WO2020019729A1 - 基板检查装置 - Google Patents
基板检查装置 Download PDFInfo
- Publication number
- WO2020019729A1 WO2020019729A1 PCT/CN2019/077908 CN2019077908W WO2020019729A1 WO 2020019729 A1 WO2020019729 A1 WO 2020019729A1 CN 2019077908 W CN2019077908 W CN 2019077908W WO 2020019729 A1 WO2020019729 A1 WO 2020019729A1
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- WO
- WIPO (PCT)
- Prior art keywords
- substrate inspection
- side wall
- disposed
- support
- guide rail
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Definitions
- the invention relates to the field of manufacturing a display panel, and in particular to a substrate inspection device.
- Macro equipment In the manufacturing process of the display panel, there is a process of inspecting the appearance of the substrate in each manufacturing process, which is called a macro inspection.
- Macro equipment is generally used for macroscopic inspection of substrate products.
- CF color filter
- Existing Macro equipment inspections are mainly divided into pre-Oven inspections and post-oven inspections.
- Pre-Oven inspections can detect substrate defects in time to facilitate rework in time, but substrates are easily affected by particles (particles) in the equipment. The inspection is not timely enough, but the substrate is fixed and not easily affected by particles, so it is mostly used in the industry for post-Oven inspection.
- the existing Macro equipment inspection requires manual operation and cannot be completely sealed, resulting in a large number of particles. It is necessary to further improve the cleanliness of the equipment.
- the inspection speed of a single equipment is slowed down and needs to be set. Multiple devices can be used in parallel to meet production needs.
- the invention provides a substrate inspection device, which can detect two substrates in a comparative manner, improve the inspection speed and accuracy of a single device, and solve the existing inspection device. Because a single device can only inspect one substrate at a time, The detection efficiency is low, which in turn affects the productivity of the panel.
- the invention provides a substrate inspection device, comprising: a side wall, two sets of brackets, a backlight source, two sets of upper light sources, a roller shutter, at least one humidifier, an inspection port, and an operation table; A side wall and a second side wall; the bracket is disposed between the first side wall and the second side wall, the bracket includes a tray and a support portion, and the tray is connected to the support portion, The tray is rotated in the vertical direction to carry the substrate to be tested; the backlight is disposed on the first side wall; two sets of the upper light sources are respectively disposed above the two sets of the brackets; The roller shutter is arranged between two sets of the upper light sources; the feeding inlet is arranged on the first side wall, respectively corresponding to the two trays; the humidifier is arranged above the bracket;
- the inspection port is provided on the second side wall, the inspection port includes a transparent door that can be opened and closed, and the operation table is close to the inspection port.
- a lifting mechanism is provided on the roller blind to control the lifting and lowering of the roller blind.
- a first guide rail is disposed on the first side wall, an end portion of the backlight source is disposed in the first guide rail, and the backlight source is along the first guide rail. Slide in the direction of extension.
- the supporting portion includes a first supporting member and a second supporting member disposed in parallel, and the first supporting member and the second supporting member are respectively connected to two of the tray. End hinged.
- the bracket further includes a base connected to the first support and the second support, and the base is provided with two second guide rails parallel to each other. Ends of the first support member and the second support member slide in corresponding two of the second guide rails.
- the base includes a first base connected to the first support member and a second base connected to the second support member, and the two second guide rails are respectively provided at the bases.
- the first support and the second support slide in the corresponding second guide rail along the extending direction of the second guide rail, respectively.
- the substrate inspection device further includes an array of fan filter units disposed at intervals above the bracket, wherein a group of the fan filter units are disposed directly above the operation table.
- a plurality of through holes are provided at the bottom of the operating table.
- the substrate inspection device includes a plurality of humidifiers, and the plurality of humidifiers are disposed above the bracket at intervals.
- the present invention provides another substrate inspection device, including: a side wall, two sets of brackets, two sets of upper light sources, two feeding ports, at least one humidifier, an inspection port, and an operation table; A first side wall and a second side wall; the bracket is disposed between the first side wall and the second side wall, the bracket includes a tray and a support portion, and the tray is connected to the support portion The tray is rotated in the vertical direction to carry the substrate to be tested; two sets of the upper light sources are respectively disposed above the two sets of the brackets; and the feeding inlets are disposed on the first side wall, respectively Corresponding to two of the trays; the humidifier is provided above the bracket; the inspection port is provided on the second side wall, and the inspection port includes a transparent door that can be opened and closed; the The operating table is close to the inspection port.
- a roller blind is provided between the two upper light sources, and a lifting mechanism is provided on the roller blind to control the lifting and lowering of the roller blind.
- the substrate inspection device further includes a backlight source, and the backlight source is disposed on the first sidewall.
- a first guide rail is disposed on the first side wall, an end portion of the backlight source is disposed in the first guide rail, and the backlight source is along the first guide rail. Slide in the direction of extension.
- the supporting portion includes a first supporting member and a second supporting member disposed in parallel, and the first supporting member and the second supporting member are respectively connected to two of the tray. End hinged.
- the bracket further includes a base connected to the first support and the second support, and the base is provided with two second guide rails parallel to each other. Ends of the first support member and the second support member slide in corresponding two of the second guide rails.
- the base includes a first base connected to the first support member and a second base connected to the second support member, and the two second guide rails are respectively provided at the bases.
- the first support and the second support slide in the corresponding second guide rail along the extending direction of the second guide rail, respectively.
- the substrate inspection device further includes an array fan filter unit disposed at intervals above the bracket,
- At least one set of the fan filter units is disposed directly above the operation table.
- a plurality of through holes are provided at the bottom of the operating table.
- the substrate inspection device includes a plurality of humidifiers, and the plurality of humidifiers are disposed above the bracket at intervals.
- the substrate inspection device provided by the present invention can inspect two substrates at the same time, improve the speed and accuracy of the substrate inspection, and also save the space occupied by the inspection device, thereby increasing the productivity and reducing the production cost.
- the sealing effect of the inspection device is improved, and the cleanliness inside the inspection device is improved.
- FIG. 1 is a front view of a schematic structural diagram of a substrate inspection device according to the present invention
- FIG. 2 is a side view of a schematic structural diagram of a substrate inspection device according to the present invention.
- the present invention is directed to the existing substrate inspection device. Because a single device can only inspect one substrate at a time, the detection efficiency is low, and because the inspector enters and exits the device, there are many particles inside the device, which easily contaminates the substrate, and then affects the panel production This embodiment can solve this defect.
- the present invention provides a substrate inspection apparatus 100 including a side wall; two sets of brackets 12; two sets of upper light sources 13; two inlets 14; array humidifier 15; inspection port 16; operation Table 17; roller shutter 19; array fan filter unit 18; a backlight source 20.
- the sidewall includes a first sidewall 111 and a second sidewall 112, and the first sidewall 111 and the second sidewall 112 are oppositely disposed.
- the bracket 12 includes a tray 121, a support portion 122, and a base 123.
- the tray 121 is in a vertical direction.
- the upper end is rotatably connected to one end of the support portion 122, the opposite end of the support portion 122 is fixedly connected to the base 123, and the tray is used to carry the substrate 22 to be tested.
- the two sets of the upper light sources 13 are respectively disposed above the two sets of the brackets 12.
- the upper light sources 13 provide corresponding light sources for the substrate 22 during the detection process.
- the upper light sources 13 include multiple light sources. Under the illumination of various light sources, an operator adjusts the position of the substrate 22 through an operating machine and observes macro defects on the substrate 22, such as uneven coating, foreign objects, scratches, etc.
- the upper light source 13 includes white and orange. , Yellow, green and other lights.
- the two feeding inlets 14 are disposed on the first side wall 111, and the feeding inlets 14 and the corresponding trays 121 are approximately at the same height, so that the conveying device can pass the substrate 22 through the feeding materials.
- the port 14 is conveyed onto the tray 121.
- a plurality of humidifiers 15 are disposed above the bracket 12 at intervals, and the fan filter unit 18 is disposed above the brackets 12 at intervals.
- the humidifier 15 is used to increase the air humidity in the device 100
- the humidifier 15 is used in conjunction with the fan filter unit 18, and after the humidifier 15 has stopped humidifying, the fan filter unit 18 is turned on, Quickly dry to avoid damage to the equipment structure of the device.
- the humidity design of the humidifier 15 is controlled within a certain range.
- the inspection port 16 is disposed on the second side wall 112.
- the inspection port 16 includes a transparent door that can be opened and closed.
- the inspection port 16 is made of transparent glass, and the transparent door is disposed on the inspection port. In the middle of 16, the area of the transparent door is less than or equal to the area of the inspection port 16.
- the transparent door When the transparent door is closed, the inside of the inspection device 100 is sealed to prevent operators from bringing in particles.
- the transparent door may be opened and extended to observe.
- the operation table 17 is disposed near the inspection port 16, which is convenient for an operator to observe the substrate on the operation table 17.
- a plurality of through holes are provided at the bottom of the operation table 17, and at least one set of the fan filter units 18 is provided above the operation table. An air convection is formed between the fan filter units 18 and the through holes. Walking particles due to personnel activities.
- the backlight source 20 is disposed on the first side wall.
- a first guide rail 21 is disposed on the first side wall, and an end portion of one side of the backlight source 20 is disposed in the guide rail 21. Further, two pulleys are provided at an end portion of the backlight source 20, and the backlight source 20 is provided. Within the first guide rail 21, it slides laterally (that is, the extending direction of the first guide rail 21).
- the two substrates 14 are used to pick up and place the wafers in sequence.
- the backlight 20 is used. Sliding along the first guide rail 21 to the front of the inlet 14 to solve the blocking problem of the backlight source 20, a driving device may be used to control the movement of the backlight source 20.
- the backlight 20 plays a transmission role on the substrate to be inspected, and inspects the substrate for large defects, such as uncoated parts and unexposed parts.
- the frequency of use during the macro inspection is relatively low. It is used for the inspection of a block substrate, and the backlight 20 is moved according to the actual inspection needs.
- the roller blind 19 is disposed between two sets of the upper light sources 13, and a first lifting mechanism is provided on the roller blind.
- the first lifting mechanism is used to control the lifting and unfolding states of the roller blind 19.
- the roller shutter 19 can be lowered to separate the two sets of inspection components (on one set).
- the light source and a set of brackets are a set of inspection parts), and the roller blind 19 is made of a light-shielding material.
- the supporting portion 122 includes a first supporting member 1221 and a second supporting member 1222 disposed in parallel, and the first supporting member 1221 and the second supporting member 1222 are hingedly connected to ends on both sides of the tray 121, respectively.
- the two end lines are located in the middle of the tray 121 so that the substrate 22 to be tested is in a balanced position during the rotation.
- the base 123 is connected to the first support 1221 and the second support 1222, respectively.
- the base 123 is provided with two second guide rails that are parallel to each other, and the two guide rails are respectively connected to the first support rail.
- the supporting members 1221 and the second supporting members 1222 are connected.
- the base 123 is a whole. In addition, the base 123 may also be two separate bodies.
- the base 123 includes a first base 1231 connected to the first support 1221 and a second support 1222.
- the connected second base 1232, the first base 1231, and the second base 1232 are respectively provided with second rails that are parallel to each other, and the first support 1221 and the second support 1222 are in the corresponding first
- the two guide rails slide longitudinally (along the extending direction of the second guide rail). By moving the bracket 12, different viewing distances can be met, the frequency of opening the transparent door can be avoided, and the cleanliness of the interior of the device can be improved.
- the operation platform 17 is provided with a second lifting mechanism, which can be used to adjust the height of the operation platform 17 to meet the height requirements of different operators.
- Contrast detection can be achieved during the inspection process.
- a set of standard substrates is placed on one of the brackets 12 and a substrate to be tested is placed on the other bracket 12.
- the standard substrate is executed.
- the same operation is convenient for using the standard substrate as a reference for comparative detection, which can greatly improve the detection speed and accuracy of a single substrate.
- the two groups of the brackets 12 and the two upper light sources can perform switching linkage and single motion.
- one operator can detect two substrates at the same time; in the single-acting state, the two operators on the operation platform can independently operate without interference, and each substrate is tested.
- a camera is also provided inside the substrate inspection device 100 to capture the status of the substrates to be tested at different angles.
- a display device is provided beside the inspection port 16 to display photos taken by the camera for operator analysis. Whether the substrate to be tested is defective.
- the substrate inspection device provided by the present invention can inspect two substrates at the same time, improve the speed and accuracy of the substrate inspection, and also save the space occupied by the inspection device, thereby increasing the productivity and reducing the production cost;
- the sealing effect of the inspection device is improved, and the cleanliness of the inspection device is improved.
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Abstract
一种基板检查装置，包括侧壁、两组支架、两组上光源、两个入料口、数组加湿器、检查口以及操作台，侧壁包括相对设置的第一侧壁和第二侧壁，支架包括一托盘和支撑部，托盘与支撑部连接，托盘在竖直方向上转动，检查口包括可开闭的透明门。该装置提高了基板检查的速度和准确性，另外也提升了检查装置内部的洁净度。
Description
本发明涉及显示面板制造领域，尤其涉及一种基板检查装置。
在显示面板的制造过程中，存在对各个制造工序中的基板进行外观检查的工序，称为宏观检查。一般用Macro设备（宏观检查机）对基板制品进行宏观不良检查。目前，CF（彩色滤光膜）基板、阵列基板在完成光阻涂布、曝光、显影工序后，需要进行微观和宏观检查。现有的Macro设备检查主要分为Oven（烘烤）前检查和oven后检查，Oven前检查可及时发现基板不良状况以便于及时返工，但基板易受设备内particle（微粒）影响，虽然Oven后检查不够及时，但基板已固定成型，不易受particle影响，故业内多用于Oven后检查。
但是，现有的Macro设备检查需要人工操作，不可完全密封，导致particle较多，需要进一步提升设备内的洁净度，而且，在基板出货检查时，单台设备检查的速度减慢，需要设置多台设备并列使用才能满足生产需要。
综上所述，现有的单台Macro设备检查的工作效率不高，且设备内部的洁净度不高，急需优化设备结构。
本发明提供一种基板检查装置，能够实现对比检测两块基板，提高单台设备的检货速度和准确率，以解决现有的检查装置，由于单台设备一次性只能检查一块基板，导致检测效率低下，进而影响面板的产能。
本发明提供一种基板检查装置，包括：侧壁、两组支架、一背光源、两组上光源、卷帘、至少一加湿器，检查口以及操作台；所述侧壁包括相对设置的第一侧壁和第二侧壁；所述支架设置于所述第一侧壁和所述第二侧壁之间，所述支架包括一托盘和支撑部，所述托盘与所述支撑部连接，所述托盘在竖直方向上转动，用以承载待测基板；所述背光源设置于所述第一侧壁上；两组所述上光源，分别设置于两组所述支架的上方；所述卷帘设置于两组所述上光源之间；所述入料口设置于所述第一侧壁上，分别与两个所述托盘对应设置；所述加湿器设置于所述支架的上方；所述检查口设置于所述第二侧壁上，所述检查口包括可开闭的透明门；所述操作台靠近所述检查口。
在本发明的至少一种实施例中，所述卷帘上设置有升降机构，用以控制所述卷帘的升降。
在本发明的至少一种实施例中，所述第一侧壁上设置有第一导轨，所述背光源的端部设置于所述第一导轨内，所述背光源沿所述第一导轨的延伸方向滑动。
在本发明的至少一种实施例中，所述支撑部包括平行设置的第一支撑件与第二支撑件，所述第一支撑件、所述第二支撑件分别与所述托盘的两个端部铰链连接。
在本发明的至少一种实施例中，所述支架还包括与所述第一支撑件和所述第二支撑件连接的底座，所述底座上设置有相互平行的两条第二导轨，所述第一支撑件、所述第二支撑件的端部在对应的两条所述第二导轨内滑动。
在本发明的至少一种实施例中，所述底座包括连接所述第一支撑件的第一底座和连接所述第二支撑件的第二底座，所述两条第二导轨分别设置于所述第一底座和所述第二底座上，所述第一支撑件和所述第二支撑件分别在对应的所述第二导轨内沿所述第二导轨的延伸方向滑动。
在本发明的至少一种实施例中，所述基板检查装置还包括间隔设置于所述支架上方的数组风机过滤单元，其中一组所述风机过滤单元设置于所述操作台的正上方。
在本发明的至少一种实施例中，所述操作台底部设置有多个通孔。
在本发明的至少一种实施例中，所述基板检查装置包括数个加湿器，所述数个加湿器间隔设置于所述支架的上方。
本发明提供另一种基板检查装置，包括：侧壁、两组支架、两组上光源、两个入料口、至少一加湿器、检查口、以及操作台；所述侧壁包括相对设置的第一侧壁和第二侧壁；所述支架设置于所述第一侧壁和所述第二侧壁之间，所述支架包括一托盘和支撑部，所述托盘与所述支撑部连接，所述托盘在竖直方向上转动用以承载待测基板；两组所述上光源分别设置于两组所述支架的上方；所述入料口设置于所述第一侧壁上，分别与两个所述托盘对应设置；所述加湿器，设置于所述支架的上方；所述检查口设置于所述第二侧壁上，所述检查口包括可开闭的透明门；所述操作台靠近所述检查口。
在本发明的至少一种实施例中，两个所述上光源之间设置有卷帘，所述卷帘上设置有升降机构，用以控制所述卷帘的升降。
在本发明的至少一种实施例中，所述基板检查装置还包括一背光源，所述背光源设置于所述第一侧壁上。
在本发明的至少一种实施例中，所述第一侧壁上设置有第一导轨，所述背光源的端部设置于所述第一导轨内，所述背光源沿所述第一导轨的延伸方向滑动。
在本发明的至少一种实施例中，所述支撑部包括平行设置的第一支撑件与第二支撑件，所述第一支撑件、所述第二支撑件分别与所述托盘的两个端部铰链连接。
在本发明的至少一种实施例中，所述支架还包括与所述第一支撑件和所述第二支撑件连接的底座，所述底座上设置有相互平行的两条第二导轨，所述第一支撑件、所述第二支撑件的端部在对应的两条所述第二导轨内滑动。
在本发明的至少一种实施例中，所述底座包括连接所述第一支撑件的第一底座和连接所述第二支撑件的第二底座，所述两条第二导轨分别设置于所述第一底座和所述第二底座上，所述第一支撑件和所述第二支撑件分别在对应的所述第二导轨内沿所述第二导轨的延伸方向滑动。
在本发明的至少一种实施例中，所述基板检查装置还包括间隔设置于所述支架上方的数组风机过滤单元，
在本发明的至少一种实施例中，至少一组所述风机过滤单元设置于所述操作台的正上方。
在本发明的至少一种实施例中，所述操作台底部设置有多个通孔。
在本发明的至少一种实施例中，所述基板检查装置包括数个加湿器，所述数个加湿器间隔设置于所述支架的上方。
本发明的有益效果为：本发明提供的基板检查装置，能够同时对比检查两块基板，提高基板检查的速度和准确性，同时也节省检查装置占用的空间，进而提高了产能，降低了生产成本；另外，提高了检查装置的密闭效果，提升了检查装置内部的洁净度。
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明基板检查装置的结构示意图的正视图；
图2为本发明基板检查装置的结构示意图的侧视图。
以下各实施例的说明是参考附加的图示，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是用以相同标号表示。
本发明针对现有的基板检查装置，由于单台设备一次性只能检查一块基板，检测效率低下，且由于检查人员的出入装置，导致装置内部particle较多，易污染基板，进而影响面板的产能，本实施例能够解决该缺陷。
请参照图1和图2，本发明提供一种基板检查装置100，包括侧壁；两组支架12；两组上光源13；两个入料口14；数组加湿器15；检查口16；操作台17；卷帘19；数组风机过滤单元18；一背光源20。
其中，所述侧壁包括第一侧壁111和第二侧壁112，所述第一侧壁111和所述第二侧壁112相对设置。
两组所述支架12平行设置于所述第一侧壁111所述第二侧壁112之间，所述支架12包括一托盘121、支撑部122和底座123，所述托盘121在竖直方向上可转动地与所述支撑部122的一端固定连接，所述支撑部122相对的另一端与所述底座123固定连接，所述托盘用以承载待测基板22。
两组所述上光源13分别设置于两组所述支架12的上方，所述上光源13为所述基板22在检测过程中提供相应的光源，所述上光源13包括多种光源，在各种光源照射下，操作人员通过操作机台调整所述基板22的位置，观察所述基板22上的宏观缺陷，例如涂布不均、异物、划痕等，所述上光源13包括白、橙、黄、绿等多种颜色的灯光。
两个所述入料口14设置于所述第一侧壁111上，所述入料口14与对应的所述托盘121大致在同一个高度，方便输送装置将所述基板22通过该入料口14输送到所述托盘121上。
数个所述加湿器15间隔设置于所述支架12的上方，数组所述风机过滤单元18间隔设置于所述支架12的上方，所述加湿器15用于增加所述装置100内的空气湿度，避免particle飞扬，对基板造成污染，增强设备内部的洁净效果，所述加湿器15与所述风机过滤单元18配合使用，在所述加湿器15加湿停止后，所述风机过滤单元18开启，快速干燥，避免对装置的设备结构造成损坏，所述加湿器15的湿度设计控制在一定的范围内。
所述检查口16设置于所述第二侧壁112上，所述检查口16包括一可开闭的透明门，所述检查口16采用透明玻璃制备，所述透明门设置于所述检查口16的中部，所述透明门的面积小于或等于所述检查口16的面积，所述透明门关闭时，所述检查装置100的内部密封，可避免操作人员带入particle，当需要对基板进行近距离观察，或者所述透明门导致光线干扰时，可打开所述透明门，伸入观察。
所述操作台17靠近所述检查口16设置，便于操作人员在所述操作台17上观察基板。所述操作台17的底部设置有多个通孔，所述操作台的上方设置有至少一组所述风机过滤单元18，所述风机过滤单元18与所述通孔之间形成空气对流，带走由于人员活动带来的particle。
所述背光源20设置于所述第一侧壁上，为了避免所述背光源20阻挡两个所述入料口14，影响待测基板从所述入料口14进入装置内，在所述第一侧壁上设置第一导轨21，所述背光源20的一侧端部设置于所述导轨21内，进一步地，所述背光源20的端部设置有两滑轮，所述背光源20在所述第一导轨21内，横向滑动（即所述第一导轨21的延伸方向）。
在使用两个所述入料口14进行基板的取放时，两个所述入料口14依次取放片，当其中一个所述入料口14进行取片时，将所述背光源20沿所述第一导轨21滑动至另一所述入料口14前，以解决所述背光源20的阻挡问题，可采用驱动装置来控制所述背光源20的移动。
所述背光源20对待检测基板起透射作用，检查基板上有无巨大缺陷，例如未涂布部分、未曝光部分等，在宏观检查过程中使用频率较低，故设计一组背光源20供两块基板检查使用，根据实际检查需要，移动所述背光源20。
所述卷帘19设置于两组所述上光源13之间，所述卷帘上设置有第一升降机构，所述第一升降机构用以控制所述卷帘19的升降和展开状态，当两个操作人员分别检查两块基板时，为了避免两组所述上光源13之间的光线相互干扰，所述卷帘19可降下，用以分隔开所述两组检查部件（一组上光源和一组支架为一组检查部件），所述卷帘19采用遮光材料制备。
所述支撑部122包括平行设置的第一支撑件1221和第二支撑件1222，所述第一支撑件1221和所述第二支撑件1222分别与所述托盘121两侧的端部铰链连接，该两侧的端部连线位于所述托盘121的中部，使得待测基板22在旋转过程中处于平衡位置。
所述底座123分别与所述第一支撑件1221和所述第二支撑件1222连接，所述底座123上设置有相互平行的两条第二导轨，所述两条导轨分别与所述第一支撑件1221、所述第二支撑件1222连接。
所述底座123为一个整体，另外，所述底座123也可为两个分体，所述底座123包括与所述第一支撑件1221连接的第一底座1231和与所述第二支撑件1222连接的第二底座1232，所述第一底座1231、所述第二底座1232上分别设置有相互平行的第二导轨，所述第一支撑件1221和所述第二支撑件1222在对应的第二导轨内纵向滑动（沿第二导轨的延伸方向），通过移动所述支架12，可以满足不同的观察距离，也可避免打开所述透明门的频率，提高装置内部的清洁度。
所述操作台17上设置有第二升降机构，可用以调节所述操作台17的高度，满足不同操作人员的身高需要。
在检查过程中可实现对比检测，一组所述支架12上放置标准基板，另一所述支架12上放置待测基板，当移动所述待测基板和改变光源时，对所述标准基板执行相同的操作，便于以所述标准基板为参考，进行对比检测，可大大提高单块基板的检测速度和准确率。
也可实现两块基板同时检测，两组所述支架12和两组上光源可实行切换联动和单动。联动状态时，一个操作人员同时检测两块基板；单动状态时，操作台上的两个操作人员可独立操作互不干扰，分别检测一块待测基板。
所述基板检查装置100内部还设置有摄像头，用以拍摄不同角度的待测基板的状态，所述检查口16旁设置有显示装置，用以显示所述摄像头拍摄的照片，以便于操作人员分析待测基板是否存在缺陷。
有益效果：本发明提供的基板检查装置，能够同时对比检查两块基板，提高基板检查的速度和准确性，同时也节省检查装置占用的空间，进而提高了产能，降低了生产成本；另外，提高了检查装置的密闭效果，提升了检查装置内部的洁净度。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
Claims (20)
- 一种基板检查装置，其中，包括：侧壁，所述侧壁包括相对设置的第一侧壁和第二侧壁；两组支架，所述支架设置于所述第一侧壁和所述第二侧壁之间，所述支架包括一托盘和支撑部，所述托盘与所述支撑部连接，所述托盘在竖直方向上转动，用以承载待测基板；一背光源，设置于所述第一侧壁上；两组上光源，分别设置于两组所述支架的上方；卷帘，设置于两组所述上光源之间；两个入料口，设置于所述第一侧壁上，分别与两个所述托盘对应设置；至少一加湿器，设置于所述支架的上方；检查口，设置于所述第二侧壁上，包括可开闭的透明门；操作台，靠近所述检查口。
- 根据权利要求1所述的基板检查装置，其中，所述卷帘上设置有升降机构，用以控制所述卷帘的升降。
- 根据权利要求1所述的基板检查装置，其中，所述第一侧壁上设置有第一导轨，所述背光源的端部设置于所述第一导轨内，所述背光源沿所述第一导轨的延伸方向滑动。
- 根据权利要求1所述的基板检查装置，其中，所述支撑部包括平行设置的第一支撑件与第二支撑件，所述第一支撑件、所述第二支撑件分别与所述托盘的两个端部铰链连接。
- 根据权利要求4所述的基板检查装置，其中，所述支架还包括与所述第一支撑件和所述第二支撑件连接的底座，所述底座上设置有相互平行的两条第二导轨，所述第一支撑件、所述第二支撑件的端部在对应的两条所述第二导轨内滑动。
- 根据权利要求5所述的基板检查装置，其中，所述底座包括连接所述第一支撑件的第一底座和连接所述第二支撑件的第二底座，所述两条第二导轨分别设置于所述第一底座和所述第二底座上，所述第一支撑件和所述第二支撑件分别在对应的所述第二导轨内沿所述第二导轨的延伸方向滑动。
- 根据权利要求1所述的基板检查装置，其中，所述基板检查装置还包括间隔设置于所述支架上方的数组风机过滤单元，其中一组所述风机过滤单元设置于所述操作台的正上方。
- 根据权利要求7所述的基板检查装置，其中，所述操作台底部设置有多个通孔。
- 根据权利要求1所述的基板检查装置，其中，所述基板检查装置包括数个加湿器，所述数个加湿器间隔设置于所述支架的上方。
- 一种基板检查装置，其中，包括：侧壁，所述侧壁包括相对设置的第一侧壁和第二侧壁；两组支架，所述支架设置于所述第一侧壁和所述第二侧壁之间，所述支架包括一托盘和支撑部，所述托盘与所述支撑部连接，所述托盘在竖直方向上转动，用以承载待测基板；两组上光源，分别设置于两组所述支架的上方；两个入料口，设置于所述第一侧壁上，分别与两个所述托盘对应设置；至少一加湿器，设置于所述支架的上方；检查口，设置于所述第二侧壁上，包括可开闭的透明门；操作台，靠近所述检查口。
- 根据权利要求10所述的基板检查装置，其中，两个所述上光源之间设置有卷帘，所述卷帘上设置有升降机构，用以控制所述卷帘的升降。
- 根据权利要求10所述的基板检查装置，其中，所述基板检查装置还包括一背光源，所述背光源设置于所述第一侧壁上。
- 根据权利要求12所述的基板检查装置，其中，所述第一侧壁上设置有第一导轨，所述背光源的端部设置于所述第一导轨内，所述背光源沿所述第一导轨的延伸方向滑动。
- 根据权利要求10所述的基板检查装置，其中，所述支撑部包括平行设置的第一支撑件与第二支撑件，所述第一支撑件、所述第二支撑件分别与所述托盘的两个端部铰链连接。
- 根据权利要求14所述的基板检查装置，其中，所述支架还包括与所述第一支撑件和所述第二支撑件连接的底座，所述底座上设置有相互平行的两条第二导轨，所述第一支撑件、所述第二支撑件的端部在对应的两条所述第二导轨内滑动。
- 根据权利要求15所述的基板检查装置，其中，所述底座包括连接所述第一支撑件的第一底座和连接所述第二支撑件的第二底座，所述两条第二导轨分别设置于所述第一底座和所述第二底座上，所述第一支撑件和所述第二支撑件分别在对应的所述第二导轨内沿所述第二导轨的延伸方向滑动。
- 根据权利要求10所述的基板检查装置，其中，所述基板检查装置还包括间隔设置于所述支架上方的数组风机过滤单元。
- 根据权利要求17所述的基板检查装置，其中，至少一组所述风机过滤单元设置于所述操作台的正上方。
- 根据权利要求18所述的基板检查装置，其中，所述操作台底部设置有多个通孔。
- 根据权利要求10所述的基板检查装置，其中，所述基板检查装置包括数个加湿器，所述数个加湿器间隔设置于所述支架的上方。
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