WO2018036959A1

WO2018036959A1 - Mirror tower, arrangement having a mirror tower, and microscope

Info

Publication number: WO2018036959A1
Application number: PCT/EP2017/071022
Authority: WO
Inventors: Ralph Lange; Wolfgang Bathe; Michael Gölles; Sebastian Borck
Original assignee: Carl Zeiss Microscopy Gmbh
Priority date: 2016-08-23
Filing date: 2017-08-21
Publication date: 2018-03-01
Also published as: DE102016215847A1

Abstract

The invention relates to a mirror tower (1) having a rotation axis (2) and having a plurality of mirrors (3) arranged in succession along the rotation axis (2), wherein each of the mirrors (3) is rotatable about the rotation axis (2); each mirror (3) has a mirror surface (4) which extends substantially parallel to the rotation axis (2) and mutually holds adjacently arranged mirrors (3) at a respective mirror position (SP) relative to the rotation axis (2).

Description

Mirror tower, arrangement with mirror tower and microscope

The invention relates to a mirror tower as well as a possibility for deflecting incident light beams, in particular parallel light beams. The invention further relates to an arrangement with a mirror tower and a microscope with such an arrangement.

For the deflection of rays, in particular of light in the visible and invisible wavelength range in optical arrangements, the use of mirror arrangements is known.

For example, in DE 10 2014 224 994 A1 a mirror arrangement

in particular for a microlithographic projection exposure apparatus comprising a plurality of mirror elements. The mirror elements are

arranged side by side. There is a device for adjusting the geometric orientation of the mirror elements, which has a plurality of Einzelaktuatoren, wherein the mirror elements associated

Single actuators are distributed to different actuator layers. The

Actuator layers are arranged one above the other, whereby a higher packing density can be achieved on smaller mirror elements in one area. In such a mirror array, up to 10,000 mirror elements per cm ² can be achieved.

From DD 1589 57 a mirror arrangement is known, which serves for deflecting a light beam by a certain angle or in an angular interval. The deflection is done by means of a rotatable, curved mirror. Here is a variable deflection of the light beam with low requirements

Adjustment effort and accuracy allows. In addition, the angle of the

Beam deflection smaller or at most equal to the angle of motion of the

beam deflecting element. The beam deflecting element is designed such that at least a part of the border line of the cross section of the

Beam deflecting element perpendicular to its axis of motion a the

Curve piece of a spiral corresponding shape. The invention may be used in opto-mechanical scanning systems or in beam deflection systems

be applied. However, the beam-deflecting elements (mirrors) are specific and expensive to make.

The mirror arrangements known from the prior art comprise a large number of individual parts and / or are provided with mirrors which are to be specially produced, and thus cost-intensive.

The invention has for its object to provide an efficient way of deflecting incident light rays, in particular light beams parallel to each other. It is also an object of the invention to propose a suitable arrangement for deflecting incident light beams, in particular parallel light beams, and an improved microscope. The object is achieved with regard to the possibility of deflection by the features of independent claim 1. With regard to the arrangement and the microscope, the object is achieved by the features of claims 10 and 11, respectively.

Advantageous embodiments are specified in the dependent claims.

The object is achieved by a mirror tower having an axis of rotation along which successive mirrors are arranged. Each of the mirrors is rotatable about the axis of rotation and has a mirror surface which extends substantially parallel to the axis of rotation. Adjacent mirrors and / or existing beams hold and position each other with respect to

Rotary axis at a respective mirror position.

The mirrors keep each other in particular at the respective mirror position along the axis of rotation. Preferably, the mirrors and / or existing carriers, in which or by means of which the mirrors are held, are designed such that, in addition, a lateral deviation from the axis of rotation does not exceed permissible tolerances.

The mirror surfaces extend substantially parallel to the axis of rotation when, for example, not more than 15 °, advantageously not more than 5 °, of the

Diverge axis of rotation.

Below a mirror tower is the device characterized above

understood, wherein the axis of rotation, through which a longitudinal axis of the mirror tower is determined, must not run vertically, but any spatial

Orientation can have. A mirror tower can for example also be arranged lying horizontally.

The mirrors may have support structures which are fixedly connected to the respective mirror and in which or by means of which the relevant mirror is held. Structures are formed or attached to the mirrors in further possible embodiments by means of which mutually adjacently arranged mirrors can mutually hold one another with respect to the axis of rotation at a respective mirror position. Such structures are for example complementary to each other shaped pins and receptacles of the pins or annular projections and recordings of the surveys. Additionally or alternatively, the mirrors may each be received and held in carriers.

In the following, the term mirror is used in general to denote the

To cover the above described embodiments. The term carrier is used to describe specific technical solutions in which the mirror is held, for example, in a frame, a holder or a housing.

An inventive mirror tower advantageously allows the mirrors to be arranged in such a way that they are accessible from all sides or from virtually all sides in a plane (plane of incidence) running parallel to the axis of rotation and not shading or the light beam blocking components are present in the beam path.

Furthermore, the mirrors are accessible in a large angular range in the plane as well as obliquely to the plane.

This extensive freedom of accessibility and the rotatability of the mirrors about the axis of rotation advantageously permit an individual deflection, in particular of light rays incident in the plane, and an individual correction of the deflection of the light rays for each individual mirror.

In order to adjust the deflection, in particular a reflection of the incident light beams, individually for each mirror and to be able to correct them if necessary, each mirror is in a further advantageous embodiment with a drive for generating a controlled rotational movement about the axis of rotation and / or for controlled adjustment of a rotational position , and thus an orientation of the mirror,

connected.

Each of the mirrors has a mirror surface on which incident light rays are reflected. It is advantageous if the axis of rotation passes through the plane of the mirror surface of each mirror. Such a design of the mirror tower does not require any correction of the mirror in a lateral or radial direction transverse to the axis of rotation after a rotational movement.

In a further embodiment of the mirror tower according to the invention, at least one additional drive for generating a tilting movement of one or more mirrors relative to the axis of rotation is present. The possibility of tilting

at least one of the mirrors advantageously increases the angular range in which a deflection and a correction are possible.

In order to enable such a tilting movement, at least one of the mirrors may be formed on a sectional surface in a sectional plane of a sphere. The ball consists for example of metal, plastic or glass. The cut surface may be provided with a reflective layer or surface, respectively

be educated. The mirrors can each be individually and independently of the other mirrors of the mirror tower movable, in particular rotatable and / or tiltable. Such an embodiment allows a maximum degree of individual adjustment options.

The drive and / or the additional drive have in further embodiments, a drive element made of a shape memory material.

Such shape memory materials can be shape memory alloys (useful for, for example, shape memory actuators), shape memory polymers (SMPs), magnetic shape memory materials (MSM), useful, for example, for magnetic shape memory actuators;

magnetic shape memory actuators), dielectric elastomers (dielectric

elastomers; usable for dielectric elastomer actuators, DEA) as well as their

Be combinations. Shape memory materials may also be materials as described in US Pat. No. 7,591,834 B2. Drives based on shape memory materials allow a large number of switching cycles with simultaneously low fatigue of the material. There are high accuracies of the positioning movements and a high

Repeat accuracy achievable with simultaneous high actuating forces.

In further embodiments of the mirror tower at least two mirrors are connected to each other in terms of their rotational movement and / or tilting movement, in particular coupled together. Such a connection can be realized for example by means of a mechanical coupling element. The rotational movement of one of the connected mirrors causes a positively controlled rotational movement of the other connected mirror or the other connected mirrors about the axis of rotation.

In further embodiments, the coupling of at least two mirrors is implemented by a control algorithm, on the basis of which a specific movement of the one connected mirror causes a defined movement of the other connected mirror or of the other connected mirrors.

The connected, in particular coupled, mirror can be moved in the same direction and with the same adjustment paths, that is rotated and / or tilted. In further embodiments, it is possible to move the connected mirror in opposite directions and / or with mutually different adjustment paths. If more than two mirrors are connected to each other, the aforementioned possibilities can be combined.

In order to use the mirror tower in a variety of applications and arrangements and to be able to exchange mirrors easily and with little effort, the mirrors are advantageously held in carriers with uniform external dimensions. The modules thus formed can be produced cost-effectively in large numbers. In addition, only one type of carrier is to be provided for repairs and maintenance.

The mirrors or the carriers hold and position each other. In order to decouple the movements of the individual mirrors or of the individual carriers from the respectively adjacent mirrors or carriers, the mirrors or the carriers may have structures which interact with one another such that both the holding and positioning as well as the

Decoupling is possible.

For example, the carriers have structures on their side surfaces which

are designed complementary to each other and, for example, are inserted into each other. The dimensioning of the structures and their design advantageously allows a rotational movement of each carrier regardless of its adjacently arranged carrier. Furthermore, the structures lead in advantageous embodiments to a positioning of the carrier relative to each other and relative to the axis of rotation. In further embodiments of the mirror tower, a coupling piece is arranged between adjacently arranged carriers. By means of the coupling, a drive force for generating the rotary movement and / or for adjusting the rotational position of the mirror is guided by the coupling to at least one of the carriers.

For this purpose, the coupling piece, for example, non-positively and / or positively engaged with at least one carrier. For example, the coupling piece recesses, openings, grooves, projections and / or stops have, which are provided for engagement in correspondingly shaped corresponding shapes of the carrier or the carrier.

In a mirror tower combinations of mirrors, carriers, drives, additional drives and / or coupling pieces can be realized.

The mirror tower can be part of an arrangement for deflection in one

Be incident level of incident and parallel to each other directed light rays. Advantageously, the arrangement comprises a control unit for controlling the

existing drives for generating the rotational movement and the setting of a rotational position and optionally for controlling the additional drives for generating a tilting movement.

In further embodiments, sensors or transducers are present, by means of which current rotational positions and / or tilt angles of the mirrors are detected and made available to the control unit.

Arrangements with one or more mirror towers according to the invention are advantageously part of microscopes, in particular in laser scanning microscopes.

The invention will be explained in more detail with reference to embodiments and figures. Show it:

Fig. 1 is a schematic representation of a first embodiment of a

inventive arrangement and a mirror tower according to the invention,

Fig. 2 is a schematic representation of a first embodiment of a

microscope according to the invention with an inventive arrangement and a second embodiment of the mirror tower according to the invention,

A schematic representation of a second embodiment of the

Microscope with an inventive arrangement and a third

Embodiment of the mirror tower according to the invention,

Fig. 4 is a schematic representation of a first embodiment of a

Carrier with a first embodiment of a mirror, 5 is a schematic representation of a second embodiment of the carrier with the first embodiment of the mirror,

6 is a schematic representation of a third embodiment of the carrier with a second embodiment of the mirror,

7 is a schematic representation of the third embodiment of the carrier with the second embodiment of the mirror in a longitudinal section,

Fig. 8 is a schematic representation of an embodiment of a

Symmetry piece

9 is a schematic representation of a first embodiment of a

Coupling piece and

10 is a schematic representation of a second embodiment of the

Coupling piece.

As essential elements of a mirror tower 1 according to the invention, an axis of rotation 2 and a number along the axis of rotation 2 are shown in FIG

successively arranged and rotatable about the rotation axis 2 mirror 3, each with a mirror surface 4 (see Fig. 4) shown, with adjacently arranged mirror 3 hold each other at a respective mirror position SP.

The mirrors 3 of the first exemplary embodiment of the reflecting tower 1 shown schematically in FIG. 1 are arranged in carriers 5 and against the respective ones

Mirror positions SP (symbolized by horizontal arrows). The supports 5 all have the same external dimensions and are thus modular and can be used at freely selectable mirror positions SP in a mirror tower 1 according to the invention.

Here are the number and the concrete places of the selectable

Mirror positions SP determined by the outer dimensions of the carrier 5, in particular in the direction of the axis of rotation 2. The mirror positions SP are exemplified here by the locations of the centers of the carriers 5 in the direction of the axis of rotation 2 (reference points). As a reference planes each extending through the locations of the centers and orthogonal to the axis of rotation 2 extending planes are selected. In other embodiments, other reference points or

Reference levels be selected.

The carriers 5 are designed in such a way that, due to these rotational movements, each carrier 5 is decoupled from those of the other carriers 5. In addition, lateral, radial deviation with respect to the axis of rotation 2 is reduced or even avoided by structures formed on the carriers 5 (FIGS. 4 and 5).

An axis 5.0 of the carrier 5 and the axis of rotation 2 coincide in the illustrated mirror tower 1 according to the invention.

In the illustrated embodiments, between adjacent carriers 5 each have a coupling piece 6 is present. The mirror turn 1 is held with its respective ends in a holding frame 7. To a rotatable mounting of each terminal carrier 5 in the

To reach holding frame 7, each one as Symmetriestück 19 (see Fig. 8) designated element is present.

To increase the stability of the reflecting tower 1, in particular in the radial direction transversely to the axis of rotation 2, an intermediate web 8 is provided on the holding frame 7, by which the reflecting tower 1 is additionally supported on the holding frame 7 between its central supports 5. A decoupling of the individual rotational movements of the carrier 5 takes place by means of additional coupling pieces 6 above and below the intermediate web 8.

Each of the two sections of the thus divided tower mirror 1 can also be regarded as an independent mirror tower 1.

Each carrier 5 is provided with a coupling piece 6, which is designed to direct a power flow of a drive 9 (see FIGS. 2, 3) onto the carrier 5 which is in direct contact with the coupling piece 6. By means of the drives 9, each carrier 6 is controlled by the respective held by this mirror 3 in a respect to a reference position to be defined certain angular position, as

Rotational position DP is called, adjustable. The rotational positions DP of the carriers 5 of the two sections are schematically illustrated by arrows. Such an arrangement 1 1 with the mirror tower 1 can be used in optical devices, for example in a microscope 13, not shown.

The carriers 5 of the two sections of the mirror tower 1 are each placed in a different rotational position DP.

The respective section of the mirror tower 1 at the gutter. 8

supporting additional coupling pieces 6 support a positioning of the mirror tower 1 in the radial direction.

In a second possible embodiment of the mirror tower 1 according to the invention, which in its basic construction corresponds to the first possible embodiment, the coupling pieces 6, except the additional coupling pieces 6, are connected to drives 9, each comprising at least one drive element

Shape memory material (SMA actuators) have (Fig. 2).

Each drive 9 is independently of the other drives 9 and independently of current rotational positions DP of the mirror 3 and the carrier 5 of the mirror tower 1 driven, so that each of the carrier 5 of an individual

Rotary position DP is deliverable. The mirrors 3 are each held in one of the carriers 5.

To control each of the drives 9 is connected to a control unit 12 in a manner suitable for the transmission of control commands. Furthermore, sensors 15 (one shown schematically) are provided by means of which measured values, for example, for the current rotational position DP of the mirrors 3 and / or the carriers 5 are detected and transmitted to the control unit 12 for evaluation.

The individual current rotational positions DP can additionally or alternatively be detected by the drives 9.

A third embodiment of a mirror tower 1 according to the invention and an arrangement 1 1 is shown schematically in FIG. Two each

Coupling pieces 6 are connected to each other by means of a coupling element 14, which is formed as a U-shaped beam. Each of the coupling elements 14 is driven by a drive 9 individually and independently of the other coupling elements 14.

By action of each of the coupling elements 14, the two by means of

respective coupling element 14 connected coupling pieces 6 set in their relative angular position to each other. In this case, the coupled with each other

Coupling pieces 6 have the same or different rotational positions DP. If the coupling element 14 is actuated and moved by the drive 9, then the two coupling pieces 6 connected by means of the relevant coupling element 14 are forcibly controlled in the same direction and rotated about the rotation axis 2 at the same angle.

In further embodiments of the mirror tower 1 combinations of individually controllable and rotatable coupling pieces 6 and with each other by a

Coupling element 14 connected coupling pieces 6 may be present. It may be in more embodiments more than two coupling pieces 6 by means of a

Coupling element 14 may be connected.

The arrangements 1 1 shown by way of example in FIGS. 1 to 3 may be part of the microscope 13, not shown in greater detail.

A first embodiment of a carrier 5 and a mirror 3 in Fig. 4 shows a carrier 5, in which along the axis 5.0, a first disc 5.1 and a second disc 5.2 are present and interconnected by webs 5.3. Between the mutually facing inner sides of the discs 5.1, 5.2, a mirror 3 is held in the form of a cuboid body or such a mirror 3 can be held there. The mirror 3 has a mirror surface 4, which is aligned parallel to the axis 5.0. The axis 5.0 lies on the

Mirror surface 4.

The mirror 3 is exchangeable and can for example be detachably inserted into the carrier 5.

On the outside of the first disk 5.1 is rotationally symmetrical about the

Axis 5.0 and along this a pin 5.4 formed while on the

Outside of the second disc 5.2 rotationally symmetrical about the axis 5.0 and along which an annular receptacle 5.5 is formed, in which a bearing element 5.6 present, for example, is used.

In order to arrange two carriers 5 in a mirror tower 1 one above the other, the pin 5.4 of a carrier 5 is inserted into the receptacle 5.5 of the other carrier 5, as indicated in FIG. 4 by the two carriers 5 shown. in the

plugged state is the pin 5.4 of the upper carrier 4 shown in FIG. 4 on the bearing element 5.6 of the lower carrier 5. The

5.6 allows a low-friction rotation of the pin 5.4 about the axis 5.0 and a decoupling of the rotational movements of both carrier 5. At the same time, the mirror tower 1 in the direction of the axis 5.0, with the axis of rotation. 2

coincides, as regards its length. The first disc 5.1 of the upper carrier 5 and the second disc 5.2 of the lower carrier 5 are spaced apart in this mounted state with a gap 16, wherein the height of the gap 16 between the discs 5.1, 5.2 of the adjacent carrier 5 of the length of the pin 5.4 and a depth of insertion into the receptacle 5.5 depends.

In the intermediate space 16 one of the already mentioned coupling pieces 6 is arranged in each case (FIGS. 1 to 3) or can be arranged.

The carrier 5 has in one embodiment of FIG. 5 instead of a

Spigot 5.4 a number of rolling elements 5.7 on, which are shown here schematically in the form of balls.

The mirror 3 is in a second embodiment, a plane mirror made of a ball (Fig. 6). The mirror surface 4 is given by a cut surface along a cutting plane through the ball and optional

surface-treated, for example polished and / or coated.

Such a trained mirror 3 allows tilting of the mirror surface 4, regardless of the current rotational position DP of the carrier 5 and the mirror 3. To tilt the mirror surface 4 is the mirror 3 with a

additional drive 10 which is fixed to the support 5 and is rotatable with this about the axis 5.0.

By way of example, an incident on the mirror surface 4 light beam 17 and the associated reflected light beam 18 is shown by way of example.

The carrier 5 is in this embodiment with the pin 5.4 and the

Recording 5.5 provided. The first disk 5.1 and the second disk 5.2 are connected by a single web 5.3 which extends along a portion of the periphery of the inner sides of the first disk 5.1 and the second disk 5.2.

A longitudinal section of the elements described with reference to FIG. 6 is shown in FIG. 7. FIG. 8 shows in perspective an exemplary embodiment of a symmetry piece 19. This has on its two side surfaces depending on a receptacle 19.1, which corresponds to the recording 5.5 of the carrier 5.

A first embodiment of a coupling piece 6 (Figure 9) is in the form of a ring with openings 20 in its wall. The ring has an inner diameter as a first clear diameter d1 and a central inner diameter as a second clear diameter d2.

The second clear diameter d2 is smaller than the first clear diameter d1 of the peripheral portions of the inner wall over a portion in the middle of the inner wall

Interior wall.

In a second embodiment shown in FIG. 10, the wall of the coupling piece 6 has grooves 21. The inner wall is formed as described for Fig. 9.

In the openings 20 (Fig. 9) and / or grooves 21, a drive 9 by means of

engage correspondingly shaped and dimensioned elements, whereby a positive connection for transmitting the driving forces can be produced.

reference numeral

1 mirror tower

2 rotation axis

3 mirrors

4 mirror surface

5 carriers

6 coupling piece

7 holding frame

8 gutter

9 drive

10 additional drive

1 1 arrangement

12 control unit

13 microscope

14 coupling element

15 sensor

16 space

17 incident light beam

18 reflected light beam

19 symmetry piece

20 openings

21 grooves

SP mirror position

DP rotational position

Claims

claims

1 . Mirror Turns (1) with

- A rotation axis (2) and

with a number of consecutive along the axis of rotation (2)

arranged mirrors (3),

in which

each of the mirrors (3) is rotatable about the axis of rotation (2),

each mirror (3) has a mirror surface (4) which extends substantially parallel to the axis of rotation (2) and

adjacently arranged mirrors (3) mutually hold at a respective mirror position (SP) with respect to the axis of rotation (2).

2. mirror tower (1) according to claim 1, characterized in that each mirror (3) with a drive (9) for generating a controlled rotational movement about the axis of rotation (2) and for the controlled adjustment of a rotational position (DP) of the

Mirror (3) is connected.

3. mirror tower (1) according to claim 1 or 2, characterized in that the axis of rotation (2) through the plane of the mirror surface (4) of each mirror (3).

4. mirror tower (1) according to one of the preceding claims, characterized

in that at least one of the mirrors (3) is formed on a sectional surface in a sectional plane of a sphere.

5. mirror tower (1) according to one of the preceding claims, characterized

characterized in that at least one additional drive (10) for generating a tilting movement of one or more mirrors (3) relative to the axis of rotation (2) is present.

6. mirror tower (1) according to one of the preceding claims, characterized

characterized in that at least two mirrors (3) are coupled with respect to their rotational movement and / or tilting movement.

7. mirror tower (1) according to any one of the preceding claims, characterized in that the mirrors (3) are held in carriers (5) with uniform outer dimensions.

8. mirror tower (1) according to claim 7, characterized in that between adjacently arranged carriers (5) each have a coupling piece (6) is arranged, wherein by the coupling piece (6) by means of the drive (9) has a driving force for generating the rotational movement and / or for setting the rotational position (DP) of the mirror (3) on at least one of the carrier (5) is passed.

9. mirror tower (1) according to one of the preceding claims, characterized

in that the drive (9) is a drive element of a

Having shape memory material.

10. Arrangement (1 1) for deflecting incident in a plane of incidence and parallel to each other directed light beams (17) with a mirror tower (1) according to one of the preceding claims.

1 1. Microscope (13) with an arrangement (1 1) according to claim 10.