WO2020237911A1 - Foldable display panel and manufacturing method therefor - Google Patents

Foldable display panel and manufacturing method therefor Download PDF

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Publication number
WO2020237911A1
WO2020237911A1 PCT/CN2019/106025 CN2019106025W WO2020237911A1 WO 2020237911 A1 WO2020237911 A1 WO 2020237911A1 CN 2019106025 W CN2019106025 W CN 2019106025W WO 2020237911 A1 WO2020237911 A1 WO 2020237911A1
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layer
mask
display panel
opening
cathode
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PCT/CN2019/106025
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French (fr)
Chinese (zh)
Inventor
郑园
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武汉华星光电半导体显示技术有限公司
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Priority to CN201910455662.0A priority Critical patent/CN110190102A/en
Priority to CN201910455662.0 priority
Application filed by 武汉华星光电半导体显示技术有限公司 filed Critical 武汉华星光电半导体显示技术有限公司
Publication of WO2020237911A1 publication Critical patent/WO2020237911A1/en

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    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/28Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
    • H01L27/32Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
    • H01L27/3241Matrix-type displays
    • H01L27/3244Active matrix displays
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
    • H01L51/52Details of devices
    • H01L51/5203Electrodes
    • H01L51/5221Cathodes, i.e. with low work-function material
    • H01L51/5225Cathodes, i.e. with low work-function material characterised by the shape
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
    • H01L51/52Details of devices
    • H01L51/5237Passivation; Containers; Encapsulation, e.g. against humidity

Abstract

Provided in the present application is a foldable display panel and a manufacturing method therefor, the manufacturing method comprising the following steps: forming an organic light-emitting device, the organic light-emitting device comprising a cathode; and forming a thin film encapsulation layer on the organic light-emitting device; the display panel comprises a folding area, at least part of the edges of the cathode and the thin film encapsulation layer being positioned in the folding area, and the edges of the cathode and the thin film encapsulation layer positioned in the folding area being curved.

Description

可折叠的显示面板及其制作方法Foldable display panel and manufacturing method thereof 技术领域Technical field
本申请涉及显示面板技术领域,尤其涉及一种可折叠的显示面板及其制作方法。This application relates to the technical field of display panels, and in particular to a foldable display panel and a manufacturing method thereof.
背景技术Background technique
这里的陈述仅提供与本申请有关的背景信息,而不必然地构成现有技术。The statements here only provide background information related to this application, and do not necessarily constitute prior art.
有源矩阵有机发光二极体(Active-matrix organic light emitting diode,简称AMOLED)面板具有自发光的特性,采用非常薄的有机材料涂层和玻璃基板,当有电流通过时,这些有机材料就会发光。AMOLED面板具有自发光、视角广、色饱和度高、驱动电压低、功耗低、反应快、重量轻、厚度薄、构造简单以及成本低等众多优点,被视为最具前途的产品之一。折叠屏是基于柔性AMOLED屏幕技术研发的,具有可折叠、可拉伸以及方便携带等优势。Active-matrix organic light emitting diode (AMOLED) panels have self-luminous characteristics. They use very thin organic material coatings and glass substrates. When current passes, these organic materials will Glow. AMOLED panels have many advantages such as self-luminescence, wide viewing angle, high color saturation, low driving voltage, low power consumption, fast response, light weight, thin thickness, simple structure and low cost, and are regarded as one of the most promising products. . The folding screen is developed based on flexible AMOLED screen technology and has the advantages of being foldable, stretchable and easy to carry.
柔性AMOLED屏幕制作涉及到的Open Mask(开口较大的蒸镀用掩膜版)的膜层一般有阴极层、封装层中有机层和无机层,Open Mask对应一个面板开一个孔,属于整面蒸镀,但需要考虑封装特性以及显示效果,开孔大小距面板的发光区和边的空间有限制。由于阴极层为Mg/Ag金属且封装层中所用到的无机层为氮氧化硅,屏幕多次折叠后阴极和封装层的边都容易发生破裂或剥离,无法有效阻挡外界的水氧入侵,影响封装效果,且阴极发生破裂影响信号的有效传输,从而影响面板正常显示。The film layer of the Open Mask (mask for evaporation with larger openings) involved in the production of flexible AMOLED screens generally includes a cathode layer, an organic layer in the encapsulation layer, and an inorganic layer. The Open Mask corresponds to a panel with a hole, which belongs to the entire surface. For evaporation, packaging characteristics and display effects need to be considered. The size of the openings is limited to the space between the light-emitting area and the side of the panel. Since the cathode layer is made of Mg/Ag metal and the inorganic layer used in the encapsulation layer is silicon oxynitride, the edges of the cathode and the encapsulation layer are prone to cracking or peeling after the screen is folded many times, which cannot effectively prevent the intrusion of water and oxygen from the outside. The packaging effect, and the breakdown of the cathode affects the effective transmission of the signal, thereby affecting the normal display of the panel.
综上所述,折叠屏技术存在折叠过程中折叠区内的阴极层和封装层的边缘易发生破裂或剥离的问题。In summary, the folding screen technology has the problem that the edges of the cathode layer and the encapsulation layer in the folding area are prone to cracking or peeling during the folding process.
技术问题technical problem
本申请提供一种可折叠的显示面板及其制作方法,通过将阴极和薄膜封装层位于显示面板的折叠区内的边缘制作为曲线型边缘,解决了显示面板在折叠过程中折叠区内的阴极和封装层的边缘易发生破裂或剥离的技术问题。The present application provides a foldable display panel and a manufacturing method thereof. By making the edges of the cathode and the film encapsulation layer in the folding area of the display panel into a curved edge, it solves the problem of the cathode in the folding area of the display panel during the folding process. And the edge of the encapsulation layer is prone to cracking or peeling technical problems.
技术解决方案Technical solutions
为解决上述问题,本申请提供的技术方案如下:To solve the above problems, the technical solutions provided by this application are as follows:
本申请提供一种可折叠的显示面板的制作方法,包括以下步骤:This application provides a method for manufacturing a foldable display panel, including the following steps:
形成有机发光器件,所述有机发光器件包括阴极;Forming an organic light emitting device, the organic light emitting device including a cathode;
在所述有机发光器件上形成薄膜封装层;Forming a thin film encapsulation layer on the organic light emitting device;
其中,所述显示面板包括折叠区,所述阴极和所述薄膜封装层的至少部分边缘位于所述折叠区内,且所述阴极和所述薄膜封装层位于所述折叠区内的边缘呈曲线型。Wherein, the display panel includes a folding area, at least part of the edges of the cathode and the film encapsulation layer are located in the folding area, and the edges of the cathode and the film encapsulation layer in the folding area are curved type.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述形成有机发光器件,包括以下步骤:In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the forming of the organic light emitting device includes the following steps:
提供发光功能层;Provide light-emitting functional layer;
提供第一掩膜版;其中,所述第一掩膜版上设有第一开口;Providing a first mask; wherein a first opening is provided on the first mask;
将所述第一掩膜版与所述显示面板对位;所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;以及Aligning the first mask with the display panel; at least part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved; as well as
通过所述第一掩膜版在所述发光功能层上蒸镀形成阴极;所述阴极的形状和大小与所述第一开口相同。A cathode is formed by vapor deposition on the light-emitting functional layer through the first mask; the shape and size of the cathode are the same as the first opening.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述薄膜封装层包括第一无机层、有机层和第二无机层;In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the thin film encapsulation layer includes a first inorganic layer, an organic layer, and a second inorganic layer;
所述在所述有机发光器件上形成薄膜封装层,包括以下步骤:The forming a thin film encapsulation layer on the organic light emitting device includes the following steps:
提供第二掩膜版、第三掩膜版和第四掩膜版;其中,所述第二掩膜版上设有第二开口,所述第三掩膜版上设有第三开口,所述第四掩膜版上设有第四开口;A second mask, a third mask and a fourth mask are provided; wherein a second opening is provided on the second mask, and a third opening is provided on the third mask, so The fourth mask is provided with a fourth opening;
将所述第二掩膜版、第三掩膜版和第四掩膜版分别与所述显示面板对位;所述第二开口、第三开口和第四开口的至少部分边缘与所述折叠区对应,且所述第二开口、第三开口和第四开口与所述折叠区对应的边缘呈曲线型;Align the second, third, and fourth masks with the display panel respectively; at least part of the edges of the second, third, and fourth openings are aligned with the folding Areas corresponding to each other, and edges of the second opening, third opening, and fourth opening corresponding to the folding area are curved;
通过所述第二掩膜版在所述有机发光器件上蒸镀形成第一无机层;其中,所述第一无机层的形状和大小与所述第二开口相同;Forming a first inorganic layer on the organic light-emitting device by evaporation through the second mask; wherein the shape and size of the first inorganic layer are the same as the second opening;
通过所述第三掩膜版在所述第一无机层上蒸镀形成有机层;其中,所述有机层的形状和大小与所述第三开口相同;以及An organic layer is vapor-deposited on the first inorganic layer through the third mask; wherein the shape and size of the organic layer are the same as the third opening; and
通过所述第四掩膜版在所述有机层和第一无机层上蒸镀形成第二无机层;其中,所述第二无机层的形状和大小与所述第四开口相同。A second inorganic layer is formed by vapor deposition on the organic layer and the first inorganic layer through the fourth mask; wherein the shape and size of the second inorganic layer are the same as the fourth opening.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述曲线型包括波浪型。In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the curved shape includes a wave shape.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述薄膜封装层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the projection of the film encapsulation layer in the direction perpendicular to the display panel completely covers the projection of the cathode in the direction perpendicular to the display panel .
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述第一无机层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the projection of the first inorganic layer in the direction perpendicular to the display panel completely covers the cathode in the direction perpendicular to the display panel. projection.
本申请实施例还提供了一种可折叠的显示面板的制作方法,所述显示面板包括折叠区,所述制作方法包括以下步骤:The embodiment of the present application also provides a manufacturing method of a foldable display panel, the display panel includes a folding area, and the manufacturing method includes the following steps:
提供发光功能层;Provide light-emitting functional layer;
提供第一掩膜版、第二掩膜版、第三掩膜版和第四掩膜版;其中,所述第一掩膜版上设有第一开口,第二掩膜版上设有第二开口,第三掩膜版上设有第三开口,第四掩膜版上设有第四开口;A first mask, a second mask, a third mask, and a fourth mask are provided; wherein, the first mask is provided with a first opening, and the second mask is provided with a Two openings, a third opening is provided on the third mask, and a fourth opening is provided on the fourth mask;
将所述第一掩膜版与所述显示面板对位;所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;Aligning the first mask with the display panel; at least a part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved;
通过所述第一掩膜版在所述发光功能层上蒸镀形成阴极;所述阴极的形状和大小与所述第一开口相同;A cathode is formed by vapor deposition on the light-emitting functional layer through the first mask; the shape and size of the cathode are the same as the first opening;
将所述第二掩膜版与所述显示面板对位;所述第二开口的至少部分边缘与所述折叠区对应,且所述第二开口与所述折叠区对应的边缘呈曲线型;Aligning the second mask with the display panel; at least part of the edge of the second opening corresponds to the folding area, and the edge corresponding to the second opening and the folding area is curved;
通过所述第二掩膜版在所述阴极上蒸镀形成第一无机层;其中,所述第一无机层的形状和大小与所述第二开口相同;Forming a first inorganic layer by evaporation on the cathode through the second mask; wherein the shape and size of the first inorganic layer are the same as the second opening;
将所述第三掩膜版与所述显示面板对位;所述第三开口的至少部分边缘与所述折叠区对应,且所述第三开口与所述折叠区对应的边缘呈曲线型;Aligning the third mask with the display panel; at least part of the edge of the third opening corresponds to the folding area, and the edge of the third opening corresponding to the folding area is curved;
通过所述第三掩膜版在所述第一无机层上蒸镀形成有机层;其中,所述有机层的形状和大小与所述第三开口相同;Forming an organic layer by vapor deposition on the first inorganic layer through the third mask; wherein the shape and size of the organic layer are the same as the third opening;
将所述第四掩膜版与所述显示面板对位;所述第四开口的至少部分边缘与所述折叠区对应,且所述第四开口与所述折叠区对应的边缘呈曲线型;以及Aligning the fourth mask with the display panel; at least a part of the edge of the fourth opening corresponds to the folding area, and the edge of the fourth opening corresponding to the folding area is curved; as well as
通过所述第四掩膜版在所述有机层和第一无机层上蒸镀形成第二无机层;其中,所述第二无机层的形状和大小与所述第四开口相同;其中,所述第一无机层、所述有机层和所述第二无机层构成薄膜封装层。A second inorganic layer is formed by vapor deposition on the organic layer and the first inorganic layer through the fourth mask; wherein the shape and size of the second inorganic layer are the same as those of the fourth opening; wherein The first inorganic layer, the organic layer and the second inorganic layer constitute a thin film encapsulation layer.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述曲线型包括波浪型。In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the curved shape includes a wave shape.
在本申请实施例所提供的可折叠的显示面板的制作方法中,所述第一无机层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。In the manufacturing method of the foldable display panel provided by the embodiment of the present application, the projection of the first inorganic layer in the direction perpendicular to the display panel completely covers the cathode in the direction perpendicular to the display panel. projection.
本申请实施例还提供了一种可折叠的显示面板,包括有机发光器件以及覆盖在所述有机发光器件上的薄膜封装层;所述有机发光器件包括阴极;其中,所述显示面板包括折叠区,所述阴极和所述薄膜封装层的至少部分边缘位于所述折叠区内,且所述阴极和所述薄膜封装层位于所述折叠区内的边缘呈曲线型。The embodiment of the present application also provides a foldable display panel, including an organic light emitting device and a thin film encapsulation layer covering the organic light emitting device; the organic light emitting device includes a cathode; wherein the display panel includes a folding area At least part of the edges of the cathode and the thin film packaging layer are located in the folding area, and the edges of the cathode and the thin film packaging layer located in the folding area are curved.
在本申请实施例所提供的可折叠的显示面板中,所述薄膜封装层包括依次设置在所述有机发光器件上的第一无机层、有机层和第二无机层;所述第一无机层、有机层和第二无机层的至少部分边缘位于所述折叠区内,且所述第一无机层、有机层和第二无机层位于所述折叠区的边缘呈曲线型。In the foldable display panel provided by the embodiment of the present application, the thin film encapsulation layer includes a first inorganic layer, an organic layer, and a second inorganic layer that are sequentially disposed on the organic light-emitting device; the first inorganic layer At least part of the edges of the organic layer and the second inorganic layer are located in the folding area, and the edges of the first inorganic layer, the organic layer and the second inorganic layer located in the folding area are curved.
在本申请实施例所提供的可折叠的显示面板中,所述曲线型包括波浪型。In the foldable display panel provided by the embodiment of the present application, the curved shape includes a wave shape.
在本申请实施例所提供的可折叠的显示面板中,所述阴极通过第一掩膜版蒸镀形成;所述第一掩膜版上设有第一开口,所述第一掩膜版与所述显示面板对位后,所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;所述阴极的形状和大小与所述第一开口相同。In the foldable display panel provided by the embodiment of the present application, the cathode is formed by evaporation of a first mask; a first opening is provided on the first mask, and the first mask is connected to After the display panel is aligned, at least part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved; the shape and size of the cathode are The first openings are the same.
在本申请实施例所提供的可折叠的显示面板中,所述第一无机层、有机层和第二无机层分别通过第二掩膜版、第三掩膜版和第四掩膜版蒸镀形成;In the foldable display panel provided by the embodiment of the present application, the first inorganic layer, the organic layer, and the second inorganic layer are respectively evaporated through a second mask, a third mask, and a fourth mask. form;
所述第二掩膜版上设有第二开口,所述第三掩膜版上设有第三开口,所述第四掩膜版上设有第四开口;所述第二掩膜版、第三掩膜版和第四掩膜版分别与所述显示面板对位后,所述第二开口、第三开口和第四开口的至少部分边缘与所述折叠区对应,且所述第二开口、第三开口和第四开口与所述折叠区对应的边缘呈曲线型;The second mask is provided with a second opening, the third mask is provided with a third opening, and the fourth mask is provided with a fourth opening; the second mask, After the third mask and the fourth mask are respectively aligned with the display panel, at least part of the edges of the second, third, and fourth openings correspond to the folding area, and the second The edges of the opening, the third opening and the fourth opening corresponding to the folding area are curved;
所述第一无机层、有机层和第二无机层的形状和大小分别与对应的第二开口、第三开口和第四开口相同。The shapes and sizes of the first inorganic layer, the organic layer, and the second inorganic layer are the same as the corresponding second, third, and fourth openings, respectively.
在本申请实施例所提供的可折叠的显示面板中,所述显示面板还包括柔性基板和薄膜晶体管阵列层,所述柔性基板位于所述有机发光器件远离所述薄膜封装层的一侧,所述薄膜晶体管阵列层位于所述柔性基板和有机发光器件之间,所述薄膜晶体管阵列层包括多个间隔设置的阻挡层,多个阻挡层围绕所述阴极和有机层设置;In the foldable display panel provided by the embodiment of the present application, the display panel further includes a flexible substrate and a thin film transistor array layer, and the flexible substrate is located on a side of the organic light emitting device away from the thin film encapsulation layer, so The thin film transistor array layer is located between the flexible substrate and the organic light emitting device, the thin film transistor array layer includes a plurality of barrier layers arranged at intervals, and the plurality of barrier layers are arranged around the cathode and the organic layer;
所述第一无机层覆盖在所述有机发光器件的阴极和多个阻挡层上;所述有机层覆盖在第一无机层上,且所述有机层在所述柔性基板上的正投影面积大于所述阴极在所述柔性基板上的正投影面积;所述第二无机层覆盖在所述有机层和所述第一无机层上。The first inorganic layer covers the cathode of the organic light-emitting device and the plurality of barrier layers; the organic layer covers the first inorganic layer, and the orthographic projection area of the organic layer on the flexible substrate is larger than The orthographic projection area of the cathode on the flexible substrate; the second inorganic layer covers the organic layer and the first inorganic layer.
在本申请实施例所提供的可折叠的显示面板中,所述薄膜封装层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。In the foldable display panel provided by the embodiment of the present application, the projection of the film encapsulation layer in the direction perpendicular to the display panel completely covers the projection of the cathode in the direction perpendicular to the display panel.
有益效果Beneficial effect
本申请的有益效果为:本申请中,显示面板的折叠区内的阴极和薄膜封装层的边缘为曲线型,可以缓解在折叠过程中对折叠区内的阴极与薄膜封装层的边缘产生的应力,加强折叠区内的阴极和薄膜封装层的边缘抗弯折能力,减小折叠后阴极和薄膜封装层的边缘发生破裂或剥离的风险,防止外界的水汽侵入显示面板的内部,且保证显示面板内部信号的正常传输,从而加强了可折叠的显示面板的可靠性并延长了显示面板的使用寿命;阴极和薄膜封装层分别采用有一个开口的掩膜版进行整面蒸镀制得,每个掩膜版的开口的边缘对应显示面板的弯折区设置为曲线型,使得制得的阴极和薄膜封装层在弯折区内的边缘为曲线型,可以缓解在折叠过程中对折叠区内的阴极与薄膜封装层的边缘产生的应力,加强折叠区内的阴极和薄膜封装层的边缘抗弯折能力,减小折叠后阴极和薄膜封装层的边缘发生破裂或剥离的风险。The beneficial effect of this application is: in this application, the edges of the cathode and the film encapsulation layer in the folding area of the display panel are curved, which can relieve the stress generated on the edges of the cathode and the film encapsulation layer in the folding area during the folding process. Enhance the bending resistance of the cathode and the edge of the film encapsulation layer in the folding area, reduce the risk of cracking or peeling of the edge of the cathode and the film encapsulation layer after folding, prevent external water vapor from entering the inside of the display panel, and ensure the display panel The normal transmission of internal signals enhances the reliability of the foldable display panel and prolongs the service life of the display panel; the cathode and the thin film encapsulation layer are made by vapor deposition on the entire surface by using a mask with an opening. The edge of the opening of the mask is set in a curved shape corresponding to the bending area of the display panel, so that the edges of the cathode and the film encapsulation layer in the bending area are curved, which can alleviate the impact on the folding area during the folding process. The stress generated by the edges of the cathode and the film encapsulation layer strengthens the bending resistance of the edges of the cathode and the film encapsulation layer in the folding area, and reduces the risk of cracking or peeling of the edges of the cathode and the film encapsulation layer after folding.
附图说明Description of the drawings
为了更清楚地说明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单介绍,显而易见地,下面描述中的附图仅仅是申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only for application. For some embodiments, those of ordinary skill in the art can obtain other drawings based on these drawings without creative work.
图1为本申请实施例提供的一种可折叠的显示面板的制作方法的流程示意框图;FIG. 1 is a schematic block diagram of a process flow of a manufacturing method of a foldable display panel provided by an embodiment of the application;
图2为本申请实施例提供的一种可折叠的显示面板的仰视结构示意图;2 is a schematic bottom view of the structure of a foldable display panel provided by an embodiment of the application;
图3为本申请实施例提供的另一种可折叠的显示面板的制作方法的流程示意框图;3 is a schematic block diagram of the flow of another method for manufacturing a foldable display panel according to an embodiment of the application;
图4为本申请实施例提供的另一种可折叠的显示面板的制作方法的流程示意框图;4 is a schematic block diagram of the flow of another method for manufacturing a foldable display panel provided by an embodiment of the application;
图5为本申请实施例提供的掩膜版的结构示意图;5 is a schematic diagram of the structure of a mask provided by an embodiment of the application;
图6为图2中A-A’部分的截面结构示意图。Fig. 6 is a schematic cross-sectional structure diagram of part A-A' in Fig. 2.
本发明的实施方式Embodiments of the invention
这里所公开的具体结构和功能细节仅仅是代表性的,并且是用来描述本申请的示例性实施例的目的。但是本申请可以通过许多替换形式来具体实现,并且不应当被解释成仅仅受限于这里所阐述的实施例。The specific structure and functional details disclosed herein are only representative, and are used for the purpose of describing exemplary embodiments of the present application. However, this application can be implemented in many alternative forms, and should not be interpreted as being limited only to the embodiments set forth herein.
在本申请的描述中,需要理解的是,术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,术语“第一”、“第二”仅用来描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中,除非另有说明,“多个”的含义是两个或两个以上。另外,术语“包括”及其任何变形,意图在于覆盖不排他的包含。In the description of this application, it should be understood that the terms "center", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", and "outer" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, and does not indicate or imply the device referred to Or the element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first" and "second" are only used to describe the purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of these features. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, the term "including" and any variations thereof is intended to cover non-exclusive inclusion.
在本申请的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本申请中的具体含义。In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected or integrally connected; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two components. For those of ordinary skill in the art, the specific meanings of the above-mentioned terms in this application can be understood under specific circumstances.
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指,否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是,这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在,而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。The terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments. Unless the context clearly dictates otherwise, the singular forms "a" and "one" used herein are also intended to include the plural. It should also be understood that the terms "including" and/or "comprising" used herein specify the existence of the stated features, integers, steps, operations, units and/or components, and do not exclude the existence or addition of one or more Other features, integers, steps, operations, units, components, and/or combinations thereof.
下面结合附图和实施例对本申请作进一步说明。The application will be further described below in conjunction with the drawings and embodiments.
如图1所示,本申请实施例提供了一种可折叠的显示面板的制作方法,包括以下步骤:As shown in FIG. 1, an embodiment of the present application provides a method for manufacturing a foldable display panel, including the following steps:
S101:形成有机发光器件,有机发光器件包括阴极;以及S101: forming an organic light emitting device, the organic light emitting device includes a cathode; and
S102:在有机发光器件上形成薄膜封装层;其中,显示面板包括折叠区,阴极和薄膜封装层的至少部分边缘位于折叠区内,且阴极和薄膜封装层位于折叠区内的边缘呈曲线型。S102: forming a thin film encapsulation layer on the organic light emitting device; wherein the display panel includes a folding area, at least part of the edges of the cathode and the thin film encapsulation layer are located in the folding area, and the edges of the cathode and the thin film encapsulation layer in the folding area are curved.
具体的,如图2所示,显示面板1包括折叠区5,显示面板1的阴极3和薄膜封装层4的至少部分边缘位于折叠区5内,且阴极3和薄膜封装层4位于折叠区5内的边缘呈曲线型。显示面板1可以通过折叠区5进行不同程度的折叠,在折叠的过程中,位于折叠区5内的阴极3和薄膜封装层4也会被折叠;阴极3和薄膜封装层4位于折叠区5内的边缘包括波浪形曲线边,当然曲线型的具体形状不限于本实施例中提供的。Specifically, as shown in FIG. 2, the display panel 1 includes a folding area 5. At least part of the edges of the cathode 3 and the film encapsulation layer 4 of the display panel 1 are located in the folding area 5, and the cathode 3 and the film encapsulation layer 4 are located in the folding area 5. The inner edge is curved. The display panel 1 can be folded in different degrees through the folding area 5. During the folding process, the cathode 3 and the film packaging layer 4 located in the folding area 5 will also be folded; the cathode 3 and the film packaging layer 4 are located in the folding area 5 The edge of includes a wavy curve edge, of course, the specific shape of the curve is not limited to that provided in this embodiment.
具体的,薄膜封装层4在垂直于显示面板1方向上的投影完全覆盖阴极3在垂直于显示面板1方向上的投影,保证薄膜封装层4完全将阴极3覆盖,起到保护阴极3的作用。Specifically, the projection of the thin film encapsulation layer 4 in the direction perpendicular to the display panel 1 completely covers the projection of the cathode 3 in the direction perpendicular to the display panel 1 to ensure that the thin film encapsulation layer 4 completely covers the cathode 3 to protect the cathode 3. .
本实施例中,显示面板1的折叠区5内的阴极3和薄膜封装层4的边缘为曲线型,可以缓解在折叠过程中对折叠区5内的阴极3与薄膜封装层4的边缘产生的应力,加强折叠区5内的阴极3和薄膜封装层4的边缘的抗弯折能力,减小折叠后阴极3和薄膜封装层4的边缘发生破裂或剥离的风险,防止外界的水汽侵入显示面板1的内部,且保证显示面板1内部信号的正常传输,从而加强了可折叠的显示面板1的可靠性并延长了显示面板1的使用寿命。In this embodiment, the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5 of the display panel 1 are curved, which can alleviate the impact on the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5 during the folding process. Stress, strengthen the bending resistance of the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5, reduce the risk of cracking or peeling of the edges of the cathode 3 and the film encapsulation layer 4 after folding, and prevent external water vapor from invading the display panel 1 and ensure the normal transmission of internal signals of the display panel 1, thereby enhancing the reliability of the foldable display panel 1 and prolonging the service life of the display panel 1.
如图1至图6所示,本申请实施例还提供了一种可折叠的显示面板的制作方法,与上述实施例不同的在于,如图6所示,显示面板1的有机发光器件2包括发光功能层6和阴极3,如图3所示,步骤S101具体包括以下步骤:As shown in FIG. 1 to FIG. 6, an embodiment of the present application also provides a method for manufacturing a foldable display panel. The difference from the foregoing embodiment is that, as shown in FIG. 6, the organic light emitting device 2 of the display panel 1 includes The light-emitting functional layer 6 and the cathode 3, as shown in FIG. 3, step S101 specifically includes the following steps:
S301:提供发光功能层;S301: Provide a light-emitting functional layer;
S302:提供第一掩膜版;其中,第一掩膜版上设有第一开口;S302: Provide a first mask; wherein a first opening is provided on the first mask;
S303:将第一掩膜版与显示面板对位;第一开口的至少部分边缘与折叠区对应,且第一开口与折叠区对应的边缘呈曲线型;以及S303: align the first mask with the display panel; at least part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved; and
S304:通过第一掩膜版在发光功能层上蒸镀形成阴极;阴极的形状和大小与第一开口相同。S304: forming a cathode by vapor deposition on the light-emitting function layer through the first mask; the shape and size of the cathode are the same as the first opening.
具体的,形成的阴极3至少部分边缘位于折叠区5内,且阴极3位于折叠区5内的边缘呈曲线型。Specifically, at least part of the edges of the formed cathode 3 are located in the folding area 5, and the edges of the cathode 3 located in the folding area 5 are curved.
在一实施例中,如图6所示,薄膜封装层4包括第一无机层9、有机层10和第二无机层11;如图4所示,步骤S102中,在有机发光器件上形成薄膜封装层具体包括以下步骤:In an embodiment, as shown in FIG. 6, the thin film encapsulation layer 4 includes a first inorganic layer 9, an organic layer 10, and a second inorganic layer 11. As shown in FIG. 4, in step S102, a thin film is formed on the organic light emitting device. The encapsulation layer specifically includes the following steps:
S401:提供第二掩膜版、第三掩膜版和第四掩膜版;其中,第二掩膜版上设有第二开口,第三掩膜版上设有第三开口,第四掩膜版上设有第四开口;S401: Provide a second mask, a third mask and a fourth mask; wherein the second mask is provided with a second opening, the third mask is provided with a third opening, and the fourth mask is provided A fourth opening is provided on the membrane plate;
S402:将第二掩膜版与显示面板对位;第二开口的至少部分边缘与折叠区对应,且第二开口与折叠区对应的边缘呈曲线型;S402: align the second mask with the display panel; at least part of the edge of the second opening corresponds to the folding area, and the edge corresponding to the second opening and the folding area is curved;
S403:通过第二掩膜版在有机发光器件上蒸镀形成第一无机层;其中,第一无机层的形状和大小与第二开口相同;S403: forming a first inorganic layer by evaporation on the organic light-emitting device through a second mask; wherein the shape and size of the first inorganic layer are the same as the second opening;
S404:将第三掩膜版与显示面板对位;第三开口的至少部分边缘与折叠区对应,且第三开口与折叠区对应的边缘呈曲线型;S404: align the third mask with the display panel; at least part of the edge of the third opening corresponds to the folding area, and the edge corresponding to the third opening and the folding area is curved;
S405:通过第三掩膜版在第一无机层上蒸镀形成有机层;其中,有机层的形状和大小与第三开口相同;S405: forming an organic layer by evaporation on the first inorganic layer through a third mask; wherein the shape and size of the organic layer are the same as the third opening;
S406:将第四掩膜版与显示面板对位;第四开口的至少部分边缘与折叠区对应,且第四开口与折叠区对应的边缘呈曲线型;以及S406: align the fourth mask with the display panel; at least part of the edge of the fourth opening corresponds to the folding area, and the edge of the fourth opening corresponding to the folding area is curved; and
S407:通过第四掩膜版在有机层和第一无机层上蒸镀形成第二无机层;其中,第二无机层的形状和大小与第四开口相同。S407: forming a second inorganic layer by vapor deposition on the organic layer and the first inorganic layer through a fourth mask; wherein the shape and size of the second inorganic layer are the same as the fourth opening.
具体的,形成的薄膜封装层4的第一无机层9、有机层10和第二无机层11的至少部分边缘位于折叠区5内,且第一无机层9、有机层10和第二无机层11位于折叠区5内的边缘呈曲线型。Specifically, at least part of the edges of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the formed thin film encapsulation layer 4 are located in the folding area 5, and the first inorganic layer 9, the organic layer 10 and the second inorganic layer The edge of 11 located in the folding zone 5 is curved.
具体的,第一无机层9在垂直于显示面板1方向上的投影完全覆盖阴极3在垂直于显示面板1方向上的投影,保证薄膜封装层4的第一无机层9完全将阴极3覆盖,起到保护阴极3的作用。Specifically, the projection of the first inorganic layer 9 in the direction perpendicular to the display panel 1 completely covers the projection of the cathode 3 in the direction perpendicular to the display panel 1, ensuring that the first inorganic layer 9 of the thin film encapsulation layer 4 completely covers the cathode 3. Play the role of protecting the cathode 3.
具体的,阴极3、第一无机层9、有机层10和第二无机层11位于折叠区5内的曲线型边缘的形状可以相同,也可以不同,此处不做限制。Specifically, the shapes of the curved edges of the cathode 3, the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 in the folding area 5 may be the same or different, and there is no limitation here.
本实施例中,阴极3和薄膜封装层4的第一无机层9、有机层10和第二无机层11位于折叠区5内的边缘呈波浪形曲线,当然曲线型的具体形状不限于此。阴极3和薄膜封装层4的第一无机层9、有机层10和第二无机层11分别采用第一掩膜版7、第二掩膜版12、第三掩膜版14和第四掩膜版16(由于第一掩膜版、第二掩膜版、第三掩膜版和第四掩膜版的区别在于开口的大小和形状,本申请实施例中统一用图5示意上述四个掩膜版的结构)进行整面蒸镀制得;每个掩膜版都设有一个开口,每个开口对应显示面板1的折叠区5的边缘呈曲线型,使得制得的阴极3和薄膜封装层4的第一无机层9、有机层10和第二无机层11在折叠区5内的边缘均呈曲线型,可以缓解在折叠过程中对折叠区5内的阴极3以及薄膜封装层4的每一层的边缘产生的应力,加强折叠区5内的阴极3和薄膜封装层4的每一层的边缘抗弯折能力,减小折叠后阴极3和薄膜封装层4的每一层的边缘发生破裂或剥离的风险。In this embodiment, the edges of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the cathode 3 and the thin-film encapsulation layer 4 in the folding area 5 are wavy curves. Of course, the specific shape of the curve is not limited to this. The first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the cathode 3 and the thin-film encapsulation layer 4 use a first mask 7, a second mask 12, a third mask 14 and a fourth mask, respectively Plate 16 (Because the difference between the first, second, third, and fourth masks lies in the size and shape of the openings, in the embodiment of the application, FIG. 5 is used to illustrate the above four masks. The structure of the film plate) is made by evaporation on the entire surface; each mask plate is provided with an opening, and each opening corresponds to the edge of the folding area 5 of the display panel 1 and is curved, so that the cathode 3 and the film package The edges of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the layer 4 in the folding area 5 are all curved, which can relieve the damage to the cathode 3 and the thin film encapsulation layer 4 in the folding area 5 during the folding process. The stress generated at the edge of each layer strengthens the bending resistance of each layer of the cathode 3 and the film encapsulation layer 4 in the folding zone 5, and reduces the edge of each layer of the cathode 3 and the film encapsulation layer 4 after folding Risk of cracking or peeling.
如图2和图6所示,本申请实施例还提供了一种可折叠的显示面板1,包括有机发光器件2以及覆盖在有机发光器件2上的薄膜封装层4;有机发光器件2包括阴极3;其中,显示面板1包括折叠区5,阴极3和薄膜封装层4的至少部分边缘位于折叠区5内,且阴极3和薄膜封装层4位于折叠区5内的边缘呈曲线型。As shown in FIGS. 2 and 6, an embodiment of the present application also provides a foldable display panel 1, including an organic light-emitting device 2 and a thin film encapsulation layer 4 covering the organic light-emitting device 2; the organic light-emitting device 2 includes a cathode 3; Wherein, the display panel 1 includes a folding area 5, at least part of the edges of the cathode 3 and the film packaging layer 4 are located in the folding area 5, and the edges of the cathode 3 and the film packaging layer 4 located in the folding area 5 are curved.
具体的,有机发光器件2还包括发光功能层6,用以发光显示图案,阴极3覆盖在发光功能层6上;显示面板1包括显示区(发光区),阴极3整面覆盖在显示区,且阴极3的边缘超出显示区的边缘,即阴极3在垂直于显示面板1方向上的投影面积大于显示区的面积;显示面板1可以通过折叠区5进行折叠形成多个子显示区;另外,薄膜封装层4整面覆盖在阴极3上,且薄膜封装层4的边缘超出阴极3的边缘,即薄膜封装层4在垂直于显示面板1方向上的投影面积大于阴极3在垂直于显示面板1方向上的投影面积,薄膜封装层4可以有效的起到封装效果,保护阴极3,防止外界水汽入侵影响显示面板1的性能。Specifically, the organic light-emitting device 2 further includes a light-emitting functional layer 6 for luminous display patterns, and the cathode 3 covers the light-emitting functional layer 6; the display panel 1 includes a display area (light-emitting area), and the entire surface of the cathode 3 covers the display area. And the edge of the cathode 3 exceeds the edge of the display area, that is, the projection area of the cathode 3 in the direction perpendicular to the display panel 1 is larger than the area of the display area; the display panel 1 can be folded through the folding area 5 to form multiple sub-display areas; in addition, the film The entire surface of the encapsulation layer 4 covers the cathode 3, and the edge of the film encapsulation layer 4 exceeds the edge of the cathode 3, that is, the projection area of the film encapsulation layer 4 in the direction perpendicular to the display panel 1 is larger than that of the cathode 3 in the direction perpendicular to the display panel 1. With the upper projection area, the film encapsulation layer 4 can effectively achieve the encapsulation effect, protect the cathode 3, and prevent external water vapor from intruding and affecting the performance of the display panel 1.
本实施例中,显示面板1的折叠区5内的阴极3和薄膜封装层4的边缘为曲线型,可以缓解在折叠过程中对折叠区5内的阴极3和薄膜封装层4的边缘产生的应力,加强折叠区5内的阴极3和薄膜封装层4的边缘抗弯折能力,减小折叠后阴极3和薄膜封装层4的边缘发生破裂或剥离的风险,防止外界的水汽侵入显示面板1的内部,且保证显示面板1内部信号的正常传输,从而加强了可折叠的显示面板1的可靠性并延长了显示面板1的使用寿命。In this embodiment, the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5 of the display panel 1 are curved, which can alleviate the impact on the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5 during the folding process. Stress, strengthen the bending resistance of the edges of the cathode 3 and the film encapsulation layer 4 in the folding area 5, reduce the risk of cracking or peeling of the edges of the cathode 3 and the film encapsulation layer 4 after folding, and prevent external water vapor from invading the display panel 1 And ensure the normal transmission of internal signals of the display panel 1, thereby enhancing the reliability of the foldable display panel 1 and prolonging the service life of the display panel 1.
在一实施例中,如图6所示,薄膜封装层4包括依次设置在有机发光器件2上的第一无机层9、有机层10和第二无机层11;第一无机层9、有机层10和第二无机层11的至少部分边缘位于折叠区5内,且第一无机层9、有机层10和第二无机层11位于折叠区5的边缘呈曲线型。In one embodiment, as shown in FIG. 6, the thin film encapsulation layer 4 includes a first inorganic layer 9, an organic layer 10, and a second inorganic layer 11 that are sequentially disposed on the organic light-emitting device 2; the first inorganic layer 9, the organic layer At least part of the edges of the second inorganic layer 10 and the second inorganic layer 11 are located in the folding area 5, and the edges of the first inorganic layer 9, the organic layer 10 and the second inorganic layer 11 located in the folding area 5 are curved.
具体的,第一无机层9覆盖在阴极3上,防止外界的水汽入侵到显示面板1的显示区影响显示面板1的性能;有机层10覆盖在第一无机层9上,起到缓冲作用,保护阴极3;第二无机层11覆盖在有机层10上,保护有机层10并防止外界水汽入侵。Specifically, the first inorganic layer 9 covers the cathode 3 to prevent external water vapor from entering the display area of the display panel 1 and affecting the performance of the display panel 1; the organic layer 10 covers the first inorganic layer 9 and plays a buffering role. Protect the cathode 3; the second inorganic layer 11 covers the organic layer 10 to protect the organic layer 10 and prevent the intrusion of external water vapor.
具体的,阴极3、第一无机层9、有机层10和第二无机层11位于折叠区5内的曲线型边缘的形状可以相同,也可以不同,此处不做限制。Specifically, the shapes of the curved edges of the cathode 3, the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 in the folding area 5 may be the same or different, and there is no limitation here.
本实施例中,薄膜封装层4的第一无机层9、有机层10和第二无机层11在折叠区5内的边缘均呈曲线型,可以缓解在折叠过程中对折叠区5内的薄膜封装层4每一层的边缘产生的应力,加强折叠区5内的薄膜封装层4每一层的边缘抗弯折能力,减小折叠后薄膜封装层4每一层的边缘发生破裂或剥离的风险。In this embodiment, the edges of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the thin film encapsulation layer 4 in the folding area 5 are all curved, which can alleviate the damage to the thin film in the folding area 5 during the folding process. The stress generated at the edge of each layer of the encapsulation layer 4 strengthens the bending resistance of each layer of the film encapsulation layer 4 in the folding area 5, and reduces the cracking or peeling of the edge of each layer of the film encapsulation layer 4 after folding risk.
在一实施例中,曲线型包括波浪型。本实施例中,折叠区5的阴极3和薄膜封装层4的每一层的边缘都呈波浪形曲线,增大了阴极3和薄膜封装层4的边缘的面积,使得在弯折过程中边缘受到的应力被分散,减小折叠后阴极3和薄膜封装层4的每一层的边缘发生破裂或剥离的风险。In one embodiment, the curved shape includes a wave shape. In this embodiment, the edges of each layer of the cathode 3 and the film encapsulation layer 4 in the folded area 5 are wavy curves, which increases the area of the edges of the cathode 3 and the film encapsulation layer 4, so that the edges are The stress received is dispersed, reducing the risk of cracking or peeling at the edges of each of the cathode 3 and the film packaging layer 4 after folding.
在一实施例中,如图5所示,阴极3通过第一掩膜版7蒸镀形成;第一掩膜版7上设有第一开口8,第一掩膜版7与显示面板1对位后,第一开口8的至少部分边缘与折叠区5对应,且第一开口8与折叠区5对应的边缘呈曲线型;阴极3的形状和大小与第一开口8相同。In one embodiment, as shown in FIG. 5, the cathode 3 is formed by evaporation of a first mask 7; the first mask 7 is provided with a first opening 8, and the first mask 7 is opposite to the display panel 1. After positioning, at least part of the edges of the first opening 8 correspond to the folding area 5, and the edges of the first opening 8 and the folding area 5 are curved; the cathode 3 has the same shape and size as the first opening 8.
本实施例中,第一掩膜版7的第一开口8对应折叠区5的边缘呈曲线型,阴极3的形状和大小与对应的第一开口8的大小和形状相同,使得制得的阴极3在折叠区5的边缘呈曲线型,有效的缓解了阴极3在弯折时边缘受到的应力。In this embodiment, the first opening 8 of the first mask 7 is curved corresponding to the edge of the folding area 5, and the shape and size of the cathode 3 are the same as the size and shape of the corresponding first opening 8, so that the cathode 3 The edge of the folding area 5 is curved, which effectively relieves the stress on the edge of the cathode 3 when it is bent.
在一实施例中,第一无机层9、有机层10和第二无机层11分别通过第二掩膜版12、第三掩膜版14和第四掩膜版16(由于第一掩膜版、第二掩膜版、第三掩膜版和第四掩膜版的区别在于开口的大小和形状,本申请实施例中统一用图5示意上述四个掩膜版的结构)蒸镀形成;第二掩膜版12上设有第二开口13,第三掩膜版14上设有第三开口15,第四掩膜版16上设有第四开口17;第二掩膜版12、第三掩膜版14和第四掩膜版16分别与显示面板1对位后,第二开口13、第三开口15和第四开口17的至少部分边缘与折叠区5对应,且第二开口13、第三开口15和第四开口17与折叠区5对应的边缘呈曲线型;第一无机层9、有机层10和第二无机层11的形状和大小分别与对应的第二开口13、第三开口15和第四开口17相同。In one embodiment, the first inorganic layer 9, the organic layer 10 and the second inorganic layer 11 pass through the second mask 12, the third mask 14 and the fourth mask 16 respectively (due to the first mask The difference between the second mask, the third mask and the fourth mask lies in the size and shape of the opening. In the embodiment of this application, Fig. 5 is used to illustrate the structure of the four masks above) evaporation formation; The second mask 12 is provided with a second opening 13, the third mask 14 is provided with a third opening 15, and the fourth mask 16 is provided with a fourth opening 17; the second mask 12, After the three mask 14 and the fourth mask 16 are aligned with the display panel 1, at least part of the edges of the second opening 13, the third opening 15 and the fourth opening 17 correspond to the folding area 5, and the second opening 13 The edges of the third opening 15 and the fourth opening 17 corresponding to the folding area 5 are curved; the shapes and sizes of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 correspond to those of the corresponding second opening 13, The third opening 15 and the fourth opening 17 are the same.
本实施例中,薄膜封装层4的第一无机层9、有机层10和第二无机层11通过对应的第二掩膜版12、第三掩膜版14和第四掩膜版16制得,且第二开口13、第三开口15和第四开口17对应折叠区5的边缘呈曲线型;第一无机层9、有机层10和第二无机层11的形状和大小分别与对应的第二开口13、第三开口15和第四开口17的大小和形状相同,使制得的第一无机层9、有机层10和第二无机层11在折叠区5的边缘呈曲线型,有效的缓解了第一无机层9、有机层10和第二无机层11在弯折时边缘受到的应力。In this embodiment, the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 of the thin-film encapsulation layer 4 are made through the corresponding second mask 12, third mask 14, and fourth mask 16. , And the second opening 13, the third opening 15 and the fourth opening 17 are curved corresponding to the edges of the folding area 5; the shapes and sizes of the first inorganic layer 9, the organic layer 10, and the second inorganic layer 11 are respectively corresponding to the corresponding first The sizes and shapes of the two openings 13, the third opening 15 and the fourth opening 17 are the same, so that the prepared first inorganic layer 9, the organic layer 10 and the second inorganic layer 11 are curved at the edge of the folding area 5, which is effective The stress on the edges of the first inorganic layer 9, the organic layer 10 and the second inorganic layer 11 when bent is relieved.
在一实施例中,如图6所示,显示面板1还包括柔性基板18和薄膜晶体管阵列层19,柔性基板18位于有机发光器件2远离薄膜封装层4的一侧,薄膜晶体管阵列层19位于柔性基板18和有机发光器件2之间,薄膜晶体管阵列层19包括多个间隔设置的阻挡层20,多个阻挡层20围绕阴极3和有机层10设置;第一无机层9覆盖在有机发光器件2的阴极3和多个阻挡层20上;有机层10覆盖在第一无机层9上,且有机层10在柔性基板18上的正投影面积大于阴极3在柔性基板18上的正投影面积;第二无机层11覆盖在有机层10和第一无机层9上。In one embodiment, as shown in FIG. 6, the display panel 1 further includes a flexible substrate 18 and a thin film transistor array layer 19. The flexible substrate 18 is located on the side of the organic light emitting device 2 away from the thin film packaging layer 4, and the thin film transistor array layer 19 is located Between the flexible substrate 18 and the organic light-emitting device 2, the thin-film transistor array layer 19 includes a plurality of barrier layers 20 arranged at intervals. The multiple barrier layers 20 are arranged around the cathode 3 and the organic layer 10; the first inorganic layer 9 covers the organic light-emitting device 2 on the cathode 3 and multiple barrier layers 20; the organic layer 10 covers the first inorganic layer 9, and the orthographic area of the organic layer 10 on the flexible substrate 18 is larger than the orthographic area of the cathode 3 on the flexible substrate 18; The second inorganic layer 11 covers the organic layer 10 and the first inorganic layer 9.
具体的,薄膜晶体管阵列层19还包括依次设置在柔性基板18上的缓冲层、第一金属层、第二金属层、平坦层、阳极和像素定义层(图中未标示出);多个阻挡层20覆盖在阳极上,且阻挡层20可以与像素定义层同制程形成,也可以与平坦层同制程形成;有机发光器件2的发光功能层6覆盖在阳极和部分像素定义层上。Specifically, the thin film transistor array layer 19 also includes a buffer layer, a first metal layer, a second metal layer, a flat layer, an anode, and a pixel definition layer (not shown in the figure) that are sequentially arranged on the flexible substrate 18; The layer 20 covers the anode, and the barrier layer 20 can be formed by the same process as the pixel definition layer, or can be formed by the same process as the flat layer; the light-emitting function layer 6 of the organic light emitting device 2 covers the anode and part of the pixel definition layer.
本实施例中,第一无机层9覆盖在阴极3和多个阻挡层20上,用于防止外界的水汽入侵到显示面板1的内部影响显示面板1的性能;有机层10覆盖在第一无机层9上,且完全遮挡阴极3,用以保护阴极3以及发光功能层6,另外,有机层10的边缘位于阻挡层20靠近显示区的一侧,避免了有机层10溢出第一无机层9和第二无机层11的边缘;第一无机层9覆盖在多个阻挡层20上,第二无机层11覆盖在有机层10和第一无机层9上,起到保护有机层10的作用,并有效的防止外界的水汽入侵到显示面板1的内部;本实施例有效的保护了显示面板1的内部结构,保证了显示面板1的显示性能,延长了显示面板1的使用寿命。In this embodiment, the first inorganic layer 9 covers the cathode 3 and the multiple barrier layers 20 to prevent external water vapor from entering the interior of the display panel 1 and affecting the performance of the display panel 1. The organic layer 10 covers the first inorganic On the layer 9, and completely shield the cathode 3 to protect the cathode 3 and the light-emitting function layer 6. In addition, the edge of the organic layer 10 is located on the side of the barrier layer 20 close to the display area to prevent the organic layer 10 from overflowing the first inorganic layer 9 And the edge of the second inorganic layer 11; the first inorganic layer 9 covers the multiple barrier layers 20, and the second inorganic layer 11 covers the organic layer 10 and the first inorganic layer 9 to protect the organic layer 10. It also effectively prevents external water vapor from intruding into the interior of the display panel 1; this embodiment effectively protects the internal structure of the display panel 1, ensures the display performance of the display panel 1, and prolongs the service life of the display panel 1.
综上所述,虽然本申请已以优选实施例揭露如上,但上述优选实施例并非用以限制本申请,本领域的普通技术人员,在不脱离本申请的精神和范围内,均可作各种更动与润饰,因此本申请的保护范围以权利要求界定的范围为准。In summary, although the application has been disclosed as above in preferred embodiments, the above-mentioned preferred embodiments are not intended to limit the application, and those of ordinary skill in the art can make various decisions without departing from the spirit and scope of the application. Such changes and modifications, so the protection scope of this application is subject to the scope defined by the claims.

Claims (16)

  1. 一种可折叠的显示面板的制作方法,包括以下步骤:A manufacturing method of a foldable display panel includes the following steps:
    形成有机发光器件,所述有机发光器件包括阴极;Forming an organic light emitting device, the organic light emitting device including a cathode;
    在所述有机发光器件上形成薄膜封装层;Forming a thin film encapsulation layer on the organic light emitting device;
    其中,所述显示面板包括折叠区,所述阴极和所述薄膜封装层的至少部分边缘位于所述折叠区内,且所述阴极和所述薄膜封装层位于所述折叠区内的边缘呈曲线型。Wherein, the display panel includes a folding area, at least part of the edges of the cathode and the film encapsulation layer are located in the folding area, and the edges of the cathode and the film encapsulation layer in the folding area are curved type.
  2. 如权利要求1所述的可折叠的显示面板的制作方法,其中,所述形成有机发光器件,包括以下步骤:8. The method for manufacturing a foldable display panel according to claim 1, wherein said forming an organic light emitting device comprises the following steps:
    提供发光功能层;Provide light-emitting functional layer;
    提供第一掩膜版;其中,所述第一掩膜版上设有第一开口;Providing a first mask; wherein a first opening is provided on the first mask;
    将所述第一掩膜版与所述显示面板对位;所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;以及Aligning the first mask with the display panel; at least part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved; as well as
    通过所述第一掩膜版在所述发光功能层上蒸镀形成阴极;所述阴极的形状和大小与所述第一开口相同。A cathode is formed by vapor deposition on the light-emitting functional layer through the first mask; the shape and size of the cathode are the same as the first opening.
  3. 如权利要求1所述的可折叠的显示面板的制作方法,其中,所述薄膜封装层包括第一无机层、有机层和第二无机层;3. The method for manufacturing a foldable display panel according to claim 1, wherein the thin film encapsulation layer comprises a first inorganic layer, an organic layer and a second inorganic layer;
    所述在所述有机发光器件上形成薄膜封装层,包括以下步骤:The forming a thin film encapsulation layer on the organic light emitting device includes the following steps:
    提供第二掩膜版、第三掩膜版和第四掩膜版;其中,所述第二掩膜版上设有第二开口,所述第三掩膜版上设有第三开口,所述第四掩膜版上设有第四开口;A second mask, a third mask and a fourth mask are provided; wherein a second opening is provided on the second mask, and a third opening is provided on the third mask, so The fourth mask is provided with a fourth opening;
    将所述第二掩膜版、第三掩膜版和第四掩膜版分别与所述显示面板对位;所述第二开口、第三开口和第四开口的至少部分边缘与所述折叠区对应,且所述第二开口、第三开口和第四开口与所述折叠区对应的边缘呈曲线型;Align the second, third, and fourth masks with the display panel respectively; at least part of the edges of the second, third, and fourth openings are aligned with the folding Areas corresponding to each other, and edges of the second opening, third opening, and fourth opening corresponding to the folding area are curved;
    通过所述第二掩膜版在所述有机发光器件上蒸镀形成第一无机层;其中,所述第一无机层的形状和大小与所述第二开口相同;Forming a first inorganic layer on the organic light-emitting device by evaporation through the second mask; wherein the shape and size of the first inorganic layer are the same as the second opening;
    通过所述第三掩膜版在所述第一无机层上蒸镀形成有机层;其中,所述有机层的形状和大小与所述第三开口相同;以及An organic layer is vapor-deposited on the first inorganic layer through the third mask; wherein the shape and size of the organic layer are the same as the third opening; and
    通过所述第四掩膜版在所述有机层和第一无机层上蒸镀形成第二无机层;其中,所述第二无机层的形状和大小与所述第四开口相同。A second inorganic layer is formed by vapor deposition on the organic layer and the first inorganic layer through the fourth mask; wherein the shape and size of the second inorganic layer are the same as the fourth opening.
  4. 如权利要求1所述的可折叠的显示面板的制作方法,其中,所述曲线型包括波浪型。8. The method of manufacturing a foldable display panel according to claim 1, wherein the curved shape includes a wave shape.
  5. 如权利要求1所述的可折叠的显示面板的制作方法,其中,所述薄膜封装层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。The method of manufacturing a foldable display panel according to claim 1, wherein the projection of the film encapsulation layer in the direction perpendicular to the display panel completely covers the projection of the cathode in the direction perpendicular to the display panel .
  6. 如权利要求3所述的可折叠的显示面板的制作方法,其中,所述第一无机层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。The method of manufacturing a foldable display panel according to claim 3, wherein the projection of the first inorganic layer in the direction perpendicular to the display panel completely covers the cathode in the direction perpendicular to the display panel. projection.
  7. 一种可折叠的显示面板的制作方法,所述显示面板包括折叠区,所述制作方法包括以下步骤:A manufacturing method of a foldable display panel, the display panel including a folding area, the manufacturing method including the following steps:
    提供发光功能层;Provide light-emitting functional layer;
    提供第一掩膜版、第二掩膜版、第三掩膜版和第四掩膜版;其中,所述第一掩膜版上设有第一开口,第二掩膜版上设有第二开口,第三掩膜版上设有第三开口,第四掩膜版上设有第四开口;A first mask, a second mask, a third mask, and a fourth mask are provided; wherein, the first mask is provided with a first opening, and the second mask is provided with a Two openings, a third opening is provided on the third mask, and a fourth opening is provided on the fourth mask;
    将所述第一掩膜版与所述显示面板对位;所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;Aligning the first mask with the display panel; at least a part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved;
    通过所述第一掩膜版在所述发光功能层上蒸镀形成阴极;所述阴极的形状和大小与所述第一开口相同;A cathode is formed by vapor deposition on the light-emitting functional layer through the first mask; the shape and size of the cathode are the same as the first opening;
    将所述第二掩膜版与所述显示面板对位;所述第二开口的至少部分边缘与所述折叠区对应,且所述第二开口与所述折叠区对应的边缘呈曲线型;Aligning the second mask with the display panel; at least a part of the edge of the second opening corresponds to the folding area, and the edge corresponding to the second opening and the folding area is curved;
    通过所述第二掩膜版在所述阴极上蒸镀形成第一无机层;其中,所述第一无机层的形状和大小与所述第二开口相同;Forming a first inorganic layer by evaporation on the cathode through the second mask; wherein the shape and size of the first inorganic layer are the same as the second opening;
    将所述第三掩膜版与所述显示面板对位;所述第三开口的至少部分边缘与所述折叠区对应,且所述第三开口与所述折叠区对应的边缘呈曲线型;Aligning the third mask with the display panel; at least part of the edge of the third opening corresponds to the folding area, and the edge of the third opening corresponding to the folding area is curved;
    通过所述第三掩膜版在所述第一无机层上蒸镀形成有机层;其中,所述有机层的形状和大小与所述第三开口相同;Forming an organic layer by vapor deposition on the first inorganic layer through the third mask; wherein the shape and size of the organic layer are the same as the third opening;
    将所述第四掩膜版与所述显示面板对位;所述第四开口的至少部分边缘与所述折叠区对应,且所述第四开口与所述折叠区对应的边缘呈曲线型;以及Aligning the fourth mask with the display panel; at least a part of the edge of the fourth opening corresponds to the folding area, and the edge of the fourth opening corresponding to the folding area is curved; as well as
    通过所述第四掩膜版在所述有机层和第一无机层上蒸镀形成第二无机层;其中,所述第二无机层的形状和大小与所述第四开口相同;其中,所述第一无机层、所述有机层和所述第二无机层构成薄膜封装层。A second inorganic layer is formed by vapor deposition on the organic layer and the first inorganic layer through the fourth mask; wherein the shape and size of the second inorganic layer are the same as those of the fourth opening; wherein The first inorganic layer, the organic layer and the second inorganic layer constitute a thin film encapsulation layer.
  8. 如权利要求7所述的可折叠的显示面板的制作方法,其中,所述曲线型包括波浪型。8. The method of manufacturing a foldable display panel according to claim 7, wherein the curved shape includes a wave shape.
  9. 如权利要求7所述的可折叠的显示面板的制作方法,其中,所述第一无机层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。The method for manufacturing a foldable display panel according to claim 7, wherein the projection of the first inorganic layer in the direction perpendicular to the display panel completely covers the cathode in the direction perpendicular to the display panel. projection.
  10. 一种可折叠的显示面板,包括有机发光器件以及覆盖在所述有机发光器件上的薄膜封装层;所述有机发光器件包括阴极;其中,所述显示面板包括折叠区,所述阴极和所述薄膜封装层的至少部分边缘位于所述折叠区内,且所述阴极和所述薄膜封装层位于所述折叠区内的边缘呈曲线型。A foldable display panel includes an organic light-emitting device and a thin-film encapsulation layer covering the organic light-emitting device; the organic light-emitting device includes a cathode; wherein the display panel includes a folding area, the cathode and the At least part of the edges of the thin film packaging layer are located in the folding area, and the edges of the cathode and the thin film packaging layer located in the folding area are curved.
  11. 如权利要求10所述的可折叠的显示面板,其特征在于,所述薄膜封装层包括依次设置在所述有机发光器件上的第一无机层、有机层和第二无机层;所述第一无机层、有机层和第二无机层的至少部分边缘位于所述折叠区内,且所述第一无机层、有机层和第二无机层位于所述折叠区的边缘呈曲线型。The foldable display panel of claim 10, wherein the thin film encapsulation layer comprises a first inorganic layer, an organic layer, and a second inorganic layer that are sequentially disposed on the organic light-emitting device; the first At least part of the edges of the inorganic layer, the organic layer and the second inorganic layer are located in the folding area, and the edges of the first inorganic layer, the organic layer and the second inorganic layer located in the folding area are curved.
  12. 如权利要求10所述的可折叠的显示面板,其中,所述曲线型包括波浪型。10. The foldable display panel of claim 10, wherein the curved shape includes a wave shape.
  13. 如权利要求10所述的可折叠的显示面板,其中,所述阴极通过第一掩膜版蒸镀形成;所述第一掩膜版上设有第一开口,所述第一掩膜版与所述显示面板对位后,所述第一开口的至少部分边缘与所述折叠区对应,且所述第一开口与所述折叠区对应的边缘呈曲线型;所述阴极的形状和大小与所述第一开口相同。The foldable display panel of claim 10, wherein the cathode is formed by evaporation of a first mask; a first opening is provided on the first mask, and the first mask is connected to the After the display panel is aligned, at least part of the edge of the first opening corresponds to the folding area, and the edge corresponding to the first opening and the folding area is curved; the shape and size of the cathode are The first openings are the same.
  14. 如权利要求11所述的可折叠的显示面板,其特征在于,所述第一无机层、有机层和第二无机层分别通过第二掩膜版、第三掩膜版和第四掩膜版蒸镀形成;The foldable display panel of claim 11, wherein the first inorganic layer, the organic layer, and the second inorganic layer pass through a second mask, a third mask, and a fourth mask, respectively. Evaporation formation;
    所述第二掩膜版上设有第二开口,所述第三掩膜版上设有第三开口,所述第四掩膜版上设有第四开口;所述第二掩膜版、第三掩膜版和第四掩膜版分别与所述显示面板对位后,所述第二开口、第三开口和第四开口的至少部分边缘与所述折叠区对应,且所述第二开口、第三开口和第四开口与所述折叠区对应的边缘呈曲线型;The second mask is provided with a second opening, the third mask is provided with a third opening, and the fourth mask is provided with a fourth opening; the second mask, After the third mask and the fourth mask are respectively aligned with the display panel, at least part of the edges of the second, third, and fourth openings correspond to the folding area, and the second The edges of the opening, the third opening and the fourth opening corresponding to the folding area are curved;
    所述第一无机层、有机层和第二无机层的形状和大小分别与对应的第二开口、第三开口和第四开口相同。The shapes and sizes of the first inorganic layer, the organic layer, and the second inorganic layer are the same as the corresponding second, third, and fourth openings, respectively.
  15. 如权利要求11所述的可折叠的显示面板,其中,所述显示面板还包括柔性基板和薄膜晶体管阵列层,所述柔性基板位于所述有机发光器件远离所述薄膜封装层的一侧,所述薄膜晶体管阵列层位于所述柔性基板和有机发光器件之间,所述薄膜晶体管阵列层包括多个间隔设置的阻挡层,多个阻挡层围绕所述阴极和有机层设置;The foldable display panel according to claim 11, wherein the display panel further comprises a flexible substrate and a thin film transistor array layer, the flexible substrate is located on a side of the organic light emitting device away from the thin film encapsulation layer, so The thin film transistor array layer is located between the flexible substrate and the organic light emitting device, and the thin film transistor array layer includes a plurality of barrier layers arranged at intervals, and the plurality of barrier layers are arranged around the cathode and the organic layer;
    所述第一无机层覆盖在所述有机发光器件的阴极和多个阻挡层上;所述有机层覆盖在第一无机层上,且所述有机层在所述柔性基板上的正投影面积大于所述阴极在所述柔性基板上的正投影面积;所述第二无机层覆盖在所述有机层和所述第一无机层上。The first inorganic layer covers the cathode of the organic light-emitting device and the plurality of barrier layers; the organic layer covers the first inorganic layer, and the orthographic projection area of the organic layer on the flexible substrate is larger than The orthographic projection area of the cathode on the flexible substrate; the second inorganic layer covers the organic layer and the first inorganic layer.
  16. 如权利要求10所述的可折叠的显示面板,其中,所述薄膜封装层在垂直于所述显示面板方向上的投影完全覆盖所述阴极在垂直于所述显示面板方向上的投影。10. The foldable display panel of claim 10, wherein the projection of the film encapsulation layer in a direction perpendicular to the display panel completely covers the projection of the cathode in a direction perpendicular to the display panel.
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