiting hole 351.
  • the limiting hole 351 simultaneously limits the electromagnetic induction element 42 in both the radial and longitudinal directions of the vacuum cavity 20, so that the electromagnetic induction element 42 and the vacuum cavity 20 maintain a specified distance and are relatively fixed.
  • the limiting holes 351 of the first fixing member 31, the limiting holes 351 of the second fixing member 32, and the limiting holes 351 of the third fixing member 33 are distributed at intervals in the circumferential direction of the vacuum cavity 20, so that the electromagnetic induction element 42 can be respectively inserted through multiple limiting holes 351 in the circumferential direction of the vacuum cavity 20 to limit and fix the electromagnetic induction element 42 in different directions (such as up, down, left, and right), and to maintain a specified distance between each part of the electromagnetic induction element 42 and the vacuum cavity 20.
  • the first fixing element 31, the second fixing element 32 and the third fixing element 33 can be fixed to the vacuum cavity 20, and then the electromagnetic induction element 42 can be wound through the limiting holes 351 of the first fixing element 31, the second fixing element 32 and the third fixing element 33 respectively.
  • the connecting part 35 is provided with a plurality of limiting holes 351.
  • the plurality of limiting holes 351 are distributed at intervals along the length direction of the connecting part 35, and the plurality of limiting holes 351 correspond to a plurality of electromagnetic induction elements 42, so that the same connecting part 35 can simultaneously limit and fix a plurality of electromagnetic induction elements 42 through the plurality of limiting holes 351.
  • the vacuum chamber 20 is detachably fixed to the outer shell 10.
  • Flanges are provided at both ends of the vacuum chamber 20, and the flanges are fixedly welded to the vacuum chamber 20.
  • Mounting plates corresponding to the flanges are provided at both ends of the outer shell 10, and the flanges are bolted to the corresponding mounting plates, so that the vacuum chamber 20 is detachably fixed to the outer shell 10.
  • the actual heat source of the heating furnace is the vacuum chamber 20.
  • the vacuum chamber 20 malfunctions, it can be disassembled from the outer shell 10 for repair, reducing the difficulty and cost of later equipment maintenance.
  • the heating furnace further includes a heat insulation layer 60, which is disposed on the outside of the vacuum chamber 20.
  • the heat insulation layer 60 has a heat preservation effect on the vacuum chamber 20, reducing heat loss and improving heat utilization.
  • the heat insulation layer 60 is formed by filling the space between the outer shell 10 and the vacuum chamber 20 with heat insulation material, which includes, but is not limited to, aluminum silicate.
  • Figure 6 is a structural schematic diagram of the heating furnace according to the second embodiment of this application.
  • Figure 7 is a structural schematic diagram of the electromagnetic induction element according to the second embodiment of this application.
  • Figure 8 is a cross-sectional schematic diagram of the electromagnetic induction element according to the second embodiment of this application.
  • the electromagnetic induction element 42 is tubular.
  • the electromagnetic induction element 42 is a circular copper tube, the cross-section of which can be square or circular. Leads are welded to the copper tube, and the copper tube is electrically connected to the power module 41 through the leads.
  • the electromagnetic induction element 42 has a cooling tank 421 inside, which is used to contain coolant.
  • the cooling tank 421 can be connected to a coolant supply device (not shown in the figure) through a pipeline structure.
  • the coolant supply device can supply coolant to the cooling tank 421.
  • the coolant flows through the interior of the electromagnetic induction element 42 and carries away some of the heat, thereby achieving a cooling effect.
  • the electromagnetic induction element 42 is provided with a plurality of mounting posts 422, which extend radially along the electromagnetic induction element 42.
  • the mounting posts 422 are welded and fixed to the outer side of the electromagnetic induction element 42.
  • Figure 9 is a structural schematic diagram of the first fixing member according to the second embodiment of this application.
  • Figure 10 is a schematic diagram of the state of the heating furnace according to the second embodiment of this application when heating sheet material.
  • the first fixing member 31, the second fixing member 32, and the third fixing member 33 all include a fixing portion 34 and a connecting portion 35.
  • the connecting portion 35 extends along the length of the vacuum cavity 20 and is provided with a plurality of positioning holes 352, which penetrate the connecting portion 35 radially through the vacuum cavity 20.
  • the plurality of positioning holes 352 are spaced apart along the length of the connecting portion 35.
  • a fixing part 34 is disposed on the side of the connecting part 35 facing the vacuum chamber 20, and the fixing part 34 extends radially along the vacuum chamber 20.
  • the length of the fixing part 34 of the first fixing member 31 forms a first distance
  • the length of the fixing part 34 of the second fixing member 32 forms a second distance. It can be understood that the lengths of the fixing parts 34 of the first fixing member 31, the second fixing member 32, and the third fixing member 33 can be configured according to the specified distance between the electromagnetic induction element 42 and the vacuum chamber 20.
  • the fixing part 34 has multiple fixing parts 34, which are spaced apart along the length of the connecting part 35, and a limiting space 341 is formed between two adjacent fixing parts 34.
  • the multiple fixing parts 34 are staggered with multiple positioning holes 352, so that the multiple positioning holes 352 are respectively connected to the limiting space 341 between the multiple fixing parts 34.
  • the distance between two adjacent fixing parts 34 is greater than or equal to the width of the electromagnetic induction element 42.
  • Multiple mounting posts 422 are distributed corresponding to the first fixing part 31, the second fixing part 32, and the third fixing part 33, and the positioning holes 352 are all adapted to the mounting posts 422.
  • Multiple electromagnetic induction elements 42 are housed in multiple limiting spaces 341, with the mounting posts 422 of the electromagnetic induction elements 42 passing through the corresponding positioning holes 352, and the connecting part 35 abutting against the side of the electromagnetic induction element 42 away from the vacuum chamber 20. Through the abutment of the connecting part 35 against the electromagnetic induction element 42 and the positioning engagement of the positioning holes 352 with the mounting posts 422, the electromagnetic induction element 42 is relatively fixed to the vacuum chamber 20.
  • one end of the mounting post 422 passes through the positioning hole 352 and protrudes into the connecting portion 35, and the periphery of the mounting post 422 is provided with a threaded surface.
  • the connecting portion 35 is also provided with a locking nut 423, which is adapted to the mounting post 422.
  • the locking nut 423 is threadedly connected to the end of the mounting post 422 exposed in the connecting portion 35, and causes the electromagnetic induction element 42 to abut against the connecting portion 35.
  • the mounting post 422 is locked in the positioning hole 352 by the locking nut 423, so that the multiple mounting posts 422 of the electromagnetic induction element 42 are respectively fixed to the connecting portion 35.
  • the fixing portions 34 of the first fixing member 31, the second fixing member 32, and the third fixing member 33 limit the electromagnetic induction element 42 in the length direction of the vacuum cavity 20
  • the connecting portions 35 of the first fixing member 31, the second fixing member 32, and the third fixing member 33 limit the electromagnetic induction element 42 in the radial direction of the vacuum cavity 20
  • the positioning holes 352 of the first fixing member 31, the second fixing member 32, and the third fixing member 33 limit the electromagnetic induction element 42 in the circumferential direction of the vacuum cavity 20.
  • the multi-point support structure distributed around the electromagnetic induction element 42 by the first fixing member 31, the second fixing member 32, and the third fixing member 33 improves the stability of the electromagnetic induction element 42.

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Abstract

本申请提供一种加热炉，包括：外壳；真空腔体，设置于外壳内，真空腔体用于收容片状材料；固定组件，设置于真空腔体的外侧；加热组件，围绕真空腔体的外侧设置，且连接于固定组件；其中，加热组件的上部与真空腔体之间的距离为第一间距，加热组件的下部与真空腔体之间的距离为第二间距，第一间距大于第二间距。当加热组件进行加热时，加热组件的下部相较于上部更接近于真空腔体，使得真空腔体下部的加热温度相较于真空腔体上部的加热温度更高，补偿了热气上流导致的温度不均匀，使得反应空间上部的温度与下部的温度更加接近，提高片状材料的加热均匀性，进而提升加工质量。

Description

加热炉
相关申请的交叉引用
本申请要求于2024年5月31日提交中国专利局，申请号为202421239597.0，专利申请名称为“加热炉”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉光伏材料加工技术领域，尤其涉及一种加热炉。
背景技术
目前，光伏材料或半导体广泛应用于新能源行业，而在光伏材料或半导体的加工过程中，通常会采用化学气相沉积(Chemical Vapor Deposition，CVD)、扩散、镀膜等加工技术进行化学处理，将光伏材料或半导体应用到产品上。在上述加工技术的处理过程中，通常需要将材料放入加热设备中，在一定的温度和压力条件下进行反应。
相关技术中，卧式加热炉是常用的加热设备之一，但是卧式加热炉存在加热时上下温度不均匀，影响加工质量的问题。
发明内容
鉴于以上内容，有必要提供一种加热炉，以解决上述缺陷。
本申请的实施例提供一种加热炉，包括：外壳；真空腔体，设置于外壳内，真空腔体用于收容片状材料；固定组件，设置于真空腔体的外侧；加热组件，围绕真空腔体的外侧设置，且连接于固定组件；其中，加热组件的上部与真空腔体之间的距离为第一间距，加热组件的下部与真空腔体之间的距离为第二间距，第一间距大于第二间距。
在一些实施例中，加热组件包括电源模块和电磁感应件，电源模块与电磁感应件电连接；其中，真空腔体为金属材质，且电磁感应件与真空腔体之间绝缘设置。
在一些实施例中，固定组件包括第一固定件和第二固定件，第一固定件设置于真空腔体的上部，第二固定件设置于真空腔体的下部；第一固定件和第二固定件都包括固定部和连接部，固定部连接于真空腔体，连接部连接于电磁感应件；第一固定件的固定部与第一固定件的连接部之间的距离为第一距离，第二固定件的固定部与第二固定件的连接部之间的距离为第二距离，第一距离大于第二距离。
在一些实施例中，固定组件还包括至少一个第三固定件，第一固定件、第二固定件和第三固定件在真空腔体的周向上间隔分布。
在一些实施例中，连接部设置有限位孔，限位孔在真空腔体的周向上贯穿连接部，电磁感应件穿设于限位孔。
在一些实施例中，电磁感应件设置有安装柱；连接部位于电磁感应件远离真空腔体的一侧，连接部设置有定位孔，定位孔在真空腔体的径向上贯穿连接部，安装柱穿设于定位孔。
在一些实施例中，固定组件还包括锁紧螺母，安装柱的周侧设置有螺纹面；安装柱的一端穿过定位孔外露于连接部，并与锁紧螺母螺纹连接。
在一些实施例中，电磁感应件内部设置有冷却槽，冷却槽用于收容冷却液。
在一些实施例中，真空腔体沿长度方向设置有多个加热区，每一个加热区均分布有加热组件；加热炉还包括多个温度传感器，多个温度传感器分别设置于多个加热区。
在一些实施例中，加热炉还包括保温层，保温层设置于真空腔体的外侧。
本申请提供的加热炉，当加热组件进行加热时，加热组件的下部相较于上部更接近于真空腔体，使得真空腔体下部的产生热量相较于真空腔体上部的产生热量更快，补偿了热气上流导致的温度不均匀，使得反应空间上部的温度与下部的温度更加接近，提高片状材料的加热均匀性，进而提升加工质量。这种加热炉在应用于化学气相沉积、扩散、镀膜等加工技术对应的设备中时，可以提高成品质量。
附图说明
图1为本申请的第一实施例的加热炉的结构示意图。
图2为本申请的第一实施例的加热炉在对片状材料进行加热时的状态示意图。
图3为本申请的第一实施例的加热区的分布示意图。
图4为本申请的第一实施例的固定件的结构示意图。
图5为本申请的第一实施例的第一固定件、第二固定件和第三固定件的分布示意图。
图6为本申请的第二实施例的加热炉的结构示意图。
图7为本申请的第二实施例的电磁感应件的结构示意图。
图8为本申请的第二实施例的电磁感应件的剖面示意图。
图9为本申请的第二实施例的固定件的结构示意图。
图10为本申请的第二实施例的加热炉在对片状材料进行加热时的状态示意图。
附图标记说明如下：
10、外壳；20、真空腔体；21、反应空间；22、加热区；30、固定组件；31、第一固定
件；32、第二固定件；33、第三固定件；34、固定部；341、限位空间；35、连接部；351、限位孔；352、定位孔；40、加热组件；41、电源模块；42、电磁感应件；421、冷却槽；422、安装柱；423、锁紧螺母；50、温度传感器；60、保温层；100、片状材料。
具体实施方式
下面将结合本申请实施方式中的附图，对本申请实施方式中的技术方案进行清楚、完整地描述，显然，所描述的实施方式仅是本申请一部分实施方式，而不是全部的实施方式。
本申请中所涉及的多个，是指两个或两个以上。另外，需要理解的是，在本申请的描述中，“第一”、“第二”等词汇，仅用于区分描述的目的，而不能理解为指示或暗示相对重要性，也不能理解为指示或暗示顺序。
在本申请实施例的描述中，“示例性的”或者“例如”等词用于表示作例子、例证或说明。本申请实施例中被描述为“示例性的”或者“例如”的任何实施例或设计方案不应被解释为比其它实施例或设计方案更优选或更具优势。确切而言，使用“示例性的”或者“例如”等词旨在以具体方式呈现相关概念。
相关技术中，卧式加热炉包括有从外到内依次分布的外壳、加热丝、真空腔体，其中，真空腔体整体沿水平方向延伸，加热丝设置有多个，每一个加热丝均围绕于真空腔体的外侧，且多个加热丝沿真空腔体的长度方向分布。
在实际加工时，需要将材料固定在反应空间的中部，加热丝通电后发出热量，热量透过真空腔体传递给其内部的材料。但是，在加热过程中，真空腔体内热气的密度比冷气的密度大，导致热气上流的现象，使得真空腔体的上部产生温度相较于真空腔体的下部更快，存在上下温度不均匀的问题，影响了材料的加热均匀性和加工质量。
另一方面，相关技术中，通常采用电阻式加热丝对石英材质的真空腔体加热，加热速度慢，热滞后性大，且在长期使用后真空腔体的内壁会被镀膜，透光性变差，降低了加热效率。同时，石英材质的真空腔体在高温环境下可能会发生炸管碎裂，残渣留在电热丝上难以清理需要替换，提高生产成本。
为此，本申请提供一种加热炉，具有均匀加热，提高加工质量的效果。其中，加热炉可以用于对片状材料进行化学处理，片状材料包括但不限于硅片、碳化硅片或晶圆等，热处理、电处理或化学处理包括但不限于化学气相沉积处理或扩散工艺处理等。
图1为本申请的第一实施例的加热炉的结构示意图。图2为本申请的第一实施例的加热炉在对片状材料进行加热时的状态示意图。
如图1和图2所示，加热炉包括有外壳10、真空腔体20、固定组件30和加热组件40，其中，真空腔体20设置于外壳10的内部，且真空腔体20的外侧与外壳10的内侧之间留有间距。在本实施例中，外壳10采用弱磁材质，优选为弱磁绝缘材质，例如塑料材质。
真空腔体20整体呈圆管状，真空腔体20的内部形成有反应空间21，反应空间21用于收容片状材料100。为方便描述，下文以加热炉在正常使用时的方向作为方向参考，即以真空腔体20以水平方向放置作为示例，真空腔体20的长度方向(或轴向)为水平方向。
示例性的，片状材料100可以装载于载具如舟上。真空腔体20为可开启关闭的腔体结构。在进行加工之前，可以打开真空腔体20，并将舟通过固定机构固定在反应空间21内，舟固定完成后，片状材料100位于真空腔体20的中心处，然后真空腔体20封闭，并对真空腔体20内抽气作真空处理。
固定组件30设置于真空腔体20的外侧，并与加热组件40连接。固定组件30用于使真空腔体20与加热组件40相对固定。加热组件40用于对真空腔体20内的片状材料100进行加热。加热组件40围绕真空腔体20的外侧设置，且加热组件40沿真空腔体20的长度方向分布并覆盖于真空腔体20。
加热组件40与真空腔体20之间设置有间距，其中，加热组件40的上部与真空腔体20之间的距离为第一间距T1，加热组件40的下部与真空腔体20之间的距离为第二间距T2，第一间距T1大于第二间距T2。
通过本申请提供的加热炉，当加热组件40进行加热时，加热组件40的下部相较于上部更接近于真空腔体20，使得真空腔体20下部的产生热量相较于真空腔体20上部的产生热量更快，补偿了热气上流导致的温度不均匀，使得反应空间21上部的温度与下部的温度更加接近，提高片状材料100的加热均匀性，进而提升加工质量。
在本实施例中，真空腔体20与加热组件40在竖直方向上的截面均呈圆环形，其中，真空腔体20的外环半径小于加热组件40的内环半径，且真空腔体20的圆心的高度低于加热组件40的圆心的高度，以使加热组件40的上部与真空腔体20的上部之间的最短距离为第一间距T1，加热组件40的下部与真空腔体20的下部之间的最短距离为第二间距T2。可以理解，第一间距T1、第二间距T2的具体数值，可以根据实际需求如进行配置，本申请对此不进行限制。
在本实施例中，加热炉采用电磁感应的方式进行加热。具体地，真空腔体20为金属材质，包括但不限于碳钢、不锈钢等。加热组件40包括有电源模块41和电磁感应件42，电源模块41电连接于电磁感应件42，电磁感应件42呈圆环状围绕真空腔体20，真空腔体20与电磁感应件42之间绝缘设置。
在本实施例中，电磁感应件42采用无氧铜线(包括但不限于云母线)缠绕形成的感应线圈，感应线圈焊接有引线，并通过引线与电源模块41电连接。电源模块41为高频电源控制箱，其中，高频指的是频率在10000HZ以上。
在实际应用中，电源模块41能够向电磁感应件42提供高频电流，电磁感应件42在高频电流的作用下产生变化的磁场，金属材质的真空腔体20在变化的磁场作用下产生感应电流，并产生焦耳热，进而为反应空间21内的片状材料100提供足够的反应温度。并且，由于电磁感应件42的下部相较于上部更接近于真空腔体20，通过真空腔体20下部的电磁线及感应电动势相较于上部更多，使得真空腔体20下部产生的感应电流相较于上部更大，产生的焦耳热也更多，从而使得真空腔体20下部的产生热量相较于真空腔体20上部的产生热量更快，达到补偿了热气上流导致的温度不均匀的目的。
可以理解，电磁感应件42依靠电磁感应对金属材质的真空腔体20进行加热，加热速度快，提高生产效率高。在长期工作之后，真空腔体20的内壁会被镀上膜，但是，感应加热具有集肤效应，感应电流集中在真空腔体20的外表层，内表层的热量是依靠内表层的热传导进行，真空腔体20内壁的镀膜的厚度对热传导的影响较少，避免了相关技术中采用电阻式加热丝对石英真空腔加热的方式，由于石英真空腔内壁会被镀膜，透光性变差且降低加热效率的问题。并且，金属材质的真空腔体20在高温环境下不易于发生炸管碎裂，减少了对设备的后期维护成本，提高生产效益。
图3为本申请的第一实施例的加热区的分布示意图。
如图2和图3所示，在本实施例中，电磁感应件42具有多个，多个电磁感应件42沿真空腔体20的长度方向间隔分布。真空腔体20沿长度方向设置有多个加热区22，每一个加热区22均分布有电磁感应件42，以使每一个加热区22均可以产生焦耳热。可以理解，加热区22的数量、长度等可以根据实际需求进行配置，本申请对此不进行限制。
加热炉还包括有多个温度传感器50，多个温度传感器50分别设置于多个加热区22。多个温度传感器50可以实时检测各个加热区22的实际温度。可以理解，每一个加热区22可以配置一个或多个温度传感器50，温度传感器50的数量、位置等可以根据实际需求进行配置，本申请对此不进行限制。示例性的，每一个加热区22配置有4个温度传感器50，各个温度传感器50围绕真空腔体20的内壁圆周间隔分布，温度传感器50可以采用热电偶。
电源模块41具有多个，多个电源模块41与多个加热区22相对应。多个电源模块41分别电连接于分布在对应加热区22的多个电磁感应件42。并且，多个电源模块41分别电连接于设置在对应加热区22的温度传感器50。
在实际工作中，电源模块41能够向分布在对应的加热区22的多个电磁感应件42输出指定频率的电流，使多个电磁感应件42产生指定强度的磁场，从而控制真空腔体20的产生的热量。电源模块41还可以根据温度传感器50反馈的温度数据和设定的目标温度值，调整向对应电磁感应件42输出的电流的频率，以使加热区22的实际温度维持在目标温度值。并且，多个电源模块41可以分别对分布在多个加热区22的各个电磁感应件42进行控制，实现分区控制。
图4为本申请的第一实施例的第一固定件的结构示意图。图5为本申请的第一实施例的第一固定件、第二固定件和第三固定件的分布示意图。
如图2、图4和图5所示，固定组件30包括有第一固定件31和第二固定件32，第一固定件31设置于真空腔体20的上部，第二固定件32设置于真空腔体20的下部。第一固定件31和第二固定件32都包括固定部34和连接部35，固定部34连接于真空腔体20，连接部35连接于电磁感应件42。第一固定件31和第二固定件32连接于电磁感应件42与真空腔体20之间，对电磁感应件42与真空腔体20进行支撑和固定，使电磁感应件42的环形内圈与真空腔体20的环形外圈之间隔开以保持有指定的间距，以在电磁感应件42与真空腔体20之间形成第一间距T1和第二间距T2。
第一固定件31的固定部34与第一固定件31的连接部35之间的距离为第一距离，第二固定件32的固定部34与第二固定件32的连接部35之间的距离为第二距离，第一距离大于第二距离。如此，第一固定件31隔开电磁感应件42与真空腔体20的距离较短，第二固定件32隔开电磁感应件42与真空腔体20的距离较长，以使第一间距T1大于第二间距T2。
可以理解，第一固定件31的第一距离和第二固定件32的第二距离限制了电磁感应件42与真空腔体20之间的第一间距T1和第二间距T2的具体数值。在实际应用中，第一间距T1和第二间距T2的具体数值可以根据对热气上流导致的温度不均匀的补偿程度进行设定，第一固定件31的第一距离和第二固定件32的第二距离也可以根据第一间距T1和第二间距T2的具体数值进行适应性调整。
在本申请实施例中，定义加热炉具有间距系数K，间距系数K用于指示第一间距T1和第二间距T2之间的间距偏差，间距系数K＝(第一间距T1－第二间距T2)/第一间距T1。间距系数K的取值范围为[0.4,1]。
在本申请实施例中，定义加热炉具有温差系数Qs，温差系数Qs用于指示加热炉的顶部温度和底部温度之间的温差，温差系数Qs＝(顶部温度值Qt－底部温度值Qb)/顶部温度值Qt。温差系数Qs的要求范围为±3％。其中，顶部温度值Qt为加热炉的顶部温度的测量数据，底部温度值Qb为加热炉的底部温度的测量数据。
下文以不同的间距系数K作为实验条件进行测试实验，并对加热炉的加热效果进行说明。
其中，真空腔体20的直径(即加热炉的管径)设定为470mm，电磁感应件42的直径设定为540mm。加热炉的目标温度设定为600℃。加热炉从常温升到目标温度的时间设定为20min。
加热炉的测温位置设定为顶部测温点和底部测温点，顶部测温点为距离顶部5mm的位置，顶部测温点沿加热炉的轴向分布有多个(如炉口、炉尾和中部)。底部测温点为距离底部5mm的位置，底部测温点沿加热炉的轴向分布有多个(如炉口、炉尾和中部)。
在各组实验中，记录多个顶部测温点的温度平均值作为顶部温度值Qt，记录多个底部测温点的温度平均值作为底部温度值Qb。
在第一组实验中，间距系数K设定为1，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。在第二组实验中，间距系数K设定为0.8，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。在第三组实验中，间距系数K设定为0.6，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。在第四组实验中，间距系数K设定为0.4，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。在第五组实验中，间距系数K设定为0.2，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。在对比组实验中，间距系数K设定为0，即第一间距T1＝第二间距T2，记录对应的顶部温度值Qt、底部温度值Qb及温差系数Qs。上述各组实验的记录数据如表1所示。
表1-实验数据对比表
结合表1中的数据可验证，在间距系数K的取值范围为[0.4,1]的情况下，温差系数Qs可以达到±3％，以满足相应的工艺需求，加热效果更佳。
在本实施例中，固定组件30还包括至少一个第三固定件33，第一固定件31、第二固定件32和第三固定件33在真空腔体20的周向上间隔分布。第三固定件33也包括有固定部34和连接部35，第三固定件33通过固定部34连接真空腔体20，并通过连接部35连接电磁感应件42。
可以理解，第一固定件31、第二固定件32和第三固定件33形成围绕真空腔体20分布的多点支撑结构，以提高电磁感应件42之间的稳固性，防止真空腔体20与电磁感应件42发生相对位移导致两者之间发生间距变化。
示例性的，第三固定件33的数量为2，第一固定件31、第二固定件32和两个第三固定件33相对于真空腔体20呈上下左右分布。在其他实施例中，第三固定件33的数量也可以为1，第一固定件31、第二固定件32和第三固定件33相对于真空腔体20呈三角形分布，即第二固定件32和第三固定件33分别位于第一固定件31的左下方和右下方。可以理解，第三固定件33的具体数量可以根据真空腔体20与电磁感应件42之间所需要的固定强度进行配置，第三固定件33的分布方向也可以适应性进行调整，本申请对此不进行限制。
在本实施例中，第一固定件31、第二固定件32和第三固定件33均呈长条板状，第一固定件31、第二固定件32和第三固定件33的宽度方向均对应于真空腔体20的径向设置，第一固定件31、第二固定件32和第三固定件33的长度方向均对应于真空腔体20的长度方向设置。第一固定件31、第二固定件32和第三固定件33朝向真空腔体20的一侧形成固定部34，第一固定件31、第二固定件32和第三固定件33背离真空腔体20的一侧形成连接部35。
在本实施例中，固定部34可拆卸固定于真空腔体20，以方便用户对第一固定件31、第二固定件32或第三固定件33进行更换，从而完成对电磁感应件42的拆装，便于对加热炉的后期维护。
示例性的，真空腔体20的两端分别设置有挂钩件(图中未示出)。固定部34的两端分别设置有供挂钩件穿设通孔(图中未示出)。通过将挂钩件穿过固定部34的通孔，可将固定部34悬挂固定于真空腔体20。在需要拆卸固定部34时，可将固定部34从挂钩件上取出即可。其中，挂钩件可以为由耐高温线如石英线、高硅氧线等穿过通孔缠绕形成的结构。
在其他实施例中，固定部34也可以通过栓接、卡接等方式可拆卸安装于真空腔体20，达到方便拆装的效果即可，本申请对此不进行限制。在其他实施例中，固定部34还可以通过高温胶将直接粘接固定于真空腔体20。
在本实施例中，连接部35设置有限位孔351。限位孔351在真空腔体20的周向上贯穿连接部35的两侧，电磁感应件42穿设于限位孔351。限位孔351同时在真空腔体20的径向和长度方向上对电磁感应件42进行限位，以使电磁感应件42与真空腔体20之间保持指定的间距并相对固定。
其中，第一固定件31的限位孔351、第二固定件32的限位孔351和第三固定件33的限位孔351在真空腔体20的周向上间隔分布，以使电磁感应件42能够在真空腔体20的周向上分别穿设于多个限位孔351，以对电磁感应件42在不同的方向(如上、下、左、右)进行限位和固定，并使电磁感应件42的各个部位分别与真空腔体20之间保持指定的间距。
在安装线圈状的电磁感应件42，可将第一固定件31、第二固定件32和第三固定件33固定于真空腔体20，再将电磁感应件42分别穿设于第一固定件31、第二固定件32和第三固定件33的限位孔351进行缠绕。
在本实施例中，连接部35设置有多个限位孔351，多个限位孔351在连接部35的长度方向上间隔分布，且多个限位孔351与多个电磁感应件42相对应，以使同一个连接部35可以通过多个限位孔351同时对多个电磁感应件42进行限位和固定。
在本实施例中，真空腔体20可拆卸固定于外壳10。真空腔体20的两端分别设置有法兰盘，法兰盘固定焊接于真空腔体20。外壳10的两端分别设置有与法兰盘相对应的安装盘，法兰盘与对应的安装盘栓接固定，以使真空腔体20可拆卸固定于外壳10。
可以理解，加热炉实际的发热源为真空腔体20，当真空腔体20出现异常时，可将真空腔体20从外壳10中拆卸出来进行维修，降低设备后期维护的难度和成本。
在本实施例中，加热炉还包括有保温层60，保温层60设置于真空腔体20的外侧。保温层60对真空腔体20具有保温作用，减少热量流失，提高热量利用率。示例性的，保温层60采用保温材料在外壳10与真空腔体20之间填充形成，保温材料包括但不限于硅酸铝。
图6为本申请的第二实施例的加热炉的结构示意图。图7为本申请的第二实施例的电磁感应件的结构示意图。图8为本申请的第二实施例的电磁感应件的剖面示意图。
如图6、图7和图8所示，在本实施例中，电磁感应件42呈管状，示例性的，电磁感应件42采用圆环形铜管，铜管的截面可以为方形或圆形。铜管焊接有引线，铜管通过引线与电源模块41电连接。
电磁感应件42内部形成有冷却槽421，冷却槽421用于收容冷却液。冷却槽421可以通过管路结构连通于冷却液供给装置(图中未示出)，在需要对电磁感应件42进行降温时，冷却液供给装置可向冷却槽421输送冷却液，冷却液流经电磁感应件42的内部带走部分热量，达到降温效果。
电磁感应件42设置有多个安装柱422，安装柱422沿电磁感应件42的径向延伸。示例性的，安装柱422焊接固定于电磁感应件42的外侧。
图9为本申请的第二实施例的第一固定件的结构示意图。图10为本申请的第二实施例的加热炉在对片状材料进行加热时的状态示意图。
如图8、图9和图10所示，在本实施例中，第一固定件31、第二固定件32和第三固定件33都包括有固定部34和连接部35。其中，连接部35沿真空腔体20的长度方向延伸，连接部35设置有多个定位孔352，定位孔352在真空腔体20的径向上贯穿连接部35。多个定位孔352在连接部35的长度方向上间隔分布。
固定部34设置于连接部35朝向真空腔体20的一侧，且固定部34沿真空腔体20的径向延伸。第一固定件31的固定部34的长度形成第一距离，第二固定件32的固定部34的长度形成第二距离。可以理解，第一固定件31、第二固定件32和第三固定件33的固定部34的长度可以根据电磁感应件42与真空腔体20之间指定的间距进行配置。
固定部34具有多个，多个固定部34在连接部35的长度方向上间隔分布，相邻的两个固定部34之间形成有限位空间341。多个固定部34与多个定位孔352交错分布，以使多个定位孔352分别连通于多个固定部34之间的限位空间341。
在本实施例中，相邻两个固定部34之间的间距大于等于电磁感应件42的宽度。多个安装柱422对应于第一固定件31、第二固定件32和第三固定件33分布，且定位孔352均与安装柱422相适配。多个电磁感应件42收容于多个限位空间341，电磁感应件42的安装柱422穿设于对应的定位孔352，且连接部35抵持于电磁感应件42远离真空腔体20的一侧。通过连接部35对电磁感应件42的止抵以及定位孔352对安装柱422的定位配合，使电磁感应件42与真空腔体20相对固定。
在本实施例中，安装柱422的一端穿过定位孔352外露于连接部35，且安装柱422的周侧设置有螺纹面。连接部35还配置有锁紧螺母423，锁紧螺母423与安装柱422相适配，锁紧螺母423螺纹连接于安装柱422外露于连接部35的一端，并使电磁感应件42抵紧于连接部35。通过锁紧螺母423将安装柱422锁紧于定位孔352，以使电磁感应件42的多个安装柱422分别固定于连接部35。
如此，第一固定件31、第二固定件32和第三固定件33的固定部34在真空腔体20的长度方向上对电磁感应件42进行限位，第一固定件31、第二固定件32和第三固定件33的连接部35在真空腔体20的径向上对电磁感应件42进行限位，第一固定件31、第二固定件32和第三固定件33的定位孔352在真空腔体20的周向上对电磁感应件42进行限位，同时第一固定件31、第二固定件32和第三固定件33围绕电磁感应件42分布的多点支撑结构，提高电磁感应件42的稳固性。
对于本领域技术人员而言，显然本申请不限于上述示范性实施例的细节，而且在不背离本申请的精神或基本特征的情况下，能够以其他的具体形式实现本申请。因此，无论从哪一点来看，均应将本申请上述的实施例看作是示范性的，而且是非限制性的，本申请的范围由所附权利要求而不是上述说明限定，因此旨在将落在权利要求的等同要件的含义和范围内的所有变化涵括在本申请内。

Claims (10)

  1. 一种加热炉，其特征在于，包括：
    外壳；
    真空腔体，设置于所述外壳内，所述真空腔体用于收容片状材料；
    固定组件，设置于所述真空腔体的外侧；
    加热组件，围绕所述真空腔体的外侧设置，且连接于所述固定组件；其中，所述加热组件的上部与所述真空腔体之间的距离为第一间距，所述加热组件的下部与所述真空腔体之间的距离为第二间距，所述第一间距大于所述第二间距。
  2. 如权利要求1所述的加热炉，其特征在于，所述加热组件包括电源模块和电磁感应件，所述电源模块与所述电磁感应件电连接；其中，所述真空腔体为金属材质，且所述电磁感应件与所述真空腔体之间绝缘设置。
  3. 如权利要求2所述的加热炉，其特征在于，
    所述固定组件包括第一固定件和第二固定件，所述第一固定件设置于所述真空腔体的上部，所述第二固定件设置于所述真空腔体的下部；
    所述第一固定件和所述第二固定件都包括固定部和连接部，所述固定部连接于所述真空腔体，所述连接部连接于所述电磁感应件；
    所述第一固定件的固定部与所述第一固定件的连接部之间的距离为第一距离，所述第二固定件的固定部与所述第二固定件的连接部之间的距离为第二距离，所述第一距离大于所述第二距离。
  4. 如权利要求3所述的加热炉，其特征在于，
    所述固定组件还包括至少一个第三固定件，所述第一固定件、所述第二固定件和所述第三固定件在所述真空腔体的周向上间隔分布。
  5. 如权利要求3所述的加热炉，其特征在于，所述连接部设置有限位孔，所述限位孔在所述真空腔体的周向上贯穿所述连接部，所述电磁感应件穿设于所述限位孔。
  6. 如权利要求3所述的加热炉，其特征在于，所述电磁感应件设置有安装柱；所述连接部位于所述电磁感应件远离所述真空腔体的一侧，所述连接部设置有定位孔，所述定位孔在所述真空腔体的径向上贯穿所述连接部，所述安装柱穿设于所述定位孔。
  7. 如权利要求6所述的加热炉，其特征在于，所述固定组件还包括锁紧螺母，所述安装柱的周侧设置有螺纹面；所述安装柱的一端穿过所述定位孔外露于所述连接部，并与所述锁紧螺母螺纹连接。
  8. 如权利要求2所述的加热炉，其特征在于，所述电磁感应件内部设置有冷却槽，所述冷却槽用于收容冷却液。
  9. 如权利要求2所述的加热炉，其特征在于，所述真空腔体沿长度方向设置有多个加热区，每一个所述加热区均分布有所述加热组件；所述加热炉还包括多个温度传感器，多个所述温度传感器分别设置于多个所述加热区。
  10. 如权利要求1所述的加热炉，其特征在于，定义所述加热炉具有间距系数，所述间距系数＝(第一间距－第二间距)/第一间距，所述间距系数的取值范围为[0.4,1]。
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