WO2021190299A1 - 存储容器及供应系统 - Google Patents

存储容器及供应系统 Download PDF

Info

Publication number
WO2021190299A1
WO2021190299A1 PCT/CN2021/079809 CN2021079809W WO2021190299A1 WO 2021190299 A1 WO2021190299 A1 WO 2021190299A1 CN 2021079809 W CN2021079809 W CN 2021079809W WO 2021190299 A1 WO2021190299 A1 WO 2021190299A1
Authority
WO
WIPO (PCT)
Prior art keywords
storage container
control device
support rod
side wall
sealing
Prior art date
Application number
PCT/CN2021/079809
Other languages
English (en)
French (fr)
Inventor
董佳仁
Original Assignee
长鑫存储技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/444,182 priority Critical patent/US11702273B2/en
Publication of WO2021190299A1 publication Critical patent/WO2021190299A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0227—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants by an ejection plunger
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • B65D83/76—Containers or packages with special means for dispensing contents for dispensing fluent contents by means of a piston
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D47/00—Closures with filling and discharging, or with discharging, devices
    • B65D47/04—Closures with discharging devices other than pumps
    • B65D47/06—Closures with discharging devices other than pumps with pouring spouts or tubes; with discharge nozzles or passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D3/00—Apparatus or devices for controlling flow of liquids under gravity from storage containers for dispensing purposes
    • B67D3/0003—Apparatus or devices for controlling flow of liquids under gravity from storage containers for dispensing purposes provided with automatic fluid control means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means

Definitions

  • This application relates to the field of semiconductor manufacturing processes, in particular to a storage container and a supply system.
  • Photoresist is a key material for micro-pattern processing in microelectronics technology. Especially in recent years, the development of large-scale and ultra-large-scale integrated circuits has greatly promoted the research, development and application of photoresist. At present, the photoresist is used in the semiconductor manufacturing process to press the photoresist out of the storage container through gas.
  • the embodiments of the present application provide a storage container and a supply system to avoid contact between the photoresist and the air, thereby avoiding the dissolution of gas in the photoresist.
  • an embodiment of the present application provides a storage container for accommodating and taking out photoresist, including: a side wall part, a sealing part and a movable part; a side wall part, a sealing part and a movable part
  • the sealing part is suitable for sealing the top of the side wall part, and the sealing part has a hole communicating with the containing space, and the hole is used to connect the liquid inlet end of the liquid outlet pipe;
  • the movable part is suitable for sealing the bottom of the side wall part , And also suitable for moving up and down in a direction parallel to the bottom of the side wall pointing to the top.
  • the movable component is used for connecting the control device, and the control device controls the movable component to move up and down in the direction from the bottom of the side wall to the top, so as to discharge the photoresist in the containing space through the hole.
  • the embodiment of the present application provides a new storage container for accommodating and taking out photoresist.
  • the movable member moves up and down parallel to the bottom of the sidewall part pointing to the top, so that the sidewall
  • the accommodating space enclosed by the sealing part, the sealing part and the movable part becomes smaller, so that the photoresist is pressed out from the hole in the sealing part, avoiding the contact between the photoresist and the air, thereby avoiding the dissolution of gas in the photoresist
  • the bubbles dissolved in the photoresist in the related art will cause the photoresist to be abnormal during the coating process.
  • control device is integrated in the movable part.
  • the movable component is used to connect the control device, and the control device controls the movable component to move up and down in the direction from the bottom of the side wall to the top, including: the storage container also includes a push rod, which is used to connect the control device; Move the push rod to push the movable part to move up and down in the direction that the bottom of the side wall points to the top.
  • the movable part is used to connect the control device, and the control device controls the movable part to move up and down in the direction that the bottom of the side wall part points to the top, including: the movable part includes a sealing part and a support rod; the sealing part or support rod is used to connect The control device controls the sealing portion to move up and down in a direction from the bottom of the side wall to the top.
  • the sealing part is fixed on the top of the support rod; the support rod is connected to a control device, and the control device is used to control the support rod to drive the sealing part to move up and down in a direction from the bottom of the side wall to the top.
  • the support rod has a spiral pattern or bayonet
  • the control device has a spiral pattern or bayonet that coincides with the support rod; the control device controls the rotation of the support rod through the spiral pattern, so that the bottom of the support rod at the side wall points toward the top Move up and down; or, through the bayonet, the control device controls the support rod to move up and down in the direction that the bottom of the side wall points to the top.
  • the storage container further includes a fixing part located at the bottom edge of the side wall part, and the fixing part is used to make the support rod parallel to the bottom of the side wall part pointing to the top to be fixed in the storage container; the sealing part is movably arranged in the storage container On the support rod; the sealing part is used to connect the control device, and the control device is used to control the sealing part, so that the sealing part moves up and down in the direction from the bottom of the side wall to the top.
  • the support rod has a spiral pattern or bayonet
  • the sealing part has a spiral pattern or bayonet that coincides with the support rod
  • the control device controls the rotation of the sealing part on the support rod through the spiral pattern on the sealing part, so that the sealing part is on the support rod.
  • the support rod moves on the support rod; or, the control device controls the sealing part to move on the support rod through the bayonet on the sealing part.
  • the surface of the sealing portion is provided with a film layer covering the support rod in the accommodating space.
  • the film layer on the surface of the sealing part isolates the photoresist and the support rod in the containing space.
  • the storage container further includes a pin port, which is movably arranged on the support rod, and the pin port is located below the sealing portion. Supported by the pin opening below the sealing part to prevent the sealing part from sliding down.
  • a rod cap is fixed on the top of the support rod, and the size of the rod cap is larger than the size of the support rod.
  • the rod cap on the top of the support rod prevents the sealing part from escaping from the top of the support rod.
  • the sealing part includes a piston and a sealing ring, and the sealing ring is located at the edge of the piston.
  • the sealing ring prevents the photoresist in the accommodating space from leaking through the sealing part.
  • the sealing part has holes, and the holes are used to connect the liquid inlet end of the liquid outlet pipe, including: the sealing part has N holes, where N is a natural number greater than or equal to 2; each of the N holes is connected to a sub The liquid inlet end of the pipe and the liquid outlet end of the N sub-pipes are used to connect the liquid inlet end of the liquid outlet pipe.
  • the photoresist in the accommodating space is discharged through a plurality of holes, which avoids the problem of excessive pressure caused by a single hole.
  • the outlet ends of the N sub-pipes are used to connect the inlet ends of the outlet pipes, including: the outlet ends of the N sub-pipes are used to connect the inlet ends of the M outlet pipes, and M is a natural number greater than or equal to 2, And M is less than N; each of the M outlet pipes is connected to at least one of the N sub-pipes.
  • the storage container further includes a valve installed in at least one of the sub-pipe or the liquid outlet pipe.
  • the valve can be used to control the number of sub-pipes connected to a liquid outlet pipe and the number of liquid outlet pipes. It is also used to close the valve to prevent the photoresist from contacting the air when the movable parts are not working.
  • the embodiment of the present application also provides a supply system, including: a control device, a liquid outlet pipe, and the above-mentioned storage container; the liquid inlet end of the liquid outlet pipe is connected to the hole on the sealing part of the storage container; the control device is connected to the storage container
  • the movable part is used to control the movable part to move up and down in the direction that the bottom of the side wall part of the side wall part of the storage container points to the top, so that the photoresist contained in the storage container enters the liquid outlet pipe through the hole; the liquid of the liquid outlet pipe
  • the end is used to apply the photoresist taken out of the storage container.
  • the supply system controls the movable part in the storage container to move up and down in the direction from the bottom of the side wall to the top through the control device, so as to remove the photoresist in the containing space.
  • An abnormal problem occurred during the coating process.
  • FIG. 1 is a schematic structural diagram of a storage container provided by an embodiment of the application
  • FIG. 2 is a schematic diagram of the layout and connection of the holes in the sealing portion provided by an embodiment of the application;
  • FIG. 3 is a schematic diagram of an implementation of a control device that pushes a movable component through a pushing part according to an embodiment of the application;
  • FIGS. 4 and 5 are schematic diagrams of the specific structure of a movable component provided by an embodiment of this application.
  • FIG. 6 is a schematic structural diagram of a sealing portion provided by an embodiment of the application.
  • FIG. 7 is a schematic diagram of a specific structure of a storage container provided by an embodiment of the application.
  • FIG. 8 is a schematic structural diagram of a supply system provided by another embodiment of the application.
  • the gas will dissolve in the photoresist, causing bubbles to be generated in the photoresist, and these bubbles will cause abnormalities in the photoresist coating process.
  • an embodiment of the present application provides a storage container for containing and taking out photoresist.
  • the movable member moves up and down parallel to the bottom of the side wall pointing to the top, so that the side wall and the seal are moved up and down.
  • the accommodating space enclosed by the movable part and the movable part becomes smaller, so that the photoresist is pressed out from the hole in the sealing part, avoiding the contact between the photoresist and the air, so as to avoid the dissolution of gas in the photoresist.
  • the bubbles dissolved in the photoresist can cause abnormalities in the photoresist coating process.
  • Fig. 1 is a schematic structural diagram of a storage container provided by this embodiment
  • Fig. 2 is a schematic diagram of the layout and connection of the holes in the sealing portion provided by this embodiment
  • Fig. 3 is a control device provided by this embodiment that can be moved by pushing through the pushing portion
  • Fig. 4 and Fig. 5 are schematic diagrams of the specific structure of the movable part provided in this embodiment
  • Fig. 6 is a schematic diagram of the structure of the sealing part provided in this embodiment
  • Fig. 7 is a specific structure diagram of the storage container provided in this embodiment.
  • the storage container 100 provided in this embodiment will be described in detail below with reference to the accompanying drawings.
  • a storage container 100 for containing and taking out photoresist includes: a side wall portion 101, a sealing portion 102 and a movable component 103; the side wall portion 101, a sealing portion 102 and the movable component 103 enclose a containing space 104, the containing space 104 is used to contain the photoresist; the sealing portion 102 is adapted to seal the top of the side wall portion 101, the sealing portion 102 has a hole 112 communicating with the containing space 104, and the hole 112 is used to connect a liquid outlet pipe (not shown) Show) the liquid inlet end; the movable part 103 is suitable for sealing the bottom of the side wall part 101, and is also suitable for moving up and down parallel to the bottom of the side wall part 101 pointing to the top; the movable part 103 is used to connect the control device ( (Not shown), the control device (not shown) controls the movable member 103 to move up and down in the direction from the bottom of the side wall portion 101 to the top, so as
  • the side wall portion 101 is described by taking a columnar shape as an example, and does not constitute a limitation to the present solution; in other embodiments, the side wall portion may be square. In specific applications, those skilled in the art understand that the shape of the side wall portion can be set according to actual requirements.
  • the side wall portion 101 is columnar, and the thickness of the side wall portion 101 is 1 mm to 2.5 mm, for example, 1.3 mm, 1.7 mm, 2.0 mm, or 2.3 mm. It should be noted that, in this embodiment, the material of the side wall portion 101 may be glass.
  • the side wall portion 101 includes a neck portion 111 and a body portion 121.
  • the height of the neck portion 111 is 8 cm, and the height of the body portion 121 is 24 cm.
  • the diameter of the inner surface of the bottle body 121 is 15 cm, and the diameter of the inner surface of the bottle neck 111 is 3 cm.
  • the sealing portion 102 has N holes 112, and N is a natural number greater than or equal to 2.
  • N is a natural number greater than or equal to 2.
  • the size of the storage container 100 or the specific use situation of the storage container 100 can be used. Set the number of holes 112.
  • the diameter of the sealing portion 102 is 4 cm, and the diameter of the hole 112 is 1 cm.
  • each of the N holes 112 is connected to the liquid inlet end of a sub-pipe 105, and the liquid outlet ends of the N sub-pipes 105 are used to connect the liquid outlet pipe 300.
  • the photoresist in the accommodating space 104 is discharged through a plurality of holes 112, which avoids the problem of excessive pressure that may be generated by a single hole 112.
  • the liquid outlet ends of the N sub-pipes 105 are used to connect the liquid inlet ends of the M liquid outlet pipes 300, M is a natural number greater than or equal to 2, and M is less than N.
  • M is a natural number greater than or equal to 2
  • M is less than N.
  • Each of the M liquid outlet pipes 300 is connected to at least one of the N sub-pipes 105.
  • five sub-pipes 105 are connected to two liquid pipes 300 as an example for illustration.
  • the storage container 100 further includes a valve 601 installed in at least one of the sub-pipe 105 or the liquid outlet pipe 300.
  • the valve 601 is installed in the sub-pipe 105 and the outlet pipe 300.
  • the valve 601 can be used to control the number of sub-pipes 105 connected to a liquid outlet pipe 300, as well as to control the number of liquid outlet pipes 300 used. It is also used when the movable part 103 is not working, closing the valve 601 to prevent the photoresist from interacting with air. touch.
  • the movable part 103 As the movable part 103 moves up and down, the volume of the accommodation space 104 becomes larger or smaller accordingly. When the accommodation space 104 becomes smaller, the lithography contained in the accommodation space 104 The glue is discharged through the hole 112 in the sealing portion 102.
  • the movable part 103 is used to connect a control device (not shown), and the control device (not shown) controls the movable part 103 to move up and down in the direction from the bottom of the side wall 101 to the top, so as to adjust the lithography in the accommodation space 104
  • the glue is discharged through the hole 112.
  • the control device can be integrated in the movable component 103.
  • the storage container 100 further includes a push rod 201, the push rod 201 is used to connect the control device 200, the control device 200 moves the push rod 201 to push the movable part 103 to move up and down in the direction from the bottom of the side wall 101 to the top. .
  • a part of the push rod 201 is in the control device 200, and the control device 200 controls the extension length of the push rod 201, and then pushes the bottom of the side wall portion 101 of the movable member 103 to move up and down in a direction toward the top.
  • the top area of the push rod 201 is larger than the rod portion, which is used to increase the contact area between the push rod 201 and the movable part 103 and prevent the push rod 201 from pushing through the movable part 103 due to excessive pressure.
  • the movable part 103 includes a sealing part and a support rod.
  • the sealing portion or the supporting rod is used to connect the control device 200, and the control device 200 controls the sealing portion to move up and down in the direction from the bottom of the side wall 101 to the top.
  • This embodiment provides two specific implementations of the sealing part and the support rod. The implementation of the sealing part and the support rod will be described in detail below with reference to the accompanying drawings.
  • Method 1 Referring to Figure 4, the sealing part 301 is fixed on the top of the support rod 302, and the support rod 302 is connected to the control device 200.
  • the control device 200 is used to control the support rod 302 to drive the sealing part 301 and the bottom of the side wall 101 to move up and down. move.
  • part of the rod portion of the support rod 302 is in the control device 200, and the control device 200 controls the extension length of the support rod 302, and then pushes the bottom of the side wall portion 101 of the movable member 103 to move up and down in a direction toward the top.
  • connection between the support rod 302 and the control device 200 can be realized by a spiral pattern or a bayonet.
  • the support rod 302 has a spiral pattern or bayonet
  • the control device 200 has a spiral pattern or bayonet that coincides with the support rod 302; the control device 200 controls the support rod 302 to rotate through the spiral pattern so that the support rod 302 is placed on the side wall.
  • the bottom of the side wall 101 points to the top to move up and down; or, the control device 200 uses the bayonet to control the support rod 302 to move up and down in the direction that the bottom of the side wall 101 points to the top.
  • the diameter of the support rod 602 is 3 cm, and the length of the support rod 602 is 26 cm.
  • the length of the support rod 602 is slightly larger than the height of the bottle body 121, which can press out all the photoresist contained in the bottle body 121, and the diameter is smaller than the bottle body 121 so that the bottle neck 111 can prevent the movable parts from slipping off.
  • the sealing part includes a piston 601 and a sealing ring 603.
  • the diameter of the sealing portion is 15 cm which is the same as the diameter of the inner surface of the bottle body 121.
  • the diameter of the piston 601 is 11 cm to 14 cm.
  • the thickness of the sealing ring is 0.5 cm to 2 cm.
  • the sum of the piston diameter and twice the thickness of the sealing ring is the same as the diameter of the sealing portion.
  • the sealing ring 603 prevents the photoresist in the accommodating space 104 from leaking through the sealing portion.
  • the piston 601 is fixed on the top of the support rod 602, and the sealing ring 603 is fixed on the edge of the piston 601.
  • the control device 200 controls the piston 601 to move up and down in the direction where the bottom of the side wall 101 points to the top, so as to discharge the photoresist in the containing space 104 through the hole 112.
  • the storage container 100 further includes a fixing part 403, which is located at the bottom edge of the side wall 101.
  • the fixing part 403 is used to fix the support rod 402 in a direction parallel to the bottom of the side wall 101 pointing to the top. Located in the storage container 100.
  • the sealing part 401 is movably arranged on the support rod 402; the sealing part 401 is used to connect the control device 200, and the control device 200 is used to control the sealing part 401, so that the sealing part 401 moves up and down in the direction that the bottom of the side wall 101 points to the top .
  • connection between the sealing portion 401 and the support rod 402 can be realized by a spiral pattern or a bayonet.
  • the supporting rod 402 has a spiral pattern or bayonet
  • the sealing portion 401 has a spiral pattern or bayonet that coincides with the supporting rod 402;
  • the control device 200 controls the sealing portion 401 on the supporting rod through the spiral pattern on the sealing portion 401 Rotate 402 upward to move the sealing part 401 on the support rod 402; or, the control device 200 controls the sealing part 401 to move on the support rod 402 through the bayonet on the sealing part 401.
  • the surface of the sealing portion 401 is provided with a film layer 406 covering the support rod 402 in the accommodation space 104.
  • the photoresist in the accommodating space 104 and the support rod 402 are separated by a thin film layer 406.
  • the storage container 100 further includes a pin opening 404, the pin opening 404 is movably disposed on the support rod 402, and the pin opening 404 is located below the sealing portion 401.
  • the pin opening 404 located below the sealing part 401 is supported to prevent the sealing part 401 from sliding down.
  • a rod cap 405 is fixed on the top of the support rod 402, and the size of the rod cap 405 is larger than the size of the support rod 402.
  • the rod cap 405 on the top of the support rod 402 prevents the sealing portion 401 from being separated from the support rod 402 from the top.
  • the sealing portion includes a piston 501 and a sealing ring 502, and the sealing ring 502 is located on the edge of the piston 501.
  • the sealing ring 502 prevents the photoresist in the accommodating space 104 from leaking through the sealing portion. If applied to the second method, there is a piston hole 503 in the middle of the piston, and the size of the piston hole 503 is the same as the size of the support rod 402.
  • the embodiment of the present application provides a new storage container 100 for accommodating and taking out photoresist.
  • the movable member 103 moves up and down parallel to the bottom of the side wall 101 toward the top.
  • the side wall portion 101, the sealing portion 102 and the movable component 103 enclose the accommodating space 104 to become smaller, so that the photoresist is pressed out from the hole 112 in the sealing portion 102, and the contact between the photoresist and the air is avoided. It avoids the dissolution of gas in the photoresist, and solves the problem that the bubbles dissolved in the photoresist in the related art will cause the photoresist to be abnormal during the coating process.
  • the supply system includes: a control device 200, a liquid outlet pipe 300, and the aforementioned storage container 100.
  • the inlet end of the outlet pipe 300 is connected to the hole 112 on the sealing portion 102 in the storage container 100; the control device 200 is connected to the movable part 103 in the storage container 100 for controlling the side of the movable part 103 in the storage container 100
  • the bottom of the wall 101 moves up and down in the direction toward the top, and the photoresist contained in the storage container 100 enters the outlet pipe 300 through the hole 112; the outlet end of the outlet pipe 300 is used to remove the light from the storage container 100 The resist is applied.
  • FIG. 8 is a schematic diagram of the structure of the supply system provided by the embodiment.
  • the supply system of this embodiment will be described in detail below with reference to the accompanying drawings.
  • the storage container 100 includes: a side wall part 101, a sealing part 102 and a movable part 103.
  • the side wall portion 101, the sealing portion 102, and the movable component 103 enclose an accommodation space 104, and the accommodation space 104 is used for accommodating photoresist.
  • the sealing portion 102 is suitable for sealing the top of the side wall portion 101, and the sealing portion 102 has a hole 112, and the hole 112 is used to connect the liquid inlet end of the liquid outlet pipe 300.
  • the volume of the containing space 104 increases or decreases accordingly.
  • the photoresist contained in the containing space 104 is discharged through the hole 112 in the sealing portion 102.
  • the upward movement rate of the movable member 103 is controlled by the control control device 200 to control the discharge rate of the photoresist.
  • the volume of the photoresist discharged per unit time can be known by the control device 200 controlling the rate at which the movable member 103 moves up and down and the cross-sectional area of the sidewall portion 101.
  • the supply system controls the movable part 103 in the storage container 100 to move up and down in the direction that the bottom of the side wall 101 points to the top through the control device 200, so that the The photoresist is discharged through the hole 112, and the discharged photoresist is applied through the liquid outlet pipe 300 to prevent the gas from being dissolved in the photoresist to generate bubbles, thereby avoiding the related art caused by the bubbles dissolved in the photoresist
  • the photoresist has abnormal problems during the coating process.
  • each unit involved in this embodiment is a logical unit.
  • a logical unit can be a physical unit, a part of a physical unit, or multiple physical units. The combination of units is realized.
  • this embodiment does not introduce units that are not closely related to solving the technical problems proposed by the present application, but this does not indicate that there are no other units in this embodiment.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)

Abstract

一种存储容器（100）及供应系统，存储容器（100）包括：侧壁部（101）、封口部（102）和可移动部件（103）；侧壁部（101）、封口部（102）以及可移动部件（103）围成容纳空间（104）；封口部（102）适于密封侧壁部（101）的顶部，且封口部（102）上具有与容纳空间（104）连通的孔洞（112），孔洞（112）用于连接出液管道（300）的进液端；可移动部件（103）适于密封侧壁部（101）的底部，且还适于沿平行于侧壁部（101）的底部指向顶部的方向上下移动。可移动部件（103）用于连接控制装置（200），控制装置（200）控制可移动部件（103）于侧壁部（101）的底部指向顶部的方向上下移动，以将容纳空间（104）内的光刻胶通过孔洞（112）排出。

Description

存储容器及供应系统
交叉引用
本申请引用于2020年3月25日递交的名称为“存储容器及供应系统”的第202010218909.X号中国专利申请，其通过引用被全部并入本申请。
技术领域
本申请涉及半导体制程工艺领域，特别涉及一种存储容器及供应系统。
背景技术
光刻胶是微电子技术中微细图形加工的关键材料，特别是近年来大规模和超大规模集成电路的发展，更是大大促进了光刻胶的研究开发和应用。目前，在半导体制程工艺中对光刻胶的取用是通过气体将光刻胶从存储容器中压出。
然而，申请人发现通过气体将光刻胶从储存容器中压出的过程中，气体会溶解在光刻胶中，使得光刻胶中产生气泡，这些气泡会导致光刻胶在涂敷过程中出现异常。
发明内容
本申请实施例提供一种存储容器及供应系统，避免光刻胶与空气的接触，从而避免了有气体溶解在光刻胶中。
为解决上述技术问题，本申请实施例提供了一种存储容器，用于容纳和取出光刻胶，包括：侧壁部、封口部和可移动部件；侧壁部、封口部以及可移动部件围成容纳空间；封口部适于密封侧壁部的顶部，且封口部上具有与容纳空间连通的孔洞，孔洞用于连接出液管道的进液端；可移动部件适于密封侧壁部的底部，且还适于沿平行于侧壁部的底部指向顶部的方向上下移动。可移动 部件用于连接控制装置，控制装置控制可移动部件于侧壁部的底部指向顶部的方向上下移动，以将容纳空间内的光刻胶通过孔洞排出。
相对于相关技术而言，本申请实施例提供了一种新的用于容纳和取出光刻胶的存储容器，通过可移动部件平行于侧壁部的底部指向顶部的方向上下移动，使得侧壁部、封口部以及可移动部件围成容纳空间变小，从而使光刻胶从封口部中的孔洞被压出，避免可光刻胶与空气的接触，从而避免了有气体溶解在光刻胶中，解决了相关技术中溶解在光刻胶中的气泡会导致光刻胶在涂敷过程中出现异常。
另外，控制装置集成在可移动部件中。
另外，可移动部件用于连接控制装置，控制装置控制可移动部件于侧壁部的底部指向顶部的方向上下移动，包括：存储容器还包括推动杆，推动杆用于连接控制装置；控制装置通过移动推动杆，推动可移动部件于侧壁部的底部指向顶部的方向上下移动。
另外，可移动部件用于连接控制装置，控制装置控制可移动部件于侧壁部的底部指向顶部的方向上下移动，包括：可移动部件包括密封部和支撑杆；密封部或支撑杆用于连接控制装置，控制装置控制密封部于侧壁部的底部指向顶部的方向上下移动。
另外，密封部固定在支撑杆顶部；支撑杆连接控制装置，控制装置用于控制支撑杆带动密封部于侧壁部的底部指向顶部的方向上下移动。
另外，支撑杆上具有螺旋纹或卡口，控制装置具有与支撑杆上吻合的螺旋纹或卡口；控制装置通过螺旋纹控制支撑杆旋转，使支撑杆于侧壁部的底部指向顶部的方向上下移动；或，控制装置通过卡口，控制支撑杆于侧壁部的底 部指向顶部的方向上下移动。
另外，存储容器还包括固定部，固定部位于侧壁部的底部边缘，固定部用于，使支撑杆平行于侧壁部的底部指向顶部方向固定在于存储容器内；密封部可移动地设置在支撑杆上；密封部用于连接控制装置，控制装置用于控制密封部，使密封部于侧壁部的底部指向顶部的方向上下移动。
另外，支撑杆上具有螺旋纹或卡口，密封部具有与支撑杆上吻合的螺旋纹或卡口；控制装置通过密封部上的螺旋纹，控制密封部于支撑杆上旋转，使密封部于支撑杆上移动；或，控制装置通过密封部上的卡口，控制密封部于支撑杆上移动。
另外，密封部的表面设置有包覆容纳空间中的支撑杆的薄膜层。通过密封部表面的薄膜层，隔离容纳空间中的光刻胶与支撑杆。
另外，存储容器还包括销口，销口可移动地设置在支撑杆上，且销口位于密封部下方。通过位于密封部下方的销口支撑，防止密封部下滑。
另外，支撑杆顶部固定有杆帽，杆帽尺寸大于支撑杆尺寸。通过支撑杆顶部的杆帽，防止密封部从顶部脱离支撑杆。
另外，密封部包括活塞和密封环，密封环位于活塞边缘。通过密封环，防止容纳空间中的光刻胶通过密封部泄漏。
另外，封口部上具有孔洞，孔洞用于连接出液管道的进液端，包括：封口部上具有N个孔洞，N为大于等于2的自然数；N个孔洞中的每一个孔洞都连接一个子管道的进液端，N个子管道的出液端用于连接出液管道的进液端。通过多个孔洞排出容纳空间的光刻胶，避免了因单个孔洞可能产生的压力过大的问题。
另外，N个子管道的出液端用于连接出液管道的进液端，包括：N个子管道的出液端用于连接M个出液管道的进液端，M为大于等于2的自然数，且M小于N；M个出液管道中每一个出液管道都连接N个子管道中的至少一个。通过设置多个出液管道，使一个存储容器可以为多个出液管道供给光刻胶，实现一个存储容器中的光刻胶可以同时供应给不同的半导体制程。
另外，所述存储容器还包括阀门，阀门安装在子管道或出液管道的至少一个中。通过阀门可以控制一个出液管道连接的子管道的使用数量，以及控制出液管道的使用数量，还用于可移动部件不工作时，关闭阀门避免光刻胶与空气相接触。
本申请实施例还提供了一种供应系统，包括：控制装置、出液管道以及上述存储容器；出液管道的进液端连接存储容器中的封口部上的孔洞；控制装置连接存储容器中的可移动部件，用于控制可移动部件于存储容器中的侧壁部的底部指向顶部的方向上下移动，以将存储容器内容纳的光刻胶通过孔洞进入出液管道；出液管道的出液端用于对从存储容器中取出的光刻胶进行应用。
相比于相关技术而言，本实施例提供的供应系统，通过控制装置，控制存储容器中的可移动部件于侧壁部的底部指向顶部的方向上下移动，以将容纳空间内的光刻胶通过孔洞排出，并通过出液管道对排出的光刻胶进行应用，防止气体溶解在光刻胶中产生气泡，从而避免了相关技术中由于溶解在光刻胶中的气泡导致的光刻胶在涂敷过程中出现异常的问题。
附图说明
图1为本申请一实施例提供的存储容器的结构示意图；
图2为本申请一实施例提供的封口部中孔洞的布局及连接示意图；
图3为本申请一实施例提供的一种控制装置通过推动部推可移动部件的实施示意图；
图4和图5为本申请一实施例提供的可移动部件的具体结构示意图；
图6为本申请一实施例提供的密封部的结构示意图；
图7为本申请一实施例提供的存储容器的具体结构示意图；
图8为本申请另一实施例提供的供应系统的结构示意图。
具体实施方式
目前，通过气体将光刻胶从储存容器中压出的过程中，气体会溶解在光刻胶中，使得光刻胶中产生气泡，这些气泡会导致光刻胶在涂敷过程中出现异常。
为解决上述问题，本申请一实施例提供了一种存储容器，用于容纳和取出光刻胶，通过可移动部件平行于侧壁部的底部指向顶部的方向上下移动，使得侧壁部、封口部以及可移动部件围成容纳空间变小，从而使光刻胶从封口部中的孔洞被压出，避免可光刻胶与空气的接触，从而避免了有气体溶解在光刻胶中，解决了相关技术中溶解在光刻胶中的气泡会导致光刻胶在涂敷过程中出现异常。
为使本申请实施例的目的、技术方案和优点更加清楚，下面将结合附图对本申请的各实施例进行详细的阐述。然而，本领域的普通技术人员可以理解，在本申请各实施例中，为了使读者更好地理解本申请而提出了许多技术细节。但是，即使没有这些技术细节和基于以下各实施例的种种变化和修改，也可以实现本申请所要求保护的技术方案。以下各个实施例的划分是为了描述方便，不应对本申请的具体实现方式构成任何限定，各个实施例在不矛盾的前提下可 以相互结合，相互引用。
图1为本实施例提供的存储容器的结构示意图，图2为本实施例提供的封口部中孔洞的布局及连接示意图，图3为本实施例提供的一种控制装置通过推动部推可移动部件的实施示意图，图4和图5为本实施例提供的可移动部件的具体结构示意图，图6为本实施例提供的密封部的结构示意图，图7为本实施例提供的存储容器的具体结构示意图，下面将结合附图对本实施例提供的存储容器100进行具体说明。
参考图1，存储容器100，用于容纳和取出光刻胶，包括：侧壁部101、封口部102和可移动部件103；侧壁部101、封口部102以及可移动部件103围成容纳空间104，容纳空间104用于容纳光刻胶；封口部102适于密封侧壁部101的顶部，封口部102上具有与容纳空间104连通的孔洞112，孔洞112用于连接出液管道(未图示)的进液端；可移动部件103适于密封侧壁部101的底部，且还适于平行于侧壁部101的底部指向顶部的方向上下移动；可移动部件103用于连接控制装置(未图示)，控制装置(未图示)控制可移动部件103于侧壁部101的底部指向顶部的方向上下移动，以将容纳空间104内的光刻胶通过孔洞112排出。
对于侧壁部101，在本实施例中，侧壁部101以柱状为例进行说明，并不构成对本方案的限定；在其他实施例中，侧壁部可以是方形。在具体应用中，本领域技术人员理解可以根据实际需求设置侧壁部的形状。
具体地，参考图7，侧壁部101为柱状，侧壁部101的厚度为1mm～2.5mm，例如1.3mm、1.7mm、2.0mm或者2.3mm。需要说明的是，在本实施例中，侧壁部101的材料可以为玻璃。侧壁部101包括瓶颈部111和瓶身部121，瓶 颈部111的高度为8cm，瓶身部121的高度为24cm。瓶身部121内表面直径为15cm，瓶颈部111的内表面直径为3cm。
对于封口部102，参考图2，封口部102上具有N个孔洞112，N为大于等于2的自然数。本实施例以5(N＝5)个孔洞112为例进行说明，并不构成对本方案的限定，在具体的使用过程中，可以根据存储容器100的大小或者存储容器100的具体使用情况，进而设置孔洞112的数量。
具体地，参考图7，封口部102的直径为4cm，孔洞112的直径为1cm。
继续参考图2，N个孔洞112中的每一个孔洞112都连接一个子管道105的进液端，N个子管道105的出液端用于连接出液管道300。通过多个孔洞112排出容纳空间104的光刻胶，避免了因单个孔洞112可能产生的压力过大的问题。
具体地，N个子管道105的出液端用于连接M个出液管道300的进液端，M为大于等于2的自然数，且M小于N。本实施例以2(M＝2)个出液管道300为例进行说明，并不构成对本方案的限定，在具体的使用过程中，可以根据存储容器100的大小或者存储容器100的具体使用情况，进而设置出液管道300的数量。
M个出液管道300中每一个出液管道300都连接N个子管道105中的至少一个，本实施例以5个子管道105连接2个出液管道300为例进行图示。通过设置多个出液管道300，使一个存储容器100可以为多个出液管道300供给光刻胶，实现一个存储容器100中的光刻胶可以同时供应给不同的半导体制程。
另外，存储容器100还包括阀门601，阀门601安装在子管道105或出液管道300的至少一个中。在本实施例中，阀门601安装在子管道105以及出 液管道300中。通过阀门601可以控制一个出液管道300连接的子管道105的使用数量，以及控制出液管道300的使用数量，还用于可移动部件103不工作时，关闭阀门601避免光刻胶与空气相接触。
继续参考图1，对于可移动部件103，随着可移动部件103的上下移动，容纳空间104的容积也随之变大或变小，当容纳空间104变小时，容纳空间104中容纳的光刻胶通过封口部102中的孔洞112排出。
可移动部件103用于连接控制装置(未图示)，控制装置(未图示)控制可移动部件103于侧壁部101的底部指向顶部的方向上下移动，以将容纳空间104内的光刻胶通过孔洞112排出。需要说明是的，控制装置(未图示)可以集成在可移动部件103中。
参考图3，存储容器100还包括推动杆201，推动杆201用于连接控制装置200，控制装置200通过移动推动杆201，推动可移动部件103于侧壁部101的底部指向顶部的方向上下移动。
具体地，推动杆201的部分杆部于控制装置200中，控制装置200控制推动杆201的伸出长度，进而推动可移动部件103侧壁部101的底部指向顶部的方向上下移动。另外，推动杆201的顶部面积大于杆部，用于增大推动杆201与可移动部件103的接触面积，防止推动杆201对可移动部件103的压力过大而推穿。
可移动部件103包括密封部和支撑杆。密封部或支撑杆用于连接控制装置200，控制装置200控制密封部于侧壁部101的底部指向顶部的方向上下移动。本实施例提供了密封部与支撑杆的两种具体实现方式，下面结合附图对密封部与支撑杆的实现方式进行详细描述。
方式一：参考图4，密封部301固定在支撑杆302顶端，支撑杆302连接控制装置200，控制装置200用于控制支撑杆302带动密封部301与侧壁部101的底部指向顶部的方向上下移动。
具体地，支撑杆302的部分杆部于控制装置200中，控制装置200控制支撑杆302的伸出长度，进而推动可移动部件103侧壁部101的底部指向顶部的方向上下移动。
需要说明的是，支撑杆302与控制装置200的连接可以通过螺旋纹或卡口实现。具体地，支撑杆302上具有螺旋纹或卡口，控制装置200具有与支撑杆302上吻合的螺旋纹或卡口；控制装置200通过螺旋纹控制支撑杆302旋转，使支撑杆302于侧壁部101的底部指向顶部的方向上下移动；或，控制装置200通过卡口，控制支撑杆302于侧壁部101的底部指向顶部的方向上下移动。
具体地，参考图7，支撑杆602的直径为3cm，支撑杆602的长度为26cm。支撑杆602的长度略大于瓶身部121的高度，可以将瓶身部121中容纳的光刻胶全部压出，直径比瓶身部121小得到瓶颈部111可以防止可移动部件滑脱。密封部包括活塞601和密封环603。其中密封部的直径为与瓶身部121内表面直径相同的15cm。其中，活塞601的直径为11cm～14cm。密封环的厚度为0.5cm～2cm。具体地，活塞直径与密封环厚度的两倍之和与密封部的直径相同。通过密封环603，防止容纳空间104中的光刻胶通过密封部泄漏。活塞601固定在支撑杆602顶部，密封环603固定在活塞601边缘。控制装置200控制活塞601于侧壁部101的底部指向顶部的方向上下移动，以将容纳空间104内的光刻胶通过孔洞112排出。
方式二：参考图5，存储容器100还包括固定部403，固定部403位于侧 壁部101的底部边缘，固定部403用于，使支撑杆402平行于侧壁部101的底部指向顶部方向固定在于存储容器100内。
密封部401可移动地设置在支撑杆402上；密封部401用于连接控制装置200，控制装置200用于控制密封部401，使密封部401于侧壁部101的底部指向顶部的方向上下移动。
需要说明的是，密封部401于支撑杆402的连接可以通过螺旋纹或卡口实现。具体地，支撑杆402上具有螺旋纹或卡口，密封部401具有与支撑杆402上吻合的螺旋纹或卡口；控制装置200通过密封部401上的螺旋纹，控制密封部401于支撑杆402上旋转，使密封部401于支撑杆402上移动；或，控制装置200通过密封部401上的卡口，控制密封部401于支撑杆402上移动。
在本方式中，密封部401的表面设置有包覆容纳空间104中的支撑杆402的薄膜层406。通过薄膜层406隔离容纳空间104中的光刻胶与支撑杆402。
在本方式中，存储容器100还包括销口404，销口404可移动地设置在支撑杆402上，且销口404位于密封部401下方。通过位于密封部401下方的销口404支撑，防止密封部401下滑。
在本方式中，支撑杆402顶部固定有杆帽405，杆帽405尺寸大于支撑杆402尺寸。通过支撑杆402顶部的杆帽405，防止密封部401从顶部脱离支撑杆402。
需要说明的是，参考图6，密封部包括活塞501和密封环502，密封环502位于活塞501边缘。通过密封环502，防止容纳空间104中的光刻胶通过密封部泄漏。若应用于方式二，则活塞中间具有活塞孔503，活塞孔503的尺寸与支撑杆402的尺寸相同。
相对于相关技术而言，本申请实施例提供了一种新的用于容纳和取出光刻胶的存储容器100，通过可移动部件103平行于侧壁部101的底部指向顶部的方向上下移动，使得侧壁部101、封口部102以及可移动部件103围成容纳空间104变小，从而使光刻胶从封口部102中的孔洞112被压出，避免可光刻胶与空气的接触，从而避免了有气体溶解在光刻胶中，解决了相关技术中溶解在光刻胶中的气泡会导致光刻胶在涂敷过程中出现异常。
本申请另一实施例涉及一种供应系统，参考图8，供应系统包括：控制装置200、出液管道300以及上述存储容器100。出液管道300的进液端连接存储容器100中的封口部102上的孔洞112；控制装置200连接存储容器100中的可移动部件103，用于控制可移动部件103于存储容器100中的侧壁部101的底部指向顶部的方向上下移动，已将存储容器100内容纳的光刻胶通过孔洞112进入出液管道300；出液管道300的出液端用于对存储容器100中取出的光刻胶进行应用。
图8为实施例提供的供应系统的结构示意图，下面将结合附图对本实施例的供应系统进行具体说明。
具体地，存储容器100包括：侧壁部101、封口部102和可移动部件103。侧壁部101、封口部102以及可移动部件103围成容纳空间104，容纳空间104用于容纳光刻胶。封口部102适于密封侧壁部101的顶部，封口部102上具有孔洞112，孔洞112用于连接出液管道300的进液端。
随着可移动部件103的上下移动，容纳空间104的容积也随之变大或变小，当容纳空间104变小时，容纳空间104中容纳的光刻胶通过封口部102中的孔洞112排出。
通过把控控制装置200控制可移动部件103的上移速率进而控制光刻胶的排出速率。具体地，通过控制装置200控制可移动部件103上下移动的速率集合侧壁部101的横截面积可以得知单位时间内排出的光刻胶的体积。
与相关技术相比，本实施例提供的供应系统，通过控制装置200，控制存储容器100中的可移动部件103于侧壁部101的底部指向顶部的方向上下移动，以将容纳空间104内的光刻胶通过孔洞112排出，并通过出液管道300对排出的光刻胶进行应用，防止气体溶解在光刻胶中产生气泡，从而避免了相关技术中由于溶解在光刻胶中的气泡导致的光刻胶在涂敷过程中出现异常的问题。
值得一提的是，本实施例中所涉及到的各单元均为逻辑单元，在实际应用中，一个逻辑单元可以是一个物理单元，也可以是一个物理单元的一部分，还可以以多个物理单元的组合实现。此外，为了突出本申请的创新部分，本实施例中并没有将与解决本申请所提出的技术问题关系不太密切的单元引入，但这并不表明本实施例中不存在其它的单元。
由于上述实施例与本实施例相互对应，因此本实施例可与上述实施例互相配合实施。上述实施例中提到的相关技术细节在本实施例中依然有效，在上述实施例中所能达到的技术效果在本实施例中也同样可以实现，为了减少重复，这里不再赘述。相应地，本实施例中提到的相关技术细节也可应用在上述实施例中。
本领域的普通技术人员可以理解，上述各实施例是实现本申请的具体实施例，而在实际应用中，可以在形式上和细节上对其作各种改变，而不偏离本申请的精神和范围。

Claims (16)

  1. 一种存储容器，用于容纳和取出光刻胶，其特征在于，包括：
    侧壁部、封口部和可移动部件，所述侧壁部、所述封口部以及所述可移动部件围成容纳空间；
    所述封口部适于密封所述侧壁部的顶部，且所述封口部上具有与所述容纳空间连通的孔洞，所述孔洞用于连接出液管道的进液端；
    所述可移动部件适于密封所述侧壁部的底部，且还适于沿平行于所述侧壁部的底部指向顶部的方向上下移动；
    所述可移动部件用于连接控制装置，所述控制装置控制所述可移动部件于所述侧壁部的底部指向顶部的方向上下移动，以将所述容纳空间内的光刻胶通过所述孔洞排出。
  2. 根据权利要求1所述的存储容器，其特征在于，所述控制装置集成在所述可移动部件中。
  3. 根据权利要求1所述的存储容器，其特征在于，所述可移动部件用于连接控制装置，所述控制装置控制所述可移动部件于所述侧壁部的底部指向顶部的方向上下移动，包括：
    所述存储容器还包括推动杆，所述推动杆用于连接所述控制装置；
    所述控制装置通过移动所述推动杆，推动所述可移动部件于所述侧壁部的底部指向顶部的方向上下移动。
  4. 根据权利要求1所述的存储容器，其特征在于，所述可移动部件用于连接控制装置，所述控制装置控制所述可移动部件于所述侧壁部的底部指向顶部的方向上下移动，包括：
    所述可移动部件包括密封部和支撑杆；
    所述密封部或所述支撑杆用于连接所述控制装置，所述控制装置控制所述密封部于所述侧壁部的底部指向顶部的方向上下移动。
  5. 根据权利要求4所述的存储容器，其特征在于，所述密封部固定在所述支撑杆顶部；所述支撑杆连接所述控制装置，所述控制装置用于控制所述支撑杆带动所述密封部于所述侧壁部的底部指向顶部的方向上下移动。
  6. 根据权利要求5所述的存储容器，其特征在于，包括：
    所述支撑杆上具有螺旋纹或卡口，所述控制装置具有与所述支撑杆上吻合的螺旋纹或卡口；
    所述控制装置通过所述螺旋纹控制所述支撑杆旋转，使支撑杆于所述侧壁部的底部指向顶部的方向上下移动；
    或，所述控制装置通过所述卡口，控制支撑杆于所述侧壁部的底部指向顶部的方向上下移动。
  7. 根据权利要求4所述的存储容器，其特征在于，包括：
    所述存储容器还包括固定部，所述固定部位于所述侧壁部的底部边缘，所述固定部用于，使所述支撑杆平行于所述侧壁部的底部指向顶部方向固定在于所述存储容器内；
    所述密封部可移动地设置在所述支撑杆上；所述密封部用于连接所述控制装置，所述控制装置用于控制所述密封部，使所述密封部于所述侧壁部的底部指向顶部的方向上下移动。
  8. 根据权利要求7所述的存储容器，其特征在于，包括：
    所述支撑杆上具有螺旋纹或卡口，所述密封部具有与所述支撑杆上吻合的 螺旋纹或卡口；
    所述控制装置通过所述密封部上的螺旋纹，控制所述密封部于所述支撑杆上旋转，使所述密封部于所述支撑杆上移动；
    或，所述控制装置通过所述密封部上的卡口，控制所述密封部于所述支撑杆上移动。
  9. 根据权利要求7所述的存储容器，其特征在于，所述密封部的表面设置有包覆所述容纳空间中的所述支撑杆的薄膜层。
  10. 根据权利要求7所述的存储容器，其特征在于，所述存储容器还包括销口，所述销口可移动地设置在所述支撑杆上，且所述销口位于所述密封部下方。
  11. 根据权利要求7所述的存储容器，其特征在于，所述支撑杆顶部固定有杆帽，所述杆帽尺寸大于所述支撑杆尺寸。
  12. 根据权利要求4-11中任一项所述的存储容器，其特征在于，所述密封部包括活塞和密封环，所述密封环位于所述活塞边缘。
  13. 根据权利要求1所述的存储容器，其特征在于，所述封口部上具有孔洞，所述孔洞用于连接出液管道的进液端，包括：
    所述封口部上具有N个孔洞，所述N为大于等于2的自然数；
    所述N个孔洞中的每一个孔洞都连接一个子管道的进液端，N个所述子管道的出液端用于连接所述出液管道的进液端。
  14. 根据权利要求13所述的存储容器，其特征在于，所述N个所述子管道的出液端用于连接所述出液管道的进液端，包括：
    所述N个所述子管道的出液端用于连接M个出液管道的进液端，所述M为大于等于2的自然数，且所述M小于所述N；
    所述M个出液管道中每一个出液管道都连接所述N个所述子管道中的至少一个。
  15. 根据权利要求13或14所述的存储容器，其特征在于，所述存储容器还包括阀门，所述阀门安装在所述子管道或所述出液管道的至少一个中。
  16. 一种供应系统，其特征在于，包括：
    控制装置、出液管道以及如权利要求1-15中任一项所述的存储容器；
    所述出液管道的进液端连接所述存储容器中的封口部上的孔洞；
    所述控制装置连接存储容器中的可移动部件，用于控制所述可移动部件于所述存储容器中的侧壁部的底部指向顶部的方向上下移动，以将所述存储容器内容纳的光刻胶通过所述孔洞进入所述出液管道；
    所述出液管道的出液端用于对从所述存储容器中取出的光刻胶进行应用。
PCT/CN2021/079809 2020-03-25 2021-03-09 存储容器及供应系统 WO2021190299A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/444,182 US11702273B2 (en) 2020-03-25 2021-07-30 Storage container and supply system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010218909.XA CN113443279A (zh) 2020-03-25 2020-03-25 存储容器及供应系统
CN202010218909.X 2020-03-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US17/444,182 Continuation US11702273B2 (en) 2020-03-25 2021-07-30 Storage container and supply system

Publications (1)

Publication Number Publication Date
WO2021190299A1 true WO2021190299A1 (zh) 2021-09-30

Family

ID=77806769

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/079809 WO2021190299A1 (zh) 2020-03-25 2021-03-09 存储容器及供应系统

Country Status (3)

Country Link
US (1) US11702273B2 (zh)
CN (1) CN113443279A (zh)
WO (1) WO2021190299A1 (zh)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5819980A (en) * 1996-12-04 1998-10-13 Hill; Myles L. Gurgle and slosh free canteen
CN101758003A (zh) * 2010-01-29 2010-06-30 深圳市耐迪科技有限公司 简易点胶机
KR20120133226A (ko) * 2011-05-31 2012-12-10 주식회사 케이씨텍 기판 코터 장치의 약액 공급용 펌프
KR20120133227A (ko) * 2011-05-31 2012-12-10 주식회사 케이씨텍 기판 코터 장치의 약액 공급용 펌프
CN204583618U (zh) * 2015-02-15 2015-08-26 南通航运职业技术学院 一种自动化涂胶设备
CN204602555U (zh) * 2015-03-30 2015-09-02 深圳市世椿自动化设备有限公司 一种胶桶无气泡压胶装置
CN105499080A (zh) * 2015-12-31 2016-04-20 昆山龙腾光电有限公司 供胶系统及供胶方法
CN206064742U (zh) * 2016-08-26 2017-04-05 东南（福建）汽车工业有限公司 一种汽车防震胶储胶系统
CN106941074A (zh) * 2017-04-27 2017-07-11 林文华 一种方形晶片加工装置及其工作方法
CN206587993U (zh) * 2017-02-28 2017-10-27 东莞优邦材料科技股份有限公司 一种点胶机用液态物料上料装置
CN108465604A (zh) * 2018-03-15 2018-08-31 松下压缩机(大连)有限公司 筒装膏状密封胶自动出胶装置
CN208098509U (zh) * 2018-03-06 2018-11-16 东旭（昆山）显示材料有限公司 光阻容器及涂布机光阻供应系统
CN110888302A (zh) * 2018-09-11 2020-03-17 长鑫存储技术有限公司 扫描式光刻胶涂布系统及方法
CN210647111U (zh) * 2019-08-24 2020-06-02 常山弘远电子有限公司 一种供胶装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2349726A (en) * 1942-06-18 1944-05-23 George J Holler Dispenser for extrusile substances
US5218913A (en) 1989-03-09 1993-06-15 Corrugated Pallet Corporation Corrugated pallet
CN2080054U (zh) * 1990-09-03 1991-07-03 滕云龙 自压式膏体密封包装瓶
US5462207A (en) * 1994-10-19 1995-10-31 Ocg Microelectronic Materials, Inc. Environmentally safe dispensing assembly for ultra-pure liquid chemicals
IL153940A0 (en) * 2003-01-14 2003-07-31 Mickey Shraiber A food dispenser
US8292598B2 (en) * 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
CN101737314B (zh) * 2008-11-14 2012-04-11 沈阳芯源微电子设备有限公司 高黏度精密胶泵
CN202575025U (zh) * 2012-04-23 2012-12-05 李冬佳 旋转助推式包装瓶
CN103511221A (zh) * 2013-09-19 2014-01-15 丁云广 全行程往复活塞式手动压缩机
US9817315B2 (en) * 2014-03-13 2017-11-14 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for supplying and dispensing bubble-free photolithography chemical solutions
CN106104267B (zh) * 2014-03-31 2020-11-03 安捷伦科技有限公司 高压泵中的随活塞移动的密封件
CN204178123U (zh) 2014-10-23 2015-02-25 西安神光皓瑞光电科技有限公司 一种具有脱泡功能的显影装置
CN104622383B (zh) * 2015-02-11 2016-12-07 浙江大学 一种低噪声活塞泵吹吸尘器
CN106074178A (zh) * 2016-08-04 2016-11-09 中国人民解放军第三军医大学第三附属医院 一种儿科专用营养液注射装置
CN207191927U (zh) * 2017-09-04 2018-04-06 杭州妙洁日化科技有限公司 一种新型洗洁精瓶
CN107983011B (zh) * 2017-12-28 2024-03-08 山西阳光中天医疗器械有限公司 一种用于分离脂肪混合液的滤油装置
CN208842987U (zh) * 2018-08-24 2019-05-10 上海全力日用品有限公司 一种新型牙膏包装装置
CN209127332U (zh) * 2018-09-21 2019-07-19 烟台朗润涂料有限公司 乳胶漆放料装置
CN209080644U (zh) * 2018-11-20 2019-07-09 河南该亚生物科技有限公司 一种方便取用的生物试剂存放瓶

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5819980A (en) * 1996-12-04 1998-10-13 Hill; Myles L. Gurgle and slosh free canteen
CN101758003A (zh) * 2010-01-29 2010-06-30 深圳市耐迪科技有限公司 简易点胶机
KR20120133226A (ko) * 2011-05-31 2012-12-10 주식회사 케이씨텍 기판 코터 장치의 약액 공급용 펌프
KR20120133227A (ko) * 2011-05-31 2012-12-10 주식회사 케이씨텍 기판 코터 장치의 약액 공급용 펌프
CN204583618U (zh) * 2015-02-15 2015-08-26 南通航运职业技术学院 一种自动化涂胶设备
CN204602555U (zh) * 2015-03-30 2015-09-02 深圳市世椿自动化设备有限公司 一种胶桶无气泡压胶装置
CN105499080A (zh) * 2015-12-31 2016-04-20 昆山龙腾光电有限公司 供胶系统及供胶方法
CN206064742U (zh) * 2016-08-26 2017-04-05 东南（福建）汽车工业有限公司 一种汽车防震胶储胶系统
CN206587993U (zh) * 2017-02-28 2017-10-27 东莞优邦材料科技股份有限公司 一种点胶机用液态物料上料装置
CN106941074A (zh) * 2017-04-27 2017-07-11 林文华 一种方形晶片加工装置及其工作方法
CN208098509U (zh) * 2018-03-06 2018-11-16 东旭（昆山）显示材料有限公司 光阻容器及涂布机光阻供应系统
CN108465604A (zh) * 2018-03-15 2018-08-31 松下压缩机(大连)有限公司 筒装膏状密封胶自动出胶装置
CN110888302A (zh) * 2018-09-11 2020-03-17 长鑫存储技术有限公司 扫描式光刻胶涂布系统及方法
CN210647111U (zh) * 2019-08-24 2020-06-02 常山弘远电子有限公司 一种供胶装置

Also Published As

Publication number Publication date
US11702273B2 (en) 2023-07-18
US20210354904A1 (en) 2021-11-18
CN113443279A (zh) 2021-09-28

Similar Documents

Publication Publication Date Title
US8469285B2 (en) Chemical liquid supply nozzle and chemical liquid supply method
JP5335156B2 (ja) 基板保持装置
TWI416618B (zh) A treatment gas supply means and a treatment gas supply method, and a gas treatment apparatus
JP5083285B2 (ja) 疎水化処理装置、疎水化処理方法及び記憶媒体
JP2012507391A (ja) 基板とパターン形成層との間の接着性の促進
JP2011077529A (ja) 流体チャンバのアレイを備えるチャック・システム
CN103367203A (zh) 基板处理装置及基板处理方法
JP6442377B2 (ja) ポンプ装置セット及び液供給システム
KR101980729B1 (ko) 기판 처리 장치 및 기판 처리 방법
TW200839862A (en) Treatment apparatus, method of treating and recording medium
WO2021190299A1 (zh) 存储容器及供应系统
CN111570150B (zh) 光刻胶涂布系统及方法
JP2019129243A (ja) 基板処理装置および基板処理方法
JP2007005576A (ja) 基板処理システム及びその制御方法
CN105545713B (zh) 泵、泵装置和供液系统
US20090023297A1 (en) Method and apparatus for hmds treatment of substrate edges
JP3955197B2 (ja) ウエット処理用ノズルおよびウエット処理装置
KR100904462B1 (ko) 기판 처리 설비 및 기판 처리 방법
KR20200072222A (ko) 보틀, 기판 처리 장치, 및 방법
JP6050091B2 (ja) 基板処理装置
US20080202587A1 (en) System and method to supply chemical during semiconductor device fabrication
KR20060057113A (ko) 반도체 제조장비의 코팅액 노즐구조
KR20240070028A (ko) 기판 처리 장치
JP2024112469A (ja) 液体処理装置
CN117423637A (zh) 基板干燥装置及方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21774451

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21774451

Country of ref document: EP

Kind code of ref document: A1