WO2021089735A1 - Loading and unloading device for a substrate hopper, substrate hopper system - Google Patents

Loading and unloading device for a substrate hopper, substrate hopper system Download PDF

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Publication number
WO2021089735A1
WO2021089735A1 PCT/EP2020/081191 EP2020081191W WO2021089735A1 WO 2021089735 A1 WO2021089735 A1 WO 2021089735A1 EP 2020081191 W EP2020081191 W EP 2020081191W WO 2021089735 A1 WO2021089735 A1 WO 2021089735A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
conveyor belt
loading
substrates
unloading device
Prior art date
Application number
PCT/EP2020/081191
Other languages
German (de)
French (fr)
Inventor
Torsten Vegelahn
Jürgen Lehner
Original Assignee
Asys Automatisierungssysteme Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asys Automatisierungssysteme Gmbh filed Critical Asys Automatisierungssysteme Gmbh
Priority to KR1020227018874A priority Critical patent/KR20220098173A/en
Priority to CN202080076808.1A priority patent/CN114641854A/en
Priority to EP20803149.2A priority patent/EP4055626A1/en
Publication of WO2021089735A1 publication Critical patent/WO2021089735A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Definitions

  • the invention relates to a loading and unloading device for a substrate magazine, the substrate magazine having several drawers into which several substrates can be inserted for storage or temporary storage, with at least one controllable conveyor belt on which substrates can be deposited, and with at least one controllable gripper arm, the is designed to push substrates from the conveyor belt into a drawer or to push them out of the drawer onto the conveyor belt, the conveyor belt and the gripping arm being arranged on a common and movably mounted carrier.
  • the invention also relates to a substrate magazine system with at least one substrate magazine which has several drawers, into which several substrates can be inserted for storage or temporary storage, and with a loading and unloading device as described above.
  • Loading and unloading devices for substrate magazines are known from the prior art. In the production of flat substrates or electrical / electronic modules based on a flat substrate, it is known to hold substrates in a substrate magazine and to automatically feed them to the assembly line by an unloading device. It is also known to store or temporarily store substrates that have already been fitted or prepared from the assembly line during the production of a component in order to keep them ready for a later work step. Correspondingly, loading devices are known which can load the substrate magazine with substrates, for example from the assembly line. Combined loading and unloading devices are also known which enable both the unloading and loading of substrate magazines and make individual substrates available in accordance with an assembly line or remove individual substrates from the assembly line and store them temporarily in the substrate magazine.
  • Known loading and unloading devices have at least one controllable conveyor belt on which substrates can be placed.
  • the substrates can be transferred from a substrate magazine to the assembly line, for example.
  • a controllable gripper arm which is designed to push substrates from the conveyor belt into a drawer of the substrate magazine or to push them out onto the conveyor belt. If a substrate magazine is provided with a large number of drawers, the distance between adjacent drawers in terms of height is often selected to be as small as possible for reasons of installation space, so that a large number of drawers is possible. In this case it is difficult or even impossible to introduce the conveyor belt into the substrate magazine even below a substrate.
  • a gripping arm which can be made significantly narrower than the conveyor belt, can also be inserted between two drawers, for example, in order to pull a substrate out of one of the drawers.
  • the interaction of the gripper arm and the conveyor belt has the advantage that loading and unloading is possible in a cost-effective manner, and in particular also loading and unloading in a substrate magazine which offers little free space.
  • the invention is based on the object of creating an improved loading and unloading device which, in particular, also enables substrates to be separated from a substrate stack that can be stored in a substrate magazine.
  • the object on which the invention is based is achieved by a loading and unloading device having the features of claim 1.
  • This has the advantage that the loading and unloading device enables both the handling of individual substrates and the handling of substrate stacks. This increases the possibility of using the loading and unloading device and overcomes the need for an additional loading and unloading device for the substrate stack. As a result, an assembly line can be implemented in a cost-effective and space-saving manner overall.
  • the gripper arm is arranged at least essentially below the conveyor belt to grab a substrate from below, and that a movable vacuum gripper is arranged above the conveyor belt to grab a substrate in the substrate magazine or on the conveyor belt from above and move.
  • a movable vacuum gripper is arranged above the conveyor belt to grab a substrate in the substrate magazine or on the conveyor belt from above and move.
  • the vacuum gripper is designed to separate substrates from a substrate stack.
  • the vacuum gripper has, for example, a movable suction head with one or more suction points that can be placed on the surface of a substrate, in particular the uppermost substrate of a substrate stack, in order to suck up the substrate and remove or transport it from the substrate stack.
  • the vacuum gripper has retaining means, which are assigned or can be assigned to the rear side of the substrate to be gripped and ensure that a substrate underneath does not stick to the substrate being gripped.
  • the retaining means can be, for example, a compressed air device which generates an air flow in the space between the substrate to be gripped and the substrate underneath in order to reliably separate the two substrates from one another.
  • the retaining means are preferably designed mechanically and retain the lower substrate when the substrate lying above is lifted by the vacuum runner.
  • the vacuum gripper is particularly preferably designed to move into the substrate magazine. This makes it possible to isolate substrates from a substrate stack within the substrate magazine and to deposit isolated substrates on the conveyor belt for further use. Of course, this also enables the reverse process, in which individual substrates are picked up by the vacuum gripper and moved into the substrate magazine for the production or further development of a substrate stack. As an alternative to this, the vacuum gripper is preferably designed to carry out a separation of a substrate stack only on the conveyor belt.
  • the vacuum gripper is particularly preferably mounted on the carrier in a height-adjustable manner. As a result, the vacuum gripper can be optimally adapted to a substrate stack regardless of the transport height of the conveyor belt.
  • the gripping arm has at least one gripping hook which can be displaced from a gripping position for moving a substrate into a release position for moving the gripping arm independently of a substrate and back. Grasping one Substrate for moving the substrate into the substrate magazine or out of the substrate magazine is thus carried out by moving the gripping hook.
  • the gripping arm In the release position, this offers the advantage that the gripping arm is designed to be particularly low in height, so that it can, for example, also be inserted between two substrates lying one above the other in the substrate magazine. In particular, this avoids having to adjust the overall height of the gripping arm in order to grip a substrate or to be detached from it.
  • the gripping hook is particularly preferably mounted pivotably on the gripping arm.
  • the gripping arm has a plurality of such gripping hooks, which are arranged on the gripping arm at a distance from one another in the sliding direction.
  • the gripping hooks are designed in particular as described above and mounted on the gripping arm. This results in the advantage that several substrates can be gripped and displaced simultaneously by means of the gripping hooks without the substrates hitting one another.
  • the gripping hooks are preferably arranged on the gripping arm in such a way that at least one gripping hook can be inserted between adjacent substrates in a drawer by shifting, and that, as a result, all substrates can be pulled out onto the conveyor belt at the same time by moving or pulling out the gripping arm. This ensures safe handling of several substrates at the same time, which prevents substrates from being damaged by bumping into one another or being pushed over one another during transport.
  • one of the gripping hooks is mounted on the gripping arm so as to be longitudinally displaceable. This enables the spacing of adjacent gripping hooks to be adapted to one another, so that the gripping arm can be adapted, for example, to different substrates stored in a drawer of the substrate magazine, which substrates are of different lengths when viewed in the sliding direction. The same naturally also applies to the insertion of several different substrates into the substrate magazine.
  • the gripping arm has at least one sensor for detecting a substrate. Because the sensor is assigned to the gripper arm, the sensor is moved along with the gripper arm. In particular, the sensor is arranged on the upper side of the gripping arm, that is to say assigned to a substrate to be gripped. If the gripper arm is now moved past a substrate, in particular the beginning and the end of a substrate are detected by means of the sensor during the movement and thereby the substrate contour and position in the substrate magazine and / or on the substrate, for example, with the help of a control device Conveyor belt determined. This ensures that the substrate can be transported easily and safely.
  • the data from the sensor are used to determine the position at which the gripping hook is to be or can be shifted into the gripping position without hitting the substrate from below.
  • the gripper arm is pushed into the substrate magazine, the beginning of a substrate is detected and either the end of the substrate is also detected by means of the sensor or the end of the substrate is calculated depending on the data known to the control device of the substrate to be gripped, so that the gripping hook is only then in the gripping position is shifted when the gripping hook has completely passed the substrate.
  • the conveyor belt is designed in such a way that it has two conveyor belt runs which are arranged parallel at a distance from one another so that the gripper arm is arranged between the two conveyor belt runs so that the respective substrate rests on its side edges both in the substrate magazine and on the conveyor belt.
  • the distance between the conveyor belt runs does not necessarily have to correspond to the distance between sliding guides of the substrate magazine, which each form a drawer. Rather, the distance between the substrate strip runs can also be selected to be smaller.
  • At least one displacement sensor is assigned to the gripping arm.
  • the path of movement of the gripping arm can be determined by the displacement sensor and, in particular, the positioning of the gripping hook with respect to a substrate to be gripped can be optimally determined and adjusted as a function of the data from the sensor.
  • the gripping arm is assigned at least one actuator, in particular an electromotive actuator, for its displacement and / or for displacing the at least one gripping hook.
  • the gripping arm has at least one further electrically operated actuator for displacing the respective gripping hook. If the gripping arm has several gripping hooks, each gripping hook is either assigned its own actuator, or the gripping hooks are mechanically connected to one another with a common actuator, so that the gripping hooks are moved, in particular pivoted, at the same time by the actuator.
  • the loading and unloading device preferably has a control device which is connected for signaling at least to the actuator, to the sensor and to the displacement sensor and is designed to control the at least one actuator as a function of the sensor to control the recorded data to push substrates out of a certain compartment of the substrate magazine individually or together onto the conveyor belt or to push them into the drawer of the conveyor belt.
  • the control device controls the loading and unloading device to push the substrates individually or as described above simultaneously from a drawer onto the conveyor belt or otherwise inhibit them.
  • the conveyor belt is controlled by the control device, either after picking up each individual substrate, removing the respective substrate for further use by means of the conveyor belt, or first collecting individual substrates on the conveyor belt and only then forwarding them for further use.
  • the control device is designed in particular to push a single substrate from the conveyor belt to a predetermined position in the drawer or to remove it from a predetermined position from the drawer.
  • the control unit uses data from the
  • Distance measuring sensor and, for example, data recorded by the sensor of the substrate to be pushed, so that the substrate is optimally positioned in the drawer or on the conveyor belt.
  • Figure 1 shows an advantageous substrate magazine system in a perspective
  • FIG. 2 shows a push unit of the substrate magazine system in a perspective view
  • FIG. 3A shows a simplified illustration of the substrate magazine system in FIG.
  • FIG. 3B shows a simplified illustration of the substrate magazine system in FIG.
  • FIG. 1 shows, in a simplified perspective illustration, a substrate magazine system 1 for an assembly line for electrical / electronic components.
  • the substrate magazine 1 has a substrate magazine 2 which has a plurality of drawers 3 for receiving a plurality of substrates 4 in each case.
  • the substrate magazine 2 has two opposite one another horizontally arranged and vertically aligned parallel to each other, each having a plurality of guide rails 6 on mutually facing sides, two guide rails 6 arranged opposite each other forming a drawer 3 in which the respective substrate 4 rests with its side edges.
  • substrate stacks can also be arranged in the substrate magazine 2, that is to say a multiplicity of individual substrates stacked on top of one another, which form a package or a stack.
  • the substrate magazine 1, 2 also has a loading and unloading device 7 which is used to move substrates 4 into the substrate magazine 2 or to remove them from the substrate magazine 2 and, for example, to feed them to an equipping device of the equipping line.
  • the loading and unloading device 7 has a conveyor belt 8, which has two conveyor belt runs 9 which are aligned parallel to one another and arranged at a distance from one another.
  • the conveyor belt runs 9 can be controlled as endless drives in order to set the conveyor belt in a circular motion, whereby objects lying on the conveyor belt 8 can be transported with the conveyor belt 8.
  • the conveyor belt runs 9 are arranged so close to one another that substrates from the substrate magazine 2 rest on both conveyor belt runs 9 at their side edges and can thus be transported through the conveyor belt 8.
  • a sliding unit 10 is arranged between the conveyor belt runs 9.
  • the sliding unit 10 has a gripping arm 11 which is designed as a telescopic arm.
  • the gripping arm 11 lies below the support surface 12 of the conveyor belt 8 and is aligned parallel to it.
  • the gripping arm 11 has a gripping hook 13 which can be displaced.
  • the gripping hook 13 can be pivoted by pivoting the gripping arm 11 about its longitudinal axis of the gripping arm 11, as shown by a double arrow 14 in FIG. As a result, the gripping hook 13 can be pivoted from the release position shown in FIG. 1 into an erected gripping position shown in dashed lines in FIG.
  • the gripping arm 11 is also assigned an electromotive actuator 15 which enables the gripping hook 13 to be pivoted according to arrow 14 as shown by a double arrow 16.
  • the gripping arm 11 can be displaced longitudinally with the gripping hook 13 parallel to the conveyor belt 8 by the actuator 15.
  • the sliding unit 10 and the conveyor belt 8 are arranged on the same carrier 17 of the loading and unloading device 7.
  • FIG. 2 shows the sliding unit 10 in a perspective view detached from the rest of the loading and unloading device 7.
  • the gripping arm 11 has a first arm part 20 and a second arm part 21.
  • the arm part 20 is mounted so as to be longitudinally displaceable according to the double arrow 16 on a support carrier 22 fastened to the carrier 17.
  • the shifting takes place by means of a belt drive 23 which can be driven by an electric motor by an actuator 24.
  • the gripping arm part 21 is pivotably mounted about its longitudinal center axis and is firmly connected to the gripping hook 13 in order to pivot it from the loose position into the gripping position and vice versa through its rotational movement caused by the actuator 15.
  • the gripping arm part 21 is pivotably or rotatably mounted on the gripping arm part 20 by a plurality of radial bearings 25.
  • the loading and unloading device 7 has a vacuum gripper 18, as shown in FIG.
  • the vacuum gripper 18 has a movable suction head 19 which is arranged above the gripping arm 11 and is mounted so that it can be displaced longitudinally at least parallel to the gripping arm 11 according to the double arrow 16.
  • the suction head 19 lies above the support surface 12 of the conveyor belt 8 and is optionally mounted on the carrier 17 adjustable in height so that the distance between the suction head 19 or the vacuum device 18 and the conveyor belt 8 can be changed.
  • the vacuum device 18 makes it possible to suck in substrates 4 from above and to transport them.
  • At least one control unit 34 controls the actuators of the loading and unloading device 7.
  • the control unit 34 is connected for signaling purposes to all actuators and sensors, which are explained in more detail below, in order to control the actuators in a targeted manner, in particular depending on information from the sensors to carry out a loading and / or unloading process by means of the loading and unloading device 7 on the substrate magazine 2.
  • control device 34 has, for example, a computing unit, in particular a microcontroller, and a data memory, with a computer program being stored in the data memory, which is used by the computing unit to operate the loading and unloading device 7 as described below.
  • FIG. 3A shows an application example of the substrate magazine system 1 in which individual substrates are handled.
  • individual substrates 4 are arranged in drawers 3 of the substrate magazine 2.
  • the substrate magazine system is shown here in a simplified manner. In some drawers there are several substrates 4 next to one another at a distance from one another, while in other drawers 3 only one substrate 4 can be arranged.
  • the gripping arm 11 is now pushed into the substrate magazine 2 with the aid of the actuator 24.
  • the gripping arm 11 has at least one sensor 26 on its upper side, which is designed, for example, as an optical sensor or a distance sensor.
  • the senor 26 is arranged close to the gripping hook 13 on the gripping arm 11, in particular on the second gripping arm part 21.
  • the sensor 26 is thus also pushed past the substrates 4 located therein, which are located above the gripping arm 11 in the drawer 3.
  • a distance measuring device 27, which monitors the movement path of the gripper arm 11, is also assigned to the gripper arm 11. The beginning and the end of a substrate 4 above the gripping arm 11 can now be detected with the sensor 26, and the position of the gripping arm 11 can be determined with the aid of the displacement measuring device 27.
  • the movement of the gripping arm 11 is stopped and the gripping hook 13 is pivoted into the gripping position, as shown in FIG. 3, so that the gripping hook 13 engages behind the substrate 4 to be gripped. If the gripping arm 11 is now moved out of the substrate magazine 2, the gripping hook 13 pushes the substrate 4 onto the conveyor belt 8 or onto the support surface 12 of the conveyor belt 8. In this way, several substrates 4 can be moved one after the other from a drawer 3 onto the conveyor belt 8.
  • the height of the carrier 17 is advantageously adjustable, as indicated by a double arrow 28 in FIG. 3, so that all drawers 3 of the substrate magazine 2 can be reached with the aid of the gripper arm 11 by adjusting the height of the carrier 17.
  • FIG. 3B shows the same substrate magazine system 1 in an operation in which substrates 4 are separated from a substrate stack 29 or the substrate stack 29 is produced from individual substrates 4.
  • the substrate stack 29 is stored in the substrate magazine 2.
  • an adapter plate 30, for example has been pushed into a drawer 3 on which the substrate stack 29 lies.
  • the vacuum device 18 is now used to grip the top substrate 4 of the substrate stack 29.
  • the suction head 19 is moved into the substrate magazine 2 so that it is positioned above the substrate stack 29.
  • a further sensor 33 is preferably assigned to the suction head 19, which sensor 33 points downwards in order, for example, to detect the beginning of the substrate stack and optionally also the end of the substrate stack.
  • the suction head 19 can be optimally positioned over the substrate 4 to be gripped using simple means.
  • a displacement measuring device 27 is also assigned to the suction head 19, which detects the path of the suction head 19 and, for example, determines the center point of the substrate stack 29 depending on the beginning and end of the substrate stack 29 and positions the suction head 19 centrally above the substrate stack 29 for removing a substrate 4 . Then the suction head 19 is guided down to the uppermost substrate 4 and the uppermost substrate 4 is sucked onto the suction head 19 by the vacuum device 18. The suction head 19 is then preferably raised a little in order to detach the substrate 4 from the substrate 4 underneath. The suction head 19 is then moved out of the substrate magazine 2, as shown by an arrow 32. As a result, the substrate 4 is separated from the substrate stack 29 and, in particular, is deposited on the conveyor belt 8 by the suction head 19.
  • the removal of the individual substrates from the substrate magazine 2 begins from below, i.e. with the substrate 4, which is located in the lowest drawer 3 of the substrate magazine 2, so that the gripping arm 11 is given the greatest possible free space when it is inserted into the substrate magazine 2.
  • the substrate 4 which is located in the lowest drawer 3 of the substrate magazine 2
  • the gripping arm 11 is given the greatest possible free space when it is inserted into the substrate magazine 2.
  • This also prevents dirt particles or the like from falling onto a substrate 4 below when a substrate 4 is displaced in the substrate magazine. In this way, advantages with regard to the purity of the substrates 4 and with regard to the freedom of movement of the gripping arm 11 are achieved.
  • the advantageous substrate magazine system 1 enables different loading and unloading processes to be implemented.
  • the present design of the substrate magazine system 1 allows the substrates to be pushed specifically to predetermined positions within a drawer.
  • the insertion position is freely programmable or, for example, can be set by the control device 34 as a function of the size of the respective substrate.
  • several end positions of the gripping arm 11 can be programmed and set.
  • the position of the gripping hook 13 and thus the position of a moving substrate is monitored with the aid of the displacement measuring device 27, so that the substrate 4 remains in a desired position.
  • gripping hooks 13 are pivotably mounted on the gripping arm.
  • the gripping hooks 13 are arranged at a fixed distance from one another, which corresponds to a desired distance between adjacent substrates 4 in the substrate magazine 2. If the gripping arm 11 is completely retracted into the substrate magazine 2, all substrates 4 lying in the relevant drawer 3 can be pulled simultaneously by the gripping hooks 13 out of the drawer onto the conveyor belt 8 or onto the support surface 12 of the conveyor belt 8.
  • the substrates 4 are first positioned on the conveyor belt 8 according to the spacing of the gripping hooks or insertion fingers, and then all substrates 4 are pushed simultaneously by the gripping arm 11 into the desired magazine slot or into the desired drawer 3.
  • a force sensor is also assigned to the gripper arm 11, which monitors the movement force of the gripper arm 11, so that if the force exceeds an expected value, for example if a substrate jams in the respective drawer 3, the process is interrupted to prevent damage to substrates 4 to avoid.
  • the sensor 26, 33 is designed in particular as an optical sensor or as a distance sensor.
  • the following options also arise: On the one hand, it is possible that each individual item can be placed on the Conveyor belt 8 pushed substrate 4 is immediately moved further by the conveyor belt 8 and made available for further use. In addition, it is possible for all substrates 4 from a drawer 3 to be positioned one after the other on the conveyor belt 8 by the gripper arm. In particular, after each positioning of a substrate, the conveyor belt 8 is operated, so that the gripping arm always deposits a substrate removed from the substrate magazine 2 at the same point from which the respective substrate is then conveyed by the conveyor belt 8 until all substrates 4 are removed from the drawer 3 lie on the conveyor belt 8.
  • the advantageous substrate magazine system 1 makes it possible, as already mentioned above, to pull several substrates 4 out of a drawer 3 at the same time with the aid of several gripping hooks 13 and to place them next to one another on the conveyor belt 8.
  • the procedure in accordance with the exemplary embodiment in FIG. 3B is used to separate the substrate stack 29.
  • the dimensions of the substrates 4 present in the substrate magazine 2 as a substrate stack 29 are usually known. These values are used to determine the position of the gripper arm and for the suction head 19. Although it is generally known what length the substrates 4 have in the sliding direction, it is not necessarily known at which point the substrate stack 29 is located in the substrate magazine 2. Because the substrate stack 29 is usually inserted into the magazine by hand, it can be assumed that the substrate stack 29 is not present in the substrate magazine 2 in a position-controlled manner. For the safe removal of a substrate 4 or for the separation of the substrates 4, the position of the substrate stack 29 must first be determined.
  • a sensor 33 is assigned to the suction head 19, which looks from above at the substrates to be removed and which, in particular, is designed like the sensor 26. If the suction head 19 is moved over the substrate stack 29, the sensor 33 detects the front edge of the substrate stack 29.
  • the control device 34 automatically adds half of the substrate length known to the control device 34 and thus positions the suction head 19 in the center above the top substrate 4 of the substrate stack 29. Subsequently, the substrate 4 is gripped as described above and guided out of the substrate magazine 2. Loading of the substrate magazine 2 with the aid of the vacuum device 18 is also possible, in which case For example, the position of the substrate on the conveyor belt 8 is detected by means of the sensor 33 and the vacuum head 19 is optionally controlled for gripping the substrate 4.
  • the substrate magazine system 1 preferably has a plurality of substrate magazines 2, of which at least two are preferably designed differently. For example, one is designed to receive individual substrates, the other to receive substrate stacks.
  • the substrate magazines 2 preferably each have at least one readable identification element, such as, for example, a printed one-dimensional or two-dimensional code, in particular a QR code, or a readable chip, in particular an RFID chip.
  • the loading and unloading device 7 then preferably has a read-out device for capturing the respective code or chip and, depending on the captured code, determines the operation of the captured substrate magazine 2, in particular its type, and optionally its occupancy with substrates. It is thereby achieved that the loading and unloading device 2 can handle any type of substrate magazine in an automated manner and can be fully utilized at any time.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to a loading and unloading device (7) for a substrate hopper (2), wherein the substrate hopper (2) comprises a plurality of drawers (3) into each of which a plurality of substrates (4) can be inserted for storage or temporary storage, having at least one controllable conveyor belt (8) on which substrates (4) can be deposited and having at least one controllable gripper arm (11) which is designed to insert substrates (4) from the conveyor belt (8) into a drawer (3) of the substrate hopper or to pull substrates out of the drawer (3) onto the conveyor belt (8), wherein the conveyor belt (8) and the gripper arm (11) are arranged on a common and movably mounted carrier (17). According to the invention, the gripper arm (11) is at least substantially arranged below the conveyor belt (8) in order to grip a substrate (4) from below and a movable vacuum gripper (18) is arranged above the conveyor belt (8), which movable vacuum gripper is designed to grip a substrate (4) in the substrate hopper (2) or on the conveyor belt (8) from above and to move said substrate.

Description

BESCHREIBUNG DESCRIPTION
Be- und Entladeeinrichtung für ein Substratmagazin, Substratmagazinsystem Loading and unloading device for a substrate magazine, substrate magazine system
Die Erfindung betrifft eine Be- und Entladeeinrichtung für ein Substratmagazin, wobei das Substratmagazin mehrere Schubfächer aufweist, in welche mehrere Substrate zur Lagerung oder Zwischenlagerung einschiebbar sind, mit zumindest einem ansteuerbaren Transportband, auf welchem Substrate ablegbar sind, und mit zumindest einem ansteuerbaren Greifarm, der dazu ausgebildet ist, Substrate von dem Transportband in ein Schubfach einzuschieben oder aus dem Schubfach auf das Transportband herauszuschieben, wobei das Transportband und der Greifarm an einem gemeinsamen und beweglich gelagerten Träger angeordnet sind. The invention relates to a loading and unloading device for a substrate magazine, the substrate magazine having several drawers into which several substrates can be inserted for storage or temporary storage, with at least one controllable conveyor belt on which substrates can be deposited, and with at least one controllable gripper arm, the is designed to push substrates from the conveyor belt into a drawer or to push them out of the drawer onto the conveyor belt, the conveyor belt and the gripping arm being arranged on a common and movably mounted carrier.
Weiterhin betrifft die Erfindung ein Substratmagazinsystem mit zumindest einem Substratmagazin, das mehrere Schubfächer aufweist, in welche jeweils mehrere Substrate zur Lagerung oder Zwischenlagerung einschiebbar sind, und mit einer Be- und Entladeeinrichtung wie sie vorstehend beschrieben wurde. The invention also relates to a substrate magazine system with at least one substrate magazine which has several drawers, into which several substrates can be inserted for storage or temporary storage, and with a loading and unloading device as described above.
Be- und Entladeeinrichtungen für Substratmagazine sind aus dem Stand der Technik bekannt. Bei der Fertigung von flächigen Substraten oder elektrischen/elektronischen Modulen, die auf einem flächigen Substrat basieren, ist es bekannt, Substrate in einem Substratmagazin vorzuhalten und automatisiert durch eine Entladeeinrichtung der Bestückungslinie zuzuführen. Auch ist es bekannt, während der Fertigung eines Bauteils bereits bestückte oder vorbereitete Substrate aus der Bestückungslinie in ein Substratmagazin zu lagern oder zwischenzulagem, um sie für einen späteren Arbeitsschritt bereitzuhalten. Entsprechend sind Beladeeinrichtungen bekannt, die das Substratmagazin mit Substraten beispielsweise aus der Bestückungslinie beladen können. Bekannt sind auch kombinierte Be- und Entladeeinrichtungen, welche sowohl das Entladen als auch das Beladen von Substratmagazinen ermöglichen und entsprechend einer Bestückungslinie einzelne Substrate zur Verfügung stellen oder einzelne Substrate von der Bestückungslinie entfernen und in dem Substratmagazin Zwischenlagern können. Loading and unloading devices for substrate magazines are known from the prior art. In the production of flat substrates or electrical / electronic modules based on a flat substrate, it is known to hold substrates in a substrate magazine and to automatically feed them to the assembly line by an unloading device. It is also known to store or temporarily store substrates that have already been fitted or prepared from the assembly line during the production of a component in order to keep them ready for a later work step. Correspondingly, loading devices are known which can load the substrate magazine with substrates, for example from the assembly line. Combined loading and unloading devices are also known which enable both the unloading and loading of substrate magazines and make individual substrates available in accordance with an assembly line or remove individual substrates from the assembly line and store them temporarily in the substrate magazine.
Bekannte Be- und Entladeeinrichtungen weisen zumindest ein ansteuerbares Transportband auf, auf welchem Substrate ablegbar sind. Auf dem Transportband sind die Substrate beispielsweise von einem Substratmagazin zu der Bestückungslinie überführbar. Darüber hinaus ist es bekannt, einen ansteuerbaren Greifarm vorzusehen, der dazu ausgebildet ist, Substrate von dem Transportband in ein Schubfach des Substratmagazins einzuschieben oder aus diesem auf das Transportband herauszuschieben. Ist ein Substratmagazin mit einer Vielzahl von Schubfächern versehen, so ist häufig der Abstand benachbarter Schubfächer zueinander in der Höhe aus Bauraumgründen möglichst klein gewählt, sodass eine Vielzahl von Schubfächern ermöglicht ist. In diesem Fall ist es dann schwierig bis unmöglich das Transportband in das Substratmagazin selbst unterhalb eines Substrats einzuführen. Auch ist es kostengünstiger ein Transportband nicht derart verschiebbar zu lagern, dass es vollständig in ein Substratmagazin einfahrbar ist. Ein Greifarm, der deutlich schmaler ausgebildet werden kann als das Transportband, ist auch beispielweise zwischen zwei Schubfächer einführbar, um ein Substrat aus einem der Schubfächer herauszuziehen. Das Zusammenwirken von Greifarm und Transportband hat so den Vorteil, dass kostengünstig ein Be- und Entladen ermöglicht ist, und insbesondere auch ein Be- und Entladen in einem Substratmagazin, welches nur wenig Freiraum bietet. Known loading and unloading devices have at least one controllable conveyor belt on which substrates can be placed. On the conveyor belt, the substrates can be transferred from a substrate magazine to the assembly line, for example. In addition, it is known to provide a controllable gripper arm which is designed to push substrates from the conveyor belt into a drawer of the substrate magazine or to push them out onto the conveyor belt. If a substrate magazine is provided with a large number of drawers, the distance between adjacent drawers in terms of height is often selected to be as small as possible for reasons of installation space, so that a large number of drawers is possible. In this case it is difficult or even impossible to introduce the conveyor belt into the substrate magazine even below a substrate. It is also more cost-effective not to store a conveyor belt such that it can be displaced in such a way that it can be completely inserted into a substrate magazine. A gripping arm, which can be made significantly narrower than the conveyor belt, can also be inserted between two drawers, for example, in order to pull a substrate out of one of the drawers. The interaction of the gripper arm and the conveyor belt has the advantage that loading and unloading is possible in a cost-effective manner, and in particular also loading and unloading in a substrate magazine which offers little free space.
Der Erfindung liegt die Aufgabe zugrunde, eine verbesserte Be- und Entladeeinrichtung zu schaffen, die insbesondere auch das Vereinzeln von Substraten aus einem Substratstapel, der in einem Substratmagazin lagerbar ist, ermöglicht. The invention is based on the object of creating an improved loading and unloading device which, in particular, also enables substrates to be separated from a substrate stack that can be stored in a substrate magazine.
Die der Erfindung zugrunde liegende Aufgabe wird durch eine Be- und Entladeeinrichtung mit den Merkmalen des Anspruchs 1 gelöst. Dieser hat den Vorteil, dass die Be- und Entladeeinrichtung sowohl das Handhaben einzelner Substrate als auch das Handhaben von Substratstapeln ermöglicht. Dadurch wird die Verwendungsmöglichkeit der Be- und Entladeeinrichtung erhöht und die Notwendigkeit einer zusätzlichen Be- und Entladeeinrichtung Substratstapel überwunden. Dadurch kann eine Bestückungslinie insgesamt kostengünstig und bauraumsparend realisiert werden. The object on which the invention is based is achieved by a loading and unloading device having the features of claim 1. This has the advantage that the loading and unloading device enables both the handling of individual substrates and the handling of substrate stacks. This increases the possibility of using the loading and unloading device and overcomes the need for an additional loading and unloading device for the substrate stack. As a result, an assembly line can be implemented in a cost-effective and space-saving manner overall.
Erfindungsgemäß ist dazu vorgesehen, dass der Greifarm zumindest im Wesentlichen unterhalb des Transortbands angeordnet ist, um ein Substrat von unten zu greifen, und dass oberhalb des Transportbands ein beweglicher Vakuumgreifer angeordnet ist, um ein Substrat in dem Substratmagazin oder auf dem Transportband von oben zu greifen und zu bewegen. Mittels des Greifarms ist es damit möglich, sowohl ein vereinzeltes Substrat als auch einen Substratstapel von unten zu greifen, in dem das zuunterst liegende Substrat gefasst und in Richtung des Transportbands geschoben wird. Abgesehen von einem höheren Kraftaufwand ändert sich dazu an der Konstruktion der Be- und Entladeeinrichtung zunächst nichts. Durch den zusätzlichen Vakuumgreifer ist es nunmehr möglich, einzelne Substrate von einem Substratstapel von oben zu entfernen oder von oben auf den Substratstapel aufzulegen. Dadurch kann mittels der Be- und Entladeeinrichtung sowohl ein Substratstapel als auch einzelne Substrate von einem Substratstapel entnommen und in das Substratmagazin bewegt werden und andersherum. According to the invention, it is provided that the gripper arm is arranged at least essentially below the conveyor belt to grab a substrate from below, and that a movable vacuum gripper is arranged above the conveyor belt to grab a substrate in the substrate magazine or on the conveyor belt from above and move. By means of the gripper arm, it is thus possible to grasp both an isolated substrate and a substrate stack from below by gripping the substrate lying at the bottom and pushing it in the direction of the conveyor belt. Apart from a higher expenditure of force, nothing changes initially in the design of the loading and unloading device. The additional vacuum gripper now makes it possible to move individual substrates from a substrate stack from above remove or place on top of the substrate stack. As a result, both a substrate stack and individual substrates can be removed from a substrate stack and moved into the substrate magazine and vice versa by means of the loading and unloading device.
Gemäß einer bevorzugten Weiterbildung der Erfindung ist der Vakuumgreifer zum Vereinzeln von Substraten von einem Substratstapel ausgebildet. Dazu weist der Vakuumgreifer beispielsweise einen beweglichen Saukgkopf mit einer oder mehreren Saugstellen auf, die auf die Oberfläche eines Substrats, insbesondere des zuoberst liegenden Substrats eines Substratstapels, aufgelegt werden könne, um das Substrat anzusaugen und von dem Substratstapel zu entfernen beziehungsweise zu transportieren. Optional weist der Vakuumgreifer Rückhaltemittel auf, die der Rückseite des zu greifenden Substrats zugeordnet oder zuordenbar sind und gewährleisten, dass ein darunter liegendes Substrat nicht an dem gegriffenen Substrat hängenbleibt. Bei dem Rückhaltemittel kann es sich beispielweise um eine Drucklufteinrichtung handeln, die in dem Zwischenraum zwischen dem zu greifenden Substrat und dem darunterliegenden Substrat einen Luftstrom erzeugt, um die beiden Substrate sicher voneinander zu trennen. Alternativ sind die Rückhaltemittel vorzugsweise mechanisch ausgebildet und halten das untere Substrat zurück, wenn das oben liegende Substrat durch den Vakuumläufer angehoben wird. According to a preferred development of the invention, the vacuum gripper is designed to separate substrates from a substrate stack. For this purpose, the vacuum gripper has, for example, a movable suction head with one or more suction points that can be placed on the surface of a substrate, in particular the uppermost substrate of a substrate stack, in order to suck up the substrate and remove or transport it from the substrate stack. Optionally, the vacuum gripper has retaining means, which are assigned or can be assigned to the rear side of the substrate to be gripped and ensure that a substrate underneath does not stick to the substrate being gripped. The retaining means can be, for example, a compressed air device which generates an air flow in the space between the substrate to be gripped and the substrate underneath in order to reliably separate the two substrates from one another. Alternatively, the retaining means are preferably designed mechanically and retain the lower substrate when the substrate lying above is lifted by the vacuum runner.
Besonders bevorzugt ist der Vakuumgreifer dazu ausgebildet, in das Substratmagazin einzufahren. Damit ist es möglich, die Vereinzelung von Substraten aus einem Substratstapel innerhalb des Substratmagazins vorzunehmen und vereinzelte Substrate auf das Transportband zur weiteren Verwendung abzulegen. Selbstverständlich wird dadurch auch der umgekehrte Prozess ermöglicht, bei welchem vereinzelte Substrate von dem Vakuumgreifer aufgenommen und zum Herstellen oder Weiterbilden eines Substratstapels in das Substratmagazin eingefahren werden. Alternativ dazu ist der Vakuumgreifer bevorzugt dazu ausgebildet, eine Vereinzelung eines Substratstapels nur auf dem Transportband durchzuführen. The vacuum gripper is particularly preferably designed to move into the substrate magazine. This makes it possible to isolate substrates from a substrate stack within the substrate magazine and to deposit isolated substrates on the conveyor belt for further use. Of course, this also enables the reverse process, in which individual substrates are picked up by the vacuum gripper and moved into the substrate magazine for the production or further development of a substrate stack. As an alternative to this, the vacuum gripper is preferably designed to carry out a separation of a substrate stack only on the conveyor belt.
Besonders bevorzugt ist der Vakuumgreifer an dem Träger höhenverstellbar gelagert. Dadurch ist der Vakuumgreifer unabhängig von der Transporthöhe des Transportbands optimal an einen Substratstapel anpassbar. The vacuum gripper is particularly preferably mounted on the carrier in a height-adjustable manner. As a result, the vacuum gripper can be optimally adapted to a substrate stack regardless of the transport height of the conveyor belt.
Weiter ist bevorzugt vorgesehen, dass der Greifarm zumindest einen Greifhaken aufweist, der von einer Greifposition zum Verschieben eines Substrats in eine Löseposition zum Verschieben des Greifarms unabhängig von einem Substrat und zurück verlagerbar ist. Das Greifen eines Substrats zum Verschieben des Substrats in das Substratmagazin oder aus dem Substratmagazin erfolgt damit durch das Verlagern des Greifhakens. In der Löseposition bietet dies den Vorteil, dass der Greifarm insbesondere in der Höhe besonders niedrigbauend ausgebildet ist, sodass er beispielsweise auch zwischen zwei übereinanderliegende Substrate in dem Substratmagazin eingefahren werden kann. Insbesondere wird dadurch vermieden, dass der Greifarm insgesamt in der Höhe verstellt werden muss, um ein Substrat zu greifen oder von diesem gelöst zu werden. Besonders bevorzugt ist der Greifhaken verschwenkbar an dem Greifarm gelagert. It is further preferably provided that the gripping arm has at least one gripping hook which can be displaced from a gripping position for moving a substrate into a release position for moving the gripping arm independently of a substrate and back. Grasping one Substrate for moving the substrate into the substrate magazine or out of the substrate magazine is thus carried out by moving the gripping hook. In the release position, this offers the advantage that the gripping arm is designed to be particularly low in height, so that it can, for example, also be inserted between two substrates lying one above the other in the substrate magazine. In particular, this avoids having to adjust the overall height of the gripping arm in order to grip a substrate or to be detached from it. The gripping hook is particularly preferably mounted pivotably on the gripping arm.
Gemäß einer bevorzugten Weiterbildung der Erfindung weist der Greifarm mehrere solcher Greifhaken auf, die in Schieberichtung beabstandet voneinander an dem Greifarm angeordnet sind. Die Greifhaken sind dabei insbesondere wie zuvor beschrieben ausgebildet und an dem Greifarm gelagert. Es ergibt sich dabei der Vorteil, dass mittels der Greifhaken mehrere Substrate gleichzeitig gegriffen und verschoben werden können, ohne dass die Substrate aneinander stoßen. Vielmehr sind die Greifhaken bevorzugt derart an dem Greifarm angeordnet, dass zwischen benachbarten Substraten in einem Schubfach jeweils zumindest ein Greifhaken durch das Verlagern einbringbar ist, und dass in Folge dessen durch das Verschieben beziehungsweise Herausziehen des Greifarms alle Substrate gleichzeitig auf das Transportband herausgezogen werden können. Damit ist eine sichere Handhabung mehrere Substrate gleichzeitig gewährleistet, die vermeidet, dass Substrate durch Aneinanderstoßen oder Übereinanderschieben beim Transport beschädigt werden. According to a preferred development of the invention, the gripping arm has a plurality of such gripping hooks, which are arranged on the gripping arm at a distance from one another in the sliding direction. The gripping hooks are designed in particular as described above and mounted on the gripping arm. This results in the advantage that several substrates can be gripped and displaced simultaneously by means of the gripping hooks without the substrates hitting one another. Rather, the gripping hooks are preferably arranged on the gripping arm in such a way that at least one gripping hook can be inserted between adjacent substrates in a drawer by shifting, and that, as a result, all substrates can be pulled out onto the conveyor belt at the same time by moving or pulling out the gripping arm. This ensures safe handling of several substrates at the same time, which prevents substrates from being damaged by bumping into one another or being pushed over one another during transport.
Besonders bevorzugt ist einer der Greifhaken an dem Greifarm längsverschieblich gelagert. Dadurch ist eine Anpassung des Abstands benachbarter Greifhaken zueinander ermöglicht, sodass der Greifarm beispielsweise an unterschiedliche in einem Schubfach des Substratmagazins gelagerte Substrate anpassbar ist, die in Schieberichtung gesehen unterschiedlich lang ausgebildet sind. Entsprechendes gilt selbstverständlich auch für das Einschieben mehrerer unterschiedlicher Substrate in das Substratmagazin hinein. Particularly preferably, one of the gripping hooks is mounted on the gripping arm so as to be longitudinally displaceable. This enables the spacing of adjacent gripping hooks to be adapted to one another, so that the gripping arm can be adapted, for example, to different substrates stored in a drawer of the substrate magazine, which substrates are of different lengths when viewed in the sliding direction. The same naturally also applies to the insertion of several different substrates into the substrate magazine.
Gemäß einer vorteilhaften Weiterbildung der Erfindung weist der Greifarm zumindest einen Sensor zum Erfassen eines Substrats auf. Dadurch, dass der Sensor den Greifarm zugeordnet ist, wird der Sensor mit dem Greifarm mitbewegt. Insbesondere ist der Sensor auf der Oberseite des Greifarms, also einem zu greifenden Substrat zugeordnet, angeordnet. Wird der Greifarm nun an einem Substrat vorbei bewegt, wird mittels des Sensor während der Bewegung insbesondere der Beginn und das Ende eines Substrats erfasst und dadurch beispielweise mithilfe eines Steuergeräts die Substratkontur und Position in dem Substratmagazin und/oder auf dem Transportband ermittelt. Hierdurch wird ein einfacher und sicherer Transport des Substrats gewährleistet. Insbesondere wird mithilfe der Daten des Sensors bestimmt, an welcher Position der Greifhaken in die Greifposition zu verlagern ist oder verlagert werden kann, ohne gegen das Substrat von unten zu stoßen. Dazu wird beispielweise beim Einschieben des Greifarms in das Substratmagazin der Beginn eines Substrats erfasst und entweder auch das Ende des Substrats mittels des Sensors erfasst oder in Abhängigkeit von dem Steuergerät bekannten Daten des zu greifenden Substrates das Ende des Substrats berechnet, sodass der Greifhaken erst dann in die Greifposition verlagert wird, wenn der Greifhaken das Substrat vollständig passiert hat. Insbesondere ist das Transportband derart ausgebildet, dass es zwei Transportbandläufe aufweist, die parallel im Abstand zueinander angeordnet sind, sodass der Greifarm zwischen den beiden Transportbandläufen angeordnet ist, sodass das jeweilige Substrat sowohl in dem Substratmagazin als auch auf das Transportband jeweils an seines Seitenrändern aufliegt. Der Abstand der Transportbandläufe zueinander muss dabei nicht unbedingt dem Abstand von Schiebeführungen des Substratmagazins, die jeweils ein Schubfach ausbilden, entsprechen. Vielmehr kann der Abstand der Substratbandläufe auch kleiner gewählt sein. According to an advantageous development of the invention, the gripping arm has at least one sensor for detecting a substrate. Because the sensor is assigned to the gripper arm, the sensor is moved along with the gripper arm. In particular, the sensor is arranged on the upper side of the gripping arm, that is to say assigned to a substrate to be gripped. If the gripper arm is now moved past a substrate, in particular the beginning and the end of a substrate are detected by means of the sensor during the movement and thereby the substrate contour and position in the substrate magazine and / or on the substrate, for example, with the help of a control device Conveyor belt determined. This ensures that the substrate can be transported easily and safely. In particular, the data from the sensor are used to determine the position at which the gripping hook is to be or can be shifted into the gripping position without hitting the substrate from below. For this purpose, for example, when the gripper arm is pushed into the substrate magazine, the beginning of a substrate is detected and either the end of the substrate is also detected by means of the sensor or the end of the substrate is calculated depending on the data known to the control device of the substrate to be gripped, so that the gripping hook is only then in the gripping position is shifted when the gripping hook has completely passed the substrate. In particular, the conveyor belt is designed in such a way that it has two conveyor belt runs which are arranged parallel at a distance from one another so that the gripper arm is arranged between the two conveyor belt runs so that the respective substrate rests on its side edges both in the substrate magazine and on the conveyor belt. The distance between the conveyor belt runs does not necessarily have to correspond to the distance between sliding guides of the substrate magazine, which each form a drawer. Rather, the distance between the substrate strip runs can also be selected to be smaller.
Gemäß einer bevorzugten Weiterbildung der Erfindung ist dem Greifarm zumindest ein Wegsensor zugeordnet. Durch den Wegsensor ist der Bewegungsweg des Greifarms ermittelbar und damit insbesondere auch in Abhängigkeit von den Daten des Sensors die Positionierung des Greifhakens bezüglich eines zu greifenden Substrats optimal feststellbar und einstellbar. According to a preferred development of the invention, at least one displacement sensor is assigned to the gripping arm. The path of movement of the gripping arm can be determined by the displacement sensor and, in particular, the positioning of the gripping hook with respect to a substrate to be gripped can be optimally determined and adjusted as a function of the data from the sensor.
Weiterhin ist bevorzugt vorgesehen, dass dem Greifarm zumindest ein insbesondere elektromotorischer Aktuator zu dessen Verschiebung und/oder zur Verlagerung des zumindest einen Greifhakens zugeordnet ist. Damit ist die Positionierung des Greifarms und insbesondere des an dem Greifarm befindlichen Greifhakens, oder gegebenenfalls der mehreren Greifhaken, insbesondere unter Berücksichtigung der Daten des Wegmesssensors sowie des Sensors gewährleistet. Optional weist der Greifarm zum Verlagern des jeweiligen Greifhakens zumindest einen weiteren elektrisch betreibbaren Aktuator auf. Weist der Greifarm mehrere Greifhaken auf, so ist jedem Greifhaken entweder ein eigener Aktuator zugeordnet, oder die Greifhaken sind mechanisch miteinander mit einem gemeinsamen Aktuator verbunden, sodass die Greifhaken gleichzeitig durch den Aktuator bewegt, insbesondere verschwenkt werden. Furthermore, it is preferably provided that the gripping arm is assigned at least one actuator, in particular an electromotive actuator, for its displacement and / or for displacing the at least one gripping hook. This ensures the positioning of the gripper arm and in particular of the gripper hook located on the gripper arm or, if applicable, of the multiple gripper hooks, in particular taking into account the data from the displacement sensor and the sensor. Optionally, the gripping arm has at least one further electrically operated actuator for displacing the respective gripping hook. If the gripping arm has several gripping hooks, each gripping hook is either assigned its own actuator, or the gripping hooks are mechanically connected to one another with a common actuator, so that the gripping hooks are moved, in particular pivoted, at the same time by the actuator.
Weiterhin weist die Be- und Entladeeinrichtung bevorzugt ein Steuergerät auf, das zumindest mit dem Aktuator, mit dem Sensor und mit dem Wegmesssensor signaltechnisch verbunden und dazu ausgebildet ist, den zumindest einen Aktuator in Abhängigkeit von von dem Sensor erfassten Daten dazu anzusteuem, Substrate aus einem bestimmten Fach des Substratmagazins einzeln oder gemeinsam auf das Transportband rauszuschieben oder in das Schubfach von dem Transportband hineinzuschieben. In Kenntnis der Positionierung der Substrate in dem Substratmagazin oder Transportband steuert das Steuergerät die Be- und Entladeeinrichtung dazu an, die Substrate einzeln oder wie zuvor beschrieben gleichzeitig von einem Schubfach auf das Transportband zu schieben oder anders hemm. Bei dem Bewegen einzelner Substrate wird das Transportband durch das Steuergerät insbesondere angesteuert, entweder nach Aufnahme jedes einzelnen Substrats, das jeweilige Substrat mittels des Transportbands zu einer weiteren Verwendung abzuführen, oder einzelne Substrate auf dem Transportband zunächst zu sammeln und erst dann der weiteren Verwendung zuzuführen. Furthermore, the loading and unloading device preferably has a control device which is connected for signaling at least to the actuator, to the sensor and to the displacement sensor and is designed to control the at least one actuator as a function of the sensor to control the recorded data to push substrates out of a certain compartment of the substrate magazine individually or together onto the conveyor belt or to push them into the drawer of the conveyor belt. Knowing the positioning of the substrates in the substrate magazine or conveyor belt, the control device controls the loading and unloading device to push the substrates individually or as described above simultaneously from a drawer onto the conveyor belt or otherwise inhibit them. When moving individual substrates, the conveyor belt is controlled by the control device, either after picking up each individual substrate, removing the respective substrate for further use by means of the conveyor belt, or first collecting individual substrates on the conveyor belt and only then forwarding them for further use.
Das Steuergerät ist insbesondere so ausgebildet, ein einzelnes Substrat von dem Transportband auf eine vorgegebene Position in dem Schubfach zu schieben oder von einer vorgegebenen Position aus dem Schubfach zu entfernen. Dazu nutzt das Steuergerät Daten desThe control device is designed in particular to push a single substrate from the conveyor belt to a predetermined position in the drawer or to remove it from a predetermined position from the drawer. The control unit uses data from the
Wegmesssensors sowie beispielsweise durch den Sensor erfasste Daten des zu schiebenden Substrats, sodass eine optimale Positionierung des Substrats in dem Schubfach oder auf dem Transportband erfolgt. Distance measuring sensor and, for example, data recorded by the sensor of the substrate to be pushed, so that the substrate is optimally positioned in the drawer or on the conveyor belt.
Im Folgenden soll die Erfindung anhand der Zeichnungen näher erläutert werden. Dazu zeigen The invention will be explained in more detail below with reference to the drawings. To show
Figur 1 ein vorteilhaftes Substratmagazinsystem in einer perspektivischenFigure 1 shows an advantageous substrate magazine system in a perspective
Darstellung, Presentation,
Figur 2 eine Schubeinheit des Substratmagazinsystems in einer perspektivischenFIG. 2 shows a push unit of the substrate magazine system in a perspective view
Darstellung, Presentation,
Figur 3A eine vereinfachte Darstellung des Substratmagazinsystems bei derFIG. 3A shows a simplified illustration of the substrate magazine system in FIG
Handhabung von Einzelsubstraten, und Handling of single substrates, and
Figur 3B eine vereinfachte Darstellung des Substratmagazinsystems bei derFIG. 3B shows a simplified illustration of the substrate magazine system in FIG
Handhabung von Substratstapeln. Handling of stacks of substrates.
Figur 1 zeigt in einer vereinfachten perspektivischen Darstellung ein Substratmagazinsystem 1 für eine Bestückungslinie für elektrische/elektronische Komponenten. Das Substratmagazin 1 weist ein Substratmagazin 2 auf, das eine Vielzahl von Schubfächern 3 zur Aufnahme jeweils mehrerer Substrate 4 aufweist. Dazu weist das Substratmagazin 2 zwei einander gegenüber liegend angeordnete und parallel zueinander vertikal ausgerichtete Seitenwände 5 auf, die an einander zugewandten Seiten jeweils eine Vielzahl von Führungsschienen 6 aufweisen, wobei jeweils zwei gegenüberliegend angeordnete Führungsschienen 6 ein Schubfach 3 ausbilden, in welchem das jeweilige Substrat 4 mit seinen Seitenrändern aufliegt. Optional können im Substratmagazin 2 auch Substratstapel angeordnet werden, also eine Vielzahl von übereinander gestapelten Einzelsubstraten, die ein Paket beziehungsweise einen Stapel bilden. FIG. 1 shows, in a simplified perspective illustration, a substrate magazine system 1 for an assembly line for electrical / electronic components. The substrate magazine 1 has a substrate magazine 2 which has a plurality of drawers 3 for receiving a plurality of substrates 4 in each case. For this purpose, the substrate magazine 2 has two opposite one another horizontally arranged and vertically aligned parallel to each other, each having a plurality of guide rails 6 on mutually facing sides, two guide rails 6 arranged opposite each other forming a drawer 3 in which the respective substrate 4 rests with its side edges. Optionally, substrate stacks can also be arranged in the substrate magazine 2, that is to say a multiplicity of individual substrates stacked on top of one another, which form a package or a stack.
Das Substratmagazin 1, 2 weist weiterhin eine Be- und Entladeeinrichtung 7 auf, welche dazu dient, Substrate 4 in das Substratmagazin 2 zu verlagern oder aus dem Substratmagazin 2 zu entnehmen und beispielsweise einer Bestückungsvorrichtung der Bestückungslinie zuzuführen. Dazu weist die Be- und Entladeeinrichtung 7 ein Transportband 8 auf, das zwei parallel zueinander ausgerichtete und beabstandet zueinander angeordnete Transportbandläufe 9 aufweist. Die Transportbandläufe 9 sind als Endlostriebe dazu ansteuerbar, das Transportband in eine Umlaufbewegung zu versetzen, wodurch auf dem Transportband 8 aufliegende Gegenstände mit dem Transportband 8 mittransportiert werden können. Die Transportbandläufe 9 sind derart nah beieinander angeordnet, dass Substrate aus dem Substratmagazin 2 auf beiden Transportbandläufen 9 an ihren Seitenrändem aufliegen und damit durch das Transportband 8 transportiert werden können. The substrate magazine 1, 2 also has a loading and unloading device 7 which is used to move substrates 4 into the substrate magazine 2 or to remove them from the substrate magazine 2 and, for example, to feed them to an equipping device of the equipping line. For this purpose, the loading and unloading device 7 has a conveyor belt 8, which has two conveyor belt runs 9 which are aligned parallel to one another and arranged at a distance from one another. The conveyor belt runs 9 can be controlled as endless drives in order to set the conveyor belt in a circular motion, whereby objects lying on the conveyor belt 8 can be transported with the conveyor belt 8. The conveyor belt runs 9 are arranged so close to one another that substrates from the substrate magazine 2 rest on both conveyor belt runs 9 at their side edges and can thus be transported through the conveyor belt 8.
Zwischen den Transportbandläufen 9 ist eine Schiebeeinheit 10 angeordnet. Die Schiebeeinheit 10 weist einen Greifarm 11 auf, der als Teleskoparm ausgebildet ist. Der Greifarm 11 liegt dabei unterhalb der Auflagefläche 12 des Transportbands 8 und ist parallel zu diesem ausgerichtet. An seinem freien Ende weist der Greifarm 11 einen Greifhaken 13 auf, der verlagerbar ist. Insbesondere ist der Greifhaken 13 durch ein Verschwenken des Greifarms 11 um seine Längsachse des Greifarms 11 verschwenkbar, wie durch einen Doppelpfeil 14 in Figur 1 gezeigt. Dadurch ist der Greifhaken 13 von der in Figur 1 dargestellten Löseposition in eine aufgestellte, in Figur 1 gestrichelt dargestellte Greifposition verschwenkbar. Dem Greifarm 11 ist außerdem ein elektromotorischer Aktuator 15 zugeordnet, der das Verschwenken des Greifhakens 13 gemäß Pfeil 14 wie durch einen Doppelpfeil 16 gezeigt, ermöglicht. Der Greifarm 11 ist mit dem Greifhaken 13 parallel zu dem Transportband 8 durch den Aktuator 15 längsverschiebbar. Die Schiebeeinheit 10 und das Transportband 8 sind dabei an dem gleichen Träger 17 der Be- und Entladeeinrichtung 7 angeordnet. A sliding unit 10 is arranged between the conveyor belt runs 9. The sliding unit 10 has a gripping arm 11 which is designed as a telescopic arm. The gripping arm 11 lies below the support surface 12 of the conveyor belt 8 and is aligned parallel to it. At its free end, the gripping arm 11 has a gripping hook 13 which can be displaced. In particular, the gripping hook 13 can be pivoted by pivoting the gripping arm 11 about its longitudinal axis of the gripping arm 11, as shown by a double arrow 14 in FIG. As a result, the gripping hook 13 can be pivoted from the release position shown in FIG. 1 into an erected gripping position shown in dashed lines in FIG. The gripping arm 11 is also assigned an electromotive actuator 15 which enables the gripping hook 13 to be pivoted according to arrow 14 as shown by a double arrow 16. The gripping arm 11 can be displaced longitudinally with the gripping hook 13 parallel to the conveyor belt 8 by the actuator 15. The sliding unit 10 and the conveyor belt 8 are arranged on the same carrier 17 of the loading and unloading device 7.
Figur 2 zeigt die Schiebeeinheit 10 in einer perspektivischen Darstellung losgelöst von der übrigen Be- und Entladeeinrichtung 7. Der Greif arm 11 weist einen ersten Armteil 20 und einen zweiten Armteil 21 auf. Der Armteil 20 ist an einem an dem Träger 17 befestigten Stützträger 22 gemäß Doppelpfeil 16 längsverschieblich gelagert. Dabei erfolgt das Verschieben gemäß dem vorliegenden Ausführungsbeispiel durch einen Riementrieb 23, der elektromotorisch durch einen Aktuator 24 antreibbar ist. An dem Greifarmteil 20 ist das Greifarmteil 21 verschwenkbar um seine Längsmittelachse gelagert, und fest mit dem Greifhaken 13 verbunden, um diesen durch seine durch den Aktuator 15 bewirkte Drehbewegung von der Losstellung in die Greifstellung und andersherum zu verschwenken. Insbesondere ist der Greifarmteil 21 dabei durch mehrere Radiallager 25 an dem Greifarmteil 20 verschwenk- beziehungsweise drehbar gelagert. Figure 2 shows the sliding unit 10 in a perspective view detached from the rest of the loading and unloading device 7. The gripping arm 11 has a first arm part 20 and a second arm part 21. The arm part 20 is mounted so as to be longitudinally displaceable according to the double arrow 16 on a support carrier 22 fastened to the carrier 17. According to the present exemplary embodiment, the shifting takes place by means of a belt drive 23 which can be driven by an electric motor by an actuator 24. On the gripping arm part 20, the gripping arm part 21 is pivotably mounted about its longitudinal center axis and is firmly connected to the gripping hook 13 in order to pivot it from the loose position into the gripping position and vice versa through its rotational movement caused by the actuator 15. In particular, the gripping arm part 21 is pivotably or rotatably mounted on the gripping arm part 20 by a plurality of radial bearings 25.
Darüber hinaus weist die Be- und Entladeeinrichtung 7 einen Vakuumgreifer 18 auf, wie in Figur 1 gezeigt. Der Vakuumgreifer 18 weist einen beweglichen Saugkopf 19 auf, der oberhalb des Greif arms 11 angeordnet und zumindest parallel zu dem Greif arm 11 gemäß Doppelpfeil 16 längs verschieblich gelagert ist. Der Saugkopf 19 liegt dabei oberhalb der Auflagefläche 12 des Transportbands 8 und ist optional in der Höhe verstellbar an dem Träger 17 gelagert, sodass der Abstand zwischen dem Saugkopf 19 beziehungsweise der Vakuumeinrichtung 18 und dem Transportband 8 veränderbar ist. Durch die Vakuumeinrichtung 18 ist es möglich, Substrate 4 von oben anzusaugen und zu transportieren. Mittels des Greifarms 11 ist es mit Hilfe des Greifhakens 13 ermöglicht, Substrate formschlüssig zu verschieben, wobei der Greifhaken 13 von unten nach oben in die Greifstellung verschwenkt wird, wie zuvor erläutert, um ein Substrat 4 mit einer Schubkraft beaufschlagen zu können. Zumindest ein Steuergerät 34 steuert dazu die Aktuatoren der Be- und Entladeeinrichtung 7. Das Steuergerät 34 ist dazu signaltechnisch mit allen Aktuatoren und Sensoren, die unten näher erläutert werden, verbunden, um insbesondere auch in Abhängigkeit von Informationen der Sensoren die Aktuatoren gezielt anzusteuern, um einen Belade- und/oder Entladevorgang mittels der Be- und Entladeeinrichtung 7 an dem Substratmagazin 2 durchzuführen. Das Steuergerät 34 weist dazu beispielsweise eine Recheneinheit, insbesondere einen Mikrokontroller, sowie einen Datenspeicher auf, wobei in dem Datenspeicher insbesondere ein Computerprogramm hinterlegt ist, das von der Recheneinheit angewendet wird, um die Be- und Entladeeinrichtung 7 wie untenstehend beschrieben zu betreiben. In addition, the loading and unloading device 7 has a vacuum gripper 18, as shown in FIG. The vacuum gripper 18 has a movable suction head 19 which is arranged above the gripping arm 11 and is mounted so that it can be displaced longitudinally at least parallel to the gripping arm 11 according to the double arrow 16. The suction head 19 lies above the support surface 12 of the conveyor belt 8 and is optionally mounted on the carrier 17 adjustable in height so that the distance between the suction head 19 or the vacuum device 18 and the conveyor belt 8 can be changed. The vacuum device 18 makes it possible to suck in substrates 4 from above and to transport them. By means of the gripping arm 11, it is possible with the aid of the gripping hook 13 to shift substrates in a form-fitting manner, the gripping hook 13 being pivoted from bottom to top into the gripping position, as explained above, in order to be able to apply a thrust force to a substrate 4. For this purpose, at least one control unit 34 controls the actuators of the loading and unloading device 7. The control unit 34 is connected for signaling purposes to all actuators and sensors, which are explained in more detail below, in order to control the actuators in a targeted manner, in particular depending on information from the sensors to carry out a loading and / or unloading process by means of the loading and unloading device 7 on the substrate magazine 2. For this purpose, the control device 34 has, for example, a computing unit, in particular a microcontroller, and a data memory, with a computer program being stored in the data memory, which is used by the computing unit to operate the loading and unloading device 7 as described below.
Anhand von Figuren 3A und B soll im Folgenden die Funktionsweise des vorteilhaften Substratmagazinsystems 1 erläutert werden. The mode of operation of the advantageous substrate magazine system 1 is to be explained below with the aid of FIGS. 3A and B.
Figur 3A zeigt ein Anwendungsbeispiel des Substratmagazinsystems 1, bei welchem Einzelsubstrate gehandhabt werden. In diesem Ausführungsbeispiel sind vereinzelte Substrate 4 in Schubfächern 3 des Substratmagazins 2 angeordnet. Dabei ist vorliegend das Substratmagazinsystem vereinfacht gezeigt. In manchen Schubfächern liegen dabei mehrere Substrate 4 nebeneinander beabstandet zueinander, während in anderen Schubfächern 3 lediglich ein Substrat 4 angeordnet sein kann. Zum Entnehmen der Substrate für eine weitere Verwendung beispielsweise in einer Bestückungslinie, wird nunmehr der Greifarm 11 mit Hilfe des Aktuators 24 in das Substratmagazin 2 hineingeschoben. Der Greifarm 11 weist auf seiner Oberseite zumindest einen Sensor 26 auf, der beispielsweise als optischer Sensor oder Abstandssensor ausgebildet ist. Insbesondere ist der Sensor 26 nahe zu dem Greifhaken 13 an dem Greifarm 11, insbesondere an dem zweiten Greifarmteil 21 angeordnet. Beim Einschieben des Greifarms 11 in das Substratmagazin 2 wird somit auch der Sensor 26 an den darin befindlichen Substraten 4 vorbeigeschoben, die oberhalb des Greifarms 11 in dem Schubfach 3 liegen. Dem Greifarm 11 ist des Weiteren eine Wegmesseinrichtung 27 zugeordnet, welche den Bewegungsweg des Greifarms 11 überwacht. Mit dem Sensor 26 ist nunmehr der Anfang und das Ende eines Substrats 4 oberhalb des Greifarms 11 erfassbar und mit Hilfe der Wegmesseinrichtung 27 ist die Position des Greifarms 11 ermittelbar. Insbesondere nachdem mittels des Sensors 26 das Ende des zu greifenden Substrats 4 erfasst wurde, wird die Bewegung des Greifarms 11 gestoppt und der Greifhaken 13 in die Greifposition, wie in Figur 3 dargestellt, verschwenkt, sodass der Greifhaken 13 das zu erfassende Substrat 4 hintergreift. Wird nun der Greifarm 11 aus dem Substratmagazin 2 heraus bewegt, so schiebt der Greifhaken 13 das Substrat 4 auf das Transportband 8 beziehungsweise auf die Auflagefläche 12 des Transportbands 8. Ein weiterer Transport des Substrats 4 ist durch das Transportband 8 ermöglicht. So können nacheinander mehrere Substrate 4 aus einem Schubfach 3 auf das Transportband 8 bewegt werden. Vorteilhafterweise ist der Träger 17 in der Höhe verstellbar, wie durch einen Doppelpfeil 28 in Figur 3 anzeigt, sodass durch eine Höhenverstellung des Trägers 17 sämtliche Schubfächer 3 des Substratmagazins 2 mithilfe des Greifarms 11 erreicht werden können. FIG. 3A shows an application example of the substrate magazine system 1 in which individual substrates are handled. In this exemplary embodiment, individual substrates 4 are arranged in drawers 3 of the substrate magazine 2. The substrate magazine system is shown here in a simplified manner. In some drawers there are several substrates 4 next to one another at a distance from one another, while in other drawers 3 only one substrate 4 can be arranged. To remove the substrates for further use, for example in an assembly line, the gripping arm 11 is now pushed into the substrate magazine 2 with the aid of the actuator 24. The gripping arm 11 has at least one sensor 26 on its upper side, which is designed, for example, as an optical sensor or a distance sensor. In particular, the sensor 26 is arranged close to the gripping hook 13 on the gripping arm 11, in particular on the second gripping arm part 21. When the gripping arm 11 is pushed into the substrate magazine 2, the sensor 26 is thus also pushed past the substrates 4 located therein, which are located above the gripping arm 11 in the drawer 3. A distance measuring device 27, which monitors the movement path of the gripper arm 11, is also assigned to the gripper arm 11. The beginning and the end of a substrate 4 above the gripping arm 11 can now be detected with the sensor 26, and the position of the gripping arm 11 can be determined with the aid of the displacement measuring device 27. In particular, after the end of the substrate 4 to be gripped has been detected by means of the sensor 26, the movement of the gripping arm 11 is stopped and the gripping hook 13 is pivoted into the gripping position, as shown in FIG. 3, so that the gripping hook 13 engages behind the substrate 4 to be gripped. If the gripping arm 11 is now moved out of the substrate magazine 2, the gripping hook 13 pushes the substrate 4 onto the conveyor belt 8 or onto the support surface 12 of the conveyor belt 8. In this way, several substrates 4 can be moved one after the other from a drawer 3 onto the conveyor belt 8. The height of the carrier 17 is advantageously adjustable, as indicated by a double arrow 28 in FIG. 3, so that all drawers 3 of the substrate magazine 2 can be reached with the aid of the gripper arm 11 by adjusting the height of the carrier 17.
Für einen Beladevorgang des Substratmagazins 2 erfolgt die Bewegung des Greifarms umgekehrt, wobei zunächst ein Substrat auf dem Transportband 8 platziert und anschließend mithilfe des Greifhakens 13 in Richtung des Substratmagazins 2 in eines der Schubfächer 3 eingeschoben wird. Figur 3B zeigt das gleiche Substratmagazinsystem 1 in einem Betrieb, in welchem die Vereinzelung von Substraten 4 von einem Substratstapel 29 oder das Herstellen des Substratstapels 29 aus einzelnen Substraten 4 vorgenommen wird. For a loading process of the substrate magazine 2, the movement of the gripper arm is reversed, whereby a substrate is first placed on the conveyor belt 8 and then pushed into one of the drawers 3 with the aid of the gripper hook 13 in the direction of the substrate magazine 2. FIG. 3B shows the same substrate magazine system 1 in an operation in which substrates 4 are separated from a substrate stack 29 or the substrate stack 29 is produced from individual substrates 4.
Gemäß dem vorliegenden Ausführungsbeispiel ist der Substratstapel 29 in dem Substratmagazin 2 gelagert. Dazu ist beispielweise ein Adapterblech 30 in ein Schubfach 3 eingeschoben worden, auf welchem der Substratstapel 29 liegt. According to the present exemplary embodiment, the substrate stack 29 is stored in the substrate magazine 2. For this purpose, an adapter plate 30, for example, has been pushed into a drawer 3 on which the substrate stack 29 lies.
Anstelle des Greifarms 11 wird nunmehr die Vakuumeinrichtung 18 dazu genutzt, das oberste Substrat 4 des Substratstapels 29 zu greifen. Dazu wird der Saugkopf 19 in das Substratmagazin 2 verfahren, sodass er oberhalb des Substratstapels 29 positioniert ist. Vorzugsweise ist dem Saugkopf 19 ein weiterer Sensor 33 zugeordnet, der nach unten weist, um beispielsweise den Beginn des Substratstapels und optional auch das Ende des Substratstapels zu erfassen. Dadurch ist mit einfachen Mitteln der Saugkopf 19 optimal über dem zu greifenden Substrat 4 positionierbar. Insbesondere ist auch dem Saugkopf 19 eine Wegmesseinrichtung 27 zugeordnet, die den Weg des Saugkopfs 19 erfasst und beispielsweise in Abhängigkeit von Beginn und Ende des Substratstapels 29 den Mittelpunkt des Substratstapels 29 bestimmt und den Saugkopf 19 zur Entnahme eines Substrats 4 mittig über dem Substratstapel 29 positioniert. Anschließend wird der Saugkopf 19 nach unten zu dem obersten Substrat 4 geführt und das zuoberst liegende Substrat 4 durch die Vakuumeinrichtung 18 an den Saugkopf 19 angesaugt. Vorzugsweise wird anschließend der Saugkopf 19 ein Stück weit angehoben, um das Substrat 4 von dem darunterliegenden Substrat 4 zu lösen. Anschließend wird der Saugkopf 19 aus dem Substratmagazin 2 herausbewegt, wie durch einen Pfeil 32 gezeigt Dadurch wird das Substrat 4 von dem Substratstapel 29 vereinzelt und insbesondere durch den Saugkopf 19 auf dem Transportband 8 abgelegt. Instead of the gripper arm 11, the vacuum device 18 is now used to grip the top substrate 4 of the substrate stack 29. For this purpose, the suction head 19 is moved into the substrate magazine 2 so that it is positioned above the substrate stack 29. A further sensor 33 is preferably assigned to the suction head 19, which sensor 33 points downwards in order, for example, to detect the beginning of the substrate stack and optionally also the end of the substrate stack. As a result, the suction head 19 can be optimally positioned over the substrate 4 to be gripped using simple means. In particular, a displacement measuring device 27 is also assigned to the suction head 19, which detects the path of the suction head 19 and, for example, determines the center point of the substrate stack 29 depending on the beginning and end of the substrate stack 29 and positions the suction head 19 centrally above the substrate stack 29 for removing a substrate 4 . Then the suction head 19 is guided down to the uppermost substrate 4 and the uppermost substrate 4 is sucked onto the suction head 19 by the vacuum device 18. The suction head 19 is then preferably raised a little in order to detach the substrate 4 from the substrate 4 underneath. The suction head 19 is then moved out of the substrate magazine 2, as shown by an arrow 32. As a result, the substrate 4 is separated from the substrate stack 29 and, in particular, is deposited on the conveyor belt 8 by the suction head 19.
Besonders bevorzugt beginnt die Entnahme der einzelnen Substrate aus dem Substratmagazin 2 von unten, also mit dem Substrat 4, das in dem untersten Schubfach 3 des Substratmagazins 2 liegt, sodass dem Greif arm 11 der größtmögliche Freiraum beim Einführen in das Substratmagazin 2 geboten wird. Darüber hinaus wird sichergestellt, dass kein Substrat unterhalb des Greifarms liegt, dass durch den Greifarm beim Greifen das darüberliegende Substrat beschädigt werden könnte. Auch wird dadurch verhindert, dass bei dem Verschieben eines Substrats 4 in dem Substratmagazin Schmutzpartikel oder dergleichen nicht auf ein darunterliegendes Substrat 4 fallen können. Dadurch werden sowohl Vorteile bezüglich der Reinheit der Substrate 4 sowie bezüglich der Bewegungsfreiheit des Greifarms 11 erreicht. Durch das vorteilhafte Substratmagazinsystem 1 können unterschiedliche Be- und Entladevorgänge realisiert werden. Während bei herkömmlichen Substratmagazinsystemen die Substrate durch einen Greifarm lediglich nur in eine einzige einführbare Endposition oder bis zu einem Anschlag gefahren werden können, erlaubt die vorliegende Ausbildung des Substratmagazinsystems 1, dass die Substrate gezielt auf vorbestimmte Positionen innerhalb eines Schubfachs geschoben werden. Die Einschiebeposition ist frei programmierbar oder beispielweise in Abhängigkeit von der Größe des jeweiligen Substrats durch das Steuergerät 34 einstellbar. In Abhängigkeit von dem verfügbaren Platz in einem Schubfach 3, können in Abhängigkeit der gewünschten Anzahl von Substraten 4 mehrere Endpositionen des Greifarms 11 programmiert und eingestellt werden. Dabei wird mithilfe der Wegmesseinrichtung 27 die Position des Greifhakens 13 und damit die Position eines bewegten Substrats überwacht, sodass das Substrat 4 an einer gewünschten Position verbleibt. Insbesondere ist es dadurch möglich, einzelne Substrate in einem Schubfach 3 mit frei wählbarem Abstand zueinander zu platzieren. Ein Übereinanderschieben oder Gegeneinanderschieben der Substrate 4 wird somit vermieden. Particularly preferably, the removal of the individual substrates from the substrate magazine 2 begins from below, i.e. with the substrate 4, which is located in the lowest drawer 3 of the substrate magazine 2, so that the gripping arm 11 is given the greatest possible free space when it is inserted into the substrate magazine 2. In addition, it is ensured that no substrate lies below the gripper arm that the substrate above could be damaged by the gripper arm when gripping. This also prevents dirt particles or the like from falling onto a substrate 4 below when a substrate 4 is displaced in the substrate magazine. In this way, advantages with regard to the purity of the substrates 4 and with regard to the freedom of movement of the gripping arm 11 are achieved. The advantageous substrate magazine system 1 enables different loading and unloading processes to be implemented. While in conventional substrate magazine systems the substrates can only be moved into a single insertable end position or up to a stop by a gripper arm, the present design of the substrate magazine system 1 allows the substrates to be pushed specifically to predetermined positions within a drawer. The insertion position is freely programmable or, for example, can be set by the control device 34 as a function of the size of the respective substrate. Depending on the available space in a drawer 3, depending on the desired number of substrates 4, several end positions of the gripping arm 11 can be programmed and set. The position of the gripping hook 13 and thus the position of a moving substrate is monitored with the aid of the displacement measuring device 27, so that the substrate 4 remains in a desired position. In particular, it is thereby possible to place individual substrates in a drawer 3 at a freely selectable distance from one another. Sliding over or against one another of the substrates 4 is thus avoided.
Optional sind an dem Greifarm mehrere Greifhaken 13 verschwenkbar gelagert. Die Greifhaken 13 sind dabei in einem festen Abstand zueinander angeordnet, der einen gewünschten Abstand benachbarter Substrate 4 im Substratmagazin 2 entspricht. Wird der Greifarm 11 vollständig in das Substratmagazin 2 eingefahren, können somit entsprechend alle in dem betroffenen Schubfach 3 liegende Substrate 4 gleichzeitig durch die Greifhaken 13 aus dem Schubfach heraus auf das Transportband 8 beziehungsweise auf die Auflagefläche 12 des Transportbands 8 herausgezogen werden. Für den umgekehrten Vorgang werden die Substrate 4 zunächst auf dem Transportband 8 entsprechend dem Abstand der Greifhaken oder Einschiebefinger positioniert, und anschließend werden alle Substrate 4 gleichzeitig durch den Greifarm 11 in den gewünschten Magazinslot beziehungsweise in das gewünschte Schubfach 3 geschoben. Optionally, several gripping hooks 13 are pivotably mounted on the gripping arm. The gripping hooks 13 are arranged at a fixed distance from one another, which corresponds to a desired distance between adjacent substrates 4 in the substrate magazine 2. If the gripping arm 11 is completely retracted into the substrate magazine 2, all substrates 4 lying in the relevant drawer 3 can be pulled simultaneously by the gripping hooks 13 out of the drawer onto the conveyor belt 8 or onto the support surface 12 of the conveyor belt 8. For the reverse process, the substrates 4 are first positioned on the conveyor belt 8 according to the spacing of the gripping hooks or insertion fingers, and then all substrates 4 are pushed simultaneously by the gripping arm 11 into the desired magazine slot or into the desired drawer 3.
Optional ist dem Greifarm 11 außerdem ein Kraftsensor zugeordnet, der die Bewegungskraft des Greifarms 11 überwacht, sodass wenn die Kraft einen erwarteten Wert übersteigt, beispielsweise, wenn ein Substrat in dem jeweiligen Schubfach 3 verklemmt, der Vorgang unterbrochen wird, um eine Beschädigung von Substraten 4 zu vermeiden. Der Sensor 26, 33 ist dabei jeweils insbesondere als optischer Sensor oder als Abstandsensor ausgebildet. Optionally, a force sensor is also assigned to the gripper arm 11, which monitors the movement force of the gripper arm 11, so that if the force exceeds an expected value, for example if a substrate jams in the respective drawer 3, the process is interrupted to prevent damage to substrates 4 to avoid. The sensor 26, 33 is designed in particular as an optical sensor or as a distance sensor.
Bei der Entladung der Substrate 4 aus einem Schubfach 3 des Substratmagazins 2 ergeben sich außerdem die folgenden Möglichkeiten: Zum einen ist es möglich, dass jedes einzelne auf das Transportband 8 geschobene Substrat 4 durch das Transportband 8 sofort weitergefahren und der weiteren Verwendung zur Verfügung gestellt wird. Außerdem ist es möglich, dass durch den Greifarm zunächst alle Substrate 4 aus einem Schubfach 3 auf dem Transportband 8 nacheinander positioniert werden. Insbesondere wird nach jedem Positionieren eines Substrates das Transportband 8 betrieben, sodass der Greifarm ein aus dem Substratmagazin 2 entferntes Substrat stets an der gleichen Stelle ablegt, von der das jeweilige Substrat dann durch das Transportband 8 weitergefördert wird, bis alle Substrate 4 aus dem Schubfach 3 auf dem Transportband 8 liegen. Erst anschließend werden die Substrate zusammen von dem Transportband der weiteren Verwendung einzeln oder gemeinsam zugeführt. Außerdem ist es durch das vorteilhafte Substratmagazinsystem 1 möglich, wie zuvor bereits erwähnt, mehrere Substrate 4 aus einem Schubfach 3 gleichzeitig mithilfe mehrerer Greifhaken 13 herauszuziehen und nebeneinander auf dem Transportband 8 zu platzieren. When the substrates 4 are unloaded from a drawer 3 of the substrate magazine 2, the following options also arise: On the one hand, it is possible that each individual item can be placed on the Conveyor belt 8 pushed substrate 4 is immediately moved further by the conveyor belt 8 and made available for further use. In addition, it is possible for all substrates 4 from a drawer 3 to be positioned one after the other on the conveyor belt 8 by the gripper arm. In particular, after each positioning of a substrate, the conveyor belt 8 is operated, so that the gripping arm always deposits a substrate removed from the substrate magazine 2 at the same point from which the respective substrate is then conveyed by the conveyor belt 8 until all substrates 4 are removed from the drawer 3 lie on the conveyor belt 8. Only then are the substrates fed together by the conveyor belt for further use, either individually or together. In addition, the advantageous substrate magazine system 1 makes it possible, as already mentioned above, to pull several substrates 4 out of a drawer 3 at the same time with the aid of several gripping hooks 13 and to place them next to one another on the conveyor belt 8.
Befindet sich in dem Substratmagazin 2 ein Substratstapel 29, so wird gemäß dem Ausführungsbeispiel in Figur 3B vorgegangen, um den Substratstapel 29 zu vereinzeln. Üblicherweise sind die in dem Substratmagazin 2 als Substratstapel 29 vorhandenen Substrate 4 in ihren Abmaßen bekannt. Diese Werte werden für die Positionsbestimmung für den Greifarm und für den Saugkopf 19 verwendet. Zwar ist in der Regel bekannt, welche Länge die Substrate 4 in Schieberichtung aufweisen, jedoch ist nicht unbedingt bekannt, an welcher Stelle sich der Substratstapel 29 in dem Substratmagazin 2 befindet. Weil der Substratstapel 29 üblicherweise von Hand in das Magazin eingelegt wird, ist davon auszugehen, dass der Substratstapel 29 nicht lagekontrolliert in dem Substratmagazin 2 vorliegt. Für die sichere Entnahme eines Substrats 4 beziehungsweise für die Vereinzelung der Substrate 4 ist dabei die Position des Substratstapels 29 zunächst zu bestimmen. If there is a substrate stack 29 in the substrate magazine 2, the procedure in accordance with the exemplary embodiment in FIG. 3B is used to separate the substrate stack 29. The dimensions of the substrates 4 present in the substrate magazine 2 as a substrate stack 29 are usually known. These values are used to determine the position of the gripper arm and for the suction head 19. Although it is generally known what length the substrates 4 have in the sliding direction, it is not necessarily known at which point the substrate stack 29 is located in the substrate magazine 2. Because the substrate stack 29 is usually inserted into the magazine by hand, it can be assumed that the substrate stack 29 is not present in the substrate magazine 2 in a position-controlled manner. For the safe removal of a substrate 4 or for the separation of the substrates 4, the position of the substrate stack 29 must first be determined.
Um die genaue Position zu bestimmen, ist ein Sensor 33 dem Saugkopf 19 zugeordnet, der von oben auf die zu entnehmenden Substrate blickt und der insbesondere wie der Sensor 26 ausgebildet ist. Wird der Saugkopf 19 über den Substratstapel 29 gefahren, erkennt der Sensor 33 die Vorderkante des Substratstapels 29. Das Steuergerät 34 addiert automatisch die Hälfte der Substratlänge, die dem Steuergerät 34 bekannt ist, hinzu und positioniert so den Saugkopf 19 mittig über dem obersten Substrat 4 des Substratstapels 29. Anschließend wird das Substrat 4 wie zuvor beschrieben gegriffen und aus dem Substratmagazin 2 herausgeführt. Ein Beladen des Substratmagazins 2 mithilfe der Vakuumeinrichtung 18 ist ebenfalls möglich, wobei dann beispielweise die Lage des Substrats auf dem Transportband 8 mittels des Sensors 33 erfasst und der Vakuumkopf 19 optional zum Greifen des Substrats 4 angesteuert wird. In order to determine the exact position, a sensor 33 is assigned to the suction head 19, which looks from above at the substrates to be removed and which, in particular, is designed like the sensor 26. If the suction head 19 is moved over the substrate stack 29, the sensor 33 detects the front edge of the substrate stack 29. The control device 34 automatically adds half of the substrate length known to the control device 34 and thus positions the suction head 19 in the center above the top substrate 4 of the substrate stack 29. Subsequently, the substrate 4 is gripped as described above and guided out of the substrate magazine 2. Loading of the substrate magazine 2 with the aid of the vacuum device 18 is also possible, in which case For example, the position of the substrate on the conveyor belt 8 is detected by means of the sensor 33 and the vacuum head 19 is optionally controlled for gripping the substrate 4.
Vorzugsweise weist das Substratmagazinsystem 1 mehrere Substratmagazine 2 auf, von denen vorzugsweise zumindest zwei unterschiedlich ausgebildet sind. So ist eines beispielsweise dazu ausgebildet, einzelne Substrate aufzunehmen, das andere dazu, Substratstapel aufzunehmen. Vorzugsweise weisen die Substratmagazine 2 jeweils zumindest ein auslesbares Identifikationselement auf, wie beispielsweise einen aufgedruckten eindimensionalen oder zweidimensionalen Code, insbesondere QR-Code, oder einen auslesbaren Chip, insbesondere RFID-Chip. Die Be- und Entladeeinrichtung 7 weist dann bevorzugt ein Auslesegerät zum Erfassen des jeweiligen Codes beziehungsweise Chips auf und bestimmt in Abhängigkeit von dem erfassten Code die Bedienung des erfassten Substratmagazins 2, insbesondere dessen Typ, sowie optional dessen Belegung mit Substraten. Dadurch wird erreicht, dass die Be- und Entladeeinrichtung 2 jede Art von Substratmagazinen automatisiert handhaben und maximal zu jeder Zeit ausgelastet werden kann. The substrate magazine system 1 preferably has a plurality of substrate magazines 2, of which at least two are preferably designed differently. For example, one is designed to receive individual substrates, the other to receive substrate stacks. The substrate magazines 2 preferably each have at least one readable identification element, such as, for example, a printed one-dimensional or two-dimensional code, in particular a QR code, or a readable chip, in particular an RFID chip. The loading and unloading device 7 then preferably has a read-out device for capturing the respective code or chip and, depending on the captured code, determines the operation of the captured substrate magazine 2, in particular its type, and optionally its occupancy with substrates. It is thereby achieved that the loading and unloading device 2 can handle any type of substrate magazine in an automated manner and can be fully utilized at any time.

Claims

ANSPRÜCHE EXPECTATIONS
1. Be- und Entladeeinrichtung (7) für ein Substratmagazin (2), wobei das Substratmagazin (2) mehrere Schubfächer (3) aufweist, in welche jeweils mehrere Substrate (4) zur Lagerung oder Zwischenlagerung einschiebbar sind, mit zumindest einem ansteuerbaren Transportband (8), auf welchem Substrate (4) ablegbar sind, und mit zumindest einem ansteuerbaren Greifarm (11), der dazu ausgebildet ist, Substrate (4) von dem Transportband (8) in ein Schubfach (3) des Substratmagazins einzuschieben oder aus dem Schubfach (3) auf das Transportband (8) herauszuschieben, wobei das Transportband (8) und der Greifarm (11) an einem gemeinsamen und beweglich gelagerten Träger (17) angeordnet sind, dadurch gekennzeichnet, dass der Greifarm (11) zumindest im Wesentlichen unterhalb des Transportbands (8) angeordnet ist, um ein Substrat (4) von unten zu greifen, und dass oberhalb des Transportbands (8) ein beweglicher Vakuumgreifer (18) angeordnet ist, der dazu ausgebildet ist, ein Substrat (4) in dem Substratmagazin (2) und/oder auf dem Transportband (8) von oben zu greifen und zu bewegen. 1. Loading and unloading device (7) for a substrate magazine (2), the substrate magazine (2) having several drawers (3) into which several substrates (4) can be inserted for storage or temporary storage, with at least one controllable conveyor belt ( 8), on which substrates (4) can be placed, and with at least one controllable gripping arm (11) which is designed to push substrates (4) from the conveyor belt (8) into a drawer (3) of the substrate magazine or from the drawer (3) slide out onto the conveyor belt (8), the conveyor belt (8) and the gripping arm (11) being arranged on a common and movably mounted carrier (17), characterized in that the gripping arm (11) is at least substantially below the Conveyor belt (8) is arranged to grip a substrate (4) from below, and that above the conveyor belt (8) a movable vacuum gripper (18) is arranged, which is designed to hold a substrate (4) in the substrate to grab and move the magazine (2) and / or on the conveyor belt (8) from above.
2. Be- und Entladeeinrichtung (7) nach Anspruch 1, dadurch gekennzeichnet, dass der Vakuumgreifer (18) zum Vereinzeln von Substraten (4) von einem Substratstapel (29) ausgebildet ist. 2. Loading and unloading device (7) according to claim 1, characterized in that the vacuum gripper (18) is designed for separating substrates (4) from a substrate stack (29).
3. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Vakuumgreifer (18) dazu ausgebildet ist, in das Substratmagazin (2) einzufahren. 3. Loading and unloading device (7) according to one of the preceding claims, characterized in that the vacuum gripper (18) is designed to move into the substrate magazine (2).
4. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Vakuumgreifer (18) an dem Träger (17) höhenverstellbar gelagert ist. 4. loading and unloading device (7) according to any one of the preceding claims, characterized in that the vacuum gripper (18) is mounted on the carrier (17) adjustable in height.
5. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Greifarm (11) zumindest einen Greifhaken (13) aufweist, der von einer Greifposition zum Verschieben eines Substrats (4) in eine Löseposition unterhalb des Substrats (4) zum Verschieben des Greifarms (11) unabhängig von dem Substrat (4) verlagerbar ist. 5. Loading and unloading device (7) according to one of the preceding claims, characterized in that the gripping arm (11) has at least one gripping hook (13) which moves from a gripping position for moving a substrate (4) into a release position below the substrate ( 4) for moving the gripper arm (11) can be moved independently of the substrate (4).
6. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Greif arm (11) mehrere Greifhaken (13) aufweist, die in Schieberichtung beabstandet voneinander an dem Greifarm (11) angeordnet sind. 6. Loading and unloading device (7) according to one of the preceding claims, characterized in that the gripping arm (11) has a plurality of gripping hooks (13) which are arranged spaced apart from one another in the sliding direction on the gripping arm (11).
7. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zumindest einer der Greifhaken (13) an dem Greifarm (11) längsverschieblich gelagert ist. 7. Loading and unloading device (7) according to one of the preceding claims, characterized in that at least one of the gripping hooks (13) is mounted on the gripping arm (11) so as to be longitudinally displaceable.
8. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Greifarm (11) zumindest einen Sensor (26) zum Erfassen eines Substrats (4) aufweist. 8. Loading and unloading device (7) according to one of the preceding claims, characterized in that the gripping arm (11) has at least one sensor (26) for detecting a substrate (4).
9. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass dem Greifarm (11) zumindest ein Wegmesssensor ( 27) zugeordnet ist. 9. Loading and unloading device (7) according to one of the preceding claims, characterized in that the gripping arm (11) is assigned at least one displacement sensor (27).
10. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass dem Greifarm (11) zumindest ein insbesondere elektromotorischer Aktuator (15,24) zu dessen Verschiebung und/oder zum Verlagern des zumindest einen Greifhakens (13) zugeordnet ist. 10. Loading and unloading device (7) according to one of the preceding claims, characterized in that the gripping arm (11) is assigned at least one, in particular an electromotive actuator (15, 24) for its displacement and / or for displacing the at least one gripping hook (13) is.
11. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, gekennzeichnet durch ein Steuergerät (34), das zumindest mit dem Aktuator (15), dem Sensor (26,33) und dem Wegmesssensor (27) signaltechnisch verbunden und dazu ausgebildet ist, den Aktuator (15) in Abhängigkeit von von dem Sensor (26,33) erfassten Daten dazu anzusteuem, Substrate (4) aus einem Schubfach (3) des Substratmagazins (2) einzeln oder gemeinsam auf das Transportband (8) herauszuziehen oder von dem Transportband (8) in das Schubfach (3) hineinzuschieben. 11. Loading and unloading device (7) according to one of the preceding claims, characterized by a control unit (34) which is signal-connected to at least the actuator (15), the sensor (26, 33) and the displacement sensor (27) and designed for this purpose is to control the actuator (15) as a function of the data recorded by the sensor (26, 33) to pull substrates (4) out of a drawer (3) of the substrate magazine (2) individually or together onto the conveyor belt (8) or from push the conveyor belt (8) into the drawer (3).
12. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Steuergerät (34) dazu ausgebildet ist, ein einzelnes Substrat (4) von dem Transportband (8) auf eine vorgegebene Position in dem Schubfach (3) zu schieben oder von einer vorgegebenen Position aus dem Schubfach (3) zu entnehmen. 12. Loading and unloading device (7) according to one of the preceding claims, characterized in that the control device (34) is designed to move a single substrate (4) from the conveyor belt (8) to a predetermined position in the drawer (3) to slide or to be removed from a predetermined position from the drawer (3).
13. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Steuergerät (34) dazu ausgebildet ist, mehrere Substrate (4) in einem Schubfach (3) des Substratmagazins (2) beabstandet zueinander anzuordnen. 13. Loading and unloading device (7) according to one of the preceding claims, characterized in that the control device (34) is designed to arrange several substrates (4) in a drawer (3) of the substrate magazine (2) spaced from one another.
14. Be- und Entladeeinrichtung (7) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Steuergerät (34) dazu ausgebildet ist, den Aktuator (15) und das Transportband (8) derart anzusteuem, dass Substrate (4) beabstandet zueinander auf dem Transportband (8) positioniert werden. 14. Loading and unloading device (7) according to one of the preceding claims, characterized in that the control device (34) is designed to control the actuator (15) and the conveyor belt (8) in such a way that substrates (4) are spaced apart from one another positioned on the conveyor belt (8).
15. Substratmagazinsystem (1) für Bestückungslinien von flächigen Substraten (4), wie15. Substrate magazine system (1) for assembly lines of flat substrates (4), such as
Leiterplatten, Solarzellen oder Wafer, mit zumindest einem Substratmagazin (2), das mehrere Schubfächer (3) aufweist, in welchen jeweils mehrere Substrate (4) und/oder zumindest ein Substratstapel (29) zur Lagerung oder Zwischenlagerung anordenbar sind, gekennzeichnet durch eine Be- und Entladeeinrichtung (7) gemäß einem der Ansprüche 1 bis 14. Printed circuit boards, solar cells or wafers, with at least one substrate magazine (2), which has several drawers (3), in each of which several substrates (4) and / or at least one substrate stack (29) can be arranged for storage or temporary storage, characterized by a loading - and unloading device (7) according to one of claims 1 to 14.
PCT/EP2020/081191 2019-11-05 2020-11-05 Loading and unloading device for a substrate hopper, substrate hopper system WO2021089735A1 (en)

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CN202080076808.1A CN114641854A (en) 2019-11-05 2020-11-05 Loading and unloading device for substrate magazine and substrate magazine system
EP20803149.2A EP4055626A1 (en) 2019-11-05 2020-11-05 Loading and unloading device for a substrate hopper, substrate hopper system

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