WO2024034291A1 - 冷却器及び半導体装置 - Google Patents

冷却器及び半導体装置 Download PDF

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Publication number
WO2024034291A1
WO2024034291A1 PCT/JP2023/024795 JP2023024795W WO2024034291A1 WO 2024034291 A1 WO2024034291 A1 WO 2024034291A1 JP 2023024795 W JP2023024795 W JP 2023024795W WO 2024034291 A1 WO2024034291 A1 WO 2024034291A1
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WO
WIPO (PCT)
Prior art keywords
region
flow rate
flow path
cooler
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/024795
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English (en)
French (fr)
Japanese (ja)
Inventor
大貴 佐野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to DE112023000409.9T priority Critical patent/DE112023000409T5/de
Priority to JP2024540309A priority patent/JPWO2024034291A1/ja
Priority to CN202380018604.6A priority patent/CN118541794A/zh
Publication of WO2024034291A1 publication Critical patent/WO2024034291A1/ja
Priority to US18/783,704 priority patent/US20240379499A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/40—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/022—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being wires or pins
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/042—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element
    • F28F3/044—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element the deformations being pontual, e.g. dimples
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
    • F28D2021/0029—Heat sinks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

Definitions

  • the present invention relates to a cooler and a semiconductor device.
  • a cooler integrated into the power converter housing in which a refrigerant passage and a recess whose opening is sealed by a heating element are connected at a connecting part, and the opening area and A cooler is known in which the shape changes depending on the distance from the entrance of the refrigerant passage (Patent Document 1).
  • a plurality of plate-like fins forming a cooling water flow path between each of the plate-like fins is provided at the lower part of the upper plate on which the semiconductor chip is disposed, and a plurality of plate-like fins each protruding into the flow path are provided on the plurality of plate-like fins.
  • a cooler is known in which connecting bars having comb teeth are connected, and a plurality of openings are defined by the plurality of comb teeth and a plurality of plate-like fins with sizes based on the position of a semiconductor chip, etc. (Patent Document 2).
  • the cooling part includes a fin part including a plurality of protrusions connected to the lower surface of the heat conductive base plate, and a cooling component that is connected to the inlet and outlet of the refrigerant and covers the fin part.
  • a semiconductor device is known in which a header serving as a water reservoir and a water flow control plate are provided so that a refrigerant can flow between the header and the water flow control plate (Patent Document 3).
  • a cooling plate is provided with a plurality of semiconductor modules having different amounts of heat generated on one side, a cooling plate with a plurality of radiating fins placed upright on the other side, and a casing portion placed opposite to the cooling plate.
  • a semiconductor cooler has been developed in which the height of the refrigerant flow path formed between the gap between the radiation fins, the cooling plate, and the wall of the casing is varied depending on the area facing semiconductor modules with different amounts of heat generation. (Patent Document 4).
  • the inside of the cooling container which has a heat sink having radiation fins as one side wall, is divided into two areas by a first partition wall, and one area has a heat radiation area where the radiation fins are exposed, and the other area has a heat radiation area where the radiation fins are exposed.
  • An inlet header area and an outlet header area are formed that are separated by two partition walls, an inflow side communication path and an outflow side communication path are provided in the first partition wall, and the heat radiation area and the inlet header area are communicated with each other by the inflow side communication path.
  • a liquid-cooled cooler is known in which a cooling liquid path is formed by communicating a heat radiation area and an outlet header area through an outflow side communication path (Patent Document 5).
  • a plurality of cooling fins and a jacket surrounding them are arranged on the lower surface of the base plate on which semiconductor elements are mounted, and the lower side of the plurality of cooling fins in the jacket is connected to the cooling medium inlet of the jacket.
  • a semiconductor device that is provided with a partition that allows the refrigerant to flow through a plurality of cooling fins and flows out to the refrigerant outlet of the jacket, and has an inflow opening that allows the refrigerant to flow from the refrigerant inlet to the plurality of cooling fins at a position corresponding to the semiconductor element of the partition.
  • a device is known (Patent Document 6).
  • a plurality of upstream communicating passages are provided in the connection area between the main passage for guiding the cooling medium and the introduction passage on the upstream side of the cooling jacket, and a plurality of upstream communication passages are provided in the connection area between the main passage and the discharge passage on the downstream side thereof.
  • An electric device is known in which a downstream communication path is provided and an electric element is provided on the ceiling wall of the main flow path of the cooling jacket (Patent Document 7).
  • a tray-shaped cooling jacket is provided with a refrigerant introduction channel and a refrigerant discharge channel extending parallel to each other, and a cooling channel between them;
  • a heat sink is arranged such that a flow velocity regulating plate fixed to one side and perpendicular to the refrigerant discharge flow path extends to a boundary position with the refrigerant discharge flow path, and a semiconductor element is bonded to the outer surface of the heat sink to close the opening of the cooling jacket.
  • a semiconductor module cooler including a heat sink is known (Patent Document 8).
  • a first flow path extending from the refrigerant inlet, a second flow path arranged in parallel with and spaced apart from the first flow path and extending toward the refrigerant outlet, and a first flow path and a second flow path extending toward the refrigerant outlet.
  • a water jacket having a third flow path that communicates with the second flow path, and a heat sink disposed in the third flow path, and a heat sink disposed in the second flow path of the water jacket and spaced apart from the side surface of the heat sink.
  • a semiconductor module cooler is known in which a flow rate adjusting plate is provided in parallel (Patent Document 9).
  • a technique using a liquid cooling type cooler is known as one technique for cooling a semiconductor module that generates heat during operation.
  • a predetermined refrigerant such as water is circulated inside a cooler container (also called a water jacket), and heat exchange occurs between the refrigerant and a semiconductor module mounted on the outer surface of the cooler.
  • the semiconductor module is cooled.
  • the refrigerant may flow unevenly within the cooler depending on the internal structure of the container, such as the arrangement and shape of the refrigerant introduction and discharge channels and the flow channels that communicate them. Unbalanced flow distribution may occur.
  • the uneven flow distribution that occurs in the cooler may cause uneven cooling efficiency for different parts of the semiconductor module, and there is a risk that the semiconductor module may deteriorate in performance or break down due to overheating that accompanies a decrease in cooling efficiency.
  • the present invention aims to realize a cooler that can suppress the occurrence of uneven flow distribution and increase in pressure loss. Further, in one aspect, the present invention aims to realize a semiconductor device equipped with a cooler that can suppress the occurrence of uneven flow distribution and increase in pressure loss.
  • a container has a first side wall and a second side wall facing each other, and is provided with a refrigerant inlet and an outlet, and the inlet is arranged in the container in parallel with the first side wall, and the inlet a second flow path disposed within the container parallel to the second side wall and communicating with the outlet; a second flow path disposed within the container and communicating with the first flow path and the a third flow path communicating with the second flow path; a first flow rate adjusting section disposed between the first flow path and the third flow path in the container; a second flow rate adjusting section disposed between the second flow path and the third flow path, the first flow rate adjusting section having a first region having a first aperture ratio; a second region having a second aperture ratio smaller than the aperture ratio; the second flow rate adjusting section includes a third region having a third aperture ratio and a fourth aperture ratio larger than the third aperture ratio A fourth region having a fourth region is provided.
  • the cooler includes a semiconductor module mounted on the cooler, and the cooler has a first side wall and a second side wall facing each other, and has a refrigerant inlet and a refrigerant outlet.
  • a first channel disposed in the container parallel to the first side wall and communicating with the inlet; a first channel disposed in the container parallel to the second side wall; a second flow path communicating with the discharge port; a third flow path disposed within the container and communicating with the first flow path and the second flow path; and the first flow path within the container.
  • a first flow rate adjusting section disposed between the third flow path; and a second flow rate adjusting section disposed between the second flow path and the third flow path in the container.
  • the first flow rate adjusting section includes a first region having a first aperture ratio and a second region having a second aperture ratio smaller than the first aperture ratio
  • the second flow rate adjusting section includes: , a third region having a third aperture ratio, and a fourth region having a fourth aperture ratio larger than the third aperture ratio, the semiconductor module facing the third flow path of the cooler.
  • a semiconductor device is provided that is mounted at a location.
  • FIG. 1 is a diagram illustrating an example of a semiconductor device and a cooling system according to a first embodiment
  • FIG. 1 is a diagram illustrating an example of a semiconductor device according to a first embodiment
  • FIG. It is a figure explaining the example of composition of the cooling fin provided in the heat sink of the cooler concerning a 1st embodiment. It is a figure explaining the example of composition of the container of the cooler concerning a 1st embodiment. It is a figure explaining the example of composition of the 1st flow rate adjustment part and the 2nd flow rate adjustment part of the cooler concerning a 1st embodiment.
  • FIG. 2 is a diagram (part 1) illustrating a configuration example of the cooler according to the first embodiment.
  • FIG. 1 is a diagram illustrating an example of a semiconductor device and a cooling system according to a first embodiment
  • FIG. 1 is a diagram illustrating an example of a semiconductor device according to a first embodiment
  • FIG. It is a figure explaining the example of composition of the cooling fin provided in the heat sink of the cooler concerning
  • FIG. 2 is a diagram (part 2) illustrating a configuration example of the cooler according to the first embodiment.
  • FIG. 3 is a diagram (Part 3) illustrating a configuration example of the cooler according to the first embodiment.
  • FIG. 2 is a diagram (part 1) illustrating a configuration example of a cooler according to a comparative example.
  • FIG. 2 is a diagram (part 2) illustrating a configuration example of a cooler according to a comparative example.
  • FIG. 3 is a diagram (Part 3) illustrating a configuration example of a cooler according to a comparative example.
  • FIG. 3 is a diagram showing an example of evaluation results of coolant flow velocity with respect to semiconductor element positions. It is a figure which shows an example of the evaluation result of the pressure loss in each type of cooler.
  • FIG. 3 is a diagram showing an example of evaluation results of coolant flow velocity with respect to semiconductor element positions. It is a figure which shows an example of the evaluation result of the pressure loss in each type of cooler.
  • FIG. 3 is a diagram illustrating an example of evaluation results of semiconductor element temperature with respect to semiconductor element position. It is a figure explaining the 1st modification of the cooling fin provided in the heat sink of a cooler. It is a figure explaining the 2nd modification of the cooling fin provided in the heat sink of a cooler. It is a figure explaining the 3rd modification of the cooling fin provided in the heat sink of a cooler. It is a figure explaining the 1st modification of the container of the cooler concerning a 2nd embodiment. It is a figure explaining the 2nd modification of the container of the cooler concerning 2nd Embodiment. It is a figure explaining the 3rd modification of the container of the cooler concerning 2nd Embodiment.
  • FIG. 1 is a diagram illustrating an example of a semiconductor device and a cooling system according to the first embodiment.
  • FIG. 1 schematically shows a perspective view of a main part of an example of a semiconductor device according to a first embodiment together with some of the elements of a cooling system.
  • FIG. 2 is a diagram illustrating an example of the semiconductor device according to the first embodiment.
  • FIG. 2 schematically shows a cross-sectional view of a main part of an example of the semiconductor device according to the first embodiment.
  • FIG. 2 is a sectional view taken along line II-II in FIG.
  • the semiconductor device 1 shown in FIGS. 1 and 2 includes a cooler 10 and a semiconductor module 20 mounted on the cooler 10.
  • the semiconductor module 20 includes a circuit element section 21, a circuit element section 22, and a circuit element section 23 mounted in three different mounting areas AR1, AR2, and AR3 of the cooler 10, respectively.
  • Each of the circuit element section 21, the circuit element section 22, and the circuit element section 23 includes an insulated circuit board 24, a semiconductor element 25 (also referred to as "CP1"), and a semiconductor element 26 (also referred to as "CP2”) mounted on the insulated circuit board 24. ”).
  • the insulated circuit board 24 includes an insulating substrate 24a, and a conductor layer 24b and a conductor layer 24c provided on both sides thereof.
  • a substrate made of alumina, composite ceramics containing alumina as a main component, aluminum nitride, silicon nitride, or the like is used as the insulating substrate 24a.
  • a metal material such as copper or aluminum is used for the conductor layer 24b and the conductor layer 24c.
  • a DCB (Direct Copper Bonding) board is used as the insulated circuit board 24.
  • Other substrates such as an AMB (Active Metal Brazed) substrate may be used as the insulated circuit board 24.
  • a power semiconductor element is used for the semiconductor element 25 and the semiconductor element 26.
  • a switching element such as an IGBT (Insulated Gate Bipolar Transistor) or a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) is used for the semiconductor element 25 and the semiconductor element 26, respectively.
  • a diode element such as an FWD (Free Wheeling Diode) or an SBD (Schottky Barrier Diode) may be connected or integrated with each of the switch elements used in the semiconductor element 25 and the semiconductor element 26 .
  • a reverse conducting insulated gate bipolar transistor RC-IGBT is used for the semiconductor element 25 and the semiconductor element 26.
  • the semiconductor element 25 and the semiconductor element 26 are mounted on the conductor layer 24b side provided on one surface of the insulated circuit board 24, and are bonded via a bonding layer 27 such as solder or the like. It is electrically connected to the conductor layer 24b via a wire (not shown).
  • the conductor layer 24b of the insulated circuit board 24 has a predetermined pattern shape so that a predetermined circuit function is realized together with the semiconductor element 25, semiconductor element 26, etc. to be mounted. It is provided on the insulating substrate 24a.
  • the semiconductor element 25 and the semiconductor element 26 are connected in series on the conductor layer 24b side of the insulated circuit board 24, and are mounted on the conductor layer 24b side of the insulated circuit board 24 so as to function as an inverter circuit.
  • the semiconductor element 25 is mounted to constitute an upper arm of the inverter circuit
  • the semiconductor element 26 is mounted to constitute a lower arm of the inverter circuit.
  • a connection node between semiconductor element 25 and semiconductor element 26 connected in series is used for output.
  • the three circuit element sections 21, 22, and 23 each having such a configuration are connected in parallel on the conductor layer 24b side of the insulated circuit board 24.
  • the outputs of the circuit element section 21, the circuit element section 22, and the circuit element section 23 correspond to U-phase, V-phase, and W-phase outputs, and are connected to a three-phase AC motor.
  • direct current is converted to alternating current, and a three-phase alternating current motor is driven. .
  • the circuit element part 21, the circuit element part 22, and the circuit element part 23 of the semiconductor module 20 are connected to the conductor layer 24c of each insulated circuit board 24, which is opposite to the conductor layer 24b side on which the semiconductor element 25 and the semiconductor element 26 are mounted.
  • the sides are thermally connected to the cooler 10 via the bonding layer 28 .
  • the cooler 10 on which the semiconductor module 20 is mounted includes a heat sink 13 (also referred to as a "fin base”) provided with cooling fins 13a (also referred to as a "fin base”), and a container 14 (also referred to as a "water jacket”).
  • the circuit element section 21 , circuit element section 22 , and circuit element section 23 of the semiconductor module 20 are thermally connected to the heat sink 13 of the cooler 10 via the bonding layer 28 .
  • the heat sink 13 provided with the cooling fins 13a has a function as a heat sink.
  • the container 14 is connected to the heat sink 13, for example, fastened by bolts (not shown), so as to cover the cooling fins 13a provided on the heat sink 13.
  • the container 14 is connected to the heat sink 13 so that the cooling fins 13a of the heat sink 13 are accommodated therein.
  • the container 14 has a function as a fin cover.
  • the refrigerant 30 is circulated.
  • An inlet 11 and an outlet 12 for a refrigerant 30 are arranged in the cooler 10 .
  • the refrigerant 30 introduced from the inlet 11 flows through a refrigerant flow path (third flow path 14g) that is an internal space between the heat sink 13 and the container 14 in the cooler 10 and is defined by the cooling fins 13a. is distributed and discharged from the discharge port 12.
  • the inlet 11 is connected to the pump 40 through piping, and the outlet 12 is connected to the heat exchanger 50 through piping.
  • the refrigerant 30 is introduced into the container 14 from the inlet 11 by the pump 40, flows through the container 14, and is discharged from the outlet 12.
  • Heat generated in the circuit element section 21, circuit element section 22, and circuit element section 23 of the semiconductor module 20 is transferred to the heat sink 13 of the cooler 10 and its cooling fins 13a, and the heat is transferred to the inside of the container 14 that covers the cooling fins 13a. Heat is exchanged with the circulating refrigerant 30. Thereby, the circuit element section 21, the circuit element section 22, and the circuit element section 23 are cooled.
  • the refrigerant 30 whose temperature has increased as the circuit element section 21 , circuit element section 22 , and circuit element section 23 are cooled is discharged from the discharge port 12 .
  • the refrigerant 30 discharged from the discharge port 12 is sent to the heat exchanger 50 and cooled.
  • the refrigerant 30 cooled by the heat exchanger 50 is sent to the inlet 11 again by the pump 40 connected to the heat exchanger 50 through piping, and is introduced into the container 14 from the inlet 11.
  • a refrigerant flow path is configured in which a refrigerant 30 flows in a closed loop including the cooler 10, the pump 40, and the heat exchanger 50. Ru.
  • the refrigerant 30 is forced to circulate within such a closed loop by the pump 40.
  • the semiconductor module 20 of the semiconductor device 1 is cooled by the forcedly circulated coolant 30 .
  • the arrangement of the inlet 11 and the outlet 12 of the cooler 10 is determined not only by the routing of the piping that connects them to the pump 40 and the heat exchanger 50, but also by the clearance with the semiconductor device 1 and surrounding parts of the cooling system including the same. etc., and therefore various arrangements may be made.
  • the arrangement of the inlet 11 and the outlet 12 shown in FIG. 1 is one example of various such arrangements.
  • FIG. 3 is a diagram illustrating an example of the configuration of cooling fins provided on the heat sink of the cooler according to the first embodiment.
  • FIG. 3(A) schematically shows a main part perspective view of an example of cooling fins provided on the heat sink of the cooler according to the first embodiment
  • FIG. 3(B) shows a cooling fin according to the first embodiment.
  • FIG. 2 schematically shows a plan view of essential parts of an example of cooling fins provided on a heat sink of the device.
  • FIG. 3(B) is an enlarged plan view of the Z0 section in FIG. 3(A).
  • the cooling fins 13a are provided on the heat dissipation plate 13 of the cooler 10 as pin fins in which a plurality of pin-shaped objects are arranged in a lattice pattern, for example, as shown in FIGS. 3(A) and 3(B).
  • the cooling fins 13a are, for example, prismatic or substantially prismatic with chamfered corners.
  • the cooling fins 13a have, for example, a rectangular or substantially rectangular planar shape (or cross-sectional shape) with a side length in the range of 1 mm to 3 mm, and a height from the installation surface 13b of the heat sink 13 in the range of 2 mm to 10 mm.
  • the plurality of cooling fins 13a are arranged in a grid pattern such that the length of one side is 3 mm and the interval between adjacent cooling fins 13a is 1.5 mm. Ru.
  • cooling fins 13a as shown in FIGS. 3(A) and 3(B) are provided on the heat sink 13 of the cooler 10 as shown in FIGS. 1 and 2 above. Note that the shape and dimensions of the cooling fins 13a shown in FIGS. 3(A) and 3(B) are merely examples, and the optimal shape and dimensions are selected depending on the required cooling performance.
  • the cooling fins 13a are integrated with the heat sink 13. Metal materials such as aluminum, aluminum alloy, copper, and copper alloy are used for the heat sink 13 and the cooling fins 13a.
  • the cooling fins 13a are manufactured integrally with the heat sink 13 by die casting, brazing, or various welding techniques. Alternatively, the cooling fins 13a can be formed using a processing technique in which the convex cooling fins 13a are formed from the material of the heat sink 13 by die casting, forging, or pressing, or by cutting or wire cutting to form the convex cooling fins 13a from the material of the heat sink 13. It may be manufactured in a form integrated with the heat sink 13 using a processing technique.
  • FIG. 4 is a diagram illustrating an example of the configuration of the container of the cooler according to the first embodiment.
  • FIG. 4(A) schematically shows a main part perspective view of an example of the container of the cooler according to the first embodiment
  • FIG. 4(B) shows an example of the container of the cooler according to the first embodiment.
  • a cross-sectional view of main parts is schematically shown.
  • FIG. 4(B) is a sectional view taken along the line IV-IV in FIG. 4(A).
  • the container 14 has an external shape of a rectangular parallelepiped or a substantially rectangular parallelepiped, for example, as shown in FIGS. 4(A) and 4(B).
  • the container 14 has a first side wall 14a and a second side wall 14b facing each other, and a third side wall 14c and a fourth side wall 14d facing each other.
  • the first side wall 14a, the second side wall 14b, the third side wall 14c, and the fourth side wall 14d are configured to stand up from the bottom plate 14h toward one surface thereof.
  • the inlet 11 is arranged in one of the first side walls 14a
  • the outlet 12 is arranged in the other second side wall 14b.
  • a first channel 14e is arranged parallel to the first side wall 14a and communicating with the inlet 11.
  • the first channel 14e is a first groove extending along the first side wall 14a at the bottom of the container 14 between the first side wall 14a and the second side wall 14b.
  • a second flow path 14f that is arranged parallel to the second side wall 14b and communicates with the discharge port 12 is arranged.
  • the second flow path 14f is a second groove extending along the second side wall 14b at the bottom between the first side wall 14a and the second side wall 14b of the container 14.
  • the second flow path 14f extends parallel to the first flow path 14e.
  • a third flow path 14g that communicates with the first flow path 14e and the second flow path 14f is further arranged within the container 14.
  • the third flow path 14g is an internal space of the container 14 above the first flow path 14e (first groove) and the second flow path 14f (second groove).
  • the first flow rate adjusting section 15 is disposed at the boundary between the third flow path 14g and the first flow path 14e, and the third flow path 14g and the second flow path 14f are connected to each other.
  • a second flow rate adjustment section 16 is arranged at the boundary between the two.
  • the cooling fins 13a of the heat sink 13 connected to cover the container 14 are housed in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f. ( Figures 1 and 2).
  • the length w of the internal space surrounded by the first side wall 14a, the second side wall 14b, the third side wall 14c, and the fourth side wall 14d of the container 14 (also referred to as the length w of the first flow path 14e and the second flow path 14f) ) and the width h0, the width h and height t1 of the first flow path 14e and the second flow path 14f, and the height t2 of the third flow path 14g, depending on the dimensions of the semiconductor module 20, the dimensions of the semiconductor device 1, and the necessary It is set appropriately based on cooling performance, etc.
  • a metal material such as aluminum, aluminum alloy, copper, copper alloy, etc. is used for the container 14.
  • the container 14 is formed with a first flow path 14e, a second flow path 14f, and a third flow path 14g, for example, by die casting.
  • the inlet 11 and outlet 12 of the container 14 are formed, for example, by cutting.
  • the container 14 is not limited to metal materials, and other materials may be used as long as they have sufficient corrosion resistance and heat resistance for the refrigerant 30 flowing inside the container 14.
  • the container 14 may be made of a material containing carbon filler.
  • a ceramic material, a resin material, or the like may be used depending on the type and temperature of the refrigerant 30 flowing through the container 14.
  • FIG. 5 is a diagram illustrating a configuration example of the first flow rate adjusting section and the second flow rate adjusting section of the cooler according to the first embodiment.
  • FIG. 5 schematically shows a plan view of essential parts of an example of the first flow rate adjusting section and the second flow rate adjusting section of the cooler according to the first embodiment.
  • An adjustment section 16 is arranged.
  • the first flow rate adjustment section 15 is formed of, for example, a plate-shaped member, and is arranged parallel to and apart from the bottom surface of the first flow path 14e (first groove).
  • the first flow rate adjusting section 15 is connected to and fixed to the first side wall 14a, for example, so as to cover the first flow path 14e of the container 14.
  • the first flow rate adjusting section 15 is provided with an opening for circulating the refrigerant 30 from the first flow path 14e to the third flow path 14g.
  • the first flow rate adjusting section 15 includes a first region 15a in which a first slit 15aa having a first width h2 is provided as an opening, and a second region 15b in which a second slit 15ba having a second width h1 and h3 is provided as an opening. including. For example, of a group of regions obtained by dividing the first flow rate adjusting section 15 into three in its longitudinal direction (corresponding to the direction in which the first flow path 14e extends along the first side wall 14a), one of the regions is divided into three regions. The area 15a is defined as the area 15a, and the remaining two outside areas are defined as the second area 15b.
  • the fifth has a configuration in which one first region 15a at the center is sandwiched between two second regions 15b outside the first region 15a.
  • the first region 15a has a first length in the longitudinal direction w2, and the two second regions 15b have second lengths in the longitudinal direction w1 and w3.
  • the total length of the first flow rate adjusting section 15 in the longitudinal direction is the length w of the internal space of the container 14 (the length w of the first flow path 14e) shown in FIG. 4 above.
  • the first length w2 of the first region 15a and the second lengths w1 and w3 of the second region 15b are each set to approximately 1/3 of the length w, which is the entire length of the first flow rate adjustment section 15. be done.
  • the first width h2 of the first slit 15aa in the first region 15a and the second widths h1 and h3 of the second slit 15ba in the second region 15b are set in the range of 1 mm to 3 mm.
  • the first width h2 of the first slit 15aa in the first region 15a and the second widths h1 and h3 of the second slit 15ba in the second region 15b are set to be different widths from each other.
  • the second widths h1 and h3 of the second slit 15ba of the second region 15b are set to be the same width, for example, but may be set to be different widths from each other.
  • the first width h2 of the first slit 15aa in the first region 15a is set to be wider than the second widths h1 and h3 of the second slit 15ba in the second region 15b.
  • the first region 15a of the first flow rate adjusting section 15, where the first slit 15aa is provided, has a first aperture ratio
  • the second region 15b, where the second slit 15ba is provided has the first aperture ratio of the first region 15a.
  • the first aperture ratio of the first region 15a is the ratio of the opening portion per unit area of the first region 15a opened by the first slit 15aa.
  • the second aperture ratio of the second region 15b is the ratio of the opening portion per unit area of the second region 15b opened by the second slit 15ba.
  • the first slit 15aa and the second slit 15ba of the first flow rate adjusting section 15 are located at one end of both ends extending in the longitudinal direction, that is, the first slit 15aa and the second slit 15ba of the first flow rate adjusting section 15 It is arranged so as to be located at the end on the first side wall 14a side when it is arranged to cover the first flow path 14e.
  • the first slit 15aa and the second slit 15ba are formed continuously, they may be divided at the boundary between the first slit 15aa and the second slit 15ba.
  • the second flow rate adjusting section 16 is formed of, for example, a plate-shaped member, and is arranged parallel to and apart from the bottom surface of the second flow path 14f (second groove).
  • the second flow rate adjustment section 16 is connected to and fixed to the second side wall 14b, for example, so as to cover the second flow path 14f of the container 14.
  • the second flow rate adjustment section 16 is provided with an opening for circulating the refrigerant 30 from the third flow path 14g to the second flow path 14f.
  • the second flow rate adjustment unit 16 includes a third region 16a in which a third slit 16aa having a third width h6 is provided as an opening, and a fourth region 16b in which a fourth slit 16ba having a fourth width h5 and h7 is provided as an opening. including. For example, out of a group of regions obtained by dividing the second flow velocity adjusting section 16 into three in its longitudinal direction (corresponding to the direction in which the second flow path 14f extends along the second side wall 14b), the central one is the third region.
  • the area 16a is defined as the area 16a, and the remaining two outside areas are defined as the fourth area 16b.
  • the fifth has a configuration in which one third region 16a at the center is sandwiched between two fourth regions 16b outside the third region 16a.
  • the third region 16a has a third length in the longitudinal direction of w6, and the two fourth regions 16b have fourth lengths in the longitudinal direction of w5 and w7.
  • the total length of the second flow rate adjusting section 16 in the longitudinal direction is the length w of the internal space of the container 14 (the length w of the second flow path 14f) shown in FIG. 4 above.
  • the third length w6 of the third region 16a and the fourth lengths w5 and w7 of the fourth region 16b are each set to approximately 1/3 of the length w, which is the entire length of the second flow rate adjustment section 16. be done.
  • the third width h6 of the third slit 16aa of the third region 16a and the fourth widths h5 and h7 of the fourth slit 16ba of the fourth region 16b are set in the range of 1 mm to 3 mm.
  • the third width h6 of the third slit 16aa in the third region 16a and the fourth widths h5 and h7 of the fourth slit 16ba in the fourth region 16b are set to be different widths from each other.
  • the fourth widths h5 and h7 of the fourth slit 16ba of the fourth region 16b are set to be the same width, for example, but may be set to be different widths from each other.
  • the third width h6 of the third slit 16aa in the third region 16a is set to be narrower than the fourth widths h5 and h7 of the fourth slit 16ba in the fourth region 16b.
  • the third region 16a of the second flow rate adjusting section 16, where the third slit 16aa is provided, has a third aperture ratio
  • the fourth region 16b, where the fourth slit 16ba is provided has the third aperture ratio of the third region 16a.
  • the fourth aperture ratio is larger than the fourth aperture ratio.
  • the third aperture ratio of the third region 16a is the ratio of the opening portion per unit area of the third region 16a opened by the third slit 16aa.
  • the fourth aperture ratio of the fourth region 16b is the ratio of the opening portion per unit area of the fourth region 16b opened by the fourth slit 16ba.
  • the third slit 16aa and the fourth slit 16ba of the second flow rate adjustment section 16 are located at one end of both ends extending in the longitudinal direction, that is, the second flow rate adjustment section 16 is connected to the container 14. It is arranged so as to be located at the end on the second side wall 14b side when it is arranged to cover the second flow path 14f.
  • the third slit 16aa and the fourth slit 16ba are formed continuously, they may be divided at the boundary between the third slit 16aa and the fourth slit 16ba.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 are provided with a first region 15a and a third region 16a of each other, that is, a relatively wide first slit 15aa, so that a relatively large aperture ratio is achieved.
  • the first region 15a and the third region 16a which is provided with a relatively narrow third slit 16aa and has a relatively small opening ratio, are arranged in the container 14 of the cooler 10 so as to face each other.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 are provided with a second region 15b and a fourth region 16b, that is, a relatively narrow second slit 15ba, and have a relatively small aperture ratio.
  • the second region 15b is arranged in the container 14 of the cooler 10 so that the fourth region 16b, which is provided with a relatively wide fourth slit 16ba and has a relatively large aperture ratio, face each other.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 are formed by die casting, pressing, or the like.
  • the first flow rate adjusting section 15 is arranged so as to cover the first flow path 14e of the container 14, such as the side walls of the first flow path 14e (the first side wall 14a, the third side wall 14c, the fourth side wall 14d, and the first flow path 14e). (at least one of the first side wall 14a and the opposing side wall) using brazing or various welding techniques, and is integrated with the container 14.
  • the second flow rate adjustment unit 16 is arranged so as to cover the second flow path 14f of the container 14, such as the side walls of the second flow path 14f (the second side wall 14b, the third side wall 14c, the fourth side wall 14d, and the second flow path 14f). (at least one of the second side wall 14b and the opposing side wall) using brazing or various welding techniques, and is integrated with the container 14.
  • the first flow rate adjusting section 15 and the second flow rate adjusting section 16 each include a plate-like member as well as a cylindrical member formed to match the groove shapes of the first flow path 14e and second flow path 14f of the container 14. members may also be used.
  • a first slit 15aa and a second slit 15ba are formed at predetermined positions on one side of the cylindrical member used for the first flow rate adjustment section 15 by cutting or the like.
  • a third slit 16aa and a fourth slit 16ba are formed in a predetermined position on one side of the cylindrical member used for the second flow rate adjustment section 16 by cutting or the like.
  • FIGS. 6 to 8 are diagrams illustrating configuration examples of the cooler according to the first embodiment.
  • FIG. 6 schematically shows a perspective view of essential parts of an example of the cooler according to the first embodiment.
  • FIG. 7 schematically shows a plan view of essential parts of an example of the cooler according to the first embodiment.
  • FIGS. 8(A) and 8(B) schematically show cross-sectional views of essential parts of an example of the cooler according to the first embodiment.
  • 8(A) is a cross-sectional view taken along line VIIIa-VIIIa in FIG. 7
  • FIG. 8(B) is a cross-sectional view taken along line VIIIb-VIIIb in FIG.
  • a first flow rate adjusting section 15 and a second flow rate adjusting section 16 as shown in FIG. 5 above are arranged and connected to the container 14 (water jacket) as shown in FIGS. 4(A) and 4(B) above.
  • a cooler 10 as shown in FIGS. 6, 7, 8(A) and 8(B) is obtained.
  • the cooler 10 shown in FIGS. 6, 7, 8(A), and 8(B) has a heat dissipation plate 13 (fin base) provided with cooling fins 13a as shown in FIGS. 1 and 2 above. ) is omitted.
  • FIGS. 6, 7, 8(A), and 8(B) the flow of the refrigerant 30 is schematically shown by dotted arrows.
  • the first flow rate adjusting section 15 is arranged so as to cover the first flow path 14e extending along the first side wall 14a of the container 14.
  • the first flow rate adjusting section 15 has its openings, that is, the first slit 15aa of the first region 15a and the second slit 15ba of the second region 15b, on the first side wall 14a side of the container 14 in the first flow rate adjusting section 15. It is arranged so that it is located at the end.
  • the first slit 15aa of the first region 15a and the second slit 15ba of the second region 15b of the first flow rate adjusting section 15 are arranged so as to be located at the end of the first flow path 14e on the first side wall 14a side. It can also be said that it is done.
  • the first flow path 14e is divided into three regions in the direction extending along the first side wall 14a, one in the center corresponds to the first region 15a of the first flow rate adjustment section 15, and the remaining The outer two correspond to the second region 15b of the first flow rate adjusting section 15.
  • a first slit 15aa is provided in the first region 15a, and a second slit 15ba narrower than the first slit 15aa is provided in the second region 15b.
  • the first region 15a has a first aperture ratio
  • the second region 15b has a second aperture ratio smaller than the first aperture ratio of the first region 15a.
  • the second flow rate adjustment section 16 is arranged so as to cover the second flow path 14f extending along the second side wall 14b of the container 14.
  • the second flow rate adjustment section 16 has its openings, that is, the third slit 16aa of the third region 16a and the fourth slit 16ba of the fourth region 16b, on the second side wall 14b side of the container 14 in the second flow rate adjustment section 16. It is arranged so that it is located at the end.
  • the third slit 16aa of the third region 16a and the fourth slit 16ba of the fourth region 16b of the second flow rate adjusting section 16 are arranged so as to be located at the end of the second flow path 14f on the second side wall 14b side. It can also be said that it is done.
  • the second flow path 14f is divided into three regions in the direction extending along the second side wall 14b, one in the center corresponds to the third region 16a of the second flow velocity adjustment section 16, and the remaining The outer two correspond to the fourth region 16b of the second flow rate adjustment section 16.
  • a third slit 16aa is provided in the third region 16a, and a fourth slit 16ba wider than the third slit 16aa is provided in the fourth region 16b.
  • the third region 16a has a third aperture ratio
  • the fourth region 16b has a fourth aperture ratio that is larger than the third aperture ratio of the third region 16a.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 include a first region 15a that is provided with a relatively wide first slit 15aa and has a relatively large aperture ratio, and a relatively narrow third slit. It is arranged in the container 14 so that the third region 16a, which is provided with the opening 16aa and has a relatively small aperture ratio, faces the third region 16a.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 include a second region 15b in which a relatively narrow second slit 15ba is provided and a relatively small opening ratio, and a relatively wide fourth slit. 16ba is provided in the container 14 so that the fourth region 16b, which has a relatively large aperture ratio, faces the fourth region 16b.
  • the first flow rate adjusting section 15 is provided with a relatively wide first slit 15aa and has a relatively large aperture ratio.
  • 1 region 15a is provided with a relatively narrow second slit 15ba and has a relatively small opening ratio. be located near the
  • the relatively narrow third slit 16aa of the second flow rate adjusting section 16 is provided to provide a relatively small opening ratio.
  • the third region 16a has a relatively wide fourth slit 16ba and a relatively large opening ratio. be located near the
  • a third flow path 14g is formed in the internal space. That is, the first flow rate adjustment section 15 is arranged at the boundary between the first flow path 14e and the third flow path 14g, and the second flow speed adjustment section 16 is arranged at the boundary between the second flow path 14f and the third flow path 14g. is placed.
  • the first flow path 14e and the third flow path 14g communicate through the first slit 15aa and the second slit 15ba of the first flow rate adjustment section 15, and the second flow path 14f and the third flow path 14g communicate with each other through the They communicate through the third slit 16aa and the fourth slit 16ba of the flow rate adjustment section 16.
  • cooling fins 13a as shown in FIGS. 1, 2, 3(A) and 3(B) are provided to cover the internal space of the container 14.
  • the heat sink 13 on which the semiconductor module 20 is mounted is disposed on the opposite side of the heat sink 13 or the cooling fins 13a.
  • the heat sink 13 and the container 14 are fastened and connected using, for example, bolts.
  • the cooling fins 13a of the heat sink 13 connected to the container 14 are arranged so as to be accommodated in the third flow path 14g of the container 14, as shown in FIG. 2 above.
  • the cooling fins 13a are arranged so that when the heat sink 13 is connected to the container 14, a certain clearance c1 (FIG. 2) is secured between the tips of the cooling fins 13a and the bottom of the third flow path 14g. , provided.
  • the refrigerant 30 flows through the cooler 10 as shown by dotted arrows in FIGS. 6, 7, 8(A), and 8(B).
  • the refrigerant 30 supplied to the cooler 10 by the pump 40 (FIG. 1) is introduced into the cooler 10 from the inlet 11.
  • the refrigerant 30 introduced from the introduction port 11 flows into the first flow path 14e of the container 14 that communicates with the introduction port 11, and flows from the first flow path 14e into the relatively wide first slit 15aa of the first flow rate adjustment section 15. (FIG. 8(A)) and flows into the third flow path 14g through the relatively narrow second slit 15ba (FIG. 8(B)).
  • the refrigerant 30 that has flowed into the third flow path 14g is transferred from the third flow path 14g to the relatively narrow third slit 16aa (FIG. 8(A)) and the relatively wide fourth slit 16ba of the second flow rate adjustment section 16. (FIG. 8(B)) and flows into the second flow path 14f of the container 14 communicating with the discharge port 12.
  • the refrigerant 30 that has flowed into the second flow path 14f is discharged to the outside of the cooler 10 from the discharge port 12.
  • the refrigerant 30 that has flowed into the third flow path 14g from the first flow path 14e fills the refrigerant flow path defined by the cooling fins 13a accommodated in the third flow path 14g, that is, the gap between adjacent cooling fins 13a. flows. While the refrigerant 30 flows through the third flow path 14g, the heat transferred from the semiconductor module 20 to the heat sink 13 and its cooling fins 13a is exchanged with the refrigerant 30 flowing through the third flow path 14g. Module 20 is cooled.
  • the refrigerant 30, whose temperature has increased due to heat exchange with the heat sink 13 and its cooling fins 13a flows into the second flow path 14f and is discharged to the outside of the cooler 10 from the discharge port 12. Then, the refrigerant 30 whose temperature has been lowered by being sent to the heat exchanger 50 (FIG. 1) is introduced into the cooler 10 from the inlet 11 by the pump 40 again.
  • the cooler 10 having the above configuration, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing within the cooler 10 and the increase in pressure loss. Furthermore, it is possible to realize a semiconductor device 1 equipped with a cooler 10 that can suppress the occurrence of such uneven flow distribution and increase in pressure loss. This point will be further explained below.
  • FIGS. 9 to 11 are diagrams illustrating configuration examples of a cooler according to a comparative example.
  • FIG. 9 schematically shows a perspective view of essential parts of an example of a cooler according to a comparative example.
  • FIG. 10 schematically shows a plan view of main parts of a first flow rate adjusting section and a second flow rate adjusting section of a cooler according to a comparative example.
  • FIG. 11 schematically shows a sectional view of a main part of an example of a cooler according to a comparative example.
  • FIG. 11 is a sectional view taken along line XI-XI in FIG. Further, in FIGS. 9 and 11, the flow of the refrigerant 30 is schematically shown by dotted arrows.
  • the cooler 110 shown in FIG. 9 has a configuration in which a first flow rate adjustment section 115 and a second flow rate adjustment section 116 are arranged as shown in FIGS. It is different from the container 10.
  • the container 14 of the cooler 110, the heat sink 13 covering the container 14 and its cooling fins 13a, and the semiconductor module 20 mounted on the heat sink 13, although not shown in the drawings, are as described in the first embodiment. Something like this is used.
  • the first flow rate adjusting section 115 of the cooler 110 of the comparative example has a configuration in which a seventh slit 115aa having a longitudinal length w4 and a constant width h4 is provided as an opening.
  • the second flow rate adjusting section 116 of the cooler 110 of the comparative example has a configuration in which an eighth slit 116aa having a longitudinal length w8 and a constant width h8 is provided as an opening.
  • the first flow rate adjustment section 115 and the second flow rate adjustment section 116 are arranged to cover the first flow path 14e and the second flow path 14f of the container 14, respectively.
  • the seventh slit 115aa of the first flow rate adjustment section 115 is located at the end of the first flow rate adjustment section 115 on the first side wall 14a side, that is, at the end of the first flow path 14e on the first side wall 14a side. , placed.
  • the eighth slit 116aa of the second flow rate adjustment section 116 is located at the end of the second flow rate adjustment section 116 on the second side wall 14b side, that is, at the end of the second flow path 14f on the second side wall 14b side. , placed.
  • cooling fins 13a are provided to cover the internal space of such a container 14 according to the examples shown in FIGS. 1, 2, 3(A), and 3(B).
  • the heat sink 13 on which the semiconductor module 20 is mounted is arranged on the opposite side of the heat sink 13 or the cooling fins 13a.
  • the heat sink 13 and the container 14 are fastened and connected using, for example, bolts.
  • the cooling fins 13a of the heat sink 13 connected to the container 14 are arranged so as to be accommodated in the third flow path 14g of the container 14.
  • the inlet 11 of the cooler 110 is connected to the pump 40 through piping, and the outlet 12 of the cooler 110 is connected to the heat exchanger 50 through piping, as shown in FIG. 1 above. be done.
  • Pump 40 and heat exchanger 50 are connected via piping.
  • a refrigerant 30 is circulated within the cooler 110 as shown by dotted arrows in FIGS. 9 and 11. That is, the refrigerant 30 supplied to the cooler 110 by the pump 40 is introduced into the cooler 110 from the inlet 11.
  • the refrigerant 30 introduced from the introduction port 11 flows into the first flow path 14e of the container 14 communicating with the introduction port 11, and flows from the first flow path 14e through the seventh slit 115aa of a constant width of the first flow rate adjustment section 115.
  • the refrigerant 30 that has flowed into the third flow path 14g flows from the third flow path 14g into the second flow path 14f of the container 14 that communicates with the discharge port 12 through the eighth slit 116aa of a constant width of the second flow rate adjustment section 116. do.
  • the refrigerant 30 that has flowed into the second flow path 14f is discharged to the outside of the cooler 110 from the discharge port 12.
  • the refrigerant 30 that has flowed into the third flow path 14g from the first flow path 14e fills the refrigerant flow path defined by the cooling fins 13a accommodated in the third flow path 14g, that is, the gap between adjacent cooling fins 13a. flows. While the refrigerant 30 flows through the third flow path 14g, the heat transferred from the semiconductor module 20 to the heat sink 13 and its cooling fins 13a is exchanged with the refrigerant 30 flowing through the third flow path 14g. Module 20 is cooled.
  • the refrigerant 30, whose temperature has increased due to heat exchange with the heat sink 13 and its cooling fins 13a flows into the second flow path 14f and is discharged from the outlet 12 to the outside of the cooler 110. Then, the refrigerant 30 whose temperature has been lowered by being sent to the heat exchanger 50 is introduced into the cooler 110 from the inlet 11 by the pump 40 again.
  • the cooler 10 according to the first embodiment is referred to as “Type A”
  • the cooler 110 according to this comparative example is referred to as "Type B”
  • a cooler using a container 14 without the first flow rate adjusting sections 15 and 115 and the second flow rate adjusting sections 16 and 116 as described above is referred to as "type C”.
  • the length w, width h0, width h, height t1, and height t2 of the container 14 of the type A cooler 10, type B cooler 110, and type C cooler are as shown in FIG. 4 above.
  • the dimensions of the length w of the container 14 of the type A cooler 10, the type B cooler 110, and the type C cooler are set to be the same.
  • the dimensions of the width h0 of the container 14 of the type A cooler 10, the type B cooler 110, and the type C cooler are set to be the same.
  • the dimensions of the width h of the container 14 of the type A cooler 10, the type B cooler 110, and the type C cooler are set to be the same.
  • the dimensions of the height t1 of the container 14 of the type A cooler 10, the type B cooler 110, and the type C cooler are set to be the same.
  • the dimensions of the height t2 of the container 14 of the type A cooler 10, the type B cooler 110, and the type C cooler are set to be the same.
  • the first length w2, the second lengths w1 and w3, the first width h2, and the second width h1 and h3 of the first flow rate adjusting part 15 of the type A cooler 10 are as shown in FIG. 5 above.
  • the dimensions are
  • the third length w6, fourth lengths w5 and w7, third width h6, and fourth width h5 and h7 of the second flow rate adjusting section 16 of the type A cooler 10 are as shown in FIG. 5 above.
  • the dimensions are The dimensions of the first length w2, second lengths w1, and w3 of the first flow rate adjusting section 15 are set to the lengths obtained by dividing the length w of the container 14 into approximately three equal parts.
  • the dimension of the first width h2 of the first flow rate adjusting section 15 is set to 2 mm, as an example, and the dimension of the second width h1 and h3 is set to 1 mm, as an example.
  • the dimensions of the third length w6, fourth length w5, and w7 of the second flow rate adjusting section 16 are set to the lengths obtained by dividing the length w of the container 14 into approximately three equal parts.
  • the dimension of the third width h6 of the second flow rate adjustment section 16 is set to 1 mm, as an example, and the dimension of the fourth width h5 and h7 is set to 2 mm, as an example.
  • the length w4 and width h4 of the first flow rate adjusting section 115 of the type B cooler 110 are the dimensions of the portion shown in FIG. 10 above.
  • the length w8 and width h8 of the second flow rate adjusting section 116 of the type B cooler 110 are the dimensions of the portion shown in FIG. 10 above.
  • the length w4 of the first flow rate adjusting section 115 is the same as the total length of the first length w2, second length w1, and second length w3 of the first flow rate adjusting section 15 of the type A cooler 10. The dimensions are set to .
  • the width h4 of the first flow rate adjusting section 115 is set to be the same as the second widths h1 and h3 of the first flow rate adjusting section 15 of the type A cooler 10, for example, 1 mm.
  • the length w8 of the second flow rate adjustment section 116 is the same as the total length of the third length w6, fourth length w5, and fourth length w7 of the second flow rate adjustment section 16 of the type A cooler 10.
  • the dimensions are set to .
  • the width h8 of the second flow rate adjusting section 116 is set to be the same as the third width h6 of the second flow rate adjusting section 16 of the type A cooler 10, for example, 1 mm.
  • FIG. 12 is a diagram showing an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 13 is a diagram showing an example of evaluation results of pressure loss in each type of cooler.
  • FIG. 14 is a diagram showing an example of evaluation results of semiconductor element temperature with respect to semiconductor element position.
  • the flow rate of the refrigerant 30 introduced from the inlet 11 of the container 14 is set to 10 L/min.
  • heat generation is reproduced by giving a certain amount of loss to the semiconductor module 20 as shown in FIG. 1 above. That is, the three mounting areas AR1 (circuit element part 21), mounting area AR2 (circuit element part 22), and mounting area AR3 (circuit element part 23) of the semiconductor module 20 mounted on the heat sink 13 covering the container 14 are Heat generation is reproduced by giving a certain amount of loss to each of the semiconductor element CP1 (semiconductor element 25) and the semiconductor element CP2 (semiconductor element 26).
  • FIG. 12 shows the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in the mounting area AR1, the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in the mounting area AR2, and the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in the mounting area AR3. and the flow velocity of the refrigerant 30 at the position CP2.
  • the semiconductor elements CP1 and CP1 in the central mounting area AR2 are The flow velocity of the coolant 30 at the position of CP2 is around 0.65 m/s, and the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in each of the mounting areas AR1 and AR3 at both ends is from 0.40 m/s to 0. It is about .45 m/s, and a polarized flow distribution occurs.
  • FIG. 12 From FIG. 12, it can be seen that in the type C cooler using the container 14 without the first flow rate adjustment parts 15 and 115 and the second flow rate adjustment parts 16 and 116 as described above, the semiconductor elements CP1 and CP1 in the central mounting area AR2 are The flow velocity of the coolant 30 at the position of CP2 is around 0.65 m/s, and the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in each of the mounting areas AR1 and AR3 at both ends is from 0.40 m/s to 0. It is about .45
  • a type A cooler 10 using a container 14 provided with a first flow rate adjustment section 15 and a second flow rate adjustment section 16 and a type A cooler 10 using a container 14 provided with a first flow rate adjustment section 115 and a second flow rate adjustment section 116 are shown.
  • the flow velocity of the coolant 30 at the positions of the semiconductor elements CP1 and CP2 in each of the mounting area AR1, the mounting area AR2, and the mounting area AR3 is around 0.40 m/s. , it can be seen that a more uniform flow occurs compared to the type C cooler.
  • FIG. 13 shows the pressure loss between the inlet 11 and the outlet 12 of the container 14, that is, the amount of decrease in the pressure of the refrigerant at the outlet 12 with respect to the pressure of the refrigerant 30 at the inlet 11.
  • the pressure loss is about 5.0 kPa.
  • the pressure loss increased by 80% to 9.0 kPa.
  • the pressure loss is about 7.0 kPa, and the pressure loss from the type C The increase in losses has been suppressed to 40%.
  • FIG. 14 shows the temperatures of the semiconductor elements CP1 and CP2 in the mounting area AR1, the temperatures of the semiconductor elements CP1 and CP2 in the mounting area AR2, and the temperatures of the semiconductor elements CP1 and CP2 in the mounting area AR3.
  • a type A cooler 10 using a container 14 provided with a first flow rate adjustment section 15 and a second flow rate adjustment section 16, and a first flow rate adjustment section 115 and a second flow rate adjustment section 116 are shown.
  • the temperature of the semiconductor elements CP1 and CP2 in any of the mounting area AR1, the mounting area AR2, and the mounting area AR3 (FIG. 2) where the flow rate of the refrigerant 30 is relatively uniform is It can be seen that the temperature was around 124°C, and the cooling was more uniform than that of the Type C cooler.
  • the type A cooler 10 suppresses pressure loss more than the type B cooler 110, and has the same or similar uneven flow distribution suppressing effect as the type B cooler 110.
  • a semiconductor element cooling effect can be obtained.
  • the type A cooler 10 that is, the cooler 10 according to the first embodiment, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing within the cooler 10 and the increase in pressure loss. Furthermore, it is possible to realize a semiconductor device 1 equipped with a cooler 10 that can suppress the occurrence of such uneven flow distribution and increase in pressure loss.
  • the semiconductor module 20 described above is widely employed in power conversion devices used in control devices of hybrid vehicles, electric vehicles, and the like.
  • the semiconductor module 20 that constitutes such a control device for energy saving power semiconductor elements that control large current are used as the semiconductor element 25 (CP1) and the semiconductor element 26 (CP2).
  • a typical power semiconductor element is a heat generating element that generates heat when controlling a large current, but as power conversion devices become smaller and have higher output, the amount of heat generated is increasing. Therefore, in the semiconductor module 20 including a plurality of heat generating elements, cooling thereof becomes an important issue.
  • a liquid cooling type cooler has been used to cool the semiconductor module 20.
  • measures have been taken such as increasing the flow rate of refrigerant and changing the shape or material of cooling fins to have a high heat transfer coefficient.
  • the load on the pump for circulating the refrigerant may increase, such as the pressure loss of the refrigerant increasing inside the cooler.
  • it is ideal to increase cooling efficiency with a small flow rate of refrigerant, and it is possible to reduce the flow rate of refrigerant and change the shape and material of the cooling fins to have a high heat transfer coefficient.
  • Adopting such cooling fins may increase the cost of the cooler and the semiconductor device using it. Furthermore, in conventional liquid-cooled coolers, the refrigerant flows unevenly within the cooler due to the shape of the heat sink and refrigerant flow path, the arrangement of heating elements, the shape of the refrigerant inlet and outlet, etc. A flowing drift distribution occurs. Since such uneven flow distribution brings about bias in cooling performance, it has been difficult to obtain uniform and stable cooling performance with conventional coolers. As a result, the temperature of some of the heating elements may rise, leading to a decrease in their performance and lifespan, failure, and the like.
  • the parallel first flow path 14e and second flow path 14f in the container 14 and the third flow path 14g communicating with them are A first flow rate adjustment section 15 and a second flow rate adjustment section 16 are respectively arranged between them.
  • the first flow rate adjusting section 15 has a first region 15a having a first aperture ratio by a relatively wide first slit 15aa, and a second aperture smaller than the first aperture ratio by a relatively narrow second slit 15ba. and a second region 15b which is made into a ratio.
  • the second flow rate adjustment section 16 has a third area 16a having a third aperture ratio by a relatively narrow third slit 16aa, and a fourth aperture larger than the third aperture ratio by a relatively wide fourth slit 16ba. and a fourth region 16b which is made into a ratio.
  • a cooler 10 by forming a plurality of types of gaps with appropriate shapes and dimensions in the first flow rate adjusting section 15 and the second flow rate adjusting section 16, the first flow path 14e and the second flow path
  • the refrigerant 30 can be made to flow smoothly without applying excessive pressure inside 14f. As a result, it is possible to suppress an increase in pressure loss while suppressing the size of the cooler 10 and the semiconductor device 1 including the same while maintaining a more uniform flow velocity distribution of the coolant 30.
  • the structure of the cooler 10 can be prevented from becoming complicated and large, and the connection between the container 14 and the heat dissipation plate 13 can be prevented from being restricted. This makes it possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 and increase in pressure loss. Further, it becomes possible to realize a semiconductor device 1 including such a cooler 10.
  • FIG. 15 is a diagram illustrating a first modification of the cooling fins provided on the heat sink of the cooler.
  • FIG. 15(A) schematically shows a perspective view of a main part of a first modified example of cooling fins provided on a heat sink
  • FIG. 15(B) shows a first modified example of cooling fins provided on a heat sink.
  • a plan view of the main parts is schematically shown.
  • FIG. 15(B) is an enlarged plan view of the Z1 portion of FIG. 15(A).
  • the installation surface 13b of the heat dissipation plate 13 that covers the container 14 of the cooler 10 and is connected to the container 14 is not limited to the prismatic or substantially prismatic cooling fins 13a as described above, but also has the cooling fins 13a shown in FIGS.
  • a cylindrical cooling fin 13a as shown in FIG. 15(B) may be provided.
  • the dimensions of the cylindrical cooling fins 13a are appropriately selected depending on the required cooling performance. For example, a plurality of cylindrical cooling fins 13a as shown in FIGS. 15(A) and 15(B) are arranged on the heat sink 13 in a close-packed manner.
  • the cylindrical cooling fins 13a are integrated with the heat sink 13.
  • a metal material is used for the heat sink 13 and the cylindrical cooling fins 13a.
  • the cylindrical cooling fins 13a are integrated with the heat dissipation plate 13 by, for example, die casting, brazing, or various welding techniques.
  • a cylindrical cooling fin 13a that is integrated with the heat sink 13 may be formed using the heat dissipation plate 13.
  • a heat sink 13 provided with cylindrical cooling fins 13a as shown in FIGS. 15(A) and 15(B) is placed on the container 14 so that the cooling fins 13a are accommodated in the third flow path 14g and is connected and fixed to the container 14.
  • the cylindrical cooling fins 13a also transfer heat generated in the semiconductor module 20 mounted on the heat sink 13 to the cooling fins 13a, and exchange heat with the refrigerant 30 flowing through the third flow path 14g. This allows the semiconductor module 20 to be cooled.
  • FIG. 16 is a diagram illustrating a second modification of the cooling fins provided on the heat sink of the cooler.
  • FIG. 16(A) schematically shows a perspective view of a main part of a second modification of the cooling fin provided on the heat sink
  • FIG. 16(B) shows a second modification of the cooling fin provided on the heat sink.
  • a plan view of the main parts is schematically shown.
  • FIG. 16(B) is an enlarged plan view of the Z2 section in FIG. 16(A).
  • the heat sink 13 that covers the container 14 of the cooler 10 and is connected to the container 14 is provided with corrugated cooling fins 13a, that is, corrugated fins, as shown in FIGS. 16(A) and 16(B). It's okay to be hit.
  • the dimensions of the corrugated fins provided as the cooling fins 13a are appropriately selected depending on the required cooling performance. For example, corrugated fins as shown in FIGS. 16(A) and 16(B) are arranged on the heat sink 13 as the cooling fins 13a.
  • the corrugated fins provided as the cooling fins 13a are integrated with the heat sink 13.
  • a metal material is used for the heat sink 13 and the cooling fins 13a.
  • the corrugated fins provided as the cooling fins 13a are integrated with the heat dissipation plate 13, for example, by die casting, brazing, or various welding techniques.
  • a heat dissipation plate 13 provided with corrugated fins as shown in FIGS. 16(A) and 16(B) as the cooling fins 13a is mounted on the container 14 so that the corrugated fins are accommodated in the third flow path 14g. and is connected and fixed to the container 14.
  • the corrugated fins are arranged so that the refrigerant 30 flowing in the third flow path 14g from the first flow path 14e toward the second flow path 14f is in a direction parallel to the installation surface 13b of the corrugated fins of the heat sink 13.
  • the corrugated fins are accommodated in the third flow path 14g in such a direction that the corrugated fins flow along the direction in which the peaks or valleys of the corrugated fins extend.
  • the heat generated in the semiconductor module 20 mounted on the heat sink 13 is transferred to the corrugated fin, and the coolant flowing through the third flow path 14g is The semiconductor module 20 can be cooled by exchanging heat with the semiconductor module 30.
  • FIG. 17 is a diagram illustrating a third modification of the cooling fins provided on the heat sink of the cooler.
  • FIG. 17(A) schematically shows a perspective view of a main part of a third modified example of cooling fins provided on a heat sink
  • FIG. 17(B) shows a third modified example of cooling fins provided on a heat sink.
  • a plan view of the main parts is schematically shown.
  • FIG. 17(B) is an enlarged plan view of the Z3 section in FIG. 17(A).
  • the heat sink 13 that covers the container 14 of the cooler 10 and is connected to the container 14 has flat cooling fins 13a as shown in FIGS. 17(A) and 17(B), that is, straight fins (or blades). fins) may be provided.
  • the dimensions of the straight fins provided as the cooling fins 13a are appropriately selected depending on the required cooling performance. For example, straight fins as shown in FIGS. 17(A) and 17(B) are arranged on the heat sink 13 as the cooling fins 13a.
  • the straight fins provided as the cooling fins 13a are integrated with the heat sink 13.
  • a metal material is used for the heat sink 13 and the cooling fins 13a.
  • the straight fins provided as the cooling fins 13a are integrated with the heat dissipation plate 13 by, for example, die casting, brazing, or various welding techniques.
  • a straight fin integrated with the heat sink 13 may be formed as the cooling fin 13a.
  • a heat dissipation plate 13 provided with straight fins as shown in FIGS. 17(A) and 17(B) as the cooling fins 13a is placed on the container 14 so that the straight fins are accommodated in the third flow path 14g. , and is connected and fixed to the container 14.
  • the straight fins are arranged so that the refrigerant 30 flowing through the third flow path 14g from the first flow path 14e toward the second flow path 14f is parallel to the straight fin installation surface 13b of the heat sink 13.
  • the straight fins are housed in the third flow path 14g in such a direction that they flow along the direction in which the side walls of the straight fins extend.
  • the heat generated in the semiconductor module 20 mounted on the heat sink 13 is transferred to the straight fins, and the coolant flowing through the third flow path 14g is The semiconductor module 20 can be cooled by exchanging heat with the semiconductor module 30.
  • FIG. 18 is a diagram illustrating a first modification of the container of the cooler according to the second embodiment.
  • FIG. 18 schematically shows a perspective view of essential parts of a first modified example of the container of the cooler.
  • the container 14 shown in FIG. 18 has an inlet 11 in a third side wall 14c connecting a first side wall 14a and a second side wall 14b that communicates with a first channel 14e extending along the first side wall 14a. and a discharge port 12 that communicates with the second flow path 14f extending along the second side wall 14b.
  • the first flow rate adjusting section 15 for example, as shown in FIG. be done.
  • the second flow rate adjusting section 16 as shown in FIG. 5 above is arranged so as to cover the second flow path 14f that communicates with the discharge port 12 provided in the third side wall 14c.
  • the first flow rate adjusting section 15 is arranged between the first flow path 14e and the third flow path 14g, By arranging the second flow rate adjusting section 16 between the third flow path 14g, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing in the cooler 10 and the increase in pressure loss.
  • the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 can also be changed by changing the positions of the inlet 11 and the outlet 12 as shown in FIG. 18.
  • the aperture ratio of the region closest to the inlet 11 among the region group obtained by dividing the first flow path 14e into three in the direction extending along the first side wall 14a is: Adjust the slit width so that it is larger than the aperture ratio of the remaining two regions.
  • the aperture ratio of the region closest to the discharge port 12 among the region groups obtained by dividing the second flow path 14f into three in the direction extending along the second side wall 14b is as follows.
  • the slit width is adjusted so that it is smaller than the aperture ratio of the remaining two regions.
  • the region of the first flow rate adjustment section 15 that is closest to the inlet 11 and has a relatively large aperture ratio, and the region of the second flow rate adjustment section 16 that is closest to the discharge port 12 and has a relatively small aperture ratio. are facing each other.
  • the first flow rate adjusting section 15 and the second flow rate adjusting section 16 whose opening layouts have been changed in this way may be arranged in a container 14 as shown in FIG. 18.
  • FIG. 19 is a diagram illustrating a second modification of the container of the cooler according to the second embodiment.
  • FIG. 19 schematically shows a perspective view of a main part of a second modified example of the container of the cooler.
  • the container 14 shown in FIG. 19 has an inlet 11 in a fourth side wall 14d connecting a first side wall 14a and a second side wall 14b that communicates with a first channel 14e extending along the first side wall 14a. It has a configuration in which Furthermore, the container 14 shown in FIG. 19 has a third side wall 14c connecting the first side wall 14a and the second side wall 14b with an exhaust that communicates with the second flow path 14f extending along the second side wall 14b. It has a configuration in which an outlet 12 is provided.
  • the second flow rate adjusting section 16 as shown in FIG. 5 above is arranged so as to cover the second flow path 14f that communicates with the discharge port 12 provided in the third side wall 14c.
  • the first flow rate adjusting section 15 is arranged between the first flow path 14e and the third flow path 14g, and the By arranging the second flow rate adjusting section 16 between the third flow path 14g, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing in the cooler 10 and the increase in pressure loss.
  • the first flow rate adjusting section 15 and the second flow rate adjusting section 16 may be arranged with the opening layout changed.
  • FIG. 20 is a diagram illustrating a third modification of the container of the cooler according to the second embodiment.
  • FIG. 20 schematically shows a perspective view of a main part of a third modified example of the container of the cooler.
  • the container 14 shown in FIG. 20 has an inlet 11 in its bottom plate 14h that communicates with the first channel 14e extending along the first side wall 14a, and a second inlet 11 extending along the second side wall 14b. It has a configuration in which a discharge port 12 communicating with the flow path 14f is provided.
  • a first flow rate adjusting section 15 for example, as shown in FIG. .
  • a second flow rate adjusting section 16 as shown in FIG. 5 above is arranged so as to cover a second flow path 14f that communicates with the discharge port 12 provided in the bottom plate 14h.
  • the first flow rate adjusting section 15 is arranged between the first flow path 14e and the third flow path 14g, and By arranging the second flow rate adjusting section 16 between the third flow path 14g, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing in the cooler 10 and the increase in pressure loss.
  • the first flow rate adjusting section 15 and the second flow rate adjusting section 16 may be arranged with a changed opening layout.
  • FIG. 21 is a diagram illustrating a fourth modification of the container of the cooler according to the second embodiment.
  • FIG. 21 schematically shows a perspective view of a main part of a fourth modification of the cooler container.
  • the container 14 shown in FIG. 21 has a bottom plate 14h that communicates with the first flow path 14e at the end on the fourth side wall 14d side of the first flow path 14e extending along the first side wall 14a. It has a configuration in which an introduction port 11 is provided.
  • the container 14 shown in FIG. 21 has a bottom plate 14h including a second flow path 14f and a second flow path 14f extending along the second side wall 14b at the end thereof on the third side wall 14c side. It has a configuration in which a communicating discharge port 12 is provided.
  • the second flow rate adjusting section 16 as shown in FIG. 5 above is arranged so as to cover the second flow path 14f that communicates with the discharge port 12 provided in the bottom plate 14h.
  • the first flow rate adjusting section 15 is arranged between the first flow path 14e and the third flow path 14g, and By arranging the second flow rate adjusting section 16 between the third flow path 14g, it is possible to suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing in the cooler 10 and the increase in pressure loss.
  • the first flow rate adjusting section 15 and the second flow rate adjusting section 16 may be arranged with different opening layouts.
  • FIG. 22 is a diagram illustrating a first modification of the first flow rate adjusting section and the second flow rate adjusting section of the cooler according to the third embodiment.
  • FIG. 22 schematically shows a plan view of essential parts of a first modification of the first flow rate adjusting section and the second flow rate adjusting section of the cooler.
  • the first slit 15aa of the central first region 15a is divided into a plurality of regions, for example two, out of a region group divided into three in the longitudinal direction, and Each of the second slits 15ba of the second region 15b is divided into a plurality of parts, for example, into two parts.
  • the third slit 16aa of the central third region 16a is divided into a plurality of regions, for example two, out of a region group divided into three in the longitudinal direction, and two locations on the outside are formed.
  • Each of the fourth slits 16ba of the fourth region 16b is divided into a plurality of parts, for example, into two parts.
  • a first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in FIG. 22 are arranged to cover the first flow path 14e and the second flow path 14f of the container 14, respectively.
  • a first region 15a of the first flow rate adjustment section 15 having a relatively large aperture ratio and a third region 16a of the second flow rate adjustment section 16 having a relatively small aperture ratio are opposed to each other.
  • the second region 15b having a small aperture ratio and the fourth region 16b having a relatively large aperture ratio of the second flow rate adjusting section 16 face each other.
  • the cooler 10 in which the first flow rate adjuster 15 and the second flow rate adjuster 16 are arranged can also suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing through the cooler 10 and the increase in pressure loss.
  • the first slit 15aa of the first region 15a may be divided into three or more, and the second slit 15ba of the second region 15b may be divided into three or more. Good too. If the aperture ratio of the first region 15a is larger than the aperture ratio of the second region 15b, the width of each of the first slits 15aa divided into a plurality of parts may be the same or different from each other. The widths of the divided second slits 15ba may be the same or different.
  • the third slit 16aa of the third region 16a may be divided into three or more, and the fourth slit 16ba of the fourth region 16b may be divided into three or more. Good too. If the aperture ratio of the third region 16a is smaller than the aperture ratio of the fourth region 16b, the width of each of the third slits 16aa divided into a plurality of parts may be the same or different from each other, The widths of the divided fourth slits 16ba may be the same or different.
  • the width of the first slit 15aa of the first flow rate adjustment section 15 and the width of the fourth slit 16ba of the second flow rate adjustment section 16 may be the same or different from each other.
  • the width of the second slits 15ba of No. 15 and the width of the third slits 16aa of the second flow rate adjustment section 16 may be the same or different.
  • FIG. 23 is a diagram illustrating a second modification of the first flow rate adjustment section and the second flow rate adjustment section of the cooler according to the third embodiment.
  • FIG. 23 schematically shows a plan view of a main part of a second modification of the first flow rate adjustment section and the second flow rate adjustment section of the cooler.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 23 are provided with holes instead of slits as openings.
  • a plurality of first holes 15ab having a first diameter d1 are provided in a central first region 15a of a group of regions divided into three in the longitudinal direction, and Each of the two second regions 15b has a configuration in which a plurality of second holes 15bb having a second diameter d2 smaller than the first diameter d1 are provided.
  • a plurality of third holes 16ab having a third diameter d3 are provided in the central third region 16a of a group of regions divided into three in the longitudinal direction, and the outer It has a configuration in which a plurality of fourth holes 16bb having a fourth diameter d4 larger than the third diameter d3 are provided in each of the two fourth regions 16b.
  • a first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in FIG. 23 are arranged to cover the first flow path 14e and the second flow path 14f of the container 14, respectively.
  • a first region 15a of the first flow rate adjustment section 15 having a relatively large aperture ratio and a third region 16a of the second flow rate adjustment section 16 having a relatively small aperture ratio are opposed to each other.
  • the second region 15b having a small aperture ratio and the fourth region 16b having a relatively large aperture ratio of the second flow rate adjusting section 16 face each other.
  • the cooler 10 uses the first flow rate adjusting section 15 and the second flow rate adjusting section 16 as shown in FIG. 23, that is, the first flow path 14e and the second flow path 14f of the container 14 are connected to
  • the cooler 10 in which the first flow rate adjuster 15 and the second flow rate adjuster 16 are arranged can also suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing through the cooler 10 and the increase in pressure loss.
  • the number of first holes 15ab in the first region 15a and the number of holes 15ab in the second region 15b decrease.
  • the number of two holes 15bb is not limited to what is illustrated. If the aperture ratio of the first region 15a is larger than the aperture ratio of the second region 15b, the first diameter d1 of each of the plurality of first holes 15ab may be the same or different, and the first diameter d1 of each of the plurality of first holes 15ab may be the same or different.
  • the second diameter d2 of each of the second holes 15bb may be the same or different.
  • the plurality of first holes 15ab may be arranged not only in one row but also in a plurality of rows, and the plurality of second holes 15bb may be arranged not in one row but in a plurality of rows.
  • the number of third holes 16ab in the third region 16a and the number of third holes 16ab in the fourth region 16b are increased.
  • the number of four holes 16bb is not limited to what is illustrated. If the aperture ratio of the third region 16a is smaller than the aperture ratio of the fourth region 16b, the third diameter d3 of each of the plurality of third holes 16ab may be the same or different, and the third diameter d3 of each of the plurality of third holes 16ab may be the same or different.
  • the fourth diameter d4 of each of the fourth holes 16bb may be the same or different.
  • the plurality of third holes 16ab may be arranged not only in one row but in a plurality of rows, and the plurality of fourth holes 16bb may be arranged in not only one row but in a plurality of rows.
  • first diameter d1 of the first hole 15ab of the first flow rate adjustment section 15 and the fourth diameter d4 of the fourth hole 16bb of the second flow rate adjustment section 16 may be the same or different.
  • the second diameter d2 of the second hole 15bb of the first flow rate adjustment section 15 and the third diameter d3 of the third hole 16ab of the second flow rate adjustment section 16 may be the same or different.
  • FIG. 24 is a diagram illustrating a third modification of the first flow rate adjustment section and the second flow rate adjustment section of the cooler according to the third embodiment.
  • FIG. 24 schematically shows a plan view of the main parts of a third modification of the first flow rate adjustment section and the second flow rate adjustment section of the cooler.
  • the first flow rate adjusting section 15 shown in FIG. 24 has a configuration in which a fifth slit 15ac is provided whose width becomes narrower from the center portion 15c in the longitudinal direction toward both end portions 15d.
  • the first flow rate adjusting section 15 shown in FIG. 24 has a fifth slit 15ac whose width becomes narrower from the central first region 15a toward the two outer second regions 15b in a region group divided into three in the longitudinal direction. It can also be said that it has a configuration in which .
  • the second flow rate adjusting section 16 shown in FIG. 24 has a configuration in which a sixth slit 16ac is provided, the width of which increases from the central portion 16c in the longitudinal direction toward both end portions 16d.
  • a first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in FIG. 24 are arranged to cover the first flow path 14e and the second flow path 14f of the container 14, respectively.
  • a first region 15a of the first flow rate adjustment section 15 having a relatively large aperture ratio and a third region 16a of the second flow rate adjustment section 16 having a relatively small aperture ratio are opposed to each other.
  • the second region 15b with a small aperture ratio and the fourth region 16b of the second flow rate adjustment section 16 with a relatively large aperture ratio face each other.
  • the cooler 10 in which the first flow rate adjuster 15 and the second flow rate adjuster 16 are arranged can also suppress the occurrence of uneven flow distribution of the refrigerant 30 flowing through the cooler 10 and the increase in pressure loss.
  • the fifth slit 15ac of the first flow rate adjusting section 15 may be divided into a plurality of slits at the boundary position between the first region 15a and the second region 15b, and according to the example of FIG. 22 above, Each of the first region 15a and the second region 15b may be divided into a plurality of regions.
  • the sixth slit 16ac of the second flow rate adjustment section 16 may be divided into a plurality of slits at the boundary position between the third region 16a and the fourth region 16b, and according to the example of FIG. 22, Each of the third region 16a and the fourth region 16b may be divided into a plurality of regions.
  • the width of the fifth slit 15ac of the first flow rate adjustment section 15 at the center portion 15c and the width of the sixth slit 16ac of the second flow rate adjustment section 16 at the end portion 16d may be different even if they are the same.
  • the width of the fifth slit 15ac of the first flow rate adjustment section 15 at the end 15d and the width of the sixth slit 16ac of the second flow rate adjustment section 16 at the center section 16c may be the same or different. It's okay.
  • FIG. 25 is a diagram illustrating a first example of the cooler according to the fourth embodiment.
  • FIG. 25A schematically shows a perspective view of a main part of a cooler of the first example and a layout of a semiconductor element mounting area.
  • FIGS. 25(B) to 25(F) each schematically show a plan view of a main part of a flow rate adjusting section applied to the cooler of the first example.
  • a container 14 as shown in FIG. 25(A) is used for the cooler 10.
  • the container 14 shown in FIG. 25(A) corresponds to that shown in FIG. 4 above.
  • an introduction port 11 (IN) communicating with the first flow path 14e is arranged at the center of the first side wall 14a, and communicating with the second flow path 14f at the center of the second side wall 14b.
  • a discharge port 12 (OUT) is arranged.
  • the cooling fins 13a of the heat sink 13 that covers the container 14 are accommodated in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f.
  • the cooling fins 13a are prismatic as shown in FIGS.
  • FIGS. 15(A) and 15(B) A cylindrical shape is used.
  • the semiconductor element CP1 and the semiconductor element CP2 are arranged in each of the three mounting areas AR1, AR2, and AR3.
  • FIG. 25(A) (and FIG. 25(B) to FIG. 25(F) described later), the inlet 11 side of the container 14 is expressed as "IN”, and the outlet 12 side is expressed as "OUT”. There is.
  • the three mounting areas AR1-AR3 and the semiconductor elements CP1 and CP2 provided in each have a positional relationship with respect to the IN and OUT of the container 14 as shown in FIG. 25(A).
  • thermofluid simulation a cooler 10 as shown in FIG. 25(A), a first flow rate adjusting section 115 and a second flow rate adjusting section 116 as shown in FIG. 25(B), and FIGS. 25(C) to 25 A first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in (F) are used.
  • first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 25(B) are expressed as "SL1".
  • SL1 corresponds to the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 10 above.
  • the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 25(B) each have a slit 115e (seventh slit) and a slit 116e (eighth slit) having a constant width extending in the longitudinal direction.
  • the width of the slit 115e and the slit 116e is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 25(C) are expressed as "SL2".
  • SL2 corresponds to the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 5 above.
  • the aperture ratio of the central region (first region) closest to the inlet 11 (IN) among the region group divided into three in the longitudinal direction is The width of the slit 15e is adjusted so that it is larger than the aperture ratio of the region (second region).
  • the width of the slit 15e (first slit) in the center region closest to the introduction port 11 is set to 2 mm, and the width of the slit 15e (second slit) in the regions on both sides is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 25(C) has an aperture ratio of the central region (third region) closest to the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction. , the width of the slit 16e is adjusted so that it is smaller than the aperture ratio of the regions on both sides (fourth region).
  • the width of the slit 16e (third slit) in the center region closest to the discharge port 12 is set to 1 mm, and the width of the slit 16e (fourth slit) in the regions on both sides is set to 2 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 25(D) are expressed as "SL3".
  • SL3 corresponds to the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 22 above.
  • the first flow rate adjusting section 15 shown in FIG. 25(D) has two slits 15e as the slits 15f in each of the region groups obtained by dividing the first flow rate adjusting section 15 into three in the longitudinal direction. It is divided into two parts.
  • the second flow rate adjustment section 16 shown in FIG. 25(D) uses the slit 16e of FIG. 25(C) as the slit 16f in each of the region groups obtained by dividing the second flow rate adjustment section 16 into three in the longitudinal direction. It has two parts.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 25(E) are expressed as "SL4".
  • SL4 corresponds to the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 23 above.
  • the aperture ratio of the central region (first region) closest to the inlet 11 (IN) among the region group divided into three in the longitudinal direction is The diameter of the hole 15g is adjusted so that it is larger than the aperture ratio of the region (second region).
  • the diameter of the hole 15g (first hole) in the center region closest to the introduction port 11 is set to 2 mm, and the diameter of the hole 15g (second hole) in the regions on both sides is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 25(E) has an aperture ratio of the central region (third region) closest to the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction. , the diameter of the hole 16g is adjusted so that it is smaller than the aperture ratio of the regions on both sides (fourth region).
  • the diameter of the hole 16g (third hole) in the central region closest to the discharge port 12 is set to 1 mm, and the diameter of the hole 16g (fourth hole) in both side regions is set to 2 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 25(F) are expressed as "SL5".
  • SL5 corresponds to the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 24 above.
  • the aperture ratio of the central region (first region) closest to the inlet 11 (IN) out of the region group divided into three in the longitudinal direction is The width of the slit 15h (fifth slit) is adjusted so that it is larger than the aperture ratio of the area (second area), that is, the width of the slit 15h (fifth slit) becomes narrower from the center toward both sides.
  • the width at the center of the slit 15h is set to 2 mm, and the width at both ends is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 25(F) has an aperture ratio of the central region (third region) closest to the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction.
  • the width of the slit 16h (sixth slit) is adjusted so that it is smaller than the aperture ratio of the regions on both sides (fourth region), that is, the width of the slit 16h (sixth slit) becomes wider from the center toward both sides.
  • the width at the center of the slit 16h is set to 1 mm, and the width at both ends is set to 2 mm.
  • SL1 to SL5 shown in FIGS. 25(B) to 25(F) are respectively applied to the container 14 of the cooler 10 as shown in FIG. 25(A).
  • a prismatic or cylindrical cooling fin 13a is used as the cooling fin 13a of the heat sink 13
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 and the temperatures of semiconductor elements CP1 and CP2 are determined.
  • prismatic or cylindrical cooling fins 13a are also applied to the case where the flow rate adjustment parts (SL1-SL5) are not applied to the container 14 of the cooler 10 as shown in FIG. 25(A).
  • FIG. 26 is a diagram showing the evaluation results of the first example cooler using prismatic cooling fins by thermal fluid simulation.
  • FIG. 26(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 26(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 26C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting units (first and second flow rate adjusting units) applied to the container of the cooler are "SL1-SL5" (FIGS. 25(B) to 25(F)). )), and "none" indicates the case where the flow velocity adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 90.1% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 26(A)).
  • the pressure loss of the cooler 10 decreases by 24.1% when SL2 is applied, compared to SL1 with a constant slit width (pressure loss indicated by broken line L2 in FIG. 26(A)), and when SL3 is applied, the pressure loss decreases by 24.1%.
  • the refrigerant flow velocity at the positions of semiconductor elements CP1 and CP2 in the central mounting area AR2 is lower than that at the positions of semiconductor elements CP1 and CP2 in the mounting areas AR1 and AR3 at both ends.
  • the refrigerant flow rate becomes faster than that at , and uneven flow distribution occurs.
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 is kept relatively constant, resulting in a more uniform flow, compared to the case without the flow velocity adjustment section. .
  • the temperature of the semiconductor elements CP1 and CP2 in the central mounting area AR2 where the refrigerant flow rate is relatively high is low, and the temperature of the semiconductor elements CP1 and CP2 is low in the mounting area AR1 at both ends where the refrigerant flow rate is relatively slow. And the temperature of semiconductor elements CP1 and CP2 of AR3 becomes high.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 27 is a diagram showing the evaluation results of the first example cooler using cylindrical cooling fins by thermal fluid simulation.
  • FIG. 27(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 27(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 27C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting units (first and second flow rate adjusting units) applied to the container of the cooler are "SL1-SL5" (FIG. 25(B)-FIG. 25(F). )), and "none" indicates the case where the flow rate adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 86.4% when SL1 is applied, compared to the case without the flow rate adjustment part (pressure loss shown by the dotted line L1 in FIG. 27(A)).
  • pressure loss shown by the dotted line L1 in FIG. 27(A)
  • the pressure loss of the cooler 10 is reduced by 23.6% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG. 27(A)), and when SL3 is applied, the pressure loss decreases by 23.6%.
  • the refrigerant flow velocity at the positions of semiconductor elements CP1 and CP2 in the central mounting area AR2 is lower than that at the positions of semiconductor elements CP1 and CP2 in the mounting areas AR1 and AR3 at both ends.
  • the refrigerant flow rate becomes faster than that at , and uneven flow distribution occurs.
  • the coolant flow velocity at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 is kept relatively constant, resulting in a more uniform flow, compared to the case without the flow velocity adjustment section. .
  • the temperature of the semiconductor elements CP1 and CP2 in the central mounting area AR2 where the coolant flow rate is relatively high is low, and the temperature of the semiconductor elements CP1 and CP2 is low in the mounting area AR1 at both ends where the coolant flow rate is relatively slow. And the temperature of semiconductor elements CP1 and CP2 of AR3 becomes high.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjusting section.
  • FIG. 28 is a diagram illustrating a second example of the cooler according to the fourth embodiment.
  • FIG. 28A schematically shows a perspective view of a main part of a cooler of a second example and a layout of a semiconductor element mounting area.
  • FIGS. 28(B) to 28(F) each schematically show a plan view of a main part of a flow rate adjusting section applied to the cooler of the second example.
  • a container 14 as shown in FIG. 28(A) is used for the cooler 10.
  • the container 14 shown in FIG. 28(A) corresponds to that shown in FIG. 18 above.
  • an inlet 11 (IN) communicating with the first flow path 14e and an outlet 12 (OUT) communicating with the second flow path 14f are arranged on the third side wall 14c. be done.
  • the cooling fins 13a of the heat dissipation plate 13 that covers the container 14 are accommodated in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f.
  • the cooling fins 13a are prismatic as shown in FIGS. 3(A) and 3(B), or cylindrical as shown in FIGS.
  • cooling fins 13a are used. Then, in the area corresponding to the third flow path 14g on the heat dissipation plate 13 (the area indicated by the dotted line frame in FIG. 28(A)), as shown in FIG. 28(A), according to the example of FIG. , the semiconductor element CP1 and the semiconductor element CP2 are arranged in each of the three mounting areas AR1, AR2, and AR3.
  • FIG. 28(A) (and FIG. 28(B) to FIG. 28(F) described later), the inlet 11 side of the container 14 is expressed as "IN”, and the outlet 12 side is expressed as "OUT”. There is.
  • the three mounting areas AR1-AR3 and the semiconductor element CP1 and semiconductor element CP2 provided in each have a positional relationship with respect to the IN and OUT of the container 14 as shown in FIG. 28(A).
  • thermofluid simulation the cooler 10 as shown in FIG. 28(A), the first flow rate adjusting section 115 and the second flow rate adjusting section 116 as shown in FIG. 28(B), and FIGS. 28(C) to 28 A first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in (F) are used.
  • first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 28(B) are expressed as "SL1".
  • SL1 corresponds to the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 10 above.
  • the first flow rate adjusting section 115 and the second flow rate adjusting section 116 shown in FIG. 28(B) each have a slit 115e (seventh slit) and a slit 116e (eighth slit) having a constant width extending in the longitudinal direction.
  • the width of the slit 115e and the slit 116e is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 28(C) are expressed as "SL2".
  • SL2 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 5 above.
  • the first flow rate adjusting section 15 shown in FIG. 28(C) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction.
  • the width of the slit 15i is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the width of the slit 15i (first slit) in the end region closest to the introduction port 11 is set to 2 mm, and the width of the slit 15i (second slit) in the remaining region is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 28(C) has an aperture ratio of the end region (third region) closest to the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction.
  • the width of the slit 16i is adjusted so that the aperture ratio is smaller than the aperture ratio of the remaining two regions (fourth region).
  • the width of the slit 16i (third slit) in the end region closest to the discharge port 12 is set to 1 mm, and the width of the slit 16i (fourth slit) in the remaining region is set to 2 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 28(D) are expressed as "SL3".
  • SL3 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 22 above.
  • the first flow rate adjusting section 15 shown in FIG. 28(D) has two slits 15i as the slits 15j in each of the region groups obtained by dividing the first flow rate adjusting section 15 into three in the longitudinal direction. It is divided into two parts.
  • the second flow rate adjusting section 16 shown in FIG. 28(D) uses the slit 16i of FIG. 28(C) as the slit 16j in each of the region groups obtained by dividing the second flow rate adjusting section 16 into three in the longitudinal direction. It has two parts.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 28(E) are expressed as "SL4".
  • SL4 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 23 above.
  • the first flow rate adjusting section 15 shown in FIG. 28(E) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction.
  • the diameter of the hole 15k is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the diameter of the hole 15k (first hole) in the end region closest to the introduction port 11 is set to 2 mm, and the diameter of the hole 15k (second hole) in the remaining region is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 28(E) has an aperture ratio of the end region (third region) closest to the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction.
  • the diameter of the hole 16k is adjusted so that it is smaller than the aperture ratio of the remaining two regions (fourth region).
  • the diameter of the hole 16k (third hole) in the region closest to the discharge port 12 is set to 1 mm, and the diameter of the hole 16k (fourth hole) in the remaining region is set to 2 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 28(F) are expressed as "SL5".
  • SL5 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 24 above.
  • the width of the slit 15m (fifth slit) is adjusted to become narrower as the distance from the inlet 11 increases.
  • the width of one end of the slit 15m on the introduction port 11 side is set to 2 mm, and the width of the other end is set to 1 mm. Furthermore, in the second flow rate adjusting section 16 shown in FIG.
  • the width of the slit 16m (sixth slit) is adjusted to be smaller than the aperture ratio, that is, the width of the slit 16m (sixth slit) becomes wider as the distance from the discharge port 12 increases.
  • the width of one end of the slit 16m on the discharge port 12 side is set to 1 mm, and the width of the other end is set to 2 mm.
  • SL1 to SL5 shown in FIGS. 28(B) to 28(F) are respectively applied to the container 14 of the cooler 10 as shown in FIG. 28(A).
  • a prismatic or cylindrical cooling fin 13a is used as the cooling fin 13a of the heat sink 13
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 and the temperatures of semiconductor elements CP1 and CP2 are determined.
  • prismatic or cylindrical cooling fins 13a are also applied in the case where the flow rate adjustment parts (SL1-SL5) are not applied to the container 14 of the cooler 10 as shown in FIG. 28(A).
  • FIG. 29 is a diagram showing the evaluation results of a second example cooler using prismatic cooling fins, based on thermal fluid simulation.
  • FIG. 29(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 29(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 29(C) shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting units first and second flow rate adjusting units
  • applied to the container of the cooler are "SL1-SL5" (FIG. 28(B)-FIG. 28(F) )), and "none" indicates the case where the flow velocity adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 153.2% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 29(A)).
  • the pressure loss of the cooler 10 is reduced by 22.3% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG.
  • the temperature of the semiconductor elements CP1 and CP2 in the mounting area AR1 where the refrigerant flow rate is relatively high is low, and the temperature of the semiconductor elements in the mounting area AR2 and AR3 where the refrigerant flow rate is relatively slow is lower.
  • the temperatures of elements CP1 and CP2 become higher.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 30 is a diagram showing the evaluation results of a second example cooler using cylindrical cooling fins, based on thermal fluid simulation.
  • FIG. 30(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 30(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 30(C) shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting units first and second flow rate adjusting units
  • applied to the container of the cooler are "SL1-SL5" (FIGS. 28(B) to 28(F)). )
  • "none" indicates the case where the flow rate adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 176.5% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 30(A)).
  • the pressure loss of the cooler 10 is reduced by 28.2% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG.
  • the temperature of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 becomes relatively high.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 31 is a diagram illustrating a third example of the cooler according to the fourth embodiment.
  • FIG. 31A schematically shows a perspective view of a main part of a cooler of a third example and a layout of a semiconductor element mounting area.
  • FIGS. 31(B) to 31(F) each schematically show a plan view of a main part of a flow rate adjusting section applied to a cooler of the third example.
  • a container 14 as shown in FIG. 31(A) is used in the cooler 10.
  • the container 14 shown in FIG. 31(A) is a modification of the container shown in FIG. 19 above.
  • an inlet 11 (IN) communicating with the first flow path 14e is arranged in the third side wall 14c
  • an outlet 12 communicating with the second flow path 14f is arranged in the fourth side wall 14d. (OUT) is placed.
  • the cooling fins 13a of the heat sink 13 that covers the container 14 are accommodated in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f.
  • the cooling fins 13a are prismatic as shown in FIGS.
  • cooling fins 13a are used. Then, in the area corresponding to the third flow path 14g on the heat dissipation plate 13 (the area indicated by the dotted line frame in FIG. 31(A)), as shown in FIG. 31(A), according to the example of FIG. , the semiconductor element CP1 and the semiconductor element CP2 are arranged in each of the three mounting areas AR1, AR2, and AR3.
  • FIG. 31(A) (and FIG. 31(B) to FIG. 31(F) described later), the inlet 11 side of the container 14 is indicated as "IN”, and the outlet 12 side is indicated as "OUT”. There is.
  • the three mounting areas AR1 to AR3 and the semiconductor element CP1 and semiconductor element CP2 provided in each have a positional relationship with respect to the IN and OUT of the container 14 as shown in FIG. 31(A).
  • thermofluid simulation a cooler 10 as shown in FIG. 31(A), a first flow rate adjusting section 115 and a second flow rate adjusting section 116 as shown in FIG. 31(B), and FIGS. 31(C) to 31 A first flow rate adjustment section 15 and a second flow rate adjustment section 16 as shown in (F) are used.
  • first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 31(B) are expressed as "SL1".
  • SL1 corresponds to the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 10 above.
  • the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 31(B) each have a slit 115e (seventh slit) and a slit 116e (eighth slit) having a constant width extending in the longitudinal direction.
  • the width of the slit 115e and the slit 116e is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 31(C) are expressed as "SL2".
  • SL2 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 5 above.
  • the first flow rate adjusting section 15 shown in FIG. 31(C) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction.
  • the width of the slit 15n is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the slit 15n (first slit) in the end region closest to the introduction port 11 has portions with different widths, with the wide portion having a width of 3 mm and the narrow portion having a width of 2 mm.
  • the width of the slit 15n (second slit) in the remaining area is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 31(C) has an aperture ratio of the end region (fourth region) farthest from the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction. The width of the slit 16n is adjusted so that it is larger than the aperture ratio of the remaining two regions (third region).
  • the slit 16n (fourth slit) in the end region furthest from the discharge port 12 has portions with different widths, with the wide portion having a width of 3 mm and the narrow portion having a width of 2 mm.
  • the width of the slit 16n (third slit) in the remaining area is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 31(D) are expressed as "SL3".
  • SL3 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 22 above.
  • the first flow rate adjusting section 15 shown in FIG. 31(D) has two slits 15n shown in FIG. 31(C) as the slits 15p in each of the region groups obtained by dividing the first flow rate adjusting section 15 into three in the longitudinal direction. (The end region closest to the inlet 11 is divided into two parts: a wide part and a narrow part).
  • the second flow rate adjustment section 16 shown in FIG. 31(D) uses the slit 16n of FIG.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 31(E) are referred to as "SL4".
  • SL4 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 23 above.
  • the first flow rate adjusting section 15 shown in FIG. 31(E) has an aperture ratio of the end region (first region) closest to the inlet 11 (IN) among the region group divided into three in the longitudinal direction.
  • the diameter of the hole 15q is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the holes 15q (first holes) in the region of the end closest to the introduction port 11 have different diameters, and the large diameter is set to 3 mm and the small diameter is set to 2 mm.
  • the diameter of the hole 15q (second hole) in the remaining area is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. the diameter of the hole 16q is adjusted so that it is larger than the aperture ratio of the remaining two regions (third region).
  • the hole 16q (fourth hole) in the region of the end farthest from the discharge port 12 has different diameters, and the large diameter is set to 3 mm and the small diameter is set to 2 mm.
  • the diameter of the hole 16q (third hole) in the remaining area is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 31(F) are expressed as "SL5".
  • SL5 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 24 above.
  • the first flow rate adjusting section 15 shown in FIG. 31(F) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction.
  • the width of the slit 15r (fifth slit) is adjusted so that the aperture ratio is larger than the aperture ratio of the remaining two regions (second region).
  • the width of the slit 15r in the end region closest to the introduction port 11 is set to 3 mm at the end on the introduction port 11 side, and the width is set to become narrower to 1 mm as the distance from the introduction port 11 increases.
  • the width of the slit 15r in the remaining area is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 31(F) has an aperture ratio of the end region (fourth region) farthest from the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction. The width of the slit 16r (sixth slit) is adjusted so that the aperture ratio is larger than that of the remaining two regions (third region).
  • the width of the slit 16r in the end region farthest from the discharge port 12 is set to 3 mm at the end opposite to the discharge port 12 side, and the width is set to become narrower to 1 mm as it approaches the discharge port 12 side. Ru.
  • the width of the slit 15r in the remaining area is set to 1 mm.
  • SL1 to SL5 shown in FIGS. 31(B) to 31(F) are respectively applied to the container 14 of the cooler 10 as shown in FIG. 31(A).
  • a prismatic or cylindrical cooling fin 13a is used as the cooling fin 13a of the heat sink 13
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 and the temperatures of semiconductor elements CP1 and CP2 are determined.
  • prismatic or cylindrical cooling fins 13a are also applied to the case where the flow rate adjustment parts (SL1-SL5) are not applied to the container 14 of the cooler 10 as shown in FIG. 31(A).
  • FIG. 32 is a diagram showing the evaluation results of a third example cooler using prismatic cooling fins, based on thermal fluid simulation.
  • FIG. 32(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 32(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 32C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting parts (first and second flow rate adjusting parts) applied to the container of the cooler are "SL1-SL5" (FIG. 31(B)-FIG. 31(F) )), and "none" indicates the case where the flow velocity adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 91.2% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 32(A)).
  • the pressure loss of the cooler 10 decreases by 20.4% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG. 32(A)), and when SL3 is applied, the pressure loss decreases by 20.4%.
  • the temperature of the semiconductor elements CP1 and CP2 becomes higher as the refrigerant flow rate approaches the mounting area AR1 where the flow rate is slow.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 33 is a diagram showing the evaluation results of a third example of a cooler to which cylindrical cooling fins are applied, by thermal fluid simulation.
  • FIG. 33(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 33(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 33(C) shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting parts (first and second flow rate adjusting parts) applied to the container of the cooler are "SL1-SL5" (FIG. 31(B)-FIG. 31(F) )), and "none" indicates the case where the flow rate adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 106.8% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 33(A)).
  • the pressure loss of the cooler 10 is reduced by 26.0% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG. 33(A)), and when SL3 is applied, the pressure loss is reduced by 26.0%.
  • FIG. 34 is a diagram illustrating a fourth example of the cooler according to the fourth embodiment.
  • FIG. 34A schematically shows a perspective view of a main part of a cooler of the fourth example and a layout of a semiconductor element mounting area.
  • FIGS. 34(B) to 34(F) each schematically show a plan view of a main part of a flow rate adjusting section applied to the cooler of the fourth example.
  • a container 14 as shown in FIG. 34(A) is used as the cooler 10.
  • the container 14 shown in FIG. 34(A) corresponds to that shown in FIG. 20 above.
  • the container 14 shown in FIG. 34(A) has an inlet 11 (IN) communicating with the center of the first channel 14e and an outlet 12 (OUT) communicating with the center of the second channel 14f in the bottom plate 14h. is placed.
  • the cooling fins 13a of the heat dissipation plate 13 that covers the container 14 are accommodated in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f.
  • the cooling fins 13a are prismatic as shown in FIGS. 3(A) and 3(B), or cylindrical as shown in FIGS.
  • cooling fins 13a are used. Then, in the area corresponding to the third flow path 14g on the heat dissipation plate 13 (the area indicated by the dotted frame in FIG. 34(A)), as shown in FIG. 34(A), according to the example of FIG. , the semiconductor element CP1 and the semiconductor element CP2 are arranged in each of the three mounting areas AR1, AR2, and AR3.
  • FIG. 34(A) (and FIG. 34(B) to FIG. 34(F) described later), the inlet 11 side of the container 14 is expressed as "IN”, and the outlet 12 side is expressed as "OUT”. There is.
  • the three mounting areas AR1-AR3 and the semiconductor element CP1 and semiconductor element CP2 provided in each have a positional relationship with respect to the IN and OUT of the container 14 as shown in FIG. 34(A).
  • FIGS. 34(B) to 34(F) illustrate the positions of the inlet 11 (IN) and the outlet 12 (OUT).
  • first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 34(B) are expressed as "SL1".
  • SL1 corresponds to the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 10 above.
  • the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 34(B) each have a slit 115e (seventh slit) and a slit 116e (eighth slit) having a constant width extending in the longitudinal direction.
  • the width of the slit 115e and the slit 116e is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 34(C) are expressed as "SL2".
  • the first flow rate adjusting section 15 shown in FIG. 34(C) has a slit 15s similar to the slit 15e of the first flow rate adjusting section 15 shown in FIG. 25(C) above.
  • the second flow rate adjustment section 16 shown in FIG. 34(C) has a slit 16s similar to the slit 16e of the second flow rate adjustment section 16 shown in FIG. 25(C) above.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 34(D) are expressed as "SL3".
  • the first flow rate adjusting section 15 shown in FIG. 34(D) has a slit 15t similar to the slit 15f of the first flow rate adjusting section 15 shown in FIG. 25(D) above.
  • the second flow rate adjusting section 16 shown in FIG. 34(D) has a slit 16t similar to the slit 16f of the second flow rate adjusting section 16 shown in FIG. 25(D) above.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 34(E) are expressed as "SL4".
  • the first flow rate adjusting section 15 shown in FIG. 34(E) has a hole 15u similar to the hole 15g of the first flow rate adjusting section 15 shown in FIG. 25(E) above.
  • the second flow rate adjusting section 16 shown in FIG. 34(E) has holes 16u similar to the holes 16g of the second flow rate adjusting section 16 shown in FIG. 25(E) above.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 34(F) are expressed as "SL5".
  • the first flow rate adjusting section 15 shown in FIG. 34(F) has a slit 15v similar to the slit 15h of the first flow rate adjusting section 15 shown in FIG. 25(F) above.
  • the second flow rate adjustment section 16 shown in FIG. 34(F) has a slit 16v similar to the slit 16h of the second flow rate adjustment section 16 shown in FIG. 25(F) above.
  • SL1 to SL5 shown in FIGS. 34(B) to 34(F) are respectively applied to the container 14 of the cooler 10 as shown in FIG. 34(A).
  • a prismatic or cylindrical cooling fin 13a is used as the cooling fin 13a of the heat sink 13
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 and the temperatures of semiconductor elements CP1 and CP2 are determined.
  • prismatic or cylindrical cooling fins 13a are also applied to the case where the flow rate adjustment parts (SL1-SL5) are not applied to the container 14 of the cooler 10 as shown in FIG. 34(A).
  • the pressure loss between the inlet 11 and the outlet 12, the coolant flow velocity at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3, and the temperatures of the semiconductor elements CP1 and CP2 are determined.
  • heat generation is reproduced by giving a certain amount of loss to the semiconductor elements CP1 and CP2 in the mounting areas AR1 to AR3.
  • the evaluation results by thermal fluid simulation are shown in FIGS. 35 and 36.
  • FIG. 35 is a diagram showing the evaluation results of a fourth example of a cooler using prismatic cooling fins by thermal fluid simulation.
  • FIG. 35(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 35(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 35C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting units first and second flow rate adjusting units
  • applied to the container of the cooler are "SL1-SL5" (FIGS. 34(B) to 34(F)). )
  • "none" indicates the case where the flow velocity adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 98.7% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 35(A)).
  • the pressure loss of the cooler 10 decreases by 20.2% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG.
  • the refrigerant flow velocity at the positions of the semiconductor elements CP1 and CP2 in the mounting area AR2 is higher than that at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1 and AR3.
  • the refrigerant flow speed becomes faster and uneven flow distribution occurs.
  • SL1-SL5 when SL1-SL5 is applied, the uneven flow distribution of the refrigerant at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 is suppressed, and a more uniform flow occurs, compared to the case without the flow rate adjustment section.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 36 is a diagram showing the evaluation results of a fourth example of a cooler to which cylindrical cooling fins are applied, by thermal fluid simulation.
  • FIG. 36(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 36(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 36C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting parts (first and second flow rate adjusting parts) applied to the container of the cooler are "SL1-SL5" (FIG. 34(B)-FIG. 34(F) )), and "none" indicates the case where the flow rate adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 113.5% when SL1 is applied, compared to the case without the flow rate adjustment part (pressure loss shown by the dotted line L1 in FIG. 36(A)).
  • pressure loss shown by the dotted line L1 in FIG. 36(A)
  • the pressure loss of the cooler 10 is reduced by 26.0% when SL2 is applied, compared to SL1 with a constant slit width (the pressure loss indicated by the broken line L2 in FIG.
  • the refrigerant flow velocity at the positions of the semiconductor elements CP1 and CP2 in the mounting area AR2 is higher than that at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1 and AR3.
  • the refrigerant flow speed increases and uneven flow distribution occurs.
  • SL1-SL5 when SL1-SL5 is applied, the uneven flow distribution of the refrigerant at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 is suppressed, and a more uniform flow occurs, compared to the case without the flow rate adjustment section.
  • the temperatures of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3 are kept relatively constant and are cooled more uniformly than in the case without the flow rate adjustment section.
  • FIG. 37 is a diagram illustrating a fifth example of the cooler according to the fourth embodiment.
  • FIG. 37A schematically shows a perspective view of a main part of a cooler of the fifth example and a layout of a semiconductor element mounting area.
  • FIGS. 37(B) to 37(F) each schematically show a plan view of a main part of a flow rate adjusting section applied to the cooler of the fifth example.
  • a container 14 as shown in FIG. 37(A) is used in the cooler 10.
  • the container 14 shown in FIG. 37(A) is a modification of the container shown in FIG. 21 above.
  • the container 14 shown in FIG. 37(A) has an inlet 11 (IN) in the bottom plate 14h that communicates with the end of the first flow path 14e on the third side wall 14c side, and a fourth side wall 14d of the second flow path 14f.
  • a discharge port 12 (OUT) communicating with the side end is arranged.
  • the cooling fins 13a of the heat dissipation plate 13 that covers the container 14 are accommodated in the third flow path 14g, which is an internal space above the first flow path 14e and the second flow path 14f.
  • the cooling fins 13a are prismatic as shown in FIGS. 3(A) and 3(B), or cylindrical as shown in FIGS. 15(A) and 15(B). cooling fins 13a are used. Then, in the area corresponding to the third flow path 14g on the heat dissipation plate 13 (the area indicated by the dotted line frame in FIG. 37(A)), as shown in FIG. 37(A), according to the example of FIG. , the semiconductor element CP1 and the semiconductor element CP2 are arranged in each of the three mounting areas AR1, AR2, and AR3.
  • FIG. 37(A) (and FIG. 37(B) to FIG. 37(F) described later), the inlet 11 side of the container 14 is expressed as "IN”, and the outlet 12 side is expressed as "OUT”.
  • the three mounting areas AR1 to AR3 and the semiconductor element CP1 and semiconductor element CP2 provided in each have a positional relationship with respect to the IN and OUT of the container 14 as shown in FIG. 37(A).
  • FIGS. 37(B) to 37(F) illustrate the positions of the inlet 11 (IN) and the outlet 12 (OUT).
  • first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 37(B) are expressed as "SL1".
  • SL1 corresponds to the first flow rate adjustment section 115 and the second flow rate adjustment section 116 shown in FIG. 10 above.
  • the first flow rate adjusting section 115 and the second flow rate adjusting section 116 shown in FIG. 37(B) each have a slit 115e (seventh slit) and a slit 116e (eighth slit) having a constant width extending in the longitudinal direction.
  • the width of the slit 115e and the slit 116e is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 37(C) are expressed as "SL2".
  • SL2 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 5 above.
  • the first flow rate adjusting section 15 shown in FIG. 37(C) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction.
  • the width of the slit 15w is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the width of the slit 15w (first slit) in the end region closest to the introduction port 11 is set to 2 mm, and the width of the slit 15w (second slit) in the remaining region is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. 37(C) has an aperture ratio of the end region (fourth region) furthest from the discharge port 12 (OUT) among the region group divided into three in the longitudinal direction.
  • the width of the slit 16w is adjusted so that it is larger than the aperture ratio of the remaining two regions (third region).
  • the width of the slit 16w (fourth slit) in the end region farthest from the discharge port 12 is set to 2 mm, and the width of the slit 16w (third slit) in the remaining region is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 37(D) are expressed as "SL3".
  • SL3 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 22 above.
  • the first flow rate adjusting section 15 shown in FIG. 37(D) has two slits 15w shown in FIG. 37(C) as the slits 15x in each of the region groups obtained by dividing the first flow rate adjusting section 15 into three in the longitudinal direction. It is divided into.
  • the second flow velocity adjustment section 16 shown in FIG. 37(D) uses the slit 16w of FIG. 37(C) as the slit 16x in each of the region groups obtained by dividing the second flow velocity adjustment section 16 into three in the longitudinal direction. It is divided into two parts.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 37(E) are expressed as "SL4".
  • SL4 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 23 above.
  • the first flow rate adjusting section 15 shown in FIG. 37(E) has an aperture ratio of an end region (first region) closest to the inlet 11 (IN) among a group of regions divided into three in the longitudinal direction. The diameter of the hole 15y is adjusted so that it is larger than the aperture ratio of the remaining two regions (second region).
  • the diameter of the hole 15y (first hole) in the end region closest to the introduction port 11 is set to 2 mm, and the diameter of the hole 15y (second hole) in the remaining region is set to 1 mm.
  • the second flow rate adjusting section 16 shown in FIG. The diameter of the hole 16y is adjusted so that it is larger than the aperture ratio of the remaining two regions (third region).
  • the diameter of the hole 16y (fourth hole) in the end region farthest from the discharge port 12 is set to 2 mm, and the diameter of the hole 16y (third hole) in the remaining region is set to 1 mm.
  • the first flow rate adjustment section 15 and the second flow rate adjustment section 16 shown in FIG. 37(F) are expressed as "SL5".
  • SL5 is obtained by changing the opening layout of the first flow rate adjusting section 15 and the second flow rate adjusting section 16 shown in FIG. 24 above.
  • the width of the slit 15z is adjusted to be larger as the distance from the inlet 11 increases.
  • the width of one end of the slit 15z on the introduction port 11 side is set to 2 mm, and the width of the other end is set to 1 mm. Further, in the second flow rate adjusting section 16 shown in FIG. 37(F), the closer the aperture ratio of the region (third region) to the discharge port 12 (OUT), the more distant the region (fourth region) from the discharge port 12.
  • the width of the slit 16z (sixth slit) is adjusted to be smaller than the aperture ratio, that is, the width of the slit 16z (sixth slit) becomes wider as the distance from the discharge port 12 increases.
  • the width of one end of the slit 16z on the discharge port 12 side is set to 1 mm, and the width of the other end is set to 2 mm.
  • SL1 to SL5 shown in FIGS. 37(B) to 37(F) are respectively applied to the container 14 of the cooler 10 as shown in FIG. 37(A).
  • a prismatic or cylindrical cooling fin 13a is used as the cooling fin 13a of the heat sink 13
  • the coolant flow velocity at the positions of semiconductor elements CP1 and CP2 and the temperatures of semiconductor elements CP1 and CP2 are determined.
  • prismatic or cylindrical cooling fins 13a are also applied to the case where the flow rate adjustment parts (SL1-SL5) are not applied to the container 14 of the cooler 10 as shown in FIG. 37(A).
  • the pressure loss between the inlet 11 and the outlet 12, the coolant flow velocity at the positions of the semiconductor elements CP1 and CP2 in the mounting areas AR1-AR3, and the temperatures of the semiconductor elements CP1 and CP2 are determined.
  • heat generation is reproduced by giving a certain amount of loss to the semiconductor elements CP1 and CP2 in the mounting areas AR1 to AR3.
  • the evaluation results by thermal fluid simulation are shown in FIGS. 38 and 39.
  • FIG. 38 is a diagram showing the evaluation results of the fifth example cooler using prismatic cooling fins, based on thermal fluid simulation.
  • FIG. 38(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 38(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 38C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting parts (first and second flow rate adjusting parts) applied to the container of the cooler are "SL1-SL5" (FIG. 38(B)-FIG. 38(F) )), and "none" indicates the case where the flow velocity adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 69.8% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 38(A)).
  • the pressure loss of the cooler 10 decreases by 11.2% when SL2 is applied, compared to SL1 with a constant slit width (pressure loss indicated by broken line L2 in FIG. 32(A)), and when SL3 is applied, the pressure loss decreases by 11.2%.
  • FIG. 39 is a diagram showing the evaluation results of the fifth example cooler using cylindrical cooling fins, based on thermal fluid simulation.
  • FIG. 39(A) shows an example of the evaluation results of pressure loss in the cooler.
  • FIG. 39(B) shows an example of the evaluation results of the coolant flow velocity with respect to the semiconductor element position.
  • FIG. 39C shows an example of the evaluation results of the semiconductor element temperature with respect to the semiconductor element position.
  • the flow rate adjusting parts first and second flow rate adjusting parts
  • applied to the container of the cooler are "SL1-SL5" (FIG. 37(B)-FIG. 37(F) )), and "none" indicates the case where the flow rate adjustment section is not applied.
  • the pressure loss of the cooler 10 increases by 85.8% when SL1 is applied, compared to the case without the flow rate adjustment part (the pressure loss shown by the dotted line L1 in FIG. 39(A)).
  • the pressure loss of the cooler 10 is reduced by 15.6% when SL2 is applied, compared to SL1 with a constant slit width (pressure loss indicated by broken line L2 in FIG. 39(A)), and when SL3 is applied, the pressure loss is reduced by 15.6%.

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  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
PCT/JP2023/024795 2022-08-08 2023-07-04 冷却器及び半導体装置 Ceased WO2024034291A1 (ja)

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CN202380018604.6A CN118541794A (zh) 2022-08-08 2023-07-04 冷却器以及半导体装置
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