WO2021019700A1 - Récipient de stockage de substrat - Google Patents

Récipient de stockage de substrat Download PDF

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Publication number
WO2021019700A1
WO2021019700A1 PCT/JP2019/029898 JP2019029898W WO2021019700A1 WO 2021019700 A1 WO2021019700 A1 WO 2021019700A1 JP 2019029898 W JP2019029898 W JP 2019029898W WO 2021019700 A1 WO2021019700 A1 WO 2021019700A1
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WO
WIPO (PCT)
Prior art keywords
opening
valve body
housing
substrate storage
container body
Prior art date
Application number
PCT/JP2019/029898
Other languages
English (en)
Japanese (ja)
Inventor
忠利 井上
Original Assignee
ミライアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社 filed Critical ミライアル株式会社
Priority to PCT/JP2019/029898 priority Critical patent/WO2021019700A1/fr
Priority to US17/630,769 priority patent/US20220199439A1/en
Priority to JP2021535395A priority patent/JPWO2021020460A1/ja
Priority to KR1020227001287A priority patent/KR20220041078A/ko
Priority to PCT/JP2020/029110 priority patent/WO2021020460A1/fr
Priority to CN202080047895.8A priority patent/CN114080666A/zh
Priority to TW109125845A priority patent/TWI846917B/zh
Publication of WO2021019700A1 publication Critical patent/WO2021019700A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Definitions

  • the present invention relates to a substrate storage container used for storing, storing, transporting, transporting, etc. a substrate made of a semiconductor wafer or the like.
  • Patent Document 1 As a substrate storage container for storing a substrate made of a semiconductor wafer and transporting it in a process in a factory, a container having a container body and a lid has been conventionally known (for example, Patent Document 1). -See Patent Document 2).
  • One end of the container body has an opening peripheral portion on which the container body opening is formed.
  • the other end of the container body has a closed tubular wall.
  • a substrate storage space is formed in the container body.
  • the board storage space is formed by being surrounded by a wall portion, and can store the board.
  • the lid is removable from the peripheral edge of the opening, and the opening of the container body can be closed.
  • the side substrate support portions are provided on the wall portion so as to form a pair in the substrate storage space.
  • the side substrate support portion can support the edge portion of the substrate in a state where adjacent substrates are separated from each other at a predetermined interval and arranged in parallel when the container body opening is not closed by the lid.
  • a front retainer is provided in the part of the lid that faces the board storage space when the opening of the container body is closed.
  • the front retainer can support the edge of the substrate when the container body opening is closed by the lid.
  • the back side substrate support portion is provided on the wall portion so as to be paired with the front retainer.
  • the back side substrate support portion can support the edge portion of the substrate.
  • the container body is provided with a check valve.
  • Gas purging is performed from the outside of the container body to the substrate storage space through the check valve with dry air (hereinafter referred to as purge gas) from which inert gas such as nitrogen or water is removed (1% or less).
  • purge gas dry air
  • the check valve prevents the gas filled in the substrate storage space from leaking due to the gas purge.
  • the check valve is provided with a filter, which removes particles, organic substances, moisture and the like contained in the gas flowing in from the outside of the container body through the filter.
  • a filter unit for air supply and a filter unit for exhaust air are used.
  • the role of the exhaust filter unit is important.
  • An object of the present invention is to provide a substrate storage container provided with a filter portion which can efficiently perform gas purging by purging gas injected into the container storage space and in which cleaning water does not easily enter the inside of the filter portion. ..
  • the present invention has an opening peripheral edge portion in which a container body opening is formed at one end, and has a tubular wall portion in which the other end is closed, and the substrate can be stored by the inner surface of the wall portion. It is removable from the container body in which the substrate storage space communicating with the container body opening is formed and the opening peripheral edge portion, and the container body opening can be closed in a positional relationship surrounded by the opening peripheral edge portion. It is attached to the lid body and the lid body, can be in contact with the lid body and the opening peripheral edge portion, and is interposed between the opening peripheral edge portion and the lid body to the opening peripheral edge portion and the lid body.
  • a ventilation path that includes a seal member that closes the opening of the container body together with the lid by being in close contact with the container body, and that can communicate the substrate storage space and the space outside the container body, and the ventilation. It has a filter arranged in the path and a housing forming the ventilation path, and is arranged in the container body, and gas passes between the space outside the container body and the substrate storage space through the filter.
  • the filter unit includes a possible filter unit, and the filter unit includes an exhaust filter unit capable of flowing gas from the substrate storage space to the space outside the container body, and the substrate storage space from the space outside the container body.
  • the housing of the exhaust filter portion has an air supply filter portion capable of flowing gas to the container body, and has an outer opening opening toward the space outside the container body, and is for exhaust.
  • the housing of the filter portion is inserted into the outer opening and is movable between a closed position in the outer opening that closes the outer opening and an open position that opens the outer opening.
  • a urged member that is connected to the valve body and is supported by the housing of the exhaust filter portion so as to be movable inside the housing of the exhaust filter portion, and guides the movement of the valve body. And the urging member that urges the urged member so that the valve body moves to the closed position, and the effective area of the filter of the exhaust filter portion is the air supply filter.
  • the present invention relates to a substrate storage container having a size larger than the effective area of the filter.
  • valve body is made of an elastically deformable material. Further, it is preferable that the valve body is detachably fixed to the urged member. Further, it is preferable that the urged member is formed with a gas flow passage through which gas can flow. Further, it is preferable that the urging member is composed of a spring, and the diameter of the spring is larger than the diameter of the outer opening.
  • the housing includes an outer housing portion and an inner housing portion that is arranged inside the outer housing portion and is movably supported by the outer housing portion with respect to the outer housing portion.
  • the portion preferably has the outer opening.
  • the urged member includes a urged member main body portion having a valve body fixing portion to which the valve body is fixed, and the inner housing portion has the urged member main body portion slid on the inner housing portion. It is preferable to include a tubular portion having an inner peripheral sliding surface on which the main body of the urged member is supported, and an outer opening forming portion integrally molded with the tubular portion.
  • the outer opening has a tapered shape whose diameter expands toward the space outside the container body, and the valve body has a through hole closing portion that closes the outer opening at the closing position.
  • the outer peripheral surface of the through hole closing portion has a tapered shape whose diameter expands toward the space outside the container body, and the through hole closing per unit length in the axial direction of the through hole closing portion.
  • the taper ratio of the outer peripheral surface of the portion is preferably larger than the taper ratio of the outer opening per unit length in the axial direction of the outer opening.
  • FIG. 5 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to the embodiment of the present invention. It is an upper perspective view which shows the container main body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is a lower perspective view which shows the container main body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is a side sectional view which shows the container main body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is a side sectional view which shows the air supply filter part 80 of the substrate storage container 1 which concerns on embodiment of this invention. It is a lower perspective view which shows the air supply filter part 80 of the substrate storage container 1 which concerns on embodiment of this invention.
  • FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1.
  • FIG. 2 is an upward perspective view showing the container body 2 of the substrate storage container 1.
  • FIG. 3 is a downward perspective view showing the container body 2 of the substrate storage container 1.
  • FIG. 4 is a side sectional view showing the container body 2 of the substrate storage container 1.
  • the direction from the container body 2 to the lid 3 (the direction from the upper right to the lower left in FIG. 1) described later is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are collectively defined as the front-back direction D1.
  • the direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1), which will be described later, is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22, which are collectively referred to as the vertical direction D2.
  • the direction from the second side wall 26 to the first side wall 25 (the direction from the lower right to the upper left in FIG. 1), which will be described later, is defined as the left direction D31, and the opposite direction is defined as the right direction D32.
  • the main drawings show arrows pointing in these directions.
  • the substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, a glass wafer, a sapphire wafer, or the like, and is a thin one used in industry.
  • the substrate W in this embodiment is a silicon wafer having a diameter of 300 mm.
  • the substrate storage container 1 can be used as an in-process container for accommodating a substrate W made of a silicon wafer as described above and transporting it in a process in a factory, or by land transportation means, air transportation means, and shipping. It is used as a shipping container for transporting a substrate by a transportation means such as a means, and is composed of a container body 2 and a lid 3.
  • the container body 2 includes a substrate support plate-shaped portion 5 as a side substrate support portion and a back side substrate support portion 6 (see FIG. 2 and the like), and the lid body 3 serves as a lid side substrate support portion. It has a front retainer (not shown).
  • the container body 2 has a tubular wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed by being surrounded by the wall portion 20.
  • a substrate support plate-like portion 5 is arranged in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of boards W can be stored in the board storage space 27.
  • the substrate support plate-shaped portions 5 are provided on the wall portions 20 so as to form a pair in the substrate storage space 27.
  • the substrate support plate-shaped portion 5 abuts on the edges of the plurality of substrates W to separate the adjacent substrates W from each other at predetermined intervals. It is possible to support the edges of a plurality of substrates W in a parallel state.
  • the back-side substrate support portion 6 is integrally molded with the substrate support plate-shaped portion 5.
  • the back side substrate support portion 6 (see FIG. 2 and the like) is provided on the wall portion 20 so as to be paired with a front retainer (not shown) described later in the substrate storage space 27.
  • the back side substrate support portion 6 can support the rear portion of the edge portions of the plurality of substrate Ws by abutting against the edge portions of the plurality of substrate Ws when the container body opening 21 is closed by the lid body 3. Is.
  • the lid 3 is removable from the opening peripheral edge 28 (FIG. 1 and the like) forming the container body opening 21, and the container body opening 21 can be closed.
  • a front retainer (not shown) is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • the front retainer is arranged so as to be paired with the back side substrate support portion 6 inside the substrate storage space 27.
  • the front retainer can support the front portion of the edge portion of the plurality of substrates W by contacting the edge portions of the plurality of substrate Ws when the container body opening 21 is closed by the lid body 3.
  • the front retainer supports a plurality of boards W in cooperation with the back side board support portion 6, thereby supporting adjacent boards W to each other. Hold in parallel with a gap.
  • the substrate storage container 1 is made of a resin such as a plastic material, and unless otherwise specified, the resin of the material may be, for example, polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, or polybutylene.
  • Thermoplastic resins such as terephthalate, polyetheretherketone, and liquid crystal polymers, and their alloys can be mentioned.
  • conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added to the resins of these molding materials. It is also possible to add glass fiber, carbon fiber or the like in order to increase the rigidity.
  • FIG. 5 is a side sectional view showing the air supply filter portion 80 of the substrate storage container 1.
  • FIG. 6 is a downward perspective view showing the air supply filter unit 80 of the substrate storage container 1.
  • FIG. 7 is an exploded perspective view showing the air supply filter unit 80 of the substrate storage container 1.
  • FIG. 8 is a side sectional view showing the exhaust filter portion 90 of the substrate storage container 1.
  • FIG. 9 is an exploded perspective view showing the exhaust filter portion 90 of the substrate storage container 1.
  • the wall portion 20 of the container main body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally molded.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral edge portion 28 forming a substantially rectangular container body opening 21.
  • the opening peripheral edge 28 is provided at one end of the container body 2, and the back wall 22 is located at the other end of the container body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 is a substrate storage space surrounded by these. 27 is formed.
  • the container body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 boards W can be stored in the board storage space 27.
  • the latch engaging recesses 231A and 231B recessed outward of the substrate storage space 27. , 241A and 241B are formed.
  • a total of four latch engaging recesses 231A, 231B, 241A, and 241B are formed in the vicinity of the left and right ends of the upper wall 23 and the lower wall 24.
  • ribs 235 are integrally molded with the upper wall 23.
  • the rib 235 increases the rigidity of the container body 2.
  • a top flange 236 is fixed to the central portion of the upper wall 23.
  • the top flange 236 is a member that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in AMHS (automatic wafer transfer system), PGV (wafer substrate transfer carriage), or the like.
  • a bottom plate 244 is fixed to the lower wall 24.
  • the bottom plate 244 has a substantially rectangular plate shape that is arranged so as to face substantially the entire lower surface that constitutes the outer surface of the lower wall 24, and is fixed to the lower wall 24.
  • two types of through holes are formed at the four corners of the lower wall 24.
  • the two through holes at the front of the lower wall 24 are exhaust holes 243 for discharging the gas inside the container body 2
  • the two through holes at the rear are the container body 2
  • An air supply filter unit 80 as an additional component is arranged in the through hole as the air supply hole 242, and an exhaust filter unit 90 is arranged in the through hole as the exhaust hole 243. That is, the gas flow path inside the air supply filter unit 80 and the exhaust filter unit 90 constitutes a part of the ventilation path capable of communicating the substrate storage space 27 and the space outside the container body 2. Further, the air supply filter unit 80 and the exhaust filter unit 90 are arranged on the wall portion 20, and the air supply filter unit 80 and the exhaust filter unit 90 have a space outside the container body 2. Gas can pass through the substrate storage space 27.
  • the air supply filter unit 80 communicates with the internal space of the gas ejection nozzle unit 8, and the purge gas supplied to the air supply filter unit 80 passes through the internal space of the gas ejection nozzle unit 8 to the substrate storage space 27. It is configured to be supplied.
  • the air supply filter portion 80 includes an inner opening forming portion 81 as a filter portion housing, a first housing portion 82, a nozzle portion 83, a second housing portion 84, and a filter 85.
  • the inner opening forming portion 81, the first housing portion 82, the nozzle portion 83, and the second housing portion 84 are made of separate bodies composed of separate and independent parts. Therefore, the inner opening forming portion 81, the first housing portion 82, and the second housing portion 84 are formed separately from the nozzle portion 83.
  • the air passage 801 has a valve body accommodating chamber 804 for accommodating the valve body 86 by the filter portion housing composed of the inner opening forming portion 81, the first housing portion 82, the nozzle portion 83, and the second housing portion 84. Therefore, a ventilation path 801 that can communicate between the substrate storage space 27 and the space outside the container body 2 is formed. In the air supply filter unit 80, gas can pass from the space outside the container body 2 to the substrate storage space 27 through the filter 85.
  • the inner opening forming portion 81 has a disk shape. As shown in FIG. 5, the central portion of the inner opening forming portion 81 has a circular protruding portion 811 projecting upward D21. The peripheral edge portion of the inner opening forming portion 81 has a flat plate-shaped annular peripheral edge portion 812. As shown in FIG. 7, a large number of through holes 806 are formed in the circular protrusion 811 radially from the center of the circular protrusion 811. The large number of through holes 806 form the air passage 801. The openings at the upper ends of the large number of through holes 806 form an opening 807 on the substrate storage space side that opens into the substrate storage space 27 and is connected to the substrate storage space 27. Therefore, the ventilation path 801 has an opening 807 on the substrate storage space side.
  • the first housing portion 82 has a tubular portion 821, an end flange portion 822, and an end plate-shaped portion 823.
  • the tubular portion 821 has a cylindrical shape, and a disk-shaped end plate-shaped portion 823 is integrally formed and connected to the upper end portion of the tubular portion 821.
  • a male screw portion is threaded on the side surface (outer peripheral surface) of the tubular portion 821.
  • a small flange portion 824 is integrally molded with the tubular portion 821 on a side surface portion of the tubular portion 821 and a portion above the male screw portion.
  • the end flange portion 822 is provided integrally with the tubular portion 821 at the upper end portion of the tubular portion 821 above the portion of the tubular portion 821 where the small flange portion 824 is present.
  • the end flange portion 822 has a protrusion 825 extending upward to D21.
  • the end flange portion 822 is fixed to the annular peripheral edge portion 812 by welding the protrusion 825 and the portion of the annular peripheral edge portion 812 in which the recess 815 is formed in the inner opening forming portion 81.
  • the first housing portion 82 is connected to the inner opening forming portion 81 in a coaxial positional relationship with the inner opening forming portion 81.
  • the nozzle portion 83 has a tubular portion 831 and an externally projecting portion 832.
  • the tubular portion 831 has a cylindrical shape.
  • the inner peripheral surface of the tubular portion 831 constitutes an inner peripheral sliding surface on which the outer peripheral surface of the valve body main body portion 860 of the valve body 86, which will be described later, slides.
  • the lower portion of the outer peripheral surface of the tubular portion 831 has an outer diameter large diameter portion 833 having a large outer diameter.
  • the lower end of the outer diameter large diameter portion 833 is integrally molded and connected to the large diameter portion bottom portion 834 provided so as to reduce the inner diameter of the lower end portion of the outer diameter large diameter portion 833, and is connected to the large diameter portion bottom portion.
  • the 834 and the external protrusion 832 are connected by integral molding.
  • the outer diameter of the upper part of the outer diameter large diameter portion 833 is slightly smaller than the inner diameter of the tubular portion 821 of the first housing portion 82, and although it does not appear in FIG. 5, the outer diameter of the upper part of the outer diameter large diameter portion 833 A gap is formed between the surface and the inner peripheral surface of the tubular portion 821.
  • the nozzle portion 83 is placed on the axial center of the nozzle portion 83 and the tubular portion 821 while maintaining the positional relationship in which the axial centers of the nozzle portion 83 and the tubular portion 821 are parallel to the tubular portion 821.
  • a cylindrical through hole is formed in the center of the bottom portion 834 of the large diameter portion, and this through hole constitutes the exterior space side accommodation chamber opening 803 as an outer opening.
  • the upper surface of the large-diameter bottom portion 834 and the portion of the nozzle portion 83 forming the exterior space side accommodation chamber opening 803 form a valve seat to which the seal wall 861 as the seal portion and the convex portion 8611 abut.
  • the external protrusion 832 has a cylindrical shape with a short axial length.
  • the outer diameter and inner diameter of the outer protruding portion 832 are smaller than the outer diameter and inner diameter of the outer diameter large diameter portion 833, respectively.
  • the opening at the lower end of the external protrusion 832 constitutes the external space side opening 802.
  • the exterior space side opening 802 constitutes the ventilation path 801. Therefore, the ventilation passage 801 has an opening 802 on the external space side.
  • the second housing portion 84 has a tubular portion 841, an end inward projecting portion 842, and an end axially projecting portion 843.
  • the tubular portion 841 has a cylindrical shape.
  • the inner diameter of the tubular portion 841 is larger than the outer diameter of the tubular portion 821 of the first housing portion 82.
  • the first housing portion 82 is arranged in the space formed by the inner peripheral surface of the tubular portion 841 of the second housing portion 84 in a coaxial positional relationship with the tubular portion 841 of the second housing portion 84. Has been done.
  • a female screw portion is engraved on the inner peripheral surface of the tubular portion 841.
  • the male threaded portion of the tubular portion 821 of the first housing portion 82 is screwed into the female threaded portion.
  • the second housing portion 84 is fixed to the first housing portion 82.
  • the end inward projecting portion 842 is integrally molded and provided at the lower end portion of the tubular portion 841.
  • the end inwardly projecting portion 842 projects inward in the radial direction of the tubular portion 841 from the lower end portion of the tubular portion 841 and has an annular plate shape.
  • the end axially projecting portion 843 projects downward from the lower surface of the end inward projecting portion 842 to the downward D22 and has an annular shape.
  • a rib portion 846 that protrudes outward from the end axial direction projecting portion 843 to the tubular portion 841 is provided.
  • Four rib portions 846 are formed at equal intervals in the circumferential direction of the tubular portion 841.
  • the portion of the nozzle portion 83 which is the portion around the external space side opening 802, that is, the lower end portion of the external protruding portion 832 protrudes in the downward direction D22, which is the direction in which the ventilation passage 801 opens in the external space side opening 802. ing.
  • the lower end portion of the external projecting portion 832 and the end axial direction projecting portion 843 form a U-shaped portion that opens downward, and the contact pad 88 is provided in the U-shaped portion. It is fitted.
  • the close contact pad 88 is formed in an annular shape having a coaxial positional relationship with the opening 802 on the external space side, and is the tip portion of the second housing portion 84 in the outward direction of the storage space 27 (second housing portion 84 in FIG. 5).
  • the surface of the tip end portion of the close contact pad 88 in the outward direction (the lowermost lower surface of the close contact pad 88 in FIG. 7) is located lower than the lowermost end of the contact pad 88.
  • the tip of the close contact pad 88 in the outward direction of the storage space 27 (the lowermost surface of the close contact pad 88 in FIG. 5) constitutes a sealing surface that is in close contact with the purge port (gas injection port) described later.
  • the close contact pad 88 prevents gas leakage between the purge port and the sealing surface (not shown).
  • Polycarbonate which generates a small amount of outgas, was used for the nozzle portion 83.
  • resins such as cycloolefin polymer, polyetherimide, and polyetheretherketone can be used.
  • the adhesion pad 88 for example, a resin such as polybutylene terephthalate or polyethylene, an elastomer such as polyethylene elastomer or polyolefin elastomer, or a rubber material such as silicon rubber or fluororubber can be used.
  • the lower end surface of the close contact pad 88 is textured and roughened.
  • Fixing of the first housing portion 82 to the lower wall 24 is performed via an O-ring 89 mounted in a groove formed on the side surface of the first housing portion 82.
  • an O-ring 89 is used between the first housing portion 82 and the lower wall 24 to seal between the lower wall 24 and the nozzle portion 93. Will be done.
  • the ventilation passage 801 is formed by the inner opening forming portion 81, the first housing portion 82, the nozzle portion 83, and the second housing portion 84 that form the filter portion housing. More specifically, the ventilation passage 801 continues from the substrate storage space side opening 807 of the through hole 806 of the inner opening forming portion 81 to the valve body storage chamber 804 and then to the outer space side opening 802 of the nozzle portion 83. There is.
  • the valve body 86 is made of an elastically deformable material, and specifically, various thermoplastic elastomers such as elastically deformable polyester and polyolefin are made of fluororubber. It may be made of silicon rubber or the like, and in this embodiment, for example, thermoplastic is used as a desirable material.
  • the valve body 86 has a substantially cylindrical valve body main body portion 860 and a convex portion 8611. One end of the valve body 86 is closed by a seal wall 861 as a seal portion constituting the valve body main body portion 860. The outer surface of the seal wall 861 constitutes the seal surface 862. As shown in FIG.
  • the seal wall 861 is provided with a convex portion 8611 protruding from the seal wall 861.
  • the convex portion 8611 is provided by being integrally molded with the seal wall 861, and has a cylindrical shape having a shape and dimensions that fits into the outer space side accommodation chamber opening 803. As shown in FIG. 5, by inserting and fitting the convex portion 8611 into the external space side accommodation chamber opening 803, the external space side accommodation chamber opening 803 can be closed by the convex portion 8611, and the convex portion 8611 can be closed. By deviating from the external space side accommodation chamber opening 803, the external space side accommodation chamber opening 803 is opened.
  • the height h1 of the convex portion 8611 in the protruding direction is the same as the length h2 in the penetrating direction of the external space side accommodating chamber opening 803 as the outer opening.
  • the exterior space side opening 802 is configured to be wider than the exterior space side accommodation chamber opening 803, so that the opening area of the exterior space side opening 802 is the exterior space side accommodation chamber opening 803. Larger than the opening area.
  • a notch 863 is formed in a portion of the valve body 86 from the central position in the axial direction of the valve body 86 to the other end portion.
  • Two notches 863 are formed at equal intervals in the circumferential direction of the valve body 86.
  • a side convex portion 864 is provided as a rib-shaped portion that protrudes outward from the side surface of the valve body 86 in a semicircular shape.
  • the side convex portion 864 extends from one end to the other end of the valve body 86 on the side surface of the valve body 86.
  • the side convex portion 864 is located between the notch 863 and the notch 863 adjacent to each other on the side surface of the valve body 86.
  • the total length of the valve body 86 in the axial direction of the valve body 86 is shorter than the distance from the upper end of the tubular portion 831 of the nozzle portion 83 to the upper end of the outer diameter large diameter portion 833 of the nozzle portion 83 in the vertical direction D2.
  • the protruding end of the side convex portion 864 is slidable in the axial direction of the tubular portion 831 of the nozzle portion 83 with respect to the inner peripheral surface of the tubular portion 831 of the nozzle portion 83.
  • the valve body 86 Due to this sliding, the valve body 86 has a position (blocking position) where the seal surface 862 abuts on the bottom portion 834 of the large diameter portion to close the opening 803 of the accommodation chamber on the external space side, and the upper end portion of the valve body 86 is the first housing. It is possible to move between the end portion 82 and the position (top position) where the end plate-shaped portion 823 is in contact with the portion 82. Therefore, the valve body 86 has a communication position in which the substrate storage space 27 and the space outside the container body 2 communicate with each other in the valve body storage chamber 804, and the board storage space 27 and the outside of the container body 2 in the valve body storage chamber 804. It can move between a communication cutoff position that cuts off communication with the space.
  • a space forming a ventilation path is secured between the side surface of the valve body 86 and the inner peripheral surface of the tubular portion 831 of the nozzle portion 83.
  • the valve body 86 is formed with a notch 863, the ventilation path is formed even when the upper end portion of the valve body 86 is in contact with the end plate-shaped portion 823 of the first housing portion 82. The space constituting the 801 is secured.
  • the filter 85 has a disk shape.
  • the peripheral edge of the filter 85 is positioned so as to be sandwiched between the end flange portion 822 of the first housing portion 82 and the annular peripheral edge portion 812 of the inner opening forming portion 81, and the end flange portion 822 and the annular peripheral edge portion 812. Is fixed to.
  • the filter 85 is arranged in the ventilation path 801. Therefore, the valve body accommodating chamber 804 is located in the portion of the ventilation path 801 on the side of the space outside the container body 2 with respect to the filter 85.
  • the filter 85 prevents particles and the like from passing through the through hole 806 of the inner opening forming portion 81.
  • the spring 87 as an urging member is composed of a compression spring.
  • the lower end of the spring 87 is in contact with the inner surface of the seal wall 861 of the valve body 86.
  • the upper end portion of the spring 87 is in contact with the end plate-shaped portion 823 of the first housing portion 82.
  • the spring 87 is a convex portion of the valve body 86 so as to prevent gas from flowing into the valve body accommodation chamber 804 from the exterior space side accommodation chamber opening 803.
  • the valve body 86 is urged so that the 8611 is inserted into the exterior space side accommodation chamber opening 803 and the sealing surface 862 of the valve body 86 closes the exterior space side accommodation chamber opening 803.
  • the exhaust filter portion 90 includes an inner opening forming portion 91 as a filter portion housing, a first housing portion 92, a nozzle portion 93, a second housing portion 94, and a filter 95. It has a spring seat 96, a spring 97 as an urging member, a close contact pad 98, and a valve body 99.
  • the inner opening forming portion 91, the first housing portion 92, the nozzle portion 93, and the second housing portion 94 are each formed as a separate body composed of separate and independent parts. Therefore, the inner opening forming portion 91, the first housing portion 92, and the second housing portion 94 are formed separately from the nozzle portion 93.
  • the air passage 901 has a valve body accommodating chamber 904 for accommodating the spring seat 96 by the filter portion housing composed of the inner opening forming portion 91, the first housing portion 92, the nozzle portion 93, and the second housing portion 94. Therefore, a ventilation path 901 that can communicate between the substrate storage space 27 and the space outside the container body 2 is formed. In the exhaust filter unit 90, gas can pass from the substrate storage space 27 to the space outside the container body 2 through the filter 95.
  • the inner opening forming portion 91 has a disk shape.
  • the central portion of the inner opening forming portion 91 has a circular protruding portion 911 protruding upward to D21.
  • the peripheral portion of the inner opening forming portion 91 has a flat plate-shaped annular peripheral edge portion 912.
  • a large number of through holes 906 are formed in the circular protrusion 911 radially from the center of the circular protrusion 911.
  • the large number of through holes 906 form the air passage 901.
  • the openings at the upper ends of the large number of through holes 906 form an opening 907 on the board storage space side that opens into the board storage space 27 and is connected to the board storage space 27. Therefore, the ventilation path 901 has an opening 907 on the substrate storage space side.
  • the first housing portion 92 has a tubular portion 921, an end flange portion 922, and an end plate-shaped portion 923.
  • the tubular portion 921 has a cylindrical shape, and a disk-shaped end plate-shaped portion 923 is integrally formed and connected to the upper end portion of the tubular portion 921.
  • a male screw portion is threaded on the side surface (outer peripheral surface) of the tubular portion 921.
  • a small flange portion 924 is integrally molded with the tubular portion 921 on a portion of the side surface of the tubular portion 921 and above the male screw portion.
  • the end flange portion 922 is provided integrally with the tubular portion 921 at the upper end portion of the tubular portion 921 above the portion of the tubular portion 921 where the small flange portion 924 exists.
  • the end flange portion 922 has a protrusion 925 extending upward to D21.
  • the end flange portion 922 is fixed to the annular peripheral edge portion 912 by welding the protrusion 925 and the portion of the annular peripheral edge portion 912 in which the recess 915 is formed in the inner opening forming portion 91.
  • the first housing portion 92 is connected to the inner opening forming portion 91 in a coaxial positional relationship with the inner opening forming portion 91.
  • the nozzle portion 93 has a tubular portion 931 and an externally projecting portion 932.
  • the tubular portion 931 has a cylindrical shape.
  • the inner peripheral surface of the tubular portion 931 constitutes an inner peripheral sliding surface on which the outer peripheral surface of the spring seat main body portion 960 of the spring seat 96, which will be described later, slides.
  • the lower portion of the tubular portion 931 is integrally molded and connected to the bottom portion 934, and the bottom portion 934 and the external protrusion 932 are integrally molded and connected.
  • the outer diameter of the upper portion of the tubular portion 931 is slightly smaller than the inner diameter of the tubular portion 921 of the first housing portion 92, and as shown in FIG.
  • the outer peripheral surface of the upper portion of the tubular portion 931 and the tubular portion A gap is formed between the inner peripheral surface of the 921 and the inner peripheral surface of the 921.
  • the nozzle portion 93 has a direction orthogonal to the axial center of the nozzle portion 93 and the tubular portion 921 with respect to the tubular portion 921 (the left-right direction in FIG. 8 and the direction connecting the back side and the front side of the paper surface). In addition, it is slightly movable with respect to the tubular portion 921.
  • a cylindrical through hole is formed in the center of the bottom portion 934, and this through hole constitutes the exterior space side accommodation chamber opening 903.
  • the external protrusion 932 has a cylindrical shape with a short axial length.
  • the outer diameter and inner diameter of the external protrusion 932 are smaller than the outer diameter and inner diameter of the tubular portion 931, respectively.
  • the inner peripheral surface of the external protrusion 932 of the nozzle portion 93 forming the external space side accommodation chamber opening 903 has a tapered shape whose diameter expands toward the external space of the container body 2. This portion constitutes a valve seat to which the valve body body 991 as a sealing portion abuts.
  • the opening at the lower end of the external protrusion 932 constitutes the external space side opening 902.
  • the exterior space side opening 902 constitutes the ventilation path 901. Therefore, the ventilation passage 901 has an opening 902 on the external space side.
  • the second housing portion 94 has a tubular portion 941, an end inward projecting portion 942, and an end axially projecting portion 943.
  • the tubular portion 941 has a cylindrical shape.
  • the inner diameter of the tubular portion 941 is larger than the outer diameter of the tubular portion 921 of the first housing portion 92.
  • the first housing portion 92 is arranged in the space formed by the inner peripheral surface of the tubular portion 941 of the second housing portion 94 in a coaxial positional relationship with the tubular portion 941 of the second housing portion 94. Has been done.
  • a female screw portion is engraved on the inner peripheral surface of the tubular portion 941.
  • the male screw portion of the tubular portion 921 of the first housing portion 92 is screwed into the female screw portion.
  • the second housing portion 94 is fixed to the first housing portion 92.
  • the end inward projecting portion 942 is integrally formed with the lower end portion of the tubular portion 941.
  • the end inwardly projecting portion 942 projects inward in the radial direction of the tubular portion 941 from the lower end portion of the tubular portion 941 and has an annular plate shape.
  • the end axially projecting portion 943 projects downward from the lower surface of the end inward projecting portion 942 to the downward D22, and has an annular shape. Further, as shown in FIG.
  • a rib portion 946 that protrudes outward from the end axial direction projecting portion 943 to the tubular portion 941 is provided.
  • Four rib portions 946 are formed at equal intervals in the circumferential direction of the tubular portion 941.
  • the close contact pad 98 is formed in an annular shape having a positional relationship coaxial with the opening 902 on the external space side, and is the tip portion of the second housing portion 94 in the outward direction of the storage space 27 (second housing portion 94 in FIG. 8).
  • the surface surface (the lowermost surface of the close contact pad 98 in FIG. 8) is located on the lower side.
  • the tip of the close contact pad 98 in the outward direction of the storage space 27 (the lowermost surface of the close contact pad 98 in FIG. 8) constitutes a sealing surface that is in close contact with the purge port (gas injection port) described later.
  • the close contact pad 98 prevents gas leakage between the purge port (not shown) and the sealing surface.
  • Polycarbonate which generates a small amount of outgas, was used for the nozzle portion 93.
  • resins such as cycloolefin polymer, polyetherimide, and polyetheretherketone can be used.
  • the adhesion pad 98 for example, a resin such as polybutylene terephthalate or polyethylene, an elastomer such as polyethylene elastomer or polyolefin elastomer, or a rubber material such as silicon rubber or fluororubber can be used.
  • the lower end surface of the close contact pad 98 is textured to be roughened.
  • Fixing of the first housing portion 92 to the lower wall 24 is performed via an O-ring (not shown) mounted in a groove 927 formed on the side surface of the first housing portion 92.
  • an O-ring (not shown) is used between the first housing portion 92 and the lower wall 24 to provide a gap between the lower wall 24 and the nozzle portion 93. It will be sealed.
  • the ventilation passage 901 is formed by the inner opening forming portion 91, the first housing portion 92, the nozzle portion 93, and the second housing portion 94 constituting the filter portion housing. More specifically, the ventilation passage 901 continues from the substrate storage space side opening 907 of the through hole 906 of the inner opening forming portion 91 to the valve body storage chamber 904 and then to the outer space side opening 902 of the nozzle portion 93. There is.
  • the spring seat 96 is supported by the nozzle portion 93 and constitutes an urged member that guides the movement of the valve body 99.
  • the spring seat 96 has a substantially cylindrical spring seat main body portion 960 and a central tubular convex portion 963. One end of the spring seat 96 is closed by an end wall 961 constituting the spring seat main body 960.
  • the spring seat main body 960 constitutes the urging member main body.
  • a central tubular convex portion 963 is provided in the central portion of the end wall 961 so as to project downward from the end wall 961.
  • a plurality of through holes 9613 are formed as gas flow passages through which gas can flow in the portion of the end wall 961 around the central tubular convex portion 963.
  • the central tubular convex portion 963 is integrally formed with the end wall 961, and a through hole penetrating the spring seat 96 in the axial direction is formed in the central portion of the central tubular convex portion 963.
  • the protruding end of the central tubular convex portion 963 slightly protrudes inward in the radial direction of the spring seat 96.
  • the central tubular convex portion 963 constitutes a valve body fixing portion.
  • the valve body 99 has a valve body main body 991 and a valve body shaft portion 992.
  • the valve body body 991 has a tapered shape whose diameter expands toward the space outside the container body 2, and has a trapezoidal shape in the cross-sectional view shown in FIG.
  • the edge of the trapezoidal bottom has dimensions to fit into the exterior space side accommodation chamber opening 903.
  • FIG. 8 by fitting the valve body main body 991 into the external space side accommodation chamber opening 903, the external space side accommodation chamber opening 903 can be closed by the valve body main body 991, and the valve body main body 991 can be closed. By deviating from the external space side accommodation chamber opening 903, the external space side accommodation chamber opening 903 is opened.
  • the valve body body 991 constitutes a through-hole closing portion as a sealing portion of the valve body 99 that closes the opening 903 of the accommodation chamber on the external space side.
  • the taper ratio of the outer peripheral surface of the valve body 991 per unit length in the axial direction of the valve body 991 is the unit in the axial direction of the exterior space side opening 902 and the exterior space side accommodation chamber opening 903. It is larger than the taper ratio of the inner peripheral surface of the portion of the external protrusion 932 forming the external space side opening 902 and the external space side accommodation chamber opening 903 per length. That is, as shown in FIG.
  • the inclination angle a1 of the taper of the outer peripheral surface of the valve body 991 with respect to the axial direction of the valve body 991 is larger than the inclination angle a2.
  • the lower end of the valve body shaft portion 992 is integrally molded and connected to the valve body main body 991.
  • the upper portion of the valve body shaft portion 992 is a valve at a position above the lower protruding portion 9921 protruding outward in the radial direction of the valve body shaft portion 992 and the lower protruding portion 9921 and away from the lower protruding portion 9921.
  • the body shaft portion 992 has an upper protruding portion 9923 that protrudes outward in the radial direction, and the lower protruding portion 9921 has a larger protrusion amount than the upper protruding portion 9923.
  • the upper end side of the valve body shaft portion 992 from the lower protruding portion 9921 is inserted into the through hole of the central tubular convex portion 963, and the protruding end portion of the central tubular convex portion 963 is above the lower protruding portion 9921.
  • the upper end portion is detachably fixed and connected to the central tubular convex portion 963 of the spring seat 96.
  • the spring seat 96 and the valve body 99 can be integrally moved in these axial directions.
  • the valve body 99 is made of a material that can be elastically deformed.
  • the valve body 99 may be made of various thermoplastic elastomers such as elastically deformable polyester or polyolefin, fluororubber, silicon rubber, or the like.
  • thermoplastics are used as the preferred material.
  • the side surface of the spring seat 96 is provided with a side convex portion 964 as a rib-shaped portion protruding from the side surface of the spring seat 96 to the outside of the spring seat 96 in a semicircular shape.
  • the side convex portion 964 extends from one end to the other end of the spring seat 96 on the side surface of the spring seat 96.
  • a plurality of side convex portions 964 are provided on the side surface of the spring seat 96 in the circumferential direction of the spring seat 96.
  • the axial length of the spring seat 96 in the axial direction of the spring seat 96 in the substantially cylindrical shape of the spring seat main body portion 960 is shorter than the length of the tubular portion 931 of the nozzle portion 93 in the vertical direction D2. Therefore, the spring seat 96 can slide with respect to the inner peripheral surface of the tubular portion 931 in the axial direction of the tubular portion 931 of the nozzle portion 93. Due to this sliding, the spring seat 96 has a position (closed position) where the valve body body 991 comes into contact with the inner peripheral surface of the external protrusion 932 of the nozzle portion 93 and closes the external space side accommodation chamber opening 903, and the valve. The body body 991 moves downward from the position shown in FIG. 8 and separates from the inner peripheral surface of the external protrusion 932 of the nozzle unit 93 to a position (opening position) where the external space side accommodation chamber opening 903 is opened. It is possible to move between.
  • the filter 95 has a disk shape.
  • the peripheral edge portion of the filter 95 is sandwiched between the end flange portion 922 of the first housing portion 92 and the annular peripheral edge portion 912 of the inner opening forming portion 91, so that the end flange portion 922 and the annular peripheral edge portion 912 are sandwiched. Is fixed to.
  • the filter 95 is arranged in the ventilation path 901. Therefore, the valve body accommodating chamber 904 is located in the portion of the ventilation path 901 on the side of the space outside the container body 2 with respect to the filter 95.
  • the filter 95 prevents particles and the like from passing through the through hole 906 of the inner opening forming portion 91.
  • the effective area of the filter 95 of the exhaust filter unit 90 is larger than the effective area of the filter 85 of the air supply filter unit 80.
  • the effective area of the filter 95 of the exhaust filter unit 90 is preferably 1.5 times or more the effective area of the filter 85 of the air supply filter unit 80, and is twice or more in this embodiment.
  • the reason why it is set to 1.5 times or more is that if it is 1.5 times or less, efficient gas purging cannot be performed, and it takes a long time to perform gas purging. This is because it is possible to reliably perform efficient gas purging by doubling or more.
  • the spring 97 as an urging member is composed of a compression spring.
  • the upper end of the spring 97 is in contact with the inner surface (lower surface) of the end wall 961 of the spring seat 96.
  • the lower end of the spring 97 is in contact with the bottom 934 of the nozzle 93.
  • the spring 97 sets the end wall 961 of the spring seat 96 so as to prevent the gas from flowing out from the external space side accommodation chamber opening 903 to the external space. It is urged in the direction of the filter 95 (upward in FIG. 8). That is, the spring 97 urges the valve body 99 to move to the closed position.
  • the diameter of the spring 97 is configured to be larger than the diameter of the exterior space side opening 902, which is a portion having the maximum diameter of the exterior space side accommodation chamber opening 903.
  • the substrate support plate-shaped portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are paired in the left-right direction D3 so as to form a pair in the substrate storage space 27. It is provided in 2.
  • the substrate support plate-shaped portion 5 has a plate portion 51.
  • the plate portion 51 has a plate-like substantially arc shape.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, 25 in the vertical direction D2.
  • the adjacent plate portions 51 are arranged in a parallel positional relationship so as to be separated from each other at intervals of 10 mm to 12 mm in the vertical direction D2.
  • the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3.
  • Convex portions 511 and 512 are provided on the upper surface of the plate portion 51.
  • the substrate W supported by the plate portion 51 contacts only the protruding ends of the convex portions 511 and 512, and does not contact the plate portion 51 on the surface.
  • the substrate support plate-shaped portion 5 having such a configuration has a plurality of substrates W in a state in which adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and are in a parallel positional relationship with each other. It is possible to support the edge of.
  • the back side substrate support portion 6 has a back side edge support portion 60.
  • the back edge support portion 60 is formed by being integrally molded with the container main body 2 at the rear end portion of the plate portion 51 of the substrate support plate-shaped portion 5.
  • the number of the back edge support portions 60 corresponding to each of the substrates W that can be stored in the substrate storage space 27, specifically 25, is provided.
  • the rear edge support portions 60 arranged on the first side wall 25 and the second side wall 26 have a positional relationship such as pairing with a front retainer described later in the front-rear direction D1.
  • the substrate W is housed in the substrate storage space 27, and the lid 3 is closed, so that the back end edge support portion 60 sandwiches and supports the edge portion of the edge portion of the substrate W.
  • the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2.
  • the lid 3 is removable from the opening peripheral edge 28 of the container body 2, and when the lid 3 is attached to the opening peripheral edge 28, the lid 3 is surrounded by the opening peripheral edge 28. ,
  • the container body opening 21 can be closed.
  • the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1) at the position of D12 in the immediate rear direction of the opening peripheral edge 28 when the lid 3 closes the container body opening 21.
  • An annular seal member 4 is attached to the surface of the formed step portion facing the surface (seal surface 281) so as to go around the outer peripheral edge of the lid 3.
  • the seal member 4 is arranged so as to go around the lid body 3.
  • the sealing member 4 is made of various thermoplastic elastomers such as polyester-based and polyolefin-based, which are elastically deformable, and made of fluororubber, silicon rubber, and the like.
  • the seal member 4 When the lid 3 is attached to the opening peripheral edge 28, the seal member 4 is elastically deformed by being sandwiched between the seal surface 281 (see FIG. 1) of the container body 2 and the inner surface of the lid 3. That is, by interposing the seal member 4 between the lid 3 and the container body 2, the lid 3 and the opening peripheral edge 28 are separated from each other without contacting each other, and the lid 3 is separated from the container body 3.
  • the opening 21 can be closed.
  • the substrate W By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken in and out of the substrate storage space 27 in the container body 2.
  • the lid 3 is provided with a latch mechanism.
  • the latch mechanism is provided near both the left and right ends of the lid 3, and as shown in FIG. 1, two upper latches 32A and 32A that can project upward from the upper side of the lid 3 and the lid 3 It includes two lower latch portions 32B and 32B that can project downward from the lower side.
  • the two upper latch portions 32A and 32A are arranged near the left and right ends of the upper side of the lid 3, and the two lower latch portions 32B and 32B are arranged near the left and right ends of the lower side of the lid 3. .
  • An operation unit 33 is provided on the outer surface of the lid 3.
  • the upper latch portions 32A and 32A and the lower latch portions 32B and 32B can be projected from the upper side and the lower side of the lid body 3, and also from the upper side and the lower side. It can be in a state where it does not protrude.
  • the upper latch portions 32A and 32A project upward from the upper side of the lid 3 to engage the latch engaging recesses 231A and 231B of the container body 2, and the lower latch portions 32B and 32B are the lower sides of the lid 3.
  • the lid 3 is fixed to the opening peripheral edge portion 31 of the container body 2 by protruding downward from the container body 2 and engaging with the latch engaging recesses 241A and 241B of the container body 2.
  • a recess (not shown) recessed to the outside (front direction D11) of the storage space 27 is formed.
  • a front retainer (not shown) is fixedly provided in the recess (not shown) and the portion of the lid 3 outside the recess.
  • the front retainer (not shown) has a front retainer board receiving portion (not shown).
  • Two front retainer substrate receiving portions (not shown) are arranged in pairs in the left-right direction at predetermined intervals.
  • the front retainer substrate receiving portions arranged in pairs in this way are provided in a state of 25 pairs arranged in parallel in the vertical direction.
  • the substrate W is housed in the storage space 27, and the lid 3 is closed, so that the front retainer substrate receiving portion sandwiches and supports the edge of the edge portion of the substrate W.
  • the filter portion housing of the air supply filter portion 80 which is composed of the first housing portion 82, the nozzle portion 83, and the second housing portion 84, has an opening on the external space side as an outer opening.
  • a valve body 86 that closes the exterior space side accommodation chamber opening 803 by being inserted into the 803 and opens the exterior space side accommodation chamber opening 803 by being removed from the exterior space side accommodation chamber opening 803 is accommodated.
  • the convex portion 8611 of the valve body 86 is formed in the opening 803 of the accommodation chamber on the external space side. Since the opening 803 of the accommodation chamber on the external space side is closed by being inserted, the washing water is prevented from entering the portion of the ventilation path located inside the filter portion housing rather than the opening 803 of the accommodation chamber on the external space side. It becomes possible to suppress it. As a result, it is possible to significantly reduce the time required to dry the ventilation path inside the filter portion housing.
  • the valve body 86 is slightly raised to the upper side in FIG. 5, the state in which the convex portion 8611 of the valve body 86 is inserted into the external space side accommodation chamber opening 803 is maintained, and the external space side accommodation chamber opening The closed state of the 803 is maintained. Then, when the lower surface of the seal wall 861 shown in FIG. 5 and the upper surface of the large-diameter bottom portion 834 of the nozzle portion are at a predetermined distance, the convex portion 8611 is separated from the external space side accommodation chamber opening 803. The air passage is open. Therefore, unlike a conventional valve body, it is possible to prevent a so-called chattering sound from being generated by repeating a short period of time in which the valve body is slightly opened and then closed immediately.
  • the opening area of the external space side opening 802 that opens toward the external space of the container body 2 is larger than the opening area of the external space side accommodating chamber opening 803 into which the valve body 86 is inserted.
  • the convex portion 8611 is inserted from the state in which the convex portion 8611 of the valve body 86 is inserted into the external space side accommodation chamber opening 803 due to the flow of gas flowing in from the external space side opening 802 having a wide opening area. It becomes easy to make it in a non-existing state, and gas purging can be performed faster.
  • the nozzle portion 83 constituting the inner housing portion has an outer space side accommodation chamber opening 803 as an outer opening.
  • a valve body 86 having a convex portion 8611 that fits into the exterior space side accommodation chamber opening 803 of the nozzle portion 83.
  • valve body 86 has a valve body main body 860 and a convex portion 8611 protruding from the valve body main body 860 and inserted into the external space side accommodation chamber opening 803. With this configuration, a valve that closes the external space side accommodation chamber opening 803 by being inserted into the external space side accommodation chamber opening 803 and opens the external space side accommodation chamber opening 803 by being removed from the external space side accommodation chamber opening 803.
  • the body 86 can be easily realized.
  • the portion of the valve body main body 860 around the convex portion 8611 constitutes a seal portion
  • the nozzle portion 83 as the inner housing portion has the valve body main body 860 sliding due to the valve body main body 860 sliding.
  • a tubular portion 831 having an inner peripheral sliding surface to be supported is provided, and a portion of the nozzle portion 83 around the outer space side housing chamber opening 803 constitutes a valve seat with which the seal portion abuts.
  • valve body main body portion 860 is provided with a side convex portion 864 as a rib-shaped portion that directly contacts and slides on the inner peripheral sliding surface of the tubular portion 831. With this configuration, it is possible to suppress the sliding noise and chattering noise of the side convex portion 864 with respect to the inner peripheral sliding surface of the tubular portion 831.
  • the air supply filter unit 80 includes a spring 87 as an urging member that urges the valve body 86 in the direction of inserting the valve body 86 into the external space side accommodation chamber opening 803.
  • a spring 87 as an urging member that urges the valve body 86 in the direction of inserting the valve body 86 into the external space side accommodation chamber opening 803.
  • the filter portion housing of the exhaust filter portion 90 is inserted into the external space side accommodation chamber opening 903 as an outer opening, and has a closing position for closing the external space side accommodation chamber opening 903 in the external space side accommodation chamber opening 903.
  • the valve body 99 that can be moved between the opening position that opens the exterior space side accommodation chamber opening 903 and the exhaust filter unit that is connected to the valve body 99 and can move inside the filter unit housing of the exhaust filter unit 90.
  • a spring seat 96 as an urging member that is supported by the filter portion housing of 90 and guides the movement of the valve body 99, and a spring seat 96 as an urging member so that the valve body 99 moves to the closed position are attached.
  • a spring 97 as a urging member is housed, and the effective area of the filter 95 of the exhaust filter unit 90 is larger than the effective area of the filter 85 of the air supply filter unit 80.
  • the effective area of the filter 95 of the exhaust filter unit 90 is larger than the effective area of the filter 85 of the air supply filter unit 80, so that the gas is exhausted from the substrate storage space 27 of the exhaust filter unit 90. , And the purge gas injected into the substrate storage space 27 of the container body 2 enables efficient replacement.
  • the filter housing of the exhaust filter unit 90 is connected to the valve body 99 and the valve body 99 so that the inside of the filter unit housing of the exhaust filter unit 90 can be moved.
  • the spring seat 96 as an urging member that is supported by the housing and guides the movement of the valve body 99, and the urging member that urges the spring seat 96 as the urging member so that the valve body 99 moves to the closed position. Because the valve body 99 is in the closed position, the valve body 99 opens the housing chamber opening 903 on the external space side when the substrate storage container is washed with the washing water. Since it is closed, it is possible to prevent the washing water from entering the portion of the ventilation path located inside the filter portion housing rather than the opening 903 of the accommodation chamber on the external space side. As a result, it is possible to significantly reduce the time required to dry the ventilation path inside the filter portion housing.
  • the valve body is made of a material that can be elastically deformed. With this configuration, it is possible to reliably close the opening 903 of the accommodation chamber on the external space side by the valve body 99.
  • valve body 99 is detachably fixed to the spring seat 96 as an applied member. With this configuration, even when the sealing property of the valve body 99 deteriorates due to long-term use, the valve body 99 can be easily removed from the spring seat 96 and replaced with a new valve body 99.
  • the spring seat 96 as the urged member is formed with a through hole 9613 as a gas flow passage through which gas can flow. With this configuration, gas can be circulated through the spring seat 96.
  • the urging member is composed of a spring 97, and the diameter of the spring 97 is larger than the diameter of the accommodation chamber opening 903 on the external space side.
  • the nozzle portion 93 as the inner housing portion has an outer space side accommodation chamber opening 903 as an outer opening.
  • the spring seat 96 as the urged member includes a spring seat main body 960 as the urged member main body having a central tubular convex portion 963 as the valve body fixing portion to which the valve body 99 is fixed.
  • the nozzle portion 93 as the inner housing portion includes a tubular portion 931 as a tubular portion having an inner peripheral sliding surface on which the spring seat main body portion 960 slides and supports the spring seat main body portion 960, and a tubular portion. It is provided with an external space side accommodating chamber opening 903 integrally molded with 931. With this configuration, it is possible to easily realize a configuration having a valve body 99 that closes the opening 903 of the accommodation chamber on the external space side of the nozzle portion 93.
  • the exterior space side accommodation chamber opening 903 has a tapered shape in which the diameter expands toward the exterior space of the container body 2, and the valve body 99 has an exterior space side accommodation chamber at the closed position. It has a valve body body 991 as a through-hole closing portion that closes the opening 903, and the outer peripheral surface of the valve body body 991 has a tapered shape whose diameter expands toward the space outside the container body 2, and the valve body body.
  • the taper ratio of the outer peripheral surface of the valve body main body 991 per unit length in the axial direction of 991 is the inner peripheral surface of the outer space side accommodation chamber opening 903 per unit length in the axial direction of the exterior space side accommodation chamber opening 903. Greater than the taper ratio.
  • the lower end portion of the valve body body 991 can be strongly and surely in contact with the inner peripheral surface of the exterior space side accommodation chamber opening 903, and the valve body body 991 reliably closes the exterior space side accommodation chamber opening 903. It becomes possible to do. As a result, it is possible to reliably prevent the washing water from entering the portion of the ventilation path located inside the filter portion housing rather than the opening 903 of the accommodation chamber on the external space side.
  • the configurations of the substrate storage container, the air supply filter unit, and the exhaust filter unit are not limited to the configurations of the substrate storage container 1, the air supply filter unit 80, and the exhaust filter unit 90 in the present embodiment. ..
  • the shapes of the container body and the lid, the number and dimensions of the substrates that can be stored in the container body are the shapes of the container body 2 and the lid 3 in the present embodiment, and the number and dimensions of the substrates W that can be stored in the container body 2.
  • the substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm, but the value is not limited to this value.
  • the back side substrate support portion has a back end edge support portion 60 formed by being integrally molded with the container body 2 at the rear end portion of the plate portion 51 of the substrate support plate-shaped portion 5.
  • the back-side substrate support portion is not integrally molded with the container body, but may be configured as a separate body.
  • the two through holes at the front of the lower wall 24 are exhaust holes 243 for discharging the gas inside the container body 2, and the two through holes at the rear are the container body.
  • the air supply hole 242 for supplying gas to the inside of No. 2 is not limited to this configuration.
  • at least one of the two through holes at the front of the lower wall may also be an air supply hole for supplying gas to the inside of the container body.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un récipient de stockage de substrat dans lequel des logements (91, 92, 93, 94) d'une partie filtre d'échappement (90) accueillent : un corps de soupape (99) qui est inséré dans une partie d'ouverture externe (903) et qui est mobile dans la partie d'ouverture externe (903) entre une position de fermeture permettant de fermer la partie d'ouverture externe (903) et une position d'ouverture permettant d'ouvrir la partie d'ouverture externe (903) ; un élément sollicité (96) qui est relié au corps de soupape (99), supporté par les logements (91, 92, 93, 94) de la partie filtre d'échappement (90) de façon à être mobile à l'intérieur des logements (91, 92, 93, 94) de la partie filtre d'échappement (90) et qui guide le mouvement du corps de soupape (99) ; et un élément de sollicitation (97) qui sollicite l'élément sollicité (96) de telle sorte que le corps de soupape (99) se déplace vers la position de fermeture. Un filtre (95) de la partie filtre d'échappement (90) a une surface efficace supérieure à une surface efficace d'un filtre (85) d'une partie filtre d'admission (80).
PCT/JP2019/029898 2019-07-30 2019-07-30 Récipient de stockage de substrat WO2021019700A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
PCT/JP2019/029898 WO2021019700A1 (fr) 2019-07-30 2019-07-30 Récipient de stockage de substrat
US17/630,769 US20220199439A1 (en) 2019-07-30 2020-07-29 Substrate storage container and filter unit
JP2021535395A JPWO2021020460A1 (fr) 2019-07-30 2020-07-29
KR1020227001287A KR20220041078A (ko) 2019-07-30 2020-07-29 기판수납용기 및 필터부
PCT/JP2020/029110 WO2021020460A1 (fr) 2019-07-30 2020-07-29 Récipient de stockage de substrat et unité de filtre
CN202080047895.8A CN114080666A (zh) 2019-07-30 2020-07-29 基板收纳容器及过滤部
TW109125845A TWI846917B (zh) 2019-07-30 2020-07-30 基板收納容器及過濾部

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/029898 WO2021019700A1 (fr) 2019-07-30 2019-07-30 Récipient de stockage de substrat

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WO2021019700A1 true WO2021019700A1 (fr) 2021-02-04

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008297046A (ja) * 2007-05-30 2008-12-11 Hitachi Plant Technologies Ltd 気流制御方法および保管倉庫設備
WO2015132910A1 (fr) * 2014-03-05 2015-09-11 ミライアル株式会社 Récipient de stockage de substrat et section de filtre pour récipient de stockage de substrat
WO2016002005A1 (fr) * 2014-07-01 2016-01-07 ミライアル株式会社 Récipient de stockage de substrats
WO2017033546A1 (fr) * 2015-08-25 2017-03-02 村田機械株式会社 Dispositif de purge, dispositif d'emmagasinement de purge et procédé de purge
JP2017147372A (ja) * 2016-02-18 2017-08-24 信越ポリマー株式会社 基板収納容器用バルブ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008297046A (ja) * 2007-05-30 2008-12-11 Hitachi Plant Technologies Ltd 気流制御方法および保管倉庫設備
WO2015132910A1 (fr) * 2014-03-05 2015-09-11 ミライアル株式会社 Récipient de stockage de substrat et section de filtre pour récipient de stockage de substrat
WO2016002005A1 (fr) * 2014-07-01 2016-01-07 ミライアル株式会社 Récipient de stockage de substrats
WO2017033546A1 (fr) * 2015-08-25 2017-03-02 村田機械株式会社 Dispositif de purge, dispositif d'emmagasinement de purge et procédé de purge
JP2017147372A (ja) * 2016-02-18 2017-08-24 信越ポリマー株式会社 基板収納容器用バルブ

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