WO2024070630A1 - 搬送装置及び保管装置 - Google Patents

搬送装置及び保管装置 Download PDF

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Publication number
WO2024070630A1
WO2024070630A1 PCT/JP2023/033029 JP2023033029W WO2024070630A1 WO 2024070630 A1 WO2024070630 A1 WO 2024070630A1 JP 2023033029 W JP2023033029 W JP 2023033029W WO 2024070630 A1 WO2024070630 A1 WO 2024070630A1
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WO
WIPO (PCT)
Prior art keywords
arm
drive unit
rotation
base
transfer mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/033029
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
宣之 伊藤
一馬 矢河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2024550010A priority Critical patent/JP7831619B2/ja
Priority to CN202380064192.XA priority patent/CN119836392A/zh
Publication of WO2024070630A1 publication Critical patent/WO2024070630A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transport device and a storage device.
  • a storage device that stores items on multiple shelves arranged in the vertical and horizontal directions is known.
  • This storage device is equipped with a transport device for transferring items.
  • This transport device uses, for example, a stacker crane, and is equipped with a traveling cart that travels along the shelves, a mast erected on the traveling cart, and a transfer mechanism that is arranged on the mast and transfers items.
  • the transfer mechanism is disclosed to have a configuration that includes a base that rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, and an item holder rotatably supported on the second arm (see, for example, Patent Document 1).
  • a first drive unit that rotates the first arm and a second drive unit that rotates the second arm are each provided in a state where they protrude downward from the base.
  • the transfer mechanism becomes larger in the vertical direction, making it difficult to place the lowest shelf at a low position, which is a factor in reducing the storage efficiency of items.
  • the second drive unit on the first arm. In this case, if the second drive unit is provided hanging down from the underside of the first arm, it is not preferable because the second drive unit interferes with the base when the first arm rotates and restricts the rotation range of the first arm. Also, even if the second drive unit is provided protruding from the upper surface of the first arm, it is not preferable because the second drive unit interferes with the second arm.
  • the present invention aims to provide a transport device and storage device that can thin the transfer mechanism in the vertical direction.
  • the transport device comprises a traveling carriage, a mast erected on the traveling carriage, and a transfer mechanism arranged on the mast for transferring an item, the transfer mechanism having a base which rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, an item holder which holds an item and is supported on the second arm, a first drive unit which rotates the first arm, and a second drive unit which rotates the second arm, the center of rotation of the second arm being arranged on one end side as viewed from the center of rotation of the first arm on the upper surface of the first arm, and the second drive unit being provided on the other end side of the first arm as viewed from the center of rotation of the first arm, at a position outside the rotation orbit of the second arm.
  • a storage device includes a shelf for storing items and a transport device according to the above aspect for transferring items between the shelf.
  • the second drive unit is provided on the other end side of the first arm as viewed from the center of rotation of the first arm, and is positioned outside the rotation orbit of the second arm, so that interference with the second drive unit can be avoided when the second arm rotates.
  • the second drive unit is provided on the first arm, the base does not need to be made larger than when the second drive unit is provided on the base.
  • the upper surface of the second drive unit may be higher than the lower surface of the second arm. According to this configuration, the height positions of the second drive unit and the second arm at least partially overlap, so that the transfer mechanism can be made thinner. Furthermore, in the transport device according to the above aspect, the item holding unit has a mounting surface on which an item is placed, and the upper surface of the second drive unit may be lower than the mounting surface of the item holding unit. According to this configuration, it is possible to prevent the item held on the mounting surface from interfering with the second drive unit. Furthermore, in the transport device according to the above aspect, the second drive unit may be stored inside a cover provided on the first arm, and the upper surface of the cover may be lower than the mounting surface. According to this configuration, it is possible to prevent interference between the cover storing the second drive unit and the item held on the mounting surface.
  • the transport device may further include a second reducer located near the second drive unit, which reduces the rotation transmitted from the second drive unit to the second arm. This configuration makes it possible to prevent the second reducer from interfering with the rotation of the second arm.
  • the transport device may further include a first drive unit below the first arm, and a first reducer located below the first arm, which reduces the rotation transmitted from the first drive unit to the first arm. This configuration makes it possible to prevent the first drive unit and the first reducer from interfering with the first arm when the first arm rotates.
  • the first drive unit and the first reducer may be provided at a position on the base spaced apart from the mast. This configuration makes it possible to reduce the thermal impact on the mast, since the first drive unit and the first reducer, which are heat sources, are spaced apart from the mast.
  • the base may have a rib along the vertical direction between the first drive unit and the mast.
  • the transfer mechanism may be capable of transferring items to both the left and right sides of the traveling direction of the traveling cart. With this configuration, the range over which items can be transferred can be expanded compared to a configuration in which transfer is only possible to one side, either left or right.
  • the item holding unit may be rotated relative to the second arm in synchronization with the rotation of the second arm. With this configuration, the item holding unit can be oriented in an appropriate direction when the second arm is rotated.
  • FIG. 2 is a front view illustrating an example of a transport device and a storage device according to an embodiment.
  • FIG. 2 is a side view illustrating an example of a transport device and a storage device according to an embodiment.
  • FIG. 4 is a front view showing an example of a transfer mechanism.
  • 11 is a plan view showing a state in which an article is placed above a base in the transfer mechanism.
  • FIG. 11 is a plan view showing a state in which an article is handed over in the transfer mechanism.
  • FIG. 5A and 5B are front and plan views showing the relationship between a base and a first arm in a transfer mechanism.
  • 4 is a plan view showing the relationship between a first arm and a second arm in the transfer mechanism.
  • FIG. 13 is a front view showing a state in which an article is held by an article holding section in the transfer mechanism.
  • FIG. 13 is a diagram illustrating a schematic diagram of a transmission path of a driving force to a first arm, a second arm, and an article holding portion.
  • FIG. 10 is an enlarged view of a portion of FIG. 9 .
  • 13 is a plan view showing another example in which an article is placed above a base in the transfer mechanism.
  • FIG. 13 is a plan view showing another example of the transfer mechanism for transferring an article.
  • FIG. 1 is a front view showing an example of a conveying device 1 and a storage device 2 according to an embodiment.
  • FIG. 2 is a side view showing an example of a conveying device 1 and a storage device 2 according to this embodiment.
  • the running direction of the conveying device 1 is the X direction
  • the conveying device 1 and the storage device 2 are viewed from the Y direction perpendicular to the X direction, respectively.
  • the conveying device 1 and the storage device 2 are viewed from the Y direction, respectively.
  • the storage device 2 includes a conveying device 1 that conveys items OB, and a plurality of shelves 3 on which the items OB are placed and stored.
  • the object OB is a storage container such as a FOUP that contains glass substrates, semiconductor wafers, etc.
  • the weight of the object OB may be 25 kg or more depending on the size of the glass substrates contained and the number of substrates contained.
  • the object OB may be another storage container other than a FOUP, such as a reticle case. This embodiment is also applicable even when the object OB is a heavy object weighing tens of kg.
  • the conveying device 1 conveys an item OB and transfers the item OB between any of the multiple shelves 3.
  • the conveying device 1 includes a transfer mechanism 4, a traveling cart 5, and a mast 6.
  • the transfer mechanism 4 will be described in detail later.
  • the traveling cart 5 includes a base frame 7 and drive wheels 8.
  • the base frame 7 includes a traveling drive unit (not shown), such as an electric motor, for driving the drive wheels 8 to rotate.
  • the drive wheels 8 are rotatably provided on the base frame 7 and are driven to rotate by a traveling drive unit (not shown).
  • the drive wheels 8 roll on rails 9 installed on the floor F. In this embodiment, there is one drive wheel 8, but multiple drive wheels 8 may be provided, or a driven wheel may be provided in addition to the drive wheels 8.
  • the rails 9 are laid on the floor F along the X direction.
  • the traveling cart 5 travels in the X direction by driving the drive wheels 8 to rotate by a traveling drive unit (not shown). That is, the conveying device 1 travels along the rails 9 in the +X direction or the -X direction.
  • the traveling carriage 5 may also be provided with a pair of rollers 8a on the underside of the base frame 7 that grip the sides of the rails 9. By providing a pair of rollers 8a, it is possible to prevent the drive wheels 8 from falling off the rails 9.
  • the mast 6 is erected on the traveling cart 5.
  • the mast 6 is provided so as to extend upward (in the +Z direction) from the upper surface of the base frame 7.
  • the mast 6 is set, for example, at a height that allows the transfer mechanism 4 to transfer the item OB to the top shelf 3.
  • An upper frame 10 is provided at the upper end of the mast 6.
  • the upper frame 10 has a pair of rollers 11 on the upper surface side.
  • the pair of rollers 11 are arranged so as to sandwich the sides of the ceiling rail 12 installed on the ceiling C.
  • the ceiling rail 12 is provided on the ceiling C along the X direction.
  • rollers 11 are rotated and driven in synchronization with the drive wheels 8 by a drive device (not shown), and move the upper frame 10, which is the upper end of the mast 6, in the traveling direction of the traveling cart 5.
  • the drive of the drive wheels 8 and the drive of the rollers 11 are controlled by a control device (not shown).
  • the rollers 11 are not limited to being drive rollers driven by a drive device, and may be driven rollers.
  • the shelves 3 are arranged in a line in the X direction and the vertical direction (Z direction) along the rails 9.
  • the shelves 3 store items OB.
  • Each shelf 3 is formed so that the item OB can be placed on it, and a space capable of accommodating the item OB is formed on the upper surface of each shelf 3.
  • Each shelf 3 has a cutout portion 3a and a pin 3b.
  • the cutout portion 3a is provided with a size that allows the item holding portion 23 of the transfer mechanism 4 described later to pass through in the vertical direction.
  • the pins 3b are provided, for example, in three pieces on the upper surface of the shelf 3, and position the item OB placed on the shelf 3 by entering a groove portion provided on the bottom surface of the item OB.
  • a positioning guide that guides the side of the item OB may be provided.
  • the shelf board 3 may be separated into left and right, and one pin 3b may be provided on each of the left and right shelf boards 3, and the item OB may be positioned by the two pins 3b.
  • a cutout 3a is formed between the left and right shelf boards 3, and the item holder 23 can pass through this cutout 3a in the vertical direction.
  • Each shelf 3 may be equipped with a gas supply device that supplies an inert gas into the placed item OB.
  • FIG. 2 a form in which multiple shelves 3 are provided on both sides of the conveying device 1 in the Y direction is shown, but this is not limited to this form.
  • a form in which multiple shelves 3 are arranged only on the +Y side or only on the -Y side of the conveying device 1 may also be used.
  • the transport device 1 of this embodiment shows a form in which the transfer mechanism 4 is provided on the -X side of one mast 6. In other words, the transfer mechanism 4 is supported by one mast 6.
  • the transport device 1 is not limited to the above form.
  • the transfer mechanism 4 may be provided between two masts 6 spaced apart in the X direction, and the transfer mechanism 4 may be supported by the two masts 6.
  • the overall length of the transport device 1 in the X direction can be shortened.
  • Figure 3 is a front view showing an example of the transfer mechanism 4.
  • Figure 3 shows a front view of the transfer mechanism 4 as seen from a direction (Y direction) perpendicular to the running direction (X direction) of the conveying device 1.
  • the transfer mechanism 4 has a base 20, a first arm 21, a second arm 22, an item holding unit 23, a first drive unit 31, and a second drive unit 32.
  • the base 20 is formed in an L shape having a horizontal portion 20a and a vertical portion 20b extending upward from one end of the horizontal portion 20a.
  • a guided portion 20c having a concave cross section and extending in the vertical direction is provided on the +X surface of the vertical portion 20b.
  • the guided portion 20c is provided on the -X surface of the mast 6 and fits into a linear guide 26 having a convex cross section and extending in the vertical direction.
  • the vertical portion 20b is guided in the vertical direction along the linear guide 26.
  • the transport device 1 is equipped with a lifting device (not shown) that raises and lowers the base 20. By driving this lifting device, the base 20 (transfer mechanism 4) is raised and lowered along the mast 6.
  • the lifting device has, for example, a drive unit such as an electric motor, a sprocket that is rotated by the drive unit, and a chain that is attached to the outer circumference of the sprocket.
  • the chain is stretched from the upper end to the lower end of the mast 6, and moves (or rotates) as the sprocket rotates.
  • the base 20 is connected to the chain, and rises or falls along the linear guide 26 as the chain moves.
  • the lifting device is not limited to the above configuration, and an endless belt may be used instead of the chain.
  • the lifting device is not limited to raising and lowering the base 20 by a chain or belt, and may use, for example, a rack gear installed along the mast 6 and a pinion gear installed on the base 20, and the pinion gear may be rotated to raise and lower the base 20.
  • the lifting and lowering operation and height position of the base 20 are controlled by a control device (not shown).
  • the first arm 21 is rotatably supported on the upper surface 20d side of the base 20.
  • the first arm 21 is a rod-shaped body extending in a straight line.
  • a first rotating shaft 27 extending downward is provided in the middle part (e.g., the center part) of the longitudinal direction of the first arm 21.
  • the first arm 21 is connected to the base 20 via the first rotating shaft 27.
  • the first arm 21 is rotatable around the first rotating shaft 27 relative to the base 20.
  • the vertical direction passing through the center of the first rotating shaft 27 is the rotation center P1 of the first arm 21.
  • the first arm 21 has a first end 21a and a second end 21b. In the first arm 21, one end seen from the rotation center P1 is the first end 21a, and the other end seen from the rotation center P1 is the second end 21b.
  • the second arm 22 is rotatably supported on the upper surface 21c side of the first arm 21.
  • the second arm 22 is supported at the first end 21a of the first arm 21.
  • the second arm 22 is a rod-shaped body extending in a straight line.
  • the longitudinal dimension of the second arm 22 is shorter than that of the first arm 21.
  • One longitudinal end of the second arm 22 is the base end 22a, and the other longitudinal end is the tip end 22b.
  • a second rotating shaft 28 extending downward is provided at the base end 22a of the second arm 22.
  • the second arm 22 is connected to the first arm 21 via the second rotating shaft 28.
  • the second arm 22 is rotatable around the second rotating shaft 28 relative to the first arm 21.
  • the vertical direction passing through the center of the second rotating shaft 28 is the rotation center P2 of the second arm 22.
  • the rotation center P2 of the second arm 22 is located on the upper surface 21c of the first arm 21, on the first end 21a side as viewed from the rotation center P1 of the first arm 21
  • the first arm 21 and the second arm 22 are capable of positioning the tip 22b of the second arm 22 anywhere within a predetermined range by adjusting their respective rotation angles. This predetermined range is determined by the lengths of the first arm 21 and the second arm 22 and the rotation angles of both.
  • the first arm 21 and the second arm 22 can control the direction of movement of the tip 22b of the second arm 22 by synchronously driving the respective drive units described below.
  • the item holding part 23 is rotatably supported on the upper surface 22c side of the second arm 22. It is supported on the tip portion 22b of the second arm 22.
  • the item holding part 23 is a plate-shaped body on which the item OB can be placed.
  • the item holding part 23 has a mounting surface 23a on the upper surface side.
  • the item holding part 23 supports the lower surface of the item OB on the mounting surface 23a.
  • the mounting surface 23a of the item holding part 23 is provided with, for example, three pins 23b.
  • the pins 23b can be inserted into grooves provided on the bottom surface of the item OB to position the item OB.
  • the item holding part 23 is provided with a third rotation shaft 29 extending downward.
  • the item holding part 23 is connected to the second arm 22 via the third rotation shaft 29.
  • the item holding part 23 is rotatable around the third rotation shaft 29 relative to the second arm 22.
  • the vertical direction passing through the center of the third rotation shaft 29 is the rotation center P3 of the item holding part 23.
  • the rotation center P3 of the item holding part 23 is located on the top surface 22c of the second arm 22, on the tip end 22b side of the second arm 22.
  • the transfer mechanism 4 includes a first drive unit 31 and a second drive unit 32.
  • a first drive unit 31 For example, an electric motor or the like is used for the first drive unit 31 and the second drive unit 32.
  • the first drive unit 31 rotates the first arm 21.
  • the first drive unit 31 is disposed on the horizontal portion 20a of the base 20 below the first arm 21.
  • the first drive unit 31 is disposed on the tip side of the horizontal portion 20a of the base 20 as viewed from the rotation center P1 of the first arm 21, that is, on the opposite side to the vertical portion 20b.
  • the first drive unit 31 may be configured to include a first reducer 33, which will be described later.
  • the second drive unit 32 drives the second arm 22 to rotate.
  • the second drive unit 32 is provided on the first arm 21.
  • the second drive unit 32 is provided on the second end 21b side of the first arm 21 when viewed from the rotation center P1.
  • the second drive unit 32 is arranged with a part of it protruding upward from the upper surface 21c of the first arm 21.
  • the second arm 22 is provided with a cover 25 for covering the protruding part of the second drive unit 32. Therefore, the cover 25 is provided in a state where it protrudes upward from the upper surface 21c of the first arm 21. It is optional whether or not to provide the cover 25. Therefore, the second arm 22 may be in a form without the cover 25. It is also possible for the second drive unit 32 to be configured to include a second reducer 34 described later.
  • Figure 4 is a plan view showing the state in which the item OB is placed above the base 20 in the transfer mechanism 4.
  • the item holding part 23 can be positioned above the base 20 by setting the first arm 21 and the second arm 22 to a predetermined angular position (standby position or item holding position). At this time, the item holding part 23 is separated from the shelf 3.
  • the transport device 1 can move in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
  • FIG. 5 is a plan view showing the state in which the transfer mechanism 4 transfers the article OB.
  • the first drive unit 31 and the second drive unit 32 are driven to set the first arm 21 and the second arm 22 to a predetermined angular position (transfer position), so that the article holding unit 23 can be inserted above or below the shelf 3.
  • the shelf 3 is provided with a cutout portion 3a through which the article holding unit 23 can pass in the vertical direction.
  • the article holding unit 23 is placed at a position higher than the shelf 3, and in this state, the article holding unit 23 (transfer mechanism 4) is lowered, so that the article OB is transferred from the article holding unit 23 to the shelf 3.
  • the article holding unit 23 is returned to the position shown in FIG. 4 (standby position), completing the operation of transferring the article OB to the shelf 3.
  • the item holding unit 23 When receiving an item OB from the shelf 3, the item holding unit 23 is positioned at a lower position than the shelf 3 on which the item OB is placed, and the item holding unit 23 (transfer mechanism 4) is raised in this state, whereby the item OB is transferred from the shelf 3 to the item holding unit 23. After the item OB is placed on the item holding unit 23, the item holding unit 23 is returned to the position shown in Figure 4 (item holding position), completing the operation of receiving the item OB by the transfer mechanism 4.
  • Figure 6 shows the relationship between the base 20 and the first arm 21 in the transfer mechanism 4, (A) being a front view and (B) being a plan view. In Figure 6, some components are omitted for ease of explanation.
  • the second drive unit 32 is stored inside the cover 25 of the first arm 21.
  • the cover 25 is disposed on the upper surface 21c of the first arm 21 and protrudes upward from the first arm 21.
  • the second drive unit 32 is disposed so as not to protrude downward from the first arm 21, and the cover 25 or the like is not provided on the underside of the first arm 21. In other words, there is no part that protrudes from the underside of the first arm 21.
  • the second drive unit 32 does not interfere with the base 20.
  • the rotation range of the first arm 21 is not restricted, and the first arm 21 can be rotated to any angle position.
  • FIG. 7 is a plan view showing the relationship between the first arm 21 and the second arm 22 in the transfer mechanism 4.
  • the rotation center P2 of the second arm 22 is disposed on the first end 21a side of the first arm 21 as viewed from the rotation center P1 of the first arm 21.
  • the second drive unit 32 is disposed on the first arm 21 as viewed from the second end 21b side of the first arm 21 as viewed from the rotation center P1 of the first arm 21.
  • the second arm 22 is provided such that the length from the base end 22a to the tip end 22b does not reach the cover 25 (the second drive unit 32 when the cover 25 is not present).
  • the cover 25 is provided with a distance L1 between the tip end 22b of the second arm 22.
  • the second arm 22 does not interfere with the second drive unit 32.
  • the rotation range of the second arm 22 is not restricted, and the second arm 22 can be rotated to any angle position.
  • the distance L1 can be set arbitrarily as long as the tip 22b of the second arm 22 does not reach the cover 25 (or the second drive unit 32 if there is no cover 25).
  • Figure 8 is a front view showing the state in which the item holding section 23 holds an item OB in the transfer mechanism 4.
  • the upper surface 25a of the cover 25 (or the upper surface 32c of the second drive section 32 when the cover 25 is not present) is set at a position higher than the lower surface 22d of the second arm 22.
  • the height positions of the cover 25 (second drive section 32) and the second arm 22 are formed so as to at least partially overlap. This makes it possible to make the transfer mechanism 4 thinner.
  • the upper surface 25a of the cover 25 is disposed at a lower position than the placement surface 23a of the item holding unit 23. Specifically, the upper surface 25a of the cover 25 is disposed at a distance L2 below the placement surface 23a of the item holding unit 23. Therefore, even when the first arm 21 and the second arm 22 are rotated with the item OB placed on the item holding unit 23, the item OB is prevented from interfering with the cover 25. Therefore, the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23.
  • the upper surface 32c of the second driving unit 32 is disposed at a lower position than the placement surface 23a by a distance L2 or more. Therefore, as described above, the item OB is prevented from interfering with the second driving unit 32, and the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23.
  • Figure 9 is a schematic diagram showing the path of transmission of driving force for the first arm 21, the second arm 22, and the item holding part 23.
  • Figure 10 is an enlarged view of a portion of Figure 9. To facilitate explanation, some components have been omitted from Figures 9 and 10.
  • the first drive unit 31 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor. An electric motor that generates the torque required to rotate the first arm 21 is used.
  • the first drive unit 31 drives the first arm 21 to rotate via the first reduction gear 33, causing the first arm 21 to rotate relative to the base 20.
  • the rotation of the first drive unit 31 is controlled by a control device (not shown). This control device servo-controls the electric motor using the detection results of the encoder. Note that the control device may be the same as the control device that controls the traveling drive unit of the traveling cart 5, or may be a different control device.
  • the output of the first drive unit 31 is transmitted to the first rotating shaft 27.
  • the output shaft 31a of the first drive unit 31 is arranged to protrude downward from the first drive unit 31.
  • a pulley 31b is provided on the output shaft 31a.
  • a pulley 27a is provided on the first rotating shaft 27.
  • the first rotating shaft 27 is rotatably supported on the first arm 21.
  • An endless transmission belt 35 is stretched between the pulleys 31b and 27a, and the rotation of the pulley 31b is transmitted to the pulley 27a via the transmission belt 35.
  • the first reducer 33 is provided on the first rotating shaft 27.
  • the first reducer 33 reduces the speed of the rotation of the pulley 27a and transmits it to the rotation of the first arm 21.
  • the first drive unit 31 and the first reducer 33 are disposed below the first arm 21. This configuration makes it possible to prevent both the first drive unit 31 and the first reducer 33 from interfering with the first arm 21 when the first arm 21 rotates. Furthermore, the first drive unit 31 and the first reducer 33 are provided at a position on the base 20 away from the mast 6. With this configuration, the first drive unit 31 and the first reducer 33, which are heat sources, are separated from the mast 6, so that the thermal effects on the linear guide 26 of the mast 6, the guided portion 20c of the base 20, etc. can be reduced.
  • the speed is reduced by the first reducer 33 to rotate the output shaft 31a.
  • the pulley 31b rotates together with the output shaft 31a, moving the transmission belt 35 (circular movement).
  • This movement of the transmission belt 35 rotates the pulley 27a, which in turn rotates the first rotating shaft 27 integrated with the pulley 27a.
  • the first arm 21 integrated with the first rotating shaft 27 rotates around the axis of the rotation center P1 relative to the base 20.
  • the rotational position of the first arm 21 can be maintained by servo control of the first drive unit 31 (electric motor).
  • the amount of rotation of pulley 27a relative to the amount of rotation of pulley 31b is set by the ratio of the diameters of pulley 31b and pulley 27a. Therefore, by making the diameter of pulley 27a larger than the diameter of pulley 31b, the rotation of pulley 31b can be decelerated and transmitted to the rotation of pulley 27a. Therefore, as shown in FIG. 9, instead of providing the first reducer 33 in the first drive unit 31, it is possible to make the pulley 31b and pulley 27a function as a reducer by appropriately setting the diameters of the pulleys 31b and 27a. Note that sprockets may be used instead of pulley 31b and pulley 27a, and an endless chain may be used instead of the transmission belt 35.
  • the second drive unit 32 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor.
  • An electric motor that generates the torque required to rotate the second arm 22 is used.
  • the electric motor of the first drive unit 31 and the electric motor of the second drive unit 32 may be the same or different.
  • the second drive unit 32 drives and rotates the second arm 22 via the second reducer 34, causing the second arm 22 to rotate relative to the first arm 21.
  • the rotation of the second drive unit 32 is controlled by the control device (not shown) described above. As with the above, the control device servo-controls the electric motor using the detection results of the encoder.
  • the output of the second drive unit 32 is output to the output shaft 32a after being reduced in speed via the second reducer 34.
  • the second reducer 34 reduces the speed of the rotation transmitted from the second drive unit 32 to the output shaft 32a.
  • the second reducer 34 is disposed in the vicinity of the second drive unit 32. With this configuration, it is possible to prevent the second reducer 34 from interfering with the second arm 22, allowing the second arm 22 to rotate without hindrance.
  • the output shaft 32a is provided so as to protrude downward from the second reducer 34.
  • a pulley 32b is provided on the output shaft 32a.
  • a pulley 28a is provided on the second rotating shaft 28.
  • the second rotating shaft 28 is rotatably supported on the first arm 21.
  • An endless transmission belt 36 is stretched between the pulleys 32b and 28a, and the rotation of the pulley 32b is transmitted to the pulley 28a via the transmission belt 35.
  • the second reducer 34 reduces the speed and rotates the output shaft 32a.
  • the pulley 32b rotates together with the output shaft 32a, moving (circulating) the transmission belt 36.
  • This movement of the transmission belt 36 rotates the pulley 28a, which in turn rotates the second rotating shaft 28 integral with the pulley 28a.
  • the second arm 22 integral with the second rotating shaft 28 rotates around the axis of the rotation center P2 relative to the first arm 21.
  • the rotation position of the second arm 22 can be maintained by servo control of the second drive unit 32 (electric motor).
  • the drive timing of the second drive unit 32 may be simultaneous with the drive timing of the first drive unit 31, or may be different.
  • the amount of rotation of pulley 28a relative to the amount of rotation of pulley 32b is set by the ratio of the diameters of pulley 32b and pulley 28a. Therefore, by making the diameter of pulley 28a larger than the diameter of pulley 32b, the rotation of pulley 32b can be reduced and transmitted to the rotation of pulley 28a. Therefore, as shown in FIG. 9, instead of providing a second reducer 34 in the second drive unit 32, it is possible to make the pulley 32b and pulley 28a function as a reducer by appropriately setting the diameters of the pulleys 32b and 28a. Note that sprockets may be used instead of pulley 32b and pulley 28a, and an endless chain may be used instead of the transmission belt 36.
  • the second rotating shaft 28 is formed in a cylindrical shape.
  • a support shaft 37 is provided inside the second rotating shaft 28 in a state where it is inserted through the second rotating shaft 28.
  • the support shaft 37 is fixed to the first arm 21 so as not to rotate around the axis of the rotation center P2. In other words, even if the second rotating shaft 28 rotates relative to the first arm 21, the support shaft 37 is configured not to rotate relative to the first arm 21.
  • a pulley 37a is provided at the upper end of the support shaft 37.
  • the pulley 37a is disposed within the second arm 22.
  • a pulley 29a is provided on a third rotating shaft 29 that is integral with the item holding section 23.
  • the third rotating shaft 29 is rotatably supported by the second arm 22.
  • An endless transmission belt 38 is stretched between the pulleys 37a and 29a, and the rotation of the pulley 37a is transmitted to the pulley 29a via the transmission belt 38.
  • the second drive unit 32 When the second drive unit 32 is driven to rotate the second arm 22, as described above, the second arm 22 and the second rotating shaft 28 rotate around the axis of the rotation center P2 relative to the first arm 21.
  • the support shaft 37 since the support shaft 37 is fixed to the first arm 21, the support shaft 37 and the pulley 37a rotate relative to the second arm 22. That is, when the second arm 22 rotates, the second rotating shaft 28 and the support shaft 37 rotate relatively.
  • the rotation of the pulley 37a moves (circulates) the transmission belt 38, rotating the pulley 29a and the third rotating shaft 29.
  • the item holding unit 23 integrated with the third rotating shaft 29 rotates around the axis of the rotation center P3 relative to the second arm 22. That is, the item holding unit 23 rotates relative to the second arm 22 in synchronization with the rotation of the second arm 22.
  • the rotational position of the article holding unit 23 is maintained by maintaining the rotational position of the second arm 22 relative to the first arm 21.
  • the orientation of the article holding unit 23 is set so that when the first arm 21 and the second arm 22 are rotated to a state where the article OB can be transferred to the shelf 3, the tip of the article holding unit 23 fits within the cutout portion 3a of the shelf 3 in a plan view (see FIG. 5).
  • the orientation of the article holding unit 23 is set by the rotation ratio of the pulley 37a and the pulley 29a.
  • the desired rotation ratio of the pulley 37a and the pulley 29a can be achieved by appropriately setting the diameter of the pulley 37a and the diameter of the pulley 29a. Note that a configuration in which sprockets are used instead of the pulleys 37a and 29a, and an endless chain is used instead of the transmission belt 38 may also be used.
  • the above-mentioned configuration is applied to rotate the item holding part 23 relative to the second arm 22, but this configuration is not limited to this.
  • a drive unit such as an electric motor may be used to rotate the item holding part 23.
  • the drive unit (electric motor, etc.) is arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and a configuration may be applied in which the support shaft 37 is rotated around the axis of the rotation center P2 by a transmission belt, thereby rotating the item holding part 23 relative to the second arm 22.
  • FIG. 11 is a plan view showing another example in which the item OB is arranged above the base 20 in the transfer mechanism 4.
  • the first arm 21 and the second arm 22 can be respectively placed at a predetermined angular position (standby position or item holding position) to position the item holding section 23 above the base 20.
  • the first arm 21 is rotated 180 degrees from the position shown in FIG. 4.
  • the item holding section 23 is facing in the -Y direction.
  • the item OB is placed on the placement surface 23a and positioned above the base 20.
  • the transport device 1 can be moved in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
  • FIG. 12 is a plan view showing another example of transferring an item OB in the transfer mechanism 4.
  • the item holding unit 23 can be moved in the -Y direction and inserted above or below the shelf 3.
  • the operation of transferring an item OB to the shelf 3 is the same as that described above with reference to FIGS. 4 and 5.
  • the transfer mechanism 4 of this embodiment can transfer an item OB to the shelves 3 on the +Y side and -Y side, respectively.
  • Figure 13 is a view of the base 20 as seen from the back side.
  • the first drive unit 31 is provided at the tip side of the horizontal portion 20a (the opposite side to the vertical portion 20b).
  • no drive unit or the like is provided on the opposite side of the horizontal portion 20a to the first drive unit 31 across the first rotation shaft 27.
  • This portion can be used as a space to reduce the weight of the base 20, but if the object OB becomes heavy, the rigidity of the base 20 (especially the horizontal portion 20a) may be insufficient.
  • the horizontal part 20a of the base 20 is provided with a rib 41 along the vertical direction between the first drive unit 31 and the mast 6.
  • a plurality of ribs 41 are provided in the horizontal part 20a in the space between the first rotation shaft 27 and the vertical part 20b.
  • the load of the object OB acts on the first rotation shaft 27. Therefore, the rib 41 is provided so as to extend in the X direction, the Y direction, a direction obtained by combining the X direction and the Y direction, and a curved direction surrounding the first rotation shaft 27, taking into consideration the case where a large load acts on the first rotation shaft 27.
  • the rigidity of the base 20 can be increased while reducing the weight of the base 20.
  • the shape of the rib 41 shown in FIG. 13 is one example, and the shape of the rib 41 is arbitrary as long as it is possible to increase the rigidity of the base 20.
  • the second drive unit 32 is provided on the first arm 21 at a position on the second end 21b side as viewed from the rotation center P1 of the first arm 21 and away from the rotation path R2 of the second arm 22, so that interference with the second drive unit 32 when the second arm 22 rotates can be avoided. Therefore, there is no need to increase the vertical distance between the first arm 21 and the second arm 22, and a transfer mechanism 4 that is thin in the vertical direction can be realized. Also, because the second drive unit 32 is provided on the first arm 21, it is possible to avoid an increase in the size of the base 20.
  • the first drive unit 31 is arranged on the base 20, but the present invention is not limited to this.
  • the first drive unit 31 may be provided on the first arm 21.
  • the first drive unit 31 may be arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and may be housed together with the second drive unit 32 within the cover 25.
  • the storage device 2 is described as having one transport device 1, but this is not limited to this.
  • the storage device 2 may have two or more transport devices 1.
  • the storage device 2 is described as having the transport device 1 and the shelf 3 of the storage device 2 installed on the floor F, but this is not limited to this.
  • One or both of the transport device 1 and the shelf 3 may be suspended from the ceiling C.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
PCT/JP2023/033029 2022-09-27 2023-09-11 搬送装置及び保管装置 Ceased WO2024070630A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024550010A JP7831619B2 (ja) 2022-09-27 2023-09-11 搬送装置及び保管装置
CN202380064192.XA CN119836392A (zh) 2022-09-27 2023-09-11 输送装置以及保管装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022153344 2022-09-27
JP2022-153344 2022-09-27

Publications (1)

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WO2024070630A1 true WO2024070630A1 (ja) 2024-04-04

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JP (1) JP7831619B2 (https=)
CN (1) CN119836392A (https=)
TW (1) TW202421548A (https=)
WO (1) WO2024070630A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット
JP2004071925A (ja) * 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP2016055988A (ja) * 2014-09-10 2016-04-21 村田機械株式会社 移載装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット
JP2004071925A (ja) * 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP2016055988A (ja) * 2014-09-10 2016-04-21 村田機械株式会社 移載装置

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JPWO2024070630A1 (https=) 2024-04-04
CN119836392A (zh) 2025-04-15
JP7831619B2 (ja) 2026-03-17
TW202421548A (zh) 2024-06-01

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