WO2021210151A1 - ソナー - Google Patents

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Publication number
WO2021210151A1
WO2021210151A1 PCT/JP2020/016830 JP2020016830W WO2021210151A1 WO 2021210151 A1 WO2021210151 A1 WO 2021210151A1 JP 2020016830 W JP2020016830 W JP 2020016830W WO 2021210151 A1 WO2021210151 A1 WO 2021210151A1
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WO
WIPO (PCT)
Prior art keywords
vibrating
piezoelectric element
ultrasonic vibrator
vibrating portion
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/016830
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English (en)
French (fr)
Japanese (ja)
Inventor
流田　賢治
和樹 樋口
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Honda Electronics Co Ltd
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Honda Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Electronics Co Ltd filed Critical Honda Electronics Co Ltd
Priority to JP2020549826A priority Critical patent/JP7576834B2/ja
Priority to PCT/JP2020/016830 priority patent/WO2021210151A1/ja
Publication of WO2021210151A1 publication Critical patent/WO2021210151A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features

Definitions

  • the present invention relates to sonar that detects an object to be detected such as a school of fish using ultrasonic waves.
  • Sonar that detects an object to be detected such as a school of fish by transmitting and receiving ultrasonic waves has been known.
  • Sonar is a drive that causes an ultrasonic transducer to perform a swing motion centered on a rotation axis oriented in the vertical direction and a tilt motion centered on a tilt axis orthogonal to the rotation axis, and an ultrasonic transducer that transmits and receives ultrasonic waves. It has a mechanism. Then, by transmitting and receiving ultrasonic waves while moving the ultrasonic vibrator, it is possible to detect underwater (see, for example, Patent Documents 1 to 4). Then, the detection result of detecting underwater is displayed on the screen as a detection image.
  • the ultrasonic vibrator generally includes an acoustic matching layer and a piezoelectric element bonded to the acoustic matching layer.
  • the piezoelectric elements 102 constituting the ultrasonic vibrator 101 are arranged vertically and horizontally when viewed from the thickness direction. It has been proposed to have a structure composed of a plurality of (for example, 100 or more) vibrating portions 103 and having a filler 104 filled between adjacent vibrating portions 103 (see, for example, Patent Documents 5 and 6).
  • each of the vibrating portions 103 is easily deformed in the height direction of the vibrating portion 103, so that the piezoelectric element 102 is easily deformed at each portion. That is, since the piezoelectric element 102 is likely to vibrate, the sensitivity of the ultrasonic vibrator 101 is increased. Further, the filler 104 enters the gap between the vibrating portions 103, so that the vibrating portions 103 are mutually reinforced.
  • Japanese Patent No. 5979537 (Claim 1, FIG. 4, etc.) Japanese Unexamined Patent Publication No. 2013-221791 (paragraph [0036], FIGS. 1 to 6, etc.) Tokusho 01-025435 (figure, etc.) Special Publication No. 63-042755 (Fig. 1 etc.) Japanese Unexamined Patent Publication No. 2016-23666 (Fig. 4B, etc.) Japanese Unexamined Patent Publication No. 2012-182758 (Fig. 6 etc.)
  • each vibrating portion 103 is less likely to be deformed (vibrated) in the height direction, so that there is a problem that the sensitivity of the ultrasonic vibrator 101 is lowered. .. Therefore, it is conceivable to remove the filler 104 to secure the sensitivity, but each vibrating portion 103 has a thin rod shape and has low strength. Therefore, if the ultrasonic vibrator 101 is driven for a long period of time without the filler 104, cracks are likely to occur due to fatigue fracture. That is, when the filler 104 is not filled, there is a problem that the reliability of the ultrasonic vibrator 101 is lowered.
  • the present invention has been made in view of the above problems, and an object thereof is a sonar capable of obtaining a highly reliable ultrasonic vibrator by preventing a decrease in strength of a vibrating portion while maintaining sensitivity. Is to provide. Another object is to provide a sonar capable of obtaining an ultrasonic vibrator that is easy to manufacture and has a low manufacturing cost.
  • the invention according to claim 1 comprises an ultrasonic vibrator that transmits and receives ultrasonic waves, a swirling motion centered on a rotation axis oriented in the vertical direction, and a tilting axis orthogonal to the rotation axis. It is a sonar provided with a drive mechanism for causing the ultrasonic vibrator to perform a tilting motion centered on the ultrasonic vibrator, and the ultrasonic vibrator is a substantially disk-shaped piezoelectric element having a front surface and a back surface on the opposite side thereof.
  • the piezoelectric element is provided with a plurality of groove portions extending in the plane direction so as not to intersect with each other, and a plurality of band-shaped vibrating portions are arranged via the groove portions, and the distance from the center of the piezoelectric element.
  • the gist is the sonar, which is characterized by this.
  • a band-shaped vibrating portion is formed in the piezoelectric element. Therefore, since the vibrating portion is longer in the plane direction than the columnar vibrating portion, the vibrating portion has a stable shape that is less likely to fall, and the strength of the vibrating portion is prevented from decreasing. As a result, the occurrence of cracks in the vibrating portion can be prevented without filling the groove portion with the filler, so that the reliability of the ultrasonic vibrator can be improved. Moreover, in claim 1, since the band-shaped vibrating portion is obtained by forming the groove portions extending in the plane direction so as not to intersect each other, when the groove portion extending vertically and horizontally is formed to obtain the above-mentioned columnar vibrating portion.
  • the number of times the groove is formed which is required to form the vibrating portion, is reduced. Therefore, since the groove portion can be easily formed, the manufacturing cost of the ultrasonic vibrator can be reduced. Further, as the number of times the groove is formed decreases, the number of divided electrodes also decreases, so that the time and effort required to connect each of the divided electrodes with a conductive member is also reduced. Compared with the case where a groove portion extending vertically and horizontally is formed to obtain a columnar vibrating portion, the vibration amplitude of the vibrating portion is reduced due to the influence of the vibrating portions being connected in a band shape.
  • the reduction of the vibration amplitude is compensated by the increase of the vibration amplitude due to not filling the groove with the filler and the increase of the area of the electrode described above, so that the transmission / reception sensitivity of the ultrasonic vibrator results in columnar vibration. It is maintained as if it were to get a part.
  • the longer the distance from the center of the piezoelectric element the shorter the length of the vibrating portion.
  • the outer shape of the entire vibrating portion approaches a circle
  • the directivity characteristic of the ultrasonic wave irradiated in the perpendicular direction of the piezoelectric element approaches axisymmetry.
  • the ultrasonic beam becomes a spotlight, which makes it easier to recognize the area where the ultrasonic scan is performed.
  • the piezoelectric element has a substantially disk shape, the outer shape of the ultrasonic vibrator can be made circular.
  • the ultrasonic vibrator When the ultrasonic vibrator is stored in a hemispherical sonar dome, a small and highly sensitive ultrasonic vibrator can be secured because a wider vibrating part area can be secured if the outer shape of the ultrasonic vibrator is circular. It can be preferably obtained.
  • the ultrasonic vibrator is arranged so that the groove portion has an angle of 60 ° or more and 120 ° or less with respect to the tilting axis.
  • the plurality of vibrating portions arranged via the groove portions have a band shape extending in a direction substantially orthogonal to the tilt axis.
  • each vibrating portion has a band shape extending in a direction orthogonal to the tilting axis.
  • the "substantially disk-shaped piezoelectric element” includes not only a disk-shaped piezoelectric element but also an elliptical plate-shaped piezoelectric element, an oval-shaped piezoelectric element, and the like. That is, it is preferable to use a piezoelectric element in which a part or all of the outer circumference has an arc shape.
  • the driving mode of the ultrasonic vibrator is the first mode for driving all the vibrating parts and one located in the central region of the piezoelectric element.
  • the gist is that the unit can be switched to the second mode of driving the vibrating unit.
  • the outer shape of the entire vibrating portion is substantially circular, so that the piezoelectric element The directional characteristics of the ultrasonic waves emitted in the perpendicular direction of the above approach to axial symmetry.
  • the ultrasonic vibrator is driven in the second mode of driving a part of the vibrating portion, the ultrasonic waves emitted from the band-shaped vibrating portion of the ultrasonic vibrator alone are emitted in the longitudinal direction of the vibrating portion. Although it has a relatively narrow directional angle, it has a relatively wide directional angle in the width direction of the vibrating portion (arrangement direction of each vibrating portion).
  • the directivity angle of the ultrasonic wave in the scanning direction can be further widened.
  • the step angle during the scanning operation can be made rough, so that the detection time can be shortened as compared with the first aspect.
  • the gist of the invention according to claim 4 is to irradiate ultrasonic waves from all the vibrating parts in the same phase in the first aspect in claim 3.
  • the ultrasonic waves in the straight-ahead direction do not cancel each other so much, but the ultrasonic waves spreading laterally from the straight-ahead direction are transmitted from the adjacent vibrating portion. It cancels out with the emitted ultrasonic waves. Therefore, the ultrasonic waves emitted from the ultrasonic vibrator travel mainly in the normal direction of the piezoelectric element.
  • the gist of the invention according to claim 5 is that, in any one of claims 1 to 4, the width of the vibrating portion is smaller than the thickness of the piezoelectric element.
  • the vibrating portion since the width of the vibrating portion is smaller than the thickness of the piezoelectric element, the vibrating portion can be formed into an elongated shape having a width smaller than the height.
  • the vibrating part contracts in the height direction, the vibrating part tends to be deformed so as to become thicker by the contracted body integral, and when the vibrating part extends in the height direction, the vibrating part becomes wider. It tends to be deformed toward the center of the vibrating portion along the direction. That is, the vibrating portion has a shape that easily vibrates in the height direction, and the electromechanical coupling coefficient becomes high, so that the sensitivity of the ultrasonic vibrator can be increased.
  • the gist of the invention according to claim 6 is that, in claim 5, the width of the vibrating portion is one-fourth or more and one-half or less of the thickness of the piezoelectric element.
  • the width of the vibrating portion is one-fourth or more of the thickness of the piezoelectric element, it is possible to prevent the strength of the vibrating portion from decreasing. Further, since the width of the vibrating part is less than half the thickness of the piezoelectric element, the vibrating part has an elongated shape that easily vibrates in the height direction, and the electromechanical coupling coefficient is surely increased. The sensitivity of the vibrator can be surely increased.
  • a highly reliable ultrasonic vibrator can be obtained by preventing a decrease in the strength of the vibrating portion while maintaining the sensitivity.
  • FIG. 2 is a perspective view conceptually showing an ultrasonic vibrator driven in all drive modes in the second embodiment.
  • Impedance characteristic diagram showing the result of piezoelectric harmonic analysis simulation in all drive modes. The figure which simulated the propagation state of the ultrasonic wave in the XZ plane of a piezoelectric element in all drive modes.
  • Impedance characteristic diagram showing the result of piezoelectric harmonic analysis simulation in the partial drive mode.
  • the sonar 11 of the present embodiment is mounted on the bottom of the ship 10 and used.
  • the sonar 11 is a device that detects an object to be detected S0 such as a school of fish existing in the water by irradiating the water with ultrasonic waves U1.
  • the sonar 11 is attached to the elevating device 12.
  • the elevating device 12 is a device that raises and lowers the sonar 11 so that the sonar 11 appears and disappears from the bottom of the ship into the water.
  • a liquid crystal monitor 13 is electrically connected to the sonar 11 and the elevating device 12.
  • the liquid crystal monitor 13 is installed in the wheelhouse of the ship 10 and has an operation unit 14 and a display unit 15.
  • the sonar 11 includes a sonar dome 20.
  • the sonar dome 20 is formed by using a resin material such as ABS resin (acrylonitrile butadiene styrene resin), and is composed of an upper case 21, a lower case 22, and a lid 23.
  • the upper case 21 is a bottomed cylindrical case that opens at the lower end
  • the lower case 22 is a bottomed cylindrical case that opens at the upper end.
  • the lower end of the lower case 22 has a dome shape (hemispherical shape).
  • the lid 23 has a disk shape and is for closing the lower end side opening of the upper case 21 and the upper end side opening of the lower case 22.
  • the upper accommodation space 24 is formed by the lid 23 and the upper case 21, and the lower accommodation space 25 is formed by the lid 23 and the lower case 22.
  • the sonar dome 20 houses an ultrasonic vibrator 41 that transmits and receives ultrasonic waves U1, a case 40 that houses the ultrasonic vibrator 41, and a drive mechanism 30 that moves the ultrasonic vibrator 41. ..
  • the drive mechanism 30 includes a scan motor 31, a tilt motor 32, and the like.
  • the scan motor 31 is installed in the central portion of the lid 23 in the upper accommodation space 24.
  • a stepping motor is used as the scan motor 31 of the present embodiment.
  • the rotation shaft 31a of the scan motor 31 extends along the vertical direction, and protrudes into the lower accommodation space 25 through the through hole 33 provided in the central portion of the lid 23.
  • the tip of the rotating shaft 31a is connected to the central portion of the disk-shaped support plate 34, and the support frame 35 is attached to the lower surface of the support plate 34.
  • the support frame 35 has a U-shape having a pair of arm portions 35a.
  • the case 40 is formed in a bottomed cylindrical shape having one end opened by using a resin material such as ABS resin. Further, the case 40 is provided with a tilting shaft 36 orthogonal to the rotating shaft 31a.
  • the tilting shaft 36 is divided into two tilting shaft portions 36a, and both tilting shaft portions 36a project in opposite directions from both side portions (left side portion and right side portion in FIGS. 4 and 7) of the case 40. ..
  • the both tilting shaft portions 36a are fitted into through holes provided in both arm portions 35a of the support frame 35 via bearings (not shown).
  • the support plate 34, the support frame 35, the case 40, and the ultrasonic vibrator 41 rotate around the rotation shaft 31a.
  • the irradiation direction of the ultrasonic wave U1 output from the ultrasonic vibrator 41 changes along the circumferential direction of the rotation shaft 31a.
  • each boss 46 is provided with a screw hole portion 47, respectively.
  • the screw hole portions 47 are arranged at equal angular intervals with respect to the center C1 of the case 40.
  • the tilt motor 32 is attached to the upper end of the support frame 35.
  • a stepping motor is used as the tilt motor 32 of the present embodiment.
  • the output shaft 32a of the tilt motor 32 is arranged in parallel with the pair of tilting shaft portions 36a, and a pinion gear 32b is attached to the tip portion thereof.
  • the pinion gear 32b meshes with a substantially semicircular tilt gear 37 attached to the case 40. Therefore, when the output shaft 32a of the tilt motor 32 rotates, the pinion gear 32b and the tilt gear 37 rotate, and the case 40 and the ultrasonic vibrator 41 are centered on the tilt shaft 36 (tilt shaft portion 36a). Perform a tilting motion. Along with this, the irradiation angle of the ultrasonic wave U1 output from the ultrasonic vibrator 41 also changes with the tilt of the ultrasonic vibrator 41.
  • the ultrasonic vibrator 41 includes a base material 42 and a piezoelectric element 43.
  • the base material 42 is a disk-shaped resin plate-like material that also serves as an acoustic matching layer.
  • Four overhanging portions 44 are provided on the outer peripheral portion of the base material 42, and each overhanging portion 44 is provided with a screw hole 45.
  • the screw holes 45 are arranged at equal angular intervals with respect to the center O1 of the piezoelectric element 43 (ultrasonic vibrator 41). Further, each screw hole 45 is countersunk at the opening on the back surface 42b side of the base material 42.
  • the piezoelectric element 43 is, for example, a substantially disk-shaped ceramic plate-like material formed by using lead zirconate titanate (PZT), which is a piezoelectric ceramic. As shown in FIGS. 6, 8 and 9, the outer diameter of the piezoelectric element 43 is smaller than the outer diameter of the base material 42, so that the area of the piezoelectric element 43 is smaller than the area of the base material 42. Further, the piezoelectric element 43 has a front surface 51 joined to the base material 42, a back surface 52 on the opposite side of the front surface 51, and an outer peripheral surface 53 orthogonal to the front surface 51 and the back surface 52. Further, as shown in FIGS.
  • PZT lead zirconate titanate
  • a front electrode 54 is formed on the front surface 51 of the piezoelectric element 43, and a back electrode 55 is formed on the back surface 52 of the piezoelectric element 43.
  • the entire front surface 51 of the piezoelectric element 43 is bonded to the base material 42 via the front side electrode 54 and the adhesive layer 56 (see FIG. 10). Further, the piezoelectric element 43 is polarized in the thickness direction by applying a voltage between the front side electrode 54 and the back side electrode 55.
  • the piezoelectric element 43 is composed of a plurality of vibrating portions 90 divided so as to extend along the thickness direction of the piezoelectric element 43.
  • Each vibrating portion 90 is configured by forming a plurality of groove portions K1 with respect to the back surface 52 of the piezoelectric element 43.
  • Each groove K1 extends in one direction (Y direction in FIG. 8) along the surface direction so as not to intersect with each other. Therefore, each vibrating portion 90 is arranged via the groove portion K1 in a direction orthogonal to the direction in which the groove portion K1 extends (X direction in FIG. 8).
  • each groove K1 is perpendicular to the central axis A1 of the tilting shaft 36.
  • the center O1 of the piezoelectric element 43 is located on the groove portion K1 located in the central portion of each groove portion K1.
  • the width of each groove K1 is smaller than the width of the vibrating portion 90, and in the present embodiment, it is 1/10 or more and 1/3 or less of the width of the vibrating portion 90.
  • each groove K1 is not filled with any filler made of a resin material (epoxy resin, urethane resin, silicone resin, etc.) or an adhesive (epoxy adhesive, etc.), each groove K1 is as a whole.
  • the gap is K0.
  • each vibrating portion 90 has a pair of outer vibrating portions 91 located at both ends (left end and right end in FIG. 8) and a plurality of inner vibrating portions 91 arranged between the two outer vibrating portions 91. It is composed of a vibrating unit 92.
  • Each vibrating portion 90 has a band shape when viewed from the rear.
  • the surface 93a (back surface 52) of the outer vibrating portion 91 is composed of two sides 94a and 94b, and the sides 94a are arcuate in rear view.
  • the side 94b is linear in the rear view.
  • the surface 93b (back surface 52) of the inner vibrating portion 92 is composed of four sides 95a, 95b, 95c, 95d, and the sides 95a, 95c are viewed from the back. It has an arc shape, and the sides 95b and 95d are linear in rear view.
  • the outer surface 96 of both outer vibrating portions 91 and both end surfaces 97 of each inner vibrating portion 92 form an outer peripheral surface 53 of the piezoelectric element 43.
  • the vibrating portion 90 (inner vibrating portion 92) located at the central portion has the longest length, which is substantially equal to the outer diameter of the piezoelectric element 43.
  • the width W1 of the outer vibrating portion 91 is larger than the width W2 of the inner vibrating portion 92.
  • both outer vibrating portions 91 and each inner vibrating portion 92 are connected to each other at the end portion on the front surface 51 side of the piezoelectric element 43.
  • the length of the outer vibrating portion 91 is smaller than the length of the inner vibrating portion 92. Further, the length of the outer vibrating portion 91 is larger than the height H1 of the outer vibrating portion 91, and the height H1 of the outer vibrating portion 91 is larger than the width W1 of the outer vibrating portion 91. That is, the minimum value of the length of the vibrating portion 90 is larger than the height H1 of the vibrating portion 90.
  • the length of the inner vibrating portion 92 is larger than the height H1 of the inner vibrating portion 92, and the height H1 of the inner vibrating portion 92 is larger than the width W2 of the inner vibrating portion 92.
  • the height H1 of the vibrating portions 91 and 92 is equal to the depth of the groove portion K1.
  • the thickness of the base material 42 described above is smaller than the height H1 of the vibrating portions 91 and 92.
  • the thickness H2 of the portion of the piezoelectric element 43 where the vibrating portions 91 and 92 are connected to each other is smaller than the thickness of the base material 42.
  • the thickness H3 of the piezoelectric element 43 (height H1 of the vibrating portions 91 and 92) is arbitrarily determined. For example, the "longitudinal vibration" of the vibrating portions 91 and 92 becomes the target resonance frequency. Is decided.
  • the width W of the vibrating portion 90 (specifically, the width W1 of the outer vibrating portion 91 or the width W2 of the inner vibrating portion 92) is the thickness H3 of the piezoelectric element 43. More specifically, it is one-fourth or more and one-half or less of the thickness H3. Further, in the piezoelectric element 43 of the present embodiment, the width W of the vibrating portion 90 and the minimum value L of the outer diameter of the piezoelectric element 43 (in the present embodiment, the diameter of the piezoelectric element 43) are 0.05 ⁇ W /. The relationship of L ⁇ 0.1, particularly the relationship of 0.07 ⁇ W / L ⁇ 0.1 is satisfied.
  • the piezoelectric element 43 has 10 or more vibrating portions 90.
  • the composite vibration is reduced and the sensitivity of the specific portion is increased, so that the sensitivity in the vicinity of the specific portion is also increased and the specific band of the ultrasonic wave U1 is widened.
  • back side electrodes 55 are formed on the surface 93a of both outer vibrating portions 91 and on the surface 93b of each inner vibrating portion 92, respectively.
  • a wire rod 60 (conductive member) made of a conductive metal (copper in this embodiment) having a small electric resistance such as copper, silver, and tin is joined so as to bridge each of the plurality of back side electrodes 55.
  • the wire rod 60 is arranged at a position deviated from the center O1 of the piezoelectric element 43 (ultrasonic vibrator 41).
  • the wire rod 60 of the present embodiment has an undulating shape (wavy shape).
  • the wire rod 60 is connected to each back side electrode 55 via a solder 61. By connecting the wire rod 60, the wire rod 60 becomes a common electrode on the surface 93a of both outer vibrating portions 91 and the surface 93b of each inner vibrating portion 92.
  • the first lead wire 62 is connected to the front side electrode 54, and the second lead wire 63 is connected to the back side electrode 55.
  • the first lead wire 62 is connected to a side terminal (not shown) extending outward from the front side electrode 54 by soldering or the like.
  • the second lead wire 63 is connected to any one of the plurality of back side electrodes 55 by soldering or the like. Then, the first lead wire 62 and the second lead wire 63 are bound by the wiring tube 64 and pulled out of the case 40 through the wiring insertion hole 49 provided in the upper part of the case 40.
  • the first lead wire 62 is connected to the side terminal, a metal foil (not shown) such as copper foil is attached on the front side electrode 54 or the surface 42a of the base material 42 to the metal foil.
  • the first lead wire 62 may be connected by soldering or the like.
  • the wiring insertion hole 49 is arranged on the opposite side of the tilt gear 37 via the center C1 of the case 40. Therefore, it is possible to prevent the wiring tube 64 passing through the wiring insertion hole 49 from interfering with the tilt gear 37. Further, the wiring insertion hole 49 is arranged in the vicinity of the tilting shaft portion 36a. Therefore, it is possible to prevent the wiring tube 64 (first lead wire 62 and second lead wire 63) from fluttering when the ultrasonic vibrator 41 tilts.
  • a sheet-shaped soundproofing material 65 (backing material) is attached to the back surface 52 side of the piezoelectric element 43.
  • the soundproofing material 65 is for suppressing reverberation, and is also attached to the inner peripheral surface of the case 40.
  • the soundproofing material 65 includes a resin material or rubber containing particles or fibers made of metal or ceramics, or a resin material having pores dispersedly provided (sponge or the like). Can be used.
  • the sonar dome 20 shown in FIGS. 3 and 4 is filled with an ultrasonic wave propagating liquid (not shown) that propagates the ultrasonic wave U1. Further, a part of the ultrasonic wave propagating liquid flows into the case 40 through the communication port 48 provided in the case 40, and flows into the gap K0 (groove K1) between the adjacent vibrating portions 90 in the piezoelectric element 43. , Fills the void K0.
  • the ultrasonic wave propagating liquid of this embodiment is liquid paraffin.
  • the intrinsic acoustic impedance of the base material 42 described above is smaller than the intrinsic acoustic impedance of the piezoelectric element 43, and is larger than the intrinsic acoustic impedance of the ultrasonic propagating liquid and the intrinsic acoustic impedance of water.
  • the liquid crystal monitor 13 of the sonar 11 includes a control device 70 that controls the entire device in an integrated manner.
  • the control device 70 is composed of a well-known computer including a CPU 71, a ROM 72, a RAM 73, and the like.
  • the CPU 71 is electrically connected to the scan motor 31 and the tilt motor 32 via the motor driver 81, and controls them by various drive signals. Further, the CPU 71 is electrically connected to the ultrasonic vibrator 41 via the transmission / reception circuit 82. The transmission / reception circuit 82 outputs an oscillation signal to the ultrasonic vibrator 41 to drive the ultrasonic vibrator 41. As a result, the ultrasonic transducer 41 irradiates (transmits) the ultrasonic wave U1 into water. Further, an electric signal indicating the ultrasonic wave U1 (reflected wave U2) received by the ultrasonic vibrator 41 is input to the transmission / reception circuit 82. Further, the CPU 71 is electrically connected to the elevating device 12, the operation unit 14, the display unit 15, and the GPS (Global Positioning System) receiving unit 83, respectively.
  • GPS Global Positioning System
  • the CPU 71 shown in FIG. 12 controls the transmission / reception circuit 82 to irradiate the ultrasonic wave U1 from the ultrasonic vibrator 41, and also controls to drive the elevating device 12.
  • the CPU 71 controls the motor driver 81 to drive the scan motor 31 and the tilt motor 32, respectively.
  • the position information of the ship 10 received by the GPS receiving unit 83 is input to the CPU 71.
  • the CPU 71 receives the reception signal generated when the ultrasonic vibrator 41 receives the reflected wave U2 via the transmission / reception circuit 82. Then, the CPU 71 generates detection image data based on the received reception signal, and stores the generated detection image data in the RAM 73. The CPU 71 controls the display unit 15 to display the detected image based on the detected image data stored in the RAM 73.
  • the power (not shown) of the sonar 11, the elevating device 12, and the liquid crystal monitor 13 is turned on.
  • the position information indicating the position of the ship 10 is input from the GPS receiving unit 83 to the CPU 71 of the control device 70.
  • the CPU 71 controls the transmission / reception circuit 82 to output an oscillation signal to the ultrasonic vibrator 41, and drives the ultrasonic vibrator 41.
  • each vibrating portion 90 of the piezoelectric element 43 repeats contraction (see FIG. 13B) and expansion (see FIG. 13A).
  • the vibrating portion 90 contracts in the height direction, the volume of the vibrating portion 90 contracted in the width direction, specifically, on the outer peripheral side of the vibrating portion 90 (see arrow F1 in FIG. 13B).
  • the vibrating portion 90 transforms so that it becomes thicker by the amount. Then, when the vibrating portion 90 extends in the height direction, the vibrating portion 90 deforms in the width direction, specifically, toward the central portion side of the vibrating portion 90 (see arrow F2 in FIG. 13A). As a result, the piezoelectric element 43 vibrates, and the ultrasonic wave U1 is irradiated (transmitted) to the water from the ultrasonic vibrator 41. Then, when the ultrasonic wave U1 reaches the object to be detected S0 (see FIG. 1), the ultrasonic wave U1 is reflected by the object to be detected S0 to become a reflected wave U2, which propagates toward the sonar 11 and is propagated toward the sonar 11.
  • the ultrasonic wave U1 (reflected wave U2) received by the ultrasonic vibrator 41 is converted into a received signal and input to the CPU 71 via the transmission / reception circuit 82. At this point, the object to be detected S0 is detected.
  • the CPU 71 controls to drive the scan motor 31 via the motor driver 81, and causes the ultrasonic vibrator 41 to perform a turning motion around the rotation shaft 31a. Further, the CPU 71 controls to drive the tilt motor 32 via the motor driver 81, and causes the ultrasonic vibrator 41 to perform a tilting motion centered on the tilting shaft 36. As a result, the irradiation direction of the ultrasonic wave U1 gradually changes, and the detection range also gradually changes accordingly. After that, when the operator turns off the power, the control device 70 stops the transmission / reception circuit 82, and the irradiation of the ultrasonic wave U1 and the reception of the reflected wave U2 are completed.
  • the base material 42 is prepared. Specifically, a resin plate made of glass epoxy (FR-4) or the like is cut into a circular shape. Further, a ceramic plate-like material to be the piezoelectric element 43 is prepared. Specifically, a disc-shaped ceramic sintered body made of lead zirconate titanate (PZT) is produced, and then surface polishing is performed to obtain a ceramic plate-shaped product. Next, an electrode forming step is performed to form the front side electrode 54 on the front surface 51 of the ceramic plate-shaped material and the back side electrode 55 on the back surface 52 of the ceramic plate-shaped material.
  • PZT lead zirconate titanate
  • the silver paste is applied to the front surface 51 and the back surface 52 of the ceramic plate-shaped material, respectively, and the applied silver paste is fired to form the electrodes 54 and 55. Then, by applying a voltage between the front side electrode 54 and the back side electrode 55, a polarization process is performed to polarize the ceramic plate-like object in the thickness direction.
  • a ceramic plate-like material is joined to one side of the base material 42 via the front side electrode 54.
  • an adhesive epoxy-based adhesive or the like
  • an adhesive layer 56 is applied to either the surface of the front electrode 54 or the surface 42a of the base material 42, and the base material 42 is coated.
  • brazing may be performed using solder or the like.
  • a plurality of groove portions K1 are formed on the back surface 52 side of the ceramic plate-like material by performing cutting or the like.
  • the ceramic plate-shaped object is divided into a plurality of vibrating portions 90, and the back side electrodes 55 formed on the back surface 52 of the ceramic plate-shaped object are also divided into a plurality of (the same number as the vibrating portions 90).
  • the piezoelectric element 43 is completed. Since each vibrating portion 90 is divided in a state of being connected to each other at the end portion of the piezoelectric element 43 on the front surface 51 side, the front electrode 54 formed on the front surface 51 is not divided.
  • each back side electrode 55 is used as a common electrode for the surfaces 93a and 93b of each vibrating portion 90.
  • the wire rod 60 of the present embodiment is joined to each back side electrode 55 by soldering, but is joined to each back side electrode 55 by another joining method (brazing, bonding with an adhesive, etc.). There may be. Then, at this point, the ultrasonic vibrator 41 is completed.
  • the first lead wire 62 is connected to the front side electrode 54 via a side terminal (not shown) by soldering or the like, and to the back side electrode 55.
  • the second lead wire 63 is connected by soldering or the like.
  • a soundproofing material 65 for suppressing reverberation is attached to the back surface 52 side of the piezoelectric element 43. Further, the soundproofing material 65 is also attached to the inner surface of the case 40. After that, the piezoelectric element 43 of the ultrasonic vibrator 41 is housed in the case 40.
  • the ultrasonic vibrator 41 is fixed to the case 40 (see FIGS. 5 and 6). Further, the case 40 to which the ultrasonic vibrator 41 is fixed is housed in the sonar dome 20, and the pair of tilting shaft portions 36a of the case 40 are placed in the through holes provided in both arm portions 35a of the support frame 35, respectively. Fit. Then, the sonar dome 20 is filled with an ultrasonic propagating liquid (not shown).
  • the ultrasonic vibrator 41 is arranged so that the groove portion K1 formed in the piezoelectric element 43 forms an angle of 90 ° with respect to the tilting shaft 36.
  • the plurality of vibrating portions 90 arranged via the groove portions K1 have a band shape extending in a direction orthogonal to the tilting axis 36.
  • the ultrasonic wave U1 emitted from the band-shaped vibrating portion 90 of the ultrasonic vibrator 41 alone has directivity having a wide directivity in the width direction of the vibrating portion 90 (arrangement direction of each vibrating portion 90). More specifically, as shown in FIGS.
  • the ultrasonic waves U1 in the straight-ahead direction do not cancel each other so much.
  • the ultrasonic wave U1 spreading laterally from the straight direction cancels out with the ultrasonic wave U1 emitted from the adjacent vibrating portion 90. Therefore, the ultrasonic wave U1 is surely irradiated downward, not to the side of the piezoelectric element 43.
  • the adjacent vibrating portions 90 since the adjacent vibrating portions 90 do not exist, a stronger side lobe is irradiated toward the side where the vibrating portions 90 do not exist.
  • the directional angle of the ultrasonic wave U1 expands in the arrangement direction of each vibrating portion 90. Therefore, in the present embodiment in which each vibrating portion 90 extends in the direction orthogonal to the tilt axis 36, the directional angle of the ultrasonic wave U1 is increased. It widens in the turning direction of the rotating shaft 31a orthogonal to the tilting shaft 36. As a result, the detection range in one scan is widened, so that the number of scans required when performing an all-around scan can be reduced. Therefore, the detection speed can be increased without causing detection omission, and the detection time can be shortened.
  • the band-shaped vibrating portion 90 is formed in the piezoelectric element 43 of the ultrasonic vibrator 41.
  • the vibrating portion 90 is longer in the plane direction than the columnar vibrating portion, the joint area between the end portion (the portion where the vibrating portions 90 are connected to each other) on the front surface 51 side of the piezoelectric element 43 and the vibrating portion 90 is increased. Since the vibrating portion 90 becomes large and has a stable shape in which the vibrating portion 90 does not easily fall down, it is possible to prevent a decrease in the strength of the vibrating portion 90.
  • the band-shaped vibrating portion 90 is obtained by forming the groove portion K1 extending in one direction. Therefore, as compared with the case where the groove portions extending vertically and horizontally are formed to obtain the columnar vibrating portion described above, the number of times of forming the groove portion K1 required for forming the vibrating portion 90 is halved, and the formation of the groove portion K1 becomes easy. .. Further, as the number of times the groove K1 is formed decreases, the number of divisions of the back side electrode 55 also decreases, so that the load of connecting the wire rod 60 to the back side electrode 55 is reduced. Therefore, the manufacturing cost of the ultrasonic vibrator 41 can be reduced.
  • each groove K1 formed in the piezoelectric element 43 when the width of each groove K1 formed in the piezoelectric element 43 is increased, the area of each vibrating portion 90 becomes smaller as the width of each vibrating portion 90 becomes smaller, so that the ultrasonic transducer is used. The output of 41 is reduced.
  • the width of each groove K1 is 1/10 or more and 1/3 or less of the width of the vibrating portion 90, which is considerably smaller than the width of the vibrating portion 90. As a result, since the area of each vibrating portion 90 is secured, the output of the ultrasonic vibrator 41 can be secured even if the groove portion K1 is formed.
  • the outer vibrating portion 91 is larger in the width direction than the inner vibrating portion 92. Therefore, the strength of the outer vibrating portion 91 whose entire outer surface 96 is exposed to the outside of the piezoelectric element 43 is increased, and the occurrence of cracks in the outer vibrating portion 91 is surely prevented. Therefore, the piezoelectric element 43 can be reinforced at the outer peripheral portion where an external force is likely to act because it is exposed to the outside, and the reliability of the ultrasonic vibrator 41 is further improved.
  • the vibrating portion 90 since the vibrating portion 90 becomes longer in the plane direction, the vibrating portion 90 has a stable shape that does not easily fall, so that the gap K0 (groove portion K1) between the vibrating portions 90 is filled with a filler. You don't have to fill it. In this case, since the deformation of the vibrating portion 90 in the height direction is not hindered by the filler, it is possible to prevent the sensitivity of the ultrasonic vibrator 41 from being lowered due to the filling of the filler.
  • the ultrasonic vibrator 41 provided with the disc-shaped piezoelectric element 43 rotates inside the hemispherical portion (lower end portion of the lower case 22) of the sonar dome 20. It is a structure to do. That is, since the lower end portion of the lower case 22 and the ultrasonic vibrator 41 both have an arcuate portion, the inner surface of the lower end portion of the lower case 22 and the ultrasonic vibrator 41 can be arranged close to each other. .. Therefore, the dead space in the sonar dome 20 is reduced, and the sonar 11 can be miniaturized.
  • the front surface of the piezoelectric element 43 is formed.
  • the front side electrode 54 formed on the 51 is also divided. Therefore, even if the first lead wire 62 is connected to the front side electrode 54 (side terminal), there is a problem that continuity cannot be achieved with the entire front side electrode 54.
  • the vibrating portions 90 are connected to each other at the end portion on the front surface 51 side of the piezoelectric element 43, the front side electrode 54 formed on the front surface 51 is not divided.
  • the sonar 11 can be easily manufactured because the continuity with the entire front electrode 54 can be ensured. Further, since the vibrating portions 90 are connected to each other at the end portion of the piezoelectric element 43 on the front surface 51 side, the entire front surface 51 of the piezoelectric element 43 comes into contact with the surface 42a of the base material 42, so that the contact area between the two is secured. The bonding strength between the piezoelectric element 43 and the base material 42 is improved. As a result, the reliability of the ultrasonic vibrator 41 becomes even higher.
  • the ultrasonic vibrator of the first embodiment has only one energizing system for a plurality of vibrating parts
  • the ultrasonic vibrator of the present embodiment has a plurality of energizing systems for a plurality of vibrating parts. It is different in that it is.
  • each vibrating portion 113 has a vibrating portion 113a located at the center in the arrangement direction of the vibrating portion 113 and a vibration located at both ends in the arrangement direction. It is divided into parts 113b and 113c.
  • the wire rod 60a is joined so as to bridge each of the back side electrodes 55 of each vibrating portion 113a
  • the wire rod 60b is joined so as to bridge each of the back side electrodes 55 of each vibrating portion 113b.
  • the wire rod 60c is joined so as to bridge each of the back side electrodes 55 of the above.
  • a second lead wire 63 (see FIG. 6) is connected to any one of the back side electrodes 55 of each vibrating portion 113a by soldering or the like.
  • another second lead wire 63 is soldered to any one of the back side electrodes 55 of each vibrating portion 113b and to any one of the back side electrodes 55 of each vibrating part 113c. Is connected by.
  • the number of the second lead wires 63 shown in FIG. 6 is one, in the present embodiment, the number of the second lead wires 63 increases according to the number of divided groups.
  • the wire rod 60b and the wire rod 60c may be connected, and one second lead wire 63 may be connected to any one of the back side electrodes 55 of the vibrating portions 113b and 113c.
  • the width W3 of the outer vibrating portion 114 located at both ends of each vibrating portion 113 and the width W4 of the inner vibrating portion 115 arranged between the pair of outer vibrating portions 114 are equal. It has become.
  • the CPU 71 sets the driving mode of the ultrasonic vibrator 111 to the full drive mode (see FIGS. 15 and 16) which is the first mode and the partial drive which is the second mode. It is possible to switch to the mode (see FIGS. 21 and 22).
  • the full drive mode is a mode for driving all the vibrating portions 113 constituting the piezoelectric element 112.
  • the partial drive mode is a mode for driving a part of the vibrating portion 113 located in the central region of the piezoelectric element 112, specifically, four vibrating portions 113a located in the central portion in the arrangement direction.
  • the first electric path connected to the vibrating portion 113a located in the central portion and the second electric path connected to the other vibrating portions 113b and 113c are separate systems from each other. There is. Therefore, it is possible to energize only one of the first electric path and the second electric path to drive a part of the vibrating part 113, and also to drive both of them at the same time to drive all the driving parts 113. It is possible.
  • the CPU 71 When the drive mode of the ultrasonic vibrator 111 is switched to the full drive mode, the CPU 71 has one second lead wire 63 forming the first electric path and two lead wires 63 forming the second electric path. Control is performed so that the transmission / reception circuit 82 outputs an oscillation signal to each vibrating unit 113 via the second lead wire 63. As a result, all the vibrating units 113 vibrate, and the ultrasonic wave U1 is irradiated (transmitted) to the water from the ultrasonic vibrator 111. On the other hand, when the driving mode of the ultrasonic oscillator 111 is switched to the partial driving mode, the CPU 71 moves from the transmission / reception circuit 82 to the central portion via one second lead wire 63 constituting the first electric path.
  • Control is performed to output an oscillation signal to the located vibrating unit 113a.
  • the ultrasonic vibrator 111 irradiates the water with ultrasonic waves U1.
  • the vibrating portion 113a that irradiates the ultrasonic wave U1 when the partial drive mode is switched has a distance shorter than the vibrating portions 113b and 113c of the vibrating portions 113 from the center O1 of the piezoelectric element 112. It is a vibrating part.
  • the total area of the vibrating unit 113a driven in the partial drive mode is one tenth or more and one half or less of the total area of all the vibrating units 113 driven in the full drive mode.
  • a measurement sample was prepared as follows.
  • An ultrasonic vibrator 121 in which a plurality of band-shaped vibrating portions 123 are formed by forming a plurality of groove portions K1 extending in one direction with respect to the back surface of the piezoelectric element 122 is prepared, and this is an embodiment (FIGS. 15 and 15). 16, FIG. 21, and FIG. 22).
  • an ultrasonic vibrator 125 in which the groove portion K1 (and the vibrating portion 123) is not formed in the piezoelectric element 126 was prepared, and this was used as a comparative example (see FIG. 27).
  • the directivity of the ultrasonic vibrators 121 and 125 was verified for each measurement sample (Example and Comparative Example). Specifically, in a state where the driving mode of the ultrasonic vibrator 121 of the embodiment is switched to the full drive mode, the ultrasonic vibrator 121 is irradiated with ultrasonic waves U1 (see FIG. 17) having a resonance frequency of 281 kHz. The directivity at the time of irradiation (at the time of transmission) was simulated.
  • FIG. 18 is a diagram simulating the propagation state of the ultrasonic wave U1 on the XZ plane of the piezoelectric element 122 in the full drive mode, and FIG.
  • FIG. 19 is a diagram showing the ultrasonic wave U1 on the YZ plane of the piezoelectric element 122 in the full drive mode. It is a figure which simulated the propagation state of the ultrasonic wave U1, and FIG. 20 is a graph which shows the simulation result of the directivity of the ultrasonic wave U1 in all drive modes.
  • the Z axis is an axis extending in the normal direction.
  • FIG. 24 is a diagram simulating the propagation state of the ultrasonic wave U1 on the XZ plane of the piezoelectric element 122 in the partial drive mode
  • FIG. 25 is a diagram showing the ultrasonic wave U1 on the YZ plane of the piezoelectric element 122 in the partial drive mode. It is a figure which simulated the propagation state of the ultrasonic wave U1
  • FIG. 26 is a graph which shows the simulation result of the directivity of the ultrasonic wave U1 in a partial drive mode.
  • FIG. 29 is a diagram simulating the propagation state of the ultrasonic wave U1 on the YZ plane of the piezoelectric element 126 in the comparative example
  • FIG. 30 is a graph showing the simulation result of the directivity of the ultrasonic wave U1 in the comparative example. be.
  • the directivity has a narrow directivity, for example, on the ZZ plane. (See FIGS. 29 and 30).
  • the vibrating portion 123 is formed on the piezoelectric element 122, when the ultrasonic waves U1 are irradiated from each vibrating portion 123 in the same phase (all drive modes), the YZ is also formed on the XX plane. It was confirmed that the surface also had a narrow directivity (see FIGS. 18 to 20). That is, it was confirmed that the isotropically directional ultrasonic wave U1 is emitted from the ultrasonic transducer 121 in the full drive mode (see FIG. 16).
  • the ultrasonic wave U1 when the ultrasonic wave U1 is irradiated from only one vibrating portion 123 in the central portion (partial drive mode), the directivity has a narrow directivity on the YZ plane (FIG. 25, see FIG. 26), it was confirmed that the XX plane has a wide directivity (see FIGS. 24 and 26). That is, in the partial drive mode, the ultrasonic wave U1 spreads relatively to the XX plane, but does not spread relatively to the YY plane. It was confirmed that the sound wave U1 was irradiated (see FIG. 22). Moreover, in the partial drive mode, it was confirmed that the ultrasonic waves U1 spread concentrically from the vibrating portion 123 in the center (see FIGS. 24 and 26).
  • the resonance of the radial vibration of the piezoelectric element 122 is around 40 kHz, and this harmonic appears periodically.
  • the groove portion K1 is formed in the piezoelectric element 122, the individual vibrating portions 123 do not form a disk shape.
  • the impedance characteristics as shown in FIGS. 17 and 23 were obtained because the radial vibration was less likely to occur.
  • the groove portion K1 is not formed in the piezoelectric element 126, radial vibration occurs.
  • the harmonics of the resonance of the radial vibration appear periodically and the impedance characteristics are as shown in FIG. 28.
  • the ultrasonic vibrator 121 is driven in the partial drive mode. It was confirmed that the detection range (direction angle of the ultrasonic wave U1) of the ultrasonic vibrator 121 was widened in the horizontal direction (see FIG. 22). Therefore, when scanning (all-around scan) while rotating the ultrasonic vibrator 121 by 360 ° around the rotation axis 31a facing in the vertical direction, the number of scans is reduced and the step interval during sector scan is increased.
  • the directivity angle of the ultrasonic wave U1 is, for example, 40 °, and the number of scans in the all-around scan is, for example, 9 (see Z1 to Z9 in FIG. 31). ).
  • the directivity angle of the ultrasonic wave U1 is, for example, three times (120 °) that of the full drive mode. It can be reduced to one-third (three times) (see Z1 to Z3 in FIG. 32). As a result, it was confirmed that the detection time can be shortened because the number of scans is reduced.
  • the outer shape of the entire vibrating portion 113 is substantially circular, so that the shape is in the perpendicular direction of the piezoelectric element 112.
  • the directional characteristic of the irradiated ultrasonic wave U1 approaches axial symmetry (see FIG. 16).
  • the ultrasonic wave U1 emitted from the band-shaped vibrating unit 113 alone is relatively narrow in the longitudinal direction of the vibrating unit 113.
  • the directivity angle of the ultrasonic wave U1 can be made wider in the turning direction of the ultrasonic vibrator 111.
  • the detection range in one scan is widened, so that the number of scans required can be further reduced. Therefore, since the detection speed can be increased without causing detection omission, the detection time can be shortened as compared with the full drive mode.
  • the area of the circular vibrating portion is about one-third of the total area of the vibrating portion, and the outer diameter of the circular vibrating portion is about 57% of the outer diameter of the annular vibrating portion located on the outermost circumference. In this case, since the spread of the directivity angle is less than twice that in the case of driving all the vibrating parts, the number of scans in the all-around scan cannot be reduced by half.
  • the directional angle is set by the ultrasonic vibrator 111 (piezoelectric element 112). It can be expanded only in the turning direction. As a result, unnecessary information is less likely to be included in the information in the depression angle direction in the received signal generated when the ultrasonic vibrator 111 receives the reflected wave. Therefore, the resolution of the received signal by the CPU 71 can be ensured. Further, the width of the vibrating portion 113 in the central portion, which is the driving portion in the partial drive mode, is about 1/9 of the outer diameter of the piezoelectric element 112.
  • the spread of the directivity angle is, for example, about 3 to 5 times as compared with the case of driving all the vibrating parts 113, so that the number of scans in the all-around scan is, for example, about 1/5 to 1/3. (See FIGS. 31 and 32).
  • the width of the vibrating portion 113 of the present embodiment is less than half the thickness of the piezoelectric element 112 as in the first embodiment, the vibrating portion 113 tends to vibrate in the height direction. Therefore, the electromechanical coupling coefficient becomes high, so that the sensitivity of the ultrasonic vibrator 111 becomes high.
  • the ultrasonic wave U1 has a wide band, and the reverberation becomes short.
  • the influence of the composite vibration is reduced because the lengths of the vibrating portions 113 are different, and even in the vibrating portions 113, the distance from the center O1 of the piezoelectric element 112 is far from the side. It is considered that this is because the length is different between the side and the side.
  • the resonance phenomenon in the length direction due to a specific frequency is suppressed.
  • the thicknesses are uniform, and the resonance frequencies in the thickness direction coincide with each vibrating portion 113. Further, since each vibrating portion 113 is easily deformed in the thickness direction by the groove processing, the sensitivity of the ultrasonic vibrator 111 is increased.
  • the groove portions K1 formed in the piezoelectric elements 43 and 112 are arranged parallel to each other (that is, without intersecting each other) along the plane direction and tilt. It was arranged perpendicular to the axis 36 (center axis A1) (at an angle of 90 °). However, if each groove K1 has an angle of 60 ° or more and 120 ° or less with respect to the tilting shaft 36, the arrangement mode of each groove K1 may be appropriately changed. For example, as shown in the ultrasonic vibrator 131 of FIG. 33 (a), the groove portions K2 may extend in different directions from each other. Further, each groove K3 may be bent as in the ultrasonic vibrator 132 of FIG.
  • each groove K4 may be bent as in the ultrasonic vibrator 133 of FIG. 33 (c). May be.
  • the grooves are preferably parallel to each other and preferably have the same width. Further, it is preferable that each groove portion is formed on a straight line even if it is broken in the middle.
  • the ultrasonic vibrators 41 and 111 of each of the above embodiments include disc-shaped piezoelectric elements 43 and 112, but the piezoelectric element is an elliptical plate-shaped piezoelectric element 134 and 135 (FIG. 34 (a), (B) may be used, or an oval-shaped piezoelectric element 136, 137 (see FIGS. 34 (c) and 34 (d)) may be used.
  • the groove K1 is a gap K0 as a whole.
  • both ends of the groove K1 may be sealed on the outer peripheral surfaces 53 of the piezoelectric elements 43 and 112.
  • both ends of each groove K1 may be sealed by winding the tape 141 around the outer peripheral surface 53 of the piezoelectric element 140.
  • both ends of each groove K1 may be sealed by filling both ends of each groove K1 with a filler 142. Further, if the density of the filler is relatively low, the entire groove K1 may be filled with the filler.
  • the width W1 of the outer vibrating portion 91 and the width W2 of the inner vibrating portion 92 are different from each other, but the widths W1 and W2 may be equal to each other. Further, in each of the above embodiments, the widths of the groove portions K1 formed in the piezoelectric elements 43 and 112 are equal to each other, but the widths of the groove portions K1 may be different from each other.
  • the piezoelectric element 43 of the first embodiment has a structure in which a plurality of divided vibrating portions 90 are connected to each other at an end portion on the front surface 51 side.
  • the piezoelectric element may have a structure in which a plurality of vibrating portions are completely divided.
  • the ultrasonic vibrator is configured by attaching each vibrating portion to the base material 42.
  • the back side electrodes 55 are formed on the surfaces 93a and 93b of the plurality of vibrating portions 90, and the wire rods 60 are joined so as to bridge each of the plurality of back side electrodes 55.
  • the metal foil 143 for example, copper foil, brass foil, aluminum foil, etc.
  • the metal foil 143 which is a strip-shaped conductive member, contains a conductive metal such as solder or a conventionally known conductive filler.
  • Each of the plurality of back side electrodes 55 may be attached so as to be bridged by an adhesive or the like (see FIG. 37).
  • a conductive tape (not shown) which is a strip-shaped conductive member having an adhesive layer may be attached so as to bridge each of the plurality of back side electrodes 55. Further, both the wire rod 60 and the metal foil 143 may be joined so that each of the plurality of back side electrodes 55 is bridged.
  • the four vibrating portions 113a located in the central region of the piezoelectric element 112 are driven.
  • the drive mode is switched to the partial drive mode, one or more and three or less vibrating portions 113a located in the central region of the piezoelectric element 112 may be driven, or may be located in the central region of the piezoelectric element 112. 5 or more vibrating units 113 may be driven.
  • an AC voltage is applied to the vibrating portions 113a located in the central region of the piezoelectric element 112 to drive the piezoelectric element 112, and voltages are applied to the vibrating portions 113b and 113c located at both ends of the piezoelectric element 112.
  • the partial drive mode may be in a mode in which a voltage lower than that of the vibrating portion 113a in the central region is applied to the vibrating portions 113b and 113c on both sides, or in a phase different from that of the vibrating portion 113a in the central region.
  • a mode may be used in which a voltage is applied to the vibrating portions 113b and 113c on both sides.
  • the piezoelectric elements 43 and 112 made of lead zirconate titanate (PZT) are used, but the material for forming the piezoelectric elements 43 and 112 is not particularly limited.
  • PZT lead zirconate titanate
  • the material for forming the piezoelectric elements 43 and 112 is not particularly limited.
  • the tip of the screw through which the screw hole 45 on the base material 42 side is inserted is screwed into the screw hole 47 provided in the case 40.
  • the ultrasonic transducer 41 was fixed to the case 40, but it may be fixed by another method.
  • the ultrasonic vibrator 41 may be fixed to the case 40 using an adhesive.
  • an ultrasonic vibrator 41 composed of a base material 42 that also serves as an acoustic matching layer and a piezoelectric element 43 bonded to the base material 42 is used, but only from the piezoelectric element 43.
  • An ultrasonic transducer may be used.
  • the ultrasonic vibrator includes a substantially disk-shaped base material that also serves as an acoustic matching layer, and the front surface of the piezoelectric element is joined to the base material.
  • the sonar is characterized in that the plurality of vibrating portions are connected to each other at the front end portion of the piezoelectric element.
  • the plurality of the vibrating portions are composed of a pair of outer vibrating portions and a plurality of inner vibrating portions arranged between the pair of outer vibrating portions.
  • a sonar characterized in that the width of the outer vibrating portion is larger than the width of the inner vibrating portion.
  • the electric path connected to the vibrating portion located in the central region of the piezoelectric element and the electric path connected to the other vibrating portion are separate systems from each other. Sonar characterized by being.

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS316973B1 (https=) * 1954-03-15 1956-08-17
JPS5511696A (en) * 1978-07-05 1980-01-26 Siemens Ag Ultrasonic wave head
JPS5822111U (ja) * 1981-07-31 1983-02-10 株式会社島津製作所 超音波探触子
JPS58161492A (ja) * 1982-02-16 1983-09-26 ゼネラル・エレクトリツク・カンパニイ リニア・フェーズド・アレイ超音波変換器
JPH01295190A (ja) * 1988-05-23 1989-11-28 Furuno Electric Co Ltd 魚群探知機
JPH028410U (https=) * 1988-06-30 1990-01-19
JPH06292669A (ja) * 1991-04-17 1994-10-21 Hewlett Packard Co <Hp> 超音波プローブ
US5550792A (en) * 1994-09-30 1996-08-27 Edo Western Corp. Sliced phased array doppler sonar system
JP2002311128A (ja) * 2001-04-13 2002-10-23 Furuno Electric Co Ltd 多周波送受波器
JP2013238568A (ja) * 2012-05-17 2013-11-28 Honda Electronic Co Ltd サーチライトソナー

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461590A (en) * 1977-10-25 1979-05-17 Nippon Denpa Kogyo Kk Arrayed supersonic probe
JPS5637597U (https=) * 1979-08-30 1981-04-09
DE69213295T2 (de) * 1991-04-16 1997-01-23 Hewlett Packard Co Endoskopischer Ultraschallkopf mit Kabelaufrollmechanismus
WO2021176726A1 (ja) * 2020-03-06 2021-09-10 本多電子株式会社 ソナー
WO2021210055A1 (ja) * 2020-04-14 2021-10-21 本多電子株式会社 計測機器用の超音波振動子

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS316973B1 (https=) * 1954-03-15 1956-08-17
JPS5511696A (en) * 1978-07-05 1980-01-26 Siemens Ag Ultrasonic wave head
JPS5822111U (ja) * 1981-07-31 1983-02-10 株式会社島津製作所 超音波探触子
JPS58161492A (ja) * 1982-02-16 1983-09-26 ゼネラル・エレクトリツク・カンパニイ リニア・フェーズド・アレイ超音波変換器
JPH01295190A (ja) * 1988-05-23 1989-11-28 Furuno Electric Co Ltd 魚群探知機
JPH028410U (https=) * 1988-06-30 1990-01-19
JPH06292669A (ja) * 1991-04-17 1994-10-21 Hewlett Packard Co <Hp> 超音波プローブ
US5550792A (en) * 1994-09-30 1996-08-27 Edo Western Corp. Sliced phased array doppler sonar system
JP2002311128A (ja) * 2001-04-13 2002-10-23 Furuno Electric Co Ltd 多周波送受波器
JP2013238568A (ja) * 2012-05-17 2013-11-28 Honda Electronic Co Ltd サーチライトソナー

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