WO2018173221A1 - Wicket, wicket conveyor and wicket conveyor drying device - Google Patents

Abstract

This wicket (96) comprises: a bottom plate (53) of elongated shape which has a through-hole (101); and a guide part (81) which is affixed to the bottom plate (53), guides the insertion and removal of an object to be conveyed, and supports the sides of the object to be conveyed. The guide part (81) has a base part (87) affixed to the bottom plate (53). The bottom plate (53) affixes the base part (87) by means of the through-hole (101).

Description

Wicket, wicket conveyor and wicket conveyor drying device

The present invention relates to a wicket capable of supporting a plurality of conveyed objects such as substrates. And it is related with the drying apparatus which carries multiple wickets on a conveyor, conveys a conveyed product, and dries it in a drying chamber.

In the conventional wicket, the portion that supports the bottom of the substrate, which is a conveyed product, is flat (for example, Patent Document 1).

Japanese Utility Model Publication No. 63-7795 Japanese Unexamined Patent Publication No. 63-101213 JP-A-3-288709 Japanese Utility Model Publication No. 6-32424 JP-A-9-280734 JP 2014-101155 A

Since the wicket is attached to the conveyor and transports the conveyed product, durability that can withstand vibration from the conveyor is required.

For example, the main object of the present invention is to provide a wicket with improved durability.

Also, the main object of the present invention is to provide, for example, a wicket conveyor and a wicket conveyor drying apparatus using the wicket.

The wicket of the present invention is
A longitudinal bottom plate having a through hole;
A pair of guide portions that are fixed to the bottom plate and guide the insertion / extraction of the conveyed product.
Each guide portion of the pair of guide portions has a floor portion fixed to the bottom plate,
The bottom plate fixes the floor portion in the through hole.

According to the present invention, since the bottom plate fixes the floor portion in the through hole, the bottom plate and the floor portion can be securely fixed, and the durability of the wicket is improved.

FIG. 5 shows the first embodiment, and is a partial perspective view (exploded view) of a wicket. FIG. 5 shows the first embodiment, and is a partial perspective view after the assembly of the wickets. Fig. 5 shows the first embodiment, and is a side view showing a wicket attachment state. It is a figure which shows Embodiment 1, and is a side view of a wicket conveyor drying apparatus. Fig. 5 shows the first embodiment, and is a plan view of a wicket conveyor drying apparatus. It is a figure which shows Embodiment 1, and the whole figure of a wicket ((a) is a top view, (b) is a front view). FIG. 5 is a diagram illustrating the first embodiment and is a diagram illustrating a support slot and a conveyed product ((a) is a plan view, (b) is a front view, and (c) is a side view of the conveyed product). FIG. 5 shows the first embodiment and is a plan view of a support slot. FIG. 5 shows the first embodiment and shows the sheet metal before the cover plate is assembled. FIG. 5 shows the first embodiment, and shows a sheet metal before assembly of the bottom plate. FIG. 4 shows the first embodiment, and shows a sheet metal before assembly of the right guide portion. FIG. 3 shows the first embodiment and shows a cross section of the wicket. FIG. 3 shows the first embodiment and shows a cross section of the wicket. FIG. 3 shows the first embodiment and shows a cross section of the wicket. FIG. 5 shows the first embodiment, and shows a case where the angle φ of the top cover portion is an acute angle. FIG. 5 shows the first embodiment, and shows a case where the angle φ of the top cover portion is an obtuse angle. FIG. 5 shows the first embodiment, and shows an example in which the deepest part is shifted from the center of the top cover part. FIG. 3 shows the first embodiment and shows a cross section of the wicket. FIG. 3 shows the first embodiment and shows a cross section of the wicket. It is a figure which shows Embodiment 1, and the front view and top view of a wicket. Fig. 5 shows the first embodiment, and is a side view showing a wicket attachment state. The figure which shows Embodiment 1 and is a side view which shows the dimensional relationship of a wicket. The figure which shows Embodiment 1 and is a side view which shows the dimensional relationship of a wicket. It is a figure which shows Embodiment 2, and is a partial perspective view (exploded view) of a wicket. FIG. 5 shows the third embodiment and shows a cover plate. It is a figure which shows Embodiment 4, and is a partial perspective view (exploded view) of a wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket. FIG. 5 shows the fourth embodiment and shows a cross section of the wicket.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of each embodiment, the directions such as “up”, “down”, “left”, “right”, “front”, “back”, “front”, “back” are However, it is not intended to limit the arrangement or orientation of devices, instruments, parts, or the like.
For convenience of explanation, for example, when it is not necessary to distinguish between the left guide portion 71 and the right guide portion 81 of the pair of guide portions, “left” and “right” are omitted, and simply referred to as “guide portion”. .
In addition, when it is not necessary to distinguish between “left” and “right” for the names of the components constituting the left guide portion 71 and the right guide portion 81, “left” and “right” are omitted. The name will be used.
In addition, components having the same structure but different arrangement positions are indicated by the same numerals and different lowercase letters such as “73a” and “73b”. In addition, when it is not necessary to distinguish the arrangement position, the lowercase letters (“a”, “b”) are omitted, and only the numerals (“73”) are used.

Embodiment 1 FIG.
(Composition of wickets)
FIG. 1 is a partial perspective view (exploded view) of the wicket 96.
The wicket 96 includes a longitudinal bottom plate 53, a plurality of guide pairs, and a cover plate 30. In FIG. 1, the cover plate 30 is removed. The “guide pair” refers to a pair of guide portions 551 (the left guide portion 71 and the right guide portion 81).
A plurality of guide pairs are attached to the bottom plate 53 of the wicket 96 in the longitudinal direction (row direction). The number of guide pairs is not limited.
The guide pair is provided on the bottom plate 53 on a straight line. The bottom plate 53 has a bottom portion 55 and a rear surface portion 56.
The bottom plate 53 is attached to a chain conveyor described later by bolts 92. And the wicket 96 moves by the conveyor in the direction of arrow S (row direction).

The right guide portion 81 includes a right front portion 83, a right rear portion 84, and a right side portion 82 that form a U-shaped right guide groove 88. The conveyed product is inserted into and removed from the right guide groove 88. Here, the conveyed product is, for example, a plate-shaped object such as a silicon wafer. Further, the right side portion 82 includes a right side plate 85 and a right tongue portion 86 (right guide piece). Further, the right front portion 83 and the right rear portion 84 have an air hole 40. The number of the air holes 40 is not limited.
The right guide portion 81 has a floor portion 87. The floor portion 87 has a positioning hole 89a and a positioning hole 89b. The positioning hole 89 a is fitted with a convex portion 80 a provided in the bottom portion 55, and the positioning hole 89 b is fitted with a convex portion 80 b provided in the bottom portion 55. And the floor part 87 and the bottom part 55 are fixed by welding in the center welding part 41b of the positioning hole 89a and the positioning hole 89b.
Moreover, the right front part 83 and the bottom part 55 may be fixed by welding in the welding part 41a.
In addition, when the location which welds the right guide part 81 and the baseplate 53 increases, since the deformation | transformation of the baseplate 53 will occur easily, for example, it is desirable that the number of welding parts which weld the baseplate 53 is small.

The structure of the left guide portion 71 is the same as that of the right guide portion 81. That is, in the same way as the right guide portion 81, the left guide portion 71 also forms a U-shaped left guide groove 78 by the left front portion 73, the left rear portion 74, and the left side portion 72. Further, the left side portion 72 has a left side plate 75 and a left tongue portion 76 (left guide piece).
And although illustration is abbreviate | omitted, the left guide part 71 also has the floor part 87. FIG. The structure of this floor portion is the same as that of the right guide portion 81. The floor portion and the bottom portion 55 of the left guide portion 71 are fixed by welding. Moreover, the left front part 73 and the bottom part 55 may be fixed by welding in the welding part 41c. Further, the left front part 73 and the left rear part 74 have an air hole 40.
In FIG. 2, FIG. 6, FIG. 7, and FIG. 8 described below, the floor portion, the positioning hole, and the convex portion are not shown.

The guide pair is fixed to the bottom plate 53. A portion (space) where the conveyed product is supported is referred to as a support slot 51.
As described above, the support slot 51 includes a guide pair in which the left guide groove 78 and the right guide groove 88 face each other. Hereinafter, the left guide groove 78 and the right guide groove 88 are collectively referred to as “guide grooves”. These left guide portion 71 and right guide portion 81 are welded to the bottom plate 53, that is, the bottom portion 55 as described above. And in order to reinforce this welding stop, the front cover part 34 and the side part of the left guide part 71 are weld-stopped by the weld part 42n, and the front cover part 34 and the side part of the right guide part 81 are welded part 42m. It is welded. Moreover, the side part of the left guide part 71 and the right guide part 81 may be welded to the bottom part 55 by the welding part 41a and the welding part 41c.

The cover plate 30 includes a front cover part 34, a rear cover part 31, and a top cover part 36. The top cover part 36 is also long in the longitudinal direction of the bottom plate 53. The top cover 36 has an inclined surface 32 and an inclined surface 33. A concave portion 45 is formed by the inclined surface 32 and the inclined surface 33, and a portion where the inclined surface 32 and the inclined surface 33 are in contact becomes the deepest portion 35 of the concave portion 45 which is the most concave portion in the center. .
The cover plate 30 has a guide hole 44a and a guide hole 44b. Although illustrations other than the guide hole 44a and the guide hole 44b are omitted, the same number of guide holes as the guide pairs are provided. The guide hole 44a shown in FIG. 1 allows two guide portions (the right guide portion 81a and the left guide portion 71b) existing back to back to pass through. Here, the two guide portions existing back to back are the two guide portions that are disposed so that the side portions face each other. Therefore, when the cover plate 30 is attached to the bottom plate 53, the cover plate 30 has a guide hole 44a in a portion where the two guide portions exist back to back.
The cover plate 30 has two parallel sides (a cover side 28 and a cover side 29).

FIG. 2 is a partial perspective view of the wicket 96 after assembly.
The cover plate 30 is fixed to the bottom plate 53. More specifically, the cover plate 30 has both end sides of the cover plate 30 with respect to the bottom plate 53, a central side portion of the guide hole 44a in the cover plate 30, a central side portion of the guide hole 44b, and a front cover. Only the central side of each guide pair of the portion 34 is welded.
Here, in FIG. 2, the welding location of the both ends side part of the cover board 30 is the welding part 42a and the welding part 42b. In FIG. 2, only one end of both end portions of the cover plate 30 is shown and the other end is not shown, but the other end is the same.
Moreover, in FIG. 2, the welding location of the center side part of the guide hole 44a of the cover board 30 is the welding part 42c and the welding part 42d.
Moreover, in FIG. 2, the welding location of the center side part of the guide hole 44b of the cover board 30 is the welding part 42e and the welding part 42f.
In FIG. 2, only the guide hole 44 a and the guide hole 44 b are illustrated, but two central side portions are similarly welded for each guide hole that is not illustrated.
Moreover, in FIG. 2, the welding location of the center side part of each guide pair of the front cover part 34 is the welding part 421a and the welding part 421b.
In FIG. 2, only the welded portion 421a and the welded portion 421b are illustrated, but the central side portion of the front cover portion 34 is similarly welded for each guide pair not shown.
In addition, there is no welding part in the center side part of each guide pair of the rear cover part 31. FIG.
As described above, if there are many locations to be welded, for example, the cover plate 30 and the bottom plate 53 are deformed, and the linearity of the wicket 96 in the longitudinal direction is deteriorated. Therefore, it is preferable that the number of parts to be welded is small. Then, the cover plate 30 and the bottom plate 53 are welded only at both ends of the cover plate 30 and the bottom plate 53, the central side of the guide hole, and the central side of each guide pair of the front cover 34. The number of locations to be welded is minimized, and the joining strength between the cover plate 30 and the bottom plate 53 is maximized.
The top cover portion 36 of the cover plate 30 covers the bottom plate 53 between the guide pair (the left guide portion 71 and the right guide portion 81).

One support slot 51 includes a guide pair (left guide portion 71 and right guide portion 81) and a top cover portion 36 (dent portion 45).
As described above, the conveyed product 61 is inserted into and removed from the guide groove formed by the guide pair. That is, the guide pair guides insertion / extraction of the conveyed product 61 and supports the side portion 65 of the conveyed product 61.
And between the guide pair (the left guide part 71 and the right guide part 81), the recessed part 45 which the cover board 30 has supports the bottom part 63 of the conveyed product 61 in a longitudinal direction.
Both the left front part 73 and the left rear part 74 are opened 3 to 15 degrees, preferably about 6 degrees, outward from the surface perpendicular direction of the left side plate 75. As described above, the reason why the left front part 73 and the left rear part 74 are attached by opening 3 degrees to 15 degrees, preferably 6 degrees is that the transported object 61 supported by the guide groove is the left front part 73 or the left This is to prevent surface contact with the rear portion 74. By opening at an angle of 3 to 15 degrees, preferably 6 degrees, the left front part 73 or the left rear part 74 does not come into surface contact with the conveyed product 61, and the left front part 73 and the left rear part The part 74 is in contact with the side part 65 of the conveyed product 61 at a point. The same applies to the right front part 83 and the right rear part 84.
More specifically, the left front portion 73b shown in FIG. 2 contacts the side edge 66a of the conveyed product 61 at a point, and the right front portion 83b contacts the side edge 66b of the conveyed product 61 at a point. Here, the side edge of the transported object 61 is the side where the side part 65 of the transported object 61 and the front surface 67 of the transported object 61 are in contact, or the side part 65 of the transported object 61 and the rear surface 68 of the transported object 61. It is the side that touches.
An example of point contact between the right front part 83 and the side edge 66b of the conveyed product 61 will be described later.
In addition, the right front part 83 and the front cover part 34 are welded by the welding part 42m. However, when the right front part 83 and the bottom part 55 are welded by the above-mentioned welding part 41a, it does not need to be welded by the welding part 42m.
The left front part 73 and the front cover part 34 are welded by a welding part 42n. However, when the left front part 73 and the bottom part 55 are welded by the above-mentioned welding part 41c, it does not need to be welded by the welding part 42n.
Moreover, the bottom part 55 and the front cover part 34 are fixed by welding in the welding part 421a and the welding part 421b.
The welded part 421a and the welded part 421b exist in the middle of the pair of guide parts 551.
The bottom part 55 and the rear cover part 31 are not fixed in the middle of the pair of guide parts 551.
The left rear portion 74 and the rear cover portion 31 are not fixed.
The right rear portion 84 and the rear cover portion 31 are not fixed.
The bottom portion 55 and the rear cover portion 31 are fixed by welding only between a pair of adjacent guide portions 551.

(Wicket 96 attached)
FIG. 3 is a side view showing an attached state of the wicket 96.
The wickets 96 are attached to the chain conveyor with an interval K in the row direction of, for example, 25.4 mm. That is, the chain of the chain conveyor constitutes one unit with a size of 25.4 mm. The wicket 96 is attached to the chain belt by being inclined at an angle of 75 degrees rearward. Thus, the reason why the wicket 96 is attached with an inclination of 75 degrees is to efficiently dry the conveyed product 61.

(Description of wicket conveyor drying device 99)
FIG. 4 is a side view of the wicket conveyor drying device 99.
FIG. 5 is a plan view of the wicket conveyor drying apparatus 99.

The wicket conveyor drying device 99 includes a drying chamber 95 and a wicket conveyor 98. The wicket conveyor 98 includes a plurality of wickets 96 and a conveyor 97. The conveyor 97 uses a chain conveyor. One wicket 96 is attached to each chain of the chain conveyor. That is, a plurality of wickets 96 are attached to the entire periphery of the conveyor 97, and the wickets 96 are also circulated and moved by the circulating movement of the conveyor 97, so that the conveyed product 61 is conveyed.
The insertion position sensor 93 is provided on the side of the conveyor 97 in order to detect the insertion position of the conveyed product 61. The insertion position sensor 93 detects the position of the wicket 96 into which the conveyed product 61 can be inserted in the horizontal direction. That is, as shown in FIG. 4, it is detected that the wicket 96 has come to an angle θ or height H portion, and the conveyor 97 is stopped. The conveyed product 61 is inserted into the support slot 51 while the conveyor 97 is stopped.
On the other hand, when extracting the conveyed product 61 from the support slot 51, the removal position sensor 94 detects that the wicket 96 has an angle θ or a height H, and the conveyor 97 is stopped. While the conveyor 97 is stopped, the conveyed product 61 is extracted.
The stop of the conveyor 97 by the insertion position sensor 93 and the stop of the conveyor 97 by the removal position sensor 94 are alternately performed individually in order to enable accurate insertion and removal.

Inside the drying chamber 95, the conveyed product 61 is dried by hot air, warm air or air.
The airflow for drying is blown from the upper part of the support slot 51 toward the lower part of the support slot 51 or from the lower part of the support slot 51 toward the upper part of the support slot 51. Thus, it blows in the up-and-down direction in order to dry the some conveyed product 61 equally. When the air is blown from the left-right direction (longitudinal direction), the conveyed product 61 at both ends is easily dried, and the conveyed product 61 at the central portion is difficult to dry. The plurality of conveyed items 61 are evenly dried by blowing air in the vertical direction.
Furthermore, the left front part 73 and the left rear part 74, the right front part 83, and the right rear part 84 have the air holes 40, and the conveyed product 61 becomes easy to dry when the airflow passes through the air holes 40.

(Detailed explanation of wicket 96)
FIG. 6 is an overall view of the wicket 96. 6A is a plan view, and FIG. 6B is a front view.
FIG. 7 is a view showing the support slot 51 and the conveyed product 61. 7A is a plan view, FIG. 7B is a front view, and FIG. 7C is a side view of the conveyed product 61.
FIG. 8 is a plan view of the support slot 51.
FIG. 6B shows a state in which the wicket 96 is horizontal while the conveyed product 61 is inserted into the guide groove. That is, the state shown in FIG. 6B is the same as the state where the wicket 96 is located at the angle θ or the height H in FIG.

As shown in FIG. 6B, one wicket 96 is provided with four support slots 51 (guide pairs) in the longitudinal direction. That is, it is possible to transport four transport objects 61 with one wicket 96. As described above, the number of support slots 51 (guide pairs) provided in one wicket 96 is not limited.
The screw hole 90 is a hole into which, for example, the bolt 92 of FIG. 1 is fitted.
As shown in FIG. 6B, the right tongue portion 86 is attached in a form that opens 15 degrees outward from the surface of the right side plate 85. Thus, the reason why the right tongue portion 86 is opened outward is to adjust the insertion position of the conveyed product 61 when the conveyed product 61 is inserted so that the conveyed product 61 can easily enter the guide groove. The same applies to the left tongue 76.
That is, the left tongue portion 76 and the right tongue portion 86 guide the side portion 65 of the conveyed product 61 into the guide portion (inside the guide groove).
Further, when the wicket 96 is inclined and the conveyed product 61 moves in the guide portion, the side portion 65 of the conveyed product 61 slides on the surface of the left side plate 75. That is, the left side plate 75 slides the side portion 65 of the conveyed product 61 within the guide portion. The same applies to the right side plate 85.

Further, the upper side of the right front portion 83 has an inclined side 39, a horizontal side 38, and a tapered side 37 toward the center of the support slot 51 (guide pair). The same applies to the left front part 73, the left rear part 74, and the right rear part 84. Here, the right front part 83 will be described as an example.
When the transported object 61 is inserted into the support slot 51 (guide pair), the transported object 61 guided by the right tongue 86 has the side edge 66b slid by the inclined side 39, and the support slot 51 (guide pair). ) Move toward the center. That is, the inclined side 39 guides the conveyed product 61 guided by the right tongue 86 in the center direction of the support slot 51 (guide pair).
Further, when the conveyed product 61 moves in the longitudinal direction in the support slot 51 (in the guide pair) due to vibration or the like, the side edge 66 b of the conveyed product 61 slides while hitting the horizontal side 38. That is, the horizontal side 38 is a side on which the side end side 66b of the conveyed product 61 slides.

Here, a state in which the conveyed product 61 slides will be described with reference to FIG.
FIG. 7A is the same as the support slot 51 of FIG.
In FIG. 7C, only the conveyed product 61 and the top cover portion 36 are illustrated. FIG. 7C is a side view of FIG.
As shown in FIG. 7C, the bottom 63 of the conveyed product 61 is supported by the dent 45. Then, the wicket 96 is tilted horizontally, whereby the conveyed product 61 is tilted to the front side (right front portion 83 side).
The hatched portion of the conveyed product 61 in FIG. 7 (a) shows a cross-section at the DD section in FIGS. 7 (b) and 7 (c). And since the conveyed product 61 inclines to the front side, it is in the state which can see the rear surface 68 in (a) of FIG.
The same applies to the conveyed product 61 in FIG.

For example, as shown in (a) of FIG. 7 or (b) of FIG. 7, even when the conveyed product 61 is inserted not on the center of the support slot 51 but on the right guide portion 81 side, for example, The side edge 66b of the conveyed product 61 is slid by the inclined side 39 in the direction of the black arrow shown in FIG. 7A or FIG. Then, the side end side 66 b of the conveyed product 61 moves to the horizontal side 38.

6B, the inner end point distance (shortest distance) N between the horizontal side 38 of the left guide portion 71 and the horizontal side 38 of the right guide portion 81 is larger than the width I of the conveyed product 61. The outer end point distance (longest distance) M between the horizontal side 38 of the left guide portion 71 and the horizontal side 38 of the right guide portion 81 is smaller than the width I of the conveyed product 61. As a result, the side edge 66 a of the conveyed product 61 falls within the range of the horizontal side 38 of the left guide portion 71, and the side edge 66 b of the conveyed product 61 falls within the range of the horizontal side 38 of the right guide portion 81. .

Further, the tapered side 37 is a portion formed by chamfering the corner of the right front portion 83 so that the conveyed product 61 is not caught when the conveyed product 61 is inserted into the support slot 51 (guide pair). is there. Thereby, it becomes difficult for the conveyed product 61 to be damaged.

As shown in FIG. 6B, the distance G between the left guide portion 71 and the right guide portion 81 is smaller than the width I of the conveyed product 61. Further, the interval J between the left side plate 75 and the right side plate 85 is larger than the width I of the conveyed product 61.
Further, as shown in FIG. 6A, the width W of the left side plate 75 and the right side plate 85 is wider than the thickness of the conveyed product 61. In this way, the guide groove formed by the left guide portion 71 and the right guide portion 81 has a margin more than the width and thickness of the conveyed product 61. That is, the conveyed product 61 is not fixed by the left guide portion 71 and the right guide portion 81 but is held with a margin. Accordingly, when the conveyed product 61 is inserted into the support slot 51 (guide pair) or is being conveyed, the conveyed product 61 is inclined with respect to the support slot 51 (guide pair) (in FIG. 7). (State of description) or may be held in a twisted state. Alternatively, as the conveyor moves, the conveyed product 61 may move inside the support slot 51 (guide pair) in response to the vibration.

6B, the height E of the left guide portion 71 and the right guide portion 81 may be 50% or more of the height F of the conveyed product 61. However, the height E of the left guide portion 71 and the right guide portion 81 need not be higher than the height F of the conveyed product 61, and the height E of the left guide portion 71 and the right guide portion 81 can be Around 70% of the height F is desirable. The reason is that insertion and extraction of the conveyed product 61 are facilitated, and drying obstruction by the left guide portion 71 and the right guide portion 81 is reduced.

The height E of the left guide portion 71 and the right guide portion 81 is preferably around 70% of the height F of the conveyed product 61. When the conveyed product 61 is taken out, the left front portion 73 and the right front portion This is to ensure that the side portion 65 of the conveyed product 61 can be brought into point contact with 83.
Again, an example of point contact between the right front portion 83 and the side edge 66b of the conveyed product 61 will be described with reference to FIG. The same applies to the right rear portion 84, the left front portion 73, and the left rear portion 74.
As shown to (a) of FIG. 7, the right front part 83 and the side edge 66b of the conveyed product 61 are contacting in the contact location T (dotted circle part). Note that, as described above, the hatched portion of the conveyed product 61 in FIG. 7A shows a cross section of the DD portion in FIG. 7B and FIG. As shown in b) and (c) of FIG. 7, the conveyed product 61 protrudes higher than the contact location T.
7A and 7C, the contact point T is one point, and the conveyed product 61 (the side portion 65 or the side edge side). 66b) is in point contact with the right front portion 83 (the inclined side 39 of the right front portion 83).
The reason for the point contact is that the lower end (bottom part 63) of the conveyed product 61 is in the center of the V-shape (dent part 45) of the top cover part 36. If there is no V-shape (dent part 45) of the top cover part 36, the side edge 66b of the conveyed product 61 may be in line contact with the right front part 83.

6B shows a state in which the conveyed product 61 is inserted into the support slot 51 (guide pair) obliquely (the side edge 66a of the conveyed product 61 is in point contact with the left front portion 73, and the conveyed product 61 This is a state in which the side edge 66b is in point contact with the right front portion 83). In addition, as a state where the conveyed product 61 is inserted into the support slot 51 (guide pair) obliquely, a state where the conveyed product 61 is inserted while being twisted into the guide groove is also assumed.
When the transported object 61 is transported while being inserted into the support slot 51 (guide pair) at an angle, the bottom part 63 of the transported object 61 is caused by friction between the side portion 65 of the transported object 61 and the guide groove. If the conveyed product 61 is to be pulled out while being inserted obliquely (while being twisted and inserted) due to the friction with the bottom portion 55, it may not be able to be pulled out depending on the structure of the extracting device. Therefore, when the upper part of the conveyed product 61 is exposed as much as possible (30% to 50% of the height F of the conveyed product 61) and the wicket 96 is inclined in the horizontal direction as shown by the arrow D in FIG. The transported object 61 automatically makes point contact with the left front part 73 and the right front part 83 by the weight of the upper part of the transported object 61.
In this way, all of the conveyed product 61 comes to the same position in the support slot, so that there is no failure in extraction.

As shown in FIG. 8, both the left front portion 73 and the left rear portion 74 are opened about 15 degrees outward from the surface vertical direction of the left side plate 75. Similarly, the right front portion 83 and the right rear portion 84 are both opened about 15 degrees outward from the surface vertical direction of the right side plate 85.
That is, the distance between the left front portion 73 and the left rear portion 74 is gradually increased toward the center of the guide pair. The interval between the right front part 83 and the right rear part 84 is also the same.

Further, the left side portion 72 (left side plate 75) and the right side portion 82 (right side plate 85) are provided in the guide pair because the inserted transported object 61 moves to the left and right and the next transported object. This is so as not to overlap with 61. When one substrate is carried in by one wicket, there is no possibility that adjacent substrates overlap each other, so a left side portion 72 (left side plate 75) and a right side portion 82 (right side plate 85) are provided. There was no need.
That is, the left side portion 72 and the right side portion 82 support the side surface (side portion 65) of the conveyed product 61.

Further, the reason why the left rear portion 74 and the right rear portion 84 are provided in the guide pair is to prevent the inserted conveyed product 61 from falling backward. That is, the left rear portion 74 and the right rear portion 84 support the rear surface 68 of the conveyed product 61.
Further, the reason why the left front portion 73 and the right front portion 83 are provided in the guide pair is to prevent the inserted conveyed product 61 from falling forward. In particular, as shown by an arrow D in FIG. 4, when the wicket 96 falls forward due to rotation, the transported object 61 is kept until the wicket 96 is detected to be horizontal by the removal position sensor 94. It prevents falling forward. Without the left front part 73 and the right front part 83, the conveyed product 61 is rotated about 90 degrees from the vertical direction to the horizontal direction and falls. If a thin substrate such as a silicon wafer is rotated 90 degrees and dropped, the substrate may be damaged. In order to prevent the substrate from being damaged, the left front portion 73 and the right front portion 83 prevent the substrate from falling forward. That is, the left front part 73 and the right front part 83 support the front surface 67 of the conveyed product 61.
In the case of a wicket that transports a large substrate, it was not much aware that the substrate would break. Therefore, there was no idea of supporting the substrate in the front.

(Description of cover plate 30)
FIG. 9 is a view showing the sheet metal before the cover plate 30 is assembled.
For example, the cover plate 30 shown in FIG. 9 is obtained by flattening the bent portions of the cover plate 30 of FIG.
As described above, the cover plate includes the rear cover portion 31, the top cover portion 36 (the inclined surface 32 and the inclined surface 33), the front cover portion 34, and the guide hole 44.
The top cover portion 36 has two parallel sides (a cover side 28 and a cover side 29).
Further, the front cover part 34 is long in the longitudinal direction, and is provided from one side (cover side 29) of the top cover part 36. Further, the rear cover portion 31 is long in the longitudinal direction, and is provided from the other side (cover side 28) of the top cover portion 36.
The length of the short side of the rear cover part 31 is CB.
The length of the short side of the front cover part 34 is CF.

(Description of bottom plate 53)
FIG. 10 is a view showing a sheet metal before the bottom plate 53 is assembled.
For example, the bottom plate 53 shown in FIG. 10 is obtained by flattening the bent portions of the bottom plate 53 of FIG.
As described above, the bottom plate 53 has the bottom portion 55 and the rear surface portion 56.
The bottom 55 is elongated in the longitudinal direction and has two parallel sides (a bottom plate side 58 and a bottom plate side 59). In other words, the bottom part 55 has two sides which are parallel and consist of one side (bottom plate side 59) and the other side (bottom plate side 58).
Further, the rear surface portion 56 is long in the longitudinal direction of the bottom plate 53 and is provided from the other side of the bottom portion 55 (bottom plate side 58).
Furthermore, the bottom part 55 (bottom plate 53) has the convex part 80 in the position which attaches each guide part (the left guide part 71 and the right guide part 81).
The bottom 55 (bottom plate 53) has a through hole 101 formed on either side of the two convex portions.
The through hole 101 is formed between the two convex portions and beside the convex portion 80a closer to the side portion.

As described above, the bottom plate 53 has the long bottom portion 55 having two sides composed of a parallel side and the other side.
The bottom plate 53 has a long rear surface portion 56 provided to be inclined with respect to the bottom portion 55 from the other side of the bottom portion 55.
The bottom plate 53 has two convex portions 80 formed at positions corresponding to the two positioning holes 89.
The bottom plate 53 has a through hole 101 formed on either side of the two convex portions.

(Description of guide section)
FIG. 11 is a diagram illustrating the sheet metal before the right guide portion 81 is assembled.
For example, the right guide portion 81 shown in FIG. 11 is obtained by flattening the bent portions of the right guide portion 81 of FIG.
Here, the description is given by taking the right guide portion 81 as an example, but the same applies to the left guide portion 71.
As described above, the right guide portion 81 includes the right side portion 82 (the right side plate 85 and the right tongue portion 86), the right front portion 83, the right rear portion 84, and the floor portion 87.
The floor portion 87 has a positioning hole 89a into which the convex portion 80a provided in the bottom portion 55 is fitted, and a positioning hole 89b into which the convex portion 80b provided in the bottom portion 55 is fitted.
In the example of FIG. 11, the floor portion 87 is provided at the lower end of the right rear portion 84, but the floor portion 87 is one of the right side portion 82, the right front portion 83, and the right rear portion 84. What is necessary is just to be provided in the lower end.

A detailed configuration of the right guide portion 81 will be described with reference to FIG.
The meanings of the symbols shown in FIG. 11 are as follows.
W3: Horizontal length of right front portion 83 and right rear portion 84 W7: Horizontal length of air hole 40 W8: Horizontal length of inner frame 123 and outer frame 124 T3: Vertical length of air hole 40 T4: Vertical length of upper frame 121 and middle frame 122 T5 : Vertical length of the lower frame 125 of the right front portion 83 T6: Vertical length of the lower frame 135 of the right rear portion 84 TA: Vertical length from the lower side 126 of the air hole 40 to the horizontal side 38a of the upper frame 121 = The upper frame from the lower side 136 of the air hole 40 Vertical length to 121 horizontal side 38b TB: Vertical length of right rear portion 84 TC: Vertical length of right front portion 83

The ratio of the vertical length TC of the right front portion 83 to the horizontal length W3 of the right front portion 83 is 100: 45, and the vertical length TC of the right front portion 83 is twice or about twice the horizontal length W3 of the right front portion 83. .
The right front portion 83 includes an upper frame 121, a middle frame 122, and a lower frame 125.
The right front portion 83 has an inner frame 123 and an outer frame 124.
The upper frame 121 and the middle frame 122 have the same vertical length, which is the vertical length T4.
The inner frame 123 and the outer frame 124 have the same horizontal length, which is the horizontal length W8.
Upper and lower two air holes 40 are formed in the right front portion 83.
The vertical length T3 of the air hole 40 is four times the vertical length T4 of the horizontal frame.
The horizontal length of the air hole 40 is a horizontal length W7, which is 2.5 times the horizontal length W8 of the outer frame 124.

A right front portion 83 is on the left side of the right side plate 85, and a right rear portion 84 is on the right side of the right side plate 85.
The side base 140 of the right side plate 85 is inclined by an angle θ with respect to the horizontal direction.
An angle θ5 formed by the side bottom 140 and the right side plate 85 is (π / 2) + θ.
The left side of the right side plate 85 is longer than the right side of the right side plate 85 by tan θ · W.
The bottom 127 of the lower frame 125 is inclined downward from the end of the side bottom 140 by an angle θ1 from the horizontal direction, and the longitudinal length of the lower frame 125 increases as the distance from the right side plate 85 increases.
The vertical increase in the lower frame 125 is T9 = tan θ1 · W3.
The vertical length of the lower frame 125 at the right end of the base 127 is T5.
The vertical length of the lower frame 125 at the left end of the base 127 is T5 + T9.
The vertical length on the left side of the right side plate 85 is increased by T9 = tan θ1 · W3 from the vertical length on the right side plate 85.
The reason is that even if the right guide portion 81 is attached to the bottom plate 53 so as to be inclined and the right front portion 83 is opened outward from the surface vertical direction of the right side plate 85, the bottom 127 of the lower frame 125 is free from the bottom plate. This is to match the surface of 53.

The right rear portion 84 has the same configuration as that of the right front portion 83 except for the lower frame 135.
The ratio of the vertical length TB of the right rear portion 84 to the horizontal length W3 of the right front portion 83 is 95:45, and the vertical length TB of the right rear portion 84 is twice or about twice the horizontal length W3 of the right front portion 83. .
The vertical length T6 of the lower frame 135 is smaller than the vertical length T5 of the lower frame 125, and the vertical length T6 of the lower frame 135 is half the vertical length or almost half the vertical length of the lower frame 135.
The bottom side 137 of the lower frame 135 is inclined upward from the right end of the side bottom side 140 by an angle θ1 from the horizontal direction, and the vertical length of the lower frame 135 becomes smaller as the distance from the right side plate 85 increases.
The lengthwise decrease of the lower frame 135 is T9 = tan θ1 · W3.
The longitudinal length of the lower frame 135 at the left end of the base 137 is T6.
The vertical length of the lower frame 135 at the right end of the base 177 is T6-T9.
The vertical length on the right side of the right rear portion 84 is reduced by T9 = tan θ1 · W3 from the vertical length on the left side.
The vertical length on the right side of the lower frame 135 of the right rear portion 84 is smaller than the vertical length T6 on the left side by T9 = tan θ1 · W3.
The reason is that even if the right guide portion 81 is attached to the bottom plate 53 so as to be inclined and the right rear portion 84 opens outward from the surface vertical direction of the right side plate 85, the bottom side 137 of the lower frame 135 has no gap. This is to match the surface of 53.

The entire area of the right front portion 83 is 2.475 times the area of the air hole 40.
The overall area of the right rear portion 84 is 2.36 times the ratio of the area of the air holes 40.
The total area of the front part is preferably 2.3 to 2.7 times the area of the air hole 40, and 2.5 times is preferable.
That is, the ratio of the entire area of the front portion to the area of the air hole 40 is in the range of 4.6: 2 to 5.4: 2, and 5: 2 is preferable.
The same applies to the rear part.

The right guide portion 81 has a floor portion 87 provided at the lower end of the right rear portion 84.
The floor portion 87 has a substantially rectangular trapezoidal shape.
One of the two long sides of the floor 87 is the bottom side 137 itself of the lower frame 135.
The other long side 138 of the floor portion 87 is slightly shorter than the bottom side 137 of the lower frame 135 on the left side where the right side plate 85 is located, and the length of the short side of the floor portion 87 is shorter than the length of the side bottom side 140. The reason is to prevent the corner of the floor portion 87 from colliding with the bottom 127 of the right front portion 83 when the right side plate 85 is bent on the left side.
The floor portion 87 has two positioning holes 89.
The two positioning holes 89 are formed below the two vertical frames (outer frame 124 and inner frame 123) in which the air holes 40 are formed.
The two positioning holes 89 exist outside the center line L of the floor portion 87 so that positioning is performed at the center between the right front portion 83 and the right rear portion 84.
That is, the positioning hole 89 a and the positioning hole 89 b are located at a position deviating from the center line L of the floor portion 87, away from the right rear portion 84, and located near the right front portion 83.
Here, the center line L of the floor 87 is a straight line parallel to the bottom 137 of the lower frame 135.
A welded portion 41b shown by a broken line is a normal plane portion corresponding to the through hole 101, and is not a particularly processed portion.
The welded portion 41 b is between the two positioning holes 89. For this reason, the two positioning holes 89 are difficult to come off.
The welding part 41b is located beside the positioning hole 89b close to the right side plate 85. For this reason, it can fix firmly rather than the welding part 41b being on the side of the positioning hole 89a.
The center of the welded portion 41 b exists outside the center line L of the floor portion 87 so that positioning is performed at the center between the right front portion 83 and the right rear portion 84.

The configuration of the left guide portion 71 is also as shown in FIG. The left guide part 71 is manufactured by bending the right front part 83, the right rear part 84, and the floor part 87 in front of the paper surface of FIG. 11 with the broken line of the right guide part 81 shown in FIG. Can do.

(Description of cross-sectional shape of wicket 96)
FIG. 12 is a view showing a cross section of the wicket 96.
FIG. 12 shows the AA cross section of FIG. Here, the AA cross section is a cross section orthogonal to the longitudinal direction of the wicket 96.
The bottom plate 53 has an L-shaped cross-sectional shape by a bottom portion 55 and a rear surface portion 56.
The inclination angle of the rear surface portion 56 with respect to the bottom portion 55 is “180 degrees−75 degrees = 105 degrees” and (π / 2) + θ.

On the other hand, the cover plate 30 has an M-shaped cross-sectional shape by the rear cover portion 31, the top cover portion 36 (the inclined surface 32 and the inclined surface 33), and the front cover portion 34.
And the top cover part 36 (the inclined surface 32 and the inclined surface 33) has V-shaped cross-sectional shape. Note that the cross-sectional shape of the top cover portion 36 may be U-shaped. In other words, the dent 45 may be formed by the top cover 36.
The front cover part 34 is provided from one piece (cover side 29) of the top cover part 36 toward one side (bottom plate side 59) of the bottom part 55 so as to cover the front space 100, and the rear cover part 31 is provided on the top cover part 36. It is provided from the other side (cover side 28) toward the other side (bottom plate side 58) of the bottom 55 so as to cover the rear surface part 56. The rear cover part 31 is lower in height than the front cover part 34.
And the dent part 45 is formed of the top cover part 36 (the inclined surface 32 and the inclined surface 33). The inclined surface 32 and the inclined surface 33 form an angle φ.
The inclined surface 33 forms an angle α1 with respect to a surface (horizontal plane) parallel to the bottom 55, and the inclined surface 32 forms an angle β1 with respect to a surface parallel to the bottom 55. The angle β1 is 0 (zero) degree or more, and the angle α1 is larger than the angle β1. That is, the relationship of “angle α1> angle β1 ≧ 0 (zero)” is established.
When the angle β1 is equal to or greater than 0 (zero) degree, the conveyed product 61 is hardly displaced to the rear side (right rear portion 84).
The angle θ5 between the right rear portion 84 and the floor portion 87 is (π / 2) + θ.
The inclination angles of the rear cover portion 31 and the front cover portion 34 with respect to the horizontal direction are also “180 degrees−75 degrees = 105 degrees” and (π / 2) + θ.

(Welded part 42)
The bottom 55 has a bottom surface 155 and a top surface 156.
The bottom surface 155 is an attachment surface attached to the conveyor 97 and is a flat surface.
The upper surface 156 is a fixed surface that fixes the support slot 51 and is a flat surface.

As shown in FIG. 12, the bottom side 311 of the rear cover portion 31 is above the bottom surface 155 of the bottom portion 55, and a welded portion 421 a and a welded portion 42 d exist at the lower portion of the side surface of the rear surface portion 56. Therefore, the unevenness of the welded portion 421a and the welded portion 42d does not occur below the bottom surface 155 of the bottom portion 55.
The bottom side 341 of the front cover part 34 is at the end of the upper surface 156 of the bottom part 55, and the welded part 42 c exists between the bottom side 341 of the front cover part 34 and the upper surface 156 of the bottom part 55. Therefore, the unevenness of the welded portion 42 c does not occur below the bottom surface 155 of the bottom portion 55.
Since there is no weld on the bottom surface 155 of the bottom portion 55, the bottom surface 155 of the bottom portion 55 can be kept flat, the bottom plate 53 can be securely attached to the conveyor 97, and the durability of the wicket 96 is improved.

As described above, the cover plate 30 covers the bottom plate 53 between the support slots 51.
The cover plate 30 has a recess 45 that supports the bottom 55 of the conveyed product in the longitudinal direction between the support slots 51.
The cover plate 30 has an M-shaped cross-sectional shape orthogonal to the longitudinal direction.
The cover plate 30 has a long front cover portion 34 provided toward one side of the bottom portion 55 so as to cover the front surface from one side of the top cover portion 36.

(Convex 80 and positioning hole 89a)
FIG. 13 is a view showing a cross section of the wicket 96.
FIG. 13 shows a BB cross section of FIG.
A convex portion 80a provided on the bottom portion 55 is fitted into the positioning hole 89a.
By fitting the convex portion 80a into the positioning hole 89a, positioning during assembly can be performed.
Furthermore, in FIG. 13, the convex part 80a is welded to the positioning hole 89a. By the welded portion 103, the protruding portion of the convex portion 80a and the edge of the positioning hole 89a are fixed.
This welding is performed from the surface of the bottom portion 55, that is, the surface of the floor portion 87.

(Through hole 101 and weld 105)
FIG. 14 is a view showing a cross section of the wicket 96.
FIG. 13 shows an EE cross section of FIG.
The floor portion 87 and the bottom portion 55 are welded to each other at the through hole 101.
In FIG. 14, the floor portion 87 is welded to the inner peripheral wall 10 of the through hole 101 in the bottom portion 55. The floor portion 87 is fixed to the bottom portion 55 by the welded portion 105.
This welding is performed from the bottom surface of the bottom portion 55, that is, the back surface of the floor portion 87.
Since the bottom plate 53 fixes the floor portion 87 in the through hole 101, the bottom plate 53 and the floor portion 87 can be reliably fixed and the durability of the wicket 96 is improved as compared with the case where there is no through hole 101.
Since the floor portion 87 is welded to the inner peripheral wall of the through hole 101 of the bottom portion 55, there is no unevenness of the welded portion 105 below the bottom surface 155 of the bottom portion 55. Thus, since the bottom surface 155 of the bottom 55 can be kept flat, the bottom plate 53 can be reliably attached to the conveyor 97, and the durability of the wicket 96 is improved.

(Ventilation structure)
As shown in FIG. 14, the height from the bottom surface 155 of the wicket 96 to the upper side of the lower frame 135 in which the air hole 40 of the right rear portion 84 is formed is the same as the height T <b> 12 of the rear cover portion 31.
Since the upper side of the lower frame 135 is the lower side 136 of the air hole 40, the height from the bottom surface 155 of the wicket 96 to the lower side 136 of the air hole 40 is the same as the height T12 of the rear cover part 31.
The height from the bottom surface 155 of the wicket 96 to the upper side 561 of the rear surface portion 56 is not more than the height to the cover side 28 of the rear cover portion 31, and is not more than the height T12.
T12 = height of the lower frame 135 = height of the lower side 136 of the air hole 40 = height of the rear cover portion 31 ≧ height of the rear surface portion 56 The vertical length T6 of the lower frame 135 is larger than the width CB of the rear cover portion 31. .
Here, the height T12 is
T12 = T6 · cos θ + thickness of bottom 55 ≧ CB · cos θ + thickness of bottom 55

The height from the bottom surface 155 of the wicket 96 to the upper side of the lower frame 125 in which the air hole 40 of the right front portion 83 is formed is the same as the height T11 of the front cover portion 34.
Since the upper side of the lower frame 125 is the lower side 126 of the air hole 40, the height from the bottom surface 155 of the wicket 96 to the lower side 126 of the air hole 40 is the same as the height T11 of the rear cover portion 31.
T11 = height of the lower frame 125 = height of the lower side 126 of the air hole 40 = height of the front cover portion 34 The vertical length T5 of the lower frame 125 and the width CF of the front cover portion 34 are the same length.
Here, the height T11 is
T11 = T5 · cos θ + thickness of bottom 55 = CF · cos θ + thickness of bottom 55

Therefore, as indicated by the arrows, the entire surface of the air hole 40 is opened and air permeability is good.
In particular, since the air holes 40 are present at the lower end of the conveyed product 61, the air permeability of the lower end of the conveyed product 61 is good.

In addition, the height of the rear cover part 31 and the height of the front cover part 34 are lowered,
T12 = height of the lower frame 135 = height of the lower side 136 of the air hole 40> height of the rear cover 31 ≧ height of the rear surface part T11 = height of the lower frame 125 = height of the lower side 126 of the air hole 40> The height of the front cover portion 34 may be used.
That is, the height of the lower side 136 of the air hole 40 in the rear portion may be equal to or higher than the height of the rear cover portion 31.
Further, the height of the lower side 126 of the air hole 40 in the front portion may be equal to or higher than the height of the front cover portion 34.

(Angle φ of the top cover 36)
FIG. 15 is a diagram illustrating a case where the angle φ of the top cover portion 36 is an acute angle.
FIG. 16 is a diagram illustrating a case where the angle φ of the top cover portion 36 is an obtuse angle.
15 and 16 correspond to the AA cross section of FIG.
As shown in FIGS. 15 and 16, the dent 45 supports the bottom 63 of the conveyed product 61.
And when the wicket 96 is conveyed by the conveyor 97, the conveyed product 61 in the wicket 96 vibrates or moves. When the angle φ is an acute angle (FIG. 15), the friction between the conveyed product 61 and the top cover portion 36 increases, and cracks are likely to occur at the bottom 63 of the conveyed product 61. In particular, cracks are likely to occur at the bottom end side 69 a and the bottom end side 69 b of the conveyed product 61.
On the other hand, when the angle φ is an obtuse angle (FIG. 16), the friction between the conveyed product 61 and the top cover portion 36 is relieved, and the occurrence of cracks can be prevented.
Specifically, the angle φ may be 100 degrees or more and 170 degrees or less. Furthermore, the angle φ is desirably 115 degrees or more and 125 degrees or less. The angle φ is preferably 120 degrees.

(Center of top cover 36)
FIG. 17 is a diagram illustrating an example in which the deepest portion 35 is shifted from the center of the top cover portion 36.
As shown in FIG. 17, the deepest portion 35 may be shifted from the center of the top cover portion 36. For example, the deepest portion 35 may be shifted from the center of the top cover portion 36 to the front side (right front portion 83 side). By doing in this way, the conveyed product 61 becomes easy to incline to the rear side (right rear part 84 side). And in all the support slots 51, if the conveyed product 61 inclines to the rear side (if the inclination direction of the conveyed product 61 is unified), the removal operation | work of the conveyed product 61 will become easy.

(Caulking portion 104 and positioning hole 89)
18 is a view showing a BB cross section of the wicket 96 shown in FIG.
In FIG. 18, a caulking portion 104 is provided on the top of the convex portion 80, and the top is deformed so as to cover the edge of the positioning hole 89 by caulking. By the caulking portion 104, the protruding portion of the convex portion 80 and the edge of the positioning hole 89 are fixed.
This caulking is performed from the surface of the bottom 55, that is, the surface of the floor 87.

(Through hole 101 and convex part 180)
FIG. 19 is a view showing an EE cross section of the wicket 96 shown in FIG.
In FIG. 19, a convex portion 180 protruding from the back surface is formed on the floor portion 87, the convex portion 180 is fitted into the through hole 101, and the convex portion 180 is welded to the inner peripheral wall of the through hole 101. The floor portion 87 is fixed to the bottom portion 55 by the welded portion 105. This welding is performed from the bottom surface 155 of the bottom portion 55, that is, the back surface of the floor portion 87.
Since the bottom surface 155 of the bottom portion 55 is a flat surface fixed to the conveyor 97, the welded portion 105 is prevented from projecting below the bottom surface 155 of the bottom portion 55. Therefore, the height of the convex portion 180 protruding from the back surface to the floor portion 87 is set to be less than the height of the through hole 101.

(Conveyed items of different sizes)
FIG. 20 is a front view and a plan view of the wicket 96.
With reference to FIG. 20, a case for transporting transported objects having different sizes will be described.
As shown in FIG. 20, one wicket 96 is provided with four support slots 51 (guide pairs) in the longitudinal direction. That is, it is possible to transport four transport objects 61 with one wicket 96.
The wicket 96 is capable of transporting transported objects having different widths from the minimum width K1 to the maximum width K2.

As described above, the wicket 96 has the bottom plate 53 having a longitudinal shape.
The wicket 96 has a support slot 51 (a pair of guide portions 551) fixed to the bottom plate 53.
The support slot 51 guides insertion / extraction of the conveyed product and supports the side portion of the conveyed product.
The support slot 51 has a left guide portion 71 and a right guide portion 81.
The left guide portion 71 includes a left side portion 72 that supports the side surface of the conveyed product, a left front portion 73 that supports the front surface of the conveyed product, and a left rear portion 74 that supports the rear surface of the conveyed product.

Here, the support slot 51 is a support slot for transporting different sizes of transported objects.
The conveyed product 161 is a horizontally long substrate K1 and a vertically long substrate H1.
The conveyed product 162 is a horizontally long substrate K2 and a vertically long substrate H2.
In FIG. 20, the support slot 51 is capable of transporting a transported object 161 having a minimum lateral length K1 to a transported object 162 having a maximum lateral length K2.
In addition, the support slot 51 can transport a transported object 161 having a minimum vertical length H1 to a transported object 162 having a maximum vertical length H2.
The conveyed product 162 is 1.5 times or less in size in the portrait and landscape directions, and the support slot 51 is configured to accommodate a conveyed product having a size of 1 to 1.5 times in portrait or landscape. It is a support slot to convey.
Maximum horizontal length K2 / Minimum horizontal length K1 = 1.5
Maximum vertical length H2 / Minimum vertical length H1 = 1.5
Specifically, the transported object 161 is a 125 mm × 125 mm square substrate, the transported object 162 is a square substrate of 156 mm × 156 mm, and the transported object 162 is a transported object in each of a portrait and a landscape. It is 1.25 times as large as 161.

The meanings of the symbols shown in FIG. 20 are as follows.
W1: Length from the center of the left end support slot 51 to the end of the wicket 96 W2: Distance between support slots 51 G: Length of space 110 = distance between left guide portion 71 and right guide portion 81 J: Left side plate 75 and distance between right side plate 85 W5: distance between screw holes 90 W6: total length of wicket 96 W9: guide width

T1: Height of support slot 51 = height of wicket 96 E: Height of left side portion 72 and right side portion 82

H1: Minimum vertical length of transported object H2: Maximum vertical length of transported object K1: Minimum horizontal length of transported object K2: Maximum horizontal length of transported object

S1: Length of short side of wicket 96 S3: Maximum width of support slot 51 (S1 ≧ S3)
W: Minimum width of the support slot 51 (S1 ≧ S3> W)

(Supports left and right of the transported item)
As shown in FIG. 20A, the distance J between the two side portions of the support slot 51 is larger than the maximum lateral length K2 of the conveyed product.
That is, the interval J between the left side plate 75 and the right side plate 85 is larger than the maximum lateral length K2 of the conveyed product.
Therefore, both the conveyed product 161 and the conveyed product 162 can be inserted into the support slot 51.

As shown in FIG. 20A, the guide width W9 of the right front portion 83 is longer than the length K3 obtained by subtracting the lateral length K1 of the conveyance object 161 having the minimum width from the distance J between the two side portions of the support slot 51. Is also big.
Therefore, when the transported object 161 having the minimum width is arranged to be shifted to the left, the transported object 161 is supported by the right front portion 83 by at least the laterally long K4 (K4 = K1- (W9 + G)).
Since the length of the right rear portion 84 from the right side portion 82 is also the guide width W9, the conveyed product 161 is supported by the right rear portion 84 by at least the lateral length K4 (K4 = K1- (W9 + G)).
Thus, even if the conveyed product 161 is arranged to be deviated to the left, the conveyed product 161 is not detached because the right end of the conveyed product 161 is supported by the right front portion 83 and the right rear portion 84.
Similarly, even if the transported object 161 is arranged to be shifted to the right, the left end of the transported object 161 is supported by the left front part 73 and the left rear part 74, so that the transported object 161 does not come off.

When the transported object 162 having the maximum width is arranged to be deviated from side to side, the end of the transported object 162 is supported at least by the horizontally long K6 (K6 = K2− (W9 + G)). There is no.

In order to support the conveyed product 161 by at least the horizontally long K4,
K4 = K1− (W9 + G).
When the minimum lateral length K4 for supporting the conveyed product 161 is 1 mm, the minimum lateral length K1 of the conveyed product is 125 mm, and the distance G between the left guide portion 71 and the right guide portion 81 is 80 mm,
1 = 125- (W9 + 80)
W9 = 125-1-80 = 44
Thus, the guide width W9 is 44 mm.
As described in FIG. 6, the side edge 66 a of the conveyed product 61 is within the range of the horizontal side 38 of the left guide portion 71, and the side edge 66 b of the conveyed product 61 is within the range of the horizontal side 38 of the right guide portion 81. It is desirable to fit within. For this purpose, the minimum lateral length K4 that supports the conveyed product 161 may be set to be equal to or greater than the lateral length of the tapered side 37 in the horizontal direction.

As shown in FIG. 8, both the right front portion 83 and the right rear portion 84 are opened outward from the surface vertical direction of the right side plate 85, and this angle is θ2.
θ2 is as follows.
tan θ2 = ((S3-w) / 2) / W9
When the minimum width W of the support slot 51 is 10 mm, the maximum width S3 of the support slot 51 is 20 mm, and the guide width W9 is 44 mm,
tan θ2 = ((20−10) / 2) / 44
tan θ2 = 5 / 44≈0.1136
And
tan (6.38 degrees) ≈0.1136
θ2 = 6.38 degrees.

The relationship between the laterally long W3 and the guide width W9 of the right front part 83 and the right rear part 84 is
cos θ2 = W9 / W3
Because
W3 = W9 / cos θ2
W3 = 44 / cos (6.38 degrees)
W3 = 44 / 0.9938≈44.27
Thus, the lateral length W3 of the right front part 83 and the right rear part 84 may be set to 44.27 mm.

(Non-contact structure on top of the transported item)
The non-contact structure of the upper part of the conveyed product will be described with reference to FIG.
The wicket conveyor 98 has a plurality of wickets 96 attached to the conveyor 97.
The length of the bottom side (short side) of the wicket 96 is the length S1.
The wickets 96 are equally arranged in the row direction at intervals K.
The length S <b> 1 of the bottom (short side) of the wicket 96 is smaller than the interval K between the wickets 96.
The wicket 96 is fixed to the conveyor 97 while being inclined by an angle θ.
The wicket 96 conveys the conveyed product in an inclined manner.
The wicket 96 conveys conveyed items having different heights from the minimum vertical length H1 to the maximum vertical length H2.

When the wicket 96 is used in a wicket conveyor drying device, in order to dry the conveyed product, it is preferable to reduce the height of the wicket 96 to increase the degree of exposure of the conveyed item.
However, the wicket 96 must be transported so that front and rear transported objects do not come into contact with each other.
Therefore, the height of the wicket 96 is such that the conveyed item 162 conveyed by the previous wicket 96 and the conveyed item 162 conveyed by the subsequent wicket 96 are not in contact with the conveyed item 162 having the maximum longitudinal length H2. have.

When the conveyed product 161 inserted in the front row of wickets 96 is tilted backward and the conveyed product 161 inserted in the rear row of wickets 96 is tilted forward, the upper end of the conveyed product 161 does not come into contact.
Similarly, when the conveyed product 162 inserted into the front row of wickets 96 is tilted backward and the conveyed product 162 inserted into the rear row of wickets 96 is tilted forward, the upper end of the conveyed product 162 does not come into contact.
In this way, the wicket 96 has a height T1 such that the upper end of the maximum vertically long conveyed product 162 does not come into contact.

The height T1 of the wicket 96 is a height at which the tip of the conveyed product in the wicket 96 tilted in the traveling direction does not contact the tip of the conveyed product in the wicket 96 tilted in the direction opposite to the traveling direction. It is.

(Dimensional relation 1)
Details of the dimensional relationship will be described with reference to FIG.
A rectangle B1 and a rectangle B2 indicated by broken lines indicate a virtual maximum arrangement space of the support slot 51 in which the conveyed product 162 can be arranged.
The positions of the upper two points in the maximum arrangement space are equal to the positions where the horizontal side 38a and the horizontal side 38b are farthest apart.
Two points at the lower part of the maximum arrangement space are on both sides of the top cover part 36, and are equal to a position where the lower side 126 and the lower side 136 of the air hole 40 are farthest from each other.
As shown in FIG. 22B, the short side length BX of the rectangle B1 and the rectangle B2 is equal to the maximum width S3 of the support slot 51. Further, the length BY of the long sides of the rectangle B1 and the rectangle B2 is equal to the longitudinal length TA from the lower side 126 of the air hole 40 of the right guide portion 81 to the horizontal side 38a of the upper frame 121.

When the transported object 162 inserted in the front row of wickets 96 tilts most backward in the maximum arrangement space, and the transported object 162 inserted in the back row wicket 96 tilts most forward in the maximum arrangement space, Do not allow the objects 162 to contact each other.
The intersection of the transported object 162 inserted in the front row wicket 96 and inclined most backward and the transported object 162 inserted in the back row wicket 96 and tilted most forward becomes a contact point on the upper part of the transported object.
Therefore, in order not to bring the conveyed items 162 into contact with each other, it is only necessary to increase the length BY of the long side of the maximum arrangement space and move the intersection of the conveyed items upward.

In FIG. 22, the meaning of each point is as follows.
P0 (0, 0): origin of the two-dimensional coordinate system with the horizontal axis X in the row direction and the vertical axis Y in the height direction = the position of the lower side of the transported object 162 that is inserted in the front row of wickets 96 and tilted to the rearmost side P1 (X1, Y1): Position of the horizontal side 38b of the right rear portion 84 P3 (X4, Y4): Intersection P4 (X5, Y5): Position of the upper side of the transported object 162 that is inserted into the front row of wickets 96 and tilted most backward. Q0 (X2, Y2): the position of the lower side of the transported object 162 that is inserted into the rear row wicket 96 and tilted most forward Q1 (X3, Y3): the position of the horizontal side 38a of the right front portion 83 Q2 (X6, Y6) rear row The position of the upper side of the transported object 162 inserted in the wicket 96 and tilted forward most α: Inclination of the transported object 162 in the front row with respect to the horizontal axis X = (Y1 / X1)
β: Inclination of the rear row transported object 162 with respect to the horizontal axis X = (Y3-Y2) / (X3-X2)
C: Y coordinate of the intersection of the vertical axis Y and the extended line of the transported object 162 in the rear row

FIG. 22A shows a state in which the lower end of the conveyed product 162 is at the point P0 of the rectangle B1 and the conveyed product 162 passes through the point P1. That is, the case where the conveyed product 162 exists on the diagonal line of the rectangle B1 is shown, and the conveyed product 162 is inclined most backward. An angle formed between the transported object 162 and the horizontal plane in a state where the transported object 162 is inclined most backward is defined as an angle α.
Moreover, the case where the conveyed product 162 inserted in the back row wicket 96 inclines forward is shown. An angle formed between the transported object 162 and the horizontal plane in a state where the transported object 162 is inclined forward is defined as an angle β.

The front row conveyed object 162 exists on the diagonal line of the rectangle B1, and is expressed by the following expression.
Y = α · X Equation 1
= (Y1 / X1) · X Equation 2

The rear row transported object 162 exists on the diagonal line of the rectangle B2, and is expressed by the following expression.
Y = β · X + C Equation 3
= ((Y3-Y2) / (X3-X2)). X + C (4)

The intersection P4 (X4, Y4) between the transported object 162 in the front row and the transported product 162 in the back row is as follows.
The front row transport 162 is
Y4 = α · X4
It is expressed.
The transported item 162 in the rear row is
Y4 = β · X4 + C
It is expressed.
Therefore,
α · X4 = β · X4 + C
(Α-β) · X4 = C
X4 = C / (α−β)
Thus, X4 is obtained.
And since Y4 = α · X4,
Y4 = α · C / (α−β)
Thus, Y4 is obtained.
Therefore, P4 (X4, Y4) is
P4 (C / (α-β), α · C / (α-β))
It is.

Note that C can be calculated by substituting (X2, Y2) into Equation 3.
Y2 = β · X2 + C
C = Y2-β · X2 Equation 5

Substituting C in Equation 5 into P4 (C / (α−β), α · C / (α−β)),
P4 ((Y2-β · X2) / (α-β), α · (Y2-β · X2) / (α-β))
It becomes.

The length ML from the point P1 as the origin to the intersection P4 is as follows.
ML
= √ (X4 · X4 + Y4 · Y4)
= √ [{(Y2-β · X2) / (α-β)} · {(Y2-β · X2) / (α-β)} +
{Α · (Y 2 −β · X 2) / (α−β)} · {α · (Y 2 −β · X 2) / (α−β)}] Equation 6

When the length of the transported object 162 is equal to or longer than the length ML, the transported object 162 in the rear row is touched. On the other hand, when the length of the transported object 162 is less than the length ML, the transported object 162 in the rear row is not touched.

From Equation 6, it can be seen that the coordinates of the intersection point P4 are functions of α, β, X2, and Y2.
Since α, β, X2, and Y2 are functions of the long side length BY of the rectangle B1 and the short side length BX of the rectangle B1, the long side length BY and the short side length BX If ML is changed, the length ML changes.
Since the interval K between the wickets 96 is a fixed value, if the length BX of the short side of the rectangle B1 is also a fixed value, X2 and Y2 are fixed values.
Assuming that X2 and Y2 in Expression 6 are fixed values, it can be seen that the coordinates of the intersection point P4 are functions of α and β.
α and β can be obtained by the following equations.
α + γ + θ = (π / 2)
α = (π / 2) −γ−θ Equation 7
β-γ + θ = (π / 2)
β = (π / 2) + γ−θ Equation 8

As shown in FIG. 22B, the rectangle B1 has a long side length BY and a short side length BX.
tanγ = BX / BY
γ = arctan BX / BY
It is.
Substituting this into Equation 7 and Equation 8,
α = (π / 2) − (arctan BX / BY) −θ
β = (π / 2) + (arctan BX / BY) −θ
It becomes.
Here, BX is the maximum width S3 of the support slot 51, and BY is a vertically long TA from the lower side 126 of the air hole 40 to the horizontal side 38a of the upper frame 121.
α = (π / 2) − (arctanS3 / TA) −θ
β = (π / 2) + (arctanS3 / TA) −θ
Thus, α and β can be obtained from the maximum width S3 of the support slot 51, the vertically long TA, and the angle θ.

If the height BY of the rectangle B1, that is, the longitudinal length TA of the right guide portion 81 is increased, γ decreases and α increases and the intersection P4 moves upward.
Further, if the height BY of the rectangle B1, that is, the longitudinal length TA of the right guide portion 81 is increased, γ decreases, β decreases, and the intersection point P4 moves upward.
Since the position of the horizontal side 38a of the rectangle B1 is determined by the vertical length TC of the right front portion 83, if the vertical length TC of the right front portion 83 is increased, the intersection point P4 moves upward.
Since the position of the horizontal side 38b of the rectangle B1 is determined by the vertical length TB of the right rear portion 84, if the vertical length TB of the right rear portion 84 is increased, the intersection point P4 moves upward.

As described above, the vertical length TC of the right front portion 83 and the vertical length TB of the right rear portion 84 are set so that the ML expressed by Equation 6 is larger than the maximum vertical length of the conveyed product.
That is, because the vertical length TC of the right front portion 83 and the vertical length TB of the right rear portion 84 are larger than the maximum vertical length H2 of the conveyed product, the upper portion of the conveyed product does not contact.
As described above, since the height of the wicket 96 is preferably low for drying, the height of the wicket 96 may be a minimum height that satisfies Equation 6, and the minimum that satisfies Equation 6. A height of 1.1 times or less is preferable.

(Dimensional relationship 2)
With reference to FIG. 23, another dimensional relationship in which the upper part of the conveyed product does not contact will be described.
FIG. 23 illustrates a case where the leading edge of the front row transported object 162 does not touch the exposed portion of the rearward transported object 162 from the wicket 96.
A rectangle B1 and a rectangle B2 indicated by broken lines indicate a virtual maximum internal space of the support slot 51 in which the conveyed product 162 can be arranged.
The lengths of the short sides of the rectangle B1 and the rectangle B2 are equal to the maximum width S3 of the support slot 51.
The lengths of the long sides of the rectangles B1 and B2 are equal to the longitudinal length TA from the lower side 126 of the air hole 40 of the right guide portion 81 to the horizontal side 38a of the upper frame 121.

In order to prevent the conveyed items 162 from contacting each other when the conveyed items 162 inserted into the front row wickets 96 are inclined backward and the conveyed items 162 inserted into the rear row wickets 96 are inclined forward. Then, the specifications are as follows.
Specification 1: The transported object 162 in the front row does not exist after the point Q1 of the rectangle B2 in the rear row.
Specification 2: The rear row conveyance 162 does not exist before the point Q1 of the rear row rectangle B2.

<Specification 1>
In order to satisfy the specification 1, the following conditions are required.
The upper end point P4 of the transported object 162 in the front row only needs to exist before the point Q1 of the rectangle B2 in the rear row.
For this purpose, the horizontal length M8 between the lower leading end point P0 and the upper leading end point P4 of the transported object 162 in the front row is set to the horizontal length between the lower leading end point P0 and the point Q1 of the transported object 162. It may be smaller than M9.

FIG. 23A shows a state in which the lower end of the conveyed product 162 is at the point P0 of the rectangle B1 and the conveyed product 162 passes through the point P1. That is, the case where the conveyed product 162 exists on the diagonal line of the rectangle B1 is shown, and the conveyed product 162 is inclined most backward. An angle formed between the transported object 162 and the horizontal plane in a state where the transported object 162 is inclined most backward is defined as an angle α.
The horizontal length M8 between the lower tip point P1 and the upper tip point P4 of the conveyed product 162 is as follows.
M8 = H2 · cosα

The horizontal length M9 between the lower end point P1 and the point Q1 of the conveyed product 162 is K + N1.
The interval K is the interval of the wickets 96.
An angle formed by the rectangle B2 with the horizontal plane is defined as an angle δ.
N1 = TA · cos δ Equation 9
Here, since δ is (π / 2) −θ,
N1 = TA · cos ((π / 2) −θ)
Therefore,
M9 = K + TA · cos ((π / 2) −θ) Equation 10
It becomes.

Since M8 <M9 only needs to be satisfied, M8, which is the maximum horizontal value of the conveyed product 162, may be less than K + N1, and the relationship is as follows.
H2 · cos α <K + TA · cos ((π / 2) −θ) Equation 11

Since K and θ are fixed values, and α is a value that depends on TA, the longitudinal length H2 of the conveyed product 162 can be changed by changing the length of TA.
Changing the length of TA means changing the height of the wicket 96. Therefore, by changing the height of the wicket 96, it is possible to prevent the vertically long H2 conveyed product 162 from exceeding the point Q1.

<Specification 2>
In order to satisfy the specification 2, the following conditions are necessary.
FIG. 23B shows a case where the conveyed product 162 inserted into the rear row wicket 96 is tilted forward.
An angle formed between the transported object 162 and the horizontal plane in a state where the transported object 162 is inclined forward is defined as an angle β.
If the angle β is 90 degrees or less, the conveyed product 162 does not exist before the point Q1.
For that purpose, the point Q0 only needs to be ahead of the point Q1.
That is, length N2 <length M2 may be satisfied.

M2 = TA · cos δ
Here, since δ is π / 2−θ,
M2 = TA · cos (π / 2−θ)
It becomes.

N2 is as shown in FIG.
N2 = S3 · cos θ
It is.
If θ and S3 are fixed values, N2 is a fixed value.

Since length N2 <length M2 may be satisfied, the relationship is as follows.
S3 · cos θ <TA · cos (π / 2−θ)
(S3 · cos θ) / cos (π / 2−θ) <TA (12)

If TA satisfying Expression 12 is satisfied, the conveyed product 162 does not exist before the point Q1.
Changing the length of TA means changing the height of the wicket 96. Therefore, by changing the height of the wicket 96, the conveyed product 162 can be prevented from existing before the point Q1.

As described above, the wicket 96 has a length that satisfies both the TA that satisfies the above expression 11 and the TA that satisfies the above expression 12.

In this manner, the vertically long TA may be set so as to satisfy both the specifications 1 and 2.
Since the position of the horizontal side 38a of the rectangle B1 is determined by the vertical length TC of the right front portion 83, if the vertical length TC of the right front portion 83 is increased, a vertical length TA that satisfies both the specifications 1 and 2 can be realized.
Since the position of the horizontal side 38b of the rectangle B1 is determined by the vertical length TB of the right rear portion 84, if the vertical length TB of the right rear portion 84 is increased, a vertical TA that satisfies both the specifications 1 and 2 can be realized.

As described above, the longitudinal length TC of the right front portion 83 and the longitudinal length TB of the right rear portion 84 are set to lengths that can realize the longitudinal length TA that satisfies both the specifications 1 and 2.
That is, by ensuring the vertical length TC of the right front portion 83 and the vertical length TB of the right rear portion 84, the upper part of the conveyed product does not contact.
The height T1 of the wicket 96 is determined by the minimum length at which the longitudinal length TC of the right front portion 83 and the longitudinal length TB of the right rear portion 84 can satisfy the longitudinal length TA satisfying both the specifications 1 and the specifications 2.
As described above, since the height T1 of the wicket 96 is preferably low for drying, the height T1 of the wicket 96 is specified by the vertical length TC of the right front portion 83 and the vertical length TB of the right rear portion 84. It is sufficient that the vertical length TA satisfying both 1 and specification 2 can be realized, and the height T1 of the wicket 96 is preferably 1.1 times or less the minimum length.

(Effect of Embodiment 1)
Since the wicket 96 has the dent portion 45 that supports the bottom 63 of the conveyed product 61, the light, small, and thin conveyed product 61 moves in the support slot 51 and does not shift. And it is possible to convey the conveyed product 61 within the support slot 51 without being damaged.
Further, since the rear cover portion 31 and the front cover portion 34 of the cover plate 30 are also provided between the support slot and the support slot, the entire wicket 96 is reinforced and deformation such as twisting of the wicket 96 is less likely to occur. .

Although the case where the wicket 96 has four support slots 51 (guide pairs) has been described in the above embodiment, it is sufficient that there are two or more support slots 51 (guide pairs).
Further, in this embodiment, the case where the bottom plate 53 also serves as the bottom portion 55 is shown, but the bottom portion 55 may be separately provided in addition to the bottom plate 53.
The material of the wicket 96 may be any material as long as it can withstand the heat of the drying chamber 95, but stainless steel is particularly preferable. Stainless steel is not easily rusted, and has the advantage that it is easy to insert and remove because the friction with the side of the substrate is small when the substrate is inserted and removed.

Also, different sizes of conveyed items can be conveyed depending on the shape of the support slot 51.
Even if the support slot 51 is tilted and attached to the bottom plate 53, the bottom side 127 of the lower frame 125 and the bottom side 137 of the lower frame 135 are inclined, so that the support slot 51 can be accurately attached to the bottom plate 53. .
Further, when the floor 87 is fixed to the bottom plate 53, the support slot 51 is securely fixed to the bottom plate 53 because the floor 87 is fixed from both the bottom surface 155 of the bottom 55 and the top surface of the floor 87. And the durability of the wicket 96 is improved.
Moreover, since there is no welding part in the bottom part 55 of the baseplate 53, and the bottom part 55 maintains the plane, the wicket 96 can be reliably attached to the conveyor 97, and durability of the wicket 96 improves.

In this embodiment, the case where a chain conveyor is used is shown, but another conveyor may be used.
Further, in this embodiment, the case of a drying device is shown, but it may be a case of a cleaning device, a coating device, or a simple conveying device.
Moreover, in this embodiment, the case where a silicon wafer is conveyed was shown, but a ceramic substrate, a printed circuit board, or another substrate may be conveyed, or another metal plate, a plastic plate, or a resin plate Anything can be handled as long as it can be inserted into the support slot 51 (guide pair).
The shape of the conveyed product is not limited to a rectangular shape, but may be a polygonal shape, a circular shape, or other complicated shapes.

Embodiment 2. FIG.
In the present embodiment, differences from the first embodiment will be mainly described.
FIG. 24 is a partial perspective view (exploded view) of the wicket 96.
The wicket 96 according to the second embodiment is different from the first embodiment only in the cover plate 30.
The cover plate 30 of the second embodiment is fixed only between the left guide part 71 and the right guide part 81. The same number of cover plates 30 as the number of support slots 51 (guide pairs) are provided for one wicket 96.
The cover plate 30 is fixed to the bottom plate 53 by welding at least one front cover portion 34 and the front surface portion 54 and welding at least one rear cover portion 31 and the rear surface portion 56.
Even in such a configuration, since the wicket 96 has the dent portion 45 that supports the bottom 63 of the conveyed product 61, the lightweight, small, and thin conveyed product 61 does not move or drop. And it is possible to convey the conveyed product 61 without destroying.

Embodiment 3 FIG.
In the present embodiment, differences from the first embodiment will be mainly described.
FIG. 25 is a view showing the cover plate 30.
The wicket 96 of the third embodiment is different from the first embodiment only in the cover plate 30.
The cover plate 30 of the third embodiment has a guide hole 44 having a shape in which the left guide groove 78 of the left guide portion 71 and the right guide groove 88 of the right guide portion 81 are matched.
In other words, the top cover part 36 has a shape that matches the left guide part 71 and the right guide part 81.
Since the top cover part 36 (guide hole 44) has such a shape, the length for supporting the bottom part 63 of the conveyed product 61 becomes long. Therefore, the stress applied to the conveyed product 61 from the top cover portion 36 is dispersed, and the conveyed product 61 is stably supported.
Further, since the top cover portion 36 (guide hole 44) has such a shape, when the cover plate 30 is fixed to the bottom plate 53, the left guide portion 71 (the left side portion 72, the left front portion 73, the left rear portion). Portion 74) and the right guide portion 81 (the right side portion 82, the right front portion 83, and the right rear portion 84) are not easily deformed. In other words, the left guide groove 78 and the right guide groove 88 are not easily deformed. Further, stress applied to the left guide portion 71 and the right guide portion 81 is also distributed to the cover plate 30.
And it is possible to convey the conveyed product 61 more stably.

Embodiment 4 FIG.
In the present embodiment, differences from the first embodiment will be mainly described.
FIG. 26 is a partial perspective view (exploded view) of a wicket.
FIG. 27 is a view showing a cross section of the wicket 96.
Similar to FIG. 12 described in the first embodiment, FIG. 27 shows a cross section orthogonal to the longitudinal direction of the wicket 96. The same applies to FIGS. 28 to 34 described later.
Although the bottom plate 53 of the first embodiment has an L-shaped cross-sectional shape by the bottom portion 55 and the rear surface portion 56, as shown in FIGS. 26 and 27, the bottom plate 53 has the bottom portion 55 and the rear surface portion. 56 may have a U-shaped cross-sectional shape. That is, the bottom plate 53 may have a bottom portion 55, a front surface portion 54, and a rear surface portion 56. The front surface portion 54 is long in the longitudinal direction of the wicket 96 and is provided from one side (bottom plate side 59) of the bottom portion 55.
The front surface portion 54 is provided at a predetermined height and inclined with respect to the bottom portion 55. Further, the rear surface portion 56 is lower in height than the front surface portion 54 and is inclined with respect to the bottom portion 55.
The inclination of the front surface part 54 with respect to the bottom part 55 is substantially equivalent to the inclination (75 degrees) of the wicket 96 shown in FIG.
The front surface portion 54 is formed by bending the bottom plate 53. Then, the front portion 54 and the side portions of the left guide portion 71 and the right guide portion 81 may be welded.
With such a configuration, the strength of the wicket 96 is improved.

FIG. 28 is a view showing a cross section of the wicket 96.
As shown in FIG. 28, the bottom plate 53 may have an L-shaped cross-sectional shape by a bottom portion 55 and a front surface portion 54.

FIG. 29 is a view showing a cross section of the wicket 96.
As shown in FIG. 29, the bottom plate 53 may be composed of only the bottom portion 55.

FIG. 30 is a view showing a cross section of the wicket 96.
As shown in FIG. 30, the cover plate 30 may be composed of a top cover part 36 and a rear cover part 31.

FIG. 31 is a view showing a cross section of the wicket 96.
As shown in FIG. 31, the cover plate 30 may be composed of a top cover part 36 and a front cover part 34.

FIG. 32 is a view showing a cross section of the wicket 96.
As shown in FIG. 32, the cover plate 30 may be configured with only the top cover portion 36.

FIG. 33 is a view showing a cross section of the wicket 96.
As shown in FIG. 33, the bottom plate 53 may include a rear surface portion 56 and a bottom portion 55, and the cover plate 30 may include a top cover portion 36 and a front cover portion 34.

FIG. 34 is a view showing a cross section of the wicket 96.
As shown in FIG. 34, the bottom plate 53 may be composed of a front surface portion 54 and a bottom portion 55, and the cover plate 30 may be composed of a top cover portion 36 and a rear cover portion 31.

28 to 34, the welded portion 42c and the welded portion 42d exist above the bottom surface 155 of the bottom portion 55.

Although the embodiments of the present invention have been described above, two or more of these embodiments may be implemented in combination. Alternatively, one of these embodiments may be partially implemented. Alternatively, two or more of these embodiments may be partially combined. In addition, this invention is not limited to these embodiment, A various change is possible as needed.

<Features>
The wickets 96 described in the plurality of embodiments described above have the following characteristics.
The wicket 96 includes a long bottom plate 53 and a pair of guide portions 511 that are fixed to the bottom plate 53 and guide the insertion / extraction of the conveyed product and support the side portion of the conveyed product.
The wicket 96 has a cover plate 30 that covers the bottom plate 53 between the pair of guide portions 511. The cover plate 30 has a recess 45 that supports the bottom of the conveyed product in the longitudinal direction between the pair of guide portions 511.

The cover plate 30 has a long top cover portion 36 having a V-shaped or U-shaped cross section perpendicular to the longitudinal direction.

The bottom plate 53 has an L-shaped cross-sectional shape orthogonal to the longitudinal direction.
The bottom plate 53 has a long bottom portion 55 having two sides consisting of a parallel side and another side, and a long rear surface portion 56 provided to be inclined with respect to the bottom portion 55 from the other side of the bottom portion 55.
The cover plate 30 has an M-shaped cross-sectional shape orthogonal to the longitudinal direction.
The cover plate 30 covers a long front cover portion provided toward one side of the bottom portion 55 so as to cover the front space from one side of the top cover portion 36, and the rear surface portion 56 from the other side of the top cover portion 36. And a long rear cover portion 31 provided toward the other side of the bottom portion 55.

The bottom plate 53 has a plurality of pairs of guide portions 511 attached in the longitudinal direction.
The cover plate 30 has a guide hole 44 through which two guide portions existing back to back are passed in a portion where the guide portions exist back to back.
The cover plate 30 may be welded to the bottom plate 53 only at both ends of the cover plate 30 and the central side of the guide hole 44 of the cover plate 30.

The bottom plate 53 has convex portions 80 at positions where the guide portions of the pair of guide portions 511 are attached.
Each guide part of a pair of guide part 511 has a side part which supports the side surface of a conveyed product.
Each guide part has a front part which supports the front of a conveyed product and has an air hole.
Each guide portion supports a rear surface of the conveyed product and has a rear portion having an air hole.
Each guide portion has a floor portion having a positioning hole into which the convex portion 80 of the bottom plate 53 is fitted.
The floor part should just be provided in the lower end in any one of a side part, a front part, and a rear part.

The side portion includes a tongue portion that guides the side surface of the conveyed product into the guide portion, and a side plate that slides the side surface of the conveyed product within the guide portion.
The distance between the front part and the rear part gradually increases toward the center of the guide part.
The upper side of the front part and the rear part has an inclined side 39, a horizontal side 38, and a tapered side 37.
The inclined side guides the conveyed product guided by the tongue portion toward the center of the guide portion toward the center of the guide portion.
The horizontal side is the side on which the side edge of the conveyed product slides.
The tapered side is a side that prevents the conveyed product from being caught.

The angle formed by the inclined surfaces of the recessed portions of the cover plate 30 may be 100 degrees or more and 170 degrees or less. Furthermore, the angle φ is desirably 115 degrees or more and 125 degrees or less. The angle φ is preferably 120 degrees.

The floor 87 has a positioning hole 89 that exists outside the center line L of the floor 87,
The bottom plate 53 has a convex portion 80 formed at a position corresponding to the positioning hole 89,
The convex portion 80 is fitted into the positioning hole 89, and the convex portion 80 is fixed to the positioning hole 89.

The center of the through hole 101 exists outside the center line L of the floor 87,
The bottom plate 53 is welded to the floor portion 87 in the through hole 101,
The convex portion 80 is welded to the positioning hole 89.
Alternatively, the convex portion 80 is caulked in the positioning hole 89.

The floor portion 87 has two positioning holes 89,
The bottom plate 53 has two convex portions 80,
The through hole 101 is formed beside one of the two convex portions 80 between the two convex portions 80.

The guide part
A side part for supporting the side surface of the conveyed product;
A front portion that supports the front surface of the conveyed product;
And a rear portion that supports the rear surface of the conveyed product.
The distance between the front part and the rear part increases as the distance from the side part increases.
The side portion has an inclined side base 140,
The front part has a base 127 that is inclined downward as it moves away from the side part,
The rear portion has a base 137 that is inclined upward as it gets farther from the side portion.

The wicket 96 includes a cover plate 30 that covers a portion between the pair of guide portions 511 of the bottom plate 53.
The bottom plate 53 is
A bottom 55 having two sides consisting of a parallel side and the other side;
And a rear surface portion 56 provided to be inclined with respect to the bottom portion 55 from the other side of the bottom portion 55.
The cover plate 30 and the bottom plate 53 are welded by a plurality of welds.
The plurality of welded portions are all present on the upper surface of the bottom portion 55 and the side surface of the rear surface portion 56, and are not present on the bottom surface 155 of the bottom portion 55.

The rear part has an air hole 40,
The height of the lower side 136 of the rear air hole 40 is the same as the height of the rear surface portion 56.

The cover plate 30 includes a rear cover portion 31 that covers the rear surface portion 56.
The height of the lower side 136 of the rear air hole 40 is equal to or higher than the height of the rear cover portion 31.

The front part has an air hole 40,
The cover plate 30
The front cover part 34 provided toward the bottom part 55 is provided.
The height of the lower side 126 of the air hole 40 in the front portion is equal to or higher than the height of the front cover portion 34.

The wicket 96 conveys different horizontally long conveyed objects from a horizontally long conveyed object to a horizontally long conveyed object 1.5 times.
The length between the side portions of the pair of guide portions 511 is larger than the lateral length of the conveyed product whose lateral length is 1.5 times.
The front guide width W9 and the rear guide width W9 are longer than the length K3 obtained by subtracting the lateral length K1 of the conveyed product having a lateral length of 1 from the distance J between the two side portions of the pair of guide portions 511. large.

The wicket conveyor is attached to the conveyor at an equal interval by tilting the wicket 96.
The wicket 96 conveys conveyed items having different heights from a conveyed item having a height of 1 to a conveyed item having a height of 1.5 times.
The wicket 96 has such a height that the conveyed item conveyed by the previous wicket 96 and the conveyed item conveyed by the subsequent wicket 96 are not in contact with each other while the conveyed item having a height of 1.5 times is conveyed. is doing.

The height of the wicket 96 is
Inside the pair of guide portions 511, the leading end of the conveyed product in the state where the conveyed product is most inclined in the traveling direction of the conveyor, and in the pair of guide portions 511, the conveyed product is most inclined in the direction opposite to the traveling direction of the conveyor It is larger than the height at which the tip of the conveyed product comes into contact.
Moreover, the height of the wicket 96 is 1.1 times or less the height of the wicket 96 when the tip of the conveyed product comes into contact.

In addition, the wicket conveyer carries a conveyed product by attaching a plurality of the aforementioned wickets 96 to the conveyor.

Moreover, the wicket conveyor drying device dries the conveyed product using the wicket conveyor.

Since the wicket 96 described above has a dent portion that supports the bottom 55 of the conveyed product, the position of the conveyed product does not shift during movement of the lightweight, small, and thin conveyed item. Therefore, it is possible to convey the object without damaging it.

28 cover sides, 29 cover sides, 30 cover plates, 31 rear cover part, 32 inclined surface, 33 inclined surface, 34 front cover part, 35 deepest part, 36 top cover part, 37 taper side, 38 horizontal side, 38a, 38b Horizontal side, 39 inclined side, 40 air holes, 41 welded portion, 41a, 41b, 41c, 41d welded portion, 42 welded portion, 42a, 42b, 42c, 42d, 42e, 42f, 42m, 42n welded portion, 44 guide hole, 44a, 44b, guide hole, 45 dent, 51 support slot, 53 bottom plate, 54 front surface, 55 bottom, 56 rear surface, 58 bottom plate side, 59 bottom plate side, 61 transported material, 62 top, 63 bottom, 65 side, 66 side edge, 66a, 66b side edge, 67 front, 68 rear, 69 bottom edge, 69a, 69b End side, 71 guide part, 71a, 71b left guide part, 72 left side part, 73 left front part, 73a, 73b left front part, 74 left rear part, 75 left side plate, 76 left tongue part, 78 left guide groove 80 convex part, 80a, 80b convex part, 81 guide part, 81a, 81b right guide part, 82 right side part, 83 right front part, 83a, 83b right front part, 84 right rear part, 85 right side plate, 86 Right tongue, 87 floor, 88 right guide groove, 89 positioning hole, 89a, 89b positioning hole, 90 screw hole, 92 bolt, 93 insertion position sensor, 94 removal position sensor, 95 drying chamber, 96 wicket, 97 conveyor, 98 wicket conveyor, 99 wicket conveyor drying device, 100 spaces, 101 through holes, 03 welded portion, 104 crimped portion, 105 welded portion, 110 space, 121 upper frame, 122 middle frame, 123 inner frame, 124 outer frame, 125 lower frame, 126 lower side, 127 bottom side, 135 lower frame, 136 lower side, 137 bottom side 140 side bottom, 155 bottom surface, 156 top surface, 161 transported object, 162 transported object, 180 convex portion, 311 bottom side, 341 bottom side, 421a welded part, 421b welded part, 511 pair of guide parts.

Claims (13)

A longitudinal bottom plate having a through hole;
A pair of guide portions that are fixed to the bottom plate and guide insertion / extraction of a conveyed product,
Each guide portion of the pair of guide portions has a floor portion fixed to the bottom plate,
The bottom plate is a wicket that fixes the floor portion in the through hole. The floor portion has a positioning hole that exists outside the center line L of the floor portion,
The bottom plate has a convex portion formed at a position corresponding to the positioning hole,
The wicket according to claim 1, wherein the convex portion is fitted into the positioning hole, and the convex portion is fixed to the positioning hole. The center of the through hole exists outside the center line L of the floor,
The bottom plate is welded to the floor in the through hole,
The wicket according to claim 2, wherein the convex portion is welded or caulked to the positioning hole. The floor has two positioning holes,
The bottom plate has two convex portions,
4. The wicket according to claim 2, wherein the through hole is formed beside one of the two protrusions between the two protrusions. 5. The guide part
A side portion for supporting the side surface of the conveyed product;
A front portion for supporting the front surface of the conveyed product;
A rear portion that supports the rear surface of the conveyed product,
The distance between the front part and the rear part increases as the distance from the side part increases.
The side part has an inclined side base,
The front part has a bottom that is inclined downward as it gets away from the side part,
The said rear part is a wicket of any one of Claim 1 to 4 which has the base which inclines upwards as it distances from a side part. A cover plate that covers a portion between the pair of guide portions of the bottom plate;
The bottom plate
A bottom having two sides consisting of a parallel side and the other side;
A rear surface portion provided to be inclined with respect to the bottom portion from the other side of the bottom portion,
The cover plate and the bottom plate are welded at a welded portion,
The wicket according to claim 5, wherein the welded portion exists on an upper surface of the bottom portion and a side surface of the rear surface portion, and does not exist on a bottom surface of the bottom portion. The rear part has an air hole,
The wicket according to claim 6, wherein a height of a lower side of the air hole in the rear portion is the same as a height of the rear surface portion. The cover plate includes a rear cover portion that covers the rear surface portion,
The wicket according to claim 7, wherein a height of a lower side of the air hole in the rear portion is equal to or higher than a height of the rear cover portion. The front part has an air hole,
The cover plate
A front cover provided toward the bottom,
The wicket according to any one of claims 6 to 8, wherein a height of a lower side of the air hole of the front portion is equal to or higher than a height of the front cover portion. The wicket is a wicket that conveys different horizontally long conveyed items from a horizontally long conveyed item to a 1.5 times horizontally long conveyed item,
The length between the side portions of the pair of guide portions is larger than the lateral length of the conveyed product whose lateral length is 1.5 times,
The guide width W9 of the front part and the width W9 of the rear part are respectively a length K3 obtained by subtracting the lateral length K1 of the conveyed product having a lateral length of 1 from the interval J between the two side portions of the pair of guide portions. The wicket according to any one of claims 5 to 9, which is larger than the wicket. In the wicket conveyor which inclined the wicket according to any one of claims 1 to 10 and attached to the conveyor at equal intervals,
The wicket is a wicket that conveys differently-conveyed items from a one-fold height conveyed item to a 1.5-fold height conveyed item,
The above-mentioned wicket has a height at which the conveyed item conveyed by the previous wicket and the conveyed item conveyed by the subsequent wicket are not in contact with each other while the conveyed item having a height of 1.5 times is conveyed. A wicket conveyor. The height of the wicket is
Inside the pair of guide portions, the transported object is most inclined with respect to the traveling direction of the conveyor, and inside the pair of guide portions, the transported object is in a direction opposite to the traveling direction of the conveyor. Greater than the height at which the tip of the transported object in the most inclined state comes into contact, and
The height of a wicket is a wicket conveyor of Claim 11 which is 1.1 times or less of the height of a wicket when the front-end | tip of a conveyed product contacts. A wicket conveyor drying device for drying a conveyed product using the wicket conveyor according to claim 11 or 12.

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