WO2024124685A1 - 一种气体传感装置 - Google Patents

一种气体传感装置 Download PDF

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Publication number
WO2024124685A1
WO2024124685A1 PCT/CN2023/076640 CN2023076640W WO2024124685A1 WO 2024124685 A1 WO2024124685 A1 WO 2024124685A1 CN 2023076640 W CN2023076640 W CN 2023076640W WO 2024124685 A1 WO2024124685 A1 WO 2024124685A1
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Prior art keywords
quartz crystal
light source
crystal oscillator
gas
module
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PCT/CN2023/076640
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English (en)
French (fr)
Inventor
任伟
何应
何恺源
刘阳
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Syspetro Technology Co Ltd
Chinese University of Hong Kong CUHK
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Syspetro Technology Co Ltd
Chinese University of Hong Kong CUHK
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Publication of WO2024124685A1 publication Critical patent/WO2024124685A1/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers

Definitions

  • the present invention relates to the technical field of gas sensing, and in particular to a gas sensing device.
  • Methane is the main gas component in natural gas, with a content of more than 90%.
  • the same technical means as gas detection can be used for natural gas leakage detection.
  • gas detection mostly adopts electronic measurement technology, that is, the principle of thermal catalysis or catalytic combustion. They all have defects such as small concentration detection range, high risk of "poisoning", difficult calibration, and incomplete combustion at low concentrations.
  • chemical reagent measurement means is inexpensive, it has poor repeatability, short service life, and serious performance degradation. These factors seriously restrict its practical application.
  • Spectral measurement technologies such as direct absorption spectroscopy, Raman spectroscopy, cavity ring-down spectroscopy, etc., all have technical advantages such as high sensitivity, fast response, and online measurement.
  • the Chinese invention patent application with the announcement number "CN103743706A” announced a full-range high-sensitivity gas detection method and device, which uses the infrared absorption principle and uses a semiconductor laser to detect the absorption strength of the characteristic peak of the target gas to achieve high-sensitivity detection.
  • This scheme uses wavelength modulation technology, that is, low-frequency triangular waves superimposed on high-frequency sine waves to control the laser, and uses harmonic demodulation technology to achieve high-sensitivity detection of gas at low concentrations.
  • the sensor system designed by this patent does not involve the locking and stabilization of the laser wavelength, that is, if the wavelength of the laser output drifts, it will cause the measured gas concentration value to deviate.
  • LED light sources are used for gas absorption.
  • the light source is related to the type of gas to be detected, and the central wavelength of the LED output needs to be selected corresponding to the characteristic absorption spectrum of the detected gas.
  • This type of absorption spectroscopy generally has the disadvantage of light source wavelength drift, is unable to meet the requirements of long-term work, and lacks wide adaptability for the detection of different gas types.
  • the measurement response speed is also subject to corresponding limitations.
  • the purpose of the present invention is to solve the technical problems of how to avoid the deviation of detection results caused by the wavelength drift of the light source in the spectral gas detection and how to improve the wide adaptability and measurement response speed of the gas sensor device.
  • the present invention proposes a gas sensing device, comprising a driving module, a light source module, a measuring module and a data acquisition and processing module, wherein the driving module is connected to the light source module, and the measuring module is connected to the data acquisition and processing module; the driving module is used to drive the light source module to generate intensity modulated light of a fixed frequency; the measuring module comprises a quartz crystal oscillator arranged in an environment of the gas to be measured, the intensity modulated light emitted by the light source module is used to excite the quartz crystal oscillator to form mechanical vibration, the mechanical vibration generates an electrical signal via a piezoelectric effect, the electrical signal contains signal response amplitude information corresponding to the type and concentration of the gas to be measured generated by the quartz crystal oscillator at the fixed frequency; the data acquisition and processing module is used to collect the electrical signal, and determine the concentration information of the gas to be measured according to the signal response amplitude.
  • the data acquisition and processing module includes a phase-locked amplifier, a data acquisition card and a data processing device
  • the measurement module is connected to the phase-locked amplifier
  • the data acquisition card is connected between the phase-locked amplifier and the data processing device
  • the phase-locked amplifier is used to demodulate the first harmonic component of the electrical signal with the fixed frequency as a reference, output the first harmonic signal amplitude and transmit it to the data acquisition card
  • the data acquisition card transmits the collected data to the data processing device for processing.
  • the driving module includes a function generator and a power driver
  • the function generator is connected to the power driver and the phase-locked amplifier
  • the power driver is connected to the light source module
  • the power driver receives the light source intensity modulation signal of the function generator to generate a driving current of the same frequency
  • the driving current is used to realize light source intensity modulation of the light source module.
  • the fixed frequency is obtained in the following manner: the function generator outputs a swept frequency signal with a fixed amplitude and a changing frequency, controls the light source module to output an intensity modulated light with a changing frequency, the phase-locked amplifier uses a reference signal consistent with the frequency of the swept frequency signal of the function generator, and obtains the frequency response characteristics and the resonant frequency of the quartz crystal oscillator in the gas environment to be measured through correlation demodulation, wherein the resonant frequency is the frequency corresponding to the maximum value of the characteristic curve of the frequency response amplitude of the quartz crystal oscillator; wherein the data acquisition and processing module determines the type of gas to be measured based on the frequency response characteristics of the quartz crystal oscillator.
  • the light source module includes a light source and a collimating lens, the light source is driven by the driving module to output the intensity modulated light, and the collimating lens is used to collimate the intensity modulated light and then output it; wherein the light source is an LED light source or a coherent light source.
  • the measuring module further comprises a focusing lens, which is used to converge the light beam output by the light source module and make the focus of the converged light beam act on the center position of the cantilever beam junction of the quartz crystal oscillator.
  • the measurement module also includes a transimpedance amplifier, which is connected between the quartz crystal oscillator and the phase-locked amplifier, and is used to amplify the electrical signal converted by the quartz crystal oscillator absorbing light energy and output it in the form of a voltage signal.
  • the voltage signal is transmitted to the phase-locked amplifier for demodulation.
  • a plurality of groups of the light source modules and the measuring modules are respectively arranged at different detection points; wherein the measuring module also includes a matching capacitor, a pin of the quartz crystal oscillator is connected in series with a pin of the matching capacitor, the transimpedance amplifier is connected to another pin of the quartz crystal oscillator and the remaining pin of the matching capacitor, and the matching capacitor is used for uniform calibration of the resonant frequencies of the plurality of quartz crystal oscillators to achieve matching of the frequency values of the multi-point detection ends; the phase-locked amplifier is a multi-channel input, and the voltage signal output by the phase-locked amplifier is integrated with the channel information and timing information of the function generator into an array to form sensing information of each channel, so as to achieve detection of gas concentrations at multiple detection points.
  • multiple groups of the light source modules and the measuring modules are respectively arranged at different detection points;
  • the unified calibration of the resonant frequencies of the multiple quartz crystal oscillators is achieved by means of micro-resonant cavity energy coupling, micromachining, surface coating or temperature modulation, wherein the micro-resonant energy coupling is to add a resonant cavity near the quartz crystal oscillator, the micromachining is to adjust the size of the quartz crystal oscillator by grinding or corrosion, the surface coating is to add a coating on the surface of the quartz crystal oscillator by chemical deposition, and the temperature modulation is to adjust the working temperature of the quartz crystal oscillator;
  • the phase-locked amplifier is a multi-channel input, and the voltage signal output by the phase-locked amplifier is integrated with the channel information and timing information of the function generator into an array to form the sensing information of each channel, so as to realize the detection of gas concentration at multiple detection points.
  • the modulation signal used by the driving module to realize light modulation is a square wave signal, a pulse signal, a triangle wave signal or a sine wave signal.
  • the gas sensing device proposed by the present invention uses a light source to excite a quartz crystal oscillator, and the mechanical vibration is transmitted through a piezoelectric The effect generates an electrical signal, and the electrical signal contains the signal response amplitude information corresponding to the type and concentration of the gas to be measured generated by the quartz crystal at a fixed frequency, and the setting of technical features can realize the determination of the concentration information of the gas to be measured according to the signal response amplitude.
  • LED light sources are used for gas absorption, and the central wavelength of the LED output needs to be selected corresponding to the characteristic absorption spectrum of the detected gas.
  • the basic principle of gas detection of the present invention is different.
  • the present invention uses a light source to excite the quartz crystal to generate vibrations, and uses the principle that different gas molecules and background gases such as air and nitrogen have different viscosity effects on the quartz crystal to achieve gas type identification and concentration inversion. Since the gas sensing realized by the present invention is independent of the gas absorption spectrum, the disadvantage of the wavelength drift of the light source that is commonly present in the absorption spectroscopy method is avoided, and the limitation of the wavelength drift of the laser with good monochromaticity leading to the mismatch of the gas absorption peak is avoided, thereby solving the technical problem of the deviation of the detection result caused by the wavelength drift of the light source in the gas detection of the prior art, and therefore has a wide adaptability for the detection of gas types.
  • the gas sensing device of the present invention measures the signal response amplitude at a fixed frequency of the quartz crystal oscillator, it can achieve higher sensitivity and faster response speed than traditional spectral measurement technology.
  • the core components used in the gas sensing device of the present invention such as the quartz crystal oscillator, have huge cost advantages. Compared with traditional spectral measurement technology, it eliminates expensive equipment such as lasers and photodetectors, and can achieve multi-point distributed measurement, which has higher practical value in leak detection of long-distance natural gas transportation pipelines.
  • the present invention weakens the limiting factors of the light source itself, and realizes safer, faster and more reliable detection requirements for highly dangerous gases such as flammable and explosive gases.
  • FIG1 is a schematic structural diagram of a gas sensor device according to an embodiment of the present invention.
  • FIG2 is a frequency response characteristic of a quartz crystal oscillator under different gas concentrations in an embodiment of the present invention
  • FIG. 3 is a graph showing the signal response amplitudes measured at fixed excitation quartz crystal frequencies under different gas concentrations in an embodiment of the present invention.
  • 1 is a function generator
  • 2 is a power driver
  • 3 is a detection gas chamber
  • 4 is an LED light source
  • 5 is an immersed collimating lens
  • 6 is a focusing lens
  • 7 is a quartz crystal oscillator
  • 8 is a matching capacitor
  • 9 is an impedance amplifier
  • 10 is a phase-locked amplifier
  • 11 is a data acquisition card
  • 12 is a computer.
  • the following embodiment of the present invention proposes a gas sensing device, including a driving module, a light source module, a measuring module and a data acquisition and processing module, wherein the driving module is connected to the light source module, and the measuring module is connected to the data acquisition and processing module; the driving module is used to drive the light source module to generate intensity modulated light of a fixed frequency; the measuring module includes a quartz crystal oscillator 7 arranged in the gas environment to be measured, the intensity modulated light emitted by the light source module is used to excite the quartz crystal oscillator 7 to form mechanical vibration, and the mechanical vibration generates an electrical signal through the piezoelectric effect, and the electrical signal contains signal response amplitude information corresponding to the type and concentration of the gas to be measured generated by the quartz crystal oscillator 7 at the fixed frequency; the data acquisition and processing module is used to collect the electrical signal and determine the concentration information of the gas to be measured according to the signal response amplitude.
  • an embodiment of the present invention provides a gas sensing device based on a fixed frequency excitation quartz crystal oscillator. It is preferred to use an LED light source 4 as the excitation source of the quartz crystal oscillator 7 to avoid the absorption effect of the detection gas, and use fixed frequency excitation and measurement of the signal response amplitude of the quartz crystal oscillator 7 instead of frequency sweeping to obtain the measurement of the frequency change, thereby improving the sensitivity and detection speed of the gas sensing device. This is because the measurement of the frequency change needs to be obtained through frequency sweeping and fitting, while the response amplitude is the result of direct measurement.
  • the embodiment of the present invention uses the amplitude response to improve the detection speed; the measurement of the frequency change depends on the accuracy and speed of the frequency sweep, so the sensitivity of sensing using the change in the amplitude response is higher.
  • the embodiment of the present invention can achieve a multi-point layout of gas leakage detection at a relatively low cost, and adopt a multi-point layout scheme to achieve gas leakage detection in a large area and a long path system.
  • the gas sensor device described in the embodiment of the present invention includes a driving module, a light source module, a measuring module, and a data acquisition and processing module, wherein:
  • the driving module described in the embodiment of the present invention comprises a function generator 1 and a power driver 2.
  • the function generator 1 outputs a square wave scan to drive a subsequent light source to implement a frequency pre-scan of a light detection device.
  • the signal drives the power supply driver 2 to achieve intensity modulation with a constant frequency f0 .
  • the light source module described in the embodiment of the present invention includes an LED light source 4, a metal package and an immersed collimating lens 5 (immersed means that the packaged lens and the light-emitting chip are integrated into a whole, and the outer surface of the lens is lower than the metal package of the outer circumference of the LED, which plays a certain protective role for the lens and is a commercially available lens packaging form).
  • the LED light source 4 is a naturally cooled visible light diode with a wavelength of 400-760nm; the metal package is integrated with the immersed collimating lens 5 and the LED light-emitting chip, so that the LED light source can stably output excitation light with a fixed modulation frequency f0 under natural heat dissipation conditions.
  • the measurement module described in the embodiment of the present invention includes a focusing lens 6, a quartz crystal oscillator 7, a matching capacitor 8 and a transimpedance amplifier 9.
  • the focusing lens 6 is a spherical lens with high transmittance (T>90%) in the visible light band.
  • the focusing lens focuses the light beam output by the LED light source 4 on the subsequent quartz crystal oscillator surface to excite the quartz crystal oscillator to form a stable mechanical oscillation;
  • the quartz crystal oscillator 7 is a commercial 25kHz crystal oscillator in a bending vibration mode.
  • the resonant frequency of the quartz crystal oscillator 7 can maintain a small difference of the order of Hz after peeling off its own metal shell; the matching capacitor 8 (1-100pF, according to the difference in the crystal frequency, the size of the matching capacitor 8 ranges from a few to tens of pF) is directly connected in series with the quartz crystal oscillator 7 to achieve a unified calibration of the resonant frequency of the quartz crystal oscillator 7.
  • the equivalent resistance of the transimpedance amplifier 9 is 1-50M ⁇ , such as 10M ⁇ .
  • the transimpedance amplifier 9 is connected to one of the pins of the quartz crystal oscillator 7 and the remaining pins of the matching capacitor 8 to amplify the weak piezoelectric current signal generated by the quartz crystal oscillator 7 and convert it into a voltage signal.
  • the data acquisition and processing module described in the embodiment of the present invention includes a phase-locked amplifier 10, a data acquisition card 11, a computer 12 and its processing program;
  • the phase-locked amplifier 10 is a phase-locked amplifier with multi-channel input, front-end digital-to-analog conversion and digital phase-locked demodulation, and the phase-locked amplifier 10 is connected to the amplification output end of the transimpedance amplifier 9 to demodulate the signal response amplitude of the quartz crystal oscillator 7 at a fixed frequency;
  • the data acquisition card 11 is used to receive the signal response amplitude of the quartz crystal oscillator 7 demodulated by the phase-locked amplifier 10, and transmit the measurement results of each channel of the phase-locked amplifier 10 to the data processing program of the computer 12;
  • the data processing program obtains the gas concentration information at the multi-point detection positions through multi-channel data algorithm calibration and concentration correction.
  • the high frequency signal with frequency f0 generated by the function generator 1 in the driving module includes but is not limited to a short pulse signal, a square wave signal, a triangle wave signal and the like.
  • the LED light source 4 includes but is not limited to LED light sources in the ultraviolet, visible, and infrared bands (LED light sources are incoherent light sources), coherent light sources, i.e. lasers of various wavelengths, black body radiation sources, broadband light sources of various bands, etc.
  • the metal package and immersed collimating lens 5 include but are not limited to other forms (pure quartz, The LED packaging scheme of silicon window packaging) and the beam collimation scheme (the common packaging method is flat window piece packaging and window piece external collimation form), the surface position of the LED light source 4 acting on the quartz crystal oscillator 7 after focusing can be changed and optimized according to the signal amplitude intensity of the fixed frequency f0 of the quartz crystal oscillator 7 demodulated by the phase-locked amplifier 10 (it can be optimized by changing the position of the beam focus point on the quartz crystal oscillator and the signal response amplitude measured by the phase-locked amplifier), and its excitation of the quartz crystal oscillator 7 to form mechanical oscillation includes but is not limited to other forms of excitation methods, such as photoacoustic excitation mode.
  • the quartz crystal oscillator 7 can be modified according to different excitation forms such as the LED light source 4. Similarly, the quartz crystal oscillator 7 includes but is not limited to low-frequency bending vibration mode, high-frequency shear mode and other working modes, quartz crystal oscillators with different resonant frequencies.
  • the matching capacitor 8 is used to calibrate the frequency difference of the quartz crystal oscillator.
  • Other forms of calibration schemes can be used, including but not limited to micro-resonant cavity energy coupling, micro-machining, surface coating, temperature modulation and other schemes (other forms of calibration schemes do not require matching capacitors.
  • Micro-resonant energy coupling is to add a resonant cavity near the quartz crystal oscillator
  • micro-machining is to change the size of the quartz crystal oscillator by grinding and corrosion
  • surface coating is to add a certain coating to the surface of the quartz crystal oscillator by chemical deposition
  • temperature modulation is to change the working temperature of the quartz crystal oscillator).
  • the excitation signal is a light intensity modulation signal of the LED light source 4 acting on the quartz crystal oscillator 7; the square wave signal of frequency f0 generated by the function generator 1 is a modulation signal input to the power driver 2; the DC square wave signal generated by the power driver 2 is a signal for driving the LED light source 4.
  • the three signals have the same frequency and waveform.
  • the excitation signal generated by the driving module is the resonant frequency of the quartz crystal oscillator 7 under the set gas concentration.
  • the function generator 1 generates a square wave signal with a frequency f0 and transmits it to the phase-locked amplifier 10 to demodulate the signal response amplitude of the quartz crystal oscillator 7 under the set frequency;
  • the reference demodulation mode of the phase-locked amplifier 10 includes but is not limited to direct frequency input reference, modulus demodulation of the same frequency, etc.
  • the driving module and the signal acquisition and processing module can be integrated into hardware circuits such as boards and single-chip microcomputers, and data and programs can be transplanted and modified.
  • the gas sensor device of this embodiment includes a driving module, a light source module, a measuring module, and a data acquisition and processing module.
  • the driving module includes a function generator 1 and a power driver 2.
  • the function generator 1 is set to generate a square wave signal with a frequency f 0.
  • the duty cycle of the square wave signal is is 50%, the low level is zero value, and the high level is the maximum loading voltage of the LED light source 4; the square wave signal output by the function generator 1 is input to the modulation port of the power driver 2, and the power driver 2 will output a DC square wave signal consistent with the square wave signal generated by the function generator 1, and the DC square wave signal is connected to the subsequent LED light source 4 to realize intensity modulation of a fixed frequency f0 .
  • the light source module includes an LED light source 4 and an immersed collimating lens 5.
  • the LED light source 4 is a 650nm red light LED with a continuous maximum output power of 20mW. Its output light is first collimated by the immersed collimating lens 5.
  • the outer shell of the LED light source 4 is a metal package with a natural cooling heat dissipation method. It is packaged as one body with the immersed collimating lens 5. Under the drive of the power driver 2 with a fixed frequency of f0 , it outputs an intensity modulated light beam with a frequency of f0 .
  • the measurement module includes a focusing lens 6, a quartz crystal oscillator 7, a matching capacitor 8 and a transimpedance amplifier 9.
  • One pin of the quartz crystal oscillator 7 is connected in series with one pin of the matching capacitor 8.
  • the focusing lens 6 converges the collimated light beam output by the LED light source 4 through the immersed collimating lens 5.
  • the focus of the converged light beam acts on the center position of the cantilever beam junction of the quartz crystal oscillator 7.
  • the quartz crystal oscillator 7 is excited by intensity modulated light with a frequency of f0 , and absorbs light energy and converts it into mechanical vibration by its own resonant working principle. The mechanical vibration finally generates an electrical signal through the piezoelectric effect.
  • the quartz crystal oscillator 7 is connected to the matching capacitor 8.
  • the matching capacitor 8 can realize the unified calibration of the resonant frequency of the quartz crystal oscillator 7, thereby realizing the matching of the multi-point detection end (the quartz crystal oscillator frequencies of the multi-point detection ends are unified, and the measured signal intensity amplitudes are normalized to achieve multi-point matching).
  • the equivalent resistance of the transimpedance amplifier 9 is 1-50M ⁇ .
  • the transimpedance amplifier is connected to another pin of the quartz crystal oscillator 7 and the remaining pin of the matching capacitor 8 (the quartz crystal oscillator has two pins, and the matching capacitor can be connected in series with them).
  • the transimpedance amplifier 9 amplifies the electrical signal (which is a weak piezoelectric current signal) converted by the quartz crystal oscillator 7 after absorbing light energy to the mV level and outputs it in the form of a voltage signal.
  • the data acquisition processing module includes a phase-locked amplifier 10, a data acquisition card 11 and a computer 12.
  • the voltage signal output by the transimpedance amplifier 9 is transmitted to the phase-locked amplifier 10 for demodulation, that is, the phase-locked amplifier 10 uses the f0 frequency of the square wave signal set by the function generator 1 as a reference to demodulate the voltage signal output by the transimpedance amplifier 9 for the first harmonic component.
  • the amplitude of the demodulated first harmonic signal is transmitted to the data acquisition card 11.
  • the function generator 1 transmits its channel information and timing information to the data acquisition card 11.
  • the data acquisition card 11 combines the voltage signal output by the phase-locked amplifier 10 with the channel information and timing information of the function generator 1 into an array to form the sensing information of each channel.
  • the data acquisition card 11 collects the above signals and transmits them to the host computer data processing program on the computer 12.
  • the host computer software on the computer 12 processes the data collected by the data acquisition card 11, including
  • the channel information and timing information of the function generator 1 and the voltage signal of the phase-locked amplifier 10 are combined into an array, and finally the sensing information of each channel is formed, thereby realizing the detection of multi-point gas concentration.
  • the fixed frequency f 0 of the quartz crystal oscillator 7 can be obtained by using a frequency-varying sweep signal.
  • the function generator 1 is used to output a fixed-amplitude sweep signal to control the LED light source 4 to output a frequency-varying intensity modulated light intensity.
  • the output beam of the LED light source 4 excites the quartz crystal oscillator 7 to form mechanical vibration.
  • the electrical signal generated by the quartz crystal oscillator 7 is amplified by the transimpedance amplifier 9 and input into the phase-locked amplifier 10.
  • the reference signal of the phase-locked amplifier 10 is always consistent with the output sweep frequency of the function generator 1.
  • the response amplitude of the first harmonic signal of the quartz crystal oscillator 7 at different frequencies is obtained by correlation demodulation.
  • the frequency response characteristics of the quartz crystal oscillator 7 and its resonant frequency i.e., the fixed frequency f 0
  • the fixed frequency f 0 the frequency response characteristics of the quartz crystal oscillator 7 and its resonant frequency.
  • Gases of the same concentration and different types have different influence factors on the frequency of the quartz crystal oscillator. Based on this principle, their types can be identified. Under the fixed LED excitation frequency, different concentrations of the same gas will directly affect the signal response amplitude of the quartz crystal oscillator.
  • the detection gas chamber 3 where the light source module and the measurement module are located is respectively injected with CH 4 gas of different concentrations (a mixed gas containing CH 4 gas and background gas is introduced), and the frequency response characteristics and resonant frequencies of the quartz crystal oscillator 7 under different concentrations are measured.
  • CH 4 gas with a volume concentration of 10%, 20%, 30%, 40%, and 50% is introduced into the detection gas chamber 3, and the function generator 1 outputs a frequency sweep signal (a square wave signal with a frequency change).
  • the frequency response amplitude of the quartz crystal oscillator 7 is demodulated by the phase-locked amplifier 10 to obtain its characteristic curve in the shape of a Lorentz line, wherein the horizontal axis is Hertz (Hz) and the vertical axis is the signal amplitude (mV).
  • the frequency corresponding to the maximum value of the curve obtained by measuring at a certain concentration is the resonant frequency of the quartz crystal oscillator 7 at this concentration. It can be clearly seen that as the gas concentration increases, the resonant frequency of the quartz crystal oscillator 7 gradually increases. This is because the number of gas molecules is different from the number of background gas molecules (air, nitrogen), which causes the viscosity and resonance damping of the quartz crystal oscillator 7 in the gas environment to change.
  • the resonant frequency of the quartz crystal oscillator 7 will change, and the viscosity effect of the gas is directly related to the number of gas molecules.
  • the type of gas can be identified by measuring the frequency response characteristics of the quartz crystal oscillator 7. Different types of gases with the same concentration have different viscosity on the quartz crystal oscillator. This principle can be used to identify the type. Specifically, the frequency drift of the quartz crystal oscillator under the same concentration and different types of gas, the frequency drift under pure background gas and pure target gas, and the signal response amplitude at the f0 frequency can be measured to mark the type (in actual application, a calibration work can be performed for various gases first).
  • the frequency of the square wave signal output by the function generator 1 is fixed to f0 .
  • the horizontal axis is time (s)
  • the vertical axis is signal amplitude ( ⁇ V)
  • the frequency of the square wave signal output by the function generator 1 is fixed to f 0 , and it is only an example.
  • the CH 4 and N 2 mixed gas with volume concentrations of 5%, 10%, 15%, 20%, 25%, 30%, 35%, and 40% are introduced into the detection gas chamber 3 in time division to verify the measurement speed and detection sensitivity of the gas sensor device of the embodiment of the present invention, and the response amplitude of the quartz crystal oscillator 7 at the frequency f 0 is demodulated by the phase-locked amplifier 10.
  • the measurement is continuous, and the change of concentration is achieved by changing the mixed flow rate in the mass flow gas distribution system, so the concentration change and the overcharge and fluctuation in the change process can be observed.
  • the results in FIG3 show that when the quartz crystal oscillator 7 is excited by the fixed LED modulation frequency f 0 and CH 4 gas of different concentrations is introduced, the signal response amplitude of the quartz crystal oscillator 7 will change. That is to say, it is proved that the present embodiment can realize the concentration measurement of the target detection gas by using the fixed frequency excitation quartz crystal oscillator 7.
  • the example described in FIG3 is limited by the length of the gas pipeline used in the test and is only shown as a phenomenon. In practical applications, the response time of the gas sensor device of the present embodiment is less than the order of seconds and has a more excellent detection performance.
  • the light source module and the measuring module contained in the detection chamber 3 will be connected in the whole system in the form of a detection unit (3, 4, 5, 6, 7, 8, 9 constitute a detection unit), and the specific connection form is shown as 3' and 3" in Figure 1 (3' and 3" both contain components 4, 5, 6, 7, 8, 9).
  • the arrows in Figure 1 represent the passage and outflow of gas.
  • the embodiment of the present invention discloses a gas sensing device, which detects gas concentration based on the viscosity effect of the gas in the environment where the quartz crystal oscillator 7 is located; it includes a driving module, a light source module, a measuring module, and a data acquisition and processing module; the driving module is used to generate an intensity modulation signal for driving the LED light source 4; the light source module is used to excite the quartz crystal oscillator 7 to form mechanical vibration, so that the quartz crystal oscillator 7 can respond to the viscosity effect of the gas under the excitation conditions of fixed frequency and intensity; the measuring module is used to detect the change of the viscosity effect of the gas in the environment where the quartz crystal oscillator 7 is located, and obtain the signal response amplitude of the quartz crystal oscillator 7 corresponding to the gas with different concentrations; the data acquisition and processing module will collect the signal generated by the quartz crystal oscillator 7 and the related signal in the synchronous driving module, obtain the multi-point detection signal and perform calculation and post-processing on it, so
  • the embodiments of the present invention effectively improve the adaptability of the detection gas types and significantly reduce the cost of core components, realize multi-point distributed measurement, weaken the limitation factors of the light source itself, and achieve safer, faster and more reliable detection needs for flammable and explosive and other highly dangerous gases.
  • Embodiment 2 is a diagrammatic representation of Embodiment 1:
  • This embodiment provides a gas sensor device, including a driving module, a light source module, a measuring module, and a data acquisition and processing module.
  • the driving module of this embodiment includes a function generator 1 and a power driver 2; the function generator 1 first generates a frequency sweep signal in the form of a square wave and inputs it to the power driver 2, and the power driver 2 receives the square wave signal of the function generator 1 to generate a square wave DC driving current with the same frequency, and realizes intensity modulation of the subsequent light source; after determining to select the modulation frequency f0 , the output square wave frequency of the function generator 1 will be fixed to f0 and output to the power driver 2.
  • the function generator 1 generates a square wave drive signal of a fixed frequency as a light source intensity modulation signal to realize effective excitation of the quartz crystal oscillator, including but not limited to a triangle wave signal excitation source and a sine wave excitation source, and is not limited to the intensity modulation method of the continuous light back end such as a chopper, acousto-optic modulation, electro-optic modulation, etc.
  • a triangle wave or a sine wave excitation source only the square wave signal in the above example is replaced.
  • the intensity modulation of the continuous light back end is added with a corresponding modulator, and at this time the power driver 2 only needs a constant current output.
  • the light source module of this embodiment includes an LED light source 4 and an immersed collimating lens 5;
  • the LED light source 4 is an LED light source with an output wavelength of 400-760nm and a power of 20mW, and its packaging form is a metal packaging and the heat is dissipated by natural cooling;
  • the immersed collimating lens 5 and the metal packaging of the LED light source 4 form an integral structure, which can be highly integrated in terms of device size;
  • the LED light source 4 is driven by the DC square wave current signal output by the power driver 2 to output an intensity modulated light beam with a stable frequency, and this light beam is then collimated and output by the immersed collimating lens 5.
  • the LED light source 4 may have an output wavelength of 400-760 nm, a power of 20 mW, and a metal shell packaging form, and the immersion collimating lens 5 is formed as a whole with the metal shell packaging of the LED light source 4.
  • the LED light source 4 as a driving source for exciting the quartz crystal to generate mechanical vibration includes but is not limited to ultraviolet, visible light, infrared band LED light sources and coherent light sources (lasers of various wavelengths, black body radiation sources, broadband light sources of various bands, etc.); the immersion collimating lens 5 is used as a collimated excitation light
  • the sources include but are not limited to optical elements such as multi-lens optical systems, graded-index polymers, and parabolic reflectors.
  • the measurement module of this embodiment includes a focusing lens 6, a quartz crystal oscillator 7, a matching capacitor 8, and a transimpedance amplifier 9; the focusing lens 6 focuses the collimated light beam output by the LED light source 4 and the immersed collimating lens 5, and the focusing spot is incident on the center position of the cantilever beam junction of the quartz crystal oscillator 7.
  • the quartz crystal oscillator 7 is a commercial tuning fork crystal oscillator with a resonant frequency of 25kHz, and one end of its pin is connected to the matching capacitor 8.
  • the matching capacitor 8 is used to calibrate and tune the resonant frequency of the quartz crystal oscillator 7 in multiple detection units to match an equal frequency value, and calibrate the frequency of each quartz crystal oscillator in the multiple detection units to be equal.
  • the equivalent resistance of the transimpedance amplifier 9 is 1-50M ⁇ , and it amplifies the piezoelectric current signal generated by the quartz crystal oscillator 7 and outputs it as a voltage signal.
  • the quartz crystal oscillator 7 in the measurement module serves as a core gas detection device, and uses the principle of gas viscosity effect as a measurement basis, including but not limited to quartz crystal oscillators of different resonant frequencies, such as the common 32.768kHz, 30.72kHz, 38kHz, etc., and is also not limited to non-tuning fork quartz crystal oscillators, such as high-frequency MHz-level frequency devices in the form of surface shear.
  • the matching capacitor 8 serves as a frequency calibration matching element for the quartz crystal oscillator 7 (if there is only one detection unit, the matching capacitor 8 is not required) to realize multi-point distributed detection under the same frequency modulation and demodulation, including but not limited to other forms of frequency calibration compensation means such as temperature modulation, pressure modulation, crystal oscillator grinding, etc.
  • the data acquisition processing module of this embodiment includes a phase-locked amplifier 10, a data acquisition card 11, and a computer 12;
  • the phase-locked amplifier 10 is a multi-channel demodulator, which uses the square wave signal frequency output by the function generator 1 as a reference to demodulate the amplitude of the first harmonic component of the output electrical signal of the quartz crystal oscillator 7 amplified by the transimpedance amplifier 9;
  • the data acquisition card 11 receives the demodulated signal of the phase-locked amplifier 10 and the channel information, timing information, and synchronization signal output by the function generator 1, and finally transmits them to the host computer data processing program of the computer 12.
  • the sensor device in this embodiment uses CH 4 as the target detection gas, and its wide adaptability includes but is not limited to gases with a large difference in molecular number between the gas and the background gas (nitrogen, air) such as H 2 , He, CO 2 , NO 2 , C 6 H 6 and polymer gases.
  • gases with a large difference in molecular number between the gas and the background gas nitrogen, air
  • nitrogen, air such as H 2 , He, CO 2 , NO 2 , C 6 H 6 and polymer gases.
  • the above embodiments of the present invention mainly have the following beneficial effects:
  • the gas sensing device of the embodiment of the present invention uses an LED light source to excite a quartz crystal oscillator and measures the signal response amplitude at a fixed frequency, thereby avoiding the limitation of using a laser with good monochromaticity that has wavelength drift and causes mismatch of gas absorption peaks; the basic principle of the embodiment of the present invention is different from that of the prior art such as CN 113218901 A and CN 104280340 A.
  • LED light sources are used as gas Absorption requires the central wavelength of the LED output to be selected corresponding to the characteristic absorption spectrum of the detected gas.
  • the LED in the embodiment of the present invention is used to excite the quartz crystal to produce vibrations, which is independent of the type of gas to be detected, and therefore has a wide range of adaptability for the detection of gas types.
  • the above-mentioned prior art utilizes the principle of absorption spectroscopy technology.
  • the embodiment of the present invention is independent of the gas absorption spectrum, and therefore can be regarded as a new method that does not require spectral calibration, avoiding the disadvantage of wavelength drift of the light source that is common in absorption spectroscopy.
  • the gas sensing device of the embodiment of the present invention is based on the principle that different gas molecules and background gases such as air and nitrogen have different viscosity effects on the quartz crystal oscillator, thereby achieving gas type identification and concentration inversion, and therefore has wide adaptability;
  • the gas sensor device of the embodiment of the present invention measures the signal response amplitude at a fixed frequency of the quartz crystal oscillator, which can achieve a faster response speed than measuring its frequency drift principle;
  • the core components LED light source and quartz crystal oscillator used in the gas sensor device of the embodiment of the present invention have great cost advantages. Compared with the traditional spectral measurement technology, it saves expensive equipment such as lasers and photoelectric detectors, and can realize multi-point distributed measurement, which has higher practical value in the leakage detection of long-distance natural gas transportation pipelines.

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Abstract

一种气体传感装置，包括驱动模块、光源模块、测量模块以及数据采集处理模块，驱动模块用于驱动光源模块产生固定频率的强度调制光；测量模块包括设置于待测气体环境中的石英晶振（7），光源模块发出的强度调制光用于激励石英晶振（7）形成机械振动，机械振动经由压电效应产生电信号，电信号含有石英晶振（7）在固定频率下产生的与待测气体种类和浓度对应的信号响应幅值信息；数据采集处理模块用于采集电信号，根据信号响应幅值确定待测气体的浓度信息。能够避免光谱法气体检测中因光源波长漂移造成的检测结果偏差，同时具有广泛的适应性。

Description

一种气体传感装置 技术领域
本发明涉及气体传感技术领域，特别是涉及一种气体传感装置。
背景技术
对输气过程中的泄露、损耗实现高灵敏度、低成本的监测是保障高效、安全运行所需的。
甲烷是天然气中最主要的气体成分，其含量高达90％以上，针对天然气泄露检测可采用与瓦斯探测相同的技术手段。目前瓦斯探测多采用电子式测量技术，即采用热催化或催化燃烧原理，它们均存在浓度检测范围小、“中毒”风险高、校准困难、低浓度燃烧不充分等缺陷。采用化学试剂测量手段虽然价格低廉，但其重复性差、使用寿命短、性能退化严重，这些因素严重制约了它的实际应用。
针对以上困局，现今大量的光谱式测量手段应运而生。光谱式测量技术如直接吸收光谱、拉曼光谱、腔衰荡光谱等，它们均具有高灵敏度、快速响应、在线测量等技术优势。如公告号为“CN103743706A”的中国发明专利申请，公布了一种全量程高灵敏度瓦斯气体检测方法及装置，其利用红外吸收原理，采用半导体激光器探测目标气体特征峰的吸收强弱实现高灵敏度的检测。该方案利用波长调制技术即低频三角波叠加高频正弦波控制激光器，采用谐波解调技术实现气体低浓度下的高灵敏度探测。然而该专利所设计的传感器系统没有涉及激光波长的锁定与稳定，即激光器输出的波长若发生漂移，将导致所测量到的气体浓度值出现偏差。此外，如CN 113218901 A、CN 104280340 A中，LED光源都是用作气体吸收，光源与所要探测的气体种类相关，需要对应所探测气体的特征吸收谱线来选取LED输出的中心波长。这类吸收光谱法普遍存在光源波长漂移的缺点，无法胜任长时间工作的要求，而且针对不同气体种类的探测而言缺乏广泛的适应性，此外，测量响应速度也受到相应的限制。
发明内容
本发明的目的是在于解决如何避免光谱法气体检测中因光源波长漂移造成的检测结果偏差以及如何提高气体传感装置的广泛适应性和测量响应速度的技术问题。
为此，本发明提出一种气体传感装置，包括驱动模块、光源模块、测量模块以及数据采集处理模块，所述驱动模块与所述光源模块相连，所述测量模块与所述数据采集处理模块相连；所述驱动模块用于驱动所述光源模块产生固定频率的强度调制光；所述测量模块包括设置于待测气体环境中的石英晶振，所述光源模块发出的所述强度调制光用于激励所述石英晶振形成机械振动，所述机械振动经由压电效应产生电信号，所述电信号含有所述石英晶振在所述固定频率下产生的与待测气体种类和浓度对应的信号响应幅值信息；所述数据采集处理模块用于采集所述电信号，根据所述信号响应幅值确定所述待测气体的浓度信息。
在本发明的一些实施例中，所述数据采集处理模块包括锁相放大器、数据采集卡和数据处理装置，所述测量模块连接所述锁相放大器，所述数据采集卡连接在所述锁相放大器和所述数据处理装置之间，所述锁相放大器用于以所述固定频率为参考，对所述电信号进行一次谐波分量解调，输出一次谐波信号幅值传输至所述数据采集卡，所述数据采集卡将采集的数据传输至所述数据处理装置进行处理。
在本发明的一些实施例中，所述驱动模块包括函数发生器和电源驱动器，所述函数发生器连接所述电源驱动器和所述锁相放大器，所述电源驱动器连接所述光源模块，所述电源驱动器接收所述函数发生器的光源强度调制信号以产生同频率的驱动电流，由所述驱动电流对所述光源模块实现光源强度调制。
在本发明的一些实施例中，所述固定频率通过如下方式获得：所述函数发生器输出固定幅值而频率变化的扫频信号，控制所述光源模块输出频率变化的强度调制光，所述锁相放大器利用与所述函数发生器的扫频信号频率一致的参考信号，通过相关解调获得所述石英晶振在所述待测气体环境中的频率响应特性及其谐振频率，其中，所述谐振频率为所述石英晶振的频率响应幅值的特性曲线的最大值对应的频率；其中，所述数据采集处理模块根据所述石英晶振频率响应特性确定待测气体的种类。
在本发明的一些实施例中，所述光源模块包括光源和准直透镜，所述光源经由所述驱动模块驱动而输出所述强度调制光，所述准直透镜用于将所述强度调制光准直后输出；其中，所述光源为LED光源或相干光源。
在本发明的一些实施例中，所述测量模块还包括聚焦透镜，所述聚焦透镜用于对所述光源模块输出的光束进行汇聚，并使汇聚光束的焦点作用于所述石英晶振的悬臂梁结合点的中心位置。
在本发明的一些实施例中，所述测量模块还包括跨阻抗放大器，所述跨阻抗放大器连接在所述石英晶振与所述锁相放大器之间，用于将所述石英晶振吸收光能转化的电信号进行放大并以电压信号的形式输出，所述电压信号传输至所述锁相放大器中进行解调。
在本发明的一些实施例中，包括分别设置在不同探测点的多组所述光源模块和所述测量模块；其中，所述测量模块还包括匹配电容，所述石英晶振的一个引脚与所述匹配电容的一个引脚串联，所述跨阻抗放大器连接所述石英晶振的另一个引脚和匹配电容的剩余引脚，所述匹配电容用于多个所述石英晶振的谐振频率的统一校准从而实现多点探测端的频率值的匹配；所述锁相放大器为多通道输入，所述锁相放大器输出的电压信号与所述函数发生器的通道信息、时序信息集成为数组形成各通道传感信息，以实现多探测点气体浓度的探测。
在本发明的一些实施例中，包括分别设置在不同探测点的多组所述光源模块和所述测量模块；通过微型共振腔能量耦合、微加工、表面涂敷或温度调制的方式实现多个所述石英晶振的谐振频率的统一校准，其中，所述微型共振能量耦合是在所述石英晶振的附近添加共振腔，所述微加工是通过打磨或腐蚀调节所述石英晶振的尺寸，所述表面涂敷是通过化学沉积在所述石英晶振表面添加涂层，所述温度调制是调节所述石英晶振的工作温度；所述锁相放大器为多通道输入，所述锁相放大器输出的电压信号与所述函数发生器的通道信息、时序信息集成为数组形成各通道传感信息，以实现多探测点气体浓度的探测。
在本发明的一些实施例中，其特征在于，所述驱动模块为实现光调制所用的调制信号为方波信号、脉冲信号、三角波信号或正弦波信号。
本发明具有如下有益效果：
本发明提出的气体传感装置通过使用光源激励石英晶振，机械振动经由压电 效应产生电信号，电信号含有石英晶振在固定频率下产生的与待测气体种类和浓度对应的信号响应幅值信息等技术特征的设置，能够实现根据信号响应幅值确定所述待测气体的浓度信息。现有技术中，LED光源都是用作气体吸收，需要对应所探测气体的特征吸收谱线来选取LED输出的中心波长。本发明气体检测的基本原理不同，本发明通过光源激励石英晶振产生振动，利用不同气体分子数与背景气体如空气、氮气环境下针对石英晶振存在不同粘滞效应的原理，实现气体的种类鉴别与浓度反演，由于本发明实现气体传感与气体吸收光谱无关，避免了使用吸收光谱法中普遍存在光源波长漂移的缺点，避免了使用单色性较好的激光器存在波长漂移导致气体吸收峰失配的局限，从而解决了现有技术气体检测中因光源波长漂移造成的检测结果偏差的技术问题，并且因此针对气体种类的探测而言有着广泛的适应性。而且，由于本发明的气体传感装置所测量的是石英晶振固定频率下的信号响应幅值，相比传统光谱式测量技术可实现更高的灵敏度和更快的响应速度。此外，本发明的气体传感装置所使用的核心器件如石英晶振等具有巨大的成本优势，相比传统光谱式测量技术而言，省去了激光器、光电探测器等价格高昂的设备，并可实现多点分布测量，在远距离天然气运输管道的泄漏检测中具有更高的实用价值。本发明弱化了光源本身的限制因素，针对易燃易爆等高危险性气体实现更加安全、快速、可靠的检测需求。
本发明实施例中的其他有益效果将在下文中进一步述及。
附图说明
图1是本发明实施例中气体传感装置的结构示意图；
图2是本发明实施例中不同气体浓度下石英晶振的频率响应特性；
图3是本发明实施例中不同气体浓度下固定激励石英晶振频率所测量得到的信号响应幅值。
附图标记如下：
1为函数发生器、2为电源驱动器、3为探测气室、4为LED光源、5为沉浸式准直透镜、6为聚焦透镜、7为石英晶振、8为匹配电容、9为阻抗放大器、10为锁相放大器、11为数据采集卡、12为计算机。
具体实施方式
下面对照附图并结合优选的实施方式对本发明作进一步说明。需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。
需要说明的是，本实施例中的左、右、上、下、顶、底等方位用语，仅是互为相对概念，或是以产品的正常使用状态为参考的，而不应该认为是具有限制性的。
本发明下述实施例提出了一种气体传感装置，包括驱动模块、光源模块、测量模块以及数据采集处理模块，所述驱动模块与所述光源模块相连，所述测量模块与所述数据采集处理模块相连；所述驱动模块用于驱动所述光源模块产生固定频率的强度调制光；所述测量模块包括设置于待测气体环境中的石英晶振7，所述光源模块发出的所述强度调制光用于激励所述石英晶振7形成机械振动，所述机械振动经由压电效应产生电信号，所述电信号含有所述石英晶振7在所述固定频率下产生的与待测气体种类和浓度对应的信号响应幅值信息；所述数据采集处理模块用于采集所述电信号，根据所述信号响应幅值确定所述待测气体的浓度信息。
针对以特征峰为测量核心的光谱式气体传感技术中光源波长漂移问题以及多种气体探测的改进需求，本发明实施例提供一种基于固定频率激励石英晶振的气体传感装置。其中优选采用LED光源4作为石英晶振7的激励源，避免探测气体的吸收效应，利用固定频率激励、测量石英晶振7的信号响应幅值代替通过扫频以获得频率变化量的测量，提高了气体传感装置的灵敏度与检测速度，这是因为，频率变化量的测量需要通过扫频、拟合获得，而响应幅值是直接测量的结果，因此本发明实施例利用幅值响应可以提高检测速度；频率变化量的测量依赖于扫频精度和速度，因此用幅值响应的变化来做传感的灵敏度更高。本发明实施例可以较低成本实现气体泄漏检测的多点布局，采用多点布局方案，实现大区域、长路径系统的气体泄漏检测。
本发明实施例中所述的气体传感装置包括驱动模块、光源模块、测量模块、数据采集处理模块，其中：
本发明实施例中所述的驱动模块包括函数发生器1、电源驱动器2，所述函数发生器1输出方波扫描驱动后续光源实现光探测器件的频率预扫描；所述方波 信号驱动电源驱动器2实现恒定频率f0的强度调制。
本发明实施例中所述的光源模块包括LED光源4、金属封装及其沉浸式准直透镜5(沉浸式指封装透镜与发光芯片集成为一个整体，透镜外表面低于LED圆周外围的金属封装，对于透镜而言起到一定的保护作用，是一种已商用的透镜封装形式)，所述LED光源4为自然冷却的波长400-760nm可见光二极管；所述金属封装与沉浸式准直透镜5以及LED发光芯片集成为一体，使得该LED光源能够在自然散热的工况下稳定输出固定调制频率f0的激励光。
本发明实施例中所述的测量模块包括聚焦透镜6、石英晶振7、匹配电容8和跨阻抗放大器9，所述聚焦透镜6为可见光波段具有高透过率(T>90％)的球面透镜，该聚焦透镜将LED光源4输出的光束聚焦于后续石英晶振表面，用以激励石英晶振形成稳定的机械振荡；所述石英晶振7为弯曲振动模式的商用25kHz晶振，该石英晶振7的谐振频率在剥开其自身金属外壳后均能保持Hz数量级的微小差异；所述匹配电容8(1-100pF，根据晶振频率的差异数值，匹配电容8的大小从几到几十pF)与石英晶振7直接串联，实现石英晶振7谐振频率的统一校准。所述跨阻抗放大器9的等效阻值为1-50MΩ如10MΩ，该跨阻抗放大器9连接石英晶振7其中一个引脚和匹配电容8的剩余引脚，用以将石英晶振7产生的微弱压电电流信号进行放大并转换为电压信号。
本发明实施例中所述的数据采集处理模块包括锁相放大器10、数据采集卡11，计算机12及其处理程序；所述锁相放大器10为多通道输入、前端数模转换以及数字锁相解调的锁相放大器，该锁相放大器10连接跨阻抗放大器9的放大输出端以解调石英晶振7固定频率下的信号响应幅值；所述数据采集卡11用于接收锁相放大器10解调石英晶振7的信号响应幅值，并将锁相放大器10各通道的测量结果传输至计算机12的数据处理程序；所述数据处理程序经多通道数据算法校准、浓度校正得到多点探测位置处的气体浓度信息。
所述驱动模块中函数发生器1产生的频率f0高频信号包括且不限于短脉冲信号、方波信号、三角波信号等。
所述LED光源4包括且不限于紫外、可见光、红外波段的LED光源(LED光源为非相干光源)、相干光源即各种波长的激光、黑体辐射源、各种波段的宽带光源等，所述金属封装与沉浸式准直透镜5包括且不限于其他形式(纯石英、 硅窗口封装)的LED封装方案、光束准直方案(常见的封装方式为平面窗口片封装，窗口片外准直形式)，所述LED光源4经聚焦后作用于石英晶振7的表面位置可根据锁相放大器10解调石英晶振7固定频率f0的信号幅值强度而改变优化(可以通过改变光束聚焦点在石英晶振上的位置，根据锁相放大器测量到的信号响应幅值大小来进行优化)，其激励石英晶振7形成机械振荡包括且不限于其他形式的激励方式，如光声激励模式。
所述石英晶振7可根据LED光源4等不同激励形式而改动，同样的，所述石英晶振7包括且不限于低频弯曲振动模式、高频切变模式等工作方式、不同谐振频率的石英晶振，所述匹配电容8是为校准石英晶振的频率差异，可采用其他形式的校准方案，包括且不限于微型共振腔能量耦合、微加工、表面涂敷、温度调制等方案(其他形式的校准方案不用匹配电容。微型共振能量耦合是在石英晶振附近添加共振腔，微加工是采用打磨、腐蚀方法改变石英晶振的尺寸，表面涂敷是通过化学沉积的方法给石英晶振表面添加一定后的涂层，温度调制是改变石英晶振的工作温度)。
激励信号为LED光源4作用于石英晶振7上的光强度调制信号；函数发生器1产生的频率f0的方波信号为输入到电源驱动器2上的调制信号；电源驱动器2产生的直流方波信号为驱动LED光源4的信号。三者信号的频率相同，波形相同。
所述驱动模块产生的激励信号为石英晶振7在设定气体浓度下的谐振频率，同时，函数发生器1产生频率f0的方波信号传输至锁相放大器10中用以解调设定频率下石英晶振7的信号响应幅值；此外，锁相放大器10的参考解调模式包括且不限于直接的频率输入参考、同频率的模值解调等。
所述驱动模块以及信号采集处理模块可集成为板卡、单片机等硬件电路中，可进行数据、程序的移植与修改。
实施例1
如图1所示，本实施例的气体传感装置包括驱动模块、光源模块、测量模块、数据采集处理模块。
驱动模块包括函数发生器1和电源驱动器2，根据所选定的石英晶振7的固定频率f0，将函数发生器1设置为产生频率f0的方波信号，该方波信号的占空比 为50％，低电平为零值，高电平为LED光源4最大加载电压；函数发生器1输出的方波信号输入至电源驱动器2的调制端口，电源驱动器2将输出与函数发生器1产生的方波信号一致的直流方波信号，该直流方波信号连接至后续LED光源4实现固定频率f0的强度调制。
光源模块包括LED光源4、沉浸式准直透镜5，LED光源4为连续最大输出功率20mW的650nm红光LED，其输出光首先由沉浸式准直透镜5进行光束准直输出，LED光源4的外壳为金属封装，自然冷却的散热方式，与沉浸式准直透镜5封装为一体，在电源驱动器2固定频率f0的驱动下，输出频率为f0的强度调制光束。
测量模块包括聚焦透镜6、石英晶振7、匹配电容8和跨阻抗放大器9，石英晶振7的一个引脚与匹配电容8的一个引脚串联，聚焦透镜6将LED光源4经沉浸式准直透镜5输出的准直光束进行汇聚，该汇聚光束的焦点作用于石英晶振7悬臂梁结合点的中心位置，石英晶振7受到频率为f0的强度调制光激励，由其自身的谐振工作原理吸收光能转化为机械振动，该机械振动经由压电效应最终产生电信号，石英晶振7与匹配电容8连接，匹配电容8可实现石英晶振7谐振频率的统一校准从而实现多点探测端的匹配(多点探测端的石英晶振频率进行统一，测量所得信号强度幅值归一化即可实现多点匹配)。跨阻抗放大器9的等效阻值为1-50MΩ，该跨阻抗放大器连接石英晶振7另一个引脚和匹配电容8的剩余引脚(石英晶振有两个引脚，匹配电容与其串联即可)，跨阻抗放大器9将石英晶振7经过吸收光能转化的电信号(其为微弱压电电流信号)进行放大至mV量级并以电压信号的形式输出。
数据采集处理模块包括锁相放大器10、数据采集卡11和计算机12。跨阻抗放大器9输出的电压信号传输至锁相放大器10中进行解调，即锁相放大器10以函数发生器1设定方波信号的f0频率为参考，对跨阻抗放大器9输出的电压信号进行一次谐波分量解调，解调输出的一次谐波信号幅值传输至数据采集卡11，函数发生器1将其通道信息、时序信息传输至数据采集卡11，数据采集卡11将锁相放大器10输出的电压信号与函数发生器1的通道信息、时序信息即成为数组形成各通道传感信息。数据采集卡11收集上述信号传输至计算机12上的上位机数据处理程序，计算机12上的上位机软件将数据采集卡11收集的数据，包括 函数发生器1的通道信息、时序信息以及锁相放大器10的电压信号集合成数组，最终形成各通道的传感信息，继而实现多点气体浓度的探测。
在实际测量过程中，首先可用频率变化的扫频信号去获取获得石英晶振7的固定频率f0。利用函数发生器1输出一个固定幅值的扫频信号控制LED光源4输出一个频率变化的强度调制光强，LED光源4的输出光束激励石英晶振7形成机械振动，石英晶振7产生的电信号通过跨阻抗放大器9放大后输入至锁相放大器10中。锁相放大器10的参考信号始终与函数发生器1的输出扫描频率保持一致，通过相关解调获得石英晶振7在不同频率下一次谐波信号的响应幅值。至此，便可获得石英晶振7的频率响应特性及其谐振频率即固定频率f0。相同浓度、不同种类的气体对石英晶振频率的影响因子不同，根据这一原理可鉴别其种类。在固定LED激励频率下，同一种气体不同浓度将直接影响石英晶振的信号响应幅值。为了实现探测气体浓度的标定，首先将光源模块以及测量模块所在的探测气室3分别注入不同浓度的CH4气体(通入的是包含CH4气体和背景气体的混合气体)，测量不同浓度下石英晶振7的频率响应特性及其谐振频率。如图2所示：探测气室3分别通入体积浓度为10％、20％、30％、40％、50％的CH4气体，函数发生器1输出扫频信号(一个频率变化的方波信号)，通过锁相放大器10解调石英晶振7的频率响应幅值即可得到其形如洛伦兹线型的特性曲线其中，横坐标为赫兹(Hz)，纵坐标为信号幅值(mV)。其中，在某一个浓度下测量所获得的曲线最大值对应的频率即为石英晶振7在该浓度下的谐振频率。可以清晰的看出，随着气体浓度增大，石英晶振7的谐振频率逐渐增大。这是由于气体分子数与背景气体(空气、氮气)的分子数存在差异，致使石英晶振7在气体环境中的粘滞力以及谐振阻尼发生改变。因此，石英晶振7的谐振频率将发生改变，而气体的粘滞效应与气体分子数有直接的关联，利用这一原理便可通过测量石英晶振7的频率响应特性来鉴别气体种类。相同浓度的不同种类气体对石英晶振的粘滞力不同，利用这一原理即可实现种类的鉴别，具体可测量石英晶振在相同浓度、不同种类气体下的频率漂移量、纯背景气体以及纯目标气体下频率漂移量以及f0频率下的信号响应幅值来做种类的标记(在实际应用中，可先针对各种气体做一个标定工作)。在本实施例中，为了提高检测速度、探测灵敏度，如图2所示，将函数发生器1输出的方波信号频率固定为f0，当气体浓度发生改变时，测量石 英晶振7在f0频率下的信号响应幅值将会发生变化，其变化值大小的测量是迅速的、直接的。为此，如图3所示：其中，横坐标为时间(s)，纵坐标为信号幅值(μV)，将函数发生器1输出的方波信号的频率固定为f0，仅为示例，向探测气室3内分时通入体积浓度为5％、10％、15％、20％、25％、30％、35％、40％的CH4、N2混合气体，验证本发明实施例气体传感装置的测量速度与探测灵敏度，通过锁相放大器10解调石英晶振7在f0频率下的响应幅值。在整个过程中，测量是连续的，浓度的变化是通过更改质量流量配气系统中的混合流速实现，因此可以观察到浓度变化以及变化过程中的过充和波动。图3结果表明，石英晶振7在固定LED调制频率f0的激励、通入不同浓度CH4气体时，石英晶振7的信号响应幅值将发生改变。即证明，本实施例采用固定频率激励石英晶振7可实现目标检测气体的浓度测量。图3所述示例受测试所使用的气体管路长度局限，只作为一种现象展示。在实际应用中，本实施例的气体传感装置响应时间小于秒量级并有着更加优异的检测性能。
为了实现多点分布式测量，探测气室3所包含的光源模块、测量模块将以探测单元(3、4、5、6、7、8、9构成一个探测单元)的形式连接在整个系统中，其具体连接形式如图1中的3′、3″(3′、3″中都含有4、5、6、7、8、9这些元件)。图1中的箭头表示气体的通入和流出。通过装配测量模块中的匹配电容8便可校准多个探测单元中石英晶振7的谐振频率，从而实现整个传感系统同频率驱动、多点探测的同时解调。图1中列出了三个探测单元仅作为一个示例，具体所需的探测单元数根据实际应用需求而定。
本发明实施例公开了一种气体传感装置，基于石英晶振7所处环境气体的粘滞效应实现气体浓度的检测；其包括驱动模块、光源模块、测量模块、数据采集处理模块；驱动模块用于产生驱动LED光源4的强度调制信号；光源模块用于激励石英晶振7形成机械振动，在固定频率、强度的激励条件下使得石英晶振7能够对气体粘滞效应做出响应；测量模块用于检测石英晶振7所处环境中气体粘滞效应的变化，获得在不同浓度气体对应的石英晶振7信号响应幅值；数据采集处理模块将采集石英晶振7产生的信号以及同步驱动模块中的相关信号，获得多点探测信号并对其进行计算后处理，以得到不同探测点的气体浓度及浓度变化信息。相比可调谐激光二极管吸收光谱、腔衰荡光谱、法拉第磁旋转光谱、光声光 谱等利用相干光源气体的指纹特征探测检测手段而言，本发明实施例有效提高了检测气体种类的适应性，并且显著降低了核心元器件的成本，实现多点分布式测量，弱化了光源本身的限制因素，针对易燃易爆等高危险性气体实现更加安全、快速、可靠的检测需求。
实施例2：
本实施例提供一种气体传感装置，包括驱动模块、光源模块、测量模块、数据采集处理模块。
本实施例的驱动模块包括函数发生器1、电源驱动器2；所述函数发生器1首先产生一个方波形式的扫频信号输入至电源驱动器2，所述电源驱动器2接收函数发生器1的方波信号产生同频率的方波直流驱动电流，并对后续光源实现强度调制；在确定选取调制频率f0后，函数发生器1的输出方波频率将固定为f0并输出至电源驱动器2。
进一步地，所述函数发生器1产生固定频率的方波驱动信号作为光源强度调制信号实现石英晶振的有效激励，包括但不限于三角波信号激励源、正弦波激励源，也不限于连续光后端的强度调制方式如斩波器、声光调制、电光调制等方式。当采用三角波、正弦波激励源时，只是对上述示例中的方波信号进行替换。连续光后端的强度调制均添加相应的调制器，此时电源驱动器2仅需要一个恒定的电流输出。
本实施例的光源模块包括LED光源4、沉浸式准直透镜5；所述LED光源4为输出波长为400-760nm、功率20mW的LED光源，其封装形式为金属封装且作自然冷却的方式散热；所述沉浸式准直透镜5与LED光源4的金属封装形成为一个整体结构，在器件尺寸上可做高度集成；所述LED光源4经由电源驱动器2输出的直流方波电流信号驱动输出稳定频率的强度调制光束，此光束再由沉浸式准直透镜5准直输出。
进一步地，所述LED光源4可以为输出波长为400-760nm，功率为20mW，金属外壳封装形式，所述沉浸式准直透镜5与LED光源4的金属外壳封装形成为一体。
进一步地，所述LED光源4作为激励石英晶振产生机械振动的驱动源包括但不限于紫外、可见光、红外波段LED光源以及相干光源(各种波长的激光、黑体辐射源、各种波段的宽带光源等)；所述沉浸式准直透镜5用作准直激励光 源包括但不限于多透镜组光学系统、折射率渐变聚合物、抛物面反射镜等光学元件。
本实施例的测量模块包括聚焦透镜6、石英晶振7、匹配电容8、跨阻抗放大器9；所述聚集透镜6将LED光源4以及沉浸式准直透镜5输出的准直光束进行聚焦，其聚焦光斑入射至石英晶振7悬臂梁结合点的中心位置，所述石英晶振7为商用的谐振频率为25kHz的音叉式晶振，其引脚一端连接至匹配电容8，所述匹配电容8用于校准调谐多个探测单元中石英晶振7的谐振频率，以匹配出相等的频率值，将多个探测单元的每个石英晶振频率校准为相等。所述跨阻抗放大器9的等效阻值为1-50MΩ，其将石英晶振7产生的压电电流信号放大输出为电压信号。进一步地，测量模块中的石英晶振7作为核心气体检测器件，利用气体粘滞效应原理作为测量依据包括但不限于不同谐振频率的石英晶振，如常见的32.768kHz，30.72kHz，38kHz等，同时也不限于非音叉式的石英晶振，如面切变形式的高频MHz量级频率器件等。
进一步地，所述匹配电容8作为石英晶振7频率校准匹配元件(如果只有一个探测单元，则不需要匹配电容8)，实现同频调制、解调下的多点分布检测，包括但不限于其他形式的频率校准补偿手段如温度调制、压强调制、晶振研磨等。
本实施例的数据采集处理模块包括锁相放大器10、数据采集卡11、计算机12；所述锁相放大器10为多通道解调，以函数发生器1输出的方波信号频率为参考，解调石英晶振7经跨阻抗放大器9放大输出电信号的一次谐波分量幅值；所述数据采集卡11接收锁相放大器10解调的信号以及函数发生器1输出的通道信息、时序信息、同步信号，最终传输至计算机12的上位机数据处理程序中。
进一步地，所述传感装置在本实施例中以CH4作为目标检测气体，其广泛适应性包括但不限于气体与背景气体(氮气、空气)分子数相差较大的气体如H2、He、CO2、NO2、C6H6以及聚合物气体等种类。
总体而言，与现有光谱式气体传感测量器相比，本发明上述实施例主要具备以下有益效果：
(1)本发明实施例的气体传感装置通过使用LED光源激励石英晶振，测量固定频率下的信号响应幅值，避免了使用单色性较好的激光器存在波长漂移导致气体吸收峰失配的局限；本发明实施例与现有技术如CN 113218901 A、CN 104280340 A等专利的基本原理不同，上述现有技术中，LED光源都是用作气体 吸收，需要对应所探测气体的特征吸收谱线来选取LED输出的中心波长。本发明实施例中的LED是用来激励石英晶振产生振动，与所要探测的气体种类无关，因此针对气体种类的探测而言有着广泛的适应性。上述现有技术利用了吸收光谱技术原理，本发明实施例与气体吸收光谱无关，因此可视为免光谱标定的新方法，避免使用吸收光谱法中普遍存在光源波长漂移的缺点。
(2)本发明实施例的气体传感装置基于不同气体分子数与背景气体如空气、氮气环境下针对石英晶振存在不同粘滞效应的原理，从而实现气体的种类鉴别与浓度反演，因此拥有广泛的适应性；
(3)本发明实施例的气体传感装置所测量的是石英晶振固定频率下的信号响应幅值，相比测量其频率漂移原理可实现更快的响应速度；
(4)本发明实施例的气体传感装置所使用的核心器件LED光源、石英晶振均具有巨大的成本优势，相比传统光谱式测量技术而言，省去了激光器、光电探测器等价格高昂的设备，可实现多点分布测量，在远距离天然气运输管道的泄漏检测中具有更高的实用价值。
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明，不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的技术人员来说，在不脱离本发明构思的前提下，还可以做出若干等同替代或明显变型，而且性能或用途相同，都应当视为属于本发明的保护范围。

Claims (10)

  1. 一种气体传感装置，其特征在于，包括驱动模块、光源模块、测量模块以及数据采集处理模块，所述驱动模块与所述光源模块相连，所述测量模块与所述数据采集处理模块相连；所述驱动模块用于驱动所述光源模块产生固定频率的强度调制光；所述测量模块包括设置于待测气体环境中的石英晶振，所述光源模块发出的所述强度调制光用于激励所述石英晶振形成机械振动，所述机械振动经由压电效应产生电信号，所述电信号含有所述石英晶振在所述固定频率下产生的与待测气体种类和浓度对应的信号响应幅值信息；所述数据采集处理模块用于采集所述电信号，根据所述信号响应幅值确定所述待测气体的浓度信息。
  2. 如权利要求1所述的气体传感装置，其特征在于，所述数据采集处理模块包括锁相放大器、数据采集卡和数据处理装置，所述测量模块连接所述锁相放大器，所述数据采集卡连接在所述锁相放大器和所述数据处理装置之间，所述锁相放大器用于以所述固定频率为参考，对所述电信号进行一次谐波分量解调，输出一次谐波信号幅值传输至所述数据采集卡，所述数据采集卡将采集的数据传输至所述数据处理装置进行处理。
  3. 如权利要求2所述的气体传感装置，其特征在于，所述驱动模块包括函数发生器和电源驱动器，所述函数发生器连接所述电源驱动器和所述锁相放大器，所述电源驱动器连接所述光源模块，所述电源驱动器接收所述函数发生器的光源强度调制信号以产生同频率的驱动电流，由所述驱动电流对所述光源模块实现光源强度调制。
  4. 如权利要求3所述的气体传感装置，其特征在于，所述固定频率通过如下方式获得：所述函数发生器输出固定幅值而频率变化的扫频信号，控制所述光源模块输出频率变化的强度调制光，所述锁相放大器利用与所述函数发生器的扫频信号频率一致的参考信号，通过相关解调获得所述石英晶振在所述待测气体环境中的频率响应特性及其谐振频率，其中，所述谐振频率为所述石英晶振的频率响应幅值的特性曲线的最大值对应的频率；其中，所述数据采集处理模块根据所述石英晶振的频率响应特性确定待测气体的种类。
  5. 如权利要求1至4任一项所述的气体传感装置，其特征在于，所述光源模块包括光源和准直透镜，所述光源经由所述驱动模块驱动而输出所述强度调制光，所述准直透镜用于将所述强度调制光准直后输出；其中，所述光源为LED 光源或相干光源。
  6. 如权利要求1至4任一项所述的气体传感装置，其特征在于，所述测量模块还包括聚焦透镜，所述聚焦透镜用于对所述光源模块输出的光束进行汇聚，并使汇聚光束的焦点作用于所述石英晶振的悬臂梁结合点的中心位置。
  7. 如权利要求2至4任一项所述的气体传感装置，其特征在于，所述测量模块还包括跨阻抗放大器，所述跨阻抗放大器连接在所述石英晶振与所述锁相放大器之间，用于将所述石英晶振吸收光能转化的电信号进行放大并以电压信号的形式输出，所述电压信号传输至所述锁相放大器中进行解调。
  8. 如权利要求7所述的气体传感装置，其特征在于，包括分别设置在不同探测点的多组所述光源模块和所述测量模块；其中，所述测量模块还包括匹配电容，所述石英晶振的一个引脚与所述匹配电容的一个引脚串联，所述跨阻抗放大器连接所述石英晶振的另一个引脚和匹配电容的剩余引脚，所述匹配电容用于多个所述石英晶振的谐振频率的统一校准从而实现多点探测端的频率值的匹配；所述锁相放大器为多通道输入，所述锁相放大器输出的电压信号与所述函数发生器的通道信息、时序信息集成为数组形成各通道传感信息，以实现多探测点气体浓度的探测。
  9. 如权利要求2至4任一项所述的气体传感装置，其特征在于，包括分别设置在不同探测点的多组所述光源模块和所述测量模块；通过微型共振腔能量耦合、微加工、表面涂敷或温度调制的方式实现多个所述石英晶振的谐振频率的统一校准，其中，所述微型共振能量耦合是在所述石英晶振的附近添加共振腔，所述微加工是通过打磨或腐蚀调节所述石英晶振的尺寸，所述表面涂敷是通过化学沉积在所述石英晶振表面添加涂层，所述温度调制是调节所述石英晶振的工作温度；所述锁相放大器为多通道输入，所述锁相放大器输出的电压信号与所述函数发生器的通道信息、时序信息集成为数组形成各通道传感信息，以实现多探测点气体浓度的探测。
  10. 如权利要求1至4任一项所述的气体传感装置，其特征在于，所述驱动模块为实现光调制所用的调制信号为方波信号、脉冲信号、三角波信号或正弦波信号。
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