WO2020184567A1 - Image inspection device and image inspection method - Google Patents

Image inspection device and image inspection method Download PDF

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Publication number
WO2020184567A1
WO2020184567A1 PCT/JP2020/010331 JP2020010331W WO2020184567A1 WO 2020184567 A1 WO2020184567 A1 WO 2020184567A1 JP 2020010331 W JP2020010331 W JP 2020010331W WO 2020184567 A1 WO2020184567 A1 WO 2020184567A1
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WO
WIPO (PCT)
Prior art keywords
light
unit
image
image inspection
emission direction
Prior art date
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PCT/JP2020/010331
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French (fr)
Japanese (ja)
Inventor
和志 吉岡
加藤　豊
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オムロン株式会社
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Publication of WO2020184567A1 publication Critical patent/WO2020184567A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to an image inspection device and an image inspection method.
  • an image inspection device may be installed in the product manufacturing line to inspect parts and finished products.
  • the direction of lighting is adjusted in advance so that the state of an object such as a part or a finished product can be appropriately photographed.
  • Patent Document 1 there is a method of photographing an object illuminated by a pattern selected from a pattern that combines the presence / absence of lighting of a plurality of illumination blocks and the intensity of irradiation light of each illumination block. It is disclosed.
  • the object is not always photographed in the same position and posture.
  • the position and posture of the object may change in the process of being conveyed, and the position and posture at the time of shooting may not be constant. Therefore, it may not be possible to take an appropriate image of the object in the illumination direction optimized for a specific position and posture.
  • the present invention provides an image inspection device and an image inspection method capable of taking an appropriate image of an object and inspecting the image even when the position and posture of the object are not constant.
  • the image inspection apparatus includes a measuring unit that measures placement information including at least one of the position and orientation of an object, and a plurality of lighting elements arranged in a matrix, and a plurality of lighting elements. Based on the lighting unit that irradiates the object with light by controlling the emission direction of the light according to the arrangement information, the photographing unit that captures the illuminated object, and the image captured by the photographing unit. It is equipped with an inspection unit that inspects the condition of the object.
  • the position and orientation of the object are measured by measuring the arrangement information including at least one of the position and orientation of the object and controlling the emission direction of light by the plurality of lighting elements according to the arrangement information. Even when the value is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
  • the lighting unit may irradiate the object with light by correcting the emission direction of the light designed in advance for the object according to the arrangement information.
  • the object by correcting the emission direction of the pre-designed light according to the arrangement information, the object can be calculated with a smaller amount of calculation as compared with the case where the emission direction of the pre-designed light is not referred to.
  • the light emission direction can be controlled so that an appropriate image can be taken.
  • the measuring unit may include a distance measuring sensor that measures the distance to the object.
  • the arrangement information of the object can be measured more accurately, and even when the position and posture of the object are not constant, an appropriate image of the object can be taken and an image inspection can be performed. ..
  • the measuring unit extracts the shape feature of the object based on the test image taken by the photographing unit of the object irradiated with the predetermined light by the lighting unit, and arranges the object based on the shape feature. May be measured.
  • the arrangement information of the object can be measured based on the test image, and the hardware configuration of the measuring unit can be simplified.
  • the illumination unit when a test image is taken by the photographing unit, the illumination unit emits either light directed at the contour of the object, line-shaped light crossing the object, or striped light covering the object. You may irradiate.
  • the shape feature of the object can be extracted more accurately based on the test image, and the arrangement information of the object can be measured more accurately.
  • the measuring unit may include an auxiliary photographing unit that photographs an object from a direction different from that of the photographing unit.
  • the arrangement information of the object can be measured more accurately, and even when the position and posture of the object are not constant, an appropriate image of the object can be taken and an image inspection can be performed. ..
  • the illumination unit the light from a plurality of illumination elements is used so that the light reflected at the normal portion of the object is incident on the photographing unit and the light reflected at the abnormal portion of the object is not incident on the photographing unit.
  • the object may be irradiated with light by controlling the emission direction of the object according to the arrangement information.
  • the image of the object satisfies the bright field condition that the normal part of the object appears bright and the abnormal part of the object appears dark. Can be photographed and image inspection can be performed.
  • the illumination unit is provided with a plurality of illumination elements so that the light reflected at the normal portion of the object does not enter the photographing unit and the light reflected at the abnormal portion of the object is incident on the photographing unit.
  • the light emission direction may be controlled according to the arrangement information to irradiate the object with light.
  • the image of the object satisfies the dark field condition that the normal part of the object appears dark and the abnormal part of the object appears bright. Can be photographed and image inspection can be performed.
  • the image inspection apparatus includes a plurality of illuminating elements arranged in a matrix in which the emission direction of light can be controlled, and a plurality of illuminating elements with respect to an object. Based on the characteristics of the illumination unit that irradiates light multiple times at an angle, the photographing unit that photographs the object each time the light is irradiated, and the characteristics of the plurality of images of the photographed object, at least one from the plurality of images. It is provided with a selection unit for selecting an image of light, and an inspection unit for inspecting the state of an object based on at least one image.
  • the position and orientation of the object are not constant by irradiating the object with light at a plurality of angles to capture a plurality of images and selecting at least one image. Also, an appropriate image of the object can be taken and an image inspection can be performed.
  • An image inspection method is to measure arrangement information including at least one of the position and orientation of an object, and to measure light from an illumination unit including a plurality of illumination elements arranged in a matrix.
  • the emission direction is controlled according to the arrangement information, the object is irradiated with light, the illuminated object is photographed, and the state of the object is inspected based on the photographed image. Including that.
  • the position and orientation of the object are measured by measuring the arrangement information including at least one of the position and orientation of the object and controlling the emission direction of light by the plurality of lighting elements according to the arrangement information. Even when the value is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
  • the emission direction of light can be controlled, and light is emitted from an object at a plurality of angles with respect to an object by an illumination unit including a plurality of illumination elements arranged in a matrix. At least one image is selected from the plurality of images based on the characteristics of the multiple images of the object being photographed and the object being photographed each time the light is irradiated. This includes inspecting the condition of the object based on at least one image.
  • the position and orientation of the object are not constant by irradiating the object with light at a plurality of angles to capture a plurality of images and selecting at least one image. Also, an appropriate image of the object can be taken and an image inspection can be performed.
  • an image inspection device and an image inspection method capable of taking an appropriate image of an object and inspecting the image even when the position and posture of the object are not constant. It becomes.
  • FIG. 1 is a schematic view showing an outline of the image inspection apparatus 100 according to the first embodiment of the present invention.
  • the image inspection device 100 takes an image of the object 1 transported by the transport unit 50 and performs an image inspection.
  • the image inspection device 100 according to the present embodiment includes an auxiliary photographing unit 10, a lighting unit 20, an imaging unit 30, and an information processing device 40.
  • the auxiliary photographing unit 10 is an example of a measuring unit that measures arrangement information including at least one of the position and posture of the object 1, and photographs the object 1 from a direction different from that of the photographing unit 30.
  • the auxiliary photographing unit 10 may be composed of a general-purpose camera, and in the case of this example, the object 1 is photographed from the direction along the conveying surface of the conveying unit 50.
  • the illumination unit 20 includes a plurality of illumination elements arranged in a matrix, controls the emission direction of light by the plurality of illumination elements according to the arrangement information, and irradiates the object 1 with light.
  • the lighting unit 20 is arranged so as to cover a backlight composed of, for example, an LED (Light Emitting Diode) and the backlight, and a liquid crystal panel constituting a plurality of pixels and a liquid crystal panel so as to cover the liquid crystal panel. It may have a microlens array.
  • the illumination unit 20 may control a plurality of pixels of the liquid crystal panel to transmit or block light, and emit light in a specific direction by a microlens array.
  • the lighting unit 20 may have another configuration.
  • the illumination unit 20 is arranged so as to cover a backlight composed of, for example, LEDs or the like, a first liquid crystal panel that constitutes a plurality of pixels, and a plurality of illumination units 20 that are arranged so as to cover the first liquid crystal panel. It may have a second liquid crystal panel constituting the pixels of. In this case, the illumination unit 20 may control a plurality of pixels of the first liquid crystal panel and the second liquid crystal panel to transmit or block light and emit light in a specific direction.
  • the lighting unit 20 may irradiate the object 1 with light by correcting the light emission direction designed in advance for the object 1 according to the arrangement information.
  • the pre-designed light emission direction for the object 1 is the direction of illumination optimized when the object 1 is in a specific position and orientation.
  • the lighting unit 20 calculates how much the position and orientation of the object 1 deviates from a specific position and orientation designed in advance based on the arrangement information, and corrects the light emission direction according to the deviation. Good.
  • the photographing unit 30 photographs the illuminated object 1.
  • the photographing unit 30 may be composed of a general-purpose camera, and in the case of this example, the object 1 is photographed from a direction perpendicular to the conveying surface of the conveying unit 50.
  • the information processing device 40 functions as an inspection unit that inspects the state of the object 1 based on the image captured by the photographing unit 30.
  • the information processing device 40 performs known image processing on the image captured by the photographing unit 30, inspects the object 1 for any abnormality, displays the inspection result, and transmits the inspection result to an external device.
  • the arrangement information including at least one of the position and the posture of the object 1 is measured, and the light emission direction by the plurality of illumination elements is measured according to the arrangement information.
  • the arrangement information of the object 1 is measured more accurately, and an appropriate image of the object 1 is photographed even when the position and the posture of the object 1 are not constant. be able to.
  • the object 1 is suitable with a smaller amount of calculation as compared with the case where the emission direction of the light designed in advance is not referred to.
  • the light emission direction can be controlled so that an image can be taken.
  • FIG. 2 is a diagram showing a physical configuration of an information processing device 40 included in the image inspection device 100 according to the first embodiment.
  • the information processing device 40 includes a CPU (Central Processing Unit) 10a corresponding to a calculation unit, a RAM (Random Access Memory) 10b corresponding to a storage unit, a ROM (Read only Memory) 10c corresponding to a storage unit, and a communication unit. It has a 10d, an input unit 10e, and a display unit 10f. Each of these configurations is connected to each other via a bus so that data can be transmitted and received.
  • the information processing device 40 is composed of one computer will be described, but the information processing device 40 may be realized by combining a plurality of computers.
  • the configuration shown in FIG. 10 is an example, and the information processing apparatus 40 may have configurations other than these, or may not have a part of these configurations.
  • the CPU 10a is a control unit that controls execution of a program stored in the RAM 10b or ROM 10c, calculates data, and processes data.
  • the CPU 10a is a calculation unit that executes a program (image inspection program) for inspecting the state of the object based on the image of the object 1 taken with illumination according to the arrangement information of the object 1 measured by the measuring unit. Is.
  • the CPU 10a receives various data from the input unit 10e and the communication unit 10d, displays the calculation result of the data on the display unit 10f, and stores it in the RAM 10b or the ROM 10c.
  • the CPU 10a functions as an inspection unit 41 by executing an image inspection program.
  • the inspection unit 41 inspects the state of the object 1 based on the image taken by the photographing unit 30.
  • the CPU 10a may function as a correction unit that corrects the light emission direction designed in advance for the object 1 according to the arrangement information by executing the image inspection program.
  • the RAM 10b is a storage unit in which data can be rewritten, and may be composed of, for example, a semiconductor storage element.
  • the RAM 10b may store data such as an image inspection program executed by the CPU 10a and an image of an object. It should be noted that these are examples, and data other than these may be stored in the RAM 10b, or a part of these may not be stored.
  • the ROM 10c is a storage unit capable of reading data, and may be composed of, for example, a semiconductor storage element.
  • the ROM 10c may store, for example, an image inspection program or data that is not rewritten.
  • the communication unit 10d is an interface for connecting the information processing device 40 to another device.
  • the communication unit 10d may be connected to a communication network such as the Internet.
  • the input unit 10e receives data input from the user, and may include, for example, a keyboard and a touch panel.
  • the display unit 10f visually displays the calculation result by the CPU 10a, and may be configured by, for example, an LCD (Liquid Crystal Display).
  • the display unit 10f may display, for example, an image of the object 1 or an inspection result by the inspection unit 41.
  • the image inspection program may be stored in a storage medium readable by a computer such as RAM 10b or ROM 10c and provided, or may be provided via a communication network connected by the communication unit 10d.
  • the operation of the inspection unit 41 and the like is realized by the CPU 10a executing the image inspection program.
  • the information processing device 40 may include an LSI (Large-Scale Integration) in which the CPU 10a and the RAM 10b or ROM 10c are integrated.
  • FIG. 3 is a diagram showing a first example in which an object is photographed so as to satisfy a bright visual field condition by the image inspection apparatus 100 according to the first embodiment.
  • the bright visual field condition is an illumination condition in which the normal portion of the object 1 appears bright and the abnormal portion of the object 1 appears dark.
  • the light L1 emitted in the pre-designed direction is reflected by the normal portion of the object 1 and the reflected light R1. Is incident on the photographing unit 30.
  • the object 1 has an abnormal portion, the light reflected by the abnormal portion does not enter the photographing unit 30 (or even if it does, the intensity is smaller than the reflected light R1 from the normal portion).
  • FIG. 4 is a diagram showing a second example in which an object is photographed so as to satisfy a bright visual field condition by the image inspection device 100 according to the first embodiment.
  • the object 1 is not placed horizontally on the transport unit 50, and the posture is tilted.
  • the illumination unit 20 has a plurality of illumination elements so that the light R2 reflected at the normal portion of the object 1 is incident on the photographing unit 30 and the light reflected at the abnormal portion of the object 1 is not incident on the photographing unit 30.
  • the light L2 may be applied to the object 1 by controlling the light emission direction according to the arrangement information.
  • the illumination unit 20 corrects the light emission direction (light L1 shown in FIG. 3) designed in advance for the object 1 according to the arrangement information of the object 1 with respect to the object 1.
  • Light L2 may be irradiated.
  • the object can satisfy the bright field condition that the normal part of the object 1 appears bright and the abnormal part of the object 1 appears dark.
  • the image of 1 can be taken. Therefore, according to the image inspection device 100 according to the present embodiment, an appropriate image inspection can be performed even when the position and posture of the object 1 are not constant.
  • FIG. 5 is a diagram showing a first example of photographing an object so as to satisfy the dark field condition by the image inspection apparatus 100 according to the first embodiment.
  • the dark field condition is an illumination condition in which the normal portion of the object 1 appears dark and the abnormal portion of the object 1 appears bright.
  • the light L3 emitted in the pre-designed direction is reflected by the normal portion of the object 1 and the reflected light R3. Does not enter the photographing unit 30.
  • the object 1 has an abnormal portion, the light reflected by the abnormal portion is incident on the photographing unit 30 (or light having a higher intensity than the reflected light R3 from the normal portion is incident).
  • FIG. 6 is a diagram showing a second example of photographing an object so as to satisfy the dark field condition by the image inspection apparatus 100 according to the first embodiment.
  • the object 1 is not placed horizontally on the transport unit 50, and the posture is tilted.
  • the illumination unit 20 has a plurality of illuminations so that the light R4 reflected at the normal portion of the object 1 does not enter the photographing unit 30 and the light reflected at the abnormal portion of the object 1 incident on the photographing unit 30.
  • the light L4 may be applied to the object 1 by controlling the light emission direction of the element according to the arrangement information.
  • the illumination unit 20 corrects the light emission direction (light L3 shown in FIG. 5) designed in advance for the object 1 according to the arrangement information of the object 1 with respect to the object 1.
  • Light L4 may be irradiated.
  • the image inspection device 100 According to the present embodiment, an appropriate image inspection can be performed even when the position and posture of the object 1 are not constant.
  • FIG. 7 is a schematic view showing an outline of the image inspection device 101 according to the second embodiment of the present invention.
  • the image inspection device 101 according to the second embodiment has the first embodiment in that it includes the distance measuring sensors 15a, 15b, 15c as a measuring unit for measuring the arrangement information including at least one of the position and the posture of the object 1. It is different from the image inspection device 100 and has the same configuration as the image inspection device 100 according to the first embodiment.
  • the distance measuring sensors 15a, 15b, and 15c each measure the distance to the object 1.
  • the distance measuring sensors 15a, 15b, and 15c measure the distances of the different points of the object 1 in the direction perpendicular to the transport surface of the transport unit 50.
  • the distance measuring sensors 15a, 15b, and 15c measure the arrangement information of the object 1 more accurately, and even when the position and posture of the object 1 are not constant, an appropriate image of the object 1 is obtained. Can be photographed and image inspection can be performed.
  • the distance measuring sensor is not limited to a sensor that measures the distance at one point, but is a sensor that measures the distance at multiple points, a sensor that measures the distance on a line, or measures a distance on a two-dimensional area. It may be a sensor that does.
  • FIG. 8 is a diagram showing an example in which the object 1 is photographed by the image inspection device 102 according to the third embodiment of the present invention.
  • the image inspection device 102 according to the present embodiment irradiates a predetermined light with a lighting unit 20 to take a test image of the object 1, extracts the shape feature of the object 1 based on the test image, and converts the shape feature into the shape feature. It differs from the image inspection device 100 according to the first embodiment in that the arrangement information of the object 1 is measured based on the above, and has the same configuration as the image inspection device 100 according to the first embodiment in other respects.
  • the image inspection device 102 irradiates a predetermined light L5 with the lighting unit 20, and takes a test image of the object 1 with the photographing unit 30. More specifically, when the illuminating unit 20 captures a test image by the photographing unit 30, the light directed toward the contour of the object 1, the line-shaped light crossing the object 1, and the stripes covering the object 1 are covered. You may irradiate any of the light.
  • the image inspection device 102 calculates the position and distortion of the contour of the object 1 based on the test image, and calculates the position and distortion of the contour of the object 1 based on the position of the contour.
  • the position of 1 may be measured, and the posture of the object 1 may be measured based on the distortion of the contour.
  • the image inspection device 102 may measure the position and the posture of the object 1 by the light cutting method.
  • the image inspection device 102 may measure the position and orientation of the object 1 by the phase shift method.
  • the shape feature of the object 1 can be extracted more accurately based on the test image, and the arrangement information of the object 1 can be measured more accurately. ..
  • FIG. 9 is a diagram showing an example of a test image IMG taken by the image inspection device 102 according to the third embodiment.
  • the measuring unit of the image inspection device 102 according to the present embodiment extracts the shape feature of the object 1 based on the test image IMG taken by the photographing unit 30 of the object 1 irradiated with the predetermined light by the lighting unit 20. , The arrangement information of the object 1 is measured based on the shape feature.
  • FIG. 9 shows an example of a test image IMG taken by irradiating the contour of the object 1 with light by the illumination unit 20.
  • the image inspection device 102 may extract the contour shape of the object 1 as a shape feature of the object 1.
  • the image inspection device 102 may calculate the distortion of the contour based on the shape of the contour of the extracted object 1, and measure the posture of the object 1 based on the distortion of the contour. In this way, the arrangement information of the object 1 can be measured based on the test image IMG, and the hardware configuration of the measuring unit can be simplified.
  • the image inspection device 102 may extract edges other than the pattern of the object 1 and the contour of the object 1 and measure the position and posture of the object 1 based on them.
  • FIG. 10 is a schematic view showing an outline of the image inspection apparatus 103 according to the fourth embodiment of the present invention.
  • the image inspection device 103 according to the fourth embodiment does not include a measuring unit such as an auxiliary photographing unit 10, and has a point that the illumination unit 20 illuminates the object 1 multiple times at a plurality of angles, and an imaging unit 30 allows the object 1 to be illuminated.
  • the point of taking a plurality of images of the above and the point of selecting at least one image from the plurality of images by the information processing apparatus 40 are different from the image inspection device 100 according to the first embodiment, and the other points are described in the first embodiment. It has the same configuration as the image inspection device 100.
  • the illumination unit 20 of the image inspection device 103 can control the light emission direction, includes a plurality of illumination elements arranged in a matrix, and the plurality of illumination elements with respect to the object 1. , Irradiate light multiple times at multiple angles. Then, the photographing unit 30 photographs the object 1 each time the light is irradiated. For example, when the illumination unit 20 irradiates the object 1 with light at 10 different angles, the photographing unit 30 captures 10 images of the object 1.
  • the illumination unit 20 may irradiate light at a plurality of angles a plurality of times by varying the emission direction of the light designed in advance. In this case, the illumination unit 20 may randomly change the emission direction of the light designed in advance, or may change it by a predetermined angle.
  • the information processing device 40 determines the state of the object 1 based on the selection unit that selects at least one image from the plurality of images and the state of the object 1 based on the characteristics of the plurality of images of the captured object 1. It functions as an inspection unit for inspection.
  • the selection unit selects, for example, at least one image from the plurality of images based on the contrast of the plurality of images, or at least one image from the plurality of images based on the sharpness of the edge of the captured object 1.
  • An image may be selected, or at least one image may be selected from a plurality of images based on the sharpness of a predetermined shape of the captured object 1.
  • the photographing unit 30 photographs a plurality of images of the object 1 at different telephoto magnifications
  • the selection unit selects at least one of the plurality of images based on whether or not the entire object 1 is contained in the image. You may select an image.
  • the selection unit may select the brightest image among the plurality of images of the object 1. Further, when capturing an image satisfying the dark field condition, the selection unit may select the darkest image among the plurality of images of the object 1.
  • the position of the object 1 is determined by irradiating the object 1 with light at a plurality of angles to capture a plurality of images and selecting at least one image. And even when the posture is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
  • FIG. 11 is a diagram showing a physical configuration of the information processing device 40 included in the image inspection device 103 according to the fourth embodiment of the present invention. Hereinafter, the differences from the information processing device 40 included in the image inspection device 100 according to the first embodiment will be described.
  • the CPU 10a functions as an inspection unit 41 and a selection unit 42 by executing an image inspection program.
  • the selection unit 42 selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object 1.
  • the characteristics of the image may be the contrast of the image, the sharpness of the edge of the object 1 captured in the image, the sharpness of the predetermined shape of the object 1 captured in the image, and the like.
  • the image inspection program may be stored in a storage medium readable by a computer such as RAM 10b or ROM 10c and provided, or may be provided via a communication network connected by the communication unit 10d.
  • the operation of the inspection unit 41 and the selection unit 42 is realized by the CPU 10a executing the image inspection program.
  • the information processing device 40 may include an LSI in which the CPU 10a is integrated with the RAM 10b and the ROM 10c.
  • FIG. 12 is a flowchart of an image inspection process executed by the image inspection device 103 according to the fourth embodiment.
  • the image inspection device 103 irradiates the object 1 with light a plurality of times at a plurality of angles (S10), and photographs the object 1 each time the light is irradiated (S11).
  • the image inspection device 103 selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (S12). Finally, the image inspection device 103 performs an image inspection based on the selected image (S13). As a matter of course, the image inspection device 103 may display the result of the image inspection or transmit it to an external device. With the above, the image inspection process is completed.
  • Illumination in which the emission direction of light can be controlled includes a plurality of illumination elements arranged in a matrix, and the plurality of illumination elements irradiate the object (1) with light at a plurality of angles. Part (20) and Each time the light is irradiated, the photographing unit (30) that photographs the object (1) and A selection unit (42) that selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (1). An inspection unit (41) that inspects the state of the object (1) based on at least one image, An image inspection device (103).
  • the emission direction of light can be controlled, and the object (1) is irradiated with light at a plurality of angles by an illumination unit (20) including a plurality of illumination elements arranged in a matrix.
  • an illumination unit (20) including a plurality of illumination elements arranged in a matrix.
  • the object (1) is photographed, and To select at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (1). Inspecting the state of the object (1) based on the at least one image, and Image inspection methods including.

Abstract

Provided are an image inspection device and an image inspection method, whereby an appropriate image of a subject can be captured and image inspection performed, even if the position or posture of the subject is not constant. The image inspection device comprises: a measurement unit that measures arrangement information including at least either the position or posture of the subject; an illumination unit that includes a plurality of illumination elements arranged in a matrix, controls the emission direction of the light by the plurality of illumination elements in accordance with the arrangement information, and illuminates light on to the subject; an imaging unit that captures images of the illuminated subject; and an inspection unit that inspects the state of the subject, on the basis of images captured by the imaging unit.

Description

画像検査装置及び画像検査方法Image inspection equipment and image inspection method
　本発明は、画像検査装置及び画像検査方法に関する。 The present invention relates to an image inspection device and an image inspection method.
　従来、製品の製造ラインに画像検査装置を導入して、部品や完成品の検査を行うことがある。この場合、部品や完成品等の対象物の状態を適切に撮影できるように、照明の方向を予め調整している。 Conventionally, an image inspection device may be installed in the product manufacturing line to inspect parts and finished products. In this case, the direction of lighting is adjusted in advance so that the state of an object such as a part or a finished product can be appropriately photographed.
　例えば、下記特許文献１には、複数個の照明ブロックの点灯の有無と各照明ブロックの照射光の強度とを組み合わせたパターンの中から選択されたパターンにより照射された対象物を撮影する方法が開示されている。 For example, in Patent Document 1 below, there is a method of photographing an object illuminated by a pattern selected from a pattern that combines the presence / absence of lighting of a plurality of illumination blocks and the intensity of irradiation light of each illumination block. It is disclosed.
特開２００８－１２２１９８号公報Japanese Unexamined Patent Publication No. 2008-12198
　特許文献１に記載の技術では、各対象物を撮影する際に、それぞれの対象物に対して同じパターンで光を照射することになる。 In the technique described in Patent Document 1, when each object is photographed, each object is irradiated with light in the same pattern.
　しかしながら、対象物は、必ずしも同じ位置及び姿勢で撮影されるとは限らない。例えば、対象物は、搬送される過程で位置や姿勢が変化し、撮影時における位置及び姿勢が一定とならないことがある。そのため、特定の位置及び姿勢に対して最適化された照明方向では、対象物の適切な画像が撮影できないことがある。 However, the object is not always photographed in the same position and posture. For example, the position and posture of the object may change in the process of being conveyed, and the position and posture at the time of shooting may not be constant. Therefore, it may not be possible to take an appropriate image of the object in the illumination direction optimized for a specific position and posture.
　そこで、本発明は、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査することができる画像検査装置及び画像検査方法を提供する。 Therefore, the present invention provides an image inspection device and an image inspection method capable of taking an appropriate image of an object and inspecting the image even when the position and posture of the object are not constant.
　本開示の一態様に係る画像検査装置は、対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定する測定部と、マトリクス状に配置された複数の照明素子を含み、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物に対して光を照射する照明部と、照明された対象物を撮影する撮影部と、撮影部で撮影された画像に基づいて、対象物の状態を検査する検査部と、を備える。 The image inspection apparatus according to one aspect of the present disclosure includes a measuring unit that measures placement information including at least one of the position and orientation of an object, and a plurality of lighting elements arranged in a matrix, and a plurality of lighting elements. Based on the lighting unit that irradiates the object with light by controlling the emission direction of the light according to the arrangement information, the photographing unit that captures the illuminated object, and the image captured by the photographing unit. It is equipped with an inspection unit that inspects the condition of the object.
　この態様によれば、対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定し、配置情報に応じて複数の照明素子による光の出射方向を制御することで、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影することができ、画像検査を行うことができる。 According to this aspect, the position and orientation of the object are measured by measuring the arrangement information including at least one of the position and orientation of the object and controlling the emission direction of light by the plurality of lighting elements according to the arrangement information. Even when the value is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
　上記態様において、照明部は、対象物について事前に設計された光の出射方向を、配置情報に応じて補正して、対象物に対して光を照射してもよい。 In the above aspect, the lighting unit may irradiate the object with light by correcting the emission direction of the light designed in advance for the object according to the arrangement information.
　この態様によれば、事前に設計された光の出射方向を、配置情報に応じて補正することで、事前に設計された光の出射方向を参照しない場合に比べて、少ない演算量で対象物の適切な画像が撮影できるように光の出射方向を制御することができる。 According to this aspect, by correcting the emission direction of the pre-designed light according to the arrangement information, the object can be calculated with a smaller amount of calculation as compared with the case where the emission direction of the pre-designed light is not referred to. The light emission direction can be controlled so that an appropriate image can be taken.
　上記態様において、測定部は、対象物までの距離を測定する測距センサを含んでもよい。 In the above aspect, the measuring unit may include a distance measuring sensor that measures the distance to the object.
　この態様によれば、対象物の配置情報をより正確に測定し、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to this aspect, the arrangement information of the object can be measured more accurately, and even when the position and posture of the object are not constant, an appropriate image of the object can be taken and an image inspection can be performed. ..
　上記態様において、測定部は、照明部により所定の光が照射された対象物を撮影部により撮影したテスト画像に基づいて対象物の形状特徴を抽出し、形状特徴に基づいて対象物の配置情報を測定してもよい。 In the above aspect, the measuring unit extracts the shape feature of the object based on the test image taken by the photographing unit of the object irradiated with the predetermined light by the lighting unit, and arranges the object based on the shape feature. May be measured.
　この態様によれば、テスト画像に基づいて対象物の配置情報を測定することができ、測定部のハードウェア構成を簡素化することができる。 According to this aspect, the arrangement information of the object can be measured based on the test image, and the hardware configuration of the measuring unit can be simplified.
　上記態様において、照明部は、撮影部によりテスト画像を撮影する場合に、対象物の輪郭に向けた光、対象物を横断するライン状の光及び対象物を覆う縞状の光のいずれかを照射してもよい。 In the above aspect, when a test image is taken by the photographing unit, the illumination unit emits either light directed at the contour of the object, line-shaped light crossing the object, or striped light covering the object. You may irradiate.
　この態様によれば、テスト画像に基づいて、より正確に対象物の形状特徴を抽出することができ、対象物の配置情報をより正確に測定することができる。 According to this aspect, the shape feature of the object can be extracted more accurately based on the test image, and the arrangement information of the object can be measured more accurately.
　上記態様において、測定部は、撮影部とは異なる方向から対象物を撮影する補助撮影部を含んでもよい。 In the above aspect, the measuring unit may include an auxiliary photographing unit that photographs an object from a direction different from that of the photographing unit.
　この態様によれば、対象物の配置情報をより正確に測定し、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to this aspect, the arrangement information of the object can be measured more accurately, and even when the position and posture of the object are not constant, an appropriate image of the object can be taken and an image inspection can be performed. ..
　上記態様において、照明部は、対象物の正常箇所で反射された光が撮影部に入射し、対象物の異常箇所で反射された光が撮影部に入射しないように、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物に対して光を照射してもよい。 In the above aspect, in the illumination unit, the light from a plurality of illumination elements is used so that the light reflected at the normal portion of the object is incident on the photographing unit and the light reflected at the abnormal portion of the object is not incident on the photographing unit. The object may be irradiated with light by controlling the emission direction of the object according to the arrangement information.
　この態様によれば、対象物の位置及び姿勢が一定しない場合であっても、対象物の正常部位が明るく写り、対象物の異常部位が暗く写る明視野条件を満たすように、対象物の画像を撮影し、画像検査を行うことができる。 According to this aspect, even when the position and posture of the object are not constant, the image of the object satisfies the bright field condition that the normal part of the object appears bright and the abnormal part of the object appears dark. Can be photographed and image inspection can be performed.
　上記態様において、照明部は、対象物の正常箇所で反射された光が撮影部に入射せず、対象物の異常箇所で反射された光が撮影部に入射するように、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物に対して光を照射してもよい。 In the above embodiment, the illumination unit is provided with a plurality of illumination elements so that the light reflected at the normal portion of the object does not enter the photographing unit and the light reflected at the abnormal portion of the object is incident on the photographing unit. The light emission direction may be controlled according to the arrangement information to irradiate the object with light.
　この態様によれば、対象物の位置及び姿勢が一定しない場合であっても、対象物の正常部位が暗く写り、対象物の異常部位が明るく写る暗視野条件を満たすように、対象物の画像を撮影し、画像検査を行うことができる。 According to this aspect, even when the position and posture of the object are not constant, the image of the object satisfies the dark field condition that the normal part of the object appears dark and the abnormal part of the object appears bright. Can be photographed and image inspection can be performed.
　本開示の他の態様に係る画像検査装置は、光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含み、複数の照明素子によって、対象物に対して、複数の角度で光を複数回照射する照明部と、光が照射されるごとに、対象物を撮影する撮影部と、撮影された対象物の複数の画像の特徴に基づいて、複数の画像から少なくとも１の画像を選択する選択部と、少なくとも１の画像に基づいて、対象物の状態を検査する検査部と、を備える。 The image inspection apparatus according to another aspect of the present disclosure includes a plurality of illuminating elements arranged in a matrix in which the emission direction of light can be controlled, and a plurality of illuminating elements with respect to an object. Based on the characteristics of the illumination unit that irradiates light multiple times at an angle, the photographing unit that photographs the object each time the light is irradiated, and the characteristics of the plurality of images of the photographed object, at least one from the plurality of images. It is provided with a selection unit for selecting an image of light, and an inspection unit for inspecting the state of an object based on at least one image.
　この態様によれば、対象物に対して複数の角度で光を照射して複数の画像を撮影し、少なくとも１の画像を選択することで、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to this aspect, the position and orientation of the object are not constant by irradiating the object with light at a plurality of angles to capture a plurality of images and selecting at least one image. Also, an appropriate image of the object can be taken and an image inspection can be performed.
　本開示の他の態様に係る画像検査方法は、対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定することと、マトリクス状に配置された複数の照明素子を含む照明部による光の出射方向を配置情報に応じて制御して、対象物に対して光を照射することと、照明された対象物を撮影することと、撮影された画像に基づいて、対象物の状態を検査することと、を含む。 An image inspection method according to another aspect of the present disclosure is to measure arrangement information including at least one of the position and orientation of an object, and to measure light from an illumination unit including a plurality of illumination elements arranged in a matrix. The emission direction is controlled according to the arrangement information, the object is irradiated with light, the illuminated object is photographed, and the state of the object is inspected based on the photographed image. Including that.
　この態様によれば、対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定し、配置情報に応じて複数の照明素子による光の出射方向を制御することで、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to this aspect, the position and orientation of the object are measured by measuring the arrangement information including at least one of the position and orientation of the object and controlling the emission direction of light by the plurality of lighting elements according to the arrangement information. Even when the value is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
　本開示の他の態様に係る画像検査方法は、光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含む照明部によって、対象物に対して、複数の角度で光を複数回照射することと、光が照射されるごとに、対象物を撮影することと、撮影された対象物の複数の画像の特徴に基づいて、複数の画像から少なくとも１の画像を選択することと、少なくとも１の画像に基づいて、対象物の状態を検査することと、を含む。 In the image inspection method according to another aspect of the present disclosure, the emission direction of light can be controlled, and light is emitted from an object at a plurality of angles with respect to an object by an illumination unit including a plurality of illumination elements arranged in a matrix. At least one image is selected from the plurality of images based on the characteristics of the multiple images of the object being photographed and the object being photographed each time the light is irradiated. This includes inspecting the condition of the object based on at least one image.
　この態様によれば、対象物に対して複数の角度で光を照射して複数の画像を撮影し、少なくとも１の画像を選択することで、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to this aspect, the position and orientation of the object are not constant by irradiating the object with light at a plurality of angles to capture a plurality of images and selecting at least one image. Also, an appropriate image of the object can be taken and an image inspection can be performed.
　本発明によれば、対象物の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査することができる画像検査装置及び画像検査方法を提供することが可能となる。 According to the present invention, it is possible to provide an image inspection device and an image inspection method capable of taking an appropriate image of an object and inspecting the image even when the position and posture of the object are not constant. It becomes.
本発明の第１実施形態に係る画像検査装置の概要を示す模式図である。It is a schematic diagram which shows the outline of the image inspection apparatus which concerns on 1st Embodiment of this invention. 第１実施形態に係る画像検査装置に含まれる情報処理装置の物理的構成を示す模式図である。It is a schematic diagram which shows the physical structure of the information processing apparatus included in the image inspection apparatus which concerns on 1st Embodiment. 第１実施形態に係る画像検査装置によって、明視野条件を満たすように対象物を撮影する第１例を示す図である。It is a figure which shows the 1st example which image | photographed the object so that the bright-field condition is satisfied by the image inspection apparatus which concerns on 1st Embodiment. 第１実施形態に係る画像検査装置によって、明視野条件を満たすように対象物を撮影する第２例を示す図である。It is a figure which shows the 2nd example which image | photographed the object so that the bright-field condition is satisfied by the image inspection apparatus which concerns on 1st Embodiment. 第１実施形態に係る画像検査装置によって、暗視野条件を満たすように対象物を撮影する第１例を示す図である。It is a figure which shows the 1st example which image | photographed the object so that the dark field condition condition is satisfied by the image inspection apparatus which concerns on 1st Embodiment. 第１実施形態に係る画像検査装置によって、暗視野条件を満たすように対象物を撮影する第２例を示す図である。It is a figure which shows the 2nd example which image | photographed the object so that the dark field condition condition is satisfied by the image inspection apparatus which concerns on 1st Embodiment. 本発明の第２実施形態に係る画像検査装置の概要を示す模式図である。It is a schematic diagram which shows the outline of the image inspection apparatus which concerns on 2nd Embodiment of this invention. 本発明の第３実施形態に係る画像検査装置によって対象物を撮影する一例を示す図である。It is a figure which shows an example of taking an image of an object by the image inspection apparatus which concerns on 3rd Embodiment of this invention. 第３実施形態に係る画像検査装置によって撮影されたテスト画像の一例を示す図である。It is a figure which shows an example of the test image taken by the image inspection apparatus which concerns on 3rd Embodiment. 本発明の第４実施形態に係る画像検査装置の概要を示す模式図である。It is a schematic diagram which shows the outline of the image inspection apparatus which concerns on 4th Embodiment of this invention. 第４実施形態に係る画像検査装置に含まれる情報処理装置の物理的構成を示す図である。It is a figure which shows the physical structure of the information processing apparatus included in the image inspection apparatus which concerns on 4th Embodiment. 第４実施形態に係る画像検査装置によって実行される画像検査処理のフローチャートである。It is a flowchart of the image inspection process executed by the image inspection apparatus which concerns on 4th Embodiment.
　添付図面を参照して、本発明の実施形態について説明する。なお、各図において、同一の符号を付したものは、同一又は同様の構成を有する。 An embodiment of the present invention will be described with reference to the accompanying drawings. In addition, in each of the drawings, those denoted by the same reference numerals have the same or similar configurations.
［第１実施形態］
　図１は、本発明の第１実施形態に係る画像検査装置１００の概要を示す模式図である。画像検査装置１００は、搬送部５０によって搬送される対象物１の画像を撮影して、画像検査を行う。本実施形態に係る画像検査装置１００は、補助撮影部１０、照明部２０、撮影部３０及び情報処理装置４０を備える。 [First Embodiment]
FIG. 1 is a schematic view showing an outline of the image inspection apparatus 100 according to the first embodiment of the present invention. The image inspection device 100 takes an image of the object 1 transported by the transport unit 50 and performs an image inspection. The image inspection device 100 according to the present embodiment includes an auxiliary photographing unit 10, a lighting unit 20, an imaging unit 30, and an information processing device 40.
　補助撮影部１０は、対象物１の位置及び姿勢の少なくともいずれかを含む配置情報を測定する測定部の一例であり、撮影部３０とは異なる方向から対象物１を撮影する。補助撮影部１０は、汎用のカメラで構成されてよく、本例の場合、搬送部５０の搬送面に沿った方向から、対象物１を撮影する。 The auxiliary photographing unit 10 is an example of a measuring unit that measures arrangement information including at least one of the position and posture of the object 1, and photographs the object 1 from a direction different from that of the photographing unit 30. The auxiliary photographing unit 10 may be composed of a general-purpose camera, and in the case of this example, the object 1 is photographed from the direction along the conveying surface of the conveying unit 50.
　照明部２０は、マトリクス状に配置された複数の照明素子を含み、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物１に対して光を照射する。照明部２０は、例えば、ＬＥＤ（Light Emitting Diode）等で構成されたバックライトと、バックライトを覆うように配置され、複数の画素を構成する液晶パネルと、液晶パネルを覆うように配置されたマイクロレンズアレイとを有してよい。この場合、照明部２０は、液晶パネルの複数の画素を制御して、光を透過又は遮蔽し、マイクロレンズアレイによって特定の方向に光を出射してよい。もっとも、照明部２０は他の構成であってもよい。照明部２０は、例えば、ＬＥＤ等で構成されたバックライトと、バックライトを覆うように配置され、複数の画素を構成する第１液晶パネルと、第１液晶パネルを覆うように配置され、複数の画素を構成する第２液晶パネルとを有してよい。この場合、照明部２０は、第１液晶パネル及び第２液晶パネルの複数の画素を制御して、光を透過又は遮蔽し、特定の方向に光を出射してよい。 The illumination unit 20 includes a plurality of illumination elements arranged in a matrix, controls the emission direction of light by the plurality of illumination elements according to the arrangement information, and irradiates the object 1 with light. The lighting unit 20 is arranged so as to cover a backlight composed of, for example, an LED (Light Emitting Diode) and the backlight, and a liquid crystal panel constituting a plurality of pixels and a liquid crystal panel so as to cover the liquid crystal panel. It may have a microlens array. In this case, the illumination unit 20 may control a plurality of pixels of the liquid crystal panel to transmit or block light, and emit light in a specific direction by a microlens array. However, the lighting unit 20 may have another configuration. The illumination unit 20 is arranged so as to cover a backlight composed of, for example, LEDs or the like, a first liquid crystal panel that constitutes a plurality of pixels, and a plurality of illumination units 20 that are arranged so as to cover the first liquid crystal panel. It may have a second liquid crystal panel constituting the pixels of. In this case, the illumination unit 20 may control a plurality of pixels of the first liquid crystal panel and the second liquid crystal panel to transmit or block light and emit light in a specific direction.
　照明部２０は、対象物１について事前に設計された光の出射方向を、配置情報に応じて補正して、対象物１に対して光を照射してよい。対象物１について事前に設計された光の出射方向は、対象物１が特定の位置及び姿勢である場合に最適化された照明の方向である。照明部２０は、配置情報に基づいて、対象物１の位置及び姿勢が、事前に設計した特定の位置及び姿勢からどの程度ずれているか算出し、ずれに応じて光の出射方向を補正してよい。 The lighting unit 20 may irradiate the object 1 with light by correcting the light emission direction designed in advance for the object 1 according to the arrangement information. The pre-designed light emission direction for the object 1 is the direction of illumination optimized when the object 1 is in a specific position and orientation. The lighting unit 20 calculates how much the position and orientation of the object 1 deviates from a specific position and orientation designed in advance based on the arrangement information, and corrects the light emission direction according to the deviation. Good.
　撮影部３０は、照明された対象物１を撮影する。撮影部３０は、汎用のカメラで構成されてよく、本例の場合、搬送部５０の搬送面に対して垂直な方向から、対象物１を撮影する。 The photographing unit 30 photographs the illuminated object 1. The photographing unit 30 may be composed of a general-purpose camera, and in the case of this example, the object 1 is photographed from a direction perpendicular to the conveying surface of the conveying unit 50.
　情報処理装置４０は、撮影部３０で撮影された画像に基づいて、対象物１の状態を検査する検査部として機能する。情報処理装置４０は、撮影部３０で撮影された画像について公知の画像処理を施し、対象物１に異常がないか検査し、検査結果を表示したり、外部機器に送信したりする。 The information processing device 40 functions as an inspection unit that inspects the state of the object 1 based on the image captured by the photographing unit 30. The information processing device 40 performs known image processing on the image captured by the photographing unit 30, inspects the object 1 for any abnormality, displays the inspection result, and transmits the inspection result to an external device.
　このように、本実施形態に係る画像検査装置１００によれば、対象物１の位置及び姿勢の少なくともいずれかを含む配置情報を測定し、配置情報に応じて複数の照明素子による光の出射方向を制御することで、対象物１の位置及び姿勢が一定しない場合であっても、対象物１の適切な画像を撮影し、対象物１の画像検査を行うことができる。 As described above, according to the image inspection apparatus 100 according to the present embodiment, the arrangement information including at least one of the position and the posture of the object 1 is measured, and the light emission direction by the plurality of illumination elements is measured according to the arrangement information. By controlling the above, even when the position and posture of the object 1 are not constant, an appropriate image of the object 1 can be taken and an image inspection of the object 1 can be performed.
　また、補助撮影部１０を備えることで、対象物１の配置情報をより正確に測定し、対象物１の位置及び姿勢が一定しない場合であっても、対象物１の適切な画像を撮影することができる。 Further, by providing the auxiliary photographing unit 10, the arrangement information of the object 1 is measured more accurately, and an appropriate image of the object 1 is photographed even when the position and the posture of the object 1 are not constant. be able to.
　さらに、事前に設計された光の出射方向を、配置情報に応じて補正することで、事前に設計された光の出射方向を参照しない場合に比べて、少ない演算量で対象物１の適切な画像が撮影できるように光の出射方向を制御することができる。 Further, by correcting the emission direction of the light designed in advance according to the arrangement information, the object 1 is suitable with a smaller amount of calculation as compared with the case where the emission direction of the light designed in advance is not referred to. The light emission direction can be controlled so that an image can be taken.
　図２は、第１実施形態に係る画像検査装置１００に含まれる情報処理装置４０の物理的構成を示す図である。情報処理装置４０は、演算部に相当するＣＰＵ（Central Processing Unit）１０ａと、記憶部に相当するＲＡＭ（Random Access Memory）１０ｂと、記憶部に相当するＲＯＭ（Read only Memory）１０ｃと、通信部１０ｄと、入力部１０ｅと、表示部１０ｆと、を有する。これらの各構成は、バスを介して相互にデータ送受信可能に接続される。なお、本例では情報処理装置４０が一台のコンピュータで構成される場合について説明するが、情報処理装置４０は、複数のコンピュータが組み合わされて実現されてもよい。また、図１０で示す構成は一例であり、情報処理装置４０はこれら以外の構成を有してもよいし、これらの構成のうち一部を有さなくてもよい。 FIG. 2 is a diagram showing a physical configuration of an information processing device 40 included in the image inspection device 100 according to the first embodiment. The information processing device 40 includes a CPU (Central Processing Unit) 10a corresponding to a calculation unit, a RAM (Random Access Memory) 10b corresponding to a storage unit, a ROM (Read only Memory) 10c corresponding to a storage unit, and a communication unit. It has a 10d, an input unit 10e, and a display unit 10f. Each of these configurations is connected to each other via a bus so that data can be transmitted and received. In this example, the case where the information processing device 40 is composed of one computer will be described, but the information processing device 40 may be realized by combining a plurality of computers. Further, the configuration shown in FIG. 10 is an example, and the information processing apparatus 40 may have configurations other than these, or may not have a part of these configurations.
　ＣＰＵ１０ａは、ＲＡＭ１０ｂ又はＲＯＭ１０ｃに記憶されたプログラムの実行に関する制御やデータの演算、加工を行う制御部である。ＣＰＵ１０ａは、測定部により測定された対象物１の配置情報に応じた照明で撮影された対象物１の画像に基づいて、対象物の状態を検査するプログラム（画像検査プログラム）を実行する演算部である。ＣＰＵ１０ａは、入力部１０ｅや通信部１０ｄから種々のデータを受け取り、データの演算結果を表示部１０ｆに表示したり、ＲＡＭ１０ｂやＲＯＭ１０ｃに格納したりする。 The CPU 10a is a control unit that controls execution of a program stored in the RAM 10b or ROM 10c, calculates data, and processes data. The CPU 10a is a calculation unit that executes a program (image inspection program) for inspecting the state of the object based on the image of the object 1 taken with illumination according to the arrangement information of the object 1 measured by the measuring unit. Is. The CPU 10a receives various data from the input unit 10e and the communication unit 10d, displays the calculation result of the data on the display unit 10f, and stores it in the RAM 10b or the ROM 10c.
　ＣＰＵ１０ａは、画像検査プログラムを実行することで、検査部４１として機能する。検査部４１は、撮影部３０で撮影された画像に基づいて、対象物１の状態を検査する。 The CPU 10a functions as an inspection unit 41 by executing an image inspection program. The inspection unit 41 inspects the state of the object 1 based on the image taken by the photographing unit 30.
　また、ＣＰＵ１０ａは、画像検査プログラムを実行することで、対象物１について事前に設計された光の出射方向を、配置情報に応じて補正する補正部として機能してよい。 Further, the CPU 10a may function as a correction unit that corrects the light emission direction designed in advance for the object 1 according to the arrangement information by executing the image inspection program.
　ＲＡＭ１０ｂは、記憶部のうちデータの書き換えが可能なものであり、例えば半導体記憶素子で構成されてよい。ＲＡＭ１０ｂは、ＣＰＵ１０ａが実行する画像検査プログラムや、対象物を撮影した画像といったデータを記憶してよい。なお、これらは例示であって、ＲＡＭ１０ｂには、これら以外のデータが記憶されていてもよいし、これらの一部が記憶されていなくてもよい。 The RAM 10b is a storage unit in which data can be rewritten, and may be composed of, for example, a semiconductor storage element. The RAM 10b may store data such as an image inspection program executed by the CPU 10a and an image of an object. It should be noted that these are examples, and data other than these may be stored in the RAM 10b, or a part of these may not be stored.
　ＲＯＭ１０ｃは、記憶部のうちデータの読み出しが可能なものであり、例えば半導体記憶素子で構成されてよい。ＲＯＭ１０ｃは、例えば画像検査プログラムや、書き換えが行われないデータを記憶してよい。 The ROM 10c is a storage unit capable of reading data, and may be composed of, for example, a semiconductor storage element. The ROM 10c may store, for example, an image inspection program or data that is not rewritten.
　通信部１０ｄは、情報処理装置４０を他の機器に接続するインターフェースである。通信部１０ｄは、インターネット等の通信ネットワークに接続されてよい。 The communication unit 10d is an interface for connecting the information processing device 40 to another device. The communication unit 10d may be connected to a communication network such as the Internet.
　入力部１０ｅは、ユーザからデータの入力を受け付けるものであり、例えば、キーボード及びタッチパネルを含んでよい。 The input unit 10e receives data input from the user, and may include, for example, a keyboard and a touch panel.
　表示部１０ｆは、ＣＰＵ１０ａによる演算結果を視覚的に表示するものであり、例えば、ＬＣＤ（Liquid Crystal Display）により構成されてよい。表示部１０ｆは、例えば対象物１を撮影した画像や、検査部４１による検査結果を表示してよい。 The display unit 10f visually displays the calculation result by the CPU 10a, and may be configured by, for example, an LCD (Liquid Crystal Display). The display unit 10f may display, for example, an image of the object 1 or an inspection result by the inspection unit 41.
　画像検査プログラムは、ＲＡＭ１０ｂやＲＯＭ１０ｃ等のコンピュータによって読み取り可能な記憶媒体に記憶されて提供されてもよいし、通信部１０ｄにより接続される通信ネットワークを介して提供されてもよい。情報処理装置４０では、ＣＰＵ１０ａが画像検査プログラムを実行することにより、検査部４１等の動作が実現される。なお、これらの物理的な構成は例示であって、必ずしも独立した構成でなくてもよい。例えば、情報処理装置４０は、ＣＰＵ１０ａとＲＡＭ１０ｂやＲＯＭ１０ｃが一体化したＬＳＩ（Large-Scale Integration）を備えていてもよい。 The image inspection program may be stored in a storage medium readable by a computer such as RAM 10b or ROM 10c and provided, or may be provided via a communication network connected by the communication unit 10d. In the information processing apparatus 40, the operation of the inspection unit 41 and the like is realized by the CPU 10a executing the image inspection program. It should be noted that these physical configurations are examples and do not necessarily have to be independent configurations. For example, the information processing device 40 may include an LSI (Large-Scale Integration) in which the CPU 10a and the RAM 10b or ROM 10c are integrated.
　図３は、第１実施形態に係る画像検査装置１００によって、明視野条件を満たすように対象物を撮影する第１例を示す図である。ここで、明視野条件とは、対象物１の正常部位が明るく写り、対象物１の異常部位が暗く写るような照明条件である。 FIG. 3 is a diagram showing a first example in which an object is photographed so as to satisfy a bright visual field condition by the image inspection apparatus 100 according to the first embodiment. Here, the bright visual field condition is an illumination condition in which the normal portion of the object 1 appears bright and the abnormal portion of the object 1 appears dark.
　図３に示すように、対象物１が搬送部５０に水平に置かれている場合、事前に設計された方向で出射された光Ｌ１は、対象物１の正常部位で反射され、反射光Ｒ１が撮影部３０に入射する。ここで、仮に対象物１に異常部位がある場合、異常部位で反射された光は、撮影部３０に入射しない（又は、入射するとしても正常部位からの反射光Ｒ１よりも強度が小さい）。 As shown in FIG. 3, when the object 1 is placed horizontally on the transport unit 50, the light L1 emitted in the pre-designed direction is reflected by the normal portion of the object 1 and the reflected light R1. Is incident on the photographing unit 30. Here, if the object 1 has an abnormal portion, the light reflected by the abnormal portion does not enter the photographing unit 30 (or even if it does, the intensity is smaller than the reflected light R1 from the normal portion).
　図４は、第１実施形態に係る画像検査装置１００によって、明視野条件を満たすように対象物を撮影する第２例を示す図である。第２例では、対象物１が搬送部５０に水平に置かれておらず、姿勢が傾いている。 FIG. 4 is a diagram showing a second example in which an object is photographed so as to satisfy a bright visual field condition by the image inspection device 100 according to the first embodiment. In the second example, the object 1 is not placed horizontally on the transport unit 50, and the posture is tilted.
　照明部２０は、対象物１の正常箇所で反射された光Ｒ２が撮影部３０に入射し、対象物１の異常箇所で反射された光が撮影部３０に入射しないように、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物１に対して光Ｌ２を照射してよい。ここで、照明部２０は、対象物１について事前に設計された光の出射方向（図３に示す光Ｌ１）を、対象物１の配置情報に応じて補正して、対象物１に対して光Ｌ２を照射してよい。 The illumination unit 20 has a plurality of illumination elements so that the light R2 reflected at the normal portion of the object 1 is incident on the photographing unit 30 and the light reflected at the abnormal portion of the object 1 is not incident on the photographing unit 30. The light L2 may be applied to the object 1 by controlling the light emission direction according to the arrangement information. Here, the illumination unit 20 corrects the light emission direction (light L1 shown in FIG. 3) designed in advance for the object 1 according to the arrangement information of the object 1 with respect to the object 1. Light L2 may be irradiated.
　このようにして、対象物１の位置及び姿勢が一定しない場合であっても、対象物１の正常部位が明るく写り、対象物１の異常部位が暗く写る明視野条件を満たすように、対象物１の画像を撮影することができる。このため、本実施形態に係る画像検査装置１００によれば、対象物１の位置及び姿勢が一定しない場合であっても、適切な画像検査を行うことができる。 In this way, even when the position and posture of the object 1 are not constant, the object can satisfy the bright field condition that the normal part of the object 1 appears bright and the abnormal part of the object 1 appears dark. The image of 1 can be taken. Therefore, according to the image inspection device 100 according to the present embodiment, an appropriate image inspection can be performed even when the position and posture of the object 1 are not constant.
　図５は、第１実施形態に係る画像検査装置１００によって、暗視野条件を満たすように対象物を撮影する第１例を示す図である。ここで、暗視野条件とは、対象物１の正常部位が暗く写り、対象物１の異常部位が明るく写るような照明条件である。 FIG. 5 is a diagram showing a first example of photographing an object so as to satisfy the dark field condition by the image inspection apparatus 100 according to the first embodiment. Here, the dark field condition is an illumination condition in which the normal portion of the object 1 appears dark and the abnormal portion of the object 1 appears bright.
　図５に示すように、対象物１が搬送部５０に水平に置かれている場合、事前に設計された方向で出射された光Ｌ３は、対象物１の正常部位で反射され、反射光Ｒ３は撮影部３０に入射しない。ここで、仮に対象物１に異常部位がある場合、異常部位で反射された光は、撮影部３０に入射する（又は、正常部位からの反射光Ｒ３よりも大きい強度の光が入射する）。 As shown in FIG. 5, when the object 1 is placed horizontally on the transport unit 50, the light L3 emitted in the pre-designed direction is reflected by the normal portion of the object 1 and the reflected light R3. Does not enter the photographing unit 30. Here, if the object 1 has an abnormal portion, the light reflected by the abnormal portion is incident on the photographing unit 30 (or light having a higher intensity than the reflected light R3 from the normal portion is incident).
　図６は、第１実施形態に係る画像検査装置１００によって、暗視野条件を満たすように対象物を撮影する第２例を示す図である。第２例では、対象物１が搬送部５０に水平に置かれておらず、姿勢が傾いている。 FIG. 6 is a diagram showing a second example of photographing an object so as to satisfy the dark field condition by the image inspection apparatus 100 according to the first embodiment. In the second example, the object 1 is not placed horizontally on the transport unit 50, and the posture is tilted.
　照明部２０は、対象物１の正常箇所で反射された光Ｒ４が撮影部３０に入射せず、対象物１の異常箇所で反射された光が撮影部３０に入射するように、複数の照明素子による光の出射方向を配置情報に応じて制御して、対象物１に対して光Ｌ４を照射してよい。ここで、照明部２０は、対象物１について事前に設計された光の出射方向（図５に示す光Ｌ３）を、対象物１の配置情報に応じて補正して、対象物１に対して光Ｌ４を照射してよい。 The illumination unit 20 has a plurality of illuminations so that the light R4 reflected at the normal portion of the object 1 does not enter the photographing unit 30 and the light reflected at the abnormal portion of the object 1 incident on the photographing unit 30. The light L4 may be applied to the object 1 by controlling the light emission direction of the element according to the arrangement information. Here, the illumination unit 20 corrects the light emission direction (light L3 shown in FIG. 5) designed in advance for the object 1 according to the arrangement information of the object 1 with respect to the object 1. Light L4 may be irradiated.
　このようにして、対象物１の位置及び姿勢が一定しない場合であっても、対象物１の正常部位が暗く写り、対象物１の異常部位が明るく写る暗視野条件を満たすように、対象物１の画像を撮影することができる。このため、本実施形態に係る画像検査装置１００によれば、対象物１の位置及び姿勢が一定しない場合であっても、適切な画像検査を行うことができる。 In this way, even when the position and posture of the object 1 are not constant, the normal part of the object 1 appears dark and the abnormal part of the object 1 appears bright so as to satisfy the dark field condition. The image of 1 can be taken. Therefore, according to the image inspection device 100 according to the present embodiment, an appropriate image inspection can be performed even when the position and posture of the object 1 are not constant.
［第２実施形態］
　図７は、本発明の第２実施形態に係る画像検査装置１０１の概要を示す模式図である。第２実施形態に係る画像検査装置１０１は、対象物１の位置及び姿勢の少なくともいずれかを含む配置情報を測定する測定部として測距センサ１５ａ，１５ｂ，１５ｃを含む点で第１実施形態に係る画像検査装置１００と相違し、その他について第１実施形態に係る画像検査装置１００と同様の構成を備える。 [Second Embodiment]
FIG. 7 is a schematic view showing an outline of the image inspection device 101 according to the second embodiment of the present invention. The image inspection device 101 according to the second embodiment has the first embodiment in that it includes the distance measuring sensors 15a, 15b, 15c as a measuring unit for measuring the arrangement information including at least one of the position and the posture of the object 1. It is different from the image inspection device 100 and has the same configuration as the image inspection device 100 according to the first embodiment.
　測距センサ１５ａ，１５ｂ，１５ｃは、それぞれ対象物１までの距離を測定する。本例の場合、測距センサ１５ａ，１５ｂ，１５ｃは、それぞれ対象物１の異なる点について、搬送部５０の搬送面に対して垂直な方向の距離を測定する。測距センサ１５ａ，１５ｂ，１５ｃにより測定される距離によって、対象物１が水平な姿勢からどの程度ずれているのかを表す配置情報を測定することができる。 The distance measuring sensors 15a, 15b, and 15c each measure the distance to the object 1. In the case of this example, the distance measuring sensors 15a, 15b, and 15c measure the distances of the different points of the object 1 in the direction perpendicular to the transport surface of the transport unit 50. Depending on the distance measured by the distance measuring sensors 15a, 15b, and 15c, it is possible to measure the arrangement information indicating how much the object 1 deviates from the horizontal posture.
　このように、測距センサ１５ａ，１５ｂ，１５ｃによって、対象物１の配置情報をより正確に測定し、対象物１の位置及び姿勢が一定しない場合であっても、対象物１の適切な画像を撮影し、画像検査を行うことができる。 In this way, the distance measuring sensors 15a, 15b, and 15c measure the arrangement information of the object 1 more accurately, and even when the position and posture of the object 1 are not constant, an appropriate image of the object 1 is obtained. Can be photographed and image inspection can be performed.
　なお、測距センサは、一点の距離を測定するセンサに限られず、多点の距離を測定するセンサであったり、ライン上の距離を測定するセンサであったり、２次元エリア上の距離を測定するセンサであったりしてもよい。 The distance measuring sensor is not limited to a sensor that measures the distance at one point, but is a sensor that measures the distance at multiple points, a sensor that measures the distance on a line, or measures a distance on a two-dimensional area. It may be a sensor that does.
［第３実施形態］
　図８は、本発明の第３実施形態に係る画像検査装置１０２によって対象物１を撮影する一例を示す図である。本実施形態に係る画像検査装置１０２は、照明部２０により所定の光を照射して対象物１のテスト画像を撮影し、テスト画像に基づいて対象物１の形状特徴を抽出し、形状特徴に基づいて対象物１の配置情報を測定する点で第１実施形態に係る画像検査装置１００と相違し、その他について第１実施形態に係る画像検査装置１００と同様の構成を備える。 [Third Embodiment]
FIG. 8 is a diagram showing an example in which the object 1 is photographed by the image inspection device 102 according to the third embodiment of the present invention. The image inspection device 102 according to the present embodiment irradiates a predetermined light with a lighting unit 20 to take a test image of the object 1, extracts the shape feature of the object 1 based on the test image, and converts the shape feature into the shape feature. It differs from the image inspection device 100 according to the first embodiment in that the arrangement information of the object 1 is measured based on the above, and has the same configuration as the image inspection device 100 according to the first embodiment in other respects.
　本実施形態に係る画像検査装置１０２は、照明部２０によって、所定の光Ｌ５を照射して、撮影部３０によって、対象物１のテスト画像を撮影する。より具体的には、照明部２０は、撮影部３０によりテスト画像を撮影する場合に、対象物１の輪郭に向けた光、対象物１を横断するライン状の光及び対象物１を覆う縞状の光のいずれかを照射してよい。 The image inspection device 102 according to the present embodiment irradiates a predetermined light L5 with the lighting unit 20, and takes a test image of the object 1 with the photographing unit 30. More specifically, when the illuminating unit 20 captures a test image by the photographing unit 30, the light directed toward the contour of the object 1, the line-shaped light crossing the object 1, and the stripes covering the object 1 are covered. You may irradiate any of the light.
　照明部２０によって対象物１の輪郭に向けた光を照射する場合、画像検査装置１０２は、テスト画像に基づいて対象物１の輪郭の位置及び歪みを算出し、輪郭の位置に基づいて対象物１の位置を測定し、輪郭の歪みに基づいて対象物１の姿勢を測定してよい。 When the illumination unit 20 irradiates light toward the contour of the object 1, the image inspection device 102 calculates the position and distortion of the contour of the object 1 based on the test image, and calculates the position and distortion of the contour of the object 1 based on the position of the contour. The position of 1 may be measured, and the posture of the object 1 may be measured based on the distortion of the contour.
　また、照明部２０によって対象物１を横断するライン状の光を照射する場合、画像検査装置１０２は、光切断法によって対象物１の位置及び姿勢を測定してよい。 Further, when the illumination unit 20 irradiates the line-shaped light that crosses the object 1, the image inspection device 102 may measure the position and the posture of the object 1 by the light cutting method.
　また、照明部２０によって対象物１を覆う縞状の光を照射する場合、画像検査装置１０２は、位相シフト法によって対象物１の位置及び姿勢を測定してよい。 Further, when the illumination unit 20 irradiates the striped light covering the object 1, the image inspection device 102 may measure the position and orientation of the object 1 by the phase shift method.
　本実施形態に係る画像検査装置１０２によれば、テスト画像に基づいて、より正確に対象物１の形状特徴を抽出することができ、対象物１の配置情報をより正確に測定することができる。 According to the image inspection apparatus 102 according to the present embodiment, the shape feature of the object 1 can be extracted more accurately based on the test image, and the arrangement information of the object 1 can be measured more accurately. ..
　図９は、第３実施形態に係る画像検査装置１０２によって撮影されたテスト画像ＩＭＧの一例を示す図である。本実施形態に係る画像検査装置１０２の測定部は、照明部２０により所定の光が照射された対象物１を撮影部３０により撮影したテスト画像ＩＭＧに基づいて対象物１の形状特徴を抽出し、形状特徴に基づいて対象物１の配置情報を測定する。図９では、照明部２０によって対象物１の輪郭に向けた光を照射して撮影されたテスト画像ＩＭＧの一例を示している。 FIG. 9 is a diagram showing an example of a test image IMG taken by the image inspection device 102 according to the third embodiment. The measuring unit of the image inspection device 102 according to the present embodiment extracts the shape feature of the object 1 based on the test image IMG taken by the photographing unit 30 of the object 1 irradiated with the predetermined light by the lighting unit 20. , The arrangement information of the object 1 is measured based on the shape feature. FIG. 9 shows an example of a test image IMG taken by irradiating the contour of the object 1 with light by the illumination unit 20.
　画像検査装置１０２は、対象物１の形状特徴として、対象物１の輪郭の形状を抽出してよい。画像検査装置１０２は、抽出した対象物１の輪郭の形状に基づいて、輪郭の歪みを算出し、輪郭の歪みに基づいて対象物１の姿勢を測定してよい。このように、テスト画像ＩＭＧに基づいて対象物１の配置情報を測定することができ、測定部のハードウェア構成を簡素化することができる。 The image inspection device 102 may extract the contour shape of the object 1 as a shape feature of the object 1. The image inspection device 102 may calculate the distortion of the contour based on the shape of the contour of the extracted object 1, and measure the posture of the object 1 based on the distortion of the contour. In this way, the arrangement information of the object 1 can be measured based on the test image IMG, and the hardware configuration of the measuring unit can be simplified.
　なお、画像検査装置１０２は、対象物１の模様や対象物１の輪郭以外のエッジを抽出し、それらに基づいて対象物１の位置及び姿勢を測定してもよい。 Note that the image inspection device 102 may extract edges other than the pattern of the object 1 and the contour of the object 1 and measure the position and posture of the object 1 based on them.
［第４実施形態］
　図１０は、本発明の第４実施形態に係る画像検査装置１０３の概要を示す模式図である。第４実施形態に係る画像検査装置１０３は、補助撮影部１０等の測定部を備えず、照明部２０によって複数の角度で対象物１を複数回照明する点と、撮影部３０によって対象物１の複数の画像を撮影する点と、情報処理装置４０によって複数の画像から少なくとも１の画像を選択する点とについて第１実施形態に係る画像検査装置１００と相違し、その他について第１実施形態に係る画像検査装置１００と同様の構成を備える。 [Fourth Embodiment]
FIG. 10 is a schematic view showing an outline of the image inspection apparatus 103 according to the fourth embodiment of the present invention. The image inspection device 103 according to the fourth embodiment does not include a measuring unit such as an auxiliary photographing unit 10, and has a point that the illumination unit 20 illuminates the object 1 multiple times at a plurality of angles, and an imaging unit 30 allows the object 1 to be illuminated. The point of taking a plurality of images of the above and the point of selecting at least one image from the plurality of images by the information processing apparatus 40 are different from the image inspection device 100 according to the first embodiment, and the other points are described in the first embodiment. It has the same configuration as the image inspection device 100.
　本実施形態に係る画像検査装置１０３の照明部２０は、光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含み、複数の照明素子によって、対象物１に対して、複数の角度で光を複数回照射する。そして、撮影部３０は、光が照射されるごとに、対象物１を撮影する。例えば、照明部２０によって１０種類の角度で対象物１に光を照射する場合、撮影部３０は、１０枚の対象物１の画像を撮影する。 The illumination unit 20 of the image inspection device 103 according to the present embodiment can control the light emission direction, includes a plurality of illumination elements arranged in a matrix, and the plurality of illumination elements with respect to the object 1. , Irradiate light multiple times at multiple angles. Then, the photographing unit 30 photographs the object 1 each time the light is irradiated. For example, when the illumination unit 20 irradiates the object 1 with light at 10 different angles, the photographing unit 30 captures 10 images of the object 1.
　照明部２０は、事前に設計された光の出射方向を変動させることで、複数の角度で光を複数回照射してよい。この場合、照明部２０は、事前に設計された光の出射方向をランダムに変動させたり、所定角度ずつ変動させたりしてよい。 The illumination unit 20 may irradiate light at a plurality of angles a plurality of times by varying the emission direction of the light designed in advance. In this case, the illumination unit 20 may randomly change the emission direction of the light designed in advance, or may change it by a predetermined angle.
　情報処理装置４０は、撮影された対象物１の複数の画像の特徴に基づいて、複数の画像から少なくとも１の画像を選択する選択部及び少なくとも１の画像に基づいて、対象物１の状態を検査する検査部として機能する。選択部は、例えば、複数の画像のコントラストに基づいて、複数の画像から少なくとも１の画像を選択したり、撮影された対象物１のエッジの鮮明さに基づいて、複数の画像から少なくとも１の画像を選択したり、撮影された対象物１の所定の形状の鮮明さに基づいて、複数の画像から少なくとも１の画像を選択したりしてよい。また、撮影部３０は、対象物１の複数の画像を、異なる望遠倍率で撮影し、選択部は、対象物１全体が画像に収まっている否かに基づいて、複数の画像から少なくとも１の画像を選択してよい。 The information processing device 40 determines the state of the object 1 based on the selection unit that selects at least one image from the plurality of images and the state of the object 1 based on the characteristics of the plurality of images of the captured object 1. It functions as an inspection unit for inspection. The selection unit selects, for example, at least one image from the plurality of images based on the contrast of the plurality of images, or at least one image from the plurality of images based on the sharpness of the edge of the captured object 1. An image may be selected, or at least one image may be selected from a plurality of images based on the sharpness of a predetermined shape of the captured object 1. Further, the photographing unit 30 photographs a plurality of images of the object 1 at different telephoto magnifications, and the selection unit selects at least one of the plurality of images based on whether or not the entire object 1 is contained in the image. You may select an image.
　例えば、明視野条件を満たす画像を撮影する場合、選択部は、対象物１の複数の画像のうち、最も明るい画像を選択してよい。また、暗視野条件を満たす画像を撮影する場合、選択部は、対象物１の複数の画像のうち、最も暗い画像を選択してよい。 For example, when shooting an image satisfying the bright field condition, the selection unit may select the brightest image among the plurality of images of the object 1. Further, when capturing an image satisfying the dark field condition, the selection unit may select the darkest image among the plurality of images of the object 1.
　本実施形態に係る画像検査装置１０３によれば、対象物１に対して複数の角度で光を照射して複数の画像を撮影し、少なくとも１の画像を選択することで、対象物１の位置及び姿勢が一定しない場合であっても、対象物の適切な画像を撮影し、画像検査を行うことができる。 According to the image inspection apparatus 103 according to the present embodiment, the position of the object 1 is determined by irradiating the object 1 with light at a plurality of angles to capture a plurality of images and selecting at least one image. And even when the posture is not constant, an appropriate image of the object can be taken and an image inspection can be performed.
　図１１は、本発明の第４実施形態に係る画像検査装置１０３に含まれる情報処理装置４０の物理的構成を示す図である。以下では、第１実施形態に係る画像検査装置１００に含まれる情報処理装置４０との相違点について説明する。 FIG. 11 is a diagram showing a physical configuration of the information processing device 40 included in the image inspection device 103 according to the fourth embodiment of the present invention. Hereinafter, the differences from the information processing device 40 included in the image inspection device 100 according to the first embodiment will be described.
　ＣＰＵ１０ａは、画像検査プログラムを実行することで、検査部４１及び選択部４２として機能する。選択部４２は、撮影された対象物１の複数の画像の特徴に基づいて、複数の画像から少なくとも１の画像を選択する。画像の特徴は、画像のコントラスト、画像に写された対象物１のエッジの鮮明さ、画像に写された対象物１の所定形状の鮮明さ等であってよい。 The CPU 10a functions as an inspection unit 41 and a selection unit 42 by executing an image inspection program. The selection unit 42 selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object 1. The characteristics of the image may be the contrast of the image, the sharpness of the edge of the object 1 captured in the image, the sharpness of the predetermined shape of the object 1 captured in the image, and the like.
　画像検査プログラムは、ＲＡＭ１０ｂやＲＯＭ１０ｃ等のコンピュータによって読み取り可能な記憶媒体に記憶されて提供されてもよいし、通信部１０ｄにより接続される通信ネットワークを介して提供されてもよい。情報処理装置４０では、ＣＰＵ１０ａが画像検査プログラムを実行することにより、検査部４１及び選択部４２の動作が実現される。なお、これらの物理的な構成は例示であって、必ずしも独立した構成でなくてもよい。例えば、情報処理装置４０は、ＣＰＵ１０ａとＲＡＭ１０ｂやＲＯＭ１０ｃが一体化したＬＳＩを備えていてもよい。 The image inspection program may be stored in a storage medium readable by a computer such as RAM 10b or ROM 10c and provided, or may be provided via a communication network connected by the communication unit 10d. In the information processing device 40, the operation of the inspection unit 41 and the selection unit 42 is realized by the CPU 10a executing the image inspection program. It should be noted that these physical configurations are examples and do not necessarily have to be independent configurations. For example, the information processing device 40 may include an LSI in which the CPU 10a is integrated with the RAM 10b and the ROM 10c.
　図１２は、第４実施形態に係る画像検査装置１０３によって実行される画像検査処理のフローチャートである。はじめに、画像検査装置１０３は、対象物１に対して、複数の角度で光を複数回照射し（Ｓ１０）、光が照射されるごとに、対象物１を撮影する（Ｓ１１）。 FIG. 12 is a flowchart of an image inspection process executed by the image inspection device 103 according to the fourth embodiment. First, the image inspection device 103 irradiates the object 1 with light a plurality of times at a plurality of angles (S10), and photographs the object 1 each time the light is irradiated (S11).
　その後、画像検査装置１０３は、撮影された対象物の複数の画像の特徴に基づいて、複数の画像から少なくとも１の画像を選択する（Ｓ１２）。最後に、画像検査装置１０３は、選択された画像に基づいて、画像検査を実施する（Ｓ１３）。当然ながら、画像検査装置１０３は、画像検査の結果を表示したり、外部機器に送信したりしてよい。以上により、画像検査処理が終了する。 After that, the image inspection device 103 selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (S12). Finally, the image inspection device 103 performs an image inspection based on the selected image (S13). As a matter of course, the image inspection device 103 may display the result of the image inspection or transmit it to an external device. With the above, the image inspection process is completed.
　以上説明した実施形態は、本発明の理解を容易にするためのものであり、本発明を限定して解釈するためのものではない。実施形態が備える各要素並びにその配置、材料、条件、形状及びサイズ等は、例示したものに限定されるわけではなく適宜変更することができる。また、異なる実施形態で示した構成同士を部分的に置換し又は組み合わせることが可能である。 The embodiments described above are for facilitating the understanding of the present invention and are not for limiting the interpretation of the present invention. Each element included in the embodiment and its arrangement, material, condition, shape, size and the like are not limited to the exemplified ones and can be appropriately changed. Further, the configurations shown in different embodiments can be partially replaced or combined.
　本実施形態における態様は、以下のような開示を含む。 Aspects in this embodiment include the following disclosures.
［付記１］
　対象物（１）の位置及び姿勢の少なくともいずれかを含む配置情報を測定する測定部（１０，１５ａ，１５ｂ，１５ｃ）と、
　マトリクス状に配置された複数の照明素子を含み、前記複数の照明素子による光の出射方向を前記配置情報に応じて制御して、前記対象物（１）に対して光を照射する照明部（２０）と、
　照明された前記対象物（１）を撮影する撮影部（３０）と、
　前記撮影部（３０）で撮影された画像に基づいて、前記対象物（１）の状態を検査する検査部（４１）と、
　を備える画像検査装置（１００，１０１，１０２）。 [Appendix 1]
A measuring unit (10, 15a, 15b, 15c) that measures placement information including at least one of the position and posture of the object (1), and
An illuminating unit (1) that includes a plurality of illuminating elements arranged in a matrix, controls the emission direction of light by the plurality of illuminating elements according to the arrangement information, and irradiates the object (1) with light. 20) and
A photographing unit (30) for photographing the illuminated object (1), and
An inspection unit (41) that inspects the state of the object (1) based on an image taken by the photographing unit (30).
(100, 101, 102).
［付記２］
　光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含み、前記複数の照明素子によって、対象物（１）に対して、複数の角度で光を複数回照射する照明部（２０）と、
　前記光が照射されるごとに、前記対象物（１）を撮影する撮影部（３０）と、
　撮影された前記対象物（１）の複数の画像の特徴に基づいて、前記複数の画像から少なくとも１の画像を選択する選択部（４２）と、
　前記少なくとも１の画像に基づいて、前記対象物（１）の状態を検査する検査部（４１）と、
　を備える画像検査装置（１０３）。 [Appendix 2]
Illumination in which the emission direction of light can be controlled, includes a plurality of illumination elements arranged in a matrix, and the plurality of illumination elements irradiate the object (1) with light at a plurality of angles. Part (20) and
Each time the light is irradiated, the photographing unit (30) that photographs the object (1) and
A selection unit (42) that selects at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (1).
An inspection unit (41) that inspects the state of the object (1) based on at least one image,
An image inspection device (103).
［付記３］
　前記対象物（１）の位置及び姿勢の少なくともいずれかを含む配置情報を測定することと、
　マトリクス状に配置された複数の照明素子を含む照明部（２０）による光の出射方向を前記配置情報に応じて制御して、前記対象物（１）に対して光を照射することと、
　照明された前記対象物（１）を撮影することと、
　撮影された画像に基づいて、前記対象物（１）の状態を検査することと、
　を含む画像検査方法。 [Appendix 3]
Measuring placement information including at least one of the position and posture of the object (1), and
The object (1) is irradiated with light by controlling the light emission direction by the lighting unit (20) including a plurality of lighting elements arranged in a matrix according to the arrangement information.
Taking a picture of the illuminated object (1) and
Inspecting the state of the object (1) based on the captured image, and
Image inspection methods including.
［付記４］
　光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含む照明部（２０）によって、前記対象物（１）に対して、複数の角度で光を複数回照射することと、
　前記光が照射されるごとに、前記対象物（１）を撮影することと、
　撮影された前記対象物（１）の複数の画像の特徴に基づいて、前記複数の画像から少なくとも１の画像を選択することと、
　前記少なくとも１の画像に基づいて、前記対象物（１）の状態を検査することと、
　を含む画像検査方法。 [Appendix 4]
The emission direction of light can be controlled, and the object (1) is irradiated with light at a plurality of angles by an illumination unit (20) including a plurality of illumination elements arranged in a matrix. When,
Each time the light is irradiated, the object (1) is photographed, and
To select at least one image from the plurality of images based on the characteristics of the plurality of images of the captured object (1).
Inspecting the state of the object (1) based on the at least one image, and
Image inspection methods including.

Claims (11)

  1. 　対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定する測定部と、
    　マトリクス状に配置された複数の照明素子を含み、前記複数の照明素子による光の出射方向を前記配置情報に応じて制御して、前記対象物に対して光を照射する照明部と、
    　照明された前記対象物を撮影する撮影部と、
    　前記撮影部で撮影された画像に基づいて、前記対象物の状態を検査する検査部と、
    　を備える画像検査装置。     A measuring unit that measures placement information including at least one of the position and orientation of the object,
    A lighting unit that includes a plurality of lighting elements arranged in a matrix, controls the light emission direction of the plurality of lighting elements according to the arrangement information, and irradiates the object with light.
    A shooting unit that shoots the illuminated object,
    An inspection unit that inspects the state of the object based on the image taken by the imaging unit, and
    An image inspection device comprising.
  2. 　前記照明部は、前記対象物について事前に設計された光の出射方向を、前記配置情報に応じて補正して、前記対象物に対して光を照射する、
    　請求項１に記載の画像検査装置。     The lighting unit corrects the emission direction of light designed in advance for the object according to the arrangement information, and irradiates the object with light.
    The image inspection apparatus according to claim 1.
  3. 　前記測定部は、前記対象物までの距離を測定する測距センサを含む、
    　請求項１又は２に記載の画像検査装置。     The measuring unit includes a distance measuring sensor that measures a distance to the object.
    The image inspection apparatus according to claim 1 or 2.
  4. 　前記測定部は、前記照明部により所定の光が照射された前記対象物を前記撮影部により撮影したテスト画像に基づいて前記対象物の形状特徴を抽出し、前記形状特徴に基づいて前記対象物の前記配置情報を測定する、
    　請求項１又は２に記載の画像検査装置。     The measuring unit extracts the shape feature of the object based on a test image taken by the photographing unit of the object irradiated with a predetermined light by the lighting unit, and the object is based on the shape feature. To measure the arrangement information of
    The image inspection apparatus according to claim 1 or 2.
  5. 　前記照明部は、前記撮影部により前記テスト画像を撮影する場合に、前記対象物の輪郭に向けた光、前記対象物を横断するライン状の光及び前記対象物を覆う縞状の光のいずれかを照射する、
    　請求項４に記載の画像検査装置。     When the test image is taken by the photographing unit, the illuminating unit may be either light directed at the contour of the object, line-shaped light crossing the object, or striped light covering the object. Irradiate
    The image inspection apparatus according to claim 4.
  6. 　前記測定部は、前記撮影部とは異なる方向から前記対象物を撮影する補助撮影部を含む、
    　請求項１又は２に記載の画像検査装置。     The measuring unit includes an auxiliary photographing unit that photographs the object from a direction different from that of the photographing unit.
    The image inspection apparatus according to claim 1 or 2.
  7. 　前記照明部は、前記対象物の正常箇所で反射された光が前記撮影部に入射し、前記対象物の異常箇所で反射された光が前記撮影部に入射しないように、前記複数の照明素子による光の出射方向を前記配置情報に応じて制御して、前記対象物に対して光を照射する、
    　請求項１から６のいずれか一項に記載の画像検査装置。     The illumination unit has the plurality of illumination elements so that the light reflected at the normal portion of the object is incident on the photographing unit and the light reflected at the abnormal portion of the object is not incident on the photographing unit. The object is irradiated with light by controlling the emission direction of the light according to the arrangement information.
    The image inspection apparatus according to any one of claims 1 to 6.
  8. 　前記照明部は、前記対象物の正常箇所で反射された光が前記撮影部に入射せず、前記対象物の異常箇所で反射された光が前記撮影部に入射するように、前記複数の照明素子による光の出射方向を前記配置情報に応じて制御して、前記対象物に対して光を照射する、
    　請求項１から６のいずれか一項に記載の画像検査装置。     The illumination unit has the plurality of illuminations so that the light reflected at the normal portion of the object does not enter the photographing unit and the light reflected at the abnormal portion of the object enters the photographing unit. The light emission direction of the element is controlled according to the arrangement information to irradiate the object with light.
    The image inspection apparatus according to any one of claims 1 to 6.
  9. 　光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含み、前記複数の照明素子によって、対象物に対して、複数の角度で光を複数回照射する照明部と、
    　前記光が照射されるごとに、前記対象物を撮影する撮影部と、
    　撮影された前記対象物の複数の画像の特徴に基づいて、前記複数の画像から少なくとも１の画像を選択する選択部と、
    　前記少なくとも１の画像に基づいて、前記対象物の状態を検査する検査部と、
    　を備える画像検査装置。     An illuminating unit that can control the light emission direction, includes a plurality of illuminating elements arranged in a matrix, and irradiates an object with light at a plurality of angles by the plurality of illuminating elements.
    Each time the light is irradiated, a photographing unit that photographs the object and a photographing unit
    A selection unit that selects at least one image from the plurality of images based on the characteristics of the plurality of images of the object taken.
    An inspection unit that inspects the condition of the object based on at least one image,
    An image inspection device comprising.
  10. 　対象物の位置及び姿勢の少なくともいずれかを含む配置情報を測定することと、
    　マトリクス状に配置された複数の照明素子を含む照明部による光の出射方向を前記配置情報に応じて制御して、前記対象物に対して光を照射することと、
    　照明された前記対象物を撮影することと、
    　撮影された画像に基づいて、前記対象物の状態を検査することと、
    　を含む画像検査方法。     Measuring placement information, including at least one of the position and orientation of the object,
    To irradiate the object with light by controlling the emission direction of light by an illumination unit including a plurality of illumination elements arranged in a matrix according to the arrangement information.
    Taking a picture of the illuminated object and
    Inspecting the condition of the object based on the captured image,
    Image inspection methods including.
  11. 　光の出射方向が制御可能であり、マトリクス状に配置された複数の照明素子を含む照明部によって、対象物に対して、複数の角度で光を複数回照射することと、
    　前記光が照射されるごとに、前記対象物を撮影することと、
    　撮影された前記対象物の複数の画像の特徴に基づいて、前記複数の画像から少なくとも１の画像を選択することと、
    　前記少なくとも１の画像に基づいて、前記対象物の状態を検査することと、
    　を含む画像検査方法。     The light emission direction can be controlled, and the object is irradiated with light multiple times at a plurality of angles by a lighting unit including a plurality of lighting elements arranged in a matrix.
    Each time the light is irradiated, the object is photographed and
    To select at least one image from the plurality of images based on the characteristics of the plurality of images of the object taken.
    Inspecting the condition of the object based on at least one image,
    Image inspection methods including.
PCT/JP2020/010331 2019-03-14 2020-03-10 Image inspection device and image inspection method WO2020184567A1 (en)

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