WO2023178721A1 - Procédé et système d'inspection optique pour semi-conducteur - Google Patents

Procédé et système d'inspection optique pour semi-conducteur Download PDF

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Publication number
WO2023178721A1
WO2023178721A1 PCT/CN2022/084029 CN2022084029W WO2023178721A1 WO 2023178721 A1 WO2023178721 A1 WO 2023178721A1 CN 2022084029 W CN2022084029 W CN 2022084029W WO 2023178721 A1 WO2023178721 A1 WO 2023178721A1
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light
signal
detection
intensity
optical system
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PCT/CN2022/084029
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English (en)
Chinese (zh)
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孔寒夫
兰艳平
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上海御微半导体技术有限公司
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Publication of WO2023178721A1 publication Critical patent/WO2023178721A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

Definitions

  • the present invention relates to the field of optical detection technology, and in particular, to a semiconductor optical detection method and system.
  • the optical system mainly includes an illumination system 101, an imaging lens 102 and a detector 103.
  • the illumination system 101 is responsible for providing the illumination light required for detection
  • the imaging lens 102 is used to collect the light signal to be measured from the target
  • the detector 103 is responsible for converting the light signal into a digital signal.
  • different parts of the target usually have different reflectivities. Taking process silicon wafers as an example, the reflectivity distribution in different areas can reach 10% to 90%. Therefore, in a shot, there are likely to be some areas It is still very dark but some areas have been overexposed, which seriously affects the detection effect.
  • the purpose of the present invention is to provide a semiconductor optical detection method and system, which can quickly detect the surface of targets with different reflectivities and greatly improve the detection efficiency.
  • the semiconductor optical detection method of the present invention includes:
  • An optical system is used to photograph the sample to be tested to obtain an initial picture, and the sample to be tested is divided into several signal areas according to the signal strengths of different areas in the initial picture;
  • the detection light source is configured according to the target light intensity configuration information
  • the target to be measured is photographed through the optical system to obtain the detection result.
  • the beneficial effect of the semiconductor optical detection method of the present invention is that: in the above method, the sample to be tested is detected and analyzed through the optical system, thereby dividing the surface of the sample to be tested into several signal areas, and then using different configurations of light intensities to detect and analyze the sample.
  • the sample is tested to obtain the target light intensity configuration information that meets the detection requirements, so that the detection light source can be configured later through the target light intensity configuration information, and multiple targets to be tested can be quickly detected through the configured optical system to ensure detection. While the results are accurate, it can effectively improve detection efficiency.
  • the sample to be tested is divided into several signal areas according to the signal strengths of different areas in the initial picture, including:
  • the signal strengths of different areas in the initial picture are obtained, and based on the difference in signal intensity in different areas of the initial picture, the initial picture is placed in the area to be tested. The corresponding area on the sample is divided into several signal areas.
  • the sample to be tested is divided into several signal areas according to the signal strengths of different areas in the initial picture, including:
  • the saturated light signal is adjusted in the optical system, and the sample to be tested is photographed again with the optical system to obtain a new initial picture until no area in the new initial picture appears to be saturated with light signals;
  • the signal strengths of different areas in the initial picture are obtained, and the corresponding areas of the initial picture on the sample to be tested are divided into several signal areas based on the differences in signal strengths of different areas of the initial picture.
  • the detection light source includes three light sources: red light, green light and blue light.
  • the signal strength Di in the i-th signal area satisfies the following formula:
  • the number of the signal areas is n
  • ⁇ iR is the red light reflectance in the i-th signal area
  • ⁇ iG is the green light reflectivity in the i-th signal area
  • ⁇ iB is the red light reflectivity in the i-th signal area.
  • p R is the red light intensity in the detection light source
  • ⁇ R is the optical efficiency of the optical system for red light
  • p G is the green light intensity in the detection light source
  • Light intensity ⁇ G is the optical efficiency of the optical system for green light
  • p B is the blue light intensity in the detection light source
  • ⁇ B is the optical efficiency of the optical system for blue light
  • i and n are both positive Integer, 0 ⁇ i ⁇ n.
  • the method further includes:
  • the light intensity information corresponding to the detected light source is used as the target light intensity configuration information
  • the target to be measured is photographed through the optical system to obtain the detection result.
  • the beneficial effect is that: taking into account the impact of the noise coefficient on the optical system, the original determination of the target light intensity configuration information based on the variance is changed to the determination of the target light intensity configuration information based on the signal-to-noise ratio variance, thereby effectively reducing the noise coefficient of different colors of light. influence and improve the accuracy of subsequent detection results.
  • the signal-to-noise ratio variance satisfies the following formula:
  • p R is the red light intensity in the detection light source
  • p G is the green light intensity in the detection light source
  • p B is the blue light intensity in the detection light source
  • ⁇ NR is the noise of red light Coefficient
  • eta NG is the noise coefficient of green light
  • eta NB is the noise coefficient of blue light
  • B is the second preset threshold
  • i and n are both positive integers, 0 ⁇ i ⁇ n.
  • the optical system includes:
  • Light-emitting components used to provide light sources
  • a reflective component configured to reflect the light source to a target area and receive the reflected light reflected back from the target area
  • the light-emitting component includes a plurality of monochromatic light sources, a first dichroic prism and a focusing lens.
  • the light generated by the monochromatic light source passes through the first dichroic prism and is transmitted to the focusing lens and then focused.
  • the focusing lens transmits the focused light to the reflective component.
  • the receiver includes several receiving components, the number of the receiving components is the same as the number of the monochromatic light sources, the receiving components include a second dichroic prism, a filter and a color camera, and the third The dichroic prism is used to reflect the reflected light to the filter, the filter is used to filter the reflected light, and the color camera is used to filter the reflected light. The light is processed to obtain the final detection result.
  • the invention provides a semiconductor optical detection system, including:
  • An area dividing module is used to use an optical system to photograph the sample to be tested to obtain an initial picture, and divide the sample to be tested into several signal areas according to the signal strengths of different areas in the initial picture;
  • An information acquisition module used to acquire the reflectivity information of each signal area and the system optical efficiency information of each color light in the optical system
  • Intensity calculation module used to adjust the light intensity of different configurations of detection light sources in the optical system, and calculate the signal area of the optical system with different light intensities based on the reflectivity information and the system optical efficiency information. signal strength in;
  • Target acquisition module used to calculate the variance between the signal intensity in the signal area and the preset detection intensity, and use the light intensity information corresponding to the optical system as the target light intensity when the variance is less than the first preset threshold.
  • a detection module configured to configure the detection light source according to the target light intensity configuration information, and then photograph the target to be measured through the optical system to obtain a detection result.
  • the area division module detects and analyzes the sample to be tested through the optical system, thereby dividing the surface of the sample to be tested into several signal areas, and then uses different configurations of light It is important to test the sample to be tested to obtain the target light intensity configuration information that meets the detection requirements, so that the detection module can subsequently configure the detection light source through the target light intensity configuration information, and quickly detect multiple targets to be tested through the configured optical system. Detection can effectively improve detection efficiency while ensuring accurate detection results.
  • Figure 1 is a schematic structural diagram of automatic optical inspection equipment in the prior art
  • Figure 2 is a flow chart of a semiconductor optical detection method according to an embodiment of the present invention.
  • Figure 3 is a schematic structural diagram of an optical system used in the semiconductor optical detection method according to the embodiment of the present invention.
  • Figure 4 is a schematic structural diagram of a light-emitting component in an optical system according to an embodiment of the present invention.
  • Figure 5 is a schematic structural diagram of a receiver in an optical system according to an embodiment of the present invention.
  • Figure 6 is a structural block diagram of a semiconductor optical detection system according to an embodiment of the present invention.
  • FIG. 7 is a schematic diagram of the execution process of the semiconductor optical detection method according to the embodiment of the present invention.
  • embodiments of the present invention provide a semiconductor optical detection method. Referring to Figure 2, it includes the following steps:
  • S201 Use an optical system to photograph the sample to be tested to obtain an initial picture, and divide the sample to be tested into several signal areas according to the signal strengths of different areas in the initial picture.
  • an optical system is used to photograph the sample to be tested to obtain a complete initial picture of the sample to be tested, so as to subsequently divide the sample to be tested into regions based on the initial picture.
  • the initial picture at least includes a complete image of the sample to be tested, so as to facilitate complete region division of the sample to be tested.
  • the process of dividing the test sample corresponding to the initial picture into several signal areas includes at least the following two situations.
  • the first situation after determining that no optical signal saturation occurs in the area of the initial picture, obtain the signal strengths of different areas in the initial picture, and convert the initial picture according to the difference in signal intensity in different areas of the initial picture.
  • the corresponding area on the sample to be tested is divided into several signal areas.
  • the optical system includes a detection light source.
  • the optical system takes a picture of the sample to be tested and obtains a complete initial picture, if there is no light signal saturation in each area of the initial picture, it indicates that the current initial picture is If the picture meets the requirements, you can use this pair to obtain the signal strength of each position in the initial picture, and according to the different signal strengths on the initial picture, divide the corresponding area of the initial picture on the sample to be tested into several signal areas for subsequent convenience Get the reflectivity of each signal area.
  • the saturated light signal is adjusted in the optical system, and the optical system is used to shoot the image to be viewed again. Test samples to obtain a new initial picture until no area in the new initial picture appears to be saturated with light signals;
  • the signal strengths of different areas in the initial picture are obtained, and the corresponding areas of the initial picture on the sample to be tested are divided into several signal areas based on the differences in signal strengths of different areas of the initial picture.
  • the intensity of the red light in the detection light source is correspondingly reduced.
  • use the optical system after weakening the light intensity of the detection light source to take another picture of the sample to be tested and obtain a new initial picture, and adjust it repeatedly until there is no area where the light signal is saturated in the initial picture taken by the adjusted optical system.
  • each adjustment in the optical system weakens the current light signal intensity by 50%.
  • the saturated red light in the optical system is 255 bit, then it is 128 bit after weakening, so that each of the initial pictures taken can be The intensity of the light signal in an area can be detected.
  • the attenuation amplitude of the optical signal intensity of the detection light source is set according to different situations, and it only needs to be greater than 0 and less than 100%, which will not be described again here.
  • the light intensity in the detection light source is first increased to the maximum, and then gradually reduced by detecting whether the light signal is saturated to complete the adjustment process.
  • this solution can also adjust the light intensity in the detection light source from weak to strong until a picture that meets the detection requirements is obtained, which will not be described again here.
  • the light signal intensity of each area in the initial picture is obtained, and the corresponding value can be obtained according to the obtained light signal intensity.
  • the reflectance information of each area in the initial image is thus obtained, and the reflectance information of each signal area in the sample to be measured is obtained, and the illumination efficiency information of different color light signals in the optical system is calculated based on the intensity of the detected light signal.
  • the detection light source includes three light sources: red light, green light and blue light.
  • the number of the signal areas is n
  • ⁇ iR is the red light reflectance in the i-th signal area
  • ⁇ iG is the green light reflectance in the i-th signal area
  • ⁇ iB is the red light reflectivity in the i-th signal area.
  • p R is the red light intensity in the detection light source
  • ⁇ R is the optical efficiency of the optical system for red light
  • p G is the green light intensity in the detection light source
  • Light intensity ⁇ G is the optical efficiency of the optical system for green light
  • p B is the blue light intensity in the detection light source
  • ⁇ B is the optical efficiency of the optical system for blue light
  • i and n are both positive Integer, 0 ⁇ i ⁇ n.
  • S204 Calculate the variance between the signal intensity in the signal area and the preset detection intensity, and when the variance is less than the first preset threshold, use the light intensity information corresponding to the detection light source as the target light intensity configuration information.
  • the entire process is divided into a light intensity setting stage and a detection stage.
  • the light intensity setting stage after placing the sample to be tested in the area to be tested, the light intensity of the three colors is set to 100%, and Take photos of the sample to be tested through the currently set optical system, and calculate the reflectivity of each position of the sample to be tested relative to the three colors of light based on the signal strength. If the signal is saturated with a certain color of light, appropriately reduce the corresponding light Then continue to take new photos until the light color saturation does not appear in the new photos.
  • the color light combination and light intensity configuration with the best detection effect are calculated by calculating the variance, and the detection light source is adjusted and configured accordingly.
  • Subsequent targets to be tested are detected through the adjusted optical system, and the color cameras are processed separately. Signal data of different color channels in the picture to facilitate the rapid detection process of the target to be measured.
  • the detection light source in order to adjust the detection light source to a light intensity configuration suitable for the current sample to be tested, by continuously adjusting the light intensity configuration of the detection light source, several sets of corresponding signal intensities on different initial pictures are obtained, and then based on calculation The obtained several sets of signal strengths calculate the variance between the signal strength and the preset detection strength, record it as the first variance, and after the first variance is less than the first preset threshold, the current first variance corresponds to a
  • the light intensity information of the detection light source corresponding to the group signal intensity is used as the target light intensity configuration information, and the detection light source is configured according to the target light intensity configuration information, and the subsequent target to be measured is detected through the optical system after completing the configuration, so that It is suitable for detecting defects on the surface of the target to be tested, thereby obtaining accurate detection results, and can meet the detection process of a large number of targets to be tested in the same batch, improving detection efficiency.
  • each set of signal intensity data contains n signal intensity numbers
  • the method further includes:
  • the light intensity information corresponding to the detected light source is used as the target light intensity configuration information
  • the detection light source is configured according to the target light intensity configuration information
  • the target to be measured is photographed through the optical system to obtain the detection result.
  • the original determination of the target light intensity configuration information based on the variance is changed to the determination of the target light intensity configuration information based on the variance of the signal-to-noise ratio, thereby effectively reducing the noise of different colors of light.
  • the influence of the coefficient improves the accuracy of subsequent detection results.
  • the main difference from the aforementioned detection method is that the signal-to-noise ratio variance in the optical system and the size of the second preset threshold are calculated by using the noise coefficients of different colors of light and the signal intensity calculated previously.
  • the light intensity information corresponding to the detection light source whose noise ratio variance is less than the second preset threshold is used as the target light intensity configuration information.
  • the rest of the process is basically the same as the above, thus effectively reducing the impact of the system on the detection results in the morning and improving the accuracy of the detection results. sex.
  • the system noise includes optical noise and electrical noise.
  • the signal-to-noise ratio variance satisfies the following formula:
  • p R is the red light intensity in the detection light source
  • p G is the green light intensity in the detection light source
  • p B is the blue light intensity in the detection light source
  • ⁇ NR is the noise of red light Coefficient
  • eta NG is the noise coefficient of green light
  • eta NB is the noise coefficient of blue light
  • B is the second preset threshold
  • i and n are both positive integers, 0 ⁇ i ⁇ n.
  • the optical system includes:
  • Reflective component 32 used to reflect the light source to the target area and receive the reflected light reflected back from the target area
  • Receiver 33 is used to receive the reflected light and detect the reflected light.
  • the light-emitting component 33 includes several monochromatic light sources, a first dichroic prism and a focusing lens.
  • the light generated by the monochromatic light source passes through the first dichroic prism and is transmitted to the focusing lens and then focused. , and transmit the focused light to the reflective component through the focusing lens.
  • the light-emitting component 31 includes three monochromatic light sources, namely a red light source 311, a green light source 312 and a blue light source 313.
  • the light generated by the red light source 311, the green light source 312 and the blue light source 313 passes through the first dichroic prism. 314 reaches the focusing lens 315 after reflection, thereby generating detection light rays that are gathered together.
  • the reflective component 32 transmits the detection light to the surface of the target to be measured, the reflective component 32 transmits the reflected light to the receiver 33 again through the reflection of the target to be measured, thereby completing the detection process through the receiver 33 .
  • the receiver 33 includes several receiving components 331.
  • the number of the receiving components 331 is the same as the number of the monochromatic light sources, so
  • the receiving component 331 includes a second dichroic prism 3311, a filter 3312 and a color camera 3313.
  • the second dichroic prism 3311 is used to reflect the reflected light to the filter 3312.
  • the filter 3312 is used for In order to filter the reflected light, the color camera 3313 is used to process the filtered reflected light to obtain the final detection result.
  • the invention also discloses a semiconductor optical detection system.
  • Figure 6 which includes:
  • the area division module 601 is used to use an optical system to photograph the sample to be tested to obtain an initial picture, and divide the sample to be tested into several signal areas according to the signal strengths of different areas in the initial picture;
  • the information acquisition module 602 is used to acquire the reflectivity information of each signal area and the system optical efficiency information of each color light in the optical system;
  • the intensity calculation module 603 is used to adjust the light intensity of different configurations of the detection light sources in the optical system, and calculate the signal output of the optical system with different light intensities based on the reflectivity information and the system optical efficiency information. signal strength in the area;
  • the target acquisition module 604 is used to calculate the variance between the signal intensity in the signal area and the preset detection intensity, and use the light intensity information corresponding to the detection light source as the target light when the variance is less than the first preset threshold. Strong configuration information;
  • the detection module 605 is configured to, after configuring the detection light source according to the target light intensity configuration information, photograph the target to be measured through the optical system to obtain a detection result.

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Abstract

La présente invention concerne un procédé et un système d'inspection optique pour un semi-conducteur. Le procédé d'inspection optique pour un semi-conducteur consiste : à photographier, à l'aide d'un système optique, un échantillon à inspecter, de façon à obtenir une image initiale, et à diviser ledit échantillon en une pluralité de régions de signal en fonction de l'intensité de signal de différentes régions dans l'image initiale ; à acquérir des informations de réflectivité et des informations d'efficacité optique de système ; à régler les intensités lumineuses de différentes configurations d'une source de lumière d'inspection dans le système optique, et en fonction des informations de réflectivité et des informations d'efficacité optique de système, à calculer l'intensité de signal, dans chaque région de signal, du système optique d'intensités lumineuses différentes ; à calculer la variance entre l'intensité de signal dans chaque région de signal et une intensité d'inspection prédéfinie, de façon à acquérir des informations de configuration d'intensité lumineuse cible ; et après la configuration de la source de lumière d'inspection en fonction des informations de configuration d'intensité lumineuse cible, à photographier, au moyen du système optique, une cible à inspecter, de façon à acquérir un résultat d'inspection. Grâce à la présente invention, une inspection de surface rapide peut être effectuée sur des cibles présentant différentes réflectivités, ce qui permet d'améliorer considérablement l'efficacité d'inspection.
PCT/CN2022/084029 2022-03-24 2022-03-30 Procédé et système d'inspection optique pour semi-conducteur WO2023178721A1 (fr)

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CN202210296167.1A CN114813770A (zh) 2022-03-24 2022-03-24 半导体光学检测方法及系统
CN202210296167.1 2022-03-24

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190250107A1 (en) * 2016-10-26 2019-08-15 Board Of Regents, The University Of Texas System High Throughput, High Resolution Optical Metrology For Reflective And Transmissive Nanophotonic Devices
CN110166704A (zh) * 2019-05-30 2019-08-23 深圳市道创智能创新科技有限公司 多光谱相机的校准方法及装置
CN111174702A (zh) * 2020-01-22 2020-05-19 无锡微视传感科技有限公司 一种自适应结构光投射模组及测量方法
CN113155845A (zh) * 2021-04-09 2021-07-23 武汉精测电子集团股份有限公司 一种光源及其设置方法、光学检测方法及系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190250107A1 (en) * 2016-10-26 2019-08-15 Board Of Regents, The University Of Texas System High Throughput, High Resolution Optical Metrology For Reflective And Transmissive Nanophotonic Devices
CN110166704A (zh) * 2019-05-30 2019-08-23 深圳市道创智能创新科技有限公司 多光谱相机的校准方法及装置
CN111174702A (zh) * 2020-01-22 2020-05-19 无锡微视传感科技有限公司 一种自适应结构光投射模组及测量方法
CN113155845A (zh) * 2021-04-09 2021-07-23 武汉精测电子集团股份有限公司 一种光源及其设置方法、光学检测方法及系统

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