WO2022176932A1 - ポンプ装置 - Google Patents

ポンプ装置 Download PDF

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Publication number
WO2022176932A1
WO2022176932A1 PCT/JP2022/006291 JP2022006291W WO2022176932A1 WO 2022176932 A1 WO2022176932 A1 WO 2022176932A1 JP 2022006291 W JP2022006291 W JP 2022006291W WO 2022176932 A1 WO2022176932 A1 WO 2022176932A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric pump
pump
housing
piezoelectric
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/006291
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English (en)
French (fr)
Japanese (ja)
Inventor
友徳 川端
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2023500911A priority Critical patent/JP7435894B2/ja
Priority to CN202280011179.3A priority patent/CN116745524A/zh
Publication of WO2022176932A1 publication Critical patent/WO2022176932A1/ja
Priority to US18/365,342 priority patent/US12467447B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the present invention relates to a pump device in which a plurality of pumps are connected.
  • Patent Document 1 describes a nebulizer that sprays a liquid such as a drug solution.
  • a nebulizer described in Patent Document 1 includes an ultrasonic transducer as a driving unit for atomization.
  • a piezoelectric pump can be employed as a drive unit for such a nebulizer.
  • a plurality of piezoelectric pumps may be used to achieve a desired spray performance.
  • piezoelectric pumps generate heat when driven, it is preferable to use a heat dissipation mechanism.
  • a heat dissipation mechanism when miniaturizing a device, such as a nebulizer, to which piezoelectric pumps are attached, it is desirable to save a space for arranging a plurality of piezoelectric pumps.
  • an object of the present invention is to provide a configuration that effectively dissipates heat from a plurality of piezoelectric pumps while arranging the plurality of piezoelectric pumps in a space-saving manner.
  • a pump device of the present invention includes a first piezoelectric pump, a second piezoelectric pump, and a connecting pipe.
  • the first piezoelectric pump and the second piezoelectric pump are surrounded by a housing in which a diaphragm that vibrates by driving a piezoelectric element is arranged in an internal space, one main surface of the diaphragm in the internal space of the housing, and the housing. and a discharge port communicating with a second space surrounded by the other main surface of the diaphragm in the space inside the housing and the housing.
  • the connection pipe allows communication between the discharge port of the first piezoelectric pump and the suction port of the second piezoelectric pump.
  • the first piezoelectric pump and the second piezoelectric pump are arranged so that the outer wall surface of the housing of the first piezoelectric pump on the first space side faces the outer wall surface of the housing of the second piezoelectric pump on the first space side. , are placed.
  • heat can be effectively dissipated while arranging a plurality of piezoelectric pumps in a space-saving manner.
  • FIG. 1 is a side view showing the configuration of the pump device according to the first embodiment.
  • FIG. 2 is an exploded perspective view of the piezoelectric pump according to the first embodiment.
  • FIG. 3 is a schematic side cross-sectional view showing fluid flow in the piezoelectric pump according to the first embodiment.
  • FIG. 4 is a side view showing the configuration of the pump device according to the second embodiment.
  • FIG. 5 is a side view showing the configuration of the pump device according to the third embodiment.
  • FIG. 6 is a side view showing the configuration of the pump device according to the fourth embodiment.
  • FIG. 7 is a side view showing the configuration of the pump device according to the fifth embodiment.
  • FIG. 1 is a side view showing the configuration of the pump device according to the first embodiment.
  • the shape of each component is partially or entirely exaggerated in order to make the configuration of the pump device easier to understand.
  • the pump device 1 includes a piezoelectric pump 10A, a piezoelectric pump 10B, and a connecting pipe 80.
  • the piezoelectric pump 10A and the piezoelectric pump 10B have the same configuration.
  • Piezoelectric pump 10A and piezoelectric pump 10B are connected in series with respect to fluid flow by connecting tube 80 .
  • a set of the piezoelectric pump 10A and the piezoelectric pump 10B corresponds to a set of "first piezoelectric pump” and "second piezoelectric pump" of the present invention.
  • FIG. 2 is an exploded perspective view of the piezoelectric pump according to the first embodiment.
  • FIG. 3 is a schematic side cross-sectional view showing fluid flow in the piezoelectric pump according to the first embodiment. 2 and 3, the piezoelectric pump 10 will be described instead of the piezoelectric pumps 10A and 10B.
  • the piezoelectric pump 10 includes a pump body 20, a base housing 30, and a lid member 40.
  • the base housing 30 and the lid member 40 constitute the "housing" of the present invention.
  • the pump body 20 includes a diaphragm 211 , a frame 212 , a support portion 213 and a piezoelectric element 22 .
  • Diaphragm 211 is circular in plan view.
  • the frame 212 has a shape surrounding the outer periphery of the diaphragm 211 and is arranged at a position spaced apart from the outer periphery of the diaphragm 211 .
  • Support portion 213 is arranged between diaphragm 211 and frame 212 .
  • the supporting portion 213 has a beam shape and supports the diaphragm 211 with respect to the frame 212 so as to vibrate.
  • the piezoelectric element 22 includes a disk-shaped piezoelectric body and a drive electrode.
  • the piezoelectric element 22 is installed on one main surface of the diaphragm 211 .
  • a drive signal is applied to the piezoelectric element 22 by a drive signal application electrode 251 and a drive signal application electrode 252 .
  • the base housing 30 includes a main member 31, a suction side nozzle 321, a discharge side nozzle 322, and a terminal mounting portion 35.
  • the main member 31, the suction side nozzle 321, the discharge side nozzle 322, and the terminal mounting portion 35 are integrally molded, for example, from an insulating resin material.
  • the main member 31 has a bottom wall 311 and side walls 312 .
  • the main member 31 has a recess 33 surrounded by a bottom wall 311 and side walls 312 .
  • the recessed portion 33 includes a central recessed portion 333 in plan view, a recessed portion 332 arranged on the outer periphery thereof, and a recessed portion 331 arranged on the outer periphery thereof and in contact with the inner edge of the side wall 312 .
  • Recess 333 is deeper than recess 332
  • recess 332 is deeper than recess 331 .
  • the suction side nozzle 321 and the discharge side nozzle 322 are attached to the outer surface of the side wall 312 of the main member 31 .
  • a suction port 3210 provided in the suction-side nozzle 321 communicates with the recessed portion 333 of the main member 31 through a through hole penetrating the side wall 312 in the thickness direction.
  • a discharge port 3220 provided in the discharge-side nozzle 322 communicates with the concave portion 332 through a through-hole penetrating the side wall 312 in the thickness direction.
  • the terminal mounting portion 35 is arranged at a position different from the position where the suction side nozzle 321 and the discharge side nozzle 322 are connected on the outer surface of the side wall 312 of the main member 31 .
  • the terminal mounting portion 35 has a shape protruding outward from the side wall 312 of the main member 31 .
  • One ends of the driving signal applying electrode 251 and the driving signal applying electrode 252 are placed on the terminal mounting portion 35 .
  • the portions of the driving signal applying electrode 251 and the driving signal applying electrode 252 that are placed on the terminal mounting portion 35 serve as portions for supplying drive signals from the outside.
  • the lid member 40 is a flat plate and is made of metal, for example.
  • the outer shape of the lid member 40 is substantially the same as the inner shape of the side wall 312 of the base housing 30 , that is, the outer shape of the recess 331 .
  • the lid member 40 may be made of a material other than metal as long as it has a higher thermal conductivity than the base housing 30 .
  • the thermal conductivity of the lid member 40 is higher than that of the base housing 30, the entire lid member 40 may not be made of metal and the entire base housing 30 may not be made of resin.
  • the thermal conductivity of the lid member 40 should be higher than that of the base housing 30 .
  • the lid member 40 is entirely made of metal, the heat radiation efficiency is further improved, which is effective.
  • the pump body 20 is fitted into the recess 332 of the base housing 30 .
  • the frame 212 contacts the surface of the concave portion 332 , and the diaphragm 211 and the support portion 213 do not contact the concave portion 332 . That is, a suction-side space 101 is formed between the vibration plate 211 and the support portion 213 and the surface of the recess 331, as shown in FIG.
  • the suction side space 101 corresponds to the "first space" of the present invention.
  • the lid member 40 is fitted into the recess 331 of the base housing 30 .
  • a discharge side space 102 is formed between the lid member 40 and the vibration plate 211 and the support portion 213 of the pump body 20 by adjusting the height of the recess 332. be done.
  • the discharge side space 102 corresponds to the "second space" of the present invention.
  • the pump body 20 is arranged in the internal space of the housing in a state in which the diaphragm 211 can vibrate.
  • the outer wall surface on the suction side space 101 side of the housing is the suction side outer wall surface 130
  • the outer wall surface on the discharge side space 102 side is the discharge side outer wall surface 140 .
  • the piezoelectric body of the piezoelectric element 22 is distorted and the vibration plate 211 undergoes bending vibration.
  • This bending vibration mainly changes the pressure distribution in the suction-side space 101 .
  • fluid for example, air
  • the fluid that has flowed into the suction side space 101 is conveyed to the discharge side space 102 through the communication port 103 between the support portions 213 .
  • the fluid conveyed to the ejection-side space 102 is carried out to the ejection port 3220 of the ejection-side nozzle 322 and ejected to the outside.
  • the driving of the piezoelectric element 22 causes the piezoelectric element 22 to generate heat, and the temperature of the internal space of the housing rises.
  • the temperature of the discharge side space 102 on the downstream side in the fluid transport direction is likely to rise significantly.
  • the piezoelectric pump 10A and the piezoelectric pump 10B are connected by a connection pipe 80.
  • the discharge side nozzle 322A of the piezoelectric pump 10A and the suction side nozzle 321B of the piezoelectric pump 10B are connected by a connection pipe 80.
  • the discharge port of the discharge-side nozzle 322A of the piezoelectric pump 10A and the suction port of the suction-side nozzle 321B of the piezoelectric pump 10B communicate with each other through the cavity of the connection pipe 80 .
  • the piezoelectric pump 10A and the piezoelectric pump 10B are driven.
  • the fluid is sucked into the piezoelectric pump 10A from the suction port of the suction side nozzle 321A of the piezoelectric pump 10A.
  • the piezoelectric pump 10A discharges the sucked fluid to the connection pipe 80 from the discharge port of the discharge-side nozzle 322A of the piezoelectric pump 10A.
  • the fluid discharged to the connecting pipe 80 is sucked into the piezoelectric pump 10B from the suction port of the suction side nozzle 321B of the piezoelectric pump 10B.
  • the piezoelectric pump 10B discharges the sucked fluid to the outside from the discharge port of the discharge-side nozzle 322B of the piezoelectric pump 10B.
  • the fluid is transported by the piezoelectric pump 10A and the piezoelectric pump 10B, so a larger flow rate and pressure can be achieved than when the piezoelectric pump 10A or the piezoelectric pump 10B is used alone.
  • piezoelectric pump 10A and piezoelectric pump 10B are arranged such that suction-side outer wall surface 130A of piezoelectric pump 10A and suction-side outer wall surface 130B of piezoelectric pump 10B face each other. be done. More specifically, the piezoelectric pump 10A and the piezoelectric pump 10B are such that the suction-side outer wall surface 130A of the piezoelectric pump 10A and the suction-side outer wall surface 130B of the piezoelectric pump 10B face each other, are close to each other, and are substantially parallel to each other. are placed so that
  • the piezoelectric pump 10A is arranged so that the discharge-side outer wall surface 140A faces the side opposite to the piezoelectric pump 10B side.
  • the piezoelectric pump 10B is arranged such that the discharge-side outer wall surface 140B faces the side opposite to the piezoelectric pump 10A side.
  • the temperature of the discharge side space 102 of the piezoelectric pumps 10A and 10B is likely to rise. Therefore, by using the arrangement of the piezoelectric pump 10A and the piezoelectric pump 10B as described above, even when the piezoelectric pump 10A and the piezoelectric pump 10B face each other closely, the locations where the temperature is likely to rise can can be prevented. Further, the outer wall surfaces (discharge-side outer wall surfaces 140A and 140B) of the piezoelectric pumps 10A and 10B where the temperature is likely to rise are the structures of the pump device 1 (the piezoelectric pumps 10A and 10B, and the connecting pipe 80). ).
  • the pump device 1 is less likely to trap heat and can achieve effective heat dissipation. Furthermore, in this configuration, since the cover member 40 is made of metal, the heat in the discharge side space 102 of the piezoelectric pumps 10A and 10B is effectively transmitted to the outer wall surface on the discharge side through the cover member 40 . Therefore, the heat in the discharge side space 102 is more effectively radiated to the outside.
  • the piezoelectric pump 10A and the piezoelectric pump 10B are not arranged so that the discharge side nozzle and the suction side nozzle face each other. Therefore, the pump device 1 does not have a shape that is significantly elongated in one direction, but has a spatially compact shape, so that the pump device 1 can be space-saving.
  • a spatially consistent shape means that the difference in dimensions in three orthogonal directions is small.
  • connection pipe 80 is metal. As a result, heat can be dissipated in the connection pipe 80 as well. Therefore, the pump device 1 can dissipate heat more effectively.
  • FIG. 4 is a side view showing the configuration of the pump device according to the second embodiment.
  • the pump device 1A according to the second embodiment differs from the pump device 1 according to the first embodiment in that a heat conducting member 70 is added.
  • the rest of the configuration of the pump device 1A is the same as that of the pump device 1, and therefore the description of the similar portions will be omitted.
  • the pump device 1A includes a heat conducting member 70.
  • the heat conducting member 70 is, for example, a metal plate.
  • the heat conducting member 70 is arranged between the piezoelectric pump 10A and the piezoelectric pump 10B. More specifically, the heat conducting member 70 is sandwiched between the suction-side outer wall surface 130A of the piezoelectric pump 10A and the suction-side outer wall surface 130B of the piezoelectric pump 10B.
  • the piezoelectric pump 10A can dissipate heat from the suction side outer wall surface 130A through the heat conducting member 70.
  • the piezoelectric pump 10B can dissipate heat from the intake-side outer wall surface 130B through the heat conducting member 70 .
  • the piezoelectric pump 10A can dissipate heat more effectively.
  • the planar area of the heat conducting member 70 is preferably larger than the planar area of the piezoelectric pumps 10A and 10B. Then, in plan view, the piezoelectric pump 10A and the piezoelectric pump 10B preferably overlap the heat conducting member 70 . This allows the piezoelectric pump 10B to dissipate heat more effectively.
  • the thermal conductivity of the heat conducting member 70 is not limited to metal as long as it is higher than the thermal conductivity of the piezoelectric pumps 10A and 10B. Note that the thermal conductivity of the piezoelectric pumps 10A and 10B here is the thermal conductivity of the base housing 30 that the heat conducting member 70 faces.
  • the heat conducting member 70 is in direct contact with the piezoelectric pump 10A and the piezoelectric pump 10B, but it may be in indirect contact or there may be a gap or the like.
  • thermally conductive grease or adhesive may be used for example.
  • the heat conducting member 70 is preferably shaped and arranged such that the fluid discharged from the discharge-side nozzle 322B of the piezoelectric pump 10B passes through its surface. As a result, the heat conducting member 70 also dissipates heat from the fluid discharged from the pump device 1A.
  • FIG. 5 is a side view showing the configuration of the pump device according to the third embodiment.
  • the pump device 1B according to the third embodiment differs from the pump device 1A according to the second embodiment in the arrangement of the piezoelectric pumps 10A and 10B.
  • the rest of the configuration of the pump device 1B is the same as that of the pump device 1A, and the description of the similar portions will be omitted.
  • the piezoelectric pump 10A and the piezoelectric pump 10B are arranged so that the discharge-side outer wall surface 140A of the piezoelectric pump 10A and the discharge-side outer wall surface 140B of the piezoelectric pump 10B face each other, are close to each other, and are substantially parallel to each other. , is placed.
  • the heat conducting member 70 is sandwiched between the discharge-side outer wall surface 140A and the discharge-side outer wall surface 140B.
  • the pump device 1B can effectively dissipate heat from the discharge-side outer wall surface 140A and heat from the discharge-side outer wall surface 140B to the outside through the heat conducting member 70.
  • FIG. 6 is a side view showing the configuration of the pump device according to the fourth embodiment.
  • the pump device 1C according to the fourth embodiment differs from the pump device 1 according to the first embodiment in the arrangement of the piezoelectric pumps 10A and 10B.
  • the rest of the configuration of the pump device 1C is the same as that of the pump device 1, and the description of the similar portions will be omitted.
  • the piezoelectric pumps 10A and 10B are not arranged in parallel, but are arranged at a predetermined angle.
  • the suction-side outer wall surface 130A of the piezoelectric pump 10A and the suction-side outer wall surface 130B of the piezoelectric pump 10B form an angle smaller than 90°.
  • the pump device 1C can effectively dissipate heat.
  • FIG. 7 is a side view showing the configuration of the pump device according to the fifth embodiment.
  • the pump device 1D according to the fifth embodiment uses three piezoelectric pumps. different from Other configurations of the pump device 1D are the same as those of the pump devices 1 and 1B, and the description of the same portions will be omitted.
  • the pump device 1D includes a piezoelectric pump 10A, a piezoelectric pump 10B, a piezoelectric pump 10C, a connecting pipe 81, a connecting pipe 82, and a heat conducting member 70.
  • Piezoelectric pump 10A, piezoelectric pump 10B, and piezoelectric pump 10C have the same configuration.
  • the piezoelectric pump 10A and the piezoelectric pump 10B are arranged so that the suction-side outer wall surface 130A of the piezoelectric pump 10A and the suction-side outer wall surface 130B of the piezoelectric pump 10B face each other and are close to each other.
  • the piezoelectric pump 10B and the piezoelectric pump 10C are arranged such that the discharge-side outer wall surface 140B of the piezoelectric pump 10B and the discharge-side outer wall surface 140C of the piezoelectric pump 10C face each other and are close to each other.
  • the piezoelectric pump 10A has a discharge-side outer wall surface 140A exposed to the outside.
  • the piezoelectric pump 10C exposes the suction side outer wall surface 130C to the outside.
  • the discharge side nozzle 322A of the piezoelectric pump 10A and the suction side nozzle 321B of the piezoelectric pump 10B are connected and communicated by a connection pipe 81.
  • a discharge side nozzle 322B of the piezoelectric pump 10B and a suction side nozzle 321C of the piezoelectric pump 10C are connected and communicated by a connecting pipe 82 .
  • the heat conducting member 70 is sandwiched between the discharge-side outer wall surface 140B of the piezoelectric pump 10B and the discharge-side outer wall surface 140C of the piezoelectric pump 10C.
  • the piezoelectric pump 10A, piezoelectric pump 10B, and piezoelectric pump 10C are driven.
  • the fluid is sucked into the piezoelectric pump 10A from the suction port of the suction side nozzle 321A of the piezoelectric pump 10A.
  • the piezoelectric pump 10A discharges the sucked fluid to the connection pipe 81 from the discharge port of the discharge-side nozzle 322A of the piezoelectric pump 10A.
  • the fluid discharged to the connection pipe 81 is sucked into the piezoelectric pump 10B from the suction port of the suction side nozzle 321B of the piezoelectric pump 10B.
  • the piezoelectric pump 10B discharges the sucked fluid to the connection pipe 82 from the discharge port of the discharge-side nozzle 322B of the piezoelectric pump 10B.
  • the fluid discharged to the connection pipe 82 is sucked into the piezoelectric pump 10C from the suction port of the suction side nozzle 321C of the piezoelectric pump 10C.
  • the piezoelectric pump 10C discharges the sucked fluid to the outside from the discharge port of the discharge-side nozzle 322C of the piezoelectric pump 10C.
  • the fluid is transported by the piezoelectric pumps 10A, 10B, and 10C, so that a larger flow rate can be achieved.
  • the pump device 1D does not have a shape that is significantly elongated in one direction, and has a spatially compact shape. 1D space can be saved.
  • the discharge-side outer wall surface 140A and the discharge-side outer wall surface 140B of the piezoelectric pump 10A and the piezoelectric pump 10B are close to each other and do not face each other. Furthermore, in the piezoelectric pump 10B and the piezoelectric pump 10C, the discharge-side outer wall surface 140B and the discharge-side outer wall surface 140C face each other close to each other, but sandwich the heat conducting member 70 therebetween.
  • the pump device 1D can effectively dissipate heat even with a configuration including three piezoelectric pumps 10A, 10B, and 10C.
  • the heat conducting member 70 may also be arranged between the piezoelectric pumps 10A and 10B.
  • the pump device can realize effective heat dissipation even if the number of piezoelectric pumps is four or more.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressor (AREA)
  • Details Of Reciprocating Pumps (AREA)
PCT/JP2022/006291 2021-02-22 2022-02-17 ポンプ装置 Ceased WO2022176932A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2023500911A JP7435894B2 (ja) 2021-02-22 2022-02-17 ポンプ装置
CN202280011179.3A CN116745524A (zh) 2021-02-22 2022-02-17 泵装置
US18/365,342 US12467447B2 (en) 2021-02-22 2023-08-04 First and second piezoelectric pumps and connection pipe arrangement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-025858 2021-02-22
JP2021025858 2021-02-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/365,342 Continuation US12467447B2 (en) 2021-02-22 2023-08-04 First and second piezoelectric pumps and connection pipe arrangement

Publications (1)

Publication Number Publication Date
WO2022176932A1 true WO2022176932A1 (ja) 2022-08-25

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Application Number Title Priority Date Filing Date
PCT/JP2022/006291 Ceased WO2022176932A1 (ja) 2021-02-22 2022-02-17 ポンプ装置

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US (1) US12467447B2 (https=)
JP (1) JP7435894B2 (https=)
CN (1) CN116745524A (https=)
WO (1) WO2022176932A1 (https=)

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CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置

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JPH07301182A (ja) * 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
JP2006336641A (ja) * 2005-05-02 2006-12-14 Sony Corp 噴流発生装置及び電子機器
JP2016200067A (ja) * 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア

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WO2024195204A1 (ja) * 2023-03-20 2024-09-26 株式会社村田製作所 流体制御装置

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