WO2021186927A1 - 湿度調整装置 - Google Patents

湿度調整装置 Download PDF

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Publication number
WO2021186927A1
WO2021186927A1 PCT/JP2021/003776 JP2021003776W WO2021186927A1 WO 2021186927 A1 WO2021186927 A1 WO 2021186927A1 JP 2021003776 W JP2021003776 W JP 2021003776W WO 2021186927 A1 WO2021186927 A1 WO 2021186927A1
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WO
WIPO (PCT)
Prior art keywords
humidity
steam
control device
unit
detection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/003776
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English (en)
French (fr)
Japanese (ja)
Inventor
上田　晃
雅文 山口
克洋 増田
徹平 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Spindle Manufacturing Co Ltd
Original Assignee
Nihon Spindle Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Spindle Manufacturing Co Ltd filed Critical Nihon Spindle Manufacturing Co Ltd
Priority to JP2022508115A priority Critical patent/JPWO2021186927A1/ja
Publication of WO2021186927A1 publication Critical patent/WO2021186927A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air

Definitions

  • the present invention relates to a humidity control device.
  • an air adjusting device for adjusting the humidity in a clean room is known (see, for example, Patent Document 1).
  • the air conditioner described in Patent Document 1 includes a steam generator that generates steam.
  • the steam generator has an opening / closing door, and the amount of steam supplied into the clean room is adjusted by the combination of opening / closing the opening / closing door and stopping steam generation in the steam generator.
  • An object of the present invention is to provide a humidity control device capable of preventing the electric devices around the humidity control device from getting wet due to water droplets generated due to steam generation.
  • the humidity control device of the present invention is a humidity control device including a refrigerator, a cooling coil connected to the refrigerator, an electric heater, and a humidity control device.
  • the humidity controller includes a steam generator attached to the intake side of the cooling coil and A steam discharge pipe attached to the exhaust side of the cooling coil and It has a connecting pipe that connects the steam generator and the steam discharge pipe.
  • the humidity control device is characterized by including a receiving portion that receives water dripping from the steam discharge pipe.
  • the present invention it is possible to prevent the electric equipment such as the electric heater around the humidity controller from getting wet due to the water dripping from the steam discharge pipe. This makes it possible to prevent electric leakage and damage to electrical equipment due to a short circuit with water.
  • FIG. 1 is a schematic side view showing a first embodiment of the humidity control device of the present invention.
  • FIG. 2 is a block diagram showing a first embodiment of the humidity control device of the present invention.
  • FIG. 3 is a flowchart showing a control program performed by the humidity control device of the present invention.
  • FIG. 4 is a flowchart showing a subroutine included in the flowchart shown in FIG.
  • FIG. 5 is a block diagram showing a second embodiment of the humidity control device of the present invention.
  • FIG. 6 is a flowchart showing a control program performed by the humidity control device shown in FIG.
  • FIG. 7 is a flowchart showing a subroutine included in the flowchart shown in FIG. FIG.
  • FIG. 8 is a schematic side view showing a third embodiment of the humidity control device of the present invention.
  • FIG. 9 is a schematic side view showing a fourth embodiment of the humidity control device of the present invention.
  • FIG. 10 is a diagram (water supply state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG.
  • FIG. 11 is a diagram (water supply stopped state) showing the internal configuration of the steam generator included in the humidity control device shown in FIG.
  • FIG. 12 is a block diagram showing a fourth embodiment of the humidity control device of the present invention.
  • FIG. 13 is a flowchart showing a control program performed by the humidity control device of the present invention.
  • FIG. 14 is a schematic side view showing an arrangement state of the humidity control device (fifth embodiment) of the present invention in a clean room.
  • FIG. 15 is a schematic side view showing a sixth embodiment of the humidity control device of the present invention.
  • the humidity control device of the present invention will be described in detail based on a preferred embodiment shown in the attached drawings.
  • the upper side in FIGS. 1, 8, 9 to 11, 14 and 15 is “upper (or upper)", and the lower side is “lower (or lower)".
  • the right side is sometimes referred to as “front (or front)” and the left side is sometimes referred to as “rear (or back)”.
  • the humidity control device 1 shown in FIG. 1 includes a refrigerator 11, a cooling coil 12, an electric heater 13, an exhaust fan 14, a humidity control device 2, a housing 15, and a humidity detection unit 16, for example. It is used for humidity control in the clean room 30. Further, as shown in FIG. 2, the humidity control device 1 includes a control unit 17 and a power switch 18. Hereinafter, the configuration of each part will be described.
  • the refrigerator 11 has, for example, a built-in compressor and is airtightly connected to the cooling coil 12. As a result, the refrigerant can be supplied to the cooling coil 12.
  • the cooling coil 12 is composed of a tube through which the refrigerant supplied from the refrigerator 11 passes. This tube is formed in a coil shape (spiral shape), and when the refrigerant passes through it, the air around the cooling coil 12 (air AR1 described later) can be cooled.
  • the electric heater 13 is arranged above the cooling coil 12.
  • the electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. Thereby, the air (air AR1) around the electric heater 13 can be heated.
  • the humidity controller 2 includes a steam generator 21, a steam discharge pipe 22, and a connecting pipe 23.
  • a steam generator 21 is attached (arranged) to the lower side (intake side) of the cooling coil 12.
  • the steam generator 21 includes a humidifier 24 having a removable storage unit 241 for storing water.
  • the humidifier 24 has a heater (heater for steam generation) 242.
  • the electric heater 13 is composed of, for example, a nichrome wire, and can generate heat by applying a voltage. As a result, the water in the storage unit 241 can be heated to generate steam ST.
  • the steam discharge pipe 22 is attached to the upper side (exhaust side) of the cooling coil 12, particularly the upper side of the electric heater 13 in the present embodiment. Further, the steam discharge pipe 22 is connected to the steam generator 21 via a connecting pipe 23. The connecting pipe 23 bypasses the cooling coil 12 and the electric heater 13, and can guide the steam ST generated from the steam generator 21 to the steam discharge pipe 22. As a result, the steam ST is discharged through the steam discharge pipe 22.
  • An exhaust fan 14 is arranged above the electric heater 13. The exhaust fan 14 discharges air having a predetermined humidity, that is, air whose humidity has been adjusted by the humidity regulator 2 (air AR2 described later).
  • the refrigerator 11, the cooling coil 12, the electric heater 13, the exhaust fan 14, and the humidity controller 2 are housed in the housing 15.
  • the housing 15 has a suction port 151 for sucking the air AR1 in the clean room 30.
  • the temperature of the air AR1 is adjusted in the housing 15 by the cooling coil 12 and the electric heater 13, and the air AR1 is discharged from the exhaust fan 14 together with the steam ST from the steam discharge pipe 22.
  • the air discharged from the exhaust fan 14 is referred to as "air AR2".
  • the connecting pipe 23 is entirely housed in the housing 15, but the present invention is not limited to this, and for example, a part of the connecting pipe 23 may be exposed to the outside of the housing 15.
  • the humidity detection unit 16 is a sensor that detects the humidity of the environment in which the humidity control device 1 is used, that is, the humidity in the clean room 30.
  • the humidity detection unit 16 is used by arranging it at an arbitrary position in the clean room 30.
  • the humidity detection unit 16 is not particularly limited, and examples thereof include an electric hygrometer having a semiconductor, a bimetal hygrometer in which a humidity sensitive sheet and a metal plate are laminated, and the like.
  • the control unit 17 is electrically connected to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16.
  • a voltage is applied to the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16 via the control unit 17, and the operation is controlled by the control unit 17.
  • the configuration of the control unit 17 is not particularly limited, and may be, for example, a configuration including a CPU 171 and a storage unit 172.
  • the CPU 171 can execute, for example, a control program stored in advance in the storage unit 172.
  • the control program includes, for example, a program for adjusting the humidity by controlling the operating conditions (operating timing) of the refrigerator 11, the electric heater 13, the exhaust fan 14, the humidity regulator 2, and the humidity detection unit 16. included.
  • the humidity adjusting device 1 includes a power switch 18 for performing an ON / OFF operation of applying a voltage (power supply) to the control unit 17.
  • the power switch 18 is electrically connected to an external power source 40 such as an outlet.
  • the humidity controller 2 includes a non-contact relay 25.
  • the non-contact relay 25 switches between applying a voltage to the heater 242 and stopping the application of the voltage.
  • the non-contact relay 25 is a solid-state relay (abbreviation: SSR), and is composed of, for example, a photo-coupled SSR, a transformer-coupled SSR, a hybrid SSR, and the like.
  • SSR solid-state relay
  • the responsiveness is superior to that of a contact relay such as a mechanical relay, and the switching operation between voltage application and voltage application stop can be performed with high frequency.
  • the humidity adjusting device 1 the amount of steam ST generated can be accurately adjusted, and thus fine and stable humidity adjustment becomes possible.
  • the non-contact relay 25 is built in the humidity controller 2 in this embodiment, it may be externally attached, for example.
  • Step S101 determines whether or not the power switch 18 has been turned ON (step S101), and if it is determined that the power switch 18 has been turned ON, executes step S200.
  • Step S200 is a subroutine for humidity adjustment control.
  • step S200 the CPU 171 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is stopped.
  • the CPU 171 first determines whether or not the detection value H detected by the humidity detection unit 16 exceeds the threshold value (threshold humidity) ⁇ (step S201).
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ can be changed within the range of 40% or more and 60% or less, although it depends on the usage conditions of the clean room 30, for example.
  • step S201 As a result of the determination in step S201, when the detected value H exceeds the threshold value ⁇ , the non-contact relay 25 is stopped from applying the voltage. As a result, the generation of steam ST is suppressed. On the other hand, if the detection value H does not exceed the threshold value ⁇ as a result of the determination in step S201, the non-contact relay 25 is made to apply a voltage. This promotes the generation of steam ST.
  • the control unit 17 can control the switching of the non-contact relay 25 based on the detection result of the humidity detecting unit 16.
  • the control unit 17 causes the non-contact relay 25 to stop applying voltage when the detection result of the humidity detection unit 16 exceeds the threshold value ⁇ .
  • the control unit 17 applies a voltage to the non-contact relay 25.
  • the second embodiment of the humidity control device of the present invention will be described with reference to FIGS. 5 to 7, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
  • the present embodiment is the same as the first embodiment except that the humidity adjusting device can execute the operation mode switching control.
  • the control unit 17 has a function as a number detection unit 173.
  • the number-of-times detection unit 173 detects the number of times the non-contact relay 25 is switched per unit time.
  • the humidity regulator 2 includes a voltage regulator 26.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242.
  • the voltage adjusting unit 26 is not particularly limited, and examples thereof include a variable resistor and the like.
  • the humidity control device 1 can switch the operation mode to change the amount of steam generated from the steam generator 21.
  • the operation mode switching control program by the control unit 17 will be described with reference to the flowcharts shown in FIGS. 6 and 7.
  • the operation mode includes a first operation mode in which the amount of steam generated from the steam generator 21 is increased and a second operation mode in which the amount of steam generated from the steam generator 21 is decreased.
  • the operation mode switching control program is stored in advance in the storage unit 172.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 in two stages, for example, large and small.
  • the magnitude of the applied voltage to the heater 242 can be increased and the amount of steam can be easily increased
  • the magnitude of the applied voltage to the heater 242 can be decreased. The amount of steam can be easily reduced.
  • Step S101 determines whether or not the power switch 18 has been turned ON (step S101), and if it determines that the power switch 18 has been turned ON, executes step S200 and step S300 in that order. ..
  • Step S300 is a subroutine for operation mode switching control, and is executed in parallel with S200.
  • step S200 determines whether or not the power switch 18 has been turned off (step S102), and if it is determined that the power switch 18 has been turned off, the execution of step S200 is executed. Stop.
  • the CPU 171 first determines whether or not the detection value N detected by the number-of-times detection unit 173 exceeds the threshold value (threshold number of times) ⁇ (step S301). ..
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ can be set and changed as appropriate.
  • step S301 when the detected value N exceeds the threshold value ⁇ , the first operation mode is set. As a result, the amount of steam generated from the steam generator 21 increases. On the other hand, if the detection value N does not exceed the threshold value ⁇ as a result of the determination in step S301, the second operation mode is set. As a result, the amount of steam generated from the steam generator 21 is reduced.
  • the non-contact relay 25 is superior to the contact relay in responsiveness, so the number of switchings per unit time tends to be larger than that of the contact relay. Therefore, for example, depending on the degree of steam generation capacity of the steam generator 21, the greater the number of switching times of the non-contact relay 25 per unit time, the insufficient the total amount of steam ST supplied to the clean room 30 per unit time. May be done.
  • the control unit 17 can switch the operation mode based on the detection result of the number of times detection unit 173.
  • the control unit 17 has a first operation mode in which the amount of steam is increased so as to make up for the shortage of the total supply amount of the steam ST. do.
  • the control unit 17 reduces the amount of vapor when the detection result of the number detection unit 173 does not exceed the threshold value ⁇ , that is, when the detection result of the number of times detection unit 173 is less than the threshold value ⁇ .
  • the amount of steam can be adjusted, which contributes to more accurate humidity adjustment.
  • a third embodiment of the humidity control device of the present invention will be described with reference to FIG. 8, but the differences from the above-described embodiment will be mainly described, and the same matters will be omitted.
  • the present embodiment is the same as the first embodiment except that the humidity control device includes a water leakage prevention unit.
  • the humidity control device 1 when steam is discharged from the steam discharge pipe 22, the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13 come into contact with each other, causing dew condensation on the steam discharge pipe 22 and steam. Water Q1 may drip from the discharge pipe 22. That is, if there is a temperature difference between the steam discharge pipe 22 and the air AR1 that has passed through the electric heater 13, water droplets may be formed from the steam discharge pipe 22 and dropped. Therefore, as shown in FIG. 8, the humidity control device 1 includes a water leakage prevention unit 3 for preventing the wet spread of water droplets generated due to the generation of steam.
  • the water leakage prevention unit 3 includes a receiving unit 31 that receives the water Q1, a storage unit 32 that temporarily stores the water Q1, a connecting pipe 33 that connects the receiving unit 31 and the storage unit 32, and the water Q1 in the storage unit 32. It has a discharge unit 34 for discharging the water.
  • the receiving portion 31 is a tray-shaped (flat plate-shaped) member that receives the water Q1 dripping from the steam discharge pipe 22.
  • the receiving portion 31 is arranged between the steam discharge pipe 22 and the electric heater 13. As a result, it is possible to prevent the electric device around the humidity controller 2, that is, the electric heater 13, from getting wet by receiving the water Q1 dripping from the steam discharge pipe 22. As a result, it is possible to prevent electric leakage and damage to the electric heater 13 due to a short circuit with water Q1.
  • the receiving portion 31 has a size (area) sufficient to include the steam discharge pipe 22 when viewed from above. As a result, the water Q1 can be received without leakage regardless of the location where the water Q1 is dropped from the steam discharge pipe 22. Further, the receiving portion 31 is arranged so as to be inclined with respect to the horizontal direction. As a result, the water Q1 received by the receiving portion 31 can be quickly directed to the connecting pipe 33.
  • the storage unit 32 is a tray-shaped (flat plate-shaped) member that temporarily stores the water Q1 that has passed through the connecting pipe 33.
  • the storage unit 32 is arranged below the humidity controller 2.
  • a discharge unit 34 is provided below the storage unit 32.
  • the discharge unit 34 is a discharge port for discharging the water Q1 stored in the storage unit 32. Thereby, for example, if the water Q1 is discharged periodically, it is possible to prevent the water Q1 from overflowing from the storage unit 32. Further, the discharge unit 34 faces forward. As a result, the water Q1 discharge operation can be easily performed.
  • a fourth embodiment of the humidity control device of the present invention will be described with reference to FIGS. 9 to 13, but the differences from the above-described embodiments will be mainly described, and the same matters will be omitted. ..
  • the present embodiment is the same as the first embodiment except that the humidity adjusting device includes a negative pressure state relaxation unit.
  • the humidity control device 1 includes a negative pressure state relaxation unit 4.
  • the inside of the housing 15 may be in a negative pressure state rather than the atmospheric pressure depending on the magnitude of the discharge force of the air AR2 of the fan 14, that is, the rotation speed of the fan.
  • This negative pressure state also extends to the inside of the storage unit 241 of the humidity controller 2.
  • the storage unit 241 of the humidity controller 2 is provided with a supply port 27 for supplying water Q2.
  • water Q2 can be stored in the storage unit 241.
  • steam ST can be generated by heating the water Q2.
  • the storage portion 241 is provided with a float 281, a plug body 282, and a connecting portion 283 for connecting the float 281 and the plug body 282.
  • the position of the float 281 changes in the vertical direction according to the height of the liquid level of the water Q2 in the storage portion 241.
  • the plug body 282 can move closer to or further from the supply port 27 in conjunction with the change in the position of the float 281.
  • FIG. 10 when the plug body 282 is separated from the supply port 27, the supply port 27 is opened and water Q2 can be supplied.
  • FIG. 11 when the plug body 282 is approaching from the supply port 27, the supply port 27 can be closed to stop the supply of water Q2. This makes it possible to prevent an excessive supply of water Q2 to the storage unit 241.
  • the connecting portion 283 is a bent (or curved) rod-shaped member, and the connecting portion 283 is rotatably supported in the middle of the longitudinal direction via the rotating shaft 284.
  • the supply port 27 can be opened and closed by the plug body 282 in conjunction with the change in the position of the float 281.
  • the negative pressure state may extend into the storage portion 241 of the humidity controller 2.
  • the float 281 is forcibly pulled up, which may cause a malfunction in which the supply of water Q2 is stopped even though the supply of water Q2 is insufficient.
  • the humidity control device 1 includes a negative pressure state relaxation unit 4, and the negative pressure state relaxation unit 4 is an internal pressure detection unit that detects pressure in the vicinity of the fan 14 in the housing 15. It has 41 and an external pressure detecting unit 42 that detects pressure on the opposite side to the suction port 151 outside the housing 15. Further, as shown in FIG. 10, the internal pressure detection unit 41 and the external pressure detection unit 42 are electrically connected to the control unit 17.
  • the negative pressure state relaxation unit 4 can perform a negative pressure state relaxation operation for relaxing the negative pressure state in the storage unit 241.
  • the control program that performs this operation will be described with reference to the flowcharts shown in FIGS. 6 and 13. This control program is stored in advance in the storage unit 172.
  • the CPU 171 operates the internal pressure detection unit 41 and the external pressure detection unit 42 to detect the internal pressure P1 by the internal pressure detection unit 41 (step S401), and the external pressure detection unit 41.
  • the external pressure P2 is detected at 42 (step S402).
  • the CPU 171 calculates the pressure difference ⁇ P between the internal pressure P1 and the external pressure P2 (step S403).
  • the CPU 171 determines whether or not the pressure difference ⁇ P is equal to or greater than the threshold value ⁇ (step S404).
  • the threshold value ⁇ is stored in advance in the storage unit 172. Further, the threshold value ⁇ indicates that the negative pressure state in the storage portion 241 is relatively high, and is a size that can be regarded as forcibly pulling up the float 281.
  • the threshold value ⁇ is obtained, for example, experimentally or by simulation.
  • step S404 if the pressure difference ⁇ P is equal to or greater than the threshold value ⁇ , the negative pressure state relaxation operation is performed (step S405). On the other hand, if the pressure difference ⁇ P is not equal to or greater than the threshold value ⁇ as a result of the determination in step S404, the process returns to step S401 and the subsequent steps are sequentially executed.
  • the steam generator 21 has a lid 211 that can be opened and closed.
  • the lid 211 constitutes a part of the negative pressure state alleviating portion 4.
  • the steam generator 21 has a lid opening / closing drive unit 22.
  • the lid opening / closing drive unit 22 is a mechanism for opening / closing the lid 211, and is composed of, for example, a motor or the like.
  • the lid opening / closing drive unit 22 also constitutes a part of the negative pressure state relaxation unit 4.
  • One of the negative pressure state relaxation operations is to open the lid 211.
  • the negative pressure state in the storage unit 241 of the humidity controller 2 is opened, and the negative pressure state in the storage unit 241 can be alleviated.
  • one of the negative pressure state relaxation operations is to reduce the amount of air AR2 discharged by the fan 14, that is, to reduce the rotation speed of the fan 14, apart from opening the lid 211.
  • the negative pressure state in the storage unit 241 is alleviated. This also prevents the float 281 from being forcibly pulled up, and thus prevents a malfunction of the supply stop. Therefore, it can be said that the fan 14 also constitutes a part of the negative pressure state relaxation unit 4.
  • opening the lid 211 and reducing the rotation speed of the fan 14 may be used in combination. Further, the order of step S401 and step S402 may be reversed. Further, the external pressure detection unit 42 of the internal pressure detection unit 41 and the external pressure detection unit 42 may be omitted.
  • the humidity control device 1 is arranged close to the wall of the clean room 30. This makes it possible to prevent the humidity control device 1 from getting in the way in the clean room 30. Further, in the clean room 30, a duct 50 connected to the humidity control device 1 and a duct 60 connected to the duct 50 are arranged.
  • the duct 50 is connected to the fan 14 and can guide the air AR2 to the duct 60.
  • the duct 60 is arranged along the horizontal direction near the ceiling of the clean room 30.
  • the air AR2 guided to the duct 60 can pass through the duct 60 as it is.
  • the air AR2 is discharged through a plurality of exhaust ports 601 provided by opening in the duct 60. As a result, the air AR2 can be supplied into the clean room 30.
  • the humidity regulator 1 (humidity regulator 2) further includes a condensed water discharge pipe (discharge passage) 29 connected to the steam discharge pipe 22. Condensation occurs due to the temperature difference between the air AR1 passing through the steam discharge pipe 22 and the electric heater 13, and the dew condensation occurs as condensed water (water Q3) inside the steam discharge pipe 22.
  • this water Q3 is discharged from the steam discharge pipe 22 via the condensed water discharge pipe 29.
  • this water Q3 is possible to prevent the water Q3 from overflowing from the inside of the steam discharge pipe 22 and wetting the electric heater 13 or the like around the humidity controller 2. This makes it possible to prevent electric leakage and the like.
  • the condensed water discharge pipe 29 may be connected to the connecting pipe 33 or may extend to the storage unit 32. As a result, the water Q3 that has passed through the condensed water discharge pipe 29 can be stored in the storage unit 32. Further, the steam discharge pipe 22 may be inclined with respect to the horizontal direction. In this case, the condensed water discharge pipe 29 is connected to the lower side of the steam discharge pipe 22 in the inclined direction. As a result, the water Q generated inside the steam discharge pipe 22 can be quickly directed to the condensed water discharge pipe 29.
  • the humidity control device of the present invention has been described above with reference to the illustrated embodiment, the present invention is not limited to this, and each part constituting the humidity control device has an arbitrary configuration capable of exhibiting the same function. Can be replaced with one. Further, any component may be added. Further, the humidity control device of the present invention may be a combination of any two or more configurations (features) of the above-described embodiments. For example, the configuration of the third embodiment can be combined with the configurations of the first embodiment, the second embodiment, the fourth embodiment, the fifth embodiment, and the sixth embodiment.
  • the voltage adjusting unit 26 adjusts the magnitude of the applied voltage to the heater 242 to switch between the first operation mode and the second rotation mode, but the present invention is not limited to this. ..
  • the present invention is not limited to this. ..
  • the steam generator 21 has a plurality of heaters 242

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Air Conditioning Control Device (AREA)
  • Air Humidification (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Paper (AREA)
PCT/JP2021/003776 2020-03-18 2021-02-02 湿度調整装置 Ceased WO2021186927A1 (ja)

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