WO2022110353A1 - Mems陀螺仪 - Google Patents

Mems陀螺仪 Download PDF

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Publication number
WO2022110353A1
WO2022110353A1 PCT/CN2020/136721 CN2020136721W WO2022110353A1 WO 2022110353 A1 WO2022110353 A1 WO 2022110353A1 CN 2020136721 W CN2020136721 W CN 2020136721W WO 2022110353 A1 WO2022110353 A1 WO 2022110353A1
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WIPO (PCT)
Prior art keywords
transducer
coupling
mems gyroscope
mass
elastic
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Ceased
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PCT/CN2020/136721
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English (en)
French (fr)
Inventor
占瞻
马昭
阚枭
杨珊
李杨
谭秋喻
洪燕
黎家健
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AAC Technologies Holdings Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
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Application filed by AAC Acoustic Technologies Shenzhen Co Ltd, AAC Technologies Holdings Nanjing Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Publication of WO2022110353A1 publication Critical patent/WO2022110353A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure

Definitions

  • the invention belongs to the technical field of gyroscopes, and particularly relates to a MEMS gyroscope.
  • Micromachined gyroscope or MEMS (Micro Electro Mechanical systems) gyroscope is a typical angular velocity micro-sensor, which has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.
  • MEMS Micro Electro Mechanical systems
  • MEMS gyroscopes can be divided into two types: linear vibration tuning fork gyroscopes and disc gyroscopes.
  • disc gyroscopes have degenerate driving mode and detection mode modes, high sensitivity, and simple structure. Gradually become a more widely used high-performance gyroscope.
  • the disc-shaped gyroscope is limited in structure and space layout, such as the patent of the traditional Disc gyroscope with the patent number of US7581443B2, and referring to the normalized displacement diagram of the traditional Dsic gyroscope in FIG. 4, some areas are not or less Involved in vibration and sensitivity, the chip area usage rate is low, resulting in low sensitivity and low bias stability, which affects its detection performance.
  • the purpose of the present invention is to provide a MEMS gyroscope, which can improve the area utilization rate of the chip area, increase the sensitivity, improve the bias stability, improve its detection performance, and reduce mechanical noise.
  • a MEMS gyroscope comprising a ring structure, a first coupling structure connected to the ring structure, a mass connected to the first coupling structure away from the end of the ring structure, and the An anchor point to which the mass blocks are connected, a second coupling structure connected between the adjacent mass blocks, and a transducer assembly connected to the annular structure and the mass blocks
  • the MEMS gyroscope includes 4N windings
  • the center of the annular structure is equiangularly arranged and has the same size of the mass block, N is an integer greater than or equal to 2
  • the mass block includes a main body connected with the first coupling structure and a receiving groove is opened inside or on the side and the connection
  • the anchor point is arranged in the receiving groove and connected with the elastic structure.
  • the elastic structure includes a motion decoupling block accommodated in the accommodating groove and spaced from the main body, a first beam connected to the motion decoupling block at one end and connected to the main body at the other end structure, and a second beam structure having one end connected to the motion decoupling block and the other end connected to the anchor point.
  • the accommodating groove includes a main groove in the middle and an elastic groove extending from the main groove to one side, the motion decoupling block is accommodated in the main groove, and the middle part of the first beam structure has A first curved structure extending into the elastic groove.
  • an elastic gap is formed between the anchor point and the inner wall of the receiving groove, and the middle portion of the second beam structure has a second bending structure extending into the elastic gap.
  • connection gap is formed in the middle part of the mass block near the annular structure side, and the first coupling structure includes a connecting bar with one end connected to the annular structure and the other end extending into the connecting gap, and one end.
  • the third beam structure is connected to the connecting bar and the other end is connected to the side wall of the connecting notch.
  • the connecting bar is symmetrically connected with two third beam structures, and the third beam structure includes a first connecting arm extending from the end of the connecting bar away from the annular structure toward one side, An elastic arm formed by one end of the first connecting arm bent and extended toward the annular structure and a second connecting arm bent and extended from one side of the elastic arm and connected with the side wall of the connecting notch.
  • a coupling gap is provided on one side of the mass block, and the second coupling structure includes a coupling beam accommodated in the coupling gap and a coupling beam with one end connected to the coupling beam and the other end connected to the coupling gap.
  • the fourth beam structure of the inner wall is provided on one side of the mass block, and the second coupling structure includes a coupling beam accommodated in the coupling gap and a coupling beam with one end connected to the coupling beam and the other end connected to the coupling gap.
  • the middle portion of the fourth beam structure has a third curved structure.
  • the mass is located inside or outside the annular structure.
  • the annular structure includes a plurality of annular members arranged coaxially and spaced in sequence from the inside to the outside, and spokes connected between the adjacent annular members.
  • the transducer assembly includes 4N first transducers arranged around the outer side of the annular structure and second transducers arranged inside the annular structure and located on the mass block, the first transducer A transducer is arranged in a one-to-one correspondence with the second transducer.
  • the first transducer includes any one or a combination of any of a capacitive transducer, an inductive transducer, a pyroelectric transducer, and a piezoelectric transducer
  • the second transducer It includes any one or a combination of any of capacitive transducers, inductive transducers, pyroelectric transducers, and piezoelectric transducers.
  • the principle of the present invention is:
  • the mass blocks are related through the second coupling structure, which constitutes a tuning fork gyro with linear vibration, which is sensitive to angular velocity.
  • a ring gyro connected to the tuning fork gyro is formed; and the MEMS gyro of this solution has two vibration modes with the same mode shape, the first mode is the mode shape along 0°/90°, which is called the driving mode ; The second mode is the mode shape along 45°/135°, called the detection mode.
  • the MEMS gyroscope is driven to drive the vibration of the mode shape.
  • the angular velocity ⁇ will generate a Coriolis force along the direction of 45°/135°
  • the resultant force will force the MEMS gyroscope to generate vibration to detect the mode shape.
  • the angular velocity ⁇ can be obtained.
  • the ring gyroscope composed of the ring structure and the tuning fork gyroscope composed of the mass block adopt a conformal driving mode and detection mode. Therefore, the motion decoupling of the driving mode and the detection mode of the linear vibration tuning fork gyroscope can reduce the non-moving mass
  • the displacement of the block reduces the quadrature error and is beneficial to the bias stability of the sensor;
  • the mass block is arranged in the original idle anchor point area of the ring gyroscope, and replaces the vibration area of the ring gyroscope with small displacement. Due to the translational characteristics of the linear vibration tuning fork gyroscope, the mass block has a large displacement. Therefore, the driving mode of the MEMS gyroscope Compared with the detection mode, it has a larger modal quality, which can reduce the mechanical noise of the MEMS resonator, which is beneficial to the bias stability of the sensor;
  • a linear vibrating tuning fork gyro is formed between the mass blocks, which is sensitive to angular velocity. Therefore, the new solution greatly improves the area utilization rate of the chip, has a larger Coriolis force, greatly improves the area utilization rate of the chip, and increases the sensitivity of the sensor;
  • the ring gyroscope and tuning fork gyroscope are related to the coupling beams between several masses and the ring structure to form a multi-level coupling driving mode and detection mode, which enhances the maximum displacement of the sensor, increases the Coriolis force, and improves the sensitivity of the gyro. This further benefits the bias stability of the sensor.
  • Fig. 1 is the top-view structure schematic diagram of the MEMS gyroscope in Embodiment 1 of the present invention
  • FIG. 2 is a schematic diagram of the state of the MEMS gyroscope in the driving mode in Embodiment 1 of the present invention
  • FIG. 3 is a schematic diagram of the state of the MEMS gyroscope in the detection mode in Embodiment 1 of the present invention.
  • Fig. 4 is the normalized displacement comparison table of the MEMS gyroscope and the traditional Disc (disk) gyroscope in Embodiment 1 of the present invention
  • Fig. 5 is the enlarged view of the detail of A part in Fig. 1;
  • Fig. 6 is an enlarged view of the detail of part B in Fig. 5;
  • FIG. 7 is a schematic top-view structural diagram of a MEMS gyroscope in Embodiment 2 of the present invention.
  • FIG. 8 is a schematic diagram of the state of the MEMS gyroscope in the driving mode in Embodiment 2 of the present invention.
  • FIG. 9 is a schematic diagram of the state of the MEMS gyroscope in the detection mode in Embodiment 2 of the present invention.
  • the MEMS gyroscope includes a ring structure 1 , a first coupling structure 2 connected to the ring structure 1 , a mass 3 connected to the first coupling structure 2 away from the end of the ring structure 1 , and a mass block 3 connected to the mass 3 .
  • the anchor point 4, the second coupling structure 5 connected between the adjacent masses 3, and the transducer element 60 connected to the annular structure 1 and the mass 3, the MEMS gyroscope includes 4N equal angles around the center of the annular structure 1
  • the mass blocks 3 arranged with the same size, N is an integer greater than or equal to 2
  • the mass block 3 includes a main body 30 connected to the first coupling structure 2 and having a receiving groove 33 opened therein, and a main body 30 connected to the main body 30 and located in the receiving groove 33
  • the elastic structure 31 , the anchor point 4 is arranged in the receiving groove 33 and connected with the elastic structure 31 .
  • the mass blocks 3 are associated through the second coupling structure 5, which constitutes a tuning fork gyro with linear vibration, and participates in angular velocity sensitivity. They are connected by an elastic structure 31 to form a ring gyro connected to the tuning fork gyro; and, as shown in Figure 2, the MEMS gyro of this solution has two vibration modes with the same mode shape, and the first mode is along 0° The mode shape of /90° is called the driving mode; as shown in Figure 3, the second mode is the mode shape along 45°/135°, which is called the detection mode. Through the external driving force, the MEMS gyroscope is driven to drive the vibration of the mode shape.
  • the angular velocity ⁇ will generate a Coriolis force along the direction of 45°/135°
  • the resultant force will force the MEMS gyroscope to generate vibration to detect the mode shape.
  • the angular velocity ⁇ can be obtained.
  • the ring gyro formed by the ring structure 1 and the tuning fork gyro formed by the mass block 3 adopt a conformal driving mode and detection mode. Therefore, the motion decoupling between the driving mode and the detection mode of the linear vibration tuning fork gyro can reduce the The displacement of the non-moving mass 3 reduces the quadrature error, which is beneficial to the bias stability of the sensor; the guiding of the moving mass 3 presents a unidirectional displacement, and the non-moving mass 3 basically has no displacement, which is conducive to the displacement detection of the tuning fork gyroscope; Block 3 is arranged in the original idle area of the ring gyroscope, and replaces the vibration area of the ring gyroscope with small displacement.
  • the mass block 3 Due to the characteristics of the linear vibration tuning fork gyroscope, the mass block 3 has a large displacement at the same time. Therefore, the driving mode and detection of the MEMS gyroscope The modal has a larger modal mass, which can reduce the mechanical noise of the MEMS resonator, which is beneficial to the bias stability of the sensor; the linear vibration tuning fork gyroscope is formed between the mass blocks 3, which is sensitive to the angular velocity.
  • the new solution has more The large Coriolis force greatly improves the area utilization rate of the chip and increases the sensitivity of the sensor; with reference to Figure 5, the ring gyro and the tuning fork gyro are associated with the associated coupling beam 51 between the ring structure 1 through several masses, forming a multi-level coupling
  • the driving mode and detection mode, the driving mode mass Md and the detection mode mass Ms can be expressed as: , therefore, the gyroscope of this scheme has a larger modal quality, and the MEMS mechanical noise equivalent angular velocity of the detection mode can be expressed as: , therefore, the gyroscope of this solution has a small noise output, so that the maximum displacement of the sensor is enhanced, the Coriolis force is increased, the sensitivity of the gyroscope is improved, and the bias stability of the sensor is further improved.
  • the elastic structure 31 includes a motion decoupling block 311 accommodated in the receiving groove 33 and spaced apart from the main body 30 , a first beam structure 22 having one end connected to the motion decoupling block 311 and the other end connected to the main body 30 , and one end connected to the main body 30 .
  • the other end of the motion decoupling block 311 is connected to the second beam structure 312 of the anchor point 4 .
  • the receiving slot 33 includes a main slot 331 in the middle and an elastic slot 332 extending from the main slot 331 to one side.
  • the motion decoupling block 311 is accommodated in the main slot 331 .
  • the accommodating groove 33, the elastic structure 31 and the anchor point 4 are all symmetrical structures with the central axis of the corresponding mass block 3 as the symmetry axis; the width of the main groove 331 near the end of the annular structure 1 is larger than that of the main groove 331
  • the end of the motion decoupling block 311 is accommodated at the end of the main groove 331 away from the ring structure 1, and the width of the anchor point 4 is smaller than that of
  • a second beam structure 313 is connected to both sides of the anchor point 4, one end of the second beam structure 313 is connected to the end of the anchor point 4 near the motion decoupling block 311, and the other end of the second beam structure 313 Connected to the head of the motion decoupling block 311, the second curved structure 3131 of the second beam structure 313 extends into the elastic gap 10 toward the ring structure 1; both sides of the part of the main groove 331 away from the ring structure 1 extend outwards
  • Two elastic grooves 332 are formed, and two first beam structures 312 are provided on both sides of the tail of the motion decoupling block 311. Therefore, the four first beam structures 312 are in one-to-one correspondence with the four elastic grooves 332.
  • the first beam structure One end of the 312 is connected to the tail of the motion decoupling block 311 and the other end is connected to the inner wall of the corresponding elastic groove 332 near the motion decoupling block 311 .
  • the motion decoupling block 311 and the mass block 3 are connected through the first beam structure 312, and the first beam structure 312 is an elastic structure 31. Therefore, the motion decoupling block 311 and the mass block 3 can be connected under the condition of ensuring the stability of the connection.
  • Relative displacement can be generated between the motion decoupling block 311 and the mass block 3, and the motion decoupling block 311 and the anchor point 4 are connected by the first beam structure 312, which is the elastic structure 31, so it can be guaranteed Under the condition of the stability of the connection between the motion decoupling block 311 and the anchor point 4, relative displacement can be generated between the motion decoupling block 311 and the anchor point 4.
  • the mass block 3 and the anchor point 4 The connection stability can be maintained, and a larger relative displacement range can be obtained between the mass 3 and the anchor point 4 .
  • a connection gap 32 is provided in the middle of the mass block 3 close to the side of the annular structure 1, and the first coupling structure 2 includes a connecting bar 21 with one end connected to the annular structure 1 and the other end extending into the connecting gap 32, and One end is connected to the connecting bar 21 and the other end is connected to the third beam structure 22 of the side wall of the connecting gap 32; the connecting bar 21 is symmetrically connected with two third beam structures 22, and the third beam structure 22 includes A first connecting arm 221 extending from one end of the annular structure 1 to one side, an elastic arm 222 bent and extending from one end of the first connecting arm 221 toward the annular structure 1 , and a side bent and extended from the elastic arm 222 and connected to the side of the connecting notch 32 .
  • the second connecting arm 223 is connected to the wall.
  • the mass blocks 3 have 8 blocks, that is, N is taken as 2, the mass blocks 3 are fan-shaped, and all the mass blocks 3 in the area of the annular structure 1 form a mosaic structure under the condition of no external force, that is, Each mass block 3 is combined into a circle, so the mass block 3 can make full use of the area in the annular structure 1; The blocks 3 are combined together to form a ring.
  • both the connection gap 32 and the second coupling structure 5 are symmetrical with respect to the center line of the corresponding mass block 3, and both sides of the connecting bar 21 are respectively connected to the inner wall of the connection gap 32 through a third beam structure 22, Therefore, the mass block 3 and the annular structure 1 can be elastically connected, so that the mass block 3 and the annular structure 1 can generate relative displacement under the condition of ensuring the connection stability, and improve the sensitivity.
  • the second coupling structure 5 includes a coupling beam 51 accommodated in the coupling gap 34 and a fourth beam structure having one end connected to the coupling beam 51 and the other end connected to the inner wall of the coupling gap 34 52; the middle of the fourth beam structure 52 has a third bending structure 521.
  • the mass blocks 3 can be arranged on the inner side or the outer side of the annular structure 1. In this embodiment, the mass blocks 1 are arranged inside the annular structure 1. Specifically, the distances from the coupling notch 34 opened on each mass block 3 to the center of the annular structure 1 are the same.
  • the coupling gaps 34 of the adjacent mass blocks 3 are combined into a symmetrical hole structure, the coupling beam 51 is accommodated in the corresponding coupling gap 34, and the two ends of the coupling beam 51 pass through the fourth beam structure 52 and the corresponding coupling gap respectively. 34.
  • the third bending structure 521 makes the fourth beam structure 52 have elasticity.
  • the second coupling structure 5 can ensure the connection stability between the adjacent mass blocks 3, and can generate relative displacement between the adjacent mass blocks 3 within a certain range.
  • the annular structure 1 includes a plurality of annular members 11 arranged coaxially and sequentially spaced from the inside to the outside, and spokes 12 connected between adjacent annular members 11 .
  • the transducer assembly 60 includes 4N first transducers 6 arranged around the outside of the annular structure 1 and a second transducer 7 arranged inside the annular structure 1 and located on the mass 3 .
  • the first transducers 6 are connected to the second transducer 7 .
  • the two transducers 7 are arranged in a one-to-one correspondence.
  • the second transducers 7 are symmetrically arranged in the corresponding mass blocks 3 and on the side of the elastic structure 31 close to the annular structure 1 .
  • the transducer 6 has a symmetrical structure and the axis of symmetry is the centerline of the corresponding mass 3 .
  • the first transducer 6 includes any one or any combination of capacitive transducers, inductive transducers, pyroelectric transducers, and piezoelectric transducers
  • the second transducer 7 includes a capacitive transducer , any one or any combination of inductive transducers, thermoelectric transducers, and piezoelectric transducers. Transducers in several planes can realize the coupling of mechanical fields (including mechanical forces, mechanical displacements) and electric fields in the plane of the structure.
  • Embodiment 2 is a diagrammatic representation of Embodiment 1:
  • N is 3, that is, the mass block 3 has 12 blocks.
  • the vibration mode of the MEMS gyroscope is shown in FIG. 8 , and the detection mode is as follows: shown in Figure 9.
  • N may take 4, 5, 6, etc., bringing the number of mass blocks to 16, 20, 24, and so on.

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Abstract

一种MEMS陀螺仪，包括环形结构（1）、连接于环形结构（1）的第一耦合结构（2）、连接于第一耦合结构（2）的质量块（3）、与质量块（3）相连的锚点（4）、连接于相邻的质量块（3）之间的第二耦合结构（5）及连接于环形结构（1）和质量块（3）的换能组件（60），该MEMS陀螺仪包括4N个绕环形结构（1）的中心等角度排布的质量块（3），N为大于等于2的整数，质量块（3）包括与第一耦合结构（2）相连且开设有收容槽（33）的主体（30）及连接于主体（30）且位于收容槽（33）内的弹性结构（31），锚点（4）设置于收容槽（33）内且与弹性结构（31）相连。该MEMS陀螺仪能够提高芯片区域的面积使用率，增加灵敏度，提高偏置稳定性，提升检测性能，降低机械噪声。

Description

MEMS陀螺仪 技术领域
本发明属于陀螺仪技术领域，尤其涉及MEMS陀螺仪。
 背景技术
微机械陀螺仪，即MEMS(Micro Electro Mechanical systems)陀螺仪，是一种典型的角速度微传感器，由于其尺寸小、功耗低和加工方便等优势在消费电子市场有着非常广泛的应用。近年来随着MEMS陀螺仪性能的逐步提升，广泛应用于汽车、工业、虚拟现实等领域。
MEMS陀螺仪可分为线振动音叉型陀螺仪和圆盘形陀螺仪两类，其中，圆盘形陀螺仪的驱动模态振型和检测模态振型简并,灵敏度高，且结构简单，逐步成为实用较为广泛的高性能陀螺仪。但是，圆盘形陀螺仪受限于结构和空间布局，如专利号为US7581443B2的传统Disc陀螺的专利，并参见附图4中传统Dsic陀螺的归一化位移图，一些区域并未或较少参与振动和敏感，芯片面积使用率低，导致灵敏度低、而且偏置稳定性不高，影响其检测性能。
 技术问题
本发明的目的在于提供一种MEMS陀螺仪，能够提高芯片区域的面积使用率，增加灵敏度，提高偏置稳定性，提升其检测性能，降低机械噪声。
 技术解决方案
本发明的技术方案如下：一种MEMS陀螺仪，包括环形结构、连接于所述环形结构的第一耦合结构、连接于所述第一耦合结构的远离所述环形结构端的质量块、与所述质量块相连的锚点、连接于相邻的所述质量块之间的第二耦合结构及连接于所述环形结构和所述质量块的换能组件，所述MEMS陀螺仪包括4N个绕所述环形结构的中心等角度排布且尺寸相同的所述质量块，N为大于等于2的整数，所述质量块包括与第一耦合结构相连且内部或侧部开设有收容槽的主体及连接于所述主体且位于所述收容槽内的弹性结构，所述锚点设置于所述收容槽内且与所述弹性结构相连。
进一步地，所述弹性结构包括容置于所述收容槽内且与所述主体间隔设置的运动解耦块、一端连接于所述运动解耦块且另一端连接于所述主体的第一梁结构、以及一端连接于所述运动解耦块且另一端连接于所述锚点的第二梁结构。
进一步地，所述收容槽包括位于中部的主槽及自所述主槽朝一侧延伸形成的弹力槽，所述运动解耦块收容于所述主槽内，所述第一梁结构的中部具有伸入所述弹力槽内的第一弯曲结构。
进一步地，所述锚点和所述收容槽的内壁之间形成弹性间隙，所述第二梁结构的中部具有伸入所述弹性间隙内的第二弯曲结构。
进一步地，所述质量块的靠近所述环形结构侧的中部开设连接缺口，所述第一耦合结构包括一端连接于所述环形结构且另一端伸入所述连接缺口内的连接条、及一端连接于所述连接条且另一端连接于所述连接缺口的侧壁的第三梁结构。
进一步地，所述连接条对称地连接有两所述第三梁结构，所述第三梁结构包括自所述连接条的远离所述环形结构端朝一侧延伸出的第一连接臂、自所述第一连接臂的一端朝所述环形结构弯曲延伸形成的弹性臂及自所述弹性臂一侧弯曲延伸并与所述连接缺口的侧壁相连的第二连接臂。
进一步地，所述质量块的一侧开设耦合缺口，所述第二耦合结构包括容置于所述耦合缺口内的耦合梁及一端连接于所述耦合梁且另一端连接于所述耦合缺口的内壁的第四梁结构。
进一步地，所述第四梁结构的中部具有第三弯曲结构。
进一步地，所述质量块位于所述环形结构的内侧或外侧。
进一步地，所述环形结构包括同轴设置且自内而外依次间隔排布的若干环形件以及连接于相邻的所述环形件之间的辐条。
进一步地，所述换能组件包括环绕设置于所述环形结构外侧的4N个第一换能器和设置于所述环形结构内侧且位于所述质量块上的第二换能器，所述第一换能器与所述第二换能器一一对应设置。
进一步地，所述第一换能器包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合，所述第二换能器包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合。
本发明的原理在于：
质量块之间通过第二耦合结构关联，构成了线振动的音叉陀螺，参与角速度敏感，环形结构和质量块之间通过第一耦合结构关联，且质量块和锚点之间通过弹性结构相连，构成了与音叉陀螺相连的环形陀螺；并且，本方案的MEMS陀螺仪拥有两个振型相同的振动模态，第一个模态为沿0°/90°的振型，称为驱动模态；第二个模态为沿45°/135°的振型，称为检测模态。通过外部驱动力，驱动MEMS陀螺仪以驱动模态振型的振动，此时，当MEMS陀螺仪受到外界角速度ω，根据哥氏原理，角速度ω将产生沿45°/135°方向的哥氏力合力，而哥氏力合力会迫使MEMS陀螺仪产生以检测模态振型的振动，最终，通过检测MEMS陀螺仪沿45°/135°方向的振动位移，可获取角速度ω大小。
 有益效果
本发明的有益效果在于：
1、环形结构构成的环形陀螺和质量块构成的音叉陀螺采用共形的驱动模态与检测模态，因而，线振动音叉陀螺驱动模态与检测模态的运动解耦，可以降低非运动质量块的位移，降低正交误差，有利于传感器的偏置稳定性；
2、质量块布置于环形陀螺原本闲置的锚点区域，且替换环形陀螺小位移的振动区域，由于线振动音叉陀螺平动的特点，质量块拥有大位移，所以，MEMS陀螺仪的驱动模态与检测模态拥有更大的模态质量，可以降低MEMS谐振器的机械噪声，有利于传感器的偏置稳定性；
3、质量块间构成了线振动音叉陀螺，参与角速度敏感，因此，新方案极大提升了芯片的面积使用率，拥有更大的哥氏力，极大提升了芯片的面积使用率，增加了传感器的灵敏度；
4、环形陀螺和音叉陀螺通过若干质量与环形结构间关联耦合梁关联，形成多级耦合的驱动模态与检测模态，增强传感器的最大位移，提升了哥氏力大小，提升了陀螺灵敏度，进一步有利于传感器的偏置稳定性。
 附图说明
图1为本发明实施例1中MEMS陀螺仪的俯视结构示意图；
图2为本发明实施例1中MEMS陀螺仪在驱动模态时的状态示意图；
图3为本发明实施例1中MEMS陀螺仪在检测模态时的状态示意图；
图4为本发明实施例1中MEMS陀螺仪与传统Disc（圆盘）陀螺的归一化位移对比表；
图5为图1中A部细节的放大图；
图6为图5中B部细节的放大图；
图7为本发明实施例2中MEMS陀螺仪的俯视结构示意图；
图8为本发明实施例2中MEMS陀螺仪在驱动模态时的状态示意图；
图9为本发明实施例2中MEMS陀螺仪在检测模态时的状态示意图。
 本发明的实施方式
下面结合附图和实施方式对本发明作进一步说明。
实施例1：
如图1所示，MEMS陀螺仪，包括环形结构1、连接于环形结构1的第一耦合结构2、连接于第一耦合结构2的远离环形结构1端的质量块3、与质量块3相连的锚点4、连接于相邻的质量块3之间的第二耦合结构5及连接于环形结构1和质量块3的换能组件60， MEMS陀螺仪包括4N个绕环形结构1的中心等角度排布且尺寸相同的质量块3，N为大于等于2的整数，质量块3包括与第一耦合结构2相连且内部开设有收容槽33的主体30及连接于主体30且位于收容槽33内的弹性结构31，锚点4设置于收容槽33内且与弹性结构31相连。
质量块3之间通过第二耦合结构5关联，构成了线振动的音叉陀螺，参与角速度敏感，环形结构1和质量块3之间通过第一耦合结构2关联，且质量块3和锚点4之间通过弹性结构31相连，构成了与音叉陀螺相连的环形陀螺；并且，如图2，本方案的MEMS陀螺仪拥有两个振型相同的振动模态，第一个模态为沿0°/90°的振型，称为驱动模态；如图3，第二个模态为沿45°/135°的振型，称为检测模态。通过外部驱动力，驱动MEMS陀螺仪以驱动模态振型的振动，此时，当MEMS陀螺仪受到外界角速度ω，根据哥氏原理，角速度ω将产生沿45°/135°方向的哥氏力合力，而哥氏力合力会迫使MEMS陀螺仪产生以检测模态振型的振动，最终，通过检测MEMS陀螺仪沿45°/135°方向的振动位移，可获取角速度ω大小。
本方案中环形结构1构成的环形陀螺和质量块3构成的音叉陀螺采用共形的驱动模态与检测模态，因而，线振动音叉陀螺驱动模态与检测模态的运动解耦，可以降低非运动质量块3的位移，降低正交误差，有利于传感器的偏置稳定性；运动质量块3导向呈现单方向位移，且非运动质量块3基本无位移，利于音叉陀螺的位移检测；质量块3布置于环形陀螺原本闲置的区域，且替换环形陀螺小位移的振动区域，由于线振动音叉陀螺平动的特点，质量块3同时拥有大位移，所以，MEMS陀螺仪的驱动模态与检测模态拥有更大的模态质量，可以降低MEMS谐振器的机械噪声，有利于传感器的偏置稳定性；质量块3间构成了线振动音叉陀螺，参与角速度敏感，因此，新方案的拥有更大的哥氏力，极大提升了芯片的面积使用率，增加了传感器的灵敏度；结合图5，环形陀螺和音叉陀螺通过若干质量与环形结构1间关联耦合梁51关联，形成多级耦合的驱动模态与检测模态，驱动模态质量Md以及检测模态质量Ms可以表示为：
Figure dest_path_image001
，因此，本方案的陀螺仪具有更大的模态质量，检测模态的MEMS机械噪声等效角速度可以表示为：
Figure dest_path_image002
，因此，本方案的陀螺仪具有小的噪声输出，这样，增强传感器的最大位移，提升了哥氏力大小，提升了陀螺灵敏度，进一步有利于传感器的偏置稳定性。
弹性结构31包括容置于收容槽33内且与主体30间隔设置的运动解耦块311、一端连接于运动解耦块311且另一端连接于主体30的第一梁结构22、以及一端连接于运动解耦块311且另一端连接于锚点4的第二梁结构312。收容槽33包括位于中部的主槽331及自主槽331朝一侧延伸形成的弹力槽332，运动解耦块311收容于主槽331内，第一梁结构312的中部具有伸入弹力槽332内的第一弯曲结构3121；锚点4和收容槽33的内壁之间形成弹性间隙10，第二梁结构313的中部具有伸入弹性间隙10内的第二弯曲结构3131。具体的，在本实施例中，收容槽33、弹性结构31和锚点4均为以对应的质量块3的中心轴为对称轴的对称结构；主槽331的靠近环形结构1端的宽度大于主槽331的远离环形结构1端的宽度，锚点4容置于主槽331的靠近环形结构1端，运动解耦块311呈T形结构，运动解耦块311的头部容置于主槽331的靠近环形结构1端且位于锚点4的远离环形结构1侧，运动解耦块311的尾部容置于主槽331的远离环形结构1端，锚点4的宽度小于运动解耦块311头部的宽度，锚点4的两侧分别连接有一第二梁结构313，第二梁结构313的一端连接于锚点4一侧的靠近运动解耦块311端，第二梁结构313的另一端连接于运动解耦块311的头部，第二梁结构313的第二弯曲结构3131朝环形结构1方向伸入弹性间隙10内；主槽331远离环形结构1的部分的两侧均朝外延伸形成两弹力槽332，并且，运动解耦块311的尾部的两侧均设置两第一梁结构312，因此，四个第一梁结构312与四个弹力槽332一一对应，第一梁结构312的一端连接于运动解耦块311的尾部且另一端连接于对应的弹力槽332的内壁的靠近运动解耦块311处。运动解耦块311和质量块3之间通过第一梁结构312相连，第一梁结构312为弹性结构31，因此，可以在保证运动解耦块311与质量块3连接稳定性的条件下使运动解耦块311和质量块3之间能够产生相对位移，运动解耦块311和锚点4之间通过第一梁结构312相连，第一梁结构312为弹性结构31，因此，可以在保证运动解耦块311与锚点4连接稳定性的条件下使运动解耦块311和锚点4之间能够产生相对位移，综上，在弹性结构31的作用下，质量块3和锚点4之间可以保持连接稳定性，并且，质量块3和锚点4之间可以获得较大的相对位移范围。
结合图5和图6，质量块3的靠近环形结构1侧的中部开设连接缺口32，第一耦合结构2包括一端连接于环形结构1且另一端伸入连接缺口32内的连接条21、及一端连接于连接条21且另一端连接于连接缺口32的侧壁的第三梁结构22；连接条21对称地连接有两第三梁结构22，第三梁结构22包括自连接条21的远离环形结构1端朝一侧延伸出的第一连接臂221、自第一连接臂221的一端朝环形结构1弯曲延伸形成的弹性臂222及自弹性臂222一侧弯曲延伸并与连接缺口32的侧壁相连的第二连接臂223。具体的，在本实施中，质量块3具有8块，即N取2，质量块3呈扇形，且在不受外力的情况下所有质量块3在环形结构1内的区域形成镶嵌结构，即各质量块3共同组合成一个圆形，因此，质量块3可以充分利用环形结构1内的面积；在一些实施例中，质量块3的靠近环形结构1中心端可以具有扇形缺口，使得各质量块3共同组合成一个环形。在本实施例中，连接缺口32和第二耦合结构5均相对于对应的质量块3的中心线对称，连接条21的两侧分别通过一第三梁结构22与连接缺口32的内壁相连，因此，可以使质量块3和环形结构1之间为弹性连接方式，从而使质量块3和环形结构1可以在保证连接稳定性的条件下产生相对位移，提高灵敏性。
质量块3的一侧开设耦合缺口34，第二耦合结构5包括容置于耦合缺口34内的耦合梁51及一端连接于耦合梁51且另一端连接于耦合缺口34的内壁的第四梁结构52；第四梁结构52的中部具有第三弯曲结构521。质量块3可以设置于环形结构1的内侧或者外侧，本实施例中质量块1设置于环形结构1的内侧，具体的，各质量块3上开设的耦合缺口34到环形结构1中心的距离相同，相邻的质量块3的耦合缺口34组合成对称的孔结构，耦合梁51容置于对应的耦合缺口34内，并且耦合梁51的两端分别通过第四梁结构52与对应的耦合缺口34，第三弯曲结构521使得第四梁结构52具有弹性。通过第二耦合结构5可以保证相邻的质量块3之间的连接稳定性，并且使相邻的质量块3之间可以在一定范围内产生相对位移。
环形结构1包括同轴设置且自内而外依次间隔排布的若干环形件11以及连接于相邻的环形件11之间的辐条12。
换能组件60包括环绕设置于环形结构1外侧的4N个第一换能器6和设置于环形结构1内侧且位于质量块3上的第二换能器7，第一换能器6与第二换能器7一一对应设置。具体的，第二换能器7对称地设置于对应的质量块3内并且位于弹性结构31的靠近环形结构1侧，第一换能器6与各质量块3也一一对应设置，第一换能器6为对称结构且对称轴为对应的质量块3的中心线。第一换能器6包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合，第二换能器7包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合。若干面内的换能器可以实现结构平面内的机械场（包括机械力、机械位移）与电场的耦合。
实施例2:
如图7所示，与实施例1的不同点在于，本实施例中N取3，即质量块3具有12块，此时MEMS陀螺仪的振动模态为图8所示，检测模态如图9所示。在一些实施例中，N可以取4、5、6等等，从而使质量块的数量达到16、20、24块等等。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (12)

  1. 一种MEMS陀螺仪，包括环形结构、连接于所述环形结构的第一耦合结构、连接于所述第一耦合结构的远离所述环形结构端的质量块、与所述质量块相连的锚点、连接于相邻的所述质量块之间的第二耦合结构及连接于所述环形结构和所述质量块的换能组件，其特征在于，所述MEMS陀螺仪包括4N个绕所述环形结构的中心等角度排布且尺寸相同的所述质量块，N为大于等于2的整数，所述质量块包括与第一耦合结构相连且内部或侧部开设有收容槽的主体及连接于所述主体且位于所述收容槽内的弹性结构，所述锚点设置于所述收容槽内且与所述弹性结构相连。
  2. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述弹性结构包括容置于所述收容槽内且与所述主体间隔设置的运动解耦块、一端连接于所述运动解耦块且另一端连接于所述主体的第一梁结构、以及一端连接于所述运动解耦块且另一端连接于所述锚点的第二梁结构。
  3. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述收容槽包括位于中部的主槽及自所述主槽朝一侧延伸形成的弹力槽，所述运动解耦块收容于所述主槽内，所述第一梁结构的中部具有伸入所述弹力槽内的第一弯曲结构。
  4. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述锚点和所述收容槽的内壁之间形成弹性间隙，所述第二梁结构的中部具有伸入所述弹性间隙内的第二弯曲结构。
  5. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述质量块的靠近所述环形结构侧的中部开设连接缺口，所述第一耦合结构包括一端连接于所述环形结构且另一端伸入所述连接缺口内的连接条、及一端连接于所述连接条且另一端连接于所述连接缺口的侧壁的第三梁结构。
  6. 根据权利要求5所述的MEMS陀螺仪，其特征在于，所述连接条对称地连接有两所述第三梁结构，所述第三梁结构包括自所述连接条的远离所述环形结构端朝一侧延伸出的第一连接臂、自所述第一连接臂的一端朝所述环形结构弯曲延伸形成的弹性臂及自所述弹性臂一侧弯曲延伸并与所述连接缺口的侧壁相连的第二连接臂。
  7. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述质量块的一侧开设耦合缺口，所述第二耦合结构包括容置于所述耦合缺口内的耦合梁及一端连接于所述耦合梁且另一端连接于所述耦合缺口的内壁的第四梁结构。
  8. 根据权利要求7所述的MEMS陀螺仪，其特征在于，所述第四梁结构的中部具有第三弯曲结构。
  9. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述质量块位于所述环形结构的内侧或外侧。
  10. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述环形结构包括同轴设置且自内而外依次间隔排布的若干环形件以及连接于相邻的所述环形件之间的辐条。
  11. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述换能组件包括环绕设置于所述环形结构外侧的4N个第一换能器和设置于所述环形结构内侧且位于所述质量块上的第二换能器，所述第一换能器与所述第二换能器一一对应设置。
  12. 根据权利要求11所述的MEMS陀螺仪，其特征在于，所述第一换能器包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合，所述第二换能器包括电容换能器、电感换能器、热电换能器、压电换能器中的任意一种或任意多种的组合。
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