WO2021176726A1 - ソナー - Google Patents
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- WO2021176726A1 WO2021176726A1 PCT/JP2020/009855 JP2020009855W WO2021176726A1 WO 2021176726 A1 WO2021176726 A1 WO 2021176726A1 JP 2020009855 W JP2020009855 W JP 2020009855W WO 2021176726 A1 WO2021176726 A1 WO 2021176726A1
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- Prior art keywords
- piezoelectric element
- ultrasonic vibrator
- vibrating
- sonar
- ultrasonic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/521—Constructional features
Definitions
- the present invention relates to sonar that detects an object to be detected such as a school of fish using ultrasonic waves.
- the sonar that detects an object to be detected such as a school of fish by transmitting and receiving ultrasonic waves is known.
- the sonar is a drive that causes the ultrasonic vibrator to perform a swivel motion centered on a rotation axis oriented in the vertical direction and a tilt motion centered on a tilt axis orthogonal to the rotation axis, and an ultrasonic transducer that transmits and receives ultrasonic waves. It is equipped with a mechanism, and detects underwater by transmitting and receiving ultrasonic waves while moving the ultrasonic vibrator (see, for example, Patent Documents 1 and 2). Then, the detection result of detecting underwater is displayed on the screen as a detection image.
- the ultrasonic vibrator generally includes an acoustic matching layer and a piezoelectric element bonded to the acoustic matching layer.
- the piezoelectric elements 102 constituting the ultrasonic vibrator 101 are arranged vertically and horizontally when viewed from the thickness direction. It has been proposed to have a structure composed of a plurality of (for example, 100 or more) vibrating portions 103 and having a filler 104 filled between adjacent vibrating portions 103 (see, for example, Patent Documents 3 and 4).
- each of the vibrating portions 103 is easily deformed in the height direction of the vibrating portion 103, so that the piezoelectric element 102 is easily deformed at each portion. That is, since the piezoelectric element 102 is likely to vibrate, the sensitivity of the ultrasonic vibrator 101 is increased. Further, the filler 104 enters the gap between the vibrating portions 103, so that the vibrating portions 103 are mutually reinforced.
- Japanese Patent No. 5979537 Japanese Unexamined Patent Publication No. 2013-221791 (paragraph [0036], FIGS. 1 to 6, etc.) Japanese Unexamined Patent Publication No. 2016-23666 (Fig. 4B, etc.) Japanese Unexamined Patent Publication No. 2012-182758 (Fig. 6 etc.)
- each vibrating portion 103 is less likely to be deformed (vibrated) in the height direction, so that there is a problem that the sensitivity of the ultrasonic vibrator 101 is lowered. .. Therefore, it is conceivable to remove the filler 104 to secure the sensitivity, but since each vibrating portion 103 has a thin rod shape and low strength, the ultrasonic vibrator 101 can be used for a long period of time without the filler 104. If it is driven over a period of time, cracks are likely to occur due to fatigue fracture. That is, when the filler 104 is not filled, there is a problem that the reliability of the ultrasonic vibrator 101 is lowered.
- the present invention has been made in view of the above problems, and an object thereof is a sonar capable of obtaining a highly reliable ultrasonic vibrator by preventing a decrease in strength of a vibrating portion while maintaining sensitivity. Is to provide. Another object is to provide a sonar capable of obtaining an ultrasonic vibrator that is easy to manufacture and has a low manufacturing cost.
- the invention according to claim 1 comprises an ultrasonic vibrator that transmits and receives ultrasonic waves, a swirling motion centered on a rotation axis oriented in the vertical direction, and a tilting axis orthogonal to the rotation axis. It is a sonar provided with a drive mechanism for causing the ultrasonic vibrator to perform a tilting motion centered on the above, and the ultrasonic vibrator is a substantially disk-shaped piezoelectric element having a front surface and a back surface on the opposite side thereof.
- the piezoelectric element is provided with a plurality of groove portions extending in one direction, and a plurality of band-shaped vibrating portions are arranged via the groove portions, and the groove portions are 30 ° or less with respect to the tilt axis.
- the gist is a sonar characterized in that the ultrasonic vibrators are arranged so as to form an angle.
- a band-shaped vibrating portion is formed in the piezoelectric element. Therefore, since the vibrating portion is longer in the plane direction than the columnar vibrating portion, the vibrating portion is reinforced, and the strength of the vibrating portion is prevented from being lowered. As a result, the occurrence of cracks in the vibrating portion can be prevented without filling the groove portion with the filler, so that the reliability of the ultrasonic vibrator can be improved. Moreover, in claim 1, since the band-shaped vibrating portion is obtained by forming the groove portion extending in one direction, the vibrating portion is compared with the case where the groove portion extending vertically and horizontally is formed to obtain the columnar vibrating portion described above.
- the number of times of forming the groove required for forming the groove is reduced. Therefore, since the groove portion can be easily formed, the manufacturing cost of the ultrasonic vibrator can be reduced. Further, as the number of times the groove is formed decreases, the number of divided electrodes also decreases, so that the time and effort required to connect each of the divided electrodes with a conductive member is also reduced. Further, when the ultrasonic vibrator is arranged so that the groove portion makes an angle of 0 ° with respect to the tilting axis, that is, when the groove portion is parallel to the tilting axis (claim 2). , The side lobe in the direction of the tilt axis is weakened, and erroneous judgment in detection can be reduced.
- the "substantially disk-shaped piezoelectric element” includes not only a disk-shaped piezoelectric element but also an elliptical plate-shaped piezoelectric element, an oval-shaped piezoelectric element, and the like.
- the invention according to claim 3 has a relationship of W / L ⁇ 0.1, where W is the width of the vibrating portion and L is the minimum value of the outer diameter of the piezoelectric element in claim 1 or 2.
- the gist is to satisfy.
- the width of the frequency band of ultrasonic waves and the transmission / reception sensitivity of the ultrasonic vibrator are set in the case where a groove portion extending vertically and horizontally is formed in the piezoelectric element to obtain a plurality of columnar vibrating portions. Can be about the same.
- the "minimum value (L) of the outer diameter of the piezoelectric element” indicates “the length of the diameter of the circle” when the piezoelectric element has a disk shape, and "the length of the diameter of the circle” when the piezoelectric element has an elliptical plate shape. It indicates the length of the minor axis of the ellipse.
- the invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein the ultrasonic vibrator includes a substantially disk-shaped base material that also serves as an acoustic matching layer, and the piezoelectric material is used on the base material.
- the gist is that the front surface of the element is joined and the plurality of vibrating portions are connected to each other at the front end portion of the piezoelectric element.
- the thickness of the portion where the vibrating portions are connected to each other at the front end portion of the piezoelectric element is secured. .. Therefore, the strength of the piezoelectric element can be ensured.
- a highly reliable ultrasonic vibrator can be obtained by preventing a decrease in the strength of the vibrating portion while maintaining the sensitivity.
- (A) is a cross-sectional view showing a vibrating part at the time of extension
- (b) is a cross-sectional view showing a vibrating part at the time of contraction.
- the graph which shows the measurement result of the directivity in sample C The graph which shows the measurement result of the directivity of samples A to C when the ultrasonic wave is 140kHz.
- (A) is a diagram showing a detection image
- (b) is a diagram showing an image of an image when an ultrasonic wave having a directivity characteristic in which a side lobe is generated is scanned so that the side lobe does not face downward.
- (a) is a diagram showing a detection image
- (b) is a diagram showing an image of an image.
- (A) to (c) are schematic plan views showing an ultrasonic vibrator in another embodiment.
- the cross-sectional view which shows the vibrating part in the prior art.
- the sonar 11 of the present embodiment is mounted on the bottom of the ship 10 and used.
- the sonar 11 is a device that detects an object to be detected S0 such as a school of fish existing in the water by irradiating the water with ultrasonic waves U1.
- the sonar 11 is attached to the elevating device 12.
- the elevating device 12 is a device that raises and lowers the sonar 11 so that the sonar 11 appears and disappears from the bottom of the ship into the water.
- a liquid crystal monitor 13 is electrically connected to the sonar 11 and the elevating device 12.
- the liquid crystal monitor 13 is installed in the wheelhouse of the ship 10 and has an operation unit 14 and a display unit 15.
- the sonar 11 is provided with a sonar dome 20.
- the sonar dome 20 is formed by using a resin material such as ABS resin (acrylonitrile butadiene styrene resin), and is composed of an upper case 21, a lower case 22, and a lid 23.
- the upper case 21 is a bottomed cylindrical case that opens at the lower end
- the lower case 22 is a bottomed cylindrical case that opens at the upper end.
- the lower end of the lower case 22 has a dome shape (hemispherical shape).
- the lid 23 has a disk shape and is for closing the lower end side opening of the upper case 21 and the upper end side opening of the lower case 22.
- the upper accommodation space 24 is formed by the lid 23 and the upper case 21, and the lower accommodation space 25 is formed by the lid 23 and the lower case 22.
- the sonar dome 20 houses an ultrasonic vibrator 41 that transmits and receives ultrasonic waves U1, a case 40 that houses the ultrasonic vibrator 41, and a drive mechanism 30 that moves the ultrasonic vibrator 41. ..
- the drive mechanism 30 includes a scan motor 31, a tilt motor 32, and the like.
- the scan motor 31 is installed in the central portion of the lid 23 in the upper accommodation space 24.
- a stepping motor is used as the scan motor 31 of the present embodiment.
- the rotation shaft 31a of the scan motor 31 extends along the vertical direction, and protrudes into the lower accommodation space 25 through the through hole 33 provided in the central portion of the lid 23.
- the tip of the rotating shaft 31a is connected to the central portion of the disk-shaped support plate 34, and the support frame 35 is attached to the lower surface of the support plate 34.
- the support frame 35 has a U-shape having a pair of arm portions 35a.
- the case 40 is formed in a bottomed cylindrical shape having one end opened by using a resin material such as ABS resin. Further, the case 40 is provided with a tilting shaft 36 orthogonal to the rotating shaft 31a.
- the tilting shaft 36 is divided into two tilting shaft portions 36a, and both tilting shaft portions 36a project in opposite directions from both side portions (left side portion and right side portion in FIGS. 4 and 7) of the case 40. ..
- the both tilting shaft portions 36a are fitted into through holes provided in both arm portions 35a of the support frame 35 via bearings (not shown).
- the support plate 34, the support frame 35, the case 40, and the ultrasonic vibrator 41 rotate around the rotation shaft 31a.
- the irradiation direction of the ultrasonic wave U1 output from the ultrasonic vibrator 41 changes along the circumferential direction of the rotation shaft 31a.
- each boss 46 is provided with a screw hole portion 47, respectively.
- the screw hole portions 47 are arranged at equal angular intervals with respect to the center C1 of the case 40.
- the tilt motor 32 is attached to the upper end of the support frame 35.
- a stepping motor is used as the tilt motor 32 of the present embodiment.
- the output shaft 32a of the tilt motor 32 is arranged in parallel with the pair of tilting shaft portions 36a, and a pinion gear 32b is attached to the tip portion thereof.
- the pinion gear 32b meshes with a substantially semicircular tilt gear 37 attached to the case 40. Therefore, when the output shaft 32a of the tilt motor 32 rotates, the pinion gear 32b and the tilt gear 37 rotate, and the case 40 and the ultrasonic vibrator 41 are centered on the tilt shaft 36 (tilt shaft portion 36a). Perform a tilting motion. Along with this, the irradiation angle of the ultrasonic wave U1 output from the ultrasonic vibrator 41 also changes with the tilt of the ultrasonic vibrator 41.
- the ultrasonic vibrator 41 includes a base material 42 and a piezoelectric element 43.
- the base material 42 is a disk-shaped resin plate-like material that also serves as an acoustic matching layer.
- Four overhanging portions 44 are provided on the outer peripheral portion of the base material 42, and each overhanging portion 44 is provided with a screw hole 45.
- the screw holes 45 are arranged at equal angular intervals with respect to the central axis O1 of the ultrasonic vibrator 41. Further, each screw hole 45 is countersunk at the opening on the back surface 42b side of the base material 42.
- the piezoelectric element 43 is, for example, a disk-shaped ceramic plate-like material formed by using lead zirconate titanate (PZT), which is a piezoelectric ceramic. As shown in FIGS. 6, 8 and 9, since the outer diameter of the piezoelectric element 43 is smaller than the outer diameter of the base material 42, the area of the piezoelectric element 43 is smaller than the area of the base material 42. Further, the piezoelectric element 43 has a front surface 51 joined to the base material 42, a back surface 52 on the opposite side of the front surface 51, and an outer peripheral surface 53 orthogonal to the front surface 51 and the back surface 52. Further, as shown in FIGS.
- PZT lead zirconate titanate
- a front electrode 54 is formed on the front surface 51 of the piezoelectric element 43, and a back electrode 55 is formed on the back surface 52 of the piezoelectric element 43.
- the entire front surface 51 of the piezoelectric element 43 is bonded to the base material 42 via the front side electrode 54 and the adhesive layer 56 (see FIG. 10).
- the piezoelectric element 43 is composed of a plurality of vibrating portions 90 divided so as to extend along the thickness direction of the piezoelectric element 43.
- Each vibrating portion 90 is configured by forming a plurality of groove portions K1 extending in one direction (X direction in FIG. 8) with respect to the back surface 52 of the piezoelectric element 43. Therefore, each vibrating portion 90 is arranged via the groove portion K1 in a direction orthogonal to the direction in which the groove portion K1 extends (Y direction in FIG. 8). Further, the groove portions K1 are arranged in parallel with each other and at an angle of 30 ° or less (0 ° in the present embodiment) with respect to the central axis A1 (see FIG.
- each groove K1 is parallel to the central axis A1 of the tilting shaft 36. Further, in the present embodiment, of the groove portions K1, the groove portion K1 located at the central portion is located on the central axis A1 of the tilting shaft 36.
- the width of each groove K1 is 1/10 or more and 1/3 or less of the width of the vibrating portion 90, and is equal to each other. Further, since each groove K1 is not filled with any filler made of a resin material (epoxy resin, urethane resin, silicone resin, etc.) or an adhesive (epoxy adhesive, etc.), each groove K1 is as a whole.
- the gap is K0.
- each vibrating portion 90 has a pair of outer vibrating portions 91 located at both ends (upper end and lower end in FIG. 8) and a plurality of inner vibrating portions 91 arranged between the two outer vibrating portions 91. It is composed of a vibrating unit 92.
- Each vibrating portion 90 has a band shape when viewed from the rear.
- the surface 93a (back surface 52) of the outer vibrating portion 91 is composed of two sides 94a and 94b, and the sides 94a are arcuate in rear view.
- the side 94b is linear in the rear view.
- the surface 93b (back surface 52) of the inner vibrating portion 92 is composed of four sides 95a, 95b, 95c, 95d, and the sides 95a, 95c are viewed from the back. It has an arc shape, and the sides 95b and 95d are linear in rear view.
- the outer surface 96 of both outer vibrating portions 91 and both end surfaces 97 of each inner vibrating portion 92 form an outer peripheral surface 53 of the piezoelectric element 43.
- the vibrating portion 90 (inner vibrating portion 92) located at the central portion has the longest length, which is substantially equal to the outer diameter of the piezoelectric element 43.
- the length of the vibrating portion 90 decreases toward both ends of the piezoelectric element 43.
- the width W1 of the outer vibrating portion 91 is larger than the width W2 of the inner vibrating portion 92.
- both outer vibrating portions 91 and each inner vibrating portion 92 are connected to each other at the end portion on the front surface 51 side of the piezoelectric element 43.
- the length of the outer vibrating portion 91 is larger than the height H1 of the outer vibrating portion 91, and the height H1 of the outer vibrating portion 91 is larger than the width W1 of the outer vibrating portion 91.
- the length of the inner vibrating portion 92 is larger than the height H1 of the inner vibrating portion 92, and the height H1 of the inner vibrating portion 92 is larger than the width W2 of the inner vibrating portion 92.
- the height H1 of the vibrating portions 91 and 92 is equal to the depth of the groove portion K1.
- the thickness of the base material 42 described above is smaller than the height H1 of the vibrating portions 91 and 92. Further, the thickness H2 of the portion of the piezoelectric element 43 where the vibrating portions 91 and 92 are connected to each other is smaller than the thickness of the base material 42.
- the width W of the vibrating portion 90 (specifically, the width W1 of the outer vibrating portion 91 or the width W2 of the inner vibrating portion 92) and the outer diameter of the piezoelectric element 43.
- the minimum value L (in this embodiment, the diameter of the piezoelectric element 43) satisfies the relationship of 0.05 ⁇ W / L ⁇ 0.1, particularly 0.07 ⁇ W / L ⁇ 0.1. ing. This indicates that the piezoelectric element 43 has 10 or more vibrating portions 90. By doing so, the specific band of the ultrasonic wave U1 can be widened, and the sensitivity of the ultrasonic vibrator 41 is also increased.
- back side electrodes 55 are formed on the surface 93a of both outer vibrating portions 91 and on the surface 93b of each inner vibrating portion 92, respectively.
- a wire rod 60 (conductive member) made of a conductive metal (copper in this embodiment) having a small electric resistance such as copper, silver, and tin is joined so as to bridge each of the plurality of back side electrodes 55.
- the wire rod 60 is arranged at a position deviated from the central axis O1 of the piezoelectric element 43 (ultrasonic vibrator 41).
- the wire rod 60 of the present embodiment has an undulating shape (wavy shape).
- the wire rod 60 is connected to each back side electrode 55 via a solder 61.
- the wire rod 60 becomes a common electrode on the surface 93a of both outer vibrating portions 91 and the surface 93b of each inner vibrating portion 92.
- the first lead wire 62 is connected to the front side electrode 54, and the second lead wire 63 is connected to the back side electrode 55.
- the first lead wire 62 is connected to a side terminal (not shown) extending outward from the front side electrode 54 by soldering or the like.
- the second lead wire 63 is connected to any one of the plurality of back side electrodes 55 by soldering or the like. Then, the first lead wire 62 and the second lead wire 63 are bound by the wiring tube 64 and pulled out of the case 40 through the wiring insertion hole 49 provided in the upper part of the case 40.
- the first lead wire 62 is connected to the side terminal, a metal foil (not shown) such as copper foil is attached on the front side electrode 54 or the surface 42a of the base material 42 to the metal foil.
- the first lead wire 62 may be connected by soldering or the like.
- the wiring insertion hole 49 is arranged on the opposite side of the tilt gear 37 via the central axis O1 of the ultrasonic vibrator 41. Therefore, it is possible to prevent the wiring tube 64 passing through the wiring insertion hole 49 from interfering with the tilt gear 37. Further, the wiring insertion hole 49 is arranged in the vicinity of the tilting shaft portion 36a. Therefore, it is possible to prevent the wiring tube 64 (first lead wire 62 and second lead wire 63) from fluttering when the ultrasonic vibrator 41 tilts.
- a sheet-shaped soundproofing material 65 (backing material) is attached to the back surface 52 side of the piezoelectric element 43.
- the soundproofing material 65 is for suppressing reverberation, and is also attached to the inner peripheral surface of the case 40.
- the soundproofing material 65 includes a resin material or rubber containing particles or fibers made of metal or ceramics, or a resin material having pores dispersedly provided (sponge or the like). Can be used.
- the sonar dome 20 shown in FIGS. 3 and 4 is filled with an ultrasonic wave propagating liquid (not shown) that propagates the ultrasonic wave U1. Further, a part of the ultrasonic wave propagating liquid flows into the case 40 through the communication port 48 provided in the case 40, and flows into the gap K0 (groove K1) between the adjacent vibrating portions 90 in the piezoelectric element 43. , Fills the void K0.
- the ultrasonic wave propagating liquid of this embodiment is liquid paraffin.
- the intrinsic acoustic impedance of the base material 42 described above is smaller than the intrinsic acoustic impedance of the piezoelectric element 43, and is larger than the intrinsic acoustic impedance of the ultrasonic propagating liquid and the intrinsic acoustic impedance of water.
- the liquid crystal monitor 13 of the sonar 11 includes a control device 70 that comprehensively controls the entire device.
- the control device 70 is composed of a well-known computer including a CPU 71, a ROM 72, a RAM 73, and the like.
- the CPU 71 is electrically connected to the scan motor 31 and the tilt motor 32 via the motor driver 81, and controls them by various drive signals. Further, the CPU 71 is electrically connected to the ultrasonic vibrator 41 via the transmission / reception circuit 82. The transmission / reception circuit 82 outputs an oscillation signal to the ultrasonic vibrator 41 to drive the ultrasonic vibrator 41. As a result, the ultrasonic transducer 41 irradiates (transmits) the ultrasonic wave U1 into water. Further, an electric signal indicating the ultrasonic wave U1 (reflected wave U2) received by the ultrasonic vibrator 41 is input to the transmission / reception circuit 82. Further, the CPU 71 is electrically connected to the elevating device 12, the operation unit 14, the display unit 15, and the GPS (Global Positioning System) receiving unit 83, respectively.
- GPS Global Positioning System
- the CPU 71 shown in FIG. 12 controls the transmission / reception circuit 82 to irradiate the ultrasonic wave U1 from the ultrasonic vibrator 41, and also controls to drive the elevating device 12.
- the CPU 71 controls the motor driver 81 to drive the scan motor 31 and the tilt motor 32, respectively.
- the position information of the ship 10 received by the GPS receiving unit 83 is input to the CPU 71.
- the CPU 71 receives the reception signal generated when the ultrasonic vibrator 41 receives the reflected wave U2 via the transmission / reception circuit 82. Then, the CPU 71 generates detection image data based on the received reception signal, and stores the generated detection image data in the RAM 73. The CPU 71 controls the display unit 15 to display the detected image based on the detected image data stored in the RAM 73.
- each vibrating portion 90 of the piezoelectric element 43 repeats contraction (see FIG. 13B) and expansion (see FIG. 13A).
- the vibrating portion 90 contracts in the height direction, the vibrating portion 90 is deformed so as to escape in the width direction, specifically, to the outer peripheral side of the vibrating portion 90 (see arrow F1 in FIG. 13B). do.
- the vibrating portion 90 deforms in the width direction, specifically, toward the central portion side of the vibrating portion 90 (see arrow F2 in FIG. 13A).
- the piezoelectric element 43 vibrates, and the ultrasonic wave U1 is irradiated (transmitted) to the water from the ultrasonic vibrator 41.
- the ultrasonic wave U1 reaches the object to be detected S0 (see FIG. 1)
- the ultrasonic wave U1 is reflected by the object to be detected S0 to become a reflected wave U2, which propagates toward the sonar 11 and is propagated toward the sonar 11. Is input (received) to.
- the ultrasonic wave U1 (reflected wave U2) received by the ultrasonic vibrator 41 is converted into a received signal and input to the CPU 71 via the transmission / reception circuit 82.
- the object to be detected S0 is detected.
- the CPU 71 controls to drive the scan motor 31 via the motor driver 81, and causes the ultrasonic vibrator 41 to perform a turning motion around the rotation shaft 31a. Further, the CPU 71 controls to drive the tilt motor 32 via the motor driver 81, and causes the ultrasonic vibrator 41 to perform a tilting motion centered on the tilting shaft 36. As a result, the irradiation direction of the ultrasonic wave U1 gradually changes, and the detection range also gradually changes accordingly. After that, when the operator turns off the power, the control device 70 stops the transmission / reception circuit 82, and the irradiation of the ultrasonic wave U1 and the reception of the reflected wave U2 are completed.
- the base material 42 First, prepare the base material 42. Specifically, a resin plate made of glass epoxy (FR-4) or the like is cut into a circular shape. Further, a ceramic plate-like material to be the piezoelectric element 43 is prepared. Specifically, a disc-shaped ceramic sintered body made of lead zirconate titanate (PZT) is produced, and then surface polishing is performed to obtain a ceramic plate-shaped product. Next, an electrode forming step is performed to form the front side electrode 54 on the front surface 51 of the ceramic plate-shaped material and the back side electrode 55 on the back surface 52 of the ceramic plate-shaped material. Specifically, the silver paste is applied to the front surface 51 and the back surface 52 of the ceramic plate-shaped material, respectively, and the applied silver paste is fired to form the electrodes 54 and 55. Then, by applying a voltage between the front side electrode 54 and the back side electrode 55, a polarization process is performed to polarize the ceramic plate-like material in the thickness direction.
- FR-4 glass epoxy
- a ceramic plate-like material is joined to one side of the base material 42 via the front side electrode 54.
- an adhesive epoxy-based adhesive or the like
- an adhesive layer 56 is applied to either the surface of the front electrode 54 or the surface 42a of the base material 42, and the base material 42 is coated.
- brazing may be performed using solder or the like.
- a plurality of groove portions K1 are formed on the back surface 52 side of the ceramic plate-like material by performing cutting or the like.
- the ceramic plate-shaped object is divided into a plurality of vibrating portions 90, and the back side electrodes 55 formed on the back surface 52 of the ceramic plate-shaped object are also divided into a plurality of (the same number as the vibrating portions 90).
- the piezoelectric element 43 is completed. Since each vibrating portion 90 is divided in a state of being connected to each other at the end portion of the piezoelectric element 43 on the front surface 51 side, the front electrode 54 formed on the front surface 51 is not divided.
- each back side electrode 55 is used as a common electrode for the surfaces 93a and 93b of each vibrating portion 90.
- the wire rod 60 of the present embodiment is joined to each back side electrode 55 by soldering, but is joined to each back side electrode 55 by another joining method (brazing, bonding with an adhesive, etc.). There may be. Then, at this point, the ultrasonic vibrator 41 is completed.
- the first lead wire 62 is connected to the front side electrode 54 via a side terminal (not shown) by soldering or the like, and to the back side electrode 55.
- the second lead wire 63 is connected by soldering or the like.
- a soundproofing material 65 for suppressing reverberation is attached to the back surface 52 side of the piezoelectric element 43. Further, the soundproofing material 65 is also attached to the inner surface of the case 40. After that, the piezoelectric element 43 of the ultrasonic vibrator 41 is housed in the case 40.
- the ultrasonic vibrator 41 is fixed to the case 40 (see FIGS. 5 and 6). Further, the case 40 to which the ultrasonic vibrator 41 is fixed is housed in the sonar dome 20, and the pair of tilting shaft portions 36a of the case 40 are placed in the through holes provided in both arm portions 35a of the support frame 35, respectively. Fit. Then, the sonar dome 20 is filled with an ultrasonic propagating liquid (not shown).
- the measurement sample was prepared as follows.
- An ultrasonic vibrator that is, the same ultrasonic wave as the ultrasonic vibrator 41 of the present embodiment
- a plurality of band-shaped vibrating portions are formed by forming a plurality of groove portions extending in one direction with respect to the back surface of the piezoelectric element.
- Four types of oscillators were prepared, and these were designated as Examples 1A and 1B (see FIG. 14) and Examples 2A and 2B (see FIG. 15).
- the width of the vibrating portion was 2.4 mm
- Examples 2A and 2B the width of the vibrating portion was 3.5 mm.
- Examples 1B and 2B the filling material was filled in the groove portion, while in Examples 1A and 2A, the filling material was not filled in the groove portion.
- two types of ultrasonic vibrators in which a plurality of columnar vibrating portions are formed by forming a plurality of groove portions extending vertically and horizontally with respect to the back surface of the piezoelectric element are prepared, and these are compared with Comparative Examples A and B (FIG. 16). (See).
- Comparative Examples A and B the width of the vibrating portion was set to 2.4 mm, and the groove portion was filled with the filler.
- the transmission / reception sensitivity product of the ultrasonic vibrator was calculated for each measurement sample (Examples 1A, 1B, 2A, 2B and Comparative Examples A, B). Specifically, ultrasonic waves were applied to a steel ball located 1 m away from the ultrasonic vibrator. The ultrasonic waves (reflected waves) reflected by the steel ball are received by the ultrasonic vibrator, and voltage signals are generated at both ends of the ultrasonic vibrator. At this time, the voltage amplitude at the time of transmission and reception of the ultrasonic vibrator was measured with an oscilloscope, and the transmission / reception sensitivity product was calculated by performing a calculation based on the measurement result.
- the transmission / reception sensitivity product is the ratio of the reception voltage amplitude V 2 to the transmission voltage amplitude V 1 and is calculated from the formula of 20 ⁇ log (V 2 / V 1). Further, in each measurement sample, the frequency was switched between 140 kHz and 240 kHz in a plurality of stages, and ultrasonic waves were irradiated at each of the switched frequencies. Then, the transmission / reception sensitivity product of the ultrasonic transducer was calculated using the above method using an oscilloscope.
- the graph of FIG. 14 shows the change in the transmission / reception sensitivity product in Examples 1A and 1B
- the graph of FIG. 15 shows the change of the transmission / reception sensitivity product in Examples 2A and 2B
- the graph of FIG. 16 shows the change of the transmission / reception sensitivity product in Comparative Examples A and B. It shows the change in the sensitivity product.
- Example 1B in which the band-shaped vibrating portion was formed and the groove portion was filled with the filler, from Comparative Examples A and B in which the columnar vibrating portion was formed and the groove portion was filled with the filler.
- the transmission / reception sensitivity product between 140 kHz and 230 kHz was low.
- the transmission / reception sensitivity product is equivalent to that in Comparative Examples A and B.
- Example 1A having a vibrating portion having a high strength to form a band shape it was confirmed that cracks did not occur in the vibrating portion even when the ultrasonic vibrator was driven.
- Comparative Examples A and B having a columnar vibrating portion having a lower strength than that of Example 1A it was confirmed that cracks are likely to occur in the vibrating portion when the ultrasonic vibrator is driven.
- Example 1A when comparing Examples 1A and 2A in which the filler is not filled in the groove, the width of the vibrating portion is 2.4 mm even in Example 2A in which the width of the vibrating portion is 3.5 mm. It was confirmed that even in Example 1A, the transmission / reception sensitivity product was almost the same. Similarly, when comparing Examples 1B and 2B in which the filler is filled in the groove, even in Example 2B in which the width of the vibrating portion is 3.5 mm, the width of the vibrating portion is 2. It was confirmed that the transmission / reception sensitivity product was almost the same even in Example 1B having a length of 4 mm.
- the sensitivity of the ultrasonic vibrator does not decrease even if the width of the vibrating portion is increased within the range of 0.07 ⁇ W / L ⁇ 0.1. Rather, it was confirmed that widening the width of the vibrating portion reduces the number of times of forming the groove portion required for forming all the vibrating portions, so that the manufacturing cost of the ultrasonic vibrator can be reduced. Moreover, it was confirmed that since the strength is improved by increasing the width of the vibrating portion, the occurrence of cracks in the vibrating portion can be prevented and the reliability of the ultrasonic vibrator is improved.
- a measurement sample was prepared as follows.
- a sonar that is, the present embodiment in which a groove portion extending in one direction is formed with respect to the piezoelectric element to form a plurality of band-shaped vibrating portions, and the groove portion is arranged parallel to the tilting axis for tilting the ultrasonic vibrator (that is, the present embodiment).
- a sonar similar to the sonar 11) was prepared and used as sample A (see FIG. 21 (a)).
- a sonar is prepared in which a groove portion extending in one direction is formed with respect to the piezoelectric element to form a plurality of band-shaped vibrating portions, and the groove portion is arranged perpendicularly to the tilt axis, and this is sample B (FIG.
- FIG. 21 (FIG. 21 (FIG. 21)).
- b) Refer to). Further, a sonar is prepared in which groove portions extending in the vertical and horizontal directions are formed with respect to the piezoelectric element to form a plurality of columnar vibrating portions, and groove portions extending in the horizontal direction with respect to the tilt axis are arranged in parallel, and this is used as sample C (sample C). (See FIG. 21 (c)).
- the directivity of the ultrasonic transducer was verified for each measurement sample (samples A to C). Specifically, ultrasonic waves were irradiated from the ultrasonic vibrator, and the transmitted sound pressure at the time of irradiation (at the time of transmission) was measured. Further, in each measurement sample, the tilt angle (tilt angle) of the ultrasonic vibrator is changed in a plurality of stages between 0 ° and 90 °, and ultrasonic waves are irradiated at each changed tilt angle to transmit sound pressure. was measured.
- the tilt angle when the acoustic radiation surface (back surface of the base material) faces downward in the vertical direction is set to 0 °
- the tilt angle when the acoustic radiation surface faces sideways is set. 90 °.
- the ultrasonic frequency was switched to 140 kHz, 180 kHz, and 240 kHz, and ultrasonic waves were irradiated at each of the switched frequencies to measure the transmitted sound pressure.
- the graph of FIG. 17 shows the measurement result of the directivity in the sample A
- the graph of FIG. 18 shows the measurement result of the directivity in the sample B
- the graph of FIG. 19 shows the measurement result of the directivity in the sample C.
- FIG. 20 shows the measurement results of the directivity characteristics of the samples A to C when the ultrasonic wave is 140 kHz.
- FIG. 21A is a diagram conceptually showing the direction and intensity of the ultrasonic wave of the sample A when the ultrasonic wave is 140 kHz
- FIG. 21B is a diagram when the ultrasonic wave is 140 kHz
- 21 (c) is a diagram conceptually showing the direction and intensity of the ultrasonic wave of sample B
- FIG. 21 (c) conceptually shows the direction and intensity of the ultrasonic wave of sample C when the ultrasonic wave is 140 kHz. It is a figure. In these figures, the direction and intensity of the light (ultrasonic wave) appearing when the directivity of the ultrasonic wave is displayed in terms of brightness are indicated by arrows.
- the side lobe U3 (feed) is slightly stronger when the tilt angle is around 30 °. It was confirmed that the region where the wave sound pressure is high) is radiated vertically downward (see FIGS. 20, 21 (b), and 22 (a)). In this case, the ultrasonic waves that become the side lobes U3 reach the water bottom (sea floor or lake bottom) and are reflected, and the reflected ultrasonic waves (side lobes U3) are received by the ultrasonic transducer as reflected waves.
- sample A in which the groove portion extending in one direction with respect to the piezoelectric element is formed and the groove portion is arranged parallel to the tilting axis, the groove portion extending vertically and horizontally with respect to the piezoelectric element is also provided.
- the side lobe U3 was generated in the formed sample C (see FIG. 21 (c)) (see FIG. 23 (a)).
- the side lobe U3 in sample A is about 17 dB lower than that of the main beam, which is lower than that in sample B, which is preferable. That is, since the ring-shaped pattern R1 described above is not displayed in the image displayed on the display unit 15 (see FIG. 23B), the image displayed on the display unit 15 is ideal in that the side lobe U3 does not occur. It was confirmed that the state was similar to that of the directional characteristic (see FIG. 24 (b)).
- a band-shaped vibrating portion 90 is formed in the piezoelectric element 43 of the ultrasonic vibrator 41. Therefore, since the vibrating portion 90 is longer in the plane direction than the columnar vibrating portion, the contact area with the base material 42 side is increased, and the strength of the vibrating portion 90 is prevented from being lowered. Therefore, even if the ultrasonic vibrator 41 is driven for a long period of time, cracks are less likely to occur in the vibrating portion 90. Therefore, when the ultrasonic vibrator 41 is continuously driven at a high voltage in a state where cracks are generated, electric discharge is intermittently generated from the crack generation portion, and as a result, the other vibrating part 90 of the piezoelectric element 43 is generated. However, problems such as a decrease in piezoelectric characteristics and a decrease in transmission / reception sensitivity are less likely to occur. That is, the reliability of the ultrasonic vibrator 41 can be improved by suppressing the occurrence of cracks.
- the band-shaped vibrating portion 90 is obtained by forming the groove portion K1 extending in one direction, as compared with the case where the groove portion extending vertically and horizontally is formed to obtain the columnar vibrating portion described above.
- the number of times the groove K1 is formed, which is necessary for forming the vibrating portion 90, is halved, and the groove K1 can be easily formed.
- the number of divisions of the back side electrode 55 decreases, so that the load of connecting the wire rod 60 to the back side electrode 55 is reduced. Therefore, the manufacturing cost of the ultrasonic vibrator 41 can be reduced.
- the ultrasonic vibrator 41 is arranged so that the groove portion K1 is parallel to the tilting shaft 36 of the drive mechanism 30, the groove portion K1 is on the side as compared with the case where the groove portion K1 is perpendicular to the tilting shaft 36.
- the lobe U3 becomes weaker (see FIGS. 21 to 23) and the directional characteristics are improved.
- the present embodiment includes a drive mechanism 30 that causes the ultrasonic transducer 41 to perform a turning motion centered on a rotating shaft 31a facing in the vertical direction and a tilting motion centered on a tilting shaft 36 orthogonal to the rotating shaft 31a.
- a drive mechanism 30 that causes the ultrasonic transducer 41 to perform a turning motion centered on a rotating shaft 31a facing in the vertical direction and a tilting motion centered on a tilting shaft 36 orthogonal to the rotating shaft 31a.
- the ultrasonic vibrator 41 is arranged so that the groove portion K1 (vibrating portion 90) forms an angle of 0 ° with respect to the tilting shaft 36, that is, the groove portion K1 is provided on the tilting shaft 36. Since they are parallel to each other, the side lobe U3 in the axial direction of the tilt axis 36 is weakened, and erroneous determination in detection can be reduced.
- the outer vibrating portion 91 is larger in the width direction than the inner vibrating portion 92. Therefore, the strength of the outer vibrating portion 91 whose entire outer surface 96 is exposed to the outside of the piezoelectric element 43 is increased, and the occurrence of cracks in the outer vibrating portion 91 is surely prevented.
- the piezoelectric element 43 can be reinforced at the outer peripheral portion where it easily acts, and the reliability of the ultrasonic vibrator 41 becomes even higher.
- the piezoelectric element 43 is reinforced by extending the vibrating portion 90 in the plane direction, it is not necessary to fill the gap K0 (groove portion K1) between the vibrating portions 90 with a filler. I'm done. In this case, since the deformation of the vibrating portion 90 in the height direction is not hindered by the filler, it is possible to prevent the sensitivity of the ultrasonic vibrator 41 from being lowered due to the filling of the filler.
- the ultrasonic vibrator 41 provided with the disc-shaped piezoelectric element 43 rotates inside the hemispherical portion (lower end portion of the lower case 22) of the sonar dome 20. It is a structure to do. As a result, the dead space in the sonar dome 20 is reduced, so that the sonar 11 can be miniaturized. Further, in the present embodiment, since the groove portion K1 is provided in the disc-shaped piezoelectric element 43 to form a plurality of vibrating portions 90 and all the vibrating portions 90 are driven in the same phase, the irradiation range of the ultrasonic wave U1 is widened. It becomes circular and the spread of ultrasonic wave U1 becomes isotropic (see FIGS. 22 to 24).
- the front surface of the piezoelectric element 43 is formed.
- the front side electrode 54 formed on the 51 is also divided. Therefore, even if the first lead wire 62 is connected to the front side electrode 54 (side terminal), there is a problem that continuity cannot be achieved with the entire front side electrode 54.
- the vibrating portions 90 are connected to each other at the end portion on the front surface 51 side of the piezoelectric element 43, the front side electrode 54 formed on the front surface 51 is not divided.
- the sonar 11 can be easily manufactured because the continuity with the entire front electrode 54 can be ensured. Further, since the vibrating portions 90 are connected to each other at the end portion of the piezoelectric element 43 on the front surface 51 side, the entire front surface 51 of the piezoelectric element 43 comes into contact with the surface 42a of the base material 42, so that the contact area between the two is secured. The bonding strength between the piezoelectric element 43 and the base material 42 is improved. As a result, the reliability of the ultrasonic vibrator 41 becomes even higher.
- the groove portions K1 formed in the piezoelectric element 43 are arranged parallel to each other and parallel to the tilting axis 36 (center axis A1) (an angle of 0 °). It was placed in the direction of the eggplant. However, if each groove K1 has an angle of 30 ° or less with respect to the tilting shaft 36, the arrangement mode of each groove K1 may be appropriately changed. For example, as shown in the ultrasonic vibrator 121 of FIG. 26 (a), the groove portions K2 may extend in different directions from each other. Further, each groove K3 may be bent as in the ultrasonic vibrator 122 of FIG. 26 (b), or each groove K4 may be curved as in the ultrasonic vibrator 123 of FIG. 26 (c). May be.
- the groove K1 is a gap K0 as a whole.
- both ends of the groove K1 may be sealed on the outer peripheral surface 53 of the piezoelectric element 43.
- both ends of each groove K1 may be sealed by winding the tape 111 around the outer peripheral surface 53 of the piezoelectric element 43.
- both ends of each groove K1 may be sealed by filling both ends of each groove K1 with a filler 112. Further, if the density of the filler is relatively low, the entire groove K1 may be filled with the filler.
- the width W1 of the outer vibrating portion 91 and the width W2 of the inner vibrating portion 92 are different from each other, but the widths W1 and W2 may be equal to each other. Further, in the above embodiment, the widths of the groove portions K1 formed in the piezoelectric element 43 are equal to each other, but the widths of the groove portions K1 may be different from each other.
- the piezoelectric element 43 of the above embodiment has a structure in which a plurality of divided vibrating portions 90 are connected to each other at the end portion on the front surface 51 side.
- the piezoelectric element may have a structure in which a plurality of vibrating portions are completely divided.
- the ultrasonic vibrator is configured by attaching each vibrating portion to the base material 42.
- the back side electrodes 55 are formed on the surfaces 93a and 93b of the plurality of vibrating parts 90, and the wire rods 60 are joined so as to bridge each of the plurality of back side electrodes 55.
- the metal foil 113 for example, copper foil, brass foil, aluminum foil, etc.
- the metal foil 113 which is a strip-shaped conductive member, contains a conductive metal such as solder or a conventionally known conductive filler.
- Each of the plurality of back side electrodes 55 may be attached so as to be bridged by an adhesive or the like (see FIG. 29).
- a conductive tape (not shown), which is a strip-shaped conductive member having an adhesive layer, may be attached so as to bridge each of the plurality of back side electrodes 55. Further, both the wire rod 60 and the metal foil 113 may be joined so that each of the plurality of back side electrodes 55 is bridged.
- the piezoelectric element 43 made of lead zirconate titanate (PZT) is used, but the material for forming the piezoelectric element 43 is not particularly limited.
- PZT lead zirconate titanate
- the material for forming the piezoelectric element 43 is not particularly limited.
- a piezoelectric element made of single crystal or LiNbO 3 single crystal piezoelectric ceramics may be used.
- the tip of the screw through which the screw hole 45 on the base material 42 side is inserted is screwed into the screw hole 47 provided in the case 40.
- the ultrasonic transducer 41 was fixed to the case 40, it may be fixed by another method.
- the ultrasonic vibrator 41 may be fixed to the case 40 using an adhesive.
- an ultrasonic vibrator 41 composed of a base material 42 also serving as an acoustic matching layer and a piezoelectric element 43 bonded to the base material 42 has been used, but an ultrasonic vibrator 41 composed of only the piezoelectric element 43 has been used.
- a sonic transducer may be used.
- the plurality of the vibrating portions are composed of a pair of outer vibrating portions and a plurality of inner vibrating portions arranged between the pair of outer vibrating portions.
- a sonar characterized in that the width of the outer vibrating portion is larger than the width of the inner vibrating portion.
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- Remote Sensing (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/JP2020/009855 WO2021176726A1 (ja) | 2020-03-06 | 2020-03-06 | ソナー |
| JP2020537245A JP7320849B2 (ja) | 2020-03-06 | 2020-03-06 | ソナー |
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/JP2020/009855 WO2021176726A1 (ja) | 2020-03-06 | 2020-03-06 | ソナー |
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| WO (1) | WO2021176726A1 (https=) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11921200B1 (en) | 2022-08-19 | 2024-03-05 | Navico, Inc. | Live down sonar view |
| USD1026679S1 (en) | 2022-08-19 | 2024-05-14 | Navico, Inc. | Multi-orientation sonar transducer array system |
| USD1072648S1 (en) | 2022-08-19 | 2025-04-29 | Navico, Inc. | Bracket for multiple sonar transducer array housings |
| US12287416B2 (en) | 2018-05-17 | 2025-04-29 | Navico, Inc. | Live sonar systems and methods |
| US12287402B2 (en) | 2022-06-10 | 2025-04-29 | Navico, Inc. | Sonar ping synchronization and associated methods |
| US12306353B2 (en) | 2023-04-28 | 2025-05-20 | Navico, Inc. | Beamforming sonar systems for 360-degree live sonar, and associated methods |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021210151A1 (ja) * | 2020-04-17 | 2021-10-21 | 本多電子株式会社 | ソナー |
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| JPH0443984A (ja) * | 1990-06-11 | 1992-02-13 | Koden Electron Co Ltd | ソナー用のスキャナ装置 |
| JPH04111599A (ja) * | 1990-08-30 | 1992-04-13 | Nippon Dempa Kogyo Co Ltd | 超音波探触子 |
| US5142497A (en) * | 1989-11-22 | 1992-08-25 | Warrow Theodore U | Self-aligning electroacoustic transducer for marine craft |
| WO1997021985A1 (en) * | 1995-12-13 | 1997-06-19 | Matsushita Electric Industrial Co., Ltd. | Ultrasonic flowmeter and ultrasonic generator/detector |
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| JPS5461590A (en) * | 1977-10-25 | 1979-05-17 | Nippon Denpa Kogyo Kk | Arrayed supersonic probe |
| US5744898A (en) * | 1992-05-14 | 1998-04-28 | Duke University | Ultrasound transducer array with transmitter/receiver integrated circuitry |
| JP3640854B2 (ja) | 2000-01-11 | 2005-04-20 | Necトーキン株式会社 | 超音波フェイズドアレイ送受波器 |
| JP7093154B2 (ja) | 2016-11-01 | 2022-06-29 | 株式会社トーキン | 超音波トランスデューサ |
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- 2020-03-06 WO PCT/JP2020/009855 patent/WO2021176726A1/ja not_active Ceased
- 2020-03-06 JP JP2020537245A patent/JP7320849B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142497A (en) * | 1989-11-22 | 1992-08-25 | Warrow Theodore U | Self-aligning electroacoustic transducer for marine craft |
| JPH0443984A (ja) * | 1990-06-11 | 1992-02-13 | Koden Electron Co Ltd | ソナー用のスキャナ装置 |
| JPH04111599A (ja) * | 1990-08-30 | 1992-04-13 | Nippon Dempa Kogyo Co Ltd | 超音波探触子 |
| WO1997021985A1 (en) * | 1995-12-13 | 1997-06-19 | Matsushita Electric Industrial Co., Ltd. | Ultrasonic flowmeter and ultrasonic generator/detector |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12287416B2 (en) | 2018-05-17 | 2025-04-29 | Navico, Inc. | Live sonar systems and methods |
| US12287402B2 (en) | 2022-06-10 | 2025-04-29 | Navico, Inc. | Sonar ping synchronization and associated methods |
| US11921200B1 (en) | 2022-08-19 | 2024-03-05 | Navico, Inc. | Live down sonar view |
| USD1026679S1 (en) | 2022-08-19 | 2024-05-14 | Navico, Inc. | Multi-orientation sonar transducer array system |
| USD1072648S1 (en) | 2022-08-19 | 2025-04-29 | Navico, Inc. | Bracket for multiple sonar transducer array housings |
| USD1100683S1 (en) | 2022-08-19 | 2025-11-04 | Navico, Inc. | Multi-orientation sonar transducer array system |
| US12306353B2 (en) | 2023-04-28 | 2025-05-20 | Navico, Inc. | Beamforming sonar systems for 360-degree live sonar, and associated methods |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2021176726A1 (https=) | 2021-09-10 |
| JP7320849B2 (ja) | 2023-08-04 |
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