WO2019163706A1 - Liquid agent application device - Google Patents

Liquid agent application device Download PDF

Info

Publication number
WO2019163706A1
WO2019163706A1 PCT/JP2019/005825 JP2019005825W WO2019163706A1 WO 2019163706 A1 WO2019163706 A1 WO 2019163706A1 JP 2019005825 W JP2019005825 W JP 2019005825W WO 2019163706 A1 WO2019163706 A1 WO 2019163706A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure chamber
chamber plate
excitation
diaphragm
liquid agent
Prior art date
Application number
PCT/JP2019/005825
Other languages
French (fr)
Japanese (ja)
Inventor
賢司 前田
中谷　政次
Original Assignee
日本電産株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Publication of WO2019163706A1 publication Critical patent/WO2019163706A1/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work

Definitions

  • the present invention relates to a liquid agent coating apparatus.
  • Piezoelectric elements that convert energy from electrical energy to mechanical energy by the piezoelectric effect have excellent responsiveness, so they can be used in liquid application devices that apply liquids to the surface of objects in a wide range of fields such as semiconductors, printing, and chemicals. Is done. *
  • Patent Document 1 and Patent Document 2 a method of providing a displacement enlarging mechanism for increasing the displacement amount of the piezoelectric element (see Patent Document 1 and Patent Document 2) and a method of providing a heating device for reducing the viscosity of the liquid (Patent Document 3 and Patent Document) 4) has been proposed.
  • This invention is made
  • a liquid agent application device includes a liquid agent storage unit, a diaphragm, a pressurization drive unit, and an excitation drive unit.
  • the liquid agent storage unit includes a pressure chamber plate in which a pressure chamber for storing the liquid agent is formed, and a nozzle in which a discharge port connected to the pressure chamber is formed.
  • a diaphragm changes the volume in a liquid agent storage part.
  • the pressurizing drive unit is disposed in a housing space between the diaphragm and the pressure chamber plate or between the nozzle and the pressure chamber plate.
  • the vibration drive unit is disposed on the diaphragm or the nozzle.
  • the pressurizing drive unit includes a pressurizing piezoelectric element that pressurizes and oscillates the diaphragm in response to application of the pressurizing voltage signal.
  • the excitation drive unit includes an excitation piezoelectric element that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal.
  • FIG. 1 is a schematic diagram showing the configuration of the liquid agent coating apparatus according to the first embodiment.
  • FIG. 2 is a projection view of the liquid agent coating apparatus according to the first embodiment.
  • FIG. 3 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 1 of the first embodiment.
  • FIG. 4 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 2 of the first embodiment.
  • FIG. 5 is a schematic diagram showing a configuration of a liquid agent coating apparatus according to the second embodiment.
  • FIG. 6 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 1 of the second embodiment.
  • FIG. 7 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 2 of the second embodiment.
  • connection means a state in which two members are fixed or coupled to each other. Thus, when two members are connected, they always work together.
  • Contact means a state where two members are in direct contact with each other, but the two members are not fixed or connected to each other. When two members are in contact, there can be a time when they operate together and a time when they do not work together.
  • parallel is a concept including not only the case of being physically parallel but also the case of being substantially parallel.
  • substantially parallel refers to a case where it is inclined within a range of 15 ° or less.
  • vertical is a concept that includes not only the case of being physically vertical but also the case of being substantially vertical.
  • substantially vertical refers to a case where it is inclined within a range of 15 ° or less.
  • FIG. 1 is a schematic diagram showing a configuration of a liquid agent application device 10 according to the first embodiment. *
  • the liquid agent application device 10 includes a liquid agent storage unit 11, a diaphragm 12, a pressurization drive unit 13, a fixing member 14, an excitation drive unit 15, a seal 16, and a control unit 17.
  • the liquid agent storage unit 11, the diaphragm 12, the pressurization drive unit 13, the fixing member 14, and the vibration drive unit 15 constitute a head 18.
  • Liquid agent storage part 11 The liquid agent storage part 11 has the pressure chamber plate 11a and the nozzle 11b. *
  • the pressure chamber plate 11a is formed in a hollow shape.
  • the pressure chamber plate 11a is formed in a cylindrical shape, but is not limited thereto.
  • the pressure chamber plate 11a can be made of, for example, an alloy material, a ceramic material, a synthetic resin material, or the like. *
  • a recess 11g is formed on the diaphragm side surface 11s of the pressure chamber plate 11a.
  • the recess 11g constitutes an accommodation space in which the excitation drive unit 15 is disposed.
  • the accommodation space in the recess 11g is formed between the diaphragm 12 and the pressure chamber plate 11a.
  • the accommodation space in the recess 11g is closed by an outer edge portion of the diaphragm 12 connected to the pressure chamber plate 11a.
  • the housing space in the recess 11g is preferably liquid-tight and air-tight. *
  • a pressure chamber 11c is formed inside the pressure chamber plate 11a.
  • a liquid agent is stored in the pressure chamber 11c.
  • the liquid agent include, but are not limited to, a solder, a thermosetting resin, ink, and a coating liquid for forming a functional thin film (alignment film, resist, color filter, organic electroluminescence, etc.).
  • a liquid supply path 11d and a liquid discharge path 11e are formed in the pressure chamber plate 11a.
  • the liquid supply path 11d and the liquid discharge path 11e are each connected to the pressure chamber 11c.
  • the liquid agent is supplied to the pressure chamber 11c via the liquid agent supply path 11d. Excess liquid in the pressure chamber 11c is discharged to the outside from the liquid discharge path 11e as necessary.
  • the nozzle 11b is formed in a plate shape.
  • the nozzle 11b is disposed so as to close one end opening of the pressure chamber 11c.
  • a discharge port 11f is formed in the nozzle 11b.
  • the discharge port 11f continues to the pressure chamber 11c.
  • the liquid agent in the pressure chamber 11c is discharged to the outside from the discharge port 11f.
  • Diaphragm 12 The diaphragm 12 is formed in a plate shape or a film shape. The diaphragm 12 is disposed so as to close the other end opening of the pressure chamber 11c. The diaphragm 12 vibrates elastically when a pressurizing vibration is applied from the pressurizing drive unit 13. Thereby, the diaphragm 12 changes the volume of the pressure chamber 11c.
  • constituent material of the diaphragm 12 is not particularly limited, for example, an alloy material, a synthetic resin material, or the like can be used.
  • the pressurizing drive unit 13 is disposed on the diaphragm 12.
  • the first end 13 p of the pressurizing drive unit 13 is connected to the fixing member 14.
  • the first end portion 13p is a fixed end.
  • a solder paste, an underfill material, an epoxy resin, or the like can be used for the connection between the first end 13p and the fixing member 14.
  • the second end portion 13 q of the pressurizing drive unit 13 is in contact with the diaphragm 12. However, the second end 13q may be connected to the diaphragm 12. *
  • the pressurizing drive unit 13 includes only the pressurizing piezoelectric element 20.
  • the pressurizing piezoelectric element 20 includes a plurality of piezoelectric bodies 20a, a plurality of internal electrodes 20b, and a pair of side electrodes 20c and 20c.
  • the piezoelectric bodies 20a and the internal electrodes 20b are alternately stacked.
  • Each piezoelectric body 20a is made of, for example, piezoelectric ceramics such as lead zirconate titanate (PZT).
  • PZT lead zirconate titanate
  • Each internal electrode 20b is electrically connected to one of the pair of side electrodes 20c, 20c.
  • the internal electrode 20b electrically connected to one side electrode 20c is electrically insulated from the other side electrode 20c.
  • the pressurizing piezoelectric element 20 may include at least one piezoelectric body and a pair of electrodes, and various known piezoelectric elements can be used as the pressurizing piezoelectric element 20. *
  • the pressurizing piezoelectric element 20 expands and contracts (vibrates) in response to a pressurizing voltage signal (driving pulse) applied from the control unit 17 described later. Specifically, when a pressurizing voltage signal is applied from the control unit 17 to the pair of side surface electrodes 20c, 20c, each piezoelectric body 20a expands and contracts.
  • the expansion / contraction direction D1 of the pressurizing piezoelectric element 20 is perpendicular to the outer surface of the diaphragm 12. Along with the expansion / contraction operation of the pressurizing piezoelectric element 20, pressurizing vibration is applied to the diaphragm 12.
  • the fixing member 14 is a member that fixes the first end 13p of the pressurizing drive unit 13. Even if the fixing member 14 and the pressing drive unit 13 (pressurizing piezoelectric element 20) expand and contract, they do not move.
  • the fixing member 14 is disposed on the liquid agent storage unit 11. However, the fixing member 14 need only be able to fix the first end portion 13p of the pressurizing drive unit 13, and may not be disposed on the liquid agent storage unit 11. Further, the shape of the fixing member 14 is not limited to the shape shown in FIG. 1 and can be appropriately changed in consideration of the positional relationship with the peripheral members. *
  • Excitation drive unit 15 The excitation drive unit 15 is disposed in the accommodating space in the recess 11g formed in the pressure chamber plate 11a.
  • the excitation drive unit 15 is located on the opposite side of the pressurization drive unit 13 with respect to the diaphragm 12 in the expansion / contraction direction D1 of the pressurization piezoelectric element 20.
  • the vibration drive unit 15 contacts each of the diaphragm 12 and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g). In the present embodiment, the vibration drive unit 15 is biased by the diaphragm 12 toward the pressure chamber plate 11a (that is, the bottom surface of the recess 11g).
  • the first end 15p of the vibration drive unit 15 is connected to the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g).
  • the first end 15p is a fixed end.
  • a solder paste, an underfill material, an epoxy resin, or the like can be used for the connection between the first end portion 15p and the pressure chamber plate 11a.
  • the second end 15q of the vibration drive unit 15 is in contact with the diaphragm 12. However, the second end 15q may be connected to the diaphragm 12. *
  • the vibration drive unit 15 includes a vibration piezoelectric element 21 and a first intermediate member 22.
  • the exciting piezoelectric element 21 includes a piezoelectric body 21a and a pair of external electrodes 21b and 21b.
  • the piezoelectric body 21a is sandwiched between a pair of external electrodes 21b and 21b.
  • the piezoelectric body 21a is made of piezoelectric ceramics such as lead zirconate titanate (PZT).
  • PZT lead zirconate titanate
  • Each external electrode 21b applies a voltage to the piezoelectric body 21a.
  • the vibrating piezoelectric element 21 various known piezoelectric elements can be used.
  • the piezoelectric element 21 for vibration may have a partial electrode structure like the piezoelectric element 20 for pressurization. *
  • FIG. 2 is a projection view in which the liquid coating device 10 is projected onto a projection plane parallel to the diaphragm 12.
  • FIG. 2 only the pressure chamber plate 11a, the diaphragm 12, the pressurizing piezoelectric element 20, and the exciting piezoelectric element 21 are illustrated, and other members (for example, the fixing member 14 and the like) are omitted.
  • the exciting piezoelectric element 21 is formed in an annular shape. That is, the vibrating piezoelectric element 21 surrounds the entire circumference of the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12.
  • the projected view shape of the excitation piezoelectric element 21 is not limited to an annular shape, and may be a rectangular shape. Further, the projected view shape of the excitation piezoelectric element 21 may be a C-shape, a horseshoe shape, or the like. That is, the exciting piezoelectric element 21 may surround only a part of the periphery of the pressurizing piezoelectric element 20. *
  • the excitation piezoelectric element 21 expands and contracts (vibrates) in accordance with the excitation voltage signal (drive pulse) applied from the control unit 17. Specifically, when an excitation voltage signal is applied from the control unit 17 to the pair of external electrodes 21b and 21b, the piezoelectric body 21a expands and contracts.
  • the expansion / contraction direction D ⁇ b> 2 of the excitation piezoelectric element 21 is parallel to the expansion / contraction direction D ⁇ b> 1 of the pressing piezoelectric element 20.
  • the excitation voltage signal applied to the excitation piezoelectric element 21 is a high-frequency signal having a higher frequency than the pressurization voltage signal applied to the application piezoelectric element 20.
  • the excitation piezoelectric element 21 to which the excitation voltage signal is applied applies minute excitation vibration to the pressure chamber plate 11a so that the liquid agent is not discharged from the discharge port 11f.
  • the entire liquid agent in the pressure chamber 11c, the liquid agent supply path 11d, and the liquid agent discharge path 11e is vibrated and vibrated, so that the fluidity of the entire liquid agent is improved, and the liquid agent discharged from the discharge port 11f is cut off. Can be improved. *
  • the amplitude (potential difference) of the excitation voltage signal is preferably smaller than the amplitude of the pressurization voltage signal.
  • the amplitude of the excitation voltage signal is preferably 1% to 20% of the amplitude of the pressurization voltage signal, and the frequency of the excitation voltage signal is 1 kHz to 30 kHz. Is preferred.
  • the fluidity of the liquid agent can be improved as the frequency of the excitation voltage signal is increased.
  • the amplitude of the excitation voltage signal is preferably 1% to 20% of the amplitude of the pressurization voltage signal, and the frequency of the excitation voltage signal is 1 kHz to 5 kHz. preferable.
  • the displacement amount of the excitation piezoelectric element 21 is smaller than the displacement amount of the pressurizing piezoelectric element 20. Therefore, in order to further improve the displacement transmission efficiency of the excitation piezoelectric element 21, it is preferable to apply a preload to the excitation piezoelectric element 21. Specifically, it is preferable to bias the vibrating piezoelectric element 21 toward the pressure chamber plate 11a by the diaphragm 12. By applying a preload to the vibrating piezoelectric element 21 in this way, it is possible to suppress the occurrence of a pulling force when the vibrating piezoelectric element 21 is extended, so that the durability of the vibrating piezoelectric element 21 is also improved. be able to. *
  • the first intermediate member 22 is disposed between the vibrating piezoelectric element 21 and the diaphragm 12.
  • the first intermediate member 22 is in surface contact with the exciting piezoelectric element 21 and is in surface contact with the diaphragm 12.
  • the first intermediate member 22 is connected to the vibrating piezoelectric element 21 and is in contact with the diaphragm 12.
  • the seal 16 is disposed on the radially inner side of the vibration drive unit 15.
  • the seal 16 is disposed between the pressure chamber plate 11 a and the diaphragm 12.
  • the seal 16 seals the gap between the pressure chamber plate 11 a and the diaphragm 12. Thereby, the leakage of the liquid agent from the pressure chamber 11c to the recess 11g can be suppressed.
  • sticker 16 is arrange
  • the seal 16 is made of an elastic member such as rubber. However, an annular recess for accommodating the seal 16 may be formed in the diaphragm 12.
  • the seal 16 may be an adhesive. In this case, it is not necessary to form a recess in the diaphragm side surface 11s of the pressure chamber plate 11a. *
  • Control unit 17 is a microprocessor such as a CPU (Central Processing Unit) or DSP (Digital Signal Processor), or an arithmetic device such as an ASIC (Application Specific Integrated Circuit) and a power MOSFET (Metal-Oxide- This is realized by a power amplifier composed of a semiconductor (Field-Effect Transistor) or the like.
  • a microprocessor such as a CPU (Central Processing Unit) or DSP (Digital Signal Processor)
  • ASIC Application Specific Integrated Circuit
  • MOSFET Metal-Oxide- This is realized by a power amplifier composed of a semiconductor (Field-Effect Transistor) or the like.
  • the control unit 17 generates a pressurizing voltage signal for driving the pressurizing piezoelectric element 20.
  • the control unit 17 sends the generated pressurizing voltage signal to the power amplifier to amplify the power, and applies this to the pair of side electrodes 20c, 20c of the pressurizing piezoelectric element 20, thereby expanding and contracting the pressurizing piezoelectric element 20.
  • the diaphragm 12 is pressurized and vibrated, and the liquid agent is discharged from the discharge port 11f.
  • the control unit 17 generates an excitation voltage signal for driving the excitation piezoelectric element 21.
  • the excitation voltage signal is a high-frequency signal having a higher frequency than the pressurization voltage signal applied to the pressurization piezoelectric element 20.
  • the control unit 17 sends the generated excitation voltage signal to the power amplifier to amplify the power, and applies the amplified voltage to the pair of external electrodes 21b and 21b of the excitation piezoelectric element 21, thereby exciting the excitation piezoelectric element. 21 is expanded and contracted. Thereby, the liquid agent is vibrated and vibrated through the pressure chamber plate 11a, and the fluidity and liquid breakage of the entire liquid agent are improved. *
  • the liquid agent coating apparatus 10 includes a vibration drive unit 15 disposed in a housing space between the diaphragm 12 and the pressure chamber plate 11a.
  • the accommodation space is constituted by a recess 11g formed in the pressure chamber plate 11a.
  • the excitation drive unit 15 includes an excitation piezoelectric element 21 that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal. Accordingly, since the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated via the pressure chamber plate 11a, the fluidity of the entire liquid agent can be improved and the liquid material discharged from the discharge port 11f can be cut out. Can be improved. *
  • the vibration drive unit 15 contacts each of the diaphragm 12 and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g). Therefore, since the vibration of the vibration excitation piezoelectric element 21 can be prevented from escaping to the diaphragm 12, the liquid agent in the pressure chamber plate 11a can be vibrated efficiently.
  • the vibration drive unit 15 is urged by the diaphragm 12 toward the pressure chamber plate 11a (that is, the bottom side of the recess 11g). Therefore, since it is possible to suppress the formation of a gap between the excitation drive unit 15 and the diaphragm 12, it is possible to suppress the excitation piezoelectric element 21 from being damaged due to internal stress caused by its expansion and contraction.
  • the vibration drive unit 15 includes a first intermediate member 22. Since the first intermediate member 22 is in surface contact with the excitation piezoelectric element 21, the load applied to the excitation piezoelectric element 21 from the first intermediate member 22 can be made uniform. Moreover, since the 1st intermediate member 22 is line-contacted with the diaphragm 12, the 1st intermediate member 22 can be made to follow the deformation
  • the vibrating piezoelectric element 21 is disposed so as to surround the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12. Therefore, it is possible to transmit the excitation vibration of the excitation piezoelectric element 21 to the pressure chamber plate 11a over a wide range. Therefore, since the whole liquid agent in the pressure chamber plate 11a can be vibrated and vibrated uniformly, the fluidity of the whole liquid agent can be improved evenly.
  • the accommodation space of the excitation drive unit 15 is configured by the recess 11g formed in the pressure chamber plate 11a.
  • the accommodation space of the excitation drive unit 15 is configured by a recess 12 a formed in the diaphragm 12.
  • the recess 12a is formed in the outer edge portion of the diaphragm 12 connected to the pressure chamber plate 11a.
  • the outer edge portion of the diaphragm 12 is formed thicker than the inner portion surrounded by the outer edge portion of the diaphragm 12 in order to form the recess 12a.
  • the accommodation space in the recess 12a is closed by the pressure chamber plate 11a.
  • the accommodation space in the recess 12a is preferably liquid-tight and air-tight.
  • it is common with the said 1st Embodiment in the point that an accommodation space is formed between the diaphragm 12 and the pressure chamber plate 11a.
  • the configuration other than the accommodation space is as described in the first embodiment. *
  • the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodation space in the recess 12a, the fluidity of the entire liquid agent is improved. In addition, it is possible to improve the liquid breakage of the liquid agent discharged from the discharge port 11f.
  • the accommodation space of the excitation drive unit 15 is configured by the recess 11g formed in the pressure chamber plate 11a.
  • the accommodation space of the excitation drive unit 15 is constituted by a recess 11 g formed in the pressure chamber plate 11 a and a recess 12 a formed in the diaphragm 12.
  • the configuration of the recess 11g is as described in the first embodiment.
  • the configuration of the recess 12a is as described in the first modification.
  • the accommodation space according to the second modification is configured by connecting the concave portion 11g and the concave portion 12a.
  • the configuration other than the accommodation space is as described in the first embodiment. *
  • the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodating space in the concave portion 11g and the concave portion 12a.
  • the vibration drive unit 15 disposed in the accommodating space in the concave portion 11g and the concave portion 12a.
  • FIG. 10A A configuration of a liquid agent coating apparatus 10A according to a second embodiment will be described with reference to FIG.
  • the liquid agent coating apparatus 10A according to the second embodiment is different from the liquid agent application apparatus 10 according to the first embodiment in that an accommodation space in which the excitation drive unit 15 is disposed is formed on the nozzle 11b side.
  • the difference will be mainly described.
  • the recessed part 11h is formed in the nozzle side surface 11T of the pressure chamber plate 11a.
  • the recess 11h constitutes an accommodation space in which the excitation drive unit 15 is disposed.
  • the accommodation space in the recess 11h is formed between the nozzle 11b and the pressure chamber plate 11a.
  • the accommodation space in the recess 11h is closed by the outer edge portion of the nozzle 11b connected to the pressure chamber plate 11a.
  • the housing space in the recess 11h is preferably liquid-tight and air-tight. *
  • the recess 11h surrounds the pressurizing piezoelectric element 20 in a projection view parallel to the nozzle side surface 11T.
  • the concave portion 11 h may surround only a part of the pressing drive unit 13 or may surround the entire circumference of the pressing drive unit 13.
  • the recess 11g can be formed in a shape corresponding to the vibration drive unit 15 (that is, an annular shape, a rectangular shape, a C shape, a horseshoe shape, etc.).
  • the seal 16 is disposed in an annular recess formed in the nozzle side surface 11T of the pressure chamber plate 11a. *
  • the excitation drive unit 15 is disposed in the accommodating space in the recess 11h formed in the pressure chamber plate 11a.
  • the vibration drive unit 15 contacts each of the nozzle 11b and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11h).
  • the vibration drive unit 15 is biased toward the pressure chamber plate 11a (that is, the bottom surface of the recess 11h) by the nozzle 11b.
  • the first end 15p of the excitation drive unit 15 is connected to the pressure chamber plate 11a (specifically, the bottom surface of the recess 11h).
  • the first end 15p is a fixed end.
  • the second end 15q of the vibration drive unit 15 is in contact with the nozzle 11b. However, the second end 15q may be connected to the nozzle 11b.
  • the excitation drive unit 15 includes only the excitation piezoelectric element 21 and does not include the first intermediate member 22 described in the first embodiment.
  • the configuration of the vibrating piezoelectric element 21 is as described in the first embodiment.
  • the vibrating piezoelectric element 21 surrounds the entire circumference of the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12.
  • the excitation piezoelectric element 21 expands and contracts (vibrates) in accordance with the excitation voltage signal applied from the control unit 17.
  • the excitation piezoelectric element 21 to which the excitation voltage signal is applied applies minute excitation vibration to the pressure chamber plate 11a.
  • the liquid agent application device 10A includes the vibration drive unit 15 disposed in the accommodation space between the nozzle 11b and the pressure chamber plate 11a.
  • the accommodation space is configured by a recess 11h formed in the pressure chamber plate 11a.
  • the excitation drive unit 15 includes an excitation piezoelectric element 21 that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal. Accordingly, since the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated via the pressure chamber plate 11a, the fluidity of the entire liquid agent can be improved and the liquid material discharged from the discharge port 11f can be cut out. Can be improved. *
  • the accommodation space of the excitation drive unit 15 is configured by the recess 11h formed in the pressure chamber plate 11a.
  • the accommodation space of the excitation drive unit 15 is configured by the recess 11k formed in the nozzle 11b.
  • the recessed part 11k is formed in the outer edge part connected to the pressure chamber plate 11a among the nozzles 11b.
  • the accommodation space in the recess 11k is closed by the pressure chamber plate 11a.
  • the housing space in the recess 11k is preferably liquid-tight and air-tight.
  • the second embodiment is the same as the second embodiment in that an accommodation space is formed between the nozzle 11b and the pressure chamber plate 11a.
  • the configuration other than the accommodation space is as described in the second embodiment. *
  • the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodation space in the recess 11k, so that the fluidity of the entire liquid agent is improved.
  • the vibration drive unit 15 disposed in the accommodation space in the recess 11k, so that the fluidity of the entire liquid agent is improved.
  • the accommodation space of the excitation drive unit 15 is configured by the recess 11h formed in the pressure chamber plate 11a.
  • the accommodation space of the excitation drive unit 15 is configured by a recess 11h formed in the pressure chamber plate 11a and a recess 11k formed in the nozzle 11b.
  • the configuration of the recess 11h is as described in the second embodiment.
  • the configuration of the recess 11k is as described in the first modification.
  • the accommodation space according to the second modification is configured by connecting the concave portion 11h and the concave portion 11k.
  • the second embodiment is the same as the second embodiment in that an accommodation space is formed between the nozzle 11b and the pressure chamber plate 11a.
  • the configuration other than the accommodation space is as described in the second embodiment. *
  • the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration driving unit 15 disposed in the accommodating space in the concave portion 11h and the concave portion 11k.
  • the vibration driving unit 15 disposed in the accommodating space in the concave portion 11h and the concave portion 11k.
  • the vibration drive unit 15 is biased toward the pressure chamber plate 11a, but may not be biased toward the pressure chamber plate 11a. *
  • the vibration driving unit 15 is connected to the pressure chamber plate 11a, but may be in contact with the pressure chamber plate 11a.
  • the vibrating piezoelectric element 21 surrounds the pressurizing piezoelectric element 20 in a projected view, but does not have to surround the pressurizing piezoelectric element 20.
  • the exciting piezoelectric elements 21 may be formed in a straight line or may be randomly arranged in a discrete manner.
  • the vibration drive unit 15 includes the first intermediate member 22. However, the vibration drive unit 15 is in surface contact with the vibration piezoelectric element 21 and is in line contact with the pressure chamber plate 11 a. You may have an intermediate member. In the second embodiment, the vibration drive unit 15 does not include the first intermediate member 22, but may include the first intermediate member 22, or the second intermediate member described above. You may have.

Abstract

Provided is a liquid agent application device capable of smoothly applying a liquid agent by using a simple configuration. The liquid agent application device 10 comprises a vibration drive unit 15 arranged in a housing space between a diaphragm 12 and a pressure chamber plate 11a. The housing space is configured using a recessed section 11g formed in the pressure chamber plate 11a. The vibration drive unit 15 has a vibrating piezoelectric element 21 that vibrates in accordance with the application of a vibration voltage signal having a higher frequency than a pressurizing voltage signal.

Description

液剤塗布装置Liquid application device
本発明は、液剤塗布装置に関する。 The present invention relates to a liquid agent coating apparatus.
圧電効果によって電気エネルギから機械エネルギへのエネルギ変換を行う圧電素子は、応答性に優れるため、半導体、印刷、化学薬品などの広い分野において、液剤を対象物の表面に塗布する液剤塗布装置に利用される。　 Piezoelectric elements that convert energy from electrical energy to mechanical energy by the piezoelectric effect have excellent responsiveness, so they can be used in liquid application devices that apply liquids to the surface of objects in a wide range of fields such as semiconductors, printing, and chemicals. Is done. *
しかしながら、圧電素子の変位量は微小であり、液剤に十分な圧力を加えることは容易ではないため、液剤をスムーズに塗布できない場合がある。　 However, since the displacement amount of the piezoelectric element is minute and it is not easy to apply a sufficient pressure to the liquid agent, the liquid agent may not be applied smoothly. *
そこで、圧電素子の変位量を大きくするための変位拡大機構を設ける手法（特許文献１及び特許文献２参照）や、液体の粘度を低下させるための加熱装置を設ける手法（特許文献３及び特許文献４参照）が提案されている。 Therefore, a method of providing a displacement enlarging mechanism for increasing the displacement amount of the piezoelectric element (see Patent Document 1 and Patent Document 2) and a method of providing a heating device for reducing the viscosity of the liquid (Patent Document 3 and Patent Document) 4) has been proposed.
日本国公開特許公報：特開２００５－３４９３８７号公報Japanese Patent Publication: JP-A-2005-349387 日本国公開特許公報：特開２００８－５４４９２号公報Japanese Patent Publication: JP 2008-54492 A 日本国公開特許公報：特開２００３－１０１１０７号公報Japanese Patent Publication: JP-A-2003-101107 日本国公開特許公報：特開２０００－１１７３７１号公報Japanese Published Patent Publication: JP 2000-117371 A
しかしながら、特許文献１～４の手法では、液剤塗布装置の構成が複雑化又は大型化してしまう。　 However, in the methods of Patent Documents 1 to 4, the configuration of the liquid agent coating apparatus is complicated or enlarged. *
本発明は、上述の状況を鑑みてなされており、簡素な構成でスムーズに液剤を塗布可能な液剤塗布装置を提供することを目的とする。 This invention is made | formed in view of the above-mentioned situation, and it aims at providing the liquid agent coating device which can apply | coat a liquid agent smoothly with a simple structure.
本発明の一つの態様に係る液剤塗布装置は、液剤貯留部と、ダイヤフラムと、加圧用駆動部と、加振用駆動部とを備える。液剤貯留部は、液剤を貯留するための圧力室が形成された圧力室プレートと、圧力室に連なる吐出口が形成されたノズルとを有する。ダイヤフラムは、液剤貯留部内の容積を変化させる。加圧用駆動部は、ダイヤフラムと圧力室プレートとの間、又は、ノズルと圧力室プレートとの間の収容空間に配置される。加振用駆動部は、ダイヤフラム上、又は、ノズル上に配置される。加圧用駆動部は、加圧用電圧信号の印加に応じてダイヤフラムを加圧振動させる加圧用圧電素子を有する。加振用駆動部は、加圧用電圧信号よりも周波数の高い加振用電圧信号の印加に応じて振動する加振用圧電素子を有する。 A liquid agent application device according to one aspect of the present invention includes a liquid agent storage unit, a diaphragm, a pressurization drive unit, and an excitation drive unit. The liquid agent storage unit includes a pressure chamber plate in which a pressure chamber for storing the liquid agent is formed, and a nozzle in which a discharge port connected to the pressure chamber is formed. A diaphragm changes the volume in a liquid agent storage part. The pressurizing drive unit is disposed in a housing space between the diaphragm and the pressure chamber plate or between the nozzle and the pressure chamber plate. The vibration drive unit is disposed on the diaphragm or the nozzle. The pressurizing drive unit includes a pressurizing piezoelectric element that pressurizes and oscillates the diaphragm in response to application of the pressurizing voltage signal. The excitation drive unit includes an excitation piezoelectric element that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal.
本発明の一つの態様によれば、簡素な構成で円滑に液剤を塗布可能な液剤塗布装置を提供することができる。 According to one aspect of the present invention, it is possible to provide a liquid agent application apparatus that can apply a liquid agent smoothly with a simple configuration.
図１は、第１実施形態に係る液剤塗布装置の構成を示す模式図である。FIG. 1 is a schematic diagram showing the configuration of the liquid agent coating apparatus according to the first embodiment. 図２は、第１実施形態に係る液剤塗布装置の投影図である。FIG. 2 is a projection view of the liquid agent coating apparatus according to the first embodiment. 図３は、第１実施形態の変形例１に係る液剤塗布装置の構成を示す模式図である。FIG. 3 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 1 of the first embodiment. 図４は、第１実施形態の変形例２に係る液剤塗布装置の構成を示す模式図である。FIG. 4 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 2 of the first embodiment. 図５は、第２実施形態に係る液剤塗布装置の構成を示す模式図である。FIG. 5 is a schematic diagram showing a configuration of a liquid agent coating apparatus according to the second embodiment. 図６は、第２実施形態の変形例１に係る液剤塗布装置の構成を示す模式図である。FIG. 6 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 1 of the second embodiment. 図７は、第２実施形態の変形例２に係る液剤塗布装置の構成を示す模式図である。FIG. 7 is a schematic diagram illustrating a configuration of a liquid agent coating apparatus according to Modification 2 of the second embodiment.
以下、図面を参照しながら、本発明の一実施形態に係る液剤塗布装置について説明する。ただし、本発明の範囲は、以下の実施の形態に限定されず、本発明の技術的思想の範囲内で任意に変更可能である。また、以下の図面においては、各構成をわかりやすくするために、各構造における縮尺および数等を、実際の構造における縮尺および数等と異ならせる場合がある。　 Hereinafter, a liquid application device according to an embodiment of the present invention will be described with reference to the drawings. However, the scope of the present invention is not limited to the following embodiments, and can be arbitrarily changed within the scope of the technical idea of the present invention. In the following drawings, the scale and number of each structure may be different from the scale and number of the actual structure in order to make each configuration easy to understand. *
本明細書において、「接続」とは、２つの部材が互いに固定又は連結された状態を意味する。従って、２つの部材が接続される場合、両者は常に一緒に動作する。また、「接触」とは、２つの部材が直接的に接する状態にはあるものの、２つの部材は互いに固定又は連結されない状態を意味する。２つの部材が接触する場合、両者が一緒に動作するときと、両者が一緒に動作しないときとが起こりうる。　 In this specification, “connection” means a state in which two members are fixed or coupled to each other. Thus, when two members are connected, they always work together. “Contact” means a state where two members are in direct contact with each other, but the two members are not fixed or connected to each other. When two members are in contact, there can be a time when they operate together and a time when they do not work together. *
また、本明細書において、「平行」とは、物理的に厳密な意味で平行な場合だけでなく、実質的に平行な場合をも含む概念である。実質的に平行とは、１５°以下の範囲で傾いている場合をいう。同様に、「垂直」とは、物理的に厳密な意味で垂直な場合だけでなく、実質的に垂直な場合をも含む概念である。実質的に垂直とは、１５°以下の範囲で傾いている場合をいう。　 Further, in this specification, “parallel” is a concept including not only the case of being physically parallel but also the case of being substantially parallel. The term “substantially parallel” refers to a case where it is inclined within a range of 15 ° or less. Similarly, the term “vertical” is a concept that includes not only the case of being physically vertical but also the case of being substantially vertical. The term “substantially vertical” refers to a case where it is inclined within a range of 15 ° or less. *
［第１実施形態］　（液剤塗布装置１０）　図１は、第１実施形態に係る液剤塗布装置１０の構成を示す模式図である。　 First Embodiment (Liquid Application Device 10) FIG. 1 is a schematic diagram showing a configuration of a liquid agent application device 10 according to the first embodiment. *
液剤塗布装置１０は、液剤貯留部１１、ダイヤフラム１２、加圧用駆動部１３、固定部材１４、加振用駆動部１５、シール１６及び制御部１７を備える。液剤貯留部１１、ダイヤフラム１２、加圧用駆動部１３、固定部材１４、及び加振用駆動部１５は、ヘッド１８を構成する。　 The liquid agent application device 10 includes a liquid agent storage unit 11, a diaphragm 12, a pressurization drive unit 13, a fixing member 14, an excitation drive unit 15, a seal 16, and a control unit 17. The liquid agent storage unit 11, the diaphragm 12, the pressurization drive unit 13, the fixing member 14, and the vibration drive unit 15 constitute a head 18. *
（１）液剤貯留部１１　液剤貯留部１１は、圧力室プレート１１ａ及びノズル１１ｂを有する。　 (1) Liquid agent storage part 11 The liquid agent storage part 11 has the pressure chamber plate 11a and the nozzle 11b. *
圧力室プレート１１ａは、中空状に形成される。本実施形態において、圧力室プレート１１ａは筒状に形成されるが、これに限られない。圧力室プレート１１ａは、例えば合金材料、セラミックス材料、及び合成樹脂材料などによって構成することができる。　 The pressure chamber plate 11a is formed in a hollow shape. In the present embodiment, the pressure chamber plate 11a is formed in a cylindrical shape, but is not limited thereto. The pressure chamber plate 11a can be made of, for example, an alloy material, a ceramic material, a synthetic resin material, or the like. *
圧力室プレート１１ａのダイヤフラム側表面１１ｓには、凹部１１ｇが形成される。凹部１１ｇは、加振用駆動部１５が配置される収容空間を構成する。凹部１１ｇ内の収容空間は、ダイヤフラム１２と圧力室プレート１１ａとの間に形成される。凹部１１ｇ内の収容空間は、ダイヤフラム１２のうち圧力室プレート１１ａに接続される外縁部分によって塞がれる。凹部１１ｇ内の収容空間は、液密かつ気密であることが好ましい。　 A recess 11g is formed on the diaphragm side surface 11s of the pressure chamber plate 11a. The recess 11g constitutes an accommodation space in which the excitation drive unit 15 is disposed. The accommodation space in the recess 11g is formed between the diaphragm 12 and the pressure chamber plate 11a. The accommodation space in the recess 11g is closed by an outer edge portion of the diaphragm 12 connected to the pressure chamber plate 11a. The housing space in the recess 11g is preferably liquid-tight and air-tight. *
圧力室プレート１１ａの内部には、圧力室１１ｃが形成される。圧力室１１ｃには、液剤が貯留される。液剤としては、半田、熱硬化性樹脂、インク、機能性薄膜（配向膜、レジスト、カラーフィルタ、有機エレクトロルミネッセンスなど）を形成するための塗布液などが挙げられるが、これに限られない。　 A pressure chamber 11c is formed inside the pressure chamber plate 11a. A liquid agent is stored in the pressure chamber 11c. Examples of the liquid agent include, but are not limited to, a solder, a thermosetting resin, ink, and a coating liquid for forming a functional thin film (alignment film, resist, color filter, organic electroluminescence, etc.). *
圧力室プレート１１ａには、液剤供給路１１ｄと液剤排出路１１ｅとが形成される。液剤供給路１１ｄと液剤排出路１１ｅは、それぞれ圧力室１１ｃに繋がる。圧力室１１ｃには、液剤供給路１１ｄを介して液剤が供給される。圧力室１１ｃ内の余分な液剤は、必要に応じて液剤排出路１１ｅから外部に排出される。　 A liquid supply path 11d and a liquid discharge path 11e are formed in the pressure chamber plate 11a. The liquid supply path 11d and the liquid discharge path 11e are each connected to the pressure chamber 11c. The liquid agent is supplied to the pressure chamber 11c via the liquid agent supply path 11d. Excess liquid in the pressure chamber 11c is discharged to the outside from the liquid discharge path 11e as necessary. *
ノズル１１ｂは、板状に形成される。ノズル１１ｂは、圧力室１１ｃの一端開口を塞ぐように配置される。ノズル１１ｂには、吐出口１１ｆが形成される。吐出口１１ｆは、圧力室１１ｃに連なる。圧力室１１ｃ内の液剤は、吐出口１１ｆから外部に吐出される。　 The nozzle 11b is formed in a plate shape. The nozzle 11b is disposed so as to close one end opening of the pressure chamber 11c. A discharge port 11f is formed in the nozzle 11b. The discharge port 11f continues to the pressure chamber 11c. The liquid agent in the pressure chamber 11c is discharged to the outside from the discharge port 11f. *
（２）ダイヤフラム１２　ダイヤフラム１２は、板状又は膜状に形成される。ダイヤフラム１２は、圧力室１１ｃの他端開口を塞ぐように配置される。ダイヤフラム１２は、加圧用駆動部１３から加圧振動が加えられると弾性的に振動する。これにより、ダイヤフラム１２は、圧力室１１ｃの容積を変化させる。　 (2) Diaphragm 12 The diaphragm 12 is formed in a plate shape or a film shape. The diaphragm 12 is disposed so as to close the other end opening of the pressure chamber 11c. The diaphragm 12 vibrates elastically when a pressurizing vibration is applied from the pressurizing drive unit 13. Thereby, the diaphragm 12 changes the volume of the pressure chamber 11c. *
ダイヤフラム１２が圧力室１１ｃの内部に向かって凸状に湾曲すると、圧力室１１ｃの容積は小さくなる。これにより、吐出口１１ｆから液剤が吐出される。その後、ダイヤフラム１２が自身の弾性によって定常状態に復帰すると、圧力室１１ｃの容積も元に戻る。この際、液剤供給路１１ｄから圧力室１１ｃに液剤が補充される。　 When the diaphragm 12 curves convexly toward the inside of the pressure chamber 11c, the volume of the pressure chamber 11c decreases. Thereby, a liquid agent is discharged from the discharge outlet 11f. Thereafter, when the diaphragm 12 returns to the steady state by its own elasticity, the volume of the pressure chamber 11c also returns to the original state. At this time, the liquid agent is replenished to the pressure chamber 11c from the liquid agent supply path 11d. *
ダイヤフラム１２の構成材料は特に制限されないが、例えば合金材料、及び合成樹脂材料などを用いることができる。　 Although the constituent material of the diaphragm 12 is not particularly limited, for example, an alloy material, a synthetic resin material, or the like can be used. *
（３）加圧用駆動部１３　加圧用駆動部１３は、ダイヤフラム１２上に配置される。加圧用駆動部１３の第１端部１３ｐは、固定部材１４に接続される。第１端部１３ｐは、固定端である。第１端部１３ｐと固定部材１４との接続には、半田ペースト、アンダーフィル材、及びエポキシ樹脂などを用いることができる。加圧用駆動部１３の第２端部１３ｑは、ダイヤフラム１２に接触する。ただし、第２端部１３ｑは、ダイヤフラム１２に接続されてもよい。　 (3) Pressurizing drive unit 13 The pressurizing drive unit 13 is disposed on the diaphragm 12. The first end 13 p of the pressurizing drive unit 13 is connected to the fixing member 14. The first end portion 13p is a fixed end. For the connection between the first end 13p and the fixing member 14, a solder paste, an underfill material, an epoxy resin, or the like can be used. The second end portion 13 q of the pressurizing drive unit 13 is in contact with the diaphragm 12. However, the second end 13q may be connected to the diaphragm 12. *
本実施形態において、加圧用駆動部１３は、加圧用圧電素子２０のみを含む。加圧用圧電素子２０は、複数の圧電体２０ａ、複数の内部電極２０ｂ、及び一対の側面電極２０ｃ，２０ｃを有する。各圧電体２０ａと各内部電極２０ｂとは、交互に積層される。各圧電体２０ａは、例えばジルコン酸チタン酸鉛（ＰＺＴ）などの圧電セラミックスによって構成される。各内部電極２０ｂは、一対の側面電極２０ｃ，２０ｃのうちいずれか一方と電気的に接続される。一方の側面電極２０ｃと電気的に接続された内部電極２０ｂは、他方の側面電極２０ｃから電気的に絶縁される。このような構造は、一般に部分電極構造と称される。ただし、加圧用圧電素子２０は、１つの圧電体と一対の電極とを少なくとも備えればよく、加圧用圧電素子２０としては周知の種々の圧電素子を用いることができる。　 In the present embodiment, the pressurizing drive unit 13 includes only the pressurizing piezoelectric element 20. The pressurizing piezoelectric element 20 includes a plurality of piezoelectric bodies 20a, a plurality of internal electrodes 20b, and a pair of side electrodes 20c and 20c. The piezoelectric bodies 20a and the internal electrodes 20b are alternately stacked. Each piezoelectric body 20a is made of, for example, piezoelectric ceramics such as lead zirconate titanate (PZT). Each internal electrode 20b is electrically connected to one of the pair of side electrodes 20c, 20c. The internal electrode 20b electrically connected to one side electrode 20c is electrically insulated from the other side electrode 20c. Such a structure is generally called a partial electrode structure. However, the pressurizing piezoelectric element 20 may include at least one piezoelectric body and a pair of electrodes, and various known piezoelectric elements can be used as the pressurizing piezoelectric element 20. *
加圧用圧電素子２０は、後述する制御部１７から印加される加圧用電圧信号（駆動パルス）に応じて伸縮（振動）する。具体的には、制御部１７から一対の側面電極２０ｃ，２０ｃに加圧用電圧信号が印加されると、各圧電体２０ａが伸縮する。加圧用圧電素子２０の伸縮方向Ｄ１は、ダイヤフラム１２の外表面に対して垂直である。この加圧用圧電素子２０の伸縮動作に伴って、ダイヤフラム１２に加圧振動が加えられる。　 The pressurizing piezoelectric element 20 expands and contracts (vibrates) in response to a pressurizing voltage signal (driving pulse) applied from the control unit 17 described later. Specifically, when a pressurizing voltage signal is applied from the control unit 17 to the pair of side surface electrodes 20c, 20c, each piezoelectric body 20a expands and contracts. The expansion / contraction direction D1 of the pressurizing piezoelectric element 20 is perpendicular to the outer surface of the diaphragm 12. Along with the expansion / contraction operation of the pressurizing piezoelectric element 20, pressurizing vibration is applied to the diaphragm 12. *
（４）固定部材１４　固定部材１４は、加圧用駆動部１３の第１端部１３ｐを固定する部材である。固定部材１４、加圧用駆動部１３（加圧用圧電素子２０）が伸縮しても移動しない。固定部材１４は、液剤貯留部１１上に配置される。ただし、固定部材１４は、加圧用駆動部１３の第１端部１３ｐを固定できればよく、液剤貯留部１１上に配置されなくてもよい。また、固定部材１４の形状は、図１の形状に限られず、周辺部材との配置関係を考慮して適宜変更可能である。　 (4) Fixing member 14 The fixing member 14 is a member that fixes the first end 13p of the pressurizing drive unit 13. Even if the fixing member 14 and the pressing drive unit 13 (pressurizing piezoelectric element 20) expand and contract, they do not move. The fixing member 14 is disposed on the liquid agent storage unit 11. However, the fixing member 14 need only be able to fix the first end portion 13p of the pressurizing drive unit 13, and may not be disposed on the liquid agent storage unit 11. Further, the shape of the fixing member 14 is not limited to the shape shown in FIG. 1 and can be appropriately changed in consideration of the positional relationship with the peripheral members. *
（５）加振用駆動部１５　加振用駆動部１５は、圧力室プレート１１ａに形成された凹部１１ｇ内の収容空間に配置される。加振用駆動部１５は、加圧用圧電素子２０の伸縮方向Ｄ１において、ダイヤフラム１２を基準として加圧用駆動部１３の反対側に位置する。加振用駆動部１５は、ダイヤフラム１２及び圧力室プレート１１ａ（具体的には、凹部１１ｇの底面）のそれぞれに接触する。本実施形態において、加振用駆動部１５は、ダイヤフラム１２によって圧力室プレート１１ａ側（すなわち、凹部１１ｇの底面側）に付勢される。　 (5) Excitation drive unit 15 The excitation drive unit 15 is disposed in the accommodating space in the recess 11g formed in the pressure chamber plate 11a. The excitation drive unit 15 is located on the opposite side of the pressurization drive unit 13 with respect to the diaphragm 12 in the expansion / contraction direction D1 of the pressurization piezoelectric element 20. The vibration drive unit 15 contacts each of the diaphragm 12 and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g). In the present embodiment, the vibration drive unit 15 is biased by the diaphragm 12 toward the pressure chamber plate 11a (that is, the bottom surface of the recess 11g). *
加振用駆動部１５の第１端部１５ｐは、圧力室プレート１１ａ（具体的には、凹部１１ｇの底面）に接続される。第１端部１５ｐは、固定端である。第１端部１５ｐと圧力室プレート１１ａとの接続には、半田ペースト、アンダーフィル材、及びエポキシ樹脂などを用いることができる。加振用駆動部１５の第２端部１５ｑは、ダイヤフラム１２に接触する。ただし、第２端部１５ｑは、ダイヤフラム１２に接続されてもよい。　 The first end 15p of the vibration drive unit 15 is connected to the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g). The first end 15p is a fixed end. For the connection between the first end portion 15p and the pressure chamber plate 11a, a solder paste, an underfill material, an epoxy resin, or the like can be used. The second end 15q of the vibration drive unit 15 is in contact with the diaphragm 12. However, the second end 15q may be connected to the diaphragm 12. *
本実施形態において、加振用駆動部１５は、加振用圧電素子２１と第１中間部材２２とを含む。　 In the present embodiment, the vibration drive unit 15 includes a vibration piezoelectric element 21 and a first intermediate member 22. *
加振用圧電素子２１は、圧電体２１ａと一対の外部電極２１ｂ，２１ｂとを有する。圧電体２１ａは、一対の外部電極２１ｂ，２１ｂによって挟まれる。圧電体２１ａは、例えばジルコン酸チタン酸鉛（ＰＺＴ）などの圧電セラミックスによって構成される。各外部電極２１ｂは、圧電体２１ａに電圧を印加する。加振用圧電素子２１としては周知の種々の圧電素子を用いることができる。なお、加振用圧電素子２１は、加圧用圧電素子２０と同様、部分電極構造を有してもよい。　 The exciting piezoelectric element 21 includes a piezoelectric body 21a and a pair of external electrodes 21b and 21b. The piezoelectric body 21a is sandwiched between a pair of external electrodes 21b and 21b. The piezoelectric body 21a is made of piezoelectric ceramics such as lead zirconate titanate (PZT). Each external electrode 21b applies a voltage to the piezoelectric body 21a. As the vibrating piezoelectric element 21, various known piezoelectric elements can be used. In addition, the piezoelectric element 21 for vibration may have a partial electrode structure like the piezoelectric element 20 for pressurization. *
ここで、図２は、ダイヤフラム１２に平行な投影面上に液剤塗布装置１０を投影させた投影図である。ただし、図２では、圧力室プレート１１ａ、ダイヤフラム１２、加圧用圧電素子２０及び加振用圧電素子２１のみが図示され、他の部材（例えば、固定部材
１４など）は省略されている。　 Here, FIG. 2 is a projection view in which the liquid coating device 10 is projected onto a projection plane parallel to the diaphragm 12. However, in FIG. 2, only the pressure chamber plate 11a, the diaphragm 12, the pressurizing piezoelectric element 20, and the exciting piezoelectric element 21 are illustrated, and other members (for example, the fixing member 14 and the like) are omitted.
図２に示すように、加振用圧電素子２１は、円環状に形成される。すなわち、加振用圧電素子２１は、ダイヤフラム１２に平行な投影視において、加圧用圧電素子２０の全周を取り囲む。ただし、加振用圧電素子２１の投影視形状は円環状に限られず、矩形環状などであってもよい。また、加振用圧電素子２１の投影視形状は、Ｃ字状及び馬蹄形状などであってもよい。すなわち、加振用圧電素子２１は、加圧用圧電素子２０の周囲の一部のみを取り囲んでいてもよい。　 As shown in FIG. 2, the exciting piezoelectric element 21 is formed in an annular shape. That is, the vibrating piezoelectric element 21 surrounds the entire circumference of the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12. However, the projected view shape of the excitation piezoelectric element 21 is not limited to an annular shape, and may be a rectangular shape. Further, the projected view shape of the excitation piezoelectric element 21 may be a C-shape, a horseshoe shape, or the like. That is, the exciting piezoelectric element 21 may surround only a part of the periphery of the pressurizing piezoelectric element 20. *
加振用圧電素子２１は、制御部１７から印加される加振用電圧信号（駆動パルス）に応じて伸縮（振動）する。具体的には、制御部１７から一対の外部電極２１ｂ，２１ｂに加振用電圧信号が印加されると、圧電体２１ａが伸縮する。本実施形態において、加振用圧電素子２１の伸縮方向Ｄ２は、加圧用圧電素子２０の伸縮方向Ｄ１と平行である。　 The excitation piezoelectric element 21 expands and contracts (vibrates) in accordance with the excitation voltage signal (drive pulse) applied from the control unit 17. Specifically, when an excitation voltage signal is applied from the control unit 17 to the pair of external electrodes 21b and 21b, the piezoelectric body 21a expands and contracts. In the present embodiment, the expansion / contraction direction D <b> 2 of the excitation piezoelectric element 21 is parallel to the expansion / contraction direction D <b> 1 of the pressing piezoelectric element 20. *
加振用圧電素子２１に印加される加振用電圧信号は、加圧用圧電素子２０に印加される加圧用電圧信号よりも周波数の高い高周波信号である。加振用電圧信号が印加された加振用圧電素子２１は、吐出口１１ｆから液剤が吐出されない程度の微小な加振振動を圧力室プレート１１ａに加える。これによって、圧力室１１ｃ、液剤供給路１１ｄ及び液剤排出路１１ｅ内の液剤全体が加振振動されるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 The excitation voltage signal applied to the excitation piezoelectric element 21 is a high-frequency signal having a higher frequency than the pressurization voltage signal applied to the application piezoelectric element 20. The excitation piezoelectric element 21 to which the excitation voltage signal is applied applies minute excitation vibration to the pressure chamber plate 11a so that the liquid agent is not discharged from the discharge port 11f. As a result, the entire liquid agent in the pressure chamber 11c, the liquid agent supply path 11d, and the liquid agent discharge path 11e is vibrated and vibrated, so that the fluidity of the entire liquid agent is improved, and the liquid agent discharged from the discharge port 11f is cut off. Can be improved. *
加振用電圧信号の振幅（電位差）は、加圧用電圧信号の振幅よりも小さいことが好ましい。液剤の流動性を向上させるという観点からすれば、加振用電圧信号の振幅は加圧用電圧信号の振幅の１％～２０％であることが好ましく、加振用電圧信号の周波数は１ｋＨｚ～３０ｋＨｚが好ましい。また、チクソトロピー性を示す液剤の場合、一般的には、加振用電圧信号の周波数を高くするほど液剤の流動性を向上させることができる。　 The amplitude (potential difference) of the excitation voltage signal is preferably smaller than the amplitude of the pressurization voltage signal. From the viewpoint of improving the fluidity of the liquid agent, the amplitude of the excitation voltage signal is preferably 1% to 20% of the amplitude of the pressurization voltage signal, and the frequency of the excitation voltage signal is 1 kHz to 30 kHz. Is preferred. In the case of a liquid agent exhibiting thixotropy, generally, the fluidity of the liquid agent can be improved as the frequency of the excitation voltage signal is increased. *
液切れ性を向上させるという観点からすれば、加振用電圧信号の振幅は加圧用電圧信号の振幅の１％～２０％であることが好ましく、加振用電圧信号の周波数は１ｋＨｚ～５ｋＨｚが好ましい。　 From the viewpoint of improving the liquid breakage, the amplitude of the excitation voltage signal is preferably 1% to 20% of the amplitude of the pressurization voltage signal, and the frequency of the excitation voltage signal is 1 kHz to 5 kHz. preferable. *
加振用圧電素子２１の変位量は、加圧用圧電素子２０の変位量に比べて小さい。そこで、加振用圧電素子２１の変位の伝達効率をより向上させるために、加振用圧電素子２１に予圧を付与することが好ましい。具体的には、ダイヤフラム１２によって加振用圧電素子２１を圧力室プレート１１ａ側に付勢することが好ましい。このように加振用圧電素子２１に予圧を付与することにより、加振用圧電素子２１の伸長時に内部で引っ張り力が生じることを抑制できるため、加振用圧電素子２１の耐久性も向上させることができる。　 The displacement amount of the excitation piezoelectric element 21 is smaller than the displacement amount of the pressurizing piezoelectric element 20. Therefore, in order to further improve the displacement transmission efficiency of the excitation piezoelectric element 21, it is preferable to apply a preload to the excitation piezoelectric element 21. Specifically, it is preferable to bias the vibrating piezoelectric element 21 toward the pressure chamber plate 11a by the diaphragm 12. By applying a preload to the vibrating piezoelectric element 21 in this way, it is possible to suppress the occurrence of a pulling force when the vibrating piezoelectric element 21 is extended, so that the durability of the vibrating piezoelectric element 21 is also improved. be able to. *
第１中間部材２２は、加振用圧電素子２１とダイヤフラム１２との間に配置される。第１中間部材２２は、加振用圧電素子２１と面接触し、かつ、ダイヤフラム１２と面接触する。第１中間部材２２は、加振用圧電素子２１に接続されており、ダイヤフラム１２とは接触する。　 The first intermediate member 22 is disposed between the vibrating piezoelectric element 21 and the diaphragm 12. The first intermediate member 22 is in surface contact with the exciting piezoelectric element 21 and is in surface contact with the diaphragm 12. The first intermediate member 22 is connected to the vibrating piezoelectric element 21 and is in contact with the diaphragm 12. *
（６）シール１６　シール１６は、加振用駆動部１５の径方向内側に配置される。シール１６は、圧力室プレート１１ａとダイヤフラム１２との間に配置される。シール１６は、圧力室プレート１１ａとダイヤフラム１２との隙間を封止する。これによって、圧力室１１ｃから凹部１１ｇへの液剤の漏出を抑制できる。　 (6) Seal 16 The seal 16 is disposed on the radially inner side of the vibration drive unit 15. The seal 16 is disposed between the pressure chamber plate 11 a and the diaphragm 12. The seal 16 seals the gap between the pressure chamber plate 11 a and the diaphragm 12. Thereby, the leakage of the liquid agent from the pressure chamber 11c to the recess 11g can be suppressed. *
本実施形態では、シール１６は、圧力室プレート１１ａのダイヤフラム側表面１１ｓに形成された環状凹部に配置される。シール１６は、例えばゴムなどの弾性部材によって構成される。ただし、シール１６を収容するための環状凹部は、ダイヤフラム１２に形成されてもよい。また、シール１６は接着剤であってもよく、この場合には、圧力室プレート１１ａのダイヤフラム側表面１１ｓには凹部を形成する必要はない。　 In this embodiment, the seal | sticker 16 is arrange | positioned at the annular recessed part formed in the diaphragm side surface 11s of the pressure chamber plate 11a. The seal 16 is made of an elastic member such as rubber. However, an annular recess for accommodating the seal 16 may be formed in the diaphragm 12. The seal 16 may be an adhesive. In this case, it is not necessary to form a recess in the diaphragm side surface 11s of the pressure chamber plate 11a. *
（７）制御部１７　制御部１７は、ＣＰＵ（Central Processing Unit）あるいはＤＳＰ（Digital Signal Processor）等のマイクロプロセッサー、又は、ＡＳＩＣ（Application Specific Integrated Circuit）等の演算装置とパワーＭＯＳＦＥＴ（Metal-Oxide-Semiconductor Field-Effect Transistor）等で構成された電力増幅器とによって実現される。　 (7) Control unit 17 The control unit 17 is a microprocessor such as a CPU (Central Processing Unit) or DSP (Digital Signal Processor), or an arithmetic device such as an ASIC (Application Specific Integrated Circuit) and a power MOSFET (Metal-Oxide- This is realized by a power amplifier composed of a semiconductor (Field-Effect Transistor) or the like. *
制御部１７は、加圧用圧電素子２０を駆動させるための加圧用電圧信号を生成する。制御部１７は、生成した加圧用電圧信号を電力増幅器に送って電力を増幅し、これを加圧用圧電素子２０の一対の側面電極２０ｃ，２０ｃに印加することによって、加圧用圧電素子２０を伸縮させる。これにより、ダイヤフラム１２が加圧振動して、吐出口１１ｆから液剤が吐出される。　 The control unit 17 generates a pressurizing voltage signal for driving the pressurizing piezoelectric element 20. The control unit 17 sends the generated pressurizing voltage signal to the power amplifier to amplify the power, and applies this to the pair of side electrodes 20c, 20c of the pressurizing piezoelectric element 20, thereby expanding and contracting the pressurizing piezoelectric element 20. Let Thereby, the diaphragm 12 is pressurized and vibrated, and the liquid agent is discharged from the discharge port 11f. *
制御部１７は、加振用圧電素子２１を駆動させるための加振用電圧信号を生成する。加振用電圧信号は、加圧用圧電素子２０に印加される加圧用電圧信号よりも周波数の高い高周波信号である。制御部１７は、生成した加振用電圧信号を電力増幅器に送って電力を増幅し、これを加振用圧電素子２１の一対の外部電極２１ｂ，２１ｂに印加することによって、加振用圧電素子２１を伸縮させる。これにより、圧力室プレート１１ａを介して液剤が加振振動され、液剤全体の流動性及び液切れ性が向上する。　 The control unit 17 generates an excitation voltage signal for driving the excitation piezoelectric element 21. The excitation voltage signal is a high-frequency signal having a higher frequency than the pressurization voltage signal applied to the pressurization piezoelectric element 20. The control unit 17 sends the generated excitation voltage signal to the power amplifier to amplify the power, and applies the amplified voltage to the pair of external electrodes 21b and 21b of the excitation piezoelectric element 21, thereby exciting the excitation piezoelectric element. 21 is expanded and contracted. Thereby, the liquid agent is vibrated and vibrated through the pressure chamber plate 11a, and the fluidity and liquid breakage of the entire liquid agent are improved. *
（特徴）　（１）第１実施形態において、液剤塗布装置１０は、ダイヤフラム１２と圧力室プレート１１ａとの間の収容空間に配置される加振用駆動部１５を備える。収容空間は、圧力室プレート１１ａに形成された凹部１１ｇによって構成される。加振用駆動部１５は、加圧用電圧信号よりも周波数の高い加振用電圧信号の印加に応じて振動する加振用圧電素子２１を有する。従って、圧力室プレート１１ａを介して圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 (Characteristics) (1) In the first embodiment, the liquid agent coating apparatus 10 includes a vibration drive unit 15 disposed in a housing space between the diaphragm 12 and the pressure chamber plate 11a. The accommodation space is constituted by a recess 11g formed in the pressure chamber plate 11a. The excitation drive unit 15 includes an excitation piezoelectric element 21 that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal. Accordingly, since the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated via the pressure chamber plate 11a, the fluidity of the entire liquid agent can be improved and the liquid material discharged from the discharge port 11f can be cut out. Can be improved. *
（２）加振用駆動部１５は、ダイヤフラム１２及び圧力室プレート１１ａ（具体的には、凹部１１ｇの底面）のそれぞれに接触する。従って、加振用圧電素子２１の加振振動がダイヤフラム１２側に逃げることを抑制できるため、圧力室プレート１１ａ内の液剤を効率的に加振振動させることができる。　 (2) The vibration drive unit 15 contacts each of the diaphragm 12 and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11g). Therefore, since the vibration of the vibration excitation piezoelectric element 21 can be prevented from escaping to the diaphragm 12, the liquid agent in the pressure chamber plate 11a can be vibrated efficiently. *
（３）加振用駆動部１５は、ダイヤフラム１２によって圧力室プレート１１ａ側（すなわち、凹部１１ｇの底面側）に付勢される。従って、加振用駆動部１５とダイヤフラム１２との間に隙間ができることを抑制できるため、加振用圧電素子２１が自身の伸縮に伴って生じる内部応力によって破損することを抑制できる。　 (3) The vibration drive unit 15 is urged by the diaphragm 12 toward the pressure chamber plate 11a (that is, the bottom side of the recess 11g). Therefore, since it is possible to suppress the formation of a gap between the excitation drive unit 15 and the diaphragm 12, it is possible to suppress the excitation piezoelectric element 21 from being damaged due to internal stress caused by its expansion and contraction. *
（４）加振用駆動部１５は、第１中間部材２２を有する。第１中間部材２２は、加振用圧電素子２１と面接触するので、第１中間部材２２から加振用圧電素子２１に対してかかる荷重を均一にすることができる。また、第１中間部材２２は、ダイヤフラム１２と線接触するので、第１中間部材２２をダイヤフラム１２の変形に沿わせる（すなわち、馴染ませる）ことができる。従って、加振用圧電素子２１の一部分に応力が集中することを抑制できるため、加振用圧電素子２１が破損することを抑制できる。　 (4) The vibration drive unit 15 includes a first intermediate member 22. Since the first intermediate member 22 is in surface contact with the excitation piezoelectric element 21, the load applied to the excitation piezoelectric element 21 from the first intermediate member 22 can be made uniform. Moreover, since the 1st intermediate member 22 is line-contacted with the diaphragm 12, the 1st intermediate member 22 can be made to follow the deformation | transformation of the diaphragm 12 (namely, it adapts). Accordingly, it is possible to suppress the stress from being concentrated on a part of the vibrating piezoelectric element 21, and thus it is possible to suppress the vibrating piezoelectric element 21 from being damaged. *
（５）加振用圧電素子２１は、ダイヤフラム１２に平行な投影視において、加圧用圧電素子２０を取り囲むように配置される。従って、広い範囲にわたって、加振用圧電素子２１の加振振動を圧力室プレート１１ａに伝達させることができる。そのため、圧力室プレート１１ａ内の液剤全体を均等に加振振動させることができるため、液剤全体の流動性を均等に向上させることができる。　 (5) The vibrating piezoelectric element 21 is disposed so as to surround the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12. Therefore, it is possible to transmit the excitation vibration of the excitation piezoelectric element 21 to the pressure chamber plate 11a over a wide range. Therefore, since the whole liquid agent in the pressure chamber plate 11a can be vibrated and vibrated uniformly, the fluidity of the whole liquid agent can be improved evenly. *
［第１実施形態の変形例１］　第１実施形態の変形例１について、図３を参照しながら説明する。　 [First Modification of First Embodiment] A first modification of the first embodiment will be described with reference to FIG. *
上記第１実施形態では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｇによって構成されることとした。　 In the first embodiment, the accommodation space of the excitation drive unit 15 is configured by the recess 11g formed in the pressure chamber plate 11a. *
一方、本変形例１では、加振用駆動部１５の収容空間は、ダイヤフラム１２に形成された凹部１２ａによって構成される。凹部１２ａは、ダイヤフラム１２のうち圧力室プレート１１ａに接続される外縁部分に形成される。ダイヤフラム１２の外縁部分は、凹部１２ａを形成するために、ダイヤフラム１２の外縁部分に囲まれた内側部分よりも厚く形成される。凹部１２ａ内の収容空間は、圧力室プレート１１ａによって塞がれる。凹部１２ａ内の収容空間は、液密かつ気密であることが好ましい。なお、ダイヤフラム１２と圧力室プレート１１ａとの間に収容空間が形成されるという点では、上記第１実施形態と共通する。また、収容空間以外の構成は、上記第１実施形態で説明したとおりである。　 On the other hand, in the first modification, the accommodation space of the excitation drive unit 15 is configured by a recess 12 a formed in the diaphragm 12. The recess 12a is formed in the outer edge portion of the diaphragm 12 connected to the pressure chamber plate 11a. The outer edge portion of the diaphragm 12 is formed thicker than the inner portion surrounded by the outer edge portion of the diaphragm 12 in order to form the recess 12a. The accommodation space in the recess 12a is closed by the pressure chamber plate 11a. The accommodation space in the recess 12a is preferably liquid-tight and air-tight. In addition, it is common with the said 1st Embodiment in the point that an accommodation space is formed between the diaphragm 12 and the pressure chamber plate 11a. In addition, the configuration other than the accommodation space is as described in the first embodiment. *
本変形例１においても、凹部１２ａ内の収容空間に配置された加振用駆動部１５によって、圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 Also in the first modification, since the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodation space in the recess 12a, the fluidity of the entire liquid agent is improved. In addition, it is possible to improve the liquid breakage of the liquid agent discharged from the discharge port 11f. *
［第１実施形態の変形例２］　第１実施形態の変形例２について、図４を参照しながら説明する。　 [Modification 2 of First Embodiment] Modification 2 of the first embodiment will be described with reference to FIG. *
上記第１実施形態では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｇによって構成されることとした。　 In the first embodiment, the accommodation space of the excitation drive unit 15 is configured by the recess 11g formed in the pressure chamber plate 11a. *
一方、本変形例２では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｇと、ダイヤフラム１２に形成された凹部１２ａとによって構成される。凹部１１ｇの構成は、上記第１実施形態で説明したとおりである。凹部１２ａの構成は、上記変形例１で説明したとおりである。本変形例２に係る収容空間は、凹部１１ｇと凹部１２ａとが連なることによって構成される。なお、ダイヤフラム１２と圧力室プレート１１ａとの間に収容空間が形成されるという点では、上記第１実施形態と共通する。また、収容空間以外の構成は、上記第１実施形態で説明したとおりである。　 On the other hand, in the second modification, the accommodation space of the excitation drive unit 15 is constituted by a recess 11 g formed in the pressure chamber plate 11 a and a recess 12 a formed in the diaphragm 12. The configuration of the recess 11g is as described in the first embodiment. The configuration of the recess 12a is as described in the first modification. The accommodation space according to the second modification is configured by connecting the concave portion 11g and the concave portion 12a. In addition, it is common with the said 1st Embodiment in the point that an accommodation space is formed between the diaphragm 12 and the pressure chamber plate 11a. In addition, the configuration other than the accommodation space is as described in the first embodiment. *
本変形例２においても、凹部１１ｇ及び凹部１２ａ内の収容空間に配置された加振用駆動部１５によって、圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 Also in the second modification, the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodating space in the concave portion 11g and the concave portion 12a. In addition, it is possible to improve the fluidity of the liquid agent discharged from the discharge port 11f. *
［第２実施形態］　第２実施形態に係る液剤塗布装置１０Ａの構成について、図５を参照しながら説明する。第２実施形態に係る液剤塗布装置１０Ａは、加振用駆動部１５が配置される収容空間がノズル１１ｂ側に形成される点において、第１実施形態に係る液剤塗布装置１０と相違する。以下、当該相違点について主に説明する。　 [Second Embodiment] A configuration of a liquid agent coating apparatus 10A according to a second embodiment will be described with reference to FIG. The liquid agent coating apparatus 10A according to the second embodiment is different from the liquid agent application apparatus 10 according to the first embodiment in that an accommodation space in which the excitation drive unit 15 is disposed is formed on the nozzle 11b side. Hereinafter, the difference will be mainly described. *
（１）液剤貯留部１１　圧力室プレート１１ａのノズル側表面１１Ｔには、凹部１１ｈが形成される。凹部１１ｈは、加振用駆動部１５が配置される収容空間を構成する。凹部１１ｈ内の収容空間は、ノズル１１ｂと圧力室プレート１１ａとの間に形成される。凹部１１ｈ内の収容空間は、ノズル１１ｂのうち圧力室プレート１１ａに接続される外縁部分によって塞がれる。凹部１１ｈ内の収容空間は、液密かつ気密であることが好ましい。　 (1) Liquid agent storage part 11 The recessed part 11h is formed in the nozzle side surface 11T of the pressure chamber plate 11a. The recess 11h constitutes an accommodation space in which the excitation drive unit 15 is disposed. The accommodation space in the recess 11h is formed between the nozzle 11b and the pressure chamber plate 11a. The accommodation space in the recess 11h is closed by the outer edge portion of the nozzle 11b connected to the pressure chamber plate 11a. The housing space in the recess 11h is preferably liquid-tight and air-tight. *
本実施形態において、凹部１１ｈは、ノズル側表面１１Ｔに平行な投影視において、加圧用圧電素子２０の周囲を取り囲む。凹部１１ｈは、加圧用駆動部１３の一部のみを取り囲んでいてもよいし、加圧用駆動部１３の全周を取り囲んでいてもよい。凹部１１ｇは、加振用駆動部１５に対応する形状（すなわち、円環状、矩形環状、Ｃ字状、馬蹄形状など）に形成することができる。シール１６は、圧力室プレート１１ａのノズル側表面１１Ｔに形成された環状凹部に配置される。　 In the present embodiment, the recess 11h surrounds the pressurizing piezoelectric element 20 in a projection view parallel to the nozzle side surface 11T. The concave portion 11 h may surround only a part of the pressing drive unit 13 or may surround the entire circumference of the pressing drive unit 13. The recess 11g can be formed in a shape corresponding to the vibration drive unit 15 (that is, an annular shape, a rectangular shape, a C shape, a horseshoe shape, etc.). The seal 16 is disposed in an annular recess formed in the nozzle side surface 11T of the pressure chamber plate 11a. *
（２）加振用駆動部１５　加振用駆動部１５は、圧力室プレート１１ａに形成された凹部１１ｈ内の収容空間に配置される。加振用駆動部１５は、ノズル１１ｂ及び圧力室プレート１１ａ（具体的には、凹部１１ｈの底面）のそれぞれに接触する。本実施形態において、加振用駆動部１５は、ノズル１１ｂによって圧力室プレート１１ａ側（すなわち、凹部１１ｈの底面側）に付勢さ
れる。　 (2) Excitation drive unit 15 The excitation drive unit 15 is disposed in the accommodating space in the recess 11h formed in the pressure chamber plate 11a. The vibration drive unit 15 contacts each of the nozzle 11b and the pressure chamber plate 11a (specifically, the bottom surface of the recess 11h). In the present embodiment, the vibration drive unit 15 is biased toward the pressure chamber plate 11a (that is, the bottom surface of the recess 11h) by the nozzle 11b.
加振用駆動部１５の第１端部１５ｐは、圧力室プレート１１ａ（具体的には、凹部１１ｈの底面）に接続される。第１端部１５ｐは、固定端である。加振用駆動部１５の第２端部１５ｑは、ノズル１１ｂに接触する。ただし、第２端部１５ｑは、ノズル１１ｂに接続されてもよい。　 The first end 15p of the excitation drive unit 15 is connected to the pressure chamber plate 11a (specifically, the bottom surface of the recess 11h). The first end 15p is a fixed end. The second end 15q of the vibration drive unit 15 is in contact with the nozzle 11b. However, the second end 15q may be connected to the nozzle 11b. *
本実施形態において、加振用駆動部１５は、加振用圧電素子２１のみを含んでおり、第１実施形態にて説明した第１中間部材２２を含んでいない。加振用圧電素子２１の構成は、第１実施形態で説明したとおりである。加振用圧電素子２１は、ダイヤフラム１２に平行な投影視において、加圧用圧電素子２０の全周を取り囲む。　 In the present embodiment, the excitation drive unit 15 includes only the excitation piezoelectric element 21 and does not include the first intermediate member 22 described in the first embodiment. The configuration of the vibrating piezoelectric element 21 is as described in the first embodiment. The vibrating piezoelectric element 21 surrounds the entire circumference of the pressurizing piezoelectric element 20 in a projection view parallel to the diaphragm 12. *
加振用圧電素子２１は、制御部１７から印加される加振用電圧信号に応じて伸縮（振動）する。加振用電圧信号が印加された加振用圧電素子２１は、微小な加振振動を圧力室プレート１１ａに加える。　 The excitation piezoelectric element 21 expands and contracts (vibrates) in accordance with the excitation voltage signal applied from the control unit 17. The excitation piezoelectric element 21 to which the excitation voltage signal is applied applies minute excitation vibration to the pressure chamber plate 11a. *
（特徴）　第２実施形態において、液剤塗布装置１０Ａは、ノズル１１ｂと圧力室プレート１１ａとの間の収容空間に配置される加振用駆動部１５を備える。収容空間は、圧力室プレート１１ａに形成された凹部１１ｈによって構成される。加振用駆動部１５は、加圧用電圧信号よりも周波数の高い加振用電圧信号の印加に応じて振動する加振用圧電素子２１を有する。従って、圧力室プレート１１ａを介して圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 (Characteristics) In the second embodiment, the liquid agent application device 10A includes the vibration drive unit 15 disposed in the accommodation space between the nozzle 11b and the pressure chamber plate 11a. The accommodation space is configured by a recess 11h formed in the pressure chamber plate 11a. The excitation drive unit 15 includes an excitation piezoelectric element 21 that vibrates in response to application of an excitation voltage signal having a frequency higher than that of the pressurization voltage signal. Accordingly, since the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated via the pressure chamber plate 11a, the fluidity of the entire liquid agent can be improved and the liquid material discharged from the discharge port 11f can be cut out. Can be improved. *
［第２実施形態の変形例１］　第２実施形態の変形例１について、図６を参照しながら説明する。　 [First Modification of Second Embodiment] A first modification of the second embodiment will be described with reference to FIG. *
上記第２実施形態では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｈによって構成されることとした。　 In the second embodiment, the accommodation space of the excitation drive unit 15 is configured by the recess 11h formed in the pressure chamber plate 11a. *
一方、本変形例１では、加振用駆動部１５の収容空間は、ノズル１１ｂに形成された凹部１１ｋによって構成される。凹部１１ｋは、ノズル１１ｂのうち圧力室プレート１１ａに接続される外縁部分に形成される。凹部１１ｋ内の収容空間は、圧力室プレート１１ａによって塞がれる。凹部１１ｋ内の収容空間は、液密かつ気密であることが好ましい。なお、ノズル１１ｂと圧力室プレート１１ａとの間に収容空間が形成されるという点では、上記第２実施形態と共通する。また、収容空間以外の構成は、上記第２実施形態で説明したとおりである。　 On the other hand, in the first modification, the accommodation space of the excitation drive unit 15 is configured by the recess 11k formed in the nozzle 11b. The recessed part 11k is formed in the outer edge part connected to the pressure chamber plate 11a among the nozzles 11b. The accommodation space in the recess 11k is closed by the pressure chamber plate 11a. The housing space in the recess 11k is preferably liquid-tight and air-tight. Note that the second embodiment is the same as the second embodiment in that an accommodation space is formed between the nozzle 11b and the pressure chamber plate 11a. The configuration other than the accommodation space is as described in the second embodiment. *
本変形例１においても、凹部１１ｋ内の収容空間に配置された加振用駆動部１５によって、圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 Also in the first modification, the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration drive unit 15 disposed in the accommodation space in the recess 11k, so that the fluidity of the entire liquid agent is improved. In addition, it is possible to improve the liquid breakage of the liquid agent discharged from the discharge port 11f. *
［第２実施形態の変形例２］　第２実施形態の変形例２について、図７を参照しながら説明する。　 [Second Modification of Second Embodiment] A second modification of the second embodiment will be described with reference to FIG. *
上記第２実施形態では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｈによって構成されることとした。　 In the second embodiment, the accommodation space of the excitation drive unit 15 is configured by the recess 11h formed in the pressure chamber plate 11a. *
一方、本変形例２では、加振用駆動部１５の収容空間は、圧力室プレート１１ａに形成された凹部１１ｈと、ノズル１１ｂに形成された凹部１１ｋとによって構成される。凹部１１ｈの構成は、上記第２実施形態で説明したとおりである。凹部１１ｋの構成は、上記変形例１で説明したとおりである。本変形例２に係る収容空間は、凹部１１ｈと凹部１１ｋとが連なることによって構成される。ただし、ノズル１１ｂと圧力室プレート１１ａとの間に収容空間が形成されるという点では、上記第２実施形態と共通する。また、収容空間以外の構成は、上記第２実施形態で説明したとおりである。　 On the other hand, in the second modification, the accommodation space of the excitation drive unit 15 is configured by a recess 11h formed in the pressure chamber plate 11a and a recess 11k formed in the nozzle 11b. The configuration of the recess 11h is as described in the second embodiment. The configuration of the recess 11k is as described in the first modification. The accommodation space according to the second modification is configured by connecting the concave portion 11h and the concave portion 11k. However, the second embodiment is the same as the second embodiment in that an accommodation space is formed between the nozzle 11b and the pressure chamber plate 11a. The configuration other than the accommodation space is as described in the second embodiment. *
本変形例２においても、凹部１１ｈ及び凹部１１ｋ内の収容空間に配置された加振用駆動部１５によって、圧力室プレート１１ａ内の液剤全体を加振振動させることができるため、液剤全体の流動性を向上させるとともに、吐出口１１ｆから吐出される液剤の液切れ性を向上させることができる。　 Also in the second modification, the entire liquid agent in the pressure chamber plate 11a can be vibrated and vibrated by the vibration driving unit 15 disposed in the accommodating space in the concave portion 11h and the concave portion 11k. In addition, it is possible to improve the fluidity of the liquid agent discharged from the discharge port 11f. *
［他の実施形態］　本発明は上記の実施形態によって記載したが、この開示の一部をなす論述及び図面はこの発明を限定すると理解すべきではない。この開示から当業者には様々な代替実施形態、実施例及び運用技術が明らかとなる。　 [Other Embodiments] Although the present invention has been described according to the above-described embodiments, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art. *
上記第１及び第２実施形態において、加振用駆動部１５は、圧力室プレート１１ａ側に付勢されることとしたが、圧力室プレート１１ａ側に付勢されなくてもよい。　 In the first and second embodiments, the vibration drive unit 15 is biased toward the pressure chamber plate 11a, but may not be biased toward the pressure chamber plate 11a. *
上記第１及び第２実施形態において、加振用駆動部１５は、圧力室プレート１１ａに接続されることとしたが、圧力室プレート１１ａと接触してもよい。　 In the first and second embodiments, the vibration driving unit 15 is connected to the pressure chamber plate 11a, but may be in contact with the pressure chamber plate 11a. *
上記第１及び第２実施形態において、加振用圧電素子２１は、投影視において加圧用圧電素子２０の周囲を取り囲むこととしたが、加圧用圧電素子２０の周囲を取り囲んでいなくてもよい。例えば、加振用圧電素子２１は、直線状に形成されてもよいし、離散状にランダム配置されてもよい。　 In the first and second embodiments, the vibrating piezoelectric element 21 surrounds the pressurizing piezoelectric element 20 in a projected view, but does not have to surround the pressurizing piezoelectric element 20. . For example, the exciting piezoelectric elements 21 may be formed in a straight line or may be randomly arranged in a discrete manner. *
上記第１実施形態において、加振用駆動部１５は、第１中間部材２２を有することとしたが、加振用圧電素子２１と面接触し、かつ、圧力室プレート１１ａと線接触する第２中間部材を有してもよい。また、上記第２実施形態において、加振用駆動部１５は、第１中間部材２２を有さないこととしたが、第１中間部材２２を有してもよいし、上述した第２中間部材を有してもよい。 In the first embodiment, the vibration drive unit 15 includes the first intermediate member 22. However, the vibration drive unit 15 is in surface contact with the vibration piezoelectric element 21 and is in line contact with the pressure chamber plate 11 a. You may have an intermediate member. In the second embodiment, the vibration drive unit 15 does not include the first intermediate member 22, but may include the first intermediate member 22, or the second intermediate member described above. You may have.
１０，１０Ａ　　　液剤塗布装置１１　　　液剤貯留部１１ａ　　圧力室プレート１１ｂ　　ノズル１１ｃ　　圧力室１１ｄ　　液剤供給路１１ｅ　　液剤排出路１１ｆ　　吐出口１１ｇ，１１ｈ，１１ｋ　　凹部１２　　　ダイヤフラム１２ａ　　凹部１３　　　加圧用駆動部１４　　　固定部材１５　　　加振用駆動部１７　　　制御部１８　　　ヘッド２０　　　加圧用圧電素子２１　　　加振用圧電素子２２　　　第１中間部材  10, 10A, liquid application device 11, liquid storage 11a, pressure chamber plate 11b, nozzle 11c, pressure chamber 11d, liquid supply path 11e, liquid discharge path 11f, discharge port 11g, 11h, 11k, recess 12, diaphragm 12a, recess 13 and pressurizing drive member 14 Vibration drive unit 17, control unit 18, head 20, pressurization piezoelectric element 21, excitation piezoelectric element 22, first intermediate member

Claims (13)

  1. 液剤を貯留するための圧力室が形成された圧力室プレートと、前記圧力室に連なる吐出口が形成されたノズルとを有する液剤貯留部と、　前記液剤貯留部内の容積を変化させるダイヤフラムと、　前記ダイヤフラム上に配置される加圧用駆動部と、　前記ダイヤフラムと前記圧力室プレートとの間、又は、前記ノズルと前記圧力室プレートとの間の収容空間に配置される加振用駆動部と、を備え、　前記加圧用駆動部は、加圧用電圧信号の印加に応じて前記ダイヤフラムを加圧振動させる加圧用圧電素子を有し、　前記加振用駆動部は、前記加圧用電圧信号よりも周波数の高い加振用電圧信号の印加に応じて振動する加振用圧電素子を有する、液剤塗布装置。 A liquid agent reservoir having a pressure chamber plate in which a pressure chamber for storing the liquid agent is formed, a nozzle having a discharge port connected to the pressure chamber, a diaphragm for changing the volume in the liquid agent reservoir, and A pressurizing drive unit disposed on the diaphragm, and an excitation drive unit disposed in a housing space between the diaphragm and the pressure chamber plate, or between the nozzle and the pressure chamber plate. The pressurizing drive unit includes a pressurizing piezoelectric element that pressurizes and vibrates the diaphragm in response to application of the pressurizing voltage signal, and the excitation driving unit has a frequency higher than that of the pressurizing voltage signal. A liquid application device having an excitation piezoelectric element that vibrates in response to application of a high excitation voltage signal.
  2. 前記収容空間は、前記圧力室プレートに形成された凹部によって構成される、請求項１に記載の液剤塗布装置。 The liquid agent coating apparatus according to claim 1, wherein the housing space is configured by a recess formed in the pressure chamber plate.
  3. 前記収容空間は、前記ダイヤフラムに形成された凹部によって構成される、請求項１に記載の液剤塗布装置。 The liquid agent coating apparatus according to claim 1, wherein the housing space is configured by a recess formed in the diaphragm.
  4. 前記収容空間は、前記ダイヤフラムに形成された第１凹部と、前記圧力室プレートに形成された第２凹部とによって構成される、請求項１に記載の液剤塗布装置。 2. The liquid application device according to claim 1, wherein the housing space is configured by a first recess formed in the diaphragm and a second recess formed in the pressure chamber plate.
  5. 前記収容空間は、前記ノズルに形成された凹部によって構成される、請求項１に記載の液剤塗布装置。 The liquid agent coating apparatus according to claim 1, wherein the housing space is configured by a recess formed in the nozzle.
  6. 前記収容空間は、前記ノズルに形成された第３凹部と、前記圧力室プレートに形成された第４凹部とによって構成される、請求項１に記載の液剤塗布装置。 2. The liquid application device according to claim 1, wherein the housing space is configured by a third recess formed in the nozzle and a fourth recess formed in the pressure chamber plate.
  7. 前記加振用駆動部は、前記ダイヤフラム及び前記圧力室プレートのそれぞれに接触する、請求項１から４のいずれかに記載の液剤塗布装置。 5. The liquid application device according to claim 1, wherein the excitation driving unit is in contact with each of the diaphragm and the pressure chamber plate.
  8. 前記加振用駆動部は、前記ダイヤフラムによって前記圧力室プレート側に付勢される、請求項７に記載の液剤塗布装置。 The liquid agent coating apparatus according to claim 7, wherein the excitation driving unit is urged toward the pressure chamber plate by the diaphragm.
  9. 前記加振用駆動部は、前記ノズル及び前記圧力室プレートのそれぞれに接触する、請求項１，２，５，６のいずれかに記載の液剤塗布装置。 The liquid application device according to claim 1, wherein the excitation driving unit is in contact with each of the nozzle and the pressure chamber plate.
  10. 前記加振用駆動部は、前記ノズルによって前記圧力室プレート側に付勢される、請求項９に記載の液剤塗布装置。 The liquid agent application device according to claim 9, wherein the excitation driving unit is urged toward the pressure chamber plate by the nozzle.
  11. 前記加振用駆動部は、前記加振用圧電素子と面接触し、かつ、前記ダイヤフラム又はノズルと線接触する第１中間部材を有する、請求項１から１０のいずれかに記載の液剤塗布装置。 The liquid application device according to any one of claims 1 to 10, wherein the excitation drive unit includes a first intermediate member that is in surface contact with the excitation piezoelectric element and is in line contact with the diaphragm or the nozzle. .
  12. 前記加振用駆動部は、前記加振用圧電素子と面接触し、かつ、前記圧力室プレートと線接触する第２中間部材を有する、請求項１から１１のいずれかに記載の液剤塗布装置。 The liquid application device according to any one of claims 1 to 11, wherein the excitation driving unit includes a second intermediate member that is in surface contact with the excitation piezoelectric element and is in line contact with the pressure chamber plate. .
  13. 前記加振用圧電素子は、投影視において、前記加圧用圧電素子を取り囲む、請求項１乃至１２のいずれかに記載の液剤塗布装置。 The liquid application device according to claim 1, wherein the excitation piezoelectric element surrounds the pressurizing piezoelectric element in a projected view.
PCT/JP2019/005825 2018-02-23 2019-02-18 Liquid agent application device WO2019163706A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018030727 2018-02-23
JP2018-030727 2018-02-23

Publications (1)

Publication Number Publication Date
WO2019163706A1 true WO2019163706A1 (en) 2019-08-29

Family

ID=67687762

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/005825 WO2019163706A1 (en) 2018-02-23 2019-02-18 Liquid agent application device

Country Status (2)

Country Link
TW (1) TW201936268A (en)
WO (1) WO2019163706A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002143746A (en) * 2000-11-08 2002-05-21 Matsushita Electric Ind Co Ltd Device and method for supplying fluid
JP2004142333A (en) * 2002-10-25 2004-05-20 Canon Inc Inkjet recording device
JP2007203515A (en) * 2006-01-31 2007-08-16 Brother Ind Ltd Liquid droplet jet apparatus
JP2008229530A (en) * 2007-03-22 2008-10-02 Seiko Epson Corp Droplet ejecting method and device manufacturing method
JP2011098295A (en) * 2009-11-06 2011-05-19 Seiko Epson Corp Foreign substance generation test method and foreign substance generation test apparatus
WO2018173592A1 (en) * 2017-03-24 2018-09-27 日本電産株式会社 Droplet ejection device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002143746A (en) * 2000-11-08 2002-05-21 Matsushita Electric Ind Co Ltd Device and method for supplying fluid
JP2004142333A (en) * 2002-10-25 2004-05-20 Canon Inc Inkjet recording device
JP2007203515A (en) * 2006-01-31 2007-08-16 Brother Ind Ltd Liquid droplet jet apparatus
JP2008229530A (en) * 2007-03-22 2008-10-02 Seiko Epson Corp Droplet ejecting method and device manufacturing method
JP2011098295A (en) * 2009-11-06 2011-05-19 Seiko Epson Corp Foreign substance generation test method and foreign substance generation test apparatus
WO2018173592A1 (en) * 2017-03-24 2018-09-27 日本電産株式会社 Droplet ejection device

Also Published As

Publication number Publication date
TW201936268A (en) 2019-09-16

Similar Documents

Publication Publication Date Title
US11578715B2 (en) Pump
US7911112B2 (en) Ultrasonic actuator
WO2013018579A1 (en) Ultrasound transducer
US10069440B2 (en) Vibrator and ultrasonic motor
JP2013057246A (en) Fluid control device
JP3951998B2 (en) Liquid transfer device
WO2013051400A1 (en) Ultrasonic-wave generation device
US9641104B2 (en) Actuator
JP2005333749A (en) Ultrasonic vibrator and ultrasonic motor using the same
WO2019163706A1 (en) Liquid agent application device
WO2019163705A1 (en) Liquid agent application device
WO2018173592A1 (en) Droplet ejection device
JPWO2018180006A1 (en) Droplet ejection device
JP2000058934A (en) Ultrasonic motor, and electronic apparatus fitted therewith
WO2019064781A1 (en) Liquid agent application apparatus
JP2007306799A (en) Ultrasonic actuator
WO2022070549A1 (en) Fluid control device
CN111094001A (en) Liquid coating device
WO2019064782A1 (en) Liquid agent application device
WO2019064770A1 (en) Liquid agent application device
JP2021014789A (en) Liquid application device
US7453189B2 (en) Piezoelectric transformer
JP2008303805A (en) Diaphragm air pump
JP2007060888A (en) Two-dimensional moving device
JP6774222B2 (en) Vibration wave motor and optical device using vibration wave motor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19757849

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19757849

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP