Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K27/00—Construction of housing; Use of materials therefor
  • F16K27/02—Construction of housing; Use of materials therefor of lift valves
  • F16K27/0236—Diaphragm cut-off apparatus
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K27/00—Construction of housing; Use of materials therefor
  • F16K27/003—Housing formed from a plurality of the same valve elements
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K27/00—Construction of housing; Use of materials therefor
  • F16K27/08—Guiding yokes for spindles; Means for closing housings; Dust caps, e.g. for tyre valves
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
  • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
  • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
  • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
  • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
  • F16L55/10—Means for stopping flow in pipes or hoses
  • F16L55/11—Plugs
  • F16L55/1108—Plugs fixed by screwing or by means of a screw-threaded ring

Definitions

• the inventions relate to fluid flow and delivery devices and methods, and more particularly to valves used to control fluid flow and delivery.
• Valves are well known for use as flow control devices for gas and liquid fluid delivery.
• delivery of process chemicals during various processing operations is controlled using valves, for example, high purity valves.
• Exemplary applications for valves used in the semiconductor industry include chemical vapor deposition (CVD) and atomic layer deposition (ALD). In many applications, rapid precise control of the amount of fluid supplied is required.
• CVD chemical vapor deposition
• ALD atomic layer deposition
• a valve cavity cap arrangement in combination with a valve body defining a valve cavity having a recessed surface from which a central passage and at least one radially offset passage extend.
• the valve cavity cap arrangement includes an insert and a threaded cap.
• the insert is received in the valve cavity and includes an inner annular sealing surface sized to seal against a portion of the recessed surface surrounding the central passage, an outer annular sealing surface sized to seal against an outer periphery of the recessed surface, surrounding the at least one radially offset passage, and a solid web portion extending between the inner annular sealing surface and the outer annular sealing surface.
• the threaded cap includes an outer threaded portion threadably engaged with an internal threaded portion of the valve cavity, a central end portion configured to apply a first sealing force to the inner annular sealing surface, and an outer end portion configured to apply a second sealing force to the outer annular sealing surface.
• a method of sealing a valve cavity is contemplated, with the valve cavity including a recessed surface from which a central passage and at least one radially offset passage extend.
• an insert is installed in the valve cavity, such that an inner annular sealing surface of the insert engages a portion of the recessed surface surrounding the central passage and an outer annular sealing surface of the insert engages an outer periphery of the recessed surface, surrounding the at least one radially offset passage.
• a cap is assembled with the valve cavity, such that a central end portion of the cap applies a first sealing force to the inner annular sealing surface, and an outer end portion of the cap applies a second sealing force to the outer annular sealing surface.
• FIG. 1 is an exploded perspective view, in partial cross-section, of an exemplary diaphragm valve manifold assembly
• FIG. 2 is partial cross-sectional side view of a valve subassembly installed in a valve cavity of the manifold assembly of FIG. 1;
• FIG. 3 is a cross-sectional side view of an exemplary valve cavity cap arrangement assembled with a valve cavity of a manifold body, according to an exemplary embodiment of the present disclosure
• FIG. 4 is a top view of the valve cavity cap arrangement of FIG. 3;
• FIG. 5 is a cross-sectional side view of another exemplary valve cavity cap arrangement assembled with a valve cavity of a manifold body, according to another exemplary embodiment of the present disclosure
• FIG. 6 is a top view of the valve cavity cap arrangement of FIG. 5;
• FIG. 7 is a cross-sectional side view of another exemplary valve cavity cap arrangement assembled with a valve cavity of a manifold body, according to another exemplary embodiment of the present disclosure.
• Diaphragm valves are used as flow control devices for gas and liquid fluids.
• process system gases are controlled using diaphragm valves.
• a diaphragm valve may be installed into a process system in many different ways, including being mounted on manifolds or substrates that use surface mount technology. In one such exemplary surface mount configuration, as shown and described in co-owned U.S. Patent No. 9,863,542 (the “’542 Patent,” the entire disclosure of which is incorporated herein by reference) and reproduced in FIGS.
• a manifold body block 16 includes a plurality of internally threaded valve cavities 32 each defining a recessed surface 34 from which a central passage 36 and at least one radially offset passage 38 extend.
• a seat carrier subassembly 42 is installed in each valve cavity 32, and includes a seat carrier 44 defining a central opening 56 aligned with the central passage 36, and outer openings 92 substantially aligned with (e.g., at least partially radially aligned with) the at least one offset passage 38.
• An outer rim 46 of the seat carrier 44 supports (and may be welded to) a diaphragm 26 with the diaphragm and outer rim being clamped between the valve cavity recessed surface 34 and a bonnet nut 78 threaded into the valve cavity 32 to retain the seat carrier subassembly 78 and to provide for threaded assembly of an actuator assembly 14.
• a body seal 70 surrounds the central opening 56 and seals against the recessed surface 34 around the central passage 36, and a valve seat 40 (which may be integral with the body seal 70) surrounds the central opening 56 and seals against the diaphragm 26 to block flow between the central and offset passages 36, 38 when the diaphragm is in a closed (e.g., downward) position.
• the offset passages may be open to each other in the diaphragm’s closed position, for example, to maintain flow through a fluid system, with the central passage providing for fluid sampling or injection when the diaphragm is in an open position.
• a cap may be installed in place of the valve.
• a flow- through cap may provide a means for the flow to pass continuously through the installed location, as if the valve cavity/position were provided with a valve that is always in an open position.
• a valve cavity cap arrangement may provide a first seal portion (e.g., metal-to-metal seal) around a central passage extending to the valve cavity to block flow between the central passage and one or more outer radial passages, and an independent second seal portion around an outer periphery of the valve cavity, to prevent shell leakage of fluid in the outer radial passage(s).
• first seal portion e.g., metal-to-metal seal
• a valve cavity cap arrangement 100 includes a seal cartridge or insert 110 sized to be received in a valve cavity 32 of a valve body (e.g., manifold body 16), and a threaded cap 120 having an outer threaded portion 129 threadably engageable with the internal threaded portion 82 of the valve cavity.
• the exemplary insert 110 includes a solid central portion 111 surrounded by an inner annular sealing surface (e.g., bead) 112 sized to seal against a central passage seal portion 34a of the recessed surface 34 surrounding the central passage 36, to block fluid flow to and/or from the central passage.
• a solid web portion 113 of the insert 110 extends between the inner annular sealing surface 112 and an outer annular sealing surface (e.g., bead) 114 sized to seal against an outer periphery seal portion 34b of the recessed surface 34, surrounding the offset passage(s) 38, 39 to provide a seal around the offset passage(s), while maintaining fluid communication between the offset passages 38, 39, in embodiments having more than one offset passage.
• the insert 110 may be metal (e.g., stainless steel) to provide a metal-to-metal seal between the valve cavity and the insert.
• annular may include circular or any other suitable surrounding shape (e.g., oblong, elliptical, etc.).
• the threaded cap 120 includes a central end portion 122 configured to engage a central bearing surface 117 of the insert 110 to apply a first sealing force to the inner annular sealing surface 112 and an outer end portion 124 (e.g., an annular sealing surface) configured to engage an outer bearing surface 118 of the insert to apply a second sealing force to the outer annular sealing surface 114.
• an outer end portion 124 e.g., an annular sealing surface
• the cap 120 is a two-piece configuration having an inner cap plug 121 defining the central end portion 122 assembled with an outer cap nut 123 defining the outer end portion 124, for example, by threaded engagement between an outer threaded portion 125 of the cap plug 121 and an inner threaded portion 126 of the cap nut 123.
• the cap plug 121 may be threadably adjusted within the cap nut 123 for independent adjustment of the first and second sealing forces. Tightening adjustments of the cap plug 121 and the cap nut 123 may be made, for example, based on tightening torque or incremental turns from a snug tight condition. As shown in FIG.
• the cap plug 121 and the cap nut 123 may include outer grippable portions 121a, 123a to facilitate tightening with a tool (e.g., wrench flats 121a) or user hand grip (e.g., contoured hand grip portions 123a), and the cap nut 123 may be provided with one or more vent ports 127, for example, to detect leakage past the insert 110.
• a tool e.g., wrench flats 121a
• user hand grip e.g., contoured hand grip portions 123a
• vent ports 127 for example, to detect leakage past the insert 110.
• the web portion 113 of the insert 110 may be thin enough to provide an increased degree of flexing between the outer and inner sealing beads so that differences in the valve cavity recessed surface can be accommodated and the load transfer from outer to inner seal is minimized.
• a suitable thickness may be selected as a function of the potential seal surface offset between the central passage seal portion 34a and the outer periphery seal portion 34b, and/or the amount of loadloss (resulting from web deflection) that may be tolerated.
• a web portion 113 having a thickness between about 0.020” and about 0.060”, or about 0.030” may be used to provide web deflection sufficient to accommodate a seal offset (e.g., due to dimensional tolerances in the valve cavity seal surfaces and/or the annular sealing surface surfaces) of up to about 0.010”.
• a seal offset e.g., due to dimensional tolerances in the valve cavity seal surfaces and/or the annular sealing surface surfaces
• even thicker web portions may still allow for independent loading of the outer and inner annular sealing surfaces 114, 112 by the cap nut 123 and cap plug 121.
• the web portion 113 is substantially coplanar with the insert bearing surfaces 117, 118, for example, to provide an enlarged space between the valve cavity recessed surface 34 and the web portion 113 to maximize flow between the offset passages 38, 39, in embodiments having more than one offset passage.
• the insert 110' may include a web portion 113' that is more centrally positioned axially between the upper bearing surfaces 117', 118' and the lower annular sealing surfaces 112', 114', for example, to provide increased flexibility between the outer and inner sealing beads, for example, in embodiments for which flow capacity is less critical or where only one offset passage is provided.
• a valve cavity cap arrangement may include a flow diverting cartridge or insert having a central passage extending through the cap, for example, for connection with a flow loop or other flow control arrangement.
• a valve cavity cap arrangement 200 includes a flow diverting cartridge or insert 210 sized to be received in a valve cavity 32 of a manifold body 16, and a threaded cap 220 having an outer threaded portion 229 threadably engageable with the internal threaded portion 82 of the valve cavity.
• 210 includes a tubular extension 215 extending from an apertured central portion 211, which is surrounded by an inner annular sealing surface 212 sized to seal against a seal portion 34a of the recessed surface 34 surrounding the central passage 36.
• the 211 includes a central port 216 that extends from the tubular extension 215 to an end surface of the insert, radially inward of the inner annular sealing surface 212, to provide a fluid passage between the central passage 36 and the tubular extension 215.
• a solid web portion 213 of the insert 210 extends between the inner annular sealing surface 212 and an outer annular sealing surface 214 sized to seal against an outer periphery 34b of the recessed surface 34, surrounding the offset passage(s) 38, 39, to provide a seal around the offset passage(s), while maintaining fluid communication between the offset passages 38, 39, in embodiments having more than one offset passage.
• the insert 210 may be metal (e.g., stainless steel) to provide a metal-to- metal seal between the valve cavity 32 and the insert 210.
• the threaded cap 220 includes a central end portion 222 defining a central bore 228, receiving the tubular extension 215 of the insert 210 therethrough, surrounded by an annular end face 222a configured to apply a first sealing force to the inner annular sealing surface 212, and an outer end portion 224 configured to apply a second sealing force to the outer annular sealing surface 214.
• the cap 220 is a two-piece configuration having an inner cap plug 221, defining the central end portion 222, assembled with, and axially adjustable with respect to, an outer cap nut 223 defining the outer end portion 224, for example, by threaded engagement between an outer threaded portion 225 of the cap plug 221 and an inner threaded portion 226 of the cap nut 223.
• the cap plug 221 may be threadably adjusted within the cap nut 223 for independent axial adjustment of the first and second sealing forces. Tightening adjustments of the cap plug 221 and the cap nut 223 may be made, for example, based on tightening torque or incremental turns from a snug tight condition.
• the cap plug 221 and the cap nut 223 may include outer grippable portions 221a, 223a to facilitate tightening with a tool (e.g., wrench flats 221a) or user hand grip (e.g., contoured hand grip portions 223a), and the cap nut 223 may be provided with one or more vent ports 227, for example, to detect leakage past the insert 210.
• a tool e.g., wrench flats 221a
• user hand grip e.g., contoured hand grip portions 223a
• vent ports 227 for example, to detect leakage past the insert 210.
• the web portion 213 of the insert 210 may be thin enough to provide a degree of axial flexing between the outer and inner sealing beads so that differences in the valve cavity recessed surface can be accommodated and the load transfer from outer to inner seal is minimized, for example, similar to the web portion 113 of the insert 110 of FIG. 3, as described above.
• the web portion 213 is substantially coplanar with the outer bearing surface 218, for example, to provide an enlarged space between the valve cavity recessed surface 34 and the web portion 213 to maximize flow between the offset passages 38, 39.
• the insert 210' may include a web portion 213' that is more centrally positioned between the upper bearing surfaces 217', 218' and the lower annular sealing surfaces 212', 214', for example, to provide increased flexibility between the outer and inner sealing beads, for example, in embodiments for which flow capacity is less critical or where only one offset passage is provided.
• a valve cavity cap arrangement may include a flow diverting cartridge or insert having a radially offset passage extending through the cap, for example, for connection with a flow loop or other flow control arrangement.
• a valve cavity cap arrangement 300 includes a flow diverting cartridge or insert 310 sized to be received in a valve cavity 32 of a manifold body 16, and a threaded cap 320 having an outer threaded portion 329 threadably engageable with the internal threaded portion 82 of the valve cavity.
• the exemplary insert 310 includes a tubular extension 315 extending from a solid central portion 311 surrounded by an inner annular sealing surface 312 sized to seal against a seal portion 34a of the recessed surface 34 surrounding the central passage 36, to block flow to and/or from the central passage 36.
• the insert 310 includes one or more ports 316 extending radially outward and axially downward from the tubular extension 315 to an end surface of the insert, radially outward of the inner annular sealing surface 312, to provide one or more fluid passages between the offset passage(s) 38, 39 and the tubular extension 315.
• a solid web portion 313 of the insert 310 extends between the ports 316 and an outer annular sealing surface 314 sized to seal against an outer periphery 34b of the recessed surface 34, surrounding the offset passage(s) 38, 39, to provide a seal around the offset passage(s), while maintaining fluid communication between the offset passages 38, 39, in embodiments having more than one offset passage.
• the insert 310 may be metal (e.g., stainless steel) to provide a metal -to-metal seal between the valve cavity and the insert.
• the threaded cap 320 includes a central end portion 322 defining a central bore 328, receiving the tubular central portion 311 of the insert 310 therethrough, surrounded by an annular end face 322a configured to apply a first sealing force to the inner annular sealing surface 312, and an outer end portion 324 configured to apply a second sealing force to the outer annular sealing surface 314.
• the cap 320 is a two-piece configuration having an inner cap plug 321 defining the central end portion 322 assembled with, and axially adjustable with respect to, an outer cap nut 323 defining the outer end portion 324, for example, by threaded engagement between an outer threaded portion 325 of the cap plug 321 and an inner threaded portion 326 of the cap nut 323.
• the cap plug 321 may be threadably adjusted within the cap nut 323 for independent axial adjustment of the first and second sealing forces. Tightening adjustments of the cap plug 321 and the cap nut 323 may be made, for example, based on tightening torque or incremental turns from a snug tight condition.
• the cap plug 321 and the cap nut 323 may include outer flatted portions to facilitate tightening with a tool (e.g., wrench), and the cap nut 323 may be provided with one or more vent ports, for example, to detect leakage past the insert 310.
• a tool e.g., wrench
• FIGS. 7A and 7B illustrate upper and lower views of the exemplary insert 310.
• the insert 310 may include multiple ports 316 circumferentially spaced around the insert, for example, to provide for increased flow between the offset passage(s) 38, 39 and the tubular extension 315. While the insert 310 may be machined with the multiple port configuration, the insert 310 (as well as any of the other components described herein) may be manufactured using additive manufacturing (e.g., 3D printing) and/or welded configurations (e.g., an insert formed from a tubular extension welded to a ported base).
• additive manufacturing e.g., 3D printing
• welded configurations e.g., an insert formed from a tubular extension welded to a ported base.
• the web portion 313 of the insert 310 may be thin enough to provide a degree of axial flexing between the outer and inner sealing beads so that differences in the valve cavity recessed surface can be accommodated and the load transfer from outer to inner seal is minimized, for example, similar to the web portion 113 of the insert 110 of FIG. 3, as described above.
• the web portion 313 is substantially coplanar with the outer bearing surface 318, for example, to provide an enlarged space between the valve cavity recessed surface 34 and the web portion 313 to maximize flow between the offset passages 38, 39.
• the insert may include a web portion that is more centrally positioned between the upper bearing surfaces and the lower annular sealing surfaces, for example, to provide increased flexibility between the outer and inner sealing beads, for example, in embodiments for which flow capacity is less critical or where only one offset passage is provided.

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• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Valve Housings (AREA)
• Pipe Accessories (AREA)

Priority Applications (4)

Applications Claiming Priority (2)

Publications (1)

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Citations (4)

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• 2021
  • 2021-11-03 WO PCT/US2021/057808 patent/WO2022098688A1/en not_active Ceased
  • 2021-11-03 EP EP21815792.3A patent/EP4240998B1/en active Active
  • 2021-11-03 JP JP2023526894A patent/JP7629524B2/ja active Active
  • 2021-11-03 US US17/518,173 patent/US11796077B2/en active Active
  • 2021-11-03 KR KR1020237015625A patent/KR20230093446A/ko active Pending
  • 2021-11-03 CN CN202180075052.3A patent/CN116420042B/zh active Active
  • 2021-11-05 TW TW110141357A patent/TWI899367B/zh active

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