WO2024131469A1 - Material taking method, material taking apparatus, dicing machine, readable storage medium, and electronic device - Google Patents

Material taking method, material taking apparatus, dicing machine, readable storage medium, and electronic device Download PDF

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Publication number
WO2024131469A1
WO2024131469A1 PCT/CN2023/134574 CN2023134574W WO2024131469A1 WO 2024131469 A1 WO2024131469 A1 WO 2024131469A1 CN 2023134574 W CN2023134574 W CN 2023134574W WO 2024131469 A1 WO2024131469 A1 WO 2024131469A1
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WO
WIPO (PCT)
Prior art keywords
workpiece
guide rail
material taking
state
target position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2023/134574
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French (fr)
Chinese (zh)
Inventor
冯小勇
代安朋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Megarobo Technologies Co Ltd
Original Assignee
Suzhou Megarobo Technologies Co Ltd
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Publication of WO2024131469A1 publication Critical patent/WO2024131469A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • a dicing machine is a device that uses a blade or laser to cut workpieces with high precision. Taking a wafer as an example, when processing a wafer, it is necessary to remove the wafer and transfer it from the loading platform to the target position to facilitate subsequent transportation to the carrier.
  • the purpose of the present invention is to provide a material picking method, a material picking device and a dicing machine, which can ensure the position accuracy of transferring the workpiece to the position to be processed by optimizing the material picking process, thereby providing a basis for ensuring the processing accuracy of subsequent workpieces.
  • Another object of the present invention is to provide a readable storage medium and an electronic device capable of executing or realizing the aforementioned material acquisition method.
  • an embodiment of the present invention provides a material taking method for a dicing machine, wherein the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, wherein the bearing platform is located below the guide rail, and the material taking method comprises:
  • Step S1 controlling the clamping jaws of the material picking mechanism to be in a first state, clamping the workpiece from an initial position and moving along a first direction, and placing the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail;
  • Step S2 control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is at the target position, the center of the workpiece is opposite to the center of the support platform.
  • the peripheral wall of the workpiece has a flat surface;
  • the clamping jaw includes two clamping plates and a mounting seat, and the mounting seat connects the first ends of the two clamping plates;
  • the two clamps When the clamp is in the first state, the two clamps are in a clamped state; when the clamp is in the second state, the two clamps are in an open state; the surface of the mounting base facing the second end of the clamp is a determining surface for pushing the workpiece; when the clamp pushes the workpiece back, the determining surface abuts against the planar portion.
  • step S2 whether the workpiece has moved to the target position is determined by acquiring the distance between the determined surface and the target position.
  • the material taking mechanism is provided with a sensor, and the sensor is used to detect the state of the clamping claw;
  • step S1 if the sensor detects that the clamping jaws are in an empty clamping state, the material taking mechanism is controlled to stop moving and an alarm signal is issued.
  • step S2 further comprises:
  • Step S3 control the picking mechanism to move to the top of the workpiece, and control the adsorption component of the picking mechanism to adsorb the workpiece; control the guide rail to switch to the avoidance position; control the picking mechanism to drive the workpiece to move downward and place it on the supporting platform.
  • the guide rail comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are arranged in parallel, and the length direction of the first guide rail and the second guide rail is parallel to the first direction;
  • the guide rail can be switched between a carrying position and an avoidance position, in which the distance between the first guide rail and the second guide rail is smaller than the outer diameter of the workpiece, and in the avoidance position, the distance between the first guide rail and the second guide rail is larger than the outer diameter of the workpiece;
  • the guide rail is in a carrying position.
  • the dicing machine includes a loading platform, and the loading platform is located at the initial position; before step S1, the following steps are further included:
  • Step S0 Control the loading platform to rise and fall in the vertical direction so that the workpiece placed on the loading platform
  • the target workpiece in the workpiece box is at the same height as the support surface of the guide rail; wherein the workpiece box contains a plurality of workpieces arranged at intervals in the vertical direction.
  • the embodiment of the present invention further provides a material taking device for a dicing machine, wherein the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, wherein the bearing platform is located below the guide rail, and the material taking device comprises:
  • a first control module is used to control the clamping jaws of the material picking mechanism to be in a first state, to clamp the workpiece from an initial position and move along a first direction, and to place the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail;
  • the second control module is used to control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is located at the target position, the center of the workpiece is opposite to the center of the supporting platform.
  • An embodiment of the present invention further provides a dicing machine, comprising a material taking mechanism, a guide rail and a supporting platform, wherein the supporting platform is located below the guide rail, and is characterized in that the dicing machine also comprises the material taking device described above.
  • An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored.
  • a program or instruction is stored on which a program or instruction is stored.
  • An embodiment of the present invention also provides an electronic device, including a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of the material extraction method as described in any one of the above items.
  • the material picking mechanism is first controlled to move the workpiece to a transition position beyond the target position, and then the determination surface of the clamping jaws of the material picking mechanism is used to push the workpiece back to the target position, wherein the position of the determination surface of the clamping jaws can be known, and combined with its relative position relationship with the target position and the size of the workpiece, the accuracy of pushing the workpiece back to the target position can be ensured, thereby ensuring the accuracy of the workpiece at the position to be processed, and providing a basis for ensuring the processing accuracy of subsequent workpieces.
  • the material taking device, dicing machine, readable storage medium and electronic device provided by the present invention correspond to the above-mentioned material taking method, have the same technical effects, and will not be described in detail.
  • FIG1 is a schematic diagram of a partial structure of a dicing machine in an embodiment provided by the present invention.
  • FIG2 is a schematic diagram showing the principle of the material taking method provided by the present invention.
  • FIG3 is a schematic structural diagram of the clamping jaws of the material taking mechanism in a specific embodiment
  • FIG. 4 is a flow chart of an embodiment of the material taking method provided by the present invention.
  • the material taking mechanism 10 The material taking mechanism 10, the clamping claw 11, the clamping plate 111, the mounting seat 112, the determining surface 1121, the adsorption component 12; Guide rail 20, first guide rail 21, second guide rail 22; The supporting platform 30, the loading platform 40, the workpiece box 41, the workpiece 411, and the plane portion 4111; Target position A, initial position A1, transition position A2, first direction D1, second direction D2.
  • Figure 1 is a schematic diagram of the partial structure of the dicing machine in the embodiment provided by the present invention
  • Figure 2 is a schematic diagram of the principle of the material picking method provided by the present invention
  • Figure 3 is a schematic diagram of the structure of the clamping jaws of the material picking mechanism in a specific embodiment
  • Figure 4 is a flow chart of an embodiment of the material picking method provided by the present invention.
  • the embodiment of the present invention provides a material taking method, which is applied to a dicing machine.
  • the local structure of the dicing machine can be understood with reference to FIG. 1.
  • the dicing machine includes a material taking mechanism 10, a guide rail 20 and a carrier 30; wherein the carrier 30 is located below the guide rail 20, and the carrier 30 is used to carry the workpiece. 411, to facilitate processing of the workpiece 411; the guide rail 20 is used to assist in supporting the workpiece 411 during the process of transferring the workpiece 411; the material taking mechanism 10 can move under program or instruction control to transfer the workpiece 411.
  • the material taking method includes:
  • Step S1 control the clamping jaw 11 of the material picking mechanism 10 to be in the first state, clamp the workpiece 411 from the initial position A1 and move along the first direction D1, and place the workpiece 411 at the transition position A2 on the guide rail 20, wherein in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20.
  • the first direction D1 here refers to the direction from left to right; here, in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20, which means that the material picking mechanism 10 drives the workpiece 411 to move along the first direction D1 and passes through the target position A, and continues to move a certain distance to reach the transition position A2.
  • the transition position A2 is far away from the initial position A1 relative to the target position A.
  • the material picking mechanism 10 drives the workpiece 411 to move along the first direction D1
  • the workpiece 411 can slide along the upper surface of the guide rail 20.
  • the probability of losing the workpiece 411 can be reduced.
  • Step S2 control the jaws 11 of the picking mechanism 10 to be in the second state, and control the picking mechanism 10 to move along the second direction D2 opposite to the first direction D1, and push the workpiece 411 back from the transition position A2 to the target position A through the determined surface 1121 of the jaws 11 in the second state; wherein, when the workpiece 411 is located at the target position A, the center of the workpiece 411 is opposite to the center of the supporting platform 30.
  • the target position A of the guide rail 20 is opposite to the supporting platform 30, so when the workpiece 411 is pushed back to the target position A, the workpiece 411 is opposite to the supporting platform 30.
  • the above-mentioned material picking method first controls the material picking mechanism 10 to move the workpiece 411 to a transition position A2 beyond the target position A, and then uses the determination surface 1121 of the clamping jaw 11 of the material picking mechanism 20 to push the workpiece 411 back to the target position A.
  • the clamping jaw 11 has a determination surface 1121 in the second state, and the position of the determination surface 1121 can be accurately known.
  • the accuracy of the position movement of the workpiece 411 can be ensured, so that the workpiece 411 can be accurately moved to the target position A, so that the center of the workpiece 411 at the target position A is directly opposite to the center of the carrier 30, and when the workpiece 411 is subsequently transferred from the bottom to the carrier 30, it can be ensured that the workpiece 411
  • the accuracy of the position of the carrier 30 provides a basis for ensuring the subsequent processing accuracy of the workpiece 411 .
  • the clamp 11 includes two clamps 111 and a mounting seat 112.
  • the mounting seat 112 is connected to the first ends of the two clamps 111.
  • the mounting seat 112 is connected to the right end of the clamp 111.
  • the second ends of the two clamps 111 opposite to the first ends are open structures, and the workpiece 411 can be clamped through the opening.
  • the two clamps 111 are in a clamped state and can clamp the workpiece 411, that is, the edge of the workpiece 411 is located between the two clamps 111, and the two clamps 111 are in contact with the upper surface and the lower surface of the workpiece 411 respectively to clamp the workpiece 411; when the clamp 11 is in the aforementioned second state, the two clamps 111 are in an open state. At this time, although the edge of the workpiece 411 can still be located between the two clamps 111, because the clamps 111 are opened, the clamps 111 will not contact the workpiece 411 and cannot clamp the workpiece 411.
  • the relative position of the clamp 11 and the workpiece 411 can be controlled so that the edge of the workpiece 411 abuts against the mounting seat 112. Even if the mounting seat 112 contacts the peripheral wall of the workpiece 411, when the material picking mechanism 10 is controlled to move along the second direction D2, the mounting seat 112 pushes the workpiece 411 to move along the guide rail 20.
  • the surface of the mounting seat 112 of the clamping jaw 11 facing the second end of the clamping plate 111 is a determining surface 1121 for pushing the workpiece 411 .
  • the peripheral wall of the workpiece 411 has a planar portion 4111, and when the jaws 11 clamp the workpiece 411, it clamps the position where the planar portion 4111 is located. Accordingly, when the jaws 11 are in the second state, the determined surface 1121 of the mounting seat 112 abuts against the planar portion 4111. As shown in Figure 3, the determined surface 1121 of the mounting seat 112 includes surface portions located on both sides of the clamping plate 111.
  • step S2 there is a calibration relationship between the determination surface 1121 of the clamp 11 and the target position A of the guide rail 20 .
  • the distance between the determination surface 1121 and the target position A is obtained to determine whether the workpiece 411 has moved to the target position A.
  • the relative positions of the guide rail 20 and the support platform 30 of the dicing machine are determined, and the target position A on the guide rail 20 facing the support platform 30 can also be determined.
  • the driving part such as the motor screw driving structure
  • the position of the material picking mechanism 10 can be accurately determined.
  • the determination surface 1121 of the clamping jaw 11 of the material picking mechanism 10 can also be accurately determined, so that the distance between the determination surface 1121 of the clamping jaw 11 and the target position A can be known.
  • the distance between the center of the workpiece 411 and the target position A can be determined, that is, the horizontal distance L between the center of the workpiece 411 and the center of the support platform 30, so that the When the workpiece 411 is pushed to the target position A, the relative distance between the determining surface 1121 of the clamp 11 and the target position A is determined, and then the distance between the determining surface 1121 of the clamp 11 and the target position A is used to determine whether the workpiece 411 has moved to the target position.
  • a sensor (not shown in the figure) is provided on the picking mechanism 10, and the sensor is used to detect the state of the clamping jaw 11 of the picking mechanism 10; in the aforementioned step S1, that is, during the process of the picking mechanism 10 moving from the initial position A1 to the transition position A2, if the sensor detects that the clamping jaw 11 is in an empty clamping state, the picking mechanism 10 is controlled to stop moving and an alarm signal is issued.
  • the jaws 11 of the picking mechanism 10 clamping the workpiece 411 to move the workpiece 411 from the initial position A to the transition position A2 if the jaws 11 are in an empty clamping state, that is, there is no workpiece 411 clamped on the jaws 11, it indicates that the workpiece 411 has fallen from the jaws 11.
  • the sensor can detect the empty clamping state and feed back the corresponding signal to the processor. After receiving the empty clamping signal, the processor controls the picking mechanism 10 to stop moving and sends an alarm signal to inform the staff that the equipment has an abnormality and needs to be dealt with in time to avoid causing greater losses.
  • the material picking method further includes:
  • Step S3 control the picking mechanism 10 to move above the workpiece 411, and control the adsorption component 12 of the picking mechanism 10 to adsorb the workpiece 411; control the guide rail 20 to switch to the avoidance position, and control the picking mechanism 10 to drive the workpiece 411 to move downward and place it on the supporting platform 30.
  • the guide rail 20 is located above the support platform 30 , and the avoidance position of the guide rail 20 refers to a position that will not block the workpiece 411 from moving down to the support platform 30 , so as to avoid damaging the workpiece 411 or causing the position of the workpiece 411 to shift.
  • the adsorption component 12 of the material picking mechanism 10 includes at least one suction cup, which can be adsorbed on the upper surface of the workpiece 411 by vacuuming to adsorb and fix the workpiece 411, ensuring that the workpiece 411 will not fall off when the guide rail 20 switches to the avoidance position and moves the workpiece 411 down to the supporting platform 30.
  • the guide rail 20 includes a first guide rail 21 and a second guide rail 22.
  • the first guide rail 21 and the second guide rail 22 are arranged in parallel, and the length direction of the two is parallel to the aforementioned first direction D1 or the second direction D2.
  • the guide rail 20 can be cut between the load-bearing position and the aforementioned avoidance position.
  • the distance between the first guide rail 21 and the second guide rail 22 is smaller than the outer diameter of the workpiece 411.
  • the workpiece 411 can be supported by the first guide rail 21 and the second guide rail 22.
  • the distance between the first guide rail 21 and the second guide rail 22 is larger than the outer diameter of the workpiece 411. As shown by the dotted line in the figure, the workpiece 411 will not be hindered by the guide rail 20 when it moves from the height of the guide rail 20 to the carrying platform 30 .
  • step S1 the guide rail 20 is in the carrying position.
  • the position of the guide rail 20 can be switched by the first guide rail 21 and the second guide rail 22 moving toward or away from each other in a direction perpendicular to the first direction D1 or the second direction D2.
  • the dicing machine includes a loading table 40, which can be located at an initial position A1, and the material picking mechanism 10 clamps the target workpiece to be processed from the position of the loading table 40; specifically, a workpiece box 41 can be placed on the loading table 40, and a plurality of workpieces 411 arranged vertically at intervals are arranged in the workpiece box 41.
  • the material taking method further comprises, between step S1:
  • Step S0 controlling the loading platform 40 to rise and fall in the vertical direction, so that the target workpiece in the workpiece box 41 placed on the loading platform 40 is at the same height position as the support surface of the guide rail 20 .
  • the material taking mechanism 10 to clamp the target workpiece.
  • the target workpiece When the target workpiece is driven to move along the first direction D1, the target workpiece can be translated along the guide rail 20 to guide its position and support it.
  • the workpiece 411 may be a wafer or other workpiece to be processed.
  • an embodiment of the present invention further provides a material taking device, which is used for a dicing machine.
  • the structure of the dicing machine is consistent with the above-mentioned description.
  • the material taking device includes:
  • a first control module is used to control the clamping jaws 11 of the material picking mechanism 10 to be in a first state, that is, a state of clamping the workpiece 411, clamping the workpiece 411 from the initial position A1 and moving it along the first direction D1, and placing the workpiece 411 at a transition position A2 of the guide rail 20; wherein, in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20;
  • the second control module is used to control the clamp 11 to be in a second state, i.e., an open state, a state in which the workpiece 411 cannot be clamped, and to control the material picking mechanism 10 to move along a second direction D2 opposite to the first direction D1, and to push the workpiece 411 back from the transition position to the target position through the determined surface 1121 of the clamp 11 in the second state; wherein, when the workpiece 411 is at the target position, the center of the workpiece 411 is opposite to the center of the supporting platform 30.
  • a second state i.e., an open state, a state in which the workpiece 411 cannot be clamped
  • the material picking device further includes a third control module and a fourth control module, wherein the third control module is used to control the material picking mechanism 10 to move to the top of the workpiece 411 and adsorb the workpiece 411, and is also used to control the material picking mechanism 10 to move the adsorbed workpiece 411 downward and place it on the support On the carrier 30 , the fourth control module is used to control the guide rail 20 to switch between the carrying position and the avoidance position.
  • the working process of the material taking device corresponds to the aforementioned material taking method, and will not be repeated here.
  • An embodiment of the present invention also provides a dicing machine, which includes a material picking mechanism 10, a guide rail 20 and a support platform 30, and may also include a loading platform 40.
  • the structural arrangements and actions of these components are as described above and will not be repeated here.
  • the dicing machine also includes the above-mentioned material picking device, which can use the above-mentioned material picking method to accurately transfer the workpiece 411 from the loading platform 40 to the support platform 30. The specific process corresponds to the above-mentioned material picking method and will not be repeated here.
  • An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored.
  • a program or instruction is stored on which a program or instruction is stored.
  • An embodiment of the present invention further provides an electronic device, including a processor and a memory, wherein the memory stores a program or instruction that can be run on the processor, and when the program or instruction is executed by the processor, the steps of the aforementioned material extraction method can be implemented.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A material taking method, a material taking apparatus, a dicing machine, a readable storage medium, and an electronic device. The material taking method is used for the dicing machine, and the dicing machine comprises a material taking mechanism, a guide rail, and a stage, wherein the stage is located below the guide rail. The material taking method comprises: step S1, controlling a gripper of a material taking mechanism to be in a first state to grip a workpiece from an initial position, move in a first direction, and place the workpiece at a transition position of the guide rail, wherein the transition position is further than a target position of the guide rail in the first direction; and step S2, controlling the gripper to be in a second state, controlling the material taking mechanism to move in a second direction opposite to the first direction, and pushing the workpiece backwards to the target position from the transition position by means of a determination surface of the gripper in the second state, wherein when the workpiece is at the target position, the center of the workpiece directly faces the center of the stage. By optimizing a material taking process, the positional accuracy of transferring a workpiece to a position for processing can be ensured.

Description

取料方法、取料装置、划片机、可读存储介质以及电子设备Material taking method, material taking device, dicing machine, readable storage medium and electronic equipment

本申请要求于2022年12月20日提交中国专利局、申请号为202211640906.0、发明名称为“取料方法、取料装置、划片机、可读存储介质以及电子设备”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed with the China Patent Office on December 20, 2022, with application number 202211640906.0, and invention name "Material taking method, material taking device, dicing machine, readable storage medium and electronic device", all contents of which are incorporated by reference in this application.

技术领域Technical Field

本发明涉及划片机技术领域,特别是涉及一种取料方法、取料装置、划片机、可读存储介质以及电子设备。The present invention relates to the technical field of dicing machines, and in particular to a material taking method, a material taking device, a dicing machine, a readable storage medium and an electronic device.

背景技术Background technique

划片机是使用刀片或者激光等方式高精度切割工件的装置。以工件为晶圆为例,在对晶圆进行加工时,需要对晶圆进行取料操作,将其从上料台转移至目标位置,方便后续搬运至承载台。A dicing machine is a device that uses a blade or laser to cut workpieces with high precision. Taking a wafer as an example, when processing a wafer, it is necessary to remove the wafer and transfer it from the loading platform to the target position to facilitate subsequent transportation to the carrier.

相关技术中,划片机上设有取料机构,取料机构一般采用夹持的方式将晶圆从上料台转移至承载台,实际应用中发现,晶圆转移后的位置精度无法保证,即最终将晶圆放置在承载台上的位置不够准确,存在位置偏差,该位置偏差会导致后续对晶圆的加工精度无法保证,影响加工质量。In the related art, a material picking mechanism is provided on the dicing machine. The material picking mechanism generally adopts a clamping method to transfer the wafer from the loading table to the supporting table. It is found in actual applications that the position accuracy of the wafer after transfer cannot be guaranteed, that is, the position of the wafer finally placed on the supporting table is not accurate enough and there is a position deviation. This position deviation will make the subsequent processing accuracy of the wafer unable to be guaranteed, affecting the processing quality.

发明内容Summary of the invention

本发明的目的是提供一种取料方法、取料装置及划片机,通过对取料过程的优化,能够确保将工件转移至待加工位置的位置准确度,为保障后续工件的加工精度提供了基础。The purpose of the present invention is to provide a material picking method, a material picking device and a dicing machine, which can ensure the position accuracy of transferring the workpiece to the position to be processed by optimizing the material picking process, thereby providing a basis for ensuring the processing accuracy of subsequent workpieces.

本发明的另一目的是提供一种可读存储介质及电子设备,能够执行或实现前述取料方法。Another object of the present invention is to provide a readable storage medium and an electronic device capable of executing or realizing the aforementioned material acquisition method.

为解决上述技术问题,本发明实施例提供一种取料方法,用于划片机,所述划片机包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,所述取料方法包括:In order to solve the above technical problems, an embodiment of the present invention provides a material taking method for a dicing machine, wherein the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, wherein the bearing platform is located below the guide rail, and the material taking method comprises:

步骤S1、控制所述取料机构的夹爪处于第一状态,从初始位置夹取工件并沿第一方向移动,将所述工件放置在所述导轨的过渡位置;其中,在所述第一方向上,所述过渡位置超出所述导轨的目标位置; Step S1, controlling the clamping jaws of the material picking mechanism to be in a first state, clamping the workpiece from an initial position and moving along a first direction, and placing the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail;

步骤S2、控制所述夹爪处于第二状态,并控制所述取料机构沿与所述第一方向相反的第二方向移动,通过所述夹爪在所述第二状态下的确定面将所述工件从所述过渡位置回推至所述目标位置;其中,所述工件位于所述目标位置时,所述工件的中心与所述承载台的中心正对。Step S2, control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is at the target position, the center of the workpiece is opposite to the center of the support platform.

如上所述的取料方法,所述工件的周壁具有平面部;所述夹爪包括两个夹板和安装座,所述安装座连接两个所述夹板的第一端;In the material taking method as described above, the peripheral wall of the workpiece has a flat surface; the clamping jaw includes two clamping plates and a mounting seat, and the mounting seat connects the first ends of the two clamping plates;

所述夹爪处于所述第一状态,两个所述夹板处于夹紧状态,所述夹爪处于所述第二状态,两个夹板处于张开状态,所述安装座朝向所述夹板第二端的表面为推动所述工件的确定面,所述夹爪回推所述工件时,所述确定面与所述平面部抵接。When the clamp is in the first state, the two clamps are in a clamped state; when the clamp is in the second state, the two clamps are in an open state; the surface of the mounting base facing the second end of the clamp is a determining surface for pushing the workpiece; when the clamp pushes the workpiece back, the determining surface abuts against the planar portion.

如上所述的取料方法,所述确定面与所述目标位置之间具有标定关系;In the material taking method as described above, there is a calibration relationship between the determined surface and the target position;

所述步骤S2中,通过获取所述确定面与所述目标位置之间的距离来判断所述工件是否移动至所述目标位置。In the step S2, whether the workpiece has moved to the target position is determined by acquiring the distance between the determined surface and the target position.

如上所述的取料方法,所述取料机构上设有传感器,所述传感器用于检测所述夹爪的状态;In the material taking method as described above, the material taking mechanism is provided with a sensor, and the sensor is used to detect the state of the clamping claw;

所述步骤S1中,若所述传感器检测到所述夹爪处于空夹状态,控制所述取料机构停止运动并发出报警信号。In the step S1, if the sensor detects that the clamping jaws are in an empty clamping state, the material taking mechanism is controlled to stop moving and an alarm signal is issued.

如上所述的取料方法,所述步骤S2之后还包括:The material taking method as described above, after step S2, further comprises:

步骤S3、控制所述取料机构移动至所述工件的上方,并控制所述取料机构的吸附组件吸附所述工件;控制所述导轨切换至避让位置;控制所述取料机构带动所述工件下移并放置在所述承载台上。Step S3, control the picking mechanism to move to the top of the workpiece, and control the adsorption component of the picking mechanism to adsorb the workpiece; control the guide rail to switch to the avoidance position; control the picking mechanism to drive the workpiece to move downward and place it on the supporting platform.

如上所述的取料方法,所述导轨包括第一导轨和第二导轨,所述第一导轨和所述第二导轨平行布置,且两者的长度方向与所述第一方向平行;所述导轨能够在承载位置和所述避让位置之间切换,在所述承载位置,所述第一导轨和所述第二导轨之间的距离小于所述工件的外径,在所述避让位置,所述第一导轨和所述第二导轨之间的距离大于所述工件的外径;According to the material taking method as described above, the guide rail comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are arranged in parallel, and the length direction of the first guide rail and the second guide rail is parallel to the first direction; the guide rail can be switched between a carrying position and an avoidance position, in which the distance between the first guide rail and the second guide rail is smaller than the outer diameter of the workpiece, and in the avoidance position, the distance between the first guide rail and the second guide rail is larger than the outer diameter of the workpiece;

所述步骤S1中,所述导轨处于承载位置。In the step S1, the guide rail is in a carrying position.

如上所述的取料方法,所述划片机包括上料台,所述上料台位于所述初始位置;所述步骤S1之前还包括:In the material taking method as described above, the dicing machine includes a loading platform, and the loading platform is located at the initial position; before step S1, the following steps are further included:

步骤S0、控制所述上料台沿竖直方向升降,使所述上料台上放置的工 件盒中的目标工件处于与所述导轨的支撑面相同的高度位置;其中,所述工件盒内设置有沿竖向间隔排布的多个工件。Step S0: Control the loading platform to rise and fall in the vertical direction so that the workpiece placed on the loading platform The target workpiece in the workpiece box is at the same height as the support surface of the guide rail; wherein the workpiece box contains a plurality of workpieces arranged at intervals in the vertical direction.

本发明实施例还提供一种取料装置,用于划片机,所述划片机包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,所述取料装置包括:The embodiment of the present invention further provides a material taking device for a dicing machine, wherein the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, wherein the bearing platform is located below the guide rail, and the material taking device comprises:

第一控制模块,用于控制所述取料机构的夹爪处于第一状态,从初始位置夹取工件并沿第一方向移动,将所述工件放置在所述导轨的过渡位置;其中,在所述第一方向上,所述过渡位置超出所述导轨的目标位置;A first control module is used to control the clamping jaws of the material picking mechanism to be in a first state, to clamp the workpiece from an initial position and move along a first direction, and to place the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail;

第二控制模块,用于控制所述夹爪处于第二状态,并控制所述取料机构沿与所述第一方向相反的第二方向移动,通过所述夹爪在所述第二状态下的确定面将所述工件从所述过渡位置回推至所述目标位置;其中,所述工件位于所述目标位置时,所述工件的中心与所述承载台的中心正对。The second control module is used to control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is located at the target position, the center of the workpiece is opposite to the center of the supporting platform.

本发明实施例还提供一种划片机,包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,其特征在于,所述划片机还包括上述所述的取料装置。An embodiment of the present invention further provides a dicing machine, comprising a material taking mechanism, a guide rail and a supporting platform, wherein the supporting platform is located below the guide rail, and is characterized in that the dicing machine also comprises the material taking device described above.

本发明实施例还提供一种可读存储介质,所述可读存储介质上存储程序或指令,所述程序或指令被处理器执行时实现如上述任一项所述的取料方法的步骤。An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the material taking method as described in any one of the above items are implemented.

本发明实施例还提供一种电子设备,包括处理器、存储器以及存储在所述存储器上并可在所述处理器上运行的程序或指令,所述程序或指令被所述处理器执行时实现如上述任一项所述的取料方法的步骤。An embodiment of the present invention also provides an electronic device, including a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of the material extraction method as described in any one of the above items.

与已有取料方法相比,本发明提供的方案中,先控制取料机构将工件移动至超出目标位置的过渡位置,再利用取料机构的夹爪的确定面将工件回推至目标位置,其中,夹爪的确定面的位置可以获知,结合其与目标位置的相对位置关系和工件大小,可确保将工件回推至目标位置的准确性,从而保证工件在待加工位置的精确度,为保障后续工件的加工精度提供了基础。Compared with the existing material picking methods, in the solution provided by the present invention, the material picking mechanism is first controlled to move the workpiece to a transition position beyond the target position, and then the determination surface of the clamping jaws of the material picking mechanism is used to push the workpiece back to the target position, wherein the position of the determination surface of the clamping jaws can be known, and combined with its relative position relationship with the target position and the size of the workpiece, the accuracy of pushing the workpiece back to the target position can be ensured, thereby ensuring the accuracy of the workpiece at the position to be processed, and providing a basis for ensuring the processing accuracy of subsequent workpieces.

本发明提供的取料装置、划片机、可读存储介质及电子设备与上述取料方法对应,具有相同的技术效果,不再赘述。 The material taking device, dicing machine, readable storage medium and electronic device provided by the present invention correspond to the above-mentioned material taking method, have the same technical effects, and will not be described in detail.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明所提供实施例中划片机的局部结构示意图;FIG1 is a schematic diagram of a partial structure of a dicing machine in an embodiment provided by the present invention;

图2为本发明所提供的取料方法的原理示意图;FIG2 is a schematic diagram showing the principle of the material taking method provided by the present invention;

图3为具体实施例中取料机构的夹爪的结构示意图;FIG3 is a schematic structural diagram of the clamping jaws of the material taking mechanism in a specific embodiment;

图4为本发明所提供取料方法的一种实施例的流程图。FIG. 4 is a flow chart of an embodiment of the material taking method provided by the present invention.

附图标记说明:
取料机构10,夹爪11,夹板111,安装座112,确定面1121,吸附组
件12;
导轨20,第一导轨21,第二导轨22;
承载台30,上料台40,工件盒41,工件411,平面部4111;
目标位置A,初始位置A1,过渡位置A2,第一方向D1,第二方向
D2。
Description of reference numerals:
The material taking mechanism 10, the clamping claw 11, the clamping plate 111, the mounting seat 112, the determining surface 1121, the adsorption component 12;
Guide rail 20, first guide rail 21, second guide rail 22;
The supporting platform 30, the loading platform 40, the workpiece box 41, the workpiece 411, and the plane portion 4111;
Target position A, initial position A1, transition position A2, first direction D1, second direction
D2.

具体实施方式Detailed ways

现有划片机对工件的取料方法中,通过控制取料机构直接将工件夹取并放置在目标位置,经过对该取料方式的研究发现,虽然取料机构的夹取工件的夹爪的移动距离可以准确控制,但是由于夹爪每次夹持工件的位置有一定的偏差,导致最终不能将工件准确地放置到目标位置。针对此问题,本文对工件的取料方式进行了改进优化,以能够将工件准确地放置在目标位置。In the existing method of picking up workpieces by a dicing machine, the workpiece is directly clamped and placed at the target position by controlling the picking mechanism. After studying this picking method, it is found that although the moving distance of the clamping claw of the picking mechanism can be accurately controlled, the position of the clamping claw holding the workpiece each time has a certain deviation, resulting in the failure to accurately place the workpiece at the target position. In response to this problem, this paper improves and optimizes the workpiece picking method so that the workpiece can be accurately placed at the target position.

为了使本技术领域的人员更好地理解本发明方案,下面结合附图和具体实施方式对本发明作进一步的详细说明。In order to enable those skilled in the art to better understand the scheme of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

请参考图1至图4,图1为本发明所提供实施例中划片机的局部结构示意图;图2为本发明所提供的取料方法的原理示意图;图3为具体实施例中取料机构的夹爪的结构示意图;图4为本发明所提供取料方法的一种实施例的流程图。Please refer to Figures 1 to 4, Figure 1 is a schematic diagram of the partial structure of the dicing machine in the embodiment provided by the present invention; Figure 2 is a schematic diagram of the principle of the material picking method provided by the present invention; Figure 3 is a schematic diagram of the structure of the clamping jaws of the material picking mechanism in a specific embodiment; Figure 4 is a flow chart of an embodiment of the material picking method provided by the present invention.

本发明实施例提供一种取料方法,该取料方法应用于划片机,该划片机的局部结构可参考图1理解,该划片机包括取料机构10、导轨20和承载台30;其中的承载台30位于导轨20的下方,承载台30用于承载工件 411,以方便对工件411进行加工;其中的导轨20用于在转移工件411过程中辅助支撑工件411;其中的取料机构10可在程序或指令控制下移动以转移工件411。The embodiment of the present invention provides a material taking method, which is applied to a dicing machine. The local structure of the dicing machine can be understood with reference to FIG. 1. The dicing machine includes a material taking mechanism 10, a guide rail 20 and a carrier 30; wherein the carrier 30 is located below the guide rail 20, and the carrier 30 is used to carry the workpiece. 411, to facilitate processing of the workpiece 411; the guide rail 20 is used to assist in supporting the workpiece 411 during the process of transferring the workpiece 411; the material taking mechanism 10 can move under program or instruction control to transfer the workpiece 411.

本实施例中,取料方法包括:In this embodiment, the material taking method includes:

步骤S1、控制取料机构10的夹爪11处于第一状态,从初始位置A1夹取工件411并沿第一方向D1移动,将工件411放置在导轨20上的过渡位置A2,其中,在第一方向D1上,过渡位置A2超出导轨20的目标位置A。Step S1, control the clamping jaw 11 of the material picking mechanism 10 to be in the first state, clamp the workpiece 411 from the initial position A1 and move along the first direction D1, and place the workpiece 411 at the transition position A2 on the guide rail 20, wherein in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20.

以图2所示方位,此处的第一方向D1指的是从左至右的方向;此处,在第一方向D1上,过渡位置A2超出导轨20的目标位置A,指的是取料机构10带动工件411沿第一方向D1移动时经过了目标位置A,并继续移动一定距离后到达过渡位置A2,换句话来说,过渡位置A2相对目标位置A远离初始位置A1。In the orientation shown in Figure 2, the first direction D1 here refers to the direction from left to right; here, in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20, which means that the material picking mechanism 10 drives the workpiece 411 to move along the first direction D1 and passes through the target position A, and continues to move a certain distance to reach the transition position A2. In other words, the transition position A2 is far away from the initial position A1 relative to the target position A.

工件411放置在导轨20上后,由导轨20支撑。After the workpiece 411 is placed on the guide rail 20 , it is supported by the guide rail 20 .

具体应用中,取料机构10带动工件411沿第一方向D1移动过程中,工件411可以沿导轨20的上表面滑动,在夹爪11夹取和导轨20支撑的双重作用下,可降低工件411丢失的机率。In a specific application, when the material picking mechanism 10 drives the workpiece 411 to move along the first direction D1, the workpiece 411 can slide along the upper surface of the guide rail 20. Under the dual effects of the clamping of the clamp 11 and the support of the guide rail 20, the probability of losing the workpiece 411 can be reduced.

步骤S2、控制取料机构10的夹爪11处于第二状态,并控制取料机构10沿与第一方向D1相反的第二方向D2移动,通过夹爪11在第二状态下的确定面1121将工件411从过渡位置A2回推至目标位置A;其中,工件411位于目标位置A时,工件411的中心与承载台30的中心正对,可以理解,导轨20的目标位置A与承载台30正对,这样将工件411推回至目标位置A时,工件411与承载台30正对。Step S2, control the jaws 11 of the picking mechanism 10 to be in the second state, and control the picking mechanism 10 to move along the second direction D2 opposite to the first direction D1, and push the workpiece 411 back from the transition position A2 to the target position A through the determined surface 1121 of the jaws 11 in the second state; wherein, when the workpiece 411 is located at the target position A, the center of the workpiece 411 is opposite to the center of the supporting platform 30. It can be understood that the target position A of the guide rail 20 is opposite to the supporting platform 30, so when the workpiece 411 is pushed back to the target position A, the workpiece 411 is opposite to the supporting platform 30.

上述取料方法先控制取料机构10将工件411移动至超过目标位置A的过渡位置A2,再利用取料机构20的夹爪11的确定面1121将工件411回推至目标位置A,夹爪11在第二状态下具有一个确定面1121,该确定面1121的位置可以准确获知,通过该确定面1121接触工件411的边缘并推动工件411移动,能够确保工件411位置移动的准确性,从而将工件411准确地移动至目标位置A,实现工件411在目标位置A的中心与承载台30的中心正对,后续将工件411下方转移到承载台30上时能够保证工件411 在承载台30的位置的准确度,为保障后续工件411的加工精度提供了基础。The above-mentioned material picking method first controls the material picking mechanism 10 to move the workpiece 411 to a transition position A2 beyond the target position A, and then uses the determination surface 1121 of the clamping jaw 11 of the material picking mechanism 20 to push the workpiece 411 back to the target position A. The clamping jaw 11 has a determination surface 1121 in the second state, and the position of the determination surface 1121 can be accurately known. By contacting the edge of the workpiece 411 with the determination surface 1121 and pushing the workpiece 411 to move, the accuracy of the position movement of the workpiece 411 can be ensured, so that the workpiece 411 can be accurately moved to the target position A, so that the center of the workpiece 411 at the target position A is directly opposite to the center of the carrier 30, and when the workpiece 411 is subsequently transferred from the bottom to the carrier 30, it can be ensured that the workpiece 411 The accuracy of the position of the carrier 30 provides a basis for ensuring the subsequent processing accuracy of the workpiece 411 .

如图3所示,本实施例中,夹爪11包括两个夹板111和安装座112,安装座112连接两个夹板111的第一端,以图3所示方位,安装座112连接在夹板111的右端,这样,两个夹板111的与第一端相对的第二端为开口结构,通过该开口可夹取工件411。As shown in Figure 3, in this embodiment, the clamp 11 includes two clamps 111 and a mounting seat 112. The mounting seat 112 is connected to the first ends of the two clamps 111. In the orientation shown in Figure 3, the mounting seat 112 is connected to the right end of the clamp 111. In this way, the second ends of the two clamps 111 opposite to the first ends are open structures, and the workpiece 411 can be clamped through the opening.

具体的,夹爪11处在前述第一状态时,两个夹板111处于夹紧状态,可夹住工件411,即工件411的边缘部位于两个夹板111之间,两个夹板111分别与工件411的上表面和下表面接触,以夹持工件411;夹爪11处在前述第二状态时,两个夹板111处于张开状态,此时,工件411的边缘部虽然还可以处在两个夹板111之间,但因夹板111张开,所以夹板111不会接触工件411,无法夹持工件411,夹爪11在第二状态时,可通过控制夹爪11与工件411的相对位置,使工件411的边缘部与安装座112相抵接,即使安装座112与工件411的周壁接触,控制取料机构10沿第二方向D2移动时,安装座112推动工件411沿导轨20移动。Specifically, when the clamp 11 is in the aforementioned first state, the two clamps 111 are in a clamped state and can clamp the workpiece 411, that is, the edge of the workpiece 411 is located between the two clamps 111, and the two clamps 111 are in contact with the upper surface and the lower surface of the workpiece 411 respectively to clamp the workpiece 411; when the clamp 11 is in the aforementioned second state, the two clamps 111 are in an open state. At this time, although the edge of the workpiece 411 can still be located between the two clamps 111, because the clamps 111 are opened, the clamps 111 will not contact the workpiece 411 and cannot clamp the workpiece 411. When the clamp 11 is in the second state, the relative position of the clamp 11 and the workpiece 411 can be controlled so that the edge of the workpiece 411 abuts against the mounting seat 112. Even if the mounting seat 112 contacts the peripheral wall of the workpiece 411, when the material picking mechanism 10 is controlled to move along the second direction D2, the mounting seat 112 pushes the workpiece 411 to move along the guide rail 20.

其中,夹爪11的安装座112朝向夹板111的第二端的表面为推动工件411的确定面1121。The surface of the mounting seat 112 of the clamping jaw 11 facing the second end of the clamping plate 111 is a determining surface 1121 for pushing the workpiece 411 .

结合图2和图3,具体的,工件411的周壁具有平面部4111,夹爪11夹持工件411时夹持的是平面部4111所在位置,相应地,夹爪11在第二状态时,其安装座112的确定面1121与平面部4111抵接,图3所示中,安装座112的确定面1121包括位于夹板111两侧的表面部分。In combination with Figures 2 and 3, specifically, the peripheral wall of the workpiece 411 has a planar portion 4111, and when the jaws 11 clamp the workpiece 411, it clamps the position where the planar portion 4111 is located. Accordingly, when the jaws 11 are in the second state, the determined surface 1121 of the mounting seat 112 abuts against the planar portion 4111. As shown in Figure 3, the determined surface 1121 of the mounting seat 112 includes surface portions located on both sides of the clamping plate 111.

在一种可实现的方式中,夹爪11的确定面1121与导轨20的目标位置A之间具有标定关系,在前述步骤S2中,通过获取确定面1121与目标位置A之间的距离来判断工件411是否移动至目标位置A。In one achievable manner, there is a calibration relationship between the determination surface 1121 of the clamp 11 and the target position A of the guide rail 20 . In the aforementioned step S2 , the distance between the determination surface 1121 and the target position A is obtained to determine whether the workpiece 411 has moved to the target position A.

具体来说,划片机的导轨20和承载台30的相对位置是确定的,导轨20上正对承载台30的目标位置A也是可以确定的,通过对驱动取料机构10移动的驱动部(比如电机丝杆驱动结构)的控制,取料机构10的位置可以精确确定,相应地,取料机构10的夹爪11的确定面1121也就可以精确确定,从而夹爪11的确定面1121和目标位置A之间的距离可以获知,结合工件411的尺寸,可以确定工件411的中心与目标位置A之间的距离,即工件411的中心与承载台30的中心之间的水平距离L,从而可以标定出 将工件411推动至目标位置A时,夹爪11的确定面1121和目标位置A之间的相对距离,进而通过夹爪11的确定面1121和目标位置A之间的距离来判断是否工件411移动至目标位置。Specifically, the relative positions of the guide rail 20 and the support platform 30 of the dicing machine are determined, and the target position A on the guide rail 20 facing the support platform 30 can also be determined. By controlling the driving part (such as the motor screw driving structure) that drives the material picking mechanism 10 to move, the position of the material picking mechanism 10 can be accurately determined. Correspondingly, the determination surface 1121 of the clamping jaw 11 of the material picking mechanism 10 can also be accurately determined, so that the distance between the determination surface 1121 of the clamping jaw 11 and the target position A can be known. Combined with the size of the workpiece 411, the distance between the center of the workpiece 411 and the target position A can be determined, that is, the horizontal distance L between the center of the workpiece 411 and the center of the support platform 30, so that the When the workpiece 411 is pushed to the target position A, the relative distance between the determining surface 1121 of the clamp 11 and the target position A is determined, and then the distance between the determining surface 1121 of the clamp 11 and the target position A is used to determine whether the workpiece 411 has moved to the target position.

在一种可实现的方式中,取料机构10上设有传感器(图中未示出),该传感器用于检测取料机构10的夹爪11的状态;在前述步骤S1中,即取料机构10从初始位置A1向过渡位置A2移动的过程中,若传感器检测到夹爪11处于空夹状态,则控制取料机构10停止运动并发出报警信号。In one feasible manner, a sensor (not shown in the figure) is provided on the picking mechanism 10, and the sensor is used to detect the state of the clamping jaw 11 of the picking mechanism 10; in the aforementioned step S1, that is, during the process of the picking mechanism 10 moving from the initial position A1 to the transition position A2, if the sensor detects that the clamping jaw 11 is in an empty clamping state, the picking mechanism 10 is controlled to stop moving and an alarm signal is issued.

换句话说,在取料机构10的夹爪11夹取工件411以将工件411由初始位置A移动到过渡位置A2的过程中,若夹爪11处于空夹状态,即夹爪11上没有夹持的工件411,则表明工件411从夹爪11中掉落,传感器可检测到该空夹状态,并将相应的信号反馈至处理器,处理器在接收到空夹信号后,控制取料机构10停止运动,并发出报警信号,以告知工作人员设备出现异常,需要及时处理,避免造成更大的损失。In other words, in the process of the jaws 11 of the picking mechanism 10 clamping the workpiece 411 to move the workpiece 411 from the initial position A to the transition position A2, if the jaws 11 are in an empty clamping state, that is, there is no workpiece 411 clamped on the jaws 11, it indicates that the workpiece 411 has fallen from the jaws 11. The sensor can detect the empty clamping state and feed back the corresponding signal to the processor. After receiving the empty clamping signal, the processor controls the picking mechanism 10 to stop moving and sends an alarm signal to inform the staff that the equipment has an abnormality and needs to be dealt with in time to avoid causing greater losses.

在一种可实现的方式中,该取料方法在前述步骤S2之后,即将工件411移动至导轨20的目标位置A之后,还包括:In an achievable manner, after the aforementioned step S2, that is, after the workpiece 411 is moved to the target position A of the guide rail 20, the material picking method further includes:

步骤S3、控制取料机构10移动至工件411的上方,并控制取料机构10的吸附组件12吸附工件411;控制导轨20切换至避让位置,控制取料机构10带动工件411下移并放置在承载台30上。Step S3, control the picking mechanism 10 to move above the workpiece 411, and control the adsorption component 12 of the picking mechanism 10 to adsorb the workpiece 411; control the guide rail 20 to switch to the avoidance position, and control the picking mechanism 10 to drive the workpiece 411 to move downward and place it on the supporting platform 30.

如前所述,导轨20位于承载台30的上方,导轨20的避让位置指的是不会阻挡工件411下移到承载台30的位置,以免对工件411造成损坏或者使工件411位置发生偏移。As mentioned above, the guide rail 20 is located above the support platform 30 , and the avoidance position of the guide rail 20 refers to a position that will not block the workpiece 411 from moving down to the support platform 30 , so as to avoid damaging the workpiece 411 or causing the position of the workpiece 411 to shift.

其中,取料机构10的吸附组件12包括至少一个吸盘,可采用抽真空的方式吸附在工件411的上表面,以吸附固定住工件411,保证导轨20切换到避让位置及将工件411下移到承载台30时,工件411不会脱落。Among them, the adsorption component 12 of the material picking mechanism 10 includes at least one suction cup, which can be adsorbed on the upper surface of the workpiece 411 by vacuuming to adsorb and fix the workpiece 411, ensuring that the workpiece 411 will not fall off when the guide rail 20 switches to the avoidance position and moves the workpiece 411 down to the supporting platform 30.

如图2所示,具体应用中,导轨20包括第一导轨21和第二导轨22,第一导轨21和第二导轨22平行布置,且两者的长度方向与前述第一方向D1或第二方向D2平行,导轨20能够在承载位置和前述避让位置之间切在承载位置,第一导轨21和第二导轨22之间的距离小于工件411的外径,如图中实线示意的导轨,工件411可由第一导轨21和第二导轨22支撑,在避让位置,第一导轨21和第二导轨22之间的距离大于工件411的外径, 如图中虚线示意的导轨,这样,工件411在从导轨20所在高度下移至承载台30的过程中,不会受到导轨20的阻碍。As shown in FIG. 2 , in a specific application, the guide rail 20 includes a first guide rail 21 and a second guide rail 22. The first guide rail 21 and the second guide rail 22 are arranged in parallel, and the length direction of the two is parallel to the aforementioned first direction D1 or the second direction D2. The guide rail 20 can be cut between the load-bearing position and the aforementioned avoidance position. At the load-bearing position, the distance between the first guide rail 21 and the second guide rail 22 is smaller than the outer diameter of the workpiece 411. As shown in the guide rails indicated by the solid line in the figure, the workpiece 411 can be supported by the first guide rail 21 and the second guide rail 22. At the avoidance position, the distance between the first guide rail 21 and the second guide rail 22 is larger than the outer diameter of the workpiece 411. As shown by the dotted line in the figure, the workpiece 411 will not be hindered by the guide rail 20 when it moves from the height of the guide rail 20 to the carrying platform 30 .

可以理解,在前述步骤S1中,导轨20处在承载位置。It can be understood that in the aforementioned step S1 , the guide rail 20 is in the carrying position.

具体应用中,可通过第一导轨21和第二导轨22在垂直于第一方向D1或第二方向D2的方向上的相向移动或相背移动来切换导轨20的位置。In a specific application, the position of the guide rail 20 can be switched by the first guide rail 21 and the second guide rail 22 moving toward or away from each other in a direction perpendicular to the first direction D1 or the second direction D2.

在一种可能的实现方式中,划片机包括上料台40,该上料台40可位于初始位置A1,取料机构10从上料台40所在位置夹取需要加工的目标工件;具体的,上料台40上可以放置工件盒41,工件盒41内设置有沿竖向间隔排布的多个工件411。In one possible implementation, the dicing machine includes a loading table 40, which can be located at an initial position A1, and the material picking mechanism 10 clamps the target workpiece to be processed from the position of the loading table 40; specifically, a workpiece box 41 can be placed on the loading table 40, and a plurality of workpieces 411 arranged vertically at intervals are arranged in the workpiece box 41.

该取料方法在步骤S1之间还包括:The material taking method further comprises, between step S1:

步骤S0、控制上料台40沿竖直方向升降,使上料台40上放置的工件盒41内的目标工件处于与导轨20的支撑面相同的高度位置。Step S0 , controlling the loading platform 40 to rise and fall in the vertical direction, so that the target workpiece in the workpiece box 41 placed on the loading platform 40 is at the same height position as the support surface of the guide rail 20 .

这样,方便取料机构10夹取目标工件,在带动目标工件沿第一方向D1移动时,可使目标工件沿导轨20平移,以对其位置进行导向,并对其进行支撑。In this way, it is convenient for the material taking mechanism 10 to clamp the target workpiece. When the target workpiece is driven to move along the first direction D1, the target workpiece can be translated along the guide rail 20 to guide its position and support it.

在上述各实现方式中,工件411可以为晶圆或者其他待加工件。In the above-mentioned implementations, the workpiece 411 may be a wafer or other workpiece to be processed.

除了上述取料方法外,本发明实施例还提供一种取料装置,该取料装置用于划片机,划片机的结构与前述介绍一致,该取料装置包括:In addition to the above-mentioned material taking method, an embodiment of the present invention further provides a material taking device, which is used for a dicing machine. The structure of the dicing machine is consistent with the above-mentioned description. The material taking device includes:

第一控制模块,用于控制取料机构10的夹爪11处于第一状态,即可夹紧工件411的状态,从初始位置A1夹取工件411并沿第一方向D1移动,将工件411放置在导轨20的过渡位置A2;其中,在第一方向D1上,过渡位置A2超出所述导轨20的目标位置A;A first control module is used to control the clamping jaws 11 of the material picking mechanism 10 to be in a first state, that is, a state of clamping the workpiece 411, clamping the workpiece 411 from the initial position A1 and moving it along the first direction D1, and placing the workpiece 411 at a transition position A2 of the guide rail 20; wherein, in the first direction D1, the transition position A2 exceeds the target position A of the guide rail 20;

第二控制模块,用于控制夹爪11处于第二状态,即张开状态,不可夹紧工件411的状态,并控制取料机构10沿与第一方向D1相反的第二方向D2移动,通过夹爪11在第二状态下的确定面1121将工件411从过渡位置回推至目标位置;其中,工件411位于目标位置时,工件411的中心与承载台30的中心正对。The second control module is used to control the clamp 11 to be in a second state, i.e., an open state, a state in which the workpiece 411 cannot be clamped, and to control the material picking mechanism 10 to move along a second direction D2 opposite to the first direction D1, and to push the workpiece 411 back from the transition position to the target position through the determined surface 1121 of the clamp 11 in the second state; wherein, when the workpiece 411 is at the target position, the center of the workpiece 411 is opposite to the center of the supporting platform 30.

在一种可能的实现方式中,取料装置还包括第三控制模块和第四控制模块,其中的第三控制模块用于控制取料机构10移动至工件411的上方并吸附工件411,还用于控制取料机构10将吸附住的工件411下移放置到承 载台30上,其中的第四控制模块用于控制导轨20在承载位置和避让位置之间切换。In a possible implementation, the material picking device further includes a third control module and a fourth control module, wherein the third control module is used to control the material picking mechanism 10 to move to the top of the workpiece 411 and adsorb the workpiece 411, and is also used to control the material picking mechanism 10 to move the adsorbed workpiece 411 downward and place it on the support On the carrier 30 , the fourth control module is used to control the guide rail 20 to switch between the carrying position and the avoidance position.

该取料装置的工作过程与前述取料方法对应,此处不再赘述。The working process of the material taking device corresponds to the aforementioned material taking method, and will not be repeated here.

本发明实施例还提供一种划片机,该划片机包括取料机构10、导轨20和承载台30,还可以包括上料台40,这些部件的结构设置及动作等如前述描述,不再重复;该划片机还包括上述取料装置,能够采用上述取料方法将工件411从上料台40精确转移到承载台30,具体过程与前述取料方法对应,此处也不再赘述。An embodiment of the present invention also provides a dicing machine, which includes a material picking mechanism 10, a guide rail 20 and a support platform 30, and may also include a loading platform 40. The structural arrangements and actions of these components are as described above and will not be repeated here. The dicing machine also includes the above-mentioned material picking device, which can use the above-mentioned material picking method to accurately transfer the workpiece 411 from the loading platform 40 to the support platform 30. The specific process corresponds to the above-mentioned material picking method and will not be repeated here.

本发明实施例还提供一种可读存储介质,该可读存储介质上存储程序或指令,该程序或指令被处理器执行时可实现前述的取料方法的步骤。An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the aforementioned material taking method can be implemented.

本发明实施例还提供一种电子设备,包括处理器和存储器,存储器上存储有可在所述处理器上运行的程序或指令,该程序或指令被处理器执行时可实现前述的取料方法的步骤。An embodiment of the present invention further provides an electronic device, including a processor and a memory, wherein the memory stores a program or instruction that can be run on the processor, and when the program or instruction is executed by the processor, the steps of the aforementioned material extraction method can be implemented.

以上对本发明所提供的一种取料方法、取料装置、划片机、可读存储介质以及电子设备均进行了详细介绍。本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。 The above is a detailed introduction to a material taking method, a material taking device, a dicing machine, a readable storage medium and an electronic device provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims (11)

一种取料方法,用于划片机,所述划片机包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,其特征在于,所述取料方法包括:A material taking method is used for a dicing machine, the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, the bearing platform is located below the guide rail, and is characterized in that the material taking method comprises: 步骤S1、控制所述取料机构的夹爪处于第一状态,从初始位置夹取工件并沿第一方向移动,将所述工件放置在所述导轨的过渡位置;其中,在所述第一方向上,所述过渡位置超出所述导轨的目标位置;Step S1, controlling the clamping jaws of the material picking mechanism to be in a first state, clamping the workpiece from an initial position and moving along a first direction, and placing the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail; 步骤S2、控制所述夹爪处于第二状态,并控制所述取料机构沿与所述第一方向相反的第二方向移动,通过所述夹爪在所述第二状态下的确定面将所述工件从所述过渡位置回推至所述目标位置;其中,所述工件位于所述目标位置时,所述工件的中心与所述承载台的中心正对。Step S2, control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is at the target position, the center of the workpiece is opposite to the center of the support platform. 根据权利要求1所述的取料方法,其特征在于,所述工件的周壁具有平面部;所述夹爪包括两个夹板和安装座,所述安装座连接两个所述夹板的第一端;The material taking method according to claim 1 is characterized in that the peripheral wall of the workpiece has a flat surface; the clamping jaw comprises two clamping plates and a mounting seat, and the mounting seat connects the first ends of the two clamping plates; 所述夹爪处于所述第一状态,两个所述夹板处于夹紧状态,所述夹爪处于所述第二状态,两个夹板处于张开状态,所述安装座朝向所述夹板第二端的表面为推动所述工件的确定面,所述夹爪回推所述工件时,所述确定面与所述平面部抵接。When the clamp is in the first state, the two clamps are in a clamped state; when the clamp is in the second state, the two clamps are in an open state; the surface of the mounting base facing the second end of the clamp is a determining surface for pushing the workpiece; when the clamp pushes the workpiece back, the determining surface abuts against the planar portion. 根据权利要求1所述的取料方法,其特征在于,所述确定面与所述目标位置之间具有标定关系;The material retrieving method according to claim 1, characterized in that there is a calibration relationship between the determined surface and the target position; 所述步骤S2中,通过获取所述确定面与所述目标位置之间的距离来判断所述工件是否移动至所述目标位置。In the step S2, whether the workpiece has moved to the target position is determined by acquiring the distance between the determined surface and the target position. 根据权利要求1所述的取料方法,其特征在于,所述取料机构上设有传感器,所述传感器用于检测所述夹爪的状态;The material taking method according to claim 1 is characterized in that a sensor is provided on the material taking mechanism, and the sensor is used to detect the state of the clamping claw; 所述步骤S1中,若所述传感器检测到所述夹爪处于空夹状态,控制所述取料机构停止运动并发出报警信号。In the step S1, if the sensor detects that the clamping jaws are in an empty clamping state, the material taking mechanism is controlled to stop moving and an alarm signal is issued. 根据权利要求1所述的取料方法,其特征在于,所述步骤S2之后还包括:The material taking method according to claim 1 is characterized in that, after step S2, it also includes: 步骤S3、控制所述取料机构移动至所述工件的上方,并控制所述取料机构的吸附组件吸附所述工件;控制所述导轨切换至避让位置;控制所述取料机构带动所述工件下移并放置在所述承载台上。 Step S3, control the picking mechanism to move to the top of the workpiece, and control the adsorption component of the picking mechanism to adsorb the workpiece; control the guide rail to switch to the avoidance position; control the picking mechanism to drive the workpiece to move downward and place it on the supporting platform. 根据权利要求5所述的取料方法,其特征在于,所述导轨包括第一导轨和第二导轨,所述第一导轨和所述第二导轨平行布置,且两者的长度方向与所述第一方向平行;所述导轨能够在承载位置和所述避让位置之间切换,在所述承载位置,所述第一导轨和所述第二导轨之间的距离小于所述工件的外径,在所述避让位置,所述第一导轨和所述第二导轨之间的距离大于所述工件的外径;The material retrieving method according to claim 5 is characterized in that the guide rail comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are arranged in parallel, and the length direction of the first guide rail and the second guide rail is parallel to the first direction; the guide rail can be switched between a load-bearing position and a avoidance position, in which the distance between the first guide rail and the second guide rail is smaller than the outer diameter of the workpiece, and in the avoidance position, the distance between the first guide rail and the second guide rail is larger than the outer diameter of the workpiece; 所述步骤S1中,所述导轨处于承载位置。In the step S1, the guide rail is in a carrying position. 根据权利要求1-6任一项所述的取料方法,其特征在于,所述划片机包括上料台,所述上料台位于所述初始位置;所述步骤S1之前还包括:The material taking method according to any one of claims 1 to 6 is characterized in that the dicing machine includes a loading platform, and the loading platform is located at the initial position; before step S1, it also includes: 步骤S0、控制所述上料台沿竖直方向升降,使所述上料台上放置的工件盒中的目标工件处于与所述导轨的支撑面相同的高度位置;其中,所述工件盒内设置有沿竖向间隔排布的多个工件。Step S0, controlling the loading platform to rise and fall in the vertical direction so that the target workpiece in the workpiece box placed on the loading platform is at the same height as the supporting surface of the guide rail; wherein the workpiece box contains a plurality of workpieces arranged in a vertical interval. 取料装置,用于划片机,所述划片机包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,其特征在于,所述取料装置包括:A material taking device is used for a dicing machine, the dicing machine comprises a material taking mechanism, a guide rail and a bearing platform, the bearing platform is located below the guide rail, and is characterized in that the material taking device comprises: 第一控制模块,用于控制所述取料机构的夹爪处于第一状态,从初始位置夹取工件并沿第一方向移动,将所述工件放置在所述导轨的过渡位置;其中,在所述第一方向上,所述过渡位置超出所述导轨的目标位置;A first control module is used to control the clamping jaws of the material picking mechanism to be in a first state, to clamp the workpiece from an initial position and move along a first direction, and to place the workpiece at a transition position of the guide rail; wherein, in the first direction, the transition position exceeds the target position of the guide rail; 第二控制模块,用于控制所述夹爪处于第二状态,并控制所述取料机构沿与所述第一方向相反的第二方向移动,通过所述夹爪在所述第二状态下的确定面将所述工件从所述过渡位置回推至所述目标位置;其中,所述工件位于所述目标位置时,所述工件的中心与所述承载台的中心正对。The second control module is used to control the clamp to be in a second state, and control the material picking mechanism to move in a second direction opposite to the first direction, and push the workpiece back from the transition position to the target position through the determined surface of the clamp in the second state; wherein, when the workpiece is located at the target position, the center of the workpiece is opposite to the center of the supporting platform. 一种划片机,包括取料机构、导轨和承载台,所述承载台位于所述导轨的下方,其特征在于,所述划片机还包括权利要求8所述的取料装置。A dicing machine comprises a material taking mechanism, a guide rail and a supporting platform, wherein the supporting platform is located below the guide rail, and is characterized in that the dicing machine also comprises the material taking device according to claim 8. 一种可读存储介质,其特征在于,所述可读存储介质上存储程序或指令,所述程序或指令被处理器执行时实现如权利要求1-7任一项所述的取料方法的步骤。A readable storage medium, characterized in that a program or instruction is stored on the readable storage medium, and when the program or instruction is executed by a processor, the steps of the material taking method as described in any one of claims 1 to 7 are implemented. 一种电子设备,其特征在于,包括处理器、存储器以及存储在所述存储器上并可在所述处理器上运行的程序或指令,所述程序或指令被所述处理器执行时实现如权利要求1-7任一项所述的取料方法的步骤。 An electronic device, characterized in that it includes a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of the material collection method as described in any one of claims 1 to 7.
PCT/CN2023/134574 2022-12-20 2023-11-28 Material taking method, material taking apparatus, dicing machine, readable storage medium, and electronic device Ceased WO2024131469A1 (en)

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