WO2020256007A1 - 酸化ルテニウムガスの吸収液、酸化ルテニウムの分析方法およびトラップ装置、定量分析装置 - Google Patents

酸化ルテニウムガスの吸収液、酸化ルテニウムの分析方法およびトラップ装置、定量分析装置 Download PDF

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Publication number
WO2020256007A1
WO2020256007A1 PCT/JP2020/023732 JP2020023732W WO2020256007A1 WO 2020256007 A1 WO2020256007 A1 WO 2020256007A1 JP 2020023732 W JP2020023732 W JP 2020023732W WO 2020256007 A1 WO2020256007 A1 WO 2020256007A1
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WIPO (PCT)
Prior art keywords
ion
ruthenium oxide
oxide gas
group
acid
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2020/023732
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English (en)
French (fr)
Japanese (ja)
Inventor
伴光 佐藤
由樹 吉川
享史 下田
貴幸 根岸
繁則 前田
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Tokuyama Corp
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Tokuyama Corp
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Priority to JP2021526834A priority Critical patent/JP7606455B2/ja
Priority to US17/619,310 priority patent/US20220316996A1/en
Priority to KR1020217040358A priority patent/KR20220023983A/ko
Publication of WO2020256007A1 publication Critical patent/WO2020256007A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/1493—Selection of liquid materials for use as absorbents
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
    • B01D2252/20—Organic absorbents
    • B01D2252/205—Other organic compounds not covered by B01D2252/00 - B01D2252/20494
    • B01D2252/2053—Other nitrogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/60—Heavy metals or heavy metal compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • G01N2001/2217—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption using a liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155—Measuring in two spectral ranges, e.g. UV and visible

Definitions

  • the quaternary onium ion is preferably an ammonium ion or a phosphonium ion that can stably exist in the treatment liquid.
  • the alkyl chain length of an ammonium ion or a phosphonium ion can be easily controlled, and further, an allyl group or an aryl group can be easily introduced. This makes it possible to control the size, symmetry, hydrophilicity, hydrophobicity, stability, solubility, charge density, surface activity, etc. of ammonium ion or phosphonium ion. Since such ammonium ion or phosphonium ion easily forms an ion pair with RuO 4 - etc. in the ruthenium oxide gas absorbing solution, the ruthenium oxide gas absorbing solution containing the onium salt efficiently captures the ruthenium oxide gas. Can be gathered.
  • the onium ion added to collect RuO 4 - etc. in the gas absorption liquid may be any as long as it causes an electrostatic interaction with RuO 4 - etc. Therefore, the structure of the onium ion is not limited to the quaternary onium ion represented by the above formula (1) or the tertiary onium ion represented by the formula (2).
  • an onium salt different from the organic alkali containing onium ions represented by the formulas (1) and (2) for example, imidazolium ion, pyrrolidinium ion, pyridinium ion, piperidinium ion, oxazolium ion and the like. It may be an onium ion having a cyclic structure or a dication typified by a hexamethonium ion.

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Electrochemistry (AREA)
  • Gas Separation By Absorption (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
PCT/JP2020/023732 2019-06-21 2020-06-17 酸化ルテニウムガスの吸収液、酸化ルテニウムの分析方法およびトラップ装置、定量分析装置 Ceased WO2020256007A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021526834A JP7606455B2 (ja) 2019-06-21 2020-06-17 酸化ルテニウムガスの吸収液、酸化ルテニウムの分析方法およびトラップ装置、定量分析装置
US17/619,310 US20220316996A1 (en) 2019-06-21 2020-06-17 Ruthenium oxide gas absorbent liquid, analysis method for ruthenium oxide, trap device, and quantitative analyzer
KR1020217040358A KR20220023983A (ko) 2019-06-21 2020-06-17 산화루테늄 가스의 흡수액, 산화루테늄의 분석 방법 및 트랩 장치, 정량 분석 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-115740 2019-06-21
JP2019115740 2019-06-21

Publications (1)

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WO2020256007A1 true WO2020256007A1 (ja) 2020-12-24

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PCT/JP2020/023732 Ceased WO2020256007A1 (ja) 2019-06-21 2020-06-17 酸化ルテニウムガスの吸収液、酸化ルテニウムの分析方法およびトラップ装置、定量分析装置

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US (1) US20220316996A1 (https=)
JP (1) JP7606455B2 (https=)
KR (1) KR20220023983A (https=)
TW (1) TW202110527A (https=)
WO (1) WO2020256007A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115028536A (zh) * 2022-06-27 2022-09-09 昆明贵金属研究所 一种四正丙基过钌酸铵(ⅶ)的制备方法
CN120361726A (zh) * 2025-06-25 2025-07-25 中核核电运行管理有限公司 一种用于石墨慢化剂中碳-14回收的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114383899A (zh) * 2021-12-01 2022-04-22 中国辐射防护研究院 一种气溶胶中放射性核素的液体吸收方法

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269658A (ja) * 1988-09-05 1990-03-08 Ishikawajima Harima Heavy Ind Co Ltd 揮発性ルテニウムの測定方法
JPH0752234B2 (ja) * 1985-11-14 1995-06-05 石川島播磨重工業株式会社 核燃料再処理廃液のガラス固化方法
JPH07287096A (ja) * 1994-04-18 1995-10-31 Hitachi Ltd ルテニウムの処理方法及び放射性液体廃棄物の処理方法並びに放射性液体廃棄物の処理装置
JPH0972833A (ja) * 1995-09-04 1997-03-18 Mitsubishi Heavy Ind Ltd 揮発性四酸化ルテニウムのサンプリング方法
JP2000034563A (ja) * 1998-07-14 2000-02-02 Japan Energy Corp 高純度ルテニウムスパッタリングターゲットの製造方法及び高純度ルテニウムスパッタリングターゲット
US6479297B1 (en) * 2000-08-31 2002-11-12 Micron Technology, Inc. Sensor devices, methods and systems for detecting gas phase materials
JP2006520680A (ja) * 2003-02-10 2006-09-14 コンパニー・ジェネラル・デ・マティエール・ニュークレエール 排気ガス中に存在するルテニウムを捕捉する方法および装置
JP2014048084A (ja) * 2012-08-30 2014-03-17 Japan Atomic Energy Agency ルテニウムの分離回収方法
JP2015514563A (ja) * 2012-03-05 2015-05-21 ▲陽▼光▲凱▼迪新能源集▲団▼有限公司 ルテニウムを含む廃触媒を使用することによる固形ニトロシル硝酸ルテニウムの調製方法
CN106148725A (zh) * 2016-08-29 2016-11-23 金川集团股份有限公司 一种分离精炼锇的方法
JP2020087945A (ja) * 2018-11-14 2020-06-04 関東化学株式会社 ルテニウム除去用組成物
WO2020166677A1 (ja) * 2019-02-13 2020-08-20 株式会社トクヤマ オニウム塩を含む半導体ウェハの処理液

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267606A (ja) 2001-03-12 2002-09-18 Hitachi Ltd ガス検知方法
US7476290B2 (en) * 2003-10-30 2009-01-13 Ebara Corporation Substrate processing apparatus and substrate processing method
WO2011074601A1 (ja) * 2009-12-17 2011-06-23 昭和電工株式会社 ルテニウム系金属のエッチング用組成物およびその調製方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752234B2 (ja) * 1985-11-14 1995-06-05 石川島播磨重工業株式会社 核燃料再処理廃液のガラス固化方法
JPH0269658A (ja) * 1988-09-05 1990-03-08 Ishikawajima Harima Heavy Ind Co Ltd 揮発性ルテニウムの測定方法
JPH07287096A (ja) * 1994-04-18 1995-10-31 Hitachi Ltd ルテニウムの処理方法及び放射性液体廃棄物の処理方法並びに放射性液体廃棄物の処理装置
JPH0972833A (ja) * 1995-09-04 1997-03-18 Mitsubishi Heavy Ind Ltd 揮発性四酸化ルテニウムのサンプリング方法
JP2000034563A (ja) * 1998-07-14 2000-02-02 Japan Energy Corp 高純度ルテニウムスパッタリングターゲットの製造方法及び高純度ルテニウムスパッタリングターゲット
US6479297B1 (en) * 2000-08-31 2002-11-12 Micron Technology, Inc. Sensor devices, methods and systems for detecting gas phase materials
JP2006520680A (ja) * 2003-02-10 2006-09-14 コンパニー・ジェネラル・デ・マティエール・ニュークレエール 排気ガス中に存在するルテニウムを捕捉する方法および装置
JP2015514563A (ja) * 2012-03-05 2015-05-21 ▲陽▼光▲凱▼迪新能源集▲団▼有限公司 ルテニウムを含む廃触媒を使用することによる固形ニトロシル硝酸ルテニウムの調製方法
JP2014048084A (ja) * 2012-08-30 2014-03-17 Japan Atomic Energy Agency ルテニウムの分離回収方法
CN106148725A (zh) * 2016-08-29 2016-11-23 金川集团股份有限公司 一种分离精炼锇的方法
JP2020087945A (ja) * 2018-11-14 2020-06-04 関東化学株式会社 ルテニウム除去用組成物
WO2020166677A1 (ja) * 2019-02-13 2020-08-20 株式会社トクヤマ オニウム塩を含む半導体ウェハの処理液

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115028536A (zh) * 2022-06-27 2022-09-09 昆明贵金属研究所 一种四正丙基过钌酸铵(ⅶ)的制备方法
CN120361726A (zh) * 2025-06-25 2025-07-25 中核核电运行管理有限公司 一种用于石墨慢化剂中碳-14回收的方法

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KR20220023983A (ko) 2022-03-03
US20220316996A1 (en) 2022-10-06
JP7606455B2 (ja) 2024-12-25
JPWO2020256007A1 (https=) 2020-12-24
TW202110527A (zh) 2021-03-16

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