WO2018033248A3 - Method for assembling semiconductor chips and device for transferring semiconductor chips - Google Patents
Method for assembling semiconductor chips and device for transferring semiconductor chips Download PDFInfo
- Publication number
- WO2018033248A3 WO2018033248A3 PCT/EP2017/000990 EP2017000990W WO2018033248A3 WO 2018033248 A3 WO2018033248 A3 WO 2018033248A3 EP 2017000990 W EP2017000990 W EP 2017000990W WO 2018033248 A3 WO2018033248 A3 WO 2018033248A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor chips
- transfer unit
- carrier
- assembling
- transferring
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68354—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to support diced chips prior to mounting
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68368—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
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- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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- H01L2224/29001—Core members of the layer connector
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- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L2224/756—Means for supplying the connector to be connected in the bonding apparatus
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7565—Means for transporting the components to be connected
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7598—Apparatus for connecting with bump connectors or layer connectors specially adapted for batch processes
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- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
Abstract
The invention relates to a method for assembling semiconductor chips, in which first the semiconductor chips are transferred from a first carrier to a transfer unit. The transfer unit has a receiving area. The transfer of the semiconductor chips from the first carrier to the transfer unit is carried out by rolling off the receiving area of the transfer unit on the first carrier. In a further method step, the semiconductor chips received by the transfer unit are transported from the receiving area to a delivery area of the transfer unit. In a subsequent method step, the semiconductor chips are transferred from the transfer unit to a second carrier. The transfer of the semiconductor chips from the transfer unit to the second carrier is carried out by rolling off the delivery area of the transfer unit on the second carrier.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016115186.6 | 2016-08-16 | ||
DE102016115186.6A DE102016115186A1 (en) | 2016-08-16 | 2016-08-16 | Method for mounting semiconductor chips and device for transferring semiconductor chips |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2018033248A2 WO2018033248A2 (en) | 2018-02-22 |
WO2018033248A3 true WO2018033248A3 (en) | 2018-05-03 |
Family
ID=59772584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2017/000990 WO2018033248A2 (en) | 2016-08-16 | 2017-08-16 | Method for assembling semiconductor chips and device for transferring semiconductor chips |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102016115186A1 (en) |
WO (1) | WO2018033248A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109219342A (en) * | 2018-10-25 | 2019-01-15 | 浙江大学 | Continuous rolling type magnetic control transfers seal, transferring system and method |
DE102018127123A1 (en) * | 2018-10-30 | 2020-04-30 | Osram Opto Semiconductors Gmbh | Transfer tool and method for transferring semiconductor chips |
CN110349897B (en) * | 2019-08-12 | 2024-03-29 | 深圳市思坦科技有限公司 | Chip transfer device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050214963A1 (en) * | 2004-03-29 | 2005-09-29 | Daniels John J | Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices |
US20070020801A1 (en) * | 2005-07-20 | 2007-01-25 | Fujitsu Limited | IC chip mounting method |
US20070077730A1 (en) * | 2005-09-30 | 2007-04-05 | Christophe Halope | Method and device for extracting an electronic chip from a silicon wafer and transporting the chip to its installation location on an electronic device |
US20070183184A1 (en) * | 2006-02-03 | 2007-08-09 | Semiconductor Energy Laboratory Ltd. | Apparatus and method for manufacturing semiconductor device |
US20090297300A1 (en) * | 2006-01-17 | 2009-12-03 | Muehlbauer Ag | Apparatus and method for transferring a plurality of chips from a wafer to a sub strate |
US20140259633A1 (en) * | 2013-03-15 | 2014-09-18 | Sandia Corporation | Printed crystalline microelectronic devices |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3739752B2 (en) * | 2003-02-07 | 2006-01-25 | 株式会社 ハリーズ | Small-piece transfer device capable of random-cycle shifting |
US7861405B2 (en) * | 2008-03-03 | 2011-01-04 | Palo Alto Research Center Incorporated | System for forming a micro-assembler |
KR101022017B1 (en) * | 2008-10-01 | 2011-03-16 | 한국기계연구원 | Apparatus for manufacturing hierarchical structure |
DE102014110285A1 (en) * | 2014-07-22 | 2016-01-28 | Thyssenkrupp Ag | Device and method for structuring a roller by laser ablation |
-
2016
- 2016-08-16 DE DE102016115186.6A patent/DE102016115186A1/en not_active Withdrawn
-
2017
- 2017-08-16 WO PCT/EP2017/000990 patent/WO2018033248A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050214963A1 (en) * | 2004-03-29 | 2005-09-29 | Daniels John J | Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices |
US20070020801A1 (en) * | 2005-07-20 | 2007-01-25 | Fujitsu Limited | IC chip mounting method |
US20070077730A1 (en) * | 2005-09-30 | 2007-04-05 | Christophe Halope | Method and device for extracting an electronic chip from a silicon wafer and transporting the chip to its installation location on an electronic device |
US20090297300A1 (en) * | 2006-01-17 | 2009-12-03 | Muehlbauer Ag | Apparatus and method for transferring a plurality of chips from a wafer to a sub strate |
US20070183184A1 (en) * | 2006-02-03 | 2007-08-09 | Semiconductor Energy Laboratory Ltd. | Apparatus and method for manufacturing semiconductor device |
US20140259633A1 (en) * | 2013-03-15 | 2014-09-18 | Sandia Corporation | Printed crystalline microelectronic devices |
Also Published As
Publication number | Publication date |
---|---|
DE102016115186A1 (en) | 2018-02-22 |
WO2018033248A2 (en) | 2018-02-22 |
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