WO2022048024A1 - 一种自动点火式低温常压射频等离子体装置 - Google Patents

一种自动点火式低温常压射频等离子体装置 Download PDF

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WO2022048024A1
WO2022048024A1 PCT/CN2020/129560 CN2020129560W WO2022048024A1 WO 2022048024 A1 WO2022048024 A1 WO 2022048024A1 CN 2020129560 W CN2020129560 W CN 2020129560W WO 2022048024 A1 WO2022048024 A1 WO 2022048024A1
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radio frequency
atmospheric pressure
type low
automatic ignition
ignition
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王裕
江彪
高明
张永亮
陆星铭
黄逸凡
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

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  • the invention belongs to the technical field of plasma generating devices, and relates to an automatic ignition type low temperature normal pressure radio frequency plasma device.
  • Low-temperature plasma is a gaseous treatment technology that combines physical and chemical effects. It has the characteristics of low pollution, high efficiency and other environmental protection, and is widely used in material surface treatment.
  • the atmospheric pressure low temperature plasma belongs to the non-equilibrium plasma, because it is not limited by the size and space of the vacuum chamber, it is very suitable for low-cost and high-efficiency production line processing.
  • the present invention provides an automatic ignition type low temperature and atmospheric pressure radio frequency plasma device, which can reduce the breakdown voltage by using an automatic ignition structure under the condition of keeping the dielectric tube hollow, so as to generate low temperature plasma under normal pressure conditions.
  • the plasma discharge area is removed, and the operation is simple and easy to operate, and the low-cost working inert gas can be used, and to a certain extent, the electrode is protected from corrosion, the introduction of metal impurities is avoided, and the loss of the plasma device is reduced.
  • An automatic ignition type low temperature and atmospheric pressure radio frequency plasma device the special features of which are:
  • the automatic ignition part includes an ignition element and a moving device
  • the plasma discharge body includes an anode for radio frequency, a cathode and a dielectric tube, the cathode and the anode are arranged on the dielectric tube; the dielectric tube is provided with an air inlet, the ignition element is fixed on the mobile device, and the mobile device Drive the ignition element into or out of the medium tube.
  • anode and cathode are annular electrodes wrapped around the periphery of the dielectric tube, the anode is the radio frequency output terminal, the cathode is the ground terminal, and the radio frequency output terminal is connected by the radio frequency cable, which passes through the internal matching network of the radio frequency power supply, and the ground terminal is the radio frequency terminal.
  • the outer metal end of the cable is the same as the grounding pole of the RF power supply.
  • the above-mentioned ignition element is a rod.
  • the above-mentioned ignition element is made of metal materials whose melting point is above 1000 degrees Celsius, such as tungsten, molybdenum, niobium, tantalum, vanadium, and zirconium.
  • the inner diameter of the above-mentioned medium pipe may be between 0.1 mm and 10 mm.
  • the above-mentioned medium tube may be a quartz tube, a ceramic tube, or the like.
  • the above-mentioned moving device is a pneumatic control structure such as a cylinder or a spring that can generate a certain displacement, and the entire mechanical ignition structure is fixed on the insulating material.
  • the working frequency of the radio frequency power supply is 13.56MHz or 27.12MHz
  • the root mean square voltage of gas breakdown is within 500V
  • the radio frequency discharge is performed under the condition of open atmospheric pressure.
  • the above-mentioned ignition element is fixed on the mobile device through a connecting piece.
  • the automatic ignition structure can be used to reduce the breakdown voltage, so as to generate low-temperature plasma under normal pressure conditions.
  • the automatic ignition structure moves out of the plasma discharge area after successful ignition, and the operation is simple Easy to operate, low-cost working inert gas can be used, and to a certain extent, the electrode is protected from corrosion, the introduction of metal impurities is avoided, and the loss of the plasma device is reduced;
  • the present invention can use a relatively thick medium tube to generate relatively thick plasma torches, the cost of the used ignition element is low, and it can be reused, not easily corroded, and is suitable for large-scale low-cost production;
  • the plasma device created by the present invention can be widely used in the fields of surface cleaning, sterilization and preparation of polymer coatings.
  • FIG. 1 is a structural diagram of an auto-ignition type low temperature and atmospheric pressure radio frequency plasma device of the present invention.
  • an auto-ignition low temperature and atmospheric pressure radio frequency plasma device includes an auto-ignition part and a plasma discharge body.
  • the automatic ignition part includes an ignition element 3 and a moving device 1;
  • the plasma discharge body includes an anode 6 for radio frequency, a cathode 7 and a dielectric tube 4, and the cathode 7 and the anode 6 are arranged on the dielectric tube 4, so
  • the medium pipe 4 is also provided with an air inlet 5;
  • the anode 6 and the cathode 7 are annular electrodes wrapped around the periphery of the dielectric tube 4, the anode 6 is a radio frequency output terminal, the cathode 7 is a ground terminal, and the radio frequency output terminal is connected by a radio frequency cable, It passes through the internal matching network of the RF power supply, and the grounding end is the external metal end of the RF cable, which is the same as the grounding pole of the RF power supply.
  • the inner diameter of the medium tube 4 may be between 0.1 mm and 10 mm, and the medium tube 4 may be a quartz tube, a ceramic tube, or the like.
  • the above-mentioned ignition element 3 is a slender rod, which is made of metal materials such as tungsten, molybdenum, niobium, tantalum, vanadium, and zirconium whose melting point is above 1000 degrees Celsius.
  • the above-mentioned moving device 1 is a pneumatic control structure such as a cylinder or a spring that can generate a certain displacement, and the entire mechanical ignition structure is fixed on an insulating material.
  • the working frequency of the radio frequency power supply is 13.56MHz or 27.12MHz
  • the root mean square voltage of gas breakdown is within 500V
  • the radio frequency discharge is performed under the condition of open atmospheric pressure.
  • the present invention is a device for generating low-temperature radio frequency plasma by using an automatic ignition structure under normal pressure conditions.
  • the device generates secondary electrons in the conductor area through the ignition element 3, so as to induce plasma in the conductor area, and then generate plasma under normal pressure. Continuous plasma, low temperature plasma can be generated at lower power.
  • the working principle of the present invention First, use a pneumatic device to move the ignition element 3 to the anode 6 in the medium pipe 4, the gas inlet 5 enters the gas, and the ignition element 3 is placed in the gas flow in this area for ignition, and in the conductor area After applying a certain radio frequency power, the gas is ignited into plasma, and immediately after the gas is ignited, a pneumatic device is used to move the ignition element 3 away from the conductor area so as to be separated from the plasma torch.
  • the pneumatic device controls the ignition element 3 to quickly withdraw from the discharge area of the dielectric tube 4 and away from the air inlet 5, and the upper end of the dielectric tube 4 is sealed to avoid leakage of discharge gas.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

本发明属于等离子体发生装置技术领域，涉及一种自动点火式低温常压射频等离子体装置，包括自动点火部分和等离子体放电主体；自动点火部分包括点火元件和移动装置；等离子体放电主体包括用于射频的阳极、阴极以及介质管，阴极和阳极设置在介质管上；介质管上设有进气口，点火元件固定在移动装置上，移动装置带动点火元件进入或退出介质管。本发明能够在保持介质管中空的情况下，利用自动点火结构降低击穿电压，从而在常压条件下产生低温等离子体，该自动点火结构在点火成功后，移出等离子体放电区域，并且操作简单易行，可使用低成本工作惰性气体，并在一定程度上保护电极不受腐蚀，避免金属杂质引入，降低等离子体装置损耗。

Description

一种自动点火式低温常压射频等离子体装置 技术领域
本发明属于等离子体发生装置技术领域，涉及一种自动点火式低温常压射频等离子体装置。
 背景技术
低温等离子体是一种物理和化学作用相结合的气态处理技术，其本身具有的低污染、高效率等环保的特点，广泛应用在材料表面处理上。而大气压低温等离子体属于非平衡等离子体，由于其不受限于真空腔体尺寸空间限制，十分适用于低成本、高效率的生产线加工。
在上个世纪90年代，就有报道以射频为驱动源，使用氦气为工作气体，在常压下将金属电极内置在介质管中作为阳极，介质管外包裹金属电极作为阴极，这种针-环装置结构，内置金属电极容易受到腐蚀，长期影响放电效果，虽然采用氦气放电产生的等离子体气体温度相对较低，但氦气价格昂贵，并不适合大规模生产，而氩气等惰性气体产生的等离子体气体温度较高，需要对电极做冷却处理。Foest等人在2005年提出的双环结构，在毛细管外分别包裹金属阳极和金属阴极，因为毛细管直径较小，气体间隙相对较小，工作气体在流动状态下击穿和维持电压较低，所以工作气体氦气通过介质管间隙被击穿，产生等离子体，虽无内置电极，但采用毛细管为介质管，且由于介质管为毛细管较细，并使用氦气放电，产生的射流较小，不适合大面积应用。
 技术问题
本发明提出一种自动点火式低温常压射频等离子体装置，能够在保持介质管中空的情况下，利用自动点火结构降低击穿电压，从而在常压条件下产生低温等离子体，该自动点火结构在点火成功后，移出等离子体放电区域，并且操作简单易行，可使用低成本工作惰性气体，并在一定程度上保护电极不受腐蚀，避免金属杂质引入，降低等离子体装置损耗。
 技术解决方案
一种自动点火式低温常压射频等离子体装置，其特殊之处在于：
包括自动点火部分和等离子体放电主体；
所述自动点火部分包括点火元件和移动装置；
所述等离子体放电主体包括用于射频的阳极、阴极以及介质管，所述阴极和阳极设置在介质管上；介质管上设有进气口，所述点火元件固定在移动装置上，移动装置带动点火元件进入或退出介质管。
进一步地，上述阳极和阴极均为介质管外围包裹的环状电极，阳极为射频输出端，阴极为接地端，射频输出端由射频线缆连接，其经过射频电源内部匹配网络，接地端为射频线缆外部金属端，和射频电源接地极为同一个。
进一步地，上述点火元件为杆件。
进一步地，上述点火元件采用钨、钼、铌、钽、钒、锆等熔点在1000摄氏度以上的金属材料制成。
进一步地，上述介质管其内部直径大小可在0.1mm-10mm之间。
进一步地，上述介质管可以为石英管、陶瓷管等。
进一步地，上述移动装置为气缸或弹簧等可产生一定位移的气动控制结构，整个机械点火结构固定在绝缘材料上。
进一步地，上述射频电源工作频率为13.56MHz或27.12MHz，气体被击穿的均方根电压在500V以内，该射频放电是在大气压开放条件下进行。
进一步地，上述点火元件通过连接件固定在移动装置上。
 有益效果
1）能够在保持介质管中空的情况下，利用自动点火结构降低击穿电压，从而在常压条件下产生低温等离子体，该自动点火结构在点火成功后，移出等离子体放电区域，并且操作简单易行，可使用低成本工作惰性气体，并在一定程度上保护电极不受腐蚀，避免金属杂质引入，降低等离子体装置损耗；
2）本发明能采用较粗介质管，产生较粗等离子体炬，采用的点火元件成本较低，并能重复利用，不易受腐蚀，适合大规模低成本生产；
3）本发明创造的等离子体装置，可广泛应用在表面清洗、杀菌以及制备聚合物涂层等领域。
 附图说明
图1为本发明自动点火式低温常压射频等离子体装置的结构图。
其中，1、移动装置，2、连接件，3、点火元件，4、介质管，5、进气口，6、阳极，7、阴极。
 本发明的实施方式
为使本发明实施方式的目的、技术方案和优点更加清楚，下面将结合本发明实施方式中的附图，对本发明实施方式中的技术方案进行清楚、完整地描述，显然，所描述的实施方式是本发明一部分实施方式，而不是全部的实施方式。基于本发明中的实施方式，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施方式，都属于本发明保护的范围。因此，以下对在附图中提供的本发明的实施方式的详细描述并非旨在限制要求保护的本发明的范围，而是仅仅表示本发明的选定实施方式。
参见图1，一种自动点火式低温常压射频等离子体装置，包括自动点火部分和等离子体放电主体。所述自动点火部分包括点火元件3和移动装置1；所述等离子体放电主体包括用于射频的阳极6、阴极7以及介质管4，所述阴极7和阳极6设置在介质管4上，所述介质管4上还设有进气口5；所述点火元件3通过连接件2固定在移动装置1上，移动装置1带动点火元件3进入或退出介质管4。
作为本发明的一个优选实施例，所述阳极6和阴极7均为介质管4外围包裹的环状电极，阳极6为射频输出端，阴极7为接地端，射频输出端由射频线缆连接，其经过射频电源内部匹配网络，接地端为射频线缆外部金属端，和射频电源接地极为同一个。
作为本发明的一个优选实施例，上述介质管4其内部直径大小可在0.1mm-10mm之间，介质管4可以为石英管、陶瓷管等。
作为本发明的一个优选实施例，上述点火元件3为细长杆，其采用钨、钼、铌、钽、钒、锆等熔点在1000摄氏度以上的金属材料制成。
作为本发明的一个优选实施例，上述移动装置1为气缸或弹簧等可产生一定位移的气动控制结构，整个机械点火结构固定在绝缘材料上。
进一步地，上述射频电源工作频率为13.56MHz或27.12MHz，气体被击穿的均方根电压在500V以内，该射频放电是在大气压开放条件下进行。
本发明是在常压条件下利用自动点火结构产生低温射频等离子体的装置，该装置是通过点火元件3在导体区域产生二次电子，从而在导体区域诱发产生等离子体，进而在常压下产生连续等离子体，可以在较低功率下产生低温等离子体。
本发明的工作原理：首先，采用气动装置移动点火元件3至介质管4内的阳极6处，进气口5进入气体，点火元件3放置在该区域中的气体流中进行点火，在导体区域施加一定射频功率后，进而将气体点燃成等离子体，并在气体被点燃后立即使用气动装置将点火元件3从导体区域移开，以便与等离子体炬分离。
为达到快速点火目的，气动装置控制点火元件3快速抽离介质管4放电区域，并远离进气口5，且介质管4上端为密封状态，避免放电气体泄漏。
以上所述仅为本发明的实施例，并非以此限制本发明的保护范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的系统领域，均同理包括在本发明的保护范围内。

Claims (9)

  1. 一种自动点火式低温常压射频等离子体装置，其特征在于：
    包括自动点火部分和等离子体放电主体；
    所述自动点火部分包括点火元件（3）和移动装置（1）；
    所述等离子体放电主体包括用于射频的阳极（6）、阴极（7）以及介质管（4），所述阴极（7）和阳极（6）设置在介质管（4）上；介质管（4）上设有进气口（5），所述点火元件（3）固定在移动装置（1）上，移动装置（1）带动点火元件（3）进入或退出介质管（4）。
  2. 根据权利要求1所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述阳极（6）和阴极（7）均为介质管（4）外围包裹的环状电极，阳极（6）为射频输出端，阴极（7）为接地端，射频输出端由射频线缆连接，其经过射频电源内部匹配网络，接地端为射频线缆外部金属端，和射频电源接地极为同一个。
  3. 根据权利要求1所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述点火元件（3）通过连接件（2）固定在移动装置（1）上。
  4. 根据权利要求1-3任一所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述点火元件（3）为杆件。
  5. 根据权利要求4所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述点火元件（3）采用熔点在1000摄氏度以上的金属材料制成。
  6. 根据权利要求5所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述介质管（4）其内部直径大小在0.1mm-10mm之间。
  7. 根据权利要求6所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述介质管（4）可以为石英管或陶瓷管。
  8. 根据权利要求7所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述移动装置（1）为气缸。
  9. 根据权利要求8所述的一种自动点火式低温常压射频等离子体装置，其特征在于：
    所述射频电源工作频率为13.56MHz或27.12MHz，气体被击穿的均方根电压在500V以内，该射频放电在大气压开放条件下进行。
PCT/CN2020/129560 2020-09-07 2020-11-17 一种自动点火式低温常压射频等离子体装置 Ceased WO2022048024A1 (zh)

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