WO2019179164A1 - 色散分光型滤光方法及装置 - Google Patents

色散分光型滤光方法及装置 Download PDF

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Publication number
WO2019179164A1
WO2019179164A1 PCT/CN2018/118284 CN2018118284W WO2019179164A1 WO 2019179164 A1 WO2019179164 A1 WO 2019179164A1 CN 2018118284 W CN2018118284 W CN 2018118284W WO 2019179164 A1 WO2019179164 A1 WO 2019179164A1
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Prior art keywords
light
parallel light
incident
wavelength
dispersion
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PCT/CN2018/118284
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English (en)
French (fr)
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冯旭东
赵振英
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谱诉光电科技（苏州）有限公司
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Publication of WO2019179164A1 publication Critical patent/WO2019179164A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths

Definitions

  • the present invention relates to the field of optical technologies, and in particular, to a dispersion spectroscopic filtering method and apparatus.
  • Filters are the primary optics used to select the desired radiation band (the desired wavelength range), that is, to select (retain) the desired band, and to filter out (remove) interference or unwanted bands.
  • the current filters are mainly divided into two categories: material absorption type and thin film interference type.
  • the material absorption filter is mainly doped with a certain proportion of metal oxides in various glass (solid light transmissive substrates), and the light absorption characteristics of the doping materials are used to physically absorb the light of the corresponding wavelength band, and the remaining bands of light are left. Then pass through the filter.
  • the lower limit cutoff wavelength of the absorption filter with the smallest lower limit of the ultraviolet transmission wavelength in the world can be about 230 nm, that is, the short-wave ultraviolet light below 230 nm is all opaque. Since the available doping materials almost all absorb light of short-wave ultraviolet (UVC, wavelength of about 280-190 nm) and below, the transmission band of the material absorption filter is difficult to achieve 230 nm or less.
  • the thin film interference filter is formed by alternately coating a plurality of interference films on a solid transparent substrate, and the interference of the thin film allows light in some specific wavelength ranges to pass through the filter, and light in other bands is reflected off. Thereby selective filtering processing is achieved.
  • both the reflected and the transmitted light need to pass through different layers multiple times to generate the optical path difference (phase difference), since the available film materials are almost all
  • the short-wave ultraviolet and the following bands of light have a certain degree of absorption, so the light that strikes the interference filter in the short-wave ultraviolet and the following bands has three different directions, namely: transmission, reflection, and absorption by the film layer.
  • both transmitted and reflected light can be utilized in different ways (eg as a dichroic filter), but the portion of the absorbed light is lost.
  • very few interference filters can reflect or transmit light in the range of 210 nm or less.
  • the main reason why the lower limit of the UV pass band cannot be maintained is that after the interference filter treatment, the shorter wavelength light can neither be reflected nor transmitted, but is completely absorbed by the film material.
  • an object of the present invention is to provide a dispersion spectroscopic filtering method and apparatus for achieving wavelength gating in short-wave ultraviolet and lower wavelength bands, thereby improving the service life of related optical components.
  • an embodiment of the present invention provides a chromatic dispersion type filtering method, where the method includes:
  • the opposite-direction monochromatic parallel light includes a plurality of monochromatic parallel lights having a propagation direction corresponding to a wavelength
  • the filtered divergent light is collimated and reversely dispersed to obtain a filtered composite parallel light.
  • the embodiment of the present invention provides a first possible implementation manner of the first aspect, wherein, before the dispersing and splitting the incident parallel light to obtain the opposite direction, the method further includes:
  • the method further includes:
  • the filtered composite parallel light is focused to obtain a filtered and concentrated condensed light.
  • the embodiment of the present invention further provides a dispersion spectroscopic filtering device, which comprises, in order of the propagation direction of the light, an incident optical interface, a first dispersive element, a first focusing mirror, a wavelength gating component, and a second quasi Straight mirror, second dispersive element and exit optical interface;
  • the incident parallel light incident from the incident optical interface is converted into anisotropic monochromatic parallel light by dispersive splitting of the first dispersive element, and the metachromatic monochromatic parallel light includes a plurality of monochromatic colors whose propagation direction corresponds to the wavelength Parallel light; the monochromatic parallel light of different wavelengths is focused by the first focusing mirror and injected into different positions of the wavelength gating element, and spatially filtered by the wavelength gating element to reach the first
  • the two collimating mirrors are again collimated by the second collimating mirror and inversely dispersed by the second dispersing element, and become composite parallel light emitted from the exit optical interface.
  • a first collimating mirror is further disposed between the incident optical interface and the first dispersive element,
  • a second focusing mirror is further disposed between the exit optical interface and the second dispersive element;
  • Incident light is incident from the incident optical interface, and is collimated by the first collimating mirror to become the incident parallel light; the composite parallel light is focused by the second focusing mirror and concentrated to the exiting optics In the interface, and exiting from the exit optical interface.
  • the embodiment of the present invention provides a second possible implementation manner of the second aspect, wherein the first dispersive element and the second dispersive element are two discrete components or
  • the first focusing mirror and the second collimating mirror are two discrete components or the same component; the first collimating mirror and the second focusing mirror are two discrete components or the same component.
  • the embodiment of the present invention provides a third possible implementation manner of the second aspect, the first dispersing element and the second dispersing element being the same element;
  • the first focusing mirror and the second collimating mirror are the same element;
  • the first collimating mirror and the second focusing mirror are two discrete components arranged one above another.
  • the embodiment of the present invention provides a fourth possible implementation manner of the second aspect, wherein the dispersive splitting optical path and the inverse dispersive combining optical path of the dispersive optical splitting filter device are both A cross-type Cheney-Turner CT structure is used or both adopt an M-type CT structure.
  • the embodiment of the present invention provides a fifth possible implementation of the second aspect, the first dispersive element and the second The dispersive elements each include any of the following: a reflective grating, a transmissive grating, and a prism.
  • the embodiment of the present invention provides a sixth possible implementation of the second aspect, the wavelength gating element comprising a windowed reflection Gating component
  • the fenestration type reflective gating element comprises a glass substrate and a specular reflection layer; the specular reflection layer is disposed on an upper surface of the glass substrate, and the specular reflection layer is provided with a light leakage window.
  • the embodiment of the present invention provides a seventh possible implementation of the second aspect, the wavelength gating element comprising an occlusion type reflective selection Passing component
  • the occlusion-type reflective gating element includes a glass substrate, a specular reflection layer, and a shielding unit; the specular reflection layer is disposed on an upper surface of the glass substrate, and the shielding unit is disposed on the specular reflection layer.
  • the embodiment of the present invention provides the eighth possible implementation manner of the second aspect, the glass substrate has a smooth concave surface; the occlusion type reflective gating element further A hollow bead upper frame for pressing and consolidating the shielding unit is matched to the circumference of the smooth inner concave surface, and the hollow bead upper frame is fixed on the glass substrate.
  • the embodiment of the present invention provides a ninth possible implementation manner of the second aspect, wherein the wavelength gating element comprises an occlusion type transmission option Passing component
  • the occlusion type transmissive gating element includes a hollow bottom frame and a shielding unit; the shielding unit is disposed on an upper surface of the hollow bottom frame, and a portion of the hollow bottom frame that is not covered by the shielding unit forms a light transmitting region .
  • the embodiment of the present invention provides a tenth possible implementation manner of the second aspect, wherein the hollow bottom frame is a concave shape; the occlusion type transmissive gating element further And comprising a hollow bead upper frame for pressing and consolidating the shielding unit, and the hollow beading upper frame is fixed on the hollow bottom frame, which is matched with the inner concave shape of the hollow bottom frame.
  • the dispersion spectroscopic filtering device includes, in order along the propagation direction of the light, an incident optical interface, a first dispersive element, a first focusing mirror, a wavelength gating element, a second collimating mirror, and a second dispersion.
  • the incident parallel light incident from the incident optical interface is converted into anisotropic monochromatic parallel light by dispersion dispersion of the first dispersive element, and the opposite-direction monochromatic parallel light includes a plurality of singles corresponding to the propagation direction and the wavelength Color parallel light; monochromatic parallel light of different wavelengths is focused by the first focusing mirror and then injected into different positions of the wavelength gating element, spatially filtered by the wavelength gating element, and then passed to the second collimating mirror, and then passed through the first The two collimating mirror collimation and the second dispersive element are combined in opposite directions, and the composite parallel light is emitted from the exit optical interface.
  • the dispersion spectroscopic filtering method and device converts the difference in wavelengths of the incident light into a spatial position by dispersion dispersion of the dispersive element, thereby realizing spatial filtering processing by the wavelength gating element. And collimating by the second collimating mirror and the second dispersing element are inversely dispersed, so that the outgoing light and the incident light after the filtering process are consistent in spatial form. Since there is no material penetration absorption process for the optical band to be retained, the passband band can be extended to the short-wave ultraviolet and below bands, while increasing the lifetime of the associated optical components.
  • FIG. 1 is a schematic diagram of a basic structure of a dispersion spectroscopic filter device according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram of a basic structure of another dispersion spectroscopy filter device according to an embodiment of the present invention
  • FIG. 3 is a schematic structural diagram of a window-opening concave reflective gating component according to an embodiment of the present invention.
  • FIG. 4 is a schematic structural diagram of a window-type planar reflection gating component according to an embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of a occlusion-type concave reflective gating component according to an embodiment of the present invention
  • FIG. 6 is a schematic structural diagram of an occlusion type planar reflection gating component according to an embodiment of the present invention.
  • FIG. 7 is a schematic structural diagram of a shielding type concave surface transmissive gating component according to an embodiment of the present invention.
  • FIG. 8 is a schematic structural diagram of a occlusion type planar transmission strobe element according to an embodiment of the present invention.
  • 10 is an energy transmission efficiency curve of an ultraviolet short-wave band stop-band spectroscopic filter device according to an embodiment of the present invention
  • FIG. 11 is a schematic cross-sectional view of a C-T structure of a dispersion beam splitting filter device according to an embodiment of the present invention.
  • FIG. 12 is a schematic diagram of an M-type C-T structure of a dispersion spectroscopic filter device according to an embodiment of the present invention.
  • FIG. 13 is a schematic flow chart of a chromatic dispersion type filtering method according to an embodiment of the present invention.
  • both material absorption type and thin film interference type filters are difficult to effectively retain short-wavelength ultraviolet light below 210 nm, and these absorbed light energy cannot be released due to long-term accumulation on the light-absorbing material, which causes chemical degradation of the light-absorbing material. , affecting the life of the filter.
  • a dispersion spectroscopic filtering method and device provided by the embodiments of the present invention can effectively solve the technical problem that the effective short-wave passband limit of the existing filter optical device in the ultraviolet region is difficult to be 210 nm or less, and does not exist. Chemical degradation of the major optical components affects the life of the device.
  • Embodiment 1 is a diagrammatic representation of Embodiment 1:
  • FIG. 1 is a schematic diagram of a basic structure of a dispersion spectroscopic filter device according to an embodiment of the present invention.
  • the filter device includes an incident optical interface 101 and a first dispersion in sequence along a direction of propagation of light.
  • the incident parallel light incident from the incident optical interface 101 is dispersed by the first dispersive element 102 into anisotropic monochromatic parallel light, and the opposite-directional monochromatic parallel light includes a plurality of monochromatic parallel lights having a propagation direction corresponding to the wavelength;
  • the monochromatic parallel light of different wavelengths is focused by the first focusing mirror 103 and then incident on different positions of the wavelength gating element 104, spatially filtered by the wavelength gating element 104, and then passed to the second collimating mirror 105, and then passed through the first
  • the two collimating mirrors 105 are collimated and the second dispersive element 106 is inversely dispersively combined, and the composite collimated light is emitted from the exit optical interface 107.
  • the embodiment shown in Fig. 1 is based on the principle of forward dispersion splitting-space position wavelength gating-inverse dispersion combining, and the specific filtering process is as follows: incident from the incident optical interface 101.
  • the parallel light 11 is irradiated onto the first dispersing element 102, and is dispersed by the first dispersing element 102 to become anisotropic monochromatic parallel light (light of different wavelengths is directed in different directions), that is, forward dispersive light 12 (as shown in the figure)
  • forward dispersive light 12 as shown in the figure
  • the collimation process After the collimation process, it becomes the opposite direction monochromatic parallel light again, that is, the outgoing metachromatic parallel light 14; the outgoing indirection Monochrome parallel light 14 illuminates the second On the dispersive element 106, after the second dispersive element 106 is inversely dispersed/combined, it becomes the composite parallel light 15 in the same direction; the composite parallel light 15 is finally emitted from the exit optical interface 107.
  • the dispersion spectroscopic filter device converts the difference in wavelength in the incident light into a spatial position by dispersion dispersion of the dispersive element, thereby realizing spatial filtering processing through the wavelength gating element, and passing
  • the second collimating mirror collimation and the second dispersive element are combined in opposite directions, so that the filtered light and the incident light are consistent in spatial form. Since there is no material penetration absorption process for the optical band to be retained, the pass band can be extended to the short-wave ultraviolet and below bands, and there is no problem that the service life of the device is affected by the chemical denaturation of the main optical element, thereby improving the related optical element. The service life.
  • FIG. 2 is a schematic diagram of a basic structure of another dispersion spectroscopic filter device according to an embodiment of the present invention. It is considered that incident light incident from the incident optical interface 101 is generally not parallel light, as shown in FIG. 2, in FIG. In addition, a first collimating mirror 201 is disposed between the incident optical interface 101 and the first dispersive element 102, and a second focusing mirror 202 is further disposed between the exit optical interface 107 and the second dispersive element 106.
  • the incident light 10 enters the dispersion spectroscopic filter device from the incident optical interface 101, is collimated via the first collimating mirror 201, and becomes incident parallel light 11; from the second dispersive element 106.
  • the emitted composite parallel light 15 is focused by the second focusing mirror 202 and concentrated in the exit optical interface 107, and is emitted outside the dispersion spectroscopic filter device via the exit optical interface 107.
  • the first components of the first collimating mirror 201, the first focusing mirror 103, the second collimating mirror 105, and the second focusing mirror 202 may be concave mirrors or convex lenses (including single-sided lenses and lenticular lenses). ).
  • the advantage of the concave mirror is that the light absorption in the short-wave ultraviolet and infrared bands is minimal because the light does not need to pass through the device material;
  • the advantage of the convex lens is that the coma of the optical system (filter device) can be controlled very small.
  • the above four elements are preferably concave mirrors; in the visible and near-infrared bands, the above four elements can be arbitrarily selected from the concave mirror and the convex lens (including a combination of a concave mirror and a convex lens).
  • the first focusing mirror 103 and the second collimating mirror 105 may be two discrete components, or may be the same component; the first collimating mirror 201 and the second focusing mirror 202 may be two discrete components, or may be the same element.
  • Each of the first dispersive element 102 and the second dispersive element 106 may be any one of a reflective grating (including a planar reflective grating and a concave reflective grating), a transmissive grating, and a prism.
  • the advantage of the reflective grating is that the light absorption in the short-wave ultraviolet and infrared bands is minimal due to the fact that the light does not need to pass through the device material. Therefore, in the ultraviolet and infrared bands, the first dispersive element 102 and the second dispersive element 106 are preferably reflective gratings; in the visible and near-infrared bands, the first dispersive element 102 and the second dispersive element 106 can be arbitrarily selected among the three.
  • the first dispersive element 102 and the second dispersive element 106 may be two discrete elements, or may be the same element.
  • the wavelength gating element 104 is a windowed or reflective or transmissive optical element provided with a shielding unit, including any of the following: a windowed reflective gating element, an occlusion type reflective gating element, and an occlusion type transmissive gating element.
  • Each type of wavelength gating element 104 also includes both curved and planar surface structures, and thus the wavelength gating element 104 can specifically include any of the following: a windowed concave reflective gating element, a windowed planar reflection Gating components, occlusion-type concave reflective gating components, occlusion-type planar reflective gating components, occlusion-type concave transmissive gating components, and occlusion planar transmissive gating components.
  • FIG. 8 sequentially show a window-type concave reflective gate element, a window-type planar reflection gate element, a shielding type concave reflection gate element, an occlusion type planar reflection gate element, and an occlusion provided by an embodiment of the present invention.
  • the fenestration concave reflective gating element comprises a glass substrate 301 having a smooth concave surface, a specular reflection layer 302 plated on a smooth concave surface, and a precision light leakage window cut on the specular reflection layer 302. 303 composition.
  • the curvature of the concave surface depends on the spatial position distribution of the monochromatic light convergence point, and the number, width, and position of the light leakage window 303 depend on the optical band to be filtered.
  • the fenestration planar reflective gate element comprises a planar glass substrate 401 having a smooth upper surface, a specularly reflective layer 402 plated on a smooth upper surface, and precision light leakage on the specularly reflective layer 402.
  • Window 403 is composed.
  • the number, width, and position of the light leakage window 403 depend on the wavelength band of light to be filtered out.
  • the corresponding band gating principle is the same as the windowed concave reflecting gating element of FIG. 3, and details are not described herein again.
  • the occlusion type concave reflecting gating element comprises a glass substrate 501 having a smooth concave surface, a specular reflection layer 502 plated on a smooth concave surface, and a black precision strip adhered to the specular reflection layer 502
  • the shielding unit (ie, the shielding strip) 503 is not limited to the shape, and is composed of a hollow beading upper frame 504 complementary to the periphery of the smooth concave surface for pressing and reinforcing the strip shielding unit 503.
  • the strip shielding unit 503 is a black metal foil having a thickness of 0.02-0.3 mm by laser cutting or wire cutting precision processing (preferably but not limited to blackening)
  • the stainless steel sheet is processed.
  • the number, width and position of the shielding strips depend on the light band to be filtered. Different shielding strips are connected together by side strips at both ends to form a light shielding sheet; the hollow crimping upper frame 504 can be made of metal. After the material is processed, the surface is blackened or directly processed from black plastic.
  • the material and processing method of the hollow crimping upper frame 504 are not limited.
  • the light shielding sheet may be bonded to the specular reflection layer 502 by bonding, and the hollow crimping upper frame 504 is firmly adhered to the glass substrate 501 and pressed against the periphery of the light shielding sheet to reduce the bending.
  • the rebound stress protects the adhesion of the shielding unit 503.
  • the occlusion type planar reflection gating element comprises a planar glass substrate 601 having a smooth upper surface, a specular reflection layer 602 plated on the smooth upper surface, and a black precision strip adhered to the specular reflection layer 602.
  • the occlusion unit (ie, the occlusion strip) 603 is composed.
  • the manufacturing method of the precision strip shielding unit 603 is the same as that of the shielding unit 503 in the shielding type concave reflecting gating element of FIG. 5.
  • the number, width and position of the shielding strip depend on the wavelength band to be filtered, and the light shielding sheet is also bonded.
  • the manner is adhered to the specular reflection layer 602. Since there is no surface deformation, there is no need for a hollow crimping upper frame.
  • the corresponding band gating principle is the same as the occlusion type concave reflection gating element of FIG. 5, and details are not described herein again.
  • the occlusion type concave transmission transmissive element is composed of a black hollow bottom frame 701 having a concave surface type, and a black precision strip-shaped shielding unit (ie, a shielding strip) 703 attached to the concave surface of the hollow bottom frame 701.
  • a black precision strip-shaped shielding unit ie, a shielding strip
  • a hollow beading upper frame 704 complementary to the concave shape of the hollow bottom frame 701 for pressing and consolidating the strip shielding unit 703, and 702 is a vacant light transmitting area of the light shielding sheet formed by the shielding unit 703.
  • the black hollow bottom frame 701 can be processed by a metal material and then blackened, or directly processed from a hard black plastic.
  • the material and processing method of the black hollow bottom frame 701 are not limited; the concave surface The magnitude of the curvature depends on the spatial position distribution of the monochromatic light convergence point; the processing method and process of the strip-shaped shielding unit 703 and the hollow crimping upper frame 704 are the same as those of the occlusion-type concave reflecting strobing element of FIG. 5, and are not described herein again.
  • the shielding type planar transmission gate element is composed of a flat black hollow bottom frame 801 and a black precision strip-shaped shielding unit (ie, a shielding strip) 803 which is flatly attached to the upper surface of the hollow bottom frame 801, and 802 is an occlusion.
  • the unit 803 is connected to the vacant light-transmissive area of the light shielding sheet.
  • the flat black hollow bottom frame 801 can be processed by a metal material and then the surface is blackened, or directly processed from a hard black plastic.
  • the material and processing method of the hollow bottom frame 801 are not limited;
  • the shielding unit 803 is fabricated in the same manner as the blocking unit 503 in the occlusion-type concave reflecting gating element of FIG. 5.
  • the number, width, and position of the shielding strips depend on the optical band to be filtered. Since there is no surface deformation, there is no need for a hollow crimping upper frame.
  • the corresponding band gating principle is the same as the occlusion type concave surface transmissive element of FIG. 7, and will not be described again here.
  • the above six wavelength gating components can be divided into two types: curved surface (concave surface type) and flat type. Since the convergence points of the monochromatic light in different directions after being focused by the first focusing mirror 103 are not in the same plane, the convergence point of the central wavelength light is far from the first focusing mirror 103, and the convergence point of the wavelength light at both ends is away from the first focusing.
  • the mirror 103 is close, so when the total range of the passband band is wide, the distance difference between the wavelength convergence point of the two ends and the convergence point of the central wavelength light from the first focusing mirror 103 exceeds the convergence point of the central wavelength light from the first focusing mirror 103.
  • the curved type wavelength gating element is preferred; when the distance difference is less than 1% of the distance of the central wavelength light converging point from the first focusing mirror 103, both are optional (where the planar type has cost) Advantage).
  • the above six wavelength gating components can be divided into two types: specular reflection type and vacant penetration type, and which type is determined by the overall optical path structure.
  • the above four kinds of reflective wavelength gating components can be divided into two types: window light leakage type and occlusion absorption type, and the effects are the same regardless of the priority order.
  • FIG. 9 is an energy transmission efficiency curve of an ultraviolet short-wave passband dispersion spectroscopic filter device according to an embodiment of the present invention
  • FIG. 10 is an energy diagram of an ultraviolet short-waveband band dispersion spectroscopic filter device according to an embodiment of the present invention.
  • Transmission efficiency curve It can be clearly seen from FIG. 9 and FIG. 10 that the effective passband lower limit of the dispersion spectroscopic filter device provided by the embodiment of the present invention can reach 175 nm, the limit value is close to 165 nm (the transmission efficiency is close to zero), and the ultraviolet light at 190 nm is obtained.
  • the transmission (retention) efficiency of light can reach more than 50%.
  • the embodiments of the present invention can effectively solve the technical problem that the effective short-wave passband limit of the existing filter optical device is difficult to be 210 nm or less in the ultraviolet region, and there is no problem that the chemical distortion of the main optical component affects the service life of the device.
  • the embodiment of the present invention adopts a novel filtering method of “dispersion splitting” ⁇ “spatial position band strobing filtering” ⁇ “inverse dispersion combining beam”, which belongs to spatial filtering processing technology, and its filtering principle and The method differs from conventional material absorption and thin film interference filters.
  • the dispersive element is used for pre-dispersion pre-processing of the multi-wavelength composite light, and the difference of the wavelength in the incident light is converted into the spatial position, which lays a foundation for the spatial position band gating.
  • the spatial wavelength gating component is set, and the light in the stop band band is filtered by using window leakage or strip occlusion, and the light in the pass band (required reserved band) does not pass through the window leakage unit.
  • a strip-shaped shielding unit so that there is no material penetration absorption for the optical band to be retained, and is suitable for all wavelength bands of ultraviolet, visible, near-infrared, and infrared, so that the passband band of the embodiment of the present invention can be extended to the conventional material absorption type.
  • the width, the position and the number of the light leakage window and the shielding strip in the wavelength gating element of the embodiment of the present invention can be arbitrarily set by precision machining, so that the same filter device of the embodiment of the present invention can simultaneously filter out a plurality of discontinuous stop band bands. That is, non-continuous multi-band filtering is achieved.
  • the chromatic dispersion element is used to perform inverse dispersion merging treatment on the tuned retained optical band, and the different wavelengths of light are remixed together after the inverse dispersion beam processing to make the outgoing light and the incident light
  • the spatial form is consistent.
  • Embodiment 2 is a diagrammatic representation of Embodiment 1:
  • the present embodiment provides a C-T (Czerny-Turner) optical path structure of the dispersion spectroscopic filter device.
  • the first dispersing element 102 and the second dispersing element 106 are the same element;
  • the first focusing mirror 103 and the second collimating mirror 105 are the same element;
  • the first collimating mirror 201 and the second focusing mirror 202 are up and down Two discrete components stacked.
  • FIG. 11 is a schematic structural diagram of a cross-type CT of a dispersion spectroscopic filter device according to an embodiment of the present invention.
  • the CT structure is mainly composed of an incident optical interface 1101, a forward collimating concave mirror 1102, a forward spectroscopic grating 1103, a forward focal lens 1104, a reflective wavelength gating element 1105, and a reverse collimating mirror 1106.
  • the reverse beam combining grating 1107, the reverse focusing concave mirror 1108, the exit optical interface 1109 and the like are composed of components.
  • the forward beam splitting grating 1103 and the inverse beam combining grating 1107 are the same grating element, and the forward focal lens 1104 and the reverse collimating mirror 1106 are the same concave mirror.
  • the filtering device of the cross-type CT structure has the following beneficial effects: 1.
  • the cross-type CT structure is used for forward dispersion splitting and reverse dispersion combining, and no slit slitting processing is required for splitting; 2.
  • Forward collimation The concave mirror 1102 and the reverse focusing concave mirror 1108 are stacked on top of each other in the same vertical position; 3.
  • the component is used in multiple functions, and a grating is used to complete the functions of forward dispersion and reverse dispersion.
  • the concave mirror completes the functions of forward dispersion light focusing and reverse gate light collimation; 4.
  • the cross-type CT structure has compact structure, high space utilization and small volume.
  • Embodiment 3 is a diagrammatic representation of Embodiment 3
  • the present embodiment further provides a C-T optical path structure of another dispersion spectroscopic filter device.
  • the first dispersing element 102 and the second dispersing element 106 are the same element in the CT optical path structure; the first focusing mirror 103 and the second collimating mirror 105 are the same component; the first collimating mirror 201 and the The two focusing mirrors 202 are two discrete components that are stacked one on top of the other.
  • FIG. 12 is a schematic structural diagram of an M-type CT of a dispersion-spectroscopic filter device according to an embodiment of the present invention.
  • the dispersion-dispersion optical path and the inverse-dispersion beam path of the dispersion-dispersion type filter device are both M.
  • the CT structure is mainly composed of an incident optical interface 1201, a forward collimating concave mirror 1202, a forward spectroscopic grating 1203, a forward focal lens 1204, a reflective wavelength gating element 1205, and a reverse collimating mirror 1206.
  • the reverse beam combining grating 1207, the reverse focusing concave mirror 1208, the exit optical interface 1209 and the like are composed of components.
  • the forward splitting grating 1203 and the reverse combining grating 1207 share the same grating element, and the forward focal lens 1204 and the reverse collimating mirror 1206 share the same concave mirror.
  • the filtering device of the M-type CT structure has the following beneficial effects: 1.
  • the M-type CT structure is used for the forward dispersion splitting and the reverse dispersion combining, and the cross-CT structure of the second embodiment is the same, and the splitting is not required to be narrow. Slit light limiting processing; 2.
  • the forward collimating concave mirror 1202 and the reverse focusing concave mirror 1208 are stacked on top of each other in the same vertical position; 3. and the second embodiment
  • the cross-CT structure is the same, the components are multi-functional, and a grating is used to complete the functions of forward dispersion and reverse dispersion, and a concave mirror is used to complete the forward dispersion and the reverse strobe.
  • the filter device of the structure has a small spherical aberration, so that the spot size of the emitted light is small (the energy of the emitted light is more concentrated), such as the spot of the emitted light when the spot diameter of the incident light is 1 mm
  • the diameter can be made 1.6mm; 5.
  • the filter device of the structure has lower requirements on the off-axis and is convenient for processing.
  • Embodiment 4 is a diagrammatic representation of Embodiment 4:
  • FIG. 13 is a schematic flowchart diagram of a chromatic dispersion type filtering method according to an embodiment of the present invention. As shown in FIG. 13, the method includes:
  • step S1302 the incident parallel light is subjected to dispersion splitting to obtain an isotropic monochromatic parallel light; and the opposite-directional monochromatic parallel light includes a plurality of kinds of monochromatic parallel light whose propagation direction corresponds to the wavelength.
  • step S1304 the monochromatic parallel lights of different wavelengths are focused to different positions, and spatial type filtering is performed.
  • step S1306 the filtered divergent light is collimated and reversely dispersed, and the filtered composite parallel light is obtained.
  • the method further comprises: collimating the incident light to obtain incident parallel light; and After the filtered divergent light is collimated and reversely dispersed to obtain the filtered composite parallel light, the method further comprises: focusing the filtered composite parallel light to obtain a filtered emission convergence. Light.
  • the chromatic dispersion type filtering method provided by the embodiment of the present invention has the same technical features as the dispersion spectroscopy type filter device provided in the above embodiments, so that the same technical problem can be solved and the same technical effect can be achieved.
  • the terms “installation”, “connected”, and “connected” are to be understood broadly, and may be a fixed connection or a detachable connection, unless otherwise explicitly defined and defined. , or connected integrally; may be mechanical connection or electrical connection; may be directly connected, or may be indirectly connected through an intermediate medium, and may be internal communication between the two elements.
  • installation may be a fixed connection or a detachable connection, unless otherwise explicitly defined and defined.
  • connected integrally may be mechanical connection or electrical connection; may be directly connected, or may be indirectly connected through an intermediate medium, and may be internal communication between the two elements.
  • the specific meaning of the above terms in the present invention can be understood in a specific case by those skilled in the art.

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Abstract

一种色散分光型滤光方法及装置，涉及光学技术领域，该装置在沿光的传播方向依次包括：入射光学接口（101）、第一色散元件（102）、第一聚焦镜（103）、波长选通元件（104）、第二准直镜（105）、第二色散元件（106）和出射光学接口（107）；从入射光学接口（101）射入的平行光经第一色散元件（102）分光后变成异向单色平行光；不同波长的单色平行光经由第一聚焦镜（103）聚焦后射入到波长选通元件（104）的不同位置，经由波长选通元件（104）空间滤光后对出射发散光进行准直和反向色散合束，最终变成复合平行光从出射光学接口（107）射出。色散分光型滤光方法及装置实现了空间型滤光处理，对要保留的光波段不存在材料穿透吸收过程，因此通带波段可以延伸到短波紫外及以下波段，同时提高了相关光学元件的使用寿命。

Description

色散分光型滤光方法及装置 技术领域
本发明涉及光学技术领域，尤其是涉及一种色散分光型滤光方法及装置。
背景技术
滤光片是用来选取所需辐射波段(所需波长范围)的主要光学器件，即选取(保留)所需的波段、滤除(去掉)干扰或无益波段。从原理上来看，当前滤光片主要分为材料吸收型和薄膜干涉型两大类。
材料吸收型滤光片主要是在各种玻璃(固态透光基质)中掺杂一定比例的金属氧化物，利用掺杂材料的吸光特性对相应波段的光进行物理吸收截留下来，其余波段的光则透过滤光片。目前国际上紫外透射波长下限值最小的吸收型滤光片的下限截止波长能做到约230nm，即低于230nm的短波紫外光全都无法透过。由于可利用的掺杂材料几乎都对短波紫外(UVC，波长约为280-190nm)及以下波段的光有着一定程度的吸收，故而材料吸收型滤光片的透射波段难以做到230nm以下。
薄膜干涉型滤光片是在固态透光基材上交替镀上多层干涉薄膜，利用薄膜干涉效应使得一些特定波长范围内的光可以透过滤光片，另一些波段的光被反射掉，从而实现选择性滤光处理。薄膜干涉型滤光片对光进行处理的过程中，无论是反射还是透射光线均需多次穿过不同的膜层以此产生光程差(相位差)，由于可利用的薄膜材料几乎都对短波紫外及以下波段的光有着一定程度的吸收，故而在短波紫外及以下波段中照射到干涉型滤光片上的光有三种不同的去向，即：透过、反射和被膜层吸收。对于干涉型滤光片，透射光和反射光均可以以不同的方式加以利用(如用作二向分光滤光片)，但被吸收的那一部分光则被损失掉。在短波紫外及以下波段，由于膜层材料的吸收缘故，极少有干涉型滤光片能将反射或是透射光波段范围做到210nm以下。紫外通带下限做不下去的主要原因是经过干涉型滤光片处理以后，更短波长的光既不能被反射也不能被透过，而是全部被膜层材料吸收掉。
综上，由于掺杂材料和膜层材料对短波紫外及以下波段光的吸收，现有的材料吸收型和薄膜干涉型滤光片均难以对210nm以下的短波紫外光进行有效保留处理，另外这些被吸收掉的光能由于长期在吸光材料上积聚无法释放，会进一步导致吸光材料发生化学变性，进而影响滤光片的使用寿命。
发明内容
有鉴于此，本发明的目的在于提供一种色散分光型滤光方法及装置，以实现短波紫外及以下波段的波长选通，提高相关光学元件的使用寿命。
第一方面，本发明实施例提供了一种色散分光型滤光方法，所述方法包括：
对入射平行光进行色散分光，得到异向单色平行光；所述异向单色平行光包括传播方向与波长对应的多种单色平行光；
将不同波长的所述单色平行光聚焦到不同位置，并进行空间型滤光；
对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光。
结合第一方面，本发明实施例提供了第一方面的第一种可能的实施方式，其中，所述对入射平行光进行色散分光，得到异向单色平行光之前，所述方法还包括：
对入射光进行准直，得到所述入射平行光；
所述对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光之后，所述方法还包括：
对所述滤光后的复合平行光进行聚焦，得到滤光后的出射会聚光。
第二方面，本发明实施例还提供一种色散分光型滤光装置，沿着光的传播方向依次包括：入射光学接口、第一色散元件、第一聚焦镜、波长选通元件、第二准直镜、第二色散元件和出射光学接口；
从所述入射光学接口射入的入射平行光，经由所述第一色散元件色散分光变成异向单色平行光，所述异向单色平行光包括传播方向与波长对应的多种单色平行光；不同波长的所述单色平行光经由所述第一聚焦镜聚焦后射入到所述波长选通元件的不同位置，经由所述波长选通元件空间型滤光后到达所述第二准直镜，再先后经由所述第二准直镜准直和所述第二色散元件反向色散合束，变成复合平行光从所述出射光学接口射出。
结合第二方面，本发明实施例提供了第二方面的第一种可能的实施方式，在所述入射光学接口和所述第一色散元件之间还设置有第一准直镜，在所述出射光学接口和所述第二色散元件之间还设置有第二聚焦镜；
入射光从所述入射光学接口射入，经由所述第一准直镜准直后变成所述入射平行光；所述复合平行光经由所述第二聚焦镜聚焦后汇聚到所述出射光学接口中，并从所述出射光学接口射出。
结合第二方面的第一种可能的实施方式，本发明实施例提供了第二方面的第二种可能的实施方式，所述第一色散元件和所述第二色散元件为两个分立元件或同一元件；所述第一聚焦镜和所述第二准直镜为两个分立元件或同一元件；所述第一准直镜和所述第二聚焦镜为两个分立元件或同一元件。
结合第二方面的第二种可能的实施方式，本发明实施例提供了第二方面的第三种可能的实施方式，所述第一色散元件和所述第二色散元件为同一元件；所述第一聚焦镜和所述第二准直镜为同一元件；所述第一准直镜和所述第二聚焦镜为上下堆叠设置的两个分立元件。
结合第二方面的第三种可能的实施方式，本发明实施例提供了第二方面的第四种可能的实施方式，所述色散分光型滤光装置的色散分光光路和反色散合束光路均采用交叉式切尼-特纳C-T结构或者均采用M型C-T结构。
结合第二方面及其第一种和第二种中任一可能的实施方式，本发明实施例提供了第二方面的第五种可能的实施方式，所述第一色散元件和所述第二色散元件均包括以下任一种：反射型光栅、 透射型光栅和棱镜。
结合第二方面及其第一种至第四种中任一可能的实施方式，本发明实施例提供了第二方面的第六种可能的实施方式，所述波长选通元件包括开窗型反射选通元件；
所述开窗型反射选通元件包括玻璃基材和镜面反射层；所述镜面反射层设置在所述玻璃基材的上表面，所述镜面反射层上开设有漏光窗口。
结合第二方面及其第一种至第四种中任一可能的实施方式，本发明实施例提供了第二方面的第七种可能的实施方式，所述波长选通元件包括遮挡型反射选通元件；
所述遮挡型反射选通元件包括玻璃基材、镜面反射层和遮挡单元；所述镜面反射层设置在所述玻璃基材的上表面，所述遮挡单元设置在所述镜面反射层上。
结合第二方面的第七种可能的实施方式，本发明实施例提供了第二方面的第八种可能的实施方式，所述玻璃基材具有光滑内凹面；所述遮挡型反射选通元件还包括与所述光滑内凹面四周相匹配的用于压合巩固所述遮挡单元的中空压边上框，所述中空压边上框固定在所述玻璃基材上。
结合第二方面及其第一种至第四种中任一可能的实施方式，本发明实施例提供了第二方面的第九种可能的实施方式，所述波长选通元件包括遮挡型透射选通元件；
所述遮挡型透射选通元件包括中空底框和遮挡单元；所述遮挡单元设置在所述中空底框的上表面，所述中空底框上未被所述遮挡单元覆盖的部分形成透光区域。
结合第二方面的第九种可能的实施方式，本发明实施例提供了第二方面的第十种可能的实施方式，所述中空底框为内凹面型；所述遮挡型透射选通元件还包括与所述中空底框的内凹面型四周相匹配的用于压合巩固所述遮挡单元的中空压边上框，所述中空压边上框固定在所述中空底框上。
本发明实施例带来了以下有益效果：
本发明实施例中，色散分光型滤光装置在沿着光的传播方向依次包括：入射光学接口、第一色散元件、第一聚焦镜、波长选通元件、第二准直镜、第二色散元件和出射光学接口；从入射光学接口射入的入射平行光，经由第一色散元件色散分光变成异向单色平行光，该异向单色平行光包括传播方向与波长对应的多种单色平行光；不同波长的单色平行光经由第一聚焦镜聚焦后射入到波长选通元件的不同位置，经由波长选通元件空间型滤光后到达第二准直镜，再先后经由第二准直镜准直和第二色散元件反向色散合束，变成复合平行光从出射光学接口射出。本发明实施例提供的色散分光型滤光方法及装置，通过色散元件的色散分光，将入射光中波长的不同转换为空间位置的不同，从而通过波长选通元件实现了空间型滤光处理，并通过第二准直镜准直和第二色散元件反向色散合束，使得滤光处理后的出射光和入射光在空间形态上保持一致。由于对于要保留的光波段不存在材料穿透吸收过程，因此通带波段可以延伸到短波紫外及以下波段，同时提高了相关光学元件的使用寿命。
本发明的其他特征和优点将在随后的说明书中阐述，并且，部分地从说明书中变得显而易见， 或者通过实施本发明而了解。本发明的目的和其他优点在说明书、权利要求书以及附图中所特别指出的结构来实现和获得。
为使本发明的上述目的、特征和优点能更明显易懂，下文特举较佳实施例，并配合所附附图，作详细说明如下。
附图说明
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明实施例提供的一种色散分光型滤光装置的基本结构示意图；
图2为本发明实施例提供的另一种色散分光型滤光装置的基本结构示意图；
图3为本发明实施例提供的一种开窗型凹面反射选通元件的结构示意图；
图4为本发明实施例提供的一种开窗型平面反射选通元件的结构示意图；
图5为本发明实施例提供的一种遮挡型凹面反射选通元件的结构示意图；
图6为本发明实施例提供的一种遮挡型平面反射选通元件的结构示意图；
图7为本发明实施例提供的一种遮挡型凹面透射选通元件的结构示意图；
图8为本发明实施例提供的一种遮挡型平面透射选通元件的结构示意图；
图9为本发明实施例提供的一种紫外短波通带色散分光型滤光装置的能量传输效率曲线；
图10为本发明实施例提供的一种紫外短波阻带色散分光型滤光装置的能量传输效率曲线；
图11为本发明实施例提供的一种色散分光型滤光装置的交叉式C-T结构示意图；
图12为本发明实施例提供的一种色散分光型滤光装置的M型C-T结构示意图；
图13为本发明实施例提供的一种色散分光型滤光方法的流程示意图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合附图对本发明的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
目前材料吸收型和薄膜干涉型滤光片均难以对210nm以下的短波紫外光进行有效保留处理，且这些被吸收掉的光能由于长期在吸光材料上积聚无法释放，会导致吸光材料发生化学变性，影响滤光片的使用寿命。基于此，本发明实施例提供的一种色散分光型滤光方法及装置，可以有效地解决现有滤光光学器件在紫外区有效短波通带下限难以做到210nm以下的技术难题，同时不存在因主要光学元件化学变性影响器件使用寿命的问题。
为便于对本实施例进行理解，首先对本发明实施例所公开的一种色散分光型滤光装置进行详 细介绍。
实施例一：
图1为本发明实施例提供的一种色散分光型滤光装置的基本结构示意图，如图1所示，该滤光装置在沿着光的传播方向依次包括：入射光学接口101、第一色散元件102、第一聚焦镜103、波长选通元件104、第二准直镜105、第二色散元件106和出射光学接口107。从入射光学接口101射入的入射平行光，经由第一色散元件102色散分光变成异向单色平行光，该异向单色平行光包括传播方向与波长对应的多种单色平行光；不同波长的单色平行光经由第一聚焦镜103聚焦后射入到波长选通元件104的不同位置，经由波长选通元件104空间型滤光后到达第二准直镜105，再先后经由第二准直镜105准直和第二色散元件106反向色散合束，变成复合平行光从出射光学接口107射出。
图1所示的实施例是基于正向色散分光-空间位置波长选通-反向色散合束原理进行色散分光型滤光的，具体的滤光过程如下：从入射光学接口101射入的入射平行光11照射到第一色散元件102上，经由第一色散元件102色散分光后变成异向单色平行光(不同波长的光射向不同的方向)，即正向色散光12(如图1所示，分别以实线、虚线和短横线示出了三种波长的色散光)；正向色散光12照射到第一聚焦镜103上，正向色散光12中不同波长的单色平行光经第一聚焦镜103聚焦之后汇聚成不同的点光13投射到波长选通元件104表面不同的位置上；波长选通元件104上相应的位置设有遮挡单元或开窗单元，需要滤除的光波段被遮挡或遗漏过滤掉，余下波段的光到达第二准直镜105，经过准直处理之后再次成为异向单色平行光，即出射异向单色平行光14；出射异向单色平行光14照射到第二色散元件106上，经第二色散元件106反色散/合束之后变成同一方向的复合平行光15；复合平行光15最终从出射光学接口107射出。
本发明实施例提供的色散分光型滤光装置，通过色散元件的色散分光，将入射光中波长的不同转换为空间位置的不同，从而通过波长选通元件实现了空间型滤光处理，并通过第二准直镜准直和第二色散元件反向色散合束，使得滤光处理后的出射光和入射光在空间形态上保持一致。由于对于要保留的光波段不存在材料穿透吸收过程，因此通带波段可以延伸到短波紫外及以下波段，同时不存在因主要光学元件化学变性影响器件使用寿命的问题，因而提高了相关光学元件的使用寿命。
图2为本发明实施例提供的另一种色散分光型滤光装置的基本结构示意图，考虑到从入射光学接口101射入的入射光通常不是平行光，如图2所示，在图1的基础上，在入射光学接口101和第一色散元件102之间还设置有第一准直镜201，在出射光学接口107和第二色散元件106之间还设置有第二聚焦镜202。
具体地，如图2所示，入射光10从入射光学接口101进入该色散分光型滤光装置内，经由第一准直镜201准直后变成入射平行光11；从第二色散元件106射出的复合平行光15经由第二聚焦镜202聚焦后汇聚到出射光学接口107中，经由出射光学接口107射出该色散分光型滤光装 置之外。部分未描述的滤光过程可参考前述图1的滤光过程，这里不再赘述。
上述第一准直镜201、第一聚焦镜103、第二准直镜105和第二聚焦镜202四个元件，既可以是凹面反射镜，也可以是凸透镜(包括单面透镜和双面凸透镜)。其中，凹面反射镜的优势是：因光线无需穿越器件材料，在短波紫外和红外波段材料吸收的影响极小；凸透镜的优势是：光学系统(滤光装置)的慧差可以控制得很小。因此，在紫外和红外波段，上述四个元件优选凹面反射镜；在可见和近红外波段，上述四个元件可以在凹面反射镜和凸透镜中任意选用(其中，包括凹面反射镜和凸透镜混合使用)。另外，第一聚焦镜103和第二准直镜105可以为两个分立元件，也可以为同一元件；第一准直镜201和第二聚焦镜202可以为两个分立元件，也可以为同一元件。
上述第一色散元件102和第二色散元件106均可以是反射型光栅(包括平面反射光栅和凹面反射光栅)、透射型光栅和棱镜中的任意一种。其中，反射型光栅的优势是：因光线无需穿越器件材料，在短波紫外和红外波段材料吸收的影响极小。因此，在紫外和红外波段，第一色散元件102和第二色散元件106优选反射型光栅；在可见和近红外波段，第一色散元件102和第二色散元件106可以在三者中任意选用。另外，第一色散元件102和第二色散元件106可以为两个分立元件，也可以为同一元件。
上述波长选通元件104为开窗或设有遮挡单元的反射或穿透光学元件，包括以下中的任一种：开窗型反射选通元件、遮挡型反射选通元件和遮挡型透射选通元件。每种类型的波长选通元件104还包括曲面和平面两种面型结构，因此波长选通元件104可以具体包括以下中的任一种：开窗型凹面反射选通元件、开窗型平面反射选通元件、遮挡型凹面反射选通元件、遮挡型平面反射选通元件、遮挡型凹面透射选通元件和遮挡型平面透射选通元件。图3至图8依次示出了本发明实施例提供的开窗型凹面反射选通元件、开窗型平面反射选通元件、遮挡型凹面反射选通元件、遮挡型平面反射选通元件、遮挡型凹面透射选通元件、遮挡型平面透射选通元件的结构示意图。
如图3所示，开窗型凹面反射选通元件由一具有光滑内凹面的玻璃基材301、镀在光滑内凹面上的镜面反射层302、以及在镜面反射层302上开凿的精密漏光窗口303组成。内凹面的曲率大小取决于单色光汇聚点的空间位置分布，漏光窗口303的数量、宽度、位置取决于要滤除的光波段。当不同波长的光被第一聚焦镜103汇聚成不同位置的点投射到开窗型凹面反射选通元件的内凹反光面上时，落到漏光窗口303处的光进入玻璃材质被吸收或射出系统之外，相应波段的光被过滤掉；其余的光被镜面反射到第二准直镜105，最终到达出射光学接口107，即需要滤除波段的光通过漏光窗被过滤掉，余下的光被镜面反射之后保留下来，从而实现波长选通。
如图4所示，开窗型平面反射选通元件由一具有光滑上表面的平面玻璃基片401、镀在光滑上表面上的镜面反射层402、以及在镜面反射层402上开凿的精密漏光窗口403组成。漏光窗口403的数量、宽度、位置取决于要滤除的光波段。对应的波段选通原理与图3的开窗型凹面反射选通元件相同，这里不再赘述。
如图5所示，遮挡型凹面反射选通元件由一具有光滑内凹面的玻璃基材501、镀在光滑内凹 面上的镜面反射层502、粘贴在镜面反射层502上的黑色精密条状(不限于该形状)的遮挡单元(即遮挡条)503、以及与光滑内凹面四周互补用于压合巩固条状遮挡单元503的中空压边上框504组成。内凹面的曲率大小取决于单色光汇聚点的空间位置分布；条状遮挡单元503为采用激光切割或线切割精密加工技术在0.02-0.3mm厚的黑色金属薄片(优选但不限于发黑后的不锈钢薄片)上加工而成，遮挡条的数量、宽度、位置取决于要滤除的光波段，不同的遮挡条通过两端的边带连接在一起形成遮光片；中空压边上框504可由金属材料加工后表面经过发黑处理而成，亦可直接由黑色塑料加工而成，这里对中空压边上框504的材质和加工方式不做限定。遮光片可以但不限于采用粘合的方式粘贴在镜面反射层502上，中空压边上框504与玻璃基材501紧固地粘和在一起，且压住遮光片的四周以减少弯曲之后的反弹应力，对遮挡单元503的粘和起到保护作用。当不同波长的光被第一聚焦镜103汇聚成不同位置的点投射到内凹反光面上时，落到遮挡单元503上的光被遮挡吸收，相应波段的光被过滤掉；其余的光被镜面反射到第二准直镜105，最终到达出射光学接口107，即需要滤除波段的光被遮挡单元503遮挡过滤掉，余下的光被镜面反射之后保留下来，从而实现波长选通。
如图6所示，遮挡型平面反射选通元件由一具有光滑上表面的平面玻璃基片601、镀在光滑上表面上的镜面反射层602、以及粘贴在镜面反射层602上的黑色精密条状遮挡单元(即遮挡条)603组成。精密条状遮挡单元603的制作方法与图5的遮挡型凹面反射选通元件中的遮挡单元503相同，遮挡条的数量、宽度、位置取决于要滤除的光波段，遮光片亦采用粘合的方式粘贴在镜面反射层602上。由于没有曲面形变，故无需中空压边上框。对应的波段选通原理与图5的遮挡型凹面反射选通元件相同，这里不再赘述。
如图7所示，遮挡型凹面透射选通元件由一具有内凹面型的黑色中空底框701、卡贴在中空底框701内凹面型上的黑色精密条状遮挡单元(即遮挡条)703、以及与中空底框701四周内凹面型互补用于压合巩固条状遮挡单元703的中空压边上框704组成，702为遮挡单元703连成的遮光片的空缺透光区域。黑色中空底框701可采用金属材料加工制作之后表面经过发黑处理而成，亦可直接由硬质黑色塑料加工而成，这里对黑色中空底框701的材质和加工方式不做限定；内凹面的曲率大小取决于单色光汇聚点的空间位置分布；条状遮挡单元703和中空压边上框704的加工方式和工艺与图5的遮挡型凹面反射选通元件相同，这里不再赘述。当不同波长的光被第一聚焦镜103汇聚成不同位置的点投射到内凹面上时，落到遮挡单元703上的光被遮挡吸收，相应波段的光被过滤掉；其余的光则穿过空缺透光区域702照射到第二准直镜105，最终到达出射光学接口107，即需要滤除波段的光被遮挡单元703遮挡过滤掉，余下的光则可自由通过被保留下来，从而实现波长选通。
如图8所示，遮挡型平面透射选通元件由一平面黑色中空底框801以及平贴在中空底框801上平面上的黑色精密条状遮挡单元(即遮挡条)803组成，802为遮挡单元803连成的遮光片的空缺透光区域。平面黑色中空底框801可由金属材料加工制作之后表面经过发黑处理而成，亦可直 接由硬质黑色塑料加工而成，这里对中空底框801的材质和加工方式不做限定；精密条状遮挡单元803的制作方法与图5的遮挡型凹面反射选通元件中的遮挡单元503相同，遮挡条的数量、宽度、位置取决于要滤除的光波段。由于没有曲面形变，故无需中空压边上框。对应的波段选通原理与图7的遮挡型凹面透射选通元件相同，这里不再赘述。
从面型结构上来看，上述六种波长选通元件可以分为曲面(凹面)型和平面型两大类。由于不同方向的单色光经第一聚焦镜103聚焦之后的汇聚点并非在同一个平面上，中心波长光的汇聚点离第一聚焦镜103远，两端波长光的汇聚点离第一聚焦镜103近，因此当通带波段的总范围较宽，导致两端波长光汇聚点和中心波长光汇聚点离第一聚焦镜103的距离差超过中心波长光汇聚点离第一聚焦镜103的距离的1％时，优先选用曲面型波长选通元件；当该距离差小于中心波长光汇聚点离第一聚焦镜103的距离的1％时，二者皆可选用(其中，平面型具有成本优势)。
从通带波段光的收集方式上来看，上述六种波长选通元件可以分为镜面反射型和空位穿透型两大类，具体采用哪一类由整体光路结构决定。
从阻带波段光的滤除方式上来看，上述四种反射型波长选通元件可以分为开窗漏光型和遮挡吸收型两大类，二者效果相同不分优先顺序。
图9为本发明实施例提供的一种紫外短波通带色散分光型滤光装置的能量传输效率曲线，图10为本发明实施例提供的一种紫外短波阻带色散分光型滤光装置的能量传输效率曲线。从图9和图10中可以明显的看出，本发明实施例提供的色散分光型滤光装置的有效通带下限可达175nm，极限值接近165nm(透过效率接近零)，对190nm处紫外光的传输(保留)效率可达50％以上。因此本发明实施例可以有效地解决现有滤光光学器件在紫外区有效短波通带下限难以做到210nm以下的技术难题，同时不存在主要光学元件化学变性影响器件使用寿命的问题。
综上，本发明实施例采用了“色散分光”→“空间位置波段选通滤光”→“反色散合束”这一新型滤光方法，属于空间型滤光处理技术，其滤光原理和方法有别于传统的材料吸收型和薄膜干涉型滤光片。
本发明实施例采用了色散元件对多波长的复合光进行了色散分光预处理，将入射光中波长的不同转换为空间位置的不同，为空间位置波段选通奠定了基础。
本发明实施例设置了空间波长选通元件，利用开窗漏光或条状遮挡的方式对阻带波段的光进行滤除处理，通带波段(需要保留的波段)的光不经过开窗漏光单元或条状遮挡单元，因而对于要保留的光波段不存在材料穿透吸收，适用于紫外、可见、近红外、红外所有的波段，使得本发明实施例的通带波段可以延伸到传统材料吸收型和薄膜干涉型滤光片因材料吸收而不能到达的短波紫外及以下波段。
本发明实施例的波长选通元件中漏光窗口和遮挡条的宽窄、位置和数量可以通过精密加工随意设置，使得本发明实施例的同一滤光装置可以同时滤除多个非连续阻带波段，即实现了非连续多波段滤光。
本发明实施例采用色散元件对选通后的保留光波段进行了反向色散合束处理，经反色散合束处理之后不同波长的光重新混合在一起成为一个整体，使得出射光和入射光在空间形态上保持一致。
实施例二：
基于上述实施例一中图2所示的基本结构，本实施例提供了一种色散分光型滤光装置的C-T(Czerny-Turner，切尼-特纳)光路结构。该C-T光路结构中第一色散元件102和第二色散元件106为同一元件；第一聚焦镜103和第二准直镜105为同一元件；第一准直镜201和第二聚焦镜202为上下堆叠设置的两个分立元件。
图11为本发明实施例提供的一种色散分光型滤光装置的交叉式C-T结构示意图，如图11所示，该色散分光型滤光装置的色散分光光路和反色散合束光路均采用交叉式C-T结构，该滤光装置主要由入射光学接口1101、正向准直凹面反射镜1102、正向分光光栅1103、正向焦镜1104、反射型波长选通元件1105、反向准直镜1106、反向合束光栅1107、反向聚焦凹面反射镜1108、出射光学接口1109等部件组成。其中，正向分光光栅1103和反向合束光栅1107为同一光栅元件，正向焦镜1104和反向准直镜1106为同一凹面反射镜。
这种交叉式C-T结构的滤光装置具有以下有益效果：1、采用交叉式C-T结构来进行正向色散分光和反向色散合束，分光时无需狭缝限光处理；2、正向准直凹面反射镜1102和反向聚焦凹面反射镜1108在同一垂直位置分层上下叠加放置；3、元件多功能利用，采用一片光栅来完成正向色散分光和反向色散合束两项功能，采用一片凹面反射镜来完成正向色散光聚焦和反向选通光准直两项功能；4、交叉式C-T结构的结构紧凑、空间利用率高，体积更小。
实施例三：
基于上述实施例一中图2所示的基本结构，本实施例还提供了另一种色散分光型滤光装置的C-T光路结构。同上述实施例二，该C-T光路结构中第一色散元件102和第二色散元件106为同一元件；第一聚焦镜103和第二准直镜105为同一元件；第一准直镜201和第二聚焦镜202为上下堆叠设置的两个分立元件。
图12为本发明实施例提供的一种色散分光型滤光装置的M型C-T结构示意图，如图12所示，该色散分光型滤光装置的色散分光光路和反色散合束光路均采用M型C-T结构，该滤光装置主要由入射光学接口1201、正向准直凹面反射镜1202、正向分光光栅1203、正向焦镜1204、反射型波长选通元件1205、反向准直镜1206、反向合束光栅1207、反向聚焦凹面反射镜1208、出射光学接口1209等部件组成。其中，正向分光光栅1203和反向合束光栅1207共用同一光栅元件，正向焦镜1204和反向准直镜1206共用同一凹面反射镜。
这种M型C-T结构的滤光装置具有以下有益效果：1、采用M型C-T结构来进行正向色散分光和反向色散合束，与实施例二的交叉式C-T结构一样，分光时无需狭缝限光处理；2、与实施例二的交叉式C-T结构一样，正向准直凹面反射镜1202和反向聚焦凹面反射镜1208在同一垂直 位置分层上下叠加放置；3、与实施例二的交叉式C-T结构一样，元件多功能利用，采用一片光栅来完成正向色散分光和反向色散合束两项功能，采用一片凹面反射镜来完成正向色散光聚焦和反向选通光准直两项功能；4、该结构的滤光装置的球差较小，使得出射光的光斑尺寸较小(出射光的能量更集中)，如入射光的光斑直径为1mm时，出射光的光斑直径可做到1.6mm；5、该结构的滤光装置对离轴度的要求较低，便于加工制作。
实施例四：
图13为本发明实施例提供的一种色散分光型滤光方法的流程示意图，如图13所示，该方法包括：
步骤S1302，对入射平行光进行色散分光，得到异向单色平行光；该异向单色平行光包括传播方向与波长对应的多种单色平行光。
步骤S1304，将不同波长的单色平行光聚焦到不同位置，并进行空间型滤光。
步骤S1306，对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光。
进一步地，考虑到入射光通常不是平行光，在对入射平行光进行色散分光，得到异向单色平行光之前，上述方法还包括：对入射光进行准直，得到入射平行光；以及在对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光之后，上述方法还包括：对滤光后的复合平行光进行聚焦，得到滤光后的出射会聚光。
本发明实施例提供的色散分光型滤光方法，与上述实施例提供的色散分光型滤光装置具有相同的技术特征，所以也能解决相同的技术问题，达到相同的技术效果。
所属领域的技术人员可以清楚地了解到，为描述的方便和简洁，上述描述的色散分光型滤光方法的具体工作过程，可以参考前述色散分光型滤光装置实施例中的对应过程，在此不再赘述。
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。
另外，在本发明实施例的描述中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。
在本发明的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。
最后应说明的是：以上所述实施例，仅为本发明的具体实施方式，用以说明本发明的技术方 案，而非对其限制，本发明的保护范围并不局限于此，尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，其依然可以对前述实施例所记载的技术方案进行修改或可轻易想到变化，或者对其中部分技术特征进行等同替换；而这些修改、变化或者替换，并不使相应技术方案的本质脱离本发明实施例技术方案的精神和范围，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应所述以权利要求的保护范围为准。

Claims (13)

  1. 一种色散分光型滤光方法，其特征在于，所述方法包括：
    对入射平行光进行色散分光，得到异向单色平行光；所述异向单色平行光包括传播方向与波长对应的多种单色平行光；
    将不同波长的所述单色平行光聚焦到不同位置，并进行空间型滤光；
    对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光。
  2. 根据权利要求1所述的方法，其特征在于，所述对入射平行光进行色散分光，得到异向单色平行光之前，所述方法还包括：
    对入射光进行准直，得到所述入射平行光；
    所述对滤光后的出射发散光进行准直和反向色散合束，得到滤光后的复合平行光之后，所述方法还包括：
    对所述滤光后的复合平行光进行聚焦，得到滤光后的出射会聚光。
  3. 一种色散分光型滤光装置，其特征在于，沿着光的传播方向依次包括：入射光学接口、第一色散元件、第一聚焦镜、波长选通元件、第二准直镜、第二色散元件和出射光学接口；
    从所述入射光学接口射入的入射平行光，经由所述第一色散元件色散分光变成异向单色平行光，所述异向单色平行光包括传播方向与波长对应的多种单色平行光；不同波长的所述单色平行光经由所述第一聚焦镜聚焦后射入到所述波长选通元件的不同位置，经由所述波长选通元件空间型滤光后到达所述第二准直镜，再先后经由所述第二准直镜准直和所述第二色散元件反向色散合束，变成复合平行光从所述出射光学接口射出。
  4. 根据权利要求3所述的装置，其特征在于，在所述入射光学接口和所述第一色散元件之间还设置有第一准直镜，在所述出射光学接口和所述第二色散元件之间还设置有第二聚焦镜；
    入射光从所述入射光学接口射入，经由所述第一准直镜准直后变成所述入射平行光；所述复合平行光经由所述第二聚焦镜聚焦后汇聚到所述出射光学接口中，并从所述出射光学接口射出。
  5. 根据权利要求4所述的装置，其特征在于，所述第一色散元件和所述第二色散元件为两个分立元件或同一元件；所述第一聚焦镜和所述第二准直镜为两个分立元件或同一元件；所述第一准直镜和所述第二聚焦镜为两个分立元件或同一元件。
  6. 根据权利要求5所述的装置，其特征在于，所述第一色散元件和所述第二色散元件为同一元件；所述第一聚焦镜和所述第二准直镜为同一元件；所述第一准直镜和所述第二聚焦镜为上下堆叠设置的两个分立元件。
  7. 根据权利要求6所述的装置，其特征在于，所述色散分光型滤光装置的色散分光光路和反色散合束光路均采用交叉式切尼-特纳C-T结构或者均采用M型C-T结构。
  8. 根据权利要求3-5中任一项所述的装置，其特征在于，所述第一色散元件和所述第二色散元件均包括以下任一种：反射型光栅、透射型光栅和棱镜。
  9. 根据权利要求3-7中任一项所述的装置，其特征在于，所述波长选通元件包括开窗型反射选通元件；
    所述开窗型反射选通元件包括玻璃基材和镜面反射层；所述镜面反射层设置在所述玻璃基材的上表面，所述镜面反射层上开设有漏光窗口。
  10. 根据权利要求3-7中任一项所述的装置，其特征在于，所述波长选通元件包括遮挡型反射选通元件；
    所述遮挡型反射选通元件包括玻璃基材、镜面反射层和遮挡单元；所述镜面反射层设置在所述玻璃基材的上表面，所述遮挡单元设置在所述镜面反射层上。
  11. 根据权利要求10所述的装置，其特征在于，所述玻璃基材具有光滑内凹面；所述遮挡型反射选通元件还包括与所述光滑内凹面四周相匹配的用于压合巩固所述遮挡单元的中空压边上框，所述中空压边上框固定在所述玻璃基材上。
  12. 根据权利要求3-7中任一项所述的装置，其特征在于，所述波长选通元件包括遮挡型透射选通元件；
    所述遮挡型透射选通元件包括中空底框和遮挡单元；所述遮挡单元设置 在所述中空底框的上表面，所述中空底框上未被所述遮挡单元覆盖的部分形成透光区域。
  13. 根据权利要求12所述的装置，其特征在于，所述中空底框为内凹面型；所述遮挡型透射选通元件还包括与所述中空底框的内凹面型四周相匹配的用于压合巩固所述遮挡单元的中空压边上框，所述中空压边上框固定在所述中空底框上。
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