WO2018086115A1 - 激光扫描方法和装置 - Google Patents
激光扫描方法和装置 Download PDFInfo
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- WO2018086115A1 WO2018086115A1 PCT/CN2016/105695 CN2016105695W WO2018086115A1 WO 2018086115 A1 WO2018086115 A1 WO 2018086115A1 CN 2016105695 W CN2016105695 W CN 2016105695W WO 2018086115 A1 WO2018086115 A1 WO 2018086115A1
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 230000000737 periodic effect Effects 0.000 claims abstract description 15
- 230000008878 coupling Effects 0.000 claims abstract description 4
- 238000010168 coupling process Methods 0.000 claims abstract description 4
- 238000005859 coupling reaction Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
Definitions
- the present disclosure belongs to the field of laser scanning, and in particular to a laser scanning method and apparatus.
- Lidar scanning is used for scanning, ranging and positioning using lasers, and is widely used in scenes such as automatic driving, robot navigation and positioning, 3D model construction, obstacle detection, and human-computer interaction.
- the traditional laser beam scanning technology mainly includes mechanical scanning, MEMS (Micro-Electro-Mechanical System) micro-mirror scanning, electro-optical scanning, and sound and light scanning.
- MEMS Micro-Electro-Mechanical System
- electro-optical scanning electro-optical scanning
- sound and light scanning Conventional mechanical scanning achieves the purpose of scanning by controlling the movement of the optical mirror by the motor to control the direction of the laser beam, enabling large-diameter, large-angle scanning, and the mirror can withstand very high laser power.
- MEMS scanning micromirror is a microelectromechanical system fabricated by semiconductor processing technology. MEMS micromirrors can achieve scanning frequencies above kilohertz and the pointing accuracy is also very high. However, due to the small mirror size of MEMS, the laser power that can be withheld is limited, and it is difficult to meet the requirements of high-power laser beam scanning.
- Electro-optic scanning uses the effect of the refractive index of the medium to change under the action of the electric field to achieve the control of the beam pointing, which can achieve a very high scanning frequency (above MHz), but the scanning angle range of the electric scanning is limited, generally in milliradians ( Mrad) is of the order of magnitude and is difficult to meet the needs of large-scale laser scanning.
- Acousto-optic scanning uses the acousto-optic diffraction effect to control the beam pointing. It can also achieve scanning frequencies above a large angle and above MHz. However, the diffraction effect of the acousto-optic scanning produces a multi-level diffraction effect on the beam, which makes the laser energy loss very large.
- Embodiments of the present disclosure provide a laser scanning method including generating a periodic input laser signal having a plurality of wavelengths that do not overlap each other for a plurality of time periods in each period; Each wavelength of wavelengths that do not overlap each other is coupled to a corresponding output channel of a plurality of spatially separated output channels; and light from each of the output channels is emitted at different exit angles from each other.
- emitting light from each of the output channels at different exit angles from each other includes utilizing one or more optical lenses to direct light from each of the output channels at different exit angles from each other.
- each of the plurality of output channels is not parallel to each other.
- the exiting light is quasi-aligned with a plurality of lenses disposed at the output of the plurality of output channels straight.
- a further embodiment of the present disclosure also provides a laser scanning device comprising a periodic laser generating unit for generating a periodic input laser signal, the input laser signal having a plurality of mutually not in a plurality of time periods in each cycle An overlapping wavelength; and a demultiplexing unit for coupling each wavelength of the plurality of mutually non-overlapping wavelengths of the input laser signal to a corresponding output channel of the plurality of spatially separated output channels, and from each of the output channels The light exits at different exit angles from each other.
- the demultiplexing unit includes one or more optical lenses to direct light from each of the output channels at different exit angles from each other.
- each of the plurality of output channels is not parallel to each other.
- the laser scanning device further includes a plurality of lenses disposed at the output of the plurality of output channels to collimate the outgoing light.
- Embodiments of the present disclosure help to address at least some of the deficiencies of the prior art described above, using a means of spatially separating wavelengths to achieve high speed, large angle, high power laser scanning radar.
- FIG. 1 is a flow chart of a laser scanning method in accordance with some embodiments of the present disclosure.
- FIG. 2 is a schematic diagram of a laser scanning device in accordance with some embodiments of the present disclosure.
- FIG. 3 is a schematic diagram of another laser scanning device, in accordance with some embodiments of the present disclosure.
- FIG. 4 is a schematic diagram of yet another laser scanning device, in accordance with some embodiments of the present disclosure.
- first, second, etc. may be used herein to describe various elements, these elements are not limited by these terms. These terms are only used to distinguish elements from each other. For example, a first element could be termed a second element, and similarly, a second element could be termed a first element without departing from the scope of the invention. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- FIG. 1 shows a flow chart of a laser scanning method in accordance with some embodiments of the present disclosure.
- a periodic input laser signal is generated in step S101, the input laser signal having a plurality of wavelengths that do not overlap each other for a plurality of time periods in each period.
- the prior art laser scanning radar uses a monochromatic laser, that is, a single-wavelength laser or a narrow-band laser that outputs a single wavelength, and is scanned using a mechanical motor or an electro-optical material.
- a laser having a plurality of wavelengths that do not overlap each other in each cycle is selected. This multi-wavelength laser can be obtained by modulating the output signal of a multi-wavelength laser.
- Multi-wavelength lasers include, for example, but are not limited to, wavelength tunable lasers, multi-wavelength fiber lasers, broad spectrum lasers, white lasers, supercontinuous lasers, and/or combinations thereof.
- the multi-wavelength laser outputs an original laser signal comprising n wavelengths ⁇ 1 , ⁇ 2 , ⁇ 3 , . . . ⁇ n , where n>1.
- the above includes n wavelengths ⁇ 1 , ⁇ 2 , ⁇ 3 , ... ⁇ by performing, for example, amplitude modulation, frequency modulation, phase modulation, intensity modulation, pulse modulation, and/or the like known to those skilled in the art using a driving circuit.
- the original laser signal of n is modulated into a plurality of input signals of ⁇ 1 , ⁇ 2 , ⁇ 3 , ... ⁇ n for a plurality of periods t 1 , t 2 , t 3 , ... t n within one period T, respectively. .
- the time periods t 1 , t 2 , t 3 , ... t n do not overlap each other, and the wavelengths ⁇ 1 , ⁇ 2 , ⁇ 3 , ... ⁇ n are not equal to each other.
- ⁇ 1 , ⁇ 2 , ⁇ 3 , . . . ⁇ n may represent bands having a range of wavelengths that do not overlap each other.
- the period T can be equal to the time required to complete a laser scan, such as completing a period of a 360 degree laser scan. In an alternative embodiment, the period T may be greater or less than the required time for one laser scan depending on user settings.
- each of a plurality of wavelengths of the input laser signal that do not overlap each other is coupled to a corresponding output channel of the plurality of spatially separated output channels.
- This step can be implemented by an optical multiplexer and/or demultiplexer commonly used in the field of wavelength division multiplexing technology.
- Wavelength division multiplexing refers to a technique in which an optical carrier signal including a plurality of wavelengths is collected by a multiplexer at a transmitting end and optical carriers of various wavelengths are separated by a demultiplexer at a receiving end.
- the multiplexer and the demultiplexer may be used instead of each other to represent a multiplexer, a demultiplexer, or a combination device in which a multiplexer and a demultiplexer are simultaneously integrated.
- Means for providing multiple output channels separating different wavelengths include, but are not limited to, grating multiplexers, scintillation grating multiplexers, Bragg grating multiplexers, dielectric film multiplexers, thin film interference filters, integrated optical waveguides A device and / or arrayed waveguide grating (AWG).
- AWG arrayed waveguide grating
- the input laser light from the light source can be spatially separated by wavelength at different times. Space-separated lasers of different wavelengths can be used to perform laser scanning without the need for mechanical motors or electro-optic effects, so that scanning can be accomplished only by modulating the input laser.
- step S105 the light from each of the output channels is emitted at different exit angles from each other, so that in the far field, the light of each channel will be spatially separated.
- the light of each channel is spatially separated for scanning a characteristic angle or range of angles in the scan range.
- the optical path of the light exiting each channel can be further adjusted using optical waveguides known to those skilled in the art, such as optical waveguides, mirrors, etc., to match the scan range in a particular application scenario.
- the scanning range is 360 degrees
- channels 2, 3, 4, 5, and 6 The exit angles are correspondingly set to 60 degrees, 120 degrees, 180 degrees, 240 degrees, and 300 degrees.
- the channel one emitted wavelength from laser [lambda] 1 is scanned object 0 degree or 360 degree direction; at time t 2, the channel 2 emitted wavelength from to [lambda] of the laser 2 is 60 degrees direction scanning an object; and so on until the time T 6, the direction of the object 300 is scanned channel 6 is emitted from the wavelength ⁇ of the laser beam 6; thus completed a scan range of the scanning period T of 360 degrees, may then be Start another cycle of scanning.
- This scanning method eliminates the need for scanning components for mechanical movement or refractive index changes, thus eliminating the need for mechanical and electrical structures. Scanning by modulating the input laser signal can increase the scanning frequency, reduce the assembly cost of the device, and increase the power of the scanning laser. Means and structures for effecting the exiting of light from each output channel at different exit angles from one another will be further described in the exemplary embodiments below.
- FIG. 2 illustrates an exemplary laser scanning device 200 in accordance with some embodiments of the present disclosure.
- the laser scanning device 200 includes a periodic laser generating unit 201 for generating a periodic input laser signal having a plurality of wavelengths that do not overlap each other for a plurality of time periods in each cycle similar to that described above. Such as ⁇ 1 , ⁇ 2 , ⁇ 3 , ... ⁇ n .
- the periodic laser generating unit 201 may include a wavelength tunable laser, a multi-wavelength fiber laser, a wide spectrum laser, a white laser, a supercontinuum laser, and/or combinations thereof.
- the laser scanning device 200 further includes a demultiplexing unit 203 comprising a plurality of spatially separated output channels, such as n channels, to couple a plurality of wavelengths ⁇ 1 , ⁇ 2 of the input laser signal that do not overlap each other
- a demultiplexing unit 203 comprising a plurality of spatially separated output channels, such as n channels, to couple a plurality of wavelengths ⁇ 1 , ⁇ 2 of the input laser signal that do not overlap each other
- the demultiplexing unit 203 may include a raster multiplexer, a scintillation grating multiplexer, a Bragg grating multiplexer, a dielectric film multiplexer, a thin film interference filter, an integrated optical waveguide multiplexer, and/or an arrayed waveguide grating (AWG) ).
- the demultiplexing unit 203 may also include optical power amplifiers, optical line amplifiers, optical preamplifiers, optical interface converters, wave plates, and the like, which are commonly used in the field of wavelength division multiplexing.
- the plurality of channels of the demultiplexing unit 203 may include, for example, an optical waveguide, an optical fiber, a grating, or the like.
- laser scanning device 200 also includes an optical lens 205, which may include one or more optical lenses, although only one lens is shown.
- the output of the output channel of the demultiplexing unit 203 can be located at the focal plane position of the optical lens 205.
- the plurality of output channels have been separated in space and thus at different positions on the focal plane of the optical lens 205 such that light of various wavelengths output from the plurality of output channels is transmitted through the optical lens 205 After that, the beam will be deflected in different directions to achieve laser scanning based on spatial wavelength separation.
- Optical lens 205 can also collimate outgoing light having a certain divergence angle to provide a laser beam that is closer to parallel light.
- the frequency or speed of laser scanning based on the separation of wavelengths in space is completely determined by the wavelength modulation speed of the laser signal, so that the scanning frequency of MHz or even GHz can be more easily achieved.
- the maximum scanning angle range is determined by the focal length of the optical lens 205, and the shorter the focal length, the larger the scanning angle range; the smaller the channel spacing, the longer the focal length, and the adjacent two
- the smaller the angle of the wavelength for example, the laser beam separation between ⁇ i and ⁇ i+1 , the higher the scanning resolution.
- FIG. 3 illustrates an exemplary laser scanning device 300 in accordance with further embodiments of the present disclosure.
- the laser scanning device 300 includes a periodic laser generating unit 301 and a demultiplexing unit 303.
- the periodic laser generating unit 301 is similar to the periodic laser generating unit 201 described above.
- the plurality of output channels of the demultiplexing unit 303 have a certain relationship with each other The angle between the laser beams output through different channels will point in different directions, thus achieving laser scanning.
- the angle between the channels can take any suitable non-zero value, and each channel of the plurality of output channels can be spatially separated as long as they are not parallel to each other.
- FIG. 4 illustrates an exemplary laser scanning device 400 in accordance with further embodiments of the present disclosure.
- the laser scanning device 300 includes a periodic laser generating unit 401, a demultiplexing unit 403, and an optical lens 405.
- Each of the plurality of output channels of the demultiplexing unit 303 is parallel to each other, so that the outgoing light of each channel will exit in different directions and be spatially separated in the far field. Since the laser beam outputted by the demultiplexing unit 303 has a certain divergence angle, in order to obtain a laser beam having a small divergence angle, an optical lens 405 may be placed at the output end of each output channel of the demultiplexing unit 303 to align the beam. Straight to achieve laser beam scanning with small divergence angles.
- the mechanical scanning, electro-optical scanning, and acousto-optic scanning used in the existing laser scanning radar cannot simultaneously guarantee the scanning speed, the scanning angle, and the scanning laser power due to the limitation of the physical principles used.
- the laser scanning method and apparatus in the embodiments of the present disclosure utilize only input optical signal modulation and wavelength division multiplexing devices to achieve laser scanning, the scanning speed depends on the frequency of the optical signal modulation, the scanning angle and the affordable scanning laser power are dependent on the wave.
- the number of channels and optical path configuration of the multiplexer Accordingly, the laser scanning method and apparatus in the embodiments of the present disclosure can provide simultaneous improvement in scanning speed, scanning angle, and scanning laser power with respect to the prior art.
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Abstract
一种激光扫描方法及激光扫描装置(200),激光扫描方法包括产生周期性的输入激光信号,输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长(S101);将输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道(S103);以及将来自每个输出通道的光以彼此不相同的出射角度进行出射(S105)。
Description
本公开属于激光扫描领域,尤其是涉及一种激光扫描方法和装置。
激光雷达扫描用于利用激光进行扫描、测距和定位等,广泛应用于自动驾驶、机器人导航和定位、3D模型构建、障碍物检测、人机交互等场景中。传统的激光光束扫描技术主要有机械扫描、MEMS(Micro-Electro-Mechanical System)微镜扫描、电光扫描和声光扫描等。传统的机械扫描通过电机带动光学反射镜运动来控制激光束的指向来达到扫描的目的,可以实现大口径、大角度的扫描,且反射镜可以承受非常高的激光功率。但传统机械扫描扫描频率较低,难以突破百赫兹量级,且光束指向精度较低,难以满足高速、高精度激光扫描的应用需求。MEMS扫描微镜是一种采用半导体加工工艺制作出来的微机电系统,MEMS微镜可实现千赫兹以上的扫描频率,而且指向精度也非常高。但由于MEMS的镜面尺寸较小,可承受的激光功率有限,难以满足高功率激光束扫描的要求。电光扫描利用介质的折射率在电场的作用下发生改变的效应来实现对光束指向的控制,可以达到很高的扫描频率(MHz以上),但电扫描的扫描角度范围有限,一般在毫弧度(mrad)量级,难以满足大范围激光扫描的应用。声光扫描利用声光衍射效应实现对光束指向的控制,也可以实现大角度、MHz以上的扫描频率,但声光扫描的衍射效应会对光束产生多级衍射效果,使得激光能量损耗非常大。
发明内容
本公开的实施例提供了一种激光扫描方法,包括产生周期性的输入激光信号,输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长;将输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道;以及将来自每个输出通道的光以彼此不相同的出射角度进行出射。
在一些实施例中,将来自每个输出通道的光以彼此不相同的出射角度进行出射包括利用一个或多个光学透镜将来自每个输出通道的光以彼此不相同的出射角度进行出射。
在一些实施例中,多个输出通道的每个通道彼此之间不相互平行。
在一些实施例中,利用布置在多个输出通道的输出端处的多个透镜对出射光进行准
直。
本公开的另外实施例还提供了一种激光扫描装置,包括周期性激光产生单元,用于产生周期性的输入激光信号,输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长;以及解复用单元,用于将输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道,以及将来自每个输出通道的光以彼此不相同的出射角度进行出射。
在一些实施例中,所述解复用单元包括一个或多个光学透镜以将来自每个输出通道的光以彼此不相同的出射角度进行出射。
在一些实施例中,多个输出通道的每个通道彼此之间不相互平行。
在一些实施例中,激光扫描装置还包括布置在多个输出通道的输出端处的多个透镜以对出射光进行准直。
本公开的实施例有助于解决以上所述的现有技术中的至少一些缺陷,采用将波长进行空间的分离的手段来实现高速、大角度、大功率的激光扫描雷达。
本公开提供了附图以便于所公开内容的进一步理解,附图构成本申请的一部分,但仅仅是用于图示出体现发明概念的一些发明的非限制性示例,而不是用于做出任何限制。
图1是根据本公开一些实施例的激光扫描方法的流程图。
图2是根据本公开一些实施例的激光扫描装置的示意图。
图3是根据本公开一些实施例的另一个激光扫描装置的示意图。
图4是根据本公开一些实施例的又一个激光扫描装置的示意图。
下文将使用本领域的技术人员向本领域的其它技术人员传达他们工作的实质所通常使用的术语来描述本文说明性实施例的各个方面。然而,对于本领域的技术人员而言将显而易见的是,可以仅使用所描述的多个方面中的一些来实践备选实施例。出于解释的目的,本文阐述了特定的数值、材料和配置,以便使说明性的实施例更容易被理解。然而,对于本领域的技术人员而言将显而易见的是,在省略了特定细节的情况下也可以
实践本文的备选实施例。在其它情况下,可以省略或简化众所周知的特征,以便不使本文的实施例难于理解。
此外,本文将以最有助于理解说明性实施例的方式将各种操作依次地描述为多个离散的操作。然而,所描述的顺序不应当被认为是意味着这些操作必须依赖于所述的顺序。尤其是,并不必以所描述的顺序来执行这些操作。
本领域技术人员将理解尽管术语第一、第二等可在本文中用于描述各种元素,但这些元素不应由这些术语限制。这些术语仅用于将元件彼此区分开。例如,第一元素可以称作第二元素,并且相似地,第二元素可以称作第一元素,而不偏离本发明的范围。如本文使用的,术语“和/或”包括关联的列出项目中的一个或多个中的任一个或全部组合。本文使用的术语仅是为了描述特定实施例目的并且不意在限制本发明。如本文使用的,单数形式“一”和“该”意在也包括复数形式,除非上下文另外明确指示其他意思。本领域技术人员将进一步理解术语“包括”和/或“包含”当在本文使用时,规定了陈述的特征、整体、步骤、操作、元素和/或部件的存在,但不排除一个或多个其它特征、整体、步骤、操作、元素、部件和/或其的组合的存在或增加。
另外,术语“和/或”可表示“和”、“或”、“异或”、“一个”、“一些但不是全部”、“两者皆不”和/或“两者皆是”,但所述主题的范围并不限制在这些方面。在所附的说明书和/或权利要求中,可使用术语“包括”和“包含”及其衍生词,它们应视为相互的同义词。相似的附图标记在下文中用于指代相似的部件。
图1示出了根据本公开一些实施例的激光扫描方法的流程图。首先,在步骤S101中产生周期性的输入激光信号,该输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长。现有技术中的激光扫描雷达使用的是单色激光,即输出单波长的激光或者输出接近于单波长的窄带激光,并且使用机械马达或电光材料対单色激光进行扫描。本公开的实施例与之相反,选用了在每个周期内具有多个彼此不重叠的波长的激光。这种多波长的激光可以通过对多波长激光器的输出信号进行调制来得到。多波长激光器例如包括但不限于波长可调谐激光器、多波长光纤激光器、宽光谱激光器、白光激光器、超连续激光器和/或以上的组合。为了便于说明,在本文的实施例中假设多波长激光器输出包括n个波长λ1、λ2、λ3、……λn的原始激光信号,其中n>1。通过使用例如驱动电路执行本领域技术人员所知的调幅、调频、调相、强度调制、脉冲调制和/或类似调制,可以将上述包括n个波长λ1、λ2、λ3、……λn的原始激光信号调制成分别在一个周期T之内的多个t1、t2、t3、……tn时间段产生λ1、λ2、λ3、……λn的输入激光信号。
其中时间段t1、t2、t3、……tn彼此不重叠,已经波长λ1、λ2、λ3、……λn彼此不相等。在一些实施例中,λ1、λ2、λ3、……λn可以表示具有一定波长范围的波段,而这些波段相互不重叠。在一些实施例中,周期T可以等于完成一次激光扫描的所需时间,例如完成一次360度激光扫描的周期。在备选实施例中,周期T可以根据用户设置而大于或小于一次激光扫描的所需时间。
在步骤S103中,将输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道。该步骤可以通过波分复用技术领域中常用的光复用器和/或解复用器来实施。波分复用(WDM)是指在发送端将包含多个波长的光载波信号经复用器汇集并在接收端经解复用器将各种波长的光载波分离的技术。在本文中,复用器和解复用器可以相互替代地使用来表示复用器、解复用器或同时集成了复用器和解复用器的组合装置。用来提供分离不同波长的多个输出通道的装置包括但不限于光栅复用器、闪烁光栅复用器、布拉格光栅复用器、介质膜复用器、薄膜干涉滤光器、集成光波导复用器和/或阵列波导光栅(AWG)。在对上文所述在t1、t2、t3、……tn时刻波长分别为λ1、λ2、λ3、……λn的输入激光信号进行调制之后,假设共有n个输出通道(n>1),则在t1时刻,由通道1输出波长为λ1的激光信号,在t2时刻,由通道2输出波长为λ2的激光信号,在t3时刻,由通道3输出波长为λ3的激光信号;类似地,在tn时刻,由通道n输出波长为λn的激光信号。如上所述,可以在不同时刻将来自光源的输入激光按波长在空间上进行分离。在空间上分离的波长不同的激光即可用来完成激光扫描,而无需用到机械马达或电光效应,从而仅通过调制输入激光就能完成扫描。
在步骤S105中,将来自每个输出通道的光以彼此不相同的出射角度进行出射,从而在远场中,每个通道的光将在空间上分离。在一些实施例中,每个通道的光在空间上分离后用于扫描扫描范围中的一个特点角度或角度范围。可以利用光波导、镜面等本领域技术人员所知的光传导器件对每个通道出射光的光路进行进一步的调整,以便与特定应用场景中的扫描范围进行匹配。在一个示范性实施例中,扫描范围是360度,输出通道的数量n=6,则通道1的出射光的出射角设为0度或360度,通道2、3、4、5和6的出射角度相应地设为60度、120度、180度、240度和300度。如此,在t1时刻,从通道1出射的波长为λ1的激光对0度或360度方向的对象进行扫描;在t2时刻,从通道2出射的波长为λ2的激光对60度方向的对象进行扫描;以此类推,直到t6时刻,从通道6出射的波长为λ6的激光对300度方向的对象进行扫描;至此完成了一个扫描范围为360度的扫描周期T,接着可以开始另一个周期的扫描。这种扫描方法不需要扫描
部件进行机械移动或折射率改变,因此省去了相关的机械和电气结构。通过调制输入激光信号完成扫描可以提高扫描频率,降低装置组装成本并且提高扫描激光的功率。对于实现将来自每个输出通道的光以彼此不相同的出射角度进行出射的装置和结构,将在下文的示范实施例中进行进一步的描述。
图2示出了根据本公开一些实施例的示范激光扫描装置200。激光扫描装置200包括周期性激光产生单元201,用于产生周期性的输入激光信号,该输入激光信号类似于上文所述在每个周期内的多个时间段具有多个彼此不重叠的波长如λ1、λ2、λ3、……λn。周期性激光产生单元201可包括波长可调谐激光器、多波长光纤激光器、宽光谱激光器、白光激光器、超连续激光器和/或以上的组合。激光扫描装置200还包括解复用单元203,解复用单元203包括空间上分离的多个输出通道,例如n个通道,以将输入激光信号的多个彼此不重叠的波长λ1、λ2、λ3、……λn的每个波长λi耦合到多个输出通道的对应输出通道i(i=1,2,3….,n)。解复用单元203可包括光栅复用器、闪烁光栅复用器、布拉格光栅复用器、介质膜复用器、薄膜干涉滤光器、集成光波导复用器和/或阵列波导光栅(AWG)。解复用单元203还可包括在波分复用领域中常用的光功率放大器、光线路放大器、光前置放大器、光接口转换器、波片等。解复用单元203的多个通道可例如包括光波导、光纤、光栅等。一般来说,解复用单元203各通道的输出为平行光,这不利于对各波长的光进行空间分离以进行激光扫描。因此,激光扫描装置200还包括光学透镜205,光学透镜205可包括一个或多个光学透镜,虽然图中仅示出了一个透镜。解复用单元203输出通道的输出端可位于光学透镜205的焦平面位置。如本领域技术人员所知,多个输出通道已在空间中分离,因此处于光学透镜205的焦平面上的不同位置,从而从多个输出通道输出的各种波长的光在透过光学透镜205后将被偏转指向不同的方向,而实现基于空间波长分离的激光扫描。光学透镜205还能对具有一定发散角的出射光进行准直,以提供更加接近平行光的激光束。这种基于波长在空间中分离的激光扫描的频率或速度完全由激光信号的波长调制速度决定,因此可以更容易地达到MHz,甚至是GHz的扫描频率。对于通道数和通道间隔固定的解复用单元203,其最大扫描角度范围由光学透镜205的焦距决定,焦距越短,扫描角度范围越大;通道间隔越小,焦距越长,相邻两个波长,例如λi和λi+1之间的激光束分离的角度越小,则扫描分辨率越高。
图3示出了根据本公开另一些实施例的示范激光扫描装置300。激光扫描装置300包括周期性激光产生单元301和解复用单元303。周期性激光产生单元301与上文所述的周期性激光产生单元201类似。解复用单元303的多个输出通道彼此之间均具有一定
的夹角,通过不同通道输出的激光束将指向不同的方向,从而实现激光扫描。通道之间的夹角可以取任何合适的非零值,多个输出通道的每个通道彼此之间只要不相互平行即可实现空间分离。
图4示出了根据本公开又一些实施例的示范激光扫描装置400。激光扫描装置300包括周期性激光产生单元401,解复用单元403和光学透镜405。解复用单元303的多个输出通道的每个通道彼此之间相互平行,因此每个通道的出射光将沿不同的方向出射并在远场中空间分离。由于解复用单元303输出的激光束具有一定的发散角,为了得到发散角较小的激光束,可在解复用单元303的每个输出通道的输出端放置光学透镜405,对光束进行准直,从而实现小发散角的激光束扫描。
现有的激光扫描雷达中使用的机械扫描、电光扫描和声光扫描均因为使用的物理原理的限制而无法同时保证扫描速度、扫描角度和扫描激光功率。本公开的实施例中的激光扫描方法和装置仅利用输入光信号调制和波分复用器件来实现激光扫描,扫描速度取决于光信号调制的频率,扫描角度以及可承受的扫描激光功率取决于波分复用器的通道数和光路配置。因此,本公开的实施例中的激光扫描方法和装置相对于现有技术可以提供扫描速度、扫描角度和扫描激光功率的同时提升。
本发明的示例的上述具体实施方式无意穷举,也无意限制本发明为上面公开的明确形式。虽然为说明目的而在上文描述了本发明的特定示例,但相关领域的技术人中将认识到在本发明范围内可能实现各种相当的修改。虽然各种过程或框图可能在本申请中以给定顺序陈述,但在备选实施例中可以不同顺序执行这些步骤的例程,或者实施具有不同顺序的框图的系统。一些过程或框可以被删除,移动,添加,细分,组合和/或修改以提供备选或子组合。此外,虽然有些过程或框图可能显示为连续执行,但可反之并行执行或实现这些过程或框图,或者可在不同的时间执行或实现这些过程或框图。此外,本文中指出的任何特定数值只是示例。要理解备选实施例中可采用不同的值或范围。
如上所述,描述本发明某些特性或方面时使用的特殊术语不应视为暗示该术语在本文重新定义以被限制为与该术语相关联的本发明任何特定的特征、特性或方面。通常,在所附权利要求书中使用的术语不应理解为将本发明限制为说明书中公开的特定示例,但上述具体实施方式部分明确定义了此类术语时除外。相应地,本发明的实际范围不但包括公开的示例,而且包括根据权利要求书实践或实施本发明的所有等同方式。
Claims (8)
- 一种激光扫描方法,包括:产生周期性的输入激光信号,所述输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长;将所述输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道;以及将来自每个输出通道的光以彼此不相同的出射角度进行出射。
- 如权利要求1所述的激光扫描方法,其中将来自每个输出通道的光以彼此不相同的出射角度进行出射包括利用一个或多个光学透镜将来自每个输出通道的光以彼此不相同的出射角度进行出射。
- 如权利要求1所述的激光扫描方法,其中所述多个输出通道的每个通道彼此之间不相互平行。
- 如权利要求3所述的激光扫描方法,还包括利用布置在所述多个输出通道的输出端处的多个透镜对出射光进行准直。
- 一种激光扫描装置,包括:周期性激光产生单元,用于产生周期性的输入激光信号,所述输入激光信号在每个周期内的多个时间段具有多个彼此不重叠的波长;以及解复用单元,用于将所述输入激光信号的多个彼此不重叠的波长的每个波长耦合到空间上分离的多个输出通道的对应输出通道,以及将来自每个输出通道的光以彼此不相同的出射角度进行出射。
- 如权利要求5所述的激光扫描装置,其中所述解复用单元包括一个或多个光学透镜以将来自每个输出通道的光以彼此不相同的出射角度进行出射。
- 如权利要求5所述的激光扫描装置,其中所述多个输出通道的每个通道彼此之间不相互平行。
- 如权利要求7所述的激光扫描装置,还包括布置在所述多个输出通道的输出端处的多个透镜以对出射光进行准直。
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Publication number | Publication date |
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EP3540378A1 (en) | 2019-09-18 |
JP2019537845A (ja) | 2019-12-26 |
US11047713B2 (en) | 2021-06-29 |
US20190265076A1 (en) | 2019-08-29 |
EP3540378A4 (en) | 2020-08-19 |
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