WO2020143356A1 - 一种用于带有可动结构的传感器/执行器的表面防护方法及具有可动结构的传感器/执行器组件 - Google Patents

一种用于带有可动结构的传感器/执行器的表面防护方法及具有可动结构的传感器/执行器组件 Download PDF

Info

Publication number
WO2020143356A1
WO2020143356A1 PCT/CN2019/122089 CN2019122089W WO2020143356A1 WO 2020143356 A1 WO2020143356 A1 WO 2020143356A1 CN 2019122089 W CN2019122089 W CN 2019122089W WO 2020143356 A1 WO2020143356 A1 WO 2020143356A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective layer
sensor
coating
actuator
movable structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2019/122089
Other languages
English (en)
French (fr)
Inventor
杨兴
姚嘉林
王博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Publication of WO2020143356A1 publication Critical patent/WO2020143356A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]

Definitions

  • the present application relates to the technical field of packaging and protection of sensors or actuators with movable structures, and in particular to a surface protection method for sensors or actuators with movable structures and sensors or actuator assemblies with movable structures.
  • metal or non-metallic coatings such as alloy coatings, paint layers, and plastics
  • metal or non-metallic coatings are provided on the surfaces of sensors or actuators with movable structures Layer, rubber layer, asphalt layer, anti-rust oil layer, and other polymer coatings.
  • these coatings often show partial or even full-scale damage and lose protection, resulting in damage to the product.
  • the current coating method mainly adopts a single coating as the protective layer of the sensor or actuator of the movable structure, and the single coating has limited protection effects due to its own material properties and other limitations .
  • a single parylene polymer coating such as parylene provides good protection against large molecules in gas or liquid, but it has poor protection against small molecules in gas or liquid;
  • a single coating such as nanoscale oxide Or, although the structure is dense, it can better protect the small molecules in the gas or liquid, but the protection of the large molecules in the gas or liquid is poor, and because of its high Young's modulus and hardness, the sensor has a movable structure Or the performance of the sensitive or moving parts of the actuator will have a greater impact.
  • the main purpose of the present application is to provide a surface protection method for a sensor or actuator with a movable structure, which is suitable for the protection of various types of sensors or actuators with a movable structure, and the protection effect It has the advantages of ultra-thin coating size, strong coating adhesion, good protection performance or small impact on the sensor or actuator body with a movable structure, and can improve the accuracy or stability of the sensor or actuator with a movable structure Sex and other indicators.
  • the present application provides a surface protection method for a sensor or actuator with a movable structure, which includes the steps of:
  • one of the first protective layer and the second protective layer is a nano-scale coating, which is used to protect the erosion of the small molecule group composed of less than 10 water or other gas or liquid molecules, or the size is smaller than Erosion of ions or molecules equal to the small molecule group;
  • the other of the first protective layer and the second protective layer is a micron-level coating, used to protect more than 10 water or other gases or liquids Erosion of macromolecular clusters composed of molecules, or ions or molecules whose size is greater than or equal to the macromolecular clusters.
  • the first protective layer is a nano-scale coating
  • the second protective layer is a micro-scale coating
  • atomic layer deposition technology may be used to form the nano-scale coating.
  • the micro-scale coating may be formed by using chemical vapor deposition technology, evaporation technology, sputtering technology or spraying technology.
  • one or more of oxides, nitrides, fluorides, metals, carbides, sulfides, and polymers are used to form the nano-scale coating.
  • one or more of polymers, oxides, sulfides, nitrides, carbides, and ceramics are used to form the micron coating.
  • the operation process of forming the nano-scale coating includes: placing the sensor or actuator with a movable structure in an atomic layer deposition chamber under the condition of a deposition temperature of -40 to 350°C , Depositing the deposited material layer by layer in the form of a monoatomic film on the periphery of the sensor or actuator with a movable structure.
  • the number of deposited layers of the monoatomic film may be 1 to 9000 layers.
  • the method before forming the nanoscale coating layer, further includes: performing surface modification treatment on the surface to be formed with the nanoscale coating layer, such as performing plasma surface modification treatment or coupling agent surface Modification, etc., to enhance the adhesion of the coating.
  • the operation process of forming the micron-scale coating includes: placing a sensor or actuator with a movable structure or a sensor or actuator with a movable structure formed with the first protective layer In the chemical vapor deposition chamber, under the condition of a deposition temperature of -20 to 400°C, the deposition material is uniformly deposited on the periphery of the sensor or actuator with a movable structure or the first protective layer to form the micrometer A coating that protects against external influences (such as gas or liquid).
  • the operation process of forming the micron-level coating to prevent external influences includes: a sensor or an actuator with a movable structure or a movable structure with the first protective layer formed
  • the sensor or actuator is placed in a vacuum evaporation deposition chamber, the deposition material is heated to vaporization and sublimation, and the gas of the deposition material is attached to the surface of the sensor or actuator with a movable structure or the first protective layer , To form the micron-level coating to prevent external influences.
  • the operation process of forming the micron-scale coating includes: a sensor or actuator with a movable structure or a sensor or actuator with a movable structure formed with the first protective layer Placed in a vacuum sputtering system filled with an inert gas, the inert gas is ionized by the action of a high-voltage electric field, generating an ion current, which bombards the target cathode to splash the target material, and the splashed target material atoms or molecules Precipitation accumulates on the surface of the sensor or actuator with a movable structure or the first protective layer to form the micron-level coating.
  • the operation process of forming the micron-level coating includes: dispersing the micron-level coating material into uniform and fine mist droplets by means of a spray gun or an atomizer with the help of pressure or centrifugal force. Coated on the surface of the sensor or actuator with a movable structure or the first protective layer to form the micron-level coating.
  • the thickness of the nano-scale coating is 0.1-900 nm. In some embodiments of the present application, the thickness of the micron coating is 0.1-3000 microns.
  • the micron-level coating before forming the micron-level coating, it further includes: performing surface modification treatment on the surface to be formed with the micron-level coating, such as performing plasma surface modification treatment or coupling agent surface Modification, etc., to enhance the adhesion of the coating.
  • performing surface modification treatment on the surface to be formed with the micron-level coating such as performing plasma surface modification treatment or coupling agent surface Modification, etc., to enhance the adhesion of the coating.
  • the method further includes: forming at least one third protective layer on the outer surface of the second protective layer, the third protective layer being the nano-scale coating or the micro-scale coating.
  • the senor or actuator with a movable structure is a medical equipment part, a chemical equipment part or a ship equipment part.
  • the surface protection method of the present application is not limited by the structure of the sensor or actuator with a movable structure, the processing process is simple, and can be widely used in different fields of gas or gas sensors or actuators with a movable structure in many fields.
  • the treatment of the influence of liquid, and the processed sensor or actuator with a movable structure can withstand the long-term test of preventing the impact of the external harsh environment (such as gas, liquid, etc.), and preventing dust, so as to meet the harsh environment
  • the stability and reliability requirements for long-term work have the advantages of ultra-thin size, good protection performance, and small impact on performance parameters such as the sensitivity of the sensor or actuator body with a movable structure.
  • the surface protection method of the present application can directly process the surface of the sensor or actuator with a movable structure, can also make up for the gaps and hysteresis in the sensor or actuator with a movable structure, and can also isolate the external environment Harmful media that affect the accuracy of sensors or actuators with movable structures, thereby improving the accuracy of sensors or actuators with movable structures.
  • the present application provides a sensor or actuator assembly having a movable structure.
  • the sensor or actuator assembly with a movable structure includes: a sensor or actuator with a movable structure; a first protective layer provided on the movable structure On the outer surface of the sensor or actuator; the second protective layer, the second protective layer is provided on the outer surface of the first protective layer; wherein, in the first protective layer and the second protective layer One is a nano-scale coating, used to protect the erosion of small molecular clusters composed of less than 10 water or other gas or liquid molecules, or ions or molecules with a size less than or equal to the small molecular clusters; the first The other of the protective layer and the second protective layer is a micron-level coating, which is used to protect the macromolecule group composed of more than 10 water or other gas or liquid molecules, or the size is greater than or equal to the macromolecule Erosion of ions or molecules of the mass.
  • the first protective layer is the nano-scale coating
  • the second protective layer is the micro-scale coating
  • the senor or actuator assembly with a movable structure further includes at least one third protective layer stacked on the outer surface of the second protective layer, the third protective layer is the Nano-scale coating or the micro-scale coating.
  • the first protective layer is the micron-level coating
  • the second protective layer is the nano-level coating
  • at least a portion of the second protective layer is filled in the In the porous structure of the first protective layer.
  • the sensor or actuator assembly with a movable structure satisfies at least one of the following conditions: the outer surface of the sensor or actuator with a movable structure and the outer surface of the first protective layer There is a micro-nano structure on at least one of the surfaces that can increase the surface area; there is a first coupling agent layer between the sensor or actuator with a movable structure and the first protective layer; the first protective layer There is a second coupling agent layer between the second protective layer.
  • the nano-scale coating and the micro-scale coating each independently include a plurality of sub-layers, and the plurality of sub-layers satisfy at least one of the following conditions: a plurality of the sub-layers
  • the materials of the layers are not completely the same; the forming methods of the multiple sub-layers are not completely the same.
  • the material of the nano-scale coating includes one or more of oxide, nitride, fluoride, metal, carbide, sulfide, and polymer.
  • the material of the micro-scale coating includes one or more of polymers, oxides, sulfides, nitrides, carbides, and ceramics.
  • the thickness of the nano-scale coating is 0.1-900 nm.
  • the thickness of the micron coating is 0.1-3000 microns.
  • the senor or actuator with a movable structure includes at least one of a sensor and an actuator.
  • the sensor or actuator assembly with a movable structure of this application can withstand the test of long-term protection from the influence of gas or liquid, dust, etc., so as to meet the stability and reliability requirements of long-term work in harsh environments, with a coating It has the advantages of ultra-thin size, good protection performance, and little influence on the performance parameters such as the sensitivity of the sensor or actuator body with a movable structure. It can also make up for gaps, hysteresis and other defects in sensors or actuators with movable structures, and can also isolate harmful media that affect the accuracy of sensors with movable structures in the external environment, thereby improving sensors or actuators with movable structures The accuracy of the device.
  • FIG. 1 is a schematic flowchart of an embodiment of a surface protection method of a sensor or actuator with a movable structure according to this application;
  • FIG. 2 is a schematic cross-sectional view of an exemplary sensor or actuator with a movable structure of this application;
  • FIG. 3 is a schematic cross-sectional view of the sensor or actuator with a movable structure of FIG. 2 after forming the first protective layer;
  • FIG. 4 is a partially enlarged schematic view of area A in FIG. 3;
  • FIG. 5 is a schematic cross-sectional view of the sensor or actuator with a movable structure of FIG. 3 after forming a second protective layer;
  • FIG. 6 is a partially enlarged schematic view of area B in FIG. 5.
  • a single parylene polymer coating such as parylene provides good protection against large molecules in gas or liquid, but it has poor protection against small molecules in gas or liquid; a single coating such as nanoscale oxide
  • the dense structure can better protect small molecules in gas or liquid, the protection of large molecules in gas or liquid is poor, and due to its high Young's modulus and hardness, it is suitable for sensors or actuators with movable structures.
  • the performance of the sensitive or moving parts of the device will have a greater impact.
  • the movable parts will be repeatedly deformed by the action of cyclic load during operation, and then the protective coating materials will be repeatedly deformed together, so that the protective coating materials are prone to problems such as delamination and fatigue failure.
  • water in nature often does not exist in the form of a single water molecule, but several water molecules will polymerize together through hydrogen bonding to form water molecule clusters, that is, in the form of commonly known as "water molecule clusters", usually .
  • a water molecule group composed of more than 10 water molecules is called a macromolecular group, which has a large size and poor activity, and usually cannot break through the protection of the above coating.
  • This type of macromolecular group exists in a large amount in nature, accounting for nature.
  • the vast majority of the water; and the water molecule group composed of less than 10 water molecules is called a small molecule group, which is small in volume and large in activity.
  • the methods of improving the accuracy of the related art are considered from the internal physical structure such as the material, principle, structure and manufacturing process of the sensor or actuator with a movable structure.
  • this is faced with complex processes, long manufacturing cycles, research and development High cost and other issues.
  • the excessively thick surface coating will affect the accuracy and sensitivity of the action of the sensor or actuator, thereby adversely affecting its normal operation. Therefore, the method of increasing the thickness of the coating is not applicable.
  • the present application proposes a sensor or actuator with movable structures that can be applied to many types
  • the surface protection method, the processed sensor or actuator with a movable structure can significantly improve the ability to prevent the influence of gas or liquid, and this method can replace the packaging method, coating method and other processing methods used in the related art.
  • it can make up for gaps, hysteresis and other defects in sensors or actuators with movable structures, and can also isolate harmful media that affect the accuracy of sensors or actuators with movable structures in the external environment, thereby improving the movable The accuracy of the structured sensor or actuator.
  • a surface protection method of a sensor or actuator with a movable structure mainly includes the steps of:
  • first protective layer 20 on the outer surface of the sensor or actuator 10 (exemplarily shown in FIG. 2) with a movable structure (here, the outer and outer surfaces can be used interchangeably) 3-4), wherein the first protective layer 20 may be a dense nano-scale coating.
  • the dense nano-scale coating is used to protect the erosion of small molecular clusters composed of less than 10 water or other gas or liquid molecules, or ions or molecules whose size is less than or equal to the small molecular clusters;
  • the micron coating is used to protect the erosion of macromolecular clusters composed of more than 10 water or other gas or liquid molecules, or ions or molecules with a size greater than or equal to the macromolecule clusters.
  • the outer surface of the corresponding sensor or actuator with a movable structure will be formed with a stacked first protective layer and a second protective layer.
  • the first protective layer It is a dense nano-scale coating
  • the second protective layer is a micro-scale coating.
  • the dense nano-scale coating is a nanometer-thick coating that prevents the influence of gas or liquid, which can block the penetration of small molecular groups
  • the micron-level coating is a micron-thick coating that prevents the influence of gas or liquid.
  • the density of the layer is lower than the dense nano-scale coating.
  • the micro-scale coating cannot block the penetration of small molecular clusters for a long time, it can effectively block the penetration of large molecular clusters for a long time. Therefore, during the long-term operation of sensors or actuators with movable structures, even though a small amount of small molecular groups penetrate into the micron-level coating as the first line of defense, due to the dense nanometers as the second line of defense With the presence of a graded coating, these small molecular clusters will have difficulty breaking through to the surface of sensors or actuators with movable structures. Under the cooperative protection of the first protective layer and the second protective layer, the sensor or actuator with a movable structure can maintain the ability to prevent the influence of gas or liquid for a long time in various harsh environments.
  • the sensor or actuator with a movable structure can withstand the test of preventing gas or liquid for a long time, thereby meeting the stability and reliability requirements of long-term work.
  • the processed sensor or actuator with a movable structure can also effectively prevent the intrusion of dust, etc., with ultra-thin size, good protection performance, and The performance parameters such as the sensitivity of the sensor or actuator body with a movable structure have little influence, etc.
  • the surface protection method proposed in this application only provides two layers of ultra-thin, nano-scale and ultra-thin coatings on the surface of sensors or actuators with movable structures, which prevent the influence of gases or liquids.
  • the size of the sensor or actuator with a movable structure will be significantly reduced, which brings the advantage of small space occupation; compared with the coating method treatment using the related technology, it prevents gas While the ability of liquid influence is greatly improved, the thickness of the coating is significantly reduced.
  • the sensitivity of the movable structure depends on the sensitivity of the movable structure when it moves.
  • the package or coating outside the movable structure should not hinder the movement of the movable structure itself.
  • the dense nano-scale coating and micro-scale coating can be directly coated on the surface of the corresponding movable structure, because the thickness of these two coatings to prevent the influence of gas or liquid is very thin, which The hindrance to the movement of the movable structure is very small, so it will only have a small effect on the sensitivity of the corresponding sensor or actuator with the movable structure.
  • the movable parts of the sensor or actuator with a movable structure will be repeatedly deformed by the cyclic load during operation, and the protective coating material will be repeatedly deformed together, so that the protective coating material is prone to delamination, Problems such as fatigue failure. Therefore, the adhesion of the coating is also high.
  • the coating cannot be delaminated, cracked and peeled off during the action of the sensor or actuator with a movable structure.
  • the dense nano-scale The coating and micron coating can be firmly attached to the surface of the sensor or actuator of the movable structure, and will not cause delamination, cracking, peeling, damage and other defects during the movement of the sensor or actuator of the movable structure.
  • actuators are also called drivers or actuators, such as micropumps, microvalves, micromotors, microswitches, etc., which work to convert control signals and energy into controllable motion and power output of a movable structure, thereby Make the actuator work externally under the control signal.
  • the surface protection method of the present application only provides two layers of ultra-thin coatings to prevent the influence of gas or liquid on the surface of the sensor or actuator with a movable structure, regardless of the structure of the sensor or actuator with the movable structure Whether it is complicated or not, it can directly process the surface of the sensor or actuator with a movable structure, without being limited by the structure of the sensor or actuator with a movable structure, and the processing process is simple.
  • the first protective layer 20 may be a micron-level coating
  • the second protective layer 30 may be a dense nano-scale coating. That is, in step S2, a micron-level coating is first formed on the surface of a sensor or actuator with a movable structure, and in step S3, a dense nanoscale coating is formed on the surface of the micron-level coating.
  • the dense nano-scale coating can be used as the first line of defense in the periphery to block the penetration of small and large molecular clusters at the same time
  • the micro-scale coating can be used as the second line of defense in the interior to facilitate the first line of defense
  • Blocking the penetration of large molecular clusters in the case of partial failure can also make sensors or actuators with movable structures withstand long-term tests to prevent the influence of gas or liquid, dust, etc., thus meeting the stability and reliability of long-term work Claim.
  • the first protective layer 20 is a micron-level coating and the second protective layer 30 is a dense nano-level coating
  • the dense nano-level coating can penetrate into the micropores of the micron-level coating , Thereby forming a three-dimensional second protective layer.
  • the dense nano-scale coating surface as the first line of defense fails locally, the small molecular groups are still difficult to penetrate into the micro-scale coating layer.
  • the long-term working stability and reliability of sensors or actuators with movable structures can be guaranteed.
  • the advantages of the space occupation of the coating, the sensitivity of the sensor or actuator with a movable structure, and the simplicity of the processing process are advantages. It was not affected at all.
  • the method may further include steps:
  • the sensor or actuator 10 with a movable structure may be immersed in an acetone solution for ultrasonic cleaning for several minutes to tens of minutes (such as 20 minutes), and then the sensor or actuator 10 with a movable structure may be immersed in isopropyl alcohol Ultrasonic cleaning in the solution for several minutes to tens of minutes (such as 20 minutes); or it can also be cleaned directly by plasma cleaning.
  • the dense nano-scale coating layer in the step of forming a dense nano-scale coating layer (may be step S2 or step S3), may be formed using an atomic layer deposition technique 20 or the second protective layer 30), but not limited to the use of atomic layer deposition technology. That is, in the present application, the dense nano-scale coating layer may be an atomic layer deposition layer, but is not limited to the atomic layer deposition layer.
  • Atomic layer deposition technology is a method that can deposit substances layer by layer in the form of monatomic film.
  • the chemical reaction of a new layer of atomic film is directly related to the previous layer. This way allows only one layer of atoms to be deposited per reaction.
  • a protective coating that meets the requirements and is protected against the effects of gas or liquid can be obtained.
  • the density of the atomic layer deposit can well guarantee its blocking effect on small molecular clusters.
  • the operation process of step S2 may include: The sensor or actuator 10 of the movable structure is placed in the atomic layer deposition chamber, and the deposition material is deposited layer by layer in the form of a monoatomic film on the sensor or the movable structure under the condition of a deposition temperature of -40 to 350°C. On the outer surface of the actuator 10, the number of deposited layers may specifically be 10 to 9000 layers.
  • the thickness of the atomic layer deposition layer may be between 0.1 and 900 nm, and more specifically, between 0.5 and 200 nm.
  • one or more of oxide, nitride, fluoride, metal, carbide, and sulfide may be used to form an atomic layer deposition layer. That is, the material used to form the dense nano-scale coating may be any material that prevents the influence of gas or liquid, such as oxides, nitrides, fluorides, metals, carbides, sulfides, or a combination thereof.
  • the specific operation process of forming a dense nano-scale coating includes: using alumina as a deposition material, placing a sensor or actuator 10 (such as a pressure sensor) with a movable structure in an atomic layer deposition Indoors, the aluminum oxide material is layered on the surface of the pressure sensor layer by layer in the form of a monoatomic film to form the first protective layer 20, that is, a dense nano-scale coating, in which the deposition time is about 10 hours and 4,000 are deposited Cycling, the deposition thickness is 400 nm.
  • the method before forming the nano-scale coating, further includes: performing surface modification treatment on the surface to be formed with the nano-scale coating: including plasma surface modification treatment or coupling agent surface modification Sexual treatment, etc., to improve the adhesion of the coating.
  • the nano-scale coating is the first protective layer
  • the surface modification treatment is performed on the surface of the sensor or actuator with a movable structure
  • the nano-scale coating is the second protective layer
  • the first protective layer The surface is subjected to the above-mentioned surface modification treatment.
  • the nano-scale coating as the first protective layer as an example for description: in some specific examples, the surface of a sensor or actuator with a movable structure may be treated with plasma.
  • a sensor with a movable structure may be used
  • the surface of the actuator forms a micro-nano structure that can increase the surface area
  • it can activate the surface of the sensor or actuator with a movable structure, so that the nano-scale coating can be formed with the movable structure.
  • Hydrogen bonds and chemical bonds are formed between the surfaces of the sensors or actuators to improve the adhesion between the nano-scale coating and the sensors or actuators with movable structures.
  • the plasma surface modification treatment may be the above plasma cleaning step, or the plasma treatment step may be performed separately.
  • a layer of coupling agent (specifically, such as a silane coupling agent) can be formed on the surface of a sensor or actuator with a movable structure by deposition, spraying, coating, etc. to improve the nano-scale coating and Adhesion between sensors or actuators of movable structures.
  • the step of forming the micron-level coating for example, step S3 or step S2
  • chemical vapor deposition technology, or vapor deposition technology, or sputtering technology, or spraying technology may be used to form The micron-level coating (correspondingly to the second protective layer 30 or the first protective layer 20), but is not limited to the aforementioned technology.
  • the micron-level coating layer formed on the outer surface of the first protective layer 20 or directly on the outer surface of the sensor or actuator 10 having a movable structure may be a chemical vapor deposition layer, or an evaporation deposition layer , Or sputter deposition layer, or spray deposition layer, but not limited to the listed types of deposition layers.
  • the micron-level coating formed by the foregoing technique can well block the erosion of macromolecular clusters, and at the same time prevent dust and other foreign objects from contacting the surface of the first protective layer 20 or the sensor or actuator 10 with a movable structure, thereby becoming the first
  • the protective layer 20 or the sensor or actuator 10 with a movable structure provides a micron-level safety barrier.
  • one or more of polymers, oxides, sulfides, nitrides, carbides, and ceramics may be used to form the micron-scale coating. That is, the material used to form the micron-level coating may be any material that prevents the influence of gas or liquid, such as polymers, oxides, sulfides, nitrides, carbides, ceramics, or combinations thereof.
  • the micron-level coating includes multiple sub-layers, and the multiple sub-layers satisfy at least one of the following conditions: the materials of the multiple sub-layers are not completely the same; The method of forming the sub-layers is not completely the same.
  • different materials and/or different processes may be used to form the micron-level coating, that is, the micron-level coating layer to prevent the influence of gas or liquid may have different materials and/or properties in the thickness direction .
  • the same material and different processes may be used to form the micron-level coating, different materials and different processes may be used to form the micron-level coating, or different materials and the same process may be used
  • the micron coating is formed so as to fully utilize the advantages of different materials and/or different processing methods.
  • the nano-scale coating has multiple sub-layers, it is similar to the micro-scale coating, which will not be repeated here.
  • silicon carbide may be used to deposit a layer with a thickness of 2 microns to prevent the influence of gas or liquid, and then parylene is used to deposit a layer with a thickness of 2 microns to prevent gas or liquid.
  • Liquid-affected coatings, these two coatings that prevent gas or liquid effects together constitute the micron coating described in this application.
  • this embodiment can improve the density and stability of the coating to prevent the influence of gas or liquid, and can also use the hydrophobicity of parylene to further improve the ability of the coating to prevent the influence of gas or liquid.
  • the thickness of the micron-level coating (for example, the second protective layer 40 formed in step S3 or the first protective layer 20 formed in step S2) may be between 0.1 and 200 Between microns.
  • the specific example of the forming process of the second protective layer 30 is described below by taking the second protective layer 30 as a micron-level coating as an example.
  • step S3 when the chemical vapor deposition technique is used to form the second protective layer 30, the operation process of step S3 includes: placing the sensor or actuator 10 with a movable structure on which the first protective layer 20 is formed into the chemical vapor deposition chamber, Under the condition of a deposition temperature of -10 to 400° C., the deposition material is deposited uniformly on the outer surface of the first protective layer 20.
  • the specific operation process of forming the second protective layer 30 by using chemical vapor deposition technology in step S3 includes: using silicon carbide as a deposition material, and forming the first protective layer 20 having a movable structure
  • the sensor or actuator 10 (such as a pressure sensor) is placed in the deposition chamber, and the silicon carbide material is uniformly plated on the surface of the first protective layer 20 at room temperature for a deposition time of about 4 hours and a deposition thickness of 4 microns.
  • the operation process of step S3 includes: placing the sensor or actuator 10 with a movable structure on which the first protective layer 20 is formed under vacuum evaporation In the plating deposition chamber, the deposition material is heated to vaporize and sublimate, and the gas of the deposition material is attached to the surface of the first protective layer 20 to form a thin film, that is, the micron-level coating.
  • the operation process of step S3 includes: placing the sensor or actuator 10 with a movable structure on which the first protective layer 20 is formed, filled with inert
  • a vacuum sputtering system of a gas such as argon
  • the argon gas is ionized by the action of a high-voltage electric field to generate a stream of argon ions.
  • the argon ion stream bombards the target cathode to splash the target material, and the target material atoms that are splashed out Or, molecular precipitation accumulates on the surface of the first protective layer 20 to form a thin film, that is, the micron coating.
  • the operation process of step S3 includes: a sensor or actuator 10 with a movable structure on which the first protective layer 20 is formed is sprayed or atomized By means of pressure or centrifugal force, the micron-level coating material is dispersed into uniform and fine mist droplets, and applied to the surface on which the first protective layer 20 is formed to form the micron-level coating.
  • first protective layer 20 is a micron-level coating.
  • the method before forming the micron-level coating, further includes: performing plasma surface modification treatment or coupling agent surface modification on the surface to be formed with the micron-level coating.
  • the micron-level coating is the first protective layer
  • the above surface treatment is performed on the surface of the sensor or actuator with a movable structure
  • the micron-level coating is the second protective layer
  • the surface of the first protective layer Perform the above surface treatment.
  • the surface of the first protective layer may be treated with plasma.
  • a surface that can increase the surface area may be formed on the surface of the first protective layer
  • Micro-nano structure on the other hand, can activate the surface of the first protective layer, so that the formed micron-level coating can form hydrogen bonding, chemical bonding and other bonding between the surface of the first protective layer to improve The adhesion between the micron coating and the first protective layer.
  • the plasma surface modification treatment may be the above plasma cleaning step, or the plasma treatment step may be performed separately.
  • a layer of a coupling agent specifically, such as a silane coupling agent
  • the method further includes: forming at least one third protective layer on the outer surface of the second protective layer, the third protective layer being the nano-scale coating or the micro-scale coating.
  • the third protective layer being the nano-scale coating or the micro-scale coating.
  • multiple layers of nano-scale coating and micro-scale coating can be formed on the surface of a sensor or actuator with a movable structure, and the specific stacking order is not particularly limited, and can be freely stacked and combined, specifically, for example, nano-scale coating If the layer is A layer and the micron coating is B layer, you can set the protection of the stacking order of ABA, ABB, BAB, BAA, ABAA, ABAB, BAAA, BABA, etc. on the surface of the sensor or actuator with a movable structure Layer, no longer elaborate here.
  • the surface protection method of the present application can be applied to various sensors or actuators with movable structures, especially chemical equipment parts, medical equipment parts or ship equipment parts, etc., making these movable Structured sensors or actuators can withstand the test of various corrosive environments.
  • adopting the surface protection method of the present application to perform surface protection treatment on sensors and actuators with movable structures can eliminate the traditional packaging structure, while reducing volume and cost while enabling these to have movable structures
  • the sensors or actuators have a higher level of ability to prevent the influence of gas or liquid and prevent the intrusion of dust.
  • the surface protection method of the present application is used to perform surface protection treatment on parts with a movable structure in chemical equipment, medical equipment parts, or parts with a movable structure in marine equipment, without adding a coating Under the premise of thickness, the corrosion resistance of corresponding parts is improved.
  • the surface protection method of the present application directly covers the surface of the sensor or actuator with a movable structure with an ultra-thin coating with strong coating adhesion. After treatment, it can have long-term stability to prevent the influence of gas or liquid.
  • the ability to prevent dust intrusion greatly enhances the durability and service life of sensors or actuators with movable structures in water, humid environments, or other environments that affect sensors or actuators with movable structures. It has the advantages of good protection performance, small influence on the performance parameters such as the sensor with a movable structure or the sensitivity of the actuator body, etc.
  • the present application provides a sensor or actuator assembly having a movable structure.
  • the sensor or actuator assembly with a movable structure includes: a sensor or actuator with a movable structure; a first protective layer provided on the movable structure On the outer surface of the sensor or actuator; the second protective layer, the second protective layer is provided on the outer surface of the first protective layer; wherein, in the first protective layer and the second protective layer One is a nano-scale coating, used to protect the erosion of small molecular clusters composed of less than 10 water or other gas or liquid molecules, or ions or molecules with a size less than or equal to the small molecular clusters; the first The other of the protective layer and the second protective layer is a micron-level coating, which is used to protect the macromolecule group composed of more than 10 water or other gas or liquid molecules, or the size is greater than or equal to the macromolecule Erosion of ions or molecules of the mass.
  • the first protective layer is the nano-scale coating
  • the second protective layer is the micro-scale coating
  • the first protective layer is the micro-scale coating
  • the second protective layer is the nano-scale coating
  • at least a portion of the second protective layer is filled in the In the porous structure of the first protective layer.
  • At least one third protective layer is further provided on the outer surface of the second protective layer, and the third protective layer is the nano-scale coating or the micro-scale coating.
  • the third protective layer is the nano-scale coating or the micro-scale coating.
  • multiple layers of nano-scale coating and micro-scale coating can be formed on the surface of a sensor or actuator with a movable structure, and the specific stacking order is not particularly limited, and can be freely stacked and combined, specifically, for example, nano-scale coating If the layer is A layer and the micron coating is B layer, you can set the protection of the stacking order of ABA, ABB, BAB, BAA, ABAA, ABAB, BAAA, BABA, etc. on the surface of the sensor or actuator with a movable structure Layer, no longer elaborate here.
  • the micron-level coating includes multiple sub-layers, and the multiple sub-layers satisfy at least one of the following conditions: the materials of the multiple sub-layers are not completely the same; The method of forming the sub-layers is not exactly the same.
  • a sensor or actuator assembly with a movable structure may satisfy at least one of the following conditions: the outer surface of the sensor or actuator with a movable structure and the outer surface of the first protective layer There is a micro-nano structure on at least one of the surfaces that can increase the surface area; there is a first coupling agent layer between the sensor or actuator with a movable structure and the first protective layer; the first protective layer There is a second coupling agent layer between the second protective layer.
  • the above-mentioned micro-nano structure that can increase the surface area can form multiple anchor points to make the coating adhere better and improve the adhesion of the coating, while the coupling agent layer (including the first coupling agent layer and the first The second coupling agent layer) can enhance the adhesion of the coating by intermolecular forces, hydrogen bonds, chemical bonds, etc., and meet the use requirements of the movable parts for coating deformation, fatigue and other aspects.
  • the material of the nano-scale coating includes one or more of oxide, nitride, fluoride, metal, carbide, sulfide, and polymer.
  • the material of the micro-scale coating includes one or more of polymers, oxides, sulfides, nitrides, carbides, and ceramics.
  • the thickness of the nano-scale coating is 0.1-900 nm.
  • the thickness of the micron coating is 0.1-3000 microns.
  • the senor or actuator with a movable structure is a chemical equipment part, a medical equipment part or a marine equipment part.
  • the sensor or actuator assembly with a movable structure of this application can withstand the test of long-term protection from the influence of gas or liquid, anti-dust, etc., so as to meet the stability and reliability requirements of long-term work in harsh environments. It has the advantages of thinness, good protection performance, and little influence on performance parameters such as the sensitivity of the sensor or actuator body with a movable structure. It can also make up for gaps, hysteresis and other defects in sensors or actuators with movable structures, and can also isolate harmful media that affect the accuracy of sensors or actuators with movable structures in the external environment, thereby improving the performance of movable structures. The accuracy of the sensor or actuator.
  • the sensor or actuator with a movable structure, the first protective layer and the second protective layer in the sensor or actuator assembly with a movable structure may have the same characteristics as described in the surface protection method described above
  • the sensors or actuators of the movable structure, the first protective layer and the second protective layer are the same, which will not be repeated here.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

一种具有可动结构的传感器或执行器(10)的表面防护方法，包括步骤：S2、在具有可动结构的传感器或执行器(10)的外表面形成第一保护层(20)；S3、在第一保护层(20)的外表面形成第二保护层(30)；其中，第一保护层(20)和第二保护层(30)中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于小分子团的离子或分子的侵蚀；第一保护层(20)和第二保护层(30)中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于大分子团的离子或分子的侵蚀。还公开了一种具有可动结构的传感器或执行器(10)组件。

Description

一种用于带有可动结构的传感器/执行器的表面防护方法及具有可动结构的传感器/执行器组件
优先权信息
本申请要求于2019年01月11日提交的申请号为201910025845.9的中国专利申请的优先权权益，并将其全部引入本文。
技术领域
本申请涉及具有可动结构的传感器或执行器的封装和防护的技术领域，具体涉及一种具有可动结构的传感器或执行器的表面防护方法及具有可动结构的传感器或执行器组件。
背景技术
在制造业领域(包括工业领域和医疗领域等)中，很多具有可动结构的传感器或执行器在一些特殊或恶劣的环境下工作，需要考虑封装和防护的问题。特别是对于一些具有可动结构的传感器或执行器，如机械量传感器、执行器等，也因具有可动结构，其可动部件在工作时会受到循环载荷的作用而反复变形，进而带动防护涂层材料一起反复变形，从而使得防护涂层材料容易产生分层、疲劳失效等问题。因此，对涂层的附着力要求也较高，在可动结构的传感器或执行器动作过程中涂层不能分层、开裂和脱落等，使得这一大类具有可动结构的传感器或执行器对于封装技术提出了更高的要求。例如，在各行各业中大量使用的传感器或执行器，如果其工作环境为水中、具有腐蚀性的气体或液体中或潮湿环境中，则需要对其做特殊的防护和封装处理，同时还需考虑外加的防护结构及其工艺方法对具有可动结构的传感器或执行器的可动部分、敏感区等关键部分的影响尽量小，尽量不影响这些具有可动结构的传感器或执行器的性能和指标。
相关技术中，对具有可动结构的传感器或执行器表面防护处理的方法有很多种，例如，采用封装壳密封的方式对其进行防护。然而，这种封装方式一方面会导致产品的外形尺寸明显增大，另一方面还会影响具有可动结构的传感器、执行器等的灵敏度，此外，还存在工艺复杂和成本高的缺点。
相关技术中也有采用涂层法对具有可动结构的传感器或执行器进行防护：在具有可动结构的传感器或执行器的表面设置金属或非金属涂层，如合金涂层、油漆层、塑料层、橡胶层、沥青层、防锈油层、以及其他聚合物涂层等。然而，在长时间接触水或其他影响具有可动结构的传感器或执行器的气体或液体的情况下，这些涂层常常会出现局部甚至全面破损，失去防护能力，从而导致产品的损坏。造成这种情况的一个主要原因是目前的涂层法主要是采用单一的涂层作为可动结构的传感器或执行器的防护层，而单一的涂层由于其自身材料性能等限制，防护效果有限。如单一的聚对二甲苯等微米级聚合物涂层对气体或液体中的大分子的防护较好，但对气体或液体中的小分子的防护较差；单一的纳米级氧化 物等涂层或材料虽然结构致密可以较好地防护气体或液体中的小分子，但对气体或液体中大分子的防护较差，并且由于其杨氏模量和硬度较高，对具有可动结构的传感器或执行器的敏感或运动部分的性能会有较大的影响。
相关技术中，大部分具有可动结构的传感器或执行器都从可动结构的传感器或执行器的材料、原理、结构和制作工艺等内部物理结构等方面考虑如何保证和提高精度，然而，这面临着工艺复杂、制作周期长、研发成本高等问题。
因此，如果能将不同涂层的优点综合起来，研究基于两层或多层涂层的具有可动结构的传感器或执行器防护方法，将会实现一种尺寸超薄、涂层附着力强、可靠性更高、不影响具有可动结构的传感器或执行器的灵敏度等自身性能的新型表面防护方法。并且由于对外界环境的影响进行了有效隔离，这种防护方法还可以提高具有可动结构的传感器或执行器的精度、稳定性等性能指标。这种表面防护方法对于工业领域、医疗领域的具有可动结构的传感器或执行器的防护和应用具有重要的意义。
申请内容
基于上述现状，本申请的主要目的在于提供一种具有可动结构的传感器或执行器的表面防护方法，其适用于对多种类型的具有可动结构的传感器或执行器的防护，并且防护效果具有涂层尺寸超薄、涂层附着力强、防护性能好或者对具有可动结构的传感器或执行器本体的影响小等优点，并能提高具有可动结构的传感器或执行器的精度或者稳定性等指标。
上述目的通过以下技术方案实现：
在本申请的一方面，本申请提供了一种具有可动结构的传感器或执行器的表面防护方法，其包括步骤：
S2、在所述具有可动结构的传感器或执行器的外表面形成第一保护层；
S3、在所述第一保护层的外表面形成第二保护层；
其中，所述第一保护层和所述第二保护层中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述第一保护层和所述第二保护层中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
本申请的一些实施例中，所述第一保护层为纳米级涂层，所述第二保护层为微米级涂层。
本申请的一些实施例中，可以采用原子层沉积技术形成所述纳米级涂层。
本申请的一些实施例中，可以采用化学气相沉积技术、蒸镀技术、溅射技术或喷涂技术形成所述微米级涂层。
本申请的一些实施例中，采用氧化物、氮化物、氟化物、金属、碳化物、硫化物和聚合物中的一种或多种形成所述纳米级涂层。
本申请的一些实施例中，采用聚合物、氧化物、硫化物、氮化物、碳化物和陶瓷中的 一种或多种形成所述微米级涂层。
本申请的一些实施例中，形成所述纳米级涂层的操作过程包括：将所述具有可动结构的传感器或执行器置于原子层沉积室内，在沉积温度-40～350℃的条件下，将沉积材料以单原子膜的形式逐层地沉积在所述具有可动结构的传感器或执行器的外围。具体的，单原子膜的沉积层数可以为1～9000层。
本申请的一些实施例中，在形成所述纳米级涂层之前，还包括：对待形成所述纳米级涂层的表面进行表面改性处理，如进行等离子体表面改性处理或者偶联剂表面改性处理等，以增强涂层的粘附性。
本申请的一些实施例中，形成所述微米级涂层的操作过程包括：将具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于化学气相沉积室内，在沉积温度-20～400℃的条件下，将沉积材料均匀地沉积在所述具有可动结构的传感器或执行器或者所述第一保护层的外围，形成所述微米级防止外界(如气体或液体)影响的涂层。
本申请的另一些实施例中，形成所述微米级防止外界影响的涂层的操作过程包括：将具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于真空的蒸镀沉积室内，将沉积材料加热至汽化升华，并使沉积材料的气体附着于所述具有可动结构的传感器或执行器或者所述第一保护层的表面上，形成所述微米级防止外界影响的涂层。
本申请的另一些实施例中，形成所述微米级涂层的操作过程包括：将具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于充有惰性气体的真空溅射系统中，通过高压电场的作用，使得惰性气体电离，产生离子流，所述离子流轰击靶阴极使靶材料溅出，被溅出的靶材料原子或分子沉淀积累在所述具有可动结构的传感器或执行器或者所述第一保护层的表面上，形成所述微米级涂层。
本申请的另一些实施例中，形成所述微米级涂层的操作过程包括：通过喷枪或雾化器，借助于压力或离心力，将微米级涂层材料分散成均匀而微细的雾滴，施涂于具有可动结构的传感器或执行器或者所述第一保护层的表面，形成所述微米级涂层。
本申请的一些实施例中所述纳米级涂层的厚度为0.1～900纳米。本申请的一些实施例中，所述微米级涂层的厚度为0.1～3000微米。
本申请的一些实施例中，在形成所述微米级涂层之前，还包括：对待形成所述微米级涂层的表面进行表面改性处理，如进行等离子体表面改性处理或者偶联剂表面改性处理等，以增强涂层的粘附性。
本申请的一些实施例中，该方法还包括：在所述第二保护层的外表面上形成至少一个第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。
本申请的一些实施例中，所述具有可动结构的传感器或执行器为医疗设备零部件、化工设备零部件或船舶设备零部件。
本申请的表面防护方法不受具有可动结构的传感器或执行器自身结构的限制，处理工 艺简单，可广泛用于众多领域中的不同类型的具有可动结构的传感器或执行器的防止气体或液体影响的处理，且处理后的具有可动结构的传感器或执行器能够经受住长时间的防止外界恶劣环境(如气体、液体等)的影响、防灰尘等的考验，从而满足在恶劣环境中长期工作的稳定性和可靠性要求，具有尺寸超薄、防护性能好、对具有可动结构的传感器或执行器本体的灵敏度等性能参数影响小等优点。此外，本申请的表面防护方法可直接对具有可动结构的传感器或执行器的表面进行处理，还能弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器的精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
在本申请的另一方面，本申请提供了一种具有可动结构的传感器或执行器组件。根据本申请的实施例，该具有可动结构的传感器或执行器组件包括：具有可动结构的传感器或执行器；第一保护层，所述第一保护层设置在所述具有可动结构的传感器或执行器的外表面上；第二保护层，所述第二保护层设置在所述第一保护层的外表面上；其中，所述第一保护层和所述第二保护层中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述第一保护层和所述第二保护层中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
本申请的一些实施例中，所述第一保护层为所述纳米级涂层，所述第二保护层为所述微米级涂层。
本申请的一些实施例中，具有可动结构的传感器或执行器组件还包括至少一个层叠设置在所述第二保护层的外表面上的第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。
本申请的一些实施例中，所述第一保护层为所述微米级涂层，所述第二保护层为所述纳米级涂层，且所述第二保护层的至少一部分填充在所述第一保护层的多孔结构中。
本申请的一些实施例中，该具有可动结构的传感器或执行器组件满足以下条件的至少之一：所述具有可动结构的传感器或执行器的外表面和所述第一保护层的外表面中的至少之一上具有可以增加表面积的微纳结构；所述具有可动结构的传感器或执行器与所述第一保护层之间具有第一偶联剂层；所述第一保护层与所述第二保护层之间具有第二偶联剂层。
本申请的一些具体实施例中，所述纳米级涂层和所述微米级涂层各自独立的包括多个子层，且多个所述子层满足以下条件的至少一种：多个所述子层的材料不完全相同；多个所述子层的形成方法不完全相同。
本申请的一些实施例中，所述纳米级涂层的材料包括氧化物、氮化物、氟化物、金属、碳化物、硫化物和聚合物中的一种或多种。
本申请的一些实施例中，所述微米级涂层的材料包括聚合物、氧化物、硫化物、氮化物、碳化物和陶瓷中的一种或多种。
本申请的一些实施例中，所述纳米级涂层的厚度为0.1～900纳米。
本申请的一些实施例中，所述微米级涂层的厚度为0.1～3000微米。
本申请的一些实施例中，所述具有可动结构的传感器或执行器包括传感器和执行器中的至少一种。
本申请的具有可动结构的传感器或执行器组件能够经受住长时间的防止气体或液体影响、防灰尘等的考验，从而满足在恶劣环境中长期工作的稳定性和可靠性要求，具有涂层尺寸超薄、防护性能好、对具有可动结构的传感器或执行器本体的灵敏度等性能参数影响小等优点。还能弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
附图说明
以下将参照附图对根据本申请实施例的具有可动结构的传感器或执行器的表面防护方法的优选实施方式进行描述。图中：
图1为本申请的一种具有可动结构的传感器或执行器的表面防护方法的一个实施方式的流程示意图；
图2为本申请的一种示例性具有可动结构的传感器或执行器的剖视示意图；
图3为图2的具有可动结构的传感器或执行器在形成第一保护层后的剖视示意图；
图4为图3中A区域的局部放大示意图；
图5为图3的具有可动结构的传感器或执行器在形成第二保护层后的剖视示意图；
图6为图5中B区域的局部放大示意图。
附图标记：10-具有可动结构的传感器或执行器，20-第一保护层，30-第二保护层。
具体实施方式
本申请认为，相关技术的涂层法之所以不能在长时间内保持器具有可动结构的传感器或执行器的防止外界影响的效果的有效性，主要原因在于：目前的涂层法主要是采用单一的涂层作为具有可动结构的传感器或执行器的防护层，而单一的涂层由于其自身材料性能等限制，防护气体或液体影响的效果有限。如单一的聚对二甲苯等微米级聚合物涂层对气体或液体中的大分子的防护较好，但对气体或液体中的小分子的防护较差；单一的纳米级氧化物等涂层虽然结构致密可以较好地防护气体或液体中的小分子，但对气体或液体中大分子的防护较差，并且由于其杨氏模量和硬度较高，对具有可动结构的传感器或执行器的敏感或运动部分的性能会有较大的影响。另外，可动部件在工作时会受到循环载荷的作用而反复变形，进而带动防护涂层材料一起反复变形，从而使得防护涂层材料容易产生分层、疲劳失效等问题。
然而，自然界的水往往并不是以单一水分子的形式存在的，而是若干水分子会通过氢键作用而聚合在一起形成水分子簇，即以俗称的“水分子团”的形式存在，通常，由10个以上水分子组成的水分子团称为大分子团，其尺寸较大，活性也较差，通常无法突破上述涂 层的保护，这种大分子团在自然界中大量存在，占自然界的水的绝大多数；而由10个以下水分子组成的水分子团称为小分子团，其体积小，活性大，尽管在自然界中仅少量存在，但由于这些小分子团能够通过涂层的多孔结构，经过长年累月地积累，会慢慢渗透到涂层的内部，当渗入的小分子团达到一定的量时，就会对具有可动结构的传感器或执行器造成损坏，并由此宣告涂层的防护功能失效。其他腐蚀性气体或液体的分子或离子缓慢侵入涂层内部的原理也是大致如此。
此外，相关技术的提高精度的方法都从具有可动结构的传感器或执行器的材料、原理、结构和制作工艺等内部物理结构等方面考虑，然而，这面临着工艺复杂、制作周期长、研发成本高等问题。
特别地，由于具有可动结构，表面涂层过厚会影响传感器或执行器动作的精确度和灵敏度，从而对其正常工作产生不利影响，因此，增加涂层厚度的方式并不适用。
因此，针对相关技术中对具有可动结构的传感器或执行器的防止气体或液体影响的处理方面的不足，本申请提出了一种能够适用于多种类型的具有可动结构的传感器或执行器的表面防护方法，处理后的具有可动结构的传感器或执行器能够明显提高防止气体或液体影响的能力，并且该方法可以取代相关技术中所采用的封装法、涂层法等处理方法。此外，还可弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
如图1-6所示，本申请的一种具有可动结构的传感器或执行器的表面防护方法，其主要包括步骤：
S2、在所述具有可动结构的传感器或执行器10(示例性地示于图2中)的外表面(本文中，外围和外表面可以互换使用)形成第一保护层20(如图3-4所示)，其中，所述第一保护层20可以为致密的纳米级涂层。
S3、在所述第一保护层20的外表面形成第二保护层30(如图5-6所示)，其中，所述第二保护层30可以为微米级涂层。
其中，所述致密的纳米级涂层用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述微米级涂层用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
通过本申请的表面防护方法处理后，相应的具有可动结构的传感器或执行器的外表面将形成有层叠设置的第一保护层和第二保护层，一些具体实施例中，第一保护层是致密的纳米级涂层，第二保护层是微米级涂层。其中，致密的纳米级涂层为厚度在纳米级的致密防止气体或液体影响的涂层，其能够阻挡小分子团的渗透；微米级涂层为厚度在微米级的防止气体或液体影响的涂层，其致密度低于致密的纳米级涂层，微米级涂层虽然不能长时间阻挡小分子团的渗透，但能够长久有效地阻挡大分子团的渗透。因此，在具有可动结构的传感器或执行器的长期工作过程中，纵使有少量小分子团渗透到作为第一道防线的微米 级涂层的内部，但由于作为第二道防线的致密的纳米级涂层的存在，这些小分子团将难以继续突破到具有可动结构的传感器或执行器的表面。在第一保护层和第二保护层的协同保护下，具有可动结构的传感器或执行器可以在各种恶劣环境中长时间地保持防止气体或液体影响的能力。
因此，采用本申请提出的表面防护方法进行处理后，具有可动结构的传感器或执行器能够经受住长时间的防止气体或液体影响的考验，从而满足长期工作的稳定性和可靠性要求。同时，由于灰尘等异物的尺寸普遍大于前述小分子团的尺寸，因而处理后的该具有可动结构的传感器或执行器还能有效防止灰尘等的侵入，具有尺寸超薄、防护性能好、对具有可动结构的传感器或执行器本体的灵敏度等性能参数影响小等优点。此外，还可弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
另一方面，由于本申请提出的表面防护方法仅在具有可动结构的传感器或执行器的表面上设置分别为微米级和纳米级的两层超薄、防止气体或液体影响的涂层，其与采用封装法处理相比，具有可动结构的传感器或执行器的尺寸将明显减小，由此带来空间占用小的优点；而与采用相关技术的涂层法处理相比，在防止气体或液体影响的能力大大提升的同时，涂层厚度却明显减小。
特别地，对于具有可动结构传感器或执行器而言，其灵敏度取决于其可动结构动作时的灵敏程度，显然，可动结构外部的封装或涂层不应阻碍可动结构自身的运动。本申请的表面防护方法中，致密的纳米级涂层和微米级涂层可以直接涂覆在相应的可动结构的表面，由于这两个防止气体或液体影响的涂层的厚度很薄，其对可动结构的动作的阻碍很小，因而只会对相应的具有可动结构的传感器或执行器的灵敏度产生很小的影响。且由于具有可动结构的传感器或执行器中的可动部件在工作时会受到循环载荷的作用而反复变形，进而带动防护涂层材料一起反复变形，从而使得防护涂层材料容易产生分层、疲劳失效等问题。因此，对涂层的附着力要求也较高，在具有可动结构的传感器或执行器动作过程中涂层不能分层、开裂和脱落等，而本申请的表面防护方法中，致密的纳米级涂层和微米级涂层可以牢固的附着在可动结构的传感器或执行器的表面，不会在可动结构的传感器或执行器动作过程中产生分层、开裂和脱落、破损等不良。其中，执行器也称为驱动器或致动器，例如微泵、微阀、微马达、微开关等，其工作时是将控制信号和能量转换为可动结构的可控运动和功率输出，从而使执行器在控制信号的作用下对外做功。
另外，由于本申请的表面防护方法仅在具有可动结构的传感器或执行器的表面上设置两层超薄防止气体或液体影响的涂层，无论具有可动结构的传感器或执行器自身的结构复杂与否，均可直接对具有可动结构的传感器或执行器的表面进行处理，不受具有可动结构的传感器或执行器自身结构的限制，处理工艺简单。
另一些具体实施例中，第一保护层20可以为微米级涂层，而第二保护层30可以为致密的纳米级涂层。也即，步骤S2中，先在具有可动结构的传感器或执行器的表面上形成 微米级涂层，步骤S3中，再在微米级涂层的表面上形成致密的纳米级涂层。
这样，可以利用致密的纳米级涂层在外围充当第一道防线，以同时阻挡小分子团和大分子团的渗透，利用微米级涂层在内部充当第二道防线，以便在第一道防线局部失效的情况下阻挡大分子团的渗透，同样能够使具有可动结构的传感器或执行器经受住长时间的防止气体或液体影响、防灰尘等考验，从而满足长期工作的稳定性和可靠性要求。
特别需要说明的是，当第一保护层20为微米级涂层，而第二保护层30为致密的纳米级涂层时，致密的纳米级涂层能够渗透到微米级涂层的微孔中，从而形成一种立体的第二保护层，此时，即使作为第一道防线的致密的纳米级涂层表面上在局部发生失效，但小分子团实际上仍难以渗透到微米级涂层的内部，具有可动结构的传感器或执行器的长期工作稳定性和可靠性能够得到保证。
而微米级涂层和致密的纳米级涂层的设置位置改变后，在涂层的空间占用方面、对具有可动结构的传感器或执行器的灵敏度影响方面、以及处理工艺简单性等方面的优势也丝毫不受影响。
作为该表面防护方法的一种具体实施方式，如图1所示，在步骤S2之前还可以包括步骤：
S1、表面清洗，也即对具有可动结构的传感器或执行器10进行清洗，以便于在具有可动结构的传感器或执行器10的表面上形成所述第一保护层20。例如，可以先将具有可动结构的传感器或执行器10浸入丙酮溶液中超声清洗数分钟至数十分钟(如20分钟)，之后再将具有可动结构的传感器或执行器10浸入异丙醇溶液中超声清洗数分钟至数十分钟(如20分钟)；或者也可以直接用等离子清洗等方式进行清洗。
一些具体实施例中，在形成致密的纳米级涂层的步骤(可以为步骤S2或步骤S3)中，可以采用原子层沉积技术形成所述致密的纳米级涂层(具体可以为第一保护层20或第二保护层30)，但不局限于采用原子层沉积技术。也即，本申请中，致密的纳米级涂层可以为原子层沉积层，但不限于原子层沉积层。
原子层沉积技术是一种可以将物质以单原子膜形式一层一层地沉积在基底表面的方法。在原子层沉积过程中，新一层原子膜的化学反应是直接与之前一层相关联的，这种方式使每次反应只沉积一层原子。通过精确控制沉积涂层的厚度，便可以得到防止气体或液体影响的性能符合要求的保护涂层。原子层沉积层的致密度能够很好地保证其对小分子团的阻挡效果。
一些具体实施例中，当采用原子层沉积技术形成所述致密的纳米级涂层，且致密的纳米级涂层为第一保护层20时，步骤S2的操作过程可以包括：将所述具有可动结构的传感器或执行器10置于原子层沉积室内，在沉积温度-40～350℃的条件下，将沉积材料以单原子膜的形式逐层地沉积在所述具有可动结构的传感器或执行器10的外表面上，沉积层数具体可以为10～9000层。
一些具体实施例中，原子层沉积层(即致密的纳米级涂层)的厚度可以在0.1～900纳米之间，更具体可以为0.5～200纳米。
一些具体实施例中，本申请的方法中，可以采用氧化物、氮化物、氟化物、金属、碳化物、硫化物中的一种或多种形成原子层沉积层。也即，形成所述致密的纳米级涂层所用的材料可以是任何防止气体或液体影响的材料，如氧化物，氮化物，氟化物，金属，碳化物，硫化物或它们的组合等。
在一个示例性的实施例中，形成致密的纳米级涂层的具体操作过程包括：采用氧化铝作为沉积材料，将具有可动结构的传感器或执行器10(如压力传感器)放置在原子层沉积室内，将氧化铝材料以单原子膜的形式一层一层地镀在压力传感器的表面，形成第一保护层20，即致密的纳米级涂层，其中，沉积时间约10小时，沉积4000个循环，沉积厚度为400纳米。
一些具体实施例中，在形成所述纳米级涂层之前，该方法还包括：对待形成所述纳米级涂层的表面进行表面改性处理：包括等离子体表面改性处理或者偶联剂表面改性处理等，以提高涂层的粘附性。当纳米级涂层为第一保护层时，对具有可动结构的传感器或执行器的表面进行上述表面改性处理，而当纳米级涂层为第二保护层时，则对第一保护层的表面进行上述表面改性处理。具体的，以纳米级涂层为第一保护层为例进行说明：一些具体示例中，可以采用等离子体处理具有可动结构的传感器或执行器的表面，一方面可以在具有可动结构的传感器或执行器的表面形成可以增加表面积的微纳结构，另一方面可以对具有可动结构的传感器或执行器的表面起到活化作用，以使得形成的纳米级涂层可以与具有可动结构的传感器或执行器的表面之间形成氢键、化学键等键合作用，以提高纳米级涂层与具有可动结构的传感器或执行器之间的附着力。其中，等离子体表面改性处理可以为上述等离子体清洗步骤，也可以单独进行等离子体处理步骤。另一些具体示例中，可以通过沉积、喷涂、涂覆等方法在具有可动结构的传感器或执行器的表面形成偶联剂(具体如硅烷偶联剂)层，以提高纳米级涂层与具有可动结构的传感器或执行器之间的附着力。
一些具体实施例中，在形成所述微米级涂层的步骤(例如为步骤S3、或者步骤S2)中，可以采用化学气相沉积技术、或蒸镀技术、或溅射技术、或喷涂技术形成所述微米级涂层(对应地为第二保护层30、或者第一保护层20)，但不局限于采用前述技术。也即，本申请中，在第一保护层20外表面或者直接在具有可动结构的传感器或执行器10外表面形成的所述微米级涂层可以为化学气相沉积层，或蒸镀沉积层，或溅射沉积层，或喷涂沉积层，但不限于所列举的这几种沉积层。采用前述技术形成的微米级涂层能够很好地阻挡大分子团的侵蚀，同时防止灰尘等其他异物接触第一保护层20或具有可动结构的传感器或执行器10的表面，从而为第一保护层20或具有可动结构的传感器或执行器10提供微米级安全屏障。
一些具体实施例中，本申请的方法中，可以采用聚合物、氧化物、硫化物、氮化物、碳化物、陶瓷中的一种或多种形成所述微米级涂层。也即，形成所述微米级涂层所用的材料可以是任何防止气体或液体影响的材料，如聚合物，氧化物、硫化物、氮化物、碳化物、陶瓷或它们的组合等。
本申请的一些具体实施例中，所述微米级涂层包括多个子层，且多个所述子层满足以 下条件的至少一种：多个所述子层的材料不完全相同；多个所述子层的形成方法不完全相同。具体的，可采用不同的材料和/或不同的工艺形成所述微米级涂层，也即，微米级防止气体或液体影响的包覆层自身在厚度方向上可以具有不同的材料和/或性能。例如，可以采用同一种材料、不同的工艺来形成该微米级涂层，还可以采用不同材料、分别用不同的工艺来形成该微米级涂层，或者还可以用不同的材料、同一种工艺来形成该微米级涂层，从而充分利用不同材料和/或不同工艺方法的优势。而纳米级涂层具有多个子层时与微米级涂层类似，在此不再一一赘述。
例如，在一个具体实施例中，可以先采用碳化硅沉积一层例如厚度为2微米的防止气体或液体影响的涂层，再采用聚对二甲苯沉积一层例如厚度为2微米的防止气体或液体影响的涂层，这两个防止气体或液体影响的涂层共同构成本申请中所述的微米级涂层。如此一来，该实施例能提高防止气体或液体影响的涂层的致密性和稳定性，又能利用聚对二甲苯的疏水性进一步提高涂层的防止气体或液体影响的能力。此外，还可弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
一些具体实施例中，所述微米级涂层(例如，步骤S3中形成的所述第二保护层40，或者在步骤S2中形成的所述第一保护层20)的厚度可以在0.1～200微米之间。
以下以第二保护层30为微米级涂层为例，说明该第二保护层30的形成过程的具体实施例。
具体的，当采用化学气相沉积技术形成第二保护层30时，步骤S3的操作过程包括：将形成有第一保护层20的具有可动结构的传感器或执行器10置于化学气相沉积室内，在沉积温度-10～400℃的条件下，将沉积材料均匀地沉积在第一保护层20的外表面上。
在一个示例性的实施例中，步骤S3中采用化学气相沉积技术形成第二保护层30的具体操作过程包括：采用碳化硅作为沉积材料，将形成有第一保护层20的具有可动结构的传感器或执行器10(如压力传感器)放置在沉积室内，在室温下将碳化硅材料均匀地镀在第一保护层20表面，沉积时间约4小时，沉积厚度为4微米。
一些具体实施例中，当采用蒸镀技术形成第二保护层30时，步骤S3的操作过程包括：将形成有第一保护层20的具有可动结构的传感器或执行器10置于真空的蒸镀沉积室内，将沉积材料加热至汽化升华，并使沉积材料的气体附着于所述第一保护层20的表面上，形成一层薄膜，即所述微米级涂层。
一些具体实施例中，当采用溅射技术形成第二保护层30时，步骤S3的操作过程包括：将形成有第一保护层20的具有可动结构的传感器或执行器10置于充有惰性气体(如氩气)的真空溅射系统中，通过高压电场的作用，使得氩气电离，产生氩离子流，所述氩离子流轰击靶阴极使靶材料溅出，被溅出的靶材料原子或分子沉淀积累在第一保护层20表面上而形成一层薄膜，即所述微米级涂层。
一些具体实施例中，当采用喷涂技术形成第二保护层30时，步骤S3的操作过程包括：将形成有第一保护层20的具有可动结构的传感器或执行器10，通过喷枪或雾化器，借助 于压力或离心力，将微米级涂层材料分散成均匀而微细的雾滴，施涂于形成有第一保护层20的表面，形成所述微米级涂层。
而第一保护层20为微米级涂层的情况与此类似，不再赘述。
一些具体实施例中，在形成所述微米级涂层之前，该方法还包括：对待形成所述微米级涂层的表面进行等离子体表面改性处理或者偶联剂表面改性处理。当微米级涂层为第一保护层时，对具有可动结构的传感器或执行器的表面进行上述表面处理，而当微米级涂层为第二保护层时，则对第一保护层的表面进行上述表面处理。具体的，以微米级涂层为第二保护层为例进行说明：一些具体示例中，可以采用等离子体处理第一保护层的表面，一方面可以在第一保护层的表面形成可以增加表面积的微纳结构，另一方面可以对第一保护层的表面起到活化作用，以使得形成的微米级涂层可以与第一保护层的表面之间形成氢键、化学键等键合作用，以提高微米级涂层与第一保护层之间的附着力。其中，等离子体表面改性处理可以为上述等离子体清洗步骤，也可以单独进行等离子体处理步骤。另一些具体示例中，可以通过沉积、喷涂、涂覆等方法在第一保护层的表面形成偶联剂(具体如硅烷偶联剂)层，以提高微米级涂层与第一保护层之间的附着力。
本申请的一些实施例中，该方法还包括：在所述第二保护层的外表面上形成至少一个第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。具体来说，具有可动结构的传感器或执行器的表面上可以形成多层纳米级涂层和微米级涂层，且具体的层叠顺序没有特别限制，可以自由叠加组合，具体如，纳米级涂层为A层，微米级涂层为B层，则可以在具有可动结构的传感器或执行器的表面上设置ABA、ABB、BAB、BAA、ABAA、ABAB、BAAA、BABA等等层叠顺序的保护层，在此不再一一详述。
需要说明的是，本申请的表面防护方法可以适用于各种具有可动结构的传感器或执行器，尤其是化工设备零部件、医疗设备零部件或船舶设备零部件，等等，使得这些可动结构的传感器或执行器能够应对各种腐蚀性环境的工作考验。
例如，采用本申请的表面防护方法对具有可动结构的传感器、执行器进行表面防护处理，可以免除传统的封装结构，在减小体积、减小成本的同时，却能使这些具有可动结构的传感器或执行器具有更高级别的防止气体或液体影响、防灰尘入侵的能力。
又例如，采用本申请的表面防护方法对化工设备中的具有可动结构的零部件、医疗设备零部件或船舶设备中的具有可动结构的零部件进行表面防护处理，可以在不增加涂层厚度的前提下，提高相应的零部件的防腐蚀能力。
综上，本申请的表面防护方法用超薄、涂层附着力强的涂层直接包覆具有可动结构的传感器或执行器的表面，处理后即可具备长期稳定的防止气体或液体影响、防灰尘侵入的能力，大大增强具有可动结构的传感器或执行器在水中、潮湿环境或其他影响具有可动结构的传感器或执行器的环境中的耐用性和使用寿命，还具有尺寸超薄、防护性能好、对具有可动结构的传感器或执行器本体的灵敏度等性能参数影响小等优点。此外，还可弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的 精度。
在本申请的另一方面，本申请提供了一种具有可动结构的传感器或执行器组件。根据本申请的实施例，该具有可动结构的传感器或执行器组件包括：具有可动结构的传感器或执行器；第一保护层，所述第一保护层设置在所述具有可动结构的传感器或执行器的外表面上；第二保护层，所述第二保护层设置在所述第一保护层的外表面上；其中，所述第一保护层和所述第二保护层中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述第一保护层和所述第二保护层中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
本申请的一些实施例中，所述第一保护层为所述纳米级涂层，所述第二保护层为所述微米级涂层。
本申请的一些实施例中，所述第一保护层为所述微米级涂层，所述第二保护层为所述纳米级涂层，且所述第二保护层的至少一部分填充在所述第一保护层的多孔结构中。
本申请的一些实施例中，所述第二保护层的外表面上还设置有至少一个第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。具体来说，具有可动结构的传感器或执行器的表面上可以形成多层纳米级涂层和微米级涂层，且具体的层叠顺序没有特别限制，可以自由叠加组合，具体如，纳米级涂层为A层，微米级涂层为B层，则可以在具有可动结构的传感器或执行器的表面上设置ABA、ABB、BAB、BAA、ABAA、ABAB、BAAA、BABA等等层叠顺序的保护层，在此不再一一详述。
本申请的一些具体实施例中，所述微米级涂层包括多个子层，且多个所述子层满足以下条件的至少一种：多个所述子层的材料不完全相同；多个所述子层的形成方法不完全相同。
本申请的一些实施例中，具有可动结构的传感器或执行器组件可以满足以下条件的至少之一：所述具有可动结构的传感器或执行器的外表面和所述第一保护层的外表面中的至少之一上具有可以增加表面积的微纳结构；所述具有可动结构的传感器或执行器与所述第一保护层之间具有第一偶联剂层；所述第一保护层与所述第二保护层之间具有第二偶联剂层。具体的，上述可以增加表面积的微纳结构，可以形成多个锚点，以使得涂层更好的附着，提高涂层的附着力，而偶联剂层(包括第一偶联剂层和第二偶联剂层)可以通过分子间作用力、氢键、化学键等作用增强涂层的附着力，满足可动部件对于涂层变形、疲劳等各方面的使用要求。
本申请的一些实施例中，所述纳米级涂层的材料包括氧化物、氮化物、氟化物、金属、碳化物、硫化物和聚合物中的一种或多种。
本申请的一些实施例中，所述微米级涂层的材料包括聚合物、氧化物、硫化物、氮化物、碳化物和陶瓷中的一种或多种。
本申请的一些实施例中，所述纳米级涂层的厚度为0.1～900纳米。
本申请的一些实施例中，所述微米级涂层的厚度为0.1～3000微米。
本申请的一些实施例中，所述具有可动结构的传感器或执行器为化工设备零部件、医疗设备零部件或船舶设备零部件。
本申请的具有可动结构的传感器或执行器组件能够经受住长时间的防止气体或液体影响、防灰尘等的考验，从而满足在恶劣环境中长期工作的稳定性和可靠性要求，具有尺寸超薄、防护性能好、对具有可动结构的传感器或执行器本体的灵敏度等性能参数影响小等优点。还能弥补具有可动结构的传感器或执行器中间隙、迟滞等缺陷，还能隔绝外界环境中对具有可动结构的传感器或执行器精度有影响的有害介质，从而提高了具有可动结构的传感器或执行器的精度。
可以理解的是，该具有可动结构的传感器或执行器组件中的具有可动结构的传感器或执行器、第一保护层和第二保护层可以与前面所述的表面防护方法中描述的具有可动结构的传感器或执行器、第一保护层和第二保护层一致，在此不再一一赘述。
本领域的技术人员容易理解的是，在不冲突的前提下，上述各具体方案可以自由地组合、叠加(比如由纳米级涂层和微米级涂层组合的两层以上的复合结构及其表面防护方法)。
应当理解，上述的实施方式仅是示例性的，而非限制性的，在不偏离本申请的基本原理的情况下，本领域的技术人员可以针对上述细节做出的各种明显的或等同的修改或替换，都将包含于本申请的权利要求范围内。

Claims (22)

  1. 一种具有可动结构的传感器或执行器的表面防护方法，其特征在于，包括步骤：
    S2、在所述具有可动结构的传感器或执行器的外表面形成第一保护层；
    S3、在所述第一保护层的外表面形成第二保护层；
    其中，所述第一保护层和所述第二保护层中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述第一保护层和所述第二保护层中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
  2. 根据权利要求1所述的表面防护方法，其特征在于，所述第一保护层为所述纳米级涂层，所述第二保护层为所述微米级涂层。
  3. 根据权利要求1或2所述的表面防护方法，其特征在于，满足以下条件的至少一种：
    采用原子层沉积技术形成所述纳米级涂层；
    采用化学气相沉积技术、蒸镀技术、溅射技术或喷涂技术形成所述微米级涂层。
  4. 根据权利要求1-3中任一项所述的表面防护方法，其特征在于，满足以下条件的至少一种：
    采用氧化物、氮化物、氟化物、金属、碳化物、硫化物和聚合物中的一种或多种形成所述纳米级涂层；
    采用聚合物、氧化物、硫化物、氮化物、碳化物和陶瓷中的一种或多种形成所述微米级涂层。
  5. 根据权利要求2-4中任一项所述的表面防护方法，其特征在于，形成所述纳米级涂层的操作过程包括：
    将所述具有可动结构的传感器或执行器置于原子层沉积室内，在沉积温度-40～350℃的条件下，将沉积材料以单原子膜的形式逐层地沉积在所述具有可动结构的传感器或执行器的外表面上。
  6. 根据权利要求2-5中任一项所述的表面防护方法，其特征在于，还包括：在形成所述纳米级涂层之前对待形成所述纳米级涂层的表面进行表面改性处理。
  7. 根据权利要求6所述的表面防护方法，其特征在于，所述表面改性处理包括等离子体表面改性处理或者偶联剂表面改性处理。
  8. 根据权利要求5所述的表面防护方法，其特征在于，所述单原子膜的沉积层数为1～9000层。
  9. 根据权利要求1、3-8中任一项所述的表面防护方法，其特征在于，形成所述微米级涂层的操作过程包括：
    将所述具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于化学气相沉积室内，在沉积温度-20～400℃的条件下，将沉积材料均匀地沉积在所述具有可动结构的传感器或执行器或者所述第一保护层的外表面上，形成所 述微米级涂层；
    或者，将所述具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于真空的蒸镀沉积室内，将所述沉积材料加热至汽化升华，并使所述沉积材料的气体附着于所述具有可动结构的传感器或执行器或者所述第一保护层的表面上，形成所述微米级涂层；
    或者，将所述具有可动结构的传感器或执行器或者形成有所述第一保护层的具有可动结构的传感器或执行器置于充有惰性气体的真空溅射系统中，通过高压电场的作用，使得所述惰性气体电离，产生离子流，所述离子流轰击靶阴极使靶材料溅出，被溅出的靶材料原子或分子沉淀积累在所述具有可动结构的传感器或执行器或者所述第一保护层的表面上，形成所述微米级涂层；
    或者，通过喷枪或雾化器，借助于压力或离心力，将微米级涂层材料分散成均匀而微细的雾滴，施涂于所述具有可动结构的传感器或执行器或者所述第一保护层的表面，形成所述微米级涂层。
  10. 根据权利要求1-9中任一项所述的表面防护方法，其特征在于，在形成所述微米级涂层之前，还包括：对待形成所述微米级涂层的表面进行等离子体表面改性处理或者偶联剂表面改性处理。
  11. 根据权利要求1-10中任一项所述的表面防护方法，其特征在于，满足以下条件的至少一种：
    所述纳米级涂层的厚度为0.1～900纳米；
    所述微米级涂层的厚度为0.1～3000微米。
  12. 根据权利要求1-11中任一项所述的表面防护方法，其特征在于，所述具有可动结构的传感器或执行器为医疗设备零部件、化工设备零部件或船舶设备零部件。
  13. 根据权利要求1-12中任一项所述的表面防护方法，其特征在于，还包括：
    在所述第二保护层的外表面上形成至少一个第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。
  14. 一种具有可动结构的传感器或执行器组件，其特征在于，包括：
    具有可动结构的传感器或执行器；
    第一保护层，所述第一保护层设置在所述具有可动结构的传感器或执行器的外表面上；
    第二保护层，所述第二保护层设置在所述第一保护层的外表面上；
    其中，所述第一保护层和所述第二保护层中的一者为纳米级涂层，用于防护10个以下的水或其它气体或液体分子组成的小分子团的侵蚀、或者尺寸小于等于所述小分子团的离子或分子的侵蚀；所述第一保护层和所述第二保护层中的另一者为微米级涂层，用于防护10个以上的水或其它气体或液体分子组成的大分子团的侵蚀、或者尺寸大于等于所述大分子团的离子或分子的侵蚀。
  15. 根据权利要求14所述的可动结构的传感器或执行器组件，其特征在于，所述第一保护层为所述纳米级涂层，所述第二保护层为所述微米级涂层。
  16. 根据权利要求15所述的可动结构的传感器或执行器组件，其特征在于，所述第二保护层的在表面上还设置有至少一个第三保护层，所述第三保护层为所述纳米级涂层或所述微米级涂层。
  17. 根据权利要求14-16中任一项所述的可动结构的传感器或执行器组件，其特征在于，所述第一保护层为所述微米级涂层，所述第二保护层为所述纳米级涂层，且所述第二保护层的至少一部分填充在所述第一保护层的多孔结构中。
  18. 根据权利要求14-17中任一项所述的具有可动结构的传感器或执行器组件，其特征在于，满足以下条件的至少之一：
    所述具有可动结构的传感器或执行器的外表面和所述第一保护层的外表面中的至少之一上具有可以增加表面积的微纳结构；
    所述具有可动结构的传感器或执行器与所述第一保护层之间具有第一偶联剂层；
    所述第一保护层与所述第二保护层之间具有第二偶联剂层。
  19. 根据权利要求14-18中任一项所述的可动结构的传感器或执行器组件，其特征在于，所述纳米级涂层和所述微米级涂层各自独立的包括多个子层，且多个所述子层满足以下条件的至少一种：
    多个所述子层的材料不完全相同；
    多个所述子层的形成方法不完全相同。
  20. 根据权利要求14-18中任一项所述的可动结构的传感器或执行器组件，其特征在于，满足以下条件的至少一种：
    所述纳米级涂层的材料包括氧化物、氮化物、氟化物、金属、碳化物、硫化物和聚合物中的一种或多种；
    所述微米级涂层的材料包括聚合物、氧化物、硫化物、氮化物、碳化物和陶瓷中的一种或多种。
  21. 根据权利要求14-20中任一项所述的可动结构的传感器或执行器组件，其特征在于，满足以下条件的至少一种：
    所述纳米级涂层的厚度为0.1～900纳米；
    所述微米级涂层的厚度为0.1～3000微米。
  22. 根据权利要求14-21中任一项所述的可动结构的传感器或执行器组件，其特征在于，所述具有可动结构的传感器或执行器为化工设备零部件、医疗设备零部件或船舶设备零部件。
PCT/CN2019/122089 2019-01-11 2019-11-29 一种用于带有可动结构的传感器/执行器的表面防护方法及具有可动结构的传感器/执行器组件 Ceased WO2020143356A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910025845.9 2019-01-11
CN201910025845.9A CN109518185B (zh) 2019-01-11 2019-01-11 一种具有可动结构的器件的表面防护方法

Publications (1)

Publication Number Publication Date
WO2020143356A1 true WO2020143356A1 (zh) 2020-07-16

Family

ID=65798720

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/122089 Ceased WO2020143356A1 (zh) 2019-01-11 2019-11-29 一种用于带有可动结构的传感器/执行器的表面防护方法及具有可动结构的传感器/执行器组件

Country Status (2)

Country Link
CN (1) CN109518185B (zh)
WO (1) WO2020143356A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109518185B (zh) * 2019-01-11 2020-10-20 清华大学 一种具有可动结构的器件的表面防护方法
CN112752474B (zh) * 2020-10-30 2022-05-10 天津七所精密机电技术有限公司 机箱箱体的润湿改性加工方法及高防护性加固电子设备
CN116698265A (zh) * 2022-02-25 2023-09-05 北京理工大学 一体化气压传感器结构及其制备方法
CN115350886B (zh) * 2022-09-15 2024-04-19 上海派拉纶生物技术股份有限公司 复合防护涂层及其制备方法以及电子器件

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101933174A (zh) * 2008-01-30 2010-12-29 奥斯兰姆奥普托半导体有限责任公司 用于制造电子器件的方法和电子器件
KR101486217B1 (ko) * 2013-12-10 2015-02-06 한국기계연구원 커브 형 전도성 나노 또는 마이크로 필러를 이용한 촉각 센서
CN108411279A (zh) * 2018-03-30 2018-08-17 华中科技大学 一种高速钢刀具保护涂层的制备方法
CN109518185A (zh) * 2019-01-11 2019-03-26 清华大学 一种器件的表面防护方法
CN109626319A (zh) * 2019-01-11 2019-04-16 清华大学 一种植入式器件及其封装方法
CN209411765U (zh) * 2019-01-11 2019-09-20 清华大学 一种植入式器件

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5221150B2 (ja) * 2005-02-01 2013-06-26 セカンド サイト メディカル プロダクツ インコーポレイテッド 超小型埋め込み型の被覆された装置
CN107652858A (zh) * 2017-09-11 2018-02-02 清华大学 一种器件的后处理方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101933174A (zh) * 2008-01-30 2010-12-29 奥斯兰姆奥普托半导体有限责任公司 用于制造电子器件的方法和电子器件
KR101486217B1 (ko) * 2013-12-10 2015-02-06 한국기계연구원 커브 형 전도성 나노 또는 마이크로 필러를 이용한 촉각 센서
CN108411279A (zh) * 2018-03-30 2018-08-17 华中科技大学 一种高速钢刀具保护涂层的制备方法
CN109518185A (zh) * 2019-01-11 2019-03-26 清华大学 一种器件的表面防护方法
CN109626319A (zh) * 2019-01-11 2019-04-16 清华大学 一种植入式器件及其封装方法
CN209411765U (zh) * 2019-01-11 2019-09-20 清华大学 一种植入式器件

Also Published As

Publication number Publication date
CN109518185B (zh) 2020-10-20
CN109518185A (zh) 2019-03-26

Similar Documents

Publication Publication Date Title
CN109518185B (zh) 一种具有可动结构的器件的表面防护方法
EP2733231B1 (en) Thermal spray coated reinforced polymer composites
KR100772740B1 (ko) 플라즈마 처리 용기 내부재
EP3168323B1 (en) Power plant component
US20060257663A1 (en) Wear resistant coatings to reduce ice adhesion on air foils
KR970013180A (ko) 정전 척부재 및 그 제조방법
CN105143498A (zh) 铬基的氧化保护层
US20160109306A1 (en) Piezoelectric force measuring device having integrated wear-protection and anti-frictional properties
EP2462254A1 (en) Tribology combined with corrosion resistance: a new family of pvd- and pacvd coatings
JP2016519613A (ja) 異なるタイプの耐湿性材料の組み合わせ
WO2020143355A1 (zh) 一种具有可动结构的植入式传感器/执行器及其封装方法
US10471445B2 (en) Coating machine component including a functional element that is a coating
US20100239429A1 (en) Wear protection coating
JP4728306B2 (ja) 静電チャック部材およびその製造方法
KR20090004491A (ko) 복합필름 및 이의 제조방법
CN207331066U (zh) 一种海洋气氛下的折叠装置
JP6961469B2 (ja) 電極構造体、当該電極構造体を備えるセンサー、及び当該電極構造体を備える分析装置
CN107652858A (zh) 一种器件的后处理方法
KR20200103019A (ko) 가스 터빈의 터빈 블레이드용 내부식 및 내침식 코팅
CN1962926A (zh) 一种金属材料防护方法之二
KR101366027B1 (ko) 수분 발생용 반응로
KR20240107118A (ko) 롤러 표면 하드닝
JP2013103487A (ja) 耐食性を有する積層体
CN105369199A (zh) 一种耐摩擦磨损抗腐蚀碳基薄膜的制备方法
CN109503879A (zh) 一种橡胶基复合材料及其制备方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19908178

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19908178

Country of ref document: EP

Kind code of ref document: A1