WO2022044430A1 - 異物検査装置 - Google Patents

異物検査装置 Download PDF

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Publication number
WO2022044430A1
WO2022044430A1 PCT/JP2021/017259 JP2021017259W WO2022044430A1 WO 2022044430 A1 WO2022044430 A1 WO 2022044430A1 JP 2021017259 W JP2021017259 W JP 2021017259W WO 2022044430 A1 WO2022044430 A1 WO 2022044430A1
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WIPO (PCT)
Prior art keywords
infrared
unit
ray
foreign matter
image
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/017259
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English (en)
French (fr)
Japanese (ja)
Inventor
邦彦 土屋
敏康 須山
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to KR1020227037688A priority Critical patent/KR20230056623A/ko
Priority to US18/016,699 priority patent/US12276623B2/en
Priority to CN202180051867.8A priority patent/CN115885170A/zh
Priority to EP21860862.8A priority patent/EP4130725A4/en
Priority to JP2022545304A priority patent/JP7597818B2/ja
Publication of WO2022044430A1 publication Critical patent/WO2022044430A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
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    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
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    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/10—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the material being confined in a container, e.g. in a luggage X-ray scanners
    • G—PHYSICS
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    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1738—Optionally different kinds of measurements; Method being valid for different kinds of measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1042—X, Y scan, i.e. object moving in X, beam in Y
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/1006—Different kinds of radiation or particles different radiations, e.g. X and alpha
    • G—PHYSICS
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N2223/40—Imaging
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    • G—PHYSICS
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    • G01N2223/60—Specific applications or type of materials
    • G01N2223/639—Specific applications or type of materials material in a container
    • G—PHYSICS
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    • G01N2223/60—Specific applications or type of materials
    • G01N2223/643—Specific applications or type of materials object on conveyor
    • G—PHYSICS
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    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts

Definitions

  • This disclosure relates to a foreign matter inspection device.
  • the package inspection device described in Patent Document 1 includes a moving mechanism for moving a package containing contents in an exterior body, an irradiation unit for irradiating the package with X-rays, and an X transmitted through the package. It is configured to include a detection unit that detects lines, an illumination unit that illuminates the package, and an optical detection unit that acquires an optical image of the package.
  • the above-mentioned X-ray inspection device is good at discovering foreign substances made of hard substances such as metal, stone, and glass.
  • X-ray inspection equipment is not good at finding foreign substances due to soft substances such as plastics, insects, hair, and mold.
  • Examples of devices that contribute to the detection of foreign substances caused by soft substances include infrared inspection devices that use infrared rays.
  • infrared inspection devices that use infrared rays.
  • both technologies have made different advances. Therefore, in order to inspect a wide variety of foreign substances including hard and soft substances, it is necessary to deploy an X-ray inspection device and an infrared inspection device separately, and it is hoped that a compact foreign substance inspection device will appear. It was rare.
  • the present disclosure has been made to solve the above problems, and an object of the present disclosure is to provide a foreign matter inspection device capable of compactly inspecting a wide variety of foreign substances including hard substances and soft substances.
  • the foreign matter inspection device is a foreign matter inspection device for inspecting the presence or absence of foreign matter in the inspection object, and is conveyed by a transport unit for transporting the inspection target object in a predetermined transport direction and a transport unit. It is conveyed by an X-ray irradiation unit that irradiates the inspection target with X-rays, an X-ray detection unit that detects the X-rays that have passed through the inspection target and outputs X-ray image data based on the detection results, and a transport unit.
  • An infrared irradiation unit that irradiates an inspection object with infrared rays, an infrared detection unit that detects infrared rays from the inspection object and outputs infrared image data based on the detection results, and a member that shields X-rays and transmits infrared rays.
  • a protective unit provided to cover the infrared irradiation unit and the infrared detection unit, and an infrared image of the inspection object based on the X-ray image data to generate an X-ray image of the inspection object based on the infrared image data. It includes an image generation unit that generates an image.
  • the X-ray irradiation position and the infrared irradiation position on the inspection object are different positions with respect to the transport direction, and the X-ray detection timing in the X-ray detection unit and the infrared detection timing in the infrared detection unit May be synchronized. In this way, by separating the X-ray irradiation position and the infrared irradiation position and synchronizing the X-ray detection timing and the infrared detection timing, even if the inspection object has a certain thickness, The inspection position by X-ray and the inspection position by infrared rays can be matched.
  • the X-ray detector may output a synchronization signal to the infrared detector according to the X-ray detection timing.
  • the X-ray detection timing in the X-ray detection unit and the infrared detection timing in the infrared detection unit can be suitably synchronized.
  • the infrared detection unit may output a synchronization signal to the X-ray detection unit according to the infrared detection timing.
  • the X-ray detection timing in the X-ray detection unit and the infrared detection timing in the infrared detection unit can be suitably synchronized.
  • the foreign matter inspection device may further include a synchronization unit that synchronizes the X-ray detection timing in the X-ray detection unit with the infrared detection timing in the infrared detection unit.
  • a synchronization unit that synchronizes the X-ray detection timing in the X-ray detection unit with the infrared detection timing in the infrared detection unit.
  • the synchronization unit may be configured by a pulse generator.
  • the pulse generator can generate the synchronization signal with high accuracy.
  • the synchronization unit may be configured by an encoder that detects the amount of movement of the inspection target in the transport unit.
  • the encoder can generate the synchronization signal with high accuracy.
  • the infrared detection unit may detect at least one of the infrared rays reflected from the inspection object and the infrared rays transmitted through the inspection object. This makes it possible to suitably carry out the inspection from one side or the other side of the inspection object.
  • the infrared detection unit may have a slit arranged corresponding to the optical path of infrared rays from the inspection object. As a result, it is possible to reduce the incidence of X-rays on the infrared detection unit from outside the infrared optical path.
  • the image generation unit may generate a superimposed image in which an X-ray image and an infrared image are superimposed. As a result, the inspection result by X-ray and the inspection result by infrared rays can be confirmed at once in the superimposed image.
  • the image generation unit corrects one of the X-ray image and the infrared image so that the number of pixels of the X-ray image and the number of pixels of the infrared image match, and then superimposes the X-ray image and the infrared image. good. This makes it possible to improve the detection accuracy of foreign matter using the superimposed image.
  • An ultraviolet irradiation unit that irradiates the inspection object transported by the transport unit with ultraviolet rays, an ultraviolet detection unit that detects ultraviolet rays from the inspection object and outputs ultraviolet image data based on the detection results, and an X-ray shield. Further, it may have a member for transmitting ultraviolet rays, and may further include a protective portion provided so as to cover the ultraviolet irradiation unit and the ultraviolet detection unit. In this case, for example, it becomes possible to detect the autofluorescence of the inspection object, and it becomes possible to inspect a wider variety of foreign substances.
  • FIG. 1st Embodiment of this disclosure It is a schematic diagram which shows the structure of the foreign matter inspection apparatus which concerns on 1st Embodiment of this disclosure. It is a block diagram which shows the functional component of the foreign matter inspection apparatus shown in FIG. It is a top view which shows an example of a correction chart. It is a schematic diagram which shows the structure of the foreign matter inspection apparatus which concerns on 2nd Embodiment of this disclosure. It is a schematic diagram which shows the structure of the foreign matter inspection apparatus which concerns on 3rd Embodiment of this disclosure. It is a block diagram which shows the functional component of the foreign matter inspection apparatus shown in FIG. It is a figure which shows the correspondence relationship between the inspection method and the foreign matter which can be inspected. (A) and (b) are schematic views which show the modification of the protection part. (A) and (b) are schematic diagrams showing another example of an infrared line sensor. (A) and (b) are schematic diagrams showing still another example of the infrared line sensor.
  • FIG. 1 is a schematic view showing the configuration of a foreign matter inspection device according to the first embodiment of the present disclosure.
  • FIG. 2 is a block diagram showing functional components of the foreign matter inspection device shown in FIG. 1.
  • the foreign matter inspection device 1 is a device that continuously inspects the presence or absence of foreign matter in the inspection object S by using both X-ray L1 and infrared ray L2. Examples of the inspection target S include a package containing food.
  • the foreign matter to be inspected in the foreign matter inspection device 1 is both a hard substance and a soft substance.
  • the hard substance is a substance having a relatively high density such as metal, stone, and glass.
  • Soft substances are relatively low density substances such as plastics, insects, hair and mold.
  • the foreign matter inspection device 1 includes a shielding box 2.
  • the shield box 2 is made of a material such as lead that can shield the X-ray L1 so that the X-ray L1 used for inspection does not leak to the outside of the shield box 2.
  • an introduction port 3 for introducing the inspection object S into the shield box 2 and an discharge port 4 for discharging the inspection object S from the shield box 2 are provided, respectively. Has been done.
  • the foreign matter inspection device 1 includes a transport unit 5, an X-ray irradiation unit 6, an X-ray detection unit 7, an infrared irradiation unit 8, an infrared detection unit 9, and a synchronization unit 10. , An image generation unit 11, a determination unit 12, and a display unit 13.
  • the transport unit 5 is a portion that transports the inspection object S in a predetermined transport direction.
  • the transport unit 5 is composed of a plurality of belt conveyors 14 horizontally arranged corresponding to the positions of the introduction port 3 and the discharge port 4 of the shielding box 2. A plurality of inspection objects S are conveyed from the right side of the paper surface to the left side of the paper surface in FIG.
  • the inspection object S introduced into the shield box 2 from the introduction port 3 is inspected by the X-ray L1 and the infrared ray L2 in the shield box 2, and then discharged from the discharge port 4 to the outside of the shield box 2.
  • the X-ray irradiation unit 6 is a portion that irradiates the inspection object S transported by the transport unit 5 with the X-ray L1.
  • the X-ray irradiation unit 6 is composed of, for example, an X-ray tube 15, and is arranged above the transport unit 5 on the discharge port 4 side in the shield box 2.
  • the X-ray L1 generated at the X-ray focal point (point light source) of the X-ray tube 15 is emitted downward from the X-ray tube 15.
  • the X-ray L1 passes through the inspection object S on the transport unit 5 and then enters the X-ray detection unit 7.
  • the gap between the belt conveyors 14 and 14 is located at the irradiation position of the X-ray L1 on the inspection object S.
  • the X-ray L1 that has passed through the inspection object S goes toward the X-ray detection unit 7 without hitting the belt conveyor 14.
  • the X-ray detection unit 7 is a part that detects the X-ray L1 that has passed through the inspection object S and outputs the X-ray image data based on the detection result.
  • the X-ray detection unit 7 is composed of, for example, an X-ray line sensor 18, and is arranged below the transport unit 5 at a position directly below the X-ray irradiation unit 6.
  • the X-ray detection unit 7 detects the X-ray L1 that has passed through the inspection object S, and generates X-ray image data based on the detection result. Then, the X-ray detection unit 7 outputs the generated X-ray image data to the image generation unit 11 (see FIG. 2).
  • the X-ray line sensor constituting the X-ray detection unit 7 may be a single line sensor or a multi-line sensor.
  • the X-ray detection unit 7 may be configured by a TDI (Time Delay Integration) sensor.
  • the X-ray detection unit 7 may be a detector corresponding to multi-energy such as a dual energy X-ray line sensor.
  • the detection method may be an indirect conversion method using a scintillator or a direct conversion method using no scintillator.
  • the X-ray L1 passes through the gap between the belt conveyors 14 and 14, but by forming the belt conveyor 14 with a material having transparency to X-rays, the gap is formed in the belt conveyor 14. May be an embodiment that does not cause the above.
  • a slit composed of a member for shielding X-rays may be provided between the X-ray tube 15 and the inspection object S to reduce the irradiation of the X-ray L to other than the inspection object S.
  • the slit may be formed of lead, tungsten, iron, stainless steel, copper or the like capable of shielding X-ray L1.
  • the infrared irradiation unit 8 is a portion that irradiates the inspection object S conveyed by the transfer unit 5 with infrared rays L2.
  • the infrared irradiation unit 8 is composed of, for example, a pair of infrared light sources 16 and 16.
  • As the infrared light source 16 for example, a light emitting diode, a halogen lamp, a laser light source, or the like is used.
  • the infrared detection unit 9 is a part that detects the infrared L2 from the inspection object S and outputs infrared image data based on the detection result.
  • the infrared detection unit 9 is composed of an infrared line sensor 17 such as an InGaAs line sensor.
  • the infrared detection unit 9 detects a part of the infrared L2 reflected by the inspection object S and generates infrared image data based on the detection result. Then, the infrared detection unit 9 outputs the generated infrared image data to the image generation unit 11 (see FIG. 2).
  • the infrared line sensor 17 constituting the infrared detection unit 9 may be a single line sensor or a multi-line sensor having a plurality of line sensors. The multi-line sensor may have a different sensitivity wavelength for each line sensor.
  • the infrared line sensor 17 may be configured by a TDI sensor.
  • an imaging spectroscopic camera that combines an imaging spectroscopic optical system capable of spectroscopically from visible wavelengths to infrared wavelengths and a two-dimensional detection element can be used in addition to the infrared line sensor 17.
  • the irradiation position of the X-ray L1 and the irradiation position of the infrared ray L2 on the inspection object S are different positions with respect to the transport direction.
  • the irradiation position of the infrared ray L2 on the inspection object S is on the front stage side in the transport direction
  • the irradiation position of the X-ray L1 on the inspection target object S is on the rear stage side in the transport direction. ..
  • the anteroposterior relationship between the irradiation position of the X-ray L1 and the irradiation position of the infrared ray L2 on the inspection object S with respect to the transport direction of the inspection object S may be reversed with respect to the example of FIG. That is, the irradiation position of the infrared ray L2 on the inspection object S may be on the rear stage side in the transport direction, and the irradiation position of the X-ray L1 on the inspection target object S may be on the front stage side in the transport direction.
  • the infrared irradiation unit 8 and the infrared detection unit 9 include an infrared irradiation unit 8A and an infrared detection unit 9A for inspecting one side of the inspection object S, and an inspection object. It is composed of an infrared irradiation unit 8B and an infrared detection unit 9B for inspecting the other surface side of S.
  • the infrared irradiation unit 8A and the infrared detection unit 9A are arranged below the transport unit 5 on the introduction port 3 side in the shield box 2. A part of the infrared rays L2 emitted upward from the infrared irradiation unit 8A is reflected on one surface side of the inspection object S on the transport unit 5 and then incident on the infrared detection unit 9A.
  • the gap between the belt conveyors 14 and 14 is located at the irradiation position of the infrared ray L2 on the one side of the inspection object S, and the infrared ray L2 and the inspection object S toward the inspection object S are on one side.
  • the infrared rays L2 reflected by the above do not hit the belt conveyor 14 but go toward the infrared detection unit 9A.
  • the infrared irradiation unit 8B and the infrared detection unit 9B are arranged above the transport unit 5 on the rear side of the infrared irradiation unit 8A and the infrared detection unit 9B.
  • a part of the infrared rays L2 emitted downward from the infrared irradiation unit 8B is reflected on the other surface side of the inspection object S on the transport unit 5 and then incident on the infrared detection unit 9B.
  • the infrared ray L2 passes through the gap between the belt conveyors 14 and 14, but by forming the belt conveyor 14 with a material having transparency to infrared rays, a gap is created in the belt conveyor 14. It may be a mode that does not allow it.
  • the infrared irradiation unit 8 and the infrared detection unit 9 are arranged in the protection unit 21 as shown in FIG.
  • the protection unit 21 is provided so as to cover the infrared irradiation unit 8 and the infrared detection unit 9.
  • the main body portion 21a of the protective portion 21 is made of a material such as lead, tungsten, iron, stainless steel, or copper that can shield the X-ray L1 like the shielding box 2, for example.
  • the front portion of the protective portion 21 (the portion located on the optical path of the infrared L2 from the infrared irradiation unit 8 and the infrared L2 from the inspection object S) is provided with a member that shields the X-ray L1 and transmits the infrared L2.
  • the formed window portion 21b is provided.
  • the material for forming the window portion 21b include lead glass.
  • lead-free radiation shielding glass can also be used as the material for forming the window portion 21b.
  • the lead-free radiation shielding glass may contain heavy elements such as Sr, Ba, Ti, B, W, Si, Gd and Zr.
  • the material for forming the window portion 21b is not limited to glass, and may be a resin such as acrylic.
  • the infrared detection unit 9 has a slit 22 arranged corresponding to the optical path of the infrared ray L2 from the inspection object S.
  • the slit 22 is made of a material such as lead, tungsten, iron, stainless steel, or copper that can shield the X-ray L1.
  • the slit 22 may have a certain thickness or may have a cylindrical shape.
  • the material for forming the slit 22 may be lead glass or lead-free radiation shielding glass, similarly to the window portion 21b.
  • the slit 22 is arranged inside the protection unit 21 in the vicinity of the detection surface of the infrared detection unit 9.
  • the tip end portion of the slit 22 may be located outside the protective portion 21 (window portion 21b).
  • the rear end portion of the slit 22 may be located outside the protective portion 21 (window portion 21b). That is, the entire slit 22 may be located outside the protective portion 21 (window portion 21b).
  • the synchronization unit 10, the image generation unit 11, and the determination unit 12 are physically configured by a computer system including, for example, a processor, a memory, and the like. Examples of computer systems include personal computers, microcomputers, cloud servers, smart devices (smartphones, tablet terminals, etc.) and the like.
  • the image generation unit 11 may be configured by a PLD (programmable logic device) or an integrated circuit such as an FPGA (Field-programmable gate array).
  • the synchronization unit 10 is a part that synchronizes the detection timing of the X-ray L1 in the X-ray detection unit 7 with the detection timing of the infrared ray L2 in the infrared detection unit 9.
  • the synchronization unit 10 is configured by a pulse generator and is communicably connected to the X-ray detection unit 7 and the infrared detection unit 9 (9A, 9B).
  • the synchronization unit 10 sets the time required for the inspection object S from the irradiation position of the infrared ray L2 to the irradiation position of the X-ray L1 as the delay time.
  • the synchronization unit 10 After outputting the synchronization signal to the infrared detection unit 9, the synchronization unit 10 outputs the synchronization signal to the X-ray detection unit 7 when the delay time has elapsed from the detection time of the infrared ray L2 in the infrared detection unit 9.
  • the image generation unit 11 is a part that generates an inspection image of the inspection object S.
  • the image generation unit 11 receives X-ray image data from the X-ray detection unit 7, and receives infrared image data from the infrared detection unit 9 (9A, 9B).
  • the image generation unit 11 generates an X-ray image of the inspection object S based on the X-ray image data, and generates an infrared image of the inspection object S based on the infrared image data. Then, the image generation unit 11 generates a superimposed image in which the X-ray image and the infrared image are superimposed, and outputs the superimposed image as an inspection image to the determination unit 12.
  • the image generation unit 11 corrects one of the X-ray image and the infrared image so that the number of pixels of the X-ray image and the number of pixels of the infrared image match, and then the X-ray image and the red image. Superimpose with the outside image.
  • a correction chart 25 as shown in FIG. 3 is used.
  • the correction chart 25 is, for example, a rectangular stainless steel plate provided with matrix-shaped pores 25a.
  • the correction chart 25 is conveyed by the conveying unit 5, and an X-ray image and an infrared image of the correction chart 25 are acquired.
  • the pixel position of the X-ray image and the pixel position of the infrared image can be matched.
  • Examples of the image conversion method include affine transformation and projective transformation.
  • the determination unit 12 is a portion that determines the presence or absence of a foreign substance in the inspection object S based on the inspection image.
  • the determination unit 12 receives the inspection image of the inspection object S from the image generation unit 11, the determination unit 12 performs predetermined image processing or the like on the inspection image to determine the presence or absence of a foreign substance.
  • the determination unit 12 outputs information indicating the determination result to the display unit 13 together with the inspection image.
  • the display unit 13 is, for example, a display, and displays information indicating a determination result together with an inspection image.
  • the foreign matter inspection device 1 may include a notification unit that notifies the inspection object S of a foreign matter by a warning sound or the like when it is determined that there is a foreign matter.
  • the foreign matter inspection object S conveyed by the inspection object S is sequentially inspected for foreign matter by irradiation with X-ray L1 and inspected for foreign matter by irradiation with infrared ray L2.
  • the X-ray inspection device and the infrared inspection device are separately deployed, it is possible to compactly inspect a wide variety of foreign substances including hard substances and soft substances.
  • the deviation of the conveyed object caused by the transfer of the inspection object S between the devices is reduced, and the inspection accuracy can be improved.
  • the protection unit 21 having a member that shields the X-ray L1 and transmits the infrared ray L2 causes the infrared irradiation unit 8 and the infrared ray detection unit 9. It is provided to cover it. Therefore, it is possible to prevent the infrared irradiation unit 8 and the infrared detection unit 9 from having a problem due to the exposure to the X-ray L1, and the inspection of foreign matter can be performed with high accuracy.
  • the irradiation position of the X-ray L1 on the inspection object S and the irradiation position of the infrared ray L2 are different positions with respect to the transport direction, and the X-ray L1 in the X-ray detection unit 7 has a different position.
  • the detection timing and the detection timing of the infrared L2 in the infrared detection unit 9 are synchronized by the synchronization unit 10.
  • infrared rays L2 are radiated from directly above the inspection object S, while X-rays are obliquely above the inspection object S. It is necessary to irradiate from. In this case, if the inspection object S has a certain thickness, it is conceivable that the inspection position by X-ray and the inspection position by infrared rays are deviated from each other.
  • the irradiation position of the X-ray L1 and the irradiation position of the infrared ray L2 are separated, and the detection timing of the X-ray L1 and the detection timing of the infrared ray L2 are synchronized with each other to inspect the object. Even when S has a certain thickness, the inspection position by the X-ray L1 and the inspection position by the infrared ray L2 can be matched.
  • the synchronization unit 10 is configured by a pulse generator. As a result, the pulse generator can generate a synchronization signal with high accuracy.
  • the infrared detection unit 9 (9A, 9B) detects the infrared rays L2 reflected on one side and the other side of the inspection object S, respectively. Thereby, the inspection from one side and the inspection from the other side of the inspection object S can be suitably carried out.
  • the infrared detection unit 9 has a slit 22 arranged corresponding to the optical path of the infrared ray L2 from the inspection object S.
  • the slit 22 may have a certain thickness or may have a cylindrical shape. By increasing the thickness of the slit 22, it is possible to prevent the incident of scattered X-rays and infrared stray light, and it is possible to reduce noise caused by scattered X-rays and infrared stray light. As a result, the SN ratio is improved and the inspection accuracy is improved.
  • the image generation unit 11 generates a superposed image in which an X-ray image and an infrared image are superimposed.
  • a superimposed image As an inspection image of the inspection object S, the inspection result by the X-ray L1 and the inspection result by the infrared ray L2 can be confirmed at once in the superimposed image.
  • FIG. 4 is a schematic diagram showing the configuration of the foreign matter inspection device according to the second embodiment of the present disclosure.
  • the foreign matter inspection device 31 according to the second embodiment is different from the first embodiment in that the infrared detection unit 9B is configured to detect the infrared ray L2 transmitted through the inspection object S. ing.
  • the belt conveyor 14 constituting the transport unit 5 is made of a material having transparency to infrared rays L2.
  • the infrared irradiation unit 8B is arranged inside the belt conveyor 14 (lower side of the transport surface). The infrared irradiation unit 8B may be protected by a material that shields the X-ray L.
  • the infrared L2 emitted from the infrared irradiation unit 8B passes through the belt conveyor 14 and then transmits from one side to the other side of the inspection object S on the transport unit 5 and is incident on the infrared detection unit 9B.
  • such a foreign matter inspection device 31 can also compactly inspect a wide variety of foreign matters including hard substances and soft substances. Further, it is possible to prevent the infrared irradiation unit 8 and the infrared detection unit 9 from having a problem due to the exposure to the X-ray L1, and the inspection of foreign matter can be performed with high accuracy.
  • the foreign matter inspection device 31 inspects the presence or absence of foreign matter by combining the infrared ray L2 transmitted through the inspection object S and the infrared ray L2 reflected on one side of the inspection object S, so that the inspection accuracy of the foreign matter can be improved. ..
  • the belt conveyor 14 is made of a material having transparency to infrared rays L2, and the infrared irradiation unit 8B is arranged inside the belt conveyor 14, but the irradiation position of infrared rays L2 by the infrared irradiation unit 8B
  • the gap between the belt conveyors 14 and 14 may be positioned so that the infrared rays L2 from the infrared irradiation unit 8B do not hit the belt conveyor 14 but head toward the inspection object S.
  • the infrared irradiation unit 8B irradiates the infrared ray L2 from the lower side of the inspection object S, but the infrared irradiation unit 8B also irradiates the infrared ray L2 from the upper side of the inspection object S. good.
  • FIG. 5 is a schematic diagram showing the configuration of the foreign matter inspection device according to the third embodiment of the present disclosure.
  • FIG. 6 is a block diagram showing functional components of the foreign matter inspection apparatus shown in FIG.
  • the foreign matter inspection device 41 according to the third embodiment is different from the first embodiment in that the inspection by the ultraviolet L3 is further combined. More specifically, the foreign matter inspection device 41 is provided with an ultraviolet irradiation unit 42 and an ultraviolet detection unit 43 in place of the infrared irradiation unit 8A and the infrared detection unit 9A.
  • the ultraviolet detection unit 43 When detecting the autofluorescence of the inspection object S by the ultraviolet L3, the ultraviolet detection unit 43 is composed of a single-line sensor, a multi-line sensor, a TDI sensor and the like capable of detecting the fluorescence (for example, visible light). It is also good.
  • the ultraviolet irradiation unit 42 and the ultraviolet detection unit 43 are arranged in the protection unit 44.
  • the main body portion 44a of the protective portion 44 is formed of a material such as lead capable of shielding the X-ray L1
  • the window portion 44b of the protective portion 44 is a member that shields the X-ray L1 and transmits the ultraviolet L3. Is formed by.
  • a slit 45 is arranged in the vicinity of the detection surface of the ultraviolet ray detection unit 43.
  • the slit 45 may have a certain thickness or may have a cylindrical shape.
  • the tip end portion of the slit 45 may be located outside the protective portion 44 (window portion 44b).
  • the rear end portion of the slit 45 may be located outside the protective portion 44 (window portion 44b). That is, the entire slit 45 may be located outside the protective portion 44 (window portion 44b).
  • a part of the ultraviolet L3 emitted upward from the ultraviolet irradiation unit 42 is reflected on one side of the inspection object S on the transport unit 5 and then incident on the ultraviolet detection unit 43.
  • the ultraviolet ray detection unit 43 outputs ultraviolet image data based on the detection result.
  • the image generation unit 11 generates a superimposed image in which an X-ray image based on the X-ray image data, an infrared image based on the infrared image data, and an ultraviolet image based on the ultraviolet image data are superimposed, and the superimposed image is inspected. It is output to the determination unit 12 as an inspection image of the object S.
  • such a foreign matter inspection device 41 can also compactly inspect a wide variety of foreign matters including hard substances and soft substances. Further, it is possible to prevent problems in the infrared irradiation unit 8, the infrared detection unit 9, the ultraviolet irradiation unit 42, and the ultraviolet detection unit 43 due to the exposure to the X-ray L1, and the inspection of foreign matter can be performed with high accuracy.
  • the ultraviolet L3 for example, it is possible to detect the autofluorescence of the inspection object S, and it is possible to inspect a wider variety of foreign substances.
  • FIG. 7 is a diagram showing the correspondence between the inspection method and the foreign matter that can be inspected.
  • the figure summarizes foreign substances that can be inspected for four inspection methods: metal detectors, X-ray detectors, infrared detectors, and ultraviolet (autofluorescent) detectors.
  • the metal detector is a reference example.
  • A means inspection is possible
  • B B1 to B3
  • C means inspection is difficult.
  • the metal detector can detect iron / SUS.
  • the X-ray detector can detect iron / SUS, stone, glass, rubber, and voids.
  • the infrared detector can detect iron / SUS, stone, rubber, plastic, moisture, mold, and hair.
  • transparent glass is difficult to detect, but translucent glass can be detected (B1 in FIG. 7).
  • bubbles can be detected when the package of the inspection target is transparent (B2 in FIG. 7).
  • the ultraviolet (autofluorescent) detector can detect dust and feathers, and may be applied to the detection of cartilage such as chickens.
  • mold can be detected depending on the type (B3 in FIG. 7).
  • the synchronization unit 10 is configured by a pulse generator, but the synchronization unit 10 may be configured by an encoder.
  • the encoder detects the amount of movement of the inspection object S in the transport unit 5, and when the inspection object S is transported from the irradiation position of the infrared ray L2 to the irradiation position of the X-ray L1, the X-ray detection unit 7 receives it. Output a sync signal.
  • the X-ray detection unit 7 may output a synchronization signal to the infrared detection unit 9, or the infrared detection unit 9 may output a synchronization signal to the X-ray detection unit 7 without using a pulse generator or an encoder.
  • the ultraviolet detection unit 43 is arranged.
  • which surface of the inspection object S on the transport unit 5 is to be irradiated with the X-ray L1, the infrared ray L2, and the ultraviolet ray L3 is appropriately determined according to the type, shape, and the like of the inspection object S. It can be changed.
  • the X-ray L1 transmitted from the other surface side of the inspection object S to the one surface side is detected, but the X-ray L1 transmitted from one surface side to the other surface side of the inspection object S is detected. It may be an aspect to be performed.
  • the number of infrared detection units 9 arranged is not limited to two, and may be one or three or more.
  • a synchronization signal may be output from one infrared detection unit 9 to another infrared detection unit 9 to synchronize.
  • the image generation unit 11 may perform a process of matching the number of pixels of each inspection image of the inspection object S, or a process of dimensionlessizing each inspection image and matching the ratio with each other.
  • the infrared ray L2 reflected on one surface side of the inspection object S and the infrared ray L2 transmitted from one surface side to the other surface side of the inspection object S are detected.
  • the infrared L2 reflected on the other surface side of the inspection object S and the infrared ray L2 transmitted from one surface side to the other surface side of the inspection object S may be detected, and the other surface side of the inspection object S may be detected. It may be a mode to detect infrared rays transmitted to one side from the surface.
  • ultraviolet L3 a configuration for detecting the infrared ray L2 reflected on one side of the inspection object S may be added to the aspect of the second embodiment shown in FIG.
  • the inspection object S may be irradiated with X-rays L1, infrared rays L2, and ultraviolet rays L3 from the side surface side (so-called horizontal irradiation).
  • the protection unit 21 is configured to cover the infrared irradiation unit 8 and the infrared detection unit 9, but as shown in FIG. 8A, the protection unit 21A covering the infrared irradiation unit 8 and the infrared rays
  • the protective unit 21 may be configured by the protective unit 21B that covers the detection unit 9. According to such a configuration, it is possible to prevent the infrared ray L2 emitted from the infrared irradiation unit 8 from reflecting inside the protection unit 21 and being directly detected by the infrared ray detection unit 9. The same applies to the protection unit 44, and as shown in FIG.
  • the protection unit 44 is composed of the protection unit 44A covering the ultraviolet irradiation unit 42 and the protection unit 44B covering the ultraviolet detection unit 43. good. According to such a configuration, it is possible to prevent the ultraviolet L3 emitted from the ultraviolet irradiation unit 42 from being reflected inside the protection unit 44 and being directly detected by the ultraviolet detection unit 43.
  • an infrared multi-line sensor 17A having sensitivity in different wavelength ranges may be used as the infrared line sensor 17 constituting the infrared detection unit 9.
  • the infrared multi-line sensor 17A has an infrared line sensor 171a and an infrared line sensor 172a arranged at predetermined intervals by a dead zone.
  • the infrared multi-line sensor 17A is arranged so that the extending direction of the infrared line sensor 171a and the infrared line sensor 172a is orthogonal to the transport direction of the inspection object S.
  • an optical filter 171b that transmits infrared rays in the first infrared wavelength region is arranged on the infrared line sensor 171a, and a second infrared ray is placed on the infrared line sensor 172a.
  • An optical filter 172b that transmits infrared rays in the wavelength range is arranged.
  • the first infrared wavelength region is, for example, 900 nm or more and 1400 nm or less.
  • the second infrared wavelength region is, for example, 1400 nm or more and 1700 nm or less.
  • the infrared multi-line sensor 17A detects, for example, insects, plastics, wood chips, rubber, etc. in food as foreign substances, the ratio of an infrared image having a wavelength of 900 nm or more and 1400 nm or less and an infrared image having a wavelength of 1400 nm or more and 1700 nm or less or By taking the difference, it becomes easy to distinguish between food and foreign matter (insects, plastic, rubber, etc.). This is because the absorbance of infrared rays of food changes significantly in the region having a wavelength of 1400 nm or more, whereas the absorbance of foreign substances does not change significantly in the region. A part of the first infrared wavelength region and the second infrared wavelength region may be superimposed on each other.
  • the first control pulse that controls the image pickup by the infrared line sensor 17a and the second control pulse that controls the image pickup by the infrared line sensor 172a are the width of the dead zone and the transport of the inspection object S. It may be set based on the speed. In this case, the frequency of the first control pulse and the frequency of the second control pulse may be set based on the width of the dead zone and the transport speed of the inspection object S, and the frequency of the first control pulse may be set with respect to the rising edge of the second control pulse. The delay time of the rise of the control pulse may be set based on the width of the dead zone and the transport speed of the inspection object S. As a result, an infrared image of the inspection object S at the same position can be acquired at different wavelengths.
  • the infrared line sensor 17 constituting the infrared detection unit 9
  • an infrared multi-line sensor 17B having sensitivity in different wavelength ranges may be used.
  • the infrared multi-line sensor 17B has an infrared line sensor 171a, an infrared line sensor 172a, and an infrared line sensor 173a arranged at predetermined intervals by a dead zone.
  • the infrared multi-line sensor 17A is arranged so that the extending directions of the infrared line sensor 171a, the infrared line sensor 172a, and the infrared line sensor 173a are orthogonal to the transport direction of the inspection object S.
  • an optical filter 171b that transmits infrared rays in the first infrared wavelength region is arranged on the infrared line sensor 171a, and a second infrared ray is placed on the infrared line sensor 172a.
  • An optical filter 172b that transmits infrared rays in the wavelength region is arranged, and an optical filter 173b that transmits infrared rays in the third infrared wavelength region is arranged on the infrared line sensor 173a.
  • the first infrared wavelength region is, for example, 900 nm or more and 1200 nm or less.
  • the second infrared wavelength region is, for example, 1200 nm or more and 1400 nm or less.
  • the third infrared wavelength region is, for example, 1400 nm or more and 1700 nm or less.
  • the infrared multi-line sensor 17B detects, for example, insects in food, multiple types of plastic, wood chips, rubber, etc. as foreign matter, an infrared image having a wavelength of 900 nm or more and 1200 nm or less and an infrared image having a wavelength of 1200 nm or more and 1400 nm or less are used.
  • an infrared image having a wavelength of 900 nm or more and 1200 nm or less and an infrared image having a wavelength of 1200 nm or more and 1400 nm or less are used.
  • By taking the ratio or difference from the infrared image with a wavelength of 1400 nm or more and 1700 nm or less it becomes easy to distinguish between food and foreign matter (insects, plastics, rubber, etc.), and multiple types of insects in foods. It is possible to distinguish the types of plastic, wood chips, rubber, etc.
  • first infrared wavelength region and the second infrared wavelength region may be superimposed on each other, and a part of the second infrared wavelength region and the third infrared wavelength region may overlap each other. May be superimposed.

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US12276623B2 (en) 2025-04-15
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