WO2020103208A1 - 一种面板检测方法 - Google Patents

一种面板检测方法

Info

Publication number
WO2020103208A1
WO2020103208A1 PCT/CN2018/119840 CN2018119840W WO2020103208A1 WO 2020103208 A1 WO2020103208 A1 WO 2020103208A1 CN 2018119840 W CN2018119840 W CN 2018119840W WO 2020103208 A1 WO2020103208 A1 WO 2020103208A1
Authority
WO
WIPO (PCT)
Prior art keywords
panel
station
tested
carrier
inspection
Prior art date
Application number
PCT/CN2018/119840
Other languages
English (en)
French (fr)
Inventor
王永乾
Original Assignee
苏州精濑光电有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 苏州精濑光电有限公司 filed Critical 苏州精濑光电有限公司
Publication of WO2020103208A1 publication Critical patent/WO2020103208A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0258—Trays, totes or bins

Definitions

  • the present application belongs to the technical field of display panels, and for example, relates to a detection method of a display panel.
  • Manual visual inspection is a means of display panel inspection.
  • the related MVI inspection platform usually obtains the inspection angle by flipping the horizontal inspection platform, or the inspection platform is set with a fixed tilt angle for inspection. But for the first method, the detection platform is overturned to overcome the weight of the platform, and a motor is needed. For some small and medium-sized panels, the cost is higher.
  • the detection platform has a fixed tilt angle, which makes the detection platform pick up Difficulties, high requirements for the transplanting mechanism for transplanting the panel on the detection platform, which is not conducive to the automation of the production line.
  • the present application provides a panel detection method, which can conveniently and quickly detect the panel.
  • a panel detection method including:
  • a panel testing device includes a testing station.
  • the testing station includes a driving base, a rotating table and a carrier.
  • the rotating table is disposed on the driving base and forms an angle ⁇ with the horizontal plane; Up, and at an angle ⁇ with the rotating table;
  • FIG. 1 is a schematic diagram of a testing station according to an embodiment of the application
  • FIG. 2 is a schematic diagram including a feeding station according to an embodiment of the application.
  • FIG. 3 is a schematic diagram of a station including a middle station according to an embodiment of the present application.
  • 111 splitting mechanism; 112, feeding position; 113, transmission mechanism; 12, full pallet handling mechanism; 41, transfer platform; 42, code reader; 43, alignment camera; 63, rotating table; 64, Carrier; 65, feed handling mechanism.
  • FIG. 1 is a schematic diagram of a testing station according to an embodiment of the application
  • FIG. 2 is a schematic diagram including a feeding station according to an embodiment of the application
  • An embodiment of the present application provides a panel inspection method, including steps 1 to 5.
  • a panel inspection device in step 1, includes an inspection station including a driving base, a rotating table 63 and a carrier table 64.
  • the rotating table 63 is disposed on the driving base and forms an angle with a horizontal plane ⁇ ;
  • the stage 64 is provided on the rotating table 63 and forms an angle ⁇ with the rotating table 63.
  • step 2 the rotary table 63 is driven to rotate so that the angle between the stage 64 and the horizontal plane is 0 °.
  • step 3 the panel to be tested is placed on the stage 64.
  • step 4 the rotating table 63 is driven to rotate 180 ° so that the angle between the stage 64 and the horizontal plane is 2 ⁇ ⁇ .
  • step 5 the panel to be tested is tested.
  • the angle between the stage 64 on which the panel is placed on the rotating table 63 and the horizontal plane is changed to change between 0 ° and 2 ⁇ ⁇ , when the angle between the stage 64 and the horizontal plane is At 0 °, it is easy to pick and place the panel on the surface of the carrier 64.
  • the angle between the carrier 64 and the horizontal plane is 2 ⁇ ⁇ , the panel is detected. This process only involves the action of rotation, compared with the flipped in the related art. The load of the action is lower.
  • the panel inspection device further includes a feeding station, which includes a splitting mechanism 111, a feeding position 112, and a transmission mechanism 113, and step 11 is included before step 2.
  • a feeding station which includes a splitting mechanism 111, a feeding position 112, and a transmission mechanism 113, and step 11 is included before step 2.
  • step 11 the full load tray on the split mechanism 111 is split and the split single full load tray is transferred to the feeding position 112.
  • the panels are installed in pallets, and multiple pallets are stacked together to flow between different stations. Therefore, by adding a split step in the feeding station, multiple pallets are split into a single pallet , To carry the panel from a single pallet for inspection.
  • the panel inspection device further includes a transfer station and a fully loaded pallet transport mechanism 12, and step 12 is further included before step 2.
  • step 12 the panel to be tested on the feeding station is transferred to the transfer station.
  • step 121 the panel to be tested is transferred to the transfer platform 41.
  • step 122 pre-align the panel to be tested on the relay platform 41.
  • step 123 the code of the panel to be tested on the transfer platform 41 is identified.
  • the inspection station further includes a feeding and conveying mechanism 65, and after step 123, step 124 is further included.
  • step 124 the pre-aligned panel to be tested is transported to the inspection station.
  • the panel is transferred from the feeding station to the transfer platform 41 in the transfer station, the pre-positioning and code reading identification of the panel are completed on the transfer platform 41, and then the panel on the transfer platform 41 is transferred to the inspection station.
  • the pre-alignment is assisted by the alignment camera 43, which can ensure that the code reader 42 accurately reads the code, and is also convenient for the transfer mechanism that transfers the panel to be tested from the transfer platform 41 to the inspection station to accurately transport the panel to be tested, reducing the failure rate.
  • the inspection station includes a feeding station and an inspection station.
  • the opposite ends of the rotating table 63 are respectively provided with a carrier 64.
  • Step 2 includes step 21.
  • step 21 the rotary table 63 is driven to rotate, so that one of the two carriers 64 is located at the feeding and discharging station, and the angle with the horizontal plane is 0 °, and the other of the two carriers 64 is located at the inspection station And the angle with the horizontal plane is 2 ⁇ ⁇ .
  • step 3 includes step 31.
  • step 31 the panel to be tested is placed on the stage 64 of the feeding and discharging station.
  • step 4 includes step 41, in which the rotating table 63 is driven to rotate 180 °, so that the positions of the two stages 64 are interchanged.
  • step 5 includes step 51 and step 52.
  • step 51 the panel under test on the stage 64 of the inspection station is inspected.
  • step 52 the panel to be tested is placed on the stage 64 of the feeding and discharging station.
  • step 61, step 62, and step 63 are further included.
  • step 61 the rotating table 63 is driven to rotate 180 °, so that the stage 64 carrying the panel with the completed test returns to the loading and unloading station, and the stage 64 carrying the panel to be tested rotates to the inspection station.
  • step 62 the tested panels at the material entry and exit stations are unloaded from the loading platform 64.
  • step 63 the panel to be tested of the testing station is tested.
  • the opposite ends of the rotating table 63 are respectively provided with a carrier 64
  • the angle between one carrier 64 and the horizontal plane is 0 °, that is, in the feeding and discharging station
  • the angle between the other carrier 64 and the horizontal plane is 2 ⁇ ⁇ , that is in the detection station.
  • the tested panels on the feeding and discharging station are unloaded from the carrier 64, and then the panel to be tested is placed on the carrier 64.
  • the rotary table 63 is driven to rotate by 180 °, the two carrier tables 64 change positions, and the above steps can be repeated.

Abstract

一种面板检测方法，包括：提供一种面板检测装置，面板检测装置包括检测工站，检测工站包括驱动底座，旋转台（63）以及载台（64），旋转台（63）设置于驱动底座上，且与水平面呈夹角α；载台（64）设置于旋转台（63）上，且与旋转台（63）呈夹角α；驱动旋转台（63）旋转，使得载台（64）与水平面夹角为0°；放置待测面板于载台（64）上；驱动旋转台（63）旋转180°，使得载台（64）与水平面夹角为2×α；对待测面板进行检测。

Description

一种面板检测方法
本申请要求在2018年11月22日提交中国专利局、申请号为201811398538.7的中国专利申请的优先权，该申请的全部内容通过引用结合在本申请中。
技术领域
本申请属于显示面板技术领域，例如涉及一种显示面板的检测方法。
背景技术
人工目视检查(Manual Visual Inspection，MVI)是显示面板检测的一种手段，相关MVI检测台通常为通过将水平放置的检测平台翻转获得检测角度，或者检测平台本就设置固定倾斜角度以便检测。但对于第一种方式，检测平台翻转克服平台重量，需要使用电机，对于一些中小尺寸面板的检测来讲，成本较高；对于第二种方式，检测平台具有固定倾斜角度，使得检测平台接料困难，对将面板移栽于检测平台上的移栽机构要求较高，不利于产线的自动化。
发明内容
以下是对本文详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。
本申请提供一种面板检测方法，可以方便快捷地对面板进行检测。
本申请是通过以下技术方案实现的：一种面板检测方法，包括：
提供一种面板检测装置，面板检测装置包括检测工站，检测工站包括驱动底座，旋转台以及载台，旋转台设置于驱动底座上，且与水平面呈夹角α；载台设置于旋转台上，且与旋转台呈夹角α；
驱动旋转台旋转，使得载台与水平面夹角为0°；
放置待测面板于载台上；
驱动旋转台旋转180°，使得载台与水平面夹角为2×α；
对待测面板进行检测。
本申请在阅读并理解了附图和详细描述后，可以明白其他方面。
附图说明
图1为本申请一实施例的检测工站的示意图；
图2为本申请一实施例的包括入料工站的示意图；
图3为本申请一实施例的包括中站工站的示意图。
其中：111、拆分机构；112、入料位；113、传输机构；12、满载托盘搬运机构；41、中转平台；42、读码器；43、对位相机；63、旋转台；64、载台；65、入料搬运机构。
具体实施方式
下面结合附图及具体实施方式对本申请进行详细描述：
图1为本申请一实施例的检测工站的示意图；图2为本申请一实施例的包括入料工站的示意图；图3为本申请一实施例的包括中站工站的示意图。
本申请一实施例提供一种面板检测方法，包括步骤1至步骤5。
在步骤1中，提供一种面板检测装置，面板检测装置包括检测工站，检测工站包括驱动底座，旋转台63以及载台64，旋转台63设置于驱动底座上，且与水平面呈夹角α；载台64设置于旋转台63上，且与旋转台63呈夹角α。
在步骤2中，驱动旋转台63旋转，使得载台64与水平面夹角为0°。
在步骤3中，放置待测面板于载台64上。
在步骤4中，驱动旋转台63旋转180°，使得载台64与水平面夹角为2×α。
在步骤5中，对待测面板进行检测。
通过驱动旋转台63旋转，从而改变旋转台63上放置面板的载台64与水平面间的夹角，使其在0°与2×α之间变化，当载台64与水平面之间夹角为0°时便于向载台64表面取放面板，当载台64与水平面间的夹角为2×α对面板进行检测，该过程中只涉及旋转的动作，相比于相关技术中的翻转的动作的负载更低。
在一实施例中，面板检测装置还包括入料工站，入料工站包括拆分机构111、入料位112以及传输机构113，步骤2之前还包括步骤11。在步骤11中，拆分拆分机构111上的满载托盘并将拆分的单个满载托盘传输到入料位112。
实际生产中，面板是装在托盘中，多个托盘堆叠在一起后在不同工位之间流动的，因此，通过在入料工站中增加拆分步骤，将多个托盘拆分成单个托盘，以从单个托盘中搬运面板进行检测。
在一实施例中，面板检测装置还包括中转工站以及满载托盘搬运机构12，步骤2之前还包括步骤12。在步骤12中，搬运入料工站上的待测面板至中转工站。
在一实施例中，中转工站包括中转平台41、读码器42以及对位相机43，步骤12包括步骤121至步骤123。
在步骤121中，搬运待测面板至中转平台41上。
在步骤122中，对中转平台41上的待测面板预对位。
在步骤123中，对中转平台41上的待测面板读码识别。
在一实施例中，检测工站还包括入料搬运机构65，步骤123之后还包括步骤124。在步骤124中，将完成预对位的待测面板搬运至检测工站。
从入料工站中搬运面板至中转工站中的中转平台41上，在该中转平台41上完成面板的预对位和读码识别，再将中转平台41上的面板搬运至检测工站。预对位由对位相机43辅助完成，即可保证读码器42准确读码，也便于从中转平台41搬运待测面板至检测工站的搬运机构准确搬运待测面板，减小故障率。
在一实施例中，检测工站包括出入料工位和检测工位，旋转台63的相对两端分别设置有载台64，步骤2包括步骤21。
在步骤21中，驱动旋转台63旋转，使得两个载台64的其中之一位于出入料工位，且与水平面夹角为0°，并使得两个载台64的其中另一位于检测工位，且与水平面的夹角为2×α。
在一实施例中，步骤3包括步骤31。在步骤31中，放置待测面板于出入料工位的载台64上。
在一实施例中，步骤4包括步骤41，在步骤41中，驱动旋转台63旋转180°，使得两个载台64的位置互换。
在一实施例中，步骤5包括步骤51和步骤52。
在步骤51中，对位于检测工位的载台64上的待测面板进行检测。
在步骤52中，放置待测面板于出入料工位的载台64上。
在一实施例中，步骤5之后还包括步骤61，步骤62和步骤63。
在步骤61中，驱动旋转台63旋转180°，使得承载有已完成测试的面板的载台64回到出入料工位，且承载有待测面板的载台64旋转至检测工位。
在步骤62中，将出入料工位的已测面板自载台64卸载。
在步骤63中，对检测工位的待测面板进行检测。
当旋转台63的相对两端分别设置有载台64，当一个载台64与水平面夹角为0°时，即处于出入料工位时，另一载台64与水平面的夹角即为2×α，即处于检测工位。对检测工位上面板进行检测的同时，对出入料工位上的已测面板自载台64卸载，再向载台64上放置待测面板。检测工位上的面板检测完成后，驱动旋转台63旋转180°，两个载台64调换位置，重复上述步骤即可。

Claims (10)

  1. 一种面板检测方法，包括：
    提供一种面板检测装置，所述面板检测装置包括检测工站，所述检测工站包括驱动底座，旋转台(63)以及载台(64)，所述旋转台(63)设置于所述驱动底座上，且与水平面呈夹角α；所述载台(64)设置于所述旋转台(63)上，且与所述旋转台(63)呈所述夹角α；
    驱动所述旋转台(63)旋转，使得所述载台(64)与所述水平面夹角为0°；
    放置待测面板于所述载台(64)上；
    驱动所述旋转台(63)旋转180°，使得所述载台(64)与所述水平面夹角为2×α；
    对所述待测面板进行检测。
  2. 根据权利要求1所述的面板检测方法，其中，所述面板检测装置还包括入料工站，所述入料工站包括拆分机构(111)、入料位(112)以及传输机构(113)；
    所述驱动所述旋转台(63)旋转，使得所述载台(64)与所述水平面夹角为0°之前，还包括：
    拆分所述拆分机构(111)上的满载托盘并将拆分的单个所述满载托盘传输到所述入料位(112)。
  3. 根据权利要求2所述的面板检测方法，其中，所述面板检测装置还包括中转工站以及满载托盘搬运机构(12)；
    所述驱动所述旋转台(63)旋转，使得所述载台(64)与所述水平面夹角为0°之前，还包括：
    搬运所述入料工站上的所述待测面板至所述中转工站。
  4. 根据权利要求3所述的面板检测方法，其中，所述中转工站包括中转平台41、读码器42以及对位相机43；
    所述搬运所述入料工站上的所述待测面板至所述中转工站包括：
    搬运所述待测面板至所述中转平台41上；
    对所述中转平台41上的所述待测面板预对位；以及
    对所述中转平台41上的所述待测面板读码识别。
  5. 根据权利要求4所述的面板检测方法，其中，所述检测工站还包括入料搬运机构(65)；
    所述对所述中转平台41上的所述待测面板读码识别之后，还包括：
    将完成预对位的所述待测面板搬运至所述检测工站。
  6. 根据权利要求1所述的面板检测方法，其中，所述检测工站包括出入料工位和检测工位，所述旋转台(63)的相对两端分别设置有载台(64)；
    所述驱动所述旋转台(63)旋转，使得所述载台(64)与所述水平面夹角为0°包括：
    驱动所述旋转台(63)旋转，使得两个所述载台(64)的其中之一位于所述出入料工位，且与所述水平面夹角为0°，并使得两个所述载台(64)的其中另一位于所述检测工位，且与所述水平面的夹角为2×α。
  7. 根据权利要求6所述的面板检测方法，其中，所述放置待测面板于所述载台(64)上包括：
    放置所述待测面板于所述出入料工位的所述载台(64)上。
  8. 根据权利要求7所述的面板检测方法，其中，所述驱动所述旋转台(63)旋转180°，使得所述载台(64)与所述水平面夹角为2×α包括；
    驱动所述旋转台(63)旋转180°，使得两个所述载台(64)的位置互换。
  9. 根据权利要求8所述的面板检测方法，其中，所述对所述待测面板进行检测包括：
    对位于所述检测工位的所述载台(64)上的待测面板进行检测；
    放置所述待测面板于所述出入料工位的所述载台(64)上。
  10. 根据权利要求9所述的面板检测方法，所述对所述待测面板进行检测之后，还包括：
    驱动所述旋转台(63)旋转180°，使得承载有已完成测试的面板的所述载台(64)回到所述出入料工位，且承载有所述待测面板的所述载台(64)旋转至所述检测工位；
    将所述出入料工位的已完成测试的面板从所述载台(64)上卸载；
    对所述检测工位的所述待测面板进行检测。
PCT/CN2018/119840 2018-11-22 2018-12-07 一种面板检测方法 WO2020103208A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811398538.7A CN109533822B (zh) 2018-11-22 2018-11-22 一种面板检测方法
CN201811398538.7 2018-11-22

Publications (1)

Publication Number Publication Date
WO2020103208A1 true WO2020103208A1 (zh) 2020-05-28

Family

ID=65849550

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/119840 WO2020103208A1 (zh) 2018-11-22 2018-12-07 一种面板检测方法

Country Status (2)

Country Link
CN (1) CN109533822B (zh)
WO (1) WO2020103208A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109443700B (zh) * 2018-11-22 2024-03-26 苏州精濑光电有限公司 一种显示面板检测设备
CN110271851B (zh) * 2019-06-21 2021-02-09 京东方科技集团股份有限公司 预对位装置和检测设备

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201203729Y (zh) * 2008-06-06 2009-03-04 泰山光电(苏州)有限公司 液晶面板检测安装装置
CN101526575A (zh) * 2009-04-15 2009-09-09 友达光电（苏州）有限公司 显示面板测试设备及测试方法
US7818085B1 (en) * 2001-02-27 2010-10-19 Cypress Semiconductor Corporation System for controlling the processing of an integrated circuit chip assembly line
CN204433654U (zh) * 2015-01-21 2015-07-01 昆山精讯电子技术有限公司 一种便于装卸oled面板的承载装置
CN107298283A (zh) * 2017-08-08 2017-10-27 惠科股份有限公司 显示面板检查设备和显示面板检测方法
CN207515810U (zh) * 2017-11-17 2018-06-19 海安苏州大学先进机器人研究院 便于面板检测的翻转装置
CN109443700A (zh) * 2018-11-22 2019-03-08 苏州精濑光电有限公司 一种显示面板检测设备
CN109459577A (zh) * 2018-11-22 2019-03-12 苏州精濑光电有限公司 一种显示面板检测装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05319542A (ja) * 1992-05-22 1993-12-03 Sony Corp 送り側移載機、取り出し側移載機衝突防止機構
KR100732344B1 (ko) * 2005-06-02 2007-06-27 주식회사 파이컴 디스플레이 패널의 회전식 검사 장비
CN105093574B (zh) * 2015-06-05 2018-06-08 京东方科技集团股份有限公司 显示面板检测台
CN106597704A (zh) * 2016-12-22 2017-04-26 武汉精测电子技术股份有限公司 旋转装置及显示面板检测装置
CN108507759A (zh) * 2018-04-16 2018-09-07 昆山精讯电子技术有限公司 一种显示面板检测装置及检测方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7818085B1 (en) * 2001-02-27 2010-10-19 Cypress Semiconductor Corporation System for controlling the processing of an integrated circuit chip assembly line
CN201203729Y (zh) * 2008-06-06 2009-03-04 泰山光电(苏州)有限公司 液晶面板检测安装装置
CN101526575A (zh) * 2009-04-15 2009-09-09 友达光电（苏州）有限公司 显示面板测试设备及测试方法
CN204433654U (zh) * 2015-01-21 2015-07-01 昆山精讯电子技术有限公司 一种便于装卸oled面板的承载装置
CN107298283A (zh) * 2017-08-08 2017-10-27 惠科股份有限公司 显示面板检查设备和显示面板检测方法
CN207515810U (zh) * 2017-11-17 2018-06-19 海安苏州大学先进机器人研究院 便于面板检测的翻转装置
CN109443700A (zh) * 2018-11-22 2019-03-08 苏州精濑光电有限公司 一种显示面板检测设备
CN109459577A (zh) * 2018-11-22 2019-03-12 苏州精濑光电有限公司 一种显示面板检测装置

Also Published As

Publication number Publication date
CN109533822B (zh) 2020-04-07
CN109533822A (zh) 2019-03-29

Similar Documents

Publication Publication Date Title
CN101169528B (zh) 液晶显示屏的在线检测方法及其制程设备
US8056698B2 (en) Tray handling apparatus and semiconductor device inspecting method using the same
TWI448698B (zh) Transmission detection device and method thereof
WO2020103207A1 (zh) 一种显示面板检测设备
WO2020103208A1 (zh) 一种面板检测方法
CN109459577B (zh) 一种显示面板检测装置
WO2023216736A1 (zh) 一种智能硅片分选系统和分选方法
CN209400553U (zh) 一种显示面板检测装置
CN113171993A (zh) 一种新型显示面板外观自动光学检测设备
CN116387206A (zh) 一种半导体加工用测试装置及其测试方法
TW201605702A (zh) 電子元件輸送單元及其應用之電子元件檢測設備
CN109530244B (zh) 一种基板的检测方法
CN102439707A (zh) 基片的系统及处理
KR101669992B1 (ko) 기판의 양면 검사장치
CN110880461B (zh) 基板处理装置
JPH10185766A (ja) タイヤ搬送種分け装置
CN207226354U (zh) 一种交替放置tray盘的OLED显示屏的分选机构
CN105973581B (zh) 做业平台及其检测做业方法
JP2014055932A (ja) ガラス基板用合紙異物検査装置
CN214918224U (zh) 一种新型显示面板外观自动光学检测设备
KR101546192B1 (ko) 인라인형 패널 검사 및 분류 시스템
CN219936996U (zh) 一种改善系统
CN219525070U (zh) 一种子母托盘合托装置
CN113044534B (zh) 一种拆垛装置
TWI836448B (zh) 收放板裝置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18940749

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18940749

Country of ref document: EP

Kind code of ref document: A1

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205 DATED 13.07.21)

122 Ep: pct application non-entry in european phase

Ref document number: 18940749

Country of ref document: EP

Kind code of ref document: A1