WO2020095774A1 - Copolymer, and resin composition containing copolymer - Google Patents
Copolymer, and resin composition containing copolymer Download PDFInfo
- Publication number
- WO2020095774A1 WO2020095774A1 PCT/JP2019/042472 JP2019042472W WO2020095774A1 WO 2020095774 A1 WO2020095774 A1 WO 2020095774A1 JP 2019042472 W JP2019042472 W JP 2019042472W WO 2020095774 A1 WO2020095774 A1 WO 2020095774A1
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- Prior art keywords
- group
- copolymer
- meth
- acrylate
- resin composition
- Prior art date
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- 229920001577 copolymer Polymers 0.000 title claims abstract description 250
- 239000011342 resin composition Substances 0.000 title claims description 115
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims abstract description 220
- 239000000178 monomer Substances 0.000 claims abstract description 169
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 90
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 63
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 54
- 239000011737 fluorine Substances 0.000 claims abstract description 41
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 40
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 40
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract description 37
- 150000007519 polyprotic acids Polymers 0.000 claims abstract description 37
- 239000000126 substance Substances 0.000 claims abstract description 27
- 239000002253 acid Substances 0.000 claims abstract description 25
- 238000007142 ring opening reaction Methods 0.000 claims abstract description 20
- 125000000753 cycloalkyl group Chemical group 0.000 claims abstract description 19
- 239000002904 solvent Substances 0.000 claims description 80
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 48
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 46
- 239000000049 pigment Substances 0.000 claims description 26
- 125000001424 substituent group Chemical group 0.000 claims description 26
- 239000003085 diluting agent Substances 0.000 claims description 24
- 125000001153 fluoro group Chemical group F* 0.000 claims description 24
- 239000003999 initiator Substances 0.000 claims description 21
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 21
- 239000003086 colorant Substances 0.000 claims description 19
- 125000004122 cyclic group Chemical group 0.000 claims description 14
- 239000000975 dye Substances 0.000 claims description 12
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 claims description 8
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 claims description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims description 3
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 4
- 150000001735 carboxylic acids Chemical class 0.000 claims 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 abstract description 35
- 239000004925 Acrylic resin Substances 0.000 abstract description 10
- 229920000178 Acrylic resin Polymers 0.000 abstract description 10
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 4
- 230000036211 photosensitivity Effects 0.000 abstract description 4
- -1 2-ethylhexyl group Chemical group 0.000 description 53
- 238000002156 mixing Methods 0.000 description 47
- 239000000758 substrate Substances 0.000 description 30
- 239000003513 alkali Substances 0.000 description 28
- 238000000576 coating method Methods 0.000 description 27
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 22
- 239000011248 coating agent Substances 0.000 description 22
- 238000007334 copolymerization reaction Methods 0.000 description 22
- 239000000203 mixture Substances 0.000 description 21
- 150000002430 hydrocarbons Chemical group 0.000 description 20
- 238000000034 method Methods 0.000 description 19
- 239000011347 resin Substances 0.000 description 19
- 229920005989 resin Polymers 0.000 description 19
- 238000005979 thermal decomposition reaction Methods 0.000 description 18
- 239000000243 solution Substances 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 15
- 229920000642 polymer Polymers 0.000 description 15
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 14
- 239000002270 dispersing agent Substances 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 14
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- 238000011161 development Methods 0.000 description 12
- 230000018109 developmental process Effects 0.000 description 12
- 238000004383 yellowing Methods 0.000 description 12
- 238000006116 polymerization reaction Methods 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- 239000007787 solid Substances 0.000 description 8
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 7
- 238000013329 compounding Methods 0.000 description 7
- 239000003112 inhibitor Substances 0.000 description 7
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 238000007259 addition reaction Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 230000001747 exhibiting effect Effects 0.000 description 6
- NWVVVBRKAWDGAB-UHFFFAOYSA-N hydroquinone methyl ether Natural products COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000003505 polymerization initiator Substances 0.000 description 6
- 230000007261 regionalization Effects 0.000 description 6
- WLTSXAIICPDFKI-FNORWQNLSA-N (E)-3-dodecene Chemical compound CCCCCCCC\C=C\CC WLTSXAIICPDFKI-FNORWQNLSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000012776 electronic material Substances 0.000 description 5
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 5
- 238000003786 synthesis reaction Methods 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000001723 curing Methods 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 239000004210 ether based solvent Substances 0.000 description 3
- 238000001879 gelation Methods 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000010526 radical polymerization reaction Methods 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 2
- QTKPMCIBUROOGY-UHFFFAOYSA-N 2,2,2-trifluoroethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(F)(F)F QTKPMCIBUROOGY-UHFFFAOYSA-N 0.000 description 2
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 2
- SPSPIUSUWPLVKD-UHFFFAOYSA-N 2,3-dibutyl-6-methylphenol Chemical compound CCCCC1=CC=C(C)C(O)=C1CCCC SPSPIUSUWPLVKD-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- WLTSXAIICPDFKI-UHFFFAOYSA-N 3-dodecene Chemical compound CCCCCCCCC=CCC WLTSXAIICPDFKI-UHFFFAOYSA-N 0.000 description 2
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- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
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- 0 CC(C1)C(*)(*)C(*)(*)C1[C@@](C(C)(C)*)C(C)(C)N Chemical compound CC(C1)C(*)(*)C(*)(*)C1[C@@](C(C)(C)*)C(C)(C)N 0.000 description 2
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- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
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- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
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- 239000000980 acid dye Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 2
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- 125000003545 alkoxy group Chemical group 0.000 description 2
- 150000005215 alkyl ethers Chemical class 0.000 description 2
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- 125000003118 aryl group Chemical group 0.000 description 2
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- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 2
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- BEQIIZJSZSVJJK-UHFFFAOYSA-M chembl2028372 Chemical compound [Na+].OC1=CC=C(S([O-])(=O)=O)C=C1N=NC1=C(O)C=CC2=CC=CC=C12 BEQIIZJSZSVJJK-UHFFFAOYSA-M 0.000 description 2
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- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
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- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 1
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- PHWXYKUZSUKPCM-ALCCZGGFSA-N (z)-2-pentan-3-ylbut-2-enedioic acid Chemical compound CCC(CC)C(\C(O)=O)=C\C(O)=O PHWXYKUZSUKPCM-ALCCZGGFSA-N 0.000 description 1
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- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- OZEHOHQZIRILDX-UHFFFAOYSA-N ctk1b7797 Chemical compound O=C1OC(=O)C2C1C1(C)CC2CC1 OZEHOHQZIRILDX-UHFFFAOYSA-N 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- CISNNLXXANUBPI-UHFFFAOYSA-N cyano(nitro)azanide Chemical class [O-][N+](=O)[N-]C#N CISNNLXXANUBPI-UHFFFAOYSA-N 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- YKNMBTZOEVIJCM-UHFFFAOYSA-N dec-2-ene Chemical compound CCCCCCCC=CC YKNMBTZOEVIJCM-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- IEPRKVQEAMIZSS-AATRIKPKSA-N diethyl fumarate Chemical compound CCOC(=O)\C=C\C(=O)OCC IEPRKVQEAMIZSS-AATRIKPKSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- FLISWPFVWWWNNP-BQYQJAHWSA-N dihydro-3-(1-octenyl)-2,5-furandione Chemical compound CCCCCC\C=C\C1CC(=O)OC1=O FLISWPFVWWWNNP-BQYQJAHWSA-N 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- KGGOIDKBHYYNIC-UHFFFAOYSA-N ditert-butyl 4-[3,4-bis(tert-butylperoxycarbonyl)benzoyl]benzene-1,2-dicarboperoxoate Chemical compound C1=C(C(=O)OOC(C)(C)C)C(C(=O)OOC(C)(C)C)=CC=C1C(=O)C1=CC=C(C(=O)OOC(C)(C)C)C(C(=O)OOC(C)(C)C)=C1 KGGOIDKBHYYNIC-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 229940093499 ethyl acetate Drugs 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001056 green pigment Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000003840 hydrochlorides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- AQYSYJUIMQTRMV-UHFFFAOYSA-N hypofluorous acid Chemical compound FO AQYSYJUIMQTRMV-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- QDLAGTHXVHQKRE-UHFFFAOYSA-N lichenxanthone Natural products COC1=CC(O)=C2C(=O)C3=C(C)C=C(OC)C=C3OC2=C1 QDLAGTHXVHQKRE-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- NPKFETRYYSUTEC-UHFFFAOYSA-N n-[2-(4-amino-n-ethyl-3-methylanilino)ethyl]methanesulfonamide Chemical compound CS(=O)(=O)NCCN(CC)C1=CC=C(N)C(C)=C1 NPKFETRYYSUTEC-UHFFFAOYSA-N 0.000 description 1
- JMXROTHPANUTOJ-UHFFFAOYSA-H naphthol green b Chemical compound [Na+].[Na+].[Na+].[Fe+3].C1=C(S([O-])(=O)=O)C=CC2=C(N=O)C([O-])=CC=C21.C1=C(S([O-])(=O)=O)C=CC2=C(N=O)C([O-])=CC=C21.C1=C(S([O-])(=O)=O)C=CC2=C(N=O)C([O-])=CC=C21 JMXROTHPANUTOJ-UHFFFAOYSA-H 0.000 description 1
- CTIQLGJVGNGFEW-UHFFFAOYSA-L naphthol yellow S Chemical compound [Na+].[Na+].C1=C(S([O-])(=O)=O)C=C2C([O-])=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 CTIQLGJVGNGFEW-UHFFFAOYSA-L 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- UMRZSTCPUPJPOJ-KNVOCYPGSA-N norbornane Chemical compound C1C[C@H]2CC[C@@H]1C2 UMRZSTCPUPJPOJ-KNVOCYPGSA-N 0.000 description 1
- 239000001053 orange pigment Substances 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000004989 p-phenylenediamines Chemical class 0.000 description 1
- WNBDFALPKHFDJO-UHFFFAOYSA-N pentadec-3-ene Chemical compound CCCCCCCCCCCC=CCC WNBDFALPKHFDJO-UHFFFAOYSA-N 0.000 description 1
- IYDCZCBVYAESDR-UHFFFAOYSA-N pentadec-4-ene Chemical compound CCCCCCCCCCC=CCCC IYDCZCBVYAESDR-UHFFFAOYSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- FVGBHSIHHXTYTH-UHFFFAOYSA-N pentane-1,1,1-triol Chemical compound CCCCC(O)(O)O FVGBHSIHHXTYTH-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 229960003531 phenolsulfonphthalein Drugs 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 235000012739 red 2G Nutrition 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- COEZWFYORILMOM-UHFFFAOYSA-M sodium 4-[(2,4-dihydroxyphenyl)diazenyl]benzenesulfonate Chemical compound [Na+].OC1=CC(O)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 COEZWFYORILMOM-UHFFFAOYSA-M 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- AXMCIYLNKNGNOT-UHFFFAOYSA-M sodium;3-[[4-[(4-dimethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)-[4-[ethyl-[(3-sulfonatophenyl)methyl]amino]phenyl]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 AXMCIYLNKNGNOT-UHFFFAOYSA-M 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 150000003456 sulfonamides Chemical class 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical class CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 125000002221 trityl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C([*])(C1=C(C(=C(C(=C1[H])[H])[H])[H])[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- JOHIXGUTSXXADV-UHFFFAOYSA-N undec-2-ene Chemical compound CCCCCCCCC=CC JOHIXGUTSXXADV-UHFFFAOYSA-N 0.000 description 1
- NVPYPLODXLUCNR-UHFFFAOYSA-N undec-3-ene Chemical compound [CH2]CCCCCCC=CCC NVPYPLODXLUCNR-UHFFFAOYSA-N 0.000 description 1
- JABYJIQOLGWMQW-UHFFFAOYSA-N undec-4-ene Chemical compound CCCCCCC=CCCC JABYJIQOLGWMQW-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/32—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/22—Esters containing halogen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/14—Esterification
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
Definitions
- the present invention relates to a copolymer, a resin composition containing the copolymer, and a resist.
- the present application claims priority based on Japanese Patent Application No. 2018-210789 filed in Japan on November 8, 2018, and the content thereof is incorporated herein.
- photosensitive resin compositions curable by active energy rays such as ultraviolet rays and electron rays have been widely used in the fields of various coatings, printing, paints, adhesives and the like.
- photosensitive resin compositions curable by active energy rays can be used as solder resists, color filters, black matrices, black column spacers, photo spacers, protective film resists, etc. It is used.
- the required properties for curable photosensitive resin compositions are becoming more diverse and sophisticated. These required properties include, for example, short-time curability in consideration of productivity, low-temperature curability that suppresses thermal damage to applied members, and the like.
- the low reflectivity of electronic material members is emphasized in order to enhance the functionality of various devices. Therefore, in recent years, the development of members with the theme of low reflectivity has been earnestly studied. For example, in microlenses used in digital cameras, smartphones, etc., there is an increasing demand for coating a low reflectance layer along the surface of the microlens. By coating the low-reflectance layer, the reflected light from the concave portions between the lenses can be significantly suppressed, the S / N ratio can be improved, and a high-quality image with little noise can be realized.
- an image display device such as a liquid crystal display or an organic EL display
- external light such as sunlight or a fluorescent lamp
- the external light diffuses after reaching the inside of the substrate of the image display device.
- the visibility of the screen is reduced. Therefore, for the purpose of improving visibility, there is an increasing demand for a low-reflection display in which various members constituting the image display device substrate are made to have a low reflectance to minimize the reflection of external light. Examples of these members include a transparent substrate, a color filter, a black matrix, a column spacer, and a protective film.
- Patent Documents 1 and 2 by introducing a fluorine atom introducing another monomer group and a fluorine-containing (meth) acrylate, the solubility is improved and smooth coatability of the cured film is realized.
- a resin can be provided.
- the photolithography method includes exposure with active energy rays such as ultraviolet rays and electron beams, and a developing step with an alkali developing solution.
- the photosensitive resin composition used in this method is required to have sensitivity to active energy rays and alkali developability.
- an alkali-soluble resin is used as the binder of the coating film forming the member.
- a reactive diluent, a photopolymerization initiator, and if necessary, an additive such as a colorant are included.
- the alkali-soluble resin To improve the sensitivity of the alkali-soluble resin, it is necessary to introduce a functional group that causes a reaction during exposure to active energy rays.
- a functional group an ethylenically unsaturated group is generally mentioned.
- the method of introducing an acid group is the most general.
- the acid group include a carboxy group, a phosphoric acid group and a sulfonic acid group.
- a black matrix, a color filter (a colored pattern of each pixel of R / G / B), a protective film, and the like are repeatedly formed like an image display device substrate, an alkali-soluble resin as a binder of a coating film is used. , High degradability, high heat yellowing, high solvent resistance, etc. are required.
- the conventional resin has a low degree of fluorine substitution in the fluorine-containing (meth) acrylate and a low composition ratio of the fluorine-containing (meth) acrylate in all the monomers, so that it is possible to provide a satisfactory low refractive index acrylic resin. Is insufficient.
- the conventional resin is not a photosensitive resin that can be cured by active energy rays such as ultraviolet rays and electron beams, but exhibits photocurability by blending with other photosensitive resins and additives. For the purpose of improving productivity, a photosensitive resin composition that exhibits photocurability with a single liquid is in high demand, but a photosensitive acrylic resin having a satisfactory low refractive index has not been provided yet.
- fluorine-containing acrylic resins including conventional resins, generally have poor affinity with alkali developers, and further improvement in alkali developability is necessary to satisfy the strict dimensional accuracy of the members. is there.
- the present invention has been made in order to solve the above problems, and provides an acrylic resin having an excellent low refractive index in one liquid while exhibiting both photocurability and alkali developability, and the resin Accordingly, it is an object of the present invention to provide a photosensitive resin composition used for a resist that contributes to low reflection and high definition of all electronic material members such as microlenses and image display devices.
- the unsaturated carboxylic acid (a-4) is ring-opened and added to the epoxy group of the epoxy group-containing copolymer (P1), and the hydroxy group formed by ring opening of the epoxy group is polybasic acid.
- a copolymer (A1) obtained by adding an anhydride (a-5) The epoxy group-containing copolymer (P1) is Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group; A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2), A copolymer containing a structural unit derived from an epoxy group-containing (meth) acrylate (a-3), A copolymer having an acid value of 20 KOHmg / g or more.
- X and X ′ in the formula (1) each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 each independently.
- R3 represents a hydrogen atom or a methyl group
- L represents —O—, —O—CH 2 —CH (OH) —CH 2 —, —O—NH—C ( ⁇ O) —CH. 2 --CH 2-
- each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group
- n is 0 to It is an integer of 12.
- at least three fluorine atoms are included in the formula (2).
- the carboxy group-containing copolymer (P2) is Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group; A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2), A copolymer containing a structural unit derived from an unsaturated carboxylic acid (a-4), A copolymer having an acid value of 20 KOHmg / g or more.
- X and X ′ in the formula (1) each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 each independently.
- R3 represents a hydrogen atom or a methyl group
- L represents —O—, —O—CH 2 —CH (OH) —CH 2 —, —O—NH—C ( ⁇ O) —CH. 2 --CH 2-
- each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group
- n is 0 to It is an integer of 12.
- at least three fluorine atoms are included in the formula (2).
- the polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms is dicyclopentenyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isobornyl (meth) acrylate.
- [10] contains a colorant (E), The resin composition according to any one of [7] to [9], wherein the colorant (E) is at least one selected from the group consisting of dyes and pigments.
- a resist comprising a cured product of the resin composition according to [9] or [10].
- the present invention it is possible to provide an acrylate-based copolymer having an excellent low refractive index while exhibiting photocurability.
- the resin composition of the present invention can be suitably used for a resist that contributes to low reflection and high definition of all electronic material members such as microlenses and image display devices.
- the first embodiment of the copolymer (A) of the present invention is such that the unsaturated carboxylic acid (a-4) is ring-opened and added to the epoxy group of the epoxy group-containing copolymer (P1).
- the epoxy group-containing copolymer (P1) is a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a polymerizable unit represented by the above chemical formula (1). At least one selected from the group consisting of structural units derived from the monomer (a-1B), a structural unit derived from the fluorine-containing (meth) acrylate (a-2) represented by the chemical formula (2), and an epoxy group-containing It is a copolymer containing a structural unit derived from (meth) acrylate (a-3).
- the epoxy group-containing copolymer (P1) preferably further contains a constituent unit derived from a hydroxy group-containing (meth) acrylate (a-6).
- the (meth) acrylate means one or more selected from methacrylate and acrylate.
- Epoxy group-containing copolymer (P1) The epoxy group-containing copolymer (P1) relating to the copolymer (A1) of the present embodiment (hereinafter sometimes simply referred to as “copolymer (P1)”) is a crosslinker having 10 to 20 carbon atoms. At least one selected from the group consisting of a polymerizable monomer (a-1A) having a cyclic hydrocarbon group and a polymerizable monomer (a-1B) represented by the following chemical formula (1) and the following chemical formula (2) It is a copolymer of the monomer (M1) containing the indicated fluorine-containing (meth) acrylate (a-2) and the epoxy group-containing (meth) acrylate (a-3).
- the fluorine equivalent of the epoxy group-containing copolymer (P1) is preferably 100 g / mol or less, more preferably 30 to 100 g / mol, and further preferably 40 to 100 g / mol.
- the monomer (M1) of the copolymer (P1) of the present embodiment preferably further contains a hydroxy group-containing (meth) acrylate (a-6). When the hydroxy group-containing (meth) acrylate (a-6) is copolymerized, alkali developability can be further enhanced.
- the above-mentioned monomer (M1) of the copolymer (P1) of the present embodiment is other than the above-mentioned monomers (a-1A), (a-1B), (a-2), (a-3) and (a-6).
- Other polymerizable monomer (a-7) may be included.
- the polymerizable monomer (a-1A) (hereinafter sometimes simply referred to as “monomer (a-1A)”) has a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms.
- the bridged cyclic hydrocarbon means one having a structure represented by the following formula (3) or (4) represented by adamantane and norbornane, and the bridged cyclic hydrocarbon group is , Refers to a group corresponding to the rest of the structure except for some hydrogen.
- the polymerizable monomer (a-1A) does not include the later-described polymerizable monomer (a-1B).
- a and B each represent a linear or branched alkylene group (including cyclic group), R4 represents a hydrogen atom or a methyl group.
- a and B may be the same or different. , Or the branches of A and B may be connected to form a ring.
- a ', B', and D each represent a linear or branched alkylene group (including cyclic group), and R5 represents a hydrogen atom or a methyl group.
- a ', B', and D. May be the same or different, and the branches of A ′, B ′, and D may be connected to form a ring.
- the monomer (a-1A) is preferably a (meth) acrylate having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms, and has an adamantyl (meth) acrylate or a structure represented by the following formula (5) ( More preferred is (meth) acrylate. ..
- R6 to R8 each represent a hydrogen atom or a methyl group.
- R9 and R10 may be a hydrogen atom or a methyl group, or may be bonded to each other to form a saturated or unsaturated ring.
- the ring is preferably a 5-membered ring or a 6-membered ring. * Represents a bond linked to the (meth) acrylate group.
- Examples of the monomer (a-1A) include dicyclopentenyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isobornyl (meth) acrylate and adamantyl (meth) acrylate. These may be used alone or in combination of two or more.
- polymerizable Monomer (a-1B) The polymerizable monomer (a-1B) (hereinafter sometimes simply referred to as “monomer (a-1B)”) is a monomer represented by the following general formula (1).
- X and X ′ in the formula (1) each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 each independently.
- the monomer (a-1B) is not particularly limited as long as it has the chemical structure represented by the general formula (1).
- examples of X and X'representing a linear or branched hydrocarbon group having 1 to 4 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and an n-butyl group. Group, isobutyl group, t-butyl group and the like.
- examples of the substituent of the hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, which is represented by R1 and R2 include an alkoxy group and an aryl group.
- R1 and R2 are methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, t-amyl group, stearyl group, lauryl group, 2-ethylhexyl group.
- a linear or branched alkyl group such as; cyclohexyl group, t-butylcyclohexyl group, dicyclopentadienyl group, tricyclodecanyl group, isobornyl group, adamantyl group, 2-methyl-2-adamantyl group, etc.
- Examples thereof include a cyclic group; an alkyl group substituted with an alkoxy group such as a 1-methoxyethyl group and a 1-ethoxyethyl group; an alkyl group substituted with an aryl group such as a phenylaralkyl group.
- Examples of the monomer (a-1B) having the chemical structure represented by the general formula (1) include norbornene, norbornene (bicyclo [2.2.1] hept-2-ene), and 5-methylbicyclo [2.2]. .1] hept-2-ene, 5-ethylbicyclo [2.2.1] hept-2-ene, tetracyclo [4.4.0.1 2,5 . 1 7,10 ] dodec-3-ene, 8-methyltetracyclo [4.4.0.1 2,5 . 1 7,10 ] dodec-3-ene, 8-ethyltetracyclo [4.4.0.1 2,5 .
- the monomer (a-1A) and / or the monomer (a-1B) contributes to smooth coatability of the cured film, high thermal decomposition resistance, and high heat yellowing. Further, it is possible to suppress the decrease in the solubility of the copolymer in the solvent due to the presence of fluorine.
- One of the monomer (a-1A) and the monomer (a-1B) may be used, or both of them may be used. Among them, it is preferable to use one or more selected from adamantyl (meth) acrylate, a (meth) acrylate having a structure represented by the above formula (5), and norbornene.
- Dicyclopentenyl (meth) acrylate, dicyclopenta It is more preferable to use one or more selected from nyl (meth) acrylate, isobornyl (meth) acrylate, adamantyl (meth) acrylate and norbornene.
- fluorine-containing (meth) acrylate (a-2) The fluorine-containing (meth) acrylate (a-2) (hereinafter sometimes simply referred to as “monomer (a-2)”) is a fluorine-containing (meth) acrylate represented by the following chemical formula (2).
- R3 represents a hydrogen atom or a methyl group
- L represents —O—, —O—CH 2 —CH (OH) —CH 2 —, —O—NH—C ( ⁇ O) —CH. 2 --CH 2-
- each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group
- n is 0 to It is an integer of 12.
- at least three fluorine atoms are included in the formula (2).
- the fluorine-containing (meth) acrylate (a-2) is not particularly limited as long as it is represented by the above formula (2).
- the use of the fluorine-containing (meth) acrylate (a-2) makes it possible to lower the refractive index of the resin, but the effect becomes remarkable when the monomer contains three or more fluorine atoms.
- n 13
- further lowering of the refractive index can be expected, but there is a risk that the hardness of the cured film may not be sufficiently exhibited, so that n is in the range of 0 to 12.
- fluorine-containing (meth) acrylate (a-2) a commercially available product may be used, or a reactive (meth) acrylic acid such as (meth) acrylic acid, glycidyl (meth) acrylate, or 2-isocyanatoethyl (meth) acrylate may be used.
- a reactive (meth) acrylic acid such as (meth) acrylic acid, glycidyl (meth) acrylate, or 2-isocyanatoethyl (meth) acrylate may be used.
- Acrylic acid derivative and fluoroalcohol may be self-condensed and prepared.
- Epoxy group-containing (meth) acrylate (a-3) The epoxy group-containing (meth) acrylate (a-3) (hereinafter sometimes simply referred to as “monomer (a-3)”) is not particularly limited as long as it is a monomer having an epoxy group and an ethylenically unsaturated group. Not done. Specific examples include glycidyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate glycidyl ether, and 3,4-epoxycyclohexylmethyl (meth) acrylate. In particular, glycidyl (meth) acrylate is preferable from the viewpoint of easy availability and good reactivity.
- the (meth) acrylate having a hydroxy group, a carboxy group, and an epoxy group is a monomer (a-3).
- hydroxy group-containing (meth) acrylate (a-6) is not particularly limited as long as it is a (meth) acrylate containing one or more hydroxy groups.
- Specific examples include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 3-hydroxypentyl (meth) acrylate, 4-hydroxypentyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 4-hydroxyhexyl (meth) acrylate, 5-hydroxyhexyl (meth) acrylate, 6-hydroxyhexyl ( (Meth) acrylate, 5-hydroxy-3-methyl-pentyl (meth) acrylate, cyclohexane-1,4-dimethanol-mono (meth) acrylate, 2- (2-hydroxyethyloxy) ethyl (meth) a Relate, 2,3-dihydroxy (meth) acrylate, butane triol mono (meth) acrylate, pentane trio
- the epoxy group-containing copolymer (P1) relating to the copolymer (A) according to one aspect of the present invention includes the monomer (a-1A), the monomer (a-1B), the monomer (a-2), and Copolymerization of the monomer (a-3) and other polymerizable monomer (a-7) other than the above-mentioned monomer (a-6) (hereinafter sometimes simply referred to as “monomer (a-7)”). It may be done.
- the other polymerizable monomer (a-7) is a copolymerizable monomer other than the above-mentioned monomers (a-1A), (a-1B), (a-2) and (a-3).
- This monomer (a-7) is generally a radically polymerizable compound having an ethylenically unsaturated group, and specific examples thereof include dienes such as butadiene; methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl.
- (Meth) acrylate iso-propyl (meth) acrylate, n-butyl (meth) acrylate, sec-butyl (meth) acrylate, iso-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) ) Acrylate, neopentyl (meth) acrylate, benzyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate, dodecyl (meth) acrylate, cyclopentyl (Meth) acrylate, cyclohexyl (meth) acrylate, methylcyclohexyl (meth) acrylate, ethylcyclohexyl (meth) acrylate, rosin (me
- the ratio of the structure derived from each monomer is the value of the molar ratio of each polymerizable monomer added for the copolymerization reaction.
- the mixing ratio (molar ratio) of each monomer is not particularly limited, but when the total amount of the monomers (M1) constituting the epoxy group-containing copolymer (P1) is 100 mol%, the monomer (a-1A) and The total blending ratio of the monomer (a-1B) is preferably 1 to 40 mol%, more preferably 2 to 20 mol%.
- the mixing ratio of the monomer (a-1A) and the monomer (a-1B) is 1 mol% or more, desired thermal decomposition resistance, thermal yellowing resistance, and good solubility in a solvent can be obtained.
- the blending ratio is 40 mol% or less, the blending ratio of the monomer (a-2) and the monomer (a-3) becomes sufficiently large, and the copolymer (A) having a desired refractive index and curability. Is obtained.
- the mixing ratio of the monomer (a-2) is preferably 20 to 90 mol%, more preferably 30 to 85 mol%.
- the copolymer (A) having a sufficiently low refractive index can be obtained. If the blending ratio of the monomer (a-2) is 90 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-3) will be sufficiently high, and the desired amount will be obtained. A copolymer (A) having thermal decomposition resistance, curability, and good solubility in a solvent can be obtained.
- the mixing ratio of the monomer (a-3) is preferably 9 to 70 mol%, more preferably 13 to 65 mol%.
- the blending ratio of the monomer (a-3) is 9 mol% or more, sufficient curability can be exhibited when the photosensitive resin composition is formed, and the fluororesin and other photocurable resin having no photocurability can be used. It is possible to provide a photosensitive resin composition having good affinity as compared with a photosensitive resin composition in which a photocurable component is mixed. If the blending ratio of the monomer (a-3) is 70 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) will be sufficiently high, and the desired amount will be obtained. A copolymer (A) having thermal decomposition resistance and refractive index can be obtained.
- the blending ratio of the monomer (a-6) is preferably 0 to 50%, more preferably 0 to 20%.
- the epoxy group-containing copolymer (P) according to the present invention can be produced by using a copolymerization reaction.
- the copolymerization reaction carried out in the present invention can be carried out according to a radical polymerization method known in the art.
- a monomer used for copolymerization may be dissolved in a solvent, a polymerization initiator may be added to the solution, and the reaction may be performed at 50 to 130 ° C. for 1 to 20 hours.
- the monomer used for the copolymerization and the polymerization initiator may be added dropwise to the solvent adjusted to 50 to 130 ° C. for the reaction.
- the solvent that can be used in this copolymerization reaction is not particularly limited as long as it is inert to radical polymerization, and a commonly used organic solvent can be used.
- a commonly used organic solvent can be used.
- Specific examples include glycol ether solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate; aromatic solvents such as toluene and xylene; ester solvents such as ethyl acetate, isopropyl acetate and ethyl lactate. These may be used alone or in combination of two or more. Of these, glycol ether solvents are preferred.
- the amount of the solvent used in the copolymerization reaction is not particularly limited, but is generally 30 to 1000 parts by mass, preferably 50 to 800 parts by mass, when the total amount of the monomers used in the copolymerization is 100 parts by mass.
- the amount of the solvent used is 1000 parts by mass or less, the decrease in the molecular weight of the copolymer (P) due to the chain transfer action is suppressed, and the viscosity of the copolymer (P) is controlled within an appropriate range. be able to.
- an abnormal polymerization reaction can be prevented, the polymerization reaction can be stably performed, and coloring and gelation of the copolymer (P) can be prevented. You can also
- the polymerization initiator that can be used in this copolymerization reaction is not particularly limited as long as it can initiate radical polymerization, and a commonly used organic peroxide catalyst or azo compound can be used.
- the amount of the polymerization initiator used in this copolymerization reaction is not particularly limited, but is generally 0.5 to 20 parts by mass, preferably 1.0 to 10 parts by mass when the total amount of the monomers used in the copolymerization is 100 parts by mass. 10 parts by mass.
- the fluorine equivalent of the epoxy group-containing copolymer (P1) is the mass of the polymer per the number of moles of fluorine atom, and is a calculated value calculated based on the amount of the monomer used. If this value is 100 g / mol or less, the refractive index of the acrylic resin as an acrylic resin that exhibits photocurability by adding an unsaturated carboxylic acid (a-4) or an ethylenically unsaturated group-containing reactive monomer (b-2) It is possible to obtain the copolymer (A) of the present invention having a sufficiently low value.
- the fluorine equivalent is preferably 30 to 100 g / mol, more preferably 40 to 100 g / mol.
- the unsaturated group-containing copolymer (A1) is obtained by ring-opening addition of the unsaturated carboxylic acid (a-4) to the epoxy group of the epoxy group-containing copolymer (P1), and further by opening the epoxy group.
- the polybasic acid anhydride (a-5) is added to the resulting hydroxy group and the hydroxy group of the monomer (a-6).
- the copolymer (A1) of the present embodiment is excellent in photosensitivity because it contains the structural unit derived from the addition reaction in which the unsaturated carboxylic acid (a-4) and the polybasic acid anhydride (a-5) participate. At the same time when the double bond is introduced, a hydroxy group having excellent alkali developability can be obtained by ring opening of the epoxy group. Further, by adding a polybasic acid anhydride to the obtained hydroxy group, a carboxy group can be introduced to enhance the alkali developability. With this structural unit, sufficient hardness of the cured product is exhibited, and high solvent resistance is exhibited.
- the affinity of the copolymer with an alkali developing solution is increased, and a highly precise curing pattern can be formed, and strict dimensional accuracy is realized. To do. Further, the curability due to heat can be simultaneously exhibited by leaving the whole amount of the epoxy group without reacting with the unsaturated carboxylic acid (a-4).
- the unsaturated carboxylic acid (a-4) includes, among acid groups, a carboxy group which has a high reactivity with an epoxy group and an ethylenic unsaturated group. There is no particular limitation as long as it is a monomer having a group.
- the monomer examples include (meth) acrylic acid, itaconic acid, crotonic acid, cinnamic acid, 2- (meth) acryloyloxyethylsuccinic acid, 2- (meth) acryloyloxyethylphthalic acid, 2- (meth) acryloyl Examples thereof include oxyethylhexahydrophthalic acid.
- (meth) acrylic acid is preferable from the viewpoints of easy availability and good reactivity.
- polybasic acid anhydride (a-5) The polybasic acid anhydride is not particularly limited as long as it has an acid anhydride structure having good reactivity with a hydroxy group, but a polybasic acid anhydride having a ring structure that does not generate a by-product after the reaction is preferable.
- 1,2,3,6-tetrahydrophthalic anhydride hexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, bicyclo [2.2.1] heptane-2,3-dicarboxylic anhydride , Methylbicyclo [2.2.1] heptane-2,3-dicarboxylic acid anhydride, succinic anhydride, octenylsuccinic anhydride and the like.
- the reaction ratio of the unsaturated carboxylic acid (a-4) is preferably 10 to 70 mol%, more preferably 10 to 70 mol% when the total amount of the monomers (M1) constituting the epoxy group-containing copolymer (P1) is 100 mol%. It is preferably 15 to 65 mol%.
- the blending ratio of the unsaturated carboxylic acid (a-4) is 10 mol% or more, sufficient curability can be exhibited in the photosensitive resin composition.
- it is 70 mol% or less a sufficient mixing ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) is ensured to obtain desired thermal decomposition resistance and refractive index.
- the copolymer (A) having is obtained.
- the ratio of the unsaturated carboxylic acid (a-4) to be added to the number of moles of the epoxy group contained in the epoxy group-containing copolymer (P1) is preferably 90 to 100 mol%, and It is preferably 95 to 100 mol%.
- the addition ratio of the unsaturated carboxylic acid (a-4) is 90% or more, sufficient curability can be exhibited when the photosensitive resin composition is prepared, and other fluororesins having no photocurability can be obtained. It is possible to provide a photosensitive resin composition having a good affinity as compared with the photosensitive resin composition in which the photocurable component of (1) is mixed.
- the reaction ratio of the polybasic acid anhydride (a-5) is not particularly limited as long as the reaction is performed so that the acid value of the copolymer (A1) is 20 KOHmg / g or more.
- the total amount of the monomers (M1) constituting the epoxy group-containing copolymer (P1) is 100 mol%, it is preferably 5 to 30 mol%, more preferably 5 to 20 mol%.
- the blending ratio of the polybasic acid anhydride (a-5) is 5 mol% or more, the copolymer (A1) having a desired alkali developability can be obtained.
- the compounding ratio of the monomer (a-1A) and / or the monomer (a-1B), the monomer (a-2) and the monomer (a-4) is sufficiently secured to obtain a desired amount.
- the copolymer (A1) having the above-mentioned thermal decomposition resistance, refractive index, and curability can be obtained.
- the polybasic acid anhydride (a- The addition ratio of 5) is preferably 10 to 90 mol%, more preferably 10 to 70 mol%.
- the addition ratio of the polybasic acid anhydride (a-5) is 10 mol% or more, the copolymer (A1) having a desired alkali developability can be obtained. Further, when the content is 90% mol% or less, the unreacted product of the polybasic acid anhydride (a-5) does not remain and the desired copolymer (A1) is obtained.
- the unsaturated group-containing copolymer (A1) preferably has a structure represented by the following formula (6).
- X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms
- R 1 and R 2 are each independently It is a hydrocarbon group having 1 to 20 carbon atoms which may have a hydrogen atom, a carboxy group or a substituent, and may have a cyclic structure connecting R1 and R2.
- R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms.
- L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C ( ⁇ O) —CH 2 —CH 2 —.
- Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12. However, in the formula (6), at least three fluorine atoms are included.
- R12 to R14 each independently represent a hydrogen atom or a methyl group.
- One of R15 is a hydroxy group and the other is a substituent represented by the following chemical formula (7).
- one of R16 is a substituent represented by the following chemical formula (7), and the other is a substituent represented by the following chemical formula (8).
- L ′ is a divalent hydrocarbon group having 1 to 6 carbon atoms which may have a substituent
- L ′′ is a hydrogen atom or a hydrocarbon group which connects L ′′ and L ′ to form a cyclic structure
- x1, x2, y, a, b, and c are molar ratios of the respective structural units, y, a, and b are larger than 0, and x1, x2, and c may be 0.
- x1 and x2 are never 0 at the same time.
- the bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed. * Represents a bond. )
- R17 represents a hydrogen atom or a methyl group. * Represents a bond.
- R18 and R19 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, and has a cyclic structure connecting R18 and R19. May be. * Represents a bond.
- R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms, and is preferably an adamantyl group or a group having a structure represented by the following formula (5). ..
- R6 to R8 each represent a hydrogen atom or a methyl group.
- R9 and R10 may be a hydrogen atom or a methyl group, or may be bonded to each other to form a saturated or unsaturated ring.
- the ring is preferably a 5-membered ring or a 6-membered ring. * Represents a bond linked to the (meth) acrylate R11.)
- the unsaturated group-containing copolymer (A1) is obtained by adding a polymerization inhibitor and a catalyst to a solution of the copolymer (P1) having an epoxy group and then adding the unsaturated carboxylic acid (a-4). After the addition, the epoxy group is subjected to a ring-opening addition reaction under the condition of 50 to 150 ° C., preferably 80 to 130 ° C., and then the polybasic acid anhydride (a-5) is added to perform the ring-opening addition reaction of the epoxy group. It can be produced by reacting under the same conditions as.
- the reaction When reacting the unsaturated carboxylic acid (a-4) and then the polybasic acid anhydride (a-5), it is used for the copolymerization reaction when producing the above-mentioned copolymer (P1) having an epoxy group. Since there is no particular problem even if the solvent is contained, the reaction can be carried out without removing the solvent after the completion of the copolymerization reaction.
- the polymerization inhibitor is added to prevent gelation due to polymerization of the introduced double bond.
- the type is not particularly limited, and specific examples thereof include hydroquinone, methylhydroquinone, hydroquinone monomethyl ether, dibutylhydroxytoluene and the like.
- the catalyst is also not particularly limited, but specifically, tertiary amines such as triethylamine, quaternary ammonium salts such as triethylbenzylammonium chloride, phosphorus compounds such as triphenylphosphine, and organic metals such as chromium and tin. A compound etc. are mentioned.
- the second embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3). It is an unsaturated group-containing copolymer (A2-I) having a group and is characterized by having an acid value of 20 KOHmg / g or more.
- the epoxy group-containing copolymer (P2) is a structural unit derived from the polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and the polymerizable monomer represented by the chemical formula (1).
- the (meth) acrylate means one or more selected from methacrylate and acrylate.
- the carboxy group-containing copolymer (P2) (hereinafter sometimes simply referred to as “copolymer (P2)”) related to the copolymer (A2-I) of the present embodiment has 10 to 20 carbon atoms. At least one selected from the group consisting of a polymerizable monomer having a bridged cyclic hydrocarbon group (a-1A) and a polymerizable monomer represented by the chemical formula (1) (a-1B); ) Is a copolymer of the monomer (M2) containing the fluorine-containing (meth) acrylate (a-2) and the unsaturated carboxylic acid (a-4).
- the fluorine equivalent of the carboxy group-containing copolymer (P2) is preferably 100 g / mol or less, more preferably 30 to 100 g / mol, and further preferably 40 to 100 g / mol.
- the monomer (M2) of the copolymer (P2) of this embodiment preferably further contains a hydroxy group-containing (meth) acrylate (a-6). When the hydroxy group-containing (meth) acrylate (a-6) is copolymerized, alkali developability can be further enhanced. Further, the above-mentioned monomer (M2) of the copolymer (P2) of the present embodiment may contain other polymerizable monomer (a-7).
- a-1A polymerizable monomer
- a-1B polymerizable monomer
- a fluorine-containing (meth) acrylate a-2
- an unsaturated carboxylic acid a-4
- a hydroxy group a polymerizable monomer (a-6)
- a-7 polymerizable monomer (a-7)
- the ratio of each monomer-derived structure is the value of the molar ratio of each polymerizable monomer added for the copolymerization reaction.
- the mixing ratio (molar ratio) of each monomer is not particularly limited, but when the total amount of the monomers (M2) constituting the carboxy group-containing copolymer (P2) is 100 mol%, the monomer (a-1A) and The total blending ratio of the monomer (a-1B) is preferably 1 to 40 mol%, more preferably 2 to 20 mol%.
- the mixing ratio of the monomer (a-1A) and the monomer (a-1B) is 1 mol% or more, desired thermal decomposition resistance, thermal yellowing resistance, and good solubility in a solvent can be obtained.
- the blending ratio is 40 mol% or less, the blending ratio of the monomer (a-2) or the monomer (a-4) becomes sufficiently large, and the copolymer (A) having a desired refractive index and curability. Is obtained.
- the mixing ratio of the monomer (a-2) is preferably 20 to 90 mol%, more preferably 30 to 85 mol%.
- the blending ratio of the monomer (a-2) is 20 mol% or more, the copolymer (A) having a sufficiently low refractive index can be obtained.
- the blending ratio of the monomer (a-2) is 90 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-4) is sufficiently high, and the desired amount is obtained.
- a copolymer (A) having thermal decomposition resistance, curability, and good solubility in a solvent can be obtained.
- the mixing ratio of the monomer (a-4) is preferably 9 to 70 mol%, more preferably 13 to 65 mol%.
- the blending ratio of the monomer (a-4) is 9 mol% or more, sufficient curability can be exhibited when the photosensitive resin composition is prepared, and the fluororesin and other photocurable resins which do not have photocurability can be obtained. It is possible to provide a photosensitive resin composition having good affinity as compared with a photosensitive resin composition in which a photocurable component is mixed. If the blending ratio of the monomer (a-4) is 70 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) will be sufficiently high, and the desired amount will be obtained. A copolymer (A2) having thermal decomposition resistance and refractive index is obtained.
- the mixing ratio of the monomer (a-6) is preferably 0 to 50 mol%, more preferably 0 to 20 mol%.
- the carboxy group-containing copolymer (P2) according to the present invention can be produced by using a copolymerization reaction, like the copolymer (P1) according to the first embodiment.
- the fluorine equivalent of the carboxyl group-containing copolymer (P2) is the mass of the polymer per the number of moles of the fluorine atom, and is a calculated value calculated based on the amount of the monomer used. If this value is 100 g / mol or less, the refractive index of the acrylic resin that exhibits photocurability by adding an epoxy group-containing (meth) acrylate (a-3) or a polybasic acid anhydride (a-5) will be high. It is possible to obtain a sufficiently low copolymer (A2) of the present invention.
- the fluorine equivalent is preferably 30 to 100 g / mol, more preferably 40 to 100 g / mol.
- the unsaturated group-containing copolymer (A2-I) is obtained by ring-opening addition of the carboxy group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3).
- the copolymer (A2-I) of the present embodiment contains a structural unit derived from an addition reaction in which the epoxy group-containing (meth) acrylate (a-3) participates, a double bond excellent in photosensitivity is introduced. At the same time, a hydroxy group can be obtained by ring opening of the epoxy group. Curability can be exhibited by light or heat, and alkali developability can be exhibited. With this structural unit, sufficient hardness of the cured product is exhibited, and high solvent resistance is exhibited. Furthermore, the carboxy group can be introduced at the same time by leaving the whole amount of the carboxy group contained in the carboxy group-containing copolymer (P2) without reacting with the epoxy group.
- the affinity of the copolymer with the alkali developing solution is increased.
- a highly precise cured pattern can be formed and strict dimensional accuracy is realized.
- epoxy group-containing (meth) acrylate (a-3) and polybasic acid anhydride (a-5) according to the present embodiment are the same as those according to the first embodiment, and the description thereof will be omitted.
- the reaction ratio of the epoxy group-containing (meth) acrylate (a-3) is not particularly limited as long as the reaction is performed so that the acid value of the copolymer (A2-I) is 20 KOHmg / g or more.
- the total amount of the monomers (M2) constituting the carboxy group-containing copolymer (P2) is 100 mol%, it is preferably 5 to 40 mol%, more preferably 5 to 20 mol%.
- the compounding ratio of the epoxy group-containing (meth) acrylate (a-3) is 5 mol% or more, sufficient curability can be exhibited in the photosensitive resin composition.
- the compounding ratio of the monomer (a-1A) and / or the monomer (a-1B), the monomer (a-2) and the monomer (a-4) is sufficiently secured to obtain a desired amount.
- a copolymer (A2-I) having thermal decomposition resistance, refractive index, and alkali developability can be obtained.
- the ratio of the epoxy group-containing (meth) acrylate (a-3) to be added to the number of moles of the carboxy group contained in the carboxy group-containing copolymer (P2) is preferably 10 to 90 mol%. %, And more preferably 10 to 70 mol%.
- the addition ratio of the epoxy group-containing (meth) acrylate (a-3) is 10 mol% or more, sufficient curability can be exhibited when the photosensitive resin composition is prepared and photocurability is not exerted. It is possible to provide a photosensitive resin composition having good affinity as compared with a photosensitive resin composition in which a fluororesin and another photocurable component are mixed. Further, when it is 90% mol% or less, the unreacted product of the epoxy group-containing (meth) acrylate (a-3) does not remain, and the desired copolymer (A2-I) is obtained.
- the unsaturated group-containing copolymer (A2-I) preferably has a structure represented by the following formula (9-I).
- X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms
- R 1 and R 2 are each independently A hydrogen atom, a carboxy group or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent and may have a cyclic structure connecting R1 and R2.
- R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms.
- L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C ( ⁇ O) —CH 2 —CH 2 —.
- Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12.
- R12, R13, and R20 each independently represent a hydrogen atom or a methyl group, one of R21 is a hydrogen atom, and the other is a substituent represented by the following chemical formula (10).
- x1, x2, y, d, and e are molar ratios of the respective constituent units, y, d, and e are larger than 0, and x1 and x2 may be 0. However, x1 and x2 are never 0 at the same time.
- the bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed. )
- R22 represents a hydrogen atom or a methyl group
- L ′ ′′ represents a divalent hydrocarbon group having 1 to 6 carbon atoms, which may have a substituent, and is represented by the formula (9- One of R21s in I) (that is, R of the formula (10) where R is not linked may be connected to form a ring structure. * Represents a bond)
- R11, X, X ', R1 and R2 in formula (9-I) are the same as in formula (6).
- the unsaturated group-containing copolymer (A2-I) is obtained by adding a polymerization inhibitor and a catalyst to a solution of the copolymer (P2) having a carboxy group, and then adding an epoxy group-containing (meth) acrylate ( It can be produced by adding a-3) and reacting under the same conditions as in the ring-opening addition reaction of the epoxy group of the first embodiment.
- the third embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3).
- An unsaturated group-containing copolymer (A2-II) obtained by adding a polybasic acid anhydride (a-5) to a hydroxy group of an unsaturated group-containing copolymer (A2-I) having a group, The acid value is 20 KOHmg / g or more. Since the unsaturated group-containing copolymer (A2-I) according to the third embodiment is the same as the unsaturated group-containing copolymer (A2-I) according to the second embodiment, the description thereof will be omitted.
- the unsaturated group-containing copolymer (A2-II) is an unsaturated group obtained by adding a polybasic acid anhydride (a-5) to the hydroxy group of the unsaturated group-containing copolymer (A2-I). It is a containing copolymer.
- the hydroxy group is a hydroxy group formed by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3) and a monomer (a-6) which is an optional component. ) Is a hydroxy group.
- the copolymer (A2-II) of the present embodiment contains the structural unit derived from the addition reaction in which the epoxy group-containing (meth) acrylate (a-3) and the polybasic acid anhydride (a-5) participate. At the same time as introducing a double bond having excellent photosensitivity, a hydroxy group having excellent alkali developability can be obtained by ring opening of the epoxy group. With this structural unit, sufficient hardness of the cured product is exhibited, and high solvent resistance is exhibited. Further, the carboxy group can be introduced at the same time by leaving the whole amount of the carboxy group contained in the carboxy group-containing copolymer (P2) with the epoxy group and leaving a part thereof.
- a polybasic acid anhydride (a-5) to the hydroxy group to increase the amount of carboxylic acid introduced.
- a polybasic acid anhydride a-5
- carboxylic acid can be introduced at the same time by not reacting the whole amount of the unsaturated carboxylic acid with the epoxy group and leaving a part thereof.
- the amount of carboxylic acid introduced can be increased by adding a polybasic acid anhydride to the obtained hydroxy group.
- the reaction ratio of the epoxy group-containing (meth) acrylate (a-3) is the same as the reaction ratio of the epoxy group-containing (meth) acrylate (a-3) of the copolymer (A2-I) of the second embodiment. ..
- the reaction ratio of the polybasic acid anhydride (a-5) is preferably 5 to 30 mol% when the total amount of the monomers (M2) constituting the carboxy group-containing copolymer (P2) is 100 mol%. It is more preferably 5 to 20 mol%.
- the blending ratio of the polybasic acid anhydride (a-5) is 5 mol% or more, the alkali developability of the copolymer (A2-I) can be further enhanced.
- the amount is 30 mol% or less, the compounding ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) is sufficiently secured to obtain desired thermal decomposition resistance and refractive index.
- a copolymer (A2-II) having is obtained.
- the polybasic acid anhydride (a) is added to the total number of moles of the epoxy group-containing (meth) acrylate (a-3) and the monomer (a-6) of the unsaturated group-containing copolymer (A2-I).
- the ratio of -5) is preferably 10 to 90 mol%, more preferably 10 to 70 mol%.
- the addition ratio of the polybasic acid anhydride (a-5) is 10 mol% or more, a copolymer (A2-II) having a desired alkali developability can be obtained.
- the content is 90 mol% or less, the unreacted product of the polybasic acid anhydride (a-5) does not remain, and the desired copolymer (A2-II) is obtained.
- the unsaturated group-containing copolymer (A2-II) of this embodiment preferably has a structure represented by the following formula (9-II).
- X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms
- R 1 and R 2 are each independently A hydrogen atom, a carboxy group or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent and may have a cyclic structure connecting R1 and R2.
- R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms.
- L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C ( ⁇ O) —CH 2 —CH 2 —.
- Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12.
- R12, R13, and R20 each independently represent a hydrogen atom or a methyl group
- R23 is a substituent represented by the following chemical formula (8).
- One of R21 is a hydrogen atom and the other is a substituent represented by the following chemical formula (10).
- x1, x2, y, d, e, and f are molar ratios of the respective constituent units, y, d, e, and f are larger than 0, and x1 and x2 may be 0. However, x1 and x2 are never 0 at the same time.
- the bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed.
- R18 and R19 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, and has a cyclic structure connecting R18 and R19. May be. * Represents a bond.
- R 22 represents a hydrogen atom or a methyl group
- L ′ ′′ represents a divalent hydrocarbon group having 1 to 6 carbon atoms, which may have a substituent, and is represented by the formula (9- One ring of R21 in II) (that is, R21 in which * in formula (10) is not linked) may be connected to form a ring structure. * Represents a bond.
- the unsaturated group-containing copolymer (A2-II) is prepared by producing the unsaturated group-containing copolymer (A2-I) and then adding the polybasic acid anhydride (a-5) to the mixture at 50 to 150 ° C. Preferably, it can be produced by reacting a hydroxy group with a polybasic acid anhydride (a-5) at 80 to 130 ° C.
- the polybasic acid anhydride (a-5) When the polybasic acid anhydride (a-5) is reacted, there is no particular problem even if the solvent used in the above-mentioned copolymerization reaction is contained. Therefore, the solvent is not removed after the completion of the copolymerization reaction.
- the reaction can be carried out.
- the polymerization inhibitor is added to prevent gelation due to polymerization of the introduced double bond.
- the type is not particularly limited, and specific examples thereof include hydroquinone, methylhydroquinone, hydroquinone monomethyl ether, dibutylhydroxytoluene and the like.
- the catalyst is also not particularly limited, but specifically, tertiary amines such as triethylamine, quaternary ammonium salts such as triethylbenzylammonium chloride, phosphorus compounds such as triphenylphosphine, and organic metals such as chromium and tin. A compound etc. are mentioned.
- the fourth embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxy group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3).
- the fourth embodiment of the copolymer of the present invention is preferably a mixture of the unsaturated group-containing copolymer (A2-I) and the unsaturated group-containing copolymer (A2-II).
- the unsaturated group-containing copolymer (A2-I) and the unsaturated group-containing copolymer (A2-II) according to the fourth embodiment are respectively the unsaturated group-containing copolymer (A2) according to the second embodiment.
- -I) and the unsaturated group-containing copolymer (A2-II) according to the third embodiment the description thereof will be omitted.
- the polybasic acid anhydride (a-5) is added to the unsaturated group-containing copolymer (A2-II).
- the addition amount of the polybasic acid anhydride (a-5) is adjusted to obtain an unsaturated group-containing copolymer (A2-I) and an unsaturated group-containing copolymer (A2-II). It may be a mixture of.
- the molecular weight (polystyrene-equivalent weight average molecular weight) of the copolymer (A) of the present invention obtained in the above-mentioned first embodiment to fourth embodiment is preferably 1,000 to 50,000, more preferably 3,000 to 40,000. ..
- this molecular weight is 1,000 or more, the solvent resistance and thermal decomposition resistance of the cured film can be sufficiently secured.
- the molecular weight is 50,000 or less, the molecular weight and the viscosity can be controlled in an appropriate range, which is practical.
- the acid value (JIS K6901 5.3) of the copolymer (A) of the present invention is 20 KOHmg / g or more, preferably 20 to 300 KOHmg / g, and more preferably 30 to 100 KOHmg / g. If the acid value is less than 20 KOHmg / g, developability may be deteriorated and unexposed portions (non-cured portions) may be generated as residues. On the other hand, when the acid value is 300 KOHmg / g or less, the exposed portion (cured portion) is not easily dissolved in the alkali developing solution.
- the hydroxyl equivalent of the copolymer (A) of the present invention is preferably 200 to 4000 g / mol, more preferably 500 to 3000 g / mol.
- the hydroxyl equivalent of the copolymer (A) of the present invention is preferably 200 to 4000 g / mol, more preferably 500 to 3000 g / mol.
- the water repellency of the alkaline developer is increased, but by controlling the hydroxyl group equivalent to 4000 g / mol or less, more preferably 3000 g / mol or less, the water repellency of the alkaline developer is suppressed and good developing property is obtained.
- the hydroxyl group equivalent is 200 g / mol or more, the introduction amount of other substituents necessary for the present invention can be sufficiently secured, and desired curability, heat decomposition resistance, heat yellowing and refractive index can be obtained.
- the unsaturated group equivalent of the copolymer (A) is preferably 3000 g / mol or less, more preferably 100 to 3000 g / mol, and further preferably 500 to 2000 g / mol.
- the unsaturated group equivalent is 100 g / mol or more, it is more effective to further enhance the thermal decomposition resistance and the thermal yellowing resistance.
- the refractive index of the copolymer (A) is preferably less than 1.50 under the conditions of 589 nm and 20 ° C. When it is less than 1.50, the refractive index is sufficiently lower than the refractive index of the fluorine-free photocurable acrylic resin, and good low reflectance of the cured film can be obtained.
- the resin composition of the present invention contains a copolymer (A) and a solvent (B).
- the resin composition of the present invention may further contain a reactive diluent (C), a photopolymerization initiator (D) and a colorant (E).
- a photosensitive resin composition By containing the photopolymerization initiator (D), a photosensitive resin composition can be obtained.
- the solvent (B) is not particularly limited as long as it is a solvent that does not react with the copolymer (A).
- the same solvent as used in the production of the copolymer (A) can be used, and the solvent contained after the reaction can be used as it is or further added.
- the solvent contained after the reaction can be used as it is or further added.
- other components when added, they may coexist there.
- the solvent (B) examples include propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, ethyl acetate, butyl acetate, isopropyl acetate, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, tripropylene glycol.
- examples thereof include monomethyl ether, ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, ethylene glycol monoethyl ether acetate and diethylene glycol ethyl ether acetate.
- glycol ether solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate used in the production of the copolymer (A) are preferable.
- the blending amount of the solvent (B) in the resin composition or the photosensitive resin composition of the present embodiment is generally 30 to 1000 parts by mass when the total amount of the components excluding the solvent (B) in the composition is 100 parts by mass. Parts, preferably 50 to 800 parts by weight, more preferably 100 to 700 parts by weight. If it is the compounding quantity of this range, it will become a resin composition or a photosensitive resin composition which has suitable viscosity.
- the reactive diluent (C) is not particularly limited, but those containing an ethylenically unsaturated double bond, a vinyl group and a (meth) acryloyloxy group are preferable. Specific examples thereof include aromatic vinyl monomers such as styrene, ⁇ -methylstyrene, ⁇ -chloromethylstyrene, vinyltoluene, divinylbenzene, diallylphthalate and diallylbenzenephosphonate; polycarboxylic acids such as vinyl acetate and vinyl adipate.
- Monomers methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, ⁇ -hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, ethylene glycol di (meth) acrylate , Diethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylol (Meth) acrylic monomers such as propane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tri (meth) acrylate of tris (hydroxyethyl) isocyanurate; triallyl cyanurate Etc.
- a polyfunctional (meth) acrylate having a plurality of (meth) acryloyloxy groups is preferable, and a polyfunctional (meth) acrylate having three or more (meth) acryloyloxy groups is more preferable.
- the compounding amount of the reactive diluent (C) in the resin composition or photosensitive resin composition of the present embodiment is generally 10 when the total amount of the components excluding the solvent (B) in the composition is 100% by mass. ⁇ 90% by mass, preferably 20 to 80% by mass, more preferably 25 to 70% by mass. If it is the compounding quantity of this range, it will become a resin composition or photosensitive resin composition which has suitable viscosity, and a photosensitive resin composition has suitable photocurability.
- the photopolymerization initiator (D) is not particularly limited, but specific examples thereof include benzoin such as benzoin, benzoin methyl ether, and benzoin ethyl ether, and alkyl ethers thereof; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1 , 1-dichloroacetophenone, 4- (1-t-butyldioxy-1-methylethyl) acetophenone and other acetophenones; 2-methylanthraquinone, 2-amylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone and other anthraquinones Thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone and 2-chlorothioxanthone; ketals such as acetophenone dimethyl ket
- the blending amount of the photopolymerization initiator (D) in the photosensitive resin composition of the present embodiment is 100 parts by mass based on the total amount of the copolymer (A) and the reactive diluent (C) in the photosensitive resin composition. Then, it is generally 0.1 to 30 parts by mass, preferably 0.5 to 20 parts by mass, more preferably 1 to 15 parts by mass. A blending amount within this range results in a photosensitive resin composition having appropriate photocurability.
- the colorant (E) is not particularly limited as long as it can be dissolved or dispersed in the solvent (B), and known dyes or pigments can be used.
- a dye is used as the colorant (E)
- a pigment is used as the colorant (E)
- the heat resistance of the colored pattern is higher than when a dye is used.
- Dyes and pigments may be used in combination depending on the required performance and the intended pixel color.
- dye an acid dye having an acidic group such as a carboxy group, from the viewpoint of solubility in a solvent (B) or an alkali developing solution, interaction with other components in the resin composition for a color filter, heat resistance, and the like, It is preferable to use a salt of an acidic dye with a nitrogen compound, a sulfonamide body of an acidic dye, or the like. Specific examples of such dyes include acid alizarin violet N; acid black 1, 2, 24, 48; acid blue 1, 7, 9, 25, 29, 40, 45, 62, 70, 74, 80, 83, 90.
- Pigment Specific examples of the pigment include C.I. I. Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214 and other yellow pigments; C.I. I. Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73 and the like; orange pigments; I.
- the total amount of the components excluding the solvent (B) in the photosensitive resin composition is 100 parts by mass.
- the amount is 5 to 80 parts by mass, more preferably 5 to 70 parts by mass, and further preferably 10 to 60 parts by mass.
- a known dispersant may be added to the photosensitive resin composition from the viewpoint of improving the dispersibility of the pigment.
- the dispersant it is preferable to use a polymer dispersant having excellent dispersion stability over time.
- polymer dispersants include urethane dispersants, polyethyleneimine dispersants, polyoxyethylene alkyl ether dispersants, polyoxyethylene glycol diester dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified esters. Examples include a system dispersant.
- EFKA manufactured by EFKA CHEMICALS BV (EFKA)
- Disperbyk manufactured by Big Chemie
- Disparon manufactured by Kusumoto Kasei Co., Ltd.
- SOLSPERSE manufactured by Zeneca
- the blending amount of the dispersant in the photosensitive resin composition of the present embodiment may be appropriately set according to the type of pigment used.
- composition of resin composition In the resin composition of the present embodiment, the copolymer (A) and the solvent (B) are blended in such amounts that the total amount of the components excluding the solvent (B) in the resin composition is 100 parts by mass. (A) is 50 to 100 parts by mass, and the solvent (B) is 30 to 1000 parts by mass, preferably 50 to 800 parts by mass, more preferably 100 to 700 parts by mass.
- the resin composition of the present embodiment contains the reactive diluent (C)
- the blending amounts of the copolymer (A), the solvent (B) and the reactive diluent (C) are the same as those of the solvent in the resin composition.
- the copolymer (A) is 10 to 90 parts by mass
- the solvent (B) is 30 to 1000 parts by mass
- the reactive diluent (C) is 10 to 10 parts by mass.
- 90 parts by mass preferably 20 to 80 parts by mass of the copolymer (A), 50 to 800 parts by mass of the solvent (B), and 20 to 80 parts by mass of the reactive diluent (C)
- the copolymer (A) is 30 to 75 parts by mass
- the solvent (B) is 100 to 700 parts by mass
- the reactive diluent (C) is 25 to 70 parts by mass.
- the resin composition of the present embodiment in addition to the above components, in order to impart predetermined properties, known coupling agents, leveling agents, known additives such as thermal polymerization inhibitors, and known colorants. You may mix
- the blending amount of these additives is not particularly limited as long as the effects of the present invention are not impaired.
- the resin composition of the present embodiment is a photosensitive resin composition containing a photopolymerization initiator (D), a copolymer (A), a solvent (B), a reactive diluent (C), a photopolymerization initiator
- the blending amount of (D) is preferably 5 to 80 parts by mass of the copolymer (A) and the solvent (B ) Is 30 to 1000 parts by mass
- the reactive diluent (C) is 10 to 90 parts by mass
- the photopolymerization initiator (D) is 0.1 to 30 parts by mass, and more preferably the copolymer (A).
- the solvent (B) is 50 to 800 parts by mass
- the reactive diluent (C) is 20 to 80 parts by mass
- the photopolymerization initiator (D) is 0.5 to 20 parts by mass
- the copolymer (A) is 10 to 60 parts by mass
- the solvent (B) is 100 to 700 parts by mass
- the reactive diluent (C) is 25 to 70 parts by mass.
- the photopolymerization initiator (D) is 1 to 15 parts by weight.
- the photosensitive resin composition of the present embodiment contains the colorant (E), the copolymer (A), the solvent (B), the reactive diluent (C), the photopolymerization initiator (D), the colorant
- the amount of the (E) compounded is generally 5 to 80 parts by mass of the copolymer (A) and the solvent (B). 30 to 1000 parts by mass, reactive diluent (C) 10 to 89.9 parts by mass, photopolymerization initiator (D) 0.1 to 30 parts by mass, colorant (E) 5 to 80 parts by mass.
- the copolymer (A) is 8 to 70 parts by mass
- the solvent (B) is 50 to 800 parts by mass
- the reactive diluent (C) is 20 to 80 parts by mass
- the colorant (E) is 5 to 70 parts by mass
- the copolymer (A) is 10 to 60 parts by mass
- the solvent (B) is 10 parts by mass.
- To 700 parts by weight reactive diluent (C) is 25 to 70 parts by weight
- the photopolymerization initiator (D) 1 to 15 parts by mass
- the colorant (E) is 10 to 60 parts by weight.
- the resin composition of the present embodiment can be produced by mixing the above components using a known mixing device.
- the resin composition of the present embodiment is prepared by first preparing the resin composition containing the copolymer (A) and the solvent (B), and then preparing the reactive diluent (C) and the photopolymerization initiator (D). It is also possible to mix and manufacture.
- the resin composition can be used for preparing the photosensitive resin composition of the present embodiment, and can also be used for other purposes.
- the photosensitive resin composition of the present embodiment obtained as described above has excellent sensitivity to light, and since it has alkali developability, it can be developed by using an alkaline aqueous solution, and thermal decomposition It is possible to provide a high-definition cured product (curing pattern) excellent in heat resistance, heat-resistant yellowing and low reflectance. Therefore, the photosensitive resin composition of the present embodiment, various resists, in particular, a microlens surface capable of suppressing reflected light, a substrate incorporated in an image display device capable of suppressing reflection of external light, a color filter, a black matrix. It is suitable for use as a resist used for manufacturing a column spacer, a protective film, and the like.
- the photosensitive resin composition of the present embodiment gives a cured film excellent in various properties such as heat decomposition resistance, heat yellowing, high transparency, and low reflectivity, and therefore various coatings, adhesives, printing It is also suitable for use as a binder for inks and the like.
- the resist of the present invention refers to a cured film obtained from the above photosensitive resin composition.
- the resist of one embodiment of the present invention includes a glass substrate, a silicon substrate, a polycarbonate substrate, a polyester substrate, a polyamide substrate, a polyamideimide substrate, a polyimide substrate, an aluminum substrate, a printed wiring board, an array substrate, and other substrates on which the present invention is applied.
- the photosensitive resin composition is applied and the coating film is exposed to light to cure the exposed portion. Then, by baking, a predetermined cured film can be formed on the substrate.
- the method for applying the photosensitive resin composition is not particularly limited, but a screen printing method, a roll coating method, a curtain coating method, a spray coating method, a spin coating method, a slit coating method or the like can be used.
- the solvent (B) may be volatilized by heating using a heating means such as a circulation oven, an infrared heater, or a hot plate, if necessary.
- the heating conditions are not particularly limited and may be appropriately set depending on the type of photosensitive resin composition used. Generally, heating may be performed at a temperature of 50 ° C. to 120 ° C. for 30 seconds to 30 minutes.
- the light source used for the exposure is not particularly limited, but a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, a xenon lamp, a metal halide lamp and the like can be used.
- the amount of exposure is also not particularly limited, and may be appropriately adjusted according to the type of photosensitive resin composition used.
- the alkaline aqueous solution used for development is not particularly limited, but an aqueous solution of sodium carbonate, potassium carbonate, calcium carbonate, sodium hydroxide, potassium hydroxide or the like; an aqueous solution of an amine compound such as ethylamine, diethylamine or dimethylethanolamine; 3 -Methyl-4-amino-N, N-diethylaniline, 3-methyl-4-amino-N-ethyl-N- ⁇ -hydroxyethylaniline, 3-methyl-4-amino-N-ethyl-N- ⁇ - Methanesulfonamidoethylaniline, 3-methyl-4-amino-N-ethyl-N- ⁇ -methoxyethylaniline and their water-soluble p-phenylenediamine compounds such as sulfates, hydrochlorides or p-toluenesulfonates Etc.
- an amine compound such as ethylamine
- aqueous solution of a p-phenylenediamine compound can be used.
- an antifoaming agent or a surfactant may be added to these aqueous solutions, if necessary. Further, it is preferable to wash with water and dry after the development with the above alkaline aqueous solution.
- the baking conditions are not particularly limited, and heat treatment may be performed depending on the type of photosensitive resin composition used. Generally, heating may be performed at 130 to 250 ° C. for 10 to 60 minutes.
- a desired colored pattern can be formed by sequentially repeating the above-mentioned coating, exposure, development and baking using the photosensitive resin composition for black matrix and the photosensitive resin composition for pixels. ..
- the method for forming a colored pattern by photocuring has been described.
- a photosensitive resin composition containing a curing accelerator and a known epoxy resin is used instead of the photopolymerization initiator (D)
- an inkjet method can be used. It is also possible to form a desired colored pattern by applying the coating method and then heating.
- the molecular weight (Mw) means a standard polystyrene-equivalent weight average molecular weight measured by gel permeation chromatography (GPC) under the following conditions.
- GPC gel permeation chromatography
- A Developing solvent: Tetrahydrofuran Detector: Differential refractometer (Showdex RI-71S) (Showa Denko KK) Flow rate: 1 mL / min
- the refractive index means the refractive index of the copolymer (A) measured using a refractometer.
- the refractive index of the resin composition (sample) containing the copolymer (A) and the solvent (B) of the present invention is measured under the following conditions, and then the refractive index of the solvent (B) is measured under the following conditions.
- the content (solid content) of the copolymer (A) contained in the sample was measured according to JIS K6901 5.11, and the refractive index of the copolymer (A) alone contained in the sample was calculated using the following formula. calculate.
- Example 1 A production example of a resin composition (sample) containing the copolymer (A) and the solvent (B) of the present invention is shown below.
- Example 1 "Synthesis of Copolymer (A)" 302.4 g of propylene glycol monomethyl ether acetate was placed in a flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, and the mixture was stirred while substituting with nitrogen and heated to 80 ° C.
- Example 7 "Synthesis of Copolymer (A)"
- a-1A dicyclopentanyl methacrylate
- a-2 2,2,2-trifluoroethyl methacrylate
- a-4 methacrylic acid
- a solution containing the copolymer (A) of Example 7 was obtained.
- 118.8 g of propylene glycol monomethyl ether acetate was added as a solvent (B), and sample No. Got 7.
- the total amount of the monomers (a-1A), (a-2) and (a-4) is calculated as 100 mol%, the mixing ratio of each monomer and the fluorine equivalent of the carboxy group-containing copolymer (P2)
- Table 2 shows the molecular weight, acid value, hydroxyl group equivalent, unsaturated group equivalent, and refractive index of the polymer (A2).
- Example 8 "Synthesis of Copolymer (A)"
- a copolymer (A) of Example 8 was produced in the same manner as in Example 7 except that the mixing ratios of the monomers shown in Table 1 were used, and propylene glycol monomethyl ether acetate was added as a solvent (B) to obtain a sample. No. Got 8.
- Table 2 shows the molecular weight, acid value, hydroxyl group equivalent, unsaturated group equivalent, and refractive index of the copolymer (A2) contained in the sample.
- sample No. 1-8, No. 10 was used to prepare a transparent photosensitive resin composition.
- ⁇ Preparation of transparent photosensitive resin composition Sample No. 1-8, No. 10 parts by mass of pentaerythritol tetraacrylate (reactive diluent (C)) and 10 parts by mass of 2,2-dimethoxy-2-phenylacetophenone (photopolymerization initiator (D)) per 100 parts by mass of the solid content of 10.
- C pentaerythritol tetraacrylate
- D photopolymerization initiator
- propylene glycol monomethyl ether acetate was added so that the solvent (B) was 210 parts by mass to prepare a transparent photosensitive resin composition.
- the residue of the sample excluding the solvent is defined as "solid content”.
- ⁇ Pattern formation by transparent photosensitive resin composition The prepared transparent photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 2.5 ⁇ m, and then 3 ° C. at 100 ° C. The solvent was volatilized by heating for a minute. Next, the entire surface of the coating film was exposed with an apparatus (exposure amount: 80 mJ / cm 2 ), photocured, and then baked at 230 ° C. for 30 minutes to obtain a transparent resist which was a cured coating film.
- Tables 3 and 4 show the evaluation results of the thermal decomposition resistance and the yellowing resistance of the transparent resist.
- sample No. 1 to 11 were used to prepare a black photosensitive resin composition.
- ⁇ Preparation of black pigment dispersion> In a SUS container filled with 180 parts by mass of zirconia beads having a diameter of 0.5 mm, 10 parts by mass of carbon black, 34 parts by mass of propylene glycol monomethyl ether acetate, and 6 parts by mass of a dispersant (Disperbyk-manufactured by BYK Japan KK 161) was added and mixed by a paint shaker for 3 hours and dispersed to obtain a black pigment dispersion liquid.
- ⁇ Pattern formation with black photosensitive resin composition (with development)>
- the prepared black photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 1.0 ⁇ m, and then 3 ° C. at 100 ° C.
- the solvent was volatilized by heating for a minute.
- a line-and-space or dot-pattern photomask was placed on the substrate to expose the coating film (exposure amount 300 mJ / cm 2 ), and after photocuring, a 0.2 mass% potassium hydroxide aqueous solution was used. It was developed and further baked at 230 ° C. for 30 minutes to obtain a black resist as a cured coating film.
- the prepared black photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 1.0 ⁇ m, and then 3 ° C. at 100 ° C. The solvent was volatilized by heating for a minute. Next, the entire surface of the coating film was exposed (exposure amount 300 mJ / cm 2 ), photocured, and then baked at 230 ° C. for 30 minutes to obtain a black resist as a cured coating film.
- the black resist was evaluated for developability, solvent resistance, and reflectance.
- Tables 5 and 6 show the evaluation results of the developability, solvent resistance, and reflectance of the black resist.
- the photosensitive resin composition of the present invention can provide a resist that contributes to low reflection and high definition of all electronic material members such as microlenses and image display devices.
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Abstract
Description
本願は、2018年11月8日に、日本に出願された特願2018-210789号に基づき優先権を主張し、その内容をここに援用する。 The present invention relates to a copolymer, a resin composition containing the copolymer, and a resist.
The present application claims priority based on Japanese Patent Application No. 2018-210789 filed in Japan on November 8, 2018, and the content thereof is incorporated herein.
また、液晶や有機ELディスプレイ等の画像表示装置では、太陽光や蛍光灯等の外光が映り込むと、外光が画像表示装置の基板内まで届いた後に乱反射する。その結果、画面の視認性が低下する。そこで、視認性向上を目的に、画像表示装置基板を構成する各種部材を低反射率化させ、外光の映り込みを最小限に抑制する低反射ディスプレイの需要が高まっている。これらの部材としては、例えば、透明基板、カラーフィルター、ブラックマトリックス、カラムスペーサー、保護膜等が挙げられる。 Above all, the low reflectivity of electronic material members is emphasized in order to enhance the functionality of various devices. Therefore, in recent years, the development of members with the theme of low reflectivity has been earnestly studied. For example, in microlenses used in digital cameras, smartphones, etc., there is an increasing demand for coating a low reflectance layer along the surface of the microlens. By coating the low-reflectance layer, the reflected light from the concave portions between the lenses can be significantly suppressed, the S / N ratio can be improved, and a high-quality image with little noise can be realized.
In an image display device such as a liquid crystal display or an organic EL display, when external light such as sunlight or a fluorescent lamp is reflected, the external light diffuses after reaching the inside of the substrate of the image display device. As a result, the visibility of the screen is reduced. Therefore, for the purpose of improving visibility, there is an increasing demand for a low-reflection display in which various members constituting the image display device substrate are made to have a low reflectance to minimize the reflection of external light. Examples of these members include a transparent substrate, a color filter, a black matrix, a column spacer, and a protective film.
一般に、フォトリソグラフィ工法では、紫外線、電子線等の活性エネルギー線による露光、およびアルカリ現像液による現像工程がある。この工法に用いられる感光性樹脂組成物には、活性エネルギー線に対する感度およびアルカリ現像性が要求される。そのため、この工法に用いられる感光性樹脂組成物には、部材を形成する塗膜のバインダーとしてアルカリ可溶性樹脂が用いられる。その他、反応性希釈剤、光重合開始剤、そして必要に応じて着色剤等の添加剤が含まれる。 On the other hand, strict dimensional accuracy is required to manufacture a coating on the surface of a microlens or a member constituting an image display device substrate. When forming these members, a photolithography method is widely used in which the photosensitive resin composition is applied, exposed, developed, and baked, and the members are pinpointed without any defects such as pinholes at required portions. It is used.
Generally, the photolithography method includes exposure with active energy rays such as ultraviolet rays and electron beams, and a developing step with an alkali developing solution. The photosensitive resin composition used in this method is required to have sensitivity to active energy rays and alkali developability. Therefore, in the photosensitive resin composition used in this method, an alkali-soluble resin is used as the binder of the coating film forming the member. In addition, a reactive diluent, a photopolymerization initiator, and if necessary, an additive such as a colorant are included.
本発明は、上記課題を解決するためになされたものであり、光硬化性とアルカリ現像性の双方を発現しながら、優れた低屈折率を有するアクリル系樹脂を一液で提供し、その樹脂により、マイクロレンズや画像表示装置を一例としたあらゆる電子材料部材の低反射化および高精細化に寄与するレジストに用いられる感光性樹脂組成物を提供することを目的とする。 However, the conventional resin has a low degree of fluorine substitution in the fluorine-containing (meth) acrylate and a low composition ratio of the fluorine-containing (meth) acrylate in all the monomers, so that it is possible to provide a satisfactory low refractive index acrylic resin. Is insufficient. Further, the conventional resin is not a photosensitive resin that can be cured by active energy rays such as ultraviolet rays and electron beams, but exhibits photocurability by blending with other photosensitive resins and additives. For the purpose of improving productivity, a photosensitive resin composition that exhibits photocurability with a single liquid is in high demand, but a photosensitive acrylic resin having a satisfactory low refractive index has not been provided yet. Furthermore, fluorine-containing acrylic resins, including conventional resins, generally have poor affinity with alkali developers, and further improvement in alkali developability is necessary to satisfy the strict dimensional accuracy of the members. is there.
The present invention has been made in order to solve the above problems, and provides an acrylic resin having an excellent low refractive index in one liquid while exhibiting both photocurability and alkali developability, and the resin Accordingly, it is an object of the present invention to provide a photosensitive resin composition used for a resist that contributes to low reflection and high definition of all electronic material members such as microlenses and image display devices.
前記エポキシ基含有共重合体(P1)は、
炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および下記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、
下記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、
エポキシ基含有(メタ)アクリレート(a-3)由来の構成単位とを含有する共重合体であり、
酸価が20KOHmg/g以上であることを特徴とする共重合体。
The epoxy group-containing copolymer (P1) is
Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group;
A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2),
A copolymer containing a structural unit derived from an epoxy group-containing (meth) acrylate (a-3),
A copolymer having an acid value of 20 KOHmg / g or more.
[2] エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなるヒドロキシ基を有する不飽和基含有共重合体(A2-I)、及び
前記ヒドロキシ基を有する不飽和基含有共重合体(A2-I)のヒドロキシ基に、多塩基酸無水物(a-5)が付加してなる不飽和基含有共重合体(A2―II)からなる群から選択される少なくとも1種を含む共重合体(A2)であって、
前記カルボキシ基含有共重合体(P2)は、
炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および下記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、
下記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、
不飽和カルボン酸(a-4)由来の構成単位と
を含有する共重合体であり、
酸価が20KOHmg/g以上であることを特徴とする共重合体。
[2] Unsaturated group-containing copolymer (A2-) having a hydroxy group formed by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3) I), and the unsaturated group-containing copolymer (A2) obtained by adding the polybasic acid anhydride (a-5) to the hydroxy group of the unsaturated group-containing copolymer (A2-I) having the hydroxy group. -II) a copolymer (A2) containing at least one selected from the group consisting of
The carboxy group-containing copolymer (P2) is
Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group;
A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2),
A copolymer containing a structural unit derived from an unsaturated carboxylic acid (a-4),
A copolymer having an acid value of 20 KOHmg / g or more.
[3] 屈折率が1.50未満である、[1]又は[2]に記載の共重合体。
[4] 前記エポキシ基含有共重合体(P1)のフッ素当量が100g/mol以下である、[1]又は[3]に記載の共重合体。
[5]前記カルボキシ基含有共重合体(P2)のフッ素当量が100g/mol以下である、[2]又は[3]に記載の共重合体。
[6] 前記炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)がジシクロペンテニル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、イソボルニル(メタ)アクリレート、及びアダマンチル(メタ)アクリレートからなる群から選ばれる少なくとも1種を含む、[1]~[5]のいずれかに記載の共重合体。
[7] [1]~[6]のいずれかに記載の共重合体と溶剤(B)とを含有する樹脂組成物。
[8] 更に反応性希釈剤(C)を含有する[7]に記載の樹脂組成物。
[9] 更に光重合開始剤(D)を含有する[7]または[8]に記載の樹脂組成物。
[10] 着色剤(E)を含有し、
前記着色剤(E)が染料および顔料からなる群から選択される少なくとも1種である、[7]~[9]のいずれかに記載の樹脂組成物。
[11] [9]又は[10]に記載の樹脂組成物の硬化物からなるレジスト。 (In the formula (2), R3 represents a hydrogen atom or a methyl group, L represents —O—, —O—CH 2 —CH (OH) —CH 2 —, —O—NH—C (═O) —CH. 2 --CH 2-, each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is 0 to It is an integer of 12. However, at least three fluorine atoms are included in the formula (2).
[3] The copolymer according to [1] or [2], which has a refractive index of less than 1.50.
[4] The copolymer according to [1] or [3], wherein the epoxy group-containing copolymer (P1) has a fluorine equivalent of 100 g / mol or less.
[5] The copolymer according to [2] or [3], wherein the carboxy group-containing copolymer (P2) has a fluorine equivalent of 100 g / mol or less.
[6] The polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms is dicyclopentenyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isobornyl (meth) acrylate. And the copolymer according to any one of [1] to [5], containing at least one selected from the group consisting of, and adamantyl (meth) acrylate.
[7] A resin composition containing the copolymer according to any one of [1] to [6] and a solvent (B).
[8] The resin composition according to [7], which further contains a reactive diluent (C).
[9] The resin composition according to [7] or [8], which further contains a photopolymerization initiator (D).
[10] contains a colorant (E),
The resin composition according to any one of [7] to [9], wherein the colorant (E) is at least one selected from the group consisting of dyes and pigments.
[11] A resist comprising a cured product of the resin composition according to [9] or [10].
[第一実施態様]
本発明の共重合体(A)の第一実施態様は、エポキシ基含有共重合体(P1)のエポキシ基に、不飽和カルボン酸(a-4)が開環付加し、さらに、前記エポキシ基が開環して生じたヒドロキシ基に多塩基酸無水物(a-5)が付加してなる共重合体(A1)であり、酸価が20KOHmg/g以上であることを特徴とする。前記エポキシ基含有共重合体(P1)は、炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および上記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、上記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、エポキシ基含有(メタ)アクリレート(a-3)由来の構成単位とを含有する共重合体である。前記エポキシ基含有共重合体(P1)は、さらに、ヒドロキシ基含有(メタ)アクリレート(a-6)由来の構成単位を含むことが好ましい。ここで、(メタ)アクリレートとは、メタクリレートおよびアクリレートから選択される一種以上を意味する。 [Copolymer (A)]
[First embodiment]
The first embodiment of the copolymer (A) of the present invention is such that the unsaturated carboxylic acid (a-4) is ring-opened and added to the epoxy group of the epoxy group-containing copolymer (P1). Is a copolymer (A1) obtained by adding a polybasic acid anhydride (a-5) to the hydroxy group generated by ring opening, and is characterized by having an acid value of 20 KOHmg / g or more. The epoxy group-containing copolymer (P1) is a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a polymerizable unit represented by the above chemical formula (1). At least one selected from the group consisting of structural units derived from the monomer (a-1B), a structural unit derived from the fluorine-containing (meth) acrylate (a-2) represented by the chemical formula (2), and an epoxy group-containing It is a copolymer containing a structural unit derived from (meth) acrylate (a-3). The epoxy group-containing copolymer (P1) preferably further contains a constituent unit derived from a hydroxy group-containing (meth) acrylate (a-6). Here, the (meth) acrylate means one or more selected from methacrylate and acrylate.
本実施態様の共重合体(A1)に係るエポキシ基含有共重合体(P1)(以後、単に「共重合体(P1)」と言う場合もある。)は、炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)および下記化学式(1)で示される重合性モノマー(a-1B)からなる群から選択される少なくとも1種と、下記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)と、エポキシ基含有(メタ)アクリレート(a-3)とを含有するモノマー(M1)の共重合体である。エポキシ基含有共重合体(P1)のフッ素当量が100g/mol以下であることが好ましく、30~100g/molであることがより好ましく、40~100g/molであることが更に好ましい。
本実施態様の共重合体(P1)の上記モノマー(M1)は、さらに、ヒドロキシ基含有(メタ)アクリレート(a-6)を含むことが好ましい。ヒドロキシ基含有(メタ)アクリレート(a-6)を共重合させる場合、アルカリ現像性を更に高めることができる。
本実施態様の共重合体(P1)の上記モノマー(M1)は、上記モノマー(a-1A)、(a-1B)、(a-2)、(a-3)、(a-6)以外のその他の重合性モノマー(a-7)を含んでも良い。 [Epoxy group-containing copolymer (P1)]
The epoxy group-containing copolymer (P1) relating to the copolymer (A1) of the present embodiment (hereinafter sometimes simply referred to as “copolymer (P1)”) is a crosslinker having 10 to 20 carbon atoms. At least one selected from the group consisting of a polymerizable monomer (a-1A) having a cyclic hydrocarbon group and a polymerizable monomer (a-1B) represented by the following chemical formula (1) and the following chemical formula (2) It is a copolymer of the monomer (M1) containing the indicated fluorine-containing (meth) acrylate (a-2) and the epoxy group-containing (meth) acrylate (a-3). The fluorine equivalent of the epoxy group-containing copolymer (P1) is preferably 100 g / mol or less, more preferably 30 to 100 g / mol, and further preferably 40 to 100 g / mol.
The monomer (M1) of the copolymer (P1) of the present embodiment preferably further contains a hydroxy group-containing (meth) acrylate (a-6). When the hydroxy group-containing (meth) acrylate (a-6) is copolymerized, alkali developability can be further enhanced.
The above-mentioned monomer (M1) of the copolymer (P1) of the present embodiment is other than the above-mentioned monomers (a-1A), (a-1B), (a-2), (a-3) and (a-6). Other polymerizable monomer (a-7) may be included.
重合性モノマー(a-1A)(以後、単に「モノマー(a-1A)」と言う場合もある。)は、炭素数10~20の橋かけ環式炭化水素基を有する。ここで、橋かけ環式炭化水素とは、アダマンタン、ノルボルナンに代表される、下記式(3)または(4)で表される構造を有するものを意味し、橋かけ環式炭化水素基とは、当該構造における一部の水素を除いた残りの部分に相当する基をいう。また、重合性モノマー(a-1A)は、後述の重合性モノマー(a-1B)を含まないものとする。 [Polymerizable Monomer (a-1A)]
The polymerizable monomer (a-1A) (hereinafter sometimes simply referred to as “monomer (a-1A)”) has a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms. Here, the bridged cyclic hydrocarbon means one having a structure represented by the following formula (3) or (4) represented by adamantane and norbornane, and the bridged cyclic hydrocarbon group is , Refers to a group corresponding to the rest of the structure except for some hydrogen. Further, the polymerizable monomer (a-1A) does not include the later-described polymerizable monomer (a-1B).
重合性モノマー(a-1B)(以後、単に「モノマー(a-1B)」と言う場合もある。)は、下記の一般式(1)で示されるモノマーである。 [Polymerizable Monomer (a-1B)]
The polymerizable monomer (a-1B) (hereinafter sometimes simply referred to as “monomer (a-1B)”) is a monomer represented by the following general formula (1).
中でも、アダマンチル(メタ)アクリレート、上記式(5)で表される構造を有する(メタ)アクリレート、およびノルボルネンから選択される一種以上を用いることが好ましく、ジシクロペンテニル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、イソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレートおよびノルボルネンから選択される一種以上を用いることがより好ましい。 Use of the monomer (a-1A) and / or the monomer (a-1B) contributes to smooth coatability of the cured film, high thermal decomposition resistance, and high heat yellowing. Further, it is possible to suppress the decrease in the solubility of the copolymer in the solvent due to the presence of fluorine. One of the monomer (a-1A) and the monomer (a-1B) may be used, or both of them may be used.
Among them, it is preferable to use one or more selected from adamantyl (meth) acrylate, a (meth) acrylate having a structure represented by the above formula (5), and norbornene. Dicyclopentenyl (meth) acrylate, dicyclopenta It is more preferable to use one or more selected from nyl (meth) acrylate, isobornyl (meth) acrylate, adamantyl (meth) acrylate and norbornene.
フッ素含有(メタ)アクリレート(a-2)(以後、単に「モノマー(a-2)」と言う場合もある。)は、下記化学式(2)で示されるフッ素含有(メタ)アクリレートである。 [Fluorine-containing (meth) acrylate (a-2)]
The fluorine-containing (meth) acrylate (a-2) (hereinafter sometimes simply referred to as “monomer (a-2)”) is a fluorine-containing (meth) acrylate represented by the following chemical formula (2).
なかでも、共重合体(P1)の製造容易性の観点から、フッ素原子を3~20個有するフルオロアルキル(メタ)アクリレート(a-2)が好ましい。 As the fluorine-containing (meth) acrylate (a-2), a commercially available product may be used, or a reactive (meth) acrylic acid such as (meth) acrylic acid, glycidyl (meth) acrylate, or 2-isocyanatoethyl (meth) acrylate may be used. ) Acrylic acid derivative and fluoroalcohol may be self-condensed and prepared. Specific examples include 2,2,2-trifluoroethyl (meth) acrylate, 3,3,3-trifluoropropyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate and 3 , 3,4,4-Tetrafluorobutyl (meth) acrylate, 2,2,3,3,3-pentafluoropropyl (meth) acrylate, 3,3,4,4,4-pentafluorobutyl (meth) acrylate 1H, 1H-perfluoro-n-butyl (meth) acrylate, 1H, 1H-perfluoro-n-pentyl (meth) acrylate, 1H, 1H-perfluoro-n-hexyl (meth) acrylate, 1H, 1H-perfluoro-n -Octyl (meth) acrylate, 1H, 1H-perfluoro-n-decyl (meth) acrylate, 1H 1H-perfluoro-n-dodecyl (meth) acrylate, 1H, 1H-perfluoroisobutyl (meth) acrylate, 1H, 1H-perfluoroisooctyl (meth) acrylate, 1H, 1H-perfluoroisododecyl (meth) acrylate, 1H, 1H , 5H-octafluoropentyl (meth) acrylate, 1H, 1H, 5H-perfluoropentyl (meth) acrylate, 1H, 1H, 6H-perfluorohexyl (meth) acrylate, 1H, 1H, 7H-perfluoroheptyl (meth) acrylate, 1H, 1H, 8H-perfluorooctyl (meth) acrylate, 1H, 1H, 9H-perfluorononyl (meth) acrylate, 1H, 1H, 10H-perfluorodecyl (meth) acrylate, 1H, 1H, 11H Perfluoroundecyl (meth) acrylate, 1H, 1H, 12H-perfluorododecyl (meth) acrylate, 2- (perfluoro-n-propyl) ethyl (meth) acrylate, 2- (perfluoro-n-butyl) ethyl (meth) acrylate , 2- (perfluoro-n-hexyl) ethyl (meth) acrylate, 2- (perfluoro-n-octyl) ethyl (meth) acrylate, 2- (perfluoro-n-decyl) ethyl (meth) acrylate, 2- (perfluoro Isobutyl) ethyl (meth) acrylate, 2- (perfluoroisooctyl) ethyl (meth) acrylate, 1H, 1H, 2H, 2H-nonafluorohexyl (meth) acrylate, 1H, 1H, 2H, 2H-tridecafluorooctyl ( (Meth) acrylate, 1H, 1H, 2H, 2H-heptadecafluorodecyl (meth) acrylate and the like can be mentioned. These may be used alone or in combination of two or more.
Of these, fluoroalkyl (meth) acrylates (a-2) having 3 to 20 fluorine atoms are preferable from the viewpoint of easy production of the copolymer (P1).
エポキシ基含有(メタ)アクリレート(a-3)(以後、単に「モノマー(a-3)」と言う場合もある。)は、エポキシ基とエチレン性不飽和基を有するモノマーであれば、特に限定されない。具体例としては、グリシジル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート等が挙げられる。特に、入手のし易さおよび反応性の良さの観点から、グリシジル(メタ)アクリレートが好適である。 [Epoxy group-containing (meth) acrylate (a-3)]
The epoxy group-containing (meth) acrylate (a-3) (hereinafter sometimes simply referred to as “monomer (a-3)”) is not particularly limited as long as it is a monomer having an epoxy group and an ethylenically unsaturated group. Not done. Specific examples include glycidyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate glycidyl ether, and 3,4-epoxycyclohexylmethyl (meth) acrylate. In particular, glycidyl (meth) acrylate is preferable from the viewpoint of easy availability and good reactivity.
なお、ヒドロキシ基、カルボキシ基、およびエポキシ基を有する(メタ)アクリレートは、モノマー(a-3)とする。 The constitutional unit derived from the epoxy group-containing (meth) acrylate (a-3) and the unsaturated carboxylic acid (a-4) described later impart a photosensitive group that exhibits photocurability, and therefore, are included in one embodiment of the present invention. It is an essential constituent in the copolymer (A). By introducing a photosensitive group exhibiting photocurability, the cured film exhibits sufficient hardness and high solvent resistance. Further, it is possible to suppress the decrease in solubility of the copolymer in the solvent due to the presence of fluorine, a photosensitive resin composition obtained by mixing a fluororesin having no photocurability and another photocurable component In comparison, a photosensitive resin composition having a good affinity can be provided.
The (meth) acrylate having a hydroxy group, a carboxy group, and an epoxy group is a monomer (a-3).
ヒドロキシ基含有(メタ)アクリレート(a-6)としては、ヒドロキシ基を1つ以上含む(メタ)アクリレートであれば特に限定されない。具体例としては、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、3-ヒドロキシプロピル(メタ)アクリレート、3-ヒドロキシブチル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレート、3-ヒドロキシペンチル(メタ)アクリレート、4-ヒドロキシペンチル(メタ)アクリレート、5-ヒドロキシペンチル(メタ)アクリレート、4-ヒドロキシヘキシル(メタ)アクリレート、5-ヒドロキシヘキシル(メタ)アクリレート、6-ヒドロキシヘキシル(メタ)アクリレート、5-ヒドロキシ-3-メチル-ペンチル(メタ)アクリレート、シクロヘキサン-1,4-ジメタノール-モノ(メタ)アクリレート、2-(2-ヒドロキシエチルオキシ)エチル(メタ)アクリレート、2,3-ジヒドロキシ(メタ)アクリレート、ブタントリオールモノ(メタ)アクリレート、ペンタントリオールモノ(メタ)アクリレート等が挙げられる。
なお、ヒドロキシ基およびカルボキシ基を有する(メタ)アクリレートは、モノマー(a-6)とする。 [Hydroxy group-containing (meth) acrylate (a-6)]
The hydroxy group-containing (meth) acrylate (a-6) is not particularly limited as long as it is a (meth) acrylate containing one or more hydroxy groups. Specific examples include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 3-hydroxypentyl (meth) acrylate, 4-hydroxypentyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 4-hydroxyhexyl (meth) acrylate, 5-hydroxyhexyl (meth) acrylate, 6-hydroxyhexyl ( (Meth) acrylate, 5-hydroxy-3-methyl-pentyl (meth) acrylate, cyclohexane-1,4-dimethanol-mono (meth) acrylate, 2- (2-hydroxyethyloxy) ethyl (meth) a Relate, 2,3-dihydroxy (meth) acrylate, butane triol mono (meth) acrylate, pentane triol mono (meth) acrylate.
The (meth) acrylate having a hydroxy group and a carboxy group is a monomer (a-6).
本発明の一形態の共重合体(A)に係るエポキシ基含有共重合体(P1)は、前記モノマー(a-1A)、前記モノマー(a-1B)、前記モノマー(a-2)、前記モノマー(a-3)、および前記モノマー(a-6)以外の、その他の重合性モノマー(a-7)(以後、単に「モノマー(a-7)」と言う場合もある。)が共重合されていても良い。
その他の重合性モノマー(a-7)は、前記モノマー(a-1A)、(a-1B)、(a-2)、(a-3)に示した以外の共重合可能なモノマーである。このモノマー(a-7)は、一般にエチレン性不飽和基を有するラジカル重合性化合物であり、具体例としては、ブタジエン等のジエン類;メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソ-プロピル(メタ)アクリレート、n-ブチル(メタ)アクリルレート、sec-ブチル(メタ)アクリレート、イソ-ブチル(メタ)アクリレート、tert-ブチル(メタ)アクリルレート、ペンチル(メタ)アクリレート、ネオペンチル(メタ)アクリレート、ベンジル(メタ)アクリレート、イソアミル(メタ)アクリレート、ヘキシル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、ラウリル(メタ)アクリレート、ドデシル(メタ)アクリレート、シクロペンチル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、メチルシクロヘキシル(メタ)アクリレート、エチルシクロヘキシル(メタ)アクリレート、ロジン(メタ)アクリレート、アリル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、トリフェニルメチル(メタ)アクリレート、クミル(メタ)アクリレート、3-(N,N-ジメチルアミノ)プロピル(メタ)アクリレート、ナフタレン(メタ)アクリレート、アントラセン(メタ)アクリレート等の(メタ)アクリル酸エステル類;(メタ)アクリル酸アミド、(メタ)アクリル酸N,N-ジメチルアミド、(メタ)アクリル酸N,N-ジエチルアミド、(メタ)アクリル酸N,N-ジプロピルアミド、(メタ)アクリル酸N,N-ジ-イソ-プロピルアミド、(メタ)アクリル酸アントラセニルアミド等の(メタ)アクリル酸アミド;(メタ)アクリル酸アニリド、(メタ)アクリロイルニトリル、アクロレイン、塩化ビニル、塩化ビニリデン、フッ化ビニル、フッ化ビニリデン、N-ビニルピロリドン、ビニルピリジン、酢酸ビニル、ビニルトルエン等のビニル化合物;スチレン、スチレンのα-アルキル、o-アルキル、m-アルキル、p-アルキル、ニトロ、シアノ、アミド誘導体;N-フェニルマレイミド、N-シクロヘキシルマレイミド、N-ラウリルマレイミド、N-(4-ヒドロキシフェニル)マレイミド等のマレイミド類;シトラコン酸ジエチル、マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチル等の不飽和ジカルボン酸ジエステル等が挙げられる。これらは、必要に応じて、単独でまたは2種以上を組み合わせて用いることができる。 [Other polymerizable monomers (a-7)]
The epoxy group-containing copolymer (P1) relating to the copolymer (A) according to one aspect of the present invention includes the monomer (a-1A), the monomer (a-1B), the monomer (a-2), and Copolymerization of the monomer (a-3) and other polymerizable monomer (a-7) other than the above-mentioned monomer (a-6) (hereinafter sometimes simply referred to as “monomer (a-7)”). It may be done.
The other polymerizable monomer (a-7) is a copolymerizable monomer other than the above-mentioned monomers (a-1A), (a-1B), (a-2) and (a-3). This monomer (a-7) is generally a radically polymerizable compound having an ethylenically unsaturated group, and specific examples thereof include dienes such as butadiene; methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl. (Meth) acrylate, iso-propyl (meth) acrylate, n-butyl (meth) acrylate, sec-butyl (meth) acrylate, iso-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) ) Acrylate, neopentyl (meth) acrylate, benzyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate, dodecyl (meth) acrylate, cyclopentyl (Meth) acrylate, cyclohexyl (meth) acrylate, methylcyclohexyl (meth) acrylate, ethylcyclohexyl (meth) acrylate, rosin (meth) acrylate, allyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, triphenylmethyl (meth) (Meth) acrylic acid esters such as acrylate, cumyl (meth) acrylate, 3- (N, N-dimethylamino) propyl (meth) acrylate, naphthalene (meth) acrylate, anthracene (meth) acrylate; (meth) acrylic acid Amide, (meth) acrylic acid N, N-dimethylamide, (meth) acrylic acid N, N-diethylamide, (meth) acrylic acid N, N-dipropylamide, (meth) acrylic acid N, N-di-iso -Propyl Amide, (meth) acrylic acid amide such as (meth) acrylic acid anthracenylamide; (meth) acrylic acid anilide, (meth) acryloylnitrile, acrolein, vinyl chloride, vinylidene chloride, vinyl fluoride, vinylidene fluoride, N -Vinyl compounds such as vinylpyrrolidone, vinylpyridine, vinyl acetate and vinyltoluene; styrene, α-alkyl, o-alkyl, m-alkyl, p-alkyl, nitro, cyano, amide derivatives of styrene; N-phenylmaleimide, N -Maleimides such as -cyclohexylmaleimide, N-laurylmaleimide and N- (4-hydroxyphenyl) maleimide; unsaturated dicarboxylic acid diesters such as diethyl citraconic acid, diethyl maleate, diethyl fumarate, diethyl itaconic acid and the like. These may be used alone or in combination of two or more, if necessary.
本発明に係る共重合体(P1)において、各モノマー由来構造の割合は、共重合反応のために添加する各重合性モノマーのモル比の値を用いる。各モノマーの配合割合(モル比)について特に制限はないが、エポキシ基含有共重合体(P1)を構成するモノマー(M1)の合計を100モル%とした場合に、モノマー(a-1A)およびモノマー(a-1B)の合計配合割合は、好ましくは1~40モル%、より好ましくは2~20モル%である。モノマー(a-1A)およびモノマー(a-1B)の配合割合が1モル%以上であると、所望の耐熱分解性や耐熱黄変性、および溶剤への良好な溶解性が得られる。一方、この配合割合が40モル%以下であると、モノマー(a-2)やモノマー(a-3)の配合割合が十分多くなり、所望の屈折率や硬化性を有する共重合体(A)が得られる。また、モノマー(a-2)の配合割合は、好ましくは20~90モル%、より好ましくは30~85モル%である。モノマー(a-2)の配合割合が20モル%以上であると、屈折率が十分に低い共重合体(A)を得ることができる。モノマー(a-2)の配合割合が90モル%以下であると、モノマー(a-1A)および/またはモノマー(a-1B)ならびにモノマー(a-3)の配合割合が十分多くなり、所望の耐熱分解性や硬化性、および溶剤への良好な溶解性を有する共重合体(A)が得られる。モノマー(a-3)の配合割合は、好ましくは9~70モル%、より好ましくは13~65モル%である。モノマー(a-3)の配合割合が9モル%以上であると、感光性樹脂組成物としたときに十分な硬化性を発現することができ、かつ光硬化性を持たないフッ素樹脂と他の光硬化性成分とを混合した感光性樹脂組成物と比べ、親和性の良い感光性樹脂組成物を提供することができる。モノマー(a-3)の配合割合が70モル%以下であると、モノマー(a-1A)および/またはモノマー(a-1B)ならびにモノマー(a-2)の配合割合が十分多くなり、所望の耐熱分解性や屈折率を有する共重合体(A)が得られる。モノマー(a-6)の配合割合は、好ましくは0~50%、より好ましくは0~20%である。 [Ratio of structures derived from each monomer of the epoxy group-containing copolymer (P1)]
In the copolymer (P1) according to the present invention, the ratio of the structure derived from each monomer is the value of the molar ratio of each polymerizable monomer added for the copolymerization reaction. The mixing ratio (molar ratio) of each monomer is not particularly limited, but when the total amount of the monomers (M1) constituting the epoxy group-containing copolymer (P1) is 100 mol%, the monomer (a-1A) and The total blending ratio of the monomer (a-1B) is preferably 1 to 40 mol%, more preferably 2 to 20 mol%. When the mixing ratio of the monomer (a-1A) and the monomer (a-1B) is 1 mol% or more, desired thermal decomposition resistance, thermal yellowing resistance, and good solubility in a solvent can be obtained. On the other hand, when the blending ratio is 40 mol% or less, the blending ratio of the monomer (a-2) and the monomer (a-3) becomes sufficiently large, and the copolymer (A) having a desired refractive index and curability. Is obtained. The mixing ratio of the monomer (a-2) is preferably 20 to 90 mol%, more preferably 30 to 85 mol%. When the blending ratio of the monomer (a-2) is 20 mol% or more, the copolymer (A) having a sufficiently low refractive index can be obtained. If the blending ratio of the monomer (a-2) is 90 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-3) will be sufficiently high, and the desired amount will be obtained. A copolymer (A) having thermal decomposition resistance, curability, and good solubility in a solvent can be obtained. The mixing ratio of the monomer (a-3) is preferably 9 to 70 mol%, more preferably 13 to 65 mol%. When the blending ratio of the monomer (a-3) is 9 mol% or more, sufficient curability can be exhibited when the photosensitive resin composition is formed, and the fluororesin and other photocurable resin having no photocurability can be used. It is possible to provide a photosensitive resin composition having good affinity as compared with a photosensitive resin composition in which a photocurable component is mixed. If the blending ratio of the monomer (a-3) is 70 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) will be sufficiently high, and the desired amount will be obtained. A copolymer (A) having thermal decomposition resistance and refractive index can be obtained. The blending ratio of the monomer (a-6) is preferably 0 to 50%, more preferably 0 to 20%.
本発明に係るエポキシ基含有共重合体(P)は共重合反応を用いて製造することができる。本発明において行われる共重合反応は、当該技術分野において公知のラジカル重合方法に従って行うことができる。例えば、共重合に用いるモノマーを溶剤に溶解した後、その溶液に重合開始剤を添加し、50~130℃で1~20時間反応させればよい。また、50~130℃に調整した溶剤に、共重合に用いるモノマーと重合開始剤を滴下しながら反応させてもよい。 [Copolymerization reaction (method for producing epoxy group-containing copolymer (P1)]]
The epoxy group-containing copolymer (P) according to the present invention can be produced by using a copolymerization reaction. The copolymerization reaction carried out in the present invention can be carried out according to a radical polymerization method known in the art. For example, a monomer used for copolymerization may be dissolved in a solvent, a polymerization initiator may be added to the solution, and the reaction may be performed at 50 to 130 ° C. for 1 to 20 hours. Alternatively, the monomer used for the copolymerization and the polymerization initiator may be added dropwise to the solvent adjusted to 50 to 130 ° C. for the reaction.
これらは、単独でまたは2種以上を組み合わせて用いることができ、重合温度に応じて適当な半減期のラジカル重合開始剤を選択することが望ましい。 The polymerization initiator that can be used in this copolymerization reaction is not particularly limited as long as it can initiate radical polymerization, and a commonly used organic peroxide catalyst or azo compound can be used. You can Specifically, azobisisobutyronitrile, azobisisovaleronitrile, 2,2'-azobis (2,4-dimethylvaleronitrile), azobis (2-methylpropionic acid) dimethyl, benzoyl peroxide, dicumyl Peroxide, diisopropyl peroxide, di-t-butyl peroxide, t-butyl peroxybenzoate, t-hexyl peroxybenzoate, t-butyl peroxy-2-ethylhexanoate, t-hexyl peroxy-2- Examples thereof include ethylhexanoate and 1,1,3,3-tetramethylbutylperoxy-2-ethylhexanoate.
These may be used alone or in combination of two or more, and it is desirable to select a radical polymerization initiator having an appropriate half-life according to the polymerization temperature.
不飽和基含有共重合体(A1)は、上記エポキシ基含有共重合体(P1)のエポキシ基に、不飽和カルボン酸(a-4)が開環付加し、さらに、前記エポキシ基が開環して生じたヒドロキシ基およびモノマー(a-6)のヒドロキシ基に多塩基酸無水物(a-5)が付加してなる。 [Unsaturated group-containing copolymer (A1)]
The unsaturated group-containing copolymer (A1) is obtained by ring-opening addition of the unsaturated carboxylic acid (a-4) to the epoxy group of the epoxy group-containing copolymer (P1), and further by opening the epoxy group. The polybasic acid anhydride (a-5) is added to the resulting hydroxy group and the hydroxy group of the monomer (a-6).
また、エポキシ基の全量を不飽和カルボン酸(a-4)と反応させず一部を残すことで、熱による硬化性を同時に発現させることもできる。 The copolymer (A1) of the present embodiment is excellent in photosensitivity because it contains the structural unit derived from the addition reaction in which the unsaturated carboxylic acid (a-4) and the polybasic acid anhydride (a-5) participate. At the same time when the double bond is introduced, a hydroxy group having excellent alkali developability can be obtained by ring opening of the epoxy group. Further, by adding a polybasic acid anhydride to the obtained hydroxy group, a carboxy group can be introduced to enhance the alkali developability. With this structural unit, sufficient hardness of the cured product is exhibited, and high solvent resistance is exhibited. Further, by introducing an acidic group or a hydroxy group as an alkali developing group, the affinity of the copolymer with an alkali developing solution is increased, and a highly precise curing pattern can be formed, and strict dimensional accuracy is realized. To do.
Further, the curability due to heat can be simultaneously exhibited by leaving the whole amount of the epoxy group without reacting with the unsaturated carboxylic acid (a-4).
不飽和カルボン酸(a-4)(以後、単に「モノマー(a-4)」と言う場合もある。)としては、酸基の中でもとりわけエポキシ基と反応性の良いカルボキシ基とエチレン性不飽和基を有するモノマーであれば特に限定されない。モノマーの具体例としては、(メタ)アクリル酸、イタコン酸、クロトン酸、桂皮酸、2-(メタ)アクリロイルオキシエチルコハク酸、2-(メタ)アクリロイルオキシエチルフタル酸、2-(メタ)アクリロイルオキシエチルヘキサヒドロフタル酸等が挙げられる。特に、入手のし易さおよび反応性の良さの観点から、(メタ)アクリル酸が好適である。 [Unsaturated carboxylic acid (a-4)]
The unsaturated carboxylic acid (a-4) (hereinafter sometimes simply referred to as “monomer (a-4)”) includes, among acid groups, a carboxy group which has a high reactivity with an epoxy group and an ethylenic unsaturated group. There is no particular limitation as long as it is a monomer having a group. Specific examples of the monomer include (meth) acrylic acid, itaconic acid, crotonic acid, cinnamic acid, 2- (meth) acryloyloxyethylsuccinic acid, 2- (meth) acryloyloxyethylphthalic acid, 2- (meth) acryloyl Examples thereof include oxyethylhexahydrophthalic acid. In particular, (meth) acrylic acid is preferable from the viewpoints of easy availability and good reactivity.
多塩基酸無水物としては、ヒドロキシ基と反応性の良い酸無水物構造を有するものであれば、特に限定されないが、反応後に副生成物が発生しない環構造を有するものが好適である。具体的には、1,2,3,6-テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、4-メチルヘキサヒドロ無水フタル酸、ビシクロ[2.2.1]ヘプタン-2,3-ジカルボン酸無水物、メチルビシクロ[2.2.1]ヘプタン-2,3-ジカルボン酸無水物、無水コハク酸、オクテニルコハク酸無水物等が挙げられる。 [Polybasic acid anhydride (a-5)]
The polybasic acid anhydride is not particularly limited as long as it has an acid anhydride structure having good reactivity with a hydroxy group, but a polybasic acid anhydride having a ring structure that does not generate a by-product after the reaction is preferable. Specifically, 1,2,3,6-tetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, bicyclo [2.2.1] heptane-2,3-dicarboxylic anhydride , Methylbicyclo [2.2.1] heptane-2,3-dicarboxylic acid anhydride, succinic anhydride, octenylsuccinic anhydride and the like.
R11は、炭素数10~20の橋かけ環式炭化水素基を有する置換基である。Lは-O-、-O-CH2-CH(OH)-CH2-、-O-NH-C(=O)-CH2-CH2-のいずれかの鎖である。Zはそれぞれ独立して水素原子、フッ素原子、CF3基、C2F5基、C3F7基またはヒドロキシ基を表し、nは0~12の整数である。ただし、式(6)中、少なくともフッ素原子を3つ以上含む。
R12~R14はそれぞれ独立に、水素原子またはメチル基を表す。R15の一方はヒドロキシ基であり、もう一方は下記化学式(7)で示される置換基である。また、R16の一方は下記化学式(7)で示される置換基であり、もう一方は下記化学式(8)で示される置換基である。L’は置換基を有しても良い2価の炭素数1~6の炭化水素基であり、L”は水素原子もしくはL”およびL’を結び環状構造を取る炭化水素基である。
x1、x2、y、a、b、cは、各構成単位のモル数比であり、y、a、bは0より大きく、x1、x2、cは0でもよい。ただし、x1およびx2が同時に0になることはない。各構成単位同士の結合順は式に示すものに限らず、ブロックポリマーあるいはランダムポリマーを形成してもよい。*は結合手を表す。) (In the formula (6), X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 are each independently It is a hydrocarbon group having 1 to 20 carbon atoms which may have a hydrogen atom, a carboxy group or a substituent, and may have a cyclic structure connecting R1 and R2.
R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms. L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C (═O) —CH 2 —CH 2 —. Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12. However, in the formula (6), at least three fluorine atoms are included.
R12 to R14 each independently represent a hydrogen atom or a methyl group. One of R15 is a hydroxy group and the other is a substituent represented by the following chemical formula (7). Further, one of R16 is a substituent represented by the following chemical formula (7), and the other is a substituent represented by the following chemical formula (8). L ′ is a divalent hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and L ″ is a hydrogen atom or a hydrocarbon group which connects L ″ and L ′ to form a cyclic structure.
x1, x2, y, a, b, and c are molar ratios of the respective structural units, y, a, and b are larger than 0, and x1, x2, and c may be 0. However, x1 and x2 are never 0 at the same time. The bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed. * Represents a bond. )
本発明に係る不飽和基含有共重合体(A1)は、エポキシ基が存在する共重合体(P1)の溶液に重合禁止剤および触媒を添加した後、不飽和カルボン酸(a-4)を添加し、50~150℃、好ましくは80~130℃の条件下でエポキシ基を開環付加反応させてから、多塩基酸無水物(a-5)を添加し、エポキシ基の開環付加反応と同様の条件下で反応することで、製造することができる。 [Method for producing unsaturated group-containing copolymer (A1)]
The unsaturated group-containing copolymer (A1) according to the present invention is obtained by adding a polymerization inhibitor and a catalyst to a solution of the copolymer (P1) having an epoxy group and then adding the unsaturated carboxylic acid (a-4). After the addition, the epoxy group is subjected to a ring-opening addition reaction under the condition of 50 to 150 ° C., preferably 80 to 130 ° C., and then the polybasic acid anhydride (a-5) is added to perform the ring-opening addition reaction of the epoxy group. It can be produced by reacting under the same conditions as.
本発明の共重合体(A)の第二実施態様は、エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなるヒドロキシ基を有する不飽和基含有共重合体(A2-I)であり、酸価が20KOHmg/g以上であることを特徴する。エポキシ基含有共重合体(P2)は、炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および上記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、上記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、不飽和カルボン酸(a-4)由来の構成単位とを含有する共重合体である。ここで、(メタ)アクリレートとは、メタクリレートおよびアクリレートから選択される一種以上を意味する。 [Second embodiment]
The second embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3). It is an unsaturated group-containing copolymer (A2-I) having a group and is characterized by having an acid value of 20 KOHmg / g or more. The epoxy group-containing copolymer (P2) is a structural unit derived from the polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and the polymerizable monomer represented by the chemical formula (1). At least one selected from the group consisting of structural units derived from (a-1B), a structural unit derived from the fluorine-containing (meth) acrylate (a-2) represented by the chemical formula (2), and an unsaturated carboxylic acid. It is a copolymer containing a structural unit derived from (a-4). Here, the (meth) acrylate means one or more selected from methacrylate and acrylate.
本実施態様の共重合体(A2-I)に係るカルボキシ基含有共重合体(P2)(以後、単に「共重合体(P2)」と言う場合もある。)は、炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)および上記化学式(1)で示される重合性モノマー(a-1B)からなる群から選択される少なくとも1種と、上記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)と、不飽和カルボン酸(a-4)とを含有するモノマー(M2)の共重合体である。カルボキシ基含有共重合体(P2)のフッ素当量が100g/mol以下であることが好ましく、30~100g/molであることがより好ましく、40~100g/molであることが更に好ましい。
本実施態様の共重合体(P2)の上記モノマー(M2)は、さらに、ヒドロキシ基含有(メタ)アクリレート(a-6)を含むことが好ましい。ヒドロキシ基含有(メタ)アクリレート(a-6)を共重合させる場合、アルカリ現像性を更に高めることができる。また、本実施態様の共重合体(P2)の上記モノマー(M2)は、その他の重合性モノマー(a-7)を含んでもよい。 [Carboxy group-containing copolymer (P2)]
The carboxy group-containing copolymer (P2) (hereinafter sometimes simply referred to as “copolymer (P2)”) related to the copolymer (A2-I) of the present embodiment has 10 to 20 carbon atoms. At least one selected from the group consisting of a polymerizable monomer having a bridged cyclic hydrocarbon group (a-1A) and a polymerizable monomer represented by the chemical formula (1) (a-1B); ) Is a copolymer of the monomer (M2) containing the fluorine-containing (meth) acrylate (a-2) and the unsaturated carboxylic acid (a-4). The fluorine equivalent of the carboxy group-containing copolymer (P2) is preferably 100 g / mol or less, more preferably 30 to 100 g / mol, and further preferably 40 to 100 g / mol.
The monomer (M2) of the copolymer (P2) of this embodiment preferably further contains a hydroxy group-containing (meth) acrylate (a-6). When the hydroxy group-containing (meth) acrylate (a-6) is copolymerized, alkali developability can be further enhanced. Further, the above-mentioned monomer (M2) of the copolymer (P2) of the present embodiment may contain other polymerizable monomer (a-7).
本発明に係る共重合体(P2)において、各モノマー由来構造の割合は、共重合反応ために添加する各重合性モノマーのモル比の値を用いる。各モノマーの配合割合(モル比)について特に制限はないが、カルボキシ基含有共重合体(P2)を構成するモノマー(M2)の合計を100モル%とした場合に、モノマー(a-1A)およびモノマー(a-1B)の合計配合割合は、好ましくは1~40モル%、より好ましくは2~20モル%である。モノマー(a-1A)およびモノマー(a-1B)の配合割合が1モル%以上であると、所望の耐熱分解性や耐熱黄変性、および溶剤への良好な溶解性が得られる。一方、この配合割合が40モル%以下であると、モノマー(a-2)やモノマー(a-4)の配合割合が十分多くなり、所望の屈折率や硬化性を有する共重合体(A)が得られる。また、モノマー(a-2)の配合割合は、好ましくは20~90モル%、より好ましくは30~85モル%である。モノマー(a-2)の配合割合が20モル%以上であると、屈折率が十分に低い共重合体(A)を得ることができる。モノマー(a-2)の配合割合が90モル%以下であると、モノマー(a-1A)および/またはモノマー(a-1B)ならびにモノマー(a-4)の配合割合が十分多くなり、所望の耐熱分解性や硬化性、および溶剤への良好な溶解性を有する共重合体(A)が得られる。モノマー(a-4)の配合割合は、好ましくは9~70モル%、より好ましくは13~65モル%である。モノマー(a-4)の配合割合が9モル%以上であると、感光性樹脂組成物としたときに十分な硬化性を発現することができ、かつ光硬化性を持たないフッ素樹脂と他の光硬化性成分とを混合した感光性樹脂組成物と比べ、親和性の良い感光性樹脂組成物を提供することができる。モノマー(a-4)の配合割合が70モル%以下であると、モノマー(a-1A)および/またはモノマー(a-1B)ならびにモノマー(a-2)の配合割合が十分多くなり、所望の耐熱分解性や屈折率を有する共重合体(A2)が得られる。モノマー(a-6)の配合割合は、好ましくは0~50モル%、より好ましくは0~20モル%である。 [Ratio of structures derived from each monomer of carboxy group-containing copolymer (P2)]
In the copolymer (P2) according to the present invention, the ratio of each monomer-derived structure is the value of the molar ratio of each polymerizable monomer added for the copolymerization reaction. The mixing ratio (molar ratio) of each monomer is not particularly limited, but when the total amount of the monomers (M2) constituting the carboxy group-containing copolymer (P2) is 100 mol%, the monomer (a-1A) and The total blending ratio of the monomer (a-1B) is preferably 1 to 40 mol%, more preferably 2 to 20 mol%. When the mixing ratio of the monomer (a-1A) and the monomer (a-1B) is 1 mol% or more, desired thermal decomposition resistance, thermal yellowing resistance, and good solubility in a solvent can be obtained. On the other hand, when the blending ratio is 40 mol% or less, the blending ratio of the monomer (a-2) or the monomer (a-4) becomes sufficiently large, and the copolymer (A) having a desired refractive index and curability. Is obtained. The mixing ratio of the monomer (a-2) is preferably 20 to 90 mol%, more preferably 30 to 85 mol%. When the blending ratio of the monomer (a-2) is 20 mol% or more, the copolymer (A) having a sufficiently low refractive index can be obtained. When the blending ratio of the monomer (a-2) is 90 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-4) is sufficiently high, and the desired amount is obtained. A copolymer (A) having thermal decomposition resistance, curability, and good solubility in a solvent can be obtained. The mixing ratio of the monomer (a-4) is preferably 9 to 70 mol%, more preferably 13 to 65 mol%. When the blending ratio of the monomer (a-4) is 9 mol% or more, sufficient curability can be exhibited when the photosensitive resin composition is prepared, and the fluororesin and other photocurable resins which do not have photocurability can be obtained. It is possible to provide a photosensitive resin composition having good affinity as compared with a photosensitive resin composition in which a photocurable component is mixed. If the blending ratio of the monomer (a-4) is 70 mol% or less, the blending ratio of the monomer (a-1A) and / or the monomer (a-1B) and the monomer (a-2) will be sufficiently high, and the desired amount will be obtained. A copolymer (A2) having thermal decomposition resistance and refractive index is obtained. The mixing ratio of the monomer (a-6) is preferably 0 to 50 mol%, more preferably 0 to 20 mol%.
本発明に係るカルボキシ基含有共重合体(P2)は、第一実施態様に係る共重合体(P1)と同様に、共重合反応を用いて製造することができる。 [Copolymerization Reaction (Method for Producing Carboxy Group-Containing Copolymer (P2))]
The carboxy group-containing copolymer (P2) according to the present invention can be produced by using a copolymerization reaction, like the copolymer (P1) according to the first embodiment.
不飽和基含有共重合体(A2-I)は、エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなる。 [Unsaturated group-containing copolymer (A2-I)]
The unsaturated group-containing copolymer (A2-I) is obtained by ring-opening addition of the carboxy group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3).
R11は、炭素数10~20の橋かけ環式炭化水素基を有する置換基である。Lは-O-、-O-CH2-CH(OH)-CH2-、-O-NH-C(=O)-CH2-CH2-のいずれかの鎖である。Zはそれぞれ独立して水素原子、フッ素原子、CF3基、C2F5基、C3F7基またはヒドロキシ基を表し、nは0~12の整数である。ただし、式(9-I)中、少なくともフッ素原子を3つ以上含む。
R12、R13、R20はそれぞれ独立に、水素原子またはメチル基を表し、R21の一方は水素原子であり、もう一方は下記化学式(10)で示される置換基である。
x1、x2、y、d、eは、各構成単位のモル数比であり、y、d、eは0より大きく、x1、x2が0でもよい。ただし、x1およびx2が同時に0になることはない。各構成単位同士の結合順は式に示すものに限らず、ブロックポリマーあるいはランダムポリマーを形成してもよい。) (In formula (9-I), X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 are each independently A hydrogen atom, a carboxy group or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent and may have a cyclic structure connecting R1 and R2.
R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms. L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C (═O) —CH 2 —CH 2 —. Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12. However, in the formula (9-I), at least three fluorine atoms are contained.
R12, R13, and R20 each independently represent a hydrogen atom or a methyl group, one of R21 is a hydrogen atom, and the other is a substituent represented by the following chemical formula (10).
x1, x2, y, d, and e are molar ratios of the respective constituent units, y, d, and e are larger than 0, and x1 and x2 may be 0. However, x1 and x2 are never 0 at the same time. The bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed. )
本発明に係る不飽和基含有共重合体(A2-I)は、カルボキシ基が存在する共重合体(P2)の溶液に重合禁止剤および触媒を添加した後、エポキシ基含有(メタ)アクリレート(a-3)を添加し、第一実施態様のエポキシ基の開環付加反応と同様な条件で、反応させることで製造することができる。 [Method for producing unsaturated group-containing copolymer (A2-I)]
The unsaturated group-containing copolymer (A2-I) according to the present invention is obtained by adding a polymerization inhibitor and a catalyst to a solution of the copolymer (P2) having a carboxy group, and then adding an epoxy group-containing (meth) acrylate ( It can be produced by adding a-3) and reacting under the same conditions as in the ring-opening addition reaction of the epoxy group of the first embodiment.
本発明の共重合体(A)の第三実施態様は、エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなるヒドロキシ基を有する不飽和基含有共重合体(A2-I)のヒドロキシ基に、多塩基酸無水物(a-5)が付加してなる不飽和基含有共重合体(A2―II)であり、酸価が20KOHmg/g以上であることを特徴とする。第三実施態様に係る不飽和基含有共重合体(A2-I)は、第二実施態様に係る不飽和基含有共重合体(A2-I)と同じであるので、説明を省略する。 [Third embodiment]
The third embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3). An unsaturated group-containing copolymer (A2-II) obtained by adding a polybasic acid anhydride (a-5) to a hydroxy group of an unsaturated group-containing copolymer (A2-I) having a group, The acid value is 20 KOHmg / g or more. Since the unsaturated group-containing copolymer (A2-I) according to the third embodiment is the same as the unsaturated group-containing copolymer (A2-I) according to the second embodiment, the description thereof will be omitted.
不飽和基含有共重合体(A2―II)は、上記不飽和基含有共重合体(A2-I)のヒドロキシ基に、多塩基酸無水物(a-5)が付加してなる不飽和基含有共重合体である。上記ヒドロキシ基は、エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基にカルボキシ基含有共重合体(P2)が開環付加して生じたヒドロキシ基および任意成分であるモノマー(a-6)のヒドロキシ基である。 [Unsaturated group-containing copolymer (A2-II)]
The unsaturated group-containing copolymer (A2-II) is an unsaturated group obtained by adding a polybasic acid anhydride (a-5) to the hydroxy group of the unsaturated group-containing copolymer (A2-I). It is a containing copolymer. The hydroxy group is a hydroxy group formed by ring-opening addition of the carboxyl group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3) and a monomer (a-6) which is an optional component. ) Is a hydroxy group.
アルカリ現像性基としてカルボキシ基やヒドロキシ基を導入することで、共重合体のアルカリ現像液との親和性が高まり、高精細な硬化パターンを形成することができ、厳密な寸法精度を実現する。
また、不飽和カルボン酸の全量をエポキシ基と反応させず一部を残すことで、カルボン酸も同時に導入することができる。さらに、得られたヒドロキシ基に多塩基酸無水物を付加させ、カルボン酸の導入量を増やすこともできる。 The copolymer (A2-II) of the present embodiment contains the structural unit derived from the addition reaction in which the epoxy group-containing (meth) acrylate (a-3) and the polybasic acid anhydride (a-5) participate. At the same time as introducing a double bond having excellent photosensitivity, a hydroxy group having excellent alkali developability can be obtained by ring opening of the epoxy group. With this structural unit, sufficient hardness of the cured product is exhibited, and high solvent resistance is exhibited. Further, the carboxy group can be introduced at the same time by leaving the whole amount of the carboxy group contained in the carboxy group-containing copolymer (P2) with the epoxy group and leaving a part thereof. It is also possible to add a polybasic acid anhydride (a-5) to the hydroxy group to increase the amount of carboxylic acid introduced.
By introducing a carboxy group or a hydroxy group as an alkali developing group, the affinity of the copolymer with an alkali developing solution is increased, a highly precise curing pattern can be formed, and strict dimensional accuracy is realized.
In addition, the carboxylic acid can be introduced at the same time by not reacting the whole amount of the unsaturated carboxylic acid with the epoxy group and leaving a part thereof. Furthermore, the amount of carboxylic acid introduced can be increased by adding a polybasic acid anhydride to the obtained hydroxy group.
R11は、炭素数10~20の橋かけ環式炭化水素基を有する置換基である。Lは-O-、-O-CH2-CH(OH)-CH2-、-O-NH-C(=O)-CH2-CH2-のいずれかの鎖である。Zはそれぞれ独立して水素原子、フッ素原子、CF3基、C2F5基、C3F7基またはヒドロキシ基を表し、nは0~12の整数である。ただし、式(9-II)中、少なくともフッ素原子を3つ以上含む。
R12、R13、R20はそれぞれ独立に、水素原子またはメチル基を表し、R23は下記化学式(8)で示される置換基である。R21の一方は水素原子であり、もう一方は下記化学式(10)で示される置換基である。
x1、x2、y、d、e、fは、各構成単位のモル数比であり、y、d、e、fは0より大きく、x1、x2が0でもよい。ただし、x1およびx2が同時に0になることはない。各構成単位同士の結合順は式に示すものに限らず、ブロックポリマーあるいはランダムポリマーを形成してもよい。) (In the formula (9-II), X and X ′ each independently represent a hydrogen atom, a linear or branched hydrocarbon group having 1 to 4 carbon atoms, and R 1 and R 2 are each independently A hydrogen atom, a carboxy group or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent and may have a cyclic structure connecting R1 and R2.
R11 is a substituent having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms. L is a chain of any one of —O—, —O—CH 2 —CH (OH) —CH 2 —, and —O—NH—C (═O) —CH 2 —CH 2 —. Each Z independently represents a hydrogen atom, a fluorine atom, a CF 3 group, a C 2 F 5 group, a C 3 F 7 group or a hydroxy group, and n is an integer of 0 to 12. However, in the formula (9-II), at least three fluorine atoms are contained.
R12, R13, and R20 each independently represent a hydrogen atom or a methyl group, and R23 is a substituent represented by the following chemical formula (8). One of R21 is a hydrogen atom and the other is a substituent represented by the following chemical formula (10).
x1, x2, y, d, e, and f are molar ratios of the respective constituent units, y, d, e, and f are larger than 0, and x1 and x2 may be 0. However, x1 and x2 are never 0 at the same time. The bonding order of each structural unit is not limited to that shown in the formula, and a block polymer or a random polymer may be formed. )
*は結合手を表す。) (In the formula (10), R 22 represents a hydrogen atom or a methyl group, L ′ ″ represents a divalent hydrocarbon group having 1 to 6 carbon atoms, which may have a substituent, and is represented by the formula (9- One ring of R21 in II) (that is, R21 in which * in formula (10) is not linked) may be connected to form a ring structure.
* Represents a bond. )
不飽和基含有共重合体(A2―II)は、不飽和基含有共重合体(A2-I)を製造した後、多塩基酸無水物(a-5)を添加し、50~150℃、好ましくは80~130℃の条件下でヒドロキシ基と多塩基酸無水物(a-5)を反応させることで製造することができる。 [Method for producing unsaturated group-containing copolymer (A2-II)]
The unsaturated group-containing copolymer (A2-II) is prepared by producing the unsaturated group-containing copolymer (A2-I) and then adding the polybasic acid anhydride (a-5) to the mixture at 50 to 150 ° C. Preferably, it can be produced by reacting a hydroxy group with a polybasic acid anhydride (a-5) at 80 to 130 ° C.
本発明の共重合体(A)の第四実施態様は、エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなるヒドロキシ基を有する不飽和基含有共重合体(A2-I)と前記不飽和基含有共重合体(A2-I)のヒドロキシ基に、多塩基酸無水物(a-5)が付加してなる不飽和基含有共重合体(A2―II)とを含み、酸価が20KOHmg/g以上であることを特徴とする。
本発明の共重合体の第四実施態様は、不飽和基含有共重合体(A2-I)と不飽和基含有共重合体(A2―II)との混合物であることが好ましい。第四実施態様に係る不飽和基含有共重合体(A2-I)及び不飽和基含有共重合体(A2―II)は、それぞれ、第二実施態様に係る不飽和基含有共重合体(A2-I)及び第三実施態様に係る不飽和基含有共重合体(A2―II)と同じであるので、説明を省略する。 [Fourth embodiment]
The fourth embodiment of the copolymer (A) of the present invention is a hydroxy obtained by ring-opening addition of the carboxy group-containing copolymer (P2) to the epoxy group of the epoxy group-containing (meth) acrylate (a-3). An unsaturated group-containing copolymer (A2-I) having a group and a polybasic acid anhydride (a-5) added to the hydroxy group of the unsaturated group-containing copolymer (A2-I). It is characterized by containing a saturated group-containing copolymer (A2-II) and having an acid value of 20 KOHmg / g or more.
The fourth embodiment of the copolymer of the present invention is preferably a mixture of the unsaturated group-containing copolymer (A2-I) and the unsaturated group-containing copolymer (A2-II). The unsaturated group-containing copolymer (A2-I) and the unsaturated group-containing copolymer (A2-II) according to the fourth embodiment are respectively the unsaturated group-containing copolymer (A2) according to the second embodiment. -I) and the unsaturated group-containing copolymer (A2-II) according to the third embodiment, the description thereof will be omitted.
不飽和基含有共重合体(A2-I)と不飽和基含有共重合体(A2―II)とを、例えば、質量比(A2-I/A2―II)が5/95~95/5の範囲で混合し、酸価が20KOHmg/g以上である共重合体を調整する。あるいは、第三実施態様において不飽和基含有共重合体(A2-I)を製造した後、多塩基酸無水物(a-5)を添加して不飽和基含有共重合体(A2―II)を製造する際に、多塩基酸無水物(a-5)の添加量を調整して、不飽和基含有共重合体(A2-I)と不飽和基含有共重合体(A2―II)との混合物としても良い。 [Method for producing mixture of unsaturated group-containing copolymer (A2-I) and unsaturated group-containing copolymer (A2-II)]
The unsaturated group-containing copolymer (A2-I) and the unsaturated group-containing copolymer (A2-II) are mixed in a mass ratio (A2-I / A2-II) of 5/95 to 95/5, for example. Mix within the range to prepare a copolymer having an acid value of 20 KOHmg / g or more. Alternatively, in the third embodiment, after the unsaturated group-containing copolymer (A2-I) is produced, the polybasic acid anhydride (a-5) is added to the unsaturated group-containing copolymer (A2-II). In producing the compound, the addition amount of the polybasic acid anhydride (a-5) is adjusted to obtain an unsaturated group-containing copolymer (A2-I) and an unsaturated group-containing copolymer (A2-II). It may be a mixture of.
上記の第一実施態様~第四実施例態様で得られる本発明の共重合体(A)の分子量(ポリスチレン換算の重量平均分子量)は、好ましくは1000~50000、より好ましくは3000~40000である。この分子量が1000以上であると、硬化膜の耐溶剤性や耐熱分解性が十分に確保できる。一方、この分子量が50000以下であると、分子量や粘度を適切な範囲に制御することができ、実用的である。 [Characteristics of copolymer]
The molecular weight (polystyrene-equivalent weight average molecular weight) of the copolymer (A) of the present invention obtained in the above-mentioned first embodiment to fourth embodiment is preferably 1,000 to 50,000, more preferably 3,000 to 40,000. .. When this molecular weight is 1,000 or more, the solvent resistance and thermal decomposition resistance of the cured film can be sufficiently secured. On the other hand, when the molecular weight is 50,000 or less, the molecular weight and the viscosity can be controlled in an appropriate range, which is practical.
本発明の樹脂組成物は、共重合体(A)と溶剤(B)とを含む。本発明の樹脂組成物は、更に反応性希釈剤(C)、光重合開始剤(D)、着色剤(E)を含んでもよい。光重合開始剤(D)を含むことにより、感光性樹脂組成物とすることができる。 [Resin composition]
The resin composition of the present invention contains a copolymer (A) and a solvent (B). The resin composition of the present invention may further contain a reactive diluent (C), a photopolymerization initiator (D) and a colorant (E). By containing the photopolymerization initiator (D), a photosensitive resin composition can be obtained.
溶剤(B)は、共重合体(A)と反応しない溶剤であれば特に限定されない。溶剤(B)としては、共重合体(A)を製造する際に用いた溶剤と同じものを用いることができ、反応後に含まれている溶剤をそのまま用いることもでき、さらに加えることもできる。また、その他の成分を加える際に、そこに共存しているものでも良い。溶剤(B)の具体例として、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート、酢酸エチル、酢酸ブチル、酢酸イソプロピル、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノメチルエーテル、トリプロピレングリコールモノメチルエーテル、エチレングリコールモノメチルエーテル、ジエチレングリコールモノメチルエーテル、メチルエチルケトン、メチルイソブチルケトン、シクロヘキサノン、エチレングリコールモノエチルエーテルアセテート、ジエチレングリコールエチルエーテルアセテート等が挙げられる。これらは、単独で、または2種以上を組み合わせて用いることができる。また、これらの中でも、共重合体(A)を製造する際において使用されるプロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート等のグリコールエーテル系溶剤が好ましい。 [Solvent (B)]
The solvent (B) is not particularly limited as long as it is a solvent that does not react with the copolymer (A). As the solvent (B), the same solvent as used in the production of the copolymer (A) can be used, and the solvent contained after the reaction can be used as it is or further added. In addition, when other components are added, they may coexist there. Specific examples of the solvent (B) include propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, ethyl acetate, butyl acetate, isopropyl acetate, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, tripropylene glycol. Examples thereof include monomethyl ether, ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, ethylene glycol monoethyl ether acetate and diethylene glycol ethyl ether acetate. These may be used alone or in combination of two or more. Among these, glycol ether solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate used in the production of the copolymer (A) are preferable.
反応性希釈剤(C)としては特に限定されないが、エチレン性不飽和二重結合、ビニル基、(メタ)アクリロイルオキシ基を含むものが好ましい。具体例としては、スチレン、α-メチルスチレン、α-クロロメチルスチレン、ビニルトルエン、ジビニルベンゼン、ジアリルフタレート、ジアリルベンゼンホスホネート等の芳香族ビニル系モノマー類;酢酸ビニル、アジピン酸ビニル等のポリカルボン酸モノマー類;メチル(メタ)アクリレート、エチル(メタ)アクリレート、プロピル(メタ)アクリレート、ブチル(メタ)アクリレート、β-ヒドロキシエチル(メタ)アクリレート、ヒドロキシプロピル(メタ)アクリレート、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、エチレングリコールジ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、トリス(ヒドロキシエチル)イソシアヌレートのトリ(メタ)アクリレート等の(メタ)アクリル系モノマー;トリアリルシアヌレート等が挙げられる。これらは、単独で、または2種以上を組み合わせて用いることができる。
中でも、(メタ)アクリロイルオキシ基を複数有する多官能(メタ)アクリレートが好ましく、(メタ)アクリロイルオキシ基を3個以上有する多官能(メタ)アクリレートがより好ましい。 [Reactive diluent (C)]
The reactive diluent (C) is not particularly limited, but those containing an ethylenically unsaturated double bond, a vinyl group and a (meth) acryloyloxy group are preferable. Specific examples thereof include aromatic vinyl monomers such as styrene, α-methylstyrene, α-chloromethylstyrene, vinyltoluene, divinylbenzene, diallylphthalate and diallylbenzenephosphonate; polycarboxylic acids such as vinyl acetate and vinyl adipate. Monomers: methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, β-hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, ethylene glycol di (meth) acrylate , Diethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylol (Meth) acrylic monomers such as propane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tri (meth) acrylate of tris (hydroxyethyl) isocyanurate; triallyl cyanurate Etc. These may be used alone or in combination of two or more.
Among them, a polyfunctional (meth) acrylate having a plurality of (meth) acryloyloxy groups is preferable, and a polyfunctional (meth) acrylate having three or more (meth) acryloyloxy groups is more preferable.
光重合開始剤(D)としては特に限定されないが、具体例として、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル等のベンゾインとそのアルキルエーテル類;アセトフェノン、2,2-ジメトキシ-2-フェニルアセトフェノン、1,1-ジクロロアセトフェノン、4-(1-t-ブチルジオキシ-1-メチルエチル)アセトフェノン等のアセトフェノン類;2-メチルアントラキノン、2-アミルアントラキノン、2-t-ブチルアントラキノン、1-クロロアントラキノン等のアントラキノン類;2,4-ジメチルチオキサントン、2,4-ジイソプロピルチオキサントン、2-クロロチオキサントン等のチオキサントン類;アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類;ベンゾフェノン、4-(1-t-ブチルジオキシ-1-メチルエチル)ベンゾフェノン、3,3’,4,4’-テトラキス(t-ブチルジオキシカルボニル)ベンゾフェノン等のベンゾフェノン類;2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノ-プロパン-1-オン;2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)ブタノン-1;アシルホスフィンオキサイド類;およびキサントン類等が挙げられる。これらは、単独で、または2種以上を組み合わせて用いることができる。 [Photopolymerization initiator (D)]
The photopolymerization initiator (D) is not particularly limited, but specific examples thereof include benzoin such as benzoin, benzoin methyl ether, and benzoin ethyl ether, and alkyl ethers thereof; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1 , 1-dichloroacetophenone, 4- (1-t-butyldioxy-1-methylethyl) acetophenone and other acetophenones; 2-methylanthraquinone, 2-amylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone and other anthraquinones Thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone and 2-chlorothioxanthone; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzoph Benzophenones such as non-, 4- (1-t-butyldioxy-1-methylethyl) benzophenone, 3,3 ′, 4,4′-tetrakis (t-butyldioxycarbonyl) benzophenone; 2-methyl-1- [ 4- (methylthio) phenyl] -2-morpholino-propan-1-one; 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butanone-1; acylphosphine oxides; and xanthone and the like. Be done. These may be used alone or in combination of two or more.
着色剤(E)としては、溶剤(B)に溶解または分散するものであれば特に限定されず、公知の染料またはは顔料を用いることができる。着色剤(E)として染料を用いる場合、顔料を用いる場合と比べ高輝度な着色パターンを得ることができ、また良好なアルカリ現像性を示す。一方、着色剤(E)として顔料を用いる場合、染料を用いる場合と比べ着色パターンの耐熱性が高い。求められる性能や目的とする画素の色に応じて、染料と顔料を併用しても良い。 [Colorant (E)]
The colorant (E) is not particularly limited as long as it can be dissolved or dispersed in the solvent (B), and known dyes or pigments can be used. When a dye is used as the colorant (E), it is possible to obtain a colored pattern having a higher brightness than when a pigment is used, and a good alkali developability is exhibited. On the other hand, when a pigment is used as the colorant (E), the heat resistance of the colored pattern is higher than when a dye is used. Dyes and pigments may be used in combination depending on the required performance and the intended pixel color.
染料としては、溶剤(B)やアルカリ現像液に対する溶解性、カラーフィルター用樹脂組成物中の他の成分との相互作用、耐熱性等の観点から、カルボキシ基等の酸性基を有する酸性染料、酸性染料の窒素化合物との塩、酸性染料のスルホンアミド体等を用いることが好ましい。このような染料の具体例としては、acid alizarin violet N;acid black1、2、24、48;acid blue1、7、9、25、29、40、45、62、70、74、80、83、90、92、112、113、120、129、147;acid chrome violet K;acid Fuchsin;acid green1、3、5、25、27、50;acid orange6、7、8、10、12、50、51、52、56、63、74、95;acid
red1、4、8、14、17、18、26、27、29、31、34、35、37、42、44、50、51、52、57、69、73、80、87、88、91、92、94、97、103、111、114、129、133、134、138、143、145、150、151、158、176、183、198、211、215、216、217、249、252、257、260、266、274;acid violet 6B、7、9、17、19;acid yellow1、3、9、11、17、23、25、29、34、36、42、54、72、73、76、79、98、99、111、112、114、116; food yellow 3およびこれらの誘導体等が挙げられる。
これらの中でも、アゾ系、キサンテン系、アントラキノン系またはフタロシアニン系の酸性染料が好ましい。これらの染料は、目的とする画素の色に応じて、単独で、または2種以上を組み合わせて用いることができる。 "dye"
As the dye, an acid dye having an acidic group such as a carboxy group, from the viewpoint of solubility in a solvent (B) or an alkali developing solution, interaction with other components in the resin composition for a color filter, heat resistance, and the like, It is preferable to use a salt of an acidic dye with a nitrogen compound, a sulfonamide body of an acidic dye, or the like. Specific examples of such dyes include acid alizarin violet N; acid black 1, 2, 24, 48; acid blue 1, 7, 9, 25, 29, 40, 45, 62, 70, 74, 80, 83, 90. , 92, 112, 113, 120, 129, 147; acid chrome violet K; acid Fuchsin; acid green 1, 3, 5, 25, 27, 50; acid orange 6, 7, 8, 10, 12, 50, 51, 52. , 56, 63, 74, 95; acid
red1, 4, 8, 14, 17, 18, 26, 27, 29, 31, 34, 35, 37, 42, 44, 50, 51, 52, 57, 69, 73, 80, 87, 88, 91, 92, 94, 97, 103, 111, 114, 129, 133, 134, 138, 143, 145, 150, 151, 158, 176, 183, 198, 211, 215, 216, 217, 249, 252, 257, 260, 266, 274; acid violet 6B, 7, 9, 17, 19; acid yellow1, 3, 9, 11, 17, 23, 25, 29, 34, 36, 42, 54, 72, 73, 76, 79 , 98, 99, 111, 112, 114, 116; food yellow 3 and derivatives thereof.
Among these, azo, xanthene, anthraquinone or phthalocyanine acid dyes are preferable. These dyes can be used alone or in combination of two or more, depending on the intended color of the pixel.
顔料の具体例としては、C.I.ピグメントイエロー1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214等の黄色顔料;C.I.ピグメントオレンジ13、31、36、38、40、42、43、51、55、59、61、64、65、71、73等の橙色顔料;C.I.ピグメントレッド9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、255、264、265等の赤色顔料;C.I.ピグメントブルー15、15:3、15:4、15:6、60等の青色顔料;C.I.ピグメントバイオレット1、19、23、29、32、36、38等のバイオレット色顔料;C.I.ピグメントグリーン7、36、58等の緑色顔料;C.I.ピグメントブラウン23、25等の茶色顔料;C.I.ピグメントブラック1、7、カーボンブラック、チタンブラック、酸化鉄等の黒色顔料等が挙げられる。これらの顔料は、目的とする画素の色に応じて、単独で、または2種以上を組み合わせて用いることができる。 "Pigment"
Specific examples of the pigment include C.I. I. Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214 and other yellow pigments; C.I. I. Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73 and the like; orange pigments; I. Pigment Red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265 and the like; C. I. Pigment Blue 15, 15: 3, 15: 4, 15: 6, 60 and other blue pigments; C.I. I. Pigment Violet 1, 19, 23, 29, 32, 36, 38 and the like violet color pigments; C.I. I. Pigment Green 7, 36, 58 and other green pigments; C.I. I. Pigment Brown 23, 25 and the like brown pigments; C.I. I. Pigment Black 1 and 7, black pigments such as carbon black, titanium black and iron oxide. These pigments can be used alone or in combination of two or more, depending on the intended color of the pixel.
本実施の形態の樹脂組成物における、共重合体(A)、溶剤(B)の配合量は、樹脂組成物中の溶剤(B)を除く成分の総和を100質量部とすると、共重合体(A)が、50~100質量部であり、溶剤(B)が30~1000質量部、好ましくは50~800質量部、より好ましくは100~700質量部である。
本実施の形態の樹脂組成物が反応性希釈剤(C)を含む場合、共重合体(A)、溶剤(B)、反応性希釈剤(C)の配合量は、樹脂組成物中の溶剤(B)を除く成分の総和を100質量部とすると、共重合体(A)は、10~90質量部、溶剤(B)が30~1000質量部、反応性希釈剤(C)が10~90質量部であり、好ましくは、共重合体(A)は、20~80質量部、溶剤(B)が50~800質量部、反応性希釈剤(C)が20~80質量部であり、より好ましくは、共重合体(A)は、30~75質量部、溶剤(B)が100~700質量部、反応性希釈剤(C)が25~70質量部である。 [Composition of resin composition]
In the resin composition of the present embodiment, the copolymer (A) and the solvent (B) are blended in such amounts that the total amount of the components excluding the solvent (B) in the resin composition is 100 parts by mass. (A) is 50 to 100 parts by mass, and the solvent (B) is 30 to 1000 parts by mass, preferably 50 to 800 parts by mass, more preferably 100 to 700 parts by mass.
When the resin composition of the present embodiment contains the reactive diluent (C), the blending amounts of the copolymer (A), the solvent (B) and the reactive diluent (C) are the same as those of the solvent in the resin composition. When the total amount of the components excluding (B) is 100 parts by mass, the copolymer (A) is 10 to 90 parts by mass, the solvent (B) is 30 to 1000 parts by mass, and the reactive diluent (C) is 10 to 10 parts by mass. 90 parts by mass, preferably 20 to 80 parts by mass of the copolymer (A), 50 to 800 parts by mass of the solvent (B), and 20 to 80 parts by mass of the reactive diluent (C), More preferably, the copolymer (A) is 30 to 75 parts by mass, the solvent (B) is 100 to 700 parts by mass, and the reactive diluent (C) is 25 to 70 parts by mass.
[感光性樹脂組成物の組成] The resin composition of the present embodiment, in addition to the above components, in order to impart predetermined properties, known coupling agents, leveling agents, known additives such as thermal polymerization inhibitors, and known colorants. You may mix | blend a filler, a dispersing agent, etc. The blending amount of these additives is not particularly limited as long as the effects of the present invention are not impaired.
[Composition of photosensitive resin composition]
本実施形態の樹脂組成物は、公知の混合装置を用い、上記の各成分を混合することによって製造することができる。なお、本実施の形態の樹脂組成物は、先に共重合体(A)および溶剤(B)を含む樹脂組成物を調製した後、反応性希釈剤(C)、光重合開始剤(D)を混合して製造することも可能である。なお、当該樹脂組成物は、本実施の形態の感光性樹脂組成物を調製するために用いることができるほか、他の用途で使用することも可能である。 [Method for producing resin composition]
The resin composition of the present embodiment can be produced by mixing the above components using a known mixing device. The resin composition of the present embodiment is prepared by first preparing the resin composition containing the copolymer (A) and the solvent (B), and then preparing the reactive diluent (C) and the photopolymerization initiator (D). It is also possible to mix and manufacture. The resin composition can be used for preparing the photosensitive resin composition of the present embodiment, and can also be used for other purposes.
次に、本発明の感光性樹脂組成物を用いて調製したレジストについて説明する。本発明のレジストは、上記の感光性樹脂組成物から得られる硬化膜のことを指す。本発明の一実施形態のレジストとしては、ガラス基板、シリコン基板、ポリカーボネート基板、ポリエステル基板、ポリアミド基板、ポリアミドイミド基板、ポリイミド基板、アルミニウム基板、プリント配線基板、アレイ基板等の基板の上に本発明の感光性樹脂組成物を塗布し、塗布膜を露光して露光部分を光硬化させる。その後、ベーキングすることにより、基板上に所定の硬化膜を形成することができる。感光性樹脂組成物の塗布方法としては、特に限定されないが、スクリーン印刷法、ロールコート法、カーテンコート法、スプレーコート法、スピンコート法、スリットコート法等を用いることができる。また、感光性樹脂組成物の塗布後、必要に応じて、循環式オーブン、赤外線ヒーター、ホットプレート等の加熱手段を用いて加熱することにより溶剤(B)を揮発させてもよい。加熱条件は、特に限定されず、使用する感光性樹脂組成物の種類に応じて適宜設定すればよい。一般には、50℃~120℃の温度で30秒~30分加熱すればよい。 [Registration]
Next, the resist prepared using the photosensitive resin composition of the present invention will be described. The resist of the present invention refers to a cured film obtained from the above photosensitive resin composition. The resist of one embodiment of the present invention includes a glass substrate, a silicon substrate, a polycarbonate substrate, a polyester substrate, a polyamide substrate, a polyamideimide substrate, a polyimide substrate, an aluminum substrate, a printed wiring board, an array substrate, and other substrates on which the present invention is applied. The photosensitive resin composition is applied and the coating film is exposed to light to cure the exposed portion. Then, by baking, a predetermined cured film can be formed on the substrate. The method for applying the photosensitive resin composition is not particularly limited, but a screen printing method, a roll coating method, a curtain coating method, a spray coating method, a spin coating method, a slit coating method or the like can be used. In addition, after applying the photosensitive resin composition, the solvent (B) may be volatilized by heating using a heating means such as a circulation oven, an infrared heater, or a hot plate, if necessary. The heating conditions are not particularly limited and may be appropriately set depending on the type of photosensitive resin composition used. Generally, heating may be performed at a temperature of 50 ° C. to 120 ° C. for 30 seconds to 30 minutes.
また、露光量も、特に限定されず、使用する感光性樹脂組成物の種類に応じて適宜調整すればよい。 The light source used for the exposure is not particularly limited, but a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, a xenon lamp, a metal halide lamp and the like can be used.
The amount of exposure is also not particularly limited, and may be appropriately adjusted according to the type of photosensitive resin composition used.
分子量(Mw)とは、ゲルパーミエーションクロマトグラフィー(GPC)を用いて、下記条件にて測定した標準ポリスチレン換算重量平均分子量を意味する。
カラム:ショウデックス(登録商標) LF-804+LF-804(昭和電工株式会社製)
カラム温度:40℃
試料:共重合体(A)の0.2%テトラヒドロフラン溶液
展開溶媒:テトラヒドロフラン
検出器:示差屈折計(ショウデックス RI-71S)(昭和電工株式会社製)
流速: 1mL/min <Measurement method of molecular weight>
The molecular weight (Mw) means a standard polystyrene-equivalent weight average molecular weight measured by gel permeation chromatography (GPC) under the following conditions.
Column: Showdex (registered trademark) LF-804 + LF-804 (manufactured by Showa Denko KK)
Column temperature: 40 ° C
Sample: 0.2% tetrahydrofuran solution of copolymer (A) Developing solvent: Tetrahydrofuran Detector: Differential refractometer (Showdex RI-71S) (Showa Denko KK)
Flow rate: 1 mL / min
JIS K6901 5.3.2に従って、共重合体(A)1g中に含まれる酸性成分を中和するのに要する水酸化カリウムのmg数を測定した。
測定器:776 Dosimat(Metrohm社)
混合指示薬:ブロモチモールブルーとフェノールレッドの混合指示薬 <Method of measuring acid value>
According to JIS K6901 5.3.2, the number of mg of potassium hydroxide required to neutralize the acidic component contained in 1 g of the copolymer (A) was measured.
Measuring device: 776 Dosimat (Metrohm)
Mixed indicator: Mixed indicator of bromothymol blue and phenol red
ヒドロキシ基のモル数当たりの重合体の質量であり、モノマーの使用量に基づいて算出した計算値である。 <Method for measuring hydroxyl equivalent>
It is the mass of the polymer per the number of moles of hydroxy groups, and is a calculated value calculated based on the amount of the monomer used.
エチレン性不飽和基のモル数当たりの重合体の質量であり、モノマーの使用量に基づいて算出した計算値である。 <Measuring method of unsaturated group equivalent>
It is the mass of the polymer per mol of the ethylenically unsaturated group, and is a calculated value calculated based on the amount of the monomer used.
屈折率とは、屈折計を用いて測定した共重合体(A)の屈折率を意味する。本発明の共重合体(A)および溶剤(B)を含有する樹脂組成物(試料)の屈折率を下記条件にて測定し、次いで溶剤(B)の屈折率を下記条件にて測定する。次いで試料中に含まれる共重合体(A)の含有率(固形分)をJIS K6901 5.11に従って測定し、下記式を用いて試料中に含まれる共重合体(A)単独の屈折率を算出する。
測定器:J-357 Automatic Refractometer(Rudolph Research Analytical社)
測定波長:589nm
測定温度:20℃
共重合体(A)単独の屈折率=(試料の屈折率-溶剤(B)の屈折率)÷固形分×100+溶剤(B)の屈折率
<固形分の測定法>
下記の合成例で得られた試料を130℃で2時間加熱した時の加熱残分を測定した。 <Method of measuring refractive index>
The refractive index means the refractive index of the copolymer (A) measured using a refractometer. The refractive index of the resin composition (sample) containing the copolymer (A) and the solvent (B) of the present invention is measured under the following conditions, and then the refractive index of the solvent (B) is measured under the following conditions. Next, the content (solid content) of the copolymer (A) contained in the sample was measured according to JIS K6901 5.11, and the refractive index of the copolymer (A) alone contained in the sample was calculated using the following formula. calculate.
Measuring device: J-357 Automatic Refractometer (Rudolf Research Analytical)
Measurement wavelength: 589 nm
Measurement temperature: 20 ℃
Refractive index of copolymer (A) alone = (refractive index of sample−refractive index of solvent (B)) ÷ solid content × 100 + refractive index of solvent (B) <measurement method of solid content>
The heating residue when the sample obtained in the following synthesis example was heated at 130 ° C. for 2 hours was measured.
フッ素原子のモル数当たりの重合体の質量であり、モノマーの使用量に基づいて算出した計算値である。 <Method of measuring fluorine equivalent>
It is the mass of the polymer per the number of moles of the fluorine atom, and is a calculated value calculated based on the amount of the monomer used.
<実施例1>
「共重合体(A)の合成」
攪拌装置、滴下ロート、コンデンサー、温度計およびガス導入管を備えたフラスコに、302.4gのプロピレングリコールモノメチルエーテルアセテートを入れた後、窒素置換しながら撹拌し、80℃に昇温した。次に、9.1gのジシクロペンタニルメタクリレート(a-1A)、237.3gの2,2,2-トリフルオロエチルメタクリレート(a-2)、および88.5gのグリシジルメタクリレート(a-3)からなるモノマー混合物に、21.0gの2,2’-アゾビス(2,4-ジメチルバレロニトリル)(重合開始剤、モノマー混合物100質量部に対して6.0質量部)を添加したものを滴下ロートから前記フラスコ中に滴下した。滴下終了後、80℃で2時間攪拌して共重合反応を行い、エポキシ基含有共重合体(P1)を得た。 A production example of a resin composition (sample) containing the copolymer (A) and the solvent (B) of the present invention is shown below.
<Example 1>
"Synthesis of Copolymer (A)"
302.4 g of propylene glycol monomethyl ether acetate was placed in a flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, and the mixture was stirred while substituting with nitrogen and heated to 80 ° C. Next, 9.1 g of dicyclopentanyl methacrylate (a-1A), 237.3 g of 2,2,2-trifluoroethyl methacrylate (a-2), and 88.5 g of glycidyl methacrylate (a-3). 21.0 g of 2,2'-azobis (2,4-dimethylvaleronitrile) (polymerization initiator, 6.0 parts by mass with respect to 100 parts by mass of the monomer mixture) was added dropwise to the monomer mixture consisting of It dripped from the funnel into the said flask. After completion of the dropping, the mixture was stirred at 80 ° C. for 2 hours to carry out a copolymerization reaction to obtain an epoxy group-containing copolymer (P1).
「共重合体(A)の合成」
表1に記載のモノマーの配合割合とする以外は、比較例1と同様にして、実施例2~6、比較例1~3の各共重合体(A)を含む溶液を製造し、溶剤(B)としてプロピレングリコールモノメチルエーテルアセテートを加え、試料No.2~6、No.9~11を得た。各試料に含まれるエポキシ基含有共重合体(P1)のフッ素当量、共重合体(A1)の分子量、酸価、水酸基当量、不飽和基当量、および屈折率を表1に示した。 <Examples 2 to 6, Comparative Examples 1 to 3>
"Synthesis of Copolymer (A)"
A solution containing each of the copolymers (A) of Examples 2 to 6 and Comparative Examples 1 to 3 was produced in the same manner as in Comparative Example 1 except that the mixing ratios of the monomers shown in Table 1 were used. Propylene glycol monomethyl ether acetate was added as B), and sample No. 2 to 6, No. 9-11 were obtained. Table 1 shows the fluorine equivalent of the epoxy group-containing copolymer (P1), the molecular weight of the copolymer (A1), the acid value, the hydroxyl group equivalent, the unsaturated group equivalent, and the refractive index contained in each sample.
「共重合体(A)の合成」
実施例1と同様にして、フラスコに492.9gのプロピレングリコールモノメチルエーテルアセテートを入れた後、窒素置換しながら撹拌し、80℃に昇温した。次に、11.4gのジシクロペンタニルメタクリレート(a-1A)、295.3gの2,2,2-トリフルオロエチルメタクリレート(a-2)、および66.7gのメタクリル酸(a-4)からなるモノマー混合物に、22.4gの2,2’-アゾビス(2,4-ジメチルバレロニトリル)(重合開始剤、モノマー混合物100質量部に対して6.0質量部)を添加したものを滴下ロートから前記フラスコ中に滴下した。滴下終了後、80℃で2時間攪拌して共重合反応を行い、カルボキシ基含有共重合体(P2)を得た。次に、前記フラスコ内を空気に置換した後、36.7gのグリシジルメタクリレート(a-3)、1.2gのトリフェニルホスフィン(触媒、モノマー(a-1A)、(a-2)、(a-3)、(a-4)の合計100質量部に対して0.3質量部)、および1.2gのハイドロキノンモノメチルエーテル(重合禁止剤、モノマー(a-1A)、(a-2)、(a-3)、(a-4)の合計100質量部に対して0.3質量部)を加え、120℃で5時間反応を行い、不飽和基含有共重合体(A2-I)からなる実施例7の共重合体(A)を含む溶液を得た。次に、この共重合体を含む溶液に、溶剤(B)として118.8gのプロピレングリコールモノメチルエーテルアセテートを加え、試料No.7を得た。モノマー(a-1A)と(a-2)と(a-4)との合計を100モル%として換算した時の各モノマーの配合割合と、カルボキシ基含有共重合体(P2)のフッ素当量共重合体(A2)の分子量、酸価、水酸基当量、不飽和基当量、および屈折率を表2に示した。 <Example 7>
"Synthesis of Copolymer (A)"
In the same manner as in Example 1, 492.9 g of propylene glycol monomethyl ether acetate was placed in the flask, stirred while substituting with nitrogen, and heated to 80 ° C. Next, 11.4 g of dicyclopentanyl methacrylate (a-1A), 295.3 g of 2,2,2-trifluoroethyl methacrylate (a-2), and 66.7 g of methacrylic acid (a-4). 22.4 g of 2,2'-azobis (2,4-dimethylvaleronitrile) (polymerization initiator, 6.0 parts by mass with respect to 100 parts by mass of the monomer mixture) was added dropwise to the monomer mixture consisting of It dripped from the funnel into the said flask. After completion of the dropping, the mixture was stirred at 80 ° C. for 2 hours to carry out a copolymerization reaction to obtain a carboxy group-containing copolymer (P2). Next, after the air in the flask was replaced with air, 36.7 g of glycidyl methacrylate (a-3), 1.2 g of triphenylphosphine (catalyst, monomer (a-1A), (a-2), (a -3), 0.3 parts by mass relative to 100 parts by mass of (a-4) in total, and 1.2 g of hydroquinone monomethyl ether (polymerization inhibitor, monomer (a-1A), (a-2), (0.3 parts by mass relative to 100 parts by mass of (a-3) and (a-4) in total) and reacted at 120 ° C. for 5 hours to prepare the unsaturated group-containing copolymer (A2-I). A solution containing the copolymer (A) of Example 7 was obtained. Next, to the solution containing this copolymer, 118.8 g of propylene glycol monomethyl ether acetate was added as a solvent (B), and sample No. Got 7. When the total amount of the monomers (a-1A), (a-2) and (a-4) is calculated as 100 mol%, the mixing ratio of each monomer and the fluorine equivalent of the carboxy group-containing copolymer (P2) Table 2 shows the molecular weight, acid value, hydroxyl group equivalent, unsaturated group equivalent, and refractive index of the polymer (A2).
「共重合体(A)の合成」
表1に記載のモノマーの配合割合とする以外は、実施例7と同様にして、実施例8の共重合体(A)を製造し、溶剤(B)としてプロピレングリコールモノメチルエーテルアセテートを加え、試料No.8を得た。試料に含まれる共重合体(A2)の分子量、酸価、水酸基当量、不飽和基当量、および屈折率を表2に示した。 <Example 8>
"Synthesis of Copolymer (A)"
A copolymer (A) of Example 8 was produced in the same manner as in Example 7 except that the mixing ratios of the monomers shown in Table 1 were used, and propylene glycol monomethyl ether acetate was added as a solvent (B) to obtain a sample. No. Got 8. Table 2 shows the molecular weight, acid value, hydroxyl group equivalent, unsaturated group equivalent, and refractive index of the copolymer (A2) contained in the sample.
次に、試料No.1~8、No.10を用いて、透明感光性樹脂組成物を調製した。
<透明感光性樹脂組成物の調製>
試料No.1~8、No.10の固形分100質量部に対して、ペンタエリスリトールテトラアクリレート(反応性希釈剤(C))100質量部、2,2-ジメトキシ-2-フェニルアセトフェノン(光重合開始剤(D))10質量部を添加した後、溶剤(B)が210質量部となるようプロピレングリコールモノメチルエーテルアセテートを加えて透明感光性樹脂組成物を調製した。
なお、試料のうち、溶剤(プロピレングリコールモノメチルエーテルアセテート)を除いた残留物を「固形分」と定義する。 (Examples 9 to 16 and Comparative Example 4)
Next, sample No. 1-8, No. 10 was used to prepare a transparent photosensitive resin composition.
<Preparation of transparent photosensitive resin composition>
Sample No. 1-8, No. 10 parts by mass of pentaerythritol tetraacrylate (reactive diluent (C)) and 10 parts by mass of 2,2-dimethoxy-2-phenylacetophenone (photopolymerization initiator (D)) per 100 parts by mass of the solid content of 10. Was added, and then propylene glycol monomethyl ether acetate was added so that the solvent (B) was 210 parts by mass to prepare a transparent photosensitive resin composition.
The residue of the sample excluding the solvent (propylene glycol monomethyl ether acetate) is defined as "solid content".
調製された透明感光性樹脂組成物を、5cm角ガラス基板(無アルカリガラス基板)上に、最終の硬化塗膜の平均厚さが2.5μmとなるようにスピンコートした後、100℃で3分間加熱することで溶剤を揮発させた。次に塗膜の全面を機器で露光(露光量80mJ/cm2)し、光硬化させた後、さらに230℃で30分間ベーキングすることで硬化塗膜である透明レジストを得た。 <Pattern formation by transparent photosensitive resin composition>
The prepared transparent photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 2.5 μm, and then 3 ° C. at 100 ° C. The solvent was volatilized by heating for a minute. Next, the entire surface of the coating film was exposed with an apparatus (exposure amount: 80 mJ / cm 2 ), photocured, and then baked at 230 ° C. for 30 minutes to obtain a transparent resist which was a cured coating film.
透明レジストについて、耐熱分解性、耐熱黄変性を評価した。
(1)耐熱分解性の評価
ガラス基板上に製膜した塗膜を切り出したサンプルを用い、熱重量分析(TGA)を行うことによって評価した。この分析では、このサンプルを10℃/minの昇温速度で220℃まで加熱し、2時間保持した後、重量を測定した。加熱後のサンプルと加熱前のサンプルとの間の重量変化率を求めた。重量変化率は-5.0%まで測定し、これより大きく重量変化をしたものは耐熱分解性が悪いと判断した。 <Evaluation of transparent resist>
The transparent resist was evaluated for heat decomposition resistance and heat yellowing.
(1) Evaluation of thermal decomposition resistance Evaluation was carried out by thermogravimetric analysis (TGA) using a sample obtained by cutting out a coating film formed on a glass substrate. In this analysis, this sample was heated to 220 ° C. at a temperature rising rate of 10 ° C./min, held for 2 hours, and then weighed. The weight change rate between the sample after heating and the sample before heating was determined. The weight change rate was measured up to -5.0%, and those with a larger weight change were judged to have poor thermal decomposition resistance.
ガラス基板上に製膜した塗膜を230℃の乾燥機中に窒素ガス雰囲気下で1時間放置し、加熱処理前後の塗膜の着色変化(ΔE*ab)を日本電色工業(株)製 色差計SE2000にて比較した。 (2) Evaluation of heat-resistant yellowing The coating film formed on a glass substrate was allowed to stand in a dryer at 230 ° C for 1 hour in a nitrogen gas atmosphere, and the color change (ΔE * ab) of the coating film before and after heat treatment was evaluated. Comparison was performed using a color difference meter SE2000 manufactured by Nippon Denshoku Industries Co., Ltd.
次に、試料No.1~11を用いて、黒色感光性樹脂組成物を調製した。
<黒色顔料分散液の調製>
直径0.5mmのジルコニアビーズ180質量部を充填したSUS容器に、10質量部のカーボンブラック、34質量部のプロピレングリコールモノメチルエーテルアセテート、および6質量部の分散剤(ビックケミー・ジャパン株式会社製Disperbyk-161)を加え、ペイントシェーカーで3時間混合して分散させることにより、黒色顔料分散液を得た。 (Examples 17 to 24 and Comparative Examples 5 to 7)
Next, sample No. 1 to 11 were used to prepare a black photosensitive resin composition.
<Preparation of black pigment dispersion>
In a SUS container filled with 180 parts by mass of zirconia beads having a diameter of 0.5 mm, 10 parts by mass of carbon black, 34 parts by mass of propylene glycol monomethyl ether acetate, and 6 parts by mass of a dispersant (Disperbyk-manufactured by BYK Japan KK 161) was added and mixed by a paint shaker for 3 hours and dispersed to obtain a black pigment dispersion liquid.
試料No.1~11の固形分100質量部に対して、ジペンタエリスリトールヘキサアクリレート(反応性希釈剤(C))67質量部、エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル-]-,-1-(O-アセチルオキシム)(光重合開始剤(D))13質量部、黒色顔料分散液の固形分(着色剤(E))180質量部を添加した後、溶剤(B)が670質量部となるようプロピレングリコールモノメチルエーテルアセテートを加えて黒色感光性樹脂組成物を調製した。
なお、黒色顔料分散液の固形分とは、黒色顔料分散液から溶剤(プロピレングリコールモノメチルエーテルアセテート)を除いた残留物と定義する。 <Preparation of black photosensitive resin composition>
Sample No. 67 parts by mass of dipentaerythritol hexaacrylate (reactive diluent (C)), ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H, relative to 100 parts by mass of the solid content of 1 to 11 -Carbazol-3-yl-]-,-1- (O-acetyloxime) (photopolymerization initiator (D)) 13 parts by mass, solid content of the black pigment dispersion (colorant (E)) 180 parts by mass After the addition, propylene glycol monomethyl ether acetate was added so that the solvent (B) was 670 parts by mass to prepare a black photosensitive resin composition.
The solid content of the black pigment dispersion is defined as the residue obtained by removing the solvent (propylene glycol monomethyl ether acetate) from the black pigment dispersion.
調製された黒色感光性樹脂組成物を、5cm角ガラス基板(無アルカリガラス基板)上に、最終の硬化塗膜の平均厚さが1.0μmとなるようにスピンコートした後、100℃で3分間加熱することで溶剤を揮発させた。次に、基板上にラインアンドスペースやドットパターンのフォトマスクを設置して塗膜を露光(露光量300mJ/cm2)し、光硬化させた後、0.2質量%の水酸化カリウム水溶液で現像し、さらに230℃で30分間ベーキングすることで硬化塗膜である黒色レジストを得た。 <Pattern formation with black photosensitive resin composition (with development)>
The prepared black photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 1.0 μm, and then 3 ° C. at 100 ° C. The solvent was volatilized by heating for a minute. Next, a line-and-space or dot-pattern photomask was placed on the substrate to expose the coating film (exposure amount 300 mJ / cm 2 ), and after photocuring, a 0.2 mass% potassium hydroxide aqueous solution was used. It was developed and further baked at 230 ° C. for 30 minutes to obtain a black resist as a cured coating film.
調製された黒色感光性樹脂組成物を、5cm角ガラス基板(無アルカリガラス基板)上に、最終の硬化塗膜の平均厚さが1.0μmとなるようにスピンコートした後、100℃で3分間加熱することで溶剤を揮発させた。次に、塗膜全面を露光(露光量300mJ/cm2)し、光硬化させた後、さらに230℃で30分間ベーキングすることで硬化塗膜である黒色レジストを得た。 <Pattern formation with black photosensitive resin composition (no development)>
The prepared black photosensitive resin composition was spin-coated on a 5 cm square glass substrate (alkali-free glass substrate) so that the average thickness of the final cured coating film would be 1.0 μm, and then 3 ° C. at 100 ° C. The solvent was volatilized by heating for a minute. Next, the entire surface of the coating film was exposed (exposure amount 300 mJ / cm 2 ), photocured, and then baked at 230 ° C. for 30 minutes to obtain a black resist as a cured coating film.
黒色レジストについて、現像性、耐溶剤性、および反射率を評価した。 <Evaluation of black resist>
The black resist was evaluated for developability, solvent resistance, and reflectance.
黒色感光性樹脂組成物によるパターン形成(現像有り)にて作製した塗膜をガラス基板ごとN-メチル-2-ピロリドンに浸漬させ、100℃のオーブン中で15分間放置した後、色抜けの有無を目視で確認し、下記基準に従って評価した。
○:パターンの色抜けが全くない
×:パターンの色抜けが存在する (1) Evaluation of solvent resistance A coating film prepared by pattern formation (with development) using a black photosensitive resin composition is dipped in N-methyl-2-pyrrolidone together with a glass substrate, and then in an oven at 100 ° C for 15 minutes. After leaving, the presence or absence of color loss was visually confirmed and evaluated according to the following criteria.
◯: There is no color loss in the pattern x: There is color loss in the pattern
黒色感光性樹脂組成物によるパターン形成(現像有り)において、0.2質量%の水酸化カリウム水溶液での現像中、パターンが見え始めるまでに掛かる時間を測定した。測定時間は180秒までとし、それまでにパターンが見えなかった場合は現像不可と判断した。また、現像形態(未露光部分がどのように除去されるか)を目視で確認し、下記基準に従って評価した。
○:未露光部分が現像液に溶解する
×:未露光部分が剥離する (2) Evaluation of developability In pattern formation (with development) using the black photosensitive resin composition, during development with a 0.2 mass% potassium hydroxide aqueous solution, the time taken until the pattern began to be visible was measured. The measurement time was up to 180 seconds, and when the pattern was not visible by then, it was judged that development was not possible. Further, the development form (how the unexposed portion is removed) was visually confirmed and evaluated according to the following criteria.
◯: The unexposed portion is dissolved in the developing solution ×: The unexposed portion is peeled off
黒色感光性樹脂組成物によるパターン形成(現像無し)にて作製した塗膜の550nmにおける反射率を、(株)島津製作所製 分光光度計UV-1650PCを用いて測定した。 (3) Evaluation of reflectance The reflectance at 550 nm of the coating film prepared by pattern formation (without development) using the black photosensitive resin composition was measured using a spectrophotometer UV-1650PC manufactured by Shimadzu Corporation. ..
Claims (11)
- エポキシ基含有共重合体(P1)のエポキシ基に、不飽和カルボン酸(a-4)が開環付加し、さらに、前記エポキシ基が開環して生じたヒドロキシ基に多塩基酸無水物(a-5)が付加してなる共重合体(A1)であって、
前記エポキシ基含有共重合体(P1)は、
炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および下記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、
下記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、
エポキシ基含有(メタ)アクリレート(a-3)由来の構成単位とを含有する共重合体であり、
酸価が20KOHmg/g以上であることを特徴とする共重合体。
The epoxy group-containing copolymer (P1) is
Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group;
A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2),
A copolymer containing a structural unit derived from an epoxy group-containing (meth) acrylate (a-3),
A copolymer having an acid value of 20 KOHmg / g or more.
- エポキシ基含有(メタ)アクリレート(a-3)のエポキシ基に、カルボキシ基含有共重合体(P2)が開環付加してなるヒドロキシ基を有する不飽和基含有共重合体(A2-I)、及び
前記ヒドロキシ基を有する不飽和基含有共重合体(A2-I)のヒドロキシ基に、多塩基酸無水物(a-5)が付加してなる不飽和基含有共重合体(A2―II)からなる群から選択される少なくとも1種を含む共重合体(A2)であって、
前記カルボキシ基含有共重合体(P2)は、
炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)由来の構成単位および下記化学式(1)で示される重合性モノマー(a-1B)由来の構成単位からなる群から選択される少なくとも1種と、
下記化学式(2)で示されるフッ素含有(メタ)アクリレート(a-2)由来の構成単位と、
不飽和カルボン酸(a-4)由来の構成単位と
を含有する共重合体であり、
酸価が20KOHmg/g以上であることを特徴とする共重合体。
The carboxy group-containing copolymer (P2) is
Consisting of a structural unit derived from a polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms and a structural unit derived from a polymerizable monomer (a-1B) represented by the following chemical formula (1) At least one selected from the group;
A structural unit derived from a fluorine-containing (meth) acrylate (a-2) represented by the following chemical formula (2),
A copolymer containing a structural unit derived from an unsaturated carboxylic acid (a-4),
A copolymer having an acid value of 20 KOHmg / g or more.
- 屈折率が1.50未満である、請求項1又は2に記載の共重合体。 The copolymer according to claim 1 or 2, which has a refractive index of less than 1.50.
- 前記エポキシ基含有共重合体(P1)のフッ素当量が100g/mol以下である、請求項1又は請求項3に記載の共重合体。 The copolymer according to claim 1 or 3, wherein the epoxy group-containing copolymer (P1) has a fluorine equivalent of 100 g / mol or less.
- 前記カルボキシ基含有共重合体(P2)のフッ素当量が100g/mol以下である、請求項2又は請求項3に記載の共重合体。 The copolymer according to claim 2 or 3, wherein the carboxy group-containing copolymer (P2) has a fluorine equivalent of 100 g / mol or less.
- 前記炭素数10~20の橋かけ環式炭化水素基を有する重合性モノマー(a-1A)がジシクロペンテニル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、イソボルニル(メタ)アクリレート、及びアダマンチル(メタ)アクリレートからなる群から選ばれる少なくとも1種を含む、請求項1~5のいずれか1項に記載の共重合体(A)。 The polymerizable monomer (a-1A) having a bridged cyclic hydrocarbon group having 10 to 20 carbon atoms is dicyclopentenyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isobornyl (meth) acrylate, and adamantyl. The copolymer (A) according to any one of claims 1 to 5, which contains at least one selected from the group consisting of (meth) acrylates.
- 請求項1~6のいずれか1項に記載の共重合体と
溶剤(B)と
を含有する樹脂組成物。 A resin composition containing the copolymer according to any one of claims 1 to 6 and a solvent (B). - 更に反応性希釈剤(C)を含有する請求項7に記載の樹脂組成物。 The resin composition according to claim 7, which further contains a reactive diluent (C).
- 更に光重合開始剤(D)
を含有する請求項7または8に記載の樹脂組成物。 Further, a photopolymerization initiator (D)
The resin composition according to claim 7, which comprises: - 着色剤(E)を含有し、
前記着色剤(E)が染料および顔料からなる群から選択される少なくとも1種である、請求項7~9のいずれか1項に記載の樹脂組成物。 Contains a colorant (E),
The resin composition according to any one of claims 7 to 9, wherein the colorant (E) is at least one selected from the group consisting of dyes and pigments. - 請求項9又は10に記載の樹脂組成物の硬化物からなるレジスト。 A resist comprising a cured product of the resin composition according to claim 9.
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US20220204671A1 (en) * | 2020-12-24 | 2022-06-30 | Rohm And Haas Electronic Materials Korea Ltd. | Fluorinated acrylate-based copolymer and photosensitive resin composition comprising same |
WO2022168974A1 (en) * | 2021-02-08 | 2022-08-11 | 大阪有機化学工業株式会社 | Alkali-soluble resin, photosensitive resin composition, cured product, and image display device |
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