WO2020014933A1 - 柔性显示面板及其制作方法、显示装置及掩膜版 - Google Patents

柔性显示面板及其制作方法、显示装置及掩膜版 Download PDF

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Publication number
WO2020014933A1
WO2020014933A1 PCT/CN2018/096346 CN2018096346W WO2020014933A1 WO 2020014933 A1 WO2020014933 A1 WO 2020014933A1 CN 2018096346 W CN2018096346 W CN 2018096346W WO 2020014933 A1 WO2020014933 A1 WO 2020014933A1
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WIPO (PCT)
Prior art keywords
layer
flexible display
display panel
hollowed
cathode
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PCT/CN2018/096346
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English (en)
French (fr)
Inventor
林茂仲
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Shenzhen Royole Technologies Co Ltd
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Shenzhen Royole Technologies Co Ltd
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Priority to PCT/CN2018/096346 priority Critical patent/WO2020014933A1/zh
Priority to CN201880093829.7A priority patent/CN112470285A/zh
Publication of WO2020014933A1 publication Critical patent/WO2020014933A1/zh
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations

Definitions

  • the invention relates to the field of display technology, in particular to a flexible display panel and a manufacturing method thereof, a display device and a mask plate.
  • the OLED Organic Light-Emitting Diode
  • the cathode layer is coated on the entire surface. During the bending process, the stress cannot be effectively released, which may easily cause the cathode layer to deform or the cathode layer to be separated from the upper and lower film layers, thereby affecting the performance of the flexible display device.
  • an embodiment of the present invention discloses a flexible display panel, a display device, and a mask plate.
  • a flexible display panel includes a cathode layer including a first hollowed-out area.
  • the cathode layer includes a plurality of cathodes disposed at intervals and electrically connected to each other, and the first hollowed-out area is formed between two adjacent cathodes.
  • the cathode layer further includes a plurality of first connection bridges, and two adjacent cathodes are electrically connected through at least one of the first connection bridges.
  • the cathode and the first connection bridge are formed synchronously by using a fine mask.
  • the flexible display panel further includes a plurality of pixel units, the cathode is disposed corresponding to one of the pixel units, and the pixel unit includes at least one pixel area.
  • the pixel region includes a light-emitting region and a non-light-emitting region connected to the light-emitting region.
  • the longitudinal direction of the cathode is parallel to the bending axis of the flexible display device.
  • the flexible display panel further includes an organic light emitting layer and an encapsulation layer which are stacked with the cathode layer, the cathode layer is disposed between the encapsulation layer and the organic light emitting layer, and the encapsulation layer fills the The first hollowed out area is described.
  • the flexible display panel further includes a substrate, a thin film transistor, an anode layer, and a pixel definition layer.
  • the thin film transistor, the anode layer, the pixel definition layer, the organic light emitting layer, and the cathode layer are in this order. It is stacked on the substrate, and the thin film transistor is disposed adjacent to the substrate.
  • a display device includes the flexible display panel described above.
  • a mask plate is used to fabricate a cathode layer of a flexible display panel, and a non-hollowed area is formed on the mask plate, and the non-hollowed area is used to form a first hollow area of the cathode layer.
  • the mask plate includes a plurality of spaced-apart second hollowed-out areas, the non-hollowed-out area is formed between two adjacent second hollowed-out areas, and the second hollowed-out area is used for forming the cathode layer. cathode.
  • the mask plate further includes a plurality of third hollowed-out areas, and adjacent two second hollowed-out areas are communicated through at least one third hollowed-out area, and the third hollowed-out area is used to form a first hollowed-out area of the cathode layer.
  • a connecting bridge is used to form a first hollowed-out area of the cathode layer.
  • a method for manufacturing a flexible display panel includes forming a cathode layer of a flexible display panel by using a mask plate, wherein the mask plate includes a non-hollowed area, and the cathode layer includes a first hollowed area formed corresponding to the non-hollowed area.
  • the "cathode layer of the flexible display panel formed by using a mask plate” further includes: the mask plate further includes a plurality of spaced-apart second hollowed-out areas, and two adjacent hollowed-out areas are formed between the second hollowed-out areas. In the non-hollow area, the cathode layer further includes a cathode formed corresponding to the second hollow area.
  • the mask plate further includes a plurality of third hollowed-out areas, two adjacent second hollowed-out areas are communicated through at least one third hollowed-out area, and the cathode layer further includes a third hollowed-out area formed corresponding to the third hollowed-out area.
  • a first connection bridge, and two adjacent cathodes are electrically connected through at least one of the first connection bridges.
  • the "cathode layer of the flexible display panel formed by using a mask plate” further includes: the second hollowed-out area is provided corresponding to one pixel unit of the flexible display panel, and the pixel unit includes at least one pixel area.
  • the cathode is arranged corresponding to one pixel unit.
  • the manufacturing method further includes the step of: forming an encapsulation layer on the cathode layer, and the encapsulation layer filling the first hollowed-out area.
  • a mask plate is used for fabricating a cathode layer of a flexible display panel.
  • the mask plate forms a light-transmitting area, and the light-transmitting area is used to form a hollow area of the cathode layer.
  • the mask plate includes a plurality of spaced-apart shielding areas, and the light-transmitting area is formed between two adjacent shielding areas, and the shielding areas are used to form a cathode of the cathode layer.
  • the mask plate further includes a plurality of second connection bridges, and two adjacent shielding regions are connected by at least one second connection bridge, and the second connection bridge is used to form a second connection of the cathode layer. bridge.
  • a cathode layer of a flexible display panel is formed by using a mask plate, the mask plate includes a light-transmitting region, and the cathode layer includes a hollow region formed corresponding to the light-transmitting region.
  • the "cathode layer of the flexible display panel formed by using a mask plate” further comprises: the mask plate further includes a plurality of spaced-apart shielding areas, and the light-transmitting area is formed between two adjacent shielding areas.
  • the cathode layer further includes a cathode formed corresponding to the shielding area.
  • the mask plate further includes a plurality of second connection bridges, two adjacent shielding regions are connected by at least one second connection bridge, and the cathode layer further includes a first formed corresponding to the second connection bridge.
  • a connection bridge, and two adjacent cathodes are electrically connected through at least one of the first connection bridges.
  • the flexible display panel provided by the present invention, a manufacturing method thereof, a display device, and a mask plate, since the cathode layer forms a first hollowed-out area, when the flexible display panel is bent, the first hollowed-out area can effectively release the stress of the flexible display panel and avoid The cathode layer is broken or detached from the upper and lower film layers adjacent to it due to bending.
  • FIG. 1 is a schematic diagram of a display device according to a first embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a laminated structure of a flexible display panel of the display device shown in FIG. 1.
  • FIG. 3 is a partially enlarged schematic diagram of the flexible display panel shown in FIG. 2.
  • FIG. 4 is a schematic diagram of a mask for making a cathode layer.
  • FIG. 5 is a schematic diagram of a display device according to a second embodiment of the present invention.
  • FIG. 6 is a schematic diagram of a display device according to a third embodiment of the present invention.
  • FIG. 7 is a schematic diagram of a display device according to a fourth embodiment of the present invention.
  • FIG. 8 is a flowchart of a method for manufacturing a flexible display panel according to a fifth embodiment of the present invention.
  • FIG. 9 is a schematic diagram of a mask plate according to a sixth embodiment of the present invention.
  • FIG. 10 is a flowchart of a method for manufacturing a flexible display panel according to a seventh embodiment of the present invention.
  • a first embodiment of the present invention provides a display device 100.
  • the display device 100 includes a flexible display panel 10.
  • the display device 100 may be a product or component having a display function such as a tablet computer, a notebook computer, a television, a navigator, and the like.
  • the flexible display panel 10 includes a cathode layer 18 including a first hollowed-out area 180. Since the cathode layer 18 forms the first hollowed-out area 180, when the flexible display panel 10 is bent, the first hollowed-out area 180 can effectively release the stress of the flexible display panel 10 and prevent the cathode layer 18 from being broken or detached from the adjacent ones due to bending. Upper and lower film layers.
  • the cathode layer 18 is made of metal. It is understood that the cathode layer 18 may be made of other conductive materials, such as carbon nanotubes.
  • the cathode layer 18 includes a plurality of cathodes 181 disposed at intervals and electrically connected to each other.
  • the plurality of cathodes 181 are arranged in an array.
  • a first hollowed-out area 180 is provided between two adjacent cathodes 181 so as to be spaced apart.
  • the flexible display panel 10 can be bent around the bending axis 200.
  • the cathode 181 is substantially rectangular, and the long side of the cathode 181 is parallel to the bending axis 200, thereby reducing the impact on the cathode 181 during bending.
  • the cathode layer 18 further includes a plurality of first connection bridges 185. Adjacent two cathodes 181 are electrically connected through at least one first connection bridge 185. A first end of the first connection bridge 185 is connected to one cathode 181, and a second end of the first connection bridge 185 is connected to another cathode 181. Each first connecting bridge 185 is located between two first hollowed-out areas 180.
  • the cathode 181 is formed in synchronization with the first connection bridge 185, and the cathode 181 and the first connection bridge 185 are formed by a coating process on the organic light emitting layer 17.
  • a patterned cathode layer 18 is formed by vapor deposition using a fine mask.
  • the manufacturing steps can be reduced, and the flexible display panel 10 can be prevented from being disconnected between the cathodes 181 during the bending process or after multiple bendings.
  • the cathode 181 and the first connection bridge 185 are formed by patterning the same conductive layer.
  • a first hollowed-out area 180 is provided between two adjacent cathodes 181. Adjacent two cathodes 181 are connected by other conductive structures, such as wires.
  • the flexible display panel 10 further includes a plurality of pixel units 101.
  • the plurality of pixel units 101 are arranged in an array.
  • Each cathode 181 is provided corresponding to one pixel unit 101.
  • Each pixel unit 101 includes three pixel regions 102.
  • the pixel region 102 includes a light-emitting region 103 and a non-light-emitting region 104 connected to the light-emitting region 103.
  • the three pixel regions 102 include a red pixel region, a green pixel region, and a blue pixel region.
  • the pixel areas 102 are rectangular and the light emitting areas are substantially equal.
  • each pixel area 102 can be changed according to the actual light emission requirements, such as circular or parallel. It can also be understood that the shape of a quadrangle is irregular, and the area of each pixel region 102 can also be changed according to actual needs to meet different brightness requirements.
  • the light emitting area of each pixel region may be the same or different.
  • the arrangement direction of the three pixel regions 102 in the same pixel unit 101 is parallel to the bending axis 200.
  • the flexible display panel 10 further includes a substrate 11, a plurality of thin film transistors 13, an anode layer 15, a pixel definition layer 16, an organic light emitting layer 17, and a packaging layer 19.
  • the substrate 11, the thin film transistor 13, the anode layer 15, the pixel definition layer 16, the organic light emitting layer 17, the cathode layer 18, and the encapsulation layer 19 are sequentially stacked and arranged.
  • the cathode layer 18 is provided between the organic light emitting layer 17 and the encapsulation layer 19.
  • the packaging layer 19 includes a filling portion 191.
  • the filling portion 191 fills the first hollowed-out area 180.
  • the side portion of the filling portion 191 is closely attached to the sidewall of the first hollowed-out area 180, and the bottom portion of the filling portion 191 facing the organic light emitting layer 17 is closely attached to the organic light emitting layer 17, so that the encapsulation layer 19 and the organic light emitting layer 17 is engaged with each other through the first hollowed-out area 180.
  • the cathode layer 18 is enclosed between the encapsulation layer 19 and the organic light emitting layer 17, and the encapsulation layer 19 and the organic light emitting layer 17 are engaged with each other through the first hollowed-out area 180, thereby enhancing the cathode layer 18 and the organic light emitting layer 17 and
  • the connection strength between the encapsulation layers 19 can reduce the peeling of the cathode layer 18, the organic light-emitting layer 17, and the encapsulation layer 19 during bending.
  • the thin film transistor 13 has a top-gate structure.
  • the thin film transistor 13 includes an active layer 131, a gate insulating layer 132, a gate 133, and a source and drain 134.
  • An active layer 131 is provided on the substrate 11.
  • the gate insulating layer 132 is disposed on a side of the active layer 131 away from the substrate 11.
  • the gate 133 is disposed on a side of the gate insulating layer 132 away from the active layer 131.
  • the source and drain electrodes 134 are in contact with the active layer 131.
  • the thin film transistor 13 may be a bottom gate structure.
  • the pixel definition layer 16 is generally made of an organic material.
  • the pixel definition layer 16 defines a plurality of pixel units 101.
  • the cathode 181 covers the pixel unit 101.
  • the light emitting region 103 of each pixel region 102 includes an organic light emitting layer 17, a cathode 181, and an anode layer 15.
  • the organic light emitting layer 17 is located between the cathode layer 18 and the anode layer 15 and is used to generate light of a predetermined color to achieve display.
  • part of the cathode layer 18, part of the anode layer 15, and part of the organic light emitting layer 17 constitute an organic light emitting diode.
  • Each organic light emitting diode is disposed corresponding to one thin film transistor 130.
  • the thin film transistor 130 is used to drive an organic light emitting diode.
  • the flexible display panel 10 further includes a buffer layer 21, an interlayer dielectric layer 23, a passivation layer 25 and a flat layer 27.
  • the buffer layer 21 is provided between the active layer 131 and the substrate 11.
  • the interlayer dielectric layer 23 is provided on the gate electrode 133 and the gate insulating layer 132, the source and drain electrodes 134 are provided on the interlayer dielectric layer 23, and the passivation layer 25 is provided on the interlayer dielectric layer 23 and the source and drain electrodes 134.
  • the flat layer 27 is provided on the passivation layer 25, and the anode layer 15 is provided on the flat layer 27.
  • a mask 60 can be used to fabricate a patterned cathode layer 18 on the organic light emitting layer 17.
  • the mask plate 60 includes a second hollowed-out area 601, a non-hollowed-out area 603, and a third hollowed-out area 605, and adjacent second hollowed-out areas 601 are communicated through the third hollowed-out area 605.
  • the second hollowed-out area 601 is used to form the cathode 181 of the cathode layer 18, the non-hollowed-out area 603 is used to form the first hollowed-out area 180 of the cathode layer 18, and the third hollowed-out area 605 is used to form the first connection bridge 185 of the cathode layer 18.
  • the mask 60 is a fine mask. It can be understood that the pattern and quantity of the mask plate 60 are selected according to the needs, so as to make the required pattern of the cathode layer 18. In other embodiments, the patterned cathode layer 18 can be produced by a mask 60.
  • the cathode layer 18 forms the first hollowed-out area 180, when the flexible display panel 10 is bent, the first hollowed-out area 180 can effectively release the stress of the flexible display panel 10 and prevent the cathode layer 18 from being broken or detached from the adjacent ones due to bending.
  • the upper and lower film layers solve the problem that the cathode film layer obtained in the conventional cathode film coating method adopts the whole surface coating method is not resistant to bending.
  • the flexible display panel 10 of this embodiment is made by using a multi-pixel covering method through the fine mask plate 60, because the cathode layer 18 includes a first hollowed-out area 180.
  • the first hollowed-out area 180 can release stress, and the flexible display panel 10 is provided with an encapsulation layer 19 on the side of the cathode layer 18 away from the substrate 11.
  • the encapsulation layer 19 passes through the first hollowed-out area 180 and
  • the organic light emitting layers 17 are engaged with each other, so that the cathode 181 made of metal is covered inside, which is beneficial to reducing the peeling of the film layer caused by the flexible display panel 10 when it is bent.
  • the two sides of the cathode layer are not limited to an organic light emitting layer and an encapsulation layer, such as a flat layer or a dielectric layer.
  • the flexible display panel further includes a first layer and a first layer respectively located on opposite sides of the cathode layer. Two layers, the first layer and the second layer are in direct contact through a first hollowed-out area.
  • each cathode 381 is provided corresponding to one pixel unit 301.
  • Each pixel unit 301 includes six pixel regions 302.
  • the six pixel regions 302 are divided into two groups.
  • Each group of pixel regions 302 includes a red pixel region, a green pixel region, and a blue pixel region.
  • the two sets of pixel regions 302 of the same pixel unit 301 are arranged along the first direction.
  • the three pixel regions 302 of the group pixel unit 301 are arranged along a second direction perpendicular to the first direction.
  • each cathode 481 is provided corresponding to one pixel unit 401.
  • Each pixel unit 401 includes nine pixel regions 402. A plurality of pixel units 401 are arranged at intervals in the first direction. Nine pixel regions 402 in the same pixel unit 401 are along a second direction that is perpendicular to the first direction. (Parallel bending axis) arrangement. In this embodiment, the nine pixel regions 402 of the same pixel unit 401 include three red pixel regions, three green pixel regions, and three blue pixel regions.
  • R, G, B, R, G, B, R, G, B, B are arranged.
  • the plurality of cathodes 481 are arranged at intervals in the first direction, and the cathodes 481 extend in the second direction (parallel bending axis).
  • the structure of the flexible display device 50 provided by the fourth embodiment of the present invention is substantially the same as that of the flexible display device 100 provided by the first embodiment of the present invention.
  • Each cathode 581 is provided corresponding to one pixel unit 501.
  • the difference is that
  • the pixel unit 501 includes seven pixel regions 502 located in the same column (parallel bending axis). Seven pixel regions 702 in the same pixel unit 501 are arranged along a first direction, and a plurality of pixel units 501 are arranged along a second direction perpendicular to the first direction.
  • the cathodes 581 extend in the second direction, and the plurality of cathodes 581 are arranged at intervals in the first direction.
  • the colors in the same pixel unit 501 are the same, and the colors in adjacent pixel units 501 are different.
  • each cathode is disposed corresponding to one pixel unit, and the pixel unit includes at least one pixel area.
  • a fifth embodiment of the present invention further provides a method for manufacturing a flexible display panel, including the following steps:
  • step 801 a thin film transistor, an anode layer, a pixel definition layer, and an organic light emitting layer are sequentially formed on a substrate.
  • a mask layer is used to form a cathode layer of a flexible display panel on the organic light-emitting layer.
  • a non-hollow area is formed on the mask plate, and the cathode layer forms a first hollow area corresponding to the non-hollow area.
  • the "cathode layer of the flexible display panel is formed by using a mask plate” further includes: the mask plate further includes a plurality of spaced-apart second hollow areas, and between two adjacent second hollow areas The non-hollowed area is formed, and the cathode layer further includes a cathode formed corresponding to the second hollowed out area.
  • the mask plate further includes a plurality of third hollowed-out areas, two adjacent second hollowed-out areas communicate through at least one third hollowed-out area, and the cathode layer further includes a first connection formed corresponding to the third hollowed-out area. Bridge, two adjacent cathodes are electrically connected through at least one of the first connection bridges.
  • Step 803 An encapsulation layer is formed on the cathode layer, and the encapsulation layer fills the first hollowed-out area.
  • a mask layer is used to form a cathode layer of a flexible display panel by an evaporation process.
  • a method for manufacturing a flexible display panel includes forming a cathode layer of a flexible display panel using a mask plate, the mask plate including a non-hollowed area, and the cathode layer including a corresponding non-hollowed area. First hollowed out area.
  • a sixth embodiment of the present invention further provides a mask plate 70 for fabricating a cathode layer of a flexible display panel.
  • a mask 70 is used to make a patterned cathode layer.
  • the mask plate 70 includes a shielding region 701 and a light-transmitting region 703, and adjacent shielding regions 701 are connected by a second connection bridge 705.
  • the shielding region 701 is used to form a cathode of the cathode layer
  • the light-transmitting region 703 is used to form a first hollow region of the cathode layer
  • the second connection bridge 705 is used to form a first connection bridge of the cathode layer.
  • a mask 70 is used to form a patterned cathode layer of a flexible display panel through a photo-etching process.
  • a seventh embodiment of the present invention further provides a method for manufacturing a flexible display panel, including the following steps:
  • step 901 a thin film transistor, an anode layer, a pixel definition layer, and an organic light emitting layer are sequentially formed on a substrate.
  • a cathode layer of a flexible display panel is formed on the organic light-emitting layer by using a mask.
  • the mask includes a light-transmitting area
  • the cathode layer includes a first hollowed-out area corresponding to the light-transmitting area.
  • the mask plate further includes a plurality of spaced-apart shielding regions, the light-transmitting regions are formed between two adjacent shielding regions, and the cathode layer further includes a cathode formed corresponding to the shielding regions.
  • the mask plate further includes a plurality of second connection bridges, and two adjacent shielding regions are connected by at least one second connection bridge.
  • the cathode layer further includes a first connection bridge corresponding to the second connection bridge. Adjacent two of the cathodes are electrically connected through at least one of the first connection bridges.
  • the method further includes: coating a conductive layer on the organic light-emitting layer; patterning the conductive layer synchronously by using the mask to form a plurality of spaced-apart shielding areas, two adjacent ones The cathode is electrically connected through at least one of the first connection bridges.
  • Step 903 An encapsulation layer is formed on the cathode layer, and the encapsulation layer fills the first hollowed-out area.
  • the flexible display panel provided by the embodiments of the present invention, a method for manufacturing the same, a display device, and a mask plate. Since the cathode layer forms a hollow area, when the flexible display panel is bent, the hollow area can effectively release the stress of the flexible display panel and avoid The cathode layer is broken or detached from the upper and lower film layers adjacent to it due to bending.

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Abstract

本发明公开一种柔性显示面板(10)，包括阴极层(18)，所述阴极层(18)包括第一镂空区域(180)。由于阴极层形成第一镂空区域，在弯折柔性显示面板时，第一镂空区域能够有效释放柔性显示面板的应力，避免阴极层因弯折发生折断或脱离与其相邻的上下膜层。本发明还提供一种柔性显示面板的制作方法、显示装置及掩膜版。

Description

柔性显示面板及其制作方法、显示装置及掩膜版 技术领域
本发明涉及显示技术领域，特别涉及一种柔性显示面板及其制作方法、显示装置及掩膜版。
背景技术
柔性显示装置由于其可弯折的特性受到越来越多的关注。而OLED(Organic Light-Emitting Diode，有机发光二极管)是应用于柔性显示装置中的主要元件。OLED柔性显示装置中，阴极层采取整面镀膜，在弯折过程中，应力无法有效释放，易造成所述阴极层形变，或者所述阴极层与上下膜层剥离，影响柔性显示装置的性能。
发明内容
为解决上述问题，本发明实施例公开一种柔性显示面板、显示装置及掩膜版。
一种柔性显示面板，包括阴极层，所述阴极层包括第一镂空区域。
进一步地，所述阴极层包括多个间隔设置且相互电连接的阴极，相邻的两个阴极之间形成所述第一镂空区域。
进一步地，所述阴极层还包括多个第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
进一步地，所述阴极与所述第一连接桥通过采用精细掩膜版同步形成。
进一步地，所述柔性显示面板还包括多个像素单元，所述阴极对应一个所述像素单元设置，所述像素单元包括至少一个像素区域。
进一步地，所述像素区域包括发光区及与所述发光区连接设置的非发光区。
进一步地，所述阴极的长边方向与柔性显示装置的弯折轴线平行。
进一步地，所述柔性显示面板还包括与所述阴极层层叠设置的有机发光层及封装层，所述阴极层设于所述封装层与所述有机发光层之间，所述封装层填充所述第一镂空区域。
进一步地，所述柔性显示面板还包括衬底、薄膜晶体管、阳极层及像素定义层，所述薄膜晶体管、所述阳极层、所述像素定义层、所述有机发光层及所述阴极层依次层叠设置于所述衬底上，所述薄膜晶体管与所述衬底相邻设置。
一种显示装置，包括如上所述的柔性显示面板。
一种掩膜版，用于制作柔性显示面板的阴极层，所述掩膜版上形成非镂空区域，所述非镂空区域用于形成所述阴极层的第一镂空区域。
进一步地，所述掩膜版包括多个间隔设置的第二镂空区域，相邻的两个第二镂空区域间形成所述非镂空区域，所述第二镂空区域用于形成所述阴极层的阴极。
进一步地，所述掩膜版还包括多个第三镂空区域，相邻的两个第二镂空区域通过至少一个第三镂空区域连通，所述第三镂空区域用于形成所述阴极层的第一连接桥。
一种柔性显示面板的制作方法，包括采用掩膜版形成柔性显示面板的阴极层，所述掩膜版包括非镂空区域，所述阴极层包括对应所述非镂空区域形成的第一镂空区域。
进一步地，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述掩膜版还包括多个间隔设置的第二镂空区域，相邻的两个第二镂空区域间形成所述非镂空区域，所述阴极层还包括对应所述第二镂空区域形成的阴极。
进一步地，所述掩膜版还包括多个第三镂空区域，相邻的两个第二镂空区域通过至少一个第三镂空区域连通，所述阴极层还包括对应所述第三镂空区域形成的第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
进一步地，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述第二镂空区域对应所述柔性显示面板的一个像素单元设置，所述像素单元包括至少一个像素区域，所述阴极对应一个像素单元设置。
进一步地，所述“采用掩膜版形成柔性显示面板的阴极层”之后，所述制作方法还包括步骤：在所述阴极层上形成封装层，所述封装层填充所述第一镂空区域。
一种掩膜版，用于制作柔性显示面板的阴极层，所述掩膜版上形成透光区 域，所述透光区域用于形成所述阴极层的镂空区域。
进一步地，所述掩膜版包括多个间隔设置的遮挡区域，相邻的两个遮挡区域间形成所述透光区域，所述遮挡区域用于形成所述阴极层的阴极。
进一步地，所述掩膜版还包括多个第二连接桥，相邻的两个遮挡区域通过至少一个第二连接桥连接，所述第二连接桥用于形成所述阴极层的第二连接桥。
进一步地，包括采用掩膜版形成柔性显示面板的阴极层，所述掩膜版包括透光区域，所述阴极层包括对应所述透光区域形成的镂空区域。
进一步地，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述掩膜版还包括多个间隔设置的遮挡区域，相邻的两个遮挡区域间形成所述透光区域，所述阴极层还包括对应所述遮挡区域形成的阴极。
进一步地，所述掩膜版还包括多个第二连接桥，相邻的两个遮挡区域通过至少一个第二连接桥连接，所述阴极层还包括对应所述第二连接桥形成的第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
本发明提供的柔性显示面板及其制作方法、显示装置及掩膜版，由于阴极层形成第一镂空区域，在弯折柔性显示面板时，第一镂空区域能够有效释放柔性显示面板的应力，避免阴极层因弯折发生折断或脱离与其相邻的上下膜层。
附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明第一实施方式提供的显示装置的示意图。
图2为图1所示的显示装置的柔性显示面板的叠层结构示意图。
图3为图2所示的柔性显示面板的部分放大示意图。
图4为制作阴极层的掩膜版的示意图。
图5为本发明第二实施方式提供的显示装置的示意图。
图6为本发明第三实施方式提供的显示装置的示意图。
图7为本发明第四实施方式提供的显示装置的示意图。
图8为本发明第五实施方式提供的柔性显示面板的制作方法流程图。
图9为本发明第六实施方式提供的掩膜版的示意图。
图10为本发明第七实施方式提供的柔性显示面板的制作方法流程图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1，本发明第一实施方式提供一种显示装置100。显示装置100包括柔性显示面板10。显示装置100可以为平板电脑、笔记本电脑、电视机、导航仪等具显示功能的产品或部件。
柔性显示面板10包括阴极层18，阴极层18包括第一镂空区域180。由于阴极层18形成第一镂空区域180，在弯折柔性显示面板10时，第一镂空区域180能够有效释放柔性显示面板10的应力，避免阴极层18因弯折发生折断或脱离与其相邻的上下膜层。本实施方式中，阴极层18由金属制成。可以理解，阴极层18可以由其他导电材料制成，例如碳纳米管。
进一步地，阴极层18包括多个间隔设置且相互电性连接的阴极181。多个阴极181呈阵列排布。相邻的两个阴极181之间设第一镂空区域180从而间隔设置。柔性显示面板10可绕弯折轴线200弯折。阴极181大致呈矩形，阴极181的长边与弯折轴线200平行，从而减少弯折时对阴极181的冲击。
阴极层18还包括多个第一连接桥185。相邻的两个阴极181通过至少一个第一连接桥185实现电性导通。其中，第一连接桥185的第一端与一个阴极181连接，第一连接桥185的第二端与另一个阴极181连接。每个第一连接桥185位于两个第一镂空区域180之间。本实施方式中，阴极181与第一连接桥185同步形成，通过在有机发光层17上镀膜工艺形成阴极181与第一连接桥 185。本实施方式为采用精细掩膜版(Fine Mask)进行蒸镀形成图形化的阴极层18。由于阴极181与第一连接桥185同步形成，能够减少制程步骤，并避免造成柔性显示面板10在弯折过程或多次弯折后阴极181之间断路。在其他实施方式中，阴极181与第一连接桥185通过对同一导电层进行图形化形成。
在一实施方式中，相邻的两个阴极181之间设有一个第一镂空区域180。相邻的两个阴极181通过其它导电结构连接，例如，导线。
柔性显示面板10还包括多个像素单元101。多个像素单元101呈阵列排布。每个阴极181对应一个像素单元101设置。每个像素单元101包括三个像素区域102。像素区域102包括发光区103及与发光区域103连接设置的非发光区104。其中，三个像素区域102包括红像素区域、绿像素区域及蓝像素区域。本实施方式中，像素区域102呈长方形且发光面积大致相等，可以理解的是在其他实施方式中，每个像素区域102的形状可以根据实际发光需要做出相应的改变，例如圆形，或者平行四边形等不规则形状，还可以理解的是，每个像素区域102的面积也可以根据实际需要做出相应的改变，来满足不同的亮度需求，各个像素区域的发光面积可以相同也可以不相同。
本实施方式中，同个像素单元101中的三个像素区域102的排布方向与弯折轴线200平行。
在一具体实施例中，请参阅图2，柔性显示面板10还包括衬底11、多个薄膜晶体管13、阳极层15、像素定义层16、有机发光层17及封装层19。衬底11、薄膜晶体管13、阳极层15、像素定义层16、有机发光层17、阴极层18及封装层19依次层叠设置。阴极层18设于有机发光层17与封装层19之间。
请进一步参阅图3，封装层19包括填充部191。填充部191填充第一镂空区域180。填充部191的侧部与第一镂空区域180的侧壁紧密贴合于一起，填充部191朝向有机发光层17的底部与有机发光层17紧密贴合于一起，使得封装层19与有机发光层17通过第一镂空区域180相互咬合。由于阴极层18包覆于封装层19与有机发光层17之间，且封装层19和有机发光层17通过第一镂空区域180相互咬合于一起，从而增强了阴极层18与有机发光层17及封装层19之间的连接强度，减少弯折时造成阴极层18、有机发光层17及封装层 19的剥落。
本实施方式中，薄膜晶体管13为顶栅结构。薄膜晶体管13包括有源层131、栅极绝缘层132、栅极133及源漏极134。有源层131设于衬底11上。栅极绝缘层132设于有源层131远离衬底11的一侧。栅极133设于栅极绝缘层132远离有源层131一侧。源漏极134与有源层131接触。在一实施方式中，薄膜晶体管13可以设为底栅结构。
像素定义层16通常使用有机材料制成。像素定义层16定义出多个像素单元101。阴极181遮盖像素单元101。在每个像素区域102的发光区103中，包括有机发光层17、阴极181、阳极层15。有机发光层17位于阴极层18与阳极层15之间，用于产生预定颜色的光以实现显示。可换句话说，部分阴极层18、部分阳极层15、部分有机发光层17构成有机发光二极管。每个有机发光二极管对应一个薄膜晶体管130设置。薄膜晶体管130用于驱动有机发光二极管。
柔性显示面板10还包括缓冲层21、层间介电层23、钝化层25及平坦层27。缓冲层21设于有源层131与衬底11之间。层间介电层23设于栅极133和栅极绝缘层132上，源漏极134设于层间介电层23上，钝化层25设于层间介电层23及源漏极134上，平坦层27设于钝化层25上，阳极层15设于平坦层27上。
在制作柔性显示面板10的阴极层18时，请一并参阅图4，可采用掩膜版60在有机发光层17上制作图形化的部分阴极层18。掩膜版60包括第二镂空区域601、非镂空区域603及第三镂空区域605，相邻的第二镂空区域601通过第三镂空区域605连通。第二镂空区域601用于形成阴极层18的阴极181，非镂空区域603用于形成阴极层18的第一镂空区域180，第三镂空区域605用于形成阴极层18的第一连接桥185。本实施方式中，掩膜版60采用精细掩膜版(Fine mask)。可以理解，依据需要选择掩膜版60的图形及数量，以制作所需阴极层18的图形。在其他实施方式中，可通过一个掩膜版60实现制作图形化的阴极层18。
由于阴极层18形成第一镂空区域180，在弯折柔性显示面板10时，第一镂空区域180能够有效释放柔性显示面板10的应力，避免阴极层18因弯折发 生折断或脱离与其相邻的上下膜层，解决了传统阴极镀膜方法皆采取整面性镀膜方法中所得的阴极膜层不耐弯折的问题。
本实施方式的柔性显示面板10，通过精细掩膜版60采取多像素覆盖方法制成，由于阴极层18包括第一镂空区域180。在柔性显示面板10弯折时，第一镂空区域180能够让应力释放，且柔性显示面板10在阴极层18远离衬底11一侧设有封装层19，封装层19通过第一镂空区域180和有机发光层17相互咬合，从而将金属制成的阴极181包覆在内部，有利于减少柔性显示面板10在弯折时造成膜层剥落。
在其他实施方式中，不限定阴极层的两侧为有机发光层及封装层，例如平坦层或介电层等，所述柔性显示面板还包括分别位于阴极层相对两侧的第一层及第二层，所述第一层与所述第二层通过第一镂空区域直接接触。
请参阅图5，本发明第二实施方式提供的柔性显示装置30的结构大致与本发明第一实施方式提供的柔性显示装置100的结构相同，不同在于，每个阴极381对应一个像素单元301设置，每个像素单元301包括六个像素区域302。其中，六个像素区域302分为两组，每一组像素区域302包括红像素区域、绿像素区域及蓝像素区域，同个像素单元301的两组像素区域302沿第一方向排布，每组像素单元301的三个像素区域302沿与所述第一方向垂直的第二方向排布。
请参阅图6，本发明第三实施方式提供的柔性显示装置40的结构大致与本发明第一实施方式提供的柔性显示装置100的结构相同，不同在于，每个阴极481对应一个像素单元401设置，每个像素单元401包括九个像素区域402，多个像素单元401沿第一方向间隔排布，同个像素单元401中的九个像素区域402沿与所述第一方向垂直的第二方向(平行弯折轴线)排布，本实施方式中，同个像素单元401的九个像素区域402包括三个红像素区域、三个绿像素区域及三个蓝像素区域，九个像素区域402以R、G、B、R、G、B、R、G、B排列。多个阴极481沿第一方向间隔排布，阴极481沿所述第二方向(平行弯折轴线)延伸。
请参阅图7，本发明第四实施方式提供的柔性显示装置50的结构大致与本发明第一实施方式提供的柔性显示装置100的结构相同，每个阴极581对应 一个像素单元501设置，不同在于，像素单元501包括位于同一列(平行弯折轴线)的七个像素区域502。同个像素单元501中的七个像素区域702沿第一方向排布，多个像素单元501沿与所述第一方向垂直的第二方向排布。阴极581沿第二方向延伸，多个阴极581沿所述第一方向间隔排布。同一像素单元501内的颜色相同，相邻像素单元501内的颜色不同。
综上，每个阴极对应一个像素单元设置，所述像素单元包括至少一个像素区域。
请参阅图8，本发明第五实施方式还提供一种柔性显示面板的制作方法，包括以下步骤：
步骤801，在衬底上依次形成薄膜晶体管、阳极层、像素定义层及有机发光层。
步骤802，采用掩膜版在所述有机发光层上形成柔性显示面板的阴极层，所述掩膜版上形成非镂空区域，所述阴极层对应所述非镂空区域形成第一镂空区域。
步骤802中，即所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述掩膜版还包括多个间隔设置的第二镂空区域，相邻的两个第二镂空区域间形成所述非镂空区域，所述阴极层还包括对应所述第二镂空区域形成的阴极。
所述掩膜版还包括多个第三镂空区域，相邻的两个第二镂空区域通过至少一个第三镂空区域连通，所述阴极层还包括对应所述第三镂空区域形成的第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
步骤803，在所述阴极层上形成封装层，所述封装层填充所述第一镂空区域。
本实施方式中，采用掩膜版通过蒸镀工艺形成柔性显示面板的阴极层。
在一实施方式中，一种柔性显示面板的制作方法，包括采用掩膜版形成柔性显示面板的阴极层，所述掩膜版包括非镂空区域，所述阴极层包括对应所述非镂空区域形成的第一镂空区域。
请参阅图9，本发明第六实施方式还提供一种掩膜版70，用于制作柔性显示面板的阴极层。采用掩膜版70制作图形化的阴极层。掩膜版70包括遮挡区域701及透光区域703，相邻的遮挡区域701通过第二连接桥705连接。遮挡 区域701用于形成所述阴极层的阴极，透光区域703用于形成所述阴极层的第一镂空区域，第二连接桥705用于形成所述阴极层的第一连接桥。本实施方式中，采用掩膜版70通过光蚀刻工艺形成柔性显示面板的图形化阴极层。
请参阅图10，本发明第七实施方式还提供一种柔性显示面板的制作方法，包括以下步骤：
步骤901，在衬底上依次形成薄膜晶体管、阳极层、像素定义层及有机发光层。
步骤902，采用掩膜版在所述有机发光层上形成柔性显示面板的阴极层，所述掩膜版包括透光区域，所述阴极层包括对应所述透光区域形成的第一镂空区域。
所述掩膜版还包括多个间隔设置的遮挡区域，相邻的两个遮挡区域间形成所述透光区域，所述阴极层还包括对应所述遮挡区域形成的阴极。所述掩膜版还包括多个第二连接桥，相邻的两个遮挡区域通过至少一个第二连接桥连接，所述阴极层还包括对应所述第二连接桥形成第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
在步骤902中还包括：在所述有机发光层上涂覆导电层；采用所述掩膜版对所述导电层进行图形化同步形成多个间隔设置的遮挡区域，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
步骤903，在所述阴极层上形成封装层，所述封装层填充所述第一镂空区域。
本发明实施方式提供的柔性显示面板及其制作方法、显示装置及掩膜版，由于阴极层形成镂空区域，在弯折所述柔性显示面板时，镂空区域能够有效释放柔性显示面板的应力，避免阴极层因弯折发生折断或脱离与其相邻的上下膜层。
以上所述是本发明的优选实施例，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。

Claims (25)

  1. 一种柔性显示面板，其特征在于，包括阴极层，所述阴极层包括第一镂空区域。
  2. 如权利要求1所述的柔性显示面板，其特征在于，所述阴极层包括多个间隔设置且相互电连接的阴极，相邻的两个阴极之间形成所述第一镂空区域。
  3. 如权利要求2所述的柔性显示面板，其特征在于，所述阴极层还包括多个第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
  4. 如权利要求3所述的柔性显示面板，其特征在于，所述阴极与所述第一连接桥通过对同一导电层进行图形化形成。
  5. 如权利要求2所述的柔性显示面板，其特征在于，所述柔性显示面板还包括多个像素单元，每个阴极对应一个所述像素单元设置，所述像素单元包括至少一个像素区域。
  6. 如权利要求5所述的柔性显示面板，其特征在于，所述像素区域包括发光区及与所述发光区连接设置的非发光区。
  7. 如权利要求2所述的柔性显示面板，其特征在于，所述阴极的长边方向与柔性显示装置的弯折轴线平行。
  8. 如权利要求1所述的柔性显示面板，其特征在于，所述柔性显示面板还包括分别位于阴极层相对两侧的第一层及第二层，所述第一层与所述第二层通过第一镂空区域直接接触。
  9. 如权利要求8所述的柔性显示面板，其特征在于，所述第一层为有机发光层，所述第二层为封装层，所述阴极层设于所述封装层与所述有机发光层之间，所述封装层填充所述第一镂空区域。
  10. 如权利要求9所述的柔性显示面板，其特征在于，所述柔性显示面板还包括衬底、薄膜晶体管、阳极层及像素定义层，所述薄膜晶体管、所述阳极层、所述像素定义层、所述有机发光层及所述阴极层依次层叠设置于所述衬底上，所述薄膜晶体管与所述衬底相邻设置。
  11. 一种显示装置，其特征在于，所述显示装置包括如权利要求1-10项任意一项所述的柔性显示面板。
  12. 一种掩膜版，用于制作柔性显示面板的阴极层，其特征在于，所述掩膜版上形成非镂空区域，所述非镂空区域用于形成所述阴极层的第一镂空区域。
  13. 如权利要求12所述的掩膜版，其特征在于，所述掩膜版包括多个间隔设置的第二镂空区域，相邻的两个第二镂空区域间形成所述非镂空区域，所述第二镂空区域用于形成所述阴极层的阴极。
  14. 如权利要求13所述的掩膜版，其特征在于，所述掩膜版还包括多个第三镂空区域，相邻的两个第二镂空区域通过至少一个第三镂空区域连通，所述第三镂空区域用于形成所述阴极层的第一连接桥。
  15. 一种柔性显示面板的制作方法，其特征在于，包括采用掩膜版形成柔性显示面板的阴极层，所述掩膜版包括非镂空区域，所述阴极层包括对应所述非镂空区域形成的第一镂空区域。
  16. 如权利要求15所述的制作方法，其特征在于，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述掩膜版还包括多个间隔设置的第二镂空区域，相邻的两个第二镂空区域间形成所述非镂空区域，所述阴极层还包括对应所述第二镂空区域形成的阴极。
  17. 如权利要求16所述的制作方法，其特征在于，所述掩膜版还包括多个第三镂空区域，相邻的两个第二镂空区域通过至少一个第三镂空区域连通，所述阴极层还包括对应所述第三镂空区域形成的第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
  18. 如权利要求16所述的制作方法，其特征在于，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述第二镂空区域对应所述柔性显示面板的一个像素单元设置，所述像素单元包括至少一个像素区域，所述阴极对应一个像素单元设置。
  19. 如权利要求15所述的制作方法，其特征在于，所述“采用掩膜版形成柔性显示面板的阴极层”之后，所述制作方法还包括步骤：在所述阴极层上形成封装层，所述封装层填充所述第一镂空区域。
  20. 一种掩膜版，用于制作柔性显示面板的阴极层，其特征在于，所述掩膜版上形成透光区域，所述透光区域用于形成所述阴极层的镂空区域。
  21. 如权利要求20所述的掩膜版，其特征在于，所述掩膜版包括多个间隔设置的遮挡区域，相邻的两个遮挡区域间形成所述透光区域，所述遮挡区域用于形成所述阴极层的阴极。
  22. 如权利要求21所述的掩膜版，其特征在于，所述掩膜版还包括多个第二连接桥，相邻的两个遮挡区域通过至少一个第二连接桥连接，所述第二连接桥用于形成所述阴极层的第二连接桥。
  23. 一种柔性显示面板的制作方法，其特征在于，包括采用掩膜版形成柔性显示面板的阴极层，所述掩膜版包括透光区域，所述阴极层包括对应所述透光区域形成的镂空区域。
  24. 如权利要求23所述的制作方法，其特征在于，所述“采用掩膜版形成柔性显示面板的阴极层”还包括：所述掩膜版还包括多个间隔设置的遮挡区域，相邻的两个遮挡区域间形成所述透光区域，所述阴极层还包括对应所述遮挡区域形成的阴极。
  25. 如权利要求24所述的制作方法，其特征在于，所述掩膜版还包括多个第二连接桥，相邻的两个遮挡区域通过至少一个第二连接桥连接，所述阴极层还包括对应所述第二连接桥形成的第一连接桥，相邻的两个所述阴极通过至少一个所述第一连接桥实现电性导通。
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