WO2020021808A1

WO2020021808A1 - Surface inspection device and surface inspection method

Info

Publication number: WO2020021808A1
Application number: PCT/JP2019/017990
Authority: WO
Inventors: 矢橋　暁; 裕之宮本; 山本　直人; 吉田　龍一
Original assignee: コニカミノルタ株式会社
Priority date: 2018-07-26
Filing date: 2019-04-26
Publication date: 2020-01-30
Also published as: JPWO2020021808A1

Abstract

This surface inspection device and surface inspection method are a device and method for radiating illumination light to a surface to be inspected of an object to be inspected, and inspecting the surface state of the surface to be inspected on the basis of a captured image of the surface to be inspected, wherein the surface to be inspected is imaged by irradiation with illumination light in which at least one combination of a bright region and a dark region is formed, the aforementioned image is generated, the object to be inspected and an imaging unit and illumination unit are moved relative to each other, and the imaging unit and the illumination unit are moved relative to each other.

Description

Surface inspection device and surface inspection method

The present invention relates to a surface inspection apparatus and a surface inspection method for inspecting a surface state of a surface to be inspected in an object to be inspected.

Conventionally, a method of irradiating illumination light on a surface to be inspected of an object to be inspected and inspecting a surface state of the surface to be inspected based on an image obtained by imaging the surface to be inspected is known. It has been disclosed.

The inspection device disclosed in Patent Literature 1 includes an illumination unit that irradiates a light to be inspected with light whose luminance changes periodically, and an imaging unit that captures an image of the inspection object that is irradiated with the light. An acquisition unit that acquires a periodic luminance change of the image from the captured image, and at least one of an amplitude value, an average value, a lower limit value and a phase value of the acquired luminance change, and an upper limit value and a contrast. A detection unit that detects a defect of the inspection object by using the calculated amplitude value, the average value, the lower limit value and the phase value, and at least one of the upper limit value and the contrast. And parts.

By the way, when inspecting the surface state, there is a need (request) for inspecting the surface state more finely and a need for inspecting the surface state more accurately. In order to meet such needs, a method of increasing the number of pixels of the imaging unit and a method of imaging at a higher magnification can be considered. Increasing the number of pixels is relatively difficult in terms of semiconductor design rules and operation speed, and in practice, a technique of imaging at a higher magnification is often employed.

On the other hand, when the area of the inspection surface of the inspection object is wider than the imaging range (angle of view) of the imaging unit, first, the inspection surface is divided into a plurality of regions in order to inspect the entire inspection surface. Then, a method of imaging each region with each of the plurality of imaging units is conceivable. If this technique is used to meet the needs, the number of imaging units increases. For example, if the magnification is doubled, the imaging range is reduced to 1/4, and as a result, the number of regions is quadrupled, and therefore the number of imaging units is quadrupled. Secondly, a method of moving one imaging unit to image each region is also conceivable. In order to meet the above-mentioned needs by this method, the inspection time increases. For example, if the magnification is doubled, the imaging range is reduced to 1/4, so that the number of regions is quadrupled, and therefore the inspection time is quadrupled.

Japanese Patent No. 5994419

The present invention is an invention made in view of the above-described circumstances, and an object thereof is to provide a surface inspection apparatus and a surface inspection apparatus that can further reduce the number of imaging units and inspection time even when the method of imaging at a higher magnification is adopted. It is to provide a surface inspection method.

In order to achieve the above-described object, a surface inspection apparatus and a surface inspection method that reflect one aspect of the present invention are based on an image obtained by irradiating an inspection surface of an inspection object with illumination light and capturing the inspection surface. An apparatus and a method for inspecting the surface condition of the surface to be inspected, wherein at least one set of a bright region and a dark region is formed and irradiated as the illumination light, and the image of the surface to be inspected is taken and the image is formed. Is generated, and the object to be inspected, the imaging unit and the illumination unit are relatively moved, and the imaging unit and the illumination unit are relatively moved. Such a surface inspection apparatus and a surface inspection method can further reduce the number of imaging units and the inspection time even when the above-described method of imaging at a higher magnification is employed.

Advantages and features provided by one or more embodiments of the invention will be more fully understood from the detailed description given below and the accompanying drawings. These detailed descriptions and accompanying drawings are provided by way of example only and are not intended as limiting definitions of the present invention.

It is a perspective view showing the mechanical composition of the surface inspection device in a 1st embodiment. It is a figure for explaining a light radiation surface in an illumination part of the surface inspection device. It is a figure for explaining arrangement of each of a plurality of imaging parts in the surface inspection device. FIG. 2 is a block diagram illustrating an electrical configuration of the surface inspection device according to the first embodiment. It is a figure for explaining the movement operation in the surface inspection device of a 1st embodiment. It is a perspective view showing the mechanical composition of the surface inspection device in a 2nd embodiment. It is a perspective view showing the mechanical composition of the surface inspection device in a 3rd embodiment. It is a figure for explaining movement operation in a surface inspection device of a 3rd embodiment. It is a perspective view showing the mechanical composition of the surface inspection device in a 4th embodiment. It is a figure for explaining movement operation in a surface inspection device of a 4th embodiment. It is a perspective view showing the mechanical composition of the surface inspection device in a 5th embodiment. It is a figure for explaining movement operation in a surface inspection device of a 5th embodiment.

Hereinafter, one or more embodiments of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited to the disclosed embodiments. In each of the drawings, configurations denoted by the same reference numerals indicate the same configurations, and the description thereof will be omitted as appropriate. In this specification, a generic name is denoted by a reference numeral with a suffix omitted, and an individual configuration is denoted by a reference numeral with a suffix.

The surface inspection apparatus according to the embodiment is an apparatus that irradiates the inspection surface of the inspection object with illumination light and inspects the surface state of the inspection surface based on an image obtained by capturing the inspection surface, and includes a bright area and An illumination unit that forms at least one set of dark regions and irradiates the illumination light as the illumination light; an imaging unit that captures the inspection surface to generate the image; the inspection object, the imaging unit, and the illumination A moving unit that relatively moves the unit and relatively moves the imaging unit and the illumination unit. Hereinafter, such a surface inspection device will be more specifically described using the surface inspection devices Da to De according to the first to fifth embodiments.

(1st Embodiment)
FIG. 1 is a perspective view illustrating a mechanical configuration of the surface inspection device according to the first embodiment. FIG. 2 is a diagram for explaining a light emitting surface in an illumination unit of the surface inspection device. The illumination unit having the light emitting surface shown in FIG. 2 is also used in each of the surface inspection devices Db to De in the second to fifth embodiments described later. FIG. 3 is a diagram for explaining the arrangement of each of a plurality of imaging units in the surface inspection apparatus. Note that a plurality of imaging units in each of the surface inspection devices Db to De of the second to fifth embodiments described below are arranged in the same manner as in FIG. FIG. 4 is a block diagram illustrating an electrical configuration of the surface inspection device according to the first embodiment. In FIG. 4, each configuration in each of the surface inspection devices Db to De of the second to fifth embodiments described later is also shown by reference numerals in parentheses.

The surface inspection apparatus Da according to the first embodiment includes, for example, one or a plurality of illumination units LP (LP-1, LP-2) and one or a plurality of imaging units CA (CA) as shown in FIGS. -1 to CA-11), a moving unit MVa, a control processing unit 71a, an input unit 72, an output unit 73, an interface unit (IF unit) 74, and a storage unit 75.

The illumination unit LP is connected to the control processing unit 71a, and forms at least one set of a bright area BA and a dark area DA on the inspection surface of the inspection object SP as illumination light under the control of the control processing unit 71a. It is a device for irradiation. In the present embodiment, as illustrated in FIG. 1, the illumination unit LP includes two first and second illumination units LP-1 and LP-2 arranged side by side with the imaging unit CA interposed therebetween. The first and second illumination units LP-1 and LP-2 form, for example, at least one pair of a light source unit that emits light and a light area BA and a dark area DA, and emit light from the light source unit. And a light / dark area forming section that illuminates the light thus emitted as the illumination light. FIG. 2 shows a plurality of sets of the light area BA and the dark area DA, and four sets in this example. The bright area BA and the dark area DA each have a rectangular shape (linear shape) elongated in one direction, and are arranged so as to be juxtaposed in parallel with each other. The light source unit includes, for example, a white fluorescent lamp and a white LED. The light / dark area forming portion is formed, for example, so as to form a plurality of light shielding members formed in a rectangular shape elongated in one direction in parallel with each other at predetermined intervals to form a dark area DA. A light diffusion sheet (light diffusion plate) is provided. Alternatively, for example, the light and dark area forming unit is configured to include a liquid crystal panel. In such a liquid crystal panel, each pixel is controlled to alternately transmit and block light in a plurality of rectangular shapes that are long in one direction.

The imaging unit CA is a device that is connected to the control processing unit 71a and generates an image by capturing an image of the inspection target surface of the inspection target SP under the control of the control processing unit 71a. The imaging unit CA outputs the generated image (image data) to the control processing unit 71a. The inspection object SP has, for example, a three-dimensional three-dimensional shape having a bottom surface, and the imaging unit CA is disposed along a predetermined direction on all or a part of the outer surface of the inspection object SP except for the bottom surface. Is more than one. More specifically, the inspection object SP is a three-dimensional three-dimensional shape having a bottom surface, a top surface, a front surface, a back surface, a right side surface, and a left side surface. For example, the inspection object SP is a vehicle. First to fourth imaging units CA-1 to CA-4, fifth to seventh imaging units CA-5 to CA-7 for imaging the upper surface, and eighth to eleventh imaging units CA-8 for imaging the right side surface. ~ CA-11.

Since the inspection of the surface state is detected by performing image processing on the image with pixel values, as described later, the imaging unit CA may include, for example, a camera that generates an image in color, and may be configured to have a monochrome image. May be provided with a camera that generates the image data. More specifically, the imaging unit CA is an imaging optical system that forms an optical image of the imaging target on a predetermined imaging surface, the light receiving surface is arranged so as to match the imaging surface, and the imaging target CA A digital camera including an image sensor that converts an optical image into an electric signal, and an image processing unit that generates image data that is data representing the image of the imaging target by performing image processing on an output of the image sensor. . In the present embodiment, a telephoto lens with a small angle of view, a zoom lens with a small angle of view, or the like is preferable as the imaging optical system in order to improve the resolution of surface inspection. The number of the imaging units CA is appropriately set according to the size (width, area), shape, size of the angle of view, and the distance from the imaging unit CA to the inspection surface of the inspection surface of the inspection object SP. Is done.

The moving unit MVa relatively moves the inspection object SP, the imaging unit CA, and the illumination unit LP, and relatively moves the imaging unit CA and the illumination unit LP. That is, the moving unit MVa treats the imaging unit CA and the illuminating unit LP as one unit when the inspection object SP and the imaging unit CA and the illuminating unit LP are relatively moved, and the imaging unit CA and the illuminating unit LP. When relatively moving the LP, the imaging unit CA and the illumination unit LP are individually handled. In the present embodiment, the moving unit MVa moves the imaging unit CA and the illumination unit LP with respect to the inspection object SP that does not move during the inspection, and moves the illumination unit CA with respect to the imaging unit CA that does not move during image generation.

More specifically, for example, as shown in FIG. 1, the moving unit MVa includes a first lighting moving unit 1a-1 that moves the first lighting unit LP-1, and first to eleventh imaging units. An imaging moving section 3a for integrally moving the sections CA-1 to CA-11 and a second lighting moving section 1a-2 for moving the second lighting section LP-2 are provided. Since the first illumination moving section 1a-1 and the second illumination moving section 1a-2 have the same configuration, the configuration of the first illumination moving section 1a-1 will be described below. The description of the illumination moving section 1a-2 is omitted, but in the following description, the "first" and the suffix "-1" are replaced with "second" and "-2", respectively, to thereby provide the second illumination. The configuration of the moving unit 1a-2 can be described.

More specifically, the first lighting moving section 1a-1 includes first and second bases 11a-1 and 15a-1, first and second standing members 12a-1 and 14a-1, and a beam member. 13a-1, first and second trucks 16a-1 and 17a-1, and first and second power sources 18a-1 and 19a-1.

The first base 11a-1, the first standing member 12a-1, the beam member 13a-1, the second standing member 14a-1 and the second base 15a-1 are respectively made of columnar or plate-like members. It is a member that is configured and sequentially fixedly connected (connected) in this order, has a gate shape (substantially U-shaped, approximately C-shaped) in front view, and has a first illumination along the inner wall surface. A second holding member for holding the portion LP-1 is formed. That is, the lower end (one end) of the first standing member 12a-1 is fixedly connected to the first base 11a-1 so as to stand substantially vertically, and the first standing member 12a-1. Are fixedly connected to the left end (one end) of the beam member 13a-1 so as to be orthogonal to each other. The lower end (one end) of the second standing member 14a-1 is fixedly connected to the second base 15a-1 so as to stand substantially vertically, and the upper end of the second standing member 14a-1. The part (the other end) is fixedly connected to the right end (the other end) of the beam member 13a-1 so as to be orthogonal to each other. When the first lighting unit LP-1 is held by the second holding members 11a-1 to 15a-1, the first lighting unit LP-1 may be provided with one device. May be provided.

The first and second bogies 16a-1 and 17a-1 each include a first wheel having a pair of left and right circular members connected by a first axle, and a pair of left and right circular members connected by a second axle. , A holding frame for rotatably holding the first and second wheels spaced apart back and forth, and a speed reducer attached to the first axle (or the second axle). A first base 11a-1 is fixedly connected to the holding frame of the first truck 16a-1, and a second base 15a-1 is fixed to the holding frame of the second truck 17a-1. Fixedly connected.

The first and second power sources 18a-1 and 19a-1 are connected to a control processing unit 71a, respectively, and control the first and second power sources 18a-1 and 17a-1 according to the control of the control processing unit 71a. An actuator such as a motor that generates power (driving force, rotational force) for rotating the first wheel (or the second wheel). The first power source 18a-1 is attached to the holding frame of the first bogie 16a-1 and the first axle (or the first axle (or the second axle) via the speed reducer attached to the first axle (or the second axle). The rotational force is transmitted to the second wheel, thereby rotating the first wheel (or the second wheel). The second power source 19a-1 is attached to the holding frame of the second bogie 17a-1 and the first axle (or the first axle (or the second axle) via the speed reducer attached to the first axle (or the second axle). The rotational force is transmitted to the second wheel, thereby rotating the first wheel (or the second wheel).

The imaging moving unit 3a includes first and

second bases

31a and 35a, first and

second standing members

32a and 34a, beam members 33a, first and

second carriages

36a and 37a, And

second power sources

38a and 39a.

The first and

second bases

31a and 35a are plate-shaped members, respectively, and the first and

second standing members

32a and 34a and the beam member 33a are column-shaped (rod-shaped) members, respectively. The first base 31a, the first standing member 32a, the beam member 33a, the second standing member 34a, and the second base 35a are sequentially fixedly connected (connected) in this order, and the gate is viewed from the front. (Substantially U-shaped, substantially C-shaped), and a plurality of predetermined locations on the first base 31a, the first standing member 32a, the beam member 33a, the second standing portion 34a, and the second base 35a. At (position), a first holding member that holds the plurality of imaging units CA is formed. That is, the lower end (one end) of the first standing member 32a is fixedly connected to the first base 31a so as to stand substantially vertically, and the upper end (the other end) of the first standing member 32a. The parts are fixedly connected to the left end (one end) of the beam member 33a so as to be orthogonal to each other. The lower end (one end) of the second standing member 34a is fixedly connected to the second base 35a so as to stand substantially vertically, and the upper end (the other end) of the second standing member 34a. Are fixedly connected to the right end (the other end) of the beam member 33a so as to be orthogonal to each other. In the present embodiment, as shown in FIG. 3, the first imaging unit CA-1 is attached obliquely upward at a first position at the lower end of the first upright member 32a. The second and third imaging units CA-2 and CA-3 are attached to predetermined upper and lower second and third positions, respectively, at a predetermined distance from the center position of the first standing member 32a. A fourth imaging unit CA-4 is attached obliquely downward at a fourth position at the upper end, and a sixth imaging unit CA-6 is attached at a sixth position at the center of the beam member 33a. Fifth and seventh imaging units CA-5 and CA-7 are respectively attached to the left and right fifth and seventh positions spaced apart from the center position by a predetermined distance, respectively. 11th shooting at 11th position The portion CA-11 is mounted obliquely upward, and the ninth and tenth imaging units CA are respectively located at predetermined ninth and tenth positions above and below a predetermined distance from the center position of the second upright member 34a. -9 and CA-10 are attached, and an eighth imaging unit CA-8 is attached obliquely downward at an eighth position of the upper end of the second standing member 34a.

The first and

second bogies

36a and 37a each include a first wheel having a pair of left and right circular members connected by a first axle, and a second wheel having a pair of left and right circular members connected by a second axle. The vehicle includes a wheel, a holding frame that rotatably holds the first and second wheels at an interval in the front-rear direction, and a speed reducer attached to the first axle (or the second axle). A first base 31a is fixedly connected to the holding frame of the first carriage 36a, and a second base 35a is fixedly connected to the holding frame of the second carriage 37a.

The first and

second power sources

38a and 39a are connected to a control processing unit 71a, respectively, and drive (drive force, rotation) for rotating the first wheel (or the second wheel) under the control of the control processing unit 71a. Force), for example, an actuator such as a motor. The first power source 38a is attached to the holding frame of the first bogie 36a and the first axle (or the second wheel) via the speed reducer attached to the first axle (or the second axle). ), Thereby rotating the first wheel (or the second wheel). The second power source 39a is attached to the holding frame of the second bogie 37a and the first axle (or the second wheel) via the speed reducer attached to the first axle (or the second axle). ), Thereby rotating the first wheel (or the second wheel).

１ The first illumination moving unit 1a-1, the imaging moving unit 3a, and the second illumination moving unit 1a-2 having such a configuration are sequentially arranged in this order. That is, the imaging moving unit 3a is arranged between the first and second illumination moving units 1a-1 and 1a-2. The lengths of the beam member 13a-1 of the first illumination moving section 1a-1, the beam member 33a of the imaging moving section 3a, and the beam member 13a-2 of the second illumination moving section 1a-2 are The first and second wheels of the first truck 16a-1 in the first moving unit 1a-1, the first and second wheels of the first truck 36a in the imaging moving unit 31a, and the second moving of the truck. The first and second wheels of the first truck 16a-2 in the unit 1a-2 are aligned with each other, and the first and second wheels of the second truck 17a-1 in the first lighting moving unit 1a-1. The wheels, the first and second wheels of the second carriage 37a in the imaging moving section 31a, and the first and second wheels of the second carriage 17a-2 in the second lighting moving section 1a-2 are the same as each other. Adjusted to line up on the line

Then, a relative movement between the inspection object SP, the imaging unit CA, and the illumination unit LP is guided to a predetermined inspection location for inspecting the inspection object SP, and the relative movement between the imaging unit CA and the illumination unit LP is guided. A guide member for guiding the movement is arranged.

More specifically, the guide member includes first and second carriages 16a-1 and 17a-1 of the first illumination moving section 1a-1, and first and

second carriages

36a and 37a of the imaging moving section 3a. And a pair of left and right first and

second guide members

51a and 52a for guiding the first and second carriages 16a-2 and 17a-2 of the second illumination moving section 1a-2, respectively. The first guide member 51a includes a pair of left and right columnar first and second guide rails 51a-1 and 51a-2 that are long in a predetermined moving direction, and the first and second guide rails 51a-1. , 51a-2 are laid at the inspection place so as to be juxtaposed in parallel at a predetermined interval. Like the first guide member 51a, the second guide member 52a includes a pair of left and right columnar first and second guide rails 52a-1 and 52a-2 that are long in the moving direction. The second guide rails 52a-1 and 52a-2 are laid at the inspection place so as to be juxtaposed in parallel at a predetermined interval. The first and

second guide members

51a and 52a are formed by the beam member 13a-1 of the first illumination moving unit 1a-1, the beam member 33a of the imaging moving unit 3a, and the second illumination moving unit 1a-2. Of the beam members 13a-2 are juxtaposed in parallel with an interval corresponding to each length.

The first lighting moving section 1a-1, the imaging moving section 3a, and the second lighting moving section 1a-2 are provided by the first and second carriages 16a-1 of the first lighting moving section 1a-1. The wheels, the first and second wheels of the first truck 36a in the imaging moving unit 3a, and the first and second wheels of the first truck 16a-2 in the second lighting moving unit 1a-2 are respectively the first and second wheels. The first guide member 51a is placed on the first and second guide rails 51a-1 and 51a-2 and guided (guided) by the first and second guide rails 51a-1 and 51a-2 of the first guide member 51a. The first and second wheels of the second carriage 17a-1 in the first lighting moving section 1a-1, the first and second wheels of the second carriage 37a in the imaging moving section 3a, and the second lighting In the moving unit 1a-2 The first and second wheels of the two carriages 17a-2 are respectively mounted on the first and second guide rails 52a-1 and 52a-2 of the second guide member 52a, and the first and second wheels of the second guide member 52a are respectively mounted. It is arranged so as to be guided (guided) by the two guide rails 52a-1 and 52a-2.

When the first and second power sources 18a-1 and 19a-1 operate in synchronization with each other under the control of the control processing unit 71a, the first illumination unit LP-1 held by the first illumination moving unit 1a-1 is activated. Each rotational force is transmitted to each of the first wheels (or each of the second wheels) via each of the speed reducers of the first and second bogies 16a-1 and 17a-1, and the first and second bogies 16a- Each of the first wheels (or each of the second wheels) of the

wheels

1 and 17a-1 rotates, and the first and second wheels of the first and second trucks 16a-1 and 17a-1 are respectively the first and second wheels. The

second guide members

51a, 52a are guided by the first and second guide rails 51a-1, 51a-2; 52a-1, 52a-2, and move along the first and

second guide members

51a, 52a. Similarly, the plurality of imaging units CA (the first to eleventh imaging units CA-1 to CA-11 in the present embodiment) held by the imaging moving unit 3a are controlled by the control processing unit 71a. When the two

power sources

38a, 39a operate synchronously, their respective rotational forces are transmitted to the respective first wheels (or the respective second wheels) via the respective reduction gears of the first and

second carriages

36a, 37a. Each of the first wheels (or each of the second wheels) of the first and

second bogies

36a, 37a rotates, and each of the first and second wheels of the first and

second bogies

36a, 37a becomes the first wheel. And the

second guide members

51a, 52a. . Similarly, the second illumination unit LP-2 held by the second illumination moving unit 1a-2 is synchronized with the first and second power sources 18a-2 and 19a-2 by the control of the control processing unit 71a. When operated, the respective rotational forces are transmitted to the respective first wheels (or the respective second wheels) via the respective speed reducers of the first and second bogies 16a-2 and 17a-2, and the first and second wheels are transmitted. Each of the first wheels (or each of the second wheels) of the carts 16a-2 and 17a-2 rotates, and each of the first and second wheels of the first and second carts 16a-2 and 17a-2 respectively. Guided by the first and second guide rails 51a-1, 51a-2; 52a-1, 52a-2 of the first and

second guide members

51a, 52a, along the first and

second guide members

51a, 52a. Moving.

Therefore, in the present embodiment, the illumination unit LP is a plurality of illumination units LP arranged at a predetermined distance along the moving direction of the moving unit MVa, in this example, two first and second illumination units LP-1. , LP-2. Each of the first and second illumination units LP-1 and LP-2 sequentially forms a plurality of sets of a light area BA and a dark area DA along the moving direction of the moving unit MVa and irradiates them as illumination light. I do. The plurality of imaging units CA are arranged in an intersecting direction that intersects the moving direction of the moving unit MVa, in this example, an orthogonal direction.

In FIG. 4, an input unit 72 is connected to the control processing unit 71a, and is necessary for performing various inspections such as a command for instructing the start of an inspection and the inspection such as a name of the inspection object SP, for example. This is a device for inputting various data to the surface inspection device Da, and is, for example, a plurality of input switches to which predetermined functions are assigned, a keyboard, a mouse, and the like. The output unit 73 is a device that is connected to the control processing unit 71a and outputs a command or data input from the input unit 72 and a detection result obtained by the surface inspection device Da according to the control of the control processing unit 71a. There are, for example, display devices such as LCDs (Liquid Crystal Display Devices) and organic EL displays, and printing devices such as printers.

The touch panel may include the input unit 72 and the output unit 73. In the case of configuring this touch panel, the input unit 72 is a position input device for detecting and inputting an operation position of, for example, a resistive type or a capacitive type, and the output unit 73 is a display device. In this touch panel, a position input device is provided on the display surface of the display device, one or more candidates for input content that can be input to the display device are displayed, and the user touches a display position where the input content desired to be input is displayed. Then, the position is detected by the position input device, and the display content displayed at the detected position is input to the surface inspection device Da as the operation input content of the user. With such a touch panel, the user can easily and intuitively understand the input operation, so that the surface inspection device Da that is easy for the user to handle is provided.

The IF unit 74 is a circuit that is connected to the control processing unit 71a and that inputs and outputs data to and from external devices under the control of the control processing unit 71a. For example, an interface circuit of an RS-232C serial communication system is used. , An interface circuit using the Bluetooth (registered trademark) standard, an interface circuit for performing infrared communication such as the IrDA (Infrared Data Association) standard, and an interface circuit using the USB (Universal Serial Bus) standard. The IF unit 74 is a circuit that performs communication with an external device, and may be, for example, a data communication card, a communication interface circuit that conforms to the IEEE 802.11 standard, or the like.

The storage unit 75 is a circuit that is connected to the control processing unit 71a and stores various predetermined programs and various predetermined data under the control of the control processing unit 71a.

The various predetermined programs include a control program, a movement control program, an inspection processing program, and the like. The control program is a program for controlling each unit LP, CA, 72 to 74 of the surface inspection apparatus Da according to the function of each unit. The movement control program is a program for controlling the movement operation of the movement unit MVa. The inspection processing program is a program for inspecting the surface condition of the inspection target surface of the inspection target SP based on the image generated by the imaging unit CA. The various types of predetermined data include, for example, data necessary for executing each program, such as the name of the inspection object SP.

The storage unit 75 includes, for example, a ROM (Read Only Memory) that is a nonvolatile storage element, an EEPROM (Electrically Erasable Programmable Read Only Memory) that is a rewritable nonvolatile storage element, and the like. The storage unit 75 includes a RAM (Random Access Memory) serving as a working memory of a so-called control processing unit 71a that stores data and the like generated during execution of the predetermined program.

The control processing unit 71a controls the respective units LP, CA, MVa, and 72 to 75 of the surface inspection apparatus Da according to the functions of the respective units, and inspects the surface state of the inspection target surface of the inspection target SP. It is. The control processing unit 71a includes, for example, a CPU (Central Processing Unit) and its peripheral circuits. The control processing unit 71a functionally includes a control unit 711, a movement control unit 712a, and an inspection processing unit 713 by executing the control processing program.

The control unit 711 controls each unit LP, CA, 72 to 75 of the surface inspection device Da according to the function of each unit, and controls the entire surface inspection device Da.

The movement control unit 712a includes first and second power sources 38a that generate first power for moving the first holding members 31a to 35a that hold the first to eleventh imaging units CA-1 to CA-11. , 39a to move the second holding members 11a-1 to 15a-1; 11a-2 to 15a-2 holding the first and second illumination units LP-1 and LP-2, respectively. By controlling the first and second power sources 18a-1, 19a-1; 18a-2, 19a-2 that generate the second power, the first to eleventh imaging units CA-1 to CA-1 to the inspection object SP are controlled. CA-11 and the first and second illumination units LP-1 and LP-2 are moved in one direction along the movement direction, and the first to eleventh imaging units CA-1 to CA-11 are moved to the first position. And the second illumination units LP-1 and LP-2 As it is moved in the one direction along the moving direction, and controls the movement of the movable portion MVa. Since the inspection surface of the inspection object SP has a larger area than the imaging range of the imaging unit CA, in the present embodiment, the inspection surface has a plurality of inspections different from each other along the moving direction of the inspection object SP. A plurality of inspection areas; The movement control unit 712a controls the first to eleventh imaging units CA-1 to CA-11 and the first and second illumination units LP-1 and LP-2 with respect to the inspection object SP by using the imaging movement unit 3a and the first imaging unit. And moving through the second illumination moving sections 1a-1 and 1a-2 so as to be sequentially positioned in the plurality of inspection areas, respectively, and in each of the plurality of inspection areas, the inspection area in the inspection object SP in each of the plurality of inspection areas. The first and second illumination units LP-1 and LP-2 are moved to the first and second illumination moving units 1a- with respect to the first to eleventh imaging units CA-1 to CA-11 stopped so as to capture images. 1, 1a-2. Under the control of the movement control unit 712a, the movement unit MVa performs a movement operation as described later.

The inspection processing unit 713 is a program that inspects the surface state of the inspection target surface of the inspection target SP based on the image generated by the imaging unit CA. In the present embodiment, the plurality of images are obtained by imaging each of the inspected surfaces illuminated with illumination light having a plurality of mutually different incident angles with respect to the inspected surface at mutually different timings. In such a plurality of images, when one pixel is arranged in chronological order and attention is paid to the pixels, the first and second illumination units LP-1 and LP-2 are covered with illumination light in which the bright area BA and the dark area DA are alternately repeated. Since the imaging surface CA illuminates the inspection surface and observes (receives) the light illuminated at a predetermined incident angle, a plurality of pixel values arranged in chronological order in the surface state without a defect have the light-dark pattern. On the other hand, in the surface state where a defect occurs, the profile becomes different from that obtained in the surface state without a defect. Therefore, the inspection processing unit 713 calculates the difference between the profiles, and makes a determination by comparing the calculated difference with, for example, a predetermined threshold value. Thereby, the inspection processing unit 713 inspects the surface state of the inspection target surface of the inspection target SP.

欠陥 When light is incident at the same incident angle, the defect changes its reflection direction and reflectivity according to the presence or absence of the defect. For example, the defect is a concave portion or a convex portion formed on the surface. Further, for example, in the case of inspecting the state of a painted surface, the defect is a painting defect including irregularities on the painted surface, which are so-called "bud", "drip", "repelling" and the like. The inspection object SP is not particularly limited as long as it can cause the defect, and is, for example, a vehicle body.

Next, the operation of the present embodiment will be described. FIG. 5 is a diagram for explaining a moving operation in the surface inspection device of the first embodiment. FIG. 5A is a diagram for explaining a moving operation when the surface inspection device Da is moved to the first first inspection region, and FIG. 5B generates a plurality of images used for inspection of the first inspection region. FIG. 5C is a diagram for explaining a moving operation in the case, and FIG. 5C is a diagram for explaining a moving operation when the surface inspection device Da is moved to the next second inspection region. FIG. FIG. 5E is a diagram for describing a moving operation when generating a plurality of images used for inspection of the second inspection region, and FIG. 5E illustrates a moving operation when the surface inspection device Da is moved to the last L-th inspection region. FIG. 5F is a diagram for explaining a moving operation when generating a plurality of images used for inspection of the F-th inspection region. In addition, FIG. 5 is also a diagram for explaining a moving operation in the surface inspection apparatus of the second embodiment, as will be understood from the description below.

(4) When the power is turned on, the surface inspection apparatus Da having such a configuration performs initialization of necessary parts and starts its operation. By executing the control processing program, the control processing unit 71a functionally includes the control unit 711, the movement control unit 712a, and the inspection processing unit 713.

In FIG. 5, for convenience of explanation, the illustration of the first illumination moving unit 1a-1, the imaging moving unit 3a, and the second illumination moving unit 1a-2 is omitted. The imaging unit CA and the second illumination unit LP-2 are schematically illustrated. In the following description, each movement of the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 will be described. Will explain the operation of the surface inspection apparatus Da in the first embodiment, but as described above, the first illumination unit LP-1 is held by the first illumination moving unit 1a-1, and the first illumination unit LP-1 The imaging unit CA is moved by the movement of the movement unit 1a-1, the imaging unit CA is held by the imaging movement unit 3a, moves by the movement of the imaging movement unit 3a, and the second illumination unit LP-2 is moved by the second illumination. It is held by the unit 1a-2 and moves by the movement of the second illumination moving unit 1a-2. The same applies to FIGS. 8, 10 and 12 described later.

In the following description, the inspection surface of the inspection object SP is wider than the imaging range (angle of view) that can be imaged by one imaging unit CA. For this reason, the inspection surface of the inspection object SP has a plurality of inspection areas (first to L-th inspection areas, where L is the same as the inspection area) that can be imaged by one imaging unit CA along the movement direction. (An integer of 2 or more). The same applies to the second to fifth embodiments described later. In such a case, it is necessary to detect the positional relationship between the inspection object SP and the plurality of imaging units CA (the positions of the imaging units CA with respect to the inspection object SP). This positional relationship can be appropriately set for each imaging unit CA in the three-dimensional space by having the three-dimensional shape data of the measured object SP in advance. Actually, the measured object SP has a posture error when placed in the inspection area, but the posture of the measured object SP is detected by another imaging device and a distance sensor (not shown), Is correctly corrected with respect to the imaging unit CA. The same applies to the second to fifth embodiments described later. In FIG. 5, the predetermined moving direction is, for example, the horizontal direction on the paper, one direction in the moving direction is a direction from left to right on the paper, and the opposite direction in the moving direction is left to right on the paper. Direction. The same applies to FIG. 8 described later.

For example, when an instruction to start an inspection is received by the input unit 72, first, in FIG. 5, the movement control unit 712a of the control processing unit 71a determines that the plurality of imaging units CA The first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are respectively moved to the eleventh position Pa1-1, the twelfth position Pa1-2, and the thirteenth position Pa1- so as to image the surface. 3 is moved in one direction along the moving direction by the first lighting moving unit 1a-1, the imaging moving unit 3a, and the second lighting moving unit 1a-2. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are treated as one group, and the first illumination unit LP-1, The plurality of imaging units CA and the second illumination unit LP-2 move in one direction along the moving direction. Here, the eleventh position Pa1-1, the twelfth position Pa1-2, and the thirteenth position Pa1-3 are respectively sequentially arranged in this order along one direction of the moving direction, and the positions of the plurality of imaging units CA are arranged. In the example shown in FIG. 5A, the twelfth position Pa1-2 is a position in the contact state where the imaging moving unit 3a is in contact with the second lighting moving unit 1a-2 or the second lighting movement. The position is closer to the portion 1a-2. The twelfth position Pa1-2, which is the position of the plurality of imaging units CA, is a position in a contact state where the imaging moving unit 3a is in contact with the first lighting moving unit 1a-1, or a first lighting position. The position may be closer to the moving unit 1a-1 side.

Subsequently, as illustrated in FIG. 5B, the plurality of imaging units CA are stopped at the twelfth position Pa1-2, and the movement control unit 712a controls the first illumination unit LP-1 and the second illumination unit LP-2, respectively. From the eleventh position Pa1-1 and the thirteenth position Pa1-3 to the fourteenth position Pa1-4 and the sixteenth position Pa1-6, respectively, the first lighting moving part 1a-1 and the second lighting moving part 1a- 2 moves in one direction along the moving direction at a constant speed of the same moving speed. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are individually handled, and the first illumination unit LP is provided to the plurality of stopped imaging units CA. -1 and the second illumination unit LP-2 are moved in one direction along the moving direction at the same moving speed. Here, the eleventh position Pa1-1, the fourteenth position Pa1-4, the twelfth position Pa1-2, the thirteenth position Pa1-3, and the sixteenth position Pa1-6 are sequentially arranged in this order in the moving direction. In the example shown in FIG. 5B, the twelfth position Pa1-2, which is arranged along one direction and is the position of the plurality of imaging units CA, is such that the imaging moving unit 3a abuts on the first illumination moving unit 1a-1. In the abutted state or a position closer to the first lighting moving unit 1a-1 side. The twelfth position Pa1-2, which is the position of the plurality of imaging units CA, is the position in the contact state where the imaging moving unit 3a is in contact with the first illumination moving unit 1a-1 or the twelfth position Pa1-2. In the case where there is a position closer to the one illumination moving unit 1a-1, the twelfth position Pa1-2, which is the position of the plurality of imaging units CA, is determined by the imaging moving unit 3a being the second illumination moving unit 1a-2. Or the position close to the second illumination moving unit 1a-2 side. In this case, the first illumination unit LP-1 is supplied to the plurality of stopped imaging units CA. And the second illumination unit LP-2 moves in the opposite direction to the one direction at the same moving speed along the moving direction. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the stopped plurality of imaging units CA, the control processing unit 71a outputs the first The inspection surface of one inspection region is imaged a plurality of times at a predetermined sampling interval. Accordingly, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles at different timings with respect to the inspection surface of the first inspection region. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71a.

When a plurality of images on the surface to be inspected in the first inspection region are obtained in this manner, subsequently, as shown in FIG. 5C, the movement control unit 712a performs the same operation as the above-described movement operation described using FIG. 5A. The first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are respectively positioned at the 21st position such that the plurality of imaging units CA image the inspection surface of the next second inspection region. The first moving unit 1a-1, the imaging moving unit 3a, and the second moving unit 1a-2 move to Pa2-1, the 22nd position Pa2-2, and the 23rd position Pa2-3, respectively. Here, the twenty-first position Pa2-1, the twenty-second position Pa2-2, and the twenty-third position Pa2-3 are sequentially arranged in this order in one direction in the same manner as described above. In the example shown in FIG. 5C, the 22nd position Pa2-2 that is the position of the imaging unit CA is a position in a contact state where the imaging moving unit 3a is in contact with the second illumination moving unit 1a-2. This is a position closer to the second illumination moving unit 1a-2 side.

Subsequently, as illustrated in FIG. 5D, similarly to the above-described movement operation described with reference to FIG. 5B, the plurality of imaging units CA are stopped at the twenty-second position Pa2-2, and the movement control unit 712a outputs the first illumination. The first illumination unit LP-1 and the second illumination unit LP-2 are respectively illuminated from the 21st position Pa2-1 and the 23rd position Pa2-3 to the 24th position Pa2-4 and the 26th position Pa2-6, respectively. The first moving unit 1a-1 and the second illuminating moving unit 1a-2 move in one direction along the moving direction at a constant speed of the same moving speed. Here, the 21st position Pa2-1, the 24th position Pa2-4, the 22nd position Pa2-2, the 23rd position Pa2-3, and the 26th position Pa2-6 are sequentially in this order in the moving direction. In the example shown in FIG. 5D, the 22nd position Pa2-2 that is arranged along one direction and is the position of the plurality of imaging units CA is such that the imaging moving unit 3a abuts on the first illumination moving unit 1a-1. In the abutted state or a position closer to the first lighting moving unit 1a-1 side. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the stopped plurality of imaging units CA, the control processing unit 71a sends a first The inspection surface of the two inspection regions is imaged a plurality of times at a predetermined sampling interval, and the plurality of images generated thereby are output to the control processing unit 71a, respectively.

Hereinafter, as shown in FIG. 5E and FIG. 5F, the moving operation described with reference to FIG. 5A and FIG. 5B are described until a plurality of images for the surface to be inspected in the final L-th inspection region are obtained. Each movement operation similar to each of the above-described movement operations is repeated, and while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the final movement operation is performed. Are obtained for the inspection surface of the L-th inspection region.

Then, when a plurality of images for the inspection surface of each inspection region are obtained, the inspection processing unit 713 of the control processing unit 71a subsequently performs an inspection for each inspection surface of each inspection region in the inspection surface of the inspection region. The surface condition of the inspection surface in the inspection area is inspected based on the plurality of images, and the inspection result is output to the output unit 73. Note that the inspection processing unit 713 may output the inspection result from the IF unit 74 to an external device as needed.

In the above description, the inspection processing unit 713 collects and inspects the surface state of the inspection surface in each inspection region after obtaining a plurality of images for the inspection surface in each inspection region. After each of the above-described moving operations and the respective moving operations described above with reference to FIG. 5B are performed and a plurality of images on the inspection surface of the inspection region are obtained, the inspection processing unit 713 Then, the above-described moving operation described with reference to FIG. 5A may be executed in order to inspect the surface state of the inspection surface in the inspection region and then inspect the inspection surface in the next inspection region. Alternatively, after a plurality of images on the surface to be inspected in the inspection area are obtained, each of the above-described moving operations described with reference to FIG. 5A and the above-described moving operations described with reference to FIG. 5B is performed. The inspection processing unit 713 may execute the moving operation, and may inspect the surface state of the inspection target surface in the inspection area.

As described above, the surface inspection apparatus Da and the surface inspection method mounted thereon according to the present embodiment include the moving unit MVa that relatively moves the inspection object SP, the imaging unit CA, and the illumination unit LP. Even if there are a plurality of imaging units CA in the cross direction intersecting the moving direction, in this embodiment, eleven first to eleventh imaging units CA-1 to CA-11, the number of the imaging units CA in the moving direction Need not be increased, the number of imaging units CA can be further reduced, and the inspection time can be further reduced by providing a plurality of imaging units CA in the cross direction. Therefore, the surface inspection apparatus Da and the surface inspection method can further reduce the number of the imaging units CA and the inspection time even if the above-described technique of imaging at a higher magnification is adopted. For example, if the magnification is doubled, the imaging range is reduced to 1/4, so that the number of inspection areas is quadrupled. Therefore, conventionally, the number of imaging units is quadrupled or the inspection time is reduced. Is quadrupled. However, in the present embodiment, even if the magnification is doubled, the number of imaging units CA is doubled and the inspection time is doubled.

The surface inspection apparatus Da and the surface inspection method can easily integrate the imaging unit CA even if the first holding members 31a to 35a holding the imaging unit CA are moved by the power of the first and

second power sources

38a and 39a. And the second holding members 11a-1 to 15a-1 holding the first illumination unit LP-1 are moved by the power of the first and second power sources 18a-1 and 19a-1, and the first illumination is performed. The unit LP-1 can be easily and integrally moved, and the second holding members 11a-2 to 15a-2 for holding the second illumination unit LP-2 are connected to the first and second power sources 18a-2 and 19a-2. The second illumination unit LP-2 can be easily and integrally moved even when moved by power. In particular, as in the present embodiment, the eleventh to eleventh eleventh to surround all or a part of the outer surface of the inspection object SP, more specifically, the left side surface, the upper surface and the right side surface of the vehicle SP. Even when the imaging units CA-1 to CA-11 are arranged and the first and second illumination units LP-1 and LP-2 are arranged, the first holding members 31a to 35a can be moved by the first and second power sources. The first to eleventh imaging units CA-1 to CA-11 can be easily and integrally moved even when moved by the power of the

sources

38a and 39a, and the second holding members 11a-1 to 15a-1; Even if 2 to 15a-2 are moved by the power of the first and second power sources 18a-1, 19a-1; 18a-2, 19a-2, the first and second lighting units LP-1, LP-2 are moved. Can be easily and integrally moved.

In the surface inspection apparatus Da and the surface inspection method, the imaging moving unit 3a includes the first and

second power sources

38a and 39a, and the first illumination moving unit 1a-1 includes the first and second power sources 18a-1. , 19a-1 and the second illumination moving unit 1a-2 includes the first and second power sources 18a-2, 19a-2, so that the imaging unit CA, the first illumination unit LP-1, The two lighting units LP-2 can be handled individually.

は Since the surface inspection device Da and the surface inspection method move only in one direction, the member that moves during the movement moves only in one direction, and can move stably.

Next, another embodiment will be described.
(2nd Embodiment)
FIG. 6 is a perspective view illustrating a mechanical configuration of the surface inspection device according to the second embodiment. In the surface inspection apparatus Da according to the first embodiment, the first illumination moving unit 1a-1, the imaging moving unit 3a, and the second illumination moving unit 1a-2 are individually provided with the first and second guide members 51a. , 52a, and moved. However, in the surface inspection apparatus Db in the second embodiment, the imaging moving unit 3b is guided by the first and

second guide members

51b, 52b to move the first and second illuminations. The sections 1b-1 and 1b-2 are individually guided by third and

fourth guide members

53b and 54b provided in the imaging moving section 3b.

As shown in FIGS. 6 and 4, the surface inspection device Db according to the second embodiment includes one or a plurality of illumination units LP (LP-1, LP-2) and one or a plurality of imaging units CA ( CA-1 to CA-11), a moving unit MVb, a control processing unit 71b, an input unit 72, an output unit 73, an IF unit 74, and a storage unit 75. The illumination unit LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 in the surface inspection device Db according to the second embodiment are respectively illuminated units in the surface inspection device Da according to the first embodiment. The LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 are the same as those described above, and a description thereof will be omitted.

The moving unit MVb relatively moves the inspection object SP, the imaging unit CA, and the illumination unit LP, and relatively moves the imaging unit CA and the illumination unit LP, similarly to the above-described moving unit MVa. is there. Also in the second embodiment, as in the first embodiment, the moving unit MVb moves the imaging unit CA and the illumination unit LP relative to the inspection object SP that does not move during the inspection, and the imaging unit CA that does not move during image generation. To move the illumination unit CA.

More specifically, for example, as shown in FIG. 6, the moving unit MVb includes a first lighting moving unit 1b-1 that moves the first lighting unit LP-1, and first to eleventh imaging units. The imaging unit includes an imaging moving unit 3b that integrally moves the units CA-1 to CA-11, and a second illumination moving unit 1b-2 that moves the second illumination unit LP-2. Since the first lighting moving section 1b-1 and the second lighting moving section 1b-2 have the same configuration, the configuration of the first lighting moving section 1b-1 will be described below, and the second The description of the illumination moving section 1b-2 is omitted, but in the following description, the "first" and the suffix "-1" are replaced with "second" and "-2", respectively, to thereby provide the second illumination. The configuration of the moving unit 1b-2 can be described.

The imaging moving unit 3b includes first and

second bases

31b and 35b, first and second standing

members

32b and 34b, beam members 33b, first and

second carriages

36b and 37b, And

second power sources

38b and 39b. The first and

second bases

31b and 35b, the first and second standing

members

32b and 34b, the beam members 33b, the first and

second carriages

36b and 37b, and the first and

second bases

31b and 35b in the imaging moving unit 3b according to the second embodiment. , The first and

second power sources

38b and 39b respectively include first and

second bases

31b and 35b on which the first and second lighting moving parts 1b-1 and 1b-2 are mounted, respectively, The first and

second bases

31a, 35a, the first and second stands in the imaging moving section 3a of the first embodiment except that the first and second bases have a size (size, area) that can be moved by a predetermined moving distance. Since these are the same as the

installation members

32a and 34a, the beam member 33a, the first and

second carriages

36a and 37a, and the first and

second power sources

38a and 39a, the description thereof is omitted.

The first illumination moving section 1b-1 includes first and second bases 11b-1 and 15b-1, first and second standing members 12b-1 and 14b-1, and a beam member 13b-1. , First and second ball screws 16b-1 and 17b-1, and first and second power sources 18b-1 and 19b-1. The first and second bases 11b-1, 15b-1, the first and second standing members 12b-1, 14b-1, and the beams in the first lighting moving section 1b-1 of the second embodiment. The member 13b-1 is the first and second bases 11a-1 and 15a-1, the first and second standing members 12a-1 and 12a-1 in the first lighting moving unit 1a-1 of the first embodiment, respectively. Since it is the same as 14a-1 and the beam member 13a-1, the description is omitted.

Each of the first and second ball screws 16b-1 and 17b-1 is a mechanical element that converts a rotational force (rotational motion) into a linear motion. A plurality of balls that fit into the screw groove), and a nut that engages with the screw shaft via the plurality of balls by fitting the plurality of balls into a screw groove (nut-side screw groove). A holding frame for rotatably holding the screw shaft. The first base 11b-1 is fixedly connected to the nut of the first ball screw 16b-1, and the second base 15b-1 is fixed to the nut of the second ball screw 17b-1. Linked to

The first and second power sources 18b-1 and 19b-1 are connected to the control processing unit 71b, respectively, and respectively control the first and second ball screws 16b-1 and 17b-1 according to the control of the control processing unit 71b. An actuator such as a motor that generates power (driving force, rotational force) for rotating the screw shaft. The first power source 18b-1 is attached to the holding frame of the first ball screw 16b-1, transmits torque to the screw shaft, and thereby rotates the screw shaft. The second power source 19b-1 is attached to the holding frame of the second ball screw 17b-1, transmits torque to the screw shaft, and thereby rotates the screw shaft. Note that the first and second ball screws 16b-1 and 17b-1 each further include a speed reducer, and the first and second power sources 18b-1 and 19b-1 respectively operate via the speed reducers. Each rotational force may be transmitted to each screw shaft of the first and second ball screws 16b-1 and 17b-1.

The first and

second guide members

51b and 52b similar to the first and

second guide members

51a and 52a in the first embodiment are arranged at the inspection place. The imaging moving unit 3b is configured such that the first and second wheels of the first bogie 36b are placed on the first and second guide rails 51b-1 and 51b-2 of the first guide member 51b, respectively. Guided by the first and second guide rails 51b-1 and 51b-2 of the member 51b, the first and second wheels of the second carriage 37b in the imaging moving unit 3b are respectively connected to the second guide member 52b. Arranged so as to be placed on the first and second guide rails 52b-1 and 52b-2 and guided (guided) by the first and second guide rails 52b-1 and 52b-2 of the second guide member 52b. Is done.

In the present embodiment, a guide member that guides relative movement between the imaging unit CA and the illumination unit LP is disposed on each of the first and

second bases

31b and 35b in the imaging moving unit 3b. . More specifically, the guide member includes first and second ball screws 16b-1 and 17b-1 of the first lighting moving section 1b-1 and first and second ball screws 16b-1 and 17b-1 of the second lighting moving section 1b-2. A pair of left and right third and

fourth guide members

53b and 54b are provided to guide the first and second ball screws 16b-2 and 17b-2, respectively. The third guide member 53b includes a pair of left and right columnar first and second guide rails 53b-1, 53b-2 that are long in the moving direction, and the first and second guide rails 53b-1, 53b-2 are laid on the first base 31b of the imaging moving unit 3b so as to be juxtaposed in parallel at a predetermined interval. Like the third guide member 53b, the fourth guide member 54b includes a pair of left and right columnar first and second guide rails 54b-1 and 54b-2 that are long in the movement direction. The second guide rails 54b-1 and 54b-2 are laid on the second base 35b of the imaging moving unit 3b so as to be juxtaposed in parallel at a predetermined interval.

Two nuts into which the first and second guide rails 53b-1 and 53b-2 of the third guide member 53b fit into the nut of the first ball screw 16b-1 of the first lighting moving section 1b-1. Is formed. The first base 31b, the first standing member 32b, the beam member 33b, the second standing member 34b, which holds the plurality of imaging units CA, and the front side (one side) of the first holding member including the second base 35b. ), The first and second guide rails 53b-1 and 53b-2 are fitted into these two recesses, respectively, so that the nut is fitted to the first and second guide rails 53b-1 and 53b-2. The first moving part for illumination 1b-1 is disposed on the first base 31b of the moving part for imaging 3b, and the third guide member 53b is connected via the nut of the first ball screw 16b-1. Are guided (guided) by the first and second guide rails 53b-1 and 53b-2. Similarly, the first and second guide rails 54b-1 and 54b-2 of the fourth guide member 54b are fitted into the nuts of the second ball screw 17b-1 of the first lighting moving section 1b-1. Two recesses are formed. On the front side of the first holding members 31b to 35b holding the plurality of imaging units CA, the first and second guide rails 54b-1 and 54b-2 fit into the two recesses, respectively. Then, the nut is engaged with the first and second guide rails 54b-1 and 54b-2, and the first illumination moving unit 1b-1 is disposed on the second base 35b of the imaging moving unit 3b. It is guided by the first and second guide rails 54b-1, 54b-2 of the fourth guide member 54b via the nut of the second ball screw 17b-1.

Two nuts into which the first and second guide rails 53b-1 and 53b-2 of the third guide member 53b fit into the nuts of the first ball screw 16b-2 of the second illumination moving section 1b-2. Is formed. On the rear side (the other side) of the first holding members 31b to 35b holding the plurality of imaging units CA, the first and second guide rails 53b-1 and 53b-2 are fitted in these two recesses, respectively. The nut is engaged with the first and second guide rails 53b-1 and 53b-2, so that the second illumination moving unit 1b-2 is placed on the first base 31b of the imaging moving unit 3b. It is arranged and guided by the first and second guide rails 53b-1, 53b-2 of the third guide member 53b via the nut of the first ball screw 16b-2. Similarly, the first and second guide rails 54b-1 and 54b-2 of the fourth guide member 54b are fitted into the nuts of the second ball screw 17b-2 of the second illumination moving section 1b-2. Two recesses are formed. The first and second guide rails 54b-1 and 54b-2 are fitted into these two recesses on the rear side of the first holding members 31b to 35b holding the plurality of imaging units CA. Then, the nut is engaged with the first and second guide rails 54b-1, 54b-2, and the second illumination moving unit 1b-2 is disposed on the second base 35b of the imaging moving unit 3b. It is guided by the first and second guide rails 54b-1, 54b-2 of the fourth guide member 54b via the nut of the second ball screw 17b-2.

Therefore, the plurality of imaging units CA held by the imaging moving unit 3b are arranged between the first and second illumination moving units 1b-1 and 1b-2.

When the first and second power sources 18b-1 and 19b-1 operate in synchronization with each other under the control of the control processing unit 71b, the first illumination unit LP-1 held by the first illumination moving unit 1b-1 is activated. Each rotational force is transmitted to each of the screw shafts of the first and second ball screws 16b-1 and 17b-1, and each of the screw shafts rotates, and the first and second ball screws 16b-1 and 17b- are rotated. The first and second nuts are respectively guided by the first and second guide rails 53b-1, 53b-2; 54b-1, 54b-2 of the third and

fourth guide members

53b, 54b, and the third and fourth guides are provided. It moves along the

members

53b and 54b. That is, the first illumination unit LP-1 moves along the moving direction with respect to the imaging moving unit 3b in front of the plurality of imaging units CA held by the imaging moving unit 3b. The plurality of imaging units CA (the first to eleventh imaging units CA-1 to CA-11 in the present embodiment) held by the imaging moving unit 3b are controlled by the control processing unit 71b to control the first and second power sources. When the

wheels

38b and 39b operate in synchronization, the respective rotational forces are transmitted to the respective first wheels (or the respective second wheels) via the respective speed reducers of the first and

second bogies

36b and 37b, and And the first wheels (or each of the second wheels) of the

second carts

36b and 37b rotate, and the first and second wheels of the first and

second carts

36b and 37b respectively become first and second wheels. The

guide members

51b, 52b are guided by the first and second guide rails 51b-1, 51b-2; 52b-1, 52b-2, and move along the first and

second guide members

51b, 52b. When the first and second power sources 18b-2 and 19b-2 operate in synchronization with each other under the control of the control processing unit 71b, the second illumination unit LP-2 held by the second illumination moving unit 1b-2 is activated. Each rotational force is transmitted to each of the screw shafts of the first and second ball screws 16b-2 and 17b-2, and each of the screw shafts rotates, and the first and second ball screws 16b-2 and 17b- are rotated. 2 are respectively guided by the first and second guide rails 53b-1, 53b-2; 54b-1, 54b-2 of the third and

fourth guide members

53b, 54b, and the third and fourth guides are provided. It moves along the

members

53b and 54b. That is, the second illumination unit LP-2 moves along the moving direction with respect to the imaging moving unit 3b behind the plurality of imaging units CA held by the imaging moving unit 3b.

The control processing unit 71b controls each of the units LP, CA, MVb, and 72 to 75 of the surface inspection apparatus Db according to the function of each unit, and inspects the surface state of the inspection surface of the inspection object SP. It is. The control processing unit 71b includes, for example, a CPU and its peripheral circuits. The control processing unit 71b functionally includes a control unit 711, a movement control unit 712b, and an inspection processing unit 713 by executing the control processing program. The control unit 711 and the inspection processing unit 713 of the control processing unit 71b of the second embodiment are the same as the control unit 711 and the inspection processing unit 713 of the control processing unit 71a of the first embodiment, respectively. Omitted.

The movement control unit 712b includes first and second power sources 38b that generate first power for moving the first holding members 31b to 35b that hold the first to eleventh imaging units CA-1 to CA-11. , 39b to move the second holding members 11b-1 to 15b-1; 11b-2 to 15b-2 for holding the first and second illumination units LP-1 and LP-2, respectively. By controlling the first and second power sources 18b-1 and 19b-1; 18b-2 and 19b-2 for generating the second power, the first to eleventh imaging units CA-1 to CA-1 to the inspection object SP are controlled. CA-11 and the first and second illumination units LP-1 and LP-2 are moved in one direction along the movement direction, and the first to eleventh imaging units CA-1 to CA-11 are moved to the first position. And the second illumination units LP-1 and LP-2 As it is moved in the one direction along the moving direction, and controls the movement of the movable portion MVb. In the present embodiment, the inspection surface of the inspection object SP also includes a plurality of different inspection regions divided along the moving direction of the inspection object SP. The movement control unit 712b controls the first to eleventh imaging units CA-1 to CA-11 and the first and second illumination units LP-1 and LP-2 for the inspection object SP via the imaging movement unit 3a. The first to eleventh imaging units CA- are moved so as to be sequentially positioned in the plurality of inspection areas, and stopped in each of the plurality of inspection areas so as to image the inspection area in the inspection object SP. The first and second illumination units LP-1 and LP-2 are moved via the first and second illumination moving units 1b-1 and 1b-2 with respect to 1 to CA-11. Under the control of the movement control unit 712b, the movement unit MVb performs a movement operation as described later.

Next, the operation of the present embodiment will be described. When the power is turned on, the surface inspection apparatus Db having such a configuration executes initialization of necessary units and starts its operation. By executing the control processing program, the control processing unit 71b functionally includes the control unit 711, the movement control unit 712b, and the inspection processing unit 713.

For example, when an instruction to start an examination is received by the input unit 72, the first and second illumination moving units 1b-1, 1b-2 and the imaging moving unit 3b operate as follows, and the first and second illumination moving units 1b-1 and 1b-2 operate as follows. The illumination units LP-1 and LP-2 and the plurality of imaging units CA move in the same manner as in the first embodiment described with reference to FIG.

More specifically, in FIG. 5, first, as shown in FIG. 5A, the movement control unit 712b of the control processing unit 71b controls the plurality of imaging units CA to image the surface to be inspected in the first inspection region. The first illuminator LP-1, the plurality of imaging units CA, and the second illuminator LP-2 are firstly illuminated at the eleventh position Pa1-1, the twelfth position Pa1-2, and the thirteenth position Pa1-3, respectively. The moving unit 1a-1, the moving unit 3a for imaging, and the moving unit 1a-2 for second illumination move in one direction along the moving direction. More specifically, the movement control unit 712b moves the plurality of imaging units CA to the twelfth position Pa1-2 so that the plurality of imaging units CA image the surface to be inspected in the first inspection region. Move by. Since the first and second illumination moving units 1b-1 and 1b-2 are arranged in the imaging moving unit 3b, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA and the second The two illumination units LP-2 are treated as one group, and the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are moved in one direction along the moving direction with respect to the inspection object SP. Go to Then, while the imaging movement unit 3b performs such a movement operation, the movement control unit 712b controls the first and second illumination units LP-1 and LP-2 as shown in FIG. 5A. , And moved to the eleventh and thirteenth positions Pa1-1 and Pa1-3 by the first and second illumination moving parts 1b-1 and 1b-2, respectively.

Subsequently, as illustrated in FIG. 5B, the plurality of imaging units CA are stopped at the twelfth position Pa1-2, and the movement control unit 712b controls the first illumination unit LP-1 and the second illumination unit LP-2, respectively. From the eleventh position Pa1-1 and the thirteenth position Pa1-3 to the fourteenth position Pa1-4 and the sixteenth position Pa1-6, respectively, the first and second bases 11b-1 and 15b of the imaging moving unit 3b. -1, the first illumination moving unit 1b-1 and the second illumination moving unit 1b-2 move in one direction along the moving direction at a constant speed of the same moving speed. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are individually handled, and the first illumination unit LP is provided to the plurality of stopped imaging units CA. -1 and the second illumination unit LP-2 are moved in one direction along the moving direction at the same moving speed. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the control processing unit 71b transmits the first The inspection surface of one inspection region is imaged a plurality of times at a predetermined sampling interval. Thereby, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles with respect to the inspection surface of the first inspection region at different timings. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71b.

When a plurality of images on the surface to be inspected in the first inspection region are obtained in this manner, subsequently, as shown in FIG. 5C, the movement control unit 712b performs the same The first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are respectively positioned at the 21st position such that the plurality of imaging units CA image the inspection surface of the next second inspection region. The first moving unit 1b-1, the imaging moving unit 3b, and the second moving unit 1b-2 move to Pa2-1, the 22nd position Pa2-2, and the 23rd position Pa2-3, respectively.

Subsequently, as illustrated in FIG. 5D, similarly to the above-described movement operation described with reference to FIG. 5B, the plurality of imaging units CA are stopped at the 22nd position Pa2-2, and the movement control unit 712b performs the first illumination. The unit LP-1 and the second illumination unit LP-2 are moved for imaging from the 21st position Pa2-1 and the 23rd position Pa2-3 to the 24th position Pa2-4 and the 26th position Pa2-6, respectively. On the first and second bases 11b-1 and 15b-1 of the unit 3b, the first illumination moving unit 1b-1 and the second illumination moving unit 1b-2 each move at the same speed with the same moving speed. It moves in one direction along the moving direction. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the control processing unit 71b transmits the first The inspection surface of the two inspection regions is imaged a plurality of times at a predetermined sampling interval, and the plurality of images generated thereby are output to the control processing unit 71b, respectively.

Then, when a plurality of images for the inspection surface of each inspection region are obtained, the inspection processing unit 713 of the control processing unit 71b subsequently performs an inspection for each inspection surface of each inspection region in the inspection surface of the inspection region. The surface state of the inspection surface in the inspection area is inspected based on the plurality of images, and the inspection result is output to the output unit 73.

As described above, the surface inspection apparatus Db according to the present embodiment and the surface inspection method mounted thereon are similar to the surface inspection apparatus Da and the surface inspection method according to the first embodiment in that the method for imaging at a higher magnification is used. Is adopted, the number of imaging units CA and the inspection time can be further reduced.

The surface inspection device Db and the surface inspection method are the same as the surface inspection device Da and the surface inspection method in the first embodiment, and the first holding member 31b that holds the first to eleventh imaging units CA-1 to CA-11. The imaging unit CA can be easily and integrally moved even when the moving unit 35b is moved by the power of the first and

second power sources

38b and 39b, and the second holding member 11b-1 to hold the first lighting unit LP-1. Even if 15b-1 is moved by the power of the first and second power sources 18b-1 and 19b-1, the first lighting unit LP-1 can be easily and integrally moved, and the second lighting unit LP-2 is held. Even if the second holding members 11b-2 to 15b-2 are moved by the power of the first and second power sources 18b-2 and 19b-2, the second illumination unit LP-2 can be easily and integrally moved.

In the above-described surface inspection device Db and surface inspection method, the first and second illumination moving units 1b-1 and 1b-2 are mounted on the imaging moving unit 3b. The part LP can be easily moved. In the surface inspection apparatus Db and the surface inspection method, the imaging moving unit 3a includes the first and

second power sources

38a and 39a, and the first illumination moving unit 1a-1 includes the first and second power sources 18a-1. , 19a-1 and the second illumination moving unit 1a-2 includes the first and second power sources 18a-2, 19a-2, so that the moving operation of the imaging unit CA and the first and second illumination units LP -1 and LP-2 can be independent of each other.

Next, another embodiment will be described.
(Third embodiment)
FIG. 7 is a perspective view illustrating a mechanical configuration of the surface inspection device according to the third embodiment. In the surface inspection devices Da and Db in the first and second embodiments, the

illumination moving units

1a and 1b and the

imaging driving units

3a and 3b are individually powered by

power sources

18a, 19a, 18b, and 19b; , 38b, and 39b, the surface inspection apparatus Dc according to the third embodiment is different from the illumination moving unit 1c in that the illumination moving unit 1c includes a power source and the imaging moving unit 3c does not include a power source. It moves together with the movement.

As shown in FIGS. 7 and 4, the surface inspection apparatus Dc according to the third embodiment includes one or a plurality of illumination units LP (LP-1, LP-2) and one or a plurality of imaging units CA ( CA-1 to CA-11), a moving unit MVc, a control processing unit 71c, an input unit 72, an output unit 73, an IF unit 74, and a storage unit 75. The illumination unit LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 in the surface inspection device Dc according to the third embodiment are respectively the illumination units in the surface inspection device Da according to the first embodiment. The LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 are the same as those described above, and a description thereof will be omitted.

The moving unit MVc relatively moves the object SP, the imaging unit CA, and the illumination unit LP, and relatively moves the imaging unit CA and the illumination unit LP, similarly to the above-described moving unit MVa. is there. Also in the third embodiment, the moving unit MVc moves the imaging unit CA and the illuminating unit LP relative to the inspection object SP that does not move during the inspection as in the first embodiment, and the imaging unit CA that does not move during image generation. To move the illumination unit CA.

More specifically, for example, as shown in FIG. 7, the moving unit MVc includes a first lighting moving unit 1c-1 that moves the first lighting unit LP-1, and first to fifth imaging units. An imaging moving unit 3c that integrally moves the units CA-1 to CA-5 and a second illumination moving unit 1c-2 that moves the second illumination unit LP-2 are provided.

The first moving unit for illumination 1c-1, the moving unit for imaging 3c, and the second moving unit for illumination 1c-2 in the third embodiment measure the moving unit for imaging 3c and the moving unit for imaging 3c, respectively. Except that the first moving unit for illumination 1c-1 located rearward in the moving direction in the above further includes a first tailgating member for entraining, and the moving unit for imaging 3c does not include a power source. This is the same as the first moving unit for illumination 1a-1, the moving unit for imaging 3a, and the second moving unit for illumination 1a-2 in one embodiment. Here, when inspecting a plurality of inspected objects SP, when the inspection of one inspected object SP is completed and the next inspected object SP is inspected, the first illumination moving unit 1c-1 and the imaging It is necessary that the moving unit 3c and the second moving unit 1c-2 return to the initial position. For this reason, in the present embodiment, the imaging moving unit 3c and the second illumination moving unit 1c-2 located rearward of the imaging moving unit 3c in the movement direction at the time of the return are the second moving unit 1c-2. A tailgating member is further provided.

More specifically, the first lighting moving section 1c-1 includes first and second bases 11c-1 and 15c-1, first and second standing members 12c-1 and 14c-1, It includes a beam member 13c-1, first and second carriages 16c-1 and 17c-1, first and second power sources 18c-1 and 19c-1, and a first lighting-side entrainment member 21-1. . The first and second bases 11c-1, 15c-1, the first and second standing members 12c-1, 14c-1, and the beam member 13c in the first lighting moving section 1c-1 of the third embodiment. -1, the first and second carts 16c-1 and 17c-1, and the first and second power sources 18c-1 and 19c-1 are respectively the first lighting moving unit 1a- of the first embodiment. 1, the first and second bases 11a-1, 15a-1, the first and second standing members 12a-1, 14a-1, the beam member 13a-1, the first and second carriages 16a-1, 17a. -1, and the first and second power sources 18a-1 and 19a-1 are not described here. The second illumination moving section 1c-2 includes first and second bases 11c-2 and 15c-2, first and second standing members 12c-2 and 14c-2, and a beam member 13c-2. , The first and second carriages 16c-2 and 17c-2, the first and second power sources 18c-2 and 19c-2, and the second illumination-side tailgating member 22-1. The first and second bases 11c-2 and 15c-2, the first and second standing members 12c-2 and 14c-2, and the beam member 13c in the second illumination moving section 1c-2 of the third embodiment. -2, the first and second carriages 16c-2 and 17c-2, and the first and second power sources 18c-2 and 19c-2 are respectively the first lighting moving unit 1a- of the first embodiment. 1, the first and second bases 11a-1, 15a-1, the first and second standing members 12a-1, 14a-1, the beam member 13a-1, the first and second carriages 16a-1, 17a. -1, and the first and second power sources 18a-1 and 19a-1 are not described here.

The imaging moving unit 3c includes first and

second bases

31c and 35c, first and second standing

members

32c and 34c, beam members 33c, first and

second carriages

36c and 37c, And the second imaging side tailgating members 21-2 and 22-2. The first and

second bases

31c and 35c, the first and second standing

members

32c and 34c, the beam member 33c, and the first and

second carriages

36c and 37c in the imaging moving unit 3c according to the third embodiment. Are the first and

second bases

31a and 35a, the first and

second standing members

32a and 34a, the beam members 33a, and the first and second carriages, respectively, in the imaging moving unit 3a of the first embodiment. Since they are the same as 36a and 37a, description thereof is omitted.

{Circle around (1)} At the inspection place, first and

second guide members

51c and 52c similar to the first and

second guide members

51a and 52a in the first embodiment are arranged. The first illumination moving unit 1c-1, the imaging moving unit 3c, and the second illumination moving unit 1c-2 sequentially form the first and second guide members 51c in this order, as in the first embodiment. 52c. Therefore, the imaging moving unit 3c is arranged between the first and second illumination moving units 1c-1 and 1c-2.

The first tailgating member is a member that moves the imaging unit CA with the movement of the illumination unit LP when the imaging unit CA and the illumination unit LP are moved relative to the inspection object SP by measurement. The embodiment includes the above-described first illumination side tailgating member 21-1 and the first imaging side tailgating member 21-2. In the present embodiment, when the first illumination moving unit 1c-1 moves, the first illumination moving unit 1c-1 is moved to the imaging moving unit 3c in a partial area (partial area). When the first illumination moving unit 1c-1 further moves in this contact state, the imaging moving unit 3c is pushed by the first illumination moving unit 1c-1 in the partial area. Move with the movement of the first illumination moving section 1c-1. For this reason, the first illumination side tailgating member 21-1 is engaged with the first imaging side tailgating member 21-2 provided in the partial area of the first illumination moving part 1c-1 that abuts. For example, a pressing member (first pressing member) provided with a thin plate of low resilience rubber or the like. The first imaging-side tailgating member 21-2 is an engagement member that is provided in the partial area of the abutting imaging movement unit 3c and that engages with the first illumination-side tailgating member 21-1. It is a pressing member (first pressing member) provided with a thin plate-like low resilience rubber or the like. The partial area of the first illumination moving unit 1c-1 that is in contact with, for example, each side surface of the first and second bases 11c-1 and 15c-1 on the imaging moving unit 3c side, and the first and second bases 11c-1 and 15c-1. The side surfaces of the second upright members 12c-1 and 14c-1 on the side of the imaging moving unit 3c, etc., and accordingly, the partial area of the abutting imaging moving unit 3c is, for example, the first region. And each side surface of the

second base

31c, 35c on the first lighting moving portion 1c-1 side, and each side surface of the first and second standing

members

32c, 34c on the first lighting moving portion 1c-1 side. It is. In FIG. 7, the partial area of the first lighting moving unit 1c-1 that is in contact with the first moving unit 1c-1 is provided on each side surface of the first and second bases 11c-1 and 15c-1 on the imaging moving unit 3c side. An example is shown in which the partial area of the abutting imaging moving unit 3c is provided on each side of the first and

second bases

31c and 35c on the side of the first lighting moving unit 1c-1. . Alternatively, an L-shaped member having a substantially L-shape, for example, is provided on the first base 11c-1 in order to form the partial area of the first lighting moving section 1c-1 that is in contact with the first base 11c-1. The front end surface is the partial area of the first lighting moving section 1c-1 to be in contact with, and low resilience may be adhered to the front end surface of the L-shaped member. In order to form the partial area of the imaging moving unit 3c, for example, an L-shaped member having a substantially L-shape is provided on the first base 31c, and the distal end surface of the L-shaped member is brought into contact with the imaging moving unit. 3c, the low-resilience may be attached to the tip surface of the L-shaped member.

On the other hand, the second tailgating member is a member that moves the imaging unit CA with the movement of the illumination unit LP when the imaging unit CA and the illumination unit LP are moved with respect to the inspection object SP by return. In the present embodiment, the above-described second illumination-side tailgating member 22-1 and the second imaging-side tailgating member 22-2 are provided. In the present embodiment, when the second illumination moving unit 1c-2 moves, the second illumination moving unit 1c-2 is moved to the imaging moving unit 3c in a partial area (a part thereof). When the second illumination moving unit 1c-2 further moves in this contact state, the imaging moving unit 3c is pushed by the second illumination moving unit 1c-2 in the partial area, It moves with the movement of the second illumination moving unit 1c-2. For this reason, the second illumination-side tailgating member 22-1 is engaged with the second imaging-side tailgating member 22-2 provided in the partial area of the abutting second illumination moving unit 1c-2. For example, a pressing member (second pressing member) provided with a thin plate-like low resilience rubber or the like. The second imaging-side tailgating member 22-2 is an engagement member that is provided in the partial area of the abutting imaging moving unit 3c and that engages with the second illumination-side tailgating member 22-1. This is a pressing member (second pressing member) provided with a thin plate-like low resilience rubber or the like. The partial area of the abutting second illumination moving unit 1c-2 may be, for example, each side surface of the first and second bases 11c-2 and 15c-2 on the imaging moving unit 3c side, and the first and second bases 11c-2 and 15c-2. The side surfaces of the second upright members 12c-2 and 14c-2 on the side of the imaging moving unit 3c, etc., and accordingly, the partial area of the abutting imaging moving unit 3c is, for example, the first region. Side surfaces of the

second base

31c and 35c on the side of the second illumination moving unit 1c-2, and side surfaces of the first and second standing

members

32c and 34c on the side of the second illumination moving unit 1c-2. It is. In FIG. 7, the partial area of the second moving unit for illumination 1c-2, which is in contact with the second moving unit 1c-2, is provided on each side surface of the first and second bases 11c-2 and 15c-2 on the side of the imaging moving unit 3c. An example is shown in which the partial area of the abutting imaging moving unit 3c is provided on each side surface of the first and

second bases

31c and 35c on the side of the second lighting moving unit 1c-2. . Alternatively, an L-shaped member having a substantially L-shape, for example, is provided on the first base 11c-2 in order to form the partial area of the second illumination moving section 1c-2 that is in contact with the first base 11c-2. The front end surface is the partial area of the second lighting moving section 1c-2 that is in contact with the light source, and a low resilience rubber or the like may be attached to the front end surface of the L-shaped member. For example, an L-shaped member having a substantially L-shape is provided on the first base 31c in order to form the partial area of the imaging moving section 3c that is in contact with the first base 31c. A low resilience rubber or the like may be affixed to the distal end surface of the L-shaped member as the partial area of the moving portion 3c.

When the first and second power sources 18c-1 and 19c-1 operate in synchronization with each other under the control of the control processing unit 71c, the first lighting unit LP-1 held by the first lighting moving unit 1c-1 operates. Similarly to the first embodiment, the first and second carriages 16c-1 and 17c-1 are guided by the first and

second guide members

51c and 52c, respectively, and along the first and

second guide members

51c and 52c. Moving. When the first illumination moving unit 1c-1 that holds the first illumination unit LP-1 moves, the first illumination moving unit 1c-1 is moved by the first illumination side accompanying member 21-1 to the imaging moving unit. When the first illumination moving unit 1c-1 moves further in this abutting state with the first imaging side accompanying member 21-2, the imaging moving unit 3c holding the plurality of imaging units CA is brought into contact with the imaging unit 3c. Is pushed by the first illumination moving unit 1c-1 by the first imaging side trailing member 21-2, and is moved to the first and

second guide members

51c and 52c by the movement of the first illumination moving unit 1c-1. Move along. When the first and second power sources 18c-2 and 19c-2 operate in synchronization with each other under the control of the control processing unit 71c, the second illumination unit LP-2 held by the second illumination moving unit 1c-2 operates. Similarly to the first embodiment, the first and second carriages 16c-2, 17c-2 are guided by the first and

second guide members

51c, 52c, respectively, and are guided along the first and

second guide members

51c, 52c. Moving.

On the other hand, when the inspection of one inspection object SP is completed and the inspection object SP returns to the initial position in order to inspect the next inspection object SP, the first and second illumination units LP-1 and LP-2 are turned off. , The first and second illumination moving sections 1c-1 and 1c-2, the first and second directions are reversed (reverse directions) opposite to one direction (forward direction) in the measurement in the moving direction. It is guided by the

guide members

51c and 52c, and moves along the first and

second guide members

51c and 52c. When the second illumination moving section 1c-2 holding the second illumination section LP-2 moves in the opposite direction of the moving direction, the second illumination moving section 1c-2 is moved by the second illumination side accompanying member 22. At -1, the second moving unit for illumination 1c-2 further abuts on the imaging moving unit 3c with the second imaging side trailing member 22-2, and in this abutting state, the plurality of imaging units CA are moved. The held imaging moving unit 3c is pushed by the second illumination moving unit 1c-2 by the second imaging side tailoring member 22-2, and the first and the second moving units 1c-2 are moved with the movement of the second illumination moving unit 1c-2. It moves along the

second guide members

51c and 52c.

The control processing unit 71c controls the respective units LP, CA, MVc, and 72 to 75 of the surface inspection apparatus Dc according to the functions of the respective units, and inspects the surface state of the inspection target surface of the inspection target SP. It is. The control processing unit 71c includes, for example, a CPU and its peripheral circuits. The control processing unit 71c functionally includes a control unit 711, a movement control unit 712c, and an inspection processing unit 713 by executing the control processing program. The control unit 711 and the inspection processing unit 713 of the control processing unit 71c of the third embodiment are the same as the control unit 711 and the inspection processing unit 713 of the control processing unit 71a of the first embodiment, respectively. Omitted.

The movement control unit 712c is a power for moving the second holding members 11c-1 to 15c-1; 11c-2 to 15c-2 holding the first and second illumination units LP-1 and LP-2, respectively. By controlling the first and second power sources 18c-1 and 19c-1; and 18c-2 and 19c-2, the first to eleventh imaging units CA-1 to CA- 11 and the first and second illumination units LP-1 and LP-2 are moved in one direction along the movement direction, and the first and the first imaging units CA-1 to CA-11 are moved to the first and second illumination units LP-1 and LP-2. (2) The moving operation of the moving unit MVc is controlled such that the lighting units LP-1 and LP-2 are moved in the one direction along the moving direction and the other direction opposite to the one direction along the moving direction. Is what you do. In the present embodiment, the inspection surface of the inspection object SP also includes a plurality of different inspection regions divided along the moving direction of the inspection object SP. The movement control unit 712c controls the first to eleventh imaging units CA-1 to CA-11 and the first and second illumination units LP-1 and LP-2 for the inspection object SP and the imaging movement unit 3a and the first. And moving in the one direction along the moving direction so as to be sequentially located in each of the plurality of inspection areas via the second illumination moving units 1a-1 and 1a-2, and in each of the plurality of inspection areas. The first and second illumination units LP-1 and LP-2 are provided to the first to eleventh imaging units CA-1 to CA-11 stopped so as to image the inspection area on the inspection object SP. The inspection object SP is moved in the other direction opposite to the one direction along the movement direction via the first and second illumination moving units 1a-1 and 1a-2. Under the control of the movement control unit 712c, the movement unit MVc performs a movement operation as described later.

Next, the operation of the present embodiment will be described. FIG. 8 is a diagram for explaining a moving operation in the surface inspection device of the third embodiment. FIG. 8A is a diagram for explaining a movement operation when the surface inspection apparatus Dc is moved to the first first inspection area, and FIG. 8B generates a plurality of images used for the inspection of the first inspection area. 8C is a diagram for explaining a moving operation in the case, and FIG. 8C is a diagram for explaining a moving operation when the surface inspection device Dc is moved to the next second inspection area. FIG. FIG. 8E is a diagram for explaining a moving operation when generating a plurality of images used for inspection of the second inspection region, and FIG. 8E illustrates a moving operation when the surface inspection device Dc is moved to the last L-th inspection region. FIG. 8F is a diagram for explaining a moving operation when generating a plurality of images used for inspection of the F-th inspection region.

(4) When the power is turned on, the surface inspection apparatus Dc having such a configuration executes initialization of necessary units and starts its operation. By executing the control processing program, a control unit 711, a movement control unit 712c, and an inspection processing unit 713 are functionally configured in the control processing unit 71c.

For example, when an instruction to start an inspection is received by the input unit 72, first, in FIG. 8, the movement control unit 712c of the control processing unit 71c determines, as shown in FIG. The first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are respectively moved to the eleventh position Pc1-1, the twelfth position Pc1-2, and the thirteenth position Pc1- so as to image the surface. 3 is moved in one direction (forward direction) along the moving direction by the first lighting moving unit 1c-1, the imaging moving unit 3c, and the second lighting moving unit 1c-2. At this time, in the present embodiment, the imaging moving unit 3c does not include a power source, and therefore, as described above, the first illumination side entrainment member 21-1 of the first illumination moving unit 1c-1 is used for imaging. The imaging moving unit 3c is pressed by the first illumination moving unit 1c-1 to be brought into contact with and engaged with the first imaging side trailing member 21-2 of the moving unit 3c. It moves with the movement of 1c-1. As described above, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are treated as one group, and the first illumination unit LP- 1. The plurality of imaging units CA and the second illumination unit LP-2 are moved in one direction along the moving direction. Here, the eleventh position Pc1-1, the twelfth position Pc1-2, and the thirteenth position Pc1-3 are sequentially arranged in this order in one direction of the moving direction, and the positions of the plurality of imaging units CA In the example shown in FIG. 8A, the twelfth position Pc1-2 is a position in a contact state where the imaging moving unit 3c is in contact with the first illumination moving unit 1c-2.

Subsequently, as illustrated in FIG. 8B, the plurality of imaging units CA are stopped at the twelfth position Pc1-2, and the movement control unit 712c controls the first illumination unit LP-1 and the second illumination unit LP-2, respectively. From the eleventh position Pc1-1 and the thirteenth position Pc1-3 to the fourteenth position Pc1-4 and the sixteenth position Pc1-6, respectively, the first lighting moving part 1c-1 and the second lighting moving part 1c- Each of them moves at a constant speed at the same moving speed in the opposite direction (reverse direction) to the one direction along the moving direction. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are individually handled, and the first illumination unit LP is supplied to the plurality of stopped imaging units CA. -1 and the second illumination unit LP-2 are moved at the same moving speed in the opposite direction along the moving direction. Here, the fourteenth position Pc1-4, the eleventh position Pc1-1, the twelfth position Pc1-2, the sixteenth position Pc1-6, and the thirteenth position Pc1-3 are sequentially arranged in this order in the moving direction. Lined up in one direction. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the control processing unit 71c causes the plurality of imaging units CA to perform the first The surface to be inspected in one inspection region is imaged a plurality of times at a predetermined sampling interval. Thereby, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles with respect to the inspection surface of the first inspection region at different timings. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71c.

When a plurality of images on the surface to be inspected in the first inspection region are obtained in this manner, subsequently, as shown in FIG. 8C, the movement control unit 712c performs the same operation as the above-described movement operation described using FIG. 8A. The first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are each moved to the 21st position Pc2- so that the plurality of imaging units CA image the inspection surface of the second inspection region. 1. The first illumination moving unit 1c-1, the imaging moving unit 3c, and the second illumination moving unit 1c-2 respectively move along the moving direction at the first, 22nd position Pc2-2 and 23rd position Pc2-3. Move in one direction. At this time, as described above, the imaging moving unit 3c moves together with the first illumination moving unit 1c-1. Here, the 21st position Pc2-1, the 22nd position Pc2-2, and the 23rd position Pc2-3 are respectively sequentially arranged in this order along one direction of the moving direction, and the positions of the plurality of imaging units CA In the example shown in FIG. 8C, the 22nd position Pc2-2 is a position in a contact state where the imaging moving unit 3c is in contact with the first illumination moving unit 1c-1.

Subsequently, as illustrated in FIG. 8D, similarly to the above-described movement operation described with reference to FIG. 8B, the plurality of imaging units CA are stopped at the 22nd position Pc2-2, and the movement control unit 712c sets the first illumination The first and second illumination units LP-1 and LP-2 are respectively illuminated from the 21st position Pc2-1 and the 23rd position Pc2-3 to the 24th position Pc2-4 and the 26th position Pc2-6 respectively. The first moving unit 1c-1 and the second lighting moving unit 1c-2 move in the opposite direction along the moving direction at the same moving speed with the same moving speed. Here, the 24th position Pc2-4, the 21st position Pc2-1, the 22nd position Pc2-2, the 26th position Pc2-6, and the 23rd position Pc2-3 are sequentially in this order in the moving direction. Lined up in one direction. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the control processing unit 71c causes the plurality of imaging units CA to perform the first The inspection surface of the two inspection regions is imaged a plurality of times at a predetermined sampling interval, and the plurality of images generated thereby are output to the control processing unit 71c, respectively.

Hereinafter, as shown in FIGS. 8E and 8F, the moving operation described with reference to FIG. 8A and the description with reference to FIG. 8B until a plurality of images for the surface to be inspected in the final Lth inspection region are obtained. Each movement operation similar to each of the above-described movement operations is repeated, and while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the plurality of stopped imaging units CA, the final movement operation is performed. Are obtained for the inspection surface of the L-th inspection region.

Then, when a plurality of images for the inspection surface of each inspection region are obtained, the inspection processing unit 713 of the control processing unit 71c subsequently performs a process for each inspection surface of each inspection region on the inspection surface of the inspection region. The surface condition of the inspection surface in the inspection area is inspected based on the plurality of images, and the inspection result is output to the output unit 73.

As described above, the surface inspection apparatus Dc according to the present embodiment and the surface inspection method mounted thereon are similar to the surface inspection apparatus Da and the surface inspection method according to the first embodiment in that the method for imaging at a higher magnification is used. Is adopted, the number of imaging units CA and the inspection time can be further reduced.

In the above-described surface inspection device Dc and surface inspection method, the imaging unit CA is moved by the tailgating members 21-1 and 21-2 along with the movement of the first illumination unit LP-1. Only the first and second power sources 18c-1 and 19c-1 for generating power for moving the second holding members 11c-1 to 15c-1 to be held are required.

Since the surface inspection device Dc and the surface inspection method are moved in the one direction and the other direction, the imaging unit CA is moved along with the movement of the first illumination unit LP-1 by the tailgating members 21-1 and 21-2. Can be reliably moved.

Note that each movement operation of the first and second illumination units LP-1 and LP-2 and the plurality of imaging units CA described with reference to FIG. 8 is performed by the surface inspection devices Da and Db of the first and second embodiments. The inspection object SP may be reproduced by using the first and second illumination moving units 1a-1, 1a-2; 1b-1, 1b-2. According to this, since the movement is performed in the one direction and the other direction, compared to the case where the movement is performed only in the one direction, the inspection from the start of the inspection to the end of the inspection when inspecting the entire inspection surface of the inspection object SP is performed. The total movement amount can be further reduced.

Next, another embodiment will be described.
(Fourth embodiment)
FIG. 9 is a perspective view illustrating a mechanical configuration of the surface inspection device according to the fourth embodiment. In the surface inspection apparatuses Da to Dc in the first to third embodiments, the inspection object SP does not move, and moves with respect to the inspection object SP with the first and second illumination units LP-1, LP-2 and the plurality of light sources. Although the imaging unit CA has moved, in the surface inspection device Dd according to the fourth embodiment, the plurality of imaging units CA do not move, and the inspection object SP and the first and second illumination units are provided to the plurality of imaging units CA. LP-1 and LP-2 move.

As shown in FIGS. 9 and 4, the surface inspection apparatus Dd according to the fourth embodiment includes one or a plurality of illumination units LP (LP-1, LP-2) and one or a plurality of imaging units CA ( CA-1 to CA-11), a moving unit MVd, a control processing unit 71d, an input unit 72, an output unit 73, an IF unit 74, and a storage unit 75. The illumination unit LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 in the surface inspection device Dd according to the fourth embodiment are respectively the illumination units in the surface inspection device Da according to the first embodiment. The LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 are the same as those described above, and a description thereof will be omitted.

The moving unit MVd relatively moves the inspection object SP, the imaging unit CA, and the illumination unit LP, and relatively moves the imaging unit CA and the illumination unit LP, similarly to the above-described moving unit MVa. is there. In the present embodiment, when the inspection object SP and the imaging unit CA and the illumination unit LP are relatively moved, the moving unit MVd treats the imaging unit CA and the illumination unit LP as one group and performs imaging without moving. When moving the inspection object SP with respect to the unit CA and the illumination unit LP and relatively moving the imaging unit CA and the illumination unit LP, the imaging unit CA and the illumination unit LP are treated separately, and the imaging unit that does not move The illumination unit LP is moved with respect to CA.

More specifically, for example, as shown in FIG. 9, the moving unit MVd includes a first lighting moving unit 1d-1 for moving the first lighting unit LP-1 and a first to eleventh imaging unit. The imaging holding unit 3d that holds the units CA-1 to CA-11 without moving, the second illumination moving unit 1d-2 that moves the second illumination unit LP-2, and the inspection object SP is moved. And an inspection object moving unit BCd. Since the first lighting moving unit 1d-1 and the second lighting moving unit 1d-2 have the same configuration, the configuration of the first lighting moving unit 1d-1 will be described below. Although the description of the illumination moving unit 1d-2 is omitted, in the following description, the "first" and the suffix "-1" are replaced with "second" and "-2", respectively, to thereby obtain the second illumination. The configuration of the moving unit 1d-2 can be described.

保持 The imaging holding unit 3d includes first and

second bases

31d and 35d, first and

second standing members

32d and 34d, and a beam member 33d. The first and

second bases

31d and 35d, the first and

second standing members

32d and 34d, and the beam member 33d in the imaging holding unit 3d of the fourth embodiment are the same as those of the second embodiment. The first and

second bases

31d and 35d carry the first and second lighting moving parts 1d-1 and 1d-2, respectively, and further have a size (size, Except that the first and

second bases

31a and 35a, the first and

second standing members

32a and 34a, and the beam member 33a in the imaging moving unit 3a of the first embodiment, except that they have an area. Therefore, the description is omitted. That is, the imaging holding unit 3d of the fourth embodiment removes the first and

second carriages

36b and 37b and the first and

second power sources

38b and 39b from the imaging moving unit 3b of the second embodiment. Configuration. In the fourth embodiment, the first and

second bases

31d and 35d are fixed to predetermined locations (locations) in the inspection location by, for example, height adjustment screws or the like so as to be horizontally adjustable.

The first illumination moving section 1d-1 includes first and second bases 11d-1 and 15d-1, first and second standing members 12d-1 and 14d-1, and a beam member 13d-1. , First and second ball screws 16d-1 and 17d-1, and first and second power sources 18d-1 and 19d-1. The first and second bases 11d-1 and 15d-1, the first and second standing members 12d-1 and 14d-1, and the beams in the first lighting moving unit 1d-1 of the fourth embodiment. The member 13d-1 is the first and second bases 11a-1, 15a-1, the first and second standing members 12a-1, 12a-1, Since it is the same as 14a-1 and the beam member 13a-1, the description is omitted. The first and second ball screws 16d-1 and 17d-1 and the first and second power sources 18d-1 and 19d-1 in the first lighting moving unit 1d-1 of the fourth embodiment are respectively The same as the first and second ball screws 16b-1 and 17b-1 and the first and second power sources 18b-1 and 19b-1 in the first lighting moving section 1b-1 of the second embodiment. Therefore, the description is omitted. That is, the first lighting moving unit 1d-1 in the fourth embodiment is configured in the same manner as the first lighting moving unit 1b-1 in the second embodiment.

The first and

second bases

31b and 35b in the imaging moving unit 3b are respectively provided with third and

fourth guide members

53d and 54d similar to the third and

fourth guide members

53b and 54b in the second embodiment. Is arranged. The first illumination moving unit 1d-1 includes a first base 31d, a first standing member 32d, a beam member 33d, a second standing member 34d, and a second base 35d that hold a plurality of imaging units CA. On the front side (one side) of the provided first holding member, it is arranged on the first and

second bases

31d and 35d of the imaging moving unit 3d, and is guided (guided) by the third and

third guide members

53d and 54d. Is done. The second illumination moving unit 1d-2 is disposed on the first and

second bases

31d and 35d of the imaging moving unit 3d on the rear side (the other side) of the first holding members 31d to 35d. It is guided (guided) by the third and

third guide members

53d and 54d.

Therefore, the plurality of imaging units CA held by the imaging moving unit 3d are arranged between the first and second illumination moving units 1d-1 and 1d-2.

The inspection object moving unit BCd is illuminated by the first and second illumination units LP-1 and LP-2 held in a gate shape in a front view, and is disposed at predetermined positions in the gate shape in a front view. This is a mechanism for moving the inspection object SP along the predetermined movement direction so that the plurality of imaging units CA are imaged. The inspection object moving section BCd is disposed, for example, between the first standing members 12d-1, 32d, 32d-2 and the second standing members 14d-1, 34d, 34d-2. A transport belt that is long in the moving direction; and a drive mechanism that moves the transport belt along the travel direction. The drive mechanism moves the transport belt to move the belt placed on the transport belt. The inspection object SP moves along the moving direction.

When the first and second power sources 18d-1 and 19d-1 operate in synchronization with each other under the control of the control processing unit 71d, the first illumination unit LP-1 held by the first illumination moving unit 1d-1 operates. The respective rotational forces guide the third and

fourth guide members

53d and 54d via the first and second ball screws 16d-1 and 17d-1, and move along the third and

fourth guide members

53d and 54d. I do. That is, the first illumination unit LP-1 moves along the moving direction with respect to the imaging moving unit 3d in front of the plurality of imaging units CA held by the imaging moving unit 3d. When the first and second power sources 18d-2 and 19d-2 operate in synchronization with each other under the control of the control processing unit 71d, the second illumination unit LP-2 held by the second illumination moving unit 1d-2 operates. The respective rotational forces guide the third and

fourth guide members

53d and 54d via the first and second ball screws 16d-2 and 17d-2, and move along the third and

fourth guide members

53d and 54d. I do. That is, the second illumination unit LP-2 moves along the moving direction with respect to the imaging moving unit 3d behind the plurality of imaging units CA held by the imaging moving unit 3d. The inspection object SP moves in one direction along the moving direction by the inspection object moving unit BCd when the inspection object moving unit BCd operates under the control of the control processing unit 71d. For example, when the driving mechanism operates under the control of the control processing unit 71d, the transport belt moves in one direction along the moving direction, whereby the inspection object SP placed on the transport belt moves in the moving direction. Move in one direction along.

The control processing unit 71d controls each unit LP, CA, MVd, and 72 to 75 of the surface inspection apparatus Dd according to the function of each unit, and inspects the surface state of the inspection surface of the inspection object SP. It is. The control processing unit 71d includes, for example, a CPU and its peripheral circuits. The control processing unit 71d functionally includes a control unit 711, a movement control unit 712d, and an inspection processing unit 713 by executing the control processing program. The control unit 711 and the inspection processing unit 713 of the control processing unit 71d of the fourth embodiment are the same as the control unit 711 and the inspection processing unit 713 of the control processing unit 71a of the first embodiment, respectively. Omitted.

The movement control unit 712d controls the inspection object movement unit BCd (the driving mechanism of the inspection object movement unit BCd in the above example), and controls the first and second illumination units LP-1 and LP-2. First and second power sources 18d-1, 19d-1; 18d- for generating second power for moving the second holding members 11d-1 to 15d-1; 11d-2 to 15d-2 to be held. 2, 19d-2, the inspection object SP moves in the moving direction with respect to the first to eleventh imaging units CA-1 to CA-11 and the first and second illumination units LP-1 and LP-2. Moving the first and second illumination units LP-1 and LP-2 with respect to the first to eleventh imaging units CA-1 to CA-11 in the one direction along the movement direction. And moving in the other direction opposite to the one direction. And controls the movement of the parts MVd. In the present embodiment, the inspection surface of the inspection object SP also includes a plurality of different inspection regions divided along the moving direction of the inspection object SP. The movement control unit 712c moves the inspection object SP by a predetermined distance to the fixed first to eleventh imaging units CA-1 to CA-11 via the inspection object moving unit BCd. Each time the inspection object SP moves by the predetermined distance, the first and second illumination units LP-1 and LP-2 are applied to the first to eleventh imaging units CA-1 to CA-11. The inspection object SP is alternately moved in one direction along the moving direction of the inspection object SP and in the other direction opposite to the one direction via the first and second illumination moving units 1a-1 and 1a-2. Under the control of the movement control unit 712d, the movement unit MVd performs a movement operation as described later.

Next, the operation of the present embodiment will be described. FIG. 10 is a diagram for explaining a moving operation in the surface inspection device of the fourth embodiment. FIG. 10A is a diagram for explaining a movement operation when the surface inspection apparatus Dd is moved to the first first inspection area, and FIG. 10B generates a plurality of images used for inspection of the first inspection area. 10C is a diagram for explaining a moving operation in the case, and FIG. 10C is a diagram for explaining a moving operation when the surface inspection device Dd is moved to the next second inspection area. FIG. FIG. 10E is a diagram for explaining a moving operation when generating a plurality of images used for inspection of the second inspection region, and FIG. 10E illustrates a moving operation when the surface inspection device Dc is moved to the last L-th inspection region. FIG. 10F is a diagram for explaining a moving operation when generating a plurality of images used for inspection of the F-th inspection region.

(4) When the power is turned on, the surface inspection apparatus Dd having such a configuration performs initialization of necessary parts and starts operation. By executing the control processing program, the control processing unit 71d functionally includes the control unit 711, the movement control unit 712d, and the inspection processing unit 713.

In the following description, in FIG. 10, the predetermined moving direction is, for example, the horizontal direction on the paper, but unlike the above-described FIGS. 5 and 8, one direction in the moving direction is a direction from the right to the left on the paper. And the direction opposite to the moving direction is a direction from left to right on the paper. The same applies to FIG. 12 described later.

For example, when an instruction to start an inspection is received by the input unit 72, first, in FIG. 10, the movement control unit 712d of the control processing unit 71d determines, as shown in FIG. The inspection object SP is moved in one direction along the movement direction by the inspection object moving unit BCd to the first position Pd-S1 so as to image the surface. Note that, as the initial position, the first and second illumination units LP-1 and LP-2 are in contact states where the second illumination moving unit 1d-2 is in contact with the imaging holding unit 3d, respectively. It is assumed that they are arranged at the first and third positions Pd-1 and Pd-3, respectively, so as to be located closer to the imaging holding unit 3d side. Alternatively, as an initial position, the first and second lighting units LP-1 and LP-2 are in contact states where the first lighting moving unit 1d-1 is in contact with the imaging holding unit 3d, respectively. The fourth and sixth positions Pd-4 and Pd-6 may be arranged at positions closer to the imaging holding unit 3d. The plurality of imaging units CA are arranged at the second position Pd-2. As described above, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are treated as one unit, and the first illumination unit LP-1, the plurality of imaging units The inspection object SP is moved in one direction along the movement direction with respect to the CA and the second illumination unit LP-2. Here, the first position Pd-1, the fourth position Pd-4, the second position Pd-2, the third position Pd-3, and the sixth position Pd-6 are sequentially arranged in this order in the moving direction. Lined up in the opposite direction.

Subsequently, as illustrated in FIG. 10B, the movement control unit 712d controls the first illumination unit LP-1 and the second illumination unit LP-2 from the first position Pd-1 and the third position Pd-3, respectively. On the first and second bases 11d-1 and 15d-1 of the imaging moving unit 3d, up to the fourth position Pd-4 and the sixth position Pd-6, respectively, the first lighting moving unit 1d-1 and the The two illumination moving units 1d-2 move in the opposite directions along the moving direction at a constant speed of the same moving speed. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are individually handled, and the first illumination unit LP is provided to the fixed plurality of imaging units CA. -1 and the second illumination unit LP-2 are moved in the opposite direction along the movement direction at a constant speed of the same movement speed. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the fixed plurality of imaging units CA, the control processing unit 71d sends a first The surface to be inspected in one inspection region is imaged a plurality of times at a predetermined sampling interval. Accordingly, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles at different timings with respect to the inspection surface of the first inspection region. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71d.

When a plurality of images on the surface to be inspected in the first inspection region are obtained in this manner, subsequently, as shown in FIG. 10C, the movement control unit 712d performs the same operation as the above-described movement operation described with reference to FIG. 10A. The inspection object SP is moved to the S2 position Pd-S2 by the inspection object moving unit BCd along the moving direction so that the plurality of imaging units CA image the inspection surface of the next second inspection area. Move in the direction.

Subsequently, as illustrated in FIG. 10D, the movement control unit 712d controls the first lighting unit LP-1 and the second lighting unit LP-2 from the fourth position Pd-4 and the sixth position Pd-4, respectively. On the first and second bases 11d-1 and 15d-1 of the imaging moving unit 3d, up to the first position Pd-1 and the third position Pd-3, respectively, the first lighting moving unit 1d-1 and the The two illumination moving parts 1d-2 move in one direction along the moving direction at a constant speed of the same moving speed. That is, in this moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 are individually handled, and the first illumination unit LP is provided to the fixed plurality of imaging units CA. -1 and the second illuminating unit LP-2 are moved in one direction along the moving direction at a constant speed of the same moving speed. Then, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the fixed plurality of imaging units CA, the control processing unit 71d sends a first The inspection surface of one inspection region is imaged a plurality of times at a predetermined sampling interval. Accordingly, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles at different timings with respect to the inspection surface of the first inspection region. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71d.

Hereinafter, as shown in FIGS. 10E and 10F, the above-described moving operation described with reference to FIG. 10A and the description with reference to FIG. 10B until a plurality of images for the surface to be inspected in the final L-th inspection region are obtained. The moving operation described above, the moving operation described with reference to FIG. 10C and the moving operation described with reference to FIG. 10D are each repeated, and the plurality of moving operations are repeated for the fixed plurality of imaging units CA. While the first illuminator LP-1 and the second illuminator LP-2 are moving, a plurality of images on the surface to be inspected in the final Lth inspection region are obtained.

Then, when a plurality of images for the inspection surface of each inspection region are obtained, the inspection processing unit 713 of the control processing unit 71d subsequently determines the inspection surface of each inspection region in the inspection surface of the inspection region. The surface state of the inspection surface in the inspection area is inspected based on the plurality of images, and the inspection result is output to the output unit 73.

As described above, in the present embodiment, the inspection object SP is moved stepwise at a predetermined distance by the inspection object moving unit BCd so that the plurality of imaging units CA can image each inspection region for each inspection region. It moves in one direction along the moving direction. In each of the odd-numbered inspection regions, the first and second illumination units LP-1 and LP-2 are connected to the second illumination moving unit 1d-2 by the imaging holding unit 3d as described with reference to FIG. 10A. From the abutting state or the position closer to the imaging holding unit 3d, the first illumination moving unit 1d-1 abuts on the imaging holding unit 3d or the position closer to the imaging holding unit 3d. The first and second illumination moving units 1d-1 and 1d-2 move in opposite directions along the moving direction so that In each of the even-numbered inspection areas, as described with reference to FIG. 10C, the first and second illumination units LP-1 and LP-2 are configured such that the first illumination moving unit 1d-1 is provided in the imaging holding unit 3d. The second illumination moving unit 1d-2 comes into contact with the imaging holding unit 3d or the position toward the imaging holding unit 3d from the abutting state of contacting or the position approaching the imaging holding unit 3d. The first and second illumination moving units 1d-1 and 1d-2 move in one direction along the moving direction such that While the first illumination unit LP-1 and the second illumination unit LP-2 are moving with respect to the fixed plurality of imaging units CA, each of the plurality of imaging units CA The surface is imaged a plurality of times at a predetermined sampling interval.

As described above, the surface inspection apparatus Dd according to the present embodiment and the surface inspection method mounted thereon are similar to the surface inspection apparatus Da and the surface inspection method according to the first embodiment in that the method for imaging at a higher magnification is used. Is adopted, the number of imaging units CA and the inspection time can be further reduced.

The surface inspection apparatus Dd and the surface inspection method include the moving unit MVd, so that the first to eleventh imaging units CA-1 to CA-11 can be fixed.

Next, another embodiment will be described.
(Fifth embodiment)
FIG. 11 is a perspective view illustrating a mechanical configuration of the surface inspection device according to the fifth embodiment. In the surface inspection device Dd according to the fourth embodiment, the inspection object SP is stopped when the images of the inspection surface in the inspection region are generated by the plurality of imaging units CA. In De, the inspection object SP moves even when an image of the inspection surface in the inspection area is generated by the plurality of imaging units CA.

As shown in FIGS. 11 and 4, the surface inspection apparatus De according to the fifth embodiment includes one or a plurality of illumination units LP (LP-1, LP-2) and one or a plurality of imaging units CA ( CA-1 to CA-11), a moving unit MVe, a control processing unit 71e, an input unit 72, an output unit 73, an IF unit 74, and a storage unit 75. The illumination unit LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 in the surface inspection device De of the fifth embodiment are respectively illuminators in the surface inspection device Da of the first embodiment. The LP, the imaging unit CA, the input unit 72, the output unit 73, the IF unit 74, and the storage unit 75 are the same as those described above, and a description thereof will be omitted.

The moving unit MVe relatively moves the inspection object SP, the imaging unit CA, and the lighting unit LP, and relatively moves the imaging unit CA and the lighting unit LP, similarly to the moving unit MVa described above. For example, as shown in FIG. 11, the first illumination moving unit 1e-1 for moving the first illumination unit LP-1 and the first to eleventh imaging units CA-1 to CA-11 are integrally formed. It includes an imaging moving unit 3e to be moved, a second lighting moving unit 1e-2 to move the second lighting unit LP-2, and a test object moving unit BCe to move the test object SP. The first lighting moving unit 1e-1, the imaging moving unit 3e, and the second lighting moving unit 1b-2 in the moving unit MVe according to the fifth embodiment are respectively similar to the first moving unit 1e-1 except that their moving operations are different. The moving unit MVb of the second embodiment is the same as the moving unit 1b-1, the moving unit 3b for imaging, and the moving unit 1b-2 for second illumination in the moving unit MVb of the second embodiment, and a description thereof will be omitted. The moving part BCe for the inspection object in the moving part MVe of the fifth embodiment is similar to the moving part BCd for the inspection object in the moving part MVe of the fourth embodiment except that the moving operation is different. Description is omitted.

The control processing unit 71e controls the respective units LP, CA, MVe, and 72 to 75 of the surface inspection device De according to the functions of the respective units, and inspects the surface state of the inspection target surface of the inspection target SP. It is. The control processing unit 71e includes, for example, a CPU and its peripheral circuits. The control processing unit 71e functionally includes a control unit 711, a movement control unit 712e, and an inspection processing unit 713 by executing the control processing program. The control unit 711 and the inspection processing unit 713 of the control processing unit 71e of the fifth embodiment are the same as the control unit 711 and the inspection processing unit 713 of the control processing unit 71a of the first embodiment, respectively. Omitted.

The movement control unit 712e controls the inspection object movement unit BCe (in the above example, the driving mechanism of the inspection object movement unit BCe) and holds the first to eleventh imaging units CA-1 to CA-11. The first and

second power sources

38e and 39e that generate the first power for moving the first holding members 31e to 35e are controlled, and the first and second illumination units LP-1 and LP-2 are respectively controlled. First and second power sources 18e-1, 19e-1; 18e-1 for generating second power for moving the second holding members 11e-1 to 15e-1; 11e-2 to 15e-2 to be held. 2, 19e-2, the inspection object SP and the first to eleventh imaging units CA-1 to CA-11 and the first and second illumination units LP-1 and LP-2 are moved along the moving direction. In one direction, the first to eleventh The first and second illumination units LP-1 and LP-2 are moved in the one direction along the moving direction and the one direction along the moving direction with respect to the image units CA-1 to CA-11. The moving operation of the moving unit MVe is controlled so as to move in the other direction. In the present embodiment, the inspection surface of the inspection object SP also includes a plurality of different inspection regions divided along the moving direction of the inspection object SP. The movement control unit 712e moves the inspection object SP in one direction along the movement direction via the inspection object moving unit BCe, and outputs a first to an eleventh imaging unit for the moving inspection object SP. CA-1 to CA-11 are moved so as to be sequentially positioned in each of the plurality of inspection areas, and in each of the plurality of inspection areas, the imaging is performed so that the inspection area of the moving inspection object SP is imaged. The first to eleventh imaging units CA-1 to CA-11 are moved via the imaging moving unit 3e, and the first to eleventh imaging units CA-1 to CA-11 are moved with respect to the first imaging unit CA-1 to CA-11. And the second illumination units LP-1 and LP-2 are moved via the first and second illumination moving units 1e-1 and 1e-2. Under the control of the movement control unit 712e, the movement unit MVe performs a movement operation as described later.

Next, the operation of the present embodiment will be described. FIG. 12 is a diagram for explaining a moving operation in the surface inspection device of the fourth embodiment. FIG. 12A is a diagram for explaining a movement operation when moving the surface inspection apparatus De to the first first inspection area, and FIG. 12B generates a plurality of images used for inspection of the first inspection area. FIG. 12C is a view for explaining a moving operation in the case, and FIG. 12C is a diagram illustrating a surface inspection apparatus for preparing a next second inspection area after the generation of the plurality of images used for inspection of the first inspection area is completed. FIG. 12D is a diagram for explaining a movement operation when moving De, and FIG. 12D is a diagram for explaining a movement operation when moving the surface inspection device De to the second inspection region; FIG. 12F is a view for explaining a moving operation when generating a plurality of images used for inspection of the second inspection area, and FIG. 12F shows a state after the generation of the plurality of images used for inspection of the second inspection area is completed. Preparation for the next third inspection area FIG. 12G is a diagram for explaining a movement operation when the surface inspection device De is moved, and FIG. 12G is a diagram for explaining a movement operation when the surface inspection device De is moved to the last L-th inspection region. FIG. 12H is a diagram for explaining a movement operation when generating a plurality of images used for inspection of the F-th inspection region.

(4) When the power is turned on, the surface inspection apparatus De having such a configuration performs initialization of necessary units and starts its operation. By executing the control processing program, a control section 711, a movement control section 712e, and an inspection processing section 713 are functionally configured in the control processing section 71e.

For example, when an instruction to start the inspection is received by the input unit 72, first, the movement control unit 712e of the control processing unit 71e moves the inspection object SP at an appropriate predetermined moving speed preset by the inspection object moving unit BCd. Move in one direction along the movement direction. Here, as the initial position, in the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2, the second illumination moving unit 1e-2 abuts on the imaging moving unit 3e. It is assumed that they are arranged at the eleventh to thirteenth positions Pe1-1, Pe1-2, Pe1-3 so as to be in a contact state or a position closer to the imaging holding unit 3 side.

In FIG. 12, the movement control unit 712e provides a plurality of stopped imaging units CA such that the plurality of imaging units CA image the inspection surface of the first inspection region by the movement of the inspection object SP described above. On the other hand, when the inspection object SP moves, as illustrated in FIG. 12A, the movement control unit 712e causes the plurality of imaging units CA to move in the moving direction at the same movement speed as the inspection object SP by the imaging movement unit 3e. Move along one direction. Thereby, the plurality of imaging units CA seem as if the inspection object SP is stationary. Simultaneously with the start of the movement of the plurality of imaging units CA, the movement control unit 712e controls the first illumination unit LP-1 and the second illumination unit LP-2 as shown in FIGS. 12A and 12B. The first illumination moving unit 1e-1 is brought into contact with the imaging moving unit 3e from a contact state where the second illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or a position close to the imaging moving unit 3e side. The first illumination moving unit 1e-1 and the second illumination moving unit 1e-2 respectively move the imaging unit CA so that the contacting state or the position close to the imaging moving unit 3e is brought into contact. That is, it moves in one direction along the moving direction at a moving speed lower than the moving speed of the inspection object SP). Note that the first and second illumination units LP-1 and LP-2 start moving at the same time as the moving speed of the imaging unit CA at the same time as the moving speed of the imaging unit CA, and then move at a speed lower than the moving speed of the imaging unit CA. You may move at a speed. While the first illumination unit LP-1 and the second illumination unit LP-2 are moving at a moving speed lower than the moving speed of the imaging unit CA, the control processing unit 71e controls the plurality of imaging units CA respectively. The surface to be inspected in the first inspection region is imaged a plurality of times at a predetermined sampling interval. Thereby, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles with respect to the inspection surface of the first inspection region at different timings. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71e. By such a moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 respectively move the eleventh position Pe1-1, the twelfth position Pe1-2, and the thirteenth position Pe1. From -3, it moves to the fourteenth position Pe1-4, the fifteenth position Pe1-5, and the sixteenth position Pe1-6. Here, the eleventh position Pe1-1, the twelfth position Pe1-2, and the thirteenth position Pe1-3 are respectively sequentially arranged in this order along the reverse direction of the moving direction, and the fourteenth position Pe1-4, The fifteenth position Pe1-5 and the sixteenth position Pe1-6 are respectively sequentially arranged in this order along the reverse direction of the moving direction, and the fourteenth position Pe1-4 and the eleventh position Pe1-1 are respectively The 15th position Pe1-5 and the twelfth position Pe1-2 are sequentially arranged in this order along the reverse direction of the movement direction, and the 15th position Pe1-5 and the twelfth position Pe1-2 are sequentially arranged in this order along the reverse direction of the movement direction. The sixteenth position Pe1-6 and the thirteenth position Pe1-3 are sequentially arranged in this order along the direction opposite to the moving direction.

When a plurality of images on the surface to be inspected in the first inspection area are obtained in this way, subsequently, as shown in FIG. 12C, the movement control unit 712e stops the movement of the plurality of imaging units CA and performs the first illumination. The unit LP-1 and the second illumination unit LP-2 are moved from the contact state in which the first illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or the position shifted toward the imaging moving unit 3e. (2) The first illumination moving unit 1e-1 and the second illumination moving unit 1e-2 are brought into a contact state where the illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or a position close to the imaging moving unit 3e. Each of the moving units 1e-2 moves in the opposite direction along the moving direction at a moving speed higher than the moving speed of the inspection object SP in absolute value. By such a moving operation, the first illumination unit LP-1 and the second illumination unit LP-2 respectively move the fourteenth position Pe1-4 and the sixteenth position Pe1-6 from the twenty-first position Pe2-1 and the twenty-third position. Move to the position Pe2-3. Accordingly, the first illumination unit LP-1 and the second illumination unit LP-2 have the same positional relationship with the plurality of stopped imaging units CA as the initial position. Here, for convenience of explanation, the fifteenth position Pe1-5 in the plurality of stopped imaging units CA is replaced with the twenty-second position Pe2-2.

Subsequently, similarly to the above-described movement operation described with reference to FIG. 12A, the movement control unit 712e causes the plurality of imaging units CA to image the inspection surface of the second inspection region by the movement of the inspection object SP described above. When the inspection object SP moves with respect to the plurality of stopped imaging units CA, the movement control unit 712e causes the plurality of imaging units CA to be inspected by the imaging moving unit 3e as illustrated in FIG. 12D. The object SP moves in one direction along the moving direction at the same moving speed as the moving speed of the object SP. Simultaneously with the start of the movement of the plurality of imaging units CA, the movement control unit 712e controls the first illumination unit LP-1 and the second illumination unit LP-2 as shown in FIGS. 12D and 12E. The first illumination moving unit 1e-1 is brought into contact with the imaging moving unit 3e from a contact state where the second illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or a position close to the imaging moving unit 3e side. The first illumination moving unit 1e-1 and the second illumination moving unit 1e-2 respectively move the imaging unit CA so that the contacting state or the position close to the imaging moving unit 3e is brought into contact. That is, it moves in one direction along the moving direction at a moving speed lower than the moving speed of the inspection object SP). While the first illumination unit LP-1 and the second illumination unit LP-2 are moving at a moving speed lower than the moving speed of the imaging unit CA, the control processing unit 71e controls the plurality of imaging units CA respectively. The surface to be inspected in the first inspection region is imaged a plurality of times at a predetermined sampling interval. Accordingly, the plurality of imaging units CA image each of the inspection surface of the first inspection region illuminated with the illumination light having the plurality of different incident angles at different timings with respect to the inspection surface of the first inspection region. A plurality of images are generated, and the generated plurality of images are output to the control processing unit 71e. By such a moving operation, the first illumination unit LP-1, the plurality of imaging units CA, and the second illumination unit LP-2 respectively cause the 21st position Pe2-1, the 22nd position Pe2-2, and the 23rd position Pe2. From -3, it moves to the 24th position Pe2-4, the 25th position Pe2-5, and the 26th position Pe2-6. Here, the mutual positional relationship among the 21st position Pe2-1, the 22nd position Pe2-2, the 23rd position Pe2-3, the 24th position Pe2-4, the 25th position Pe2-5, and the 26th position Pe2-6. Is the relative positional relationship between the eleventh position Pe1-1, the twelfth position Pe1-2, the thirteenth position Pe1-3, the fourteenth position Pe1-4, the fifteenth position Pe1-5, and the sixteenth position Pe1-6. Is the same as

When a plurality of images on the surface to be inspected in the second inspection area are obtained in this way, subsequently, as shown in FIG. 12F, the movement control unit 712e stops the movement of the plurality of imaging units CA and performs the first illumination. The unit LP-1 and the second illumination unit LP-2 are moved from the contact state in which the first illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or the position shifted toward the imaging moving unit 3e. (2) The first illumination moving unit 1e-1 and the second illumination moving unit 1e-2 are brought into a contact state where the illumination moving unit 1e-2 comes into contact with the imaging moving unit 3e or a position close to the imaging moving unit 3e. Each of the moving units 1e-2 moves in the opposite direction along the moving direction at a moving speed higher than the moving speed of the inspection object SP in absolute value.

Hereinafter, as shown in FIGS. 12G and 12H, the above-described moving operation described with reference to FIG. 12A and FIGS. 12A and 12B will be used until a plurality of images on the surface to be inspected in the final L-th inspection region are obtained. The above-described moving operation and the respective moving operations similar to the above-described moving operations described with reference to FIG. 12C are repeated, and the plurality of imaging units CA moving in synchronization with the inspection object SP are repeated. On the other hand, while the first illumination unit LP-1 and the second illumination unit LP-2 are moving, a plurality of images on the surface to be inspected in the final L-th inspection region are obtained.

Then, when a plurality of images for the inspection surface of each inspection region are obtained, the inspection processing unit 713 of the control processing unit 71e subsequently performs an inspection for each inspection surface of each inspection region in the inspection surface of the inspection region. The surface state of the inspection surface in the inspection area is inspected based on the plurality of images, and the inspection result is output to the output unit 73.

As described above, the surface inspection apparatus De and the surface inspection method mounted thereon according to the present embodiment are similar to the surface inspection apparatus Da and the surface inspection method according to the first embodiment. Is adopted, the number of imaging units CA and the inspection time can be further reduced.

The surface inspection device De and the surface inspection method include the moving unit MVe, so that the inspection object SP that moves on the line can be inspected while the line is moving.

Although the surface inspection apparatuses Da to De in the above-described first to fifth embodiments are configured to include the first and second illumination units LP-1 and LP-2, one of them, for example, the first It may be configured to include only the illumination section PL-1. That is, the surface inspection device D may include one illumination unit LP and one or more imaging units CA.

In the above-described first to fifth embodiments, the surface inspection apparatuses Da to De use the first and second illumination movements as shown by broken lines in FIGS. 1, 6, 7, 9, and 11. 1a-1, 1a-2; 1b-1, 1b-2; 1c-1, 1c-2; 1d-1, 1d-2; 1e-1, 1e-2 to move more reliably and synchronously. First and second illumination moving parts 1a-1, 1a-2; 1b-1, 1b-2; 1c-1, 1c-2; 1d-1, 1d-2; 1e-1, 1e-2. May be further provided. For example, the connecting member 20 includes first and second lighting moving parts 1a-1, 1a-2; 1b-1, 1b-2; 1c-1, 1c-2; 1d-1, 1d-2; -1, 1e-2, beam members 13a-1, 13a-2; 13b-1, 13b-2; 13c-1, 13c-2; 13d-1, 13d-2; 13e-1, 13e-2. It includes a pair of left and right first and second connecting members 20-1 and 20-2 that are connected to each other.

The present specification discloses various aspects of the technology as described above, and the main technologies are summarized below.

A surface inspection apparatus according to one aspect is an apparatus that irradiates illumination light to a surface to be inspected of an object to be inspected and inspects a surface state of the surface to be inspected based on an image obtained by imaging the surface to be inspected. An illumination unit that forms at least one set of a region and a dark region and irradiates the illumination light as the illumination light, an imaging unit that captures the inspection surface to generate the image, the inspection object, the imaging unit, A moving unit that relatively moves the illumination unit and relatively moves the imaging unit and the illumination unit; Preferably, in the above-described surface inspection device, the illumination unit sequentially forms a plurality of sets of a bright region and a dark region along a moving direction of the moving unit, and irradiates the pair as the illumination light. Preferably, in the surface inspection device described above, the plurality of imaging units are arranged along a direction intersecting a moving direction of the moving unit. Preferably, in the surface inspection apparatus described above, the plurality of illumination units are arranged along a moving direction of the moving unit. Preferably, in the above-described surface inspection device, the illumination unit is two first and second illumination units that are arranged apart from each other by a predetermined distance along a moving direction of the moving unit, and the imaging unit Are a plurality disposed between the first lighting unit and the second lighting unit along an intersecting direction intersecting a moving direction of the moving unit. Preferably, in the above-described surface inspection apparatus, the object to be inspected is a three-dimensional three-dimensional shape having a bottom surface, and the imaging unit is configured such that all or a part of an outer surface of the object to be inspected except the bottom surface is A plurality of pairs of bright areas and dark areas, which are sequentially arranged along a direction of movement by the moving unit, the plurality of sets being arranged along a cross direction intersecting with a direction of movement by the moving unit. To irradiate the illumination light. Preferably, the inspection object has a three-dimensional three-dimensional shape having a bottom surface, a top surface, a front surface, a back surface, a right side surface, and a left side surface, and the outer surface of the inspection object except the bottom surface includes the top surface, the right side surface And the left side.

Since such a surface inspection apparatus includes a moving unit that relatively moves the object to be inspected, the imaging unit, and the illumination unit, the surface inspection apparatus may include a plurality of imaging units in an intersecting direction intersecting the moving direction. Since there is no need to increase the number of imaging units in the moving direction, the number of imaging units can be further reduced, and the inspection time can be further reduced by providing a plurality of imaging units in the cross direction. Therefore, the surface inspection apparatus can further reduce the number of imaging units and the inspection time even when the above-described technique of imaging at a higher magnification is employed.

In another aspect, in the above-described surface inspection device, the moving unit includes a first holding member that holds the imaging unit, a second holding member that holds the lighting unit, and the second holding member. A power unit for generating power.

Such a surface inspection apparatus can easily move the imaging unit integrally even if the first holding member is moved by the power of the power unit, and the illumination unit can be moved even if the second holding member is moved by the power of the power unit. It can be easily and integrally moved. For example, even when a plurality of imaging units are arranged and an illumination unit is arranged so as to surround all or a part of the outer surface of the inspection object, even when the first holding member is moved by the power of the power unit, The plurality of imaging units can be easily and integrally moved, and the illumination unit can be easily and integrally moved even if the second holding member is moved by the power of the power unit.

In another aspect, in the above-described surface inspection device, the moving unit moves the imaging unit and the illumination unit with respect to the inspection object, moves the illumination unit with respect to the imaging unit, and includes the power unit. Includes a first power source that generates a first power for moving the first holding member, and a second power source that generates a second power for moving the second holding member.

Since such a surface inspection apparatus includes the first and second power sources, the imaging unit and the illumination unit can be individually handled.

In another aspect, in the above-described surface inspection apparatus, the moving unit moves the imaging unit and the illumination unit with respect to the inspection object, moves the illumination unit with respect to the imaging unit, and The holding member is mounted on the first holding member, and the power unit includes a first power source for generating a first power for moving the first holding member, and a second power source for the first holding member. 2) a second power source for generating a second power for moving the holding member.

は In such a surface inspection apparatus, since the second holding member is mounted on the first holding member, it is easy to move the imaging unit and the illumination unit with respect to the inspection object. Since the surface inspection device includes the first and second power sources, the moving operation of the imaging unit and the moving operation of the illumination unit can be independent.

In another aspect, in the above-described surface inspection device, the moving unit moves the imaging unit and the illumination unit in one direction along a moving direction with respect to the inspection object, and moves the imaging unit and the illumination unit with respect to the imaging unit. The lighting unit is moved in the one direction along the moving direction.

Since such a surface inspection apparatus is moved only in one direction, the member that moves at the time of the movement moves only in one direction, and can move stably.

In another aspect, in the above-described surface inspection device, the moving unit moves the imaging unit and the illumination unit in one direction along a moving direction with respect to the inspection object, and moves the imaging unit and the illumination unit with respect to the imaging unit. The lighting unit is moved in a direction opposite to the one direction along the moving direction.

Since such a surface inspection apparatus is moved in one direction and in the opposite direction, compared with the case where the surface inspection apparatus is moved only in one direction, the total time from the start of the inspection to the end of the inspection when inspecting the entire inspection surface of the inspection object is compared. The moving amount can be further reduced.

In another aspect, in the surface inspection apparatus described above, the moving unit moves the illumination unit and the imaging unit with respect to the inspection object, moves the illumination unit with respect to the imaging unit, and performs the inspection. When the imaging unit and the illumination unit are moved relative to an object, the imaging unit further includes an entrainment member that moves the imaging unit along with the movement of the illumination unit, and the power unit moves the second holding member. Power source for generating the power of

Since such a surface inspection device moves the imaging unit with the movement of the illumination unit using the tailgating member, only one power source that generates power for moving the second holding member that holds the illumination unit is used. I'm done.

In another aspect, in the above-described surface inspection device, the moving unit moves the imaging unit and the illumination unit in one direction along a movement direction with respect to the inspection object, and the illumination unit emits the illumination light to the imaging unit. The part is moved in a direction opposite to the one direction along the movement direction.

Since such a surface inspection device is moved in one direction and in the opposite direction, the imaging unit can be surely moved by the tailgating member with the movement of the illumination unit.

In another aspect, in the above-described surface inspection apparatus, the moving unit moves the inspection object at a predetermined distance with respect to the imaging unit, and after each movement of the inspection object by the predetermined distance. Then, the illumination unit is moved with respect to the imaging unit alternately in one direction along the moving direction of the inspection object and in a direction opposite to the one direction.

表面 Since such a surface inspection apparatus includes the moving unit, the imaging unit can be fixed.

In another aspect, in the above-described surface inspection apparatus, the surface to be inspected includes a plurality of inspection areas different from each other along a predetermined moving direction of the object to be inspected. Moving in the movement direction, moving the imaging unit with respect to the moving inspection object so as to be sequentially positioned in each of the plurality of inspection areas, and in each of the plurality of inspection areas, moving the inspection object. The imaging unit is moved so as to image the inspection area of the object, and the illumination unit is moved with respect to the moving imaging unit. Preferably, in the above-described surface inspection device, the moving unit moves the inspection object in the moving direction, a first holding member that holds the imaging unit, and a second holding unit that holds the illumination unit. A holding member, a first power source for generating a first power for moving the first holding member, a second power source for generating a second power for moving the second holding member, With respect to the inspection object to be inspected, the imaging unit is moved so as to be sequentially positioned in each of the plurality of inspection regions, and in each of the inspection regions, an image of the inspection region in the moving inspection object is taken. And a movement control unit that moves the illumination unit with respect to the moving imaging unit.

表面 Since such a surface inspection apparatus includes the moving unit, even an inspection object that moves on a line can be inspected while the line is moving.

In another aspect, in the above-described surface inspection device, the image captures each of the inspection surfaces illuminated with illumination light having a plurality of different incident angles at different timings with respect to the inspection surface. It is the plural obtained by that.

Since such a surface inspection device inspects a surface state based on a plurality of images obtained by imaging each of the inspection surfaces illuminated with illumination light having a plurality of mutually different incident angles, unevenness generated on the surface as a defect is obtained. The detection ability can be improved.

A surface inspection method according to another aspect includes irradiating illumination light of an illumination unit to an inspection surface of an inspection object, and changing a surface state of the inspection surface based on an image of the inspection surface captured by an imaging unit. In the inspection method, the illumination light is generated by forming at least one set of a bright area and a dark area, and the illumination light relatively moves the inspection object, the imaging unit, and the illumination unit. A first movement step; and a second movement step of relatively moving the imaging unit and the illumination unit.

Since such a surface inspection method includes a first movement step of relatively moving the object to be inspected, the imaging unit, and the illumination unit, even if a plurality of imaging units are provided in a direction crossing the movement direction, Since it is not necessary to increase the number of imaging units in the moving direction, the number of imaging units can be further reduced, and the inspection time can be further reduced by providing a plurality of imaging units in the cross direction. Therefore, in the above surface inspection method, the number of imaging units and the inspection time can be further reduced even if the above method of imaging at a higher magnification is adopted.

This application is based on Japanese Patent Application No. 2018-140360 filed on July 26, 2018, the contents of which are included in the present application.

While the embodiments of the present invention have been shown and described in detail, it has been presented by way of example only and not limitation. The scope of the invention should be construed in accordance with the language of the appended claims.

Although the present invention has been described above appropriately and sufficiently through the embodiments with reference to the drawings in order to express the present invention, it is easy for those skilled in the art to modify and / or improve the above-described embodiments. It should be recognized that it is possible. Therefore, unless a modification or improvement performed by those skilled in the art is at a level that departs from the scope of the claims set forth in the claims, the modification or the improvement will not be included in the scope of the claims. Is interpreted as being included in

According to the present invention, it is possible to provide a surface inspection apparatus and a surface inspection method for inspecting a surface state of a surface to be inspected in an object to be inspected.

Claims

A surface inspection device that inspects a surface state of the inspected surface based on an image obtained by irradiating illumination light on the inspected surface of the inspected object and capturing the inspected surface,
An illumination unit that forms at least one set of a light area and a dark area and irradiates the light as the illumination light;
An imaging unit that captures the surface to be inspected and generates the image;
A moving unit that relatively moves the inspection object and the imaging unit and the illumination unit, and relatively moves the imaging unit and the illumination unit;
Surface inspection equipment.
The moving unit includes a first holding member that holds the imaging unit, a second holding member that holds the illumination unit, and a power unit that generates power for relatively moving.
The surface inspection device according to claim 1.
The moving unit moves the imaging unit and the illumination unit with respect to the inspection object, and moves the illumination unit with respect to the imaging unit.
The power unit includes a first power source that generates a first power for moving the first holding member, and a second power source that generates a second power for moving the second holding member. ,
The surface inspection device according to claim 2.
The moving unit moves the imaging unit and the illumination unit with respect to the inspection object, and moves the illumination unit with respect to the imaging unit.
The second holding member is mounted on the first holding member,
The power unit generates a first power source for generating a first power for moving the first holding member, and generates a second power for moving the second holding member with respect to the first holding member. A second power source that performs
The surface inspection device according to claim 2.
The moving unit moves the imaging unit and the illumination unit in one direction along a movement direction with respect to the inspection object, and moves the illumination unit in the one direction along the movement direction with respect to the imaging unit. Let
The surface inspection apparatus according to claim 3 or 4.
The moving unit moves the imaging unit and the illumination unit with respect to the inspection object in one direction along a moving direction, and the one direction along the movement direction with the illumination unit with respect to the imaging unit. Move in the opposite direction,
The surface inspection apparatus according to claim 3 or 4.
The moving unit moves the illumination unit and the imaging unit with respect to the inspection object, moves the illumination unit with respect to the imaging unit, and moves the imaging unit and the illumination unit with respect to the inspection object. In addition, a tailgating member that moves the imaging unit with the movement of the illumination unit, is further provided,
The power unit includes a power source that generates power for moving the second holding member,
The surface inspection device according to claim 2.
The moving unit moves the imaging unit and the illumination unit with respect to the inspection object in one direction along a moving direction, and the one direction along the movement direction with the illumination unit with respect to the imaging unit. Move in the opposite direction,
The surface inspection device according to claim 7.
The moving unit moves the inspection object at a predetermined distance with respect to the imaging unit, and each time the inspection object moves by the predetermined distance, the illumination unit with respect to the imaging unit. One direction along the moving direction of the inspection object and the one direction are alternately moved in the opposite direction,
The surface inspection device according to claim 1.
The inspection surface includes a plurality of inspection regions different from each other along a predetermined movement direction of the inspection object,
The moving unit moves the object to be inspected in the moving direction, and moves the imaging unit with respect to the moving object to be inspected so as to be sequentially positioned in each of the plurality of inspection regions. In each of the regions, the imaging unit is moved so as to image the inspection region in the moving inspection object, and the illumination unit is moved with respect to the moving imaging unit.
The surface inspection device according to claim 1.
The image is a plurality obtained by imaging each of the inspection surface illuminated with illumination light having a plurality of different incident angles at different timings with respect to the inspection surface,
The surface inspection apparatus according to any one of claims 1 to 10.
A surface inspection method for inspecting a surface state of the inspection target surface based on an image obtained by imaging the inspection target surface with an imaging unit by irradiating illumination light of an illumination unit to the inspection target surface of the inspection target,
The illumination light is generated by forming at least one set of a bright region and a dark region,
A first moving step of relatively moving the inspection object, the imaging unit, and the illumination unit;
A second movement step of relatively moving the imaging unit and the illumination unit,
Surface inspection method.