WO2025188552A1

WO2025188552A1 - Composite pulsed-valve manifold

Info

Publication number: WO2025188552A1
Application number: PCT/US2025/017729
Authority: WO
Inventors: Premkumar RAJAGOPAL; Janardhan Achari Murkai SITHARAMACHARI; Govindasamy Ponnusamy; Mark Campello; Naveen PATIL
Original assignee: Lam Research Corp
Current assignee: Lam Research Corp
Priority date: 2024-03-08
Filing date: 2025-02-27
Publication date: 2025-09-12
Anticipated expiration: 2026-09-08
Also published as: TW202603202A; WO2025188552A8

Abstract

In one embodiment, the disclosed apparatus is a composite-manifold assembly including a manifold-base portion having a plurality of valve-mounting areas formed thereon. At least one of the valve-mounting areas has one or more gas inlets. The manifold-base portion is configured to flow at least one first gas. An edge-inserted manifold-portion is in fluid communication with the manifold-base portion to receive the at least one first gas therefrom. The edge-inserted manifold-portion is formed from a second material. The edge-inserted manifold-portion is to receive and flow one or more second gases through one or more through-holes formed therein. The second material is more corrosion -resistant to the one or more second gases than the first material. Other apparatuses and systems are disclosed.

Description

COMPOSITE PULSED-VALVE MANIFOLD CLAIM OF PRIORITY [0001] This application claims the benefit of priority to U.S. Patent Application Serial No. 63/563,224, filed on March 8, 2024, which is incorporated by reference herein in its entirety. TECHNICAL FIELD [0002] The subject matter disclosed herein relates to various types of equipment used in the semiconductor and allied industries. More specifically, the disclosed subject-matter relates to components used for delivering gases used in, for example, semiconductor-process equipment as well as other types of equipment using various types of gases. BACKGROUND [0003] In various types of semiconductor-manufacturing processes, such as during an atomic-layer deposition (ALD) process, pulses of chemical-reactant gases are pulsed sequentially into a reaction chamber that contains a substrate upon which, for example, semiconductor devices will be fabricated. Pulsed-valve manifolds are manifolds used to control and blend the one or more reactant gases. In an example, pulsed-valve manifolds are used in semiconductor manufacturing equipment to deliver multiple gases to a vacuum processing-chamber to deposit or etch films on substrates. However, many of these gases are highly corrosive. Therefore, the entirety of pulsed- valve manifolds are currently formed from a single material, wherein the material is selected to be highly resistant to the effects of both oxidizing- and reducing-acid environments, as well as those environments containing mixed acids and non-corrosive gases (e.g., nitrogen). Fabricating pulsed-valve manifolds from these highly corrosive-resistant materials have significant challenges with regard to the difficulty in machining these materials. Additionally, these highly corrosive-resistant materials are typically Attorney Docket 4948.164WO1 Client File 11589-1WO extremely costly as compared with other materials, such as stainless steel or aluminum and aluminum alloys. [0004] Therefore, in various embodiments described herein, the disclosed subject-matter describes a composite pulsed-valve manifold comprising different material types. The material types include both highly corrosive- resistant materials combined with non or less corrosive-resistant materials. The combination of material types are then integrated together as inseparable or separable assemblies to form a resulting composite pulsed- valve manifold. The composite pulsed-valve manifold allows the manifold to flow highly corrosive gases through selective channels or flow-paths within the highly corrosion-resistant material and non-corrosive gases through the non or less corrosion-resistant channels or flow-paths. [0005] The information described in this section is provided to offer a person of ordinary skill in the art a context for the following disclosed subject- matter and should not be considered as admitted prior art. SUMMARY [0006] In one exemplary embodiment, the disclosed apparatus describes a composite-manifold assembly including a manifold-base portion having a plurality of valve-mounting areas formed thereon. At least one of the valve- mounting areas has one or more gas inlets. The manifold-base portion is configured to flow at least one first gas. An edge-inserted manifold-portion is in fluid communication with the manifold-base portion to receive the at least one first gas therefrom. The edge-inserted manifold-portion is formed from a second material. The edge-inserted manifold-portion is to receive and flow one or more second gases through one or more through-holes formed therein. The second material is more corrosion-resistant to the one or more second gases than the first material. [0007] In another exemplary embodiment, the disclosed subject-matter describes a composite-manifold assembly including a manifold-base portion Attorney Docket 4948.164WO1 Client File 11589-1WO having a plurality of valve-mounting areas formed thereon. At least one of the plurality of valve-mounting areas has one or more gas inlets. The manifold- base portion is formed from a first material and configured to flow at least one first gas. A top-inserted manifold-portion is coupled to and in fluid communication with the manifold-base portion. The top-inserted manifold- portion is mounted at least partially through a hole formed through the manifold-base portion to receive the at least one first gas from the manifold- base portion. The top-inserted manifold-portion is formed from a second material to receive and flow one or more second gases therethrough. The second material is more corrosion-resistant to the one or more second gases than the first material. [0008] In another exemplary embodiment, the disclosed subject-matter describes a composite-manifold assembly a manifold-base portion having a plurality of valve-mounting areas formed thereon, at least one of the plurality of valve-mounting areas having one or more gas inlets, the manifold-base portion being formed from a first material and being configured to flow at least one first gas. A top-inserted manifold-portion is in fluid communication with the manifold-base portion. The top-inserted manifold-portion is mounted at least partially through a hole formed through the manifold-base portion. The top-inserted manifold-portion is configured to receive the at least one first gas from the manifold-base portion. The top-inserted manifold-portion is formed from a second material to receive and flow one or more second gases therethrough in addition to the at least one first gas from the manifold-base portion. The second material is more corrosion-resistant to the one or more second gases than the first material. Attorney Docket 4948.164WO1 Client File 11589-1WO BRIEF DESCRIPTION OF THE FIGURES [0009] The following description includes a discussion of figures having illustrations given by way of examples of implementations of embodiments of the disclosed subject-matter. The drawings should be understood by way of example, and not by way of limitation. As used herein, references to one or more ^embodiments^ are understood to be describing a particular feature, structure, or characteristic included in at least one implementation of the disclosed subject-matter. Thus, phrases such as ^in one embodiment^ or ^in an alternative embodiment^ appearing herein describe various embodiments and implementations of the disclosed subject-matter, and do not necessarily all refer to the same embodiment. However, the embodiments are also not necessarily mutually exclusive from one another. To identify easily the discussion of any particular element or act, the most significant digit or digits in a reference number (e.g., element number) refer to the figure (^FIG.^) number in which that element or act is first introduced. [00010] FIG. 1A shows a three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold assembly, having an edge- inserted corrosion-resistant portion, in accordance with various embodiments of the disclosed subject-matter; [00011] FIG. 1B shows another three-dimensional view of an exemplary embodiment of the composite pulsed-valve-manifold assembly of FIG.1A, showing the edge-inserted corrosion-resistant portion of the composite pulsed- valve-manifold separated from the remainder of the composite pulsed-valve- manifold, in accordance with various embodiments of the disclosed subject- matter; [00012] FIG. 1C shows a three-dimensional front view of an exemplary embodiment of the corrosion-resistant portion of the composite pulsed-valve- manifold assembly of FIG.1A in accordance with various embodiments of the disclosed subject-matter; Attorney Docket 4948.164WO1 Client File 11589-1WO [00013] FIG. 1D shows a three-dimensional rear view of an exemplary embodiment of the corrosion-resistant portion of the composite pulsed-valve- manifold assembly of FIG.1A in accordance with various embodiments of the disclosed subject-matter; [00014] FIG. 1E shows a cross-sectional elevational view of an exemplary embodiment of the composite pulsed-valve-manifold assembly of FIG.1A in accordance with various embodiments of the disclosed subject-matter; [00015] FIG. 2A shows a three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold, having a top-inserted corrosion-resistant portion, in accordance with various embodiments of the disclosed subject-matter; [00016] FIG. 2B shows a three-dimensional view of an exemplary embodiment of the composite pulsed-valve-manifold of FIG. 2A, showing the top-inserted corrosion-resistant portion of the composite pulsed-valve- manifold separated from the remainder of the composite pulsed-valve- manifold, in accordance with various embodiments of the disclosed subject- matter; [00017] FIG. 2C shows a three-dimensional top-quarter view of an exemplary embodiment of the corrosion-resistant portion of the composite pulsed-valve-manifold of FIG.2B in accordance with various embodiments of the disclosed subject-matter; [00018] FIG. 2D shows a three-dimensional bottom-quarter view of an exemplary embodiment of the corrosion-resistant portion of the composite pulsed-valve-manifold of FIG.2B in accordance with various embodiments of the disclosed subject-matter; [00019] FIG. 2E shows a cross-sectional elevational view of an exemplary embodiment of the composite pulsed-valve-manifold of FIG. 2A in accordance with various embodiments of the disclosed subject-matter; Attorney Docket 4948.164WO1 Client File 11589-1WO [00020] FIG. 3 shows a cross-sectional elevational view indicating flow paths of gases through both the corrosion-resistant portion of the composite pulsed-valve-manifold and the remainder of the composite pulsed-valve- manifold, in accordance with various embodiments of the disclosed subject- matter of an exemplary embodiment of the composite pulsed-valve-manifold of FIG.1A or FIG.2A; [00021] FIG. 4A shows another three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold, having a top-inserted corrosion-resistant portion, in accordance with various embodiments of the disclosed subject-matter; and [00022] FIG. 4B shows a three-dimensional top-quarter view of an exemplary embodiment of the corrosion-resistant portion of the composite pulsed-valve-manifold of FIG.4A in accordance with various embodiments of the disclosed subject-matter. DETAILED DESCRIPTION [00023] The disclosed subject-matter will now be described in detail with reference to a few general and specific embodiments as illustrated in various ones of the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the disclosed subject-matter. It will be apparent, however, to a person of ordinary skill in the art, that the disclosed subject-matter may be practiced without some or all of these specific details. In other instances, well-known process steps, construction techniques, or structures have not been described in detail so as not to obscure the disclosed subject-matter. [00024] FIG. 1A shows a three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold assembly 100, having an edge-inserted corrosion-resistant portion, in accordance with various embodiments of the disclosed subject-matter. FIG. 1A is shown to include a Attorney Docket 4948.164WO1 Client File 11589-1WO substantially low-corrosion-resistant (LCR) manifold-base portion 101 and a substantially corrosion-resistant (CR) manifold-portion 103. [00025] The LCR manifold-base portion 101 includes a number of valve- mounting areas 105 for pulsed valves (or other valve types) to be coupled to the LCR manifold-base portion 101. The valve-mounting areas 105 include a number of gas inlets 109 into which gases delivered to the LCR manifold-base portion 101 may be transmitted to flow through to an outlet area (described in more detail with reference to FIG. 1E and FIG.3, below). Although only a single gas inlet 109 is shown for certain ones of the valve-mounting areas 105, no such limitation is intended. Further, although only certain ones of the valve-mounting areas 105 may have gas inlets 109, each of the valve- mounting areas 105 may include one or more gas inlets depending on a desired configuration of the composite pulsed-valve-manifold assembly 100. Upon reading and understanding the disclosed subject-matter, the skilled artisan will recognize how a total number of the valve-mounting areas 105, and a number of gas inlets 109 within each of the valve-mounting areas 105, may be changed to produce a desired arrangement of the composite pulsed- valve-manifold assembly 100. [00026] With continuing reference to the composite pulsed-valve-manifold 100 of FIG. 1A, portions of gas-inlet tubes 107 are shown mechanically coupled to opposing ends of the composite pulsed-valve-manifold assembly 100. The gas-inlet tubes 107 are arranged to provide a supply of one or more process gases (although other gas inlet points may also be used, as shown and described in more detail below) to the composite pulsed-valve-manifold assembly 100. Each of the gas-inlet tubes 107 may supply one or more of various types of gases sequentially to the composite pulsed-valve-manifold 100, or supply a plurality of gases concurrently to the composite pulsed-valve- manifold assembly 100. The skilled artisan will also recognize that one or more additional gas-inlet tubes may be coupled to supply gases to the composite pulsed-valve-manifold assembly 100. Materials that may be Attorney Docket 4948.164WO1 Client File 11589-1WO considered suitable to form, for example, the CR manifold-portion 103 and the LCR manifold-base portion 101 are described in more detail, below. [00027] With reference now to FIG.1B, another three-dimensional view 110 of an exemplary embodiment of the composite pulsed-valve-manifold assembly 100 of FIG. 1A is shown. FIG.1B shows the CR manifold-portion 103 of the composite pulsed-valve-manifold assembly 100 separated from the remainder of the LCR manifold-base portion 101, in accordance with various embodiments of the disclosed subject-matter. The three-dimensional view 110 of FIG.1B shows an example of how the CR manifold-portion 103 is added to the LCR manifold-base portion 101 as an edge-mounted exemplary embodiment of the disclosed subject-matter. [00028] In an exemplary embodiment, the CR manifold-portion 103 is shown such that it may be affixed to the LCR manifold-base portion 101 by a mechanical fastener 111. The mechanical fastener 111 may comprise various types of fasteners known in the art such as a machine screw, bolt, or any other non-permanent or permanent mechanical tool that rigidly connects or affixes two or more surfaces or objects together. Since the mechanical fastener 111 is not in direct fluid communication with gases flowing in the composite pulsed-valve-manifold assembly 100, the fastener itself does not need to be fabricated from a corrosion-resistant material. Instead, the mechanical fastener 111 may comprise materials such as, for example, stainless-steel, stainless-steel alloys, or plated fasteners. Further, although only a single mechanical fastener 111 is shown, no such limitation is intended. Any number (e.g., two or more) of the mechanical fastener 111 may be used to assemble the composite pulsed-valve-manifold assembly 100. In other embodiments, the CR manifold-portion 103 may be affixed to the LCR manifold-base portion 101 by various types of chemical adhesives or a mechanical press-fit. A person of ordinary skill in the art will recognize tolerances needed to accomplish a press-fit based on the coefficient of thermal expansion (CTE) of the materials selected for the various components and a Attorney Docket 4948.164WO1 Client File 11589-1WO temperature range in which the components are expected to operate. Therefore, the composite pulsed-valve-manifold assembly 100 may comprise a separable or non-separable assembly. [00029] FIG. 1C shows a three-dimensional, top-quarter front view 130 of an exemplary embodiment of the CR manifold-portion 103 of the composite pulsed-valve-manifold assembly 100 of FIG.1A in accordance with various embodiments of the disclosed subject-matter. FIG. 1C is shown to include sealing surfaces 131 surrounding through-holes through which one or more gases may be delivered to each of the through-holes from one or more gas valves, with the gas valves being mounted to at least one of the number of valve-mounting areas 105 (see FIG.1A) to an outlet portion of the CR manifold-portion 103 (not shown in FIG. 1C but described in more detail with reference to FIG. 3, below). Although FIG.1C shows only two sealing surfaces 131 surrounding through-holes, no such limitation is intended. The sealing surface and an associated through-hole may include a single sealing surface and an associated through-hole or three or more sealing surfaces and associated through-holes. In embodiments where the mechanical fastener 111 (see FIG. 1B) is used to affix the CR manifold-portion 103 to the LCR manifold-base portion 101, the mechanical fastener 111 may be installed into a through-hole 133 in the side of the CR manifold-portion 103. [00030] The sealing surfaces 131 may include, for example, various types of metal seals, known in the relevant art. In one specific exemplary embodiment, depending on gases being flowed and pressure levels involved, the sealing surfaces 131 may comprise a VCR^® metal-to-metal seal feature, as is known in the art, or welded onto a male VCR^® tube stub. In other embodiments, various gas connection components may be formed as, for example, a VCO^® O-ring face seal fitting (VCR^® and VCO^® seal fittings are registered trademarks of the Swagelok Company of Solon, Ohio, USA). A person of ordinary skill in the art will recognize that other types of fittings may be used as well. In various specific exemplary embodiments, the gas Attorney Docket 4948.164WO1 Client File 11589-1WO valves may be mounted with metal ^C^ seals or ^W^ seals to seal the gas path between the valve and the LCR manifold-base portion 101 or CR manifold- portion 103. The screws used in these fasteners are special low-friction, high- strength screws to crush the metal seals. A person of ordinary skill in the art recognizes these types of fasteners (available from, for example, American Seal and Engineering, Orange, Connecticut, USA and Fujikin^® of America, Inc., Fremont, California, USA). In other examples, depending on the type of gas transported, an O-ring fabricated from, for example, Kalrez^® or other types of perfluorinated elastomer or fluoroelastomer materials, known in the art, may be used to prevent gas from leaking between the sealing surfaces 131 and the gas valve. (Kalrez^® is available from DuPont de Nemours, Inc.; Wilmington, Delaware, USA.) [00031] FIG. 1D shows a three-dimensional, top-quarter rear view 150 of an exemplary embodiment of the CR manifold-portion 103 of the composite pulsed-valve-manifold assembly 100 of FIG.1A in accordance with various embodiments of the disclosed subject-matter. FIG. 1D is shown to include a rear portion 153 of the through-hole 133 in the side of the CR manifold- portion 103 that contacts the LCR manifold-base portion 101. In various embodiments, the CR manifold-portion 103 may also include a locating and mounting hole 151. [00032] FIG. 1E shows a cross-sectional elevational view 170 of an exemplary embodiment of the composite pulsed-valve-manifold assembly 100 of FIG.1A in accordance with various embodiments of the disclosed subject- matter. The cross-sectional elevational view 170 shows a lowermost, outlet portion of the CR manifold-portion 103 through which gases are introduced from the composite pulsed-valve-manifold assembly 100 into, for example, a gas-distribution showerhead mounted above a substrate in a reaction chamber. Such gas-distribution showerheads are known in the relevant art. [00033] With reference now to FIG.2A, a three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold 200, having a Attorney Docket 4948.164WO1 Client File 11589-1WO top-inserted corrosion-resistant portion, in accordance with various embodiments of the disclosed subject-matter, is shown. In various embodiments, the composite pulsed-valve-manifold 200 of FIG. 2A may share some similarities with at least portions of the composite pulsed-valve- manifold 100 of FIG.1A. FIG.2A is shown to include a substantially low- corrosion-resistant (LCR) manifold-base portion 201 and a substantially corrosion-resistant (CR) manifold-portion 203. [00034] The LCR manifold-base portion 201 includes a number of valve- mounting areas 105 for pulsed valves (or any other valve) to be coupled to the LCR manifold-base portion 101. The valve-mounting areas 205 include a number of gas inlets 209 into which gases delivered to the LCR manifold-base portion 201 may be transmitted to flow through to an outlet area (described in more detail with reference to FIG. 2E and FIG.3, below). Although only a single gas inlet is shown for certain ones of the valve-mounting areas 205, no such limitation is intended. Further, although only certain ones of the valve- mounting areas 205 may have gas inlets 209, each of the valve-mounting areas 205 may include one or more gas inlets depending on a desired configuration of the composite pulsed-valve-manifold assembly 200. Upon reading and understanding the disclosed subject-matter, the skilled artisan will recognize how a total number of the valve-mounting areas 205, and a number of gas inlets 209 within each of the valve-mounting areas 205, may be changed to produce a desired arrangement of the composite pulsed-valve- manifold assembly 200. [00035] With continuing reference to the composite pulsed-valve-manifold 200 of FIG. 2A, portions of gas-inlet tubes 207 are shown mechanically coupled to opposing ends of the composite pulsed-valve-manifold assembly 200. The gas-inlet tubes 207 are arranged to provide a supply of one or more process gases (although other gas inlet points may also be used, as shown and described in more detail below) to the composite pulsed-valve-manifold assembly 200. Each of the gas-inlet tubes 207 may supply one or more various Attorney Docket 4948.164WO1 Client File 11589-1WO types of gases sequentially to the composite pulsed-valve-manifold 200 or supply a plurality of gases concurrently to the composite pulsed-valve- manifold assembly 200. The skilled artisan will also recognize that one or more additional gas-inlet tubes may be coupled to supply gases to the composite pulsed-valve-manifold assembly 200. Materials that may be considered suitable to form, for example, the CR manifold-portion 103 and the LCR manifold-base portion 201 are described in more detail, below. [00036] With reference now to FIG.2B, another three-dimensional view 210 of an exemplary embodiment of the composite pulsed-valve-manifold assembly 200 of FIG. 2A is shown. FIG.2B shows the CR manifold-portion 203 of the composite pulsed-valve-manifold assembly 200 separated from the remainder of the LCR manifold-base portion 201, in accordance with various embodiments of the disclosed subject-matter. The three-dimensional view 210 of FIG.2B shows how the CR manifold-portion 203 is added to the LCR manifold-base portion 201 as a top-mounted exemplary embodiment of the disclosed subject-matter. In a specific exemplary embodiment, the CR manifold-portion 203 is top-mounted and inserted at least partially through a hole formed through the LCR manifold-base portion 201. [00037] In an exemplary embodiment, the CR manifold-portion 203 is shown such that it may be affixed to the LCR manifold-base portion 201 by a pair of mechanical fasteners 211. The mechanical fasteners 211 may comprise various types of fasteners known in the art such as a machine screw, bolt, or any other non-permanent or permanent mechanical tool that rigidly connects or affixes two or more surfaces or objects together. Since the mechanical fasteners 211 are not in direct fluid communication with gases flowing in the composite pulsed-valve-manifold assembly 200, the fastener itself does not need to be fabricated from a corrosion-resistant material. Instead, the mechanical fasteners 211 may comprise materials such as, for example, stainless-steel alloys or plated fasteners. Further, although a pair of mechanical fasteners 211 are shown, no such limitation is intended. Any Attorney Docket 4948.164WO1 Client File 11589-1WO number (e.g., one or three or more) of the mechanical fasteners 211 may be used to assemble the composite pulsed-valve-manifold assembly 200. In other embodiments, the CR manifold-portion 203 may be affixed to the LCR manifold-base portion 201 by various types of chemical adhesives or a mechanical press-fit. Therefore, the composite pulsed-valve-manifold assembly 200 may comprise a separable or non-separable assembly. [00038] FIG. 2C shows a three-dimensional, top-quarter front view 230 of an exemplary embodiment of the CR manifold-portion 203 of the composite pulsed-valve-manifold assembly 200 of FIG.2A in accordance with various embodiments of the disclosed subject-matter. FIG. 2C is shown to include sealing surfaces 231, each surrounding an associated through-hole through which one or more gases may be delivered from a gas valve, mounted to one of the number of valve-mounting areas 205 (see FIG. 2A) to an outlet portion of the CR manifold-portion 203 (not shown in FIG. 2C but described in more detail with reference to FIG.3, below). Although FIG. 2C shows only two sealing surfaces 231 surrounding through-holes, no such limitation is intended. The sealing surface and an associated through-hole may include a single sealing surface and an associated through-hole or three or more sealing surfaces and associated through-holes. In embodiments where the mechanical fasteners 211 (see FIG.2B) are used to affix the CR manifold-portion 203 to the LCR manifold-base portion 201, the mechanical fasteners 211 may be installed into respective through-holes 233 in the top of the CR manifold- portion 203. [00039] The sealing surfaces 231 may include, for example, various types of metal seals or other sealing materials (e.g., O-rings), known in the relevant art and described with reference to FIG. 1C, above. [00040] FIG. 2D shows a three-dimensional, bottom-quarter rear view 250 of an exemplary embodiment of the CR manifold-portion 203 of the composite pulsed-valve-manifold assembly 200 of FIG.2A in accordance with various embodiments of the disclosed subject-matter. Attorney Docket 4948.164WO1 Client File 11589-1WO [00041] FIG. 2E shows a cross-sectional elevational view 270 of an exemplary embodiment of the composite pulsed-valve-manifold assembly 200 of FIG.2A in accordance with various embodiments of the disclosed subject- matter. The cross-sectional elevational view 270 shows a lowermost, outlet portion of the CR manifold-portion 203 through which gases are introduced from the composite pulsed-valve-manifold assembly 200 into, for example, a gas-distribution showerhead mounted above a substrate in a reaction chamber. Such gas-distribution showerheads are known in the relevant art. [00042] FIG. 3 shows a cross-sectional elevational view 300 indicating flow paths of gases through both a corrosion-resistant portion 303 of the composite pulsed-valve-manifold and the remainder of the composite pulsed-valve- manifold 301, in accordance with various embodiments of the disclosed subject-matter. Such exemplary embodiments may include, for example, the composite pulsed-valve-manifold of FIG. 1A or FIG. 2A. The corrosion- resistant portion 303 may be the same as or similar to the CR manifold- portion 103, 203 of FIGS.1A and 2A. The remainder of the composite pulsed- valve-manifold 301 may be the same as or similar to the LCR manifold-base portion 101, 201 of FIGS.1A and 2A. [00043] The cross-sectional elevational view 300 of FIG. 3 is also shown to include a plurality of gas valves 350 (e.g., pulsed ALD gas-valves), portions of gas-inlet tubes 307, a plurality of low- or non-corrosive gas inlets 355, and a plurality of corrosive-gas inlets 357. A low- or non-corrosive gas flow path 351 is indicated as a dashed line. A corrosive-gas flow path 353 is indicated as a solid line. As indicated by FIG.3, the low- or non-corrosive gas flow path 351 and the corrosive-gas flow path 353 are shown as combining coming into and flowing out from the corrosion-resistant portion 303 of the composite pulsed- valve-manifold. Consequently, although corrosive gases may flow through the gas valves 350, corrosive gases only flow through the corrosion-resistant portion 303 while the low- or non-corrosive gases can flow through either the Attorney Docket 4948.164WO1 Client File 11589-1WO remainder of the composite pulsed-valve-manifold 301 and the corrosion- resistant portion 303. [00044] With reference now to FIG.4A, another three-dimensional view of an exemplary embodiment of a composite pulsed-valve-manifold 400, having a top-inserted corrosion-resistant portion 403, in accordance with various embodiments of the disclosed subject-matter, is shown. In various embodiments, the composite pulsed-valve-manifold 400 of FIG. 4A may share some similarities with the composite pulsed-valve-manifold 100 of FIG. 1A, and the composite pulsed-valve-manifold 200 of FIG. 2A. FIG. 4A is shown to include a substantially low-corrosion-resistant (LCR) manifold-base portion 401 and a substantially corrosion-resistant (CR) manifold-portion 403. In this embodiment, the CR manifold-portion 403 is inserted into a cutout (not shown specifically but understandable to a person of ordinary skill in the art) in the LCR manifold-base portion 401. [00045] The LCR manifold-base portion 401 includes a number of valve- mounting areas that are similar to or the same as the valve-mounting areas 105, 205 of FIGS. 1A and 2A. The valve-mounting areas allow for pulsed valves to be coupled to the LCR manifold-base portion 401. The valve- mounting areas include a number of gas inlets (similar to or the same as the gas inlets 109, 209 of FIGS. 1A and 2A into which gases delivered to the LCR manifold-base portion 401 may be transmitted to flow through to an outlet area (as described in more detail with reference to FIG.3, above). Although only a single gas inlet is shown for certain ones of the valve-mounting areas, no such limitation is intended. Further, although only certain ones of the valve-mounting areas may have gas inlets, each of the valve-mounting areas may include one or more gas inlets depending on a desired configuration of the composite pulsed-valve-manifold assembly 400. Upon reading and understanding the disclosed subject-matter, the skilled artisan will recognize how a total number of the valve-mounting areas, and a number of gas inlets Attorney Docket 4948.164WO1 Client File 11589-1WO within each of the valve-mounting areas, may be changed to produce a desired arrangement of the composite pulsed-valve-manifold assembly 400. [00046] Materials that may be considered suitable to form, for example, the CR manifold-portion 403 and the LCR manifold-base portion 401 are described in more detail, below. [00047] With reference now to FIG.4B, another three-dimensional, top- quarter view 410 of an exemplary embodiment of the composite pulsed-valve- manifold assembly 400 of FIG. 4A is shown. FIG. 4B shows the CR manifold- portion 403 of the composite pulsed-valve-manifold assembly 400 separated from the remainder of the LCR manifold-base portion 401, in accordance with various embodiments of the disclosed subject-matter. The three-dimensional view 410 of FIG. 4B shows how the CR manifold-portion 403 is added to the LCR manifold-base portion 401 as a top-mounted exemplary embodiment of the disclosed subject-matter. In a specific exemplary embodiment, the CR manifold-portion 403 is top-mounted and inserted at least partially through a hole formed through the LCR manifold-base portion 401. [00048] In an exemplary embodiment, the CR manifold-portion 403 is shown such that it may be affixed to the LCR manifold-base portion 401 by a pair of mechanical fasteners (not shown but may be the same as or similar to the mechanical fastener 111 of FIG. 1B) through a pair of through-holes 413. The mechanical fasteners may comprise various types of fasteners known in the art such as a machine screw, bolt, or any other non-permanent or permanent mechanical tool that rigidly connects or affixes two or more surfaces or objects together. Since the mechanical fasteners are not in direct fluid communication with gases flowing in the composite pulsed-valve- manifold assembly 400, the fastener itself does not need to be fabricated from a corrosion-resistant material. Instead, the mechanical fasteners may comprise materials such as, for example, stainless-steel alloys or plated fasteners. Further, although only the pair of through-holes 413 for a pair of mechanical fasteners is shown, no such limitation is intended. Any number Attorney Docket 4948.164WO1 Client File 11589-1WO (e.g., one or three or more) of the pair of through-holes 413 and mechanical fasteners may be used to assemble the composite pulsed-valve-manifold assembly 400. In other embodiments, the CR manifold-portion 403 may be affixed to the LCR manifold-base portion 401 by various types of chemical adhesives or a mechanical press-fit. Therefore, the composite pulsed-valve- manifold assembly 400 may comprise a separable or non-separable assembly. [00049] FIG. 4B also shows a single sealing surface 431, which surrounds a through-hole. In a manner the same as or similar to the sealing surfaces 131, 231 of FIGS.1C and 2C, respectively, the single sealing surface 431 of the CR manifold-portion 403 may include, for example, various types of metal seals or other sealing materials (e.g., O-rings), known in the relevant art as described with reference to FIG. 1C, above. [00050] As disclosed above, the CR manifold-portion and the LCR manifold- base portion are fabricated from different materials. For example, various attributes for the high-corrosion-resistant materials described herein include resistance to both oxidizing and non-oxidizing chemicals (reducing-acid chemical environments), environments containing mixed acids, as well as protection from pitting, crevice attack, and stress-corrosion cracking. Corrosion-resistance refers to a material^s ability to withstand the effects of corrosion. The relative corrosion-resistance of two materials to a gas may be determined by exposing the materials to the gas and observing the effects and/or by reference to specifications of materials. [00051] For example, one alloy (UNS N06022, also referred to as Alloy 22) is one material suitable used to form the high-corrosion-resistant materials described herein. Alloy 22 is a nickel-chromium-molybdenum-based material. One commercially-available example of Alloy 22 is HASTELLOY® C-22^® alloy, available from Haynes International Inc., Kokomo, Indiana, USA. Another suitable material for the high-corrosion-resistant materials described herein is Inconel, available from Special Metals Corporation (SMC), New Hartford, New York USA. Other suitable materials for the high-corrosion- Attorney Docket 4948.164WO1 Client File 11589-1WO resistant materials include Alloy C276, UNS N10276. Nickelvac^® HC-276, Inconel^® 276, Nicrofer^® 5716 and other nickel-chromium-molybdenum-based materials and nickel-chromium-based materials, some of which also include, for example, certain amounts (e.g., additives) of at least one or iron, cobalt, niobium, and titanium. Additionally, certain ceramic alloys; aluminum alloys plated with nickel or other materials; and stainless-steel alloys plated with special coatings. Special coatings include, for example, aluminum oxide (Al2O3, SilcoTek^® and Dursan^® (comprised of amorphous silicon oxide (a- SiO)). SilcoTek^® and Dursan^® are both chemical-vapor deposition-applied coatings available from SilkoTek®, 225 PennTech Drive, Bellefonte, Pennsylvania, USA. Materials for use in the non- or less-corrosion resistant portions may be fabricated using, for example, stainless steel and stainless- steel alloys. Gases flowing in the manifold disclosed herein can be heated to, for example, about 220 °C, all along the flow path, until the gases are dispensed from the composite manifold through and into, for example, the gas-distribution showerhead and onto a substrate undergoing processing. [00052] Upon reading and understanding the disclosed subject-matter, a person of ordinary skill in the art will recognize differences between low- or non-corrosive gases and corrosive gases. Low- or non-corrosive gases can include, for example, various carrier gases such as argon or nitrogen. Corrosive gases can include, for example, various types of reactant (precursor) gases such as, for example, trimethyl aluminum, hydrazine, phosphine, antimony trichloride, and hydrogen sulfide gas. [00053] Moreover, although many of the gas flow-paths are shown as channels herein, a person of ordinary skill in the art, upon reading and understanding the disclosed subject matter, will recognize that bore holes (e.g., longitudinal holes formed along the length of the manifold) may be used instead of channels. In addition, a combination of bore holes and channels may be used in conjunction with each other. Further, although various embodiments disclosed herein are defined in terms of a pulsed-valve Attorney Docket 4948.164WO1 Client File 11589-1WO manifold, the skilled artisan will recognize that the inventive concepts may be suitable for a wide variety of manifold applications, and not just those related to pulsed-valves. [00054] Although described as a composite pulsed-valve-manifold or a composite pulsed-valve-manifold assembly the manifold also describes a composite-manifold assembly if a continuous valve or even if no valve is used. Overall, the disclosed subject-matter contained herein describes or relates generally to gas-delivery components that can be configured to be used with operations of tools in a semiconductor fabrication environment (fab). Such tools can include various types of deposition (including plasma-based tools such as atomic-layer deposition (ALD), chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), etc.) and etching tools (e.g., reactive-ion etching (RIE) tools), as well as various types of thermal furnaces (e.g., such as rapid thermal annealing and oxidation), ion implantation, and a variety of other process and metrology tools found in various fabs and known to a person of ordinary skill in the art. However, the disclosed subject-matter is not limited to semiconductor environments and can be used in a number of machine-tool environments such as gas-control operations in robotic assembly, manufacturing, and machining environments (e.g., including those operations using physical vapor deposition (PVD tools)), as well as a variety of other environments. Upon reading and understanding the disclosure provided herein, a person of ordinary skill in the art will recognize that various embodiments of the disclosed subject-matter may be used with other types of process tools as well as a wide variety of other tools, equipment, and components. [00055] As used herein, the term ^or^ may be construed in an inclusive or exclusive sense. Further, other embodiments will be understood by a person of ordinary skill in the art upon reading and understanding the disclosure provided. Further, upon reading and understanding the disclosure provided herein, the person of ordinary skill in the art will readily understand that Attorney Docket 4948.164WO1 Client File 11589-1WO various combinations of the techniques and examples provided herein may all be applied in various configurations. [00056] Although various embodiments are discussed separately, these separate embodiments are not intended to be considered as independent techniques or designs. As indicated above, each of the various portions may be inter-related and each may be used separately or in combination with other embodiments discussed herein. For example, although various embodiments of methods, operations, and processes have been described, these methods, operations, and processes may be used either separately or in various combinations. [00057] Consequently, many modifications and variations can be made, as will be apparent to a person of ordinary skill in the art upon reading and understanding the disclosure provided herein. Further, functionally equivalent methods and devices within the scope of the disclosure, in addition to those enumerated herein, will be apparent to the skilled artisan from the foregoing descriptions. Portions and features of some embodiments, materials, and construction techniques may be included in, or substituted for, those of others. Such modifications and variations are intended to fall within a scope of the appended claims. Therefore, the present disclosure is to be limited only by the terms of the appended claims, along with the full scope of equivalents to which such claims are entitled. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. [00058] The Abstract of the Disclosure is provided to allow the reader to quickly ascertain the nature of the technical disclosure. The abstract is submitted with the understanding that it will not be used to interpret or limit the claims. In addition, in the foregoing Detailed Description, it may be seen that various features may be grouped together in a single embodiment for the purpose of streamlining the disclosure. This method of disclosure is not to be interpreted as limiting the claims. Thus, the following claims are hereby Attorney Docket 4948.164WO1 Client File 11589-1WO incorporated into the Detailed Description, with each claim standing on its own as a separate embodiment. THE FOLLOWING NUMBERED EXAMPLES ARE SPECIFIC EMBODIMENTS OF THE DISCLOSED SUBJECT-MATTER [00059] Example 1. In an embodiment, the disclosed subject-matter is a composite-manifold assembly including a substantially low-corrosion- resistant (LCR) manifold-base portion having a plurality of valve-mounting areas formed thereon. At least some of the valve-mounting areas having one or more gas inlets. The LCR manifold-base portion being configured to flow at least gas type selected from one of non-corrosive gases and low-corrosive gases therein. An edge-inserted substantially corrosion-resistant (CR) manifold-portion is mechanically coupled to and in fluid communication with the LCR manifold-base portion and receives the at least one gas type therefrom. The CR manifold-portion is formed from a different material than that from which the LCR manifold-base portion is formed. The CR manifold- portion is to receive and flow one or more corrosive gases through one or more through-holes formed therethrough. [00060] Example 2. The composite-manifold assembly of Example 1, further including a plurality of valves; one of each of the plurality of valves is to be coupled mechanically to respective ones of each of the valve-mounting areas. [00061] Example 3. The composite-manifold assembly of Example 2, wherein the plurality of valves is configured to provide a pulsed-flow or gas and a continuous flow of gas. [00062] Example 4. The composite-manifold assembly of any one of the preceding Examples, wherein the composite-manifold assembly is capable of flowing the gases at a temperature of about 220 °C. [00063] Example 5. The composite-manifold assembly of any one of the preceding Examples, wherein the composite-manifold assembly is configured to be coupled fluidically to a gas-distribution showerhead. Attorney Docket 4948.164WO1 Client File 11589-1WO [00064] Example 6. The composite-manifold assembly of any one of the preceding Examples, wherein the CR manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non- oxidizing chemicals. [00065] Example 7. The composite-manifold assembly of any one of the preceding Examples, wherein the LCR manifold-base portion is comprised of at least one material including a stainless-steel material and a stainless-steel alloy material. [00066] Example 8. The composite-manifold assembly of any one of the preceding Examples, wherein the CR manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium- molybdenum-based material; a nickel-chromium-based material having additives of at least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel. [00067] Example 9. The composite-manifold assembly of any one of the preceding Examples, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by one or more mechanical fasteners. [00068] Example 10. The composite-manifold assembly of any one of the preceding Examples, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by one or more chemical adhesives. [00069] Example 11. The composite-manifold assembly of any one of the preceding Examples, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by a mechanical press-fit arrangement. [00070] Example 12. In an embodiment, the disclosed subject-matter is a composite-manifold assembly including a substantially low-corrosion- resistant (LCR) manifold-base portion having a plurality of valve-mounting areas formed thereon, with at least some of the plurality of valve-mounting areas having one or more gas inlets. The LCR manifold-base portion is Attorney Docket 4948.164WO1 Client File 11589-1WO configured to flow at least gas type selected from one of non-corrosive gases and low-corrosive gases therein. A top-inserted substantially corrosion- resistant (CR) manifold-portion mechanically is coupled to and in fluid communication with the LCR manifold-base portion. The CR manifold-portion is mounted at least partially through a hole formed in the LCR manifold-base portion. The CR manifold-portion is configured to receive the at least one gas type from the LCR manifold-base portion. The CR manifold-portion is formed from a different material than that from which the LCR manifold-base portion is formed. The top-inserted CR manifold-portion is further configured to receive and flow a plurality of corrosive gases therethrough. [00071] Example 13. The composite-manifold assembly of Example 12, wherein the composite-manifold assembly is configured to be coupled fluidically to a gas-distribution showerhead. [00072] Example 14. The composite-manifold assembly of Example 12 or Example 13, wherein the CR manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non- oxidizing chemicals. [00073] Example 15. The composite-manifold assembly of any one of Example 12 through Example 14, wherein the LCR manifold-base portion is comprised of at least one material including a stainless-steel material and a stainless-steel alloy material. [00074] Example 16. The composite-manifold assembly of any one of Example 12 through Example 15, wherein the CR manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium-molybdenum-based material; a nickel-chromium-based material having additives of at least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel. Attorney Docket 4948.164WO1 Client File 11589-1WO [00075] Example 17. The composite-manifold assembly of any one of Example 12 through Example 16, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by one or more mechanical fasteners. [00076] Example 18. The composite-manifold assembly of any one of Example 12 through Example 17, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by one or more chemical adhesives. [00077] Example 19. The composite-manifold assembly of any one of Example 12 through Example 18, wherein the CR manifold-portion is coupled to the LCR manifold-base portion by a mechanical press-fit arrangement. [00078] Example 20. In an embodiment, the disclosed subject-matter is a composite-manifold assembly including a substantially low-corrosion- resistant (LCR) manifold-base portion having a plurality of valve-mounting areas formed thereon, with at least some of the plurality of valve-mounting areas having one or more gas inlets. The LCR manifold-base portion is configured to flow at least gas type selected from one of non-corrosive gases and low-corrosive gases therein. A top-inserted substantially corrosion- resistant (CR) manifold-portion is mechanically coupled to and is in fluid communication with the LCR manifold-base portion. The CR manifold-portion is mounted at least partially through a hole formed in the LCR manifold-base portion. The CR manifold-portion is configured to receive the at least one gas type from the LCR manifold-base portion. The CR manifold-portion is formed from a different material than that from which the LCR manifold-base portion is formed. The top-inserted CR manifold-portion is further configured to receive and flow a single corrosive gas therethrough in addition to the at least one gas type from the LCR manifold-base portion. [00079] Example 21. The composite-manifold assembly of Example 20, wherein the CR manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non-oxidizing chemicals. Attorney Docket 4948.164WO1 Client File 11589-1WO [00080] Example 22. The composite-manifold assembly of either Example 20 or Example 21, wherein the LCR manifold-base portion is comprised of at least one material including a stainless-steel material and a stainless-steel alloy material. [00081] Example 23. The composite-manifold assembly of any one of Example 20 through Example 22, wherein the CR manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium-molybdenum-based material; a nickel-chromium-based material having additives of at least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel. [00082] Example 24. In an embodiment, the disclosed subject-matter is a composite-manifold assembly including a manifold-base portion having a plurality of valve-mounting areas formed thereon. At least one of the valve- mounting areas has one or more gas inlets. The manifold-base portion is configured to flow at least one first gas. An edge-inserted manifold-portion is coupled to and in fluid communication with the manifold-base portion to receive the at least one first gas therefrom. The edge-inserted manifold- portion is formed from a second material. The edge-inserted manifold-portion is to receive and flow one or more second gases through one or more through- holes formed therethrough. The second material is more corrosion-resistant to the one or more second gases than the first material. [00083] Example 25. In an embodiment, the disclosed subject-matter is a composite-manifold assembly including a manifold-base portion having a plurality of valve-mounting areas formed thereon. At least one of the plurality of valve-mounting areas has one or more gas inlets. The manifold- base portion is formed from a first material and configured to flow at least one first gas. A top-inserted manifold-portion is coupled to and in fluid communication with the manifold-base portion. The top-inserted manifold- portion is mounted at least partially through a hole formed through the manifold-base portion to receive the at least one first gas from the manifold- Attorney Docket 4948.164WO1 Client File 11589-1WO base portion. The top-inserted manifold-portion is formed from a second material to receive and flow one or more second gases therethrough. The second material is more corrosion-resistant to the one or more second gases than the first material. [00084] Example 26. In an embodiment, the disclosed subject-matter is a composite-manifold assembly a manifold-base portion having a plurality of valve-mounting areas formed thereon, at least one of the plurality of valve- mounting areas having one or more gas inlets, the manifold-base portion being formed from a first material and being configured to flow at least one first gas. A top-inserted manifold-portion is in fluid communication with the manifold-base portion. The top-inserted manifold-portion is mounted at least partially through a hole formed through the manifold-base portion. The top- inserted manifold-portion is configured to receive the at least one first gas from the manifold-base portion. The top-inserted manifold-portion is formed from a second material to receive and flow one or more second gases therethrough in addition to the at least one first gas from the manifold-base portion. The second material is more corrosion-resistant to the one or more second gases than the first material. Attorney Docket 4948.164WO1 Client File 11589-1WO

Claims

CLAIMS What is claimed is: 1. A composite-manifold assembly comprising: a manifold-base portion having a plurality of valve-mounting areas formed thereon, at least one of the plurality of valve-mounting areas having one or more gas inlets, the manifold-base portion being formed from a first material and being configured to flow at least one first gas; and an edge-inserted manifold-portion coupled to and in fluid communication with the manifold-base portion to receive the at least one gas therefrom, the edge-inserted manifold-portion being formed from a second material, the edge-inserted manifold-portion being configured to receive and flow one or more second gases through one or more through-holes formed therein, the second material being more corrosion-resistant to the one or more second gases than the first material.

2. The composite-manifold assembly of claim 1, further comprising a plurality of valves, one of each of the plurality of valves configured to be coupled mechanically to respective ones of each of the valve-mounting areas.

3. The composite-manifold assembly of claim 2, wherein the plurality of valves is configured to provide a pulsed-flow of gas and a continuous flow of gas.

4. The composite-manifold assembly of claim 1, wherein the composite- manifold assembly is capable of flowing the gases at a temperature of about 220 °C. Attorney Docket 4948.164WO1 Client File 11589-1WO

5. The composite-manifold assembly of claim 1, wherein the composite- manifold assembly is configured to be coupled fluidically to a gas- distribution showerhead.

6. The composite-manifold assembly of claim 1, wherein the edge-inserted manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non-oxidizing chemicals.

7. The composite-manifold assembly of claim 1, wherein the manifold-base portion is comprised of at least one material comprising a stainless- steel material and a stainless-steel alloy material.

8. The composite-manifold assembly of claim 1, wherein the edge-inserted manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium-molybdenum-based material; a nickel-chromium-based material having additives of at least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel.

9. The composite-manifold assembly of claim 1, wherein the edge-inserted manifold-portion is coupled to the manifold-base portion by one or more mechanical fasteners.

10. The composite-manifold assembly of claim 1, wherein the edge-inserted manifold-portion is coupled to the manifold-base portion by one or more chemical adhesives.

11. The composite-manifold assembly of claim 1, wherein the edge-inserted manifold-portion is coupled to the manifold-base portion by a mechanical press-fit arrangement. Attorney Docket 4948.164WO1 Client File 11589-1WO

12. A composite-manifold assembly comprising: a manifold-base portion having a plurality of valve-mounting areas formed thereon, at least one of the plurality of valve-mounting areas having one or more gas inlets, the manifold-base portion being formed from a first material and configured to flow at least one first gas; and a top-inserted manifold-portion coupled to and in fluid communication with the manifold-base portion, the top-inserted manifold-portion being mounted at least partially through a hole formed through the manifold- base portion to receive the at least one first gas from the manifold-base portion, the top-inserted manifold-portion being formed from a second material to receive and flow one or more second gases therethrough, the second material being more corrosion-resistant to the one or more second gases than the first material.

13. The composite-manifold assembly of claim 12, wherein the composite- manifold assembly is configured to be coupled fluidically to a gas- distribution showerhead.

14. The composite-manifold assembly of claim 12, wherein the top-inserted manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non-oxidizing chemicals.

15. The composite-manifold assembly of claim 12, wherein the manifold-base portion is comprised of at least one material comprising a stainless- steel material and a stainless-steel alloy material.

16. The composite-manifold assembly of claim 12, wherein the top-inserted manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium-molybdenum-based material; a nickel-chromium-based material having additives of at Attorney Docket 4948.164WO1 Client File 11589-1WO least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel.

17. The composite-manifold assembly of claim 12, wherein the top-inserted manifold-portion is coupled to the manifold-base portion by one or more mechanical fasteners.

18. The composite-manifold assembly of claim 12, wherein the top-inserted manifold-portion is coupled to the manifold-base portion by one or more chemical adhesives.

19. The composite-manifold assembly of claim 12, wherein the top-inserted manifold-portion is coupled to the manifold-base portion by a mechanical press-fit arrangement.

20. A composite-manifold assembly comprising: a manifold-base portion having a plurality of valve-mounting areas formed thereon, at least one of the plurality of valve-mounting areas having one or more gas inlets, the manifold-base portion being formed from a first material and being configured to flow at least one first gas; and a top-inserted manifold-portion in fluid communication with the manifold- base portion, the top-inserted manifold-portion being mounted at least partially through a hole formed through the manifold-base portion, the top-inserted manifold-portion being configured to receive the at least one first gas from the manifold-base portion, the top-inserted manifold- portion being formed from a second material to receive and flow one or more second gases therethrough in addition to the at least one first gas from the manifold-base portion, the second material being more corrosion-resistant to the one or more second gases than the first material. Attorney Docket 4948.164WO1 Client File 11589-1WO

21. The composite-manifold assembly of claim 20, wherein the top-inserted manifold-portion is comprised of one or more materials that include resistance to both oxidizing chemicals and non-oxidizing chemicals.

22. The composite-manifold assembly of claim 20, wherein the manifold-base portion is comprised of at least one material comprising a stainless- steel material and a stainless-steel alloy material.

23. The composite-manifold assembly of claim 20, wherein the top-inserted manifold-portion is comprised of at least one material comprising at least one material selected from nickel-chromium-molybdenum-based material; a nickel-chromium-based material having additives of at least one of iron, cobalt, niobium, and titanium; a ceramic alloy; and an aluminum alloy plated with nickel. Attorney Docket 4948.164WO1 Client File 11589-1WO