Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
  • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
  • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents

Definitions

• the present invention relates to an organic solvent recovery system.
• the organic solvent recovery system is equipped with a pair of treatment tanks that use an adsorbent to adsorb the organic solvents in the gas to be treated, a treatment gas supply device and a desorption gas supply device for each treatment tank, and employs a mechanism for switching between an adsorption process that supplies the gas to be treated to the treatment tank, and a desorption process that supplies the desorption gas.
• Activated carbon fibers are used as adsorbents in gas treatment devices.
• Activated carbon fibers have excellent ability to adsorb low-concentration organic solvent-containing gases and are used as adsorbents.
• JP 2014-147864 A discloses a gas treatment device in which activated carbon fibers are fixed to a support or self-supported into a cylindrical shape and arranged vertically within a core material.
• Patent Document 2 discloses an activated carbon desorption device that reduces the amount of water vapor used by connecting the condensation side of a heat exchanger to the desorption steam outlet of an activated carbon adsorber (treatment tank), supplying water to the evaporation side of the heat exchanger, and installing a pressure reducing blower in the line connecting the evaporation side of the heat exchanger to the desorption water vapor inlet of the activated carbon adsorber, and evaporating the water on the evaporation side using the heat of the desorption steam to generate water vapor for desorption.
• JP 2014-147864 A Japanese Utility Model Application Publication No. 58-161636
• the temperature of the desorption gas discharged from the treatment tank changes from time to time due to fluctuations in the outside air temperature, the organic solvent concentration in the gas being treated, the humidity of the gas being treated, and other factors. Therefore, when generating desorption water vapor using the heat of the desorption gas via a heat exchanger as in Patent Document 2, there is a risk that the flow rate of the desorption water vapor cannot be sufficiently secured.
• the condensed water of the desorbed gas in the heat exchanger may be acidic due to the decomposition of organic solvents contained in the treated gas.
• High temperatures close to steam temperature and high concentrations caused by repeated drying and wetting can increase the corrosive effect, causing pitting corrosion in the heat exchanger components. This can result in accidents such as leakage of the desorbed gas due to corrosion of the heat exchanger components.
• the present invention aims to provide an organic solvent recovery system that has a mechanism for generating desorption steam using the heat of the desorption gas, ensures a sufficient flow rate of the desorption steam supplied to the treatment tank, improves the efficiency of organic solvent recovery, and reduces corrosion of components caused by decomposition products of the organic solvent.
• the organic solvent recovery system of the present invention has the following configuration.
• an organic solvent recovery apparatus including a treatment tank containing an adsorbent that adsorbs and removes an organic solvent from a gas to be treated that contains the organic solvent, and repeats an adsorption process in which the gas to be treated that is supplied to the treatment tank is brought into contact with the adsorbent to discharge a treated gas, and a desorption process in which the organic solvent is desorbed from the adsorbent by a desorption steam supplied to the treatment tank and a desorbed gas is discharged; a heat exchanger including a heat generating section through which the desorption gas discharged from the organic solvent recovery apparatus passes and a heat absorbing section to which makeup water is supplied, the heat exchanger indirectly heating the makeup water in the heat absorbing section with the desorption gas passing through the heat generating section to generate steam, and discharging the indirectly heated desorption gas; a cooling unit that cools the desorption gas discharged from the heat exchanger and discharges a condensate, a water vapor supply unit that supplies water vapor to the heat
• the organic solvent recovery system may include a pressure measuring unit that measures the pressure of the gas phase of the heat absorbing section of the heat exchanger, and the flow rate of water vapor supplied to the heat generating section may be controlled based on the measurement results of the pressure measuring unit.
• the organic solvent recovery system may include a temperature measuring unit that measures the temperature of the liquid phase of the heat absorption unit of the heat exchanger, and the flow rate of water vapor supplied to the heat generation unit may be controlled based on the measurement results of the temperature measuring unit.
• the organic solvent recovery system described above includes a path for supplying the desorption gas discharged from the treatment tank to the heat exchanger, and a path for supplying the desorption gas discharged from the treatment tank to the cooling section.
• a path for supplying the desorption gas discharged from the treatment tank to the heat exchanger In the early stage of the desorption process, water vapor is supplied to the heat generating section of the heat exchanger, and the desorption gas discharged from the treatment tank is supplied to the cooling section. In the later stage of the desorption process, the desorption gas is supplied to the heat generating section of the heat exchanger, and the desorption gas after passing through the heat generating section is supplied to the cooling section.
• the organic solvent recovery device may include a condensate reservoir that accumulates the condensate discharged from the cooling section
• the heat exchanger may include a desorption gas outlet receiving section in which the desorption gas accumulates after indirect heating, a piping path that supplies the uncondensed desorption gas from the desorption gas outlet receiving section to the cooling section, and a piping path that supplies the desorption gas that has become condensed from the desorption gas outlet receiving section to the condensate reservoir.
• the heat exchanger may be a multi-tube heat exchanger having a tube portion, which is the heat generating portion, inside a container portion, which is the heat absorbing portion.
• the water vapor supply unit may be connected to or may share a desorption water vapor supply unit that directly supplies the desorption water vapor to the organic solvent recovery device.
• an organic solvent recovery system that has a mechanism for generating desorption steam using the heat of the desorption gas, ensures a sufficient flow rate of the desorption steam supplied to the treatment tank, improves the efficiency of organic solvent recovery, and reduces corrosion of heat exchanger components caused by decomposition products of the organic solvent.
• FIG. 1 is a conceptual diagram showing a configuration of an organic solvent recovery device in a first embodiment.
• 4 is a time chart showing the time-dependent switching between an adsorption process and a desorption process of the organic solvent recovery apparatus in the first embodiment.
• FIG. 11 is a conceptual diagram showing a configuration of an organic solvent recovery device in a second embodiment.
• organic solvents include methylene chloride, chloroform, carbon tetrachloride, ethylene chloride, trichloroethylene, tetrachloroethylene, o-dichlorobenzene, m-dichlorobenzene, fluorocarbon-112, fluorocarbon-113, HCFC, HFC, propyl bromide, butyl iodide, methyl acetate, ethyl acetate, propyl acetate, butyl acetate, vinyl acetate, methyl propionate, methyl acrylate, ethyl acrylate, butyl acrylate, methyl methacrylate, diethyl carbonate, ethyl formate, diethyl ether, dipropyl ether, tetrahydrofuran, dibutyl ether, anisole, methanol, ethanol, isopropanol, n-butanol, 2-butanol, isobutan
• FIG. 1 is a diagram showing the configuration of an organic solvent recovery system 1A according to the first embodiment.
• the organic solvent recovery system 1A includes an organic solvent recovery device 100, a heat exchanger 115, and a condenser 111 as a cooling section.
• the organic solvent recovery apparatus 100 includes a first treatment tank 104A and a second treatment tank 104B.
• the first treatment tank 104A includes a cylindrical first adsorbent 105A
• the second treatment tank 104B includes a cylindrical second adsorbent 105B.
• the first adsorbent 105A and the second adsorbent 105B are passed from the outside to the inside to perform an adsorption process (adsorption process), and water vapor is passed from the inside to the outside to perform a desorption process (desorption process).
• activated carbon fiber or activated carbon is used for the first adsorbent 105A and the second adsorbent 105B.
• the first treatment tank 104A and the second treatment tank 104B are connected to the treated gas inlet line 103 and the desorption gas line 110.
• the first treatment tank 104A and the second treatment tank 104B are provided with a first automatic lower damper 107A and a second automatic lower damper 107B, respectively.
• a first automatic upper damper 106A and a second automatic upper damper 106B that control the flow of the gas I to be treated are provided above the first treatment tank 104A and the second treatment tank 104B, respectively.
• a heat exchanger 115 is connected to the desorption gas line 110.
• the heat exchanger 115 has a desorption gas inlet chamber 115C to which the desorption gas line 110 is connected.
• the heat exchanger 115 also has a desorption gas outlet chamber 115D, which is a desorption gas outlet receiving section to which a heat exchanger outlet gas line 117 and a heat exchanger condensate line 118 are connected.
• makeup water VI is supplied to the makeup water storage section 115E.
• the makeup water VI is sent to the makeup water storage section 115E, for example, by a liquid delivery pump or the like.
• the heat exchanger 115 indirectly heats the make-up water VI in the make-up water storage section 115E with the desorption gas supplied from the desorption gas line 110, thereby evaporating the make-up water VI and generating water vapor.
• the make-up water storage section 115E is decompressed so that the boiling point is, for example, 70°C to 97°C, preferably 75°C to 95°C, and the generated water vapor is supplied to the steam compressor 122 as regenerated water vapor through the regenerated water vapor line 119 connected to the heat exchanger 115.
• the steam compressor 122 is a mechanism that uses high-pressure water vapor as a driving source (hereinafter, driving water vapor) to draw in constant-pressure water vapor (hereinafter, sucked water vapor) in a reduced pressure state and increase the pressure to medium-pressure water vapor (hereinafter, discharged water vapor).
• high-pressure water vapor VIII (a part of water vapor V) is supplied to the steam compressor 122 as driving water vapor through the steam compressor water vapor line 121, so that the regenerated water vapor is sucked in as sucked water vapor through the regenerated water vapor line 119, and the desorption water vapor, which is a mixture of water vapor VIII and regenerated water vapor, is discharged as discharged water vapor through the desorption water vapor line 108.
• the desorption steam discharged from the steam compressor 122 is supplied to the first treatment tank 104A and the second treatment tank 104B where the desorption process is being carried out through the desorption steam line 108.
• the steam compressor 122 may be replaced by a compressor having a similar effect, such as a roots blower or a turbo blower.
• the makeup water storage section 115E is connected to a heat exchanger steam supply line 120, which is a steam supply section for supplying steam VII, which is a part of the steam V.
• a heat exchanger steam supply line 120 which is a steam supply section for supplying steam VII, which is a part of the steam V.
• the makeup water storage section 115E can be kept at a predetermined pressure or higher (for example, a gauge pressure of -0.099 MPa or higher), and the flow rate of the suction steam sucked into the steam compressor 122, i.e., the regenerated steam, can be sufficiently ensured.
• the flow rate of the discharge steam of the steam compressor 122 i.e., the desorption steam
• the desorption efficiency of the organic solvent in the desorption process of the organic solvent recovery device 100 is maintained high.
• the makeup water VI in the heat exchanger 115 body and the makeup water storage section 115E can be maintained at a high temperature, and the makeup water VI can be efficiently evaporated.
• the makeup water storage section 115E is provided with a pressure sensor 115F, which is a pressure measuring section that measures the pressure inside the heat exchanger 115.
• an adjustment valve V4 is provided on the heat exchanger steam supply line 120 to adjust the flow rate of the steam VII.
• the heat exchanger 115 is provided with a control unit 115G that adjusts the flow rate of the water vapor VII. Specifically, the control unit 115G adjusts the opening of the adjustment valve V4 to supply the water vapor VII so that the pressure of the makeup water storage unit 115E detected by the pressure sensor 115F is maintained within a predetermined range (approximately -0.099 to -0.080 MPa in gauge pressure).
• the heat exchanger 115 is preferably a multi-tube heat exchanger.
• a multi-tube heat exchanger is a heat exchanger in which a large number of tubes are arranged inside a cylinder called a shell, which is a container part.
• the surface of the tubes acts as a heat transfer surface, and heat is exchanged between the fluid flowing inside the tube 115B (hereinafter, the tube side) and the fluid flowing between the outside of the tube 115B and the inside of the shell 115A (hereinafter, the shell side).
• the tube 115B is a heat generating part that provides heat
• the shell 115A is a heat absorbing part that receives heat.
• the tube 115B connects the desorption gas inlet chamber 115C and the desorption gas outlet chamber 115D. Furthermore, the heat exchanger 115 of the present invention is arranged so that the tube 115B faces horizontally, and the tube side acts as a condensation side that supplies the desorption gas, and the shell side acts as an evaporation side that supplies makeup water VI and steam VII.
• the tube side acts as a condensation side that supplies the desorption gas
• the shell side acts as an evaporation side that supplies makeup water VI and steam VII.
• other types of heat exchangers may be used instead as long as they have the same effect as a heat exchanger, such as plate or spiral types.
• makeup water VI In shell 115A, makeup water VI always remains in an amount that contacts a portion of tube 115B. When makeup water VI comes into contact with tube 115B, makeup water VI receives heat from the desorbed gas and evaporates. In addition, tube 115B also serves to heat makeup water up to the evaporation temperature, so there is no need to provide a separate makeup water heating facility to heat makeup water VI.
• the heat exchanger 115 preferably adjusts the water level of the make-up water VI so that a portion of the tube 115B does not come into contact with the make-up water VI in the make-up water storage section 115E. Specifically, a portion of the tube 115B is located in the gas phase portion of the shell 115A between the water level of the make-up water VI and the regenerated steam line 119. The regenerated steam is heated by the tube 115B located in the gas phase portion of the shell 115A, and this prevents the regenerated steam from condensing before being sucked into the steam compressor 122.
• possible means for adjusting the water level of the make-up water VI include, for example, a control method using a float type, a spacer type, a differential pressure type, or a capacitance type liquid level gauge.
• the desorbed gas outlet chamber 115D of the heat exchanger 115 is connected to the heat exchanger outlet gas line 117 and is connected to the condenser 111. Inside the condenser 111, heat exchange occurs between the desorbed gas that has completed heat exchange in the heat exchanger 115 and the cooling water, and the desorbed gas is cooled and condensed.
• the condensate condensed in the condenser 111 is supplied to the separator 113, which is a condensate reservoir, through the condenser condensate line 112.
• the separator 113 separates the condensate sent from the condenser condensate line 112 into a layer of recovered solvent 113A and a layer of separated wastewater 113B.
• the separated wastewater 113B may be discharged after aeration using an aeration device.
• a three-way on-off valve V3 is provided on the desorption gas line 110.
• One downstream side of the on-off valve V3 is connected to the desorption gas inlet chamber 115C of the heat exchanger 115, and the other downstream side is connected to the condenser 111 via the condenser line 116.
• the on-off valve V3 can be used to switch between supplying the desorption gas to the heat exchanger 115 or to the condenser 111. Note that a similar switching operation may be performed by using multiple two-way on-off valves instead of the three-way on-off valve V3.
• a heat exchanger condensate line 118 is connected to the desorption gas outlet chamber 115D of the heat exchanger 115.
• the heat exchanger condensate line 118 is connected to the separator 113.
• the desorption gas is separated into uncondensed desorption gas and condensed condensate, and supplied to the desorption gas outlet chamber 115D.
• the condensate of the desorption gas supplied to the desorption gas outlet chamber 115D is supplied directly to the separator 113 through the heat exchanger condensate line 118.
• a return gas line 114 is connected to the gas phase portion of the condenser 111 and the gas phase portion of the separator 113.
• the return gas line 114 is introduced into the treated gas line 101.
• the gas returned from the return gas line 114 to the treated gas line 101 is preferably introduced so as to flow in a counter flow direction to the flow direction of the treated gas I.
• the treated gas line 101 is provided with a treated gas blower 102.
• the treated gas I delivered by the treated gas blower 102 is sent through the treated gas introduction line 103 to the first treatment tank 104A and the second treatment tank 104B.
• the discharged water vapor from the steam compressor 122 i.e., the desorption water vapor
• the desorption water vapor line 108 is connected to the first treatment tank 104A, and the desorption water vapor line 108 is provided with a first water vapor on-off valve V1.
• the desorption water vapor line 108 is connected to the second treatment tank 104B, and the desorption water vapor line 108 is provided with a second water vapor on-off valve V2.
• the first automatic upper damper 106A, the second automatic upper damper 106B, the first automatic lower damper 107A, the second automatic lower damper 107B, the first water vapor on-off valve V1, the second water vapor on-off valve V2, the heat exchanger 115, the steam compressor 122, the condenser 111, the separator 113, and the treated gas blower 102 are appropriately controlled in operation and opening/closing by a control device (not shown) to realize the gas treatment method described below.
• FIG. 1 A gas treatment method using the organic solvent recovery system 1A having the above configuration will be described.
• a first treatment tank 104A of an organic solvent recovery apparatus 100 performs a desorption process
• a second treatment tank 104B performs an adsorption process.
• the treated gas I containing an organic solvent-containing gas is sent from the treated gas line 101 to the second treatment tank 104B, which is in an adsorption process, by the treated gas blower 102.
• the second automatic lower damper 107B is controlled to open the treated gas inlet line 103 and close the desorption gas line 110.
• the second automatic upper damper 106B is controlled to an open state that allows the gas I to flow through the second adsorbent 105B.
• the organic solvent is adsorbed in the second adsorbent 105B of the second treatment tank 104B, and the treated gas II is discharged outside the system.
• the second water vapor opening/closing valve V2 of the desorption water vapor line 108 is controlled to a closed state.
• the gas I to be treated is not sent to the first treatment tank 104A, and the first automatic lower damper 107A controls the gas to be treated introduction line 103 to be closed and the desorption gas line 110 to be open.
• the first automatic lower damper 107A blocks the flow of gas from the outside to the inside of the first adsorbent 105A.
• the water vapor for desorption is introduced through the water vapor line 108 for desorption so as to be able to flow from the inside to the outside of the first adsorbent 105A.
• the first water vapor on-off valve V1 of the water vapor line 108 for desorption is controlled to be open.
• Steam for desorption is generated by mixing steam VIII and regenerated steam in the steam compressor 122.
• Steam VIII is a part of steam V.
• the steam compressor 122 is driven by steam VIII supplied through steam line 121 for the steam compressor, sucks in regenerated steam in a reduced pressure state through regenerated steam line 119, and discharges desorption steam, which is a mixture of steam VIII and regenerated steam, through steam line 108 for desorption.
• the desorption steam is ejected, and the organic solvent adsorbed to the first adsorbent 105A is desorbed from the first adsorbent 105A.
• FIG. 2 is a time chart showing the time-dependent switching between the adsorption process and the desorption process of the organic solvent recovery device 100 of embodiment 1 shown in Figure 1.
• First Desorption Step of First Treatment Tank 104A In the first desorption step of the first treatment tank 104A (i.e., between t0 and t1 shown in FIG. 2), the desorbed gas is supplied to the condenser 111 through the condenser line 116 by operating the three-way opening/closing valve V3.
• the condensate of the desorbed gas condensed in the condenser 111 is supplied to the separator 113 through the condenser condensate line 112. In the separator 113, it is separated into a layer of recovered solvent 113A and a layer of separated wastewater 113B.
• the desorbed gas is supplied to the tube side of the heat exchanger 115 and exchanges heat with the make-up water VI that is retained on the shell side of the heat exchanger 115. Specifically, the make-up water VI is indirectly heated through the heat transfer surface.
• the desorption gas After the desorption gas has completed heat exchange with makeup water VI in heat exchanger 115, it is separated into uncondensed desorption gas and condensed condensate.
• the uncondensed desorption gas is supplied to condenser 111 through heat exchanger outlet gas line 117. Inside condenser 111, heat exchange occurs between the desorption gas and cooling water, and the desorption gas is cooled and condensed. Meanwhile, the condensate of the desorption gas condensed in heat exchanger 115 is supplied to separator 113 through heat exchanger condensate line 118.
• the condensate of the desorbed gas condensed in the condenser 111 is supplied to the separator 113 through the condenser condensate line 112. In the separator 113, it is separated into a layer of recovered solvent 113A and a layer of separated wastewater 113B.
• the return gas remaining in the condenser 111 and separator 113 is pushed out by the desorbed gas and introduced into the treated gas line 101 through the return gas line 114, where it is mixed with the treated gas I.
• the treated gas I and the return gas introduced from the treated gas line 101 are sent to the second treatment tank 104B.
• the desorption gas is supplied to the tube side of the heat exchanger 115 on the shell side, so that water vapor is generated by the evaporation of makeup water VI.
• water vapor VII which is a part of water vapor V
• water vapor is supplied to the desorption gas inlet chamber 115C through the heat exchanger water vapor supply line 120, and water vapor is generated by the evaporation of makeup water VI by the water vapor VII.
• Regenerated water vapor which is a mixture of water vapor generated by the evaporation of makeup water VI and water vapor VII, is sucked into the steam compressor 122 through the regenerated water vapor line 119.
• the flow rate of the regenerated water vapor sucked into the steam compressor 122 is not insufficient even when the evaporation amount of makeup water VI fluctuates, and the desorption step of the first treatment tank 104A is efficiently performed.
• the heat of the desorption steam supplied to the first treatment tank 104A in the first desorption step is consumed in large amounts to heat the first adsorbent 105A, the first treatment tank 104A body, the first automatic upper damper 106A, the first automatic lower damper 107A, and each piping line, so the temperature of the desorption gas discharged from the first treatment tank 104A is low.
• steam VII is supplied to the desorption gas inlet chamber 115C of the heat exchanger 115 in the first desorption step and controlled so that steam VII is not supplied to the desorption gas inlet chamber of the heat exchanger 115 in the second desorption step, in which the desorption gas discharged from the first treatment tank 104A becomes high temperature (about 70 to 120°C), it is preferable because this ensures a sufficient flow rate of regenerated steam in the early stage of the desorption step and reduces the amount of steam VII used.
• the timing for switching from the first desorption process to the second desorption process may be determined by measuring in advance the time it takes for the temperature of the desorption gas discharged from the treatment tank to reach a high temperature in the first desorption process.
• a temperature sensor may be provided to measure the temperature of the desorption gas discharged from the treatment tank, and the process may be controlled to automatically switch from the first desorption process to the second desorption process when the temperature of the desorption gas detected by the temperature sensor reaches a high temperature.
• the water vapor VII condensed in the heat exchanger becomes water and flows through the tube 115B of the heat exchanger 115. This washes away/dilutes the decomposition products of corrosive organic solvents contained in the condensed water of the desorption gas, thereby reducing the corrosiveness of the condensed water and extending the life of the heat exchanger 115.
• the organic solvent recovery device 100 continuously recovers the recovered solvent 113A through continuous processing in which the adsorption process and the desorption process are alternately performed.
• FIG. 3 is a diagram showing the configuration of an organic solvent recovery system 1B according to the second embodiment.
• the basic configuration of the organic solvent recovery system 1B of the second embodiment is the same as that of the organic solvent recovery system 1A described in the first embodiment above. The difference is that the organic solvent recovery system 1B of the second embodiment is provided with a temperature sensor 115H, which is a temperature measurement unit that measures the temperature of the makeup water VI in the heat exchanger 115, in the makeup water storage unit 115E.
• control unit 115G adjusts the opening of the adjustment valve V4 to supply water vapor VII so that the temperature of the make-up water VI in the make-up water storage unit 115E detected by the temperature sensor 115H is maintained within a predetermined range (approximately 70°C to 97°C).
• the organic solvent recovery system 1B configuration of the second embodiment can achieve the same effects as the organic solvent recovery system 1A of the first embodiment.
• the organic solvent recovery process is described as using a first treatment tank 104A and a second treatment tank 104B as treatment tanks, and alternately performing an adsorption process and a desorption process.
• the organic solvent recovery process is not limited to using these two treatment tanks, and there may be three or more treatment tanks.
• the present invention makes it possible to provide an organic solvent recovery system that is energy-efficient and improves the efficiency of organic solvent recovery while reducing corrosion of the mechanism that generates water vapor, making a significant contribution to the industrial world.
• 1A, 1B organic solvent recovery system 100 organic solvent recovery device, 101 treated gas line, 102 treated gas blower, 103 treated gas introduction line, 104A first treatment tank, 104B second treatment tank, 105A first adsorbent, 105B second adsorbent, 106A first automatic upper damper, 106B second automatic upper damper, 107A first automatic lower damper, 107B second automatic lower damper, 108 desorption water vapor line, 110 desorption gas line, 111 condenser (cooling section), 112 condenser condensate line, 113 separator (condensate reservoir section), 113A recovered solvent, 113B separated wastewater, 114 return gas line, 115 heat exchanger, 115A shell (heat absorbing section, container section), 115B tube (heat generating section, tube section) , 115C Desorption gas inlet chamber, 115D Desorption gas outlet chamber (Desorption gas outlet receiving part), 115E Make-up water storage part, 115F Pressure sensor (Pressure measurement part

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• 2023
  • 2023-09-22 WO PCT/JP2023/034492 patent/WO2024070945A1/ja not_active Ceased
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